WO2016013424A1

WO2016013424A1 - Cooling device and multi-chamber heat treatment device

Info

Publication number: WO2016013424A1
Application number: PCT/JP2015/069889
Authority: WO
Inventors: 勝俣　和彦; 馨磯本; 喬裕永田; 公中山; 勇助清水; 玄西谷
Original assignee: 株式会社Ihi; 株式会社Ｉｈｉ機械システム
Priority date: 2014-07-25
Filing date: 2015-07-10
Publication date: 2016-01-28
Also published as: CN106460077A; US20170022579A1; JP2016030836A

Abstract

This cooling device (R) cools a material to be treated (X) by immersion in a coolant (W), and is provided with: a cooling chamber (1) which accommodates the material to be treated (X) and can internally store the coolant (W); supply nozzles (8) which supply the coolant (W) into the cooling chamber (1) from below the material to be treated (X); a recovery tube (7) which recovers the coolant (W) stored in the cooling chamber (1) from above the material to be treated (X); and a pump (4) which feeds the coolant (W) recovered by the recovery tube (7) to the supply nozzle.

Description

Cooling device and multi-chamber heat treatment apparatus

The present disclosure relates to a cooling device and a multi-chamber heat treatment apparatus. Priority is claimed on Japanese Patent Application No. 2014-152048, filed July 25, 2014, the content of which is incorporated herein by reference.

For example, Patent Document 1 discloses a multi-chamber heat treatment apparatus including three heating devices and one cooling device. In this multi-chamber heat treatment apparatus, the heating devices and the cooling device are connected via the intermediate transfer chamber, and for example, the object heated by the heating device is conveyed to the cooling device and cooled. In such a cooling device, for example, the coolant is stored in a cooling chamber, and the workpiece is cooled by immersing the object in the coolant in the cooling chamber. The background art is also disclosed in the following

Patent Documents

2 and 3.

Japanese Patent Application Laid-Open No. 2014-051695 Japanese Patent Application Laid-Open No. 2005-076101 Japanese Patent Application Laid-Open No. 07-208400

By the way, in order to improve the cooling rate of the object to be treated, it is conceivable to circulate the cooling fluid stored in the cooling chamber to form the flow of the cooling fluid in the cooling chamber while the object to be treated is being cooled. In this case, in Patent Document 1, the coolant is supplied to the cooling chamber from the nozzles arranged on the side of the object while the coolant is being drained from the cooling chamber by the drainage pipe provided below, It is conceivable to form the flow of

However, the coolant heated by cooling the object flows upward of the cooling chamber. For this reason, in the above-described method, the flow of the coolant supplied from the nozzle into the cooling chamber interferes with the flow of the heated coolant directed upward, and the flow of the coolant in the cooling chamber is disturbed, and the object to be treated is It is difficult to cool evenly. In addition, since the coolant supplied from the nozzles is heated before reaching the object to be treated, it is difficult to efficiently cool the object to be treated.

The present disclosure has been made in view of the above-described problems, and in a cooling device and a multi-chamber heat treatment apparatus that immerses and cools an object to be processed in a cooling liquid in a cooling chamber, the object is processed efficiently and uniformly. The object is to form a flow of coolant that can be cooled in a cooling chamber.

The present disclosure adopts the following configuration as means for solving the above problems.

A first aspect of the present disclosure is a cooling device that cools an object to be treated by immersing in a cooling liquid, and a cooling chamber that accommodates the object to be treated and can store the cooling liquid therein; Supply nozzle that supplies the cooling fluid to the cooling chamber from below the object, a recovery pipe that recovers the cooling fluid stored in the cooling chamber from above the workpiece, and the coolant that is recovered by the recovery piping And a pump for pumping.

According to a second aspect of the present disclosure, in the first aspect, the supply nozzle includes a cylindrical body whose upper end is an open end from which the coolant is jetted and which has a through hole penetrating laterally.

