WO2016122161A1 - Machine de chargement et de transport de cartes, et système de transfert la comprenant - Google Patents

Machine de chargement et de transport de cartes, et système de transfert la comprenant Download PDF

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Publication number
WO2016122161A1
WO2016122161A1 PCT/KR2016/000639 KR2016000639W WO2016122161A1 WO 2016122161 A1 WO2016122161 A1 WO 2016122161A1 KR 2016000639 W KR2016000639 W KR 2016000639W WO 2016122161 A1 WO2016122161 A1 WO 2016122161A1
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WIPO (PCT)
Prior art keywords
substrate
loading
unit
roller
loaded
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PCT/KR2016/000639
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English (en)
Korean (ko)
Inventor
박계정
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박계정
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Publication date
Application filed by 박계정 filed Critical 박계정
Publication of WO2016122161A1 publication Critical patent/WO2016122161A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D19/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D19/38—Details or accessories
    • B65D19/40—Elements for spacing platforms from supporting surface
    • B65D19/42—Arrangements or applications of rollers or wheels

Definitions

  • the present invention relates to a substrate loading transporter used to transport (circuit) substrates and transfer them one by one into a process, and more particularly, to a transport and transfer system in which a substrate is loaded. It can be made through a single board loading transporter to prevent defects such as scratching and chipping in the transfer process, and also minimizes damage such as scratching or chipping of the board during the process of loading or unloading the board. It is possible to prevent more than one substrate from being loaded or unloaded, and also to adjust the position of the loading / unloading part according to the number of substrates changing during the loading / unloading process or to load / unload according to the height of various substrate process automation lines.
  • the PCB usually a printed circuit board (PCB)
  • PCB printed circuit board
  • the substrate is then supplied to each process step.
  • the applied method is to stack and transport dozens or hundreds of substrates on a trolley made exclusively for transportation, and then to the L-shaped stack called 'L rack' again. It will be loaded and loaded on wheeled trucks and transported to the transport system on the line where the processing takes place.
  • such a conventional method includes a process of loading and transporting a substrate in a truck for transport of a vehicle at a factory, transferring a board to an L rack or a storage truck, and moving the L rack to a transport system and Since it is required to go through a complicated loading / transportation process of several steps such as loading in the air, it takes a lot of work time and cost only in the loading and transporting process, and also suffers from a problem that a large amount of substrate defects occur due to scratches, scratches, and stamps.
  • the substrate 2 is loaded in a separate L-shaped rack 3 and transported through the truck 6 in an L-shaped manner.
  • the hassle of moving the L-shaped rack (3) from the trolley (6) to the rack transport roller (4) of the transfer system appears as it is.
  • the process of moving to a large amount of substrate defects due to scratches or scratches will occur.
  • the process of moving the substrates 2 mounted on the L-shaped racks 3 to the substrate transfer rollers 5 one by one is carried out with a dog 10. This is achieved by a rotational reciprocating motion of about 90 degrees.
  • the substrate 2 is completely removed from the dog 10 through the substrate transfer roller 5 during the loading process and then again. Since the dog 10 can rotate toward the rack 3, the distance between the reciprocating rotational movement of the dog 10 will inevitably be increased, and this will delay the loading (or unloading) work time of the substrate. You have a problem.
  • the present invention has been made to solve the above problems,
  • An object of the present invention is to improve the problem that the loading and transport is cumbersome because the conventional operation of the L rack for loading the substrate and the loaded L rack for moving the substrate is separately operated, loading the substrate Since the transport from the state to the transport and transfer system can be made through a single board loading transporter, it can solve the problem of board defects caused by gas or stamping in the process of moving from the truck to the L rack by hand, and logistics. It is to provide a substrate loading transporter and a transport system including the same that can shorten the process.
  • Another object of the present invention is to provide a substrate loading transporter having a structure capable of firmly fixing a substrate in a transport process of the substrate.
  • Still another object of the present invention is to provide a substrate transfer system that can prevent damage to a substrate or system, including a guide for loading and fixing a substrate carrier in a substrate transfer system, or a loading carrier guide for blocking entry in an abnormal situation. .
  • Still another object of the present invention is to accurately detect whether two substrates are loaded or unloaded in the process of loading or unloading a substrate so that only one sheet can be loaded or unloaded, thereby minimizing process efficiency and substrate defects. It is to provide a substrate transfer system.
  • Still another object of the present invention is to provide two or more substrates to accurately detect two or more substrates on the loading / unloading unit and / or the transfer roller by amplification detection or the like for detecting two or more substrates. It is to provide a substrate transfer system that can solve the problems caused by loading or unloading two or more substrates by applying a configuration that repositions when it comes back.
  • Still another object of the present invention is to adjust the position of the loading / unloading unit by measuring the changed distance according to the number of substrates changing during the loading / unloading process while the substrate loading transporter is fixed at the correct position in the transfer system. It is to provide a substrate transfer system that judges the substrate loading / unloading between the loading transporter and the transfer roller quickly and accurately.
  • Still another object of the present invention is to provide a substrate transfer system that minimizes damage to a substrate during transfer by controlling the speed or smooth rotation of the loading / unloading portion during loading or unloading.
  • Still another object of the present invention is to apply a configuration to accurately detect whether both sides of the substrate is correctly transferred to the rotational movement to move the substrate for loading or unloading to the substrate is not separated in the rotation process It is to provide a substrate transfer system that minimizes damage.
  • Another object of the present invention is to avoid the interference in the rotation process of the substrate and the substrate displaced in the loading portion of the substrate loading transport during the loading or unloading process, and also to align the substrate displaced by stacking the target substrate loading quantity To provide a substrate transfer system that can minimize and damage the substrate.
  • Yet another object of the present invention is to set the position of the feed rollers according to the automation line even when the heights of the various substrate process automation lines are different. It is to provide a substrate transfer system that can be applied to.
  • Still another object of the present invention is to provide a substrate transfer system for smoothly performing a substrate transfer process to a 360-degree rotation operation process by forming an interference preventing slit and a slit part in a transfer roller and a substrate loading transporter, respectively. .
  • Still another object of the present invention is to further include a buffer for temporarily loading a substrate during the process of replacing the substrate carrier in the loading or unloading process. It is to provide a substrate transfer system that can be performed.
  • Substrate loading transporter and a transport system including the same for achieving the above object of the present invention includes the following configuration.
  • a substrate loading transporter includes a loading portion on which the substrate is loaded; And a moving unit for moving the loading unit on which the substrate is loaded. Since the transfer of the substrate to the transportation unit and the transfer system can be performed through a single substrate loading transporter in the state where the substrate is loaded in the loading unit, the vehicle can be manually loaded. It is characterized by minimizing the damage due to substrates, stamps, etc. generated during the repetitive process to move to L rack, and shortens the logistics process.
  • the loading portion includes a back contact portion in contact with the rear surface of the substrate being loaded, and a bottom contact portion in contact with the bottom surface of the substrate being loaded, the back contact portion
  • the substrate is inclined so as to be directed toward the rear contact portion, and the bottom contact portion is also characterized in that the inclined toward the rear from the front side.
