WO2016092639A1 - Codeur et moteur équipé d'un codeur - Google Patents

Codeur et moteur équipé d'un codeur Download PDF

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Publication number
WO2016092639A1
WO2016092639A1 PCT/JP2014/082598 JP2014082598W WO2016092639A1 WO 2016092639 A1 WO2016092639 A1 WO 2016092639A1 JP 2014082598 W JP2014082598 W JP 2014082598W WO 2016092639 A1 WO2016092639 A1 WO 2016092639A1
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WIPO (PCT)
Prior art keywords
light receiving
light
receiving elements
receiving element
light source
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PCT/JP2014/082598
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English (en)
Japanese (ja)
Inventor
康 吉田
松谷　泰裕
宏樹 近藤
幾磨 室北
正信 原田
次郎 村岡
Original Assignee
株式会社安川電機
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 株式会社安川電機 filed Critical 株式会社安川電機
Priority to CN201480077269.8A priority Critical patent/CN106104213B/zh
Priority to PCT/JP2014/082598 priority patent/WO2016092639A1/fr
Priority to JP2016537031A priority patent/JP6037258B2/ja
Publication of WO2016092639A1 publication Critical patent/WO2016092639A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales

Definitions

  • the disclosed embodiment relates to an encoder and a motor with an encoder.
  • Patent Document 1 an optical signal from an absolute pattern that can uniquely represent the absolute position of a rotating disk by a combination of positions of reflection slits within a predetermined angle is received by a plurality of light receiving elements of an absolute light receiving element group.
  • An encoder that detects independently is described.
  • the present invention has been made in view of such problems, and an object thereof is to provide an encoder and a motor with an encoder that can improve detection accuracy.
  • an absolute pattern along a measurement direction a light source configured to emit light to the absolute pattern, and a light source arranged along the measurement direction are arranged.
  • a plurality of light receiving elements configured to receive light emitted from the light source and transmitted or reflected through the absolute pattern, the plurality of light receiving elements having a tapered pointed portion.
  • An encoder is provided that includes one light receiving element.
  • a motor with an encoder having a motor and the encoder is provided.
  • FIG. 6 is an explanatory diagram for explaining a light receiving operation along a section AA in FIGS. 4 and 5. It is explanatory drawing for demonstrating the light intensity distribution of the reflected light on the board
  • the encoder according to the embodiment described below can be applied to various types of encoders such as a rotary type (rotary type) and a linear type (linear type).
  • a rotary encoder will be described as an example so that the encoder can be easily understood.
  • it is possible to make an appropriate change such as changing the object to be measured from a rotary disk to a linear linear scale.
  • the servo system S includes a servo motor SM and a control device CT.
  • the servo motor SM includes an encoder 100 and a motor M.
  • the motor M is an example of a power generation source that does not include the encoder 100.
  • the motor M is a rotary motor in which a rotor (not shown) rotates with respect to a stator (not shown), and a rotational force is generated by rotating a shaft SH fixed to the rotor around an axis AX. Output.
  • the motor M alone may be referred to as a servo motor
  • a configuration including the encoder 100 is referred to as a servo motor SM.
  • the servo motor SM corresponds to an example of a motor with an encoder.
  • the motor with an encoder is a servo motor controlled so as to follow a target value such as a position and a speed.
  • the present invention is not necessarily limited to the servo motor.
  • the motor with an encoder includes a motor used other than the servo system as long as the encoder is attached, for example, when the output of the encoder is used only for display.
  • the motor M is not particularly limited as long as the encoder 100 can detect position data or the like, for example.
  • the motor M is not limited to an electric motor that uses electricity as a power source.
  • a motor using another power source such as a hydraulic motor, an air motor, or a steam motor. It may be.
  • a case where the motor M is an electric motor will be described below.
  • Encoder 100 is connected to the side opposite to the rotational force output side of shaft SH of motor M. However, it is not necessarily limited to the opposite side, and the encoder 100 may be coupled to the rotational force output side of the shaft SH.
  • the encoder 100 detects the position of the motor M (also referred to as a rotation angle) by detecting the position of the shaft SH (rotor), and outputs position data representing the position.
  • the encoder 100 is not limited to being directly connected to the motor M, and may be connected via other mechanisms such as a brake device, a speed reducer, and a rotation direction changer.
  • the encoder 100 detects at least one of the speed of the motor M (also referred to as rotational speed or angular velocity) and the acceleration of the motor M (also referred to as rotational acceleration or angular acceleration) in addition to or instead of the position of the motor M. May be.
  • the speed and acceleration of the motor M can be detected by, for example, processing such as first or second order differentiation of the position with time or counting a detection signal (for example, an incremental signal described later) for a predetermined time.
  • processing such as first or second order differentiation of the position with time or counting a detection signal (for example, an incremental signal described later) for a predetermined time.
  • a detection signal for example, an incremental signal described later
  • the control device CT acquires the position data output from the encoder 100, and controls the rotation of the motor M based on the position data. Therefore, in this embodiment in which an electric motor is used as the motor M, the control device CT controls the rotation of the motor M by controlling the current or voltage applied to the motor M based on the position data. Furthermore, the control device CT obtains a host control signal from a host control device (not shown), and a rotational force capable of realizing the position and the like represented by the host control signal is output from the shaft SH of the motor M. Thus, it is possible to control the motor M. When the motor M uses another power source such as a hydraulic type, an air type, or a steam type, the control device CT controls the rotation of the motor M by controlling the supply of these power sources. Is possible.
  • the encoder 100 includes a disk 110, an optical module 130, and a position data generation unit 140.
  • the encoder 100 is a so-called reflective encoder in which the light source 131 and the light receiving arrays PA1, PA2, etc. provided in the optical module 130 are arranged on the same side with respect to the patterns SA1, SA2, etc. of the disk 110.
  • the encoder 100 is not limited to the reflective encoder, and may be a so-called transmissive encoder in which the light source 131 and the light receiving arrays PA1, PA2 and the like are arranged on the opposite side with the disk 110 interposed therebetween.
  • a case where the encoder 100 is a reflective encoder will be described below.
  • the vertical direction is determined as follows and used as appropriate.
  • the direction in which the disk 110 faces the optical module 130 that is, the Z-axis positive direction is “up” and the Z-axis negative direction is “down”.
  • the direction varies depending on the installation mode of the encoder 100 and the like, and does not limit the positional relationship between the components of the encoder 100.
  • the disk 110 is formed in a disk shape, and is arranged such that the disk center O substantially coincides with the axis AX.
  • the disk 110 is connected to the shaft SH of the motor M and rotates by the rotation of the shaft SH.
  • a disk-shaped disk 110 is described as an example of an object to be measured for measuring the rotation of the motor M, but other members such as an end face of the shaft SH are to be measured. It can also be used as a target.
  • the disk 110 is directly connected to the shaft SH, but may be connected via a connecting member such as a hub.
