WO2016108306A1 - 전자기파 발진기, 플라즈마파 전력 추출기 및 전자기파 검출기 - Google Patents
전자기파 발진기, 플라즈마파 전력 추출기 및 전자기파 검출기 Download PDFInfo
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- WO2016108306A1 WO2016108306A1 PCT/KR2014/013049 KR2014013049W WO2016108306A1 WO 2016108306 A1 WO2016108306 A1 WO 2016108306A1 KR 2014013049 W KR2014013049 W KR 2014013049W WO 2016108306 A1 WO2016108306 A1 WO 2016108306A1
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- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 229910021389 graphene Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 15
- 229910052961 molybdenite Inorganic materials 0.000 claims 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 230000010356 wave oscillation Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
- G01J5/22—Electrical features thereof
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B9/00—Generation of oscillations using transit-time effects
- H03B9/01—Generation of oscillations using transit-time effects using discharge tubes
- H03B9/08—Generation of oscillations using transit-time effects using discharge tubes using a travelling-wave tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/24—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66977—Quantum effect devices, e.g. using quantum reflection, diffraction or interference effects, i.e. Bragg- or Aharonov-Bohm effects
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1606—Graphene
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
Definitions
- the present invention relates to an electromagnetic wave oscillator, a plasma wave power extractor, and an electromagnetic wave detector, and more particularly, to induce plasma waves using a 2DEG (2-Dimensional Electron Gas) structure and to oscillate electromagnetic waves of a terahertz band using a floating plate.
- Electromagnetic wave oscillator, plasma wave power extractor and electromagnetic wave detector are particularly, to induce plasma waves using a 2DEG (2-Dimensional Electron Gas) structure and to oscillate electromagnetic waves of a terahertz band using a floating plate.
- the terahertz electromagnetic wave emitter is implemented as a room temperature emitter of electromagnetic waves using a zinc-cadmium-telenium single crystal.
- the prior art Korean Patent Publication No. 2003-0095533 (published Dec. 24, 2003) not only oscillates a single shot signal in pico seconds, but also acts as an ultra-high speed device, and the signal is several teraseconds at direct current. Emitters with ultra-wideband signal bands on the order of hertz are disclosed.
- a terahertz emitter in the form of a FET is used to compensate for this, but in a semiconductor structure, the 2DEG (2-Dimensional Electron Gas) channel is formed because the gate is in contact. The mobility of is lowered and performance may be limited depending on the channel length.
- a terahertz detector using a FET type requires a different boundary condition and device structure than a terahertz oscillator in a FET type.
- an electromagnetic wave oscillator capable of inducing a plasma wave using an element structure forming a 2DEG channel, and generating an electric dipole by a plasma wave with a floating plate to oscillate electromagnetic waves in a terahertz band.
- a wave power extractor and an electromagnetic wave detector can be provided.
- the technical problem to be achieved by the present embodiment is not limited to the technical problem as described above, and other technical problems may exist.
- the 2DEG plate (Plate) forming a 2-Dimensional Electron Gas (DEG), the first resistor connected to one node of the 2DEG plate and the other side A second resistor connected to the node, a source for supplying power to the 2DEG plate between the second resistor and ground, a floating plate in which an electric dipole is formed by the 2DEG channel to generate electromagnetic waves, and a 2DEG plate; A dielectric formed between the floating plates.
- DEG 2-Dimensional Electron Gas
- a 2DEG plate forming a 2-Dimensional Electron Gas (DEG) channel, a first resistor connected to one node of the 2DEG plate and a second resistor connected to the other node, a second resistor and a ground
- DEG 2-Dimensional Electron Gas
- the source includes an extractor for extracting power from the drain node between the 2DEG plate and the second resistor.
