WO2016125924A1 - Dispositif et procédé de refroidissement d'échantillon permettant une détection d'image liée par un microscope optique et un microscope électronique - Google Patents

Dispositif et procédé de refroidissement d'échantillon permettant une détection d'image liée par un microscope optique et un microscope électronique Download PDF

Info

Publication number
WO2016125924A1
WO2016125924A1 PCT/KR2015/001092 KR2015001092W WO2016125924A1 WO 2016125924 A1 WO2016125924 A1 WO 2016125924A1 KR 2015001092 W KR2015001092 W KR 2015001092W WO 2016125924 A1 WO2016125924 A1 WO 2016125924A1
Authority
WO
WIPO (PCT)
Prior art keywords
sample
optical microscope
electron microscope
chamber
linked image
Prior art date
Application number
PCT/KR2015/001092
Other languages
English (en)
Korean (ko)
Inventor
전상미
정현석
Original Assignee
한국기초과학지원연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국기초과학지원연구원 filed Critical 한국기초과학지원연구원
Priority to PCT/KR2015/001092 priority Critical patent/WO2016125924A1/fr
Publication of WO2016125924A1 publication Critical patent/WO2016125924A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Definitions

  • the present invention relates to a sample cooling device, and more particularly, to a sample cooling device and a sample cooling method for detecting a linked image of an optical microscope and an electron microscope.
  • An optical microscope is a microscope made to investigate the position and characteristics of a particular component or element by injecting a fluorescent dye that fluoresces under ultraviolet light close to visible rays into a sample.
  • the fluorescent dye used is characterized by absorbing ultraviolet light of short wavelength and emitting energy of long wavelength.
  • optical microscopy is performed by immunofluorescence staining of antibodies capable of reacting with a specific antigen when the immunoassay is performed in a hospital, followed by observing it, and is classified as a fluorescence microscope by this feature.
  • Such an optical microscope can be usefully used for a sample which has a fluorescent substance itself or can be adsorbed on a fluorescent material. Therefore, the optical microscope can be used to identify the path of infection of bacteria or viruses, to locate functional proteins in the cell, and to change the environment. It is widely used for identifying biological phenomena such as specific protein expression and intracellular detection / testing of biological samples.
  • an electron microscope uses an electron beam instead of visible rays used in an optical microscope and an electron lens instead of a glass lens to create an enlarged image of an object.
  • the electron microscope scans the surface of a sample placed in a vacuum with a fine electron beam to accelerate the electrons from the filament and scanning electron microscopy (SEM) to display an enlarged image, and transmits the electron beam exiting the hole of the anode to the specimen.
  • SEM scanning electron microscopy
  • TEM Transmission electron microscopy
  • the observation of the sample is cooled by grasping the position of the sample with an optical microscope and freezing before the position of the sample is changed. Thereafter, the sample is precisely observed with an electron microscope.
  • the work of cooling the sample to freeze is performed manually, a long time phenomenon occurs.
  • Korean Patent Laid-Open Publication No. 10-2012-0138487 discloses a gas liquefaction apparatus for rapid freezing of biological samples for electron microscope observation, which prevents waste of gas in the manufacturing process of liquefied gas for instantaneous freezing of biological tissues and can liquefy gas quickly. to provide.
  • the present invention provides a sample cooling apparatus and a sample cooling method for detecting a linked image of an optical microscope and an electron microscope to fix the movement of a sample by shortening a cooling speed for freezing the sample in a desired state.
  • the purpose is to.
  • Another object of the present invention is to provide a sample cooling apparatus and a sample cooling method for detecting a linked image of an optical microscope and an electron microscope that minimize damage to a sample by automating a process of freezing a sample.
  • a step of loading a sample into a transfer frame accommodating the loaded sample in a culture solution, observing the received sample under an optical microscope, moving the observed sample for cooling, and before the cooling, And removing the culture solution formed on the surface of the sample and dropping the sample from which the culture solution is removed to an external coolant.
  • the sample cooling device and the sample cooling method for detecting the linked image of the optical microscope and the electron microscope according to the present invention can fix the movement of the sample by shortening the cooling speed for freezing the sample in a desired state.
  • the process of freezing the sample can be automated to minimize damage to the sample.
  • FIG. 1 is a perspective view for explaining a sample cooling device according to an embodiment of the present invention.
  • FIG. 2 is a plan view for explaining a sample cooling device according to an embodiment of the present invention.
  • FIG 3 is a side view for explaining a sample cooling device according to an embodiment of the present invention.
  • FIG. 4 is a cross-sectional view for explaining a sample cooling device according to an embodiment of the present invention.
  • FIG. 5 is a perspective view for explaining the discharge of the sample according to an embodiment of the present invention.
  • FIG. 6 is a plan view for explaining a carrier is cultured the sample according to an embodiment of the present invention.
