WO2016074296A1

WO2016074296A1 - Coating method and coating device

Info

Publication number: WO2016074296A1
Application number: PCT/CN2014/092958
Authority: WO
Inventors: 宋江江
Original assignee: 深圳市华星光电技术有限公司
Priority date: 2014-11-14
Filing date: 2014-12-03
Publication date: 2016-05-19
Also published as: CN104353594B; CN104353594A

Abstract

A coating method and a coating device. The coating method comprises the steps of: coating a to-be-coated substance mixed with magnetic particles on a to-be-coated surface of a carrier; and applying an alternating magnetic field on the to-be-coated surface to promote the magnetic particles to vibrate in the to-be-coated substance, so as to uniformly distribute the to-be-coated substance on the to-be-coated surface. According to the coating method and the coating device, the to-be-coated substance can be uniformly coated on the to-be-coated surface of the carrier to avoid an adverse effect caused by non-uniform distribution of the to-be-coated substance.

Description

Coating method and coating device

Cross-reference to related applications

The present application claims priority to Chinese Patent Application No. 20141064823, filed on Nov. 14, 2014, which is incorporated herein by reference.

Technical field

The invention belongs to the field of coating technology, and in particular relates to a coating method and a coating device.

Background technique

The coating method is generally classified into a roll coating method and a spray coating method, which are capable of applying a glue or paint waiting coating to a carrier such as a glass substrate, paper, cloth, resin, or mechanical parts. The coating method is widely used, for example, painting of mechanical parts, manufacture of a film, and manufacture of TFT glass and color filter of a liquid crystal panel.

At present, the object to be coated in the nozzle is usually sprayed on the carrier by means of air pressure, and the nozzle is sprayed at a uniform speed above the carrier to obtain a relatively uniform layer to be coated. However, when there is foreign matter in the nozzle or vibration occurs during the movement of the nozzle, the layer to be coated sprayed on the carrier may be uneven.

Summary of the invention

In order to solve the above problems, an object of the present invention is to provide a coating method and a coating apparatus capable of uniformly coating an object to be coated on a surface to be coated of a carrier.

According to a first aspect of the present invention, there is provided a coating method comprising the steps of: coating a material to be coated mixed with magnetic particles on a surface to be coated; applying an alternating magnetic field on a surface to be coated to promote magnetic properties The particles vibrate in the object to be coated, so that the object to be coated is uniformly distributed on the surface to be coated. When the coating to be coated on the surface to be coated of the carrier is unevenly distributed, the magnetic particles vibrating in the object to be coated will act to cause a small range of flow of the object to be coated, so that it is evenly distributed on the surface to be coated of the carrier. .

In one embodiment, the alternating magnetic field is formed by a group of electromagnets that input alternating current. Since the alternating magnetic field formed by the electromagnet group has strong flexibility, the magnetic field strength and the alternating frequency can be changed by the input alternating current, so that the coating method is suitable for coating to be coated with different thicknesses. Coating layer.

In one embodiment, the electromagnet group is composed of electromagnets distributed in an array, the array consisting of a plurality of rows and a plurality of columns, and the spacing of any adjacent electromagnets in each row is equal to any adjacent electromagnetic in each column. The spacing of the iron. Such an array of electromagnets can produce a substantially uniform electromagnetic field, causing the movement of most of the magnetic particles in the magnetic field to be substantially the same, further promoting uniform distribution of the object to be coated on the surface to be coated.

In one embodiment, the alternating current is an alternating current of a constant frequency. When a constant frequency alternating current is input, the electromagnet group can generate a uniformly and orderly varying magnetic field such that the magnetic force and time of each magnetic particle are equal, so that the reciprocating motion of each magnetic particle is substantially the same, further The distribution of the object to be coated is uniform on the surface to be coated of the carrier.

In one embodiment, the object to be coated is a photoresist, and the carrier is a glass substrate for manufacturing a liquid crystal panel TFT glass or a color filter. The photoresist coated on the glass substrate by the coating method of the present invention can promote the uniform distribution of the photoresist and avoid macroscopic color unevenness on the display screen.

In one embodiment, the frequency of the alternating current is greater than 3000 Hz, and the magnetic particles are selected to be particles capable of losing magnetic properties at a temperature of from 150 ° C to 300 ° C and having a particle size of from 10 to 99 nm, and containing from 100 to 200 particles of magnetic particles per ml of the mixture. By this method, not only the distribution of the photoresist layer can be ensured, but also the requirements of the TFT or the color filter of the liquid crystal panel can be satisfied, and the magnetic particles can be prevented from interfering with the normal display of the display panel.