  • the loading portion extends from the front surface to the rear surface of the bottom contact portion at a predetermined interval and is formed through the intermediate between the slit portion and the slit portion; It characterized in that it comprises a contact.
  • the moving part is formed on the front and the rear portion for fixing the coupling between the substrate loading transporters arranged back and forth in the transport process of the substrate loading transporter, Including the groove portion formed, the projection of the substrate loading transporter located in the rear portion of the substrate loading transporter located in the front portion is characterized in that the coupling is fixed.
  • the moving part may further include a banding part to which a rope for fixing the loaded substrate is fixed in a transport process of the substrate loading transporter.
  • the moving part is a fixing means of the transporting system so as to prevent and firmly fix the movement of the moving part while the substrate loading transporter is located in the transporting system. It characterized in that it comprises a fastening coupled to.
  • a substrate transfer system includes a substrate loading transporter including a loading unit on which a substrate is loaded and a moving unit to move the loading unit on which a substrate is loaded; A loading / unloading unit for loading the substrates loaded on the loading unit of the substrate loading transporter into the transfer rollers one by one or unloading the substrates conveyed from the transfer rollers into the loading unit one by one; And a transfer roller which transfers the substrate loaded through the loading / unloading unit to the substrate processing automation line or transfers the substrate loaded to the loading / unloading unit to unload the substrate from the substrate processing automation line.
  • the substrate transport system according to the present invention further includes a loading transport guide unit for guiding the substrate loading transporter to be accurately positioned in front of the loading / unloading unit;
  • the guide part may include an inlet breaker for blocking the entry of the substrate loading transporter when the loading / unloading part is not in a normal operation state or when there is a risk of collision between the loading / unloading part and the substrate loading transporter.
  • the loading transport guide portion, the friction reducing portion to minimize the friction with the side of the substrate loading transport to enter, and the position of the substrate loading transport It characterized in that it further comprises a fixing means coupled to the fixed portion of the substrate loading transporter for fixing.
  • the substrate transfer system further comprises a control unit for controlling the operation of the loading / unloading unit and the transfer roller, the loading / unloading unit, loading or unloading unit Rotation moving unit for rotating the substrate one by one between the loading unit and the transfer roller for loading and measuring the change in length (distance) as the loading amount of the substrate loaded in the loading unit during the loading or unloading process It characterized in that it comprises a spacing control unit for precisely adjusting the position of the rotary moving unit.
  • the gap adjusting part may include a front and rear guide part for guiding the front and rear movement of the rotational movement part, and guide the vertical movement of the rotational movement part. And a vertical guide part, a front and rear drive part for driving the rotational moving part in the front and rear direction, and a vertical drive part for driving the rotational moving part in the vertical direction.
  • the rotational moving portion is a bottom support for supporting the bottom of the substrate to be loaded or unloaded, and the bottom support is supported on the bottom And a rotation motor for rotating the rotational moving part including the bottom support part and the front support part around the axis of rotation.
  • the bottom support part and the front support part are formed in a plurality of spaced apart at regular intervals, and the loading part is not interfered with the plurality of the bottom support part and the front support part. It includes a slit that extends from the front surface to the rear surface of the bottom contact portion at a predetermined interval so as to pass through the loading portion, wherein the feed roller forms a predetermined space through which the front support portion passes so that a plurality of the front support portions do not interfere with the feed roller; It characterized in that it comprises an interference prevention slit.
  • the control unit is the front surface even if the substrate is not yet transferred from the transfer roller immediately after the rotary movement unit loads the substrate into the transfer roller.
  • the rotary moving unit when loading or unloading, first aligns the substrate loaded in the loading unit, and then the loading unit for loading And an adhesion part for pulling the loaded substrate toward the bottom support part or an adhesion part for pushing the substrate supported on the bottom support part toward the loading part for unloading.
  • the rotational movement portion, the push portion to prevent the movement by pressing the front surface of the substrate moved to the bottom support portion through the adsorption portion the push It includes a distance measuring unit for measuring the distance between the rotational moving portion and the substrate while pressing the front surface of the additional substrate, the control unit, based on the distance between the rotational moving portion and the substrate measured through the distance measuring unit It is characterized by determining whether or not the above substrate is moved toward the bottom support.
  • the rotational moving part collides with the rotational moving part based on the distance between the rotational moving part and the substrate measured by the distance measuring unit
  • the rotational moving part collides with the rotational moving part based on the distance between the rotational moving part and the substrate measured by the distance measuring unit
  • the mounting portion includes a back contact portion in contact with the back surface of the substrate being loaded, and a bottom contact portion in contact with the bottom surface of the substrate being loaded,
  • the contact portion is formed to be inclined so that the substrate is directed toward the rear contact portion, and the bottom contact portion is also formed to be inclined from the front side to the rear side, and the front and rear guide portions for guiding the front and rear movement of the rotary movement portion also have the same slope as the bottom contact portion. It is characterized by being inclined to.
  • the feed rollers may include main feed rollers positioned at both the left and right sides and the front of the interference prevention slit with respect to the interference prevention slit, and the main feed. And a rotating motor for rotating the roller.
  • the anti-interference slits are formed to be spaced apart at regular intervals corresponding to the front support parts spaced at regular intervals, and the interference prevention slits are smoothly formed between the anti-interference slits. It is characterized in that the auxiliary roller is positioned for the transfer.
  • the feed roller further comprises a rotation connecting member for rotating the auxiliary roller in conjunction with the rotation of the main feed roller. do.
  • the transfer roller is configured to align the arrangement of the substrates moving on the transfer roller to the center or to determine the substrate on the left or right side. It characterized in that it comprises a substrate array portion to be aligned in one direction on the left and right of the feed roller, respectively.
  • the rotatable moving part detects whether the substrate is transported on the transfer roller from the bottom support in the loading process or the substrate is unloaded in the unloading process.
  • a first detector for detecting whether the roller is transferred from the feed roller to the bottom support, wherein the controller moves the front support downward through the interference prevention slit immediately after loading the substrate based on the information of the first detector. It is characterized in that the rotational movement toward the substrate loading transport again.
  • the transfer roller includes a second detection unit for detecting whether the substrate transfers a distance of more than the size of the substrate on the transfer roller in the loading process
  • the controller may be configured to prevent another substrate from being loaded onto the transfer roller in a state where the substrate does not transfer a distance greater than or equal to the size of the substrate on the transfer roller based on the information of the second detection unit.
  • the substrate transfer system according to the present invention further comprises a buffer for allowing the substrate to be temporarily loaded during the process of replacing the substrate loading transport in the unloading process do.
  • the buffer is moved between the substrate loading transporter and the loading / unloading unit only when the substrate loading transporter is replaced by a buffer plate.
  • the substrate to be loaded in the loading process in the process of replacement is characterized in that the temporary loading on the buffer plate.
  • the buffer in the substrate transfer system according to the present invention, includes a rotating roller on the buffer plate, in the process of moving the substrate loaded on the buffer plate is replaced substrate transporter It is characterized by minimizing friction with the substrate.
