WO2015199449A1 - Photosensitive resin composition for light shielding and light-shielding layer formed therefrom - Google Patents

Photosensitive resin composition for light shielding and light-shielding layer formed therefrom Download PDF

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Publication number
WO2015199449A1
WO2015199449A1 PCT/KR2015/006454 KR2015006454W WO2015199449A1 WO 2015199449 A1 WO2015199449 A1 WO 2015199449A1 KR 2015006454 W KR2015006454 W KR 2015006454W WO 2015199449 A1 WO2015199449 A1 WO 2015199449A1
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Prior art keywords
formula
weight
silane
light
resin composition
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PCT/KR2015/006454
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French (fr)
Korean (ko)
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최정식
김태운
김학준
안정민
이건표
조용일
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주식회사 삼양사
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Priority to CN201580034918.0A priority Critical patent/CN106462071B/en
Publication of WO2015199449A1 publication Critical patent/WO2015199449A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials

Definitions

  • the present invention relates to a light-sensitive photosensitive resin composition and a light shielding layer formed therefrom. More specifically, the present invention relates to a light shielding layer comprising a photosensitive resin composition which can be used to manufacture light shielding layers used for various electronic devices using photolithography and a coating film formed by curing the composition.
  • the black matrix photosensitive resin composition is an essential material for the production of color filters included in display elements such as color filters, liquid crystal displays, organic electroluminescent devices, and display panels.
  • color filters included in display elements such as color filters, liquid crystal displays, organic electroluminescent devices, and display panels.
  • the color filter of the liquid crystal display device is used to prevent the mixing of R (red), G (green), B (blue), or in the touch panel device may be used for the bezel to cover the X, Y metal electrodes.
  • LTPS low temperature poly-silicon
  • oxide thin film transistors have been actively studied as devices for use in high-resolution driving over UD (Ultra Definition) and high speed of 240 Hz or more.
  • the light shielding layer mainly uses a metal light shielding layer because a subsequent process such as PE-CVD is performed at a high temperature after formation of the light shielding layer, but the metal light shielding layer has high reflectivity and light is reflected between the source, drain electrode, and the light shielding layer.
  • the parasitic voltage is generated between the source and drain electrodes to act as an element that resists the operation of the device and increases the load of the data line.
  • the OGS (One Glass Solution) method for forming a touch panel on the cover glass has been studied in a manner in which a conventional cover glass and a touch panel glass are bonded together for thinning of a product.
  • the first shading layer (bezel) formed on the cover glass is first formed, and then the touch panel driver is formed.
  • a high deposition or annealing process is required in the process of forming the transparent electrode of the touch panel driver.
  • the black matrix photosensitive resin used in the conventional light shielding layer has a problem in that electrical properties are degraded at such a high temperature process.
  • an object of the present invention is to provide a light-sensitive photosensitive resin composition such that even at high process temperatures, desired electrical properties such as resistance and dielectric constant, optical properties such as optical density and reflectivity can be obtained. .
  • a siloxane resin comprising a polymerized unit represented by the following formula (1) and a polymerized unit represented by the following formula (2);
  • B pigments;
  • C photoinitiator;
  • D there is provided a photosensitive resin composition comprising an organic solvent:
  • R 1 is a linear or branched alkylene group having 1 to 20 carbon atoms, an arylene group having 6 to 20 carbon atoms, an alkylene group having 7 to 20 carbon atoms substituted with an aryl group, and an arylene group having 7 to 20 carbon atoms substituted with an alkyl group. Or a group having 7 to 20 carbon atoms, in which an alkylene group and an arylene group are connected;
  • X is hydroxy, carboxylic acid, carboxylic anhydride, carboxylic anhydride derivative, imide, imide derivative, amide, amide derivative, amine or mercanto,
  • Each R 2 is independently hydrogen, a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 10 carbon atoms, an unsaturated hydrocarbon group having 2 to 10 carbon atoms, or an acyloxy group having 2 to 10 carbon atoms, A plurality of R 2 in the molecule is the same or different from each other,
  • the siloxane resin may be composed of 5 to 40 mol% of the polymerized units of Formula 1 and 95 to 60 mol% of the polymerized units of Formula 2 based on 100 mol% of the polymerized units of Formula 1 and the polymerized units of Formula 2.
  • the siloxane resin may have an acid value in the range of 10 to 200 mgKOH / g resin when titrating KOH.
  • the photosensitive resin composition may further include a polyfunctional monomer having an (E) unsaturated bond.
  • the pigment may be a black pigment.
  • the pigment may be one or a mixture of two or more selected from the group consisting of carbon black, titanium black, aniline black, perylene black, strontium titanate, chromium oxide and ceria.
  • the pigment may be included in an amount of 20 to 130 parts by weight based on 100 parts by weight of the siloxane resin or 100 parts by weight of the polyfunctional monomer having an unsaturated bond when the polyfunctional monomer having an unsaturated bond is used. Can be.
  • the photopolymerization initiator may be used in an amount of 1 to 30 parts by weight based on 100 parts by weight of siloxane resin or 100 parts by weight of the siloxane resin and the polyfunctional monomer having an unsaturated bond when the polyfunctional monomer having an unsaturated bond is used. May be included.
  • the polyfunctional monomer having the unsaturated bond may be included in an amount of more than 0 parts by weight and 100 parts by weight or less based on 100 parts by weight of the siloxane resin.
  • the organic solvent may be included in an amount of 20 to 90 parts by weight based on 100 parts by weight of the total photosensitive resin composition.
  • the light shielding layer containing the coating film formed from the photosensitive resin composition mentioned above is provided.
  • the light blocking layer may have an optical density in the range of 1.0 to 4.0 per unit ⁇ m.
  • (S1) applying a light-sensitive photosensitive resin composition corresponding to an aspect of the present invention to a substrate; (S2) removing the solvent in the composition to form a coating film; (S3) exposing and developing the coating film to form a coating film; And (S4) there is provided a method for manufacturing a light shielding layer coating film comprising the step of heat-treating the coating film at a temperature of 200 °C or more less than 300 °C.
  • step (S5) may further comprise the step of heat-treating the coating film at a temperature of 300 °C to 600 °C.
  • the pattern formation is possible by developing in aqueous alkali solution after exposure, and the shape of the pattern formed after the high temperature process of 300 degreeC or more after pattern formation is maintained.
  • the coating film formed by curing the light-sensitive photosensitive resin composition has electrical insulation properties of sheet resistance of 1.0E + 10 or more and dielectric constant of 45 or less, and has an optical density of 1.0 or more, preferably 1.0 to 4.0, per unit ⁇ m. Since lightness is maintained, it can be used as a light shielding film.
  • the photosensitive resin composition which concerns on one aspect of this invention is (A) the siloxane resin containing the polymerization unit represented by following formula (1) and the polymerization unit represented by following formula (2); (B) pigments; (C) photoinitiator; And (D) an organic solvent, and if necessary, (E) may further include a polyfunctional monomer having an unsaturated bond:
  • R 1 is a linear or branched alkylene group having 1 to 20 carbon atoms, an arylene group having 6 to 20 carbon atoms, an alkylene group having 7 to 20 carbon atoms substituted with an aryl group, and an arylene group having 7 to 20 carbon atoms substituted with an alkyl group. Or a group having 7 to 20 carbon atoms, in which an alkylene group and an arylene group are connected;
  • X is hydroxy, carboxylic acid, carboxylic anhydride, carboxylic anhydride derivative, imide, imide derivative, amide, amide derivative, amine or mercanto,
  • Each R 2 is independently hydrogen, a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 10 carbon atoms, an unsaturated hydrocarbon group having 2 to 10 carbon atoms, or an acyloxy group having 2 to 10 carbon atoms, A plurality of R 2 in the molecule is the same or different from each other,
  • linear alkylene group having 1 to 20 carbon atoms examples include hydrocarbon groups such as methylene group, ethylene group, propylene group, butylene group, and pentylene group.
  • branched alkylene group examples include isopropylene group and isobutylene group. I can lift it.
  • n and n may be each independently an integer of 1 to 20.
  • a methyl group, an ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, n-pentyl group, etc. are mentioned independently from each other, a C1-C20 aliphatic alkyl group, Specific examples of the cyclic aliphatic alkyl group include cyclopentyl group, cyclohexyl group, norbornyl group, adamantyl group, and the like.
  • acyloxy group having 2 to 10 carbon atoms include acryloxy methyl, acryloxy ethyl, acryloxy propyl, acryloxy butyl, methacryloxy methyl, methacryloxy ethyl, methacryloxy propyl, methacryloxy butyl and the like.
  • aryl group having 6 to 10 carbon atoms include phenyl group, naphthyl group, anthracenyl group, phenanthrenyl group, and pyrenyl group.
  • Examples of the monomer forming the polymerized unit represented by the formula (2) include tetraalkoxy silane, trialkoxy silane, methyl trialkoxy silane, ethyl trialkoxy silane, n-propyl trialkoxy silane, isopropyl trialkoxy silane, n-butyl Trialkoxy silane, tert-butyl trialkoxy silane, phenyl trialkoxy silane, naphtha trialkoxy silane, vinyl trialkoxy silane, methacryloxymethyl trialkoxy silane, 2-methacryloxyethyl trialkoxy silane, 3-methacryloxypropyl Trialkoxy silane, 3-methacryloxypropyl methyl dialkoxy silane, 3-methacryloxypropyl ethyl dialkoxy silane, acryloxymethyl trialkoxy silane, 2-acryloxyethyl trialkoxy silane, 3-acryloxypropyl trialkoxy silane , 3-acryloxypropyl methyl dialkoxy silane, 3-
  • At least one of the polymerized units represented by Formula 2 is methacryloxymethyl trialkoxy silane, 2-methacryloxyethyl trialkoxy silane, 3-methacryloxypropyl trialkoxy silane, 3- Methacryloxypropyl methyl dialkoxy silane, 3-methacryloxypropyl ethyl dialkoxy silane, acryloxymethyl trialkoxy silane, 2-acryloxyethyl trialkoxy silane, 3-acryloxypropyl trialkoxy silane, 3-acryloxypropyl Methyldiakoxy silane and 3-acryloxypropyl.
  • the (A) siloxane resin may have an acid value in the range of 10 ⁇ 200 mgKOH / g resin when KOH titration.
  • the interval between the carbon particles used as the pigment can be properly maintained even after a high temperature process of more than 300 °C can express a high electrical insulation properties.
  • the acid value of the siloxane resin is preferably 10 to 200 mg [KOH] per 1g of binder resin when titrated with 0.1N KOH solution.
  • the said (B) pigment is a pigment which has light-shielding property, Preferably it is a black pigment which has light-shielding property.
  • the pigment may be carbon black, titanium black, aniline black, perylene black, strontium titanate, chromium oxide, ceria and the like, depending on the characteristics, but is not limited thereto. Carbon black is preferred.
  • the carbon black As the carbon black, the Sisto series of East Sea Carbon, the diagram series of Mitsubishi Chemical, the MA series, the PRINTEX series of Daegu, the Raven series of Columbia Chemicals, etc. can be used.
  • the particle size of the pigment is preferably adjusted to 50 to 150 nm, more preferably 50 to 80 nm.
  • the pigment having a particle size of less than 50nm is dispersed in the photosensitive resin composition, even when the same amount of pigment is used, the optical density is lowered.
  • distributing the pigment which has particle size larger than 150 nm electrical insulation characteristic and the roughness characteristic of a coating film fall.
  • the pigment is used in an amount of 20 to 130 parts by weight based on 100 parts by weight of the siloxane resin, or 100 parts by weight of the siloxane resin and the polyfunctional monomer having an unsaturated bond when the polyfunctional monomer having an unsaturated bond is used.
  • the content may be different within the above numerical range.
  • the sensitivity of the photosensitive resin composition the electrical insulating properties and roughness of the coating film is improved, but it is difficult to expect an optical density of 1.0 or more per unit thickness ( ⁇ m).
  • an optical density of 4.0 or more per unit thickness ( ⁇ m) is satisfied, but the electrical insulating property is lowered, and the sensitivity of the photosensitive resin composition is lowered.
  • the photopolymerization initiator (C) is a substance that generates radicals by light to trigger crosslinking, and non-limiting examples are selected from the group consisting of triazine compounds, acetophenone compounds, biimidazole compounds, and oxime compounds. Preference is given to using at least one compound.
  • Non-limiting examples of the triazine-based compound include 2,4-bis (trichloromethyl) -6- (4-methoxyphenyl) -1,3,5-triazine, 2,4-bis (trichloromethyl ) -6- (4-methoxynaphthyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6-piperonyl-1,3,5-triazine, 2, 4-bis (trichloromethyl) -6- [2- (5-methylfuran-2-yl) ethenyl] -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (furan-2-yl) ethenyl] -1,3,5-triazine and the like, and as the acetophenone compound, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1 -(4-isopropylphenyl) -2-hydroxy-2-methylpropan
  • biimidazole-based compound examples include 2,2-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl biimidazole, 2,2'-bis (o- Chlorophenyl) -4,4 ', 5,5'-tetraphenyl biimidazole, 2,2'-bis (o-chlorophenyl) -4,4', 5,5'-tetrakis (3,4, 5-trimethoxyphenyl) -1,2'-biimidazole, 2,2'-bis (2,3-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl biimidazole, 2, 2'-bis (o-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole.
  • oxime compounds include OXE-02 (trade name, BASF), N1919, NCI-831 (trade name, Adeca), 1,2-octadione-1- (4-phenylthio) phenyl- 2- (o-bonzoyloxime), ethanone-1- (9-ethyl) -6- (2-methylbenzoyl-3-yl) -1- (0-acetyloxime), and the like.
  • the photopolymerization initiator may be included in an amount of 1 to 30 parts by weight based on 100 parts by weight of 100 parts by weight of the siloxane resin or the polyfunctional monomer having the unsaturated bond when the polyfunctional monomer having the unsaturated bond is used.
  • the organic solvent can dissolve the components including the siloxane resin and can be used without limitation as long as it is a solvent that does not impair dispersibility of the pigment.
  • Specific examples include methyl ethyl ketone, methyl-n-propyl ketone, methyl isopropyl ketone, methyl-n-butyl ketone, methyl isobutyl ketone, methyl-n-pentyl ketone, diethyl ketone, dipropyl ketone, diiso Ketone solvents such as butyl ketone, cyclohexanone, cyclopentanone, methyl cyclohexanone, 2,4-pentanedione, acetonyl acetone, gamma-butyrolactone, and gamma-valerolactone; Methyl ethyl ether, methyl di-n-propyl ether, diisoprop
  • the content of the organic solvent may be appropriately adjusted according to the content of the siloxane resin, the pigment, the photopolymerization initiator and the polyfunctional monomer having an unsaturated bond, and the content is different depending on the method of applying the photosensitive resin composition for forming the light shielding layer to the substrate.
  • the total amount of the photosensitive resin composition may be used in an amount of 20 to 90 parts by weight of the organic solvent, but is not limited thereto.
  • the polyfunctional monomer having the above (E) unsaturated bond is a reactive unsaturated compound having at least one unsaturated polymerizable group in a molecule, and these compounds may be used alone or in combination of two or more thereof.
  • Non-limiting examples of the polyfunctional monomer having an unsaturated bond include ethylene glycol diacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, triethylene glycol dimethacrylate, 1,6-hexanediol diacryl Latex, pentaerythritol triacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, bisphenol A epoxy acrylate, ethylene glycol monomethyl ether acrylate, ethylene glycol dimethacrylate or 1,6 -Hexadiol dimethacrylate is mentioned.
  • the content of the polyfunctional monomer having an unsaturated bond is 0 to 200 parts by weight based on 100 parts by weight of the siloxane resin. If it exceeds 200 parts by weight, the compatibility with the siloxane resin and the carbon particles is lowered, it is difficult to control the pattern shape.
  • the polyfunctional monomer having an unsaturated bond may not be included in the photosensitive resin composition, but may be used for controlling the shape of the pattern, sensitivity, and the like.
  • the light-shielding photosensitive resin composition may further contain additives commonly used in the art, such as a curing accelerator, a thermal polymerization inhibitor, a plasticizer, a filler, a solvent, a leveling agent, and an antifoaming agent, as necessary.
  • additives commonly used in the art such as a curing accelerator, a thermal polymerization inhibitor, a plasticizer, a filler, a solvent, a leveling agent, and an antifoaming agent, as necessary.
  • the thermal polymerization inhibitor include hydroquinone, hydroquinone monomethyl ether, pyrogarol, tert-butylcatechol, phenodiazine, and the like
  • a plasticizer includes dibutyl phthalate, dioctylphthalate, and tricresyl.
