WO2016201761A1 - 电化学放电与激光复合加工材料的装置和方法 - Google Patents

电化学放电与激光复合加工材料的装置和方法 Download PDF

Info

Publication number
WO2016201761A1
WO2016201761A1 PCT/CN2015/084544 CN2015084544W WO2016201761A1 WO 2016201761 A1 WO2016201761 A1 WO 2016201761A1 CN 2015084544 W CN2015084544 W CN 2015084544W WO 2016201761 A1 WO2016201761 A1 WO 2016201761A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser
sample
electrode
tool electrode
electrochemically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2015/084544
Other languages
English (en)
French (fr)
Inventor
张朝阳
刘皋
黄磊
姜雨佳
陆海强
庄鸿武
聂昕
郭晓杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu University
Original Assignee
Jiangsu University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu University filed Critical Jiangsu University
Priority to GB1800094.3A priority Critical patent/GB2557746B/en
Publication of WO2016201761A1 publication Critical patent/WO2016201761A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00—Combined machining
    • B23H5/02—Electrical discharge machining combined with electrochemical machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00—Combined machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H11/00—Auxiliary apparatus or details, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00—Combined machining
    • B23H5/04—Electrical discharge machining combined with mechanical working
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B23H9/14—Making holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials
    • B23K2103/54—Glass

