WO2017007065A1 - Autoclave device capable of removing bubbles in multiple stages - Google Patents

Autoclave device capable of removing bubbles in multiple stages Download PDF

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Publication number
WO2017007065A1
WO2017007065A1 PCT/KR2015/008851 KR2015008851W WO2017007065A1 WO 2017007065 A1 WO2017007065 A1 WO 2017007065A1 KR 2015008851 W KR2015008851 W KR 2015008851W WO 2017007065 A1 WO2017007065 A1 WO 2017007065A1
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WO
WIPO (PCT)
Prior art keywords
product
seating
product seating
seat
seating portion
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Application number
PCT/KR2015/008851
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French (fr)
Korean (ko)
Inventor
김재욱
Original Assignee
김재욱
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Publication date
Application filed by 김재욱 filed Critical 김재욱
Priority to JP2017567238A priority Critical patent/JP6549738B2/en
Publication of WO2017007065A1 publication Critical patent/WO2017007065A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/04—Pressure vessels, e.g. autoclaves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/18—Handling of layers or the laminate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors

Definitions

  • the present invention relates to an autoclave apparatus capable of degassing in multiple stages, and more particularly, to an autoclave apparatus that doubles productivity while minimizing the risk of explosion of a pressure portion formed therein during heating, shortening the pressurization time, and pressing against a substrate product. It is about.
  • a liquid crystal display attaches a polarizing film due to its characteristics.
  • this operation is to remove the bubbles by a device called an autoclave (Autoclave).
  • the LCD substrate is laminated on the support plate and enters the pressure part with a sealed structure to maintain the high temperature and high pressure for a certain time to prevent air bubbles between the LCD substrate and the polarizing film. It is mainly using the removal method.
  • the existing flat panel display When the existing flat panel display is of small size, it removes air bubbles by attaching the polarizing film and then selects only the bubble, and then removes the air bubble by using the OFF-line autoclave device. When the air bubbles are frequently generated, the entire process of removing the air bubbles is carried out by removing the air bubbles by using a device called autoclave in order to remove the air bubbles. Increasing the size of the management and equipment, the need for additional lamination process, etc. is required, resulting in inefficient problems in many areas, such as increased manufacturing cost, installation space, management elements.
  • the present invention has been made in order to solve the above problems of the prior art, the product mounting portion to which the substrate is mounted to improve the heating, pressurization time and productivity was configured in multiple stages, each product seat according to the configuration in multiple stages It was created as a technical task with the focus on providing a multi-stage defoaming autoclave device that is simple yet maximizes the structure and operation of the heater, the temperature control sensor, and the power supply for the unit.
  • the upper body, the lower body, fasteners for fixing the upper body and the lower body, and the substrate rail seating the substrate product is transported to the hollow portion formed between the upper and lower body
  • the product seating part consisting of a through hole in the seating part on which the substrate product is seated and a packing seating groove in which the packing is seated on the outer periphery of the seating part, an air pipe and an air pipe connecting terminal, and the product seating part of the upper body.
  • the product seat is divided into a first product seat and a second product seat, each configured in multiple stages, the first In the seating part of the product mounting part, a heater and a temperature control sensor are respectively configured, and the lower body and the first product seating part are respectively provided.
  • the first power supply device is configured to supply power to the heater and the temperature control sensor of the first product seat, and one side of the second product seat is supplied to the heater and the temperature control sensor of the second product seat.
  • the product seating portion on which the substrate product is seated is configured in multiple stages so that the same heating and pressurization are performed to each of the substrate products seated on the product seating portion composed of multiple stages.
  • the structure and the components for heating and pressurizing are simplified with the multi-stage product seating part, and the cost of the product is reduced by simplifying the structure and the components, thereby reducing the burden on the user. It is an invention that has many effects.
  • FIG. 1 is a front view showing an autoclave device of the present invention
  • Figure 2 is an enlarged view showing a key part in the present inventors autoclave device
  • Figure 3 is a plan sectional view showing a part in which the heater is configured in the product mounting portion in the present invention autoclave device
  • Figure 4 is a front view showing another embodiment of the present invention autoclave device
  • FIG. 5 is a front view illustrating another embodiment of FIG. 4.
  • FIG. 6 is a front view showing another embodiment of the heater in the configuration of the present invention autoclave device
  • Figure 7 is a front view showing another embodiment of the power supply device of the configuration of the inventors autoclave device
  • FIG. 8 is a front view showing a cylinder and a spring for raising and lowering the first and second product seats in the autoclave apparatus of the present invention
  • pedestal 220 cam 230: heater
  • the autoclave device 10 of the present invention is an autoclave composed of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seating portion for mounting a substrate product.
  • the product seating portion is divided into a first product seating portion 410 and a second product seating portion 420, each composed of a multi-stage, packing (p) configured in the first product seating portion 410
  • the lower part of the second seating part 420 is contacted, and the packing p formed in the second product seating part 420 is in contact with the lower part of the upper main body 100, so that the first and second product seating parts are closed. Sealing parts 411 and 421 of the 410 and 420 are sealed.
  • the product seating part In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for mounting the substrate product, the product seating part
  • the first product seating portion 410 and the second product seating portion 420 are divided into a plurality of stages, respectively, the second product seating portion 420 of the first product seating portion 410 in contact with both lower surfaces Springs (412s, 422s) or cylinders (412c, 422c) are formed on both sides and the second product seating portion 420 in contact with the lower surface of the upper body 100, respectively, the first and second product seating portion Raise 410, 420.
  • the product seating part Each of the first product seating unit 410 and the second product seating unit 420 is divided into a plurality of stages, but the heaters 413 inside the seating parts 411 and 421 of the first and second product seating parts 410 and 420. , 423 and a temperature control sensor, respectively, between the lower main body 200 and the first product seat 410, the power to the heater 413 and the temperature control sensor of the first product seat 410.
  • the first power supply device 417 is configured to supply, and one side of the second product seating part 420 supplies power to the heater 423 and the temperature control sensor of the second product seating part 420.
  • the power supply 427 is comprised.
  • the product seating part In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for mounting the substrate product, the product seating part
  • Each of the first product seating unit 410 and the second product seating unit 420 is divided into multiple stages, but the heater 423 and the temperature control sensor are configured inside the seating unit 421 of the second product seating unit 420.
  • One side of the second product seating part 420 includes a second power supply device 427 for supplying power to the heater 423 and the temperature control sensor of the second product seating part 420.
  • the product seating part In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for mounting the substrate product, the product seating part
  • Each of the first product seating unit 410 and the second product seating unit 420 is divided into a plurality of stages, the heater 230 and the temperature control sensor between the lower body 200 and the first product seating portion 410 Is connected to the power source.
  • the second power supply 427 may use a contact power supply or a cable bearing.
  • One or more pedestals 210 are formed between the lower main body 200 and the first product seat 410 to prevent sagging of the first product seat 410.
  • One or more cams 220 are formed between the lower main body 200 and the first product seat 410 to prevent sagging of the first product seat 410.
  • Each of the first product seating part 410 and the second product seating part 420 is provided with a plurality of supports for supporting the substrate product.
  • the upper part of the second product seating portion 420 may be configured in multiple stages.
  • a cylinder (c) for raising the first product seating portion 410 upward.
  • a control unit for controlling the operation of the first product seat 410 or the second product seat 420 is included.
  • the heater 423, the temperature control sensor, and the second power supply device 427 of the second product seat 420 may use the heater 413, the temperature control sensor, and the first product seat 410. 1 can be used by applying the power supply (417).
  • the first product seating part 410 or the second product seating part 420 or the first product seating part 410 and the second product seating part 420 at least one through a plurality of through the mounting part in which the substrate product is seated
  • the ball is formed.
  • the autoclave device 10 includes a pressure supply unit for supplying pressure to the first product seating unit 410 or the second product seating unit 420 or the first and second product seating units 410 and 420. Each consists of a connection.
  • the autoclave apparatus 10 of the present invention to be described below is configured by heating the substrate product by configuring the product seating part in multiple stages in the 'defogging autoclave apparatus and its operation method' of Patent No. 10-1207091 registered and applied by the applicant. When pressurized, it is easier, more efficient, and supplemented to increase productivity.
  • the autoclave device 10 of the present invention is composed of an upper body 100, a lower body 200, a fastener 300, and a product seating part, which are filed by the present applicant for each connection and detailed structure. Since one content is based on, detailed description will be omitted according to the accompanying drawings.
  • the product seating part is divided into a first product seating part 410 and a second product seating part 420, respectively, and is composed of multiple stages.