  • the filler include glass fiber, silica, mica, alumina, and the like
  • examples of the antifoaming agent and leveling agent include silicone, fluorine and acryl compounds.
  • (S1) applying a light-sensitive photosensitive resin composition according to the invention on a substrate; (S2) removing the solvent in the composition to form a coating film; (S3) exposing and developing the coating film to form a coating film; And (S4) heat treating the coating film at a temperature of 200 ° C. or higher and less than 300 ° C.
  • (S5) may further comprise the step of heat-treating the coating film at a temperature of 300 °C to 600 °C.
  • a contact transfer type coating device such as a roll coater, a reverse coater, a bar coater or a spinner on a glass substrate having a clean surface having a thickness of 0.5 to 1.1 mm It can apply
  • a silane coupling agent may be blended or applied to the substrate.
  • the coating film thickness can be adjusted in the range of 0.5 to 5 ⁇ m.
  • active energy rays such as ultraviolet rays and excimer laser light can be exposed to a radiation energy dose of 30 to 2000 mJ / cm 2 through a negative mask.
  • the irradiation energy dose may be different depending on the kind of light-sensitive photosensitive composition to be used.
  • the coated film obtained by exposure is developed using the developing solution by the immersion method, the spray method, etc., and a black matrix pattern is formed.
  • a developing solution used for image development it is organic type, such as monoethanolamine, diethanolamine, and triethanolamine, and aqueous solution, such as sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia, a quaternary ammonium salt, is mentioned.
  • (S4) may further comprise the step of heat-treating the coating film at a temperature of 200 °C or less than 300 °C, after the (S4) step, (S5) the coating film
  • the heat treatment may further include the step of heat treatment at a temperature of 300 ° C or more and 600 ° C or less.
  • Heat treatment in (S4) may be carried out for 5 to 60 minutes at a temperature of 200 °C or less than 300 °C, the heat treatment method at this time may use a conventional oven or the like, is not particularly limited.
  • the heat treatment in (S5) may be carried out for 5 to 60 minutes at a temperature of 300 ° C or more and 600 ° C or less
  • the heat treatment method may be a conventional method in the art, such as an oven, etc., is not particularly limited. .
  • the electric insulation property is reduced, and the electric insulation property is further reduced by the additional heat treatment at 300 ° C. or higher. .
  • the light shielding layer (black matrix) obtained by the above manufacturing method is useful for various display devices such as a liquid crystal panel and a plasma display panel.
  • the reaction temperature was raised to 85 ° C., and the reaction proceeded at the elevated temperature for 6 hours.
  • ether and water were added for extraction, the organic phase was recovered, and residual alcohol and solvent were evaporated to remove 657 g of siloxane resin.
  • the obtained siloxane resin is dissolved in 657 g of propylene glycol monomethyl ether acetate.
  • the weight average molecular weight of the siloxane resin was 4,800.
  • the reaction temperature was raised to 85 ° C., and the reaction proceeded at the elevated temperature for 6 hours.
  • ether and water were added for extraction, the organic phase was recovered, and residual alcohol and solvent were evaporated to remove 608 g of siloxane resin.
  • the obtained siloxane resin is dissolved in 608 g of propylene glycol monomethyl ether acetate.
  • the weight average molecular weight of the siloxane resin was 4,200.
  • siloxane resin is dissolved in 560 g of propylene glycol monomethyl ether acetate.
  • the weight average molecular weight of the siloxane resin was 3,800.
  • Alkali-soluble siloxane resin used in Example 5 relative to 100 parts by weight of the total resin composition (siloxane resin synthesized in Synthesis Example 2, phenyl / methyl / methacryl / propionic acid 30/30/20/20, Mw 3600, acid value 42 mg [ KOH] / g [resin]) 6 parts by weight, 6 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, 3.6 parts by weight of carbon black (100 nm particle size) (20% carbon black dispersion) 18 parts by weight in terms of dispersion of carbon black), ethanone-1- [9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] 1 part by weight of -1- (o-acetyloxime) (OXE-02, BASF) and 69 parts by weight of propylene glycol monomethyl ether
  • Alkali-soluble siloxane resin used in Example 5 relative to 100 parts by weight of the total resin composition (siloxane resin synthesized in Synthesis Example 2, phenyl / methyl / methacryl / propionic acid 30/30/20/20, Mw 3600, acid value 42 mg [ KOH] / g [resin]) 4 parts by weight, 4 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, 9.4 parts by weight of carbon black (100 nm particle size) (20% carbon black dispersion form) 47 parts by weight in terms of dispersion of carbon black), ethanone-1- [9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] 1 part by weight of -1- (o-acetyloxime) (OXE-02, BASF) and 44 parts by weight of propylene glycol monomethyl ether
  • Alkaline soluble cardo resin (Mw 5000, acid value 80 mg [KOH] / g [resin], Adeka) to 100 parts by weight of the total resin composition 4 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond Parts by weight, carbon black (100 nm particle size) 9.4 parts by weight (used in the form of a dispersion of carbon black 20%.
  • the sheet resistance of the formed coating film was measured using a Keithley high resistance measuring instrument.
  • a coating film was formed on a glass substrate coated with ITO as a lower electrode, and an upper electrode was formed through aluminum deposition.
  • the dielectric constant was measured using Agilent's 4284 LCR meter.
  • the optical density O.D was measured using 361T of X-rite.
  • Pinhole measurement of the formed coating film was measured using an optical microscope to determine the number of 10cm x 10cm glass substrate.
  • the case where the number of pinholes is 0 to 10 is indicated by ⁇
  • the final cured specimen was scratched to expose the substrate with a crosshatch cutter and then removed by attaching a 3M adhesive tape.
  • the area of the removed area is then 0B if it exceeds 65% of the total test surface, 1B for 35-65%, 2B for 15-35%, 3B for 5-15%, 4B for less than 5%, 5B if no area was removed.
  • Example 1 Example 2
  • Example 3 Example 4
  • Example 5 bookbinder Synthesis Example 1 12 parts by weight of siloxane resin Synthesis Example 1 10 parts by weight of siloxane resin Synthesis Example 1 9 parts by weight of siloxane resin Synthesis Example 1 8 parts by weight of siloxane resin Synthesis Example 2 10 parts by weight of siloxane resin Unsaturated polyfunctional monomer - - - - 2 parts by weight Carbon Black Dispersion (20%, 100nm) 18 parts by weight 30 parts by weight 40 parts by weight 47 parts by weight 18 parts by weight Photopolymerization Initiator OXE-02 1 part by weight Organic solvent 69 parts by weight 59 parts by weight 50 parts by weight 44 parts by weight 69 parts by weight After heat treatment at 230 °C Sheet resistance ( ⁇ / ⁇ ) 3.23E + 17 5.6E + 17 4.3E + 17 8.7E + 16 8.2E + 16 permittivity 6.52 13.94 18.27 20.15 7.21 Optical Density (OD / ⁇ m) 1.
  • Examples 5 to 8 relates to a resin composition comprising dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, and the lower the content of the siloxane resin as the content of the siloxane resin increases in the coating films prepared from Examples 5 to 8, respectively. It can be seen that the dielectric constant exhibits excellent electrical insulation.
  • Examples 5 and 8 were compared with Examples 1 and 4, Examples 5 and 8 replaced some of the siloxane resin contents in the resin compositions of Examples 1 and 4 with polyfunctional monomers having an unsaturated bond. It can be seen that the coating films formed from the examples 5 and 8 replaced in this way have an inferior electrical insulating effect than the coating films formed from the examples 1 and 4.
  • the coating film prepared from the resin composition of Comparative Example 1 using the cardo-based resin showed a significantly higher dielectric constant than the coating film prepared from the resin compositions of Examples 1 to 8, and appeared to have very inferior electrical insulating properties.
  • the coating film prepared in the present invention is excellent in electrical insulation, optical properties, adhesion, pattern resolution, sensitivity, etc. of the coating film even after a high temperature process of 380 °C is required to produce a high temperature
  • the light shielding layer including the coating layer may also exhibit excellent electrical insulation, optical characteristics, pattern resolution, and sensitivity as described above.

Abstract

The present invention relates to a photosensitive resin composition for light shielding, and a light-shielding layer formed using the same. The photosensitive resin composition for light shielding contains (A) a siloxane resin, (B) a pigment, (C) a photopolymerization initiator, and (D) an organic solvent, and optionally may further contain (E) a multi-functional monomer having an unsaturated bond. A coating film for a light shielding layer, formed of the photosensitive resin composition for light shielding, is characterized in that the coating film has excellent electrical characteristics, excellent adhesive strength with a substrate, and no deterioration in optical density, even after a high-temperature process at 300°C or higher.

Description

차광용 감광성 수지 조성물 및 이로부터 형성된 차광층Light-sensitive photosensitive resin composition and light-shielding layer formed therefrom
본 발명은 차광용 감광성 수지 조성물 및 이로부터 형성된 차광층에 관한 것이다. 보다 상세하게는, 각종 전자소자에 사용되는 차광층을 포토리소그래피법을 사용하여 제조하는데 사용될 수 있는 감광성 수지 조성물 및 상기 조성물을 경화하여 형성되는 도막을 포함하여 이루어진 차광층에 관한 것이다.The present invention relates to a light-sensitive photosensitive resin composition and a light shielding layer formed therefrom. More specifically, the present invention relates to a light shielding layer comprising a photosensitive resin composition which can be used to manufacture light shielding layers used for various electronic devices using photolithography and a coating film formed by curing the composition.
본 출원은 2014년 6월 27일에 출원된 한국특허출원 제10-2014-0079876호에 기초한 우선권을 주장하며, 해당 출원의 명세서에 개시된 모든 내용은 본 출원에 원용된다.This application claims priority based on Korean Patent Application No. 10-2014-0079876 filed on June 27, 2014, and all the contents disclosed in the specification of the application are incorporated in this application.
액정 표시장치 등의 평면 표시장치나 터치스크린 장치 등 전자제품의 제조 기술이 발전하면서 제품의 소형화, 박형화가 요구되고 있는 실정이다. 제품의 소형화, 박형화를 위해서는 제품 내부 소자의 집적도는 필수적으로 증가하게 되고, 이에 따라 소자제조에 사용되는 재료들의 전기적 성능 향상이 더욱 요구되고 있다.As the manufacturing technology of electronic products such as flat panel display devices such as liquid crystal display devices and touch screen devices is developed, miniaturization and thinning of products are required. In order to miniaturize and thin a product, the degree of integration of the internal device of the product is essentially increased, and accordingly, the electrical performance of materials used for manufacturing the device is required to be further improved.
일반적으로 블랙 매트릭스 감광성 수지 조성물은 컬러필터, 액정 표시장치, 유기 전계 발광 소자, 디스플레이 패널 등의 표시 소자에 포함되는 컬러 필터의 제조에 필수적인 재료이다. 액정표시장치의 컬러필터에는 R(적색), G(녹색), B(청색) 간의 혼색을 방지하기 위하여 사용이 되거나, 터치패널장치에서는 X, Y 금속 전극을 가리기 위한 베젤용으로 사용되기도 한다.In general, the black matrix photosensitive resin composition is an essential material for the production of color filters included in display elements such as color filters, liquid crystal displays, organic electroluminescent devices, and display panels. In the color filter of the liquid crystal display device is used to prevent the mixing of R (red), G (green), B (blue), or in the touch panel device may be used for the bezel to cover the X, Y metal electrodes.
디스플레이용 액정표시 장치에서는 최근 UD(Ultra Definition) 이상의 고해상도 및 240Hz이상의 고속구동에 사용하기 위한 소자로 LTPS(Low Temperature Poly-Silicon)과 산화물 박막 트랜지스터가 활발히 연구되고 있다.In display liquid crystal display devices, low temperature poly-silicon (LTPS) and oxide thin film transistors have been actively studied as devices for use in high-resolution driving over UD (Ultra Definition) and high speed of 240 Hz or more.
일반적으로 산화물 박막 트랜지스터는 광에 의해 반도체의 성질이 변하기 때문에 차광층을 도입하여 전술한 문제점을 최소화한다. 상기 차광층은 차광층 형성후 PE-CVD 등 후속공정이 고온에서 진행되기 때문에 주로 금속 차광층을 사용하고 있으나, 금속 차광층은 반사도가 높아 소스, 드래인 전극과 차광층 사이로 광이 반사되어 들어오게 되고 소스, 드래인 전극 사이에 기생 전압이 발생하여 소자의 동작에 저항을 가하는 요소로 동작하게 되고 데이터 라인의 부하가 증가하게 되는 문제점이 있다.In general, since the oxide thin film transistor changes the properties of the semiconductor by light, the above-described problem is minimized by introducing a light blocking layer. The light shielding layer mainly uses a metal light shielding layer because a subsequent process such as PE-CVD is performed at a high temperature after formation of the light shielding layer, but the metal light shielding layer has high reflectivity and light is reflected between the source, drain electrode, and the light shielding layer. There is a problem that the parasitic voltage is generated between the source and drain electrodes to act as an element that resists the operation of the device and increases the load of the data line.
또한 터치패널 장치에서는 제품의 박형화를 위하여 종래의 커버글라스와 터치패널글라스를 합착하던 방식에서 커버글라스에 터치패널을 형성하는 OGS(One Glass Solution)방식이 연구되고 있다. OGS방식의 터치패널은 커버글라스에 형성하던 차광층(bezel)이 가장 첫 번째로 형성되고 이후 터치패널 구동부가 형성된다. 터치패널 구동부의 투명전극 형성과정에서 높은 증착 또는 어닐링 공정이 필요한데 종래의 차광층에 사용되는 블랙매트릭스 감광성 수지는 이러한 고온공정에서 전기적 특성이 저하되는 문제점이 있다.In addition, in the touch panel device, the OGS (One Glass Solution) method for forming a touch panel on the cover glass has been studied in a manner in which a conventional cover glass and a touch panel glass are bonded together for thinning of a product. In the OGS type touch panel, the first shading layer (bezel) formed on the cover glass is first formed, and then the touch panel driver is formed. A high deposition or annealing process is required in the process of forming the transparent electrode of the touch panel driver. However, the black matrix photosensitive resin used in the conventional light shielding layer has a problem in that electrical properties are degraded at such a high temperature process.
따라서 본 발명이 해결하고자 하는 과제는, 높은 공정온도에서도 목적하는 저항 및 유전율 등의 전기적 특성, 광차폐율(Optical density) 및 반사도 등의 광학적 특성이 수득되도록 하는 차광용 감광성 수지 조성물을 제공하는 것이다.Accordingly, an object of the present invention is to provide a light-sensitive photosensitive resin composition such that even at high process temperatures, desired electrical properties such as resistance and dielectric constant, optical properties such as optical density and reflectivity can be obtained. .
전술한 과제를 해결하기 위하여, 본 발명의 일 양태에서는, (A) 하기 화학식 1로 표시되는 중합단위 및 하기 화학식 2로 표시되는 중합단위를 포함하는 실록산 수지; (B) 안료; (C) 광중합 개시제; 및 (D) 유기용매를 포함하는 감광성 수지 조성물이 제공된다:In order to solve the above problems, in one aspect of the present invention, (A) a siloxane resin comprising a polymerized unit represented by the following formula (1) and a polymerized unit represented by the following formula (2); (B) pigments; (C) photoinitiator; And (D) there is provided a photosensitive resin composition comprising an organic solvent:
화학식 1
Figure PCTKR2015006454-appb-C000001
Formula 1
Figure PCTKR2015006454-appb-C000001
상기 화학식 1에서,In Chemical Formula 1,
R1은 탄소수 1 내지 20의 직쇄상 또는 분지상의 알킬렌기, 탄소수 6 내지 20의 아릴렌기, 아릴기로 치환된 전체 탄소수 7 내지 20의 알킬렌기, 알킬기로 치환된 전체 탄소수 7 내지 20의 아릴렌기, 또는 알킬렌기와 아릴렌기가 연결된 전체 탄소수 7 내지 20의 기이고,R 1 is a linear or branched alkylene group having 1 to 20 carbon atoms, an arylene group having 6 to 20 carbon atoms, an alkylene group having 7 to 20 carbon atoms substituted with an aryl group, and an arylene group having 7 to 20 carbon atoms substituted with an alkyl group. Or a group having 7 to 20 carbon atoms, in which an alkylene group and an arylene group are connected;
X는 하이드록시, 카르복실산, 카르복실산 무수물, 카르복실산 무수물 유도체, 이미드, 이미드 유도체, 아마이드, 아마이드 유도체, 아민 또는 머켑토이며,X is hydroxy, carboxylic acid, carboxylic anhydride, carboxylic anhydride derivative, imide, imide derivative, amide, amide derivative, amine or mercanto,
화학식 2
Figure PCTKR2015006454-appb-C000002
Formula 2
Figure PCTKR2015006454-appb-C000002
상기 화학식 2에서,In Chemical Formula 2,
R2는 각각 독립적으로 수소, 탄소수 1 내지 20의 직쇄상, 분지상 또는 환상의 알킬기, 탄소수 6 내지 10의 아릴기, 탄소수 2 내지 10의 불포화 탄화수소기 또는 탄소수 2 내지 10의 아실옥시기이고, 분자내 복수의 R2는 서로 동일하거나 다르며,Each R 2 is independently hydrogen, a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 10 carbon atoms, an unsaturated hydrocarbon group having 2 to 10 carbon atoms, or an acyloxy group having 2 to 10 carbon atoms, A plurality of R 2 in the molecule is the same or different from each other,
n은 0 내지 3인 정수이며, n=3인 중합단위는 n이 3이 아닌 다른 중합단위와 병용될 수 있다.n is an integer of 0 to 3, and a polymer unit having n = 3 may be used in combination with another polymer unit in which n is not 3.