A 3rd aspect of this invention is provided with the heat exchanger which cools the cooling fluid collect | recovered by collection piping in the said 1st or 2nd aspect.

A fourth aspect of the present invention is a multi-chamber heat treatment apparatus including a heating device for heating an object to be treated and the cooling device according to any one of the first to third aspects.

According to the present disclosure, in the cooling chamber, the cooling fluid is supplied from below the object by the supply nozzle, and the supplied cooling fluid is recovered from above the object by the recovery pipe, and the recovered coolant is recovered. It is pumped by the pump to the feed nozzle. For this reason, according to the present disclosure, the flow from the lower side to the upper side is formed in the cooling chamber by the supply nozzle, the recovery pipe, and the pump. Such a flow is directed in the same direction as the coolant which is heated by cooling the object to be treated, so that disturbance of the flow of the coolant in the cooling chamber can be suppressed. Therefore, according to the present disclosure, the object to be treated can be cooled uniformly. Further, the coolant supplied from the supply nozzle can be prevented from being heated before reaching the object to be treated, and the object to be treated can be efficiently cooled. That is, according to the present disclosure, in a cooling device and a multi-chamber heat treatment apparatus that immerses and cools an object in a cooling chamber in a cooling chamber, the flow of coolant that can cool the object efficiently and uniformly is cooled. It can be formed indoors.

BRIEF DESCRIPTION OF THE DRAWINGS It is a 1st longitudinal cross-sectional view which shows the whole structure of the cooling device which concerns on one Embodiment of this indication, and a multi-chamber heat processing apparatus. BRIEF DESCRIPTION OF THE DRAWINGS It is a longitudinal cross-sectional view which shows the whole structure of the cooling device which concerns on one Embodiment of this indication. It is an AA arrow line view in FIG. It is a perspective view of a supply nozzle with which a cooling device concerning one embodiment of this indication is provided. It is explanatory drawing which shows the mode of immersion cooling. It is explanatory drawing which shows the mode of mist cooling.

Hereinafter, an embodiment of a cooling device and a multi-chamber heat treatment apparatus according to the present disclosure will be described with reference to the drawings. In the following drawings, the scale of each member is appropriately changed in order to make each member a recognizable size.

As shown in FIG. 1, the multi-chamber heat treatment apparatus including the cooling apparatus of the present embodiment is an apparatus in which a cooling apparatus R, an intermediate transfer apparatus H, and two heating apparatuses (heating apparatus K1 and heating apparatus K2) are combined. It is. In addition, it is also possible to set the number of heating devices to three.

The cooling device R is a device for cooling the object X, and as shown in FIG. 1, the cooling chamber 1, the plurality of cooling nozzles 2, the plurality of mist headers 3, the cooling pump 4 (pump), the cooling drainage pipe 5, a cooling water tank 6, a cooling circulation pipe 7 (collection pipe), a plurality of supply nozzles 8, a drain valve 9, and the like.

The cooling chamber 1 is a vertical cylindrical container (container whose central axis is in the vertical direction) that accommodates the object X, and the internal space is a cooling region RS. The upper portion of the cooling chamber 1 is connected to the intermediate transfer device H, and the cooling chamber 1 is formed with an opening for communicating the cooling region RS with the internal space (transfer region HS) of the intermediate transfer device H. The workpiece X is carried into or out of the cooling region RS through the opening. The cooling chamber 1 is capable of storing a coolant.

The plurality of cooling nozzles 2 are discretely disposed around the workpiece X accommodated in the cooling region RS, as shown in FIGS. 1 to 3B. More specifically, the plurality of cooling nozzles 2 are in a state in which multiple stages (specifically, five stages) are formed in the vertical direction around the workpiece X, and the circumference of the cooling chamber 1 (cooling region RS) It is discretely arranged so as to surround the whole of the object to be processed X and to be preferably equidistant in distance from the object to be processed X with a predetermined interval in the direction.

