WO2016144131A1 - Dispositif de saisie - Google Patents

Dispositif de saisie Download PDF

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Publication number
WO2016144131A1
WO2016144131A1 PCT/KR2016/002444 KR2016002444W WO2016144131A1 WO 2016144131 A1 WO2016144131 A1 WO 2016144131A1 KR 2016002444 W KR2016002444 W KR 2016002444W WO 2016144131 A1 WO2016144131 A1 WO 2016144131A1
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WO
WIPO (PCT)
Prior art keywords
flow path
body portion
vacuum pressure
picker
atmospheric pressure
Prior art date
Application number
PCT/KR2016/002444
Other languages
English (en)
Korean (ko)
Inventor
유홍준
Original Assignee
(주)제이티
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020160010928A external-priority patent/KR20160110083A/ko
Application filed by (주)제이티 filed Critical (주)제이티
Priority to SG11201707360PA priority Critical patent/SG11201707360PA/en
Priority to CN201680014563.3A priority patent/CN107405774B/zh
Publication of WO2016144131A1 publication Critical patent/WO2016144131A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a picker mounted on a pick-and-place device for transporting an element and adsorbing the element.
  • a picker is a mechanism that is installed in a pick-and-place device that picks up an element and transports it to be seated at a predetermined seating position, so as to adsorb the element.
  • a suction passage is formed therein, and an element is sucked at one end. It is provided with a rod coupled to the adsorption unit, and a vertical driving unit for moving the rod in the vertical direction.
  • the up and down drive unit is configured to operate by pneumatic pressure, and comprises a cylinder that provides a space in which pneumatic pressure is applied, and a piston that slides inside the cylinder by pneumatic pressure. Then, the piston and the rod of the up-and-down drive part is connected through a link or the like, thereby, the rod is moved in the vertical direction by sliding the piston in the interior of the cylinder.
  • the conventional picker picks up a device by forming a vacuum pressure, that is, a negative pressure, at the pick-up position at the pick-up position and releases the vacuum pressure at the pick-up position by releasing the vacuum pressure.
  • conventional pickers generally form a positive pressure in the adsorption section for rapid loading of the element at the loading position.
  • the device when the size of the device becomes finer, such as an LED device, when a positive pressure is formed in the adsorption unit that adsorbs the device, the device may be scattered or may be prevented from being loaded in the correct position.
  • the positive pressure or the negative pressure in the picker's adsorption head is formed by a pneumatic delivery line.
  • the positive or negative pressure forming time through the pneumatic delivery line is determined by the length of the pneumatic delivery line, so to reduce the positive pressure or negative pressure forming time.
  • There is a limitation in minimizing the length of the line which in turn serves as a limitation of the processing speed of the device.
  • a picker for transporting devices as a picker performance also requires fast movement from a pickup position to a loading position, faster device pickup, and device loading. Doing.
  • An object of the present invention is to provide a picker capable of performing pickup and stacking of elements more quickly in order to solve the above problems of the prior art.
  • Another object of the present invention is to provide a picker having a structure capable of reducing the weight of the device, and capable of quickly moving to the pick-up position and the stacking position.
  • the suction passage 210 is formed therein suction path 210 is a vacuum pressure is applied to the adsorption unit 220 is adsorbed at one end 220 ) Is coupled to the rod 200, and up and down driving unit 100 for moving the rod 200 in the vertical direction, the upper and lower driving unit 100 is detachably coupled to the support structure and the rod (
  • the rod body 200 is coupled to the first body portion 110 to be movable in the vertical direction, and is fixedly coupled to the rod 200 is moved in the vertical direction by the electric drive for the first body portion 110 to the rod
  • the second body portion 120 and the first body portion 110 and the second body to move the 200 in at least one direction of the upper direction and the lower direction with respect to the first body portion 110 Installed on at least one of the portions 120 to the first body portion 110. It discloses a picker comprising the electric driving unit for driving the movement of the second body section in an upward direction, and at least any one of directions of the
  • the first body part 110 has a rectangular parallelepiped shape in which the rod 200 penetrates in the vertical direction so as to be movable in the vertical direction
  • the second body part 120 includes the first body part ( Corresponding to the shape of 100) may have a thin rectangular parallelepiped shape.
  • the second body portion 120 when viewed from the upper side so that the rod 200 penetrates up and down is formed a fixed coupling portion 121 is formed with a 'U' shaped slot is fixed to the rod 200 Can be.
  • the upper and lower driving parts at least one guide member fixedly coupled to the second body portion 120 in parallel with the longitudinal direction of the rod 200 and movable up and down to the first body portion 110 ( 130).
  • the electric drive unit may include any one of a linear motor, a piezo element, a solenoid, and a VCM.
  • the electric drive unit, the electromagnet portion 510 is installed in the first body portion 110 to generate a magnetic force by applying electricity, and the magnetic force is installed in the second body portion 120 is installed in the electromagnet portion 510 When generated, it may include a magnetic force reaction member 520 that acts on the magnetic force so that the attraction force between the first body portion 110 and the second body portion 120 acts.
  • the electric drive unit a first electric drive unit for driving the movement in the upper direction of the second body portion 120 relative to the first body portion 110, and the first relative to the first body portion 110 It may include a second electric motor drive for driving the movement of the lower body portion 120 in the downward direction.
  • the electric drive unit drives the movement of the rod 200 only in one of the upper direction and the lower direction of the second body portion 120 with respect to the first body portion 110, the vertical drive portion It may include one or more elastic members 150 for movement in the opposite direction of the second body portion 120 relative to the first body portion 110.
  • the present invention also includes a rod (200) having a suction passage (210) in which a vacuum pressure is applied therein and an adsorption portion (220) to which the element (10) is adsorbed at one end thereof;
  • An up and down driving part 100 for moving the rod 200 in the up and down direction;
  • Discloses a picker comprising an atmospheric pressure forming part 400 for forming the atmospheric pressure in the suction part 220 when the vacuum pressure is released in the suction passage 210.
  • the atmospheric pressure forming unit 400 is coupled to the lower end of the rod 200 to form a first flow path forming member 410 and a second flow path forming member 420 connected to the suction flow path 210.
  • a piston member 430 which is moved upwardly when the vacuum pressure is transmitted through the suction passage 210 along the connection passage to transfer the vacuum pressure to the adsorption part 220;
  • When the vacuum pressure is released in the suction flow path 210 may include an elastic member 440 to move the piston member 430 to the lower side to transmit the atmospheric pressure to the adsorption unit 220 by the piston member 430. have.
  • the second flow path forming member 420 is formed with a piston space 429 through which the piston member 430 is movable, and penetrates to the side of the second flow path forming member 420 to form an exterior and a piston space 429.
  • One or more side through holes 421 are formed to be connected to each other, and extend upward from the upper side of the side through holes 421 along the inner circumferential surface of the second flow path forming member 420 and communicate with the suction passage 210.