In one embodiment, a constant magnetic field is applied at the edge of the surface to be coated to cause the magnetic particles to accumulate at the edges of the surface to be coated to prevent outflow of the object to be coated. Thereby, waste of resources can be avoided, and the available area of the carrier after coating can be enlarged, so that the subsequent trimming step can be omitted and the production efficiency can be improved.

According to a second aspect of the present invention, there is provided a coating apparatus comprising: a bearing surface for placing a carrier; a coating mechanism capable of coating a material to be coated mixed with the magnetic particles on a surface to be coated of the carrier; An alternating magnetic field source located below the load bearing surface. Wherein, the alternating magnetic field source is configured to generate an alternating magnetic field on the surface to be coated, and to cause the magnetic particles to vibrate in the object to be coated, thereby uniformly distributing the object to be coated on the surface to be coated.

In one embodiment, the alternating magnetic field source is a first electromagnet group that inputs an alternating current. The alternating magnet field formed by the first electromagnet group has strong flexibility, and the magnetic field strength and the alternating frequency can be changed by changing the input alternating current, so that the coating device is suitable for coating to be coated with different thicknesses. The layer to be coated.

In one embodiment, the first electromagnet group is composed of a first electromagnet distributed in an array, the array consisting of a plurality of rows and a plurality of columns, and the spacing of any adjacent first electromagnets in the row is equal to any phase in the column The spacing of the adjacent first electromagnets. The array of first electromagnets distributed in the array enables them to generate a substantially uniform electromagnetic field, which promotes the movement of the respective magnetic particles to be substantially the same, further promoting the distribution of the object to be coated on the surface to be coated of the carrier. uniform.

In one embodiment, the object to be coated is a photoresist, and the carrier is a glass substrate for manufacturing a liquid crystal panel TFT glass or a color filter. The photoresist coated on the glass substrate by using the coating device of the present invention can promote uniform distribution of the photoresist and avoid abnormality of the display screen.

In one embodiment, the frequency of the alternating current is greater than 3000 Hz, and the magnetic particles are selected to be particles capable of losing magnetic properties at a temperature of from 150 ° C to 300 ° C and having a particle size of from 10 to 99 nm, and containing from 100 to 200 particles of magnetic particles per ml of the mixture. The photoresist coated on the glass substrate by using the coating device of the present invention can promote uniform distribution of the photoresist and avoid abnormality of the display screen.

In one embodiment, the coating apparatus further includes a constant magnetic field source disposed below the edge of the load bearing surface, the constant magnetic field source configured to cause the magnetic particles to accumulate at the edges of the surface to be coated, thereby preventing the object to be coated outflow. Thereby, waste of resources can be avoided, and the available area of the carrier after coating can be enlarged, thereby eliminating the subsequent trimming step and improving production efficiency.

In one embodiment, the constant magnetic field is a second electromagnet group that inputs a direct current current, and the second electromagnet group is composed of a plurality of second electromagnets that surround the alternating magnetic field source, and the spacing of any adjacent second electromagnets The distance is fixed. Such a second electromagnet spaced apart from each other is capable of generating a uniform electric field to make the distribution of magnetic particles at the edges of the surface to be coated relatively uniform.

According to the coating method and the spraying device of the present invention, the object to be coated can be uniformly coated on the surface to be coated of the carrier to avoid adverse effects due to uneven distribution of the object to be coated, such as uneven paint layer. The display is abnormal due to poor aesthetics, poor performance due to uneven film thickness, and unevenness of the photoresist layer on the glass substrate of the TFT glass and the color filter.

At the same time, the coating method and the spraying device according to the present invention can also avoid waste of resources and enlarge the available area of the carrier after coating, so that the subsequent trimming step can be omitted and the production efficiency can be improved.

In addition, the spraying device according to the present invention is simple and compact in structure, convenient in processing, simple in assembly, safe and efficient in use, and convenient for implementation and popularization.

DRAWINGS

The invention will be described in more detail hereinafter based on the embodiments and with reference to the accompanying drawings. among them:

Figure 1 is a schematic view showing the structure of a coating apparatus according to the present invention;

Figure 2 is a cross-sectional view taken along line A-A of Figure 1.

In the drawings, the same components are denoted by the same reference numerals. The drawings are not drawn to scale.

detailed description

The invention will now be further described with reference to the accompanying drawings.

1 and 2 show a coating device 10 according to the invention, which is mainly used for applying a coating 7 to a carrier 3 and for promoting a uniform distribution of a layer to be coated formed on the carrier 3. The coating device 10 includes a base 2 and a bearing surface 2a formed at a top end of the base 2. The bearing surface 2a is used to place the carrier 3, which is in complete conformity with the contact surface of the carrier 3. In a preferred embodiment, the bearing surface 2a is planar for placement of a glass substrate (i.e., carrier 3).