Further, the plurality of cooling nozzles 2 are grouped into a predetermined number. That is, the plurality of cooling nozzles 2 are grouped in stages in the vertical direction of the cooling region RS, and are also grouped into a plurality of groups in the circumferential direction of the cooling chamber 1 (cooling region RS). As shown in FIG. 2, mist headers 3 are individually provided in such a plurality of groups (nozzle groups).

Here, the coolant jetted from the cooling nozzle 2 is a liquid having a viscosity lower than that of a cooling oil generally used for cooling of the heat treatment, and is, for example, water. The shape of the injection hole of the cooling nozzle 2 is set so that the cooling liquid such as water becomes droplets of uniform and constant particle diameter at a predetermined spray angle. Further, as shown in FIGS. 1 to 5, the spray angle of each cooling nozzle 2 and the interval between the adjacent cooling nozzles 2 are positioned on the outer peripheral side among the droplets ejected from the cooling nozzle 2. It is set such that the droplet intersects or collides with the droplet positioned on the outer peripheral side ejected from the adjacent cooling nozzle 2.

That is, such a plurality of cooling nozzles 2 are the objects to be treated of the cooling fluid so that the object to be treated X is entirely surrounded by the aggregate of droplets of the cooling fluid, that is, the mist of the cooling fluid (coolant mist). Spray towards X

The cooling device R of the present embodiment is capable of mist cooling in which the object X is cooled using such a coolant mist, and cooling (immersion cooling) in which the object X is immersed in the cooling liquid. In immersion cooling, the object X in the cooling chamber 1 is immersed and cooled by the coolant supplied from the plurality of supply nozzles 8. The cooling conditions such as the cooling temperature and the cooling time in the cooling device R are appropriately set in accordance with the purpose of the heat treatment of the object X, the material of the object X, and the like.

The cooling pump 4 pressure-feeds the coolant accumulated in the cooling water tank 6 to the mist header 3 or the supply nozzle 8. Here, an open / close valve 31 is provided upstream of the mist header 3, and an open / close valve 32 is provided upstream of the supply nozzle 8. In the case of performing mist cooling, the on-off valve 31 is opened and the on-off valve 32 is closed, and the coolant is supplied from the cooling pump 4 to the cooling nozzle 2 provided on the mist header 3. On the other hand, when the immersion cooling is performed, the on-off valve 31 is closed and the on-off valve 32 is opened, and the cooling liquid is supplied from the cooling pump 4 to the supply nozzle 8. The cooling pump 4 is selected to have a time variation of the discharge pressure of the coolant preferably small. Further, a heat exchanger 30 is provided downstream of the cooling pump 4. The heat exchanger 30 cools the cooling fluid discharged from the cooling pump 4 by heat exchange with a cooling medium. The cooling fluid is cooled by the heat exchanger 30, so that the cooling fluid recovered from the cooling chamber 1 is cooled, and then supplied to the cooling chamber 1 from the cooling nozzle 2 or the supply nozzle 8 again.

The cooling drainage pipe 5 is a pipe which makes the lower part of the cooling chamber 1 and the cooling water tank 6 connect, and the drainage valve 9 is provided in the middle part. The cooling water tank 6 is a liquid container for storing the cooling fluid drained from the cooling chamber 1 via the cooling drainage pipe 5 or the cooling circulation pipe 7. The cooling circulation pipe 7 is a pipe for connecting the upper portion of the cooling chamber 1 and the upper portion of the cooling water tank 6 as shown in FIG. The cooling circulation pipe 7 is for returning the coolant overflowed from the cooling chamber 1 to the cooling water tank 6 at the time of immersion cooling described above. That is, the cooling circulation pipe 7 recovers the cooling fluid stored in the cooling chamber 1 from above the object X stored in the cooling chamber 1.