  • Figure 7 is a side view for explaining the removal of the culture medium according to an embodiment of the present invention.
  • FIG. 8 is a flowchart illustrating a sample cooling method according to an embodiment of the present invention.
  • FIG. 1 is a perspective view for explaining a sample cooling device according to an embodiment of the present invention
  • Figure 2 is a plan view for explaining a sample cooling device according to an embodiment of the present invention
  • Figure 3 is an embodiment of the present invention 4 is a side view illustrating a sample cooling device according to an example
  • FIG. 4 is a cross-sectional view illustrating a sample cooling device according to an embodiment of the present invention.
  • the sample cooling device 1 shortens the cooling speed for freezing to observe a sample having a fast moving speed to fix the movement of the sample.
  • the sample chiller 1 can automate the process of freezing the sample to minimize damage to the sample that can occur manually.
  • the sample cooling device 1 includes a transfer part 100, an observation part 200, and a discharge part 300.
  • the transfer unit 100 includes a sample 10 and moves the provided sample 10.
  • the transfer unit 100 includes a guide rail 110, a transfer frame 120, a first motor 130, a second motor 140, and a driver 150.
  • the guide rail 110 is coupled with the lower portion of the transfer frame 120 to prevent the departure from the movement of the transfer frame 120.
  • the guide rail 110 is formed in the longitudinal direction while maintaining a straight line.
  • the guide rail 110 has a length of 20 to 25 cm and a width of 1 to 2 cm.
  • the guide rail 110 has grooves formed on both sides thereof to facilitate the coupling with the transfer frame 120 and to prevent the coupling from being released.
  • the guide rail 110 may further include a rail support at the bottom to prevent the bending phenomenon due to the load generated while the transfer frame 120 moves.
  • the transfer frame 120 is provided with a sample 10 to be transferred from the observation unit 200 to the discharge unit 300.
  • the transfer frame 120 is 30 to 35 cm in the longitudinal direction, the width is 1 to 2 cm.
  • the transfer frame 120 includes a first support part 122 and a second support part 124 that support the frame formed at the center.
  • a sample support 50 for loading and moving the sample 10 may be provided at an upper portion of the first support 122.
  • the first support 122 is formed by passing a portion of the lower portion and is not penetrated.
  • An extended support is formed extending from the bottom. That is, the extended support may have the same shape as the support of the carriage.
  • the extension support in this shape supports the sample support 50 to be provided.
  • the penetrated portion is a size that the jig 350 to be described later can pass through.
  • the upper portion of the sample support 50 is formed with a groove so that the sample 10 is provided.
  • the groove may vary depending on the size and shape of the sample 10.
  • the groove may further include a shape such as a cross, X, Y, etc. so that the user can easily load the sample 10 with tongs, such as pincette, tweezer.
  • the second support part 124 includes an arm rail coupled to the guide rail 110 at the bottom.
  • the arm rail includes a protrusion coupled to a groove formed on the side surface of the guide rail 110 described above. Therefore, as the coupling between the guide rail 110 and the second support 124 is hardened, the separation between the movements is prevented.
  • the frame formed between the first and second support parts 122 and 124 moves to the left and right in engagement with a cog wheel connected to the first motor 130 to be described later, with teeth formed thereon.
  • the first motor 130 controls the left and right movement of the transfer frame 120.
  • the first motor 130 may be a step motor for controlling the rotation angle according to the pulse signal.
  • the rotor of the first motor 130 is coupled with the cog wheels. Therefore, the gear wheel rotates according to the rotation of the first motor 130, and the gear wheel can be engaged with the gear formed on the upper portion of the frame of the transfer frame 120 as described above to control the left and right movement.
  • the second motor 140 controls the vertical movement of the transfer frame 120.
  • the second motor 140 may be the same step motor as the first motor 130.
  • the rotor of the second motor 140 is connected to the support shaft.
  • the support shaft moves up and down according to the rotation of the second motor 140, and thus the moving shaft of the transport frame 120 can be controlled.
  • the driving unit 150 instructs a driving signal to the first motor 130 and the second motor 140.
  • the driving unit 150 controls the rotation angles and the rotation speeds of the first and second motors 130 and 140 as driving signals.
  • the driver 150 may be performed according to a preset algorithm.
  • the observation unit 200 is a space where the sample 10 provided in the transfer unit 100 is observed on an optical microscope installed outside. Observation unit 200 is formed in the center of the transfer unit 100 and the discharge unit 300 in the longitudinal direction is connected to each other.
  • the observation unit 200 includes a first chamber 210, a receiving groove 220, a through hole 230, and a first transparent cover 240.
  • the first chamber 210 is formed in a quadrangular shape, and an upper portion thereof is opened. Both ends of the first chamber 210 are connected to the transfer part 100 and the discharge part 300, respectively, and part of the first chamber 210 is open.
