WO2016177572A1 - Soupape de transfert - Google Patents

Soupape de transfert Download PDF

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Publication number
WO2016177572A1
WO2016177572A1 PCT/EP2016/058697 EP2016058697W WO2016177572A1 WO 2016177572 A1 WO2016177572 A1 WO 2016177572A1 EP 2016058697 W EP2016058697 W EP 2016058697W WO 2016177572 A1 WO2016177572 A1 WO 2016177572A1
Authority
WO
WIPO (PCT)
Prior art keywords
closure element
opening
transfer valve
actuator
clean
Prior art date
Application number
PCT/EP2016/058697
Other languages
German (de)
English (en)
Inventor
Gerhard SPREITZER
Martin KOEPKE
Thomas Bultmann
Original Assignee
M. Braun Inertgas-Systeme Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M. Braun Inertgas-Systeme Gmbh filed Critical M. Braun Inertgas-Systeme Gmbh
Priority to CN201680025804.4A priority Critical patent/CN107567558B/zh
Priority to JP2017557398A priority patent/JP2018515727A/ja
Priority to EP16721369.3A priority patent/EP3292330A1/fr
Priority to KR1020177034754A priority patent/KR20170137950A/ko
Publication of WO2016177572A1 publication Critical patent/WO2016177572A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Definitions

