WO2016111291A1

WO2016111291A1 - Method for producing bonded structure, and bonded structure

Info

Publication number: WO2016111291A1
Application number: PCT/JP2016/050131
Authority: WO
Inventors: 和義西川
Original assignee: オムロン株式会社
Priority date: 2015-01-09
Filing date: 2016-01-05
Publication date: 2016-07-14
Also published as: JP2016128185A

Abstract

This method for producing a bonded structure (100) is a method for producing a bonded structure wherein a glass member (1) and a metal member (2) are bonded with each other with an intermediate member (3), which is made of a metal, being interposed therebetween. This method for producing a bonded structure (100) comprises: a step for forming a first recessed part (11) in the surface of the glass member; a step for forming the intermediate member on the surface of the glass member in such a manner that the first recessed part is filled with the intermediate member; and a step for bonding the metal member to the intermediate member.

Description

Manufacturing method of bonded structure and bonded structure

The present invention relates to a method for manufacturing a bonded structure and a bonded structure.

Conventionally, various joining methods for joining two members are known (see, for example, Patent Documents 1 and 2).

Patent Document 1 discloses a joining method for joining metallic glass and crystalline metal. In this joining method, the metallic glass and the crystalline metal are joined by forming a molten layer in which the metallic glass is melted by irradiating a laser beam to the interface where the metallic glass and the crystalline metal are brought into contact with each other. .

Further, Patent Document 2 discloses a joining method for joining two members, at least one of which is a transparent member. In this bonding method, an ultrashort light pulse laser beam is irradiated from the transparent member side in a state where two members are laminated. The filament region is generated by the self-focusing effect of the ultrashort optical pulse laser beam, and the two members are joined by positioning the joining surface in the filament region. Thereby, it is possible to join other types of members such as glass and a transparent member.

JP 2010-227940 A JP 2011-56519 A

However, in the joining method described in Patent Document 2, it is necessary to bring the two members into contact when joining the two members, and there is a problem that high surface accuracy (flatness) is required. That is, when the surface accuracy of the joint surfaces of the two members is low, gaps are generated in the joint surfaces, so it is difficult to join the gap portions of the joint surfaces, and the joint quality of the joint surfaces is low. Getting worse. In the joining method described in Patent Document 1, it is possible to join a metal glass and a crystalline metal, but it is not possible to join a glass member made of silicate glass and a metal member.

The present invention has been made to solve the above-described problems, and the object of the present invention is to suppress deterioration in bonding quality even when the surface accuracy of the glass member and the metal member is low. It is to provide a manufacturing method of a bonded structure and a bonded structure.

The manufacturing method of the joining structure by this invention is a manufacturing method of the joining structure by which the glass member and the metal member were joined via the metal intermediate member, and the process of forming a 1st recessed part in the surface of a glass member And a step of forming the intermediate member on the surface of the glass member so that the first concave portion is filled with the intermediate member, and a step of joining the metal member to the intermediate member.

In the manufacturing method of the joined structure, the step of joining the metal member to the intermediate member includes the step of arranging the metal member adjacent to the intermediate member, and irradiating the intermediate member with laser from the glass member side, thereby And a step of welding the members.

In the manufacturing method of the joined structure, the step of forming the second concave portion on the surface of the metal member before joining the metal member to the intermediate member, and the step of joining the metal member to the intermediate member includes the second concave shape. The intermediate member and the metal member are disposed adjacent to each other so that the portion is disposed on the intermediate member side, and the intermediate member is filled into the second concave portion by irradiating the intermediate member with laser from the glass member side. And a solidifying step.

In the method for manufacturing a joined structure, the intermediate member may have a linear expansion coefficient between the glass member and the metal member.

The bonded structure according to the present invention is manufactured by any one of the above-described bonded structure manufacturing methods.

According to the method for manufacturing a bonded structure and the bonded structure of the present invention, it is possible to suppress deterioration in bonding quality even when the surface accuracy of the glass member and the metal member is low.

