WO2016155612A1 - Improved cascode radio frequency power amplifier - Google Patents
Improved cascode radio frequency power amplifier Download PDFInfo
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- WO2016155612A1 WO2016155612A1 PCT/CN2016/077787 CN2016077787W WO2016155612A1 WO 2016155612 A1 WO2016155612 A1 WO 2016155612A1 CN 2016077787 W CN2016077787 W CN 2016077787W WO 2016155612 A1 WO2016155612 A1 WO 2016155612A1
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- H—ELECTRICITY
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- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
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- the invention belongs to the technical field of radio frequency integrated circuits, and in particular relates to an improved cascode radio frequency power amplifier.
- the RF power amplifier is an indispensable key component in various wireless communication applications for power amplifying the modulated RF signal output by the transceiver to meet the power requirements of the RF signal required for wireless communication.
- RF power amplifiers are large-signal devices, and therefore semiconductor devices for manufacturing RF power amplifiers are required to have high breakdown voltage, high current density, and the like.
- semiconductor devices for manufacturing RF power amplifiers are required to have high breakdown voltage, high current density, and the like.
- small-signal circuits such as digital circuits and analog circuits, Si-based CMOS processes, GaAs-based HBT, pHEMT, etc., due to their high breakdown voltage and carrier mobility, in the field of RF power amplifiers It has been widely used.
- a typical RF power amplifier circuit, transistor 103 as an important active device in the RF power amplifier, is usually fabricated in Si or GaAs process in practice; RF power amplifier input signal port RFin through the input matching network 101 is coupled to the gate of transistor 103; the gate of transistor 103 is also coupled to bias voltage port Vbias of the RF power amplifier via bias circuit 102; the source of transistor 103 is coupled to ground; the drain of transistor 103 is passed through a choke inductor 104 is coupled to the supply voltage port Vcc of the RF power amplifier; the supply voltage port Vcc is also coupled to one end of the decoupling capacitor 105, the other end of the decoupling capacitor 105 is coupled to ground; the drain of the transistor 103 is also coupled through the output matching network 106 The output signal port RFout of the RF power amplifier.
- the input signal voltage swing of the RF power amplifier is low, and after the power amplification of the transistor 103, the voltage swing of the output signal is greatly increased.
- the voltage swing across the transistor's drain can typically reach 2 ⁇ Vcc.
- the voltage swing on the drain of the transistor will reach 10V.
- the RF power amplifier is operating in the Class-E state, the voltage swing across the drain of the transistor will be higher, above 3.5 ⁇ Vcc. It can be seen that the transistor in the RF power amplifier will withstand a swing much higher than the supply voltage, and breakdown of the transistor. Voltage and reliability put forward high requirements. The use of semiconductor processes with sufficiently high breakdown voltages to fabricate RF power amplifiers will severely limit the choice, losing design flexibility and reducing integration.
- the industry typically increases the breakdown voltage of devices by designing the RF power amplifier circuit as a cascode structure. As shown in Figure 2, it is a typical cascode RF power amplifier.
- the transistor 203 and the transistor 204 are active devices for realizing power amplification in the radio frequency power amplifier, and are usually fabricated by a Si or GaAs process in practice; the input signal port RFin of the radio frequency power amplifier is connected to the gate of the transistor 203 through the input matching network 201;
- the gate of transistor 203 is also coupled to bias voltage port Vbias1 of the RF power amplifier via bias circuit 202; the source of transistor 203 is coupled to ground; the drain of transistor 203 is coupled to the source of transistor 204; the gate of transistor 204 Connected to the bias voltage port Vbias2 of the RF power amplifier via bias circuit 205; the gate of transistor 204 is also coupled to one end of decoupling capacitor 206, the other end of decoupling capacitor 206 is coupled to
- transistor 203 is a common source stage and transistor 204 is a common gate; such a cascode structure has a higher power gain and a higher inverse than a single transistor common source structure. To the isolation; more importantly, the cascode structure has a higher breakdown voltage than the single transistor common source structure, allowing the RF power amplifier to have a higher operating voltage.
- the cascode RF power amplifier operating in the Class-A/AB/B state has a RF voltage swing of 2 ⁇ Vcc at the drain of the transistor 204 and a RF voltage swing at the drain of the transistor 203. Not more than Vcc. Therefore, the voltage swing between the drain and the source of the transistor 203 and the transistor 204 does not exceed 2 ⁇ Vcc, which ensures that the transistor operates in a safe region.
- the layout of the semiconductor device is designed to be a necessary step before chip fabrication for properly distributing the various portions of the same transistor on the silicon substrate in accordance with the designed circuit. In layout design, minimizing the area of the chip device is the ultimate goal of the designer.