  • Communication grooves 422 may be formed.
  • the piston member 430, the first port 431 is formed on the side surface of the piston member 430, the bottom surface at a position corresponding to the upper and lower through-hole 423 formed in the second flow path forming member 420
  • a pneumatic transfer passage 433 is formed to connect the second port 432 formed therein, and communicates with the side through hole 421 in a state where the first port 431 is located at the lower side, so that external atmospheric pressure is pneumatic.
  • the transfer passage 433, the second port 432 and the upper and lower through-hole 423 is delivered to the adsorption unit 220, the vacuum pressure when the upper vacuum pressure of the piston member 430 is delivered As a result, the piston member 430 is moved upward and the first port 431 is moved upward along the piston space 429 so as to communicate with the communication groove 422 so that the side surface of the piston space 429 is moved. It is preferable that the atmospheric pressure is not transmitted to the adsorption part 220 by blocking the side through hole 421.
  • the atmospheric pressure forming unit 400 is coupled to the rod 200, the vacuum pressure connection passage 513 connected to the suction passage 210 is formed to penetrate up and down, and the vacuum pressure connection passage 513 from the outside.
  • the main body 510 may include a valve member 531 which is connected to or blocks the vacuum pressure connecting passage 513 and the atmospheric pressure connecting passage from each other.
  • the valve member 531 blocks communication between the atmospheric pressure connecting channel to the vacuum pressure connecting channel 513 by the vacuum pressure in the suction channel 210.
  • the communication block of the atmospheric pressure connection flow path to the vacuum pressure connection flow path 513 may be released by the elastic force or the own weight of the elastic member.
  • the atmospheric pressure forming unit 400 is inserted into an insertion groove 519 formed in the main body 510 so that at least a portion of the atmospheric pressure connection flow path intersects, and the valve member 531 is installed to be movable therein. It may include a housing 521.
  • the housing 521 may have an opening 540 communicating with the vacuum pressure connecting passage 513 and opened and closed by the valve member 531.
  • valve member 531 may be installed to allow the valve member 531 to fall by its own weight when the vacuum pressure is released from the suction passage 210.
  • the housing 521 may include an elastic member 532 that applies an elastic force to the valve member 531 so that the valve member 531 opens the opening 540 when the vacuum pressure is released from the suction passage 210. Can be installed.
  • the atmospheric pressure forming unit the atmospheric pressure connecting pipe connected to the suction passage 220;
  • An air tank storing compressed air for forming at atmospheric pressure in a space corresponding to a volume including the suction passage, the adsorption portion, and the atmospheric pressure connecting tube when opened; It may include an on-off valve installed between the air tank and the atmospheric pressure connection pipe for opening and closing the air tank.
  • At least one of the rod and the suction part may have one or more side through holes penetrating inward from an outer circumferential surface thereof, and the atmospheric pressure forming part may be moved along an outer circumferential surface of any one of the rod and the suction part to open and close the side through holes.
  • opening and closing member It may include an opening and closing member moving unit for moving the opening and closing member along the outer peripheral surface of any one of the rod and the suction unit.
  • connection flow path forming unit 561 includes an inner diameter D1 larger than an outer diameter D0 of the valve member 531 to allow movement and air of the valve member 531 having a spherical shape. It may have a cylinder structure having.
  • connection flow path forming unit 561 has a connection portion 564 connected to the vacuum pressure connection flow path 513 to facilitate opening and closing by moving the valve member 531 of the valve member 531. It may be formed to have an inner diameter smaller than the outer diameter (D0).
  • connection flow path forming portion 561 may be in communication with the outside of the main body 510 while the separation preventing means for preventing the valve member 531 from escaping to the outside of the main body 510. It is preferred to be provided.
  • the separation preventing means has an inner diameter (D2) larger than the inner diameter (D1) of the connection flow path forming portion 561 to connect between the other end of the connection flow path forming portion 561 and the outer surface of the body portion (510).
  • An expansion passage 562 is formed, and the insertion member 534 is inserted into the expansion passage 562 and allows the air inflow from the body portion 510 to the connection passage forming portion 561.
  • connection flow path forming part 561 is formed in the longitudinal direction of the main body part 510, and the main body part 510 connects the connection flow path forming part 561 and the vacuum pressure connection flow path 513.
  • An auxiliary flow path 566 may be formed.
  • the atmospheric pressure forming unit 400 applies an elastic force to the valve member 531 such that the valve member 531 is separated from one end of the connecting passage forming unit 561.
  • it further comprises an elastic member 532 for releasing the blocking of the connection flow path forming portion 561 to the vacuum pressure connection flow path 513, the main body portion 510, the connection flow path forming portion 561
  • An elastic member insertion groove 563 extending inwardly from one end may be further formed.
  • the main body portion 510 is connected to the connection portion 564 connected to the connection flow path forming portion 561 so that the atmospheric pressure outside the main body portion 510 can be more quickly transmitted to the vacuum pressure connection passage 513.
  • a communication passage 568 may be formed to communicate with the outside.
  • the separation preventing means may include a coupling ring 591 coupled to the main body 510 to cover the connection flow path forming unit 561.
  • the main body 510 may include a recess 519 into which the coupling ring 591 is inserted to smoothly couple the coupling ring 591.
  • the connecting portion 564 connected to the vacuum pressure connecting passage 513 has a tapered shape in which an inner diameter decreases while the longitudinal cross-sectional shape goes to the vacuum pressure connecting passage 513 for smooth opening and closing by the valve member 531.
  • the picker according to the present invention has an advantage that the reaction speed is faster and lighter than that of a conventional picker using a pneumatic cylinder by driving the rod up and down of the rod picking up the element by electricity such as a solenoid.
  • reaction speed of the picker is improved and reduced in weight, so that it is possible to perform faster when picking up or loading the device, and the weight of the picker is improved, thereby improving the overall moving speed of the picker.
  • the inertia is reduced when the transfer tool including the plurality of pickers is moved, thereby reducing vibration during operation of the device, thereby enabling more stable device processing.
  • the picker according to the present invention has an advantage in that it is possible to quickly and stably perform a place of the picked-up device by additionally including an atmospheric pressure forming unit capable of quickly performing atmospheric pressure in the adsorption unit to release the pick-up of the device.
  • FIG. 1 is a perspective view showing a picker according to the present invention.
  • FIG. 2 is a longitudinal sectional view showing the picker of FIG. 1, showing the picked up state of the device;
  • FIG. 3 is a longitudinal sectional view showing a state in which the rod is moved upward by the up-down driving unit in the picker of FIG. 1 and before or before picking up the element.
  • FIG. 4 is a cross-sectional view illustrating a state in which atmospheric pressure is formed in the pickup unit by the atmospheric pressure forming unit in FIG. 2.