It is sectional drawing which showed typically the joining structure body by 1st Embodiment of this invention. It is a figure for demonstrating the manufacturing method of a joining structure, Comprising: It is the figure which showed the process in which a perforation part is formed in a glass member. It is a figure for demonstrating the manufacturing method of a joining structure, Comprising: It is the figure which showed the process in which an intermediate member is formed in the surface of a glass member. It is a figure for demonstrating the manufacturing method of a joining structure, Comprising: It is the figure which showed the process in which a metal member and an intermediate member are joined. It is sectional drawing which showed typically the joining structure body by 2nd Embodiment of this invention. It is a figure for demonstrating the manufacturing method of a joining structure, Comprising: It is the figure which showed the process in which a perforation part is formed in a metal member. It is a figure for demonstrating the manufacturing method of a joining structure, Comprising: It is the figure which showed the process in which a metal member and an intermediate member are joined. It is the perspective view which showed the glass member of Example 1 and 2. FIG. It is the perspective view which showed the state in which the intermediate member was formed in the glass member of Example 1 and 2. 1 is a perspective view showing a joint structure of Example 1. FIG. 5 is a perspective view showing a metal member of Example 2. FIG. It is the perspective view which showed the joining structure of Example 2. FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
First, with reference to FIG. 1, the joining structure 100 by 1st Embodiment of this invention is demonstrated.

1, the bonded structure 100 includes a glass member 1, a metal member 2, and an intermediate member 3 disposed between the glass member 1 and the metal member 2. The glass member 1 and the metal member 2 are joined via a metal intermediate member 3. In FIG. 1, the hatching of the glass member 1 is omitted for easy viewing.

Specifically, a plurality of perforated portions 11 are formed on the surface 1a of the glass member 1, and the perforated portions 11 are filled with the intermediate member 3 and solidified. For this reason, the glass member 1 and the intermediate member 3 are mechanically joined by the anchor effect. The metal member 2 and the metal intermediate member 3 are joined by welding. In addition, the whole surface 2a of the metal member 2 may be welded, or the surface 2a may be partially welded.

The glass member 1 is a glass capable of transmitting a laser L2 for bonding described later (see FIG. 4), and examples thereof include silicate glass and metal glass such as soda lime glass, quartz glass, and crystal glass. .

The perforated portion 11 is a substantially circular non-through hole when seen in a plan view, and a plurality of perforated portions 11 are arranged on the surface 1a of the glass member 1 at a predetermined interval. The perforated part 11 is formed by, for example, a processing laser L1 (see FIG. 2). The processing laser L1 is an extremely short pulse laser such as an IR picosecond laser and a UV picosecond laser. With an ultrashort pulse laser, it is possible to perform processing by inducing nonlinear absorption for a material having a high band gap such as glass. The perforated part 11 is an example of the “first concave part” in the present invention.

Further, the perforated portion 11 is formed so that a diameter-expanded portion that expands from the surface 1a side toward the bottom portion side and a diameter-reduced portion that decreases from the diameter-expanded portion toward the bottom side are connected. That is, a protruding portion 11 a that protrudes inward is formed on the inner peripheral surface of the perforated portion 11. The protruding portion 11 a is disposed on the surface 1 a side in the perforated portion 11. Moreover, the protrusion part 11a is formed over the full length in the circumferential direction, and is formed in cyclic | annular form.

Examples of the metal member 2 include iron metal, stainless steel metal, copper metal, aluminum metal, magnesium metal, and alloys thereof. Moreover, a metal molding may be sufficient and zinc die-casting, aluminum die-casting, powder metallurgy, etc. may be sufficient.

The intermediate member 3 is interposed between the glass member 1 and the metal member 2 and is provided for joining the glass member 1 and the metal member 2. Examples of the intermediate member 3 include zinc-based metal, tin-based metal, lead-based metal, bismuth-based metal, indium-based metal, gallium-based metal, and alloys thereof. In addition, when the influence on a human body etc. is considered, other than a lead-type metal is preferable.

The intermediate member 3 has a melting point lower than that of the glass member 1 and the metal member 2 and has a linear expansion coefficient between the glass member 1 and the metal member 2.

-Manufacturing method of bonded structure-
Next, with reference to FIGS. 1 to 4, a method for manufacturing the joint structure 100 according to the first embodiment will be described.

First, as shown in FIG. 2, the surface 1 a of the glass member 1 is irradiated with a processing laser L <b> 1, thereby forming a perforated portion 11 on the surface 1 a of the glass member 1. The processing laser L1 is an ultrashort pulse laser, and the perforated portion 11 is formed by ablation. For this reason, it is possible to perform processing that is precise and less affected by heat.