  • the packing (p) formed in the first product seating portion 410 is in contact with the lower portion of the second seating portion 420, the upper portion of the packing (p) formed in the second product seating portion 420
  • the inside of the seating portions 411 and 421 of the first and second product seating portions 410 and 420 was sealed by contacting the lower portion of the main body 100.
  • the product seating part In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for mounting the substrate product, the product seating part
  • Each of the first product seating portion 410 and the second product seating portion 420 is divided into a plurality of stages.
  • the first product seating part 410 and the second product seating part 420 have both sides of the first product seating part 410 in contact with both bottom surfaces of the second product seating part 420, and an upper body ( Springs 412s and 422s or cylinders 412c and 422c are formed at both sides of the second product seating portion 420 in contact with the bottom surface of 100, respectively, so that the first product seating portion 410 and the second product seating are mounted.
  • the first and second product seating parts 410 and 420 may be cushioned according to the pressing force, thereby increasing durability of each of the first and second product seating parts 410 and 420. I was.
  • the product seating part is divided into a first product seating part 410 and a second product seating part 420, respectively, and the divided first and second product seating parts 410 and 420 are configured in multiple stages.
  • the first and second product seating parts 410 and 420 may enter and discharge the transfer rails with a transport rail formed between the upper and lower bodies 100 and 200.
  • Heaters 413 and 423 and a temperature control sensor are respectively configured in the seating parts 411 and 421 where the substrate products of the first and second product seating parts 410 and 420 are seated.
  • Each of the heaters 413 and 423 is a component according to a heating operation for a substrate product, and the temperature control sensor is for controlling the temperature of heat generated by the heaters 413 and 423.
  • Between the lower main body 200 and the first product seating portion 410 is composed of a heater 413 of the first product seating portion 410 and a first power supply device 417 for supplying power to the temperature control sensor do.
  • the first power supply 417 supplies power to the heater 413 and the temperature control sensor of the first product seating portion 410 from the outside, which is applied to the contact power supply generally used.
  • the first product seating part 410 rises, falls, and contacts by using a separate rising and lowering member when the first product seating portion 410 is raised or lowered according to the pressure to supply power.
  • One side of the second product seat 420 is configured with a second power supply device 427 for supplying power to the heater 423 and the temperature control sensor of the second product seat 420, the second The power supply 427 is configured to be connected to one side of the second product seat 420.
  • the power supply 427 is positioned on the side of the second product seat 420, but the second power supply is shown in FIG. The location of the device 427 will not be limited according to the drawings or description.
  • the second power supply device 427 may use a contact type power supply device or a cable bearing in the same manner as the first power supply device 417, and a description thereof will be omitted since it has been described above.
  • a separate heater and a temperature control sensor are configured inside the lower body 200 among the components for the above-described embodiment, and a separate heater 413 and a temperature control sensor are provided in the first product seating part 410. I will explain that is not configured.
  • the product seating part is divided into a first product seating part 410 and a second product seating part 420, respectively, and the divided first and second product seating parts 410 and 420 are multistage. It was configured.
  • the first and second product seating parts 410 and 420 may enter and discharge the transfer rails with a transport rail formed between the upper and lower bodies 100 and 200.
  • a heater 423 and a temperature control sensor are configured in the seating part 421 in which the substrate product of the second product seating part 420 is seated.
  • the heater 423 is a component according to a heating operation for the substrate product, the temperature control sensor is to control the temperature for the heat generated by the heater 423.
  • a separate heater and a temperature control sensor are not configured in the first product seat 410, and a detailed description of the heater 423 and the temperature control sensor of the second product seat 420 is described above. Same as the description for.
  • a separate heater and a temperature control sensor are configured between the lower main body 200 and the first product seating part 410 among the components of the first embodiment described above, and the first and second product seating parts 410 are provided. , 420 will be described that the separate heater 413 and the temperature control sensor are not configured.
  • the product seating part is divided into a first product seating part 410 and a second product seating part 420, respectively, and is composed of a plurality of stages, and a heater 230 between the lower body 200 and the first product seating part 410. ) And temperature control sensor are connected to the power supply.
  • the heater 230 is connected to a separate power source, the heater 230 is operated by the supply of power to dissipate heat.
  • the heat emitted from the heater 230 is dissipated to the second product seat 420 via the first product seat 410.
  • the radiated heat is transmitted through the through-holes formed in the seating portion (411, 421) of the first, second product seating portion (410, 420).
  • one or more plurality of pedestal 210 is configured to prevent sagging of the first product seating portion 410 or one or more plurality of cams 220 ) Is configured.
  • the drooping phenomenon occurs in the portion other than the portion in which the cylinder (c) is located by the pressing force, the support
  • the pedestal 210 is generally used, and in the case of the cam 220, a cylindrical portion is used to support the lower surface of the first product seating portion 410 by using a separate cylinder. 220 is applied to the present invention in the patent filed and registered by the applicant.
  • Each of the first product seating part 410 and the second product seating part 420 includes a plurality of supports for supporting substrate products, and the support parts are seating parts of the first and second product seating parts 410 and 420.
  • the support may be positioned spaced apart from the mounting portion (411, 421) by a predetermined interval.
  • the second product seating portion 420 can be configured in a plurality of stages to the upper side, which is configured for two stages in the present invention the first product seating portion 410 and the second product seating portion 420. According to the use, after forming a plurality of stages in multiple stages, the components of the second product seating portion 420 can be applied and used.
  • the first and second product seating parts 410 and 420 are connected to the first and second product seating parts 410 and 420 through a first power supply device 417.
  • Each of the power extension members 419 and 429 is configured to supply power to the furnace, which will be described below.
  • the power extension members 419 and 429 supply power through the first power supply device 417, but the first product seat 410 Power is supplied to the power extension member 419 to supply power from the first product seat 410 to the heater 413 and the temperature control sensor, and the power extension member 419 of the first product seat 410.
  • the contact with the power extension member 429 of the second product seating portion 420 is to supply power to the heater 423 and the temperature control sensor of the second product seating portion 420.
  • a cylinder (c) for raising the first product seating portion 410 upward is pressed against the substrate product
  • the first product seating portion 410 is raised to contact the second product seating portion 420 on the upper side to seal the seating portion of the first product seating portion 410 so that the work can be performed.
  • the packing may be smoothly inserted into the packing seating groove formed on the outer circumference of the first product seating part 410.
  • a control unit for controlling the operation of the first product seating unit 410 or the second product seating unit 420 is included, the control unit with the entry, discharge of the first and second product seating unit (410, 420) This is for overall control of the clave device 10.
  • the heater 423, the temperature control sensor, and the second power supply device 427 of the second product seat 420 may use the heater 413, the temperature control sensor, and the first product seat 410. 1 can be used by applying the power supply device 417, which is the use of the autoclave device 10 of the first product seating portion 410 or the second product seating portion 420 and the heater, It can be applied by varying the position of the temperature control sensor and power supply.
  • the first product seating part 410 or the second product seating part 420 or the first product seating part 410 and the second product seating part 420 at least one through a plurality of through the mounting part in which the substrate product is seated
  • the through-hole is formed, the through-hole can be changed according to the configuration position of the heater, the temperature control sensor and the power supply can be applied and used accordingly.
  • the autoclave device 10 includes a pressure supply unit for supplying pressure to the first product seating unit 410 or the second product seating unit 420 or the first and second product seating units 410 and 420. In order to be configured to be connected to each other, even if a plurality of product seats are configured to use a single pressure supply or to connect to each pressure supply.

Abstract

The present invention provides an autoclave device capable of removing bubbles in multiple stages, wherein product seating portions, on which substrates are seated, are configured in multiple stages, and the structure and operation concerning heaters, temperature control sensors, and power supply devices, which are related to respective product seating portions as a result of the multi-stage configuration, are simplified while maximizing the effect thereof.

Description

다단으로 탈포가 가능한 오토클레이브 장치Multi-stage autoclave device
본 발명은 다단으로 탈포가 가능한 오토클레이브 장치에 관한 것으로서, 보다 상세하게는 기판제품에 대해 가열, 가압시간 단축 및 가압 시 내부에 형성되는 압력부의 폭발 위험을 최소화하면서 생산성을 배가시킨 오토클레이브장치에 관한 것이다.The present invention relates to an autoclave apparatus capable of degassing in multiple stages, and more particularly, to an autoclave apparatus that doubles productivity while minimizing the risk of explosion of a pressure portion formed therein during heating, shortening the pressurization time, and pressing against a substrate product. It is about.
