WO2016173016A1 - 柔性显示装置的制造方法 - Google Patents

柔性显示装置的制造方法 Download PDF

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Publication number
WO2016173016A1
WO2016173016A1 PCT/CN2015/079483 CN2015079483W WO2016173016A1 WO 2016173016 A1 WO2016173016 A1 WO 2016173016A1 CN 2015079483 W CN2015079483 W CN 2015079483W WO 2016173016 A1 WO2016173016 A1 WO 2016173016A1
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Prior art keywords
flexible substrate
flexible
manufacturing
adjusting
display device
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English (en)
French (fr)
Inventor
李文辉
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to US14/761,307 priority Critical patent/US9559337B2/en
Publication of WO2016173016A1 publication Critical patent/WO2016173016A1/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates

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  • the present invention relates to the field of display technologies, and in particular, to a method of manufacturing a flexible display device.
  • flexible display display technology is various, including, for example, conventional liquid crystal display technology, bistable liquid crystal display technology, organic light-emitting diode (OLED) display technology, electrophoretic display technology, Electrochromism (EC) display technology and electroluminescent (EL) display technology.
  • OLED organic light-emitting diode
  • EC Electrochromism
  • EL electroluminescent
  • a flexible organic light-emitting diode (FOLED) display has more advantages than other flexible displays, such as self-luminous display, fast response, high brightness, wide viewing angle, and low cost.
  • FOLED displays are displays based on flexible organic materials that can be crimped, folded, or even part of a wearable computer, and thus have a wide range of applications in special fields such as portable products and military applications.
  • Warp deformation occurs, the precision is poor, a rigid substrate is required as a substrate, and peeling is required after the process is completed, and there is a risk of electrostatic breakdown; 2.
  • the flexible substrate 100' is wound by a winding method in a reel On the 200', the production is carried out again.
  • the method has poor precision, the tension control is difficult, and the process is immature.
  • An object of the present invention is to provide a method for manufacturing a flexible display device, which can adjust the flatness and shrinkage of a flexible substrate during the manufacturing process of the flexible display device, and control the angle of the flexible substrate to improve the precision of the process.
  • the present invention provides a method of manufacturing a flexible display device comprising the following steps:
  • Step 1 providing a flexible substrate and a plurality of clamps
  • Step 2 clamping the edge of the flexible substrate with the plurality of clamps
  • Step 3 exposing, developing, etching, thin film deposition, annealing, and film forming processes on the flexible substrate; adjusting the flatness and shrinkage of the flexible substrate by adjusting the jig in each process; controlling the angle of the flexible substrate by adjusting the jig .
  • step 3 during the exposure process, the shape of the flexible substrate is finely adjusted by adjusting the jig to control the exposure accuracy.
  • step 3 during the annealing and thin film deposition process, the force of the clamp on the flexible substrate is reduced to reduce the deformation of the flexible substrate.
  • step 3 the flexible substrate is kept horizontal by adjusting the jig during the exposure process.
  • the flexible substrate is slightly tilted by adjusting the jig.
  • step 3 the flexible substrate is placed in a vertical state by adjusting the jig during the film forming process.
  • the flexible substrate has a rectangular shape, and the jigs are four. In step 2, the four corners of the flexible substrate are respectively clamped by four clamps.
  • the flexible substrate has a rectangular shape, and the two clamps are two. In step 2, opposite sides of the flexible substrate are respectively clamped by the two clamps.
  • the flexible substrate has a rectangular shape, and the jigs are four. In the step 2, the four sides of the flexible substrate are respectively clamped by the four clamps.
  • the flexible substrate has a rectangular shape, and the plurality of clamps are.
  • each side of the flexible substrate is clamped by a plurality of clamps.
  • the invention also provides a manufacturing method of a flexible display device, comprising the following steps:
  • Step 1 providing a flexible substrate and a plurality of clamps
  • Step 2 clamping the edge of the flexible substrate with the plurality of clamps
  • Step 3 performing exposure, development, etching, thin film deposition, annealing, and film forming processes on the flexible substrate; adjusting the flatness and shrinkage of the flexible substrate by adjusting the jig in each process; and controlling the angle of the flexible substrate by adjusting the jig;
  • step 3 during the exposure process, the shape of the flexible substrate is finely adjusted by adjusting the jig to control the exposure precision;
  • step 3 during the annealing and thin film deposition process, the force of the clamp on the flexible substrate is reduced to reduce the deformation of the flexible substrate;