Next, as shown in FIG. 3, the intermediate member 3 is formed on the surface 1 a of the glass member 1 so that the perforated part 11 of the glass member 1 is filled with the intermediate member 3. Specifically, the intermediate member 3 is melted, the melted intermediate member 3 is filled in the perforated portion 11, and after being disposed on the surface 1a, the melted intermediate member 3 is solidified. In addition, as an example of the formation method of the intermediate member 3 with respect to the glass member 1, a soldering process, an ultrasonic process, a plating process, and a vapor deposition process are mentioned. In the ultrasonic process, a heater for melting the intermediate member 3 oscillates with ultrasonic waves.

Thereafter, as shown in FIG. 4, the metal member 2 is joined to the intermediate member 3. Specifically, first, the intermediate member 3 and the metal member 2 are arranged adjacent to each other so that the intermediate member 3 provided on the glass member 1 contacts the surface 2a of the metal member 2 under an inert gas atmosphere. . Then, the intermediate member 3 is melted and solidified by being irradiated with the laser L2 for bonding from the glass member 1 side toward the intermediate member 3, whereby the intermediate member 3 and the metal member 2 are welded. The As the type of the laser L2 for bonding, a fiber laser, a YAG laser, a YVO ₄ laser, a semiconductor laser, a carbon dioxide gas laser, and an excimer laser can be selected.

In this way, the joined structure 100 shown in FIG. 1 is manufactured. In the joined structure 100, the glass member 1 and the intermediate member 3 are joined by the anchor effect, and the metal member 2 and the intermediate member 3 are joined by welding.

-effect-
In 1st Embodiment, as above-mentioned, the intermediate member 3 is provided between the glass member 1 and the metal member 2, the glass member 1 and the intermediate member 3 are joined by the anchor effect, and the metal member 2 and the intermediate member 3 are attached. It is joined by welding. By configuring in this way, even if the surface accuracy of the surface 1a of the glass member 1 and the surface 2a of the metal member 2 is low, variations in the

surfaces

1a and 2a can be absorbed by the intermediate member 3, Deterioration of bonding quality can be suppressed. That is, it is possible to suppress the occurrence of unexpected bonding failure due to variations in the

surfaces

1a and 2a. Therefore, in the bonded structure 100 in which the glass member 1 and the metal member 2 are bonded, the reliability of the bonded portion can be improved.

Moreover, in 1st Embodiment, the perforated part 11 is formed in the glass member 1, and the perforated part 11 is filled with the intermediate member 3, By this, the metal intermediate member 3 and the glass member 1 are made mechanical by an anchor effect. Can be joined. Furthermore, the anchor effect can be improved by forming the protruding portion 11 a in the perforated portion 11.

Further, in the first embodiment, by forming the perforated portion 11 with an ultrashort pulse laser, it is possible to perform a precise and less heat-affected process on the glass member 1 which is a material having a high band gap.

In the first embodiment, since the linear expansion coefficient of the intermediate member 3 is between the glass member 1 and the metal member 2, the stress caused by the difference in linear expansion coefficient between the glass member 1 and the metal member 2 is applied to the intermediate member 3. Can be relaxed.

Further, in the first embodiment, when an ultrasonic process is used when forming the intermediate member 3 on the surface 1a of the glass member 1, a heater for melting the intermediate member 3 oscillates. 11 is easily filled with the intermediate member 3, so that the bonding strength between the glass member 1 and the intermediate member 3 can be improved. Further, when the ultrasonic process is used, the glass member 1 and the intermediate member 3 are covalently bonded due to the cavitation effect, so that the bonding strength between the glass member 1 and the intermediate member 3 can be improved.

(Second Embodiment)
Next, with reference to FIG. 5, the joining structure 200 by 2nd Embodiment of this invention is demonstrated.

As shown in FIG. 5, the bonding structure 200 includes a glass member 1, a metal member 20, and an intermediate member 3 arranged between the glass member 1 and the metal member 20. A plurality of perforated portions 21 are formed on the surface 20a of the metal member 20, and the perforated portions 21 are filled with the intermediate member 3 and solidified. For this reason, the metal member 20 and the intermediate member 3 are mechanically joined by the anchor effect.

Examples of the metal member 20 include iron metal, stainless steel metal, copper metal, aluminum metal, magnesium metal, and alloys thereof. Moreover, a metal molding may be sufficient and zinc die-casting, aluminum die-casting, powder metallurgy, etc. may be sufficient.