  • the invention relates to a Transferventii for opening and closing an opening, in particular a lock, a clean gas cabin, wherein the opening is closed in a closed position by a closure element of the transfer valve and released in an open position.
  • Such manufacturing processes can be coating processes, for example in semiconductor production, encapsulation steps in LCD or OLED production or production processes of highly pure base materials, for example in medical and pharmaceutical technology.
  • the processes may require clean room conditions, low humidity, an inert gas atmosphere, or a combination of various such and other conditions.
  • the closed room It has locks that allow the required materials to be introduced into the enclosed space and the products can be removed.
  • the lock may be directed outwards or it may connect two closed spaces between which materials or products must be exchanged.
  • Pure cabins e.g., inert gas housings
  • a hood design Pure cabins (e.g., inert gas housings) in a hood design are known.
  • the hoods form with a base plate an enclosed space in which the required atmosphere can be adjusted.
  • the pre-assembled hood is placed on top of the base plate and sealed.
  • Required bushings, locks, upstream chambers and other required units and assemblies are preferably already mounted and tested on the hood.
  • the clean cab can therefore be set up quickly at a designated work or production place.
  • the approach of the hood design offers the possibility to operate any plant or plant parts in a closed room, whose atmosphere can be adjusted according to the requirements.
  • the size of the hood is adapted to the respective system.
  • the materials used to construct the clean cabins are designed so that they do not alter the atmosphere inside them, for example due to contamination or outgassing. Furthermore, the enclosure is designed so that no gas exchange between the interior of the clean cabin and the environment takes place.
  • clean cabins made of stainless steel or aluminum.
  • Openings through which materials can be introduced or exported into the clean tank can be closed or opened by transfer valves.
  • the locks can be arranged between two clean car cabins or represent a connection of the clean cabin to the outside. They can also serve as a connection of the clean cab with a vacuum chamber, another lock or other process machines.
  • Known transfer valves have a sealed door, which can be opened by corresponding hinges in the Interior of the clean gas cabin is pivoted. This can be done manually or preferably by means of an actuator.
  • the disadvantage here is the large space requirement in the interior of the clean cabin, which must be kept free so that the door of the transfer valve can be opened.
  • Another disadvantage arises from the known type of doors and transfer valves. These are preferably made of metal, for example made of stainless steel or aluminum.
  • the object of the invention is achieved in that at least one first actuator and a second actuator are indirectly or directly connected to the closure element and that the first actuator is coupled to the closure element such that it lifts the closure element for opening from the opening and / or for closing applies to this and that the second actuator is coupled to the closure element such that it shifts the closure element transversely to the opening.
  • the second actuator can preferably be arranged so that it at least approximately perpendicular to the direction of movement of the closure element first actuator shifts.
  • the displacement caused by the second actuator may be, for example, horizontal, vertical or diagonal to the opening. Due to the combined lifting and sliding movement, the transfer valve can be opened to save space. In the interior of the clean cabin no space must be kept free, in which a door can swing to open.
  • the clean cab can be made smaller for the same footprint for a particular system.
  • the gas demand and thus the operating costs for the clean gas cabin can be significantly reduced.
  • the closure element Due to the independently executed lifting movement, the closure element is uniformly pressed against the opening, in particular the opening. As a result, a gas-tight closure of the opening can be achieved safely.
  • the first actuator can be made simple, easy and inexpensive, that at least one spring is indirectly or directly coupled to the closure element and that the spring pushes or pulls the closure element in the closed position.
  • the first actuator thus causes a lifting movements of the closure element against the spring force, while the spring, the closure element, after the first actuator is no longer driven, moves back in the opposite direction.
  • the first actuator only has to act in one direction. It can be correspondingly simple, for example, by a negative pressure, driven by compressed air or by a hydraulic fluid executed.
  • the first actuator may also be designed to be electrically, magnetically or mechanically driven. The use of a negative pressure has the advantage that no foreign matter, such as air or hydraulic fluid, can be accidentally introduced into the clean cabin.
  • the at least one spring is adapted to push or pull the closure member to the closed position.
  • the transfer valve in the event of a fault, for example in the event of a power failure Actuation of the first actuator, always moved and held in the closed and thus safe position.
  • the first actuator in both directions, ie counter and with the spring force act. This additionally makes it possible to assist the closing operation in the direction of the acting spring force with the first actuator.
  • a simple and cost-effective sealing of the transfer valve can be achieved in that a seal is arranged circumferentially to the opening and that the closure element rests in the closed position on the seal.
  • the separately controllable and executable movements of the closure element can be achieved in that the first actuator and the closure element are arranged on a sliding arrangement and that the second actuator, the sliding arrangement, together with the first actuator arranged thereon and the closure element arranged thereon, adjusted transversely to the opening.