  • step 3 when the exposure process is performed, the flexible substrate is kept horizontal by adjusting the jig;
  • step 3 when performing the development and etching processes, the flexibility is adjusted by adjusting the jig.
  • the substrate is slightly tilted;
  • the flexible substrate is placed in a vertical state by adjusting the jig.
  • the invention has the beneficial effects that the manufacturing method of the flexible display device provided by the invention clamps the edge of the flexible substrate by the clamp, and can adjust the clamp when the flexible substrate is deformed and flexed, thereby reducing the deflection of the flexible substrate, which can be accurately Control process accuracy, avoid deformation deflection affecting process accuracy; different process, adjustable flexible substrate is placed horizontally, obliquely, vertically, etc., fixture can apply different forces to control accuracy, reduce substrate deformation; no need to attach, peel off and other processes .
  • FIG. 1 is a schematic view showing a manufacturing method of a conventional flexible display device
  • FIG. 2 is a schematic view showing another manufacturing method of a conventional flexible display device
  • FIG. 3 is a flow chart of a method of manufacturing a flexible display device of the present invention.
  • FIG. 4 is a schematic view showing a manner of clamping a flexible substrate by a clamp of a method for manufacturing a flexible display device according to the present invention
  • FIG. 5 is a schematic view showing a second method of clamping a flexible substrate by a clamp of a method for manufacturing a flexible display device according to the present invention
  • FIG. 6 is a schematic view showing a third method of clamping a flexible substrate by a clamp of a method for manufacturing a flexible display device according to the present invention
  • FIG. 7 is a schematic diagram of a method for manufacturing a flexible display device according to the present invention.
  • FIG. 8 is a schematic diagram of an exposure process in step 3 of the method for fabricating a flexible display device of the present invention.
  • FIG. 9 is a schematic view of a flexible substrate for adjusting deformation deflection in a method of manufacturing a flexible display device of the present invention.
  • the present invention provides a method for manufacturing a flexible display device, comprising the following steps:
  • Step 1 providing a flexible substrate 10, and a plurality of clamps 20;
  • Step 2 clamping the edge of the flexible substrate 10 with the plurality of clamps 20;
  • the flexible substrate 10 has a rectangular shape. According to actual production conditions, the clamp 20 can hold the flexible substrate 10 in different clamping manners. Referring to FIG. 4 to FIG. 7, the present invention provides the following four clamping methods:
  • the clamps 20 are four, and the four corners of the flexible substrate 10 are respectively clamped by the four clamps 20.
  • the clamps 20' are two, and opposite sides of the flexible substrate 10 are respectively clamped by the two clamps 20.
  • the length of the jig 20' may be set larger than the width of the flexible substrate 10.
  • the clamps 20" are four, and the four sides of the flexible substrate 10 are respectively clamped by the four clamps 20.
  • the length of the clamps 20" may be set to be larger than the flexibility.
  • the width of the substrate 10 is smaller than the length of the flexible substrate 10.
  • the jig 20"' is plural, and each side of the flexible substrate 10 is clamped by a plurality of jigs 20.
  • Step 3 performing exposure, development, etching, thin film deposition, annealing, and film forming processes on the flexible substrate 10; adjusting the flatness and shrinkage of the flexible substrate 10 by adjusting the jig 20 in each process; and controlling the clamp 20 to control The angle of the flexible substrate 10.
  • the shape of the flexible substrate 10 is finely adjusted by adjusting the jig 20 to control the exposure accuracy and keep the flexible substrate 10 horizontal.
  • the force of the jig 20 on the flexible substrate 10 is reduced to reduce the deformation of the flexible substrate 10.
  • the flexible substrate 10 is slightly tilted by adjusting the jig 20.
  • the flexible substrate 10 is placed in a vertical state by adjusting the jig 20.
  • the force applied to the jig 20 can be adjusted to reduce the deformation deflection and improve the precision.
  • the manufacturing method of the flexible display device clamps the edge of the flexible substrate by the clamp, and can adjust the clamp when the flexible substrate is deformed and flexed, thereby reducing deformation deflection of the flexible substrate, and can be accurately controlled.
  • Process accuracy avoid deformation deflection affecting process accuracy; different processes, adjustable flexible substrate is placed horizontally, obliquely, vertically, etc., fixtures can apply different forces to control accuracy, reduce substrate deformation; no need to attach, peel and other processes.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)

Abstract

本发明提供一种柔性显示装置的制造方法，包括如下步骤：步骤1、提供柔性基板、及数个夹具；步骤2、用所述数个夹具夹住柔性基板的边缘；步骤3、对柔性基板进行曝光、显影、蚀刻、薄膜沉积、退火、成膜制程；各制程中，通过调整夹具，调整柔性基板的平整度及收缩量；通过调整夹具，来控制柔性基板的角度。本发明通过夹具夹紧柔性基板的边缘，在柔性基板发生形变挠曲时，可对夹具进行调整，减少柔性基板形变挠曲，可以精准控制制程精度，避免形变挠曲影响制程精度；不同制程，可调节柔性基板为水平、倾斜，垂直等方式放置，夹具可施加不同力量，以控制精度，减少基板形变；无需贴附、剥离等工艺。