  • the first chamber 210 has a length of 15 to 18 cm, a width of 10 to 14 cm, and a height of 6 to 8 cm in the longitudinal direction.
  • the first chamber 210 is formed with an inner wall of 2 to 3 cm to form a through hole 230 described below.
  • the interior of the first chamber 210 maintains 5% carbon dioxide (CO 2 ) and a temperature of 37 ° C. in order to optimize the state of the sample.
  • the first chamber 210 may include a carbon dioxide sensor (not shown) and a temperature sensor (not shown) therein to maintain an observation environment.
  • the receiving groove 220 is a donut-shaped groove in the central lower inner wall of the first chamber 210.
  • the donut-shaped hole is a through hole 230 to be described later.
  • Receiving groove 220 is provided with a culture plate (not shown) containing the culture solution at the top.
  • the culture plate is transparent, the center is made of glass to facilitate the observation of the optical microscope, the culture medium is a liquid to help the sample 10 is well cultured. In particular, the sample 10 is observed in the state accommodated in the culture solution.
  • the through hole 230 is a hole formed in the lower center of the first chamber 210 to insert an optical lens (not shown).
  • the diameter of the through hole 230 is a size into which the optical lens can be inserted, and preferably, may be 2 to 3 cm.
  • the first transparent cover 240 is provided on the upper portion of the first chamber made of a transparent material.
  • the first transparent cover 240 has a handle 250 formed at one corner thereof to enable the user to open and close easily.
  • a light source (not shown) of an optical microscope is disposed on the first transparent cover 240 to observe the sample 10 contained in the culture solution.
  • the discharge unit 300 removes the culture solution formed on the surface of the sample 10 transferred by the transfer unit 100, and discharges the sample 10 to the outside.
  • the discharge part 300 includes a second chamber 310, a culture medium removal part 320, a second transparent cover 330, a door 340, and a jig 350.
  • the second chamber 310 is a space through which the sample 10 is transferred from the observation unit 200 and passed through.
  • the second chamber 310 is formed with an outlet 315 for discharging the sample 10 to the outside.
  • the outlet 315 may be formed under the second chamber 310, and a coolant (not shown) may be disposed below the outlet 315. Therefore, the sample 10 may be dropped through the outlet 315 and immersed in the coolant to be rapidly frozen.
  • the culture solution removing unit 320 removes the culture solution formed on the surface of the sample 10 with paper.
  • the culture medium removal unit 320 includes a first contact portion 322 and a second contact portion 324 moved up and down to abut each other. That is, the culture medium removal unit 320 compresses the sample 10 to the first and second contact portions 322 and 324 which are moved up and down.
  • the first and second contact portions 322 and 324 both have the paper on one end surface in contact with the sample 10 to remove the culture solution formed on the surface of the sample 10.
  • the paper is merely an example of removing the culture solution, and the like is not limited thereto, and a soft cloth may be used.
  • the second transparent cover 330 is provided on the upper portion of the second chamber 310 of a transparent material. Therefore, the user may check the process of discharging the sample 10 through the second transparent cover 330, and if a malfunction occurs, the user may quickly cope with it.
  • the door 340 is formed at the end of the second chamber 310, and includes a hinge 345 to form a swing door.
  • Door 340 may be formed to replace the paper.
  • the hinge 345 may further include an elastic material such as a spring to automatically close the door 340.
  • the jig 350 gives a shock to the transfer unit 100 so that the sample 10 falls into the discharge port 315. That is, the jig 350 causes the lowering of the first support part 122 to impact the sample support 50 including the sample 10 provided on the upper part of the first support part 122. Through this, the sample support 50 can freely fall into the outlet 315.
  • FIG. 5 is a perspective view for explaining the discharge of the sample according to an embodiment of the present invention.
  • the sample cooling device 1 quickly discharges the sample 10 to an external coolant and cools it.
  • the sample cooling device 1 includes a sample support 50 including the sample 10 on the first support 122, and then observes the result in the first chamber 210. In the observation, the sample 10 contained in the culture solution is taken as an external optical microscope.
  • the sample cooling device 1 drives the first and second motors 130 and 140 to transfer the transfer frame 120 provided with the sample 10 to the discharge part 300.
  • the sample cooling device 1 may maintain a feed rate of the transfer frame 120 at 0.1 to 1 kPa, preferably at 0.5 kPa.
  • the sample cooling device 1 removes the culture solution formed in the sample 10 with the culture solution removing unit 320. At this time, the sample cooling device 1 is formed in a state where the height of the transfer frame 120, more specifically, the height of the first support portion 122 is higher than the height of the jig 350 so as not to contact the jig 350. 1 Transfer the support 122.
  • the sample cooling apparatus 1 lowers the height of the first support part 122 using the second motor 140 and moves in the direction of the jig 350 using the first motor 130. By engaging the lower portion of the jig 350 and the first support portion 122 to generate a locking shock. Through this, the sample support 50 including the sample 10 is separated from the first support portion 122 and freely falls into the outlet 315.