  • FIG. 5 is a partial cross-sectional view showing the atmospheric pressure forming unit in detail in FIG.
  • FIGS. 6 is a partial cross-sectional view illustrating a state in which a vacuum pressure is formed in the pickup unit for the device pickup in FIGS. 2 and 3.
  • FIG. 7 to 9 are side views showing embodiments of the formation position of the atmospheric pressure forming portion of FIG.
  • FIG. 10A is a cross-sectional view illustrating another embodiment of the atmospheric pressure forming unit coupled to the picker of FIG. 1, in which a vacuum pressure is formed in the adsorption unit to adsorb the device.
  • FIG. 10B is a partial cross-sectional view showing a state in which atmospheric pressure is formed in the adsorption unit by the atmospheric pressure forming unit in the configuration of FIG. 10A.
  • FIG. 11A is a cross-sectional view of another embodiment of an atmospheric pressure forming unit coupled to the picker of FIG. 1, in which a vacuum pressure is formed in an adsorption unit to adsorb a device.
  • FIG. 11B is a partial cross-sectional view showing a state in which atmospheric pressure is formed in the adsorption unit by the atmospheric pressure forming unit in the configuration of FIG. 11A.
  • FIG. 11B is a partial cross-sectional view showing a state in which atmospheric pressure is formed in the adsorption unit by the atmospheric pressure forming unit in the configuration of FIG. 11A.
  • FIG. 12A is a cross-sectional view illustrating another embodiment of an atmospheric pressure forming unit coupled to the picker of FIG. 1, in which a vacuum pressure is formed in an adsorption unit to adsorb a device.
  • FIG. 12B is a partial cross-sectional view showing a state in which atmospheric pressure is formed in the adsorption unit by the atmospheric pressure forming unit in the configuration of FIG. 12A.
  • FIG. 13A is a cross-sectional view of another embodiment of an atmospheric pressure forming unit coupled to the picker of FIG. 1, in which a vacuum pressure is formed in an adsorption unit to adsorb a device.
  • FIG. 13B is a partial sectional view showing a state in which atmospheric pressure is formed in the adsorption unit by the atmospheric pressure forming unit in the configuration of FIG. 13A.
  • FIG. 14A is a cross-sectional view illustrating another embodiment of an atmospheric pressure forming unit coupled to the picker of FIG. 1, in which a vacuum pressure is formed in an adsorption unit to adsorb a device.
  • FIG. 14B is a partial cross-sectional view showing a state in which atmospheric pressure is formed in the adsorption unit by the atmospheric pressure forming unit in the configuration of FIG. 14A.
  • FIG. 14C is a partial perspective view showing a part of the configuration including the atmospheric pressure forming portion of FIG. 14A.
  • 15 is a pneumatic control circuit diagram showing still another embodiment of the atmospheric pressure forming unit coupled to the picker.
  • 16A and 16B are conceptual views illustrating yet another embodiment of an atmospheric pressure forming unit coupled to a picker.
  • the picker according to the present invention has a suction passage 210 in which a vacuum pressure is applied therein, and an adsorption unit 220 to which an element 10 is adsorbed is coupled to one end thereof.
  • the rod 200 has a configuration in which a suction passage 210 in which a vacuum pressure is applied is formed therein and an adsorption part 220 in which an element 10 is adsorbed is coupled to one end thereof.
  • the rod 200 is a hollow cylinder such that a pneumatic transfer tube (not shown) for transferring a vacuum pressure for adsorption of the element 10 is connected.
  • the rod 200 may have various shapes such as a circle and a polygon. have.
  • the adsorption part 220 coupled to the lower end of the rod 200 is a member that picks up the element 10 by the vacuum pressure transmitted by the suction passage 210, and according to the type, size, and structure of the element. It may have one or more members and structures.
  • the up and down drive unit 100 may be configured in various ways as a configuration for moving the rod 200 in the vertical direction.
  • the vertical drive unit 100 of the picker according to the present invention uses electricity, such as a solenoid, a VCM (voice coil motor), and any configuration may be used as long as the configuration uses electricity.
  • electricity such as a solenoid, a VCM (voice coil motor), and any configuration may be used as long as the configuration uses electricity.
  • the vertical drive unit 100 is detachably coupled to the support structure and the first body portion 110 is coupled to the rod 200 to be movable in the vertical direction, the rod 200 is fixedly coupled to the The second body for moving the rod 200 in at least one of the upper direction and the lower direction relative to the first body portion 110 by moving in the vertical direction by the electric drive with respect to the first body portion 110.
  • the upper and lower directions of the second body portion 120 with respect to the first body portion 110 are installed on at least one of the portion 120 and the first body portion 110 and the second body portion 120. It may include an electric drive unit for driving the movement in at least one of the directions.
  • the first body part 110 is detachably coupled to the support structure, and the rod 200 is configured to be coupled to be movable in the vertical direction.
  • the first body part 110 may be detachably coupled to the support structure and may have a thin rectangular parallelepiped shape so that the rod 200 may be coupled to be movable in the vertical direction.
  • the first body portion 110 having a rectangular parallelepiped shape is preferably detachably coupled to the support structure at a small side.
  • the rectangular parallelepiped first body part 110 is preferably coupled to penetrate in the vertical direction so that the rod 200 can move in the vertical direction.
  • the first body part 110 is formed with a first through-hole 111 formed in the vertical direction through which the rod 200 is inserted.
  • first through holes 111 are provided with bushes 512 and 513 at upper and lower ends thereof to allow the rod 200 to move up and down smoothly.
  • first through hole 111 may be provided with a grounding member 516 for grounding the static electricity generated by the friction caused by the movement of the rod 200 to the outside.
  • the first body part 110 may further include a second through hole 112 for shanghai movement of the guide member 130 to be described later.
  • the second through hole 112 is formed similarly to the first through hole 111, and bushes 514 and 515 are installed at upper and lower ends for smooth movement of the guide member 130.
  • the second body portion 120 is fixedly coupled to the rod 200 and moved up and down by electric driving with respect to the first body portion 110 to move the rod 200 with respect to the first body portion 110.
  • Various configurations are possible as the configuration for moving in at least one of the upper direction and the lower direction.
  • the second body part 120 may have a thin rectangular parallelepiped shape corresponding to the shape of the first body part 100.
  • the second body part 120 has a fixed coupling part 121 having a 'U'-shaped slot formed thereon when the rod 200 penetrates up and down, that is, viewed from above, After the rod 200 is installed through and tightened by the bolt 511, the rod 200 is fixedly coupled.
  • the rod 200 is vertically movable by the first body part 110 to which the rod 200 is movable, the second body part 120 to which the rod 200 is fixed, and the vertical drive of the vertical drive part to be described later.
  • the up and down direction of the rod 200 is driven.