- FIG. 3a it is a schematic diagram of a cascode structure, which is composed of a common source transistor 301 and a total
- the gate transistor 302 is composed; as shown in FIG. 3b, the circuit layout corresponding to the cascode structure.
- transistor 301 and transistor 302 are typically multi-gate finger structures on the layout, i.e., a plurality of transistors having a smaller gate width are connected in parallel to form transistor 301 and transistor 302 having a larger total gate width.
- the RF input signal is connected to the gate of the common source stage transistor 301 through a metal trace.
- the respective gate fingers of the transistor are labeled G in FIG.
- the source of the common source stage transistor 301 is connected to the ground hole array 303 through a metal trace.
- the source of the transistor is labeled S in Figure 3b;
- the drain of the common source transistor 301 is connected to the source of the common-gate transistor 302 through a metal trace, the drain of which is labeled D in Figure 3b;
- the gates of transistors 302 are connected together by metal traces 304 for biasing the gates of common gate stage transistors 302;
- the drains of common gate stage transistors 302 are connected together by metal traces and are connected to the RF
- the output signal port of the power amplifier is RFout.
- the cascode RF power amplifier has a performance advantage over the single-transistor common-source RF power amplifier, but the layout area of the cascode structure is almost twice that of the single-transistor common source structure.
- the single-transistor common source structure is more costly.
- the object of the present invention is to provide an improved cascode RF power amplifier, adopting a cascode structure and optimizing a layout structure, so that the RF power amplifier has high gain, high power, high linearity, high efficiency and the like.
- An improved cascode RF power amplifier with a common source stage transistor gate G1, a common source stage transistor source S, a common gate stage transistor gate G2, and a common gate stage transistor drain D on a substrate
- the RF input terminal RFin is connected to the common source stage transistor gate G1 through a metal trace
- the common source stage transistor source S is connected to the ground hole array through a metal trace
- the common gate transistor gate G2 is connected to the bias circuit through a metal trace.
- the drain D of the common-gate transistor is connected to the RF output terminal RFout through a metal trace.
- the common source stage transistor is an enhanced pHEMT transistor
- the common gate stage transistor is a depletion type pHEMT transistor.
- the double gate transistor layout structure proposed by the invention has a very compact structure and simplifies The connection relationship of the traditional cascode transistor structure reduces the parasitic capacitance between the metal traces on the layout, which helps to improve the performance of the RF power amplifier; more importantly, the dual gate transistor structure is more conventional than the conventional
- the source common-gate transistor structure can reduce the layout area by at least 40%, and even has a considerable area with a single-transistor common-source structure, which has a high cost advantage.
- the common source transistor is an enhancement transistor, and the common gate transistor is a depletion transistor.
- the RF power amplifier only needs a positive voltage and does not need a negative voltage to operate normally.
- GaAs E/D pHEMT dual-gate transistors can greatly improve the leakage current characteristics of RF power amplifiers in individually enhanced pHEMT devices.
- 1 is a circuit diagram of a typical RF power amplifier
- FIG. 2 is a circuit diagram of a conventional RF power amplifier of a common cascode structure
- 3a is a schematic diagram of a conventional cascode RF power amplifier
- 3b is a circuit layout of a conventional cascode RF power amplifier
- 4a is an equivalent schematic diagram of a radio frequency power amplifier of a cascode structure of the present invention.
- 4b is a circuit layout diagram of a radio frequency power amplifier of a cascode structure of the present invention.
- 4c is a cross-sectional view of a radio frequency power amplifier of a cascode structure of the present invention.
- a cascode transistor structure can be simplified to a transistor with four ports: common source transistor gate G1, common source transistor source S, common gate transistor gate Pole G2, common gate transistor drain D.
- the drain of the common source transistor is connected to the source of the common gate transistor and does not need to be connected to the outside world, so this node does not need to be embodied on the circuit; this cascode transistor structure as shown in FIG. 4a , defined in the present invention It is a "double gate transistor".
- FIG. 4b shows the layout structure of the dual gate transistor proposed in the present invention.
- the dual gate transistor 401 is depicted as a common multi-gate finger structure on the layout, that is, a plurality of transistors having a small gate width are connected in parallel to form a transistor 401 having a larger total gate width.
- the RF input signal RFin is connected to the common source stage transistor gate G1 of the dual gate transistor 401 through a metal trace; the common source stage transistor source S is connected to the ground hole array 402 through a metal trace, and the common gate transistor gate G2 passes through the metal Traces 403 are connected together for bias supply of the common-gate transistor gate G2; the common-gate transistor drain D is connected by metal traces and is connected to the output signal port RFout of the RF power amplifier.
