WO2016190320A1 - Heat treatment device and heat treatment method - Google Patents

Heat treatment device and heat treatment method Download PDF

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Publication number
WO2016190320A1
WO2016190320A1 PCT/JP2016/065344 JP2016065344W WO2016190320A1 WO 2016190320 A1 WO2016190320 A1 WO 2016190320A1 JP 2016065344 W JP2016065344 W JP 2016065344W WO 2016190320 A1 WO2016190320 A1 WO 2016190320A1
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WO
WIPO (PCT)
Prior art keywords
heat treatment
thin plate
plate member
atmosphere
heating
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PCT/JP2016/065344
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French (fr)
Japanese (ja)
Inventor
恵里 平山
将大 岩川
慎太郎 鈴木
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Ntn株式会社
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Priority claimed from JP2016102150A external-priority patent/JP6084738B2/en
Application filed by Ntn株式会社 filed Critical Ntn株式会社
Publication of WO2016190320A1 publication Critical patent/WO2016190320A1/en

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    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/18Hardening; Quenching with or without subsequent tempering
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/40Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for rings; for bearing races
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00Bearings with rolling contact, for exclusively rotary movement
    • F16C19/22Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings
    • F16C19/30Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for axial load mainly
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30Parts of ball or roller bearings
    • F16C33/58Raceways; Race rings
    • F16C33/64Special methods of manufacture