상기 실록산 수지는 화학식 1의 중합단위와 화학식 2의 중합단위를 합한 100몰% 기준으로 화학식 1의 중합단위 5 내지 40몰%와 화학식 2의 중합단위 95 내지 60몰%로 구성될 수 있다.The siloxane resin may be composed of 5 to 40 mol% of the polymerized units of Formula 1 and 95 to 60 mol% of the polymerized units of Formula 2 based on 100 mol% of the polymerized units of Formula 1 and the polymerized units of Formula 2.
상기 실록산 수지는 KOH 적정시 10 ~ 200 mgKOH/g수지 범위의 산가를 가질 수 있다.The siloxane resin may have an acid value in the range of 10 to 200 mgKOH / g resin when titrating KOH.
상기 감광성 수지 조성물은 (E) 불포화 결합을 가진 다관능성 모노머를 더 포함할 수 있다.The photosensitive resin composition may further include a polyfunctional monomer having an (E) unsaturated bond.
또한, 상기 안료는 흑색 안료일 수 있다.In addition, the pigment may be a black pigment.
또한, 상기 안료는 카본블랙, 티탄블랙, 아닐린블랙, 퍼릴렌 블랙, 티탄산 스트론튬, 산화 크롬 및 세리아로 이루어진 군으로부터 선택된 1종 또는 2종 이상의 혼합물일 수 있다.In addition, the pigment may be one or a mixture of two or more selected from the group consisting of carbon black, titanium black, aniline black, perylene black, strontium titanate, chromium oxide and ceria.
또한, 상기 안료는 실록산 수지 100 중량부 또는 불포화 결합을 가진 다관능성 모노머가 사용되는 경우에는 실록산 수지와 불포화 결합을 가진 다관능성 모노머를 합한 100 중량부를 기준으로 할 때 20 내지 130 중량부의 양으로 포함될 수 있다.In addition, the pigment may be included in an amount of 20 to 130 parts by weight based on 100 parts by weight of the siloxane resin or 100 parts by weight of the polyfunctional monomer having an unsaturated bond when the polyfunctional monomer having an unsaturated bond is used. Can be.
또한, 상기 광중합 개시제는 실록산 수지 100 중량부 또는 불포화 결합을 가진 다관능성 모노머가 사용되는 경우에는 실록산 수지와 불포화 결합을 가진 다관능성 모노머를 합한 100 중량부를 기준으로 할 때 1 ~ 30 중량부의 양으로 포함될 수 있다.The photopolymerization initiator may be used in an amount of 1 to 30 parts by weight based on 100 parts by weight of siloxane resin or 100 parts by weight of the siloxane resin and the polyfunctional monomer having an unsaturated bond when the polyfunctional monomer having an unsaturated bond is used. May be included.
상기 불포화 결합을 가진 다관능성 모노머가 사용되는 경우, 다관능성 모노머는 실록산 수지 100 중량부에 대하여 0 중량부보다 많고 100 중량부 이하인 양으로 포함될 수 있다.When the polyfunctional monomer having the unsaturated bond is used, the polyfunctional monomer may be included in an amount of more than 0 parts by weight and 100 parts by weight or less based on 100 parts by weight of the siloxane resin.
상기 유기용매는 감광성 수지 조성물 전체 100 중량부에 대하여, 20 ~ 90 중량부의 양으로 포함될 수 있다.The organic solvent may be included in an amount of 20 to 90 parts by weight based on 100 parts by weight of the total photosensitive resin composition.
본 발명의 다른 양태에 따르면, 전술한 감광성 수지 조성물로부터 형성된 도막을 포함하는 차광층이 제공된다.According to the other aspect of this invention, the light shielding layer containing the coating film formed from the photosensitive resin composition mentioned above is provided.
상기 차광층은 단위μm 당 1.0 내지 4.0 범위의 광학 밀도를 가질 수 있다.The light blocking layer may have an optical density in the range of 1.0 to 4.0 per unit μm.
본 발명의 또 다른 양태에 따르면, (S1) 본 발명의 일 양태에 해당하는 차광용 감광성 수지 조성물을 기판에 도포하는 단계; (S2) 상기 조성물 중의 용매를 제거하여 도포막을 형성하는 단계; (S3) 상기 도포막을 노광하고 현상하여 도막을 형성하는 단계; 및 (S4) 상기 도막을 200℃ 이상 300 ℃ 미만의 온도에서 열처리하는 단계를 포함하는 차광층용 도막의 제조방법이 제공된다.According to another aspect of the invention, (S1) applying a light-sensitive photosensitive resin composition corresponding to an aspect of the present invention to a substrate; (S2) removing the solvent in the composition to form a coating film; (S3) exposing and developing the coating film to form a coating film; And (S4) there is provided a method for manufacturing a light shielding layer coating film comprising the step of heat-treating the coating film at a temperature of 200 ℃ or more less than 300 ℃.
또한, 상기 (S4) 단계 이후에, (S5) 상기 도막을 300℃ 이상 600 ℃ 이하의 온도에서 열처리하는 단계를 더 포함할 수 있다.In addition, after the step (S4), (S5) may further comprise the step of heat-treating the coating film at a temperature of 300 ℃ to 600 ℃.
본 발명의 일 양태에 따른 차광용 감광성 수지 조성물에 따르면, 노광 후 알칼리 수용액에 수계현상하여 패턴 형성이 가능하고, 패턴 형성 후, 300℃ 이상의 고온 공정 후에도 형성된 패턴의 형상이 유지된다.According to the light-sensitive photosensitive resin composition which concerns on one aspect of this invention, the pattern formation is possible by developing in aqueous alkali solution after exposure, and the shape of the pattern formed after the high temperature process of 300 degreeC or more after pattern formation is maintained.
또한, 상기 차광용 감광성 수지 조성물을 경화하여 형성된 도막은 면저항 1.0E+10이상, 유전율 45 이하의 전기절연 특성을 지니며, 광학밀도가 단위μm 당 1.0 이상, 바람직하게는 1.0 내지 4.0 범위의 차광성을 유지하므로, 차광막으로 이용될 수 있다. In addition, the coating film formed by curing the light-sensitive photosensitive resin composition has electrical insulation properties of sheet resistance of 1.0E + 10 or more and dielectric constant of 45 or less, and has an optical density of 1.0 or more, preferably 1.0 to 4.0, per unit μm. Since lightness is maintained, it can be used as a light shielding film.
이하, 본 발명을 상세히 설명하기로 한다. 본 명세서 및 청구범위에 사용된 용어나 단어는 통상적이거나 사전적인 의미로 한정해서 해석되어서는 아니 되며, 발명자는 그 자신의 발명을 가장 최선의 방법으로 설명하기 위해 용어의 개념을 적절하게 정의할 수 있다는 원칙에 입각하여 본 발명의 기술적 사상에 부합하는 의미와 개념으로 해석되어야만 한다.Hereinafter, the present invention will be described in detail. The terms or words used in this specification and claims are not to be construed as limiting in their usual or dictionary meanings, and the inventors may appropriately define the concept of terms in order to best explain their invention in the best way possible. It should be interpreted as meaning and concept corresponding to the technical idea of the present invention based on the principle that the present invention.
본 발명의 일 양태에 따른 감광성 수지 조성물은, (A) 하기 화학식 1로 표시되는 중합단위 및 하기 화학식 2로 표시되는 중합단위를 포함하는 실록산 수지; (B) 안료; (C) 광중합 개시제; 및 (D) 유기용매를 포함하며, 필요에 따라, (E) 불포화 결합을 갖는 다관능 모노머를 더 포함할 수 있다:The photosensitive resin composition which concerns on one aspect of this invention is (A) the siloxane resin containing the polymerization unit represented by following formula (1) and the polymerization unit represented by following formula (2); (B) pigments; (C) photoinitiator; And (D) an organic solvent, and if necessary, (E) may further include a polyfunctional monomer having an unsaturated bond:
[화학식 1][Formula 1]
Figure PCTKR2015006454-appb-I000001
Figure PCTKR2015006454-appb-I000001
상기 화학식 1에서,In Chemical Formula 1,
R1 은 탄소수 1 내지 20의 직쇄상 또는 분지상의 알킬렌기, 탄소수 6 내지 20의 아릴렌기, 아릴기로 치환된 전체 탄소수 7 내지 20의 알킬렌기, 알킬기로 치환된 전체 탄소수 7 내지 20의 아릴렌기, 또는 알킬렌기와 아릴렌기가 연결된 전체 탄소수 7 내지 20의 기이고,R 1 is a linear or branched alkylene group having 1 to 20 carbon atoms, an arylene group having 6 to 20 carbon atoms, an alkylene group having 7 to 20 carbon atoms substituted with an aryl group, and an arylene group having 7 to 20 carbon atoms substituted with an alkyl group. Or a group having 7 to 20 carbon atoms, in which an alkylene group and an arylene group are connected;
X는 하이드록시, 카르복실산, 카르복실산 무수물, 카르복실산 무수물 유도체, 이미드, 이미드 유도체, 아마이드, 아마이드 유도체, 아민 또는 머켑토이며,X is hydroxy, carboxylic acid, carboxylic anhydride, carboxylic anhydride derivative, imide, imide derivative, amide, amide derivative, amine or mercanto,
[화학식 2][Formula 2]
Figure PCTKR2015006454-appb-I000002
Figure PCTKR2015006454-appb-I000002
상기 화학식 2에서,In Chemical Formula 2,
R2는 각각 독립적으로 수소, 탄소수 1 내지 20의 직쇄상, 분지상 또는 환상의 알킬기, 탄소수 6 내지 10의 아릴기, 탄소수 2 내지 10의 불포화 탄화수소기 또는 탄소수 2 내지 10의 아실옥시기이고, 분자내 복수의 R2는 서로 동일하거나 다르며,Each R 2 is independently hydrogen, a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 10 carbon atoms, an unsaturated hydrocarbon group having 2 to 10 carbon atoms, or an acyloxy group having 2 to 10 carbon atoms, A plurality of R 2 in the molecule is the same or different from each other,
n은 0 내지 3인 정수이며, n=3인 중합단위는 n이 3이 아닌 다른 중합단위와 병용될수 있다. n is an integer of 0 to 3, and a polymer unit having n = 3 may be used in combination with another polymer unit in which n is not 3.
상기 R1의 비제한적인 예로는,Non-limiting examples of R 1 ,
탄소수 1 내지 20의 직쇄상의 알킬렌기로서, 메틸렌기, 에틸렌기, 프로필렌기, 부틸렌기, 펜틸렌기 등의 탄화수소기를 들 수 있고, 분지상의 알킬렌기로서는, 이소프로필렌기, 이소부틸렌기 등을 들수 있다. Examples of the linear alkylene group having 1 to 20 carbon atoms include hydrocarbon groups such as methylene group, ethylene group, propylene group, butylene group, and pentylene group. Examples of the branched alkylene group include isopropylene group and isobutylene group. I can lift it.
하기에 화학식 1로 표시되는 중합단위의 구체적인 예를 표시하였으나, 이에 한정되지는 않는다.Specific examples of the polymerized unit represented by Chemical Formula 1 are shown below, but are not limited thereto.
[화학식 1a][Formula 1a]
Figure PCTKR2015006454-appb-I000003
Figure PCTKR2015006454-appb-I000003
[화학식 1b][Formula 1b]
Figure PCTKR2015006454-appb-I000004
Figure PCTKR2015006454-appb-I000004
[화학식 1c][Formula 1c]
Figure PCTKR2015006454-appb-I000005
Figure PCTKR2015006454-appb-I000005
[화학식 1d][Formula 1d]
Figure PCTKR2015006454-appb-I000006
Figure PCTKR2015006454-appb-I000006
[화학식 1e][Formula 1e]
Figure PCTKR2015006454-appb-I000007
Figure PCTKR2015006454-appb-I000007
[화학식 1f][Formula 1f]
Figure PCTKR2015006454-appb-I000008
Figure PCTKR2015006454-appb-I000008
[화학식 1g][Formula 1g]
Figure PCTKR2015006454-appb-I000009
Figure PCTKR2015006454-appb-I000009
[화학식 1h][Formula 1h]
Figure PCTKR2015006454-appb-I000010
Figure PCTKR2015006454-appb-I000010
[화학식 1i]Formula 1i]
Figure PCTKR2015006454-appb-I000011
Figure PCTKR2015006454-appb-I000011
[화학식 1j][Formula 1j]
Figure PCTKR2015006454-appb-I000012
Figure PCTKR2015006454-appb-I000012
[화학식 1k][Formula 1k]
Figure PCTKR2015006454-appb-I000013
Figure PCTKR2015006454-appb-I000013
[화학식 1l][Formula 1l]
Figure PCTKR2015006454-appb-I000014
Figure PCTKR2015006454-appb-I000014
[화학식 1m][Formula 1m]
Figure PCTKR2015006454-appb-I000015
Figure PCTKR2015006454-appb-I000015
[화학식 1n][Formula 1n]
Figure PCTKR2015006454-appb-I000016
Figure PCTKR2015006454-appb-I000016
(상기 식 각각에서, m과 n은 각각 독립적으로 1 내지 20의 정수일 수 있다.)(In each of the above formula, m and n may be each independently an integer of 1 to 20.)
상기 R2의 구체적인 예로서는, 서로 독립적으로 탄소수 1 내지 20의 지방족 알킬기로 메틸기, 에틸기, n-프로필기, 이소프로필기, n-부틸기, 이소부틸기, n-펜틸기 등을 들 수 있으며, 환상의 지방족 알킬기의 구체적인 예로서는, 시클로펜틸기, 시클로헥실기, 노르보닐기, 아다만틸기 등을 들 수 있다. 탄소수 2 내지 10인 아실옥시기의 구체적인 예로서는 아크릴록시 메틸, 아크릴록시 에틸, 아크릴록시 프로필, 아크릴록시 부틸, 메타크릴록시 메틸, 메타크릴록시 에틸, 메타크릴록시 프로필, 메타크릴록시 부틸 등을 들 수 있다. 탄소수 6 내지 10인 아릴기의 구체적인 예로서는 페닐기, 나프틸기, 안트라세닐기, 페난트레닐기, 피레닐기 등을 들 수 있다. As a specific example of said R <2> , a methyl group, an ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, n-pentyl group, etc. are mentioned independently from each other, a C1-C20 aliphatic alkyl group, Specific examples of the cyclic aliphatic alkyl group include cyclopentyl group, cyclohexyl group, norbornyl group, adamantyl group, and the like. Specific examples of the acyloxy group having 2 to 10 carbon atoms include acryloxy methyl, acryloxy ethyl, acryloxy propyl, acryloxy butyl, methacryloxy methyl, methacryloxy ethyl, methacryloxy propyl, methacryloxy butyl and the like. have. Specific examples of the aryl group having 6 to 10 carbon atoms include phenyl group, naphthyl group, anthracenyl group, phenanthrenyl group, and pyrenyl group.