- FIG. 4c which is a cross-sectional view of a dual gate transistor structure, on the semiconductor structure, the port pull-out structure of the node of the common-source transistor drain-common gate transistor source is omitted.
- the dual gate transistor layout structure proposed by the present invention has a very compact structure, which simplifies the connection relationship of the conventional cascode transistor structure, thereby reducing the parasitic capacitance between the metal traces on the layout. Helps improve the performance of RF power amplifiers; more importantly, the dual-gate transistor structure can reduce the layout area by at least 40% compared to the traditional cascode transistor structure, even with a single-transistor common-source structure, which is very high. Cost advantage.
- a dual gate transistor can be fabricated using a gallium arsenide enhancement/depletion mode high electron mobility field effect transistor process, namely a GaAs E/D pHEMT dual gate transistor.
- the common-source stage of the dual-gate transistor uses an enhanced pHEMT device, and the common-gate stage uses a depletion-type pHEMT device.
- the dual gate transistor has a very high breakdown voltage and can be used in high supply voltage applications; thus the dual gate transistor also has higher output power margin, as well as higher gain characteristics, reverse isolation. And other indicators.
- GaAs E/D pHEMT dual-gate transistor Since the common source of the GaAs E/D pHEMT dual-gate transistor is an enhancement transistor and the common-gate stage is a depletion transistor, the RF power amplifier requires only a positive voltage and does not require a negative voltage to operate normally. At the same time, GaAs E/D pHEMT dual-gate transistors can greatly improve the leakage current characteristics of RF power amplifiers in individually enhanced pHEMT devices.
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Abstract
An improved cascode radio frequency power amplifier. A common-source-stage transistor gate G1, a common-source-stage transistor source S, a common-gate-stage transistor gate G2 and a common-gate-stage transistor drain D are transversely disposed on a substrate. A radio frequency input end RFin is connected to the common-source-stage transistor gate G1 by means of a metal wire, the common-source-stage transistor source S is connected to a grounding hole array (402) by means of a metal wire, the common-gate-stage transistor gate G2 is connected to a bias circuit by means of a metal wire (403), and the common-gate-stage transistor drain D is connected to a radio frequency output end RFout by means of a metal wire. By using a cascode structure and optimizing a layout structure, the radio frequency power amplifier has performance advantages of high gain, high power, high linearity, high efficiency and the like; a layout area equivalent to that of a single-transistor common-source structure radio frequency power amplifier is maintained, so that low-cost advantages are achieved.
Description
本发明属于射频集成电路技术领域,具体涉及一种改进的共源共栅射频功率放大器。The invention belongs to the technical field of radio frequency integrated circuits, and in particular relates to an improved cascode radio frequency power amplifier.
射频功率放大器是各种无线通信应用中必不可少的关键部件,用于将收发信机输出的已调制射频信号进行功率放大,以满足无线通信所需的射频信号的功率要求。射频功率放大器属于大信号器件,因此要求用于制造射频功率放大器的半导体器件具有高击穿电压、高电流密度等特性。相对于数字电路、模拟电路等小信号电路所普遍采用的基于Si CMOS工艺,基于GaAs材料的HBT、pHEMT等工艺,由于其较高的击穿电压和载流子迁移速率,在射频功率放大器领域中得到了广泛的应用。The RF power amplifier is an indispensable key component in various wireless communication applications for power amplifying the modulated RF signal output by the transceiver to meet the power requirements of the RF signal required for wireless communication. RF power amplifiers are large-signal devices, and therefore semiconductor devices for manufacturing RF power amplifiers are required to have high breakdown voltage, high current density, and the like. Compared with small-signal circuits such as digital circuits and analog circuits, Si-based CMOS processes, GaAs-based HBT, pHEMT, etc., due to their high breakdown voltage and carrier mobility, in the field of RF power amplifiers It has been widely used.