- a floating plate in which electromagnetic waves are incident to form an electric dipole and a 2DEG plate in which a 2DEG (2-Dimensional Electron Gas) is formed by the electric dipole to detect 2DEG resonance (Plate)
- a first resistor connected to one node of the 2DEG plate and a second resistor connected to the other node, a source for supplying power to the 2DEG plate between the second resistor and ground, and a dielectric formed between the 2DEG plate and the floating plate.
- any one of the problem solving means of the present invention described above it is possible to increase the mobility of the 2DEG, to control the plasma wave using a dielectric, to amplify the plasma wave using boundary conditions, and to float
- the plates can be used to oscillate TEM waves in the terahertz band, and the introduction of floating plates allows both oscillators and detectors to be used in the same device structure.
- FIG. 1 is a circuit diagram of an electromagnetic wave oscillator according to an embodiment of the present invention.
- FIG. 2 is a circuit diagram illustrating another embodiment of the electromagnetic wave oscillator of FIG. 1.
- FIG. 3 is a circuit diagram illustrating yet another embodiment of the electromagnetic wave oscillator of FIG. 1.
- FIG. 4 is a circuit diagram of a power extractor according to an embodiment of the present invention.
- FIG. 5 is a circuit diagram of an electromagnetic wave detector according to an embodiment of the present invention.
- FIG. 1 is a circuit diagram of an electromagnetic wave oscillator according to an embodiment of the present invention
- Figure 2 is a circuit diagram showing another embodiment of the electromagnetic wave oscillator of Figure 1
- Figure 3 shows another embodiment of the electromagnetic wave oscillator of Figure 1 One schematic.
- the electromagnetic wave oscillator 1 may include a 2-Dimensional Electron Gas Plate 100, a first resistor 210, a second resistor 230, a source 300, and a floating plate. , 400), and a dielectric (Dielectric, 500).
- Electromagnetic wave oscillator 1 according to an embodiment of the present invention, the boundary condition using the first resistor 210, the second resistor 220 and the source 300 connected to one side and the other side of the 2DEG plate 100 And a longitudinal plasma wave having a frequency of terahertz (THz) that amplifies over time within a resonance cavity length (L) range.
- a longitudinal plasma wave having a frequency of terahertz (THz) that amplifies over time within a resonance cavity length (L) range.
- THz terahertz
- L resonance cavity length
- the electromagnetic wave oscillator 1 may oscillate a TEM wave (Transverse Electromagnetic Wave) in response to the frequency of the longitudinal plasma wave by the electric dipole.
- TEM wave Transverse Electromagnetic Wave
- the 2DEG plate 100 may form a 2-Dimensional Electron Gas (DEG) channel, and may use a material of a metal, a semimetal, or a semiconductor such as graphene or MoS 2 .
- the longitudinal plasma wave generated in the 2DEG plate 100 may be amplified by boundary conditions.
- the first resistor 210 may be connected to one node of the 2DEG plate 100, and the second resistor 220 may be connected to the other node.
- the impedance of the first resistor 210 may have a short circuit with 0, and the impedance of the second resistor 220 may have a boundary condition that forms an open circuit indefinitely.
- the source 300 may apply power to the 2DEG plate 100 between the second resistor 220 and the ground.
- the source 300 may be represented by a voltage source or a current source, and the 2DEG channel may be controlled by the source 300 to generate longitudinal plasma waves in the 2DEG plate 100.
- the frequency f of the longitudinal plasma wave is inversely proportional to the square root of L and is proportional to the square root of the surface electron density n 0 . do.
- the floating plate 400 may be used to oscillate the generated longitudinal plasma wave as a TEM wave.
- the dielectric 500 of the BN (Boron Nitride) having a vacuum or similar properties between the floating plate 400 and the 2DEG plate 100 surface roughness and scattering (scattering) It is possible to suppress the influence of, thereby increasing the intrinsic mobility of the 2DEG material.
- the longitudinal plasma wave can be adjusted to a desired frequency band by adjusting the surface electron density n 0 with the voltage V.
