TW201610587A - Photosensitive composition for light shielding and light shielding layer obtained therefrom - Google Patents
Photosensitive composition for light shielding and light shielding layer obtained therefrom Download PDFInfo
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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Abstract
Description
本發明關於一種用於光遮蔽之光敏性樹脂組成物及一種從其形成之光遮蔽層。更特別地,本發明關於一種光敏性樹脂組成物,其可藉由光蝕刻方法被使用於製備用在多種類型之電子裝置中的光遮蔽層;以及一種藉由固化該組成物所形成之包括薄膜的光遮蔽層。 The present invention relates to a photosensitive resin composition for light shielding and a light shielding layer formed therefrom. More particularly, the present invention relates to a photosensitive resin composition which can be used by photolithography to prepare a light shielding layer for use in various types of electronic devices; and a film formed by curing the composition. The light shielding layer of the film.
關於用於製造包括平板顯示器裝置諸如液晶顯示器裝置或觸控螢幕裝置之電子產品的顯影技術,有需求於縮減該等產品的尺寸和厚度。為了縮減該等產品的尺寸和厚度,不可避免地會增加該等產品的內部元件集成度,且相應地,亟需改善在製造該等內部元件中使用之材料的電性能。 With regard to development techniques for fabricating electronic products including flat panel display devices such as liquid crystal display devices or touch screen devices, there is a need to reduce the size and thickness of such products. In order to reduce the size and thickness of such products, it is inevitable to increase the internal component integration of such products, and accordingly, there is an urgent need to improve the electrical properties of the materials used in the manufacture of such internal components.
一般地,黑色矩陣光敏性樹脂組成物是一種用於生產包括在顯示器元件諸如液晶顯示器裝置、有機電場發光元件及顯示器面板中之彩色過濾器的必要材料。黑色矩陣光敏性樹脂組成物被用來防止液晶顯示器裝置之彩色過濾器中之R(紅色)、G(綠色)和B(藍色)之間的顏色混合、或被用在觸控面板裝置中之X和Y金屬電極的遮光屏(bezel) 覆蓋。 In general, the black matrix photosensitive resin composition is a necessary material for producing a color filter included in display elements such as liquid crystal display devices, organic electroluminescent elements, and display panels. The black matrix photosensitive resin composition is used to prevent color mixing between R (red), G (green), and B (blue) in the color filter of the liquid crystal display device, or is used in a touch panel device. Shade of X and Y metal electrodes cover.
近來,對於用於顯示器之液晶顯示器裝置,正在積極研究使用在高解析度超過超清晰度(UD)及高速驅動超過240Hz的裝置、低溫多晶矽(LTPS)及氧化物薄膜電晶體。 Recently, for liquid crystal display devices for displays, devices using high-resolution ultra-high definition (UD) and high-speed driving over 240 Hz, low temperature polysilicon (LTPS) and oxide thin film transistors are being actively studied.
一般地,因為半導體之氧化物薄膜電晶體的特性會受到光而變化,所以導入光遮蔽層以減小上述問題。金屬光遮蔽層是最初被用作該光遮蔽層的,這是因為隨後製程包括PE-CVD(電漿增強式化學氣相沉積法)是在形成該光遮蔽層之後的高溫下進行,然而,從金屬形成的光遮蔽層有下列的問題:作為該金屬光遮蔽層有高反射率、光被反射回而進入源極和汲極電極與光遮蔽層之間、及在該源極和汲極電極之間出現寄生電壓並作為賦予抵抗裝置之操作的因子,從而導致增加資料線的負載。 In general, since the characteristics of the oxide thin film transistor of a semiconductor are changed by light, the light shielding layer is introduced to reduce the above problem. The metal light shielding layer was originally used as the light shielding layer because the subsequent process including PE-CVD (plasma enhanced chemical vapor deposition) was performed at a high temperature after the formation of the light shielding layer, however, The light shielding layer formed of metal has the following problems: as the metal light shielding layer has high reflectance, light is reflected back into the source and between the drain electrode and the light shielding layer, and at the source and the drain Parasitic voltages appear between the electrodes and act as a factor that imparts resistance to the operation of the device, resulting in increased load on the data line.