如图1所示为一个典型的射频功率放大器电路,晶体管103作为射频功率放大器中的重要有源器件,在实际中通常采用Si或GaAs工艺制造;射频功率放大器的输入信号端口RFin通过输入匹配网络101连接到晶体管103的栅极;晶体管103的栅极还通过偏置电路102连接到射频功率放大器的偏置电压端口Vbias;晶体管103的源极连接到地;晶体管103的漏极通过扼流电感104连接到射频功率放大器的供电电压端口Vcc;供电电压端口Vcc还连接到去耦电容105的一端,去耦电容105的另外一端连接到地;晶体管103的漏极还通过输出匹配网络106连接到射频功率放大器的输出信号端口RFout。射频功率放大器的输入信号电压摆幅较低,经过晶体管103功率放大之后,输出信号的电压摆幅大幅提升。对于一个典型的Class-A/B/AB射频功率放大器,在供电电压Vcc下工作,晶体管漏极上的电压摆幅通常可以达到2×Vcc。譬如,当射频功率放大器的供电电压Vcc为5V时,晶体管漏极上的电压摆幅将达到10V。如果射频功率放大器工作于Class-E状态,那么晶体管漏极上的电压摆幅将会更高,达到3.5×Vcc以上。由此可见,射频功率放大器中的晶体管上将承受远高于供电电压的摆幅,对晶体管的击穿
电压及可靠性提出了很高的要求。选用足够高击穿电压的半导体工艺来制造射频功率放大器,将使得选择余地严重受限,丧失了设计灵活性并将降低集成度。As shown in Figure 1, a typical RF power amplifier circuit, transistor 103 as an important active device in the RF power amplifier, is usually fabricated in Si or GaAs process in practice; RF power amplifier input signal port RFin through the input matching network 101 is coupled to the gate of transistor 103; the gate of transistor 103 is also coupled to bias voltage port Vbias of the RF power amplifier via bias circuit 102; the source of transistor 103 is coupled to ground; the drain of transistor 103 is passed through a choke inductor 104 is coupled to the supply voltage port Vcc of the RF power amplifier; the supply voltage port Vcc is also coupled to one end of the decoupling capacitor 105, the other end of the decoupling capacitor 105 is coupled to ground; the drain of the transistor 103 is also coupled through the output matching network 106 The output signal port RFout of the RF power amplifier. The input signal voltage swing of the RF power amplifier is low, and after the power amplification of the transistor 103, the voltage swing of the output signal is greatly increased. For a typical Class-A/B/AB RF power amplifier, operating at supply voltage Vcc, the voltage swing across the transistor's drain can typically reach 2 × Vcc. For example, when the supply voltage Vcc of the RF power amplifier is 5V, the voltage swing on the drain of the transistor will reach 10V. If the RF power amplifier is operating in the Class-E state, the voltage swing across the drain of the transistor will be higher, above 3.5 × Vcc. It can be seen that the transistor in the RF power amplifier will withstand a swing much higher than the supply voltage, and breakdown of the transistor.
Voltage and reliability put forward high requirements. The use of semiconductor processes with sufficiently high breakdown voltages to fabricate RF power amplifiers will severely limit the choice, losing design flexibility and reducing integration.
为了使得较小击穿电压半导体工艺也可以用于制造射频功率放大器,业界通常通过将射频功率放大器电路设计为共源共栅结构来提高器件的击穿电压。如图2所示,为一个典型的共源共栅结构的射频功率放大器。晶体管203和晶体管204为射频功率放大器中实现功率放大的有源器件,在实际中通常采用Si或GaAs工艺制造;射频功率放大器的输入信号端口RFin通过输入匹配网络201连接到晶体管203的栅极;晶体管203的栅极还通过偏置电路202连接到射频功率放大器的偏置电压端口Vbias1;晶体管203的源极连接到地;晶体管203的漏极连接到晶体管204的源极;晶体管204的栅极通过偏置电路205连接到射频功率放大器的偏置电压端口Vbias2;晶体管204的栅极还连接到去耦电容206的一端,去耦电容206的另外一端连接到地;晶体管204的漏极通过扼流电感207连接到射频功率放大器的供电电压端口Vcc;供电电压端口Vcc还连接到去耦电容208的一端,去耦电容208的另外一端连接到地;晶体管207的漏极还通过输出匹配网络209连接到射频功率放大器的输出信号端口RFout。射频功率放大器的输入信号电压摆幅较低,经过晶体管203及晶体管204功率放大之后,输出信号的电压摆幅大幅提升。在共源共栅结构射频功率放大器中,晶体管203为共源级,晶体管204为共栅极;这样的共源共栅结构相比单晶体管共源结构具有更高的功率增益和更高的反向隔离度;更为重要的是,共源共栅结构比单晶体管共源结构具有更高的击穿电压,允许射频功率放大器有更高的工作电压。In order to enable smaller breakdown voltage semiconductor processes to be used to fabricate RF power amplifiers, the industry typically increases the breakdown voltage of devices by designing the RF power amplifier circuit as a cascode structure. As shown in Figure 2, it is a typical cascode RF power amplifier. The transistor 203 and the transistor 204 are active devices for realizing power amplification in the radio frequency power amplifier, and are usually fabricated by a Si or GaAs process in practice; the input signal port RFin of the radio frequency power amplifier is connected to the gate of the transistor 203 through the input matching network 201; The gate of transistor 203 is also coupled to bias voltage port Vbias1 of the RF power amplifier via bias circuit 202; the source of transistor 203 is coupled to ground; the drain of transistor 203 is coupled to the source of transistor 204; the gate of transistor 204 Connected to the bias voltage port Vbias2 of the RF power amplifier via bias circuit 205; the gate of transistor 204 is also coupled to one end of decoupling capacitor 206, the other end of decoupling capacitor 206 is coupled to ground; the drain of transistor 204 is passed through 扼The flow inductor 207 is coupled to the supply voltage port Vcc of the RF power amplifier; the supply voltage port Vcc is also coupled to one end of the decoupling capacitor 208, the other end of the decoupling capacitor 208 is coupled to ground; and the drain of the transistor 207 is also coupled through the output matching network 209. Connect to the output signal port RFout of the RF power amplifier. The input signal voltage swing of the RF power amplifier is low, and after the power amplification of the transistor 203 and the transistor 204, the voltage swing of the output signal is greatly increased. In a cascode RF power amplifier, transistor 203 is a common source stage and transistor 204 is a common gate; such a cascode structure has a higher power gain and a higher inverse than a single transistor common source structure. To the isolation; more importantly, the cascode structure has a higher breakdown voltage than the single transistor common source structure, allowing the RF power amplifier to have a higher operating voltage.