  • the disk 110 has a plurality of patterns SA1, SA2, and SI.
  • the disk 110 rotates with the drive of the motor M, but the optical module 130 is fixedly disposed while facing a part of the disk 110. Therefore, the patterns SA1, SA2, SI and the optical module 130 are relative to each other in the measurement direction (the direction of arrow C shown in FIG. 3; hereinafter referred to as “measurement direction C” as appropriate) as the motor M is driven. Moving.
  • the “measurement direction” is a measurement direction when each pattern formed on the disk 110 by the optical module 130 is optically measured.
  • the measurement direction coincides with the circumferential direction of the disk 110.
  • the object to be measured is a linear scale
  • the mover is a stator.
  • the measurement direction is a direction along a linear scale.
  • the optical detection mechanism includes patterns SA1, SA2, SI, an optical module 130, and the like.
  • Each pattern is formed on the upper surface of the disk 110 as a track arranged in a ring shape with the disk center O as the center.
  • Each pattern has a plurality of reflective slits (hatched portions in FIG. 4) arranged along the measurement direction C over the entire circumference of the track.
  • Each reflection slit reflects light emitted from the light source 131.
  • the disk 110 is formed of a material that reflects light, such as metal. Then, a material having a low reflectance (for example, chromium oxide) is disposed on the surface of the disk 110 where light is not reflected by coating or the like, so that a reflective slit is formed in the portion that is not disposed.
  • a reflective slit may be formed by making the part which does not reflect light into a rough surface by sputtering etc., and reducing a reflectance.
  • the material and manufacturing method of the disk 110 are not particularly limited.
  • the disk 110 can be formed of a material that transmits light, such as glass or transparent resin.
  • a reflective slit can be formed by disposing a material (for example, aluminum) that reflects light on the surface of the disk 110 by vapor deposition or the like.
  • each pattern formed on the disk 110 has a plurality of transmissive slits arranged along the measurement direction C over the entire circumference of the track.
  • Each transmission slit transmits light emitted from the light source 121.
  • width direction R Three patterns are provided in the width direction (in the direction of arrow R shown in FIG. 3; hereinafter referred to as “width direction R” as appropriate) on the upper surface of the disk 110.
  • the “width direction” is a radial direction of the disk 110, that is, a direction substantially perpendicular to the measurement direction C, and the length of each pattern along the width direction R corresponds to the width of each pattern.
  • the three patterns are arranged concentrically in the order of SA1, SI, SA2 from the inner side to the outer side in the width direction R.
  • FIG. 4 shows a partially enlarged view of the vicinity of the area facing the optical module 130 of the disk 110.
  • the plurality of reflective slits included in the patterns SA ⁇ b> 1 and SA ⁇ b> 2 are arranged on the entire circumference of the disk 110 so as to have an absolute pattern along the measurement direction C.
  • These patterns SA1 and SA2 correspond to examples of absolute patterns.
  • the “absolute pattern” is a pattern in which the position and ratio of the reflection slit within an angle at which a light receiving array of the optical module 130 described later faces is uniquely determined within one rotation of the disk 110. That is, for example, in the case of the example of the absolute pattern shown in FIG. 4, when the motor M is at an angular position, a combination of bit patterns by detection or non-detection of each of the plurality of light receiving elements of the opposed light receiving array is as follows: The absolute position of the angular position is uniquely expressed.
  • the “absolute position” refers to an angular position with respect to the origin within one rotation of the disk 110. The origin is set at an appropriate angular position within one rotation of the disk 110, and an absolute pattern is formed with this origin as a reference.
  • the absolute pattern is not limited to this example.
  • it may be a multidimensional pattern represented by bits of the number of light receiving elements.
  • a pattern in which a physical quantity such as the amount of light received by a light receiving element or a phase changes so as to uniquely represent an absolute position a pattern in which a code sequence of an absolute pattern is modulated, etc.
  • There may be other various patterns.
  • the same absolute pattern is offset in the measurement direction C by a length of, for example, 1/2 of 1 bit, and formed as two patterns SA1 and SA2.
  • This offset amount corresponds to, for example, half the pitch P of the reflection slits of the pattern SI.
  • the pattern SA1, SA2 is not offset as described above, there is the following possibility. That is, when the absolute position is represented by a one-dimensional absolute pattern as in the present embodiment, the bit pattern transition point is caused by the fact that each light receiving element of the light receiving arrays PA1 and PA2 is positioned in the vicinity of the end of the reflecting slit. In the region, the absolute position detection accuracy may be lowered.
  • the absolute position of the pattern SA1 corresponds to the change of the bit pattern
  • the absolute position is calculated using the detection signal from the pattern SA2
  • the absolute position detection accuracy can be improved.
  • the amount of light received by the two light receiving arrays PA1 and PA2 needs to be uniform, but in the present embodiment, the two light receiving arrays PA1 and PA2 are arranged at substantially the same distance from the light source 131. Therefore, the above configuration can be realized.
  • the light receiving arrays PA1 and PA2 corresponding to the patterns SA1 and SA2 may be offset without offsetting the absolute patterns.
  • two absolute patterns are not necessarily formed, and only one may be used. However, hereinafter, for convenience of explanation, a case where two patterns SA1 and SA2 are formed will be described.
  • the plurality of reflective slits included in the pattern SI are arranged on the entire circumference of the disk 110 so as to have an incremental pattern along the measurement direction C.
  • the “incremental pattern” is a pattern that is regularly repeated at a predetermined pitch as shown in FIG.
  • pitch refers to the arrangement interval of the reflective slits in the pattern SI having an incremental pattern.
  • the pitch of the pattern SI is P.
  • the incremental pattern is different from an absolute pattern that represents an absolute position with each of the presence / absence of detection by a plurality of light receiving elements as a bit, and the position of the motor M within each pitch or within one pitch depending on the sum of the detection signals by at least one light receiving element. Represents. Therefore, although the incremental pattern does not represent the absolute position of the motor M, it can represent the position with very high accuracy compared to the absolute pattern.
  • the minimum length in the measurement direction C of the reflection slits of the patterns SA1 and SA2 matches the pitch P of the reflection slits of the pattern SI.
  • the resolution of the absolute signal based on the patterns SA1 and SA2 matches the number of reflection slits of the pattern SI.
  • the minimum length is not limited to this example, and it is desirable that the number of reflection slits of the pattern SI is set to be equal to or larger than the resolution of the absolute signal.
  • the optical module 130 is formed as a single substrate BA parallel to the disk 110.
  • the encoder 100 can be thinned and the optical module 130 can be easily manufactured. Therefore, as the disk 110 rotates, the optical module 130 moves relative to the patterns SA1, SA2, and SI in the measurement direction C.
  • the optical module 130 is not necessarily configured as a single substrate BA, and each configuration may be configured as a plurality of substrates. In this case, it is only necessary that these substrates are arranged together. Further, the optical module 130 does not have to be a substrate.