  • the transfer roller detects whether two or more substrates moving on the transfer roller for loading or unloading are two or more sheets (two sheets). Characterized in that it further comprises a detection unit.
  • the double sheet sensing unit includes a sensing roller for touching an upper surface of the substrate passing through the conveying roller, and a moving roller of the sensing roller.
  • a roller frame moving in conjunction with one another and the roller frame, one end of which is connected to the roller frame, and an eccentric pivot unit, the other end of which is rotated larger than the one end about the rotation axis on the principle of a lever, and the movement distance of the other end of the eccentric pivot unit is measured. It is characterized by including a limit sensor to detect.
  • the control unit is accompanied by a predetermined portion in the process of pulling the substrate loaded on the loading unit through the suction unit toward the bottom support portion for loading;
  • the substrate which is attracted and pulled through the adsorption part, is placed on the bottom support or the back support. It characterized in that it further comprises a rotary mover position control module that rotates the rotary mover first at a predetermined interval and then rotates for loading.
  • the rotational moving portion comes with a portion in the process of pulling the substrate loaded on the loading portion through the adsorption portion toward the bottom support portion for loading; It further comprises a substrate aligning portion for pushing back the substrate disturbed by the mounting portion.
  • the rotational moving part further includes a separation roller in contact with the bottom surface of the substrate 80 that is pulled or pushed by the adsorption part.
  • the separation roller includes a one-way bearing which allows the separation roller to rotate in the process of pushing the substrate toward the loading unit while the separation roller does not rotate in the process of pulling the substrate from the loading unit by the adsorption unit. Characterized in that.
  • the distance measuring unit measures the distance at two places corresponding to each of the left and right sides of the substrate by using a laser sensor, so that two or more substrates are It is characterized by accurately determining whether or not moved to the bottom support.
  • the controller rotates the rotational movement part upward and then rotates downward again.
  • the distance measuring unit measures the distance to the substrate at a position close to each of the plurality of the bottom support, whether two or more substrates are moved toward the bottom support It is characterized by judging exactly.
  • the rotational moving part further includes a back support for supporting the back of the substrate on the other end of the bottom support, or the bottom support on the substrate. It is characterized in that the additional groove portion is further formed to be inserted into the bottom.
  • the present invention can obtain the following effects by the configuration, combination, and use relationship described above with the present embodiment.
  • the present invention improves the problem that the loading and transportation is cumbersome because the conventional L rack for loading the substrate and the loaded L rack for moving the substrate is operated separately, and in the state of loading the substrate. Since the transfer to the transportation and transfer system can be made through a single board loading transporter, it can solve the problem of substrate defects caused by gas or stamping in the process of moving from the truck to the L rack by hand, and also the logistics process. It has an effect that can be shortened.
  • the present invention has the effect of firmly fixing the substrate in the transport process of the substrate.
  • the present invention has an effect of preventing the damage to the substrate or the system, including the loading transport guide portion for guiding the entry and fixation of the substrate loading transport in the substrate transport system or blocking the entry in an abnormal situation.
  • the substrate is accurately detected by loading two sheets in the process of loading the substrate, only one sheet can be loaded, and thus the efficiency of the process and the occurrence of breakage or failure in the next process can be prevented.
  • the present invention when the two or more substrates have been provided with a configuration that can accurately detect the two or more substrates on the loading / unloading unit and / or the transfer roller for the detection of two or more substrates by amplification detection, etc. Applying the configuration to re-introduced in any case to prevent the loading of two or more substrates has the effect of solving the problem caused by the loading of two or more substrates.
  • the present invention by measuring the exact distance that is changed in real time according to the number of substrates that change in the loading / unloading process while the substrate loading transporter is fixed at the correct position in the transfer system by adjusting the position of the loading / unloading unit accordingly
  • the substrate loading / unloading between the substrate loading transporter and the transport roller has an effect of performing self-judgment quickly and accurately.
  • the present invention has the effect of preventing damage to the substrate in the process of moving by controlling the speed or smooth rotation of the loading / unloading portion during the loading or unloading process.
  • the present invention prevents damage to the substrate by applying a configuration to accurately detect whether both sides of the substrate is correctly transferred to the rotational movement to move the substrate for loading or unloading to prevent the substrate from being separated during the rotation process Has an effect.
  • the present invention can avoid the interference during the rotation process of the substrate and the displaced portion of the substrate loading transport during the loading or unloading process, and also by aligning the distorted substrates can accumulate the target substrate loading quantity and damage the substrate Has the effect of preventing.
  • the present invention can be applied to a substrate processing automation line of various heights together with a loading / unloading unit with only one type of substrate loading transporter if only the position of the transfer roller is set according to the automation line even when the height of each substrate processing automation line is different. Has the effect.
  • the present invention does not proceed until the next process by waiting for the substrate to completely move the transfer roller during the loading process in the loading process as the conventional rotation movement unit for moving the substrate one by one between the substrate loading transport and the transfer roller for loading / unloading
  • Applying a structure that can move to the next process immediately after loading the substrate has the effect of reducing the loading or unloading operation time.
  • the present invention has an effect of smoothly performing the substrate transfer process to the 360-degree rotation work process of the rotation moving unit by forming the interference prevention slit and the slit portion in the transport roller and the substrate loading transport, respectively.
  • the present invention further includes a buffer that allows the substrate to be temporarily loaded during the process of replacing the substrate carrier in the loading or unloading process so that the substrate transfer operation can be continuously performed even during the replacement of the substrate carrier. Has the effect.
  • 1 is a reference diagram showing a conventional truck and L rack
  • FIG. 2 is a structural diagram of a transport system using a conventional L rack
  • FIG. 3 is a side view of a substrate loading transporter according to an embodiment of the present invention.
  • Figure 4 is a plan view of a substrate loading transporter according to an embodiment of the present invention
  • FIG. 5 is a reference diagram illustrating a state in which a substrate loading transporter is connected in a transport process
  • FIG. 6 is a side view of a substrate transfer system according to an embodiment of the present invention.
  • FIG. 7 is a side view of the loading / unloading unit used in FIG.
  • FIG. 8 is a plan view of a loading / unloading unit
  • FIG. 9 is a detailed view of the rotary mover of FIG.
  • FIG. 10 is a detailed view showing another example of the rotary mover of FIG.
  • FIG. 11 is a plan view of the feed roller used in FIG.
  • FIG. 12 is a reference diagram showing a state in which the substrate is moved to the rotary mover during the loading process
  • FIG. 13 is a reference diagram illustrating a state in which a substrate is loaded by a transfer roller in a loading process
  • FIG. 14 is a reference diagram showing a state in which the rotary moving unit is moved immediately after the substrate is loaded on the feed roller in the loading process
  • 15 is a reference diagram showing a state in which the rotary mover moves to unload the substrate transferred to the feed roller in the unloading process
  • FIG. 16 is a reference diagram illustrating a state in which a substrate moves from a rotation moving part to a loading part in an unloading process.