如图2所示,工作于Class-A/AB/B状态的共源共栅结构射频功率放大器,晶体管204漏极的射频电压摆幅为2×Vcc,晶体管203漏极的射频电压摆幅则不超过Vcc。因此,晶体管203及晶体管204各自漏极与源极之间的电压摆幅都不超过2×Vcc,保证了晶体管工作于安全区域。As shown in Figure 2, the cascode RF power amplifier operating in the Class-A/AB/B state has a RF voltage swing of 2 × Vcc at the drain of the transistor 204 and a RF voltage swing at the drain of the transistor 203. Not more than Vcc. Therefore, the voltage swing between the drain and the source of the transistor 203 and the transistor 204 does not exceed 2 × Vcc, which ensures that the transistor operates in a safe region.
半导体器件的版图设计为芯片制备之前必须的一个工序,用于将多个相同的晶体管的各个部分按照所设计的电路合理的分布在硅衬底上。在版图设计中,芯片器件面积的最小化为设计人员的终极目标。The layout of the semiconductor device is designed to be a necessary step before chip fabrication for properly distributing the various portions of the same transistor on the silicon substrate in accordance with the designed circuit. In layout design, minimizing the area of the chip device is the ultimate goal of the designer.
如图3a所示,为一个共源共栅结构原理图,由共源级晶体管301及共
栅极晶体管302组成;如图3b所示,为这个共源共栅结构所对应的电路版图。在图3b中,晶体管301和晶体管302在版图上通常为多栅指结构,即由多个较小栅宽的晶体管并联组成总栅宽较大的晶体管301和晶体管302。射频输入信号通过金属走线连接到共源级晶体管301的栅极,晶体管的各个栅指在图3b中标注为G;共源级晶体管301的源极通过金属走线连接到接地孔阵列303,晶体管的源极在图3b中标注为S;共源级晶体管301的漏极通过金属走线连接到了共栅级晶体管302的源极,晶体管的漏极在图3b中标注为D;共栅级晶体管302的栅极通过金属走线304连接在一起,用于为共栅级晶体管302的栅极进行偏置供电;共栅级晶体管302的漏极通过金属走线连接在一起,并连接到了射频功率放大器的输出信号端口RFout。As shown in FIG. 3a, it is a schematic diagram of a cascode structure, which is composed of a common source transistor 301 and a total
The gate transistor 302 is composed; as shown in FIG. 3b, the circuit layout corresponding to the cascode structure. In Figure 3b, transistor 301 and transistor 302 are typically multi-gate finger structures on the layout, i.e., a plurality of transistors having a smaller gate width are connected in parallel to form transistor 301 and transistor 302 having a larger total gate width. The RF input signal is connected to the gate of the common source stage transistor 301 through a metal trace. The respective gate fingers of the transistor are labeled G in FIG. 3b; the source of the common source stage transistor 301 is connected to the ground hole array 303 through a metal trace. The source of the transistor is labeled S in Figure 3b; the drain of the common source transistor 301 is connected to the source of the common-gate transistor 302 through a metal trace, the drain of which is labeled D in Figure 3b; The gates of transistors 302 are connected together by metal traces 304 for biasing the gates of common gate stage transistors 302; the drains of common gate stage transistors 302 are connected together by metal traces and are connected to the RF The output signal port of the power amplifier is RFout.