The perforated part 21 is a substantially circular non-through hole when seen in a plan view, and a plurality of the perforated parts 21 are arranged on the surface 20 a of the metal member 20 at a predetermined interval. The perforated portion 21 is formed by, for example, a processing laser L3 (see FIG. 6). As the type of the laser L3, a laser capable of pulse oscillation is preferable, and a fiber laser, a YAG laser, a YVO ₄ laser, a semiconductor laser, a carbon dioxide gas laser, and an excimer laser can be selected. A YAG laser, a second harmonic of a YAG laser, a YVO ₄ laser, and a semiconductor laser are preferable. The perforated part 21 is an example of the “second concave part” in the present invention.

Further, the perforated portion 21 is formed so that a diameter-expanded portion that increases in diameter from the surface 20a side toward the bottom portion side and a diameter-reduced portion that decreases in diameter from the expanded diameter portion toward the bottom portion side are connected. That is, a protruding portion 21 a that protrudes inward is formed on the inner peripheral surface of the perforated portion 21. The protruding portion 21 a is disposed on the surface 20 a side in the perforated portion 21. Moreover, the protrusion part 21a is formed over the full length in the circumferential direction, and is formed in cyclic | annular form.

Such a perforated part 21 is formed by a laser L3 in which one pulse is composed of a plurality of sub-pulses. This laser L3 is suitable for forming the perforated portion 21 because energy can be easily concentrated in the depth direction. As an example of such an irradiation apparatus of the laser L3, fiber laser marker MX-Z2000 or MX-Z2050 manufactured by OMRON can be mentioned.

As processing conditions by the fiber laser marker, it is preferable that one period of the sub-pulse is 15 ns or less. This is because when one period of the sub-pulse exceeds 15 ns, energy is easily diffused by heat conduction, and it becomes difficult to form the perforated part 21. Note that one cycle of the subpulse is a total time of the irradiation time for one subpulse and the interval from the end of the irradiation of the subpulse to the start of the irradiation of the next subpulse.

Also, the number of subpulses in one pulse is preferably 2 or more and 50 or less. This is because when the number of subpulses exceeds 50, the output per unit of subpulses becomes small and it becomes difficult to form the perforated part 21.

The other structure of the bonded structure 200 is the same as that of the bonded structure 100 described above.

-Manufacturing method of bonded structure-
Next, with reference to FIGS. 5 to 7, a method for manufacturing the joint structure 200 according to the second embodiment will be described. In addition, since the process until forming the intermediate member 3 in the surface 1a of the glass member 1 is the same as that of 1st Embodiment, description is abbreviate | omitted.

First, as shown in FIG. 6, the surface 20 a of the metal member 20 is irradiated with a processing laser L <b> 3, thereby forming a perforated portion 21 on the surface 20 a of the metal member 20. In the processing laser L3, one pulse is composed of a plurality of subpulses.

Thereafter, as shown in FIG. 7, the metal member 20 is joined to the intermediate member 3. Specifically, first, the intermediate member 3 and the metal member 20 are arranged adjacent to each other so that the intermediate member 3 provided on the glass member 1 contacts the surface 20a of the metal member 20 under an inert gas atmosphere. . That is, the perforated portion 21 of the metal member 20 is disposed on the intermediate member 3 side. Then, the intermediate member 3 is melted by irradiating the laser L2 for bonding from the glass member 1 side toward the intermediate member 3. For this reason, the melted intermediate member 3 is filled in the perforated portion 21 of the metal member 20 and solidified. As the type of the laser L2 for bonding, a fiber laser, a YAG laser, a YVO ₄ laser, a semiconductor laser, a carbon dioxide gas laser, and an excimer laser can be selected.

In this way, the joint structure 200 shown in FIG. 5 is manufactured. In the bonded structure 200, the glass member 1 and the intermediate member 3 are bonded by the anchor effect, and the metal member 20 and the intermediate member 3 are bonded by the anchor effect.