Description

柔性显示装置的制造方法 技术领域
本发明涉及显示技术领域，尤其涉及一种柔性显示装置的制造方法。
背景技术
目前，在显示技术领域，柔性显示器的显示技术种类较多，例如包括传统的液晶显示技术、双稳态液晶显示技术、有机发光二极管(organic light-emitting diode，OLED)显示技术、电泳显示技术、电致变色(electrochromism，EC)显示技术与电致发光(electroluminescent，EL)显示技术等。其中柔性有机发光二极管(flexible organic light-emitting diode，FOLED)显示器相比其他柔性显示器具有更多的优点，例如自发光显示、响应速度快、亮度高、视角宽、成本低等。而且，FOLED显示器是基于柔性有机材料的显示器，可以被卷曲、折叠、甚至作为可穿戴计算机的一部分，因此在显示效果好的便携产品和军事等特殊领域有非常广泛的应用。
传统的柔性显示器主要采用厚度小于100微米的柔性基材例如超薄玻璃、不锈钢薄膜以及塑料基材等。由于柔性基板存在易碎、易褶皱和变形等问题，实际生产过程中主要采用两种类型的生产方法：1、如附图1所示，将柔性基板100贴附在玻璃基板200上，或通过涂布的方式，涂布在刚性基板上，再进行薄膜晶体管阵列制作、OLED制作及封装等工序生产，最后，将玻璃基板等刚性基材剥离；该方法，制程过程容易产生应力，柔性基板容易发生翘曲变形，精度差，需要刚性基板作为衬底，制程完成后需要剥离，有静电破坏等风险；2、如附图2所示，将柔性基板100’通过卷绕方式卷绕在卷筒200’上，再进行生产，该方法，精度差，拉力控制难，工艺不成熟。
因此，如何固定柔性基板成为柔性显示器制作中的关键技术之一。
发明内容
本发明的目的在于提供一种柔性显示装置的制造方法，可在柔性显示装置的制程过程中调整柔性基板的平整度及收缩量，并控制柔性基板的角度，提高制程精度。
为实现上述目的，本发明提供一种柔性显示装置的制造方法，包括如下步骤：
步骤1、提供柔性基板、及数个夹具；
步骤2、用所述数个夹具夹住柔性基板的边缘；
步骤3、对柔性基板进行曝光、显影、蚀刻、薄膜沉积、退火、成膜制程；各制程中，通过调整夹具，调整柔性基板的平整度及收缩量；通过调整夹具，来控制柔性基板的角度。
步骤3中，在进行曝光制程时，通过调整夹具，来微调柔性基板的形状，以控制曝光精度。
步骤3中，在进行退火、薄膜沉积制程时，减小夹具对柔性基板的作用力，以减小柔性基板的形变。
步骤3中，在进行曝光制程时，通过调整夹具，使柔性基板保持水平。
步骤3中，在进行显影、蚀刻制程时，通过调整夹具，使柔性基板细微倾斜。
步骤3中，在成膜制程时，通过调整夹具，使柔性基板处于垂直状态。
所述柔性基板呈矩形，所述夹具为四个，步骤2中，所述柔性基板的四角分别被四个夹具夹紧。
所述柔性基板呈矩形，所述夹具为两个，步骤2中，所述柔性基板的相对两边分别被所述两个夹具夹紧。
所述柔性基板呈矩形，所述夹具为四个，步骤2中，所述柔性基板的四边分别被所述四个夹具夹紧。
所述柔性基板呈矩形，所述夹具为多个，步骤2中，所述柔性基板的每一边均被多个夹具夹紧。
本发明还提供一种柔性显示装置的制造方法，包括如下步骤：
步骤1、提供柔性基板、及数个夹具；
步骤2、用所述数个夹具夹住柔性基板的边缘；
步骤3、对柔性基板进行曝光、显影、蚀刻、薄膜沉积、退火、成膜制程；各制程中，通过调整夹具调整柔性基板的平整度及收缩量；通过调整夹具，来控制柔性基板的角度；
其中，步骤3中，在进行曝光制程时，通过调整夹具，来微调柔性基板的形状，以控制曝光精度；
其中，步骤3中，在进行退火、薄膜沉积制程时，减小夹具对柔性基板的作用力，以减小柔性基板的形变；
其中，步骤3中，在进行曝光制程时，通过调整夹具，使柔性基板保持水平；