由上可知,共源共栅结构射频功率放大器相比单晶体管共源结构射频功率放大器具有性能上的优势,但是共源共栅结构的版图面积几乎是单晶体管共源结构的二倍,具有比单晶体管共源结构更加高昂的成本。It can be seen from the above that the cascode RF power amplifier has a performance advantage over the single-transistor common-source RF power amplifier, but the layout area of the cascode structure is almost twice that of the single-transistor common source structure. The single-transistor common source structure is more costly.
发明内容Summary of the invention
本发明目的是:提供一种改进的共源共栅射频功率放大器,采用共源共栅结构,并优化版图结构,使得该射频功率放大器具有高增益、高功率、高线性度、高效率等性能优势,同时又保持与单晶体管共源结构射频功率放大器相当的版图面积,使其具有了成本优势。The object of the present invention is to provide an improved cascode RF power amplifier, adopting a cascode structure and optimizing a layout structure, so that the RF power amplifier has high gain, high power, high linearity, high efficiency and the like. The advantages, while maintaining a layout area comparable to a single-transistor common-source RF power amplifier, give it a cost advantage.
本发明的技术方案是:The technical solution of the present invention is:
一种改进的共源共栅射频功率放大器,在衬底上横向设有共源级晶体管栅极G1、共源级晶体管源极S、共栅级晶体管栅极G2、共栅级晶体管漏极D;射频输入端RFin通过金属走线连接共源级晶体管栅极G1,共源级晶体管源极S通过金属走线连接接地孔阵列,共栅级晶体管栅极G2通过金属走线连接偏置电路,共栅级晶体管漏极D通过金属走线连接射频输出端RFout。An improved cascode RF power amplifier with a common source stage transistor gate G1, a common source stage transistor source S, a common gate stage transistor gate G2, and a common gate stage transistor drain D on a substrate The RF input terminal RFin is connected to the common source stage transistor gate G1 through a metal trace, and the common source stage transistor source S is connected to the ground hole array through a metal trace, and the common gate transistor gate G2 is connected to the bias circuit through a metal trace. The drain D of the common-gate transistor is connected to the RF output terminal RFout through a metal trace.
进一步的,所述共源级晶体管为增强型pHEMT晶体管,共栅级晶体管为耗尽型pHEMT晶体管。Further, the common source stage transistor is an enhanced pHEMT transistor, and the common gate stage transistor is a depletion type pHEMT transistor.
本发明的优点是:The advantages of the invention are:
1.本发明所提出的双栅晶体管版图结构具有非常紧凑的结构,简化了
传统共源共栅晶体管结构的连接关系,从而减小了版图上各条金属走线之间的寄生电容,有助于提升射频功率放大器的性能;更重要的,双栅晶体管结构相比传统共源共栅晶体管结构,版图面积可以缩小至少40%,甚至与单晶体管共源结构具有相当的面积,具有很高的成本优势。1. The double gate transistor layout structure proposed by the invention has a very compact structure and simplifies
The connection relationship of the traditional cascode transistor structure reduces the parasitic capacitance between the metal traces on the layout, which helps to improve the performance of the RF power amplifier; more importantly, the dual gate transistor structure is more conventional than the conventional The source common-gate transistor structure can reduce the layout area by at least 40%, and even has a considerable area with a single-transistor common-source structure, which has a high cost advantage.
2.共源级晶体管为增强型晶体管,共栅级晶体管为耗尽型晶体管,射频功率放大器仅需正电压而无需负电压即可正常工作。同时,GaAs E/D pHEMT双栅晶体管还可以极大地改善单独增强型pHEMT器件射频功率放大器的漏电流特性。2. The common source transistor is an enhancement transistor, and the common gate transistor is a depletion transistor. The RF power amplifier only needs a positive voltage and does not need a negative voltage to operate normally. At the same time, GaAs E/D pHEMT dual-gate transistors can greatly improve the leakage current characteristics of RF power amplifiers in individually enhanced pHEMT devices.
下面结合附图及实施例对本发明作进一步描述:The present invention is further described below in conjunction with the accompanying drawings and embodiments:
图1为现有典型的射频功率放大器电路图;1 is a circuit diagram of a typical RF power amplifier;
图2为现有典型的共源共栅结构的射频功率放大器电路图;2 is a circuit diagram of a conventional RF power amplifier of a common cascode structure;
图3a为现有典型的共源共栅结构的射频功率放大器的原理图;3a is a schematic diagram of a conventional cascode RF power amplifier;
图3b为现有典型的共源共栅结构的射频功率放大器的电路版图;3b is a circuit layout of a conventional cascode RF power amplifier;
图4a为本发明共源共栅结构的射频功率放大器的等效原理图;4a is an equivalent schematic diagram of a radio frequency power amplifier of a cascode structure of the present invention;
图4b为本发明共源共栅结构的射频功率放大器的电路版图;4b is a circuit layout diagram of a radio frequency power amplifier of a cascode structure of the present invention;
图4c为本发明共源共栅结构的射频功率放大器的剖面图。4c is a cross-sectional view of a radio frequency power amplifier of a cascode structure of the present invention.