  • 17 is a reference diagram showing a loading transport guide portion
  • 18 is a reference diagram illustrating a state in which a substrate is loaded in the buffer by moving the buffer;
  • 19 is a reference diagram illustrating a state in which a substrate loaded in a buffer moves to a loading unit
  • 20 is a detailed view showing a double sheet (2 sheets) detecting unit
  • 21 is a detailed view showing a detailed configuration of the side surface of the rotary mover
  • Fig. 22 is a detailed view showing the detailed configuration of the front side of the rotatable moving part.
  • FIG. 23 is a diagram illustrating a state in which a substrate is disturbed in a loading part in accordance with repetition of loading or unloading operations.
  • 24 is a reference diagram showing a state in which the rotary mover rotates after reversing under the control of the rotary mover position control module.
  • FIG. 25 is a reference diagram illustrating a process of checking whether two or more substrates come down after the rotary mover is lifted up
  • 26 is a reference diagram showing a state in which the substrate alignment unit aligns the loading unit substrate
  • substrate loading transporter 310 loading part
  • protection member 327 rollover assist wheel
  • adsorption unit 415-1 separation roller
  • first detecting unit 420 gap adjusting unit
  • feed roller 510 main feed roller
  • roller frame 583 eccentric rotating part
  • positioning groove portion 80 the substrate
  • buffer 910 buffer plate
  • rotating roller 930 internal and external drive unit
  • Roller transport roller 5 Board transport roller
  • PCBs Printed Circuit Boards
  • the present invention relates to a substrate loading transporter and a transport system including the same.
  • the substrate loading transporter 30 includes a loading unit 310 on which the substrate 80 is loaded; And a moving unit 320 for moving the loading unit 310 on which the substrate 80 is loaded, and moving to a transportation and transfer system in a state in which the substrate 80 is loaded in the loading unit 310. It can be made through this one substrate loading transporter 30, characterized in that to shorten the logistics process.
  • the dozens of boards are transported by being loaded separately in a separate transport trolley, and after transportation, the L-shaped loading unit which calls the boards 'L rack 3'.
  • the process of repeating the process of loading and using the L rack 3 into the transfer system is carried out at the factory, and then back to the L rack 3.
  • Transfer process the process of placing the L rack (3) to the transfer system where the processing takes place (for example, the process of coupling or replacing the L rack (3) to the bogie 6 (see Fig. 2))
  • the substrate loading transporter 30 As shown in Figure 3, the loading unit 310 and the substrate 80 on which the substrate 80 is aligned and loaded are loaded.
  • the stacking unit 310 is loaded through a single board stacking transporter 30 from substrate loading and shipping at the factory. It is possible to shorten the logistics process by being able to move the substrate by using a single substrate loading transporter 30 including the moving unit 320 to the transport system is made from the transport to further processing of the substrate.
  • the mounting portion 310 is a back contact portion 311 in contact with the back surface of the substrate 80 to be loaded, a bottom contact portion 312 in contact with the bottom surface of the substrate 80 to be loaded, and the bottom surface at regular intervals It may include a slit portion 313 extending from the front side to the rear side of the contact portion 312 and the intermediate contact portion 314 positioned between the slit portion 313.
  • the back contact portion 311 is formed to be inclined so that the substrate 80 to be loaded is directed toward the back contact portion 311, and the bottom contact portion 312 is also the front (outer)
  • the substrate 80 can be stably loaded even during the transportation process (also, as shown in FIG. 5, as the loaded substrate 80 is inclined). Due to this, it may be arranged across the separate protective member 326 in the space formed between the substrate carriers 30, which are arranged back and forth, as shown in Figure 5 for the arrangement of the protective member 326.
  • the loaded substrate 80 may be stably loaded due to the inclination, but in an additional configuration for preventing the substrate loading transporter 30 from falling back in case of moving the inclined portion, FIG.
  • an anti-overturning wheel 327 which is positioned to float slightly on the ground than the existing wheels for movement on the rear side of the substrate loading transporter 30, usually not in contact with the ground If it does not climb the inclined portion or the substrate stacking carrier 30 is going to fall back to the ground to prevent the substrate stacking transporter 30 to rise or tilt over the inclined portion stably.
  • the configuration of the bottom support 411 or the front support 412 of the rotary moving unit 410 operating in the loading or unloading process does not interfere with the loading unit 310 during the rotational movement.
  • it includes a slit portion 313 extending from the front to the rear of the bottom contact portion 312 at a predetermined interval to be penetrated, which will be described later.
  • a separate intermediate contact portion 314 may be located between the slit portions 313, which is smaller than the slit portion 313 when the substrate 80 is a relatively small size. Since it may be a problem when loading, it is a configuration that can be formed to load a small size of the substrate 80 to prevent this.
  • the moving part 320 is configured to fix the coupling between the substrate loading transporters 30 arranged back and forth, as shown in FIG. 5 in the transportation process of the substrate loading transporter 30.
  • the protrusion 321 of the substrate loading transporter 30 located at the rear side of the groove portion 322 is inserted into the groove 322 to have the coupling fixing between the substrate loading transporters 30.
  • the moving part 320 further includes a banding part 323 to which the rope 324 that binds the loaded substrate 80 is fixed in the process of transporting the substrate loading transporter 30, thereby providing a substrate 80.
  • Rope 324 tying the wire can be prevented from moving out of position in the transport process, and additionally prevent the movement of the moving unit 320 in the state that the substrate loading transporter 30 is located in the transport system and firmly
  • a fixing part 325 is a portion to which the fixing means 730 of the transfer system to be described later coupled to be fixed, loading the substrate 80 in a state that the substrate loading transporter 30 is firmly fixed in the transfer system Or allow the unloading process to be performed.
  • the exact position protrusion 328 is accurately fitted to the right position groove 740 through the substrate loading transporter 30 can be positioned in the correct position, as well as In this case, the shock is transmitted to the transfer system in the process of positioning the substrate stacking transporter 30 through the positioning groove 740.
  • a substrate transfer system including (subjected to) a substrate loading transporter 30 may include a loading portion on which a substrate 80 is loaded.
  • a substrate stacking transporter (30) comprising a moving portion (320) for moving the stacking portion (310) on which the substrate (310) and the substrate (80) are mounted;
  • the substrates 80 loaded on the loading unit 310 of the substrate loading transporter 30 are loaded to the transfer roller 50 one by one or the substrates 80 transferred from the transfer roller 50 one by one.
  • a loading / unloading unit 40 for unloading the loading unit 310;
  • the loading / unloading portion 40 to transfer the substrate 80 loaded through the loading / unloading portion 40 to the substrate processing automation line or to unload the substrate 80 from the substrate processing automation line.
  • Feed roller 50 for feeding to;
  • a control unit 60 for controlling the operation of the loading / unloading unit 40 and the transfer roller 50;
  • a loading transporter guide unit 70 for guiding the substrate loading transporter 30 to be accurately positioned in front of the loading / unloading unit 40. Since the substrate loading transporter 30 has the same configuration as described above, a detailed description thereof will be omitted.
  • the loading / unloading unit 40 is operated in a normal operating state.