Definitions

  • the invention belongs to the field of special composite processing, in particular to an apparatus and method for electrochemical discharge and laser composite processing materials.
  • Insulating hard and brittle materials represented by glass with excellent properties such as high hardness, chemical resistance, transparency and good biocompatibility, micro-accelerators, micro-reactors, micro-pumps, medical instruments and optics in MEMS More and more applications are in the system. Especially in some complicated, harsh or extreme working environments, the corrosion resistance, high temperature resistance and wear resistance of micro devices are very strict. If some parts are replaced with insulating hard and brittle materials, it will be very good. Solve corrosion problems. In daily life, the demand for glass parts is also growing. The Touch ID sensor and rear camera and display on the Apple mobile phone are made of sapphire glass. The composition is similar to steel jade, which is harder than ordinary glass.
  • the insulating transparent hard and brittle materials have great advantages in the application of MEMS, due to their hard and brittleness, the processing technology is low, and the conventional processing technology is difficult to perform high-efficiency micro-processing.
  • laser processing uses high-energy beams as processing energy, pulse widths can range from nanoseconds to femtoseconds; peak power can reach hundreds of megawatts, and it produces unique light, heat, and light when focused on the surface of the workpiece through optical path transmission. Nonlinear effects such as force.
  • Electrochemical discharge machining uses an electrochemical reaction on the surface of the tool electrode to form a gas film layer, which short-term insulation between the electrode and the solution; when the potential difference between the tool electrode and the working fluid continuously increases to discharge the discharge voltage of the gas film, A spark discharge occurs, and the instantaneous high temperature and shock waves generated act on the surface of the glass-based insulating material, so that the material is removed by thermal erosion.
  • micromachining technology of insulating hard and brittle materials has also proposed some composite processing methods, mainly based on one of laser processing or electrochemical discharge machining, and then assists in rotating, vibrating, aerating or grinding.
  • the Chinese Patent Publication No. CN2342925Y discloses a non-conductive material ultrasonic electrolysis discharge composite processing device, which introduces an ultrasonic vibration device in an electrochemical discharge machining system to realize electrochemical discharge machining and ultrasonication.
  • the processing of composite processing the method improves the processing efficiency, but in the process of its processing, due to the frequent action of mechanical force, it is easy to cause micro-cracks on the surface of the material to be processed and the rapid loss of processing tools.
  • the Chinese patent No. 200410023547.X provides a non-conductive superhard material EDM composite processing method. The method uses a spark discharge between the conductive grinding wheel and an auxiliary electrode to etch the material, and the mechanical grinding action removes the carbonization and metamorphic layer.
  • the method improves the processing precision of the processed surface of the sample, but due to the limitation of the size of the conductive grinding wheel, the method is not suitable for processing small-sized structures such as micropores.
  • Scholar Guo Yongfeng et al. proposed a method of physical aeration assisted electrochemical discharge machining in the article "Electrochemical EDM composite processing technology for non-conductive materials", which is continued between the end face of the tubular tool electrode and the electrolyte by physical aeration. A small amount of gas is charged to compensate for the shortage of gas generated by electrolysis alone. This method enhances the stability of the gas film formation and improves the processing efficiency.
  • the tool electrode must have a through hole, which increases the electrode. Dimensions, thus limiting the use of this method in micro-size machining.
  • the present invention provides an apparatus and method for electrochemically and laser composite processing materials, which combines laser and electrochemical discharge energy to enhance the energy density of the processing region and improve the glass insulation.
  • the etching efficiency and surface quality of transparent hard and brittle materials can be used to process small size samples.
  • the present invention achieves the above technical objects by the following technical means.
  • a method for electrochemically and laser composite processing materials comprising the following steps:
  • the transparent hard and brittle sample, the auxiliary electrode and the lower part of the tool electrode are placed in the electrolyte, the tool electrode is connected to the negative electrode of the power source, is located above the sample, and the auxiliary electrode is connected to the positive electrode of the power source.
  • the tool electrode forms an electrochemical discharge circuit in the electrolyte;
  • a focus is generated on the upper surface of the sample by passing the sample under the sample, thereby forming an impact stress and a cavitation stress acting on the surface of the sample, and the lower end of the tool electrode is located at the focus;
  • the sample was continuously processed by setting a path of motion of the sample.
  • a force sensor is disposed above the tool electrode, and the force sensor is used to detect the contact force between the tool electrode and the sample in real time.
  • the sample is glass
  • the auxiliary electrode is a graphite electrode
  • the tool electrode is a tungsten carbide electrode
  • the electrolyte is an alkaline solution.
  • the laser beam has a wavelength of 532 nm, a pulse width of 10 ns, a frequency of 0-100 kHz, and a single-pulse laser energy of 0 to 1 mJ.
  • the invention also includes an apparatus for electrochemically and laser composite processing materials, including a laser processing system, a motion control system, and an electrochemical discharge machining system;
  • the laser processing system includes a laser, a mirror for changing an optical path of a pulsed laser beam emitted by a laser, and a focusing lens for focusing a pulsed laser beam to generate a focus;
  • the motion control system includes a computer, a motion control card, an electrochemical machining discharge device, and a three-axis numerical control platform, the computer is coupled to the motion control card, the motion control card and the electrochemical machining discharge device and three coordinates
  • the numerical control platforms are respectively connected, and the computer controls the movement of the electrochemical machining discharge device and the three-axis numerical control platform by controlling the motion control card;
  • the electrochemical discharge machining system includes an auxiliary electrode, a tool electrode, a working chamber, an oscilloscope, a current probe, and an adjustable pulse power source.
  • the tool electrode is fixedly mounted on the electrochemical processing device, and the working chamber contains electrolysis.
  • a liquid, a bottom of the tool electrode and the auxiliary electrode are in an electrolyte, the auxiliary electrode is connected to a positive electrode of the adjustable pulse power source, and the tool electrode is connected to a negative electrode of the adjustable pulse power source;