  • the optical module 130 has a light source 131 and a plurality of light receiving arrays PA1, PA2, PI1, PI2 on a surface of the substrate BA facing the disk 110.
  • the light source 131 is disposed at a position facing the pattern SI.
  • the light source 131 emits light to the opposed portions of the three patterns SA1, SA2, and SI that pass through the opposed positions of the optical module 130.
  • the light source 131 is not particularly limited as long as it is a light source capable of irradiating light to the irradiation region.
  • an LED Light Emitting Diode
  • the light source 131 is configured as a point light source in which no optical lens or the like is disposed, and emits diffused light from the light emitting unit.
  • the term “point light source” does not need to be a strict point.
  • light sources that can be considered to emit diffused light from a substantially point-like position in terms of design or operating principle light from a finite emission surface is used. May be emitted.
  • the “diffused light” is not limited to light emitted from a point light source in all directions, and includes light emitted while diffusing in a finite fixed direction.
  • the diffused light here includes light that is more diffusive than parallel light.
  • the plurality of light receiving arrays are arranged around the light source 131 and have a plurality of light receiving elements (dot hatched portions in FIG. 5) that respectively receive the light reflected by the reflection slits of the associated pattern.
  • the plurality of light receiving elements are arranged along the measurement direction C as shown in FIG.
  • the light emitted from the light source 131 is diffused light. Therefore, the pattern image projected on the optical module 130 is enlarged by a predetermined enlargement factor ⁇ corresponding to the optical path length. That is, as shown in FIGS. 4 to 6, the lengths of the patterns SA1, SA2, and SI in the width direction R are WSA1, WSA2, and WSI, and the reflected light is projected onto the optical module 130 in the width direction. Assuming that the length of R is WPA1, WPA2, and WPI, WPA1, WPA2, and WPI are ⁇ times as long as WSA1, WSA2, and WSI. In this embodiment, as shown in FIGS.
  • the length in the width direction R of the light receiving element of each light receiving array is set substantially equal to the shape of each slit projected onto the optical module 130.
  • An example is shown.
  • the length of the light receiving element in the width direction R is not necessarily limited to this example.
  • the measurement direction C in the optical module 130 also has a shape in which the measurement direction C in the disk 110 is projected onto the optical module 130, that is, a shape affected by the magnification factor ⁇ .
  • the measurement direction C at the position of the light source 131 will be described as an example as shown in FIG.
  • the measurement direction C in the disk 110 is circular with the axis AX as the center.
  • the center in the measurement direction C projected on the optical module 130 is a position separated from the optical center Op, which is the in-plane position of the disk 110 on which the light source 131 is disposed, by a distance ⁇ L.
  • the distance ⁇ L is a distance obtained by enlarging the distance L between the axis AX and the optical center Op at an enlargement factor ⁇ .
  • this position is conceptually shown as the measurement center Os. Therefore, the measurement direction C in the optical module 130 is centered on the measurement center Os that is separated from the optical center Op by a distance ⁇ L in the direction of the axis AX on the line where the optical center Op and the axis AX ride, and the distance ⁇ L is the radius. On the line to be.
  • the corresponding relationship in the measurement direction C in each of the disk 110 and the optical module 130 is represented by arc-shaped lines Lcd and Lcp.
  • 4 represents a line along the measurement direction C on the disk 110
  • the line Lcp illustrated in FIG. 5 and the like represents a line along the measurement direction C on the substrate BA (the line Lcd is an optical module). Line projected onto 130).
  • each light receiving element for example, a photodiode can be used.
  • Each light receiving element is formed in a shape having a predetermined light receiving area, and outputs an analog detection signal having a magnitude corresponding to the total light amount received in the entire light receiving area (hereinafter referred to as “light receiving amount”).
  • the light receiving element is not limited to a photodiode, and is not particularly limited as long as it can receive light emitted from the light source 131 and convert it into an electric signal.
  • the light receiving array in the present embodiment is arranged corresponding to the three patterns SA1, SA2, and SI.
  • the light receiving array PA1 is configured to receive the light reflected by the pattern SA1
  • the light receiving array PA2 is configured to receive the light reflected by the pattern SA2.
  • the light receiving arrays PI1 and PI2 are configured to receive light reflected by the pattern SI.
  • the light receiving array PI1 and the light receiving array PI2 are divided on the way, but correspond to the same track. As described above, the number of light receiving arrays corresponding to one pattern is not limited to one, and may be plural.
  • the light source 131 and the light receiving arrays PA1 and PA2 are arranged in the positional relationship shown in FIG. That is, two sets of light receiving arrays PA1 and PA2 corresponding to the absolute pattern are arranged in parallel at positions offset from each other in the width direction R with the light source 131 interposed therebetween.
  • the light receiving array PA1 is disposed on the inner peripheral side and the light receiving array PA2 is disposed on the outer peripheral side, and the distances between the light receiving arrays PA1 and PA2 and the light source 131 are substantially equal.
  • Each of the light receiving arrays PA1 and PA2 has an axisymmetric shape with respect to a line Lo passing through the light source 131 (optical center Op) and parallel to the Y axis.
  • a plurality (for example, 9 in this embodiment) of light receiving elements included in the light receiving arrays PA1 and PA2 are arranged at a constant pitch along the measurement direction C (line Lcp). The shapes of the plurality of light receiving elements will be described later.
  • a one-dimensional pattern is illustrated as an absolute pattern. Therefore, the light receiving arrays PA1 and PA2 corresponding to the pattern are arranged along the measurement direction C (line Lcp) so as to receive the light reflected by the reflecting slits of the corresponding patterns SA1 and SA2.
  • a plurality of (for example, 9 in this embodiment) light receiving elements are provided. In the plurality of light receiving elements, as described above, each light reception or non-light reception is treated as a bit and represents an absolute position of 9 bits.
  • the light reception signals received by each of the plurality of light receiving elements are handled independently of each other in the position data generation unit 140 (see FIG.
  • the light receiving signals of the light receiving arrays PA1 and PA2 are referred to as “absolute signals”.
  • the light receiving arrays PA1 and PA2 have a configuration corresponding to the pattern.
  • the number of light receiving elements included in the light receiving arrays PA1 and PA2 may be other than nine, and the number of bits of the absolute signal is not limited to nine.
  • the light source 131 and the light receiving arrays PI1, PI2 are arranged in the positional relationship shown in FIG. That is, the light receiving arrays PI1 and PI2 corresponding to the incremental pattern are arranged in the measurement direction C with the light source 131 interposed therebetween. Specifically, the light receiving arrays PI1 and PI2 are arranged so as to be line symmetric with respect to the line Lo as a symmetry axis. The light source 131 is arranged between the light receiving arrays PI1 and PI2 arranged as one track in the measurement direction C.
  • the light receiving arrays PI1 and PI2 have a plurality of light receiving elements arranged along the measurement direction C (line Lcp) so as to receive the light reflected by the reflecting slits of the associated pattern SI.