  • the loading / transporter guide unit 70 guides and fixes the substrate loading transporter 30 to be positioned in a transport system. If there is a risk of collision between the substrate loading transporter 30 and the loading / unloading unit 40 is not entering or entering the circuit breaker 710 to block the entry of the substrate loading transporter 30, the substrate loading The friction reducing unit 720 to minimize the friction with the side of the transporter 30, and is fastened to the fixed portion 325 of the substrate loading transporter 30 for fixing the in-place substrate loading transporter 30 It may include a fixing means (730).
  • the loading / unloading unit 40 is not in a normal operating state or enters in the process of entering the substrate loading transporter 30 in the transport system;
  • the substrate loading transporter 30 is formed on the loading transporter guide unit 70 to block entry of the substrate transporting device 30. If it is to be blocked (under the control of the control unit 60) protrudes into the space of the carrier transporter guide 70, the moving unit 320 of the substrate loading transporter 30 is no longer the internal space of the transporter guide unit 70 Do not enter
  • the friction reducing unit 720 is configured to minimize friction with the side of the substrate loading transporter 30 to enter, for example, a ball bearing as shown in FIG. 17 may be applied, and other examples may also use a rotating roller. Can be.
  • the fixing means 730 is configured to be coupled to the fixing portion 325 of the substrate loading transporter 30 to fix the substrate loading transporter 30 positioned in the transport system.
  • the fixing part 325 Is formed of a round bar, etc. Accordingly, the fixing means 730 may be utilized to clamp the fastening rod.
  • the controller 60 may operate the fixing means 730 according to the corresponding signal. Can be.
  • the loading transporter guide unit 70 is the impact of the loading / unloading unit 40 to the transport roller 50 during the collision between the substrate loading transporter 30 and the loading transporter guide unit 70
  • the loading / unloading unit 40 and the transport roller 50 is separated from the main frame is mounted on the floor in a completely independent structure (for example, Anchors, etc.).
  • a completely independent structure for example, Anchors, etc.
  • the loading / unloading unit 40 loads the substrates 80 loaded on the loading unit 310 of the substrate loading transporter 30 one by one to the transfer roller 50 or from the transfer roller 50. As shown in FIG. 6, the substrate 80, which is transferred, is unloaded to the loading unit 310 one by one, and is positioned between the substrate loading transporter 30 and the transfer roller 50. .
  • the loading / unloading unit 40 rotates the substrate 80 one by one between the loading unit 310 and the transfer roller 50 for loading or unloading, as shown in FIGS. 7 to 10.
  • Rotation moving unit 410 for moving and the gap adjusting unit for adjusting the position of the loading / unloading unit 40 as the loading amount of the substrate 80 loaded on the loading unit 310 in the loading or unloading process changes 420 may be included.
  • the gap adjusting part 420 may include a front and rear guide part 421 for guiding the front and rear movement of the rotation movement part 410 and a vertical guide part 422 for guiding the vertical movement of the rotation movement part 410. ), A front and rear driving part 423 for driving the rotation moving part 410 in the front and rear direction, and a vertical driving part 424 for driving the rotation moving part 410 in the vertical direction.
  • the front and rear driving part 423 moves the entire rotary movement part 410 along the front and rear guide part 421 in the front and rear direction
  • the vertical driving part 424 is along the vertical guide part 422.
  • the rotation moving part 410 is moved in the vertical direction.
  • the loading / unloading unit 40 may actively change the loading amount of the substrate 80 loaded between the loading unit 310 and the transfer roller 50 to a change in the height of the transfer roller 50 while the substrate ( 80) It has the feature to load or unload one by one.
  • the rotary mover 410 is rotated by holding the substrate 80 one by one between the loading portion 310 and the transfer roller 50 for loading or unloading from the loading portion 310 to the transfer roller 50 or With the configuration of moving from the transfer roller 50 to the loading unit 310, for this purpose in more detail with reference to Figures 7 and 9, the rotary moving unit 410 of the substrate 80 to be loaded or unloaded A bottom support part 411 supporting a bottom surface, a front support part 412 supporting a front surface of the substrate 80 supported by a bottom support part 411, and a bottom support part 411 and a front support part 412. It may include a rotation motor 414 for rotating the rotational movement 410 including a rotation axis about the rotation axis.
  • the bottom support part 411 and the front support part 412 are formed in a '' 'shape to support the bottom and front surfaces of the substrate 80 to be loaded or unloaded, respectively.
  • a suction part 415 configured to pull the substrate 80 loaded on the loading part 310 toward the bottom support part 411 for loading, and to the slit part 313 of the loading part 310.
  • the adsorption portion 415 is attached to the front surface of the substrate 80 loaded on the loading portion 310 to adsorb a single substrate 80.
  • the rotation moving part 410 is rotated to load the substrate 80 onto the feed roller 50.
  • the suction part 415 may be formed in such a manner that a plurality of adsorption parts 415 are arranged in parallel, in this case, to adjust the amount of adsorption (adsorption force) pulling the substrate for each of the plurality of adsorption parts 415. If a hole is formed in the board for circuit formation, and the adsorption part adsorbed by contacting with the hole is formed, the adsorption force is relatively weakened to prevent the adsorbed back to the substrate through the hole. do.
  • the other end of the bottom support part 411 (an opposite end to the end on which the front support part 412 is formed) further includes a back support part 413 for supporting the back of the substrate 80 or the substrate at the bottom support part 411.
  • a separate groove portion (not shown) may be formed to be recessed to insert the bottom of the 80.
  • the rotational movement unit 410 As shown in FIG. 12, the push unit 416 for pressing the front surface of the substrate 80 moved toward the bottom support 411 through the adsorption unit 415 and the push unit 416 and the push unit 416. ) Includes a distance measuring unit 417 for measuring the distance between the rotary moving unit 410 and the substrate 80 in a state in which the front surface of the substrate 80 is pressed, and the control unit 60 includes the distance measuring unit Based on the distance between the rotation moving part 410 and the substrate 80 measured through 417, it is determined whether two or more substrates 80 are moved toward the bottom support part 411.
  • the push unit 416 moves toward the bottom support part 411 through the adsorption part 415 as illustrated in FIG. 21.
  • the distance measuring unit 417 may be, for example, a distance measuring laser sensor to the front surface of the substrate 80.
  • the distance measuring unit 417 laser sensors may be formed on two sides closest to the front support part 412 (or the bottom support part 411), which is measured on one side.
  • the accuracy by measuring from both sides (in addition, if only one side of the substrate 80 is pulled toward the bottom support 411 can increase the accuracy of the measurement in the same situation), of course, as possible
  • the thickness is increased. Even in the case of a very thin substrate 80, it is to be able to accurately determine whether two sheets.
  • the distance between the rotary mover 410 and the substrate 80 by using the laser sensor of the distance measuring unit 417 in the state of pressing the front surface of the substrate 80 through the push unit 416 is fixed accurately.