此外,在觸控面板裝置中,為了縮減該等產品的厚度,從使保護玻璃(cover glass)與觸控面板玻璃黏結在一起的傳統技術發展,進行研究單片玻璃解決方案(OGS)技術,其在保護玻璃上形成觸控面板。在OGS觸控面板中,首先形成已經被形成在保護玻璃上的光遮蔽層(遮光屏),然後再形成觸控面板驅動單元。在形成該觸控面板驅動單元之透明電極的製程中,需要進行高溫氣相沉積或退火製程。然而,傳統使用於光遮蔽層之黑色矩陣光敏性樹脂在所述高溫製程中有電性質劣化的缺點。 In addition, in the touch panel device, in order to reduce the thickness of the products, from the conventional technology for bonding the cover glass and the touch panel glass, the research on the monolithic glass solution (OGS) technology is carried out. It forms a touch panel on the protective glass. In the OGS touch panel, a light shielding layer (light shield) that has been formed on the protective glass is first formed, and then the touch panel driving unit is formed. In the process of forming the transparent electrode of the touch panel driving unit, a high temperature vapor deposition or annealing process is required. However, the black matrix photosensitive resin conventionally used for the light shielding layer has a drawback that electrical properties are deteriorated in the high temperature process.
本發明係針對提供一種用於光遮蔽之光敏性樹脂組成物,其即使在高溫製程之後仍產生所欲的電性質包括電阻和介電常數、及所欲的光學性質包括光密度和反射率。 The present invention is directed to providing a photosensitive resin composition for light shielding which produces desired electrical properties even after a high temperature process including electrical resistance and dielectric constant, and desired optical properties including optical density and reflectance.
為了達成上述目的,在本發明之一個實施例中,提供一種光敏性樹脂組成物,包括:(A)矽氧烷樹脂,含有由下列化學式1表示之聚合單元及由下列化學式2表示之聚合單元;(B)顏料;(C)光聚合起始劑;及(D)有機溶劑。 In order to achieve the above object, in one embodiment of the present invention, there is provided a photosensitive resin composition comprising: (A) a decyl alkane resin containing a polymerized unit represented by the following Chemical Formula 1 and a polymerization unit represented by the following Chemical Formula 2 (B) a pigment; (C) a photopolymerization initiator; and (D) an organic solvent.
式中R1為具有1至20個碳原子之直鏈或分支鏈伸烷基、具有6至20個碳原子之伸芳基、具有含芳基取代基之7至20個碳原子總數之伸烷基、具有含烷基取代基之7至20個碳原子總數之伸芳基或具有其中伸烷基鏈結至伸芳基之7至20個碳原子總數之基團。 Wherein R 1 is a linear or branched alkyl group having 1 to 20 carbon atoms, an extended aryl group having 6 to 20 carbon atoms, and a total of 7 to 20 carbon atoms having an aryl group-containing substituent An alkyl group, a aryl group having a total of 7 to 20 carbon atoms having an alkyl group-containing substituent or a group having a total of 7 to 20 carbon atoms in which an alkyl group is extended to an extended aryl group.
X為羥基、羧酸、羧酸酐、羧酸酐衍生物、醯亞胺、醯亞胺衍生物、醯胺、醯胺衍生物、胺或巰基。 X is a hydroxyl group, a carboxylic acid, a carboxylic anhydride, a carboxylic anhydride derivative, a quinone imine, a quinone imine derivative, a decylamine, a decylamine derivative, an amine or a fluorenyl group.
[化學式2]R2 nSiO(4-n)/2 [Chemical Formula 2] R 2 n SiO (4-n)/2
式中R2各自獨立為氫、具有1至20個碳原子之直鏈、 分支鏈或環狀烷基、具有6至10個碳原子之芳基、具有2至10個碳原子之不飽和烴基或具有2至10個碳原子之醯氧基,在分子中之複數個R2可為相同或不同。 Wherein R 2 is each independently hydrogen, a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 10 carbon atoms, and an unsaturated hydrocarbon group having 2 to 10 carbon atoms. Or a decyloxy group having 2 to 10 carbon atoms, and the plurality of R 2 in the molecule may be the same or different.
n為0至3之整數,且其中n為3之聚合單元可與其中n為除3以外之另一聚合單元組合使用。 n is an integer from 0 to 3, and a polymer unit in which n is 3 may be used in combination with another polymerization unit in which n is other than 3.
以化學式1之該聚合單元及化學式2之該聚合單元合計100莫耳%為基準,該矽氧烷樹脂可由5-40莫耳%之化學式1之聚合單元及60-95莫耳%之化學式2之聚合單元構成。 Based on 100 ppm by mole of the polymerization unit of Chemical Formula 1 and the polymerization unit of Chemical Formula 2, the siloxane oxide may be 5-40 mol% of the polymer unit of Chemical Formula 1 and 60-95 mol% of the chemical formula 2 The composition of the polymerization unit.