-effect-
In the second embodiment, as described above, the perforated portion 21 is formed in the metal member 20, and the intermediate member 3 is filled in the perforated portion 21, thereby mechanically connecting the intermediate member 3 and the metal member 20 with an anchor effect. Can be joined. Thereby, even if the intermediate member 3 and the metal member 20 are a combination of materials which are difficult to weld, the intermediate member 3 and the metal member 20 can be joined. Furthermore, the anchor effect can be improved by forming the protruding portion 21 a in the perforated portion 21. The metal member 20 and the intermediate member 3 may be welded. In this case, the bonding strength between the metal member 20 and the intermediate member 3 can be improved.

The remaining effects of the second embodiment are similar to those of the first embodiment.

(Experimental example)
Next, referring to FIG. 8 to FIG. 12, the joining structure 300a (see FIG. 10) according to Example 1 corresponding to the first embodiment and the joining structure 300b according to Example 2 corresponding to the second embodiment. (Refer to FIG. 12) is manufactured, and the bonding evaluation performed on the bonded

structures

300a and 300b will be described.

First, a method for producing the bonded structure 300a of Example 1 will be described.

In the joined structure 300a, as shown in FIG. 10, quartz glass was used as the glass member 301, and SUS304 was used as the metal member 302a. The glass member 301 and the metal member 302a are formed in a plate shape, have a length of 100 mm, a width of 25 mm, and a thickness of 3 mm. The metal member 302a does not have a perforated portion formed in the joining region.

And as shown in FIG. 8, the perforated part (illustration omitted) was formed in the rectangular frame-shaped joining area | region R1 of the glass member 301. As shown in FIG. In addition, joining area | region R1 is a square whose one side is 20 mm, and is arrange | positioned in the center of the glass member 301. FIG.

The perforated part was formed using a UV picosecond laser having a wavelength of 355 nm. The conditions of this UV picosecond laser are a focal diameter of 20 μm and an output of less than 1 W. The depth of the perforated part is 5 to 20 μm.

And as shown in FIG. 9, the intermediate member 303 was formed in joining area | region R1 in which the perforated part of the glass member 301 was formed. The intermediate member 303 is zinc-based lead-free solder, and is formed by an ultrasonic process. Specifically, the intermediate member 303 is melted by a heater that oscillates with an ultrasonic wave of about 60 kHz. Then, the melted intermediate member 303 is filled in the perforated portion, and then the melted intermediate member 303 is solidified.

Then, as shown in FIG. 10, the glass member 301 and the metal member 302a were laminated so that the glass member 301 and the metal member 302a sandwiched the intermediate member 303. And the intermediate member 303 and the metal member 302a were welded by irradiating a fiber laser toward the intermediate member 303 from the glass member 301 side. The fiber laser irradiation conditions are as follows.

<Laser irradiation conditions>
Laser: Fiber laser (wavelength 1070nm)
Oscillation mode: Continuous oscillation Output: 150W
Focal diameter: 0.15mm
Scanning speed: 2000mm / min
In this way, the bonded structure 300a of Example 1 was produced. In the joined structure 300a, the glass member 301 and the intermediate member 303 are joined by the anchor effect, and the metal member 302a and the intermediate member 303 are joined by welding.

Next, a method for manufacturing the joint structure 300b of Example 2 will be described.

In the joining structure 300b, as shown in FIG. 12, SUS304 was used as the metal member 302b. The metal member 302b is formed in a plate shape, has a length of 100 mm, a width of 25 mm, and a thickness of 3 mm. The glass member 301 and the intermediate member 303 are the same as those in the first embodiment.

And as shown in FIG. 11, the perforated part (illustration omitted) was formed in the joining area | region R2 of the rectangular frame shape of the metal member 302b. In addition, joining area | region R2 is a square whose one side is 20 mm, and is arrange | positioned in the center of the metal member 302b. That is, the joining region R2 is disposed at a position corresponding to the joining region R1 when the glass member 301 and the metal member 302b are laminated. The perforated part was formed by irradiating a laser in which one pulse is composed of a plurality of subpulses.

Then, as shown in FIG. 12, the glass member 301 and the metal member 302b were laminated so that the glass member 301 and the metal member 302b sandwiched the intermediate member 303. And the intermediate member 303 and the metal member 302b were welded by irradiating the fiber laser toward the intermediate member 303 from the glass member 301 side. Here, since the perforated part is formed in the joining region R2 of the metal member 302b, the melted intermediate member 303 is filled in the perforated part, and then the intermediate member 303 is solidified. The fiber laser irradiation conditions are the same as those in the first embodiment.