  • the working chamber is fixed on the three-axis numerical control platform, the bottom of the working chamber and the clamp are provided with through holes, the sample is fixed at the through hole of the clamp, and the sample and the clamp are located in the electrolyte
  • the tool electrode and the laser processing system are respectively located above and below the sample, and the bottom end of the tool electrode corresponds to a focus position generated by the laser beam on the surface of the sample.
  • a sealing ring is respectively disposed between the sample and the clamp, the clamp and the working cavity.
  • the motion control system further includes a force sensor located between the electrochemical discharge machining device and the tool electrode, the force sensor being coupled to the computer, the force sensor transmitting a force signal Give the computer.
  • the apparatus further includes an oscilloscope and a hydrophone connected to the hydrophone and the auxiliary electrode, respectively, the oscilloscope for displaying signals transmitted by the hydrophone and the auxiliary electrode.
  • the apparatus further includes a thermal imager located obliquely above the sample, the thermal imager for detecting a surface temperature of the sample during processing, the high speed camera being located One side of the sample.
  • the adjustable pulse power supply has a voltage of 0 to 60 V, a frequency of 1 to 5000 Hz, and a duty ratio of 0 to 100%.
  • FIG. 1 is a schematic structural view of an apparatus for electrochemically and laser-compositing materials according to the present invention.
  • Figure 2 is a partial enlarged view of the jig of the present invention.
  • the reference numerals are as follows: 1-computer, 2-motion control card, 3-auxiliary electrode, 4-hydrophone, 5-tool electrode, 6-force sensor, 7-electrochemical discharge machining device, 8-thermal imager , 9-sample, 10-work chamber, 11-high speed camera, 12-laser, 13-mirror, 14-focus lens, 15-clamp, 16-three-axis CNC platform, 17-oscilloscope, 18-current probe, 19-adjustable pulse power supply, 20-upper seal, 21-lower seal.
  • the apparatus for electrochemically and laser-compositing materials as shown in FIG. 1 includes a laser processing system, a motion control system, and an electrochemical discharge machining system, and the processed sample 9 is fixed at a through hole of the clamp 15, wherein the sample 9
  • An upper sealing ring 20 is disposed between the clamp 15 and a lower sealing ring 21 between the lower portion of the clamp 15 and the working chamber 10.
  • the working chamber 10 contains an alkaline electrolyte, and the working chamber 10 is fixed on the XYZ three-axis numerical control platform 16 On the Z axis, the sample 9 is uniaxially or multi-axis linked with the three-axis numerical control platform 16.
  • the laser 12 outputs a pulsed laser with a laser wavelength of 532 nm, a pulse width of 10 ns, a frequency of 0-100 kHz, and a single-pulse laser energy of 0 to 1 mJ.
  • the pulsed laser beam is redirected by the mirror 13, the energy is concentrated by the focusing lens 14.
  • the sample 9 is focused at the interface between the sample and the electrolyte.
  • the electrolyte is broken down to generate plasma, and the plasma absorbs the laser energy to expand outward, forming impact stress and cavitation stress. Acting on the surface of the sample 9 to achieve material removal.
  • the tool electrode 5 is clamped on the main shaft of the electrochemical discharge machining device 7, the tool electrode is a tungsten electrode, and the spindle speed of the electrochemical discharge machining device 7 is adjustable from 0 to 5000 rpm, and the tool electrode 5 is driven by the electrochemical discharge machining device 7.
  • the bottom end of the tool electrode 5 is immersed in the conductive electrolyte and positioned directly above the laser focus; the negative electrode of the adjustable pulse power source 19 is connected to the tool electrode 5, the positive electrode is connected to the auxiliary electrode 3, and the auxiliary electrode 3 is made of graphite electrode, electrode
  • the two ends are loaded by the adjustable pulse power supply 19, the voltage of the adjustable pulse power supply is 0-60V, the frequency is 1 ⁇ 5000Hz, and the duty is occupied.
  • the surface of the tool electrode 5 is generated by the electrolytic reaction to generate hydrogen bubbles.
  • the amount of hydrogen bubbles generated increases.
  • the threshold voltage the threshold voltage
  • the bubbles will interact with each other.
  • short-time insulation is formed between the tool electrode 5 and the electrolyte, so that a potential difference is generated between the tool electrode 5 and the electrolyte to form an electric field, and when the field strength exceeds a critical value, the click wear is caused.
  • a spark discharge is generated, which acts on the surface of the sample 9 to achieve material removal.
  • the laser energy and the spark discharge cooperate on the workpiece from the upper and lower directions respectively, and a large number of bubbles generated at the focus are caused by the laser irradiation, which is fused with the bubbles generated by the electrochemical reaction, thereby enhancing the stability of the electrochemical film to form a gas film.
  • Sexuality ensures efficient compounding of the two energies, increases the energy density of the processed area, and speeds up the erosion of the sample being processed.
  • the computer 1 loads the numerical control program, the computer 1 outputs the instruction to the motion control card 2 according to the program output, and the motion control card 2 controls the XYZ three-axis numerical control platform 16 to run.
  • the sample 9 is set along the XYZ three-axis numerical control platform 16 along the program. The path moves while keeping the laser focus and tool electrode position constant, and the sample is etched by laser and electrochemical discharge.
  • the force sensor 6 is installed between the tool electrode 5 and the electrochemical discharge machining device 7, and the contact force between the tool electrode 5 and the sample 9 is detected in real time, and the force signal is transmitted to the computer 1 by the force sensor 6, and the computer performs the contact force and the reference force. Comparing, further controlling the feeding and retreating of the sample 9; when the contact force is less than the reference force, the sample 9 is fed according to a setting procedure; when the contact force exceeds the reference force, the sample 9 is along Treatment in the opposite direction, the retraction distance is 10 ⁇ 20 ⁇ m, and stay for 0.5s, then feed again, repeat the above steps until the end of the program.
  • the hydrophone 4 detects the thermal shock signal generated by the laser and spark discharge in the processing area and transmits it to the oscilloscope 17 to display the waveform state; the thermal imager 8 detects the thermal field distribution of the processing region; and the high speed camera 11 observes the tool electrode The dynamic process of the five bubbles changing to the gas layer; at the same time, the current probe 18 is used in the circuit to collect the pulse signal of the spark discharge during the process and transmitted to the oscilloscope 17, detecting the magnitude and frequency of the pulse current.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Laser Beam Processing (AREA)

