EP3161847A4 - Integrated micro-electromechanical switches and a related method thereof - Google Patents

Integrated micro-electromechanical switches and a related method thereof Download PDF

Info

Publication number
EP3161847A4
EP3161847A4 EP15810992.6A EP15810992A EP3161847A4 EP 3161847 A4 EP3161847 A4 EP 3161847A4 EP 15810992 A EP15810992 A EP 15810992A EP 3161847 A4 EP3161847 A4 EP 3161847A4
Authority
EP
European Patent Office
Prior art keywords
related method
integrated micro
electromechanical switches
electromechanical
switches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15810992.6A
Other languages
German (de)
French (fr)
Other versions
EP3161847A2 (en
EP3161847B1 (en
Inventor
Marco Francesco Aimi
Dan Kenrick Spence
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/314,344 external-priority patent/US9117610B2/en
Application filed by General Electric Co filed Critical General Electric Co
Publication of EP3161847A2 publication Critical patent/EP3161847A2/en
Publication of EP3161847A4 publication Critical patent/EP3161847A4/en
Application granted granted Critical
Publication of EP3161847B1 publication Critical patent/EP3161847B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H2239/00—Miscellaneous
    • H01H2239/004—High frequency adaptation or shielding
EP15810992.6A 2014-06-25 2015-06-23 Integrated micro-electromechanical switches and a related method thereof Active EP3161847B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/314,344 US9117610B2 (en) 2011-11-30 2014-06-25 Integrated micro-electromechanical switches and a related method thereof
PCT/US2015/037155 WO2015200307A2 (en) 2014-06-25 2015-06-23 Integrated micro-electromechanical switches and a related method thereof

Publications (3)

Publication Number Publication Date
EP3161847A2 EP3161847A2 (en) 2017-05-03
EP3161847A4 true EP3161847A4 (en) 2018-01-31
EP3161847B1 EP3161847B1 (en) 2023-05-31

Family

ID=54938927

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15810992.6A Active EP3161847B1 (en) 2014-06-25 2015-06-23 Integrated micro-electromechanical switches and a related method thereof

Country Status (6)

Country Link
EP (1) EP3161847B1 (en)
JP (1) JP6781048B2 (en)
CN (1) CN106415772B (en)
CA (1) CA2952661C (en)
SG (1) SG11201610176YA (en)
WO (1) WO2015200307A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114758928A (en) * 2017-07-24 2022-07-15 中北大学 Straight plate type practical radio frequency MEMS switch
CN107393767A (en) * 2017-07-24 2017-11-24 中北大学 A kind of T-shaped double cantilever beam formula single-pole double-throw switch (SPDT)
CN107424875B (en) * 2017-07-24 2020-06-09 中北大学 Cross single-pole triple-throw switch
EP3815123A1 (en) * 2018-06-28 2021-05-05 Menlo Microsystems, Inc. Switch self-actuation mitigation using a tracking signal
CN111064456B (en) * 2019-12-04 2023-08-29 维沃移动通信有限公司 Radio frequency switch and electronic equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120249261A1 (en) * 2011-03-31 2012-10-04 General Electric Company Systems and methods for enhancing reliability of mems devices
US20130134018A1 (en) * 2011-11-30 2013-05-30 General Electric Company Micro-electromechanical switch and a related method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037719A (en) * 1998-04-09 2000-03-14 Hughes Electronics Corporation Matrix-addressed display having micromachined electromechanical switches
EP1426992A3 (en) * 2002-12-05 2005-11-30 Omron Corporation Electrostatic mems switch
JP4182861B2 (en) * 2002-12-05 2008-11-19 オムロン株式会社 Contact switch and device with contact switch
KR100661347B1 (en) 2004-10-27 2006-12-27 삼성전자주식회사 Micro thin film structure, micro electro mechanical system switch using the same and manufacturing method of them
US8610519B2 (en) 2007-12-20 2013-12-17 General Electric Company MEMS microswitch having a dual actuator and shared gate
US8749237B2 (en) 2011-01-11 2014-06-10 General Electric Company Optically controlled MEMS switch and method of using the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120249261A1 (en) * 2011-03-31 2012-10-04 General Electric Company Systems and methods for enhancing reliability of mems devices
US20130134018A1 (en) * 2011-11-30 2013-05-30 General Electric Company Micro-electromechanical switch and a related method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2015200307A2 *

Also Published As

Publication number Publication date
EP3161847A2 (en) 2017-05-03
EP3161847B1 (en) 2023-05-31
JP2017527949A (en) 2017-09-21
WO2015200307A3 (en) 2016-02-25
CA2952661C (en) 2023-01-17
CA2952661A1 (en) 2015-12-30
WO2015200307A2 (en) 2015-12-30
JP6781048B2 (en) 2020-11-04
CN106415772A (en) 2017-02-15
SG11201610176YA (en) 2017-01-27
CN106415772B (en) 2019-08-13

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