以氫氧化鉀(KOH)滴定樹脂,該矽氧烷樹脂具有10-200mg KOH/g之範圍的酸價。 The resin was titrated with potassium hydroxide (KOH) having an acid value in the range of 10 to 200 mg KOH/g.
光敏性樹脂組成物可進一步包含(E)具有不飽和鍵之多官能單體。 The photosensitive resin composition may further contain (E) a polyfunctional monomer having an unsaturated bond.
該顏料可為黑色顏料。 The pigment can be a black pigment.
而且,該顏料可為選自由下列者所組成之群組之任一者:碳黑、鈦黑、苯胺黑、苝黑、鈦酸鍶、氧化鉻及氧化鈰或其混合物。 Moreover, the pigment may be any one selected from the group consisting of carbon black, titanium black, aniline black, phthalocyanine, barium titanate, chromium oxide, and cerium oxide or a mixture thereof.
而且,當使用具有不飽和鍵之該多官能單體時,以100重量份之該矽氧烷樹脂為基準或以該矽氧烷樹脂及具有不飽和鍵之該多官能單體合計100重量份為基準,該顏料以20-130重量份之含量存在。 Further, when the polyfunctional monomer having an unsaturated bond is used, 100 parts by weight based on 100 parts by weight of the fluorene oxide resin or 100 parts by weight of the polysiloxane monomer having the oxirane resin and the unsaturated bond For the purpose of the reference, the pigment is present in an amount of from 20 to 130 parts by weight.
而且,當使用具有不飽和鍵之該多官能單體時,以100重量份之該矽氧烷樹脂為基準或以該矽氧烷樹脂及具有不飽和鍵之該多官能單體合計100重量份為基準,該光聚 合起始劑以1-30重量份之含量存在。 Further, when the polyfunctional monomer having an unsaturated bond is used, 100 parts by weight based on 100 parts by weight of the fluorene oxide resin or 100 parts by weight of the polysiloxane monomer having the oxirane resin and the unsaturated bond For the benchmark, the light is gathered The starter is present in an amount of from 1 to 30 parts by weight.
當使用具有不飽和鍵之該多官能單體時,以100重量份之該矽氧烷樹脂為基準,該多官能單體可以多於0重量份且少於或等於100重量份之含量存在。 When the polyfunctional monomer having an unsaturated bond is used, the polyfunctional monomer may be present in an amount of more than 0 parts by weight and less than or equal to 100 parts by weight based on 100 parts by weight of the onium oxide resin.
以100重量份該光敏性樹脂組成物之總量為基準,該有機溶劑可以20-90重量份之含量存在。 The organic solvent may be present in an amount of 20 to 90 parts by weight based on 100 parts by weight of the total of the photosensitive resin composition.
根據本發明之另一態樣,提供一種光遮蔽層,包含從上述光敏性樹脂組成物所形成的薄膜。 According to another aspect of the present invention, there is provided a light shielding layer comprising a film formed from the photosensitive resin composition.
該光遮蔽層具有每單位厚度(μm)介於1.0-4.0間之範圍的光密度。 The light shielding layer has an optical density in a range of from 1.0 to 4.0 per unit thickness (μm).
根據本發明之又一態樣,提供一種製備用於光遮蔽層之薄膜之方法,包括:(S1)在基板上塗布如本發明實施例之用於光遮蔽之光敏性樹脂組成物;(S2)從該組成物移除溶劑以形成塗覆膜;(S3)曝光及顯影該塗覆膜以形成薄膜;及(S4)在介於200℃至少於300℃間之溫度下熱處理該薄膜。 According to still another aspect of the present invention, a method of preparing a film for a light shielding layer, comprising: (S1) coating a photosensitive resin composition for light shielding according to an embodiment of the present invention on a substrate; (S2) Removing the solvent from the composition to form a coating film; (S3) exposing and developing the coating film to form a film; and (S4) heat treating the film at a temperature between 200 ° C and at least 300 ° C.
而且,在(S4)之後,該方法可進一步包含:(S5)在從300℃至600℃之溫度下熱處理該薄膜。 Moreover, after (S4), the method may further comprise: (S5) heat treating the film at a temperature of from 300 ° C to 600 ° C.
根據本發明之一個實施例之用於光遮蔽之光敏性樹脂組成物,可在曝光之後藉由在鹼性水溶液中水性顯影(aqueous development)而形成圖案,且該圖案被形成之後,所形成的圖案即使在300℃或更高溫度的製程之後仍可維持其外形。 A photosensitive resin composition for light shielding according to an embodiment of the present invention may be formed by patterning after aqueous exposure by aqueous development in an alkaline aqueous solution, and after the pattern is formed, formed The pattern maintains its shape even after a process at 300 ° C or higher.