  • the laser sensor is preferably measured at a height of 20mm or less from the bottom of the substrate 80, which increases the accuracy because the perforation due to the circuit formation on the substrate 80 is usually not within 20mm from the bottom)
  • the loading process is performed by rotating the rotary mover 410
  • the substrate 80 is pushed back to the loading unit 310 through the adsorption unit 415, and then the adsorption unit 415 is performed again.
  • 1 sheet of substrate 80 toward bottom support 411 You will perform a move operation.
  • the substrate 80 may be moved toward the bottom support portion 411 through the adsorption portion 415 for loading under the control of the controller 60 so as to increase the accuracy.
  • the rotation movement unit 410 is rotated upward by a predetermined degree and then rotated downward again so that the angle formed by the distance measuring unit 417 laser sensor and the substrate 80 is optimized.
  • the separation roller 415-1 may be further provided with a one-way bearing (not shown), and the adsorption part 415 pulls the substrate 80 in the process of pulling the substrate 80 and the bottom surface of the substrate 80.
  • the separation roller 415-1 which is in contact with the separation roller 415-1, is not rotated and is caught by the adsorption unit 415, the separation roller 415-1 is caught by one. Only the medium can be moved.
  • the adsorption part 415 pushes the substrate 80, the separation roller 415-1 in contact with the bottom surface of the substrate 80 rotates to form a substrate. 80 can be smoothly moved to the substrate loading transporter (30).
  • the separation roller 415-1 may adjust the position according to various weights of the substrates 80 to increase the efficiency of separating two or more substrates 80.
  • the adsorption unit 415 may function to determine whether the loading of the substrate 80 loaded in the loading unit 310 is completed in the loading process, so that it is necessary to replace the other substrate loading transporter 30. . That is, when the loading of all the substrates 80 of the loading unit 310 is completed, the adsorption unit 415 touches and pulls the back contact portion 311 of the loading unit 310, the substrate loading transporter 30 Since there is no substrate 80 that is pulled through the adsorption unit 415 through a plurality of pulling processes because it is firmly fixed, the controller 60 receiving this signal completes loading of the loaded substrate 80. It is determined that the time required to replace the other substrate loading transporter 30. Therefore, in the loading process, it is possible to automatically determine the replacement time of the substrate loading transporter 30 and notify it.
  • the rotation moving part 410 is in close contact with the substrate 80 supported by the bottom support 411 after the unloading from the transfer roller 50 toward the loading part 310
  • a part (not shown) may be additionally included, whereby the adsorption part 415 may simultaneously perform the function of the contact part (not shown) as necessary.
  • the substrate 80 when the substrate 80 is expected to collide with the rotary moving unit 410 in the course of the work process using the distance measuring unit 417, the substrate is projected to protrude from the front surface of the rotary moving unit 410 (
  • An anti-collision part 418 may be further included to block the 80 to protect the substrate 80.
  • the anti-collision part 418 is preferably formed of a soft material that can protect the substrate 80, and if necessary, a structure that protrudes from the front surface of the rotary moving part 410 or fixedly rotates the moving part 410.
  • the protruding structure can also be taken on the front surface.
  • the front and rear guide portion 421 for guiding the front and rear movement of the rotary movement unit 410 is also preferably formed to be inclined at the same inclination and inclination of the bottom contact portion 312 of the loading portion 310.
  • the efficiency of the separation process of the substrate 80 at the time of loading and the substrate 80 moved toward the loading unit 310 during unloading are naturally directed toward the loading unit 310. This will increase the ease of operation during other loading or unloading processes.
  • the control unit 60 uses a separate rotary mover position control module (not shown), as shown in FIG. 24, to attract and pull the substrate 80 attracted through the adsorption unit 415.
  • the rotary mover 410 which is seated on the bottom support 411 and / or the rear support 413, is first retracted by a predetermined distance (1 direction), and then rotated for loading (2 direction), thereby causing the rotational moving part 410 to move. It is possible to prevent the substrate 80 (the substrate in the next order of the substrate 80 being loaded or unloaded) from the bottom support part 411 to the back support part 413 of the c) from being scratched or hit and damaged. Meanwhile, in the state in which the substrate 80 to be loaded is lifted through the rotation moving part 410, one or more substrates 80 seated on the bottom support part 411 and / or the rear support part 413 are two or more. If it is necessary to determine whether, as shown in FIG.
  • the substrate 80 is pushed through the push unit 416 while the substrate 80 is slightly lifted by the rotation moving unit 410, and then the distance is increased. Measurement by the measuring unit 417 is determined, and at this time, through the rotary moving unit position control module (not shown), the rotary moving unit 410 is first reversed at a predetermined interval, and then the rotary moving unit 410 is slightly lifted up. Alternatively, by rotating the moving part 410 first at a predetermined interval and then lifting the rotating part 410 a little further and then lowering it back a little below, the bottom support part 411 of the rotating part 410 is also taken. To the substrate 80 (loaded or unloaded) on the back support 413 Immediately substrate in the following order of the plate 80) can be prevented from being scratched and damaged hit.
  • the control unit 60 uses the substrate through the substrate alignment unit 416-1 to be described later as necessary.
  • the rotary moving part 410 is lowered somewhat faster so that the bottom surface of the substrate 80 is somewhat stronger to the loading part 310 by using the weight of the substrate 80.
  • the two or more substrates 80 joined by collision may be separated, and then the substrates 80 are pushed through the substrate alignment unit 416-1, which will be described later, or below the separation roller 415-1. High pressure air is blown through the blower 417-1 located so that two or more substrates 80 bonded to each other can be separated.
  • the rotation moving part 410 further pushes the left and right sides of the substrate 80, which are distracted from the loading part 310, on both left and right sides thereof, thereby aligning the substrates 80.
  • the substrate alignment unit 416-1 is spaced apart from the left and right by a predetermined interval so as to press near the left and right edges of the substrate 80 and as shown in FIG. 21. It is preferably formed at a height capable of pressing the lower portion of the substrate 80 mounted on the 310. Therefore, before the substrate 80 is attracted and pulled through the adsorption unit 415, as shown in FIG. 26, the substrate 80 of the loading unit 310 is formed using the substrate alignment unit 416-1.
  • the substrate aligning unit 416-1 is tightly loaded without gaps while pushing both left and right sides of the substrates 80 unloaded to the loading unit 310 of the substrate loading transporter 30 during the unloading process as will be described later. It works to be.
  • the transfer roller 50 transfers the substrate 80 loaded through the loading / unloading unit 40 to a substrate processing automation line or to unload the substrate 80 from the substrate processing automation line.
  • the feed roller for this purpose as shown in Figure 11, the plurality of the front support portion 412 of the rotary moving portion 410 is a feed roller 50
  • Interference prevention slit 520 forming a predetermined space through which the front support 412 passes so as not to interfere with the main transport, respectively located on the left and right sides and front of the interference prevention slit 520 around the interference prevention slit 520
  • An auxiliary roller 530 formed to smoothly transport the substrate 80 between the roller 510, the rotation motor 540 for rotating the main feed roller 510, and the interference prevention slit 520;
  • the chin 550 may include each of the right and left sides of the transport roller.