- m is the effective electron mass
- L is the resonance cavity length
- tau p is the momemtum relaxation time
- e is the elementary electronic charge.
- an electric dipole is formed by a 2DEG channel to generate electromagnetic waves
- the electromagnetic wave is a TEM wave in a terahertz band
- the floating plate ( 400 may be a conductor or a semiconductor.
- the dielectric 500 may be formed between the 2DEG plate 100 and the floating plate 400.
- the dielectric may be vacuum or boron nitride (BN).
- (a) may include a plurality of floating plates 400 and may be configured to be positioned on an upper surface or a lower surface of the 2DEG plate 100.
- the 2DEG plate 100, the dielectric 500, and the floating plate 400 are defined as an oscillator unit as shown in (b)
- the oscillator unit, the first resistor 210, and the second resistor 220 may be provided in plural.
- One node of the first resistor 210, which is provided in series and connected in series is connected to ground, and the other node of the second resistor 220, which is provided in series and connected in series, has a source 300 Can be connected.
- the floating plate 400 may have at least one recessed groove 410 perpendicular to the length direction of the 2DEG plate 100.
- the floating plate 400 may be implemented in various forms for improving performance such as a grating structure in addition to the single floating plate 400. Accordingly, referring to (b), the floating plate 400 includes at least one unit plate 430, and the unit plate 430 includes a strip part 431 and a patch part. 433, the width of the strip portion 431 may be narrower than the width of the patch portion 433, and the length of the strip portion 431 may be longer than the length of the patch portion 433.
- the power extractor 2 includes a 2DEG plate 100 that forms a 2-Dimensional Electron Gas (DEG) channel, a first resistor 210 connected to one node of the 2DEG plate 100, and the other node.
- the extractor 600 may include an extractor 600 that extracts power at the drain node between the 2DEG plate 100 and the second resistor 220.
- a current may flow using the voltage V of the source 300, and power may be extracted from the drain node in a state where a plasma wave is generated by the current.
- the power extractor according to FIG. 4 may be provided in the electromagnetic wave oscillator of FIGS. 1 to 3 and the electromagnetic wave detector of FIG. 5, respectively. That is, since only the 2DEG plate is used, it may be used any time before the floating plate of the electromagnetic wave oscillator of FIGS. 1 to 3 or the electromagnetic wave detector of FIG. 5 is configured. 2 and 3 may also be applicable to the electromagnetic wave detector of FIG. 5.
- the power extractor since the power extractor is used to detect the power of the plasma wave converted from the electromagnetic wave incident on the floating plate, it can be used for both the electromagnetic wave oscillator and the electromagnetic wave detector.
- the electromagnetic wave detector 3 of FIG. 5 in the same structure as the electromagnetic wave oscillator 1 of FIGS. 1 and 2, injects terahertz electromagnetic waves into the floating plate 400 to provide 2DEG resonance and DC voltage. It may also function as a terahertz electromagnetic wave detector for detecting.
- the electromagnetic wave detector 3 does not receive terahertz electromagnetic waves directly from the slot antenna or the 2DEG plate 100, but instead forms the electromagnetic dipole by directly receiving the terahertz electromagnetic waves.
- the floating plate 400 is a patch antenna in shape, and functions as a dipole antenna from an operation point of view, and may be variously configured as shown in FIGS. 2 and 3. Accordingly, the electromagnetic wave detector 3 may be capable of 2DEG resonance and DC voltage.
- the electromagnetic wave detector 3 includes a floating plate 400 in which electromagnetic waves are incident to form an electric dipole, and a 2-DEG (2-Dimensional Electron Gas) channel formed by the electric dipole to detect 2DEG resonance.
- a source 300 to which power is applied and a dielectric formed between the 2DEG plate 100 and the floating plate 400 may be included.
- the floating plate 400 may be provided in plurality, and may be positioned on the top or bottom surface of the 2DEG plate 100.