又,藉由固化用於光遮蔽之光敏性樹脂組成物所形成的薄膜具有電絕緣性質,包括表面電阻率大於或等於1.0E+10及介電常數小於或等於45,且可維持光遮蔽性能,例如,每單位厚度(μm)光密度大於等於1.0,較佳介於1.0至4.0間之範圍,且因此可被用作為光遮蔽膜。 Further, the film formed by curing the photosensitive resin composition for light shielding has electrical insulating properties including surface resistivity greater than or equal to 1.0E+10 and dielectric constant less than or equal to 45, and light shielding performance can be maintained. For example, the optical density per unit thickness (μm) is 1.0 or more, preferably in the range of 1.0 to 4.0, and thus can be used as a light shielding film.
以下,將對本發明進行詳細說明。應理解,在說明書及隨附申請專利範圍中使用的術語不應被解釋為限制於一般含義和字典含義,而是應基於在允許發明人適當地定義該等術語以獲得最佳解釋的原則之基礎而對應於本發明之技術態樣的含義及概念來解釋的。 Hereinafter, the present invention will be described in detail. It should be understood that the terms used in the specification and the accompanying claims should not be construed as being limited to the general meaning and the meaning of the dictionary, but should be based on the principle that the inventor is allowed to properly define the terms to obtain the best explanation. The basis is explained corresponding to the meaning and concept of the technical aspect of the present invention.
根據本發明之一個實施例的光敏性樹脂組成物,包括:(A)矽氧烷樹脂,含有由下列化學式1表示之聚合單元及由下列化學式2表示之聚合單元;(B)顏料;(C)光聚合起始劑;及(D)有機溶劑,若需要,可進一步包括(E)具有不飽和鍵之多官能單體。 A photosensitive resin composition according to an embodiment of the present invention, comprising: (A) a decyl alkane resin containing a polymerized unit represented by the following Chemical Formula 1 and a polymerized unit represented by the following Chemical Formula 2; (B) a pigment; (C) a photopolymerization initiator; and (D) an organic solvent, if necessary, further comprising (E) a polyfunctional monomer having an unsaturated bond.
式中R1為具有1至20個碳原子之直鏈或分支鏈伸烷基、具有6至20個碳原子之伸芳基、具有含芳基取代基之7至20個碳原子總數之伸烷基、具有含烷基取代基之7至20個碳原子總數之伸芳基或具有其中伸烷基鏈結至 伸芳基之7至20個碳原子總數之基團。 Wherein R 1 is a linear or branched alkyl group having 1 to 20 carbon atoms, an extended aryl group having 6 to 20 carbon atoms, and a total of 7 to 20 carbon atoms having an aryl group-containing substituent An alkyl group, a aryl group having a total of 7 to 20 carbon atoms having an alkyl group-containing substituent or a group having a total of 7 to 20 carbon atoms in which an alkyl group is extended to an extended aryl group.
X為羥基、羧酸、羧酸酐、羧酸酐衍生物、醯亞胺、醯亞胺衍生物、醯胺、醯胺衍生物、胺或巰基。 X is a hydroxyl group, a carboxylic acid, a carboxylic anhydride, a carboxylic anhydride derivative, a quinone imine, a quinone imine derivative, a decylamine, a decylamine derivative, an amine or a fluorenyl group.
[化學式2]R2 nSiO(4-n)/2 [Chemical Formula 2] R 2 n SiO (4-n)/2
式中R2各自獨立為氫、具有1至20個碳原子之直鏈、分支鏈或環狀烷基、具有6至10個碳原子之芳基、具有2至10個碳原子之不飽和烴基或具有2至10個碳原子之醯氧基,在分子中之複數個R2可為相同或不同。 Wherein R 2 is each independently hydrogen, a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 10 carbon atoms, and an unsaturated hydrocarbon group having 2 to 10 carbon atoms. Or a decyloxy group having 2 to 10 carbon atoms, and the plurality of R 2 in the molecule may be the same or different.
n為0至3之整數,且其中n為3之聚合單元可與其中n為除3以外之另一聚合單元組合使用。 n is an integer from 0 to 3, and a polymer unit in which n is 3 may be used in combination with another polymerization unit in which n is other than 3.
R1之非限制性實例可包括具有1至20個碳原子之直鏈伸烷基,其可為烴基諸如亞甲基、伸乙基、伸丙基、伸丁基、及伸戊基;及分支鏈伸烷基,諸如異伸丙基及異伸丁基。 Non-limiting examples of R 1 may include a linear alkylene group having 1 to 20 carbon atoms, which may be a hydrocarbon group such as a methylene group, an ethylidene group, a propyl group, a butyl group, and a pentyl group; A branched alkyl group such as an exopropyl group and an isobutyl group.