  • the sample support 50 may include a high metal having high thermal conductivity such as copper, gold, and silver.
  • FIG. 6 is a plan view for explaining a carrier is cultured the sample according to an embodiment of the present invention.
  • the carrier 600 safely transports and incubates the sample 10.
  • the carrier 600 includes a cartridge 610, a grid 620, and a fixing pin 630.
  • the cartridge 610 is a mold formed in a donut shape at the outermost portion of the carrier 600.
  • the cartridge 610 protects the sample 10 from external shock.
  • the cartridge 610 also provides a space for the user to easily transport the carrier 600 with tongs.
  • the cartridge 610 and the fixing pin 620 may include a metal having high thermal conductivity, such as copper, gold, and silver.
  • the grid 620 is a space where the sample 10 is substantially cultured.
  • the grid 620 is disposed inside the cartridge 610 and is formed in a circular shape.
  • the grid 620 is formed with a grating, and each grating has a number so that the position of the sample 10 can be easily identified when observing the sample 10.
  • Grid 620 is formed of a metal such as gold, copper, nickel, may be formed thin.
  • the grid 620 is coated with collagen or the like on top of the metal so that the sample 10 is easily cultured.
  • the fixing pin 630 fixes the cartridge 610 and the grid 620 into one.
  • the fixing pin 630 is fixed at the top so that the cartridge 610 and the grid 620 do not fall off.
  • the pin 630 is formed in a smaller donut or C-shape than the cartridge 610.
  • Figure 7 is a side view for explaining the removal of the culture medium according to an embodiment of the present invention.
  • Figure 7 (a) is a view showing a carrier state when the sample 10 is received in the culture medium and the observation is completed
  • Figure 7 (b) is a view showing a carrier state when the carrier 600 is transferred.
  • FIG. 7C is a view showing a carrier state when the culture solution is removed by the culture solution removing unit 320.
  • the sample cooling device 1 removes the culture solution formed on the upper surface of the carrier 600 including the sample 10.
  • the culture solution 750 is formed on the surface of the sample 10, that is, the upper surface of the carrier 600.
  • the sample 10 becomes difficult to measure due to the culture solution 750. Therefore, in order to accurately and precisely measure the sample 10, the culture solution must be removed.
  • the sample chiller 1 removes the culture solution 750 over a second time.
  • the sample cooling device 1 firstly removes the culture solution 750 by the transfer speed while the carrier 600 is provided on the first support 122. At this time, the amount of the culture medium 750 to be removed may vary depending on the feed rate.
  • the sample cooling device 1 is first removed and the remaining culture solution 750 is completely removed by the culture medium removal unit 320.
  • the sample cooling device 1 By removing the culture medium 750 in this manner, the sample cooling device 1 reduces the amount of the culture medium 750 that can be absorbed by the paper provided in the culture medium removal unit 320 so that the sample can be more easily removed. Can be.
  • FIG. 8 is a flowchart illustrating a sample cooling method according to an embodiment of the present invention.
  • the sample cooling method fixes the movement of the sample by shortening the cooling rate of freezing to observe the sample 10 in a desired state.
  • the sample cooling method may minimize the damage of the sample 10 by automating the process of freezing the sample 10.
  • the sample is loaded (S100).
  • the first transparent cover 240 is opened using the handle 250, and the first chamber 210 is opened.
  • the sample 10 is loaded on the sample support 50 provided on the upper part of the first support part 122 located in the opened first chamber 210. At this time, the sample 10 is loaded in the state of the carrier 600 to protect from external shock.
  • the first chamber 210 is closed by closing the first transparent cover 240 again.
  • the sample is observed with an optical microscope (S110).
  • an optical lens is inserted into a through hole formed in the first chamber 210, and a light source microscope is disposed on an upper side of the first transparent cover 240.
  • the sample 10 is accommodated in the culture solution 750, and the received sample 10 is observed. At this time, the observation is completed when the sample 10 is in a desired state.
  • the sample is moved (S120).
  • the third step is conveyed to cool the sample 10 whose observation has been completed.
  • the sample 10 is transferred from the observation unit 200 to the discharge unit 300.
  • the culture solution of the sample surface is removed (S130).
  • the culture solution formed on the surface of the sample is removed by the culture solution removal unit 320.
  • the first and second contact portions 322 and 324 of the culture medium removing unit 320 are moved up and down to abut each other and the culture medium is removed.
  • the sample is introduced into the coolant (S140).
  • the sample support 50 on which the carrier 600 including the sample 10 is raised and the jig 350 formed under the second chamber 310 are caught.
  • the sample support 50 including the sample 10 is separated from the sample support 50 and the jig 350 by the locking impact, and then falls to the outlet 315. Through this, the sample 10 is injected into the external coolant and cooled.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