Definitions

  • the present invention relates to a heat treatment apparatus and a heat treatment method, and more particularly, to a heat treatment apparatus and a heat treatment method for a thrust bearing component.
  • the thrust bearing includes a pair of race rings 1 and 2, rollers (needle rollers) 3 disposed between the pair of race rings 1 and 2, and adjacent needle rollers. And a cage 4 that holds the interval.
  • thermosetting treatment For example, in the case of low carbon steel used for a thrust bearing race, dozens of ⁇ m is hardened from the surface by gas carburizing treatment or vacuum treatment. Then, in order to obtain the hardness according to a use application, the tempering process which makes a structure
  • Patent Document 1 there is one in which a steel sheet is finished into a raceway shape by press working and then subjected to heat treatment including carbonitriding and high temperature tempering.
  • Patent Document 1 the oxide film (scale) generated on the surface of the thrust bearing component (orbital ring) by heat treatment is removed.
  • FIG. 5 shows a case where gas carburizing and quenching is performed
  • FIG. 6 shows a case where vacuum carburizing and quenching is performed. That is, in FIG. 5, gas carburizing and quenching is performed (step S1), and then a temper process (tempering process) (step S2) is performed, followed by a grinding process (scale removal process) (step S3). . In addition, after a grinding process, an inspection process (step S4) will be performed.
  • step S5 vacuum carburizing and quenching is performed (step S5), and then a temper process (tempering process) (step S6) is performed, followed by a grinding process (step S7).
  • An inspection process (step S8) is performed.
  • oxide scale adheres to the product surface in the quenching and tempering process, and therefore a process for removing this scale is required.
  • vacuum carburization is performed, adhesion of oxide scale is hardly observed, but in the next tempering process (tempering process), a temper color is adhered. Therefore, there is a case where the adhesion of oxide scale is suppressed by bright tempering in which the atmosphere in the furnace is adjusted.
  • this method since a large amount of processing is performed in a large batch type furnace, a lot of time is required for adjusting the atmosphere, raising the temperature of the workpiece, and soaking.
  • the present invention is a heat treatment apparatus that can perform atmosphere adjustment and temperature raising / soaking of workpieces in a short time, and can process each workpiece inline without adhesion of oxide scale. And a heat treatment method.
  • the heat treatment apparatus of the present invention is a heat treatment apparatus for performing heat treatment on a thin plate member, and is set to an upstream chamber in which a low oxygen atmosphere having an oxygen concentration of a predetermined value or less and a low oxygen atmosphere having an oxygen concentration of the predetermined value or less.
  • a downstream chamber for placing in the atmosphere, and a non-heated thin plate member is introduced into the upstream chamber so that the oxygen concentration in the upstream chamber is a low oxygen atmosphere below the predetermined value, and this low oxygen atmosphere is set.
  • the thin plate member In the processing chamber, the thin plate member is disposed on the heating plate and heated uniformly, and after the uniform heating, the thin plate member is disposed on the cooling plate in the processing chamber and cooled, After placement downstream side chamber of the following low-oxygen atmosphere value, taken out sheet member downstream side chamber is adjusted to the atmosphere.
  • the thin plate member can be placed in a low oxygen atmosphere, and the heating process and the cooling process are always performed at a predetermined low oxygen content.
  • the treatment can be performed in a treatment chamber maintained in an atmosphere, and the atmosphere adjustment can be facilitated.
  • the heating means is constituted by a heating plate heated to a predetermined temperature, it can be simplified as the heating means, and the work can be soaked in a short time.
  • the cooling means can be constituted by a cooling plate cooled to a predetermined temperature, can be a simple cooling means, and can cool the heated workpiece in a short time.
  • the tempering step can be performed on the thin plate member that has been subjected to non-oxidation quenching in a low oxygen atmosphere by the heat treatment apparatus.
  • the predetermined value of oxygen concentration is 0.01%. If the oxygen concentration is 0.01% or less, it is possible to effectively prevent the workpiece from being oxidized.
  • the heating temperature of this heating plate is preferably 300 ° C. By heating the heating plate to 300 ° C. in this way, it can be heated to an optimum heating temperature at the time of tempering the workpiece.
  • the cooling temperature of the cooling plate is preferably 10-30 ° C.
  • a thin plate member can be used as a component of a thrust bearing. Moreover, it can be set as a bearing ring as a component.
  • the heat treatment method of the present invention is a heat treatment method for performing heat treatment on a thin plate member, and after adjusting the non-heated thin plate member to an upstream chamber, the oxygen concentration is adjusted to a low oxygen atmosphere of 0.01% or less, and thereafter Then, after placing the thin plate member on a heating plate heated to a predetermined heating temperature in a processing chamber having a low oxygen atmosphere with an oxygen concentration of 0.01% or less at all times, The thin plate member is placed on a cooling plate cooled to a predetermined cooling temperature to cool the thin plate member. Next, the thin plate member is placed in a downstream chamber having a low oxygen atmosphere with an oxygen concentration of 0.01% or less. After the placement, the atmosphere in the downstream chamber is adjusted to the atmosphere.
  • work can be mounted on the heating plate heated to predetermined temperature, and it can heat-treat to a workpiece
  • the workpiece can be placed on the cooling plate cooled to a predetermined temperature, and the heated workpiece can be cooled in a short time.
  • the atmosphere adjustment can be simplified and the temperature equalization for the workpiece can be achieved in a short time, and the productivity is excellent.
  • the configuration of the heating means and the cooling means can be simplified, and the equipment of the heat treatment apparatus can be simplified and downsized.
  • oxidation of the thin plate member, which is a workpiece can be prevented, adhesion of oxide scale can be avoided, eliminating the need for scale removal work after heat treatment, and in-line processing in a short time without adhesion of oxide scale. Is possible.
  • the predetermined value of the oxygen concentration is 0.01%, and by making the oxygen concentration 0.01% or less of the upstream chamber, the downstream chamber, and the processing chamber, stable oxidation can be prevented. Further, when the heating plate is heated to 300 ° C., it can be heated to an optimum heating temperature at the time of tempering the workpiece.
  • FIG. 1 is a simplified overall view of a heat treatment apparatus of the present invention. It is sectional drawing of the thrust bearing provided with the bearing ring to which heat processing is performed with the heat processing apparatus shown in the said FIG. It is a block diagram of the heat processing method of this invention. It is a flowchart figure which shows the heat processing method of this invention. It is a block diagram which shows a gas carburizing quenching process. It is a block diagram which shows a vacuum carburizing and quenching process. It is sectional drawing of a thrust bearing.
  • FIG. 2 is a thrust bearing provided with bearing components subjected to heat treatment by the heat treatment apparatus shown in FIG. 1 according to the present invention. That is, this thrust bearing holds a distance between a pair of race rings 11, 12 and rollers (needle rollers) 13 disposed between the pair of race rings 11, 12, and the adjacent needle rollers. And a container 14.
  • the bearing ring 11 has a bearing ring main body 11a made of a flat ring body and an inner flange portion 11b connected to the inner peripheral edge of the bearing ring main body 11a.
  • the other bearing ring 11 has a flat ring body.
  • the bearing ring main body 12a and the outer flange portion 12b connected to the outer peripheral edge of the bearing ring main body 12a.
  • bearing rings 11 and 12 are thin plate members which are bearing components subjected to heat treatment by the heat treatment apparatus shown in FIG. For this reason, the races 11 and 12 are made of a material generally used for a thrust bearing race represented by a steel plate or the like.
  • the heat treatment apparatus includes an upstream chamber 15 as a front chamber, a downstream chamber 16 as a rear chamber, and a processing chamber 17 disposed between the upstream chamber 15 and the downstream chamber 16.
  • Nitrogen gas (N 2) generated by a nitrogen gas generator (not shown) is supplied to the upstream chamber 15, the downstream chamber 16, and the processing chamber 17 to form a low oxygen atmosphere (nitrogen atmosphere).
  • the processing chamber 17 is always set to a predetermined oxygen concentration (for example, 0.01% or less).
  • the downstream chamber 16 is for placing the thin plate member in the atmosphere from a low oxygen atmosphere below the predetermined value.
  • nitrogen generated by using a nitrogen gas generator such as a PSA (adsorption) type nitrogen gas generator, a membrane type nitrogen gas generator, or a cryogenic nitrogen gas generator is used.