FIG. 3A is a view on arrow AA of FIG. As shown in this figure, the plurality of supply nozzles 8 are discretely disposed in the lower part of the cooling chamber 1, and the cooling fluid is injected into the cooling chamber 1 by injecting the cooling fluid upward during immersion cooling. Supply. The plurality of supply nozzles 8 supply the cooling liquid to the cooling chamber 1 from the lower side to the upper side than the object X accommodated in the cooling chamber 1.

FIG. 3B is a perspective view of the supply nozzle 8. As shown in this figure, the supply nozzle 8 is formed of a cylinder whose upper end is an open end 8a from which the coolant is jetted and which has a through hole 8b penetrating laterally. When such a supply nozzle 8 ejects the cooling fluid supplied from the lower end from the opening end 8a at the upper end, the surrounding cooling fluid is taken in from the through hole 8b, and the flow rate several times of the cooling fluid supplied from the lower end The cooling fluid is spouted from the open end 8a.

Returning to FIG. 1, the intermediate transfer device H includes the transfer chamber 10, the transfer chamber mounting table 11, the cooling chamber lift 12 and the cooling chamber lifting cylinder 13, the pair of transfer rails 14, and the pair of pusher cylinders (pusher cylinder 15 and pusher cylinder 16), heating chamber lift 17 and heating chamber lift cylinder 18 etc. The transfer chamber 10 is a container provided between the cooling device R and the heating device K1 and the heating device K2, and the internal space of the transfer chamber 10 is the transfer area HS. The to-be-processed object X is carried in by the external conveyance apparatus in the state accommodated in containers, such as a basket, or is carried in in the conveyance chamber 10 from a discharge port (not shown).

The transfer chamber mounting table 11 is a support table for closing the delivery port between the cooling chamber 1 and the transfer chamber 10 when the object X is cooled by the cooling device R, and can be placed on the other object X ing. The cooling chamber lift 12 is a support on which the object X is placed when the object X is cooled by the cooling device R, and the object X is preferably exposed so that the bottom of the object X is preferably widely exposed. To support. The cooling chamber lifting platform 12 has a plurality of through holes 12 a (see FIG. 3A) opened in accordance with the supply nozzle 8, and is fixed to the tip of the movable rod of the cooling chamber lifting cylinder 13.

The cooling chamber raising and lowering cylinder 13 is an actuator for moving the cooling chamber raising and lowering base 12 up and down (raising and lowering). That is, the cooling chamber lift cylinder 13 and the cooling chamber lift 12 are dedicated transfer devices for the cooling device R, and transfer the object X placed on the cooling chamber lift 12 from the transfer region HS to the cooling region RS. And transport the cooling area RS to the transport area HS.

The pair of transfer rails 14 is laid on the floor in the transfer chamber 10 so as to extend in the horizontal direction. The transport rails 14 are guide members for transporting the object X between the cooling device R and the heating device K1. The pusher cylinder 15 is an actuator that presses the object X when the object X in the transfer chamber 10 is conveyed toward the heating device K1. The pusher cylinder 16 is an actuator that presses the object X when the object X is transferred from the heating device K1 to the cooling device R.

That is, the pair of transport rails 14, the pusher cylinder 15 and the pusher cylinder 16 are dedicated transport devices for transporting the object X between the heating device K 1 and the cooling device R. Although FIG. 1 shows the pair of transport rails 14, the pusher cylinder 15, and the pusher cylinder 16, the actual intermediate transport device H includes a total of two pairs of transport rails 14, the pusher cylinder 15, and the pusher cylinder. It has sixteen. That is, the transport rail 14, the pusher cylinder 15, and the pusher cylinder 16 are provided not only for the heating device K1 but also for the heating device K2. When the third heating device is provided, a total of two pairs of transport rails 14, the pusher cylinder 15, and the pusher cylinder 16 are provided.