L'invention concerne un dispositif et un procédé de refroidissement d'échantillon permettant une détection d'image liée par un microscope optique et un microscope électronique. Le dispositif de refroidissement d'échantillon comprend : une partie d'observation servant à observer un échantillon éclairé par une source de lumière ; une partie de transfert servant à transférer l'échantillon à travers la partie d'observation lorsque l'observation de l'échantillon est terminée ; et une partie d'évacuation servant à éliminer un milieu de culture qui s'est formé sur la surface de l'échantillon transféré et à décharger l'échantillon vers l'extérieur.
PCT/KR2015/001092 2015-02-03 2015-02-03 Dispositif et procédé de refroidissement d'échantillon permettant une détection d'image liée par un microscope optique et un microscope électronique WO2016125924A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/KR2015/001092 WO2016125924A1 (fr) 2015-02-03 2015-02-03 Dispositif et procédé de refroidissement d'échantillon permettant une détection d'image liée par un microscope optique et un microscope électronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2015/001092 WO2016125924A1 (fr) 2015-02-03 2015-02-03 Dispositif et procédé de refroidissement d'échantillon permettant une détection d'image liée par un microscope optique et un microscope électronique

Publications (1)

Publication Number Publication Date
WO2016125924A1 true WO2016125924A1 (fr) 2016-08-11

Family

ID=56564252

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2015/001092 WO2016125924A1 (fr) 2015-02-03 2015-02-03 Dispositif et procédé de refroidissement d'échantillon permettant une détection d'image liée par un microscope optique et un microscope électronique

Country Status (1)

