WO2015200307A3 - Integrated micro-electromechanical switches and a related method thereof - Google Patents

Integrated micro-electromechanical switches and a related method thereof Download PDF

Info

Publication number
WO2015200307A3
WO2015200307A3 PCT/US2015/037155 US2015037155W WO2015200307A3 WO 2015200307 A3 WO2015200307 A3 WO 2015200307A3 US 2015037155 W US2015037155 W US 2015037155W WO 2015200307 A3 WO2015200307 A3 WO 2015200307A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
electromechanical switches
micro
control electrode
substrate
Prior art date
Application number
PCT/US2015/037155
Other languages
French (fr)
Other versions
WO2015200307A2 (en
Inventor
Marco Francesco Aimi
Dan Kenrick Spence
Original Assignee
General Electric Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/314,344 external-priority patent/US9117610B2/en
Application filed by General Electric Company filed Critical General Electric Company
Priority to EP15810992.6A priority Critical patent/EP3161847B1/en
Priority to JP2016574280A priority patent/JP6781048B2/en
Priority to CA2952661A priority patent/CA2952661C/en
Priority to CN201580034300.4A priority patent/CN106415772B/en
Priority to SG11201610176YA priority patent/SG11201610176YA/en
Publication of WO2015200307A2 publication Critical patent/WO2015200307A2/en
Publication of WO2015200307A3 publication Critical patent/WO2015200307A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H2239/00—Miscellaneous
    • H01H2239/004—High frequency adaptation or shielding

Landscapes

  • Micromachines (AREA)

Abstract

A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor portion coupled to the beam electrode. The beam includes a first beam portion extending from the anchor portion along a first direction; and a second beam portion extending from the anchor portion along a second direction opposite to the first direction. A first control electrode and a first contact electrode are disposed on the substrate, facing the first beam portion. A second control electrode and a second contact electrode are disposed on the substrate, facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurality of micro-electromechanical switches is arranged in at least one of a series arrangement, parallel arrangement.
PCT/US2015/037155 2014-06-25 2015-06-23 Integrated micro-electromechanical switches and a related method thereof WO2015200307A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP15810992.6A EP3161847B1 (en) 2014-06-25 2015-06-23 Integrated micro-electromechanical switches and a related method thereof
JP2016574280A JP6781048B2 (en) 2014-06-25 2015-06-23 Integrated microelectromechanical switches and related methods
CA2952661A CA2952661C (en) 2014-06-25 2015-06-23 Integrated micro-electromechanical switches and a related method thereof
CN201580034300.4A CN106415772B (en) 2014-06-25 2015-06-23 Integrated micro-electro-mechanical switch and its correlation technique
SG11201610176YA SG11201610176YA (en) 2014-06-25 2015-06-23 Integrated micro-electromechanical switches and a related method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/314,344 US9117610B2 (en) 2011-11-30 2014-06-25 Integrated micro-electromechanical switches and a related method thereof
US14/314,344 2014-06-25

Publications (2)

Publication Number Publication Date
WO2015200307A2 WO2015200307A2 (en) 2015-12-30
WO2015200307A3 true WO2015200307A3 (en) 2016-02-25

Family

ID=54938927

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2015/037155 WO2015200307A2 (en) 2014-06-25 2015-06-23 Integrated micro-electromechanical switches and a related method thereof

Country Status (6)

Country Link
EP (1) EP3161847B1 (en)
JP (1) JP6781048B2 (en)
CN (1) CN106415772B (en)
CA (1) CA2952661C (en)
SG (1) SG11201610176YA (en)
WO (1) WO2015200307A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107437482A (en) * 2017-07-24 2017-12-05 中北大学 A kind of practical RF MEMS Switches of board-type
CN107424875B (en) * 2017-07-24 2020-06-09 中北大学 Cross single-pole triple-throw switch
CN107393767A (en) * 2017-07-24 2017-11-24 中北大学 A kind of T-shaped double cantilever beam formula single-pole double-throw switch (SPDT)
MX2021000152A (en) * 2018-06-28 2021-05-27 Menlo Microsystems Inc Switch self-actuation mitigation using a tracking signal.
CN111064456B (en) * 2019-12-04 2023-08-29 维沃移动通信有限公司 Radio frequency switch and electronic equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037719A (en) * 1998-04-09 2000-03-14 Hughes Electronics Corporation Matrix-addressed display having micromachined electromechanical switches
EP1426992A2 (en) * 2002-12-05 2004-06-09 Omron Corporation Electrostatic mems switch
US20060087716A1 (en) * 2004-10-27 2006-04-27 Samsung Electronics Co., Ltd. Micro thin-film structure, MEMS switch employing such a micro thin-film, and method of fabricating them
US20090159409A1 (en) * 2007-12-20 2009-06-25 General Electric Company Mems microswitch having a dual actuator and shared gate
US20120176135A1 (en) * 2011-01-11 2012-07-12 General Electric Company Optically controlled mems switch and method of using the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4182861B2 (en) * 2002-12-05 2008-11-19 オムロン株式会社 Contact switch and device with contact switch
US8638093B2 (en) 2011-03-31 2014-01-28 General Electric Company Systems and methods for enhancing reliability of MEMS devices
US20130134018A1 (en) * 2011-11-30 2013-05-30 General Electric Company Micro-electromechanical switch and a related method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037719A (en) * 1998-04-09 2000-03-14 Hughes Electronics Corporation Matrix-addressed display having micromachined electromechanical switches
EP1426992A2 (en) * 2002-12-05 2004-06-09 Omron Corporation Electrostatic mems switch
US20060087716A1 (en) * 2004-10-27 2006-04-27 Samsung Electronics Co., Ltd. Micro thin-film structure, MEMS switch employing such a micro thin-film, and method of fabricating them
US20090159409A1 (en) * 2007-12-20 2009-06-25 General Electric Company Mems microswitch having a dual actuator and shared gate
US20120176135A1 (en) * 2011-01-11 2012-07-12 General Electric Company Optically controlled mems switch and method of using the same

Also Published As

Publication number Publication date
EP3161847B1 (en) 2023-05-31
CA2952661C (en) 2023-01-17
SG11201610176YA (en) 2017-01-27
CN106415772B (en) 2019-08-13
CN106415772A (en) 2017-02-15
EP3161847A4 (en) 2018-01-31
WO2015200307A2 (en) 2015-12-30
CA2952661A1 (en) 2015-12-30
EP3161847A2 (en) 2017-05-03
JP2017527949A (en) 2017-09-21
JP6781048B2 (en) 2020-11-04

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