- the 2DEG plate 100, the dielectric 500, and the floating plate 400 are defined as oscillator units
- the oscillator unit, the first resistor 210, and the second resistor 220 may be provided in plural in series.
- One node of the first resistor 210 that is connected and provided in series and connected in series may be grounded, and the source 300 may be connected to the other node of the second resistor 220 that is provided in series and connected in series.
- the floating plate 400 may be formed with at least one yaw groove 410 perpendicular to the longitudinal direction of the 2DEG plate 100.
- the floating plate 400 may be implemented in various forms to improve performance, such as a grating structure, in addition to the single floating plate 400 as the purpose of electromagnetic wave detection.
- the floating plate 400 includes at least one unit plate 430, and the unit plate 430 includes a strip portion 431 and a patch portion 433.
- the width of the strip portion 431 may be narrower than the width of the patch portion 433, and the length of the strip portion 431 may be longer than the length of the patch portion 433.
- the relatively low mobility due to the surface roughness which has been a problem in FET device based terahertz emitters is improved by the use of a dielectric with vacuum gaps and similar properties,
- the proportional frequency is inversely proportional to the square root of L, allowing terahertz emitters to be implemented with floating plates over wider cavity lengths.
- materials that were difficult to use theoretically and technically in the conventional FET-based terahertz emitters may be implemented as terahertz emitters having improved characteristics through the structure according to the embodiment of the present invention.
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Abstract
Description
Claims (18)
- 2DEG(2-Dimensional Electron Gas) 채널을 형성하는 2DEG 플레이트(Plate);상기 2DEG 플레이트의 일측 노드에 연결된 제 1 저항 및 타측 노드에 연결된 제 2 저항;상기 제 2 저항과 접지 간에 상기 2DEG 플레이트로 전원을 인가하는 소스;상기 2DEG 채널에 의해 전기 쌍극자(Electric Dipole)가 형성되어 전자기파를 발진하는 플로팅 플레이트(Floating Plate); 및상기 2DEG 플레이트와 상기 플로팅 플레이트 간에 형성된 유전체를 포함하는, 전자기파 발진기.
- 제 1 항에 있어서,상기 소스는 전압원 또는 전류원이고,상기 소스에 의하여 상기 2DEG 채널이 제어되어 상기 2DEG 플레이트에서 종축 플라즈마파(longitudinal plasma-wave)가 생성되는 것인, 전자기파 발진기.
- 제 1 항에 있어서,상기 제 1 저항의 임피던스는 0로 단락(Short) 회로를 형성하고, 제 2 저항의 임피던스는 무한대로 개방(Open) 회로를 형성하는 경계조건을 가지는 것인, 전자기파 발진기.
- 제 3 항에 있어서,상기 경계 조건에 의하여 상기 2DEG 플레이트에서 생성된 종축 플라즈마 파동이 증폭되는 것인, 전자기파 발진기.
- 제 1 항에 있어서,상기 유전체는 진공 또는 BN(Boron Nitride)인 것인, 전자기파 발진기.
- 제 1 항에 있어서,상기 2DEG 플레이트는, 그레핀(Graphene) 또는 MoS2인 것인, 전자기파 발진기.
- 제 1 항에 있어서,상기 플로팅 플레이트는, 도체 또는 반도체인 것인, 전자기파 발진기.
- 제 1 항에 있어서,상기 전자기파는, 테라헤르츠(Tera Hz) 대역의 TEM 파(Transverse Electromagnetic Wave)인 것인, 전자기파 발진기.
- 제 1 항에 있어서,상기 플로팅 플레이트는 복수로 구비되고, 상기 2DEG 플레이트의 상부면 또는 하부면에 위치하는 것인, 전자기파 발진기.