화학식 2로 표시되는 중합단위를 형성시키는 단량체의 예를 들면, 테트라알콕시 실란, 트리알콕시 실란, 메틸 트리알콕시 실란, 에틸 트리알콕시 실란, n-프로필 트리알콕시 실란, 이소프로필 트리알콕시 실란, n-부틸 트리알콕시 실란, tert-부틸 트리알콕시 실란, 페닐 트리알콕시 실란, 나프타 트리알콕시 실란, 비닐 트리알콕시 실란, 메타아크릴옥시메틸 트리알콕시 실란, 2-메타아크릴옥시에틸 트리알콕시 실란, 3-메타아크릴옥시프로필 트리알콕시 실란, 3-메타아크릴옥시프로필 메틸디알콕시 실란, 3-메타아크릴옥시프로필 에틸디알콕시 실란, 아크릴옥시메틸 트리알콕시 실란, 2-아크릴옥시에틸 트리알콕시 실란, 3-아크릴옥시프로필 트리알콕시 실란, 3-아크릴옥시프로필 메틸디알콕시 실란, 3-아크릴옥시프로필 에틸디알콕시 실란, 3-글리시딜옥시프로필 트리알콕시 실란, 2-에폭시시클로헥실에틸 트리알콕시 실란, 3-에폭시시클로헥실프로필 트리알콕시 실란, 디메틸 알콕시 실란, 디에틸 디알콕시 실란, 디프로필 디알콕시 실란, 디페닐 디알콕시 실란, 디페닐 실란디올, 페닐메틸 디알콕시실란 등이 사용될 수 있으나, 이에 한정되는 것은 아니다. 여기서 알콕시는 탄소수 1 내지 7의 직쇄상, 분지상 또는 환상의 지방족 또는 방향족 알콕시이고, 가수분해가 가능한 할로겐화합물 일 수 있다. Examples of the monomer forming the polymerized unit represented by the formula (2) include tetraalkoxy silane, trialkoxy silane, methyl trialkoxy silane, ethyl trialkoxy silane, n-propyl trialkoxy silane, isopropyl trialkoxy silane, n-butyl Trialkoxy silane, tert-butyl trialkoxy silane, phenyl trialkoxy silane, naphtha trialkoxy silane, vinyl trialkoxy silane, methacryloxymethyl trialkoxy silane, 2-methacryloxyethyl trialkoxy silane, 3-methacryloxypropyl Trialkoxy silane, 3-methacryloxypropyl methyl dialkoxy silane, 3-methacryloxypropyl ethyl dialkoxy silane, acryloxymethyl trialkoxy silane, 2-acryloxyethyl trialkoxy silane, 3-acryloxypropyl trialkoxy silane , 3-acryloxypropyl methyl dialkoxy silane, 3-acryloxypropyl ethyl dialkoxy silane, 3-glycidyloxy Lopyl trialkoxy silane, 2-epoxycyclohexylethyl trialkoxy silane, 3-epoxycyclohexylpropyl trialkoxy silane, dimethyl alkoxy silane, diethyl dialkoxy silane, dipropyl dialkoxy silane, diphenyl dialkoxy silane, diphenyl silane Diols, phenylmethyl dialkoxysilanes and the like may be used, but are not limited thereto. Here, alkoxy is linear, branched or cyclic aliphatic or aromatic alkoxy having 1 to 7 carbon atoms, and may be a halogen compound capable of hydrolysis.
본 발명은 바람직하게는, 상기 화학식 2로 표시되는 중합단위는 적어도 하나 이상이 메타아크릴옥시메틸 트리알콕시 실란, 2-메타아크릴옥시에틸 트리알콕시 실란, 3-메타아크릴옥시프로필 트리알콕시 실란, 3-메타아크릴옥시프로필 메틸디알콕시 실란, 3-메타아크릴옥시프로필 에틸디알콕시 실란, 아크릴옥시메틸 트리알콕시 실란, 2-아크릴옥시에틸 트리알콕시 실란, 3-아크릴옥시프로필 트리알콕시 실란, 3-아크릴옥시프로필 메틸디알콕시 실란 및 3-아크릴옥시프로필인 것을 특징으로 한다.In the present invention, preferably, at least one of the polymerized units represented by Formula 2 is methacryloxymethyl trialkoxy silane, 2-methacryloxyethyl trialkoxy silane, 3-methacryloxypropyl trialkoxy silane, 3- Methacryloxypropyl methyl dialkoxy silane, 3-methacryloxypropyl ethyl dialkoxy silane, acryloxymethyl trialkoxy silane, 2-acryloxyethyl trialkoxy silane, 3-acryloxypropyl trialkoxy silane, 3-acryloxypropyl Methyldiakoxy silane and 3-acryloxypropyl.
상기 (A) 실록산 수지는 KOH 적정시 10 ~ 200 mgKOH/g수지 범위의 산가를 가질 수 있다.The (A) siloxane resin may have an acid value in the range of 10 ~ 200 mgKOH / g resin when KOH titration.
상기 실록산 수지를 사용하였을 때, 실록산 수지의 열적 안정성으로 인하여 300℃ 이상의 고온공정 후에도 안료로 사용되는 카본 입자간의 간격이 적절하게 유지되어 높은 전기절연특성을 발현할 수 있다. When using the siloxane resin, due to the thermal stability of the siloxane resin, the interval between the carbon particles used as the pigment can be properly maintained even after a high temperature process of more than 300 ℃ can express a high electrical insulation properties.
상기 실록산 수지의 산가는 0.1N KOH용액으로 적정시 바인더 수지 1g 당 10 내지 200 mg[KOH]가 바람직하다. The acid value of the siloxane resin is preferably 10 to 200 mg [KOH] per 1g of binder resin when titrated with 0.1N KOH solution.
상기 실록산 수지의 산가가 10 mg[KOH]/g[resin] 미만인 경우에는 감광성 수지의 현상성이 부족하여 잔막 등이 발생되고, 200 mg[KOH]/g[resin] 보다 큰 경우에는 패턴 유실 등의 문제가 발생한다. When the acid value of the siloxane resin is less than 10 mg [KOH] / g [resin], developability of the photosensitive resin is insufficient, the residual film is generated, and when larger than 200 mg [KOH] / g [resin] pattern loss, etc. Problem occurs.
상기 (B) 안료는 차광성을 갖는 안료로, 바람직하게는 차광성을 갖는 흑색 안료이다. 상기 안료의 비제한적인 예로는 카본블랙, 티탄블랙, 아닐린 블랙, 퍼릴렌 블랙, 티탄산 스트론튬, 산화크롬, 세리아 등을 그 특성에 따라 사용할 수 있으나, 이에 제한되는 것은 아니다. 카본 블랙이 바람직하다.The said (B) pigment is a pigment which has light-shielding property, Preferably it is a black pigment which has light-shielding property. Non-limiting examples of the pigment may be carbon black, titanium black, aniline black, perylene black, strontium titanate, chromium oxide, ceria and the like, depending on the characteristics, but is not limited thereto. Carbon black is preferred.
카본 블랙은, 동해카본의 시스토 시리즈, 미쯔비시화학의 다이어그램 시리즈, MA 시리즈, 대구사의 PRINTEX 시리즈, 콜럼비아 케미컬스사의 Raven 시리즈 등을 사용할 수 있다. As the carbon black, the Sisto series of East Sea Carbon, the diagram series of Mitsubishi Chemical, the MA series, the PRINTEX series of Daegu, the Raven series of Columbia Chemicals, etc. can be used.
상기 안료의 입자크기는 50 내지 150 nm로 조절하는 것이 좋으며, 보다 바람직하게는 50 내지 80 nm로 조절하는 것이 좋다. 50nm 미만의 입자크기를 갖는 안료를 감광성 수지 조성물에 분산시키는 경우 동일한 함량의 안료를 사용하더라도 광학밀도가 낮아지는 특성이 있다. 또한, 150nm 보다 큰 입자크기를 갖는 안료를 분산시키는 경우, 전기절연특성, 도막의 roughness 특성이 저하된다.The particle size of the pigment is preferably adjusted to 50 to 150 nm, more preferably 50 to 80 nm. When the pigment having a particle size of less than 50nm is dispersed in the photosensitive resin composition, even when the same amount of pigment is used, the optical density is lowered. Moreover, when disperse | distributing the pigment which has particle size larger than 150 nm, electrical insulation characteristic and the roughness characteristic of a coating film fall.
상기 안료는 실록산 수지 100 중량부, 또는, 불포화 결합을 가진 다관능 모노머가 사용되는 경우에는 실록산 수지와 불포화 결합을 가진 다관능 모노머를 합한 100 중량부를 기준으로 할 때 20 내지 130 중량부의 양으로 사용되고, 용도에 따라 상기 수치 범위내에서 함량이 상이해질 수 있다. 상기 안료가 20 중량부 미만으로 사용되는 경우, 감광성 수지 조성물의 감도, 도막의 전기절연특성 및 roughness는 좋아지나 단위 두께(μm)당 1.0 이상의 광학밀도를 기대하기 어렵다. 또한, 안료의 함량이 130 중량부보다 많을 경우에는 단위 두께(μm)당 4.0 이상의 광학밀도를 만족하나, 전기절연특성이 낮아지고, 감광성 수지 조성물의 감도는 저하된다.The pigment is used in an amount of 20 to 130 parts by weight based on 100 parts by weight of the siloxane resin, or 100 parts by weight of the siloxane resin and the polyfunctional monomer having an unsaturated bond when the polyfunctional monomer having an unsaturated bond is used. Depending on the application, the content may be different within the above numerical range. When the pigment is used in less than 20 parts by weight, the sensitivity of the photosensitive resin composition, the electrical insulating properties and roughness of the coating film is improved, but it is difficult to expect an optical density of 1.0 or more per unit thickness (μm). In addition, when the content of the pigment is more than 130 parts by weight, an optical density of 4.0 or more per unit thickness (μm) is satisfied, but the electrical insulating property is lowered, and the sensitivity of the photosensitive resin composition is lowered.
상기 (C) 광중합 개시제는 빛에 의해 라디칼을 발생시켜 가교를 촉발하는 물질로서, 비제한적인 예로는 트리아진계 화합물, 아세토페논계 화합물, 비이미다졸계 화합물 및 옥심계 화합물로 이루어지는 군으로부터 선택되는 적어도 1종의 화합물을 사용하는 것이 바람직하다.The photopolymerization initiator (C) is a substance that generates radicals by light to trigger crosslinking, and non-limiting examples are selected from the group consisting of triazine compounds, acetophenone compounds, biimidazole compounds, and oxime compounds. Preference is given to using at least one compound.
상기 트리아진계 화합물의 비제한적인 예로는, 2,4-비스(트리클로로메틸)-6-(4-메톡시페닐)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-(4-메톡시나프틸)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-피페로닐-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(5-메틸퓨란-2-일)에테닐]-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(퓨란-2-일)에테닐]-1,3,5-트리아진 등이 있고, 아세토페논계 화합물로서는 2-히드록시-2-메틸-1-페닐프로판-1-온, 1-(4-이소프로필페닐)-2-히드록시-2-메틸프로판-1-온, 4-(2-히드록시에톡시)-페닐-(2-히드록시-2-프로필)케톤, 1-히드록시시클로헥실페닐케톤, 벤조인메틸 에테르, 벤조인에틸 에테르, 벤조인이소부틸 에테르, 벤조인부틸 에테르, 2,2-디메톡시-2-페닐아세토페논, 2-메틸-(4-메틸티오)페닐-2-몰폴리노-1-프로판-1-온, 2-벤질-2-디메틸아미노-1-(4-몰폴리노페닐)-부탄-1-온, 2-(4-브로모-벤질-2-디메틸아미노-1-(4-몰폴리노페닐)-부탄-1-온, 2-메틸-1-[4-(메틸티오)페닐]-2-몰폴리노프로판-1-온 등이 있다.Non-limiting examples of the triazine-based compound include 2,4-bis (trichloromethyl) -6- (4-methoxyphenyl) -1,3,5-triazine, 2,4-bis (trichloromethyl ) -6- (4-methoxynaphthyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6-piperonyl-1,3,5-triazine, 2, 4-bis (trichloromethyl) -6- [2- (5-methylfuran-2-yl) ethenyl] -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (furan-2-yl) ethenyl] -1,3,5-triazine and the like, and as the acetophenone compound, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1 -(4-isopropylphenyl) -2-hydroxy-2-methylpropan-1-one, 4- (2-hydroxyethoxy) -phenyl- (2-hydroxy-2-propyl) ketone, 1- Hydroxycyclohexylphenyl ketone, benzoin methyl ether, benzoin ethyl ether, benzoin isobutyl ether, benzoin butyl ether, 2,2-dimethoxy-2-phenylacetophenone, 2-methyl- (4-methylthio ) Phenyl-2-morpholino-1-propane-1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, 2- (4-bromo-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, 2-methyl -1- [4- (methylthio) phenyl] -2-morpholinopropane-1-one, and the like.
또한, 비이미다졸계 화합물의 비제한적인 예로는 2,2-비스(2-클로로페닐)-4,4',5,5'-테트라페닐 비이미다졸, 2,2'-비스(o-클로로페닐)-4,4',5,5'-테트라페닐 비이미다졸, 2,2'-비스(o-클로로페닐)-4,4',5,5'-테트라키스(3,4,5-트리메톡시페닐)-1,2'-비이미다졸, 2,2'-비스(2,3-디클로로페닐)-4,4',5,5'-테트라페닐 비이미다졸, 2,2'-비스(o-클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸 등이 있다.In addition, non-limiting examples of the biimidazole-based compound include 2,2-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl biimidazole, 2,2'-bis (o- Chlorophenyl) -4,4 ', 5,5'-tetraphenyl biimidazole, 2,2'-bis (o-chlorophenyl) -4,4', 5,5'-tetrakis (3,4, 5-trimethoxyphenyl) -1,2'-biimidazole, 2,2'-bis (2,3-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl biimidazole, 2, 2'-bis (o-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole.
또한, 옥심계 화합물의 비제한적인 예로는 OXE-02(상표명, 바스프사), N1919, NCI-831(상표명, 아데카사), 1,2-옥타디온-1-(4-페닐치오)페닐-2-(o-본조일옥심), 에타논-1-(9-에틸)-6-(2-메틸벤조일-3-일)-1-(0-아세틸옥심) 등이 있다. In addition, non-limiting examples of oxime compounds include OXE-02 (trade name, BASF), N1919, NCI-831 (trade name, Adeca), 1,2-octadione-1- (4-phenylthio) phenyl- 2- (o-bonzoyloxime), ethanone-1- (9-ethyl) -6- (2-methylbenzoyl-3-yl) -1- (0-acetyloxime), and the like.
상기 광중합 개시제는 실록산 수지 100 중량부 또는 불포화 결합을 가진 다관능성 모노머가 사용되는 경우에는 실록산 수지와 불포화 결합을 가진 다관능성 모노머를 합한 100 중량부에 대하여 1 ~ 30 중량부의 양으로 포함될 수 있다.The photopolymerization initiator may be included in an amount of 1 to 30 parts by weight based on 100 parts by weight of 100 parts by weight of the siloxane resin or the polyfunctional monomer having the unsaturated bond when the polyfunctional monomer having the unsaturated bond is used.