일반적으로 평판디스플레이(LCD : Liquid Crystal Display)는 특성 상 편광필름을 부착하게 된다.In general, a liquid crystal display (LCD) attaches a polarizing film due to its characteristics.
통상적으로 편광필름을 부착 후, 편광필름과 기판 사이에 발생되는 기포를 제거하는 작업이 이루어지는데 이러한 작업을 오토클레이브(Autoclave)라는 장치로 기포를 제거하게 되는 것이다.Typically, after attaching the polarizing film, the operation is performed to remove the bubbles generated between the polarizing film and the substrate, this operation is to remove the bubbles by a device called an autoclave (Autoclave).
이때 편광필름이 부착된 LCD 기판을 한 번에 대량으로 처리하기 위해 받침판에 LCD 기판을 적층시켜 밀폐형 구조를 가진 압력부로 진입시켜 일정시간동안 고온, 고압을 유지시킴으로써 LCD 기판과 편광필름 사이의 기포를 제거하는 방식을 주로 사용하고 있는 것이다.At this time, in order to process a large amount of LCD substrate with polarizing film at once, the LCD substrate is laminated on the support plate and enters the pressure part with a sealed structure to maintain the high temperature and high pressure for a certain time to prevent air bubbles between the LCD substrate and the polarizing film. It is mainly using the removal method.
기존의 평판디스플레이가 소형사이즈 일 때는 편광필름을 부착 후 기포가 발생한 것만 선별하여 OFF라인 오토클레이브 장치로 기포를 제거하는 작업을 하였으나 최근 평판디스플레이는 대형화 추세로 크기가 점점 커져가고 있는 상황에서 편광필름을 부착하게 되면 기포가 빈번하게 발생하여 기포를 제거하기 위해서 평판디스플레이의 거의 전량을 오토클레이브라는 장치로 기포를 제거하는 공정을 거치게 되는데, 종래의 방식을 사용하면 관련 장치의 대형화와 적층시키는 받침판의 관리 및 장비의 대형화, 필요 없는 적층 공정 등의 추가가 필요하게 되며, 이에 따라 제작비용 및 설치 공간, 관리요소의 증가 등 여러 부분에서 비효율적인 문제점이 발생된 것이다.When the existing flat panel display is of small size, it removes air bubbles by attaching the polarizing film and then selects only the bubble, and then removes the air bubble by using the OFF-line autoclave device. When the air bubbles are frequently generated, the entire process of removing the air bubbles is carried out by removing the air bubbles by using a device called autoclave in order to remove the air bubbles. Increasing the size of the management and equipment, the need for additional lamination process, etc. is required, resulting in inefficient problems in many areas, such as increased manufacturing cost, installation space, management elements.
종래에는 등록번호 10-0782119호의 ‘오토클레이브 장치’와, 등록번호 10-1032248호의 ‘오토클레이브 장치’ 및 등록번호 10-1119792호의 ‘오토클레이브장치’가 개시되어 있지만, 상기한 문제점에 대한 개선사항이 지극히 현저하였으며, 이에 본 출원인은 상기한 문제점에 대해 등록특허 10-1207091호의 ‘탈포용 오토클레이브 장치 및 그 작동방법’에 대해 등록받았으며, 본 출원인이 사용함에 있어 상기 등록특허에서 작업의 안전성과 생산성을 극대화시켜 보완한 기술이다.Conventionally, an 'autoclave device' of No. 10-0782119, an 'autoclave device' of No. 10-1032248 and an 'autoclave device' of No. 10-1119792 have been disclosed, but improvements to the above problems This application was extremely remarkable, and therefore, the applicant has been registered for the above-mentioned problem of the autoclave apparatus for degassing and its operation method of Patent No. 10-1207091, and in the use of the applicant, This technology is complemented by maximizing productivity.
따라서, 본 발명은 상기한 종래 기술의 문제점을 해결하기 위하여 안출해낸 것으로서, 가열, 가압시간 및 생산성을 향상시키기 위해 기판이 안착되는 제품안착부를 다단으로 구성하였으며, 다단으로 구성에 따른 각각의 제품안착부에 대한 히터, 온도제어용 센서 및 전원공급장치에 대한 구조 및 작동을 간단하면서도 효과를 극대화시킨 다단으로 탈포가 가능한 오토클레이브 장치를 제공함에 주안점을 두고 그 기술적 과제로 창안해낸 것이다.Therefore, the present invention has been made in order to solve the above problems of the prior art, the product mounting portion to which the substrate is mounted to improve the heating, pressurization time and productivity was configured in multiple stages, each product seat according to the configuration in multiple stages It was created as a technical task with the focus on providing a multi-stage defoaming autoclave device that is simple yet maximizes the structure and operation of the heater, the temperature control sensor, and the power supply for the unit.
상기한 과제를 달성하기 위한 본 발명에 따르면, 상부본체와, 하부본체와, 상기 상부본체와 하부본체를 고정하는 체결구와, 기판제품을 안착하여 상기 상, 하부본체 사이에 형성되는 중공부로 이송레일을 타며 진입과 배출하되 기판제품이 안착되는 안착부에는 관통공과 상기 안착부의 외주에는 패킹이 안착되는 패킹안착홈과 에어관로 및 에어관로 접속단자가 구성된 제품안착부와, 상기 제품안착부를 상부본체의 하면으로 상승시켜 접촉시키는 실린더 및 상기 제품안착부의 작동을 제어하는 제어부로 구성된 오토클레이브 장치에 있어서, 상기 제품안착부는 제 1제품안착부와 제 2제품안착부로 각각 구분하며 다단으로 구성하되 상기 제 1, 2제품안착부의 안착부 내부에는 히터와 온도제어용 센서가 각각 구성되고, 상기 하부본체와 제 1제품안착부 사이에는 상기 제 1제품안착부의 히터와 온도제어용 센서로 전원을 공급하는 제 1전원공급장치가 구성되며, 상기 제 2제품안착부의 일 측에는 상기 제 2제품안착부의 히터와 온도제어용 센서로 전원을 공급하는 제 2전원공급장치가 구성되어 있는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치를 제공함으로서 그 과제를 해결하고자 한다.According to the present invention for achieving the above object, the upper body, the lower body, fasteners for fixing the upper body and the lower body, and the substrate rail seating the substrate product is transported to the hollow portion formed between the upper and lower body The product seating part consisting of a through hole in the seating part on which the substrate product is seated and a packing seating groove in which the packing is seated on the outer periphery of the seating part, an air pipe and an air pipe connecting terminal, and the product seating part of the upper body. In the autoclave device consisting of a cylinder for raising and contacting the lower surface and the control unit for controlling the operation of the product seat, the product seat is divided into a first product seat and a second product seat, each configured in multiple stages, the first In the seating part of the product mounting part, a heater and a temperature control sensor are respectively configured, and the lower body and the first product seating part are respectively provided. The first power supply device is configured to supply power to the heater and the temperature control sensor of the first product seat, and one side of the second product seat is supplied to the heater and the temperature control sensor of the second product seat. To solve the problem by providing a multi-stage degassing autoclave device characterized in that the second power supply is configured.
본 발명에 따른 다단으로 탈포가 가능한 오토클레이브 장치에 의하면, 기판제품이 안착되는 제품안착부를 다단으로 구성하여 다단으로 구성된 제품안착부에 안착된 기판제품 각각으로 동일한 가열과 동일한 가압이 진행되도록 하여 생산성을 극대화하였고, 상기 다단의 제품안착부로 가열, 가압에 대한 구조와 구성요소를 간단히 하였으며, 구조와 구성요소를 간단히 함에 따라 제품원가를 절감하는 효과가 발생하여 사용자로 하여금 구매에 대한 부담감을 현격히 줄어들게 하는 등 많은 효과가 있는 발명이라 하겠다.According to the multi-stage degassing autoclave apparatus according to the present invention, the product seating portion on which the substrate product is seated is configured in multiple stages so that the same heating and pressurization are performed to each of the substrate products seated on the product seating portion composed of multiple stages. The structure and the components for heating and pressurizing are simplified with the multi-stage product seating part, and the cost of the product is reduced by simplifying the structure and the components, thereby reducing the burden on the user. It is an invention that has many effects.