According to the invention, the coating device 10 further comprises a coating mechanism 4 capable of coating the object 7 to be coated with the magnetic particles on the surface 3a to be coated 3a, and an alternating magnetic field source provided below the bearing surface 2a. 5. The coating mechanism 4 may be selected as a nozzle capable of spraying magnetic particles, or a roller capable of coating the object to be coated 7 on the surface to be coated 3a in a rolling manner. Among them, the nozzle and the roller are well known to those skilled in the art and will not be described in detail herein.

According to the present invention, the alternating magnetic field source 5 may be disposed below the inside or the bottom of the susceptor 2 for generating an alternating magnetic field on the surface to be coated 3a and causing the magnetic particles to vibrate within the object to be coated 7, thereby The object to be coated 7 is evenly distributed on the surface to be coated 3a. When the object to be coated 7 coated on the surface 3a to be coated of the carrier 3 is unevenly distributed, the magnetic particles vibrating in the object to be coated 7 will actuate a small range of flow of the object to be coated 7, thereby uniformly distributing it on the carrier. 3 on the surface to be coated 3a.

The object to be coated 7 may be a glue or paint, and the carrier 3 may be a glass substrate, paper, cloth, resin or mechanical parts or the like. By coating by the coating device 10, it is possible to avoid adverse effects due to uneven distribution of the object to be coated 7, such as poor aesthetic effect due to uneven paint layer, performance degradation due to uneven film thickness, and TFT glass and The display layer is abnormal due to unevenness of the photoresist layer on the glass substrate of the color filter.

According to the present invention, the alternating magnetic field source 5 can be a first electromagnet group that inputs an alternating current, and of course can be a device capable of switching the magnetic poles of the permanent magnet. However, since the flexibility of the alternating magnetic field formed by the first electromagnet group is strong, the magnetic field strength and the alternating frequency can be changed while changing the input alternating current, so that the coating device 10 is suitable for coating of different thicknesses. The layer to be coated which is applied to the surface 3a to be coated.

In this embodiment, the first electromagnet group is composed of a first electromagnet 501 distributed in an array, the array consisting of a plurality of rows and a plurality of columns, and the spacing L1 of any adjacent first electromagnets 501 in each row is It is equal to the pitch L2 of any adjacent first electromagnets 501 in each column. The array of first electromagnets 501 distributed in such an array is capable of generating a substantially uniform electromagnetic field, causing the movement of most or all of the magnetic particles in the magnetic field to be substantially the same, further causing the object to be coated 7 to be distributed on the surface to be coated 3a of the carrier 3. Evenly.

In a preferred embodiment, the alternating current is an alternating current of a constant frequency. When the first electromagnet group inputs an alternating current of a constant frequency, the first electromagnet group is capable of generating a uniformly and orderly varying magnetic field such that the magnetic force and time of each magnetic particle are equal, thereby causing reciprocation of each magnetic particle. The strokes are substantially the same, which further promotes the uniform distribution of the object to be coated 7 on the surface 3a to be coated 3 of the carrier 3.

In one embodiment, each of the first electromagnets 501 is a U-shaped electromagnet, and each of the U-shaped electromagnets has the same winding mode and current direction, and the open ends thereof are all in the same plane and parallel to the bearing surface 2a. The opening distance of the U-shaped electromagnet 501 is equal to the distance between the U-shaped electromagnet 501 and the adjacent U-shaped electromagnet 501. In this way, the distribution of the magnetic field lines of the alternating magnetic field can be made to be uniform.

In another embodiment, each of the first electromagnets 501 is a strip-shaped electromagnet, and each of the strip-shaped electromagnets has the same winding mode and current direction, and one end thereof is in the same plane and parallel to the bearing surface 2a. In this way, the distribution of the magnetic field lines of the alternating magnetic field can be made to be uniform.

In one embodiment, the object to be coated 7 is a photoresist, and the carrier 3 is a glass substrate for manufacturing a liquid crystal panel TFT glass or a color filter. By the photoresist coated on the glass substrate by the coating device 10 according to the present invention, it is possible to ensure that the distribution of the photoresist layer applied to the glass substrate approaches uniformity, thereby preventing the display screen from being abnormal.