- 제 1 항에 있어서,발진기 유닛은 상기 2DEG 플레이트, 유전체 및 플로팅 플레이트를 포함하고,상기 발진기 유닛, 상기 제 1 저항 및 상기 제 2 저항은 복수로 구비되어 직렬로 연결되고,상기 복수로 구비되어 직렬로 연결된 제 1 저항의 일측 노드는 접지되고, 상기 복수로 구비되어 직렬로 연결된 제 2 저항의 타측 노드는 상기 소스가 연결되는 것인, 전자기파 발진기.
- 제 1 항에 있어서,상기 플로팅 플레이트는, 상기 2DEG 플레이트의 길이 방향과 수직을 이루는 적어도 하나의 요(凹)홈부가 형성되는 것인, 전자기파 발진기.
- 제 1 항에 있어서,상기 플로팅 플레이트는, 적어도 하나의 단위 플레이트를 포함하고,상기 단위 플레이트는, 스트립(Strip)부와 패치(Patch)부를 포함하고,상기 스트립부의 폭은 상기 패치부의 폭보다 좁고, 상기 스트립부의 길이는 상기 패치부의 길이보다 긴 것인, 전자기파 발진기.
- 2DEG(2-Dimensional Electron Gas) 채널을 형성하는 2DEG 플레이트(Plate);상기 2DEG 플레이트의 일측 노드에 연결된 제 1 저항 및 타측 노드에 연결된 제 2 저항;상기 제 2 저항과 접지 간에 상기 2DEG 플레이트로 전원을 인가하는 소스;상기 소스에 의하여 상기 2DEG 플레이트에 플라즈마파(plasma-wave)가 형성되면, 상기 2DEG 플레이트와 상기 제 2 저항 간의 드레인 노드에서 전력을 추출하는 추출기를 포함하는, 플라즈마파 전력 추출기.
- 전자기파가 입사되어 전기 쌍극자(Electric Dipole)가 형성되는 플로팅 플레이트;상기 전기 쌍극자에 의해 2DEG(2-Dimensional Electron Gas) 채널이 형성되어 2DEG 공진이 검출되는 2DEG 플레이트(Plate);상기 2DEG 플레이트의 일측 노드에 연결된 제 1 저항 및 타측 노드에 연결된 제 2 저항;상기 제 2 저항과 접지 간에 상기 2DEG 플레이트로 전원을 인가하는 소스; 및상기 2DEG 플레이트와 상기 플로팅 플레이트 간에 형성된 유전체를 포함하는, 전자기파 검출기.
- 제 14 항에 있어서,상기 플로팅 플레이트는 복수로 구비되고,상기 2DEG 플레이트의 상부면 또는 하부면에 위치하는 것인, 전자기파 검출기.
- 제 14 항에 있어서,발진기 유닛은 상기 2DEG 플레이트, 유전체 및 플로팅 플레이트를 포함하고,상기 발진기 유닛, 제 1 저항 및 제 2 저항은 복수로 구비되어 직렬로 연결되고,상기 복수로 구비되어 직렬로 연결된 제 1 저항의 일측 노드는 접지되고, 상기 복수로 구비되어 직렬로 연결된 제 2 저항의 타측 노드는 상기 소스가 연결되는 것인, 전자기파 검출기.
- 제 14 항에 있어서,상기 플로팅 플레이트는, 상기 2DEG 플레이트의 길이 방향과 수직을 이루는 적어도 하나의 요(凹)홈부가 형성되는 것인, 전자기파 검출기.
- 제 14 항에 있어서,상기 플로팅 플레이트는, 적어도 하나의 단위 플레이트를 포함하고,상기 단위 플레이트는, 스트립(Strip)부와 패치(Patch)부를 포함하고,상기 스트립부의 폭은 상기 패치부의 폭보다 좁고, 상기 스트립부의 길이는 상기 패치부의 길이보다 긴 것인, 전자기파 검출기.
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PCT/KR2014/013049 WO2016108306A1 (ko) | 2014-12-30 | 2014-12-30 | 전자기파 발진기, 플라즈마파 전력 추출기 및 전자기파 검출기 |
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