为使本发明的目的、技术方案和优点更加清楚明了,下面结合具体实施方式并参照附图,对本发明进一步详细说明。应该理解,这些描述只是示例性的,而并非要限制本发明的范围。此外,在以下说明中,省略了对公知结构和技术的描述,以避免不必要地混淆本发明的概念。The present invention will be further described in detail below with reference to the specific embodiments thereof and the accompanying drawings. It is to be understood that the description is not intended to limit the scope of the invention. In addition, descriptions of well-known structures and techniques are omitted in the following description in order to avoid unnecessarily obscuring the inventive concept.
实施例1:Example 1:
如图4a所示,在原理上,可以将一个共源共栅晶体管结构简化为一个具有四个端口的晶体管:共源级晶体管栅极G1、共源级晶体管源极S、共栅级晶体管栅极G2、共栅级晶体管漏极D。共源级晶体管的漏极与共栅级晶体管的源极连接在一起,且无需与外界有连接关系,因此这个节点在电路上也无需体现;这种如图4a所示的共源共栅晶体管结构,在本发明中定义
为“双栅晶体管”。As shown in Figure 4a, in principle, a cascode transistor structure can be simplified to a transistor with four ports: common source transistor gate G1, common source transistor source S, common gate transistor gate Pole G2, common gate transistor drain D. The drain of the common source transistor is connected to the source of the common gate transistor and does not need to be connected to the outside world, so this node does not need to be embodied on the circuit; this cascode transistor structure as shown in FIG. 4a , defined in the present invention
It is a "double gate transistor".
如图4b所示为本发明所提出的双栅晶体管的版图结构。双栅晶体管401在版图上画为常见的多栅指结构,即由多个较小栅宽的晶体管并联组成总栅宽较大的晶体管401。射频输入信号RFin通过金属走线连接到双栅晶体管401的共源级晶体管栅极G1;共源级晶体管源极S通过金属走线连接到接地孔阵列402,共栅级晶体管栅极G2通过金属走线403连接在一起,用于为共栅级晶体管栅极G2进行偏置供电;共栅级晶体管漏极D通过金属走线连接在一起,并连接到了射频功率放大器的输出信号端口RFout。Figure 4b shows the layout structure of the dual gate transistor proposed in the present invention. The dual gate transistor 401 is depicted as a common multi-gate finger structure on the layout, that is, a plurality of transistors having a small gate width are connected in parallel to form a transistor 401 having a larger total gate width. The RF input signal RFin is connected to the common source stage transistor gate G1 of the dual gate transistor 401 through a metal trace; the common source stage transistor source S is connected to the ground hole array 402 through a metal trace, and the common gate transistor gate G2 passes through the metal Traces 403 are connected together for bias supply of the common-gate transistor gate G2; the common-gate transistor drain D is connected by metal traces and is connected to the output signal port RFout of the RF power amplifier.
如图4c所示,为双栅晶体管结构的剖面图,在半导体结构上其省略了共源级晶体管漏极-共栅级晶体管源极这个节点的端口引出结构。As shown in FIG. 4c, which is a cross-sectional view of a dual gate transistor structure, on the semiconductor structure, the port pull-out structure of the node of the common-source transistor drain-common gate transistor source is omitted.
综上,本发明所提出的双栅晶体管版图结构具有非常紧凑的结构,简化了传统共源共栅晶体管结构的连接关系,从而减小了版图上各条金属走线之间的寄生电容,有助于提升射频功率放大器的性能;更重要的,双栅晶体管结构相比传统共源共栅晶体管结构,版图面积可以缩小至少40%,甚至与单晶体管共源结构具有相当的面积,具有很高的成本优势。In summary, the dual gate transistor layout structure proposed by the present invention has a very compact structure, which simplifies the connection relationship of the conventional cascode transistor structure, thereby reducing the parasitic capacitance between the metal traces on the layout. Helps improve the performance of RF power amplifiers; more importantly, the dual-gate transistor structure can reduce the layout area by at least 40% compared to the traditional cascode transistor structure, even with a single-transistor common-source structure, which is very high. Cost advantage.