The frequency of the alternating current is preferably greater than 3000 Hz, and the magnetic particles are selected to be particles capable of losing magnetic properties at a temperature of from 150 ° C to 300 ° C and having a particle diameter of from 10 to 99 nm, and containing from 100 to 200 particles of magnetic particles per ml of the mixture. The magnetic particles may preferably be ferrite particles or NdFeB particles. By this method, not only the distribution of the photoresist layer can be ensured, but also the requirements of the liquid crystal panel TFT or the color filter can be satisfied, and the magnetic particles can be prevented from interfering with the normal display of the display panel.

In order to avoid the outflow of the object to be coated 7 at the outer edge of the surface to be coated 3a of the carrier, the coating device 10 further comprises a constant magnetic field source 6 disposed below the edge of the bearing surface 2a. The constant magnetic field source 6 is outside the dashed box B and distributed around the dashed box B, while the alternating magnetic field source 5 is in the dashed box B. The constant magnetic field source 6 is configured to urge the magnetic particles to accumulate at the edges of the surface to be coated 3a, thereby preventing the outflow of the object to be coated 7. Thereby, waste of resources can be avoided, and the available area of the carrier after coating can be enlarged, thereby omitting the subsequent trimming step, High production efficiency.

As shown in FIG. 2, the constant magnetic field source 6 can be a second electromagnet group that inputs a direct current. The second electromagnet group is composed of a plurality of second electromagnets 601 surrounding the alternating magnetic field source, and the interval distance L3 of any adjacent second electromagnets 601 is a constant value. The second electromagnet 601 may be a U-shaped electromagnet or a strip-shaped electromagnet. This second electromagnet 601 having the same distance can generate a uniform electric field to make the distribution of the magnetic particles at the edge of the surface to be coated 3a relatively uniform.

In addition, the present invention also provides a coating method, the method comprising: coating the mixed magnetic particles and the object to be coated on the carrier; applying an alternating magnetic field on the surface to be coated to urge the magnetic particles to be treated Vibration is generated in the coating to uniformly distribute the object to be coated on the surface to be coated. When the coating to be coated on the surface to be coated of the carrier is unevenly distributed, the magnetic particles vibrating in the object to be coated will act to cause a small range of flow of the object to be coated, so that it is evenly distributed on the surface to be coated of the carrier. .

The object to be coated may be a glue or paint, and the carrier may be a glass substrate, paper, cloth, resin or mechanical parts or the like. By such a coating method, it is possible to avoid adverse effects on the carrier to be coated due to uneven distribution of the object to be coated, such as poor aesthetic effect caused by uneven paint layer and poor performance due to uneven film thickness. And display abnormalities caused by unevenness of the photoresist layer on the glass substrate of the TFT glass and the color filter.

The alternating magnetic field according to the present invention is formed by an electromagnet group that inputs an alternating current, and of course can also be formed by a device capable of switching the magnetic poles of the permanent magnet. However, since the alternating magnetic field formed by the electromagnet group has strong flexibility, the magnetic field strength and the alternating frequency can be changed while changing the input alternating current, so that the coating method is suitable for coating of different thicknesses. The coated layer to be coated.

In one embodiment, the electromagnet set is comprised of electromagnets distributed in an array. 2, the array consists of a plurality of rows and a plurality of columns, and the spacing L1 of any adjacent electromagnets in each row is equal to the spacing L2 of any adjacent electromagnets in each column. Such an array of electromagnets can generate a substantially uniform electromagnetic field, causing the movement of most of the magnetic particles in the magnetic field to be substantially the same, further promoting uniform distribution of the object to be coated on the surface to be coated.

In a preferred embodiment, the alternating current is an alternating current of a constant frequency. When the electromagnet group inputs an alternating current of a constant frequency, the electromagnet group can generate a uniformly and orderly varying magnetic field, so that the magnetic force and time of the magnetic particles acting on each magnetic particle are equal, so that the reciprocating motion of each magnetic particle is substantially the same. Further, the coating to be coated is uniformly distributed on the surface to be coated of the carrier.

In one embodiment, the object to be coated is a photoresist, and the carrier is a glass substrate for manufacturing a liquid crystal panel TFT glass or a color filter. A photoresist coated on a glass substrate using the coating method according to the present invention It is sufficient to ensure that the distribution of the photoresist layer applied to the glass substrate is uniform, thereby avoiding macroscopic color unevenness on the display screen.

The frequency of the alternating current of the current frequency is selected to be greater than 3000 Hz, and the magnetic particles are selected to be particles which are capable of losing magnetic properties at a temperature of from 150 ° C to 300 ° C and having a particle diameter of from 10 to 99 nm, and containing from 100 to 200 particles of magnetic particles per ml of the mixture. Wherein, the magnetic particles may preferably be ferrite particles or NdFeB particles. By this method, not only the distribution of the photoresist layer can be ensured, but also the requirements of the TFT or the color filter of the liquid crystal panel can be satisfied, and the magnetic particles can be prevented from interfering with the normal display of the display screen.