  • the vertical drive unit at least one guide member 130 is fixedly coupled to the second body portion 120 in parallel with the longitudinal direction of the rod 200 and coupled to the first body portion 110 to be movable up and down. ) May be included.
  • the guide member 130 is fixedly coupled to the second body portion 120 in parallel with the longitudinal direction of the rod 200, and is configured in various configurations as the configuration is coupled to the first body portion 110 so as to be movable up and down. It is possible.
  • the movement of the rod 200 at the same time to prevent the shaking and rotation in the lateral direction can do.
  • the rod 200 and the first body 110 do not necessarily need to be coupled.
  • the coupling between the guide member 130 and the second body portion 120 may be the same as or similar to the coupling structure of the rod 200 described above.
  • the coupling between the guide member 130 and the first body 110 may be the same as or similar to the coupling structure of the rod 200 described above.
  • the second body part 120 has been described as being located below the first body part 110, but may be located above the first body part 110.
  • the electric drive unit is installed in at least one of the first body portion 110 and the second body portion 120 of the upper and lower directions of the second body portion 120 relative to the first body portion 110.
  • Various configurations are possible as the configuration for driving the movement in at least one direction.
  • the electric drive unit a linear motor, a piezo element, a solenoid, VCM, etc. can be configured in accordance with the operation principle.
  • the electric driving unit is installed in the first body part 110 to generate a magnetic force by applying electricity, and the second body part 120.
  • Installed in the magnetic force response member such as an iron member or a permanent magnet acting on the magnetic force so that the attraction force between the first body portion 110 and the second body portion 120 acts when a magnetic force is generated in the electromagnet portion 510.
  • 520 may include.
  • the electric drive unit can configure both the movement in the upper direction and the lower direction, such as VCM, when driving only the movement in any one of the upper direction and the lower direction, like the solenoid Further configuration is needed to drive the movement of.
  • the electric drive unit may include a first electric drive unit for driving the movement in the upper direction, and a second electric drive unit for driving the movement in the lower direction.
  • the electric drive unit drives the movement of the rod 200 only in one of the upper direction and the lower direction
  • the upper and lower drive unit further moves one or more elastic members 150, such as a spring It may include.
  • the elastic member 150 has a first body portion 110 and the second body portion 120 in consideration of the electric drive portion to act as a attraction force between the first body portion 110 and the second body portion 120. ) Can act as a repulsive force.
  • the elastic member 150 when the electric drive acts as a repulsive force between the first body portion 110 and the second body portion 120, the first body portion 110 and the second body portion 120 It can be installed between and act as an attraction force.
  • the elastic member 150 may include a first coil spring into which the rod 200 is inserted between the first body part 110 and the second body part 120, and a second coil spring into which the guide member 130 is fitted. It may include.
  • the picker having the configuration as described above when the electric drive unit is not driven, the picker having the configuration as described above is positioned with a distance between the first body part 110 and the second body part 120 at a rod ( 200 is maintained to be moved downward.
  • the electric drive unit in the vertical drive of the vertical drive, is installed on at least one of the first body portion 110 and the second body portion 120 by the electric drive It is to drive the vertical movement by the electric drive for the first body portion (110).
  • the vertical driving unit using electricity uses a piezoelectric element, a ball screw including an electric motor, a linear motor (linear motor), a solenoid, a VCM, etc. Any configuration can be used as long as it can implement driving.
  • the conventional picker picks up a device by forming a vacuum pressure, that is, a negative pressure, at the pick-up position at the pick-up position and releases the vacuum pressure at the pick-up position by releasing the vacuum pressure.
  • conventional pickers generally form a positive pressure in the adsorption section for rapid loading of the element at the loading position.
  • the device when the size of the device becomes finer, such as an LED device, when a positive pressure is formed in the adsorption unit that adsorbs the device, the device may be scattered or may be prevented from being loaded in the correct position.
  • the picker according to the present invention may further include an atmospheric pressure forming unit 400 coupled to the rod 200 to rapidly form an atmospheric pressure in the adsorption unit 220 when the device pickup is released.
  • the atmospheric pressure forming unit 400 may be located at any one of an upper portion, a lower portion, and an intermediate portion as a configuration coupled to the rod 200.
  • the atmospheric pressure is transmitted to the nearest portion to the adsorption unit 220, and it is preferable that the bottom of the rod 200 is installed.
  • atmospheric pressure forming unit 400 may be configured integrally with the adsorption unit 220.
  • the atmospheric pressure forming unit 400 is configured to rapidly form the atmospheric pressure in the adsorption unit 220 when the device pickup is released, various configurations are possible.
  • the atmospheric pressure forming unit 400 is coupled to the vacuum flow path, for example, the lower end of the rod 200, suction flow path 210
  • a first flow path forming member 410 and a second flow path forming member 420 forming a connection flow path connected to the second flow path;
  • a piston member 430 which is moved upward when the vacuum pressure is transmitted through the suction passage 210 along the connection passage to transfer the vacuum pressure to the adsorption unit 220;
  • the piston member 430 may be moved downward to include an elastic member 440 which transfers atmospheric pressure to the adsorption part 220 by the piston member 430.
  • the first flow path forming member 410 and the second flow path forming member 420 are configured to form a connection flow path that is connected to the suction flow path 210 by being coupled to a vacuum flow path, for example, the lower end of the rod 200.
  • a vacuum flow path for example, the lower end of the rod 200.
  • the second flow path forming member 420 may include a piston space 429 capable of moving the piston member 430, which will be described later, passing through the side to connect the outside and the piston space 429.
  • a side through hole 421 may be formed, and a communication groove 422 extending upward along an inner circumferential surface from an upper side of the side through hole 421 may be formed.
  • the piston space 429 is formed in the second flow path forming member 420 to allow the piston member 430 to move, and may be formed as a cylinder space having a shape corresponding to the outer shape of the piston member 430. .
  • the one or more side through holes 421 are formed to penetrate the side of the second flow path forming member 420 to connect the outside and the piston space 429, and the first port 431 and pneumatic transfer described later.
  • the atmospheric pressure of the outside of the second flow path forming member 420 is transmitted to the suction part 220.
  • the communication groove 422 is formed to extend along the inner circumferential surface of the second flow path forming member 420 from the upper side of the side through hole 421 and to receive the vacuum pressure from the suction passage 210.
  • In communication with the 210 is connected to the first port 431 and the pneumatic transfer passage 433 to be described later, the vacuum pressure formed in the suction passage 210 to be transmitted to the suction unit 220.
  • the communication groove 422 may be in communication with the suction passage 210 by various structures such as a groove 439 formed on the upper surface of the piston member 430.
  • the second flow path forming member 420 is formed through the upper and lower through holes 423 for transmitting a vacuum or atmospheric pressure to the adsorption unit 220.
  • the extension portion 424 extending downward in the shape of the outer diameter is reduced for a smooth coupling with the adsorption unit 220 at the lower end of the second flow path forming member 420 Preferably formed.