The heating chamber elevator 17 is a support on which the object X is placed when the object X is transferred from the intermediate transfer device H to the heating device K1. That is, the workpiece X is conveyed right above the heating chamber elevator 17 by being pressed in the right direction of FIG. 1 by the pusher cylinder 15. The heating chamber elevating cylinder 18 is an actuator for moving the object X on the heating chamber elevating table 17 up and down (raising and lowering). That is, the heating chamber lift 17 and the heating chamber lift cylinder 18 are dedicated transfer devices for the heating device K1, and the object X placed on the heating chamber lift 17 is transferred from the transfer area HS to the inside of the heating device K1. While transporting to (heating area KS), it transfers from heating area KS to transportation area HS.

Since the heating device K1 and the heating device K2 basically have the same configuration, the configuration of the heating device K1 will be described representatively below. The heating device K1 includes a heating chamber 20, a heat insulating container 21, a plurality of heaters 22, a vacuum exhaust pipe 23, a vacuum pump 24, a stirring blade 25, a stirring motor 26, and the like.

The heating chamber 20 is a container provided on the transfer chamber 10, and the internal space of the heating chamber 20 is a heating area KS. The heating chamber 20 is a vertical cylindrical container (container whose central axis is in the vertical direction) as in the cooling chamber 1 described above, but is smaller than the cooling chamber 1. The heat insulation container 21 is a vertical cylindrical container provided in the heating chamber 20, and is formed of a heat insulating material having a predetermined heat insulation performance.

The plurality of heaters 22 are rod-shaped heating elements, and are provided in the vertical posture at predetermined intervals in the circumferential direction of the heat insulating container 21. The plurality of heaters 22 heat the object X accommodated in the heating area KS to a desired temperature (heating temperature). The heating conditions such as the heating temperature and the heating time are appropriately set according to the purpose of the heat treatment on the object X, the material of the object X, and the like.

Here, the degree of vacuum (pressure) in the heating area KS (heating chamber 20) is included in the heating condition. The vacuum exhaust pipe 23 is a pipe communicating with the heating area KS, one end thereof is connected to the upper portion of the heat insulation container 21, and the other end is connected to the vacuum pump 24. The vacuum pump 24 is an exhaust pump that sucks the air in the heating area KS via such a vacuum exhaust pipe 23. The degree of vacuum in the heating area KS is determined by the displacement of air by the vacuum pump 24.

The stirring blade 25 is a rotary blade provided in the upper part in the heat insulation container 21 in a posture in which the direction of the rotation axis is the vertical direction (vertical direction). The stirring blade 25 is driven by the stirring motor 26 to stir the air in the heating area KS. The stirring motor 26 is a rotational drive source provided on the heating chamber 20 such that the output shaft is in the vertical direction (vertical direction). The output shaft of the agitating motor 26 located on the heating chamber 20 is axially coupled with the rotation shaft of the agitating blade 25 located in the heating chamber 20 so as not to impair the airtightness (sealability) of the heating chamber 20 .

The multi-chamber heat treatment apparatus according to the present embodiment includes a control panel (control device) (not shown). The control panel has an operation unit through which the user sets and inputs various conditions in heat treatment, and drive units such as the cooling pump 4, the heater 22, various cylinders, and the vacuum pump 24 based on a control program stored in advance. And a controller configured to execute a heat treatment according to the information related to the various conditions set and input as described above for the object X.

Next, the operation of the multi-chamber heat treatment apparatus configured as described above, in particular, the operation of the cooling device R will be described in detail. The operation of the multi-chamber heat treatment apparatus is mainly performed by the control panel based on the setting information. As is well known, heat treatment includes various treatments depending on the purpose. Below, operation | movement in the case of quenching the to-be-processed object X is demonstrated as an example of heat processing.