  • the second actuator brings the closure element by sliding the slide assembly in position relative to the opening, then the first actuator closes the opening by the lifting movement of the closure element.
  • the first actuator lifts the closure element from the opening. Thereafter, the second actuator shifts the slide assembly with the shutter member across the opening.
  • the sliding arrangement is mounted linearly movably on at least one guide rail and that the sliding arrangement can be adjusted along the guide rail by the second actuator, a secure mounting of the sliding arrangement can be ensured. As a result, transverse forces, which are introduced by the pressing of the closure element be intercepted, whereby a secure and gas-tight closing of the opening is made possible.
  • the guide rails or in addition to counter-holder can also be provided for catching the shear forces.
  • the second actuator is formed at least by a guide tube and a carriage mounted linearly movable on the guide tube, that in the guide tube, a linearly movable magnet is arranged and that the magnet is magnetically coupled to the carriage.
  • the guide tube can have a circular, square, but also any other cross section.
  • the guide tube forms a closed cylinder, in the interior of which a movably mounted piston is arranged.
  • the piston divides the cylinder into two cylinder chambers. Each cylinder chamber is assigned a compressed air connection. With the aid of compressed air, the piston can be moved in the cylinder along the longitudinal extent of the guide tube.
  • a magnet is attached to the piston, or the piston itself is magnetized, allowing for magnetic coupling to the carriage. Due to the magnetic force transmission can be reliably avoided that foreign matter, such as lubricant, hydraulic oil or compressed air, are introduced into the clean cabin.
  • the carriage is preferably connected to the sliding arrangement. By adjusting the linearly movable magnet in the guide tube of the carriage and thus the slide assembly can be moved to its desired position.
  • the piston and / or the magnet can also be driven by an electric spindle drive, by Gasferdem, by a cable with balancing weights or by pneumatic cylinders with piston rods.
  • the transfer valve may be assigned a connection element with a connection plate is that the opening is formed as a breakthrough in the connection plate and that the first actuator and / or the guide rail are attached directly or indirectly to the connection element.
  • the transfer valve thus forms an assembly which can be mounted as a unit in or on a breakthrough in the side wall of the clean cab.
  • the connection plate is connected to the side wall. Due to the pre-assembled transfer valve, the assembly time of the clean cab can be significantly reduced. Standardized transfer valves can be provided which can be used with different types and designs of clean car cabins.
  • the weight of the transfer valve and thus of the entire clean cabin can be reduced by forming the closure element and / or the connection plate and / or the sliding arrangement at least partially from structural core plates, in particular from aluminum honeycomb core plates.
  • structural core plates in particular from aluminum honeycomb core plates.
  • Components made of structural core panels have a significantly lower weight compared to solid components with comparable mechanical load capacity. Due to the structure of the structural core plates with two spaced cover plates, which are interconnected via the structural core, results in a very high bending stiffness of the components.
  • a closure element made of a structural core plate is not or only slightly bent when it is pressed against the opening. This allows a gas-tight closure of the opening along the entire seal length.
  • Structural core plates are gas-tight due to the cover plates arranged on both sides in accordance with the permeation properties of the cover plates used in the direction of their surface normals.
  • the structural core may advantageously be designed such that gas within the structural core plate can not flow transversely to its surface normal. This ensures that no gas, for example via the edges of the structural core plates or via openings introduced offset into the cover plates, through the closure element or the connection plate in the Clean cabin arrives.
  • Aluminum honeycomb core plates may preferably be used as structural core plates.
  • the sliding arrangement is assigned a movably mounted carrier, that the carrier has at least one belt and a web connected at an angle to the belt and that the closure element is connected to the belt or the web. Due to its shape, the carrier does not bend or only slightly through when pressing the closure element to the opening, so that a secure seal is ensured.
  • the carrier may preferably be made of structural core plates.
  • the mass of the closure element and the sliding arrangement together have a mass smaller than 80 kg and / or that the surface with which the closure element covers the opening, in the range between 0.2m 2 to 10m 2 , preferably 0.2m 2 to 5m 2 , is located.
  • the comparatively low mass can be achieved by using structural core plates. The low mass gives some advantages.
  • the attachment of the closure element and the sliding arrangement can be made less resilient and thus less expensive.
  • the total mass of the clean cabin can be reduced with the advantages mentioned. For the opening and closing process only relatively small masses must be moved so that they can be done faster and with less effort. By adjusting the area of the opening, the clean cabin can be used for various applications.
  • a covered opening of 10m 2 allows the introduction of aircraft turbines, for example, to carry out welding.
  • a covered opening of 5m 2 is adapted to current formats in a display production. The invention will be explained in more detail below with reference to an embodiment shown in the drawings.