  • the first flow path forming member 410 is coupled to the second flow path forming member 420 to form a piston space 429 capable of moving the piston member 430, and to receive a vacuum pressure upward and downward.
  • the through hole 411 is formed.
  • first flow path forming member 410 may have a hub portion 412 protruding downward for stable installation of the elastic member 440 to be described later.
  • the piston member 430 is moved upward when the vacuum pressure is transferred through the suction flow path 210 along the connection flow path to transfer the vacuum pressure to the adsorption part 220.
  • the piston member 430 has a cylindrical shape so as to be movable along the piston space 429, the first port 431 formed on the side and the bottom formed in the position corresponding to the upper and lower through-hole 423
  • a pneumatic transfer passage 433 is formed to connect the two ports 432.
  • the first port 431 is formed on the side surface of the piston member 430 and communicates with the side through-hole 421 described above in a state of being located at the lower side, so that external atmospheric pressure is pneumatically transmitted. It is transmitted to the adsorption part 220 through the flow path 433, the second port 432, and the upper and lower through holes 423.
  • the outer peripheral surface of the piston member 430, the annular groove 434 formed concave in the portion including the first port 431. Is preferably formed.
  • the first port 431 is moved upward along the piston space 429 to communicate with the communication groove 422 described above.
  • the side surface of the piston space 429 blocks the side through hole 421 so that atmospheric pressure is not transmitted to the adsorption part 220.
  • the first port 431 is in communication with the communication groove 422, so that the vacuum pressure formed on the upper side of the piston member 430 is a pneumatic transfer passage 433, the second port 432 and the top and bottom
  • the through hole 423 is delivered to the adsorption unit 220.
  • the piston member 430 it is preferable that engineering plastic is used in consideration of workability, frictional force and airtightness.
  • the elastic member 440 is configured to move the piston member 430 downward when the vacuum pressure is released in the suction flow path 210 to transfer the atmospheric pressure to the suction unit 220 by the piston member 430. Configuration is possible.
  • the elastic member 440 may be configured of a coil spring or the like.
  • the atmospheric pressure forming unit 400 is another embodiment (second embodiment and third embodiment), and as shown in FIGS. 10A to 11B, is coupled to the rod 200 and the suction flow path 210.
  • a main body portion 510 having a vacuum pressure connection flow path 513 connected therethrough and vertically formed therein and an atmospheric pressure connection flow path formed to connect the vacuum pressure connection flow path 513 from the outside; It may be installed in the main body 510 and may include a valve member 531 for communicating or blocking the vacuum pressure connection channel 513 and the atmospheric pressure connection channel to each other.
  • the main body portion 510 is coupled to the rod 200, the vacuum pressure connection flow path 513 connected to the suction flow path 210 is formed to penetrate up and down, so as to connect the vacuum pressure connection flow path 513 from the outside.
  • the configuration in which the atmospheric pressure connection flow path is formed are possible as the configuration in which the atmospheric pressure connection flow path is formed.
  • the main body 510 is detachably coupled to the rod 200 so as to communicate with the suction passage 210 of the rod 200 at an upper end thereof, and the suction unit 220, that is, the suction head is detachable at the lower end thereof. Possibly combined.
  • the valve member 531 is installed in the main body 510 and is configured to communicate or block the vacuum connection passage 513 and the atmospheric pressure connection passage with each other.
  • valve member 531 can be configured in various ways depending on the installation form of the main body 510, such as the second embodiment shown in Figs. 10A and 10B and the third embodiment shown in Figs. 11A and 11B. Do.
  • the valve member 531 when the vacuum pressure is formed in the suction flow path 210, the valve member 531 is connected to the vacuum pressure connection flow path 513 by the vacuum pressure in the suction flow path 210.
  • the communication blocking of the atmospheric pressure connection flow path with respect to the vacuum pressure connection flow path 513 may be released by the elastic force of the elastic member.
  • the atmospheric pressure forming unit 400 is inserted into the insertion groove 519 formed in the main body portion 510 so that at least a portion of the atmospheric pressure connection flow path and the valve member 531 is installed in the movable housing 521 may be included.
  • the housing 521 communicates with the vacuum pressure connection passage 513 and has an opening 540 that is opened and closed by the valve member 531.
  • the valve member 531 When the vacuum pressure is released from the suction passage 210, the valve member 531 is disposed.
  • the elastic member 532 may be installed to apply an elastic force to the valve member 531 to open the opening 540.
  • the housing 521, the upper and lower ends are preferably sealed with one or more sealing members 522 so that the valve member 531 is installed therein and the atmospheric pressure connection flow path can be formed.
  • the housing 521 may be provided with a first sealing member 522 at one end thereof and a second sealing member 523 having at least one through hole 523a formed at the other end thereof in communication with the outside. Can be.
  • valve member 531 may be installed on the second sealing member 523 and an elastic member 532 may be installed between the valve member 531 and the first sealing member 522.
  • an auxiliary cylinder member 524 may be additionally installed on an inner circumferential surface of the elastic member 532 to form the opening 540.
  • the housing 521 may have one or more grooves 525 formed along the outer circumferential surface of the valve member 531 to allow linear movement of the valve member 531 and to allow communication of air toward the outer circumferential surface.
  • the housing 521 is formed with through-holes 521a and 521b formed along the vacuum pressure connection channel 513 at the side to connect the vacuum pressure connection channel 513 formed in the main body 510 up and down. do.
  • the opening 540 opened and closed by the valve member 531 may be variously formed by the auxiliary cylinder member 524.
  • the valve member 531 is installed in the main body 510 and is configured to communicate or block the vacuum connection passage 513 and the atmospheric pressure connection passage with each other.
  • valve member 531 may have any structure as long as it can open and close the opening 540 described above, such as a spherical shape.
  • the valve member 531 when the vacuum pressure is formed in the suction flow path 210, the valve member 531 is connected to the vacuum pressure connection flow path by the vacuum pressure in the suction flow path 210.
  • the communication of the atmospheric pressure connection flow path 550 to the 513 is cut off, and when the vacuum pressure is released from the suction flow path 210, the communication block of the atmospheric pressure connection flow path 550 to the vacuum pressure connection flow path 513 is released by its own weight. can do.
  • the atmospheric pressure connection passage 550 is formed to connect the vacuum pressure connection passage 513 at the side of the main body 510, and is opened and closed by the valve member 531.
  • the atmospheric pressure connection passage 550 may be formed by one or more straight passages 551 and 552.
  • the straight passages 551 and 552 may include a first straight passage 551 connecting the vacuum pressure connecting passage 513 in the side direction of the main body 510 and an up and down direction of the main body 510.
  • the first linear channel 551 and the second linear channel 552 connecting to the outside of the main body 510 may be formed.