Abstract

一种电化学放电与激光复合加工材料的装置和方法，属于特种复合加工领域；对透明的硬脆材料同时进行电化学放电与激光复合加工，通过辅助电极与工具电极在电解液中形成电化学放电回路，同时激光光束在试样表面产生焦点，当能量达到一定值时，形成冲击应力和空化应力，激光能量和火花放电分别从上下两个方向协同作用于工件上，保证了两种能量的高效复合，提高了加工区域的能量密度，加快了被加工试样的蚀除速度。

Description

电化学放电与激光复合加工材料的装置和方法 技术领域
本发明属于特种复合加工领域，尤其是电化学放电与激光复合加工材料的装置和方法。
背景技术
以玻璃为代表的绝缘硬脆材料，具有高硬度、耐化学腐蚀、透明和良好的生物相容性等优良属性，在微机电系统中的微加速器、微反应器、微型泵、医疗器械和光学系统中应用越来越多。尤其是在一些复杂、恶劣或极端的工作环境中，对微小器件的耐腐蚀、耐高温、耐磨损等性能要求十分严格，如果部分换用绝缘硬脆材料加工的零件，就能很好的解决腐蚀问题。在日常生活中，对玻璃类零件的需求也越来越大，苹果手机上的Touch ID传感器和后置摄像头以及显示屏都使用了蓝宝石玻璃制造，其成分类似钢玉，比普通玻璃硬度更高，有着很好的热特性和介电特性，其在军用红外和空间技术装备方面也取得广泛地应用。虽然绝缘透明硬脆材料在MEMS领域的应用具有很大的优势，但由于它们的硬脆性使得加工工艺性低下，传统加工工艺很能难对其进行高效微细加工。
目前对于绝缘透明硬脆材料加工技术及其应用的研究，主要有激光加工和电化学放电加工。激光加工和电化学放电加工都属于特种加工方式，又各有特点。激光加工以高能量的光束作为加工能源，脉冲宽度可以从纳秒级到飞秒量级；峰值功率可以达到数百兆瓦，它通过光路传输聚焦于工件表面时会产生独特的光、热、力等非线性效应。电化学放电加工是利用工具电极表面发生电化学反应形成气膜层，使电极与溶液之间短期绝缘；当工具电极和工作液之间电位差不断增大至击穿气膜的放电电压时，发生火花放电，所产生的瞬间高温和冲击波作用于玻璃类绝缘材料表面，使材料被热蚀去除。
国内外对绝缘硬脆材料的微加工技术的研究，也提出了一些复合加工方法，主要是基于激光加工或电化学放电加工其中之一，再辅助旋转、振动、充气或磨削等方法。
经过对现有的技术检索发现，公开号为CN2342925Y的中国专利公开了一种非导电材料超声电解放电复合加工装置，其在电化学放电加工系统中引入超声振动装置，实现电化学放电加工与超声加工的复合加工，该方法提高了加工效率，但是在其加工过程中由于机械力的频繁作用，容易导致被加工材料表面出现微裂纹以及加工工具的快速损耗。申请号为200410023547.X的中国专利提供了一种非导电超硬材料电火花磨削复合加工方 法，利用导电磨轮和一个辅助电极之间的火花放电蚀除材料，辅以机械磨削作用去除碳化和变质层。该方法提高了试样被加工表面的加工精度，但是由于导电磨轮尺寸的限制，该方法不适合于加工微孔等尺寸很小的形貌。学者郭永丰等在“非导电材料的电化学电火花复合加工工艺研究”一文中提出了一种采用物理充气辅助电化学放电加工的方法，通过物理充气在管形工具电极端面和电解液之间持续充入少量气体，以弥补仅靠电解产生气体的不足，该方法增强了生成气膜的稳定性，提高了加工效率，但是由于充气的需要，工具电极必须带有通孔，增大了电极的尺寸，因而限制了该方法在微小尺寸加工中的运用。
发明内容
针对现有技术中存在不足，本发明提供了一种电化学放电与激光复合加工材料的装置和方法，通过将激光和电化学放电两种能量复合，来增强加工区域能量密度，提高玻璃类绝缘透明硬脆材料的刻蚀加工效率和表面质量，可用于加工微小尺寸的试样。
本发明是通过以下技术手段实现上述技术目的的。
一种电化学放电与激光复合加工材料的方法，包括如下步骤：
将透明硬脆的试样、辅助电极和工具电极下部置于电解液中，工具电极与电源负极相连、位于所述试样上方，辅助电极与电源正极相连，通电时，所述辅助电极与所述工具电极在电解液中形成电化学放电回路；
激光光束经聚焦后由试样下方经过试样在试样上表面产生焦点，进而形成冲击应力和空化应力作用于试样表面，所述工具电极下端位于所述焦点处；
通过设定所述试样的运动路径对所述试样进行持续加工。
进一步，所述工具电极上方设有力传感器，所述力传感器用于实时检测所述工具电极与所述试样的接触力大小。
进一步，所述试样为玻璃，所述辅助电极为石墨电极，所述工具电极为碳化钨电极，所述电解液为碱性溶液。
在上述方案中，所述激光光束的波长为532nm，脉宽为10ns，频率0-100KHz，单脉冲激光能量为0～1mJ。
本发明还包括一种电化学放电与激光复合加工材料的装置，包括激光加工系统、运动控制系统和电化学放电加工系统；
所述激光加工系统包括激光器、反射镜和聚焦透镜，所述反射镜用来改变激光器发出的脉冲激光光束的光路，所述聚焦透镜用来将脉冲激光光束聚焦产生焦点；
所述运动控制系统包括计算机、运动控制卡、电化学加工放电装置和三坐标数控平台，所述计算机与所述运动控制卡相连，所述运动控制卡与所述电化学加工放电装置和三坐标数控平台分别连接，所述计算机通过控制所述运动控制卡进而控制所述电化学加工放电装置和三坐标数控平台运动；
所述电化学放电加工系统包括辅助电极、工具电极、工作腔、示波器、电流探头和可调脉冲电源，所述工具电极固定安装在所述电化学加工装置上，所述工作腔内盛有电解液，所述工具电极的底部与辅助电极在电解液中，所述辅助电极与所述可调脉冲电源的正极相连，所述工具电极与所述可调脉冲电源的负极相连；
所述工作腔固定于所述三坐标数控平台上，所述工作腔底部及夹具设有通孔，试样固定于所述夹具的通孔处，所述试样和所述夹具位于电解液中，所述工具电极与所述激光加工系统分别位于所述试样的上方和下方，所述工具电极底端与所述激光光束在试样表面产生的焦点位置相对应。