  • Each of these light receiving elements has the same shape (substantially rectangular in this example).
  • a total of four sets of light receiving elements are included in one pitch of the incremental pattern of pattern SI (one pitch in the projected image, ie, ⁇ ⁇ P).
  • a plurality of sets of four light receiving elements are arranged along the measurement direction C.
  • reflection slits are repeatedly formed for each pitch. Therefore, when the disk 110 rotates, each light receiving element generates a periodic signal of one cycle (referred to as 360 ° in electrical angle) at one pitch.
  • 360 ° in electrical angle a periodic signal of one cycle
  • adjacent light receiving elements in one set receive an incremental phase signal which is a periodic signal having a phase difference of 90 ° from each other. Will be output.
  • Each incremental phase signal is divided into A + phase signal, B + phase signal (phase difference with respect to A + phase signal is 90 °), A ⁇ phase signal (phase difference with respect to A + phase signal is 180 °), B ⁇ phase signal (with respect to B + phase signal).
  • the phase difference is called 180 °.
  • the signal of each phase in one set and the signal of each phase in another set corresponding to it have values that change similarly. Accordingly, signals of the same phase are added over a plurality of sets. Accordingly, four signals whose phases are shifted by 90 ° are detected from the many light receiving elements of the light receiving array PI shown in FIG. Accordingly, four signals whose phases are shifted by 90 ° are generated from the light receiving arrays PI1 and PI2, respectively. These four signals are referred to as “incremental signals”.
  • one set corresponding to one pitch of the incremental pattern includes four light receiving elements, and the light receiving array PI1 and the light receiving array PI2 each have a set having the same configuration as an example.
  • the number of light receiving elements in one set is not particularly limited, for example, two light receiving elements are included in one set.
  • the total number of light receiving elements of the light receiving arrays PIL and PIR is not limited to the example shown in FIG.
  • the light receiving arrays PI1 and PI2 may be configured to acquire light receiving signals having different phases.
  • the light receiving array corresponding to the incremental pattern is not limited to a mode in which two light receiving arrays such as the light receiving arrays PI1 and PI2 are arranged with the light source 131 interposed therebetween.
  • the light source 131 may be arranged as one light receiving array along the measurement direction C on the outer peripheral side or the inner peripheral side.
  • incremental patterns having different resolutions may be formed on a plurality of tracks of the disk 110, and a plurality of light receiving arrays corresponding to the respective tracks may be provided.
  • Position data generator The position data generation unit 140, from the optical module 130, at the timing of measuring the absolute position of the motor M, two absolute signals each having a bit pattern representing the first absolute position, and four signals whose phases are shifted by 90 °. Incremental signal including. Then, the position data generation unit 140 calculates the second absolute position of the motor M represented by these signals based on the acquired signals, and outputs position data representing the calculated second absolute position to the control device CT.
  • the position data generation method by the position data generation unit 140 can use various methods, and is not particularly limited.
  • a case where the absolute position is calculated from the incremental signal and the absolute signal to generate position data will be described as an example.
  • the position data generation unit 140 binarizes each of the absolute signals from the light receiving arrays PA1 and PA2, and converts them into bit data representing an absolute position. Then, the first absolute position is specified based on the correspondence between the predetermined bit data and the absolute position. That is, the “first absolute position” here is an absolute position having a low resolution before the incremental signal is superimposed. On the other hand, among the incremental signals of the four phases from the light receiving arrays PI1 and PI2, the incremental signals having a phase difference of 180 ° are subtracted from each other. Thus, by subtracting a signal having a phase difference of 180 °, it is possible to cancel a manufacturing error or a measurement error of the reflection slit within one pitch.
  • first incremental signal and “second incremental signal”.
  • the first incremental signal and the second incremental signal have a phase difference of 90 ° in electrical angle with each other (simply referred to as “A phase signal”, “B phase signal”, etc.). Therefore, the position data generation unit 140 identifies the position within one pitch from these two signals.
  • the method for specifying the position within one pitch is not particularly limited. For example, when the incremental signal, which is a periodic signal, is a sine wave signal, the electrical angle ⁇ is calculated by performing an arctan operation on the division result of the two A-phase and B-phase sine wave signals as an example of the above-described specific method. There is a way to do it.
  • the position data generation unit 140 preferably performs analog-digital conversion of the two sine wave signals of the A phase and the B phase for each detection signal.
  • the position data generation unit 140 superimposes the position within one pitch specified based on the incremental signal on the first absolute position specified based on the absolute signal. Accordingly, it is possible to calculate the second absolute position with higher resolution than the first absolute position based on the absolute signal. The position data generation unit 140 multiplies the second absolute position calculated in this way to further improve the resolution, and then outputs it to the control device CT as position data representing a highly accurate absolute position.
  • the intensity distribution of the reflected light becomes farther from the optical center Op as shown in FIG. It becomes a concentric distribution that decays.
  • the dotted circle in FIG. 7 represents the isointensity line of the reflected light, and the light intensity is higher on the inner peripheral side and the light intensity is lower on the outer peripheral side.
  • the distribution of the light intensity of the reflected light is concentric as described above, while the light is attenuated according to the optical path length, while the optical axis is in the irradiation space of diffuse light from the light source 131 (in the reflection space). This is because the structure is such that the light is received by a flat substrate BA perpendicular to the substrate. Actually, the reflected light is applied to the areas corresponding to the patterns SA1, SA2, and SI of the disk 110 on the substrate BA.
  • each of the absolute light receiving arrays PA1 and PA2 a plurality of light receiving elements are arranged along the arc-shaped line Lcp with the measurement center Os as the center of curvature, while the optical center Op is measured. It is arranged at a position greatly separated from the center Os. For this reason, the light intensity in each light receiving element of the light receiving arrays PA1, PA2 changes according to the distance from the light source 131 in the measurement direction C.
  • the light receiving array PA2 will be described in detail. Since the light receiving array PA2 has a line-symmetric shape with respect to the line Lo as described above, the light intensity at each light receiving element is highest at the light receiving element P5 on the line Lo.
  • the light receiving array PA1 and the light receiving array PA2 are arranged side by side with the light source 131 therebetween, the light intensity in each light receiving element of the light receiving arrays PA1 and PA2 is highest at the end Eo on the light source side. , And lowest at the end En on the opposite side of the light source 131.
  • each light receiving element constituted by, for example, a photodiode outputs an analog value detection signal according to the amount of light received in the entire light receiving area as described above.
  • the received light amount is obtained by integrating the light intensity at each light receiving point in the light receiving area. For this reason, if the light intensity distribution is different among the light receiving elements, even if the light receiving areas are the same, the amount of received light is different, and the change characteristics of the analog detection signal between the light receiving elements. Will be different. In this case, since the change timing of the binarized signal is shifted between the light receiving elements, the absolute position may be erroneously detected.
  • the light receiving element having a shorter length in the width direction is more susceptible to the positional deviation in the width direction of the reflected light due to the eccentricity of the disk 110, False detection may occur.