  • a nitrogen gas generator such as a PSA (adsorption) type nitrogen gas generator, a membrane type nitrogen gas generator, or a cryogenic nitrogen gas generator is used.
  • the upstream chamber 15 and the downstream chamber 16 are provided with mounting surfaces 21 and 22 on which the bearing rings 11 and 12 that are bearing components, that is, the workpiece W that is a thin plate member is mounted.
  • the upstream chamber 15 and the downstream chamber 16 can adjust the oxygen concentration from the atmosphere to a low oxygen atmosphere.
  • a heating plate 23 as a heating unit and a cooling plate 24 as a cooling unit are arranged.
  • the heating plate 23 can be configured by a plate with a built-in heating coil, and the temperature of the workpiece placement surface 23a can be high-frequency heated to a predetermined high temperature.
  • the heating temperature of the heating plate 23 can be controlled by control means (not shown).
  • the cooling plate 24 can be constituted by a plate with a built-in cooling pipe through which a cooling medium circulates, and the temperature of the work placement surface 24a can be cooled to a predetermined low temperature. Also in the cooling plate 24, the cooling temperature can be controlled by control means (not shown).
  • the heating temperature of the heating plate 23 can be controlled by adjusting the voltage applied to the heating coil, and the cooling temperature of the cooling plate 24 can be controlled by adjusting the temperature of the cooling medium circulating in the cooling pipe.
  • the cooling means of the heating plate 23 and the cooling plate 24 keeps the temperature constant by PID control.
  • the workpiece W is first put into the upstream chamber 15 and then transferred onto the mounting surface 23a of the heating plate 23 of the processing chamber 17, and then the mounting surface 24a of the cooling plate 24 of the processing chamber 17. It is arranged on the upper side and then conveyed to the downstream chamber 16. That is, as shown in FIG. 3, the heat treatment method according to the present invention includes a thin plate member supplying step 50 for supplying the workpiece W to the upstream chamber 15, and a low oxygen atmosphere forming step 51 for setting the upstream chamber 15 to a low oxygen atmosphere.
  • a thin plate member discharging step 54 is provided for supplying members to the downstream chamber 16 and adjusting the inside of the downstream chamber 16 from the low oxygen atmosphere to the atmosphere.
  • the work W is sequentially transferred from the upstream chamber 15 to the processing chamber 17 to the downstream chamber 16.
  • a conveying means for conveying the workpiece W is provided, and the conveying means can be constituted by a conveying conveyor or the like.
  • the processed product after quenching is hard and excellent in wear resistance, but it is brittle, unstable, and has high internal stress. Therefore, it is preferable to perform tempering by heating to a temperature below the A1 transformation point. By this treatment, the structure becomes uniform, the internal stress is reduced, and the toughness is improved. The performance of the processed product is affected by the hardness, and the hardness is adjusted by the tempering temperature and time.
  • this heat treatment apparatus is used for tempering the components of a thrust bearing that has been previously quenched (for example, vacuum carburized and quenched), for example, the race ring (inner ring) 11.
  • a thrust bearing that has been previously quenched (for example, vacuum carburized and quenched), for example, the race ring (inner ring) 11.
  • the vacuum carburizing and quenching carbon is infiltrated into the surface layer of steel and the carbon concentration is increased before quenching to obtain a hard surface and wear resistance.
  • the inside has low hardness, high toughness can be obtained.
  • the treatment is performed in a vacuum furnace, there is little grain boundary oxidation or decarburization in the surface layer portion.
  • step S10 a method of tempering the workpiece W, which is the races 11 and 12, using this heat treatment apparatus.
  • the workpiece W is arranged in the upstream chamber 15. And the inside of this upstream chamber 15 is made into a low oxygen atmosphere (step S10).
  • nitrogen gas is supplied from a nitrogen gas generator (not shown) to make the nitrogen atmosphere a low oxygen atmosphere having an oxygen concentration of 0.01% or less.
  • work W as the bearing rings 11 and 12 used the outer diameter dimension D which was 100 mm or less, plate
  • the workpiece W is placed on the placement surface 23a of the heating plate 23 of the processing chamber 17 in a low oxygen atmosphere (oxygen concentration is 0.01% or less).
  • a low oxygen atmosphere having an oxygen concentration of 0.01% or less is constantly maintained. For this reason, by placing the workpiece W on the heating plate 23, the workpiece W is placed under the low oxygen atmosphere. Heated.
  • the heating temperature of the heating plate 23 is about 300 ° C.
  • the workpiece W is uniformly heated to about 300 ° C. in a short time (step S11).
  • the entire workpiece is within 300 ° C. ⁇ 10 ° C. in 30 seconds.
  • it is placed on the mounting surface 24a of the cooling plate 24 that is cooled to about 10 to 30 ° C. in the processing chamber 17, for example.
  • the workpiece W is cooled in a short time in a low oxygen atmosphere (step S12).
  • tempering after heating to a relatively high temperature below the transformation point and then cooling at an appropriate rate can be performed in a low oxygen atmosphere in a short time.
  • the workpiece W is disposed on the placement surface 22 of the downstream chamber 16.
  • the atmosphere is adjusted to the atmosphere after being introduced into the downstream chamber 16 in a low oxygen atmosphere having an oxygen concentration of 0.01% or less.
  • the workpiece W is placed in the atmosphere (step S13).
  • the thin plate member which is the work W can be placed in a low oxygen atmosphere, and the heating process and the cooling process are always maintained in a predetermined low oxygen atmosphere. It can be performed in the processing chamber 17, and the atmosphere adjustment can be facilitated.
  • the heating means is constituted by the heating plate 23 heated to a predetermined temperature, the heating means can be simplified, and the workpiece W can be subjected to soaking in a short time.
  • the cooling means can be constituted by the cooling plate 24 cooled to a predetermined temperature, can be a simple cooling means, and can cool the heated workpiece W in a short time.
  • the atmosphere adjustment can be simplified and the temperature uniformity for the workpiece W can be achieved in a short time, and the productivity is excellent.
  • the configuration of the heating means and the cooling means can be simplified, and the equipment of the heat treatment apparatus can be simplified and downsized.
  • the oxidation of the thin plate member that is the workpiece W can be prevented, adhesion of oxide scale can be avoided, and after heat treatment, there is no need for scale removal work, and in-line can be achieved in a short time without adhesion of oxide scale. Processing is possible.
  • the predetermined value of the oxygen concentration is 0.01%, and by setting the oxygen concentration to 0.01% or less of the oxygen concentration in the upstream chamber 15 and the processing chamber 17, stable oxidation can be prevented. Further, when the heating plate is heated to 300 ° C., the workpiece W can be heated to an optimum heating temperature during tempering.
  • the atmosphere is not limited to a nitrogen atmosphere, and may be an atmosphere of an inert gas such as argon other than nitrogen or a reduced pressure atmosphere.
  • the oxygen concentration in the low oxygen atmosphere was set to 0.01% or less, the oxygen concentration range can be variously set within 0.01% or less. That is, the lower limit can be set according to the capacity of the nitrogen gas generator to be used.
  • the heating temperature of the heating plate 23 is not limited to 300 ° C.
  • the tempering temperature can be set to about 550.
  • this tempering temperature can be set.
  • the cooling temperature of the cooling plate 24 can be variously changed according to the heating temperature of the heating plate 23 or the like.
  • the tempering process is performed in a low oxygen atmosphere (nitrogen atmosphere) with an oxygen concentration of 0.01% or less (the present invention system), and the conventional tempering process (the present system).
  • Table 1 below shows the result of comparison with the case of performing tempering treatment in the atmosphere.
  • the heating temperature was 200 ° C., and the heating temperature was 60 minutes.
  • the heating temperature was 300 ° C., and the heating temperature was 0.5 minutes (30 seconds).
  • the cooling temperature was 10-30 ° C., and the cooling temperature was 10-30 seconds.
  • a thrust bearing race and an inner race were used, and the race 11 shown in FIG. 2 was used.
  • the outer diameter D was 100 mm
  • the plate thickness T was 1 mm
  • the heel height H was 6 mm.
  • the workpiece W is previously subjected to vacuum carburizing and quenching. As can be seen from Table 1, the scale adheres in the conventional method, but the scale does not adhere in the method of the present invention.
  • the thin plate member constituting the workpiece W may be a bearing ring (inner ring) or a bearing ring (outer ring) which is a thrust bearing component.
  • the members other than the thrust bearing components for example, various thin plate members used in various machines such as a transport machine, a construction machine, and a machine tool may be used.