Quenching is completed, for example, by heating the object X to a temperature T1 and then rapidly cooling it to a temperature T2, holding it at a temperature T2 for a certain period of time, and then slowly cooling it. The object X accommodated in the intermediate transfer device H from the loading / unloading port by the external transfer device is transferred onto the heating chamber lift 17 by operating the pusher cylinder 15, for example, and further the heating chamber lifting cylinder 18 is accommodated in the heating area KS.

Then, when the heating heater 22 is energized for a certain period of time and the object X is heated to the temperature T1, the heating chamber elevating cylinder 18 and the pusher cylinder 16 are transported to the cooling chamber elevator 12 by operating. Further, the cooling chamber elevating cylinder 13 is transported to the cooling area RS by operating.

Here, when performing immersion cooling, as shown in FIG. 4A, the on-off valve 32 located on the upstream side of the supply nozzle 8 is opened and the on-off valve 31 of the mist header 3 is closed. It is closed. Then, the cooling pump 4 is operated in advance and the cooling fluid is supplied from the plurality of supply nozzles 8, whereby the inside of the cooling region RS is filled with the cooling fluid W. Even in the state where the object X is immersed, the cooling fluid W is continuously supplied from the supply nozzle 8 to the inside of the cooling chamber 1. Then, the cooling fluid W continuously supplied from the supply nozzle 8 cools the processing object X and ascends the inside of the cooling chamber 1, and the overflowing cooling fluid W is recovered by the cooling circulation pipe 7 to obtain a cooling water tank. Store in 6 Further, the cooling fluid W stored in the cooling water tank 6 is again supplied into the cooling chamber 1 from the supply nozzle 8 by the cooling pump 4. At this time, the coolant W is cooled by the heat exchanger 30.

On the other hand, when performing mist cooling, as shown in FIG. 4B, the on-off valve 32 located upstream of the supply nozzle 8 is closed and the on-off valve 31 of the mist header 3 is opened, and the drainage valve 9 is opened. Ru. Then, the coolant W is sprayed from the cooling nozzle 2 toward the object X through the mist header 3. As a result, the object X is mist-cooled by the droplets of the cooling fluid W jetted from the cooling nozzle 2. Further, the cooling fluid W dropped to the bottom of the cooling chamber 1 is stored in the cooling water tank 6 through the cooling drainage pipe 5. Further, the cooling fluid W stored in the cooling water tank 6 is sprayed again into the cooling chamber 1 from the cooling nozzle 2 of the mist header 3 by the cooling pump 4. At this time, the coolant W is cooled by the heat exchanger 30.

According to the multi-chamber heat treatment apparatus including the cooling device R of the present embodiment, the cooling fluid W is supplied from below the object X by the supply nozzle 8 in the cooling chamber 1, and the supplied cooling fluid W is recovered from above the object X by the cooling circulation pipe 7, and the recovered coolant W is pressure-fed by the cooling pump 4 to the supply nozzle 8. Therefore, according to the multi-chamber heat treatment apparatus including the cooling device R of the present embodiment, a flow from the lower side to the upper side is formed in the cooling chamber 1 by the supply nozzle 8, the cooling circulation pipe 7 and the cooling pump 4. . Such a flow is directed in the same direction as the coolant W heated by cooling the object X, and therefore, the occurrence of disturbance in the flow of the coolant W in the cooling chamber 1 can be suppressed. . Therefore, according to the multi-chamber heat treatment apparatus including the cooling device R of the present embodiment, the object X can be cooled uniformly. In addition, the coolant W supplied from the supply nozzle 8 can be prevented from being heated before reaching the object to be treated X, and the object to be treated X can be efficiently cooled. Therefore, according to the multi-chamber heat treatment apparatus including the cooling device R of the present embodiment, it is possible to form a flow of the cooling liquid W capable of cooling the object X efficiently and uniformly in the cooling chamber 1 .