In this way, the joined structure 300b of Example 2 was produced. In the joined structure 300b, the glass member 301 and the intermediate member 303 are joined by the anchor effect, and the metal member 302b and the intermediate member 303 are joined by the anchor effect and welding.

For comparison, an attempt was made to join a glass member and a metal member without providing an intermediate member, but it was not joined.

And about the joining

structure

300a and 300b, the drop test to the rubber sheet from height 1m was done. As a result, in the bonded

structures

300a and 300b, even after the drop test, no peeling occurred at the bonded portion, and the bonded state could be maintained.

Further, a thermal shock test was performed on the

joint structures

300a and 300b. In this thermal shock test, low temperature exposure at −40 ° C. for 30 minutes and high temperature exposure at 50 ° C. for 30 minutes were repeated 10 times. As a result, the joint portion 300a peeled off, but the joint structure 300b did not peel off the joint portion. That is, in the joined structure 300b in which the metal member 302b and the intermediate member 303 are joined also by the anchor effect, it was possible to improve the durability in a thermal cycle environment.

(Other embodiments)
In addition, embodiment disclosed this time is an illustration in all the points, Comprising: It does not become a basis of limited interpretation. Therefore, the technical scope of the present invention is not interpreted only by the above-described embodiments, but is defined based on the description of the scope of claims. Further, the technical scope of the present invention includes all modifications within the meaning and scope equivalent to the scope of the claims.

For example, in the first embodiment, the example in which the intermediate member 3 is disposed on the entire surface of the glass member 1 and the metal member 2 has been shown. However, the present invention is not limited to this, and the glass member and the metal member are partially disposed as in the experimental example. An intermediate member may be arranged. The same applies to the second embodiment.

Moreover, in 1st Embodiment, although the example in which the perforated part 11 was formed in the surface 1a of the glass member 1 was shown, not only this but the groove-shaped 1st recessed part is formed in the surface of a glass member. Also good. Moreover, although the example in which the protrusion part 11a was formed in the perforated part 11 was shown, not only this but the perforated part may be formed in the cylindrical shape or the mortar shape. The same applies to the second embodiment.

Moreover, in 2nd Embodiment, although the perforated part 21 was formed in the surface 20a of the metal member 20, not only this but the groove-shaped 2nd recessed part was formed in the surface of a metal member. Also good. Moreover, although the example which the protrusion part 21a is formed in the perforated part 21 was shown, not only this but the perforated part may be formed in the cylindrical shape or the mortar shape. Moreover, although the example which forms the perforated part 21 with the laser L3 was shown, not only this but performing a blast process, a sandpaper process, an anodizing process, an electrical discharge process, an etching process, or a press process, A second concave portion may be formed on the surface.

The present invention is applicable to a method for manufacturing a bonded structure in which a glass member and a metal member are bonded, and the bonded structure.

DESCRIPTION OF SYMBOLS 1 Glass member 1a Surface 2, 20 Metal member 20a Surface 3 Intermediate member 11 Perforated part (1st recessed part)
21 Perforated part (second concave part)
100, 200 bonded structure

Claims

A method for producing a joined structure in which a glass member and a metal member are joined via a metal intermediate member,
Forming a first concave portion on the surface of the glass member;
Forming the intermediate member on the surface of the glass member so that the intermediate member is filled in the first concave portion;
And a step of joining the metal member to the intermediate member.
In the manufacturing method of the joined structure according to claim 1,
The step of joining the metal member to the intermediate member includes
Placing the metal member adjacent to the intermediate member;
A method of manufacturing a joined structure comprising: welding the intermediate member and the metal member by irradiating the intermediate member with laser from the glass member side.
In the manufacturing method of the joined structure according to claim 1,
Before joining the metal member to the intermediate member, comprising a step of forming a second concave portion on the surface of the metal member;
The step of joining the metal member to the intermediate member includes
Arranging the intermediate member and the metal member adjacently such that the second concave portion is disposed on the intermediate member side;
And a step of irradiating the intermediate member with a laser from the glass member side to fill the second concave portion with the intermediate member and solidify the intermediate member.
In the method for manufacturing a bonded structure according to any one of claims 1 to 3,
The intermediate member has a linear expansion coefficient between the glass member and the metal member.
A bonded structure manufactured by the method for manufacturing a bonded structure according to any one of claims 1 to 4.