본 발명의 감광성 수지 조성물에 있어서, (D) 유기 용매는 상기 실록산 수지를 비롯한 구성성분을 용해할 수 있고, 안료의 분산성을 저해하지 않는 용매라면 제한없이 사용할 수 있다. 구체적인 예를 들면, 메틸 에틸 케톤, 메틸-n-프로필 케톤, 메틸 이소프로필 케톤, 메틸-n-부틸 케톤, 메틸 이소부틸 케톤, 메틸-n-펜틸 케톤, 디에틸 케톤, 디프로필케톤, 디이소부틸 케톤, 사이클로헥사논, 사이클로펜타논, 메틸 사이클로헥사논, 2,4-펜탄디온, 아세토닐아세톤, 감마-부티로락톤, 감마-발레로락톤 등의 케톤(ketone)계 용매; 메틸 에틸 에테르, 메틸 디-n-프로필 에테르, 디이소 프로필 에테르, 테트라하이드로퓨란, 메틸 테트라하이드로퓨란, 에틸렌 글리콜 디메틸에테르, 에틸렌 글리콜 에테르, 에틸렌 글리콜 디부틸 에테르, 디에틸렌 글리콜 메틸 에틸 에테르, 트리에틸렌 글리콜 디메틸 에테르, 트리에틸렌 글리콜 에테르, 트리에틸렌 글리콜 메틸 에틸 에테르, 프로필렌 글리콜 디메틸 에테르, 프로필렌 글리콜 에테르, 프로필렌 글리콜-n-프로필 에테르, 프로필렌 글리콜 디부틸 에테르, 에틸렌 글리콜 메틸 에테르, 에틸렌 글리콜 에틸 에테르, 디에틸렌 글리콜 모노메틸 에테르, 디에틸렌 글리콜 에틸 에테르, 프로필렌 글리콜 모노메틸 에테르 등의 에테르(ether)계 용매; 에틸렌 글리콜 메틸 에테르 프로피오네이트, 에틸렌 글리콜 에틸 에테르 프로피오네이트, 에틸렌 글리콜 메틸 에테르 아세테이트, 에틸렌 글리콜 에틸 에테르 아세테이트, 프로필렌 글리콜 메틸 에테르 아세테이트 프로필렌 글리콜 에틸 에테르 아세테이트, 프로필렌 글리콜 프로필 에테르 아세테이트 등의 에테르 아세테이트(ether acetate)계 용매, 아세토니트릴, N-메틸 피롤리디논, N-에틸 피롤리디논, N-프로필 피롤리디논, N,N-디메틸 포름아미드, N,N-디메틸 아세트아미드, N,N-디메틸 설폭시드, 톨루엔, 크실렌 등이 있고, 메탄올, 에탄올, n-프로판올, 이소프로판올, n-부탄올, 이소부탄올, 시클로 헥사놀, 메틸 시클로 헥사놀, 벤질알콜, 에틸렌 글리콜, 1,2-프로필렌 글리콜, 디에틸렌 글리콜 등의 알코올계 용매 등이 각각 단독으로 또는 2종 이상 혼합되어 이용될 수 있지만, 여기에 한정되는 것은 아니다. In the photosensitive resin composition of this invention, (D) The organic solvent can dissolve the components including the siloxane resin and can be used without limitation as long as it is a solvent that does not impair dispersibility of the pigment. Specific examples include methyl ethyl ketone, methyl-n-propyl ketone, methyl isopropyl ketone, methyl-n-butyl ketone, methyl isobutyl ketone, methyl-n-pentyl ketone, diethyl ketone, dipropyl ketone, diiso Ketone solvents such as butyl ketone, cyclohexanone, cyclopentanone, methyl cyclohexanone, 2,4-pentanedione, acetonyl acetone, gamma-butyrolactone, and gamma-valerolactone; Methyl ethyl ether, methyl di-n-propyl ether, diisopropyl ether, tetrahydrofuran, methyl tetrahydrofuran, ethylene glycol dimethyl ether, ethylene glycol ether, ethylene glycol dibutyl ether, diethylene glycol methyl ethyl ether, triethylene Glycol dimethyl ether, triethylene glycol ether, triethylene glycol methyl ethyl ether, propylene glycol dimethyl ether, propylene glycol ether, propylene glycol-n-propyl ether, propylene glycol dibutyl ether, ethylene glycol methyl ether, ethylene glycol ethyl ether, di Ether solvents such as ethylene glycol monomethyl ether, diethylene glycol ethyl ether, and propylene glycol monomethyl ether; Ether acetates such as ethylene glycol methyl ether propionate, ethylene glycol ethyl ether propionate, ethylene glycol methyl ether acetate, ethylene glycol ethyl ether acetate, propylene glycol methyl ether acetate propylene glycol ethyl ether acetate, propylene glycol propyl ether acetate acetate) solvents, acetonitrile, N-methyl pyrrolidinone, N-ethyl pyrrolidinone, N-propyl pyrrolidinone, N, N-dimethyl formamide, N, N-dimethyl acetamide, N, N-dimethyl Sulfoxide, toluene, xylene and the like, methanol, ethanol, n-propanol, isopropanol, n-butanol, isobutanol, cyclohexanol, methyl cyclohexanol, benzyl alcohol, ethylene glycol, 1,2-propylene glycol, di Alcohol solvents such as ethylene glycol, etc. may be used alone or in combination of two or more thereof. But it can be used, but is not limited to it.
유기용매의 함량은 실록산 수지, 안료, 광중합 개시제 및 불포화 결합을 가지는 다관능 모노머의 함량에 따라 적절히 조절할 수 있으며, 차광층 형성을 위한 감광성 수지 조성물을 기판에 도포하는 방식에 따라 함량에 차이가 있다. 예를 들면 감광성 수지 조성물 전체 100 중량부에 대하여, 유기용매 20 ~ 90 중량부의 함량으로 사용될 수 있으나, 이에 한정되는 것은 아니다.The content of the organic solvent may be appropriately adjusted according to the content of the siloxane resin, the pigment, the photopolymerization initiator and the polyfunctional monomer having an unsaturated bond, and the content is different depending on the method of applying the photosensitive resin composition for forming the light shielding layer to the substrate. . For example, the total amount of the photosensitive resin composition may be used in an amount of 20 to 90 parts by weight of the organic solvent, but is not limited thereto.
상기 (E) 불포화 결합을 가진 다관능성 모노머는 분자 중에 적어도 1개 이상의 부가중합 가능한 불포화기를 갖는 반응성 불포화 화합물이며, 이러한 화합물을 단독으로 또는 2종 이상 혼합하여 선택적으로 사용할 수 있다. The polyfunctional monomer having the above (E) unsaturated bond is a reactive unsaturated compound having at least one unsaturated polymerizable group in a molecule, and these compounds may be used alone or in combination of two or more thereof.
상기 불포화 결합을 가진 다관능성 모노머의 비제한적인 예로는 에틸렌글리콜디아크릴레이트, 디에틸렌글리콜디아크릴레이트, 트리에틸렌글리콜디아크릴레이트, 트리에틸렌글리콜디메타크릴레이트, 1,6-헥산디올이아크릴레이트, 펜타에리트리톨트리아크릴레이트, 디펜타에리트리톨펜타아크릴레이트, 디펜타에리트리톨 헥사아크릴레이트, 비스페놀A 에폭시아크릴레이트, 에틸렌글리콜모노메틸에테르아크릴레이트, 에틸린글리콜디메타크릴레이트 또는 1,6-헥사디올디메타크릴레이트를 들 수 있다. Non-limiting examples of the polyfunctional monomer having an unsaturated bond include ethylene glycol diacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, triethylene glycol dimethacrylate, 1,6-hexanediol diacryl Latex, pentaerythritol triacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, bisphenol A epoxy acrylate, ethylene glycol monomethyl ether acrylate, ethylene glycol dimethacrylate or 1,6 -Hexadiol dimethacrylate is mentioned.
상기 불포화 결합을 가진 다관능성 모노머의 함량은 실록산 수지 100중량부 대비 0 내지 200 중량부이다. 200 중량부를 초과할 경우 실록산 수지 및 카본입자와의 상용성이 저하되며, 패턴형상의 조절이 어렵다.The content of the polyfunctional monomer having an unsaturated bond is 0 to 200 parts by weight based on 100 parts by weight of the siloxane resin. If it exceeds 200 parts by weight, the compatibility with the siloxane resin and the carbon particles is lowered, it is difficult to control the pattern shape.
바인더 수지내에 불포화 결합을 포함하고 있어 불포화 결합을 가진 다관능성 모노머는 감광성 수지 조성물에 포함되지 않아도 되나 패턴의 형상조절 및 감도 등을 위하여 사용하여도 무방하다.Since the unsaturated resin is contained in the binder resin, the polyfunctional monomer having an unsaturated bond may not be included in the photosensitive resin composition, but may be used for controlling the shape of the pattern, sensitivity, and the like.
또한, 상기 차광용 감광성 수지 조성물에는 필요에 따라서 경화촉진제, 열중합금지제, 가소제, 충전재, 용제, 레벨링제, 소포제 등의 당업계에서 통상적으로 사용되는 첨가제를 더 배합할 수 있다. 열중합 금지제로서는 하이드로퀴논, 하이드로퀴논모노메틸에테르, 피로가롤, tert-부틸카테콜, 페노디아진 등을 들 수 있고, 가소제로서는 디부틸프탈레이트, 디옥틸프탈레이트, 트리크레실 등을 들 수 있고, 충전재로서는 유리섬유, 실리카, 마이카, 알루미나 등을 들 수 있고, 또한, 소포제나 레벨링제로서는, 예컨대, 실리콘계, 불소계, 아크릴계의 화합물을 들 수 있다.In addition, the light-shielding photosensitive resin composition may further contain additives commonly used in the art, such as a curing accelerator, a thermal polymerization inhibitor, a plasticizer, a filler, a solvent, a leveling agent, and an antifoaming agent, as necessary. Examples of the thermal polymerization inhibitor include hydroquinone, hydroquinone monomethyl ether, pyrogarol, tert-butylcatechol, phenodiazine, and the like, and a plasticizer includes dibutyl phthalate, dioctylphthalate, and tricresyl. Examples of the filler include glass fiber, silica, mica, alumina, and the like, and examples of the antifoaming agent and leveling agent include silicone, fluorine and acryl compounds.
상기 감광성 수지 조성물을 사용하여 차광층(블랙 매트릭스)을 형성하기 위한 일 양태를 살펴보면, (S1) 본 발명에 따른 차광용 감광성 수지 조성물을 기판에 도포하는 단계; (S2) 상기 조성물 중의 용매를 제거하여 도포막을 형성하는 단계; (S3) 상기 도포막을 노광하고 현상하여 도막을 형성하는 단계; 및 (S4) 상기 도막을 200℃ 이상 300 ℃ 미만의 온도에서 열처리하는 단계를 포함할 수 있다. 또한, 상기 (S4) 단계 이후에, (S5) 상기 도막을 300℃ 이상 600 ℃ 이하의 온도에서 열처리하는 단계를 더 포함할 수 있다. Looking at one aspect for forming a light shielding layer (black matrix) using the photosensitive resin composition, (S1) applying a light-sensitive photosensitive resin composition according to the invention on a substrate; (S2) removing the solvent in the composition to form a coating film; (S3) exposing and developing the coating film to form a coating film; And (S4) heat treating the coating film at a temperature of 200 ° C. or higher and less than 300 ° C. In addition, after the step (S4), (S5) may further comprise the step of heat-treating the coating film at a temperature of 300 ℃ to 600 ℃.
(S1) 상기 차광용 감광성 수지 조성물을 기판에 도포하는 공정의 일례를 살펴보면, 두께 0.5∼1.1㎜의 청정한 표면을 갖는 유리기판 상에 롤 코터, 리버스 코터, 바코터 등의 접촉 전사형 도포장치나 스피너(회전식 도포장치), 커튼 플로우 코터 등의 비접촉형 도포장치를 사용하여 도포할 수 있다.(S1) Looking at an example of a process of applying the light-shielding photosensitive resin composition to a substrate, a contact transfer type coating device such as a roll coater, a reverse coater, a bar coater or a spinner on a glass substrate having a clean surface having a thickness of 0.5 to 1.1 mm It can apply | coat using a non-contact type coating apparatus, such as a (rotary coating apparatus) and a curtain flow coater.
상기 조제 및 도포에 있어서, 유리기판과 감광성 수지 조성물의 밀착성을 향상시키기 위해 실란 커플링제를 배합하거나 상기 기판에 도포해 둘 수 있다.In the preparation and coating, in order to improve the adhesion between the glass substrate and the photosensitive resin composition, a silane coupling agent may be blended or applied to the substrate.
이후, (S2) 상기 조성물 중의 용매를 제거하여 도포막을 형성한다.Thereafter, (S2) a solvent in the composition is removed to form a coating film.
이를 위해서, 핫플레이트로 80℃∼120℃, 바람직하게는 90℃∼100℃ 의 온도로 60초∼120초간 건조시키거나 또는 실온에서 수 시간∼수일 방치하거나, 또는 온풍 히터, 적외선 히터 속에 수 십분∼수 시간 넣어 용제를 제거한 후, 도포막 두께를 0.5∼5㎛ 의 범위로 조정할 수 있다.To this end, it is dried with a hot plate at a temperature of 80 ° C to 120 ° C, preferably 90 ° C to 100 ° C for 60 seconds to 120 seconds, or left at room temperature for several hours to several days, or for several ten minutes in a warm air heater or an infrared heater. After removing a solvent for several hours, the coating film thickness can be adjusted in the range of 0.5 to 5 µm.
이후, (S3) 상기 도포막을 노광하고 현상하여 도막을 형성한다.Thereafter, (S3) the coating film is exposed and developed to form a coating film.
이를 위한 비제한적인 예로는, 네가티브 마스크를 통하여 자외선, 엑시머 레이저광 등의 활성성 에너지선을 조사에너지선량 30∼2000mJ/㎠ 의 범위로 노광할 수 있다. 상기 조사에너지선량은 사용하는 차광용 감광성 조성물의 종류에 따라 상이할 수 있다. 노광하여 얻은 도막을 현상액을 사용하여 침지법, 스프레이법 등으로 현상하여 블랙매트릭스 패턴을 형성한다. 현상에 사용하는 현상액으로는, 모노에탄올아민, 디에탄올아민, 트리에탄올아민 등의 유기계인 것이나, 수산화나트륨, 수산화칼륨, 탄산나트륨, 암모니아, 4급암모늄염 등의 수용액을 들 수 있다.As a non-limiting example, active energy rays such as ultraviolet rays and excimer laser light can be exposed to a radiation energy dose of 30 to 2000 mJ / cm 2 through a negative mask. The irradiation energy dose may be different depending on the kind of light-sensitive photosensitive composition to be used. The coated film obtained by exposure is developed using the developing solution by the immersion method, the spray method, etc., and a black matrix pattern is formed. As a developing solution used for image development, it is organic type, such as monoethanolamine, diethanolamine, and triethanolamine, and aqueous solution, such as sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia, a quaternary ammonium salt, is mentioned.
또한, 본 발명의 제조방법의 일 양태에서는, (S4) 상기 도막을 200℃ 이상 300 ℃ 미만의 온도에서 열처리하는 단계를 더 포함할 수 있으며, 상기 (S4) 단계 이후에, (S5) 상기 도막을 300℃ 이상 600℃ 이하의 온도에서 열처리하는 단계를 더 포함할 수 있다. In addition, in one aspect of the manufacturing method of the present invention, (S4) may further comprise the step of heat-treating the coating film at a temperature of 200 ℃ or less than 300 ℃, after the (S4) step, (S5) the coating film The heat treatment may further include the step of heat treatment at a temperature of 300 ° C or more and 600 ° C or less.
(S4)에서의 열처리는 200℃ 이상 300℃ 미만의 온도에서 5 내지 60분동안 이루어질 수 있으며, 이 때의 열처리 방법은 통상적인 오븐 등을 이용할 수 있으며, 특별히 제한되지 않는다.Heat treatment in (S4) may be carried out for 5 to 60 minutes at a temperature of 200 ℃ or less than 300 ℃, the heat treatment method at this time may use a conventional oven or the like, is not particularly limited.
또한, (S5)에서의 열처리는 300℃ 이상 600℃ 이하의 온도에서 5 내지 60분동안 이루어질 수 있으며, 열처리 방법은 당업계에서 통상적인 방법, 예컨대, 오븐 등을 사용할 수 있으며, 특별히 제한되지 않는다.In addition, the heat treatment in (S5) may be carried out for 5 to 60 minutes at a temperature of 300 ° C or more and 600 ° C or less, the heat treatment method may be a conventional method in the art, such as an oven, etc., is not particularly limited. .
통상적으로, 200℃ 이상에서의 추가적인 열처리를 실시하여 제조된 도막 및 이를 포함하는 차광층에서는 전기절연 특성이 저하되며, 300℃ 이상에서의 추가적인 열처리에 의해서는 전기절연 특성이 더 저하되는 것으로 알려져 있다. 이는 카본 블랙과 같은 안료가 갖는 전도성 특성 때문인데, 도막을 제조하는 공정에서 열처리 온도가 높아지면 안료를 감싸고 있는 수지가 열화되어 안료간 이격거리가 줄어들어 전도성이 증가하게 되고, 그 결과, 도막의 전기절연 특성이 저하되게 된다.In general, in the coating film prepared by performing an additional heat treatment at 200 ° C. or higher and a light shielding layer including the same, the electric insulation property is reduced, and the electric insulation property is further reduced by the additional heat treatment at 300 ° C. or higher. . This is due to the conductive properties of pigments such as carbon black. When the heat treatment temperature is increased in the manufacturing process of the coating film, the resin surrounding the pigment deteriorates and the separation distance between the pigments decreases, so that the conductivity increases. Insulation characteristics will fall.
그러나, 본 발명의 일 양태에 따른 감광성 수지 조성물에 의해 도막을 제조하는 경우, 200 ℃ 이상에서의 열처리, 심지어는 300℃ 이상에서의 열처리를 하더라도 우수한 전기절연 특성을 갖는 도막이 수득될 수 있고, 이를 포함하는 차광층의 전기절연 특성 역시 향상된다.However, when manufacturing a coating film by the photosensitive resin composition which concerns on one aspect of this invention, even if it heat-processes at 200 degreeC or more, even at 300 degreeC or more, the coating film which has the outstanding electrical insulation characteristic can be obtained, Electrical insulation properties of the light shielding layer to be included are also improved.
상기 제조방법으로 얻어진 차광층(블랙매트릭스)은, 액정 패널, 플라즈마 디스플레이 패널 등 여러 가지 표시장치용으로 유용하다.The light shielding layer (black matrix) obtained by the above manufacturing method is useful for various display devices such as a liquid crystal panel and a plasma display panel.