进一步，所述试样与所述夹具、所述夹具与所述工作腔之间分别设有密封圈。
进一步，所述运动控制系统还包括力传感器，所述力传感器位于所述电化学放电加工装置与所述工具电极之间，所述力传感器与所述计算机相连，所述力传感器将力信号传递给计算机。
进一步，所述装置还包括示波器和水听器，所述示波器分别与所述水听器和所述辅助电极相连，所述示波器用于显示所述水听器和所述辅助电极传递的信号。
进一步，所述装置还包括热成像仪和高速摄像机，所述热成像仪位于所述试样斜上方，所述热成像仪用于检测加工过程中试样表面温度，所述高速摄像机位于所述试样一侧。
在上述方案中，所述可调脉冲电源的电压0～60V，频率1～5000Hz，占空比0～100％。
本发明的有益效果：
(1)将激光束从下方引入电化学放电刻蚀加工系统中，为电化学放电的电极进给提供了空间条件，使激光能量和火花放电分别从上下两个方向协同作用于工件上，保证了两种能量的高效复合，提高了加工区域的能量密度，加快了被加工试样的蚀除速度。
(2)在加工过程中，由激光辐照作用可生成大量气泡，并与工具电极处电化学反应所产生的气泡融合，增大了工具电极外层形成气膜的速度和稳定性，使得电化学放电加工过程更加稳定，提高了加工速率。
(3)引入力反馈系统，通过将工具电极和试样接触力与参考力进行比较，进而控制 试样的进给以及回退，避免了工具电极和试样接触力过大而造成工具电极变形或断裂，也可以保证加工时试样不会因为接触力过大而发生破裂或产生表面裂纹，提高了被加工试样的表面质量；工具电极的回退，使得工具电极和试样之间留有一定的间隙，有利于加工区域溶液的进入，保证了电化学放电的稳定性，提高了加工效率。
附图说明
图1为本发明所述电化学放电与激光复合加工材料的装置的结构示意图。
图2为本发明所述夹具局部放大图。
附图标记说明如下：1-计算机，2-运动控制卡，3-辅助电极，4-水听器，5-工具电极，6-力传感器，7-电化学放电加工装置，8-热成像仪，9-试样，10-工作腔，11-高速摄像机，12-激光器，13-反射镜，14-聚焦透镜，15-夹具，16-三坐标数控平台，17-示波器，18-电流探头，19-可调脉冲电源，20-上密封圈，21-下密封圈。
具体实施方式
下面结合附图以及具体实施例对本发明作进一步的说明，但本发明的保护范围并不限于此。
如图1所示的电化学放电与激光复合加工材料的装置，包括激光加工系统、运动控制系统和电化学放电加工系统，将加工试样9固定于夹具15的通孔处，其中试样9与夹具15之间装有上密封圈20，夹具15下方与工作腔10之间装有下密封圈21，工作腔10内盛有碱性电解液，工作腔10固定于X-Y-Z三坐标数控平台16的Z轴上，试样9随三坐标数控平台16单轴或多轴联动。
激光器12输出的为脉冲激光，激光波长532nm，脉宽10ns，频率0-100kHz，单脉冲激光能量0～1mJ，脉冲激光光束经反射镜13改变方向后，由聚焦透镜14将能量汇聚，由试样9下方穿过试样9在试样与电解液界面聚焦，激光能量达到一定值后，击穿电解液产生等离子体，等离子体吸收激光能量向外膨胀，形成冲击应力和空化应力，直接作用于试样9表面，实现材料去除。
工具电极5夹紧在电化学放电加工装置7的主轴上，工具电极为钨电极，电化学放电加工装置7主轴转速为0～5000rpm可调，由电化学放电加工装置7带动工具电极5运动，工具电极5的底端浸于可导电的电解液中，并定位于激光焦点的正上方；将可调脉冲电源19负极连接工具电极5，正极连接辅助电极3，辅助电极3采用石墨电极，电极两端由可调脉冲电源19加载电压，可调脉冲电源的电压0～60V，频率1～5000Hz，占空 比0～100％，工具电极5表面由电解反应生成氢气泡，随着载入电压的升高，生成氢气泡的量随之增加，当载入电压达到或超过临界电压时，气泡就会相互结合形成气层并包裹住工具电极5，将工具电极5和电解液之间形成短时绝缘，因此工具电极5和电解液之间会产生电势差形成电场，当场强超过临界值时，引起点击穿，产生火花放电，作用于试样9表面，实现材料去除。激光能量和火花放电分别从上下两个方向协同作用于工件上，由激光辐照作用造成焦点处产生的大量气泡，与电化学反应所产生的气泡融合，增强了电化学放电形成气膜的稳定性，保证了两种能量的高效复合，提高了加工区域的能量密度，加快了被加工试样的蚀除速度。
计算机1内载入数控程序，计算机1根据程序输出指令给运动控制卡2，运动控制卡2控制X-Y-Z三坐标数控平台16运行，加工过程中试样9随X-Y-Z三坐标数控平台16沿程序设定的路径运动，而保持激光焦点和工具电极位置不变，由激光和电化学放电复合作用刻蚀试样。
工具电极5和电化学放电加工装置7之间安装力传感器6，实时检测工具电极5和试样9接触力大小，由力传感器6将力信号传给计算机1，计算机将接触力与参考力进行比较，进而控制试样9的进给以及回退；当接触力小于所述参考力时，试样9按照设定程序进给；当所述接触力超过所述参考力时，试样9沿反方向回退，回退距离10～20μm，并停留0.5s，然后再次进给，重复上述步骤，直至程序结束。
加工过程中，水听器4检测加工区域激光和火花放电产生的热力冲击信号并传输到示波器17，显示波形状态；由热成像仪8检测加工区域的热场分布；由高速摄像机11观察工具电极5处气泡向气层转变的动态过程；同时电路中使用电流探头18采集加工过程中火花放电的脉冲信号并传输到示波器17，检测脉冲电流的大小、频率等信息。
所述实施例为本发明的优选的实施方式，但本发明并不限于上述实施方式，在不背离本发明的实质内容的情况下，本领域技术人员能够做出的任何显而易见的改进、替换或变型均属于本发明的保护范围。