  • the maximum outer dimension in the measurement direction C and the maximum outer dimension in the width direction R of each light receiving element are set to be equal to each other, and the respective received light amounts are mutually equal.
  • the light receiving elements having different distances from the light source 131 are formed in different shapes so as to be equal.
  • the description that the outer diameter and the amount of received light are “equal” does not mean a strict meaning, but means that tolerances and errors in manufacturing are allowed and are substantially equal.
  • the “light reception amount” here is the maximum light reception amount when each light receiving element receives reflected light over the entire light receiving area.
  • the light receiving arrays PA1 and PA2 some or all of the plurality of light receiving elements are each formed into a shape having a tapered pointed portion.
  • the position of the tip is not particularly limited, in the present embodiment, a case where the light receiving element includes the tip at the end in the measurement direction C will be described.
  • the light receiving array PA2 out of the light receiving arrays PA1 and PA2 will be described as a specific example.
  • the light receiving array PA1 has the same shape as that of the light receiving array PA2 except that the light receiving array PA1 is symmetrical in the width direction R, and the description thereof is omitted.
  • FIG. 8 Details of shape of light receiving element having pointed portion
  • the shape of the light receiving element P6, which is one of the nine light receiving elements included in the light receiving array PA2 is enlarged and shown as an example.
  • the shape and dimension setting of each part of the light receiving element having a pointed portion will be described in detail.
  • the shape of the light receiving element P6 is roughly a shape in which corners of a basic quadrilateral shape are trimmed.
  • This basic quadrangular shape has a length in the measurement direction C as TPA2 (in this example, a length ⁇ times the minimum length P (basic bit length) in the measurement direction C of the reflective slit of the pattern SA2), and the width direction. It is a rectangular shape in which the length of R is WPA2.
  • the basic rectangular shape that is, the maximum external dimension TPA2 in the measurement direction C and the maximum external dimension WPA2 in the width direction R are set to be equal in common. .
  • the above-described basic quadrangular shape does not need to be strictly parallel between two opposing sides, and each corner does not need to be strictly right-angled, and may be substantially rectangular.
  • triming means chamfering at a predetermined inclination angle with respect to one corner of the square shape. Then, in each of the both end portions Ec and Er in the measurement direction C of the light receiving element P6, trimming with a predetermined inclination angle is performed on the two corner portions located on the end portions Ec and Er, respectively.
  • the apex portion Ps having a substantially triangular shape with apexes located on the portions Ec and Er is formed.
  • the pointed portion Ps is formed at each of both end portions Ec and Er of one light receiving element P6.
  • All of the measurement direction dimensions TPs are set to the same dimension d1, and the maximum external dimension in the measurement direction C of the light receiving element P6 (that is, the distance between the apexes of the tip portions Ps at both ends) is maintained at the length TPA2. Further, when the width direction dimension from the end Eo on the light source 131 side to the apex of the apex Ps is Wo, and the width direction dimension from the end En on the opposite side to the light source 131 to the apex of the apex Ps is Wn, The total Wo + Wn of these width direction dimensions is equal to the maximum external dimension WPA2 in the width direction R of the light receiving element.
  • the width direction dimensions Wo and the width direction dimensions Wn at both ends Ec and Er in the measurement direction C are also equal.
  • the light receiving element P6 is formed in a hexagonal shape that is symmetric with respect to the measurement direction C with the line Loc passing through the measurement center Os and the center position of the measurement direction C as the axis of symmetry.
  • the shape of the pointed portion Ps may be a tapered shape, and may be, for example, a trapezoidal shape or a rounded arc shape other than the triangular shape. Further, the pointed portion Ps may be formed by a method other than the trimming of a basic rectangular corner.
  • the light receiving areas of the light receiving elements having the same total TPs + TPs in the measurement direction dimension of the tip portion Ps are equal.
  • the ratio of TPs + TPs to the maximum external dimension TPA2 in the measurement direction C of the light receiving element is equal, the light receiving area is also equal.
  • a light receiving element having pointed portions Ps at both ends Ec and Er in the measurement direction C in other words, a light receiving element having a value of TPs + TPs greater than 0 (in this example, the light receiving elements P2 to P8) will be referred to as “ Also referred to as “first light receiving element”.
  • the light intensity of each light receiving element is highest at the end Eo on the light source side and lowest at the end En on the opposite side to the light source 131. For this reason, even if TPs + TPs is the same between the light receiving elements, that is, the light receiving area is the same, the position of the apex of the tip portion Ps in the width direction R is farther from the light source 131 (the ratio of the width direction dimension Wo is larger). However, the amount of received light can be made relatively small. On the contrary, when the position of the apex of the tip portion Ps in the width direction R is closer to the light source 131 (the ratio of the width direction dimension Wn is larger), the amount of received light can be relatively increased.
  • the light intensity in the plurality of light receiving elements P1 to P9 of the light receiving array PA2 is higher as the light receiving element is closer to the line Lo, that is, closer to the light source 131 on the substrate BA.
  • the farther away, that is, the light receiving element farther from the light source 131 on the substrate BA becomes lower.
  • the two light receiving elements P1 and P9 located farthest from the light source 131 are the second light receiving elements having the largest light receiving area, and the other light receiving elements P2 to P8 are the first light receiving elements.
  • the shape of the light receiving element is adjusted so that the received light amount is the same with reference to the received light amount at the light receiving elements P1 and P9.
  • the shapes of the plurality of light receiving elements P1 to P9 of the light receiving array PA2 can be the modes shown in FIGS. 5 and 7, for example.
  • the five light receiving elements P3 to P7 located close to the light source 131 have the same TPs + TPs, that is, the light receiving areas are equal. ing.
  • the light receiving elements P3 to P5 and the light receiving elements P5 to P7 constituting the light receiving elements P3 to P7 correspond to an example of a plurality of first light receiving elements having different distances from the light source 131 and equal areas. Between the light receiving elements P3 to P7 having the same area, the position of the apex of the tip portion Ps in the width direction R is set so that the light receiving element closer to the light source 131 in the measurement direction C is farther from the light source 131.
  • the ratio of the width dimension Wo is set to be larger for the first light receiving element closer to the light source 131 in the measurement direction C.
  • the positions of the apexes Ps of the light receiving elements P4 and P6 are farther from the light source 131 than the light receiving elements P3 and P7, and the apexes of the apex Ps of the light receiving element P5 are positioned at the light receiving elements P4 and P6. Rather than the light source 131.
  • TPs + TPs is close to the light source 131 in the measurement direction C.
  • the device is larger.
  • the light receiving elements P2 and P3 and the light receiving elements P7 and P8 have the same position in the width direction at the apex of the tip portion Ps.
  • the light receiving elements P2, P3 and the light receiving elements P7, P8 correspond to an example of a plurality of first light receiving elements having different distances from the light source and different areas.
  • the shape of the plurality of light receiving elements P1 to P9 of the light receiving array PA2 is not limited to the above.