Abstract

According to the present invention, a thin plate member in an unheated state is introduced into an upstream-side chamber having a low oxygen atmosphere with an oxygen concentration of 0.01% or less. Thereafter, inside a treatment chamber having a low oxygen atmosphere with a constant oxygen concentration of 0.01% or less, the thin plate member is loaded onto a heating plate heated to a predetermined heating temperature and the thin plate member is heated. Inside the treatment chamber, the thin plate member is loaded onto a cooling plate cooled to a predetermined cooling temperature and the thin plate member is cooled. Next, the thin plate member is left in the atmosphere.

Description

熱処理装置および熱処理方法Heat treatment apparatus and heat treatment method
 本発明は、熱処理装置および熱処理方法に関し、特に、スラスト軸受構成部品に対する熱処理装置および熱処理方法に関する。 The present invention relates to a heat treatment apparatus and a heat treatment method, and more particularly, to a heat treatment apparatus and a heat treatment method for a thrust bearing component.
 スラスト軸受は、例えば図7に示すように、一対の軌道輪1,2と、この一対の軌道輪1,2間に配設されるころ(針状ころ)3と、隣接する針状ころの間隔を保持する保持器4とを備える。 For example, as shown in FIG. 7, the thrust bearing includes a pair of race rings 1 and 2, rollers (needle rollers) 3 disposed between the pair of race rings 1 and 2, and adjacent needle rollers. And a cage 4 that holds the interval.
 このようなスラスト軸受では、軌道輪1,2には大きなスラスト荷重が負荷される。そのため、軌道輪に熱硬化処理を施すのが一般的である。例えば、スラスト軸受軌道輪に用いられる低炭素鋼の場合はガス浸炭処理や真空処理にて表面から十数μmを硬化させる。その後、使用用途に応じた硬さを得るために、組織を均一化する焼戻処理が行われる。 In such a thrust bearing, a large thrust load is applied to the races 1 and 2. For this reason, it is common to subject the raceway to a thermosetting treatment. For example, in the case of low carbon steel used for a thrust bearing race, dozens of μm is hardened from the surface by gas carburizing treatment or vacuum treatment. Then, in order to obtain the hardness according to a use application, the tempering process which makes a structure | tissue uniform is performed.
 従来には、プレス加工によって鋼板を軌道輪形状に仕上げた後、浸炭窒化処理と高温焼戻しを含む熱処理を施すものがある(特許文献1)。この場合、熱処置によってスラスト軸受構成部品(軌道輪)の表面に生じた酸化被膜(スケール)を除去するものである。 Conventionally, there is one in which a steel sheet is finished into a raceway shape by press working and then subjected to heat treatment including carbonitriding and high temperature tempering (Patent Document 1). In this case, the oxide film (scale) generated on the surface of the thrust bearing component (orbital ring) by heat treatment is removed.
 図5はガス浸炭焼入れを行う場合を示し、図6は真空浸炭焼入れを行う場合を示している。すなわち、図5では、ガス浸炭焼入れを行い(ステップS1)、その後、テンパー工程(焼戻工程)(ステップS2)を行った後、研削工程(スケール除去工程)(ステップS3)を行うことになる。なお、研削工程後においては、検査工程(ステップS4)を行うことになる。 FIG. 5 shows a case where gas carburizing and quenching is performed, and FIG. 6 shows a case where vacuum carburizing and quenching is performed. That is, in FIG. 5, gas carburizing and quenching is performed (step S1), and then a temper process (tempering process) (step S2) is performed, followed by a grinding process (scale removal process) (step S3). . In addition, after a grinding process, an inspection process (step S4) will be performed.
 また、図6では、真空浸炭焼入れを行い(ステップS5)、その後、テンパー工程(焼戻工程)(ステップS6)を行った後、研削工程(ステップS7)を行い、さらに、研削工程後において、検査工程(ステップS8)を行うことになる。 In FIG. 6, vacuum carburizing and quenching is performed (step S5), and then a temper process (tempering process) (step S6) is performed, followed by a grinding process (step S7). An inspection process (step S8) is performed.
特開2008-82379号公報JP 2008-82379 A
 ガス浸炭焼入れでは、焼入・焼戻工程で、製品表面に酸化スケールが付着することから、このスケールを除去する工程を必要としていた。また、真空浸炭を行った場合、酸化スケールの付着はほとんど見られないが、次工程の焼戻工程(テンパー工程)において、テンパーカラーが付着する。そのため、炉内の雰囲気を調整した光輝焼戻しにて酸化スケールの付着を抑制する場合がある。しかしながら、この方法では、大型のバッチ式の炉にて、大量に処理を行う方式のため、雰囲気調整、ワークの昇温、及び均熱に多くの時間が必要となる。 In gas carburizing and quenching, oxide scale adheres to the product surface in the quenching and tempering process, and therefore a process for removing this scale is required. In addition, when vacuum carburization is performed, adhesion of oxide scale is hardly observed, but in the next tempering process (tempering process), a temper color is adhered. Therefore, there is a case where the adhesion of oxide scale is suppressed by bright tempering in which the atmosphere in the furnace is adjusted. However, in this method, since a large amount of processing is performed in a large batch type furnace, a lot of time is required for adjusting the atmosphere, raising the temperature of the workpiece, and soaking.
 そこで、本発明は、雰囲気調整、及びワークの昇温・均熱を短時間で行うことが可能となり、酸化スケールの付着なしに、1個ずつのワークをインライン的に処理できることが可能な熱処理装置及び熱処理方法を提供する。 Accordingly, the present invention is a heat treatment apparatus that can perform atmosphere adjustment and temperature raising / soaking of workpieces in a short time, and can process each workpiece inline without adhesion of oxide scale. And a heat treatment method.
 本発明の熱処理装置は、薄板部材に対して熱処理を行う熱処理装置であって、酸素濃度が所定値以下の低酸素雰囲気となる上流側室と、酸素濃度が前記所定値以下の低酸素雰囲気に設定されている処理室と、この処理室内に配置された加熱手段としての加熱プレートと、この処理室内に配置された冷却手段としての冷却プレートと、薄板部材を前記所定値以下の低酸素雰囲気から、大気下に置くための下流側室とを備え、上流側室に非加熱状態の薄板部材を投入して、この上流側室の酸素濃度を前記所定値以下の低酸素雰囲気とし、この低酸素雰囲気に設定されている処理室内において、薄板部材を加熱プレート上に配置して均等に加熱するとともに、その均等加熱後に処理室内の冷却プレート上に配置して冷却して、この薄板部材を前記所定値以下の低酸素雰囲気の下流側室に配置後、下流側室を大気下に調整して薄板部材を取り出す。 The heat treatment apparatus of the present invention is a heat treatment apparatus for performing heat treatment on a thin plate member, and is set to an upstream chamber in which a low oxygen atmosphere having an oxygen concentration of a predetermined value or less and a low oxygen atmosphere having an oxygen concentration of the predetermined value or less. A processing plate, a heating plate as a heating means arranged in the processing chamber, a cooling plate as a cooling means arranged in the processing chamber, and a thin plate member from a low oxygen atmosphere below the predetermined value, A downstream chamber for placing in the atmosphere, and a non-heated thin plate member is introduced into the upstream chamber so that the oxygen concentration in the upstream chamber is a low oxygen atmosphere below the predetermined value, and this low oxygen atmosphere is set. In the processing chamber, the thin plate member is disposed on the heating plate and heated uniformly, and after the uniform heating, the thin plate member is disposed on the cooling plate in the processing chamber and cooled, After placement downstream side chamber of the following low-oxygen atmosphere value, taken out sheet member downstream side chamber is adjusted to the atmosphere.
 本発明の熱処理装置によれば、ワークである薄板部材を、上流側室へ供給すれば、この薄板部材を低酸素雰囲気下に置くことができ、かつ、加熱工程及び冷却工程を常時所定の低酸素雰囲気に維持されている処理室で行うことができて、雰囲気調整の容易化を図ることができる。また、加熱手段は、所定温度に加熱される加熱プレートにて構成しているので、加熱手段として簡易なものとでき、しかも、ワークに対して、短時間に均熱処理することができる。冷却手段は、所定温度に冷却された冷却プレートにて構成することができ、冷却手段として簡易なものとでき、しかも、加熱されたワークを、短時間に冷却することができる。 According to the heat treatment apparatus of the present invention, if a thin plate member as a workpiece is supplied to the upstream chamber, the thin plate member can be placed in a low oxygen atmosphere, and the heating process and the cooling process are always performed at a predetermined low oxygen content. The treatment can be performed in a treatment chamber maintained in an atmosphere, and the atmosphere adjustment can be facilitated. Further, since the heating means is constituted by a heating plate heated to a predetermined temperature, it can be simplified as the heating means, and the work can be soaked in a short time. The cooling means can be constituted by a cooling plate cooled to a predetermined temperature, can be a simple cooling means, and can cool the heated workpiece in a short time.