顯示由下列化學式1表示之聚合單元的特定實例,但不限於此。 Specific examples of the polymerization unit represented by the following Chemical Formula 1 are shown, but are not limited thereto.
(在各別的式中,m和n各自獨立為1至20之整數) (In each formula, m and n are each independently an integer from 1 to 20)
R2的特定實例可各自包括具有1至20個碳原子之脂肪族烷基,諸如甲基、乙基、正丙基、異丙基、正丁基、異丁基、及正戊基,且環狀脂肪族烷基的特定實例可包括環戊基、環己基、降莰基、及金剛烷基。具有2至10個碳原子之醯氧基的特定實例可包括丙烯醯氧基甲基、丙烯醯氧基乙基、丙烯醯氧基丙基、丙烯醯氧基丁基、甲基丙烯醯氧基甲基、甲基丙烯醯氧基乙基、甲基丙烯醯氧基丙基、及甲基丙烯醯氧基丁基。具有6至10個碳原子之芳基的特定實例可包括苯基、萘基、蔥基、菲基、及芘基。 Specific examples of R 2 may each include an aliphatic alkyl group having 1 to 20 carbon atoms such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, and n-pentyl groups, and Specific examples of the cyclic aliphatic alkyl group may include a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group. Specific examples of the decyloxy group having 2 to 10 carbon atoms may include propylene methoxymethyl group, propylene methoxyethyl group, propylene methoxy propyl group, propylene oxy butyl group, methacryloxy group. Methyl, methacryloxyethyl, methacryloxypropyl, and methacryloxybutyl. Specific examples of the aryl group having 6 to 10 carbon atoms may include a phenyl group, a naphthyl group, an onion group, a phenanthryl group, and an anthracenyl group.
由下列化學式2表示之聚合單元組成的單體可包括,但不限於,例如:四烷氧基矽烷、三烷氧基矽烷、甲基三烷氧基矽烷、乙基三烷氧基矽烷、正丙基三烷氧基矽烷、異丙基三烷氧基矽烷、正丁基三烷氧基矽烷、三級丁基三烷氧基矽烷、苯基三烷氧基矽烷、石腦油三烷氧基矽烷、乙烯基三烷氧基矽烷、甲基丙烯醯氧基甲基三烷氧基矽烷、2-甲基丙烯醯氧基乙基三烷氧基矽烷、3-甲基丙烯醯氧基丙基三烷氧基矽烷、3-甲基丙烯醯氧基丙基甲基二烷氧基矽烷、3-甲基丙烯醯氧基丙基乙基二烷氧基矽烷、丙烯醯氧基甲基三烷氧基矽烷、2-丙烯醯氧基乙基三烷氧基矽烷、3-丙烯醯氧基丙基三烷氧基矽烷、3-丙烯醯氧基丙基甲基二烷氧基矽烷、3-丙烯醯氧基丙基乙基二烷氧基矽烷、3-縮水甘油氧基丙基三烷氧基矽烷、2-環氧基環己基乙基三烷氧基矽烷、3-環氧基環己基丙基三烷氧基矽烷、二甲基烷氧基矽烷、二乙基二烷氧基矽烷、二丙基二烷氧基矽烷、二苯基二烷氧基矽烷、二苯基矽烷二醇、及苯基甲基二烷氧基矽烷。此處,烷氧基是具有1至7個碳原子之直鏈、分支鏈或環狀脂肪族或芳香族烷氧基,且可為可水解的含鹵素化合物。 The monomer composed of the polymerized unit represented by the following Chemical Formula 2 may include, but is not limited to, for example, tetraalkoxydecane, trialkoxydecane, methyltrialkoxydecane, ethyltrialkoxydecane, positive Propyltrialkoxydecane, isopropyltrialkoxydecane, n-butyltrialkoxydecane, tert-butyltrialkoxide, phenyltrialkoxydecane, naphthapentane Base decane, vinyl trialkoxy decane, methacryloxymethyltrialkoxy alkane, 2-methylpropenyloxyethyltrialkoxydecane, 3-methylpropenyloxypropane Trilutoxy decane, 3-methyl propylene methoxy propyl methyl dialkoxy decane, 3-methyl propylene methoxy propyl ethyl dialkoxy decane, propylene methoxy methyl group Alkoxydecane, 2-propenyloxyethyltrialkoxydecane, 3-propenylmethoxypropyltrialkoxydecane, 3-propenyloxypropylmethylditoxyoxydecane, 3 - propylene methoxy propyl ethyl dialkoxy decane, 3- glycidoxy propyl trialkoxy decane, 2-epoxycyclohexylethyl trialkoxy decane, 3-epoxy ring already Propyl trialkoxy decane, dimethyl alkoxy decane, diethyl dialkoxy decane, dipropyl dialkoxy decane, diphenyl dialkoxy decane, diphenyl decane diol, And phenylmethyldialkoxydecane. Here, the alkoxy group is a linear, branched or cyclic aliphatic or aromatic alkoxy group having 1 to 7 carbon atoms, and may be a hydrolyzable halogen-containing compound.