作为本发明的一个具体实施例,双栅晶体管可以采用砷化镓增强/耗尽型赝配高电子迁移率场效应晶体管工艺来制造,即GaAs E/D pHEMT双栅晶体管。并且,双栅晶体管的共源级采用增强型pHEMT器件,共栅级采用耗尽型pHEMT器件。在这样的配置下,双栅晶体管具有非常高的击穿电压,可以用于高供电电压应用;从而双栅晶体管还具有更高的输出功率容限,以及更高的增益特性、反向隔离度等指标。由于GaAs E/D pHEMT双栅晶体管共源级为增强型晶体管,共栅级为耗尽型晶体管,射频功率放大器仅需正电压而无需负电压即可正常工作。同时,GaAs E/D pHEMT双栅晶体管还可以极大地改善单独增强型pHEMT器件射频功率放大器的漏电流特性。As a specific embodiment of the present invention, a dual gate transistor can be fabricated using a gallium arsenide enhancement/depletion mode high electron mobility field effect transistor process, namely a GaAs E/D pHEMT dual gate transistor. Also, the common-source stage of the dual-gate transistor uses an enhanced pHEMT device, and the common-gate stage uses a depletion-type pHEMT device. In this configuration, the dual gate transistor has a very high breakdown voltage and can be used in high supply voltage applications; thus the dual gate transistor also has higher output power margin, as well as higher gain characteristics, reverse isolation. And other indicators. Since the common source of the GaAs E/D pHEMT dual-gate transistor is an enhancement transistor and the common-gate stage is a depletion transistor, the RF power amplifier requires only a positive voltage and does not require a negative voltage to operate normally. At the same time, GaAs E/D pHEMT dual-gate transistors can greatly improve the leakage current characteristics of RF power amplifiers in individually enhanced pHEMT devices.
应当理解的是,本发明的上述具体实施方式仅仅用于示例性说明或解释本发明的原理,而不构成对本发明的限制。因此,在不偏离本发明的精神和范围的情况下所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。此外,本发明所附权利要求旨在涵盖落入所附权利要求范围和边界、或者这种范围和边界的等同形式内的全部变化和修改例。
The above-described embodiments of the present invention are intended to be illustrative only and not to limit the invention. Therefore, any modifications, equivalent substitutions, improvements, etc., which are made without departing from the spirit and scope of the invention, are intended to be included within the scope of the invention. Rather, the scope of the appended claims is intended to cover all such modifications and modifications
Claims (2)
- 一种改进的共源共栅射频功率放大器,其特征在于,在衬底上横向设有共源级晶体管栅极G1、共源级晶体管源极S、共栅级晶体管栅极G2、共栅级晶体管漏极D;射频输入端RFin通过金属走线连接共源级晶体管栅极G1,共源级晶体管源极S通过金属走线连接接地孔阵列,共栅级晶体管栅极G2通过金属走线连接偏置电路,共栅级晶体管漏极D通过金属走线连接射频输出端RFout。An improved cascode RF power amplifier characterized in that a common source stage transistor gate G1, a common source stage transistor source S, a common gate stage transistor gate G2, and a common gate level are laterally disposed on a substrate. Transistor drain D; RF input terminal RFin is connected to common source transistor gate G1 through metal trace, common source transistor source S is connected to ground hole array through metal trace, and common gate transistor gate G2 is connected by metal trace The bias circuit, the drain D of the common-gate transistor is connected to the RF output terminal RFout through a metal trace.
- 根据权利要求1所述的改进的共源共栅射频功率放大器,其特征在于,所述共源级晶体管为增强型pHEMT晶体管,共栅级晶体管为耗尽型pHEMT晶体管。 The improved cascode radio frequency power amplifier of claim 1 wherein said common source stage transistor is an enhanced pHEMT transistor and said common gate stage transistor is a depletion mode pHEMT transistor.
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CN105490646B (en) * | 2015-11-24 | 2018-04-06 | 广州一芯信息科技有限公司 | Common source and common grid amplifier and cascode cathode-input amplifier |
WO2017098578A1 (en) * | 2015-12-08 | 2017-06-15 | 三菱電機株式会社 | Power amplifier |
CN105720936B (en) * | 2016-01-21 | 2018-01-09 | 中国电子科技集团公司第二十四研究所 | A kind of trsanscondutance amplifier based on automatic biasing cascode structure |
CN108574466B (en) * | 2018-07-23 | 2023-10-20 | 上海艾为电子技术股份有限公司 | Radio frequency low noise amplifier |
CN112564635B (en) * | 2020-12-10 | 2023-03-21 | 广东工业大学 | LNA-oriented gain-increasing and noise-reducing circuit |
CN116667801B (en) * | 2023-07-28 | 2023-10-20 | 宜确半导体(苏州)有限公司 | Radio frequency power amplifier, semiconductor die and electronic equipment |
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