  • the light receiving elements P1 and P9 at both ends of the light receiving array PA2 may be the first light receiving elements provided with the pointed portion Ps.
  • the number of light receiving elements having the same area in the light receiving elements P1 to P9 may be other than 5, or the areas of all the light receiving elements may be different from each other.
  • the relationship between the apex positions of the tip portions Ps in the first light receiving elements having the same area, and the relationship of TPs + TPs in the first light receiving elements having different areas may be other than the above.
  • the case where it is the above-mentioned shape is demonstrated for convenience of explanation.
  • each of the light receiving array PA1 and the light receiving array PA2 it is possible to make the received light amounts equal to each other while making the maximum outer dimension in the measurement direction C and the maximum outer dimension in the width direction R of each light receiving element equal to each other. .
  • the first light receiving element has the pointed portion Ps, an advantageous effect can be obtained even when the detection signal is converted into a binarized signal.
  • the effect will be described in detail.
  • the light intensity distribution in the irradiation surface Rs is uniform.
  • the amount of light received by the light receiving element PD ′ changes with the change characteristics as shown by the thick line VX.
  • the amount of received light monotonically increases from the timing of the position X2 where the irradiation surface Rs begins to overlap with the light receiving element PD ′ to the timing of the position X6 where the irradiation surface Rs completely overlaps with the light receiving element PD ′. To do. Further, from the timing of the position X6 at which the received light amount becomes the maximum to the timing of the position X10 at which the irradiation surface Rs and the light receiving element PD 'do not overlap, the received light amount decreases monotonically in a linear function.
  • the change characteristic of the analog detection signal in the case of the light receiving element PD having the tip portion Ps is shown in FIG.
  • FIG. 10 for the sake of easy understanding, the case where the light receiving element PD is formed only from the apex of the two pointed ends Ps of the first light receiving element to the half portion on the end portion En side is illustrated.
  • the irradiation surface Rs is larger than the light receiving element PD in the width direction R, has a rectangular shape having the same size as the light receiving element PD in the measurement direction C, and the light intensity distribution in the irradiation surface Rs is uniform.
  • FIG. 10 the change characteristic of the analog detection signal in the case of the light receiving element PD having the tip portion Ps is shown in FIG.
  • the irradiation surface Rs is larger than the light receiving element PD in the width direction R, has a rectangular shape having the same size as the light receiving element PD in the measurement direction C, and the light intensity distribution in the irradiation surface Rs is uniform.
  • the received light amount in the light receiving element PD is indicated by a thick line VY corresponding to each position Y1 to Y11. It changes with time with such change characteristics.
  • the amount of received light is a quadratic function from the timing of the position Y2 at which the irradiation surface Rs begins to overlap with the light receiving element PD to the timing at the position Y3 at which the irradiation surface Rs completely overlaps with the tip portion Ps on the end Ec side. (May be a multi-order function or higher than a cubic function). Further, during the period from the timing of the position Y3 to the timing of the position Y5 where the irradiation surface Rs starts to overlap with the tip portion Ps on the end Er side (see the linear section 1 in FIG. 11 described later), the amount of received light is primary. It increases monotonically functionally.
  • the amount of received light increases in a quadratic function.
  • the time change rate (the slope of the curve) of the amount of received light is the largest between the timing of the position Y3 and the timing of the position Y5.
  • the timing decreases from the timing of the position Y6 where the amount of received light is maximized to the timing of the position Y10 where there is no overlap between the irradiation surface Rs and the light receiving element PD.
  • the timing of the position Y9 where the overlapping of the irradiation surface Rs and the tip portion Ps of the end Er side begins to decrease.
  • the amount of received light monotonously decreases in a linear function during the period up to (see linear section 2 in FIG. 11 described later), and the temporal change rate (the slope of the curve) of the received light amount becomes the largest.
  • the change characteristics of the received light amount in the case of the light receiving element PD ′ and in the case of the light receiving element PD are compared.
  • the respective light receiving areas are equal, the irradiation light having the same light intensity is irradiated with a uniform distribution, and the maximum received light amounts in the respective change characteristics are equal.
  • the timing at which the overlapping area with the irradiation surface Rs becomes half of the light receiving area that is, the timing of the positions X4, X8, Y4, Y8 in FIGS.
  • the received light quantity becomes half of the maximum received light quantity, and the characteristic lines VX and VY intersect.
  • the threshold value for converting the analog detection signal from the light receiving element into a binarized signal is preferably set to a value that is half the maximum received light amount.
  • the threshold value is relative to the change characteristic of the amount of received light due to, for example, fluctuation of the light intensity of the irradiation light due to aging degradation of the light source 131 or manufacturing individual difference, or fluctuation of light receiving sensitivity due to aging deterioration of the light receiving element or manufacturing individual difference. May vary.
  • the fluctuation of the threshold fluctuates within a fluctuation range ⁇ T centered on the reference value that is half of the above-described maximum received light quantity.
  • the change characteristic increases and decreases in a linear function. Therefore, the change timing of the binarized signal fluctuates within the corresponding fluctuation width ⁇ tx.
  • the characteristic curve is inclined most greatly around the reference value which is half of the maximum received light amount. For this reason, the change in the change timing of the binarized signal with respect to the change width ⁇ T of the threshold can be suppressed to a change width ⁇ ty that is sufficiently narrower than the change width ⁇ tx in the case of the light receiving element PD ′.
  • the first light receiving element in the present embodiment is formed in a shape having the tip portion Ps, an effect of suppressing the influence due to the fluctuation of the threshold when the analog detection signal is converted into the binarized signal. There is.
  • the encoder 100 includes the light receiving arrays PA1 and PA2 that are arranged along the measurement direction C and receive the light emitted from the light source 131 and reflected by the patterns SA1 and SA2.
  • the plurality of light receiving elements (light receiving elements P1 to P9 in the example shown in FIG. 5 and the like) included in the light receiving arrays PA1 and PA2 are first light receiving elements (examples shown in FIG. 5 and the like) having a tapered point Ps. Includes light receiving elements P2 to P8). Thereby, the received light quantity of a 1st light receiving element can be adjusted by adjusting the shape, magnitude
  • the amount of light received by each of the plurality of light receiving elements can be made uniform, so that detection accuracy of 1 bit and 1 bit can be made uniform so that erroneous detection of the absolute position can be suppressed, and detection accuracy can be improved.
  • the threshold for converting the analog signal from the light receiving element into a binary signal can be shared by each light receiving element, thus simplifying the circuit configuration. it can.
  • the edge in the measurement direction C is parallel to the width R direction.
  • the signal output changes in a monotonic increase and decrease in a linear function (see FIG. 9).
  • the first light receiving element having the tip portion Ps has a shape in which the edge in the measurement direction C is inclined with respect to the width direction, the change in the signal output when the pattern passes is increased in a quadratic function and As a result, the degree of change in signal output in the vicinity of the threshold can be increased (the slope is abrupt) (see FIG. 10 above). Thereby, the phase shift with respect to the fluctuation of the threshold value is reduced, so that even if the threshold value fluctuates, an absolute position detection error can be made difficult to occur (see FIG. 11 above).