  • FIG. 1 is a perspective outside view of a clean cab
  • FIG. 5 shows an enlarged detail of the illustration shown in Figure 4 with the clamping unit
  • Fig. 6 is a transfer valve in a side sectional view.
  • FIG. 1 shows a perspective exterior view of a clean cabin 10.
  • the clean cab 10 has a polygonal floor plan.
  • the floor plan is hexagonal.
  • side walls 12 are placed on a corresponding hexagonal bottom 11 side walls 12 are placed.
  • Up is the Reingaskabine 0 covered by a cab lid 15 which is bordered by a railing 16.
  • circulation pipes 14.1, 14.2 are fastened in the form of rectangular ducts.
  • the circulation lines 14.1, 14.2 are connected via feeders and removal points with the interior of the clean cabin 10.
  • corresponding openings in the side walls 12 are provided.
  • a recess 13 is introduced, which is closed by a transfer valve 80, as shown in more detail in Figure 2.
  • An opening 23 is part of the transfer valve 80.
  • the clean cabin 10 is a sealed relative to its environment housing. Within the clean cab 10 manufacturing equipment or laboratory setups can be arranged, etc. .. Furthermore, in the clean cabin 10, a predetermined atmosphere can be set. For this purpose, a specific gas or a gas mixture having a predetermined composition in the interior of the clean cabin 10 may be present. The gas or gas mixture may be an inert gas. Furthermore, the humidity of the gas or the gas mixture can be adjusted. As an additional requirement, a required clean room class for the clean cabin 10 can be specified. The requirements can apply both individually and in combination. In addition, additional atmospheric parameters, for example the temperature, can be set. As pure gas according to the present invention, an atmosphere which meets the required requirements, to understand.
  • the clean cabin 10 is equipped with appropriate units for providing or generating this atmosphere.
  • the clean gas cabin 10 has the two circulation lines 14.1, 14.2. About this gas is removed from clean gas cab 10 at the sampling points and fed back to the clean gas cabin 10 via the feeders.
  • the gas is supplied to a gas treatment unit.
  • the gas conditioning unit is in communication with the interior of the clean gas cabin 10. The gas conditioning includes the adjustment of the required for the interior of the clean gas cabin 10 atmosphere.
  • the side walls 12 are formed from structural core plates.
  • the side walls 12 may be designed as honeycomb core plates, preferably as aluminum honeycomb core plates.
  • Structural core plates have a multilayer structure. At least two spaced cover plates are connected flat with a structural core.
  • the cover plates and the structural core are made of aluminum in the present embodiment.
  • the structural core is designed as a honeycomb core. In this way plates are produced with a high bending stiffness and at the same time a low weight.
  • the clean cab 10 thus has a significantly lower weight than a clean cabin made with solid aluminum or stainless steel walls. This significantly reduces the floor load resulting from the weight of the converted plant components and the clean cabin.
  • the clean cab can thus also be used in buildings with low floor load capacity.
  • a lighter weight facilitates the installation of the clean cabin at its place of use, since this requires no lifting devices or only lifting devices with a low load capacity.
  • the cover plates of the cabin cover 15 as well as the base 11 of structural core plates, in the present embodiment of aluminum honeycomb core plates, are formed.
  • the side walls 12, the cab lid 15 and the bottom 11 of the clean cab be made of solid material, such as aluminum or stainless steel.
  • the clean cab 10 allows the implementation of manufacturing processes or operations that require a special atmosphere. Such manufacturing steps can be coating processes, encapsulation processes or the processing or production of highly pure substances, for example in the pharmaceutical sector.
  • the supply of required materials and substances via provided locks.
  • two or more clean car cabins 10 can be connected to one another. In the connected clean cabins 10 different atmospheres may be present or it may be located in the same atmosphere different work processes therein.
  • a clean cabin 10 may be connected by one or more locks with the external environment. The clean cab 10 can thus be integrated into a production line, for example.
  • FIG. 2 shows a connection element 20 of a transfer valve 80 for a clean gas cabin 10 in an external view.
  • a terminal plate 21 is bordered by a lead frame 22.
  • the opening 23 is closed by a closure element 30.
  • plugs 33 are arranged offset, as shown in more detail in Figures 4 and 5.
  • the Guide tubes 76 are part of a pneumatic cylinder. They are assigned to the two sliding actuators 70 shown in FIGS. 3 and 4.
  • Two energy chains 75 serve to supply energy to the transfer valve 80.
  • energy is supplied to the transfer valve 80, in the present exemplary embodiment, compressed air via an energy supply 81.
  • connection plate 21 and the closure element 30 are made in the embodiment shown from Strukturkemplatten, preferably made of aluminum honeycomb core plates.
  • structural core plates By using structural core plates, the weight of the transfer valve 80 can be significantly reduced compared to solid materials.
  • Structural core plates may preferably be made gas-tight for the present application. This creates a light yet dense transfer valve 80.
  • connection element 20 can be fastened with its connection frame 22 to the recess 13 shown in FIG. 1 in the side wall 12, 12. 1 of the clean gas cabin 10 in such a way that it is closed gas-tight by the transfer valve 80.
  • the opening 23 can be opened and closed by a combined lifting and sliding movement of the closure element 30.
  • the energy required for this purpose are supplied to the transfer valve 80 via the energy supply 81 and the energy chains 75.