Claims (10)

  1. 一种电化学放电与激光复合加工材料的方法，其特征在于，包括如下步骤：
    将透明硬脆的试样、工具电极下部和辅助电极置于电解液中，工具电极与电源负极相连、位于所述试样上方，辅助电极与电源正极相连，通电时，所述辅助电极与所述工具电极在电解液中形成电化学放电回路；
    激光光束经聚焦后由试样下方穿过试样在试样上表面产生焦点，进而形成冲击应力和空化应力作用于试样表面，所述工具电极下端位于所述焦点处；
    通过设定所述试样的运动路径对所述试样进行持续加工。
  2. 如权利要求1所述的电化学放电与激光复合加工材料的方法，其特征在于，所述工具电极上方设有力传感器，所述力传感器用于实时检测所述工具电极与所述试样的接触力大小。
  3. 如权利要求2所述的电化学放电与激光复合加工材料的方法，其特征在于，所述试样为玻璃，所述辅助电极为石墨电极，所述工具电极为碳化钨电极，所述电解液为碱性溶液。
  4. 如权利要求1～3中任意一项所述的电化学放电与激光复合加工材料的方法，其特征在于，所述激光光束的波长为532nm，脉宽为10ns，频率0～100KHz，单脉冲激光能量为0～1mJ。
  5. 一种电化学放电与激光复合加工材料的装置，其特征在于，包括激光加工系统、运动控制系统和电化学放电加工系统；
    所述激光加工系统包括激光器、反射镜和聚焦透镜，所述反射镜用来改变激光器发出的脉冲激光光束的光路，所述聚焦透镜用来将脉冲激光光束聚焦产生焦点；
    所述运动控制系统包括计算机、运动控制卡、电化学加工放电装置和三坐标数控平台，所述计算机与所述运动控制卡相连，所述运动控制卡与所述电化学加工放电装置和三坐标数控平台分别连接，所述计算机通过控制所述运动控制卡进而控制所述电化学加工放电装置和三坐标数控平台运动；
    所述电化学放电加工系统包括辅助电极、工具电极、工作腔、示波器、电流探头和可调脉冲电源，所述工具电极固定安装在所述电化学加工装置上，所述工作腔内盛有电解液，所述工具电极的底部与辅助电极在电解液中，所述辅助电极与所述可调脉冲电源的正极相连，所述工具电极与所述可调脉冲电源的负极相连；
    所述工作腔固定于所述三坐标数控平台上，所述工作腔底部及夹具设有通孔，试样固定于所述夹具的通孔处，所述试样和所述夹具位于电解液中，所述工具电极与所述激光加工系统分别位于所述试样的上方和下方，所述工具电极底端与所述激光光束在试样表面产生的焦点位置相对应。
  6. 如权利要求5所述的电化学放电与激光复合加工材料的装置，其特征在于，所述试样与所述夹具、所述夹具与所述工作腔之间分别设有密封圈。
  7. 如权利要求6所述的电化学放电与激光复合加工材料的装置，其特征在于，所述运动控制系统还包括力传感器，所述力传感器位于所述电化学放电加工装置与所述工具电极之间，所述力传感器与所述计算机相连，所述力传感器将力信号传递给计算机。
  8. 如权利要求7所述的电化学放电与激光复合加工材料的装置，其特征在于，所述装置还包括示波器和水听器，所述示波器分别与所述水听器和所述辅助电极相连，所述示波器与所述辅助电极之间设有电流探头，所述示波器用于显示所述水听器和所述辅助电极传递的信号。
  9. 如权利要求8所述的电化学放电与激光复合加工材料的装置，其特征在于，所述装置还包括热成像仪和高速摄像机，所述热成像仪位于所述试样斜上方，所述热成像仪用于检测加工过程区域的热场分布，所述高速摄像机位于所述试样一侧，用于观察电解过程。
  10. 如权利要求5～9中任意一项所述的电化学放电与激光复合加工材料的装置，其特征在于，所述可调脉冲电源的电压0～60V，频率1～5000Hz，占空比0～100％。
PCT/CN2015/084544 2015-06-17 2015-07-21 电化学放电与激光复合加工材料的装置和方法 Ceased WO2016201761A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1800094.3A GB2557746B (en) 2015-06-17 2015-07-21 Device and method for machining materials by combining electrochemical discharging and laser

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201510338688.9 2015-06-17
CN201510338688.9A CN104942388B (zh) 2015-06-17 2015-06-17 电化学放电与激光复合加工材料的装置和方法

Publications (1)

Publication Number Publication Date
WO2016201761A1 true WO2016201761A1 (zh) 2016-12-22

Family

ID=54157740

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2015/084544 Ceased WO2016201761A1 (zh) 2015-06-17 2015-07-21 电化学放电与激光复合加工材料的装置和方法

Country Status (3)

Country Link
CN (1) CN104942388B (zh)
GB (1) GB2557746B (zh)
WO (1) WO2016201761A1 (zh)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107589157A (zh) * 2017-11-01 2018-01-16 青岛科技大学 光致电化学传感器
CN108977866A (zh) * 2018-08-21 2018-12-11 烟台大学 一种激光辅助喷雾微弧氧化装置
CN109365932A (zh) * 2018-10-30 2019-02-22 沈阳理工大学 带热障涂层叶片气膜孔激光电解组合微细加工新方法及装置
CN110293272A (zh) * 2019-08-08 2019-10-01 安徽理工大学 一种用于半圆孔的电火花电解放电复合加工试验装置
CN113681155A (zh) * 2021-08-06 2021-11-23 江苏大学 一种激光辅助电化学处理孔质量的方法及装置
CN113843460A (zh) * 2021-09-22 2021-12-28 清华大学 一种激光电解复合加工用光电液耦合传导管电极
CN114012268A (zh) * 2021-10-13 2022-02-08 浙江师范大学 一种光伏增效微结构紫外激光加工装置及方法
CN114054781A (zh) * 2021-11-18 2022-02-18 长沙理工大学 一种电弧增材与电化学减材复合制造装置及方法
CN114131205A (zh) * 2021-12-02 2022-03-04 苏州万光激光刀模有限公司 一种全自动激光镭射机用可旋转安装平台
CN115194271A (zh) * 2022-08-23 2022-10-18 深圳技术大学 一种面向3d打印金属构件的激光与电化学复合抛光装置
CN116100097A (zh) * 2023-02-23 2023-05-12 江苏理工学院 一种多孔电极内充液电解电火花加工系统与方法
CN119870795A (zh) * 2025-01-15 2025-04-25 江苏昶屹电子科技有限公司 一种笔记本电脑外壳加工焊接设备