도 1은 본 발명인 오토클레이브장치를 나타내는 정면도1 is a front view showing an autoclave device of the present invention
도 2는 본 발명인 오토클레이브장치에서 핵심부분을 나타내는 확대도Figure 2 is an enlarged view showing a key part in the present inventors autoclave device
도 3은 본 발명인 오토클레이브장치에서 제품안착부에 히터가 구성된 부분을 나타내는 평단면도Figure 3 is a plan sectional view showing a part in which the heater is configured in the product mounting portion in the present invention autoclave device
도 4는 본 발명인 오토클레이브장치의 다른 실시 예를 나타내는 정면도Figure 4 is a front view showing another embodiment of the present invention autoclave device
도 5는 도 4의 다른 실시 예를 나타내는 정면도5 is a front view illustrating another embodiment of FIG. 4.
도 6은 본 발명인 오토클레이브장치의 구성 중 히터의 다른 실시 예를 나타내는 정면도6 is a front view showing another embodiment of the heater in the configuration of the present invention autoclave device
도 7은 본 발명인 오토클레이브장치의 구성 중 전원공급장치의 다른 실시 예를 나타내는 정면도Figure 7 is a front view showing another embodiment of the power supply device of the configuration of the inventors autoclave device
도 8은 본 발명인 오토클레이브장치에서 제 1, 2제품안착부를 상승, 하강시키는 실린더와 스프링을 나타내는 정면도8 is a front view showing a cylinder and a spring for raising and lowering the first and second product seats in the autoclave apparatus of the present invention;
10 : 오토클레이브장치10: autoclave device
100 : 상부본체100: upper body
200 : 하부본체200: lower body
210 : 받침대 220 : 캠 230 : 히터210: pedestal 220: cam 230: heater
300 : 체결구300: fastener
410 : 제 1제품안착부 411 : 안착부 413 : 히터410: first product seating portion 411: seating portion 413: heater
417 : 제 1전원공급장치 419 : 전원연장부재417: first power supply device 419: power extension member
420 : 제 2제품안착부 421 : 안착부 423 : 히터420: second product seating portion 421: seating portion 423: heater
427 : 제 2전원공급장치 429 : 전원연장부재427: second power supply device 429: power extension member
c : 실린더 p : 패킹c: cylinder p: packing
이에 본 발명인 다단으로 탈포가 가능한 오토클레이브 장치에 대해 설명하면,In the present invention, a description will be made of an autoclave apparatus capable of defoaming in multiple stages.
본 발명인 오토클레이브장치(10)는 상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서, 상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성되되, 상기 제 1제품안착부(410)에 구성되는 패킹(p)이 제 2안착부(420)의 하부에 접촉되고, 상기 제 2제품안착부(420)에 구성되는 패킹(p)이 상부본체(100)의 하부에 접촉되어, 상기 제 1, 2제품안착부(410, 420)의 안착부(411, 421) 내부를 밀폐시킨다.The autoclave device 10 of the present invention is an autoclave composed of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seating portion for mounting a substrate product. In the device, the product seating portion is divided into a first product seating portion 410 and a second product seating portion 420, each composed of a multi-stage, packing (p) configured in the first product seating portion 410 The lower part of the second seating part 420 is contacted, and the packing p formed in the second product seating part 420 is in contact with the lower part of the upper main body 100, so that the first and second product seating parts are closed. Sealing parts 411 and 421 of the 410 and 420 are sealed.
본 발명에 대한 다른 실시 예 1을 설명하면,Referring to another embodiment 1 of the present invention,
상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서, 상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성되되, 상기 제 2제품안착부(420)의 양측 하부면과 접촉되는 제 1제품안착부(410)의 양측과, 상부본체(100)의 하부면과 접촉되는 제 2제품안착부(420)의 양측에는 각각 스프링(412s, 422s) 또는 실린더(412c, 422c)가 구성되어 상기 제 1, 2제품안착부(410, 420)를 상승시킨다.In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for mounting the substrate product, the product seating part The first product seating portion 410 and the second product seating portion 420 are divided into a plurality of stages, respectively, the second product seating portion 420 of the first product seating portion 410 in contact with both lower surfaces Springs (412s, 422s) or cylinders (412c, 422c) are formed on both sides and the second product seating portion 420 in contact with the lower surface of the upper body 100, respectively, the first and second product seating portion Raise 410, 420.
상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서, 상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성하되 상기 제 1, 2제품안착부(410, 420)의 안착부(411, 421) 내부에는 히터(413, 423)와 온도제어용 센서가 각각 구성되고, 상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)의 히터(413)와 온도제어용 센서로 전원을 공급하는 제 1전원공급장치(417)가 구성되며, 상기 제 2제품안착부(420)의 일 측에는 상기 제 2제품안착부(420)의 히터(423)와 온도제어용 센서로 전원을 공급하는 제 2전원공급장치(427)가 구성되어 있다.In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for mounting the substrate product, the product seating part Each of the first product seating unit 410 and the second product seating unit 420 is divided into a plurality of stages, but the heaters 413 inside the seating parts 411 and 421 of the first and second product seating parts 410 and 420. , 423 and a temperature control sensor, respectively, between the lower main body 200 and the first product seat 410, the power to the heater 413 and the temperature control sensor of the first product seat 410. The first power supply device 417 is configured to supply, and one side of the second product seating part 420 supplies power to the heater 423 and the temperature control sensor of the second product seating part 420. The power supply 427 is comprised.
본 발명에 대한 다른 실시 예 2를 설명하면,Referring to another embodiment 2 of the present invention,
상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서, 상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성하되 제 2제품안착부(420)의 안착부(421) 내부에는 히터(423)와 온도제어용 센서가 구성되고, 상기 제 2제품안착부(420)의 일 측에는 상기 제 2제품안착부(420)의 히터(423)와 온도제어용 센서로 전원을 공급하는 제 2전원공급장치(427)가 구성되어 있다.In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for mounting the substrate product, the product seating part Each of the first product seating unit 410 and the second product seating unit 420 is divided into multiple stages, but the heater 423 and the temperature control sensor are configured inside the seating unit 421 of the second product seating unit 420. One side of the second product seating part 420 includes a second power supply device 427 for supplying power to the heater 423 and the temperature control sensor of the second product seating part 420.
본 발명에 대한 다른 실시 예 3을 설명하면,Referring to another embodiment 3 of the present invention,
상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서, 상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성되고, 상기 하부본체(200)와 제 1제품안착부(410) 사이에는 히터(230)와 온도제어용 센서가 전원과 연결되어 구성된다.In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for mounting the substrate product, the product seating part Each of the first product seating unit 410 and the second product seating unit 420 is divided into a plurality of stages, the heater 230 and the temperature control sensor between the lower body 200 and the first product seating portion 410 Is connected to the power source.
상기 제 1제품안착부(410) 또는 제 2제품안착부(420) 각각의 안착부(411, 421)에 구성되는 히터(413, 423)로 전원을 공급하는 제 1전원공급장치(417) 또는 제 2전원공급장치(427)는 접촉식전원공급장치 또는 케이블베어를 이용할 수 있다.A first power supply device 417 for supplying power to the heaters 413 and 423 configured at the seating parts 411 and 421 of each of the first product seating part 410 or the second product seating part 420; The second power supply 427 may use a contact power supply or a cable bearing.
상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)의 쳐짐을 방지하는 하나 이상 다수개의 받침대(210)가 구성된다.One or more pedestals 210 are formed between the lower main body 200 and the first product seat 410 to prevent sagging of the first product seat 410.
상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)의 쳐짐을 방지하는 하나 이상 다수개의 캠(220)이 구성된다.One or more cams 220 are formed between the lower main body 200 and the first product seat 410 to prevent sagging of the first product seat 410.
상기 제 1제품안착부(410)와 제 2제품안착부(420) 각각에는 기판제품이 지지되는 지지대가 다수개 구성된다.Each of the first product seating part 410 and the second product seating part 420 is provided with a plurality of supports for supporting the substrate product.
상기 제 2제품안착부(420)의 상측으로 다수개를 다단으로 구성할 수 있다.The upper part of the second product seating portion 420 may be configured in multiple stages.
상기 제 1제품안착부(410)와 제 2제품안착부(420)에는 제 1전원공급장치(417)를 통해 상기 제 1, 2제품안착부(410, 420)로 전원을 공급하는 전원연장부재(419, 429)가 각각 구성된다.A power extension member for supplying power to the first and second product seats 410 and 420 through the first power supply device 417 to the first product seat 410 and the second product seat 420. 419 and 429 are respectively constructed.
상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)를 상측으로 상승시키는 실린더(c)가 구성된다.Between the lower main body 200 and the first product seating portion 410 is configured a cylinder (c) for raising the first product seating portion 410 upward.
상기 제 1제품안착부(410) 또는 제 2제품안착부(420)의 작동을 제어하는 제어부가 포함된다.A control unit for controlling the operation of the first product seat 410 or the second product seat 420 is included.