較佳地,本發明的特徵在於由上列化學式2表示之聚合單元的至少一者為甲基丙烯醯氧基甲基 三烷氧基矽烷、2-甲基丙烯醯氧基乙基 三烷氧基矽烷、3-甲基丙烯醯氧基丙基 三烷氧基矽烷、3-甲基丙烯醯氧基丙基 甲基二烷氧基 矽烷、3-甲基丙烯醯氧基丙基 乙基二烷氧基 矽 烷、丙烯醯氧基甲基 三烷氧基矽烷、2-丙烯醯氧基乙基 三烷氧基矽烷、3-丙烯醯氧基丙基 三烷氧基矽烷、3-丙烯醯氧基丙基 甲基二烷氧基 矽烷、及3-丙烯醯氧基丙基。 Preferably, the present invention is characterized in that at least one of the polymerized units represented by the above Chemical Formula 2 is methacryloxymethyltrialkoxydecane, 2-methylpropenyloxyethyltrialkoxide Baseline, 3-methylpropenyloxypropyltrialkoxydecane, 3-methylpropenyloxypropylmethylditoxyoxydecane, 3-methylpropenyloxypropylethyldi Alkoxy oxime Alkane, propylene methoxymethyl trialkoxy decane, 2-propenyl methoxyethyl trialkoxy decane, 3-propenyl methoxy propyl trialkoxy decane, 3-propenyl methoxy propyl Methyldialkoxydecane, and 3-propenyloxypropyl.
(A)矽氧烷樹脂以氫氧化鉀(KOH)滴定樹脂可具有10-200mg KOH/g之範圍的酸價。 (A) The oxirane resin may be titrated with potassium hydroxide (KOH) to have an acid value in the range of 10 to 200 mg KOH/g.
當使用矽氧烷樹脂時,由於該矽氧烷樹脂的熱穩定性,使用作為顏料的碳顆粒之間的距離即使在高於或等於300℃的高溫製程之後仍可適當地維持,呈現出高電絕緣性質。 When a decane resin is used, due to the thermal stability of the decane resin, the distance between the carbon particles used as a pigment can be appropriately maintained even after a high-temperature process higher than or equal to 300 ° C, exhibiting high Electrical insulation properties.
矽氧烷樹脂的酸價使用0.1N KOH溶液滴定較佳每1g黏結劑樹脂為10至200mg[KOH]。 The acid value of the decane resin is preferably 10 to 200 mg [KOH] per 1 g of the binder resin by titration with a 0.1 N KOH solution.
當矽氧烷樹脂的酸價少於或等於10mg[KOH]/g[樹脂]時,由於缺乏顯影光敏性的可行性而產生殘留膜,而當該酸價超過或等於200mg[KOH]/g[樹脂]時,會發生如圖案損失的問題。 When the acid value of the decane resin is less than or equal to 10 mg [KOH] / g [resin], a residual film is generated due to the lack of feasibility of developing photosensitivity, and when the acid value exceeds or equals 200 mg [KOH] / g In the case of [resin], problems such as pattern loss occur.
(B)顏料是具有光遮蔽性質的顏料,較佳為具有光遮蔽性質的黑色顏料。至於該顏料的非限制性實例,基於它們的性質可以使用碳黑、鈦黑、苯胺黑、苝黑、鈦酸鍶、氧化鉻及氧化鈰,但該顏料並不限於此。較佳為碳黑。 (B) The pigment is a pigment having light-shielding properties, preferably a black pigment having light-shielding properties. As non-limiting examples of the pigment, carbon black, titanium black, aniline black, phthalocyanine, barium titanate, chromium oxide, and cerium oxide can be used based on their properties, but the pigment is not limited thereto. It is preferably carbon black.