其中，步骤3中，在进行显影、蚀刻制程时，通过调整夹具，使柔性 基板细微倾斜；
其中，步骤3中，在成膜制程时，通过调整夹具，使柔性基板处于垂直状态。
本发明的有益效果：本发明提供的柔性显示装置的制造方法，通过夹具夹紧柔性基板的边缘，在柔性基板发生形变挠曲时，可对夹具进行调整，减少柔性基板形变挠曲，可以精准控制制程精度，避免形变挠曲影响制程精度；不同制程，可调节柔性基板为水平、倾斜，垂直等方式放置，夹具可施加不同力量，以控制精度，减少基板形变；无需贴附，剥离等工艺。
为了能更进一步了解本发明的特征以及技术内容，请参阅以下有关本发明的详细说明与附图，然而附图仅提供参考与说明用，并非用来对本发明加以限制。
附图说明
下面结合附图，通过对本发明的具体实施方式详细描述，将使本发明的技术方案及其它有益效果显而易见。
附图中，
图1为一种现有柔性显示装置的制造方法示意图；
图2为另一种现有柔性显示装置的制造方法示意图；
图3为本发明柔性显示装置的制造方法的流程图；
图4为本发明柔性显示装置的制造方法夹具夹持柔性基板方式一示意图；
图5为本发明柔性显示装置的制造方法夹具夹持柔性基板方式二示意图；
图6为本发明柔性显示装置的制造方法夹具夹持柔性基板方式三示意图；
图7为本发明柔性显示装置的制造方法夹具夹持柔性基板方式四示意图；
图8为本发明柔性显示装置的制造方法步骤3中曝光制程示意图；
图9为本发明柔性显示装置的制造方法中调整发生形变挠曲的柔性基板示意图。
具体实施方式
为更进一步阐述本发明所采取的技术手段及其效果，以下结合本发明的优选实施例及其附图进行详细描述。
请参阅图3，本发明提供一种柔性显示装置的制造方法，包括如下步骤：
步骤1、提供柔性基板10、及数个夹具20；
步骤2、用所述数个夹具20夹住柔性基板10的边缘；
具体的，所述柔性基板10呈矩形，根据实际生产情况，夹具20夹持柔性基板10可采用不同的夹持方式，请参阅图4至图7，本发明提供以下四种夹持方式：
方式一，如图4所示，所述夹具20为四个，所述柔性基板10的四角分别被四个夹具20夹紧。
方式二，如图5所示，所述夹具20’为两个，所述柔性基板10的相对两边分别被所述两个夹具20夹紧。所述夹具20’的长度可以设置成大于所述柔性基板10的宽度。
方式三，如图6所示，所述夹具20”为四个，所述柔性基板10的四边分别被所述四个夹具20夹紧。所述夹具20”的长度可以设置成大于所述柔性基板10的宽度，小于所述柔性基板10的的长度。
方式四，如图7所示，所述夹具20”’为多个，所述柔性基板10的每一边均被多个夹具20夹紧。
步骤3、对柔性基板10进行曝光、显影、蚀刻、薄膜沉积、退火、成膜制程；各制程中，通过调整夹具20，调整柔性基板10的平整度及收缩量；通过调整夹具20，来控制柔性基板10的角度。
具体地，请参阅图8，在进行曝光制程时，通过调整夹具20，来微调柔性基板10的形状，以控制曝光精度，并使柔性基板10保持水平。
在进行退火、薄膜沉积制程时，减小夹具20对柔性基板10的作用力，以减小柔性基板10的形变。
在进行显影、蚀刻制程时，通过调整夹具20，使柔性基板10细微倾斜。
在成膜制程时，通过调整夹具20，使柔性基板10处于垂直状态。
如图9所示，当柔性基板10发生形变挠曲时，可通过对夹具20施加力进行调整，以减少形变挠曲，提高精度。
综上所述，本发明提供的柔性显示装置的制造方法，通过夹具夹紧柔性基板的边缘，在柔性基板发生形变挠曲时，可对夹具进行调整，减少柔性基板形变挠曲，可以精准控制制程精度，避免形变挠曲影响制程精度；不同制程，可调节柔性基板为水平、倾斜，垂直等方式放置，夹具可施加不同力量，以控制精度，减少基板形变；无需贴附，剥离等工艺。
以上所述，对于本领域的普通技术人员来说，可以根据本发明的技术方案和技术构思作出其他各种相应的改变和变形，而所有这些改变和变形 都应属于本发明权利要求的保护范围。