  • the anti-interference slit 520 is a plurality of the front support portion 412 of the rotary moving part 410 to move the substrate 80 while moving between the loading portion 310 and the transfer roller 50 is a transfer roller
  • the length and width of the portion through which the front support part 412 passes through the feed roller 50 is configured to form a predetermined space through which the front support part 412 passes on the feed roller 50 so as not to interfere with the 50. It may be formed in consideration of.
  • a plurality of front support parts 412 of the rotary mover 410 may pass on the transfer roller 50 together with the movable structure of the rotary mover 410 up and down / left and right.
  • the front support portion 412 of the rotary moving part 410 is moved immediately after loading the substrate 80 on the feed roller 50 as described above.
  • the rotation moving unit 410 includes a first detection unit 419 for detecting whether the substrate 80 started to move on the transfer roller 50 from the bottom support 411 in the loading process,
  • the controller 60 immediately transfers the substrate 80 based on the information of the first detection unit 419 (that is, the substrate 80 moves away from the bottom support 411 and moves on the feed roller 50).
  • the first detection unit 419 may operate as a function of detecting whether the substrate 80 is completely transferred from the transfer roller 50 to the bottom support 411 in the unloading process.
  • the main feed roller 510 is located at both the left and right sides of the interference prevention slit 520 and the front side as needed, respectively, and the substrate 80 on the upper portion thereof is predetermined according to the rotation of the rollers. In a configuration for moving to the position of, the driving force for the rotation of the main feed roller 510 is transmitted from the rotation motor 540 connected to the main feed roller 510.
  • the auxiliary roller 530 is formed to smoothly transport the substrate 80 between the interference preventing slits 520, and formed to rotate by receiving a driving force with the roller of the auxiliary roller 530 as necessary.
  • the auxiliary roller 530 may further include a rotation connecting member 560 to rotate in conjunction with the rotation of the main feed roller 510.
  • the pivot connection member 560 connects the main feed roller 510 and the sub roller 530 to transfer the rotational force of the main feed roller 510 to the sub roller 530 as it is.
  • the roller 530 is also configured to rotate in conjunction with, and may be connected between the main feed roller 510 and the auxiliary roller 530 and between the auxiliary roller () and the auxiliary roller 530, respectively.
  • the substrate array unit 550 is configured to align the substrate 80 by protruding in a push form from the left and right sides of the transfer roller to align the arrangement of the substrate 80 moving on the transfer roller 50.
  • 50 is positioned on the left and right sides of the transfer roller 50 so that the substrate moving on the line is aligned and moved to pass through the feed roller 50 while protruding in a push form toward the center of the feed roller 50 at regular intervals. Both sides of the substrate are pushed at the same time to align the substrate 80 to be positioned at the center of the transfer roller 50.
  • the substrate array unit 550 may also perform a task to distinguish the defective substrate 80, for example, the defective substrate 80 that is found to be a defective substrate 80 in the substrate processing automation line
  • the control unit 60 receives the information on the order in which the defective substrate 80 is positioned, and then transfers the feeding roller 50 when the defective substrate 80 passes over the feeding roller 50.
  • the transfer roller 50 is usually located on the lower side, while the rollers rotate in the left and right while protruding only when the centering alignment of the substrate 80 or the transfer to the left or right with respect to the defective substrate 80 Further comprising a left and right roller portion (not shown), the substrate 80 is easily moved in the left or right direction when transferring the centering alignment of the substrate 80 to the left or right with respect to the defective substrate 80 You can help.
  • another substrate 80 is loaded on the transfer roller 50 while the substrate 80 loaded on the transfer roller 50 has not yet exited the transfer roller 50 in the loading process of the substrate 80.
  • the feed roller 50 transfers a distance of more than the size of the substrate 80 on the feed roller 50 in the loading process.
  • a second detection unit 570 for example, a laser sensor, etc.
  • the control unit 60 includes the substrate 80 having the transfer roller 50 based on the information of the second detection unit 570.
  • the other substrate 80 is prevented from being loaded onto the transfer roller 50 in a state in which the distance of more than the size of the substrate 80 is not transferred.
  • the control unit 60 is a state in which the substrate 80 does not transfer a distance greater than or equal to the size of the substrate 80 on the transfer roller 50 In this case, when another substrate 80 is loaded on the transfer roller 50, this is prevented, and the loading process is restarted after the substrate 80 completely passes the second detection unit 570.
  • the transfer roller 50 may further include a double sheet (2 sheets) detecting unit 580 for finally detecting whether two or more substrates 80 are loaded or unloaded.
  • the double sheet detecting unit 580 senses the thickness of the substrate 80 moving for loading or unloading along the feed roller 50 on the feed roller 50 as shown in FIG. 20. It is detected whether the substrate 80 is one sheet or two sheets or more.
  • the double sheet (2 sheets) detecting unit 580 as shown in Figure 20, the detection roller 581 for touching the upper surface of the substrate 80 passing through the transfer roller 50, and the detection roller ( 581 is an eccentricity in which the roller frame 582 and the roller frame 582 which are moved in conjunction with the shangdong are connected to the roller frame 582 and the other end is rotated more than the one end about the rotating shaft 584 by the lever principle.
  • the rotating unit 583 and the limit sensor 585 for measuring and detecting the moving distance of the other end of the eccentric rotating unit 583 may be included.
  • the sensing roller 581 and the roller frame 582 interlocked with the sensing roller 581 are formed of a substrate ( 80 is raised higher than when one sheet, and the eccentric rotation part 583 is the amplified rotation of the other end than the one connected to the roller frame 582 through the lever principle, and the limit sensor (585) Since it is possible to accurately detect the substrate 80, even when the thickness of the substrate 80 is thin, it is possible to accurately determine whether two or more substrates 80 are loaded or unloaded correctly through the amplification detection as described above. Therefore, it is possible to prevent a problem caused by loading or unloading two or more substrates 80 at the same time.
  • the double sheet detecting unit 580 includes a second handle 587 for adjusting the position of the sensing roller 581 according to the thickness of the substrate 80, and a position of the limit sensor 585.
  • a handle 586 may be further included to adjust the thickness of the substrate 80 to correspond to the thickness of the various substrates 80. That is, first, the sensing roller (581) through the second handle (587) to match the thickness of the substrate 80 so that one substrate 80 does not move when passing (that is, the substrate 80 when passing one sheet) ) So that no gas or the like is generated on the upper surface of the substrate during normal passage of one substrate 80.)
  • the sensing roller 581 is connected to the substrate only when two or more substrates 80 pass.
  • the sensing roller 581 is moved upward when two or more substrates 80 pass through the handle 586 to match the thickness of the substrate 80 through the handle 586.
  • the position of the limit sensor 585 is set so that the limit sensor 585 can sense the movement distance of the rotation of the other end of the pivoting part 583, the substrate 80 having various thicknesses is used. Can accurately detect whether two or more substrates 80 It is.