 前記熱処理装置によって、低酸素雰囲気下の無酸化焼入れが施された薄板部材に対して、焼戻工程を行うことができる。 The tempering step can be performed on the thin plate member that has been subjected to non-oxidation quenching in a low oxygen atmosphere by the heat treatment apparatus.
 酸素濃度の所定値としては0.01%である。酸素濃度が0.01%以下となれば、ワークが酸化するのを有効に防止できる。また、この加熱プレートの加熱温度としては300℃とするのが好ましい。このように加熱プレートを300℃に加熱することによって、ワークの焼戻し時における最適な加熱温度に加熱することができる。前記冷却プレートの冷却温度が10~30℃であるのが好ましい。 The predetermined value of oxygen concentration is 0.01%. If the oxygen concentration is 0.01% or less, it is possible to effectively prevent the workpiece from being oxidized. The heating temperature of this heating plate is preferably 300 ° C. By heating the heating plate to 300 ° C. in this way, it can be heated to an optimum heating temperature at the time of tempering the workpiece. The cooling temperature of the cooling plate is preferably 10-30 ° C.
 薄板部材を、スラスト軸受の構成部品とすることができる。また、構成部品としては、軌道輪とすることができる。 A thin plate member can be used as a component of a thrust bearing. Moreover, it can be set as a bearing ring as a component.
 本発明の熱処理方法は、薄板部材に対して熱処理を行う熱処理方法であって、非加熱状態の薄板部材を上流側室に投入後に酸素濃度が0.01%以下の低酸素雰囲気に調整し、その後、常時酸素濃度が0.01%以下の低酸素雰囲気となっている処理室内で、所定加熱温度に加熱された加熱プレート上に載置して、この薄板部材を加熱した後、この処理室内で、所定冷却温度に冷却された冷却プレート上に載置して、この薄板部材を冷却し、次に、酸素濃度が0.01%以下の低酸素雰囲気となっている下流側室にこの薄板部材を載置後に下流側室内の雰囲気を大気下に調整するものである。 The heat treatment method of the present invention is a heat treatment method for performing heat treatment on a thin plate member, and after adjusting the non-heated thin plate member to an upstream chamber, the oxygen concentration is adjusted to a low oxygen atmosphere of 0.01% or less, and thereafter Then, after placing the thin plate member on a heating plate heated to a predetermined heating temperature in a processing chamber having a low oxygen atmosphere with an oxygen concentration of 0.01% or less at all times, The thin plate member is placed on a cooling plate cooled to a predetermined cooling temperature to cool the thin plate member. Next, the thin plate member is placed in a downstream chamber having a low oxygen atmosphere with an oxygen concentration of 0.01% or less. After the placement, the atmosphere in the downstream chamber is adjusted to the atmosphere.
 本発明の熱処理方法によれば、ワークである薄板部材の酸化を防止できる。また、所定温度に加熱される加熱プレート上にワークを載置することができ、ワークに対して、短時間に均熱処理することができる。所定温度に冷却された冷却プレート上にワークを載置することができ、加熱されたワークを、短時間に冷却することができる。 According to the heat treatment method of the present invention, it is possible to prevent oxidation of a thin plate member that is a workpiece. Moreover, a workpiece | work can be mounted on the heating plate heated to predetermined temperature, and it can heat-treat to a workpiece | work in a short time. The workpiece can be placed on the cooling plate cooled to a predetermined temperature, and the heated workpiece can be cooled in a short time.
 本発明では、雰囲気調整の簡素化および短時間にワークに対する均熱化を達成でき、生産性に優れる。しかも、加熱手段及び冷却手段の構成の簡略化を図ることができ、熱処理装置の設備の簡略化及び小型化を図ることができる。しかも、ワークである薄板部材の酸化を防止できるので、酸化スケールの付着を回避することができ、熱処理後において、スケール除去作業の必要がなくなり、酸化スケールの付着無しに短時間でインライン的な処理が可能となる。 In the present invention, the atmosphere adjustment can be simplified and the temperature equalization for the workpiece can be achieved in a short time, and the productivity is excellent. In addition, the configuration of the heating means and the cooling means can be simplified, and the equipment of the heat treatment apparatus can be simplified and downsized. Moreover, since oxidation of the thin plate member, which is a workpiece, can be prevented, adhesion of oxide scale can be avoided, eliminating the need for scale removal work after heat treatment, and in-line processing in a short time without adhesion of oxide scale. Is possible.
 酸素濃度の所定値としては0.01%であり、上流側室、下流側室及び処理室の酸素濃度の0.01%以下とすることによって、安定した酸化防止が可能となる。また、加熱プレートが300℃に加熱されるものでは、ワークの焼戻し時における最適な加熱温度に加熱することができる。 The predetermined value of the oxygen concentration is 0.01%, and by making the oxygen concentration 0.01% or less of the upstream chamber, the downstream chamber, and the processing chamber, stable oxidation can be prevented. Further, when the heating plate is heated to 300 ° C., it can be heated to an optimum heating temperature at the time of tempering the workpiece.
本発明の熱処理装置の簡略全体図である。1 is a simplified overall view of a heat treatment apparatus of the present invention. 前記図1に示す熱処理装置にて熱処理が施される軌道輪を備えたスラスト軸受の断面図である。It is sectional drawing of the thrust bearing provided with the bearing ring to which heat processing is performed with the heat processing apparatus shown in the said FIG. 本発明の熱処理方法のブロック図である。It is a block diagram of the heat processing method of this invention. 本発明の熱処理方法を示すフローチャート図である。It is a flowchart figure which shows the heat processing method of this invention. ガス浸炭焼入工程を示すブロック図である。It is a block diagram which shows a gas carburizing quenching process. 真空浸炭焼入工程を示すブロック図である。It is a block diagram which shows a vacuum carburizing and quenching process. スラスト軸受の断面図である。It is sectional drawing of a thrust bearing.
 以下本発明の実施の形態を図1~図4に基づいて説明する。図2は、本発明に係る図1に示す熱処理装置にて熱処理が施される軸受構成部品を備えたスラスト軸受である。すなわち、このスラスト軸受は、一対の軌道輪11,12と、この一対の軌道輪11,12間に配設されるころ(針状ころ)13と、隣接する針状ころの間隔を保持する保持器14とを備える。 Hereinafter, embodiments of the present invention will be described with reference to FIGS. FIG. 2 is a thrust bearing provided with bearing components subjected to heat treatment by the heat treatment apparatus shown in FIG. 1 according to the present invention. That is, this thrust bearing holds a distance between a pair of race rings 11, 12 and rollers (needle rollers) 13 disposed between the pair of race rings 11, 12, and the adjacent needle rollers. And a container 14.
 軌道輪11は、平板状リング体からなる軌道輪本体11aと、この軌道輪本体11aの内周縁に連設される内鍔部11bとを有し、他方の軌道輪11は、平板状リング体からなる軌道輪本体12aと、この軌道輪本体12aの外周縁に連設される外鍔部12bとを有するものである。 The bearing ring 11 has a bearing ring main body 11a made of a flat ring body and an inner flange portion 11b connected to the inner peripheral edge of the bearing ring main body 11a. The other bearing ring 11 has a flat ring body. The bearing ring main body 12a and the outer flange portion 12b connected to the outer peripheral edge of the bearing ring main body 12a.
 この軌道輪11,12が図1に示す熱処理装置にて熱処理が施される軸受構成部品である薄板部材である。このため、軌道輪11,12は鋼板等に代表される一般的にスラスト軸受用軌道輪に用いられる素材からなる。 These bearing rings 11 and 12 are thin plate members which are bearing components subjected to heat treatment by the heat treatment apparatus shown in FIG. For this reason, the races 11 and 12 are made of a material generally used for a thrust bearing race represented by a steel plate or the like.
 熱処理装置は、図1に示すように、前室としての上流側室15と、後室としての下流側室16と、これらの上流側室15と下流側室16との間に配置される処理室17とを備える。上流側室15、下流側室16及び処理室17には図示省略の窒素ガス発生装置にて発生させた窒素ガス(N2)が供給されて低酸素雰囲気(窒素雰囲気)とされる。この場合、処理室17は常時所定の酸素濃度(例えば、0.01%以下)に設定される。なお、下流側室16は、後述するように、薄板部材を前記所定値以下の低酸素雰囲気から、大気下に置くためのものである。 As shown in FIG. 1, the heat treatment apparatus includes an upstream chamber 15 as a front chamber, a downstream chamber 16 as a rear chamber, and a processing chamber 17 disposed between the upstream chamber 15 and the downstream chamber 16. Prepare. Nitrogen gas (N 2) generated by a nitrogen gas generator (not shown) is supplied to the upstream chamber 15, the downstream chamber 16, and the processing chamber 17 to form a low oxygen atmosphere (nitrogen atmosphere). In this case, the processing chamber 17 is always set to a predetermined oxygen concentration (for example, 0.01% or less). As will be described later, the downstream chamber 16 is for placing the thin plate member in the atmosphere from a low oxygen atmosphere below the predetermined value.