이하, 본 발명을 구체적으로 설명하기 위해 실시예를 들어 상세하게 설명하기로 한다. 그러나, 본 발명에 따른 실시예는 여러 가지 다른 형태로 변형될 수 있으며, 본 발명의 범위가 아래에서 상술하는 실시예에 한정되는 것으로 해석되어서는 안 된다. 본 발명의 실시예는 당업계에서 평균적인 지식을 가진 자에게 본 발명을 보다 완전하게 설명하기 위해서 제공되는 것이다.Hereinafter, the present invention will be described in detail with reference to Examples. However, embodiments according to the present invention can be modified in many different forms, the scope of the present invention should not be construed as limited to the embodiments described below. The embodiments of the present invention are provided to more completely explain the present invention to those skilled in the art.
<실록산 수지의 합성><Synthesis of siloxane resin>
합성예 1Synthesis Example 1
냉각관, 교반기를 구비한 플라스크에 메틸 3-(트리에톡시실릴)프로피오네이트(methyl 3-(triethoxysilyl)propionate, 이하 'propionic acid'로도 표기함) 250g(1.0 mol), 페닐 트리메톡시 실란(이하 'phenyl'로도 표기함) 198g(1.0 mol), 메틸 트리메톡시 실란(이하 'methyl'로도 표기함) 136g(1.0 mol), 메타크릴옥시프로필트리메톡시실란(이하 'methacryl'로도 표기함) 497g(2.0 mol), 프로필렌 글리콜 모노메틸 에테르 아세테이트 2000g을 정량하고, 상기 용액을 교반하며, 35% 염산 수용액 13.0g(0.125 mol)과 물 270g 혼합액을 적하한다. 적하 종료 후, 반응온도를 85 ℃로 승온하고, 승온된 온도에서 6시간 반응을 진행한다. 반응 종료 후, 에테르, 물을 첨가하여 추출한 뒤 유기상을 회수하고, 잔류알콜 및 용매를 증발 제거하여 실록산 수지 657g을 얻었다. 얻어진 실록산 수지를 프로필렌 글리콜 모노메틸 에테르 아세테이트 657g에 용해시킨다. 실록산 수지의 중량평균분자량은 4,800 이었다.250 g (1.0 mol) of methyl 3- (triethoxysilyl) propionate (also referred to as 'propionic acid') in a flask equipped with a cooling tube and a stirrer, phenyl trimethoxy silane 198 g (1.0 mol), methyl trimethoxy silane (hereinafter also referred to as 'methyl') 136 g (1.0 mol), methacryloxypropyltrimethoxysilane (hereinafter also referred to as 'methacryl') 497 g (2.0 mol), 2000 g of propylene glycol monomethyl ether acetate are quantified, the solution is stirred, and a mixture of 13.0 g (0.125 mol) of 35% aqueous hydrochloric acid solution and 270 g of water is added dropwise. After completion of the dropwise addition, the reaction temperature was raised to 85 ° C., and the reaction proceeded at the elevated temperature for 6 hours. After completion of the reaction, ether and water were added for extraction, the organic phase was recovered, and residual alcohol and solvent were evaporated to remove 657 g of siloxane resin. The obtained siloxane resin is dissolved in 657 g of propylene glycol monomethyl ether acetate. The weight average molecular weight of the siloxane resin was 4,800.
합성예 2Synthesis Example 2
냉각관, 교반기를 구비한 플라스크에 메틸 3-(트리에톡시실릴)프로피오네이트(methyl 3-(triethoxysilyl)propionate) 250g(1.0 mol), 페닐 트리메톡시 실란 297g(1.5 mol), 메틸 트리메톡시 실란 204g(1.5 mol), 메타크릴옥시프로필트리메톡시실란 248g(1.0 mol), 프로필렌 글리콜 모노메틸 에테르 아세테이트 2000 g을 정량하고, 상기 용액을 교반하며, 35% 염산 수용액 13.0g(0.125 mol)과 물 270g 혼합액을 적하한다. 적하 종료 후, 반응 온도를 85 ℃로 승온하고, 승온된 온도에서 6시간 반응을 진행한다. 반응 종료 후, 에테르, 물을 첨가하여 추출한 뒤 유기상을 회수하고, 잔류알콜 및 용매를 증발 제거하여 실록산 수지 608g을 얻었다. 얻어진 실록산 수지를 프로필렌 글리콜 모노메틸 에테르 아세테이트 608g에 용해시킨다. 실록산 수지의 중량평균분자량은 4,200 이었다.250 g (1.0 mol) of methyl 3- (triethoxysilyl) propionate, 297 g (1.5 mol) of phenyl trimethoxy silane, methyl trimeth in a flask equipped with a cooling tube and a stirrer 204 g (1.5 mol) of methoxy silane, 248 g (1.0 mol) of methacryloxypropyltrimethoxysilane, 2000 g of propylene glycol monomethyl ether acetate are quantified, the solution is stirred, and 13.0 g (0.125 mol) of 35% aqueous hydrochloric acid solution And 270 g mixture of water is added dropwise. After completion of the dropwise addition, the reaction temperature was raised to 85 ° C., and the reaction proceeded at the elevated temperature for 6 hours. After completion of the reaction, ether and water were added for extraction, the organic phase was recovered, and residual alcohol and solvent were evaporated to remove 608 g of siloxane resin. The obtained siloxane resin is dissolved in 608 g of propylene glycol monomethyl ether acetate. The weight average molecular weight of the siloxane resin was 4,200.
합성예 3Synthesis Example 3
냉각관, 교반기를 구비한 플라스크에 메틸 3-(트리에톡시실릴)프로피오네이트(methyl 3-(triethoxysilyl)propionate) 264g(1.0 mol), 페닐 트리메톡시 실란 396g(2.0 mol), 메틸 트리메톡시 실란 272g(2.0 mol), 프로필렌 글리콜 모노메틸 에테르 아세테이트 2000 g을 정량하고, 상기 용액을 교반하며, 35% 염산 수용액 13.0g(0.125 mol)과 물 270g 혼합액을 적하한다. 적하 종료 후, 반응 온도를 85 ℃로 승온하고, 승온된 온도에서 6시간 반응을 진행한다. 반응 종료 후, 에테르, 물을 첨가하여 추출한 뒤 유기상을 회수하고, 잔류알콜 및 용매를 증발 제거하여 실록산 수지 560g을 얻었다. 얻어진 실록산 수지를 프로필렌 글리콜 모노메틸 에테르 아세테이트 560g에 용해시킨다. 실록산 수지의 중량평균분자량은 3,800 이었다.264 g (1.0 mol) of methyl 3- (triethoxysilyl) propionate, 396 g (2.0 mol) of phenyl trimethoxy silane, methyl trimeth in a flask equipped with a cooling tube and a stirrer 272 g (2.0 mol) of oxy silane, 2000 g of propylene glycol monomethyl ether acetate are quantified, the solution is stirred, and a mixture of 13.0 g (0.125 mol) of 35% aqueous hydrochloric acid solution and 270 g of water is added dropwise. After completion of the dropwise addition, the reaction temperature was raised to 85 ° C., and the reaction proceeded at the elevated temperature for 6 hours. After the completion of the reaction, the mixture was extracted with ether and water, and the organic phase was recovered. The remaining alcohol and solvent were evaporated to remove 560 g of siloxane resin. The obtained siloxane resin is dissolved in 560 g of propylene glycol monomethyl ether acetate. The weight average molecular weight of the siloxane resin was 3,800.
<블랙매트릭스용 감광성 수지의 제조><Production of Photosensitive Resin for Black Matrix>
실시예 1Example 1
전체 수지 조성물 100 중량부 대비 알칼리 가용성 실록산 수지(합성예 1에서 합성한 실록산 수지, phenyl/methyl/methacryl/propionic acid = 20/20/40/20, Mw 4800, 산가 36 mg[KOH]/g[resin]) 12 중량부, 카본 블랙(100nm 입자크기) 3.6중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 18중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 유기 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 69 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkali-soluble siloxane resin (siloxane resin synthesized in Synthesis Example 1, phenyl / methyl / methacryl / propionic acid = 20/20/40/20, Mw 4800, acid value 36 mg [KOH] / g [%] by weight of the total resin composition) resin]) 12 parts by weight, 3.6 parts by weight of carbon black (100 nm particle size) (used in the form of a dispersion of carbon black 20%. 18 parts by weight in terms of dispersion of carbon black), ethanone-1- [9-ethyl -6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] -1- (o-acetyloxime) (OXE-02, BASF) 1 part by weight, propylene as an organic solvent 69 parts by weight of glycol monomethyl ether acetate were mixed to prepare a photosensitive resin composition.
실시예 2Example 2
전체 수지 조성물 100 중량부 대비 실시예 1에서 사용한 알칼리 가용성 실록산 수지(합성예 1에서 합성한 실록산 수지, phenyl/methyl/methacryl/propionic acid = 20/20/40/20, Mw 4800, 산가 36 mg[KOH]/g[resin]) 10 중량부, 카본 블랙(100nm 입자크기) 6중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 30중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 유기 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 59 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkali-soluble siloxane resin used in Example 1 relative to 100 parts by weight of the total resin composition (siloxane resin synthesized in Synthesis Example 1, phenyl / methyl / methacryl / propionic acid = 20/20/40/20, Mw 4800, acid value 36 mg [ 10 parts by weight of KOH] / g [resin]), 6 parts by weight of carbon black (100 nm particle size) (used in the form of a dispersion containing 20% of carbon black, 30 parts by weight in terms of dispersion of carbon black), ethanone-1 1 part by weight of-[9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] -1- (o-acetyloxime) (OXE-02, BASF) And 59 parts by weight of propylene glycol monomethyl ether acetate was mixed with an organic solvent to prepare a photosensitive resin composition.
실시예 3Example 3
전체 수지 조성물 100 중량부 대비 실시예 1에서 사용한 알칼리 가용성 실록산 수지(합성예 1에서 합성한 실록산 수지, phenyl/methyl/methacryl/propionic acid = 20/20/40/20, Mw 4800, 산가 36 mg[KOH]/g[resin]) 9 중량부, 카본 블랙(100nm 입자크기) 8중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 40중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 유기 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 50 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkali-soluble siloxane resin used in Example 1 relative to 100 parts by weight of the total resin composition (siloxane resin synthesized in Synthesis Example 1, phenyl / methyl / methacryl / propionic acid = 20/20/40/20, Mw 4800, acid value 36 mg [ KOH] / g [resin]) 9 parts by weight, carbon black (100 nm particle size) 8 parts by weight (used in the form of a dispersion containing 20% of carbon black. 40 parts by weight in terms of dispersion of carbon black), ethanone-1 1 part by weight of-[9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] -1- (o-acetyloxime) (OXE-02, BASF) , 50 parts by weight of propylene glycol monomethyl ether acetate was mixed with an organic solvent to prepare a photosensitive resin composition.
실시예 4Example 4
전체 수지 조성물 100 중량부 대비 실시예 1에서 사용한 알칼리 가용성 실록산 수지(합성예 1에서 합성한 실록산 수지, phenyl/methyl/methacryl/propionic acid = 20/20/40/20, Mw 4800, 산가 36 mg[KOH]/g[resin]) 8 중량부, 카본 블랙(100nm 입자크기) 9.4중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 47중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 유기 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 44 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkali-soluble siloxane resin used in Example 1 relative to 100 parts by weight of the total resin composition (siloxane resin synthesized in Synthesis Example 1, phenyl / methyl / methacryl / propionic acid = 20/20/40/20, Mw 4800, acid value 36 mg [ KOH] / g [resin]) 8 parts by weight, carbon black (100 nm particle size) 9.4 parts by weight (used in the form of a dispersion of carbon black 20%, 47 parts by weight in terms of carbon black dispersion), ethanone-1 1 part by weight of-[9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] -1- (o-acetyloxime) (OXE-02, BASF) , 44 parts by weight of propylene glycol monomethyl ether acetate was mixed with an organic solvent to prepare a photosensitive resin composition.
실시예 5Example 5
전체 수지 조성물 100 중량부 대비 알칼리 가용성 실록산 수지(합성예 2에서 합성한 실록산 수지, phenyl/methyl/methacryl/propionic acid = 30/30/20/20, Mw 3600, 산가 42 mg[KOH]/g[resin]) 10 중량부, 불포화 결합을 가진 다관능 모노머로서 디펜타에리트리톨헥사아크릴레이트 2 중량부, 카본 블랙(100nm 입자크기) 3.6중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 18중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 유기 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 69 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkali-soluble siloxane resin (siloxane resin synthesized in Synthesis Example 2, phenyl / methyl / methacryl / propionic acid = 30/30/20/20, Mw 3600, acid value 42 mg [KOH] / g [%] by weight of the total resin composition) resin]) 10 parts by weight, polyfunctional monomer having an unsaturated bond, 2 parts by weight of dipentaerythritol hexaacrylate, 3.6 parts by weight of carbon black (100 nm particle size) (used in the form of a dispersion containing 20% of carbon black. 18 parts by weight), ethanone-1- [9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] -1- (o -Acetyloxime) (OXE-02, BASF) 1 part by weight, 69 parts by weight of propylene glycol monomethyl ether acetate were mixed with an organic solvent to prepare a photosensitive resin composition.
실시예 6Example 6
전체 수지 조성물 100 중량부 대비 실시예 5에서 사용한 알칼리 가용성 실록산 수지(합성예 2에서 합성한 실록산 수지, phenyl/methyl/methacryl/propionic acid = 30/30/20/20, Mw 3600, 산가 42 mg[KOH]/g[resin]) 8 중량부, 불포화 결합을 가진 다관능 모노머로서 디펜타에리트리톨헥사아크릴레이트 4 중량부, 카본 블랙(100nm 입자크기) 3.6중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 18중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 유기 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 69 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkali-soluble siloxane resin used in Example 5 relative to 100 parts by weight of the total resin composition (siloxane resin synthesized in Synthesis Example 2, phenyl / methyl / methacryl / propionic acid = 30/30/20/20, Mw 3600, acid value 42 mg [ KOH] / g [resin]) 8 parts by weight, 4 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, 3.6 parts by weight of carbon black (100 nm particle size) (20% carbon black dispersion) 18 parts by weight in terms of dispersion of carbon black), ethanone-1- [9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] 1 part by weight of -1- (o-acetyloxime) (OXE-02, BASF) and 69 parts by weight of propylene glycol monomethyl ether acetate were mixed with an organic solvent to prepare a photosensitive resin composition.
실시예 7Example 7
전체 수지 조성물 100 중량부 대비 실시예 5에서 사용한 알칼리 가용성 실록산 수지(합성예 2에서 합성한 실록산 수지, phenyl/methyl/methacryl/propionic acid = 30/30/20/20, Mw 3600, 산가 42 mg[KOH]/g[resin]) 6 중량부, 불포화 결합을 가진 다관능 모노머로서 디펜타에리트리톨헥사아크릴레이트 6 중량부, 카본 블랙(100nm 입자크기) 3.6중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 18중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 유기 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 69 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkali-soluble siloxane resin used in Example 5 relative to 100 parts by weight of the total resin composition (siloxane resin synthesized in Synthesis Example 2, phenyl / methyl / methacryl / propionic acid = 30/30/20/20, Mw 3600, acid value 42 mg [ KOH] / g [resin]) 6 parts by weight, 6 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, 3.6 parts by weight of carbon black (100 nm particle size) (20% carbon black dispersion) 18 parts by weight in terms of dispersion of carbon black), ethanone-1- [9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] 1 part by weight of -1- (o-acetyloxime) (OXE-02, BASF) and 69 parts by weight of propylene glycol monomethyl ether acetate were mixed with an organic solvent to prepare a photosensitive resin composition.
실시예 8Example 8
전체 수지 조성물 100 중량부 대비 실시예 5에서 사용한 알칼리 가용성 실록산 수지(합성예 2에서 합성한 실록산 수지, phenyl/methyl/methacryl/propionic acid = 30/30/20/20, Mw 3600, 산가 42 mg[KOH]/g[resin]) 4 중량부, 불포화 결합을 가진 다관능 모노머로서 디펜타에리트리톨헥사아크릴레이트 4 중량부, 카본 블랙(100nm 입자크기) 9.4중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 47중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 유기 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 44 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkali-soluble siloxane resin used in Example 5 relative to 100 parts by weight of the total resin composition (siloxane resin synthesized in Synthesis Example 2, phenyl / methyl / methacryl / propionic acid = 30/30/20/20, Mw 3600, acid value 42 mg [ KOH] / g [resin]) 4 parts by weight, 4 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, 9.4 parts by weight of carbon black (100 nm particle size) (20% carbon black dispersion form) 47 parts by weight in terms of dispersion of carbon black), ethanone-1- [9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] 1 part by weight of -1- (o-acetyloxime) (OXE-02, BASF) and 44 parts by weight of propylene glycol monomethyl ether acetate were mixed with an organic solvent to prepare a photosensitive resin composition.