  • the first straight channel 551 may be perforated by machining in the side direction of the main body 510, and may be sealed by the sealing member 536 at the side of the main body 510 after the perforation.
  • the sealing member 536 is inserted into the first straight passage 551 to seal the end portion of the first straight passage 551, and a spherical member or the like is pressed into and fixed to the first straight passage 551.
  • a spherical member or the like is pressed into and fixed to the first straight passage 551.
  • the atmospheric pressure forming unit 400 is inserted into the insertion groove 519 formed in the body portion 510 so that at least a portion of the atmospheric pressure connection passage 550 intersects, the valve member 531 is movable inside. It may include a housing 521 is installed.
  • the housing 521 communicates with the vacuum pressure connecting passage 513 and is formed with an opening 540 that is opened and closed by the valve member 531.
  • the valve member 531 may be installed to allow the valve member 531 to fall.
  • the housing 521, the upper and lower ends are preferably sealed with at least one sealing member 529 so that the valve member 531 is installed therein and the atmospheric pressure connection flow path 550 is formed.
  • the housing 521 has a first sealing member 529 at one end thereof, and a second sealing member having an opening 540 opened and closed by a valve member 531 at the other end thereof. 528 may be installed.
  • the valve member 531 is installed in the main body 510 and is configured to communicate or block the vacuum connection passage 513 and the atmospheric pressure connection passage with each other.
  • valve member 531 may have any structure as long as it can open and close the opening 540 described above, such as a spherical shape.
  • valve member 531 is installed on the lower side of the second sealing member 528, it is preferable that the size is smaller than the inner peripheral surface of the housing 521.
  • the configuration of the atmospheric pressure forming unit according to the embodiment shown in Figs. 11A to 15B is limited in the mechanical configuration such as processing, assembly, etc. when applied to the picker picking up the element 10 of a very small size.
  • the atmospheric pressure forming unit 400 is coupled to the rod 200, the suction flow path ( A main body portion 510 having a vacuum pressure connection channel 513 connected to the upper and lower sides of the vacuum pressure connection channel 513, the atmospheric pressure connection channel formed to connect the vacuum pressure connection channel 513 from the outside; Installed in the main body 510 and includes a valve member 531 for communicating or blocking the vacuum connection passage 513 and the atmospheric pressure connection passage, and the installation of the atmospheric pressure connection passage and the valve member 531 formed in the body
  • the structure can be configured to be as simple as possible.
  • the valve member 531 may be any member as long as it is a member capable of opening and closing the vacuum pressure connection passage 513 to be described later, and preferably has a spherical shape in consideration of workability and assemblability.
  • the atmospheric pressure connection flow path includes a connection flow path forming part 561, one end of which is connected to the vacuum pressure connection flow path 513, opened and closed by the movement of the valve member 531, and the other end of which is in communication with the outside of the main body part 510. can do.
  • connection flow path forming unit 561 is a structure that allows the movement of the valve member 531, and the movement of the valve member 531 having a spherical shape and the outer diameter D0 of the valve member 531 to allow air to pass through. It is preferable to have a cylinder structure having a large inner diameter D1.
  • the length of the connection flow path forming unit 561 is appropriately selected in consideration of the workability according to the overall size of the main body 510, the outer diameter D0 of the valve member 531, and the slid movement.
  • connection flow path forming portion 561 One end of the connection flow path forming portion 561 has a connection portion 564 connected to the vacuum pressure connection flow path 513 so as to be easily opened and closed by the movement of the valve member 531. It is formed to have an inner diameter smaller than D0).
  • connection portion 564 connected to the vacuum pressure connection passage 513 has a tapered shape in which the inner diameter decreases while the longitudinal cross-sectional shape goes to the vacuum pressure connection passage 513 for smooth opening and closing by the valve member 531. This is preferable.
  • connection flow path forming portion 561 is provided with a separation preventing means for preventing communication of the valve member 531 to the outside of the body portion 510 while being able to communicate with the outside of the body portion 510. .
  • the separation preventing means may be any structure as long as it prevents the valve member 531 from escaping from the connection flow path forming portion 561 to the outside of the main body portion 510.
  • connection flow path forming unit 561 For example, the separation preventing means, the valve member 531 is inserted into the connection flow path forming unit 561, and the other end of the connection flow path forming unit 561 is deformed through machining or the like (connection flow path forming unit 561). It can be achieved by reducing the inner diameter of the other end.
  • the separation preventing means may be made by inserting the valve member 531 into the connection flow path forming unit 561 and then fixedly coupled to the other end of the connection flow path forming unit 561.
  • the separation preventing means has an inner diameter (D2) larger than the inner diameter (D1) of the connection flow path forming portion 561 and of the connection flow path forming portion 561
  • Expansion passage 562 is formed to connect between the other end and the outer surface of the body portion 510, and is inserted into the expansion passage 562 to allow air inflow from the body portion 510 to the connection flow path forming portion 561. It may be made of an insertion member (534).
  • the expansion passage 562 has an inner diameter D2 larger than the inner diameter D1 of the connection passage forming unit 561 and is formed to connect between the other end of the connection passage forming unit 561 and the outer surface of the main body unit 510.
  • the flow path may have a structure similar to that of the connection flow path forming unit 561.
  • the insertion member 534 is inserted into the expansion passage 562 and is configured to allow air inflow from the main body 510 to the connection passage forming unit 561.
  • the insertion member 534 may be configured as a spherical member having an outer diameter D1 that is larger than the inner diameter D1 of the connection channel forming unit 561 and smaller than the inner diameter D2 of the expansion channel 562. have.
  • the insertion member 534 After the insertion member 534 is inserted into the outside of the main body 510 through the mechanical processing (reference numeral 535 in Figs. 12A to 13B) and the like to the expansion passage 562. Outgoing is prevented.
  • a lengthwise groove is formed on the inner circumferential surface of the expansion passage 562 or a roughness is formed on the surface of the insertion member 534 so as to be connected from the outside of the main body 510 through the expansion passage 562.
  • the atmospheric pressure may be transmitted to the flow path forming unit 561.
  • valve member 531 inserted into the connection flow path forming unit 561 is formed by the pressure difference between the two sides based on the valve member 531 when the vacuum pressure is formed in the vacuum pressure connection flow path 513.
  • One side of the unit 561 is moved to block the connection flow path forming unit 561 with respect to the vacuum pressure connection flow path 513.
  • valve member 531 moves away from one end of the connection passage forming unit 561 to connect the connection passage forming unit 561 to the vacuum pressure connecting passage 513. Will unblock.
  • valve member 531 needs to be away from one end of the connection passage forming unit 561.
  • connection flow path forming part 561 when the connection flow path forming part 561 is formed in the longitudinal direction of the main body part 510, that is, in the vertical direction, it is dropped by the weight of the valve member 531.