상기 제 2제품안착부(420)의 히터(423), 온도제어용 센서 및 제 2전원공급장치(427)는 사용에 따라 제 1제품안착부(410)에 히터(413), 온도제어용 센서 및 제 1전원공급장치(417)를 적용하여 사용할 수 있다.The heater 423, the temperature control sensor, and the second power supply device 427 of the second product seat 420 may use the heater 413, the temperature control sensor, and the first product seat 410. 1 can be used by applying the power supply (417).
상기 제 1제품안착부(410) 또는 제 2제품안착부(420) 또는 제 1제품안착부(410)와 제 2제품안착부(420)에는 기판제품이 안착되는 안착부에 하나 이상 다수개의 관통공이 형성되어 있다.The first product seating part 410 or the second product seating part 420 or the first product seating part 410 and the second product seating part 420 at least one through a plurality of through the mounting part in which the substrate product is seated The ball is formed.
상기 오토클레이브장치(10)에는 제 1제품안착부(410) 또는 제 2제품안착부(420)로 압력을 공급하는 압력공급부를 하나로 구성하거나 또는 상기 제 1, 2제품안착부(410, 420)로 각각 연결 구성된다.The autoclave device 10 includes a pressure supply unit for supplying pressure to the first product seating unit 410 or the second product seating unit 420 or the first and second product seating units 410 and 420. Each consists of a connection.
상기한 본 발명인 명칭에 대해 도 1 내지 도 8을 참고로 보다 상세히 설명하면,When the present inventors described in more detail with reference to Figures 1 to 8,
이하 설명하려는 본 발명인 오토클레이브장치(10)는 본 출원인이 출원하여 등록 받은 등록특허 10-1207091호의 ‘탈포용 오토클레이브 장치 및 그 작동방법’에서 제품안착부를 다단으로 구성하여 기판제품에 대한 가열, 가압작업 시, 보다 손쉽고, 효율적이며, 더불어 생산성을 증대시킬 수 있도록 보완한 것이다.The autoclave apparatus 10 of the present invention to be described below is configured by heating the substrate product by configuring the product seating part in multiple stages in the 'defogging autoclave apparatus and its operation method' of Patent No. 10-1207091 registered and applied by the applicant. When pressurized, it is easier, more efficient, and supplemented to increase productivity.
이에 본 발명에 대한 핵심 구성요소에 대한 설명을 하며, 일반적으로 사용되는 구성요소에 대해서는 간략 설명하겠다.This will be described for the core components of the present invention, a brief description of the commonly used components.
도 1 내지 도 7을 참고로 설명하면,Referring to Figures 1 to 7,
[실시 예][Example]
우선, 본 발명인 오토클레이브장치(10)는 상부본체(100), 하부본체(200), 체결구(300), 제품안착부로 대분하여 구성되는데, 각각의 연결 및 세부적인 구조에 대해서는 본원 출원인이 출원한 내용이 토대로 되어 있음으로 도면의 첨부에 따라 상세한 설명은 생략하겠다.First, the autoclave device 10 of the present invention is composed of an upper body 100, a lower body 200, a fastener 300, and a product seating part, which are filed by the present applicant for each connection and detailed structure. Since one content is based on, detailed description will be omitted according to the accompanying drawings.
이에 본 발명의 핵심요소를 설명하면,When explaining the key elements of the present invention,
상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성된다.The product seating part is divided into a first product seating part 410 and a second product seating part 420, respectively, and is composed of multiple stages.
이때, 상기 제 1제품안착부(410)에 구성되는 패킹(p)으로 제 2안착부(420)의 하부에 접촉시키고, 상기 제 2제품안착부(420)에 구성되는 패킹(p)으로 상부본체(100)의 하부에 접촉시켜 상기 제 1, 2제품안착부(410, 420)의 안착부(411, 421) 내부를 밀폐시켰다.At this time, the packing (p) formed in the first product seating portion 410 is in contact with the lower portion of the second seating portion 420, the upper portion of the packing (p) formed in the second product seating portion 420 The inside of the seating portions 411 and 421 of the first and second product seating portions 410 and 420 was sealed by contacting the lower portion of the main body 100.
상기 제 1제품안착부(410)와 제 2제품안착부(420)에 대해 가압 시, 순차적으로 하부에서 상부로 접촉을 이루도록 하여 다수개 구성되는 제품안착부에 대서도 제품의 가압에 대한 문제점이 발생하지 않도록 가압시킬 수 있도록 하였으며, 더불어 생산성 향상과 작업 공간의 효율성을 극대화시켰다.When pressing against the first product seating portion 410 and the second product seating portion 420, there is a problem about the pressure of the product even in the product seating portion is configured to make contact from the bottom to the top sequentially It can be pressurized so that it does not occur, and it also maximizes productivity and efficiency of the work space.
상기한 본 발명인 오토클레이브장치(10)에 대한 다른 실시 예를 설명하면,Referring to another embodiment of the above-described autoclave device 10 of the present invention,
[다른 실시 예 1][Other Embodiment 1]
상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서, 상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성된다.In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for mounting the substrate product, the product seating part Each of the first product seating portion 410 and the second product seating portion 420 is divided into a plurality of stages.
상기 제 1제품안착부(410)와 제 2제품안착부(420)에는 상기 제 2제품안착부(420)의 양측 하부면과 접촉되는 제 1제품안착부(410)의 양측과, 상부본체(100)의 하부면과 접촉되는 제 2제품안착부(420)의 양측에는 각각 스프링(412s, 422s) 또는 실린더(412c, 422c)이 구성되어, 제 1제품안착부(410)와 제 2제품안착부(420)로 가압 시, 상기 제 1, 2제품안착부(410, 420)가 가압력에 따른 완충작용이 가능하도록 하여 각각의 제 1, 2제품안착부(410, 420)에 대한 내구성을 상승시켰다.The first product seating part 410 and the second product seating part 420 have both sides of the first product seating part 410 in contact with both bottom surfaces of the second product seating part 420, and an upper body ( Springs 412s and 422s or cylinders 412c and 422c are formed at both sides of the second product seating portion 420 in contact with the bottom surface of 100, respectively, so that the first product seating portion 410 and the second product seating are mounted. When pressurized to the part 420, the first and second product seating parts 410 and 420 may be cushioned according to the pressing force, thereby increasing durability of each of the first and second product seating parts 410 and 420. I was.
[다른 실시 예 2]Other Example 2
본 발명에서는 상기 제품안착부를 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하였으며, 구분된 제 1, 2제품안착부(410, 420)는 다단으로 구성되도록 하였다.In the present invention, the product seating part is divided into a first product seating part 410 and a second product seating part 420, respectively, and the divided first and second product seating parts 410 and 420 are configured in multiple stages.
상기 제 1, 2제품안착부(410, 420)는 상, 하부본체(100, 200) 사이에 형성되는 중공부에 이송레일을 타며 진입과 배출을 하게 된다.The first and second product seating parts 410 and 420 may enter and discharge the transfer rails with a transport rail formed between the upper and lower bodies 100 and 200.
상기 제 1, 2제품안착부(410, 420)의 기판제품이 안착되는 안착부(411, 421) 내부에는 히터(413, 423)와 온도제어용 센서가 각각 구성된다. Heaters 413 and 423 and a temperature control sensor are respectively configured in the seating parts 411 and 421 where the substrate products of the first and second product seating parts 410 and 420 are seated.
상기 각각의 히터(413, 423)는 기판제품에 대한 가열작업에 따른 구성요소이며, 온도제어용 센서는 상기 히터(413, 423)로 인해 발생되는 열에 대한 온도를 제어하기 위함이다.Each of the heaters 413 and 423 is a component according to a heating operation for a substrate product, and the temperature control sensor is for controlling the temperature of heat generated by the heaters 413 and 423.
상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)의 히터(413)와 온도제어용 센서로 전원을 공급하는 제 1전원공급장치(417)가 구성된다.Between the lower main body 200 and the first product seating portion 410 is composed of a heater 413 of the first product seating portion 410 and a first power supply device 417 for supplying power to the temperature control sensor do.
상기 제 1전원공급장치(417)는 외부에서부터 제 1제품안착부(410)의 히터(413)와 온도제어용 센서로 전원을 공급하며, 이는 일반적으로 사용되는 접촉식 전원공급장치를 적용하였다.The first power supply 417 supplies power to the heater 413 and the temperature control sensor of the first product seating portion 410 from the outside, which is applied to the contact power supply generally used.