비교예 1Comparative Example 1
전체 수지 조성물 100 중량부 대비 알칼리 가용성 카도계 수지 (Mw 5000, 산가 80 mg[KOH]/g[resin], Adeka) 4 중량부, 불포화 결합을 가진 다관능 모노머로서 디펜타에리트리톨헥사아크릴레이트 4 중량부, 카본 블랙(100nm 입자크기) 9.4중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 47중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 유기 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 44 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkaline soluble cardo resin (Mw 5000, acid value 80 mg [KOH] / g [resin], Adeka) to 100 parts by weight of the total resin composition 4 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond Parts by weight, carbon black (100 nm particle size) 9.4 parts by weight (used in the form of a dispersion of carbon black 20%. 47 parts by weight in terms of carbon black dispersion), ethanone-1- [9-ethyl-6- ( 2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] -1- (o-acetyloxime) (OXE-02, BASF) 1 part by weight, propylene glycol mono as organic solvent 44 parts by weight of methyl ether acetate was mixed to prepare a photosensitive resin composition.
비교예 2Comparative Example 2
전체 수지 조성물 100 중량부 대비 알칼리 가용성 실록산 수지(합성예 3에서 합성한 실록산 수지, phenyl/methyl/propionic acid = 40/40/20, Mw 3800, 산가 40 mg[KOH]/g[resin]) 4 중량부, 불포화 결합을 가진 다관능 모노머로서 디펜타에리트리톨헥사아크릴레이트 4 중량부, 카본 블랙(100nm 입자크기) 9.4중량부(카본 블랙 20% 함량의 분산액 형태로 사용함. 카본 블랙의 분산액으로 환산시 47중량부), 에타논-1-[9-에틸-6-(2-메틸-4테트라히드로피라닐옥시벤조일)-9H-카바졸-3-일]-1-(o-아세틸옥심)(OXE-02, 바스프) 1 중량부, 용매로 프로필렌 글라이콜 모노메틸 에테르 아세테이트 44 중량부를 혼합하여 감광성 수지 조성물을 제조하였다.Alkali-soluble siloxane resin relative to 100 parts by weight of the total resin composition (siloxane resin synthesized in Synthesis Example 3, phenyl / methyl / propionic acid = 40/40/20, Mw 3800, acid value 40 mg [KOH] / g [resin]) 4 Parts by weight, polyfunctional monomer having an unsaturated bond, 4 parts by weight of dipentaerythritol hexaacrylate, 9.4 parts by weight of carbon black (100 nm particle size) (used in the form of a dispersion containing 20% of carbon black. 47 parts by weight), ethanone-1- [9-ethyl-6- (2-methyl-4tetrahydropyranyloxybenzoyl) -9H-carbazol-3-yl] -1- (o-acetyloxime) (OXE-02, BASF) 1 part by weight, 44 parts by weight of propylene glycol monomethyl ether acetate were mixed with a solvent to prepare a photosensitive resin composition.
<실험예>Experimental Example
상기 실시예 및 비교예에서 제조된 차광용(블랙매트릭스용) 감광성 수지 조성물을 LCD-panel용 유리기판에 1.2 마이크로미터의 두께로 스핀코팅을 한 후, 100℃에서 소프트베이크하여 용매를 제거하고 도포막을 형성하였다. 형성된 도포막을 노광하고, 알칼리 수용액으로 현상하여 도막을 형성하였다. 도막이 형성된 유리기판을 230℃ 오븐에서 30분간 열처리하여 최종 도막을 얻은 후, 면저항, 유전율, 광학밀도, pinhole, 접착력을 측정하고, 380℃ 오븐에서 30분간 다시 열처리를 하여 상기 평가를 하고, 평가 기준에 따른 결과를 표 1과 표 2에 나타내었다. After spin-coating the light-shielding (black matrix) photosensitive resin composition prepared in Examples and Comparative Examples to a glass substrate for LCD-panel to a thickness of 1.2 micrometers, soft-baking at 100 ℃ to remove the solvent and apply A film was formed. The formed coating film was exposed and developed with aqueous alkali solution to form a coating film. After the glass substrate on which the coating film was formed was heat treated in an oven at 230 ° C. for 30 minutes to obtain a final coating film, the sheet resistance, dielectric constant, optical density, pinhole, and adhesive force were measured, and the evaluation was performed by heat-treating again at 380 ° C. for 30 minutes. The results are shown in Table 1 and Table 2.
면저항 측정Sheet resistance measurement
형성된 도막의 면저항을 측정하기 위하여 Keithley사의 고저항 측정기를 사용하여 면저항을 측정하였다. In order to measure the sheet resistance of the formed coating film, the sheet resistance was measured using a Keithley high resistance measuring instrument.
유전율 측정Permittivity measurement
형성된 도막의 유전율을 측정하기 위하여 하부전극으로 ITO가 코팅된 유리기판에 도막을 형성하고, 알루미늄 증착을 통하여 상부전극을 형성하였다. 유전율의 측정은 Agilent사의 4284 LCR meter를 사용하였다.In order to measure the dielectric constant of the formed coating film, a coating film was formed on a glass substrate coated with ITO as a lower electrode, and an upper electrode was formed through aluminum deposition. The dielectric constant was measured using Agilent's 4284 LCR meter.
광학밀도 측정Optical density measurement
형성된 도막의 광학밀도를 측정하기 위하여 X-rite사의 361T를 사용하여 광학밀도 O.D를 측정하였다. In order to measure the optical density of the formed coating film, the optical density O.D was measured using 361T of X-rite.
Pin hole 측정 Pin hole measurement
형성된 도막의 pinhole 측정은 10cm X 10cm 유리기판내의 개수를 광학현미경을 이용하여 측정하였다. Pinhole의 개수가 0 ~ 10 개인 경우를 ○, 10 ~ 30 개인 경우를 △, 30 개를 넘는 경우를 ×로 표시하였다Pinhole measurement of the formed coating film was measured using an optical microscope to determine the number of 10cm x 10cm glass substrate. The case where the number of pinholes is 0 to 10 is indicated by ○, the case where 10 to 30 cases are represented by △, and the case where more than 30 cases are indicated by ×.
접착력 측정 Adhesion Measurement
접착력을 측정하기 위해 유리기판에 막을 형성시킨 후, 최종 경화한 시편을 크로스 해치 커터(crosshatch cutter)로 기판이 드러나도록 스크레치(scratch) 후 3M사 접착 테잎으로 부탁하여 탈착시켰다. 이 때 제거된 영역의 넓이가 전체 시험 표면의 65%를 초과할 경우 0B, 35 내지 65%일 경우 1B, 15 내지 35%일 경우 2B, 5 내지 15%일 경우 3B, 5% 미만일 경우 4B, 제거된 영역이 없는 경우 5B로 표시하였다.After the film was formed on the glass substrate to measure the adhesion, the final cured specimen was scratched to expose the substrate with a crosshatch cutter and then removed by attaching a 3M adhesive tape. The area of the removed area is then 0B if it exceeds 65% of the total test surface, 1B for 35-65%, 2B for 15-35%, 3B for 5-15%, 4B for less than 5%, 5B if no area was removed.
표 1
실시예1 실시예2 실시예3 실시예4 실시예 5
바인더 합성예 1실록산 수지12 중량부 합성예 1실록산 수지10 중량부 합성예 1실록산 수지9 중량부 합성예 1실록산 수지8 중량부 합성예 2실록산 수지10 중량부
불포화 다관능모노머 - - - - 2 중량부
카본블랙 분산액(20%, 100nm) 18 중량부 30 중량부 40 중량부 47 중량부 18 중량부
광중합개시제 OXE-02 1중량부
유기 용매 69 중량부 59 중량부 50 중량부 44 중량부 69 중량부
230 ℃ 열처리 후
면저항 (Ω/□) 3.23E+17 5.6E+17 4.3E+17 8.7E+16 8.2E+16
유전율 6.52 13.94 18.27 20.15 7.21
광학밀도(O.D/μm) 1.75 2.10 2.73 3.08 1.71
Pin hole O O O O O
접착력 5B 5B 5B 5B 5B
해상도 (μm) 5 5 10 10 5
감도 (mJ/cm2) 50 50 60 80 < 50
380 ℃ 열처리 후
면저항(Ω/□) 8.2E+13 5.4E+13 4.6E+13 9.59E+11 6.7E+13
유전율 8.62 16.48 23.38 32.13 9.93
광학밀도(O.D/μm) 1.92 2.24 2.69 3.11 1.87
Pin hole O O O O O
접착력 5B 5B 5B 5B 5B
Table 1
Example 1 Example 2 Example 3 Example 4 Example 5
bookbinder Synthesis Example 1 12 parts by weight of siloxane resin Synthesis Example 1 10 parts by weight of siloxane resin Synthesis Example 1 9 parts by weight of siloxane resin Synthesis Example 1 8 parts by weight of siloxane resin Synthesis Example 2 10 parts by weight of siloxane resin
Unsaturated polyfunctional monomer - - - - 2 parts by weight
Carbon Black Dispersion (20%, 100nm) 18 parts by weight 30 parts by weight 40 parts by weight 47 parts by weight 18 parts by weight
Photopolymerization Initiator OXE-02 1 part by weight
Organic solvent 69 parts by weight 59 parts by weight 50 parts by weight 44 parts by weight 69 parts by weight
After heat treatment at 230 ℃
Sheet resistance (Ω / □) 3.23E + 17 5.6E + 17 4.3E + 17 8.7E + 16 8.2E + 16
permittivity 6.52 13.94 18.27 20.15 7.21
Optical Density (OD / μm) 1.75 2.10 2.73 3.08 1.71
Pin hole O O O O O
Adhesion 5B 5B 5B 5B 5B
Resolution (μm) 5 5 10 10 5
Sensitivity (mJ / cm 2 ) 50 50 60 80 <50
After heat treatment at 380 ℃
Sheet resistance (Ω / □) 8.2E + 13 5.4E + 13 4.6E + 13 9.59E + 11 6.7E + 13
permittivity 8.62 16.48 23.38 32.13 9.93
Optical Density (OD / μm) 1.92 2.24 2.69 3.11 1.87
Pin hole O O O O O
Adhesion 5B 5B 5B 5B 5B
표 2
실시예6 실시예7 실시예8 비교예 1 비교예2
바인더 합성예 2실록산 수지8 중량부 합성예 2실록산 수지6 중량부 합성예 2실록산 수지4 중량부 카도계 수지4 중량부 합성예 3실록산 수지4 중량부
불포화 다관능모노머 4 중량부 6 중량부 4 중량부 4 중량부 4 중량부
카본블랙 분산액(20%, 100nm) 18 중량부 18 중량부 47 중량부 47 중량부 47 중량부
광중합개시제 OXE-02 1중량부
유기 용매 69 중량부 69 중량부 44 중량부 44 중량부 44 중량부
230 ℃ 열처리 후
면저항(Ω/□) 7.7E+16 8.8E+16 8.9E+16 4.5E+16 7.8E+16
유전율 7.83 8.11 22.36 45.30 21.63
광학밀도(O.D/μm) 1.75 1.72 3.21 3.03 3.11
Pin hole O O O O O
접착력 5B 5B 5B 5B 5B
해상도 (μm) 5 5 5 10 30
감도 (mJ/cm2) < 50 50 50 80 150
380 ℃ 열처리 후
면저항(Ω/□) 8.2E+11 4.9E+08 2.6E+09 4.39E+05 3.1E+09
유전율 12.47 21.37 120.03 190.97 115.58
광학밀도(O.D/μm) 1.66 1.04 2.53 2.14 2.64
Pin hole X X
접착력 5B 4B 3B 0B 1B
TABLE 2
Example 6 Example 7 Example 8 Comparative Example 1 Comparative Example 2
bookbinder Synthesis Example 2 8 parts by weight of siloxane resin Synthesis Example 2 6 parts by weight of siloxane resin Synthesis Example 2 4 parts by weight of siloxane resin Cardo resin 4 parts by weight Synthesis Example 3 4 parts by weight of siloxane resin
Unsaturated polyfunctional monomer 4 parts by weight 6 parts by weight 4 parts by weight 4 parts by weight 4 parts by weight
Carbon Black Dispersion (20%, 100nm) 18 parts by weight 18 parts by weight 47 parts by weight 47 parts by weight 47 parts by weight
Photopolymerization Initiator OXE-02 1 part by weight
Organic solvent 69 parts by weight 69 parts by weight 44 parts by weight 44 parts by weight 44 parts by weight
After heat treatment at 230 ℃
Sheet resistance (Ω / □) 7.7E + 16 8.8E + 16 8.9E + 16 4.5E + 16 7.8E + 16
permittivity 7.83 8.11 22.36 45.30 21.63
Optical Density (OD / μm) 1.75 1.72 3.21 3.03 3.11
Pin hole O O O O O
Adhesion 5B 5B 5B 5B 5B
Resolution (μm) 5 5 5 10 30
Sensitivity (mJ / cm 2 ) <50 50 50 80 150
After heat treatment at 380 ℃
Sheet resistance (Ω / □) 8.2E + 11 4.9E + 08 2.6E + 09 4.39E + 05 3.1E + 09
permittivity 12.47 21.37 120.03 190.97 115.58
Optical Density (OD / μm) 1.66 1.04 2.53 2.14 2.64
Pin hole X X
Adhesion 5B 4B 3B 0B 1B
상기 실시예 1 내지 4를 살펴보면, 수지 조성물 중 실록산 수지의 함량이 증가할수록 상기 수지 조성물로 제조된 도막의 유전율이 낮아짐, 즉, 전기절연성이 향상됨을 알 수 있다.Looking at Examples 1 to 4, it can be seen that as the content of the siloxane resin in the resin composition increases, the dielectric constant of the coating film made of the resin composition is lowered, that is, the electrical insulation is improved.
또한, 실시예 5 내지 8은 불포화 결합을 갖는 다관능성 모노머로서 디펜타에리트리톨헥사아크릴레이트를 포함하는 수지 조성물에 관한 것으로, 실시예 5 내지 8로부터 제조된 도막에서도 실록산 수지의 함량이 증가할수록 낮은 유전율을 나타내어 우수한 전기절연성을 가짐을 알 수 있다.In addition, Examples 5 to 8 relates to a resin composition comprising dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, and the lower the content of the siloxane resin as the content of the siloxane resin increases in the coating films prepared from Examples 5 to 8, respectively. It can be seen that the dielectric constant exhibits excellent electrical insulation.
또한, 실시예 5, 8을 실시예 1, 4 각각과 비교하면, 실시예 5, 8은 실시예 1, 4의 수지 조성물 중 실록산 수지 함량의 일부를 불포화 결합을 갖는 다관능성 모노머로 대체한 것으로 볼 수 있으며, 이와 같이 대체된 실시예 5, 8로부터 형성된 도막은 실시예 1, 4로부터 형성된 도막보다 열등한 전기절연성 효과를 갖는 것으로 나타났다.When Examples 5 and 8 were compared with Examples 1 and 4, Examples 5 and 8 replaced some of the siloxane resin contents in the resin compositions of Examples 1 and 4 with polyfunctional monomers having an unsaturated bond. It can be seen that the coating films formed from the examples 5 and 8 replaced in this way have an inferior electrical insulating effect than the coating films formed from the examples 1 and 4.
한편, 카도계 수지를 사용한 비교예 1의 수지 조성물로부터 제조된 도막은 실시예 1 내지 8의 수지 조성물로부터 제조된 도막에 비해 현저하게 높은 유전율을 나타내어, 매우 열등한 전기절연성 특성을 갖는 것으로 나타났다.On the other hand, the coating film prepared from the resin composition of Comparative Example 1 using the cardo-based resin showed a significantly higher dielectric constant than the coating film prepared from the resin compositions of Examples 1 to 8, and appeared to have very inferior electrical insulating properties.
상기 표 1과 표 2에 나타난 바와 같이, 본 발명에서 제조되는 도막은 380 ℃의 고온공정 후에도 도막의 전기절연성, 광학특성, 접착력, 패턴해상도, 감도 등이 비교예보다 크게 우수하여 고온이 필요한 제조공정에 적합하였으며, 이러한 도막을 포함하는 차광층 역시 전술한 우수한 전기절연성, 광학특성, 패턴 해상도, 감도를 나타낼 수 있다.As shown in Table 1 and Table 2, the coating film prepared in the present invention is excellent in electrical insulation, optical properties, adhesion, pattern resolution, sensitivity, etc. of the coating film even after a high temperature process of 380 ℃ is required to produce a high temperature The light shielding layer including the coating layer may also exhibit excellent electrical insulation, optical characteristics, pattern resolution, and sensitivity as described above.