  • the valve member 531 When the vacuum pressure is released to the 513, the valve member 531 may be separated from one end of the connection flow path forming part 561 to release the blocking of the connection flow path forming part 561 with respect to the vacuum pressure connection flow path 513.
  • connection channel forming unit 561 when the connection channel forming unit 561 is formed in the longitudinal direction of the main body unit 510, the main body unit 510 is connected to the connection channel forming unit 561 and the vacuum pressure connection channel ( Auxiliary flow passage 566 connecting the 513 may be formed.
  • the auxiliary flow path 566 is a flow path connecting the connection flow path forming unit 561 and the vacuum pressure connection flow path 513 and the vacuum pressure connection flow path 513 from the side surface of the main body 510 through mechanical processing or the like. After being drilled to connect, it may be sealed by the sealing member 535 in the side portion of the body portion 510.
  • the singer sealing member 535 is configured to seal the end of the auxiliary passage 566 at the side portion of the main body 510, and may be formed of various members such as a spherical member press-fitted to the end of the auxiliary passage 566. have.
  • the end of the auxiliary flow path 566 may be sealed by other sealing means such as welding other than the sealing member 535, of course.
  • connection flow path forming unit 561 when the connection flow path forming unit 561 is formed in a direction perpendicular to the length direction of the main body 510, that is, in a horizontal direction, the connection flow path for the vacuum pressure connection flow path 513.
  • the blocking state of the forming unit 561 may be maintained.
  • the atmospheric pressure forming unit 400 when the vacuum pressure is released from the vacuum pressure connection passage 513, the elastic force to the valve member 531 so that the valve member 531 is away from one end of the connection passage forming unit 561.
  • it may further include an elastic member 532 for releasing the blocking of the connection flow path forming portion 561 to the vacuum pressure connection flow path (513).
  • the elastic member 532 is configured to apply an elastic force to the valve member 531 so that the valve member 531 moves away from one end of the connection flow path forming portion 561 when the vacuum pressure is released from the vacuum pressure connection flow path 513.
  • Various configurations are possible.
  • the main body portion 510 is further formed with an elastic member insertion groove 563 extending inward from one end of the connection flow path forming portion 561.
  • the elastic member insertion groove 563 is a recess formed in the main body portion 510 for installation of the elastic member 532, and is formed in the shape of the connection flow path forming portion 561 of the cylinder structure and the valve member 531. In consideration of shape and size, a cylinder structure having an inner diameter D3 smaller than the inner diameter D0 of the valve member 531 may be achieved.
  • the elastic member insertion groove 563 is formed by mechanical processing such as milling, and is formed primarily as shown in FIGS. 12A and 12B, and a connection portion 564 and a connection flow path forming portion 561 and an expansion flow path. 562 may be formed in order.
  • connection flow path forming portion 561 in particular the connection portion 564 connected to the vacuum pressure connection flow path 513 so that the atmospheric pressure outside the main body 510 to the vacuum pressure connection flow path 513 can be more quickly transmitted. It is preferable that the communication flow path 568 that can communicate with the outside of the main body portion 510 is formed.
  • the communication passage 568 may also be used to prevent the possibility of blocking the expansion passage 562 by the insertion member 534.
  • the communication flow path 568 is configured to allow the atmospheric pressure outside the main body 510 to be transmitted to the vacuum pressure connection flow path 513 more quickly.
  • the connection flow path forming part 561 from the outside of the main body part 510. may be formed as a through-hole formed through the connection portion 564 connected to the vacuum pressure connection passage 513.
  • the communication passage 568 may be formed as a through hole formed to penetrate through the connecting portion 564 from the outer peripheral surface of the longitudinal direction or the side of the main body portion 510.
  • the communication flow path 568 may be configured in various ways, such as a groove formed in the longitudinal direction of the inner circumferential surface of the connection flow path forming unit 561.
  • connection flow path forming portion 561 is provided with a separation preventing means for preventing communication of the valve member 531 to the outside of the body portion 510 while being able to communicate with the outside of the body portion 510. .
  • the separation preventing means may be any structure as long as it prevents the valve member 531 from escaping from the connection flow path forming portion 561 to the outside of the main body portion 510.
  • connection flow path forming unit 561 For example, the separation preventing means, the valve member 531 is inserted into the connection flow path forming unit 561, and the other end of the connection flow path forming unit 561 is deformed through machining or the like (connection flow path forming unit 561). It can be achieved by reducing the inner diameter of the other end.
  • the body portion 510 to cover the connection flow path forming portion 561 It may include a coupling ring 591 coupled to.
  • the coupling ring 591 is configured to be coupled to the main body portion 510 to cover the connection flow path forming portion 561 such as a C clip ring is possible in a variety of configurations.
  • the main body 510 may include a recess 519 into which the coupling ring 591 is inserted to smoothly couple the coupling ring 591.
  • the groove 519 is a configuration in which the coupling ring 591 is inserted for smooth coupling of the coupling ring 591, and various configurations are possible.
  • the groove 519 and the coupling ring 591 is preferably coupled to each other with a predetermined error for smooth flow of the outside air through the connection flow path forming unit 561.
  • each member in the drawings are shown in a state of being closely installed, due to manufacturing errors, surface roughness, etc. due to the minute gap between the body portion 510 and the coupling ring 591 sufficient air flow for forming the atmospheric pressure It is possible.
  • the drawings are ideally represented, in fact, sufficient air flow may be possible for forming atmospheric pressure with a fine gap between members due to material selection, coupling error, and the like. .
  • the groove 519 and the coupling ring 591, the connection portion 564, the distance between the coupling ring 591 and the valve member 531 is the valve member 531 is connected to the vacuum pressure connection passage 513 It may be appropriately selected so as to have a distance to the extent that the smooth opening and closing of.
  • the coupling ring 591 is configured to be elastically deformable and may be coupled to the recess 519 by self deformation or the like.
  • the connecting portion 564 connected to the vacuum pressure connection passage 513 in order to smoothly open and close the valve member 531 as the longitudinal section of the vacuum pressure connection passage 513 decreases the inner diameter It is preferable to have a taper shape.
  • the spherical valve member 531 moves toward the connecting portion 564 connected with the vacuum pressure connecting passage 513 due to the vacuum pressure when the vacuum pressure is formed in the vacuum connecting passage 513. To block the connection portion 564.
  • the spherical valve member 531 is spaced apart from the connecting portion 564 by a tapered shape of the connecting portion 564 and the vacuum pressure connecting passage 513.
  • the minute difference between the inner diameter of the inner diameter and the outer diameter of the valve member 531 the outside air is connected to the vacuum pressure connection passage 513, the atmospheric pressure can be quickly formed in the adsorption unit 220.
  • the atmospheric pressure forming unit 400 may be formed in the rod 200, such as being integrally formed with another member or formed as a separate member.