상기 접촉식 전원공급장치는 제 1제품안착부(410)가 가압에 따라 상승, 하강 시에 별도의 상승, 하강하는 부재를 이용하여 승, 하강하며 접촉을 이루게 되어 전원을 공급하도록 하였다.In the contact type power supply device, the first product seating part 410 rises, falls, and contacts by using a separate rising and lowering member when the first product seating portion 410 is raised or lowered according to the pressure to supply power.
또한, 사용에 따라서는 접촉식 전원공급장치를 대신하여 케이블베어를 적용하여 사용할 수도 있다.In addition, depending on the use, it may be used by applying a cable bearing instead of the contact power supply.
상기 제 2제품안착부(420)의 일 측에는 상기 제 2제품안착부(420)의 히터(423)와 온도제어용 센서로 전원을 공급하는 제 2전원공급장치(427)가 구성되는데, 상기 제 2전원공급장치(427)는 제 2제품안착부(420)의 일 측에 연결 구성되는데, 본 발명에서는 도시된 바와 같이 상기 제 2제품안착부(420)의 측면부에 위치시켰으나 상기한 제 2전원공급장치(427)의 위치는 도면 또는 설명에 따라 한정하지 않겠다.One side of the second product seat 420 is configured with a second power supply device 427 for supplying power to the heater 423 and the temperature control sensor of the second product seat 420, the second The power supply 427 is configured to be connected to one side of the second product seat 420. In the present invention, the power supply 427 is positioned on the side of the second product seat 420, but the second power supply is shown in FIG. The location of the device 427 will not be limited according to the drawings or description.
상기 제 2전원공급장치(427)는 제 1전원공급장치(417)와 동일하게 접촉식 전원공급장치 또는 케이블베어를 사용할 수 있으며, 그에 대한 설명은 상기에서 설명하였기에 생략하겠다.The second power supply device 427 may use a contact type power supply device or a cable bearing in the same manner as the first power supply device 417, and a description thereof will be omitted since it has been described above.
[다른 실시 예 3][Other Example 3]
이하에서는 상기한 실시 예에 대한 구성요소 중에서 하부본체(200)의 내부에 별도의 히터와 온도제어용 센서가 구성되어 있고, 제 1제품안착부(410)에는 별도의 히터(413)와 온도제어용 센서가 구성되어 있지 않은 것에 대해 설명하겠다.Hereinafter, a separate heater and a temperature control sensor are configured inside the lower body 200 among the components for the above-described embodiment, and a separate heater 413 and a temperature control sensor are provided in the first product seating part 410. I will explain that is not configured.
이에 오토클레이브장치(10)에 대분 구성되는 구성요소는 상기와 동일하다.Thus, the components that are largely configured in the autoclave device 10 are the same as above.
본 발명의 다른 실시 예에서는 상기 제품안착부를 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하였으며, 구분된 제 1, 2제품안착부(410, 420)는 다단으로 구성되도록 하였다.In another embodiment of the present invention, the product seating part is divided into a first product seating part 410 and a second product seating part 420, respectively, and the divided first and second product seating parts 410 and 420 are multistage. It was configured.
상기 제 1, 2제품안착부(410, 420)는 상, 하부본체(100, 200) 사이에 형성되는 중공부에 이송레일을 타며 진입과 배출을 하게 된다.The first and second product seating parts 410 and 420 may enter and discharge the transfer rails with a transport rail formed between the upper and lower bodies 100 and 200.
상기 제 2제품안착부(420)의 기판제품이 안착되는 안착부(421) 내부에는 히터(423)와 온도제어용 센서가 구성된다.A heater 423 and a temperature control sensor are configured in the seating part 421 in which the substrate product of the second product seating part 420 is seated.
상기 히터(423)는 기판제품에 대한 가열작업에 따른 구성요소이고, 온도제어용 센서는 상기 히터(423)로 인해 발생되는 열에 대한 온도를 제어하기 위함이다.The heater 423 is a component according to a heating operation for the substrate product, the temperature control sensor is to control the temperature for the heat generated by the heater 423.
상기 제 1제품안착부(410)에는 별도의 히터와 온도제어용 센서가 구성되지 않으며, 제 2제품안착부(420)에 구성되는 히터(423)와 온도제어용 센서에 대한 상세한 설명은 상기한 실시 예에 대한 설명과 동일하다.A separate heater and a temperature control sensor are not configured in the first product seat 410, and a detailed description of the heater 423 and the temperature control sensor of the second product seat 420 is described above. Same as the description for.
[다른 실시 예 4][Other Example 4]
이하에서는 상기한 다른 실시 예 1에 대한 구성요소 중에서 하부본체(200)와 제 1제품안착부(410) 사이에 별도의 히터와 온도제어용 센서가 구성되어 있고, 제 1, 2제품안착부(410, 420)에는 별도의 히터(413)와 온도제어용 센서가 구성되어 있지 않은 것에 대해 설명하겠다.Hereinafter, a separate heater and a temperature control sensor are configured between the lower main body 200 and the first product seating part 410 among the components of the first embodiment described above, and the first and second product seating parts 410 are provided. , 420 will be described that the separate heater 413 and the temperature control sensor are not configured.
이에 오토클레이브장치(10)에 대분 구성되는 구성요소는 상기와 동일하다.Thus, the components that are largely configured in the autoclave device 10 are the same as above.
상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성되고, 상기 하부본체(200)와 제 1제품안착부(410) 사이에는 히터(230)와 온도제어용 센서가 전원과 연결되어 구성된다.The product seating part is divided into a first product seating part 410 and a second product seating part 420, respectively, and is composed of a plurality of stages, and a heater 230 between the lower body 200 and the first product seating part 410. ) And temperature control sensor are connected to the power supply.
상기한 히터(230)는 별도의 전원과 연결되며, 전원의 공급으로 상기 히터(230)가 작동하며 열을 발산하게 된다.The heater 230 is connected to a separate power source, the heater 230 is operated by the supply of power to dissipate heat.
상기 히터(230)에서 발산되는 열은 제 1제품안착부(410)를 거쳐 제 2제품안착부(420)까지 발산하게 된다.The heat emitted from the heater 230 is dissipated to the second product seat 420 via the first product seat 410.
이때, 발산되는 열기는 제 1, 2제품안착부(410, 420)의 안착부(411, 421)에 형성된 관통공을 통해 열기가 전달된다.At this time, the radiated heat is transmitted through the through-holes formed in the seating portion (411, 421) of the first, second product seating portion (410, 420).
이하는 상기한 실시 예와 다른 실시 예에 공통적으로 적용되되,The following applies in common to the above embodiments and other embodiments,
상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)의 쳐짐을 방지하는 하나 이상 다수개의 받침대(210)가 구성되거나 또는 하나 이상 다수개의 캠(220)이 구성된다.Between the lower main body 200 and the first product seating portion 410 one or more plurality of pedestal 210 is configured to prevent sagging of the first product seating portion 410 or one or more plurality of cams 220 ) Is configured.
상기한 받침대(210) 또는 캠(220)에 대한 구성은 기판제품에 대해 가압작업을 함에 있어, 가압력에 의해 실린더(c)가 위치된 부분을 제외한 부분에 대해서는 쳐짐 현상이 발생하게 되는데, 이를 지지하기 위함으로써, 받침대(210)는 일반적으로 사용되는 것이며, 캠(220)의 경우, 별도의 실린더를 이용하여 원통형 부분이 제 1제품안착부(410)의 하면을 지지하도록 한 것으로써, 상기 캠(220)은 본 출원인이 출원하여 등록받은 특허에서 본 발명에 적용한 것이다.In the configuration of the pedestal 210 or the cam 220 in the press work on the substrate product, the drooping phenomenon occurs in the portion other than the portion in which the cylinder (c) is located by the pressing force, the support By doing so, the pedestal 210 is generally used, and in the case of the cam 220, a cylindrical portion is used to support the lower surface of the first product seating portion 410 by using a separate cylinder. 220 is applied to the present invention in the patent filed and registered by the applicant.
상기 제 1제품안착부(410)와 제 2제품안착부(420) 각각에는 기판제품이 지지되는 지지대가 다수개 구성되는데, 상기 지지대는 제 1, 2제품안착부(410, 420)의 안착부(411, 421)에 안착되는 기판제품이 하부로 이탈되는 것을 방지하기 위함이며, 상기 지지대는 구성함에 따라 상기 안착부(411, 421)에서 일정 간격 이격되어 위치될 수도 있다.Each of the first product seating part 410 and the second product seating part 420 includes a plurality of supports for supporting substrate products, and the support parts are seating parts of the first and second product seating parts 410 and 420. In order to prevent the substrate product seated on the 411, 421 is separated from the lower portion, the support may be positioned spaced apart from the mounting portion (411, 421) by a predetermined interval.