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106003444B (zh) * 2016-06-17 2017-10-20 江苏大学 充气加压电化学放电加工装置及方法
CN106424987B (zh) * 2016-12-06 2018-10-09 江苏大学 管电极放电与激光辐照的同轴复合加工方法和装置
CN106735866B (zh) * 2016-12-27 2019-04-30 江苏大学 背向多焦点激光和电化学复合加工半导体材料的装置和方法
CN108655521B (zh) * 2018-04-27 2020-02-21 江苏大学 一种压电陶瓷振动与电化学放电同步的加工装置及方法
CN108971745B (zh) * 2018-08-12 2020-12-29 中国科学院宁波材料技术与工程研究所 一种激光诱导放电表面微结构加工方法及装置
CN109735883B (zh) * 2019-02-20 2021-02-12 江苏大学 一种激光辅助柔性随动式工具电极微细电沉积的装置及方法
CN109732199B (zh) * 2019-02-25 2020-11-20 江苏大学 一种半导体材料激光电化学背向协同微加工方法及装置
CN109693010B (zh) * 2019-03-06 2020-08-18 安徽理工大学 一种小孔电加工过程同步观察方法及装置
US20220276609A1 (en) * 2019-04-15 2022-09-01 Rolex Sa Cam-type timepiece component
CN110340471B (zh) * 2019-06-28 2020-07-10 华中科技大学 磁场作用下激光诱导等离子体辅助电火花复合加工装置及方法
CN110526379B (zh) * 2019-08-26 2022-09-16 江苏大学 一种用于处理染料废水的高效激光空化装置
CN111702337A (zh) * 2020-05-22 2020-09-25 江苏大学 一种固状电解液辅助提高激光刻蚀质量的方法及装置
CN112171184B (zh) * 2020-08-12 2021-10-12 江苏大学 一种叶片气膜孔的复合加工方法及装置
CN113857596B (zh) * 2021-09-23 2024-03-19 江苏大学 针对增材制造金属粗糙表面的多能场复合减材加工方法
CN114871518A (zh) * 2021-12-15 2022-08-09 长沙理工大学 电弧增材与电化学放电减材复合制造装置及方法
CN114178636A (zh) * 2022-01-13 2022-03-15 任洪香 一种压电陶瓷振动与电化学放电同步的加工装置
CN114346337B (zh) * 2022-01-21 2024-05-14 江苏大学 一种磨粒辅助激光电解自耦合协同对位打孔方法及系统
CN114523165B (zh) * 2022-02-21 2024-05-17 江苏大学 一种在半导体材料上制备阵列孔的激光增强超声电解复合加工方法及装置
CN115555665B (zh) * 2022-08-23 2025-07-22 温州大学 一种激光与电化学复合加工装置
CN117381144A (zh) * 2023-11-17 2024-01-12 广西大学 一种阴极中空的激光-电解复合精铣装置及方法和电解槽
CN119187902B (zh) * 2024-11-07 2025-10-21 华侨大学 电场辅助激光诱导等离子体加工透明硬脆材料装置及方法
CN119634949B (zh) * 2025-01-03 2025-10-17 河南理工大学 一种电解-激光复合柔性加工阵列微细结构的方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070283786A1 (en) * 2006-06-09 2007-12-13 Gregor Kappmeyer Mehod for the manufacture of a cutting tool
TW200824825A (en) * 2006-12-15 2008-06-16 Jia-Lung Kuo Device and method for laser assisted electrical discharge machining
EP2062671A1 (en) * 2007-11-23 2009-05-27 Siemens Aktiengesellschaft Apparatus and method to machine holes
CN102725090A (zh) * 2009-12-08 2012-10-10 欧陆汽车有限责任公司 用于加工工件的方法和装置
CN103028799A (zh) * 2012-12-28 2013-04-10 江苏大学 一种冲孔与电火花复合的微细阵列通孔加工方法和装置
CN103501949A (zh) * 2010-12-31 2014-01-08 戴蒙得创新股份有限公司 在多晶体中产生孔和埋头孔的方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10199346A (ja) * 1997-01-17 1998-07-31 Japan Steel Works Ltd:The 透明電極の形成方法および形成装置
CN100388997C (zh) * 2006-09-18 2008-05-21 南京航空航天大学 喷射液束电解-激光复合加工方法及其装置
CN101805903B (zh) * 2010-04-12 2012-07-25 太原理工大学 一种钢基表面激光钎焊熔覆铜合金层的方法
CN103008882A (zh) * 2012-12-12 2013-04-03 桂林电子科技大学 脉冲激光脆性材料微加工方法及系统
CN103572341B (zh) * 2013-09-23 2016-01-20 江苏大学 激光光管电极的电化学复合沉积制造方法与装置
CN103712723B (zh) * 2013-12-19 2016-04-06 江苏大学 激光空化射流力冲击作用的检测方法及装置
CN203992695U (zh) * 2014-08-10 2014-12-10 佳木斯大学 光纤激光掩膜微细电解复合加工装置
CN104475976B (zh) * 2014-11-19 2016-04-06 江苏大学 磁粉诱导式激光等离子刻蚀绝缘透明材料的方法和装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070283786A1 (en) * 2006-06-09 2007-12-13 Gregor Kappmeyer Mehod for the manufacture of a cutting tool
TW200824825A (en) * 2006-12-15 2008-06-16 Jia-Lung Kuo Device and method for laser assisted electrical discharge machining
EP2062671A1 (en) * 2007-11-23 2009-05-27 Siemens Aktiengesellschaft Apparatus and method to machine holes
CN102725090A (zh) * 2009-12-08 2012-10-10 欧陆汽车有限责任公司 用于加工工件的方法和装置
CN103501949A (zh) * 2010-12-31 2014-01-08 戴蒙得创新股份有限公司 在多晶体中产生孔和埋头孔的方法
CN103028799A (zh) * 2012-12-28 2013-04-10 江苏大学 一种冲孔与电火花复合的微细阵列通孔加工方法和装置