Country Link
WO (1) WO2016125924A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995026417A1 (fr) * 1994-03-29 1995-10-05 Genzyme Corporation Culture et isolation de cellules f×tales a partir de sang peripherique maternel
US20030113911A1 (en) * 2000-04-28 2003-06-19 Scholl David R. In situ growth, freezing and testing of cultured cells
US20070231787A1 (en) * 2006-04-04 2007-10-04 Voelker Mark A Methods and devices for imaging and manipulating biological samples
KR20120041587A (ko) * 2010-10-21 2012-05-02 에이피시스템 주식회사 시료 검사 시스템 및 이를 이용한 시료 검사 방법
US20130221217A1 (en) * 2010-10-08 2013-08-29 Hitachi High-Technologies Corporation Method for scanning electron microscope observation of sample floating on liquid surface

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995026417A1 (fr) * 1994-03-29 1995-10-05 Genzyme Corporation Culture et isolation de cellules f×tales a partir de sang peripherique maternel
US20030113911A1 (en) * 2000-04-28 2003-06-19 Scholl David R. In situ growth, freezing and testing of cultured cells
US20070231787A1 (en) * 2006-04-04 2007-10-04 Voelker Mark A Methods and devices for imaging and manipulating biological samples
US20130221217A1 (en) * 2010-10-08 2013-08-29 Hitachi High-Technologies Corporation Method for scanning electron microscope observation of sample floating on liquid surface
KR20120041587A (ko) * 2010-10-21 2012-05-02 에이피시스템 주식회사 시료 검사 시스템 및 이를 이용한 시료 검사 방법

Similar Documents

Publication Publication Date Title
US6377870B1 (en) Device and method for delivering various transparent substrates into a high-precision measuring instrument
US7649686B2 (en) Box-type microscope apparatus
US11125677B2 (en) Systems, devices, and methods for combined wafer and photomask inspection
JP2010108936A (ja) 二重装着光学系を備えた荷電粒子光学系
WO2021177531A1 (fr) Dispositif de test de culture cellulaire rapide capable d'empêcher la séparation d'un fluide solidifié
US20090029450A1 (en) Incubator
WO2016125924A1 (fr) Dispositif et procédé de refroidissement d'échantillon permettant une détection d'image liée par un microscope optique et un microscope électronique
JP2020128974A (ja) 直接分析サンプルを離型及び分析するための方法及び装置
WO2024085437A1 (fr) Dispositif d'analyse de film mince de type dans une chambre
WO2017007278A1 (fr) Dispositif de culture cellulaire automatisé, et procédé de fonctionnement de dispositif de culture
WO2019172689A1 (fr) Module d'inspection par vision, système d'inspection de dispositif le comprenant, et procédé d'inspection de dispositif l'utilisant
US20230045321A1 (en) System for loading and/or manipulating a sample in a sample transfer device
WO2023018109A1 (fr) Système de traitement de fluide et procédé de centrifugation l'utilisant
JPH03160341A (ja) 恒温槽を備えた全自動引張試験装置
TWI249220B (en) Purging apparatus and purging method
JP2009118862A (ja) インキュベータ
WO2017126854A1 (fr) Module d'inspection par procédé visionique, module de réglage de la distance focale du module d'inspection par procédé visionique et système de contrôle d'élément le comprenant
JP3778008B2 (ja) 試料作製装置
WO2016021745A1 (fr) Station de travail comprenant un porte-échantillon pour microscope électronique cryogénique pour la détection d'imagerie de corrélation de microscope optique et microscope électronique, appareil de détection d'imagerie de corrélation la comprenant et procédé de détection d'imagerie et système d'imagerie l'utilisant
WO2024043764A1 (fr) Dispositif d'indication de position de récipient et système de diagnostic de type à assemblage l'utilisant
EP4220271A1 (fr) Interface et procédé de support d'échantillon
WO2023121114A1 (fr) Dispositif de formation de micropuits et procédé pour la fabrication de disque ayant un micropuits
WO2024071559A1 (fr) Dispositif de prétraitement d'échantillon prélevé et procédé de prétraitement d'échantillon prélevé
EP4047407B1 (fr) Dispositif de transfert d'échantillons
JP4135013B2 (ja) 試料作製装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15881242

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 15881242

Country of ref document: EP

Kind code of ref document: A1