  • the transfer valve 80 can be preassembled as a module. The assembly can then be attached to the clean cab 10. For this purpose, the terminal frame 22, the protruding portions of the guide rails 77 and the second mounting stub 71.2 with the side wall 12, 12.1 of the clean cab 10 are connected. The installation time of the clean gas cabin 10 can be significantly reduced by the use of preassembled transfer valves 80. Furthermore, the transfer valves 80 can be checked for leaks before installation in a clean cabin 10.
  • FIG. 3 shows the transfer valve 80 shown in FIG. 2 in a perspective rear view.
  • the guide rails 77 are screwed to the terminal plate 21 of the transfer valve 80 so that they protrude on one side via the terminal plate 21 and the terminal frame 22.
  • the guide tubes 76 of the sliding actuators 70 are also fastened on one side to the connection plate 21.
  • a first mounting stub 71.1 attached to the connection plate 21 in the two opposite side areas, to each of which a first pipe holder 72.1 is attached.
  • second mounting stub 71.2 which are attached to the side wall 12, 12.1, second pipe holder 72.2 are also provided.
  • the guide tubes 76 are held at their respective ends by the tube holders 72.1, 72.2.
  • On the guide tubes 76 each have a carriage 73 is mounted linearly along the guide tubes 76 movable.
  • the guide tubes 76 are each part of a pneumatic cylinder and sealed gas-tight.
  • a concealed along the respective guide tube 76 movable piston with a magnet is arranged in each case.
  • the magnet is preferably designed as a permanent magnet. It can be mounted on the piston or the piston itself can be made magnetic.
  • In or on the carriage 73 are also magnets, preferably permanent magnets arranged.
  • the magnets within the guide tubes 76 are magnetically coupled to the magnets in the associated carriages 73. By moving the piston and thus the magnets in the guide tubes 76 so the carriage 73 can be adjusted linearly along the guide tubes 76.
  • the pistons divide the pneumatic cylinders into two cylinder chambers each.
  • Each of the cylinder chambers is connected to the power supply 81, which is designed as a compressed air supply.
  • the power supply 81 which is designed as a compressed air supply.
  • the pistons in the cylinders along the guide tubes 76 can be moved.
  • the magnets as permanent magnets, the magnetic coupling between the magnets in the guide tubes 76 and the magnets in the carriages is maintained even in the event of a power failure.
  • the sliding arrangement 50 has a carrier 51 as a basic body.
  • a U-profile with two straps 51.1, 51.2 and 51.1 connecting the straps 51.2, a bridge 51.3 is provided as a carrier 51.
  • the cross struts 52 are penetrated by passage openings 52.1.
  • the carrier 51 in particular the straps 51.1, 51.2 and the web 51.3, in the embodiment shown, made of structural core plates, preferably made of aluminum honeycomb core plates. Thereby, the weight of the carrier 51 and thus of the transfer valve 80 can be kept low.
  • the carrier 51 is connected via laterally mounted bracket 74 with the carriage 73. Furthermore, the carrier 51 via sliding elements 78.1, 78.2 mounted linearly movable on the guide rails 77. The travel of the carrier 51 is limited by means of the end positions of the sliding actuator 70. Photocells 79 monitor the opening and closing operation of the opening 23.
  • Hubaktuatoren 60 are mounted in the present embodiment.
  • Each Hubaktuator 60 are 62 terminals for supplying the required energy, in the embodiment shown in the form of compressed air assigned.
  • Side of the Hubaktuatoren 60 caps 45 of a closing unit 40 shown in Figures 4 and 5 are arranged.
  • the lifting actuators 60 are in operative connection with the closure element 30.
  • the closure element 30 In the closed position, the closure element 30 is indirectly or directly on the connection plate 21 at.
  • the opening 23 is sealed gas-tight.
  • a seal 26 shown in FIG. 4 is advantageously arranged circumferentially around the opening 23 between the connection plate 21 and the closure element 30.
  • the closure element 30 can be lifted off the connection plate 21 with the aid of the lifting actuators 60. Subsequently, the entire sliding assembly 50 is moved by means of the sliding actuators 70 transversely to the opening 23. As a result, the closure element 30 releases the opening 23. Due to the combined lifting and sliding movement, the opening 23 can be completely released without a valve element, such as a lock door, has to be widely pivoted into the interior of the clean cab 10. This is in the clean cab 10 more space for production or pilot plants available or it can be used with smaller external dimensions with the same footprint clean cabins 10.
  • the carrier 51 can be easily constructed of structural core plates.
  • the cross struts lead to a further stiffening of the carrier.
  • the Hubaktuatoren 60 for example, for the supply of the required energy, can be passed through the through holes 52.1 of the cross braces 52.
  • a compact transfer valve 80 is created, which can be installed as a structural unit in a corresponding recess 13 in a side wall 12, 12.1 of a clean gas cabin 10.
  • FIG. 4 shows a detail of the transfer valve 80 in a perspective sectional and exploded view.
  • connection frame 22 Holes are introduced through the connection frame 22 and the connection plate 21 encompassed by the connection frame 22, by means of which the connection plate 22 can be screwed to the side wall 12, 12.1 of the clean-gas cabin with the aid of connecting screws 22.1.
  • a compensation rail 27 is mounted, on which the guide rail 77 is placed and connected to the connection plate 21, preferably screwed.
  • the compensating rail 27 serves for height compensation, so that the guide rail 77 can be guided via the connection frame 22. At the same time, it allows a secure and firm connection of the guide rail 77 by means of corresponding screw connections.
  • the seal 26 Surrounding the opening 23, the seal 26, preferably a round cord seal arranged.
  • the seal 26 is between two sealing frame 25.1, 25.2 held.
  • the sealing frame 25.1, 25.2 are screwed to mounting holes 24 to the connection plate 21.