碳黑可包括購自東海碳素株式會(Tokai Carbon)的Cisto series、購自三菱化學公司(Mitsubishi Chemical)的Diagram series和MA series、購自東新公司(DK Dong Shin)的PRINTEX series、及購自科倫比恩化學品公司(Columbian Chemicals)的Raven series。 The carbon black may include Cisto series purchased from Tokai Carbon, Diagram series and MA series available from Mitsubishi Chemical, PRINTEX series purchased from DK Dong Shin, and Raven series from Columbian Chemicals.
顏料的顆粒尺寸較佳可調整到50至150nm之間的範圍,更佳50至80nm之間的範圍。當具有少於50nm顆粒尺寸的顏料被分散在光敏性樹脂組成物中時,即使是使用相同的顏料含量,光密度仍會降低。此外,當具有超過150nm顆粒尺寸的顏料被分散在光敏性樹脂組成物中時,薄膜的電絕緣性質及粗糙度特徵仍會劣化。 The particle size of the pigment is preferably adjusted to a range between 50 and 150 nm, more preferably between 50 and 80 nm. When a pigment having a particle size of less than 50 nm is dispersed in the photosensitive resin composition, the optical density is lowered even if the same pigment content is used. Further, when a pigment having a particle size exceeding 150 nm is dispersed in the photosensitive resin composition, the electrical insulating properties and roughness characteristics of the film are still deteriorated.
以100重量份之矽氧烷樹脂為基準,或當使用具有不飽和鍵之多官能單體時,以矽氧烷樹脂及具有不飽和鍵之多官能單體合計100重量份為基準,顏料係以20-130重量份之含量存在,且該含量可依使用目的而在數值範圍內變化。當該顏料以少於20重量份之含量存在時,光敏性樹脂組成物的敏感性及薄膜的電絕緣性質和粗糙度被改善,但是難以預期其光密度每單位厚度(μm)大於或等於1.0。而且,當該顏料含量超過130重量份時,光密度滿足每單位厚度(μm)大於或等於4.0,但是電絕緣性質變低且光敏性樹脂組成物的敏感性亦降低。 Based on 100 parts by weight of a decyl alkane resin or when a polyfunctional monomer having an unsaturated bond is used, based on 100 parts by weight of a total of a decyl alkane resin and a polyfunctional monomer having an unsaturated bond, the pigment system is used. It is present in an amount of from 20 to 130 parts by weight, and the content may vary within a numerical range depending on the purpose of use. When the pigment is present in an amount of less than 20 parts by weight, the sensitivity of the photosensitive resin composition and the electrical insulating property and roughness of the film are improved, but it is difficult to expect that the optical density per unit thickness ( μm ) is greater than or equal to 1.0. Moreover, when the pigment content exceeds 130 parts by weight, the optical density satisfies 4.0 or more per unit thickness ( μm ), but the electrical insulating property becomes low and the sensitivity of the photosensitive resin composition also decreases.
(C)光聚合起始劑是受光產生自由基並誘導交聯的材料,且其非限制性實例較佳係選自由下列者所組成之群組之至少一者:三嗪系(triazine-based)化合物、苯乙酮系(acetophenone-based)化合物、聯咪唑系(biimidazole-based)化合物、及肟系(oxime-based)化合物。 (C) The photopolymerization initiator is a material that generates radicals by light and induces crosslinking, and a non-limiting example thereof is preferably selected from at least one of the group consisting of triazine-based a compound, an acetophenone-based compound, a biimidazole-based compound, and an oxime-based compound.
三嗪系化合物之非限制性實例包括2,4-雙(三氯甲基)-6-(4-甲氧基苯基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-(4-甲氧基萘基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-胡椒基 -1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(5-甲基呋喃-2-基)乙烯基]-1,3,5-三嗪、及2,4-雙(三氯甲基)-6-[2-(呋喃-2-基)乙烯基]-1,3,5-三嗪。苯乙酮系化合物之非限制性實例包括2-羥基-2-甲基-1-苯基丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、4-(2-羥基乙氧基)-苯基-(2-羥基-2-丙基)丙酮、1-羥基環己基苯基丙酮、安息香甲基醚、安息香乙基醚、安息香異丁基醚、安息香丁基醚、2,2-二甲氧基-2-苯基苯乙酮、2-甲基-(4-甲基硫基)苯基-2-嗎啉-1-丙烷-1-酮、2-苄基-2-二甲基胺基-1-(4-嗎啉苯基)-丁烷-1-酮、2-(4-溴-苄基-2-二甲基胺基-1-(4-嗎啉苯基)-丁烷-1-酮、及2-甲基-1-[4-(甲基硫基)苯基]-2-嗎啉丙烷-1-酮。 Non-limiting examples of triazine-based compounds include 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazine, 2,4-bis (three Chloromethyl)-6-(4-methoxynaphthyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-piperidinyl -1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(5-methylfuran-2-yl)vinyl]-1,3,5-triazine And 2,4-bis(trichloromethyl)-6-[2-(furan-2-yl)vinyl]-1,3,5-triazine. Non-limiting examples of the acetophenone-based compound include 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methyl Propane-1-one, 4-(2-hydroxyethoxy)-phenyl-(2-hydroxy-2-propyl)acetone, 1-hydroxycyclohexylphenylacetone, benzoin methyl ether, benzoin ethyl ether , benzoin isobutyl ether, benzoin butyl ether, 2,2-dimethoxy-2-phenylacetophenone, 2-methyl-(4-methylthio)phenyl-2-morpholine- 1-propan-1-one, 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butan-1-one, 2-(4-bromo-benzyl-2 -Dimethylamino-1-(4-morpholinylphenyl)-butan-1-one, and 2-methyl-1-[4-(methylthio)phenyl]-2-morpholine Propane-1-one.