  • the first light receiving element when the first light receiving element includes the pointed portion Ps at the end in the measurement direction C, the following effects are obtained. That is, by providing the pointed end portion Ps at the end portions Ec and Er in the measurement direction C, the half portions on both sides Eo and En in the width direction R of the first light receiving element can be substantially trapezoidal. As a result, the signal output near the threshold value is higher than when the pointed portions Ps are provided at the end portions Eo and En in the width direction R (in this case, the region where the temporal change rate of the amount of received light is maximum is a point).
  • the section in which the degree of change becomes large can be increased (point ⁇ line; refer to each linear section in FIG. 11). As a result, the phase shift with respect to the threshold fluctuation becomes smaller, so that the robustness against the threshold fluctuation can be further improved.
  • the plurality of light receiving elements (light receiving elements P1 to P9 in the example shown in FIG. 5 and the like) included in the light receiving arrays PA1 and PA2 are the maximum outer dimension TPA2 in the measurement direction C and the maximum in the width direction R.
  • the light receiving elements having different distances from the light source 131 have different shapes so that the outer dimensions WPA2 are equal to each other and the received light amounts are equal to each other, the following effects are obtained. That is, since the maximum external dimensions TPA2 of the light receiving elements in the measurement direction C are equal to each other, the intervals in the measurement direction C of the light receiving elements can be made substantially uniform.
  • the amount of crosstalk between the light receiving elements adjacent to each other in the measurement direction C can be made uniform, so that the uniformity of the amount of light received by each light receiving element can be further improved. Further, it is easy to remove noise due to crosstalk from the signals of the respective light receiving elements.
  • the light receiving element having a shorter length in the width direction R is affected by the positional deviation in the width direction R of the light due to the eccentricity of the disk 110. Becomes larger, and detection errors are likely to occur.
  • the maximum outer dimensions WPA2 in the width direction R of the respective light receiving elements are equal to each other, the influence of the eccentricity can be reduced, and an absolute position detection error occurs even when the disk 110 is eccentric. Can be difficult.
  • the plurality of light receiving elements included in the light receiving arrays PA1 and PA2 are a plurality of first light receiving elements having different distances from the light source 131 and the same area (in the example shown in FIG. 5 and the like, the light receiving elements P3 to P3).
  • P7 the light receiving elements included in the light receiving arrays PA1 and PA2 are a plurality of first light receiving elements having different distances from the light source 131 and the same area (in the example shown in FIG. 5 and the like, the light receiving elements P3 to P3).
  • P7 the following effects are obtained. That is, since the first light receiving elements having the same area have the same junction capacitance (capacitance), the response speed of each first light receiving element can be made uniform. As a result, the absolute position detection accuracy when the motor M rotates at high speed can be improved.
  • the plurality of first light receiving elements having the same area (light receiving elements P3 to P7 in the example shown in FIG. 5 and the like)
  • the total TPs + TPs of the measurement direction dimensions is equal to each other and the first light receiving element closer to the light source 131 in the measurement direction C is farther away from the light source 131 in the width R direction of the apex of the apex Ps, Get the effect.
  • the irradiation intensity of the light emitted from the light source 131 and reflected by the patterns SA1 and SA2 has a concentric distribution that attenuates with increasing distance from the light source 131 with the light source 131 at the center. .
  • the first light receiving element closer to the light source 131 is separated from the light source 131 by the position in the width direction of the apex of the apex Ps.
  • the light receiving area of the region having a relatively large light intensity can be gradually reduced as the first light receiving element closer to the light source 131 is secured while the light receiving area of the larger region is secured. Therefore, it is possible to achieve a uniform amount of received light while making the area of each light receiving element uniform.
  • a plurality of light receiving elements included in the light receiving arrays PA1 and PA2 are arranged in the measurement direction C with the first light receiving elements sandwiched therebetween, and two second light receiving elements that do not have the pointed portion Ps (see FIG. In the example shown in 5 etc., when the light receiving elements P1, P9) are included, the following effects are obtained. That is, the second light receiving element that does not include the pointed portion Ps has a larger area than the first light receiving element that includes the pointed portion Ps.
  • the light receiving elements at both ends of the light receiving arrays PA1 and PA2 that are located farthest from the light source 131 are used as the second light receiving elements, and the first light receiving elements are arranged therebetween, so that a plurality of light receiving arrays PA1 and PA2 are provided.
  • the light receiving amount of each light receiving element can be made uniform while ensuring the maximum amount of light received by the entire light receiving element.
  • the second light receiving elements (light receiving elements P1 and P9 in the example shown in FIG. 5 and the like) have a square shape
  • the first light receiving elements (light receiving elements P2 to P8 in the example shown in FIG. 5 and the like)
  • the trimming area, position, and the like may be adjusted based on the square shape of the second light receiving element, so that the design of the shape of the first light receiving element can be facilitated.
  • the plurality of light receiving elements included in the light receiving arrays PA1 and PA2 are a plurality of first light receiving elements having different distances from the light source 131 and different areas (in the example illustrated in FIG. 5 and the like, the light receiving elements P2 and P2).
  • the plurality of first light receiving elements including P3 and light receiving elements P7 and P8) the total TPs + TPs of the measurement direction dimensions of the tip portion Ps is set larger as the first light receiving element closer to the light source 131 in the measurement direction C. The following effects are obtained.
  • the light receiving area can be gradually reduced for the first light receiving element closer to the light source 131. Therefore, it is possible to make the amount of light received by each light receiving element uniform.
  • the detection signal when two sets of light receiving elements constituting each of the light receiving arrays PA1 and PA2 are arranged in parallel at positions offset from each other in the width direction R so as to sandwich the light source 131, The effect like this is obtained. That is, when the reliability of the detection signal is reduced due to one of the plurality of light receiving elements (for example, the light receiving array PA2) corresponding to the transition of the absolute pattern, the signal from the other plurality of light receiving elements (for example, the light receiving array PA1) The detection signal can be used and vice versa. Thereby, the reliability of the detection signal of the light receiving element can be improved, and the absolute position detection accuracy can be improved.
  • the encoder 100 is a point light source in which the light source 131 emits diffused light to the patterns SA1 and SA2, and the patterns SA1 and SA2 are patterns that reflect the light emitted from the light source 131, and the light receiving array.
  • the plurality of light receiving elements PA1 and PA2 are configured as reflective encoders that receive the light reflected by the patterns SA1 and SA2, the following effects are obtained. That is, in the reflection type encoder, by using a point light source that emits diffused light, the light amount distribution of the reflected light from the patterns SA1 and SA2 tends to become a trapezoidal shape that further spreads from the irradiation area corresponding to the patterns SA1 and SA2.