  • the closure element 30 is made of a structural core plate, preferably made of an aluminum honeycomb core plate. It has two receiving bores 31 and a further bore 32.
  • the receiving holes 31 are guided only by one of the cover plates and the structural core of the structural core plate, so that the cover plate 23 facing the cover plate is not broken.
  • the closure element 30 remains gas-tight in the region of the receiving bores 31.
  • the bore 32 penetrates the closure element 30 completely. It widens according to the cover plate facing the sliding arrangement 50, so that the plug 33 can be introduced into the bore 32 from the side of the opening 23, as shown in FIG.
  • the plug 33 seals the bore 32 gas-tight. He continues to serve the screwing of a connecting element 56. By the abutment surface of the plug 33 can be positively transmitted high forces.
  • a closing unit 40 is arranged between the closure element 30 and the carrier 51 of the sliding arrangement 50.
  • the closing unit 40 is once shown as an exploded view and once partially moniert, as shown enlarged in Figure 5.
  • the arranged on the closure member 30 subunits of the closure unit 40 are each a retaining bush 41, a spring 42, a guide pin 43, a guide bushing 44 and a cap 45 assigned.
  • the retaining bush 41 is formed of a holding part 41.2 and a flange 41.1.
  • a screw 41.3 is inserted axially, which is 41.1 on the side of the flange of a spring retainer 41.4 circulated.
  • the retaining bush 41 can in the receiving bore 31 of the Inserted locking element 30 and anchored there with its holding part 41.2, in particular glued be.
  • the retaining bush 41 is made of metal, in particular stainless steel.
  • the spring 42 is designed as a compression spring.
  • the thread 43.1 opposite is the guide section
  • the guide bush 44 is formed from a second stop 44.1 and a second holding part 44.2, which are penetrated by a guide bore 44.3.
  • the guide bush 44 is preferably made of metal, in particular stainless steel.
  • such guide bushes 44 When mounted, such guide bushes 44 can be fixed with their second holding parts 44.2 in bush receptacles 54, which are introduced into the web 51.3 of the carrier 51.
  • the guide pins 43 are guided by the guide holes 44.3 of the guide bushes 44.
  • their head disks 43.3 protrude into the region between the two straps 51.1, 51.2 of the carrier 51 and are covered there by the covering caps 45, as shown in FIG.
  • the guide pins 43 are guided by the springs 42, which are arranged between the guide bushes 44 and the retaining bushes 41 and held in spring seats 41.4.
  • the guide pins 43 can with their threads 43.1 in the screw receptacles
  • the closure member 30 is movable according to the adjustment of the guide pins 43 in the guide bushes 44 with the carrier 51 and thus the sliding arrangement 50 connected.
  • the springs 42 are biased between the carrier 51 and the closure element 30 and press them apart.
  • an insert 55 is inserted and connected to the web 51.3.
  • the insert 55 is preferably made of metal.
  • a recess 55.1 and a bore 55.2 are provided in the insert 55.
  • the lifting actuator 60 designed as a short-stroke pneumatic cylinder is connected to the web 51.3 of the carrier 51 in the region of the insert 55.
  • a macs volume 61 is introduced in a cylinder of the Kurzhub- Pneumaktizylinders.
  • a fastening portion 63 of the lifting actuator 60 designed as a shoulder is inserted into the bore 55. 2 of the insert 55.
  • a threaded bore is arranged in the attachment portion 63.
  • the connecting element 56 is arranged between the carrier 51 and the closure element 30. By the connecting element 56 a screw 56.1 is guided. On a wing of the connecting element 56, a passage 56.1 is introduced.
  • the connecting element 56 is constructed mirror-symmetrically to the sectional area of the selected representation. It is inserted for mounting in the recess 55.1 of the insert 55 and connected to the screw 56.1 with the mounting portion 63 of the Hubaktuators 60.
  • the passage 56.2 of the connecting element 56 is then aligned with the bore 32 in the closure element 30.
  • the free volume 61 of the Hubaktuators 60 is connected via a concealed opening, the passage 56.2 and the bore 32 with the plug 33.
  • FIG. 6 shows the transfer valve 80 in a lateral sectional representation. In this case, the closure element 30 of the transfer valve 80 assumes an intermediate position between the open and the closed position.
  • the carrier 51 and thus the closure element 30 are moved by means of the slide actuators 70 arranged on both sides in the closed position.
  • the closure element 30 covers the opening 23.
  • the Hubaktuatoren 60 are operated with compressed air. This is applied to the Hubaktuatoren 60 via the terminals 62 shown in Figure 3.
  • the closure element 30 is lifted by the Hubaktuatoren 60 against the spring force of the springs 42 of the opening 23 and the opening 23 circumferential seal 26. Accordingly, the springs 42 are compressed and the guide pins 43 are retracted into the caps 45.
  • the springs 42 press the closure element 30 against the connection plate 21 or against the seal 26, whereby the opening 23 is closed in a gas-tight manner.
  • the Hubaktuators 60 acting as a two-direction pneumatic cylinder of the closing operation in the second position of the compressed air supply is supported by the Hubaktuator 60.
  • the closure element 30 is pressed by the springs 42 in the closed position.
  • the carrier 51 By controlling the sliding actuators 70, the carrier 51, after the closure member 30 has been lifted by the Hubaktuatoren 60, are displaced along the guide rails 77. As a result, the opening 23 is released. To close the transfer valve 80, the carrier 51 is again moved along the guide rails 77 until the closure element 30 is positioned opposite the opening 23. By means of the lifting actuators 60 and supported by the Springs 42, the closure member 30 is then pressed against the opening 23 and the opening 23 surrounding the seal 26.
  • the opening 23 can be closed and opened. For this purpose, only a small space requirement within the clean cab 10 is required.