In order to avoid the outflow of the object to be coated at the outer edge of the surface to be coated, a constant magnetic field may be applied at the edge of the surface to be coated to cause the magnetic particles to accumulate at the edges of the surface to be coated, thereby preventing the outflow of the object to be coated. Thereby, waste of resources can be avoided, and the available area of the carrier after coating can be improved, so that the subsequent trimming step can be omitted and the production efficiency can be improved.

It should be noted that, as a person skilled in the art can select suitable voltages, currents, and number of coils of the electromagnet coil according to the actual carrier 3 and the object to be coated 7, the details are not described in detail in order to save space.

The coating method and the coating device 10 according to the present invention can uniformly coat the object to be coated on the surface to be coated of the carrier to avoid adverse effects on the carrier due to uneven distribution of the object to be coated, for example, photolithography. The uneven distribution of the glue causes the macroscopic color unevenness of the liquid crystal panel.

Although the present invention has been described with reference to the preferred embodiments thereof, various modifications may be made without departing from the scope of the invention. In particular, the technical features mentioned in the various embodiments can be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

A coating method, comprising the steps of:

Step 1, coating the mixed magnetic particles and the object to be coated on the surface to be coated of the carrier;

Step 2: applying an alternating magnetic field on the surface to be coated to cause the magnetic particles to vibrate in the object to be coated, so that the object to be coated is evenly distributed on the surface to be coated.
The coating method according to claim 1, wherein the alternating magnetic field is formed by an electromagnet group that inputs an alternating current.
The coating method according to claim 2, wherein said electromagnet group is composed of electromagnets distributed in an array, said array being composed of a plurality of rows and a plurality of columns, said adjacent ones of said rows being arbitrarily The spacing of the electromagnets is equal to the spacing of any adjacent electromagnets in the column.
The coating method according to claim 3, wherein the alternating current is an alternating current of a constant frequency.
The coating method according to claim 4, wherein the object to be coated is a photoresist, and the carrier is a glass substrate for manufacturing a liquid crystal panel TFT glass or a color filter.
The coating method according to claim 5, wherein said alternating current has a frequency of more than 3000 Hz, and said magnetic particles are selected to be particles capable of losing magnetic properties at a temperature of from 150 ° C to 300 ° C and having a particle diameter of from 10 to 99 nm. The mixture contains 100 to 200 particles of the magnetic particles.
The coating method according to claim 4, wherein in step 2, a constant magnetic field is applied at an edge of the surface to be coated to cause the magnetic particles to accumulate at an edge of the surface to be coated, The outflow of the object to be coated is prevented.
A coating device comprising a bearing surface for placing a carrier, wherein the coating device further comprises a coating mechanism capable of coating a material to be coated mixed with magnetic particles on a surface to be coated of the carrier, And an alternating magnetic field source disposed under the bearing surface, wherein the alternating magnetic field source is configured to generate an alternating magnetic field on the surface to be coated and to cause the magnetic particles to be within the object to be coated Vibration is generated to uniformly distribute the object to be coated on the surface to be coated.
The coating apparatus according to claim 8, wherein the alternating magnetic field source is a first electromagnet group that inputs an alternating current.
The coating apparatus according to claim 9, wherein said electric first magnet group is composed of a first electromagnet distributed in an array, said array being composed of a plurality of rows and a plurality of columns, any phase within said row Neighboring place The pitch of the first electromagnet is equal to the pitch of any adjacent first electromagnets in the column.
The coating apparatus according to claim 10, wherein said alternating current is an alternating current of a constant frequency.
The coating apparatus according to claim 11, wherein the object to be coated is a photoresist, and the carrier is a glass substrate on which a liquid crystal panel TFT glass or a color filter is manufactured.
The coating apparatus according to claim 12, wherein said alternating current has a frequency greater than 3000 Hz, and said magnetic particles are selected to be particles capable of losing magnetic properties at a temperature of from 150 ° C to 300 ° C and having a particle diameter of from 10 to 99 nm. The mixture contains 100 to 200 particles of the magnetic particles.
The coating apparatus according to claim 11, further comprising a constant magnetic field source disposed below an edge of said bearing surface, said constant magnetic field source being configured to urge said magnetic particles to be coated The edges are stacked to prevent the outflow of the object to be coated.
The coating apparatus according to claim 14, wherein said constant magnetic field is a second electromagnet group that inputs a direct current current, and said second electromagnet group is composed of a plurality of electromagnets that surround said alternating magnetic field source The interval between any adjacent second electromagnets is constant.