  • the atmospheric pressure forming unit as another embodiment (seventh embodiment), as shown in FIG. 15, an atmospheric pressure connecting pipe 920 connected to the suction passage 210, and a suction passage 210 when opened.
  • An air tank 910 for storing compressed air for forming at atmospheric pressure in a space corresponding to a volume including an adsorption unit 220 and an atmospheric pressure connecting tube 920; It may include an on-off valve 930 installed between the air tank 910 and the atmospheric pressure connecting pipe 920 to open and close the air tank 910.
  • the atmospheric pressure connection pipe 920 may be a member that is the same as or similar to the vacuum pressure connection pipe as the configuration connected to the suction passage 210.
  • connection point may be coupled to the rod 10 separately or branched from a certain portion of the vacuum pressure connector.
  • a branching valve may be provided with a switching valve for switching to vacuum or atmospheric pressure.
  • the atmospheric pressure connection pipe 920 is preferably connected to the suction unit 220 as close as possible to minimize the air supply time for the suction passage (210).
  • the air tank 910 is configured to store compressed air for forming at atmospheric pressure in a space corresponding to a volume including the suction passage 210, the suction unit 220, and the atmospheric pressure connecting pipe 920 at the time of opening.
  • Various configurations are possible.
  • the air tank 910 is preferably connected to the suction unit 220 as close as possible to minimize the air supply time for the suction passage (210).
  • the on-off valve 930 is installed between the air tank 910 and the atmospheric pressure connection pipe 920, and can be configured in various ways as to open and close the air tank 910.
  • a switching valve switching valve for switching to vacuum or atmospheric pressure
  • a switching valve switching valve
  • the atmospheric pressure forming unit includes any one of the rod 200 and the adsorption unit 220, at least one side through hole 941.
  • the opening and closing member 942 When opening is penetrated from the outer circumferential surface, the opening and closing member 942 is moved along the outer circumferential surface of any one of the rod 200 and the suction unit 220 to open and close the side through-hole 941;
  • the opening and closing member 942 may include an opening and closing member moving part 943 which moves along the outer circumferential surface of any one of the rod 200 and the suction part 220.
  • the opening and closing member 942 may be moved along the outer circumferential surface of any one of the rod 200 and the suction unit 220 to open and close the side through hole 941.
  • the opening and closing member 942 may have a hollow cylinder structure surrounding the outer peripheral surface of any one of the rod 200 and the suction unit 220, side through holes When it corresponds to 941, an exposed hole 944 that is opened to the outside may be formed.
  • the opening and closing member 942 is exposed to the outside by opening or opening the side through-hole 941 by the shangdong can be converted to atmospheric pressure.
  • the opening / closing member moving unit 943 is configured to move the opening and closing member 942 along the outer circumferential surface of any one of the rod 200 and the suction unit 220.
  • the opening and closing member moving portion 943 may be a VCM or a solenoid.
  • the atmospheric pressure control unit 400 may be installed by a separate auxiliary member 90 integrally with the rod 200 or coupled with the rod 200.
  • the auxiliary member 90 may extend through the suction passage 220 and extend through the extension suction passage 721 which is in communication with the side through hole 941.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Manipulator (AREA)

Abstract

La présente invention concerne un dispositif de saisie qui aspire un dispositif tout en étant monté dans un appareil de saisie et de placement pour le transfert d'un dispositif. L'invention porte sur un dispositif de saisie qui comprend : une tige (200) ayant un passage d'aspiration (210) formé à l'intérieur de ce dernier dans lequel une pression sous vide est formée et ayant une partie d'aspiration (220) accouplée à une extrémité de ce dernier pour aspirer un dispositif (10) ; une unité d'actionnement vers le haut-bas pour déplacer la tige (200) vers le haut et vers le bas ; et une unité de formation de pression atmosphérique (400) pour former une pression atmosphérique dans la partie d'aspiration (220) lorsque la pression sous vide dans le passage d'aspiration (210) est relâchée.
PCT/KR2016/002444 2015-03-11 2016-03-11 Dispositif de saisie WO2016144131A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG11201707360PA SG11201707360PA (en) 2015-03-11 2016-03-11 Picker
CN201680014563.3A CN107405774B (zh) 2015-03-11 2016-03-11 拾取器

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2015-0033628 2015-03-11
KR20150033628 2015-03-11
KR10-2016-0010928 2016-01-28
KR1020160010928A KR20160110083A (ko) 2015-03-11 2016-01-28 픽커

Publications (1)

Publication Number Publication Date
WO2016144131A1 true WO2016144131A1 (fr) 2016-09-15

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Application Number Title Priority Date Filing Date
PCT/KR2016/002444 WO2016144131A1 (fr) 2015-03-11 2016-03-11 Dispositif de saisie

Country Status (1)

Country Link
WO (1) WO2016144131A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108247664A (zh) * 2018-03-22 2018-07-06 珠海市运泰利自动化设备有限公司 一种高效破真空吸嘴
CN109421191A (zh) * 2017-08-30 2019-03-05 东和株式会社 吸附机构、吸附手、搬送机构及方法、成形装置及方法

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KR20030084287A (ko) * 2002-04-26 2003-11-01 (주)제이티 픽커 구동용 공압실린더
KR100684608B1 (ko) * 2005-10-17 2007-02-20 장인식 자력 및 진공을 이용한 흡착장치
KR101303749B1 (ko) * 2013-05-29 2013-10-08 (주)브이텍 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치
KR20130111661A (ko) * 2012-04-02 2013-10-11 임석규 반도체 소자용 진공 흡착 실린더
KR101339394B1 (ko) * 2012-07-13 2014-01-10 (주) 티피씨 메카트로닉스 픽커 및 픽커 모듈

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Publication number Priority date Publication date Assignee Title
KR20030084287A (ko) * 2002-04-26 2003-11-01 (주)제이티 픽커 구동용 공압실린더
KR100684608B1 (ko) * 2005-10-17 2007-02-20 장인식 자력 및 진공을 이용한 흡착장치
KR20130111661A (ko) * 2012-04-02 2013-10-11 임석규 반도체 소자용 진공 흡착 실린더
KR101339394B1 (ko) * 2012-07-13 2014-01-10 (주) 티피씨 메카트로닉스 픽커 및 픽커 모듈
KR101303749B1 (ko) * 2013-05-29 2013-10-08 (주)브이텍 퀵 릴리즈 밸브 및 그것을 갖는 진공펌프 장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109421191A (zh) * 2017-08-30 2019-03-05 东和株式会社 吸附机构、吸附手、搬送机构及方法、成形装置及方法
CN109421191B (zh) * 2017-08-30 2021-08-03 东和株式会社 吸附手、搬送机构及方法、成形装置及方法
CN108247664A (zh) * 2018-03-22 2018-07-06 珠海市运泰利自动化设备有限公司 一种高效破真空吸嘴

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