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  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
  • Valve Housings (AREA)
  • Fluid-Driven Valves (AREA)
  • Ventilation (AREA)
  • Air-Flow Control Members (AREA)

Abstract

L'invention concerne une soupape de transfert (80) servant à ouvrir et à fermer une ouverture, en particulier un sas d'une cabine à atmosphère propre, l'ouverture étant fermée dans une position de fermeture par un élément de fermeture (30) de la soupape de transfert, et étant dégagée dans une position d'ouverture. Selon l'invention, au moins un premier actionneur et un deuxième actionneur peuvent être reliés directement oui indirectement à l'élément de fermeture, et le premier actionneur est raccordé à l'élément de fermeture de telle manière qu'il soulève l'élément de fermeture pour ouvrir l'ouverture et/ou prend appui sur ce dernier pour la fermer, et le deuxième actionneur est raccordé à l'élément de fermeture de telle manière qu'il déplace l'élément de fermeture transversalement à l'ouverture. La soupape de transfert permet d'ouvrir et de fermer une ouverture de la cabine à atmosphère propre avec peu de place.
PCT/EP2016/058697 2015-05-04 2016-04-20 Soupape de transfert WO2016177572A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201680025804.4A CN107567558B (zh) 2015-05-04 2016-04-20 转换阀
JP2017557398A JP2018515727A (ja) 2015-05-04 2016-04-20 切換弁
EP16721369.3A EP3292330A1 (fr) 2015-05-04 2016-04-20 Soupape de transfert
KR1020177034754A KR20170137950A (ko) 2015-05-04 2016-04-20 전환 밸브

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015106916.4 2015-05-04
DE102015106916.4A DE102015106916A1 (de) 2015-05-04 2015-05-04 Transferventil

Publications (1)

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WO2016177572A1 true WO2016177572A1 (fr) 2016-11-10

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PCT/EP2016/058697 WO2016177572A1 (fr) 2015-05-04 2016-04-20 Soupape de transfert

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EP (1) EP3292330A1 (fr)
JP (1) JP2018515727A (fr)
KR (1) KR20170137950A (fr)
CN (1) CN107567558B (fr)
DE (1) DE102015106916A1 (fr)
WO (1) WO2016177572A1 (fr)

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CN109323012B (zh) * 2018-12-10 2023-10-10 嘉兴科奥电磁技术有限公司 滑片式三通电磁阀
GB2583355B8 (en) * 2019-04-24 2021-07-07 Unity Well Integrity Ltd Gate valve member

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WO2008038940A1 (fr) * 2006-09-27 2008-04-03 Ats Engineering Co., Ltd. Soupape d'opercule

Also Published As

Publication number Publication date
CN107567558A (zh) 2018-01-09
KR20170137950A (ko) 2017-12-13
EP3292330A1 (fr) 2018-03-14
JP2018515727A (ja) 2018-06-14
CN107567558B (zh) 2019-12-27
DE102015106916A1 (de) 2016-11-10

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