  • FIGS. 12 to 14 In the state where the substrate loading transporter 30 having the substrate 80 loaded thereon is fixed in the transport system through the loading transporter guide unit 70, FIG. As shown in FIG. 12, the rotation moving part 410 of the loading / unloading part 40 rotates first toward the loading part 310 to move one of the substrates 80 in front of the loaded substrates 80. The suction part 415 is pulled and moved toward the bottom support part 411. At this time, the bottom support portion 411 is positioned below the bottom contact portion 312 by utilizing the slit portion 313 of the loading portion 310.
  • the gap adjusting part is confirmed as one piece.
  • the rotary moving unit 410 is rotated to load the substrate 80 into the transfer roller 50, as shown in FIG.
  • the gap adjusting part 420 moves the bottom support part 411 and the front support part 412 in the downward direction, and then moves the rotation moving part 410 in the opposite direction to the loading direction.
  • the unloading process will be described with reference to FIGS. 15 and 16, even when the substrate 80 is being transferred from the substrate processing automation line to the transfer roller 50 (that is, the substrate 80 is conventionally used).
  • the transfer of the substrate 80 to the feed roller 50 is made 15), as shown in FIG. 15, the gap adjusting unit 420 and the rotating motor 414 move the rotary moving unit 410 from the lower side of the feed roller 50 together with the rotational movement.
  • the rotation moving part 410 supports the substrate 80 on which the transfer to the feed roller 50 is completed by the front support part 412 and the bottom support part 411 (back support part 413 is added as necessary). Rotational movement in one state is to be unloaded up to the loading portion (310). Subsequently, as shown in FIG. 16, the unloaded substrate 80 is pushed toward the loading part 310 by using the contact part (not shown) to other substrates 80 loaded on the loading part 310. The rotating movement part 410 is rotated toward the feed roller 50 in a direction opposite to the direction when unloading, or in another example, the rotating movement part 410 is rotated 360 degrees as it is unloading. Rotates toward 50).
  • the substrate aligning unit 416-1 is first loaded before loading one substrate 80 to the loading unit 310 through the rotation moving unit 410.
  • the substrate alignment unit 416-1 is used to determine one substrate loading transporter 30. Make sure the load is filled accurately.
  • the substrate transfer system according to the present invention, as shown in Figure 18 and 19, the substrate loading transporter 30, the substrate loading transporter 30 is completed, the loading of the substrate 80 is completed in the unloading process 30 And a buffer 90 which allows the substrate 80 to be temporarily loaded during the replacement process.
  • the unloading process may be continuously performed even during the process of replacing the substrate loading transporter 30. Can be.
  • the buffer 90 moves the buffer plate 910 only when the substrate loading transporter 30 is replaced between the substrate loading transporter 30 and the loading / unloading unit 40.
  • the substrate 80 to be loaded on the stacker 310 may be temporarily loaded on the buffer plate 910.
  • the transporter guide unit 70 may be used.
  • the buffer plate 910 located on the side is moved by the inner and outer driving unit 930 for moving it inward or outward, so that the buffer plate 910 is moved inward when the loading of the substrate loading transporter 30 is completed.
  • the unloaded substrate 80 is loaded on the buffer plate 910, and the loading unit 310 is replaced with the empty substrate stacking carrier 30.
  • the buffer plate 910 is moved to the outside again in FIG. 19. As shown, the substrate 80, which was loaded on the buffer plate 910, is (moved) loaded on the loading portion 310, and then the substrate 80, which is unloaded as it is, is loaded on the loading portion 310. .
  • the buffer plate 910 interferes with the relatively high end portion of the loading portion 310. If a case may occur, and a vertical drive unit (not shown) for moving the buffer plate 910 up and down separately to prevent this, the buffer plate 910 when entering or exiting the substrate loading transporter 30. ) Is moved upward to prevent interference with the end of the stacking unit 310, and after the substrate stacking transporter 30 has completely exited, the buffer plate 910 is moved downward again to continuously operate the buffer plate 910. Allow unloading to be performed.
  • the buffer plate 910 includes a rotating roller 920, the process of moving to the loading unit 310 of the substrate loading transporter 30, the substrate 80 that was loaded on the buffer plate 910 is replaced In order to minimize the friction between the buffer plate 910 and the substrate 80 to protect the substrate (80).

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Abstract

La présente invention concerne une machine de chargement et de transport de cartes, et un système de transfert de cartes la comprenant, qui sont utilisés afin de transporter des cartes (de circuit imprimé) et de transférer celles-ci vers chaque processus une à une et, plus particulièrement, l'invention concerne un système de transfert de cartes, qui peut empêcher des défauts tels que des rayures ou des éclats des cartes lors du transport étant donné que le transport et le mouvement vers le système de transfert sont activés par l'intermédiaire d'une machine de chargement et de transport de cartes dans un état dans lequel les cartes sont chargées, qui réduit au minimum un endommagement tel que des rayures ou des éclats des cartes même au cours d'un processus de chargement ou de déchargement des cartes, qui peut empêcher deux feuilles de cartes ou plus d'être chargées ou déchargées, qui peut commander la position d'une partie de chargement/déchargement, en fonction du nombre de cartes changeant pendant un processus de chargement/déchargement, ou de la position de la partie de chargement/déchargement, en fonction de la hauteur de chaque ligne automatisée pour divers processus de cartes, et appliquer celle-ci et, en particulier, qui réduit le temps pour une opération de chargement ou de déchargement par l'application d'une structure permettant qu'une partie tournante et mobile tourne et déplace les cartes vers le processus suivant immédiatement après que la partie tournante et mobile a chargé les cartes.
PCT/KR2016/000639 2015-01-26 2016-01-21 Machine de chargement et de transport de cartes, et système de transfert la comprenant WO2016122161A1 (fr)

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KR1020150012228A KR101694468B1 (ko) 2015-01-26 2015-01-26 기판 적재운송기 및 이를 포함하는 이송시스템
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990024052A (ko) * 1998-09-19 1999-03-25 양락운 엘씨디 카셋트 운송용 수송 대차
JP2005320050A (ja) * 2004-05-11 2005-11-17 Kyokuhei Glass Kako Kk カセット収納式ガラス基板搬送用ボックス
KR100555620B1 (ko) * 2003-10-28 2006-03-03 주식회사 디엠에스 기판 운반시스템 및 운반방법
KR20080002809U (ko) * 2007-01-19 2008-07-23 주식회사 유니빅 평판유리 직립반송장치
KR20080114019A (ko) * 2007-06-26 2008-12-31 삼성전자주식회사 기판 적재장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990024052A (ko) * 1998-09-19 1999-03-25 양락운 엘씨디 카셋트 운송용 수송 대차
KR100555620B1 (ko) * 2003-10-28 2006-03-03 주식회사 디엠에스 기판 운반시스템 및 운반방법
JP2005320050A (ja) * 2004-05-11 2005-11-17 Kyokuhei Glass Kako Kk カセット収納式ガラス基板搬送用ボックス
KR20080002809U (ko) * 2007-01-19 2008-07-23 주식회사 유니빅 평판유리 직립반송장치
KR20080114019A (ko) * 2007-06-26 2008-12-31 삼성전자주식회사 기판 적재장치

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