상기 제 2제품안착부(420)의 상측으로 다수개를 다단으로 구성할 수 있는데, 이는 본 발명에서는 제 1제품안착부(410)와 제 2제품안착부(420)로 2단에 대해 구성하였지만, 사용에 따라서는 다수개를 다단으로 구성한 후, 제 2제품안착부(420)의 구성요소를 적용하여 사용할 수 있도록 하였다.The second product seating portion 420 can be configured in a plurality of stages to the upper side, which is configured for two stages in the present invention the first product seating portion 410 and the second product seating portion 420. According to the use, after forming a plurality of stages in multiple stages, the components of the second product seating portion 420 can be applied and used.
도 7을 참고로 설명하면, 상기 제 1제품안착부(410)와 제 2제품안착부(420)에는 제 1전원공급장치(417)를 통해 상기 제 1, 2제품안착부(410, 420)로 전원을 공급하는 전원연장부재(419, 429)가 각각 구성되는데, 이에 대해 설명하면, 제 1전원공급장치(417)를 통해 전원을 공급하되, 1차적으로 제 1제품안착부(410)의 전원연장부재(419)로 전원을 공급하여 제 1제품안착부(410)에서 히터(413)와 온도제어용 센서로 전원을 공급하고, 상기 제 1제품안착부(410)의 전원연장부재(419)는 제 2제품안착부(420)의 전원연장부재(429)와 접촉하게 되어 제 2제품안착부(420)의 히터(423)와 온도제어용 센서로 전원을 공급하게 된다.Referring to FIG. 7, the first and second product seating parts 410 and 420 are connected to the first and second product seating parts 410 and 420 through a first power supply device 417. Each of the power extension members 419 and 429 is configured to supply power to the furnace, which will be described below. However, the power extension members 419 and 429 supply power through the first power supply device 417, but the first product seat 410 Power is supplied to the power extension member 419 to supply power from the first product seat 410 to the heater 413 and the temperature control sensor, and the power extension member 419 of the first product seat 410. The contact with the power extension member 429 of the second product seating portion 420 is to supply power to the heater 423 and the temperature control sensor of the second product seating portion 420.
상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)를 상측으로 상승시키는 실린더(c)가 구성되는데, 상기 실린더(c)는 기판제품에 대한 가압작업을 진행할 수 있도록 제 1제품안착부(410)의 안착부를 밀폐시키기 위해 상기 제 1제품안착부(410)를 상승시켜 상측의 제 2제품안착부(420)에 접촉시킨다.Between the lower body 200 and the first product seating portion 410 is configured a cylinder (c) for raising the first product seating portion 410 upward, the cylinder (c) is pressed against the substrate product The first product seating portion 410 is raised to contact the second product seating portion 420 on the upper side to seal the seating portion of the first product seating portion 410 so that the work can be performed.
더불어, 상기 제 1제품안착부(410)의 외주에 형성된 패킹안착홈에 패킹의 끼움을 원활하게 할 수도 있다.In addition, the packing may be smoothly inserted into the packing seating groove formed on the outer circumference of the first product seating part 410.
상기 제 1제품안착부(410) 또는 제 2제품안착부(420)의 작동을 제어하는 제어부가 포함되는데, 상기 제어부는 제 1, 2제품안착부(410, 420)의 진입, 배출과 더불어 오토클레이브 장치(10)의 전반적인 제어를 하기 위함이다.A control unit for controlling the operation of the first product seating unit 410 or the second product seating unit 420 is included, the control unit with the entry, discharge of the first and second product seating unit (410, 420) This is for overall control of the clave device 10.
상기 제 2제품안착부(420)의 히터(423), 온도제어용 센서 및 제 2전원공급장치(427)는 사용에 따라 제 1제품안착부(410)에 히터(413), 온도제어용 센서 및 제 1전원공급장치(417)를 적용하여 사용할 수 있는데, 이는 제 1제품안착부(410) 또는 제 2제품안착부(420) 중 오토클레이브 장치(10)의 사용 및 상부본체 또는 하부본체에 히터, 온도제어용센서 및 전원공급장치의 구성위치에 따라 가변하여 적용시킬 수 있다.The heater 423, the temperature control sensor, and the second power supply device 427 of the second product seat 420 may use the heater 413, the temperature control sensor, and the first product seat 410. 1 can be used by applying the power supply device 417, which is the use of the autoclave device 10 of the first product seating portion 410 or the second product seating portion 420 and the heater, It can be applied by varying the position of the temperature control sensor and power supply.
상기 제 1제품안착부(410) 또는 제 2제품안착부(420) 또는 제 1제품안착부(410)와 제 2제품안착부(420)에는 기판제품이 안착되는 안착부에 하나 이상 다수개의 관통공이 형성되어 있는데, 상기 관통공은 히터, 온도제어용 센서 및 전원공급장치의 구성 위치에 따라 가변될 수 있음으로 그에 따라 적용하며 사용할 수 있다.The first product seating part 410 or the second product seating part 420 or the first product seating part 410 and the second product seating part 420 at least one through a plurality of through the mounting part in which the substrate product is seated The through-hole is formed, the through-hole can be changed according to the configuration position of the heater, the temperature control sensor and the power supply can be applied and used accordingly.
상기 오토클레이브장치(10)에는 제 1제품안착부(410) 또는 제 2제품안착부(420)로 압력을 공급하는 압력공급부를 하나로 구성하거나 또는 상기 제 1, 2제품안착부(410, 420)로 각각 연결 구성되도록 하여 다수개의 제품안착부가 구성되어도 하나의 압력공급부를 사용하거나 또는 각각의 압력공급부를 연결하여 사용할 수 있도록 하였다.The autoclave device 10 includes a pressure supply unit for supplying pressure to the first product seating unit 410 or the second product seating unit 420 or the first and second product seating units 410 and 420. In order to be configured to be connected to each other, even if a plurality of product seats are configured to use a single pressure supply or to connect to each pressure supply.
상기한 본 발명에 따르면, 기판제품이 안착되는 제품안착부를 다단으로 구성하여 다단으로 구성된 제품안착부에 안착된 기판제품 각각으로 동일한 가열과 동일한 가압이 진행되도록 하여 생산성을 극대화하였고, 상기 다단의 제품안착부로 가열, 가압에 대한 구조와 구성요소를 간단히 하였으며, 구조와 구성요소를 간단히 함에 따라 제품원가를 절감하는 효과가 발생하여 사용자로 하여금 구매에 대한 부담감을 현격히 줄어들게 하였다.According to the present invention described above, by maximizing the productivity by the same heating and the same pressurization proceeds to each of the substrate products seated on the product seating portion consisting of a multi-stage by configuring the product seating portion on which the substrate product is seated in multiple stages, The structure and components for heating and pressurization were simplified with the seating part, and the effect of reducing the product cost was generated by simplifying the structure and components, which greatly reduced the burden on users to purchase.

Claims (16)

  1. 상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서,In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for seating the substrate product,
    상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성되되,The product seating part is divided into a first product seating part 410 and a second product seating part 420, each composed of a multi-stage,
    상기 제 1제품안착부(410)에 구성되는 패킹(p)이 제 2안착부(420)의 하부에 접촉되고, 상기 제 2제품안착부(420)에 구성되는 패킹(p)이 상부본체(100)의 하부에 접촉되어, 상기 제 1, 2제품안착부(410, 420)의 안착부(411, 421) 내부를 밀폐시키는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.The packing p formed in the first product seat 410 is in contact with a lower portion of the second seat 420, and the packing p formed in the second product seat 420 is an upper body. 100) is in contact with the lower portion of the first and second product seating portion (410, 420) autoclave apparatus capable of defoaming in multiple stages, characterized in that the interior of the seating portion (411, 421).
  2. 상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서,In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for seating the substrate product,
    상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성되되,The product seating part is divided into a first product seating part 410 and a second product seating part 420, each composed of a multi-stage,
    상기 제 2제품안착부(420)의 양측 하부면과 접촉되는 제 1제품안착부(410)의 양측과, 상부본체(100)의 하부면과 접촉되는 제 2제품안착부(420)의 양측에는 각각 스프링(412s, 422s) 또는 실린더(412c, 422c)가 구성되어 상기 제 1, 2제품안착부(410, 420)를 상승시키는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.Both sides of the first product seating portion 410 in contact with the lower surface of both sides of the second product seating portion 420, and both sides of the second product seating portion 420 in contact with the lower surface of the upper body 100 Multi-stage defoaming autoclave device, characterized in that the spring (412s, 422s) or the cylinder (412c, 422c) is configured to raise the first and second product seats (410, 420).