 すなわち、窒素ガスは、PSA(吸着)式窒素ガス発生装置、膜方式窒素ガス発生装置、及び深冷式窒素ガス発生装置等の窒素ガス発生装置を用いて発生させた窒素を使用する。 That is, as the nitrogen gas, nitrogen generated by using a nitrogen gas generator such as a PSA (adsorption) type nitrogen gas generator, a membrane type nitrogen gas generator, or a cryogenic nitrogen gas generator is used.
 また、上流側室15及び下流側室16には、軸受構成部品である軌道輪11,12、つまり、薄板部材であるワークWが載置される載置面21,22が設けられている。上流側室15及び下流側室16は、大気下から低酸素雰囲気まで酸素濃度の調整が可能である。 Also, the upstream chamber 15 and the downstream chamber 16 are provided with mounting surfaces 21 and 22 on which the bearing rings 11 and 12 that are bearing components, that is, the workpiece W that is a thin plate member is mounted. The upstream chamber 15 and the downstream chamber 16 can adjust the oxygen concentration from the atmosphere to a low oxygen atmosphere.
 この処理室17には、加熱手段としての加熱プレート23と、冷却手段としての冷却プレート24が配置される。加熱プレート23としては、加熱コイルが内蔵されたプレートにて構成でき、そのワーク載置面23aの温度を所定の高温に高周波加熱することができる。この場合、図示省略の制御手段にて、加熱プレート23の加熱温度を制御できる。また、冷却プレート24としては、冷却媒体が循環する冷却パイプが内蔵されたプレートにて構成でき、そのワーク載置面24aの温度を所定の低温に冷却することができる。冷却プレート24においても、図示省略の制御手段にて冷却温度を制御できる。 In the processing chamber 17, a heating plate 23 as a heating unit and a cooling plate 24 as a cooling unit are arranged. The heating plate 23 can be configured by a plate with a built-in heating coil, and the temperature of the workpiece placement surface 23a can be high-frequency heated to a predetermined high temperature. In this case, the heating temperature of the heating plate 23 can be controlled by control means (not shown). Further, the cooling plate 24 can be constituted by a plate with a built-in cooling pipe through which a cooling medium circulates, and the temperature of the work placement surface 24a can be cooled to a predetermined low temperature. Also in the cooling plate 24, the cooling temperature can be controlled by control means (not shown).
 加熱プレート23の加熱温度は、加熱コイルへの印加電圧を調整することによって制御でき、冷却プレート24の冷却温度は、冷却パイプを循環する冷却媒体の温度を調節することによって制御できる。 The heating temperature of the heating plate 23 can be controlled by adjusting the voltage applied to the heating coil, and the cooling temperature of the cooling plate 24 can be controlled by adjusting the temperature of the cooling medium circulating in the cooling pipe.
 加熱プレート23及び冷却プレート24の冷却手段は、PID制御により温度を一定に保持する。 The cooling means of the heating plate 23 and the cooling plate 24 keeps the temperature constant by PID control.
 この熱処理装置においては、ワークWがまず上流側室15に投入され、その後、処理室17の加熱プレート23の載置面23a上に搬送された後、処理室17の冷却プレート24の載置面24a上に配設され、その後、下流側室16に搬送される。すなわち、本発明に係る熱処置方法は、図3に示すように、ワークWを上流側室15に供給する薄板部材供給工程50と、上流側室15を低酸素雰囲気とする低酸素雰囲気形成工程51と、常時低酸素雰囲気になっている処理室17においてワークWである薄板部材を加熱する加熱工程52と、処理室17においてワークWである薄板部材を冷却する冷却工程53と、ワークWである薄板部材を下流側室16に供給し、下流側室16内を低酸素雰囲気から大気下に調整する薄板部材排出工程54とを備える。 In this heat treatment apparatus, the workpiece W is first put into the upstream chamber 15 and then transferred onto the mounting surface 23a of the heating plate 23 of the processing chamber 17, and then the mounting surface 24a of the cooling plate 24 of the processing chamber 17. It is arranged on the upper side and then conveyed to the downstream chamber 16. That is, as shown in FIG. 3, the heat treatment method according to the present invention includes a thin plate member supplying step 50 for supplying the workpiece W to the upstream chamber 15, and a low oxygen atmosphere forming step 51 for setting the upstream chamber 15 to a low oxygen atmosphere. The heating step 52 for heating the thin plate member as the workpiece W in the processing chamber 17 which is always in a low oxygen atmosphere, the cooling step 53 for cooling the thin plate member as the workpiece W in the processing chamber 17, and the thin plate as the workpiece W A thin plate member discharging step 54 is provided for supplying members to the downstream chamber 16 and adjusting the inside of the downstream chamber 16 from the low oxygen atmosphere to the atmosphere.
 なお、ワークWは上流側室15→処理室17→下流側室16へと順次搬送していく。この熱処置装置内において、ワークWを搬送する搬送手段を設けており、搬送手段としては、搬送コンベア等にて構成できる。 The work W is sequentially transferred from the upstream chamber 15 to the processing chamber 17 to the downstream chamber 16. In this heat treatment apparatus, a conveying means for conveying the workpiece W is provided, and the conveying means can be constituted by a conveying conveyor or the like.
 ところで、焼入れ後の加工品は、硬く、耐摩耗性に優れるが、脆く、不安定で、内部応力も高いので、A1変態点以下の温度に加熱する焼戻しを施すのが好ましい。この処理により、組織の均一化が起こり、内部応力が軽減、靱性の向上が得られる。加工品の性能は、硬さに影響され、硬さは焼戻温度、時間で調整することになる。 By the way, the processed product after quenching is hard and excellent in wear resistance, but it is brittle, unstable, and has high internal stress. Therefore, it is preferable to perform tempering by heating to a temperature below the A1 transformation point. By this treatment, the structure becomes uniform, the internal stress is reduced, and the toughness is improved. The performance of the processed product is affected by the hardness, and the hardness is adjusted by the tempering temperature and time.
 そこで、この熱処理装置としては、予め焼入れ(例えば、真空浸炭焼入れ)したスラスト軸受の構成部品、例えば、軌道輪(内輪)11の焼戻しに用いるものである。なお、真空浸炭焼入れとは、鋼の表面層に炭素を侵入させ、炭素濃度を高めてから焼入れをすることで表面は硬く、耐摩耗性が得られる。又、内部は硬さが低いため高靱性が得られる。さらに、真空炉内で処理を行うため、表層部の粒界酸化や脱炭が少ない。 Therefore, this heat treatment apparatus is used for tempering the components of a thrust bearing that has been previously quenched (for example, vacuum carburized and quenched), for example, the race ring (inner ring) 11. In the vacuum carburizing and quenching, carbon is infiltrated into the surface layer of steel and the carbon concentration is increased before quenching to obtain a hard surface and wear resistance. Moreover, since the inside has low hardness, high toughness can be obtained. Furthermore, since the treatment is performed in a vacuum furnace, there is little grain boundary oxidation or decarburization in the surface layer portion.
 次に、軌道輪11、12であるワークWをこの熱処理装置を用いて、焼戻しする方法を図1と図4を用いて説明する。まず、上流側室15内にワークWを配置する。そして、この上流側室15内を低酸素雰囲気とする(ステップS10)。この場合、図示省略の窒素ガス発生装置から窒素ガスを供給して、窒素雰囲気として、酸素濃度が0.01%以下の低酸素雰囲気とする。なお、軌道輪11、12としてのワークWは、その外径寸法Dを100mm以下、板厚Tを1mm以下、鍔高さHを6mm以下としたものを使用した(図2参照)。 Next, a method of tempering the workpiece W, which is the races 11 and 12, using this heat treatment apparatus will be described with reference to FIGS. First, the workpiece W is arranged in the upstream chamber 15. And the inside of this upstream chamber 15 is made into a low oxygen atmosphere (step S10). In this case, nitrogen gas is supplied from a nitrogen gas generator (not shown) to make the nitrogen atmosphere a low oxygen atmosphere having an oxygen concentration of 0.01% or less. In addition, the workpiece | work W as the bearing rings 11 and 12 used the outer diameter dimension D which was 100 mm or less, plate | board thickness T was 1 mm or less, and the collar height H was 6 mm or less (refer FIG. 2).
 その後、このワークWを低酸素雰囲気(酸素濃度が0.01%以下)の処理室17の加熱プレート23の載置面23a上に配置する。この処理室17では、酸素濃度が0.01%以下の低酸素雰囲気が常時維持されており、このため、ワークWを加熱プレート23上に配置することによって、低酸素雰囲気下でこのワークWは加熱される。この場合、加熱プレート23の加熱温度としては、300℃程度とする。 Thereafter, the workpiece W is placed on the placement surface 23a of the heating plate 23 of the processing chamber 17 in a low oxygen atmosphere (oxygen concentration is 0.01% or less). In the processing chamber 17, a low oxygen atmosphere having an oxygen concentration of 0.01% or less is constantly maintained. For this reason, by placing the workpiece W on the heating plate 23, the workpiece W is placed under the low oxygen atmosphere. Heated. In this case, the heating temperature of the heating plate 23 is about 300 ° C.