Claims (17)

  1. 하기 화학식 1로 표시되는 중합단위 및 하기 화학식 2로 표시되는 중합단위를 포함하는 실록산 수지; 안료; 광중합 개시제; 및 유기용매를 포함하는 차광용 감광성 수지 조성물:A siloxane resin comprising a polymerization unit represented by the following Chemical Formula 1 and a polymerization unit represented by the following Chemical Formula 2; Pigments; Photopolymerization initiator; And a light blocking photosensitive resin composition comprising an organic solvent:
    [화학식 1][Formula 1]
    Figure PCTKR2015006454-appb-I000017
    Figure PCTKR2015006454-appb-I000017
    상기 화학식 1에서,In Chemical Formula 1,
    R1은 탄소수 1 내지 20의 직쇄상 또는 분지상의 알킬렌기, 탄소수 6 내지 20의 아릴렌기, 아릴기로 치환된 전체 탄소수 7 내지 20의 알킬렌기, 알킬기로 치환된 전체 탄소수 7 내지 20의 아릴렌기, 또는 알킬렌기와 아릴렌기가 연결된 전체 탄소수 7 내지 20의 기이고R 1 is a linear or branched alkylene group having 1 to 20 carbon atoms, an arylene group having 6 to 20 carbon atoms, an alkylene group having 7 to 20 carbon atoms substituted with an aryl group, and an arylene group having 7 to 20 carbon atoms substituted with an alkyl group. Or a group having 7 to 20 carbon atoms, in which an alkylene group and an arylene group are connected.
    X는 하이드록시, 카르복실산, 카르복실산 무수물, 카르복실산 무수물 유도체, 이미드, 이미드 유도체, 아마이드, 아마이드 유도체, 아민 또는 머켑토이며, X is hydroxy, carboxylic acid, carboxylic anhydride, carboxylic anhydride derivative, imide, imide derivative, amide, amide derivative, amine or mercanto,
    [화학식 2][Formula 2]
    Figure PCTKR2015006454-appb-I000018
    Figure PCTKR2015006454-appb-I000018
    상기 화학식 2에서,In Chemical Formula 2,
    R2는 각각 독립적으로 수소, 탄소수 1 내지 20의 직쇄상, 분지상 또는 환상의 알킬기, 탄소수 6 내지 10의 아릴기, 탄소수 2 내지 10의 불포화 탄화수소기 또는 탄소수 2 내지 10의 아실옥시기이고, 분자내 복수의 R2는 서로 동일하거나 다르며, Each R 2 is independently hydrogen, a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 10 carbon atoms, an unsaturated hydrocarbon group having 2 to 10 carbon atoms, or an acyloxy group having 2 to 10 carbon atoms, A plurality of R 2 in the molecule is the same or different from each other,
    n은 0 내지 3인 정수이며, n=3인 중합단위는 n이 3이 아닌 다른 중합단위와 병용된다. n is an integer of 0-3, and the polymer unit in which n = 3 is used together with another polymer unit in which n is not 3.
  2. 제1항에 있어서,The method of claim 1,
    상기 화학식 1로 표시되는 중합단위가 하기 화학식 1a 내지 1n으로 이루어진 군으로부터 선택된 것을 특징으로 하는 차광용 감광성 수지 조성물:Light-sensitive photosensitive resin composition, characterized in that the polymerization unit represented by the formula (1) is selected from the group consisting of the following formula (1a to 1n):
    [화학식 1a][Formula 1a]
    Figure PCTKR2015006454-appb-I000019
    Figure PCTKR2015006454-appb-I000019
    [화학식 1b][Formula 1b]
    Figure PCTKR2015006454-appb-I000020
    Figure PCTKR2015006454-appb-I000020
    [화학식 1c][Formula 1c]
    Figure PCTKR2015006454-appb-I000021
    Figure PCTKR2015006454-appb-I000021
    [화학식 1d][Formula 1d]
    Figure PCTKR2015006454-appb-I000022
    Figure PCTKR2015006454-appb-I000022
    [화학식 1e][Formula 1e]
    Figure PCTKR2015006454-appb-I000023
    Figure PCTKR2015006454-appb-I000023
    [화학식 1f][Formula 1f]
    Figure PCTKR2015006454-appb-I000024
    Figure PCTKR2015006454-appb-I000024
    [화학식 1g][Formula 1g]
    Figure PCTKR2015006454-appb-I000025
    Figure PCTKR2015006454-appb-I000025
    [화학식 1h][Formula 1h]
    Figure PCTKR2015006454-appb-I000026
    Figure PCTKR2015006454-appb-I000026
    [화학식 1i]Formula 1i]
    Figure PCTKR2015006454-appb-I000027
    Figure PCTKR2015006454-appb-I000027
    [화학식 1j][Formula 1j]
    Figure PCTKR2015006454-appb-I000028
    Figure PCTKR2015006454-appb-I000028
    [화학식 1k][Formula 1k]
    Figure PCTKR2015006454-appb-I000029
    Figure PCTKR2015006454-appb-I000029
    [화학식 1l][Formula 1l]
    Figure PCTKR2015006454-appb-I000030
    Figure PCTKR2015006454-appb-I000030
    [화학식 1m][Formula 1m]
    Figure PCTKR2015006454-appb-I000031
    Figure PCTKR2015006454-appb-I000031
    [화학식 1n][Formula 1n]
    Figure PCTKR2015006454-appb-I000032
    Figure PCTKR2015006454-appb-I000032
    상기 식 각각에서, m과 n은 각각 독립적으로 1 내지 20의 정수일 수 있다.In each of the above formula, m and n may be each independently an integer of 1 to 20.
  3. 제1항에 있어서,The method of claim 1,
    상기 화학식 2로 표시되는 중합단위가 테트라알콕시 실란, 트리알콕시 실란, 메틸 트리알콕시 실란, 에틸 트리알콕시 실란, n-프로필 트리알콕시 실란, 이소프로필 트리알콕시 실란, n-부틸 트리알콕시 실란, tert-부틸 트리알콕시 실란, 페닐 트리알콕시 실란, 나프타 트리알콕시 실란, 비닐 트리알콕시 실란, 메타아크릴옥시메틸 트리알콕시 실란, 2-메타아크릴옥시에틸 트리알콕시 실란, 3-메타아크릴옥시프로필 트리알콕시 실란, 3-메타아크릴옥시프로필 메틸디알콕시 실란, 3-메타아크릴옥시프로필 에틸디알콕시 실란, 아크릴옥시메틸 트리알콕시 실란, 2-아크릴옥시에틸 트리알콕시 실란, 3-아크릴옥시프로필 트리알콕시 실란, 3-아크릴옥시프로필 메틸디알콕시 실란, 3-아크릴옥시프로필 에틸디알콕시 실란, 3-글리시딜옥시프로필 트리알콕시 실란, 2-에폭시시클로헥실에틸 트리알콕시 실란, 3-에폭시시클로헥실프로필 트리알콕시 실란, 디메틸 알콕시 실란, 디에틸 디알콕시 실란, 디프로필 디알콕시 실란, 디페닐 디알콕시 실란, 디페닐 실란디올 및 페닐메틸 디알콕시실란으로 이루어진 군으로부터 선택된 1종 또는 2종 이상의 혼합물로부터 형성된 것을 특징으로 하는 차광용 감광성 수지 조성물.The polymerization unit represented by the formula (2) is tetraalkoxy silane, trialkoxy silane, methyl trialkoxy silane, ethyl trialkoxy silane, n-propyl trialkoxy silane, isopropyl trialkoxy silane, n-butyl trialkoxy silane, tert-butyl Trialkoxy silane, phenyl trialkoxy silane, naphtha trialkoxy silane, vinyl trialkoxy silane, methacryloxymethyl trialkoxy silane, 2-methacryloxyethyl trialkoxy silane, 3-methacryloxypropyl trialkoxy silane, 3-metha Acryloxypropyl methyl dialkoxy silane, 3-methacryloxypropyl ethyl dialkoxy silane, acryloxymethyl trialkoxy silane, 2-acryloxyethyl trialkoxy silane, 3-acryloxypropyl trialkoxy silane, 3-acryloxypropyl methyl Dialkoxy silane, 3-acryloxypropyl ethyl dialkoxy silane, 3-glycidyloxypropyl trialkoxy silane, 2-e Poxycyclohexylethyl trialkoxy silane, 3-epoxycyclohexylpropyl trialkoxy silane, dimethyl alkoxy silane, diethyl dialkoxy silane, dipropyl dialkoxy silane, diphenyl dialkoxy silane, diphenyl silanediol and phenylmethyl dialkoxysilane Light-sensitive photosensitive resin composition, characterized in that formed from one or two or more mixtures selected from the group consisting of.
  4. 제3항에 있어서,The method of claim 3,
    상기 화학식 2로 표시되는 중합단위가 메타아크릴옥시메틸 트리알콕시 실란, 2-메타아크릴옥시에틸 트리알콕시 실란, 3-메타아크릴옥시프로필 트리알콕시 실란, 3-메타아크릴옥시프로필 메틸디알콕시 실란, 3-메타아크릴옥시프로필 에틸디알콕시 실란, 아크릴옥시메틸 트리알콕시 실란, 2-아크릴옥시에틸 트리알콕시 실란, 3-아크릴옥시프로필 트리알콕시 실란, 3-아크릴옥시프로필 메틸디알콕시 실란 및 3-아크릴옥시프로필 에틸디알콕시 실란으로 이루어진 군으로부터 선택된 1종 또는 2종 이상의 혼합물로부터 형성된 것을 특징으로 하는 차광용 감광성 수지 조성물.The polymerization unit represented by the said Formula (2) is methacryloxymethyl trialkoxy silane, 2-methacryloxyethyl trialkoxy silane, 3-methacryloxypropyl trialkoxy silane, 3-methacryloxypropyl methyl dialkoxy silane, 3- Methacryloxypropyl ethyl dialkoxy silane, acryloxymethyl trialkoxy silane, 2-acryloxyethyl trialkoxy silane, 3-acryloxypropyl trialkoxy silane, 3-acryloxypropyl methyl dialkoxy silane and 3-acryloxypropyl ethyl Light-sensitive photosensitive resin composition, characterized in that formed from one or two or more mixtures selected from the group consisting of dialkoxy silanes.
  5. 제1항에 있어서,The method of claim 1,
    상기 실록산 수지는 화학식 1의 중합단위와 화학식 2의 중합단위를 합한 100몰% 기준으로 화학식 1의 중합단위 5 내지 40몰%와 화학식 2의 중합단위 95 내지 60몰%로 구성된 것을 특징으로 하는 차광용 감광성 수지 조성물.The siloxane resin is light-shielding, characterized in that composed of 5 to 40 mol% of the polymerization unit of Formula 1 and 95 to 60 mol% of the polymerization unit of Formula 2 on the basis of 100 mol% of the polymerization unit of Formula 1 and the polymerization unit of Formula 2 Photosensitive resin composition for.
  6. 제1항에 있어서,The method of claim 1,
    상기 실록산 수지가, KOH로 적정시, 10 ~ 200 mgKOH/g수지 범위의 산가를 갖는 것을 특징으로 하는 차광용 감광성 수지 조성물. When the siloxane resin is titrated with KOH, the siloxane resin has an acid value in the range of 10 to 200 mgKOH / g resin.
  7. 제1항에 있어서,The method of claim 1,
    불포화 결합을 갖는 다관능성 모노머를 더 포함하는 것을 특징으로 하는 차광용 감광성 수지 조성물.The light-sensitive photosensitive resin composition which further contains the polyfunctional monomer which has an unsaturated bond.
  8. 제1항에 있어서,The method of claim 1,
    상기 안료가 흑색 안료인 것을 특징으로 하는 차광용 감광성 수지 조성물.The pigment is a light-shielding photosensitive resin composition, characterized in that the black pigment.
  9. 제1항에 있어서,The method of claim 1,
    상기 안료가 카본블랙, 티탄블랙, 아닐린블랙, 퍼릴렌 블랙, 티탄산 스트론튬, 산화 크롬 및 세리아로 이루어진 군으로부터 선택된 1종 또는 2종 이상의 혼합물인 것을 특징으로 하는 차광용 감광성 수지 조성물.The pigment is a light-sensitive photosensitive resin composition, characterized in that the pigment is one or a mixture of two or more selected from the group consisting of carbon black, titanium black, aniline black, perylene black, strontium titanate, chromium oxide and ceria.
  10. 제1항 또는 제7항에 있어서,The method according to claim 1 or 7,
    상기 안료가 실록산 수지 100 중량부 또는 불포화 결합을 가진 다관능성 모노머가 사용되는 경우에는 실록산 수지와 불포화 결합을 가진 다관능성 모노머를 합한 중량 100 중량부에 대하여 20 내지 130 중량부의 양으로 포함되는 것을 특징으로 하는 차광용 감광성 수지 조성물.When the pigment is 100 parts by weight of the siloxane resin or polyfunctional monomer having an unsaturated bond is used in an amount of 20 to 130 parts by weight based on 100 parts by weight of the total weight of the siloxane resin and the polyfunctional monomer having an unsaturated bond. Light-sensitive photosensitive resin composition made into.
  11. 제1항 또는 제7항에 있어서,The method according to claim 1 or 7,
    상기 광중합 개시제가 실록산 수지 100 중량부 또는 불포화 결합을 가진 다관능성 모노머가 사용되는 경우에는 실록산 수지와 불포화 결합을 가진 다관능성 모노머를 합한 중량 100 중량부에 대하여 1 ~ 30 중량부의 양으로 포함되는 것을 특징으로 하는 차광용 감광성 수지 조성물.When the photopolymerization initiator is 100 parts by weight of the siloxane resin or polyfunctional monomer having an unsaturated bond is used in an amount of 1 to 30 parts by weight based on 100 parts by weight of the total weight of the siloxane resin and the polyfunctional monomer having an unsaturated bond. Light-sensitive photosensitive resin composition characterized by the above-mentioned.
  12. 제7항에 있어서,The method of claim 7, wherein
    상기 불포화 결합을 가진 다관능성 모노머는 실록산 수지 100 중량부에 대하여 0보다 크고 100 중량부 이하인 양으로 포함되는 것을 특징으로 하는 차광용 감광성 수지 조성물.Light-sensitive photosensitive resin composition, characterized in that the polyfunctional monomer having an unsaturated bond is contained in an amount of greater than 0 and 100 parts by weight or less based on 100 parts by weight of the siloxane resin.
  13. 제1항에 있어서,The method of claim 1,
    상기 유기용매가 차광용 감광성 수지 조성물 전체 100 중량부에 대하여, 20 ~ 90 중량부의 양으로 포함되는 것을 특징으로 하는 차광용 감광성 수지 조성물.The said organic solvent is contained in the quantity of 20-90 weight part with respect to 100 weight part of whole light-sensitive photosensitive resin compositions, The light-shielding photosensitive resin composition characterized by the above-mentioned.
  14. 제1항 내지 제13항 중 어느 한 항의 차광용 감광성 수지 조성물로부터 형성된 도막을 포함하는 차광층.The light shielding layer containing the coating film formed from the light-sensitive photosensitive resin composition of any one of Claims 1-13.
  15. 제14항에 있어서,The method of claim 14,
    단위 두께(μm)당 1.0 내지 4.0 범위의 광학 밀도를 가지는 것을 특징으로 하는 차광층.A light shielding layer having an optical density in the range of 1.0 to 4.0 per unit thickness (μm).
  16. (S1) 제1항 또는 제7항에 기재된 차광용 감광성 수지 조성물을 기판에 도포하는 단계;(S1) applying the light-shielding photosensitive resin composition according to claim 1 to a substrate;
    (S2) 상기 조성물 중의 용매를 제거하여 도포막을 형성하는 단계;(S2) removing the solvent in the composition to form a coating film;
    (S3) 상기 도포막을 노광하고 현상하여 도막을 형성하는 단계; 및(S3) exposing and developing the coating film to form a coating film; And
    (S4) 상기 도막을 200℃ 이상 300 ℃ 미만의 온도에서 열처리하는 단계를 포함하는 (S4) comprising the step of heat-treating the coating film at a temperature of more than 200 ℃ less than 300 ℃
    차광층용 도막의 제조방법.The manufacturing method of the coating film for light shielding layers.
  17. 제16항에 있어서,The method of claim 16,
    상기 (S4) 단계 이후에, (S5) 상기 도막을 300℃ 이상 600 ℃ 이하의 온도에서 열처리하는 단계를 더 포함하는 것을 특징으로 하는 제조방법.After the step (S4), (S5) further comprising the step of heat-treating the coating film at a temperature of 300 ° C or more and 600 ° C or less.
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