  • each light receiving element of the light receiving arrays PA1 and PA2 is not limited to the above embodiment, and various other forms are conceivable.
  • variations in the shape of these light receiving elements will be described with reference to FIGS. 12 to 17, only the shape of each light receiving element of the light receiving array PA2 is shown, and the other configurations are not shown.
  • each light receiving element is arranged along the arc-shaped line Lcp (arranged along the measurement direction C).
  • Lcp arranged along the measurement direction C.
  • FIGS. 12 to 17 it is easy to understand the shape relationship between the light receiving elements. Therefore, it is schematically shown in a linear arrangement.
  • FIG. 12 shows the shape of each light receiving element of the light receiving array PA2 in the above embodiment.
  • the two light receiving elements P1 and P9 positioned at both ends of the light receiving array PA2 are second light receiving elements that do not have the pointed portion Ps, and the first light receiving elements P2 to P8 that have the pointed portion Ps are disposed therebetween.
  • the first light receiving elements P3 to P7 have the same light receiving area. In the first light receiving elements P3 to P7, the first light receiving element closer to the light source 131 is farther away from the light source 131 in the width direction position of the apex portion Ps. Yes.
  • the total light receiving element TPs + TPs in the measurement direction dimension of the tip portion Ps is larger in the measurement direction C as the light receiving element is closer to the light source 131.
  • two kinds of measurement direction dimensions TPs of the tip portion Ps are set, and d1 is larger than d2.
  • the light receiving elements having different maximum distances from the light source 131 so that the maximum outer dimensions in the measurement direction C and the maximum outer dimensions in the width direction R of the light receiving elements are equal to each other and the received light amounts are equal to each other.
  • TPs + TPs is larger as the light receiving element is closer to the light source 131 in the measurement direction C.
  • the first light receiving elements P2 and P3 and the first light receiving elements P7 and P8 have the same position in the width direction at the apex of the pointed portion Ps. Also in this modification, the same effect as the above embodiment can be obtained.
  • all the light receiving elements P1 to P9 are the first light receiving elements having the pointed portion Ps, and the second light receiving elements not having the pointed portion Ps are not arranged. Further, only one kind of d1 is set as the measurement direction dimension TPs of the tip portion Ps. The light receiving areas of all the first light receiving elements P1 to P9 are the same. In these first light receiving elements P1 to P9, the position of the apex portion Ps in the width direction of the first light receiving element closer to the light source 131 is farther from the light source 131. ing. In this modification as well, the first light receiving elements having different areas are not arranged. Also in this modification, the same effect as the above embodiment can be obtained.
  • all the light receiving elements P1 to P9 are configured by only the pointed portion Ps. That is, only one kind of d1 is set as the measurement direction dimension TPs of the tip portion Ps, and d1 of all the light receiving elements P1 to P9 is half of the maximum outer dimension TPA2.
  • the light receiving areas of all the first light receiving elements P1 to P9 are the same. In these first light receiving elements P1 to P9, the position of the apex portion Ps in the width direction of the first light receiving element closer to the light source 131 is farther from the light source 131. ing.
  • the first light receiving elements having different areas are not arranged. Also in this modification, the same effect as the above embodiment can be obtained.
  • the two light receiving elements P1 and P9 located at both ends are second light receiving elements that do not have the pointed portion Ps.
  • four types of measurement direction dimensions TPs of the tip portion Ps are set, d3 is larger than d4, d2 is larger than d3, and d1 is larger than d2. All the light receiving elements P1 to P9 have different light receiving areas.
  • the light receiving elements closer to the light source 131 in the measurement direction C have a larger TPs + TPs.
  • the first light receiving elements P2 to P8 all have the same position in the width direction of the apex of the tip portion Ps. Also in this modification, the same effect as the above embodiment can be obtained.

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Abstract

L'invention concerne un codeur capable d'améliorer la précision de la détection, et un moteur équipé d'un codeur. Ledit codeur comprend : des motifs SA1, SA2 le long d'une direction de mesure C ; une source de lumière 131 qui émet de la lumière vers les motifs SA1, SA2 ; et des ensembles de réception de la lumière PA1, PA2 qui sont chacun disposés le long de la direction de mesure C et qui reçoivent la lumière émise par la source de lumière 131 et réfléchie par les motifs respectifs SA1, SA2. Plusieurs éléments de réception de la lumière P1 à P9 prévus dans chaque ensemble de réception de la lumière PA1, PA2 comprennent des premiers éléments de réception de la lumière P2 à P8 qui possèdent chacun une partie d'extrémité pointue Ps qui présente une forme conique.
PCT/JP2014/082598 2014-12-09 2014-12-09 Codeur et moteur équipé d'un codeur WO2016092639A1 (fr)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073418A (ja) * 1983-09-30 1985-04-25 Yokogawa Hokushin Electric Corp 変位変換器
JPH0360019U (fr) * 1989-10-14 1991-06-13
JP2000241198A (ja) * 1998-12-22 2000-09-08 Mitsutoyo Corp 光電式エンコーダ
JP2007010426A (ja) * 2005-06-29 2007-01-18 Mitsumi Electric Co Ltd エンコーダ装置
JP4945674B2 (ja) * 2010-11-08 2012-06-06 株式会社安川電機 反射型エンコーダ、サーボモータ及びサーボユニット
JP2012167949A (ja) * 2011-02-10 2012-09-06 Yaskawa Electric Corp エンコーダ、光学モジュール及びサーボシステム
JP2013083673A (ja) * 2013-02-13 2013-05-09 Nikon Corp 検出ユニット、エンコーダ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11183201A (ja) * 1997-12-19 1999-07-09 Yaskawa Electric Corp エンコーダ
JP3695398B2 (ja) * 2002-01-30 2005-09-14 富士ゼロックス株式会社 光学式エンコーダ及びエンコーダ用スケール
US6972402B2 (en) * 2002-06-03 2005-12-06 Mitsubishi Denki Kabushiki Kaisha Photoelectric rotary encoder
CN1601232A (zh) * 2003-09-27 2005-03-30 光栅科技有限公司 光编码器光源

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073418A (ja) * 1983-09-30 1985-04-25 Yokogawa Hokushin Electric Corp 変位変換器
JPH0360019U (fr) * 1989-10-14 1991-06-13
JP2000241198A (ja) * 1998-12-22 2000-09-08 Mitsutoyo Corp 光電式エンコーダ
JP2007010426A (ja) * 2005-06-29 2007-01-18 Mitsumi Electric Co Ltd エンコーダ装置
JP4945674B2 (ja) * 2010-11-08 2012-06-06 株式会社安川電機 反射型エンコーダ、サーボモータ及びサーボユニット
JP2012167949A (ja) * 2011-02-10 2012-09-06 Yaskawa Electric Corp エンコーダ、光学モジュール及びサーボシステム
JP2013083673A (ja) * 2013-02-13 2013-05-09 Nikon Corp 検出ユニット、エンコーダ

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