 これによって、ワークWを短時間で均等に300℃程度に加熱することになる(ステップS11)。この場合、30秒でワーク全域が300℃±10℃以内となる。その後、処理室17内の、例えば、10~30℃程度に冷却されている冷却プレート24の載置面24a上に配置される。これによって、低酸素雰囲気下で短時間にワークWを冷却することになる(ステップS12)。 Thereby, the workpiece W is uniformly heated to about 300 ° C. in a short time (step S11). In this case, the entire workpiece is within 300 ° C. ± 10 ° C. in 30 seconds. Thereafter, it is placed on the mounting surface 24a of the cooling plate 24 that is cooled to about 10 to 30 ° C. in the processing chamber 17, for example. As a result, the workpiece W is cooled in a short time in a low oxygen atmosphere (step S12).
 すなわち、変態点以下の比較的高温に加熱した後、適当な速さで冷却する焼戻しを、低酸素雰囲気下で短時間で行うことができる。その後は、ワークWを下流側室16の載置面22上に配置する。そして、酸素濃度が0.01%以下の低酸素雰囲気の下流側室16に投入後に大気下に雰囲気を調整する。これによって、このワークWを大気下に置くことになる(ステップS13)。これによって、図1に示す熱処理装置を用いた焼戻工程が終了する。 That is, tempering after heating to a relatively high temperature below the transformation point and then cooling at an appropriate rate can be performed in a low oxygen atmosphere in a short time. Thereafter, the workpiece W is disposed on the placement surface 22 of the downstream chamber 16. Then, the atmosphere is adjusted to the atmosphere after being introduced into the downstream chamber 16 in a low oxygen atmosphere having an oxygen concentration of 0.01% or less. As a result, the workpiece W is placed in the atmosphere (step S13). Thereby, the tempering process using the heat treatment apparatus shown in FIG. 1 is completed.
 ワークWである薄板部材を、上流側室15へ供給すれば、この薄板部材を低酸素雰囲気下に置くことができ、かつ、加熱工程及び冷却工程を常時所定の低酸素雰囲気に常時維持されている処理室17で行うことができて、雰囲気調整の容易化を図ることができる。また、加熱手段は、所定温度に加熱される加熱プレート23にて構成しているので、加熱手段として簡易なものとでき、しかも、ワークWに対して、短時間に均熱処理することができる。冷却手段は、所定温度に冷却された冷却プレート24にて構成することができ、冷却手段として簡易なものとでき、しかも、加熱されたワークWを、短時間に冷却することができる。 If the thin plate member which is the work W is supplied to the upstream chamber 15, the thin plate member can be placed in a low oxygen atmosphere, and the heating process and the cooling process are always maintained in a predetermined low oxygen atmosphere. It can be performed in the processing chamber 17, and the atmosphere adjustment can be facilitated. Further, since the heating means is constituted by the heating plate 23 heated to a predetermined temperature, the heating means can be simplified, and the workpiece W can be subjected to soaking in a short time. The cooling means can be constituted by the cooling plate 24 cooled to a predetermined temperature, can be a simple cooling means, and can cool the heated workpiece W in a short time.
 すなわち、本発明では、雰囲気調整の簡素化および短時間にワークWに対する均熱化を達成でき、生産性に優れる。しかも、加熱手段及び冷却手段の構成の簡略化を図ることができ、熱処理装置の設備の簡略化及び小型化を図ることができる。特に、ワークWである薄板部材の酸化を防止できるので、酸化スケールの付着を回避することができ、熱処理後において、スケール除去作業の必要がなくなり、酸化スケールの付着無しに短時間でインライン的な処理が可能となる。 That is, according to the present invention, the atmosphere adjustment can be simplified and the temperature uniformity for the workpiece W can be achieved in a short time, and the productivity is excellent. In addition, the configuration of the heating means and the cooling means can be simplified, and the equipment of the heat treatment apparatus can be simplified and downsized. In particular, since the oxidation of the thin plate member that is the workpiece W can be prevented, adhesion of oxide scale can be avoided, and after heat treatment, there is no need for scale removal work, and in-line can be achieved in a short time without adhesion of oxide scale. Processing is possible.
 酸素濃度の所定値としては0.01%であり、上流側室15及び処理室17の酸素濃度の0.01%以下とすることによって、安定した酸化防止が可能となる。また、加熱プレートが300℃に加熱されるものでは、ワークWを焼戻し時における最適な加熱温度に加熱することができる。 The predetermined value of the oxygen concentration is 0.01%, and by setting the oxygen concentration to 0.01% or less of the oxygen concentration in the upstream chamber 15 and the processing chamber 17, stable oxidation can be prevented. Further, when the heating plate is heated to 300 ° C., the workpiece W can be heated to an optimum heating temperature during tempering.
 以上、本発明の実施形態につき説明したが、本発明は前記実施形態に限定されることなく種々の変形が可能であって、低酸素雰囲気としては、前記実施形態では、窒素雰囲気としたが、窒素雰囲気に限るものではなく、窒素以外のアルゴン等の不活性ガスの雰囲気や減圧した雰囲気としてもよい。また、低酸素雰囲気の酸素濃度を0.01%以下に設定していたが、酸素濃度の範囲としても、0.01%以下内で種々設定できる。すなわち、使用する窒素ガス発生装置の能力に応じて下限値を設定できる。 As described above, the embodiment of the present invention has been described. However, the present invention is not limited to the above-described embodiment, and various modifications can be made. The atmosphere is not limited to a nitrogen atmosphere, and may be an atmosphere of an inert gas such as argon other than nitrogen or a reduced pressure atmosphere. Moreover, although the oxygen concentration in the low oxygen atmosphere was set to 0.01% or less, the oxygen concentration range can be variously set within 0.01% or less. That is, the lower limit can be set according to the capacity of the nitrogen gas generator to be used.
 また、加熱プレート23の加熱温度としては、300℃に限るものではなく、この焼戻し温度が約150℃~200℃等である低温焼戻しを行う場合、この焼戻し温度に設定でき、焼戻し温度が約550℃~650℃である高温焼戻しを行う場合、この焼戻し温度に設定できる。冷却プレート24の冷却温度として、加熱プレート23の加熱温度等に応じて種々変更できる。 Further, the heating temperature of the heating plate 23 is not limited to 300 ° C. When performing low temperature tempering at a tempering temperature of about 150 ° C. to 200 ° C. or the like, the tempering temperature can be set to about 550. In the case of performing high temperature tempering at a temperature of 650 ° C to 650 ° C, this tempering temperature can be set. The cooling temperature of the cooling plate 24 can be variously changed according to the heating temperature of the heating plate 23 or the like.
 前記図1に示す熱処理装置を用いて、酸素濃度を0.01%以下の低酸素雰囲気(窒素雰囲気)で焼戻処理を行った場合(本発明方式)と、従来の方式の焼戻処理(大気中の焼戻処理)を行った場合とを比較し、その結果を次の表1に示す。 Using the heat treatment apparatus shown in FIG. 1, the tempering process is performed in a low oxygen atmosphere (nitrogen atmosphere) with an oxygen concentration of 0.01% or less (the present invention system), and the conventional tempering process (the present system). Table 1 below shows the result of comparison with the case of performing tempering treatment in the atmosphere.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 すなわち、従来方式では、加熱温度を200℃とし、その加熱温度を60分とした。また、本発明方式では、加熱温度を300℃とし、その加熱温度を0.5分(30秒)とした。また、冷却温度を10~30℃とし、その冷却温度を10~30秒とした。ワークとしては、スラスト軸受軌道輪、内輪とし、図2に示す軌道輪11とした。この場合、その外径寸法Dを100mmとし、板厚Tを1mmとし、鍔高さHを6mmとしたものを使用した。また、このワークWは、予め真空浸炭焼入れを施している。この表1からわかるように、従来方式であれば、スケールが付着したが、本発明方式では、スケールの付着が無かった。 That is, in the conventional method, the heating temperature was 200 ° C., and the heating temperature was 60 minutes. In the method of the present invention, the heating temperature was 300 ° C., and the heating temperature was 0.5 minutes (30 seconds). The cooling temperature was 10-30 ° C., and the cooling temperature was 10-30 seconds. As the workpiece, a thrust bearing race and an inner race were used, and the race 11 shown in FIG. 2 was used. In this case, the outer diameter D was 100 mm, the plate thickness T was 1 mm, and the heel height H was 6 mm. In addition, the workpiece W is previously subjected to vacuum carburizing and quenching. As can be seen from Table 1, the scale adheres in the conventional method, but the scale does not adhere in the method of the present invention.
 ワークWを構成する薄板部材としては、スラスト軸受構成部品である軌道輪(内輪)であっても、軌道輪(外輪)であってもよい。また、スラスト軸受構成部品以外の部材、例えば、輸送機械、建設機械、及び工作機械等の各種の機械に用いられる種々の薄板部材であってもよい。 The thin plate member constituting the workpiece W may be a bearing ring (inner ring) or a bearing ring (outer ring) which is a thrust bearing component. Moreover, the members other than the thrust bearing components, for example, various thin plate members used in various machines such as a transport machine, a construction machine, and a machine tool may be used.
W     薄板部材(ワーク)
15   上流側室
16   下流側室
17   処理室
23   加熱プレート
24   冷却プレート
W Thin plate (work)
15 Upstream chamber 16 Downstream chamber 17 Processing chamber 23 Heating plate 24 Cooling plate