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107589157A (zh) * 2017-11-01 2018-01-16 青岛科技大学 光致电化学传感器
CN108977866B (zh) * 2018-08-21 2023-07-21 烟台大学 一种激光辅助喷雾微弧氧化装置
CN108977866A (zh) * 2018-08-21 2018-12-11 烟台大学 一种激光辅助喷雾微弧氧化装置
CN109365932A (zh) * 2018-10-30 2019-02-22 沈阳理工大学 带热障涂层叶片气膜孔激光电解组合微细加工新方法及装置
CN110293272A (zh) * 2019-08-08 2019-10-01 安徽理工大学 一种用于半圆孔的电火花电解放电复合加工试验装置
CN110293272B (zh) * 2019-08-08 2024-04-26 安徽理工大学 一种用于半圆孔的电火花电解放电复合加工试验装置
CN113681155A (zh) * 2021-08-06 2021-11-23 江苏大学 一种激光辅助电化学处理孔质量的方法及装置
CN113681155B (zh) * 2021-08-06 2022-08-23 江苏大学 一种激光辅助电化学处理孔质量的方法及装置
CN113843460A (zh) * 2021-09-22 2021-12-28 清华大学 一种激光电解复合加工用光电液耦合传导管电极
CN114012268A (zh) * 2021-10-13 2022-02-08 浙江师范大学 一种光伏增效微结构紫外激光加工装置及方法
CN114054781A (zh) * 2021-11-18 2022-02-18 长沙理工大学 一种电弧增材与电化学减材复合制造装置及方法
CN114131205A (zh) * 2021-12-02 2022-03-04 苏州万光激光刀模有限公司 一种全自动激光镭射机用可旋转安装平台
CN114131205B (zh) * 2021-12-02 2024-02-06 昆山迪翔模塑科技有限公司 一种全自动激光镭射机用可旋转安装平台
CN115194271A (zh) * 2022-08-23 2022-10-18 深圳技术大学 一种面向3d打印金属构件的激光与电化学复合抛光装置
CN115194271B (zh) * 2022-08-23 2024-05-03 深圳技术大学 一种面向3d打印金属构件的激光与电化学复合抛光装置
CN116100097A (zh) * 2023-02-23 2023-05-12 江苏理工学院 一种多孔电极内充液电解电火花加工系统与方法
CN119870795A (zh) * 2025-01-15 2025-04-25 江苏昶屹电子科技有限公司 一种笔记本电脑外壳加工焊接设备
CN119870795B (zh) * 2025-01-15 2025-10-31 江苏昶屹电子科技有限公司 一种笔记本电脑外壳加工焊接设备

Also Published As

Publication number Publication date
GB201800094D0 (en) 2018-02-21
CN104942388B (zh) 2017-11-17
CN104942388A (zh) 2015-09-30
GB2557746A (en) 2018-06-27
GB2557746B (en) 2021-03-10

Similar Documents

Publication Publication Date Title
WO2016201761A1 (zh) 电化学放电与激光复合加工材料的装置和方法
CN106424987B (zh) 管电极放电与激光辐照的同轴复合加工方法和装置
US11295953B2 (en) Method and apparatus for micromachining semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry
CN108526627B (zh) 一种半导体材料激光电化学复合微加工方法及装置
Nguyen et al. Experimental investigation of ECDM for fabricating micro structures of quartz
CN103008807B (zh) 基于力反馈控制进给系统的电化学放电加工装置与方法
CN105215487A (zh) 一种面向非导电硬脆材料的微细高效加工方法及装置
CN106735866A (zh) 背向多焦点激光和电化学复合加工半导体材料的装置和方法
CN103920948A (zh) 可控气膜微细电化学放电线切割加工装置及方法
Paul et al. Improvement in machining rate with mixed electrolyte in ECDM process
CN102528187B (zh) 倒置式电化学放电加工方法及装置
Coteaţă et al. Electrochemical discharge machining of small diameter holes
Wang et al. A green and precision compound machining method for glass micro components–Ultrasonic assisted electrochemical discharge grinding with multi-hole tube electrode
Harugade et al. Experimental investigation of high speed tool rotation on heat affected zone and over cut in ECDM
Wang et al. Profile characteristics and evolution in combined laser and electrochemical machining
CN205129105U (zh) 一种面向非导电硬脆材料的微细高效加工装置
Arab et al. Electrochemical discharge machining of soda lime glass for MEMS applications
Jiang et al. Experimental investigation of drilling incorporated electrochemical discharge machining
Zhan et al. Observation and modulation of gas film and plasma behavior in electrolytic plasma hybrid etching of semiconductor material 4H–SiC
Rajput et al. Performance analysis on the effect of different electrolytes during glass micro drilling operation using ECDM
CN108971745A (zh) 一种激光诱导放电表面微结构加工方法及装置
Bhuyan et al. Experimental investigations of traveling wire electro-chemical spark machining (TW-ECSM) of borosilicate glass
Zhao et al. An investigation into laserassisted electrochemical discharge machining of transparent insulating hard-brittle material. Micromachines 12: 1–12
CN108890055B (zh) 一种利用快走丝电火花制备微细气泡表面的方法
Kunar et al. Laser‐Assisted Electrochemical Discharge Micromachining

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15895334

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 201800094

Country of ref document: GB

Kind code of ref document: A

Free format text: PCT FILING DATE = 20150721

122 Ep: pct application non-entry in european phase

Ref document number: 15895334

Country of ref document: EP

Kind code of ref document: A1