Further, in the multi-chamber heat treatment apparatus including the cooling device R of the present embodiment, the supply nozzle 8 has a cylindrical body having an open end 8 a whose upper end ejects the cooling fluid W and a through hole 8 b penetrating laterally. It is. For this reason, the supply nozzle 8 can take in the surrounding coolant from the through hole 8b, and can eject the coolant W from the open end 8a at a flow rate several times that of the coolant W supplied from the lower end. Therefore, the flow velocity of the cooling fluid W in the cooling chamber 1 can be increased to perform more efficient cooling.

Further, in the multi-chamber heat treatment apparatus including the cooling device R of the present embodiment, the heat exchanger 30 for cooling the cooling fluid W collected by the cooling circulation pipe 7 is provided. For this reason, compared with the case where the coolant W is simply circulated, it is possible to cool the object X in a shorter time.

As mentioned above, although a suitable embodiment was described, referring to drawings, this indication is not limited to the above-mentioned embodiment. The shapes, combinations, and the like of the constituent members shown in the above-described embodiment are merely examples, and various changes can be made based on design requirements and the like without departing from the spirit of the present disclosure.

For example, although the multi-chamber heat treatment apparatus including the cooling device R, the intermediate conveyance device H, and the two heating devices is described in the above embodiment, the present disclosure is not limited thereto. The present disclosure is also applicable to, for example, a multi-chamber heat treatment apparatus of a type in which a cooling device R and a single heating chamber are adjacent via a door.

Moreover, although the cooling device R of the said embodiment accommodates the to-be-processed object X in cooling region RS from upper direction, this indication is not limited to this. The present disclosure is also applicable to one that accommodates the object X from the side (horizontal direction) or from below into the cooling region RS.

Moreover, the cooling device R of the said embodiment demonstrated that mist cooling was possible. However, the present disclosure is not limited thereto, and may be applied to a cooling device that does not perform mist cooling.

According to the present disclosure, in the cooling device and the multi-chamber heat treatment apparatus, which cools the object to be treated by immersing the object in the cooling chamber, the flow of the coolant that can cool the object efficiently and uniformly into the cooling chamber. It becomes possible to form.

1 cooling chamber 2 cooling nozzle 3 mist header 4 cooling pump (pump)
5 Cooling drainage pipe 6 Cooling water tank 7 Cooling circulation pipe (collection piping)
8 supply nozzle 8a opening end 8b through hole 9 drainage valve 10 transfer chamber 11 transfer chamber mounting table 12 cooling chamber lift 12a through hole 13 cooling chamber lift cylinder 14 transfer rail 15 pusher cylinder 16 pusher cylinder 16 pusher cylinder 17 heating chamber lift 18 heating chamber Lifting cylinder 20 Heating chamber 21 Heat insulation container 22 Heating heater 23 Vacuum exhaust pipe 24 Vacuum pump 25 Stirring blade 26 Stirring motor 30 Heat exchanger 31 Opening and closing valve 32 Opening and closing valve H Intermediate conveyance device HS Transportation region K1 Heating device K2 Heating device KS Heating region R Cooling device RS Cooling area W Coolant X Object to be treated

Claims

A cooling device that cools an object by immersing in a coolant,
A cooling chamber which accommodates the object to be treated and can store the cooling fluid therein;
A supply nozzle for supplying the cooling fluid to the cooling chamber from below the object to be treated;
A recovery pipe for recovering the coolant stored in the cooling chamber from above the object to be treated;
A pump for pressure-feeding the coolant recovered by the recovery pipe to the supply nozzle.
The cooling device according to claim 1, wherein the supply nozzle comprises a cylinder whose upper end is an open end for spouting the cooling liquid and which has a through hole which penetrates laterally.
The cooling device according to claim 1, further comprising a heat exchanger for cooling the cooling fluid recovered by the recovery pipe.
The cooling device according to claim 2, further comprising a heat exchanger for cooling the cooling fluid recovered by the recovery pipe.
A heating device for heating an object to be treated;
A multi-chamber heat treatment apparatus comprising the cooling device according to any one of claims 1 to 4.