Claims (8)

  1.  薄板部材に対して熱処理を行う熱処理装置であって、
     酸素濃度が所定値以下の低酸素雰囲気となる上流側室と、酸素濃度が前記所定値以下の低酸素雰囲気に設定されている処理室と、この処理室内に配置された加熱手段としての加熱プレートと、この処理室内に配置された冷却手段としての冷却プレートと、薄板部材を前記所定値以下の低酸素雰囲気から、大気下に置くための下流側室とを備え、上流側室に非加熱状態の薄板部材を投入して、この上流側室の酸素濃度を前記所定値以下の低酸素雰囲気とし、この低酸素雰囲気に設定されている処理室内において、薄板部材を加熱プレートにて均等に加熱するとともに、その均等加熱後に処理室内の冷却プレートにて冷却して、この薄板部材を前記下流側室に置くことを特徴とする熱処理装置。
    A heat treatment apparatus for performing heat treatment on a thin plate member,
    An upstream chamber in which the oxygen concentration is a low oxygen atmosphere having a predetermined value or less, a processing chamber in which the oxygen concentration is set to a low oxygen atmosphere having the predetermined value or less, and a heating plate as a heating means disposed in the processing chamber; A cooling plate disposed in the processing chamber as a cooling means, and a downstream chamber for placing the thin plate member in the atmosphere from a low oxygen atmosphere below the predetermined value, and the upstream chamber is a non-heated thin plate member The oxygen concentration in the upstream chamber is set to a low oxygen atmosphere below the predetermined value, and the thin plate member is heated evenly by the heating plate in the processing chamber set to the low oxygen atmosphere. A heat treatment apparatus, wherein the thin plate member is placed in the downstream chamber after being heated and cooled by a cooling plate in the treatment chamber.
  2.  無酸化焼入れが施された薄板部材に対して、焼戻工程を行うことを特徴とする請求項1に記載の熱処理装置。 The heat treatment apparatus according to claim 1, wherein a tempering step is performed on the thin plate member that has been subjected to non-oxidation quenching.
  3.  前記所定値が0.01%であることを特徴とする請求項1又は請求項2に記載の熱処理装置。 The heat treatment apparatus according to claim 1 or 2, wherein the predetermined value is 0.01%.
  4.  加熱プレートの加熱温度が300℃であることを特徴とする請求項1~請求項3のいずれか1項に記載の熱処理装置。 The heat treatment apparatus according to any one of claims 1 to 3, wherein the heating temperature of the heating plate is 300 ° C.
  5.  冷却プレートの冷却温度が10~30℃であることを特徴とする請求項1~請求項4のいずれか1項に記載の熱処理装置。 5. The heat treatment apparatus according to claim 1, wherein the cooling temperature of the cooling plate is 10 to 30 ° C.
  6.  前記薄板部材が、スラスト軸受の構成部品であることを特徴とする請求項1~請求項5のいずれか1項に記載の熱処理装置。 The heat treatment apparatus according to any one of claims 1 to 5, wherein the thin plate member is a component part of a thrust bearing.
  7.  薄板部材に対して熱処理を行う熱処理方法であって、
     非加熱状態の薄板部材を上流側室に投入後に酸素濃度が0.01%以下の低酸素雰囲気に調整し、その後、常時酸素濃度が0.01%以下の低酸素雰囲気となっている処理室内で、所定加熱温度に加熱された加熱プレート上に載置して、この薄板部材を加熱した後、この処理室内で、所定冷却温度に冷却された冷却プレート上に載置して、この薄板部材を冷却し、次に、酸素濃度が0.01%以下の低酸素雰囲気の下流側室に投入後に大気下に雰囲気を調整し、この薄板部材を排出することを特徴とする熱処理方法。
    A heat treatment method for performing heat treatment on a thin plate member,
    After putting the non-heated thin plate member into the upstream chamber, the oxygen concentration is adjusted to a low oxygen atmosphere of 0.01% or less, and thereafter, in a processing chamber in which the oxygen concentration is always a low oxygen atmosphere of 0.01% or less. After placing the thin plate member on the heating plate heated to a predetermined heating temperature and heating the thin plate member, the thin plate member is placed on the cooling plate cooled to the predetermined cooling temperature in the processing chamber. A heat treatment method characterized by cooling and then adjusting the atmosphere to the atmosphere after being introduced into a downstream chamber of a low oxygen atmosphere having an oxygen concentration of 0.01% or less and discharging the thin plate member.
  8.  無酸化焼入れを施された薄板部材に対して、前記請求項7に記載の熱処理方法を用いて焼戻工程を行うことを特徴とする熱処理方法。 A heat treatment method comprising performing a tempering step on the thin plate member subjected to non-oxidation quenching using the heat treatment method according to claim 7.
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Publication number Priority date Publication date Assignee Title
WO2018155588A1 (en) * 2017-02-24 2018-08-30 Ntn株式会社 Method for manufacturing bearing component

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JP2001316720A (en) * 2000-05-01 2001-11-16 High Frequency Heattreat Co Ltd Heat treatment apparatus, heat treatment method and apparatus for producing pipe
JP2006291247A (en) * 2005-04-06 2006-10-26 Ntn Corp Heat treatment method, method for producing thin member for bearing, thin member for bearing and thrust bearing
JP2008082379A (en) * 2006-09-26 2008-04-10 Ntn Corp Method for manufacturing thrust bearing component part

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Publication number Priority date Publication date Assignee Title
JP2001316720A (en) * 2000-05-01 2001-11-16 High Frequency Heattreat Co Ltd Heat treatment apparatus, heat treatment method and apparatus for producing pipe
JP2006291247A (en) * 2005-04-06 2006-10-26 Ntn Corp Heat treatment method, method for producing thin member for bearing, thin member for bearing and thrust bearing
JP2008082379A (en) * 2006-09-26 2008-04-10 Ntn Corp Method for manufacturing thrust bearing component part

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018155588A1 (en) * 2017-02-24 2018-08-30 Ntn株式会社 Method for manufacturing bearing component

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