Claims (15)

  1. 一种柔性显示装置的制造方法，包括如下步骤：
    步骤1、提供柔性基板、及数个夹具；
    步骤2、用所述数个夹具夹住柔性基板的边缘；
    步骤3、对柔性基板进行曝光、显影、蚀刻、薄膜沉积、退火、成膜制程；各制程中，通过调整夹具调整柔性基板的平整度及收缩量；通过调整夹具，来控制柔性基板的角度。
  2. 如权利要求1所述的柔性显示装置的制造方法，其中，步骤3中，在进行曝光制程时，通过调整夹具，来微调柔性基板的形状，以控制曝光精度。
  3. 如权利要求1所述的柔性显示装置的制造方法，其中，步骤3中，在进行退火、薄膜沉积制程时，减小夹具对柔性基板的作用力，以减小柔性基板的形变。
  4. 如权利要求1所述的柔性显示装置的制造方法，其中，步骤3中，在进行曝光制程时，通过调整夹具，使柔性基板保持水平。
  5. 如权利要求1所述的柔性显示装置的制造方法，其中，步骤3中，在进行显影、蚀刻制程时，通过调整夹具，使柔性基板细微倾斜。
  6. 如权利要求1所述的柔性显示装置的制造方法，其中，步骤3中，在成膜制程时，通过调整夹具，使柔性基板处于垂直状态。
  7. 如权利要求1所述的柔性显示装置的制造方法，其中，所述柔性基板呈矩形，所述夹具为四个，步骤2中，所述柔性基板的四角分别被四个夹具夹紧。
  8. 如权利要求1所述的柔性显示装置的制造方法，其中，所述柔性基板呈矩形，所述夹具为两个，步骤2中，所述柔性基板的相对两边分别被所述两个夹具夹紧。
  9. 如权利要求1所述的柔性显示装置的制造方法，其中，所述柔性基板呈矩形，所述夹具为四个，步骤2中，所述柔性基板的四边分别被所述四个夹具夹紧。
  10. 如权利要求1所述的柔性显示装置的制造方法，其中，所述柔性基板呈矩形，所述夹具为多个，步骤2中，所述柔性基板的每一边均被多个夹具夹紧。
  11. 一种柔性显示装置的制造方法，包括如下步骤：
    步骤1、提供柔性基板、及数个夹具；
    步骤2、用所述数个夹具夹住柔性基板的边缘；
    步骤3、对柔性基板进行曝光、显影、蚀刻、薄膜沉积、退火、成膜制程；各制程中，通过调整夹具调整柔性基板的平整度及收缩量；通过调整夹具，来控制柔性基板的角度；
    其中，步骤3中，在进行曝光制程时，通过调整夹具，来微调柔性基板的形状，以控制曝光精度；
    其中，步骤3中，在进行退火、薄膜沉积制程时，减小夹具对柔性基板的作用力，以减小柔性基板的形变；
    其中，步骤3中，在进行曝光制程时，通过调整夹具，使柔性基板保持水平；
    其中，步骤3中，在进行显影、蚀刻制程时，通过调整夹具，使柔性基板细微倾斜；
    其中，步骤3中，在成膜制程时，通过调整夹具，使柔性基板处于垂直状态。
  12. 如权利要求11所述的柔性显示装置的制造方法，其中，所述柔性基板呈矩形，所述夹具为四个，步骤2中，所述柔性基板的四角分别被四个夹具夹紧。
  13. 如权利要求11所述的柔性显示装置的制造方法，其中，所述柔性基板呈矩形，所述夹具为两个，步骤2中，所述柔性基板的相对两边分别被所述两个夹具夹紧。
  14. 如权利要求11所述的柔性显示装置的制造方法，其中，所述柔性基板呈矩形，所述夹具为四个，步骤2中，所述柔性基板的四边分别被所述四个夹具夹紧。
  15. 如权利要求11所述的柔性显示装置的制造方法，其中，所述柔性基板呈矩形，所述夹具为多个，步骤2中，所述柔性基板的每一边均被多个夹具夹紧。
PCT/CN2015/079483 2015-04-27 2015-05-21 柔性显示装置的制造方法 Ceased WO2016173016A1 (zh)

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CN105578774A (zh) * 2015-12-25 2016-05-11 惠州中京电子科技有限公司 一种pcb板阴阳铜厚的制作方法
CN106783682B (zh) * 2016-12-15 2019-11-22 武汉华星光电技术有限公司 柔性显示屏制作装置及制作方法
CN110611051B (zh) 2018-06-15 2024-07-16 京东方科技集团股份有限公司 电子装置的制备方法、电子装置及其制备工具
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