  3. 상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서,In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for seating the substrate product,
    상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성하되 상기 제 1, 2제품안착부(410, 420)의 안착부(411, 421) 내부에는 히터(413, 423)와 온도제어용 센서가 각각 구성되고,The product seating part may be divided into a first product seating part 410 and a second product seating part 420, respectively, and may be configured in multiple stages, but seating parts 411 and 421 of the first and second product seating parts 410 and 420 may be provided. Inside the heaters 413 and 423 and a temperature control sensor, respectively,
    상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)의 히터(413)와 온도제어용 센서로 전원을 공급하는 제 1전원공급장치(417)가 구성되며,Between the lower main body 200 and the first product seating portion 410 is composed of a heater 413 of the first product seating portion 410 and a first power supply device 417 for supplying power to the temperature control sensor ,
    상기 제 2제품안착부(420)의 일 측에는 상기 제 2제품안착부(420)의 히터(423)와 온도제어용 센서로 전원을 공급하는 제 2전원공급장치(427)가 구성되어 있는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.One side of the second product seat 420 is characterized in that the second power supply device 427 for supplying power to the heater 423 and the temperature control sensor of the second product seat 420 is characterized in that it is configured Autoclave device which can be defoamed in multistage.
  4. 상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서,In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for seating the substrate product,
    상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성하되 제 2제품안착부(420)의 안착부(421) 내부에는 히터(423)와 온도제어용 센서가 구성되고,The product seating part is divided into a first product seating part 410 and a second product seating part 420, respectively, and is configured in multiple stages, but the heater 423 and the inside of the seating part 421 of the second product seating part 420. The temperature control sensor is configured,
    상기 제 2제품안착부(420)의 일 측에는 상기 제 2제품안착부(420)의 히터(423)와 온도제어용 센서로 전원을 공급하는 제 2전원공급장치(427)가 구성되어 있는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.One side of the second product seat 420 is characterized in that the second power supply device 427 for supplying power to the heater 423 and the temperature control sensor of the second product seat 420 is characterized in that it is configured Autoclave device which can be defoamed in multistage.
  5. 상부본체(100)와, 하부본체(200)와, 상기 상부본체와 하부본체를 고정하는 체결구(300)와, 기판제품을 안착하는 제품안착부로 구성된 오토클레이브 장치에 있어서,In the autoclave device consisting of an upper body 100, a lower body 200, a fastener 300 for fixing the upper body and the lower body, and a product seat for seating the substrate product,
    상기 제품안착부는 제 1제품안착부(410)와 제 2제품안착부(420)로 각각 구분하며 다단으로 구성되고,The product seating portion is divided into a first product seating portion 410 and a second product seating portion 420, respectively, and is composed of multiple stages,
    상기 하부본체(200)와 제 1제품안착부(410) 사이에는 히터(230)와 온도제어용 센서가 전원과 연결되어 구성되는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.Autoclave apparatus capable of defoaming in multiple stages, characterized in that the heater 230 and the temperature control sensor is connected to the power supply between the lower body 200 and the first product seating portion (410).
  6. 제 3항 또는 제 4항 중 어느 한 항에 있어서,The method according to claim 3 or 4,
    상기 제 1제품안착부(410) 또는 제 2제품안착부(420) 각각의 안착부(411, 421)에 구성되는 히터(413, 423)로 전원을 공급하는 제 1전원공급장치(417) 또는 제 2전원공급장치(427)는 접촉식전원공급장치 또는 케이블베어를 이용할 수 있는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.A first power supply device 417 for supplying power to the heaters 413 and 423 configured at the seating parts 411 and 421 of each of the first product seating part 410 or the second product seating part 420; The second power supply (427) is a multi-stage defoaming autoclave device, characterized in that the use of a contact power supply or cable bearing.
  7. 제 1항 내지 제 5항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 5,
    상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)의 쳐짐을 방지하는 하나 이상 다수개의 받침대(210)가 구성되는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.Between the lower main body 200 and the first product seating portion 410, degassing in multiple stages, characterized in that one or more pedestal 210 is configured to prevent sagging of the first product seating portion 410. Capable autoclave device.
  8. 제 1항 내지 제 5항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 5,
    상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)의 쳐짐을 방지하는 하나 이상 다수개의 캠(220)이 구성되는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.Between the lower main body 200 and the first product seating portion 410, degassing in multiple stages, characterized in that at least one cam 220 is configured to prevent sagging of the first product seating portion 410. Capable autoclave device.
  9. 제 1항 내지 제 5항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 5,
    상기 제 1제품안착부(410)와 제 2제품안착부(420) 각각에는 기판제품이 지지되는 지지대가 다수개 구성되는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.The first product seating portion 410 and the second product seating portion 420, each of the autoclave capable of degassing in multiple stages, characterized in that a plurality of supports for supporting the substrate product is configured.
  10. 제 1항 내지 제 5항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 5,
    상기 제 2제품안착부(420)의 상측으로 다수개를 다단으로 구성할 수 있는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.A multi-stage degassing autoclave device, characterized in that a plurality of stages can be configured in the upper side of the second product seating portion (420).
  11. 제 1항 내지 제 5항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 5,
    상기 제 1제품안착부(410)와 제 2제품안착부(420)에는 제 1전원공급장치(417)를 통해 상기 제 1, 2제품안착부(410, 420)로 전원을 공급하는 전원연장부재(419, 429)가 각각 구성되는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.A power extension member for supplying power to the first and second product seats 410 and 420 through the first power supply device 417 to the first product seat 410 and the second product seat 420. An autoclave apparatus capable of defoaming in multiple stages, wherein (419, 429) are respectively configured.
  12. 제 1항 내지 제 5항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 5,
    상기 하부본체(200)와 제 1제품안착부(410) 사이에는 상기 제 1제품안착부(410)를 상측으로 상승시키는 실린더(c)가 구성되는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.A multi-stage defoaming autoclave device, characterized in that between the lower body 200 and the first product seating portion 410, the cylinder (c) for raising the first product seating portion 410 is configured upwards .
  13. 제 1항 내지 제 5항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 5,
    상기 제 1제품안착부(410) 또는 제 2제품안착부(420)의 작동을 제어하는 제어부가 포함되는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.Multi-stage defoaming autoclave device characterized in that it comprises a control unit for controlling the operation of the first product seating portion (410) or the second product seating portion (420).
  14. 제 4항에 있어서,The method of claim 4, wherein
    상기 제 2제품안착부(420)의 히터(423), 온도제어용 센서 및 제 2전원공급장치(427)는 사용에 따라 제 1제품안착부(410)에 히터(413), 온도제어용 센서 및 제 1전원공급장치(417)를 적용하여 사용할 수 있는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.The heater 423, the temperature control sensor, and the second power supply device 427 of the second product seat 420 may use the heater 413, the temperature control sensor, and the first product seat 410. A multi-stage defoaming autoclave device, characterized in that can be used by applying a power supply (417).
  15. 제 1항 내지 제 5항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 5,
    상기 제 1제품안착부(410) 또는 제 2제품안착부(420) 또는 제 1제품안착부(410)와 제 2제품안착부(420)에는 기판제품이 안착되는 안착부에 하나 이상 다수개의 관통공이 형성되어 있는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.The first product seating part 410 or the second product seating part 420 or the first product seating part 410 and the second product seating part 420 at least one through a plurality of through the mounting part in which the substrate product is seated An autoclave device capable of defoaming in multiple stages, wherein a ball is formed.
  16. 제 1항 내지 제 5항 및 제 14항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 5 and 14,
    상기 오토클레이브장치(10)에는 제 1제품안착부(410) 또는 제 2제품안착부(420)로 압력을 공급하는 압력공급부를 하나로 구성하거나 또는 상기 제 1, 2제품안착부(410, 420)로 각각 연결 구성되는 것을 특징으로 하는 다단으로 탈포가 가능한 오토클레이브 장치.The autoclave device 10 includes a pressure supply unit for supplying pressure to the first product seating unit 410 or the second product seating unit 420 or the first and second product seating units 410 and 420. Autoclave capable of degassing in multiple stages, characterized in that the connection is configured to each.
PCT/KR2015/008851 2015-07-03 2015-08-25 Autoclave device capable of removing bubbles in multiple stages WO2017007065A1 (en)

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