又,聯咪唑系化合物之非限制性實例包括2,2-雙(2-氯苯基)-4,4',5,5'-四苯基聯咪唑、2,2'-雙(鄰-氯苯基)-4,4',5,5'-四苯基聯咪唑、2,2'-雙(鄰-氯苯基)-4,4',5,5'-四(3,4,5-三甲氧基苯基)-1,2'-聯咪唑、2,2'-雙(2,3-二氯苯基)-4,4',5,5'-四苯基聯咪唑、及2,2'-雙(鄰-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑。 Further, non-limiting examples of the biimidazole-based compound include 2,2-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(o- Chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetra (3,4 ,5-trimethoxyphenyl)-1,2'-biimidazole, 2,2'-bis(2,3-dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole And 2,2'-bis(o-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole.
又,肟系化合物之非限制性實例包括OXE-02(商標名,可購自BASF)、N1919、NCI-831(商標名,可購自Adeka)、1,2-辛二酮(octadion)-1-(4-苯基硫基)苯基-2-(鄰-苯甲醯基肟)、及乙酮-1-(9-乙基)-6-(2-甲基苯甲醯基-3-基)-1-(鄰-乙醯基肟)。 Further, non-limiting examples of the lanthanide compound include OXE-02 (trade name, available from BASF), N1919, NCI-831 (trade name, available from Adeka), 1,2-octanetone (octadion)- 1-(4-phenylthio)phenyl-2-(o-benzylidene fluorenyl), and ethyl ketone-1-(9-ethyl)-6-(2-methylbenzhydryl- 3-yl)-1-(o-ethylindenyl).
以100重量份之矽氧烷樹脂為基準,或當使用具有不飽和鍵之多官能單體時,以矽氧烷樹脂及具有不飽和鍵之 多官能單體合計100重量份為基準,光聚合起始劑可以以1至30重量份之含量存在。 Based on 100 parts by weight of a decyl alkane resin, or when a polyfunctional monomer having an unsaturated bond is used, a decyl alkane resin and an unsaturated bond are used. The photopolymerization initiator may be present in an amount of from 1 to 30 parts by weight based on 100 parts by weight of the total of the polyfunctional monomer.
在本發明之光敏性樹脂組成物中,(D)有機溶劑包含但不限於任何溶劑,只要它是能夠溶解包含矽氧烷樹脂和不抑制顏料之分散的成分。該有機溶劑之特定實例包括,但不限於酮系溶劑諸如甲基乙基酮、甲基-正丙基酮、甲基異丙基酮、甲基正丁基酮、甲基異丁基酮、甲基正戊基酮、二乙基酮、二丙基酮、二異丁基酮、環己酮、環戊酮、甲基環己酮、2,4-戊二酮、丙酮基丙酮、γ-丁內酯、及γ-戊內酯;醚系溶劑諸如甲基乙基醚、甲基二-正丙基醚、二異丙基醚、四氫呋喃、甲基四氫呋喃、乙二醇二甲基醚、乙二醇醚、乙二醇二丁基醚、乙二醇甲基乙基醚、三乙二醇二甲基醚、三乙二醇醚、三乙二醇甲基乙基醚、丙二醇二甲基醚、丙二醇醚、丙二醇-正丙基醚、丙二醇二丁基醚、乙二醇甲基醚、乙二醇乙基醚、二乙二醇單甲基醚、二乙二醇乙基醚、丙二醇單甲基醚;醚乙酸酯系ether acetate-based)溶劑諸如乙二醇甲基醚丙酸酯、乙二醇乙基醚丙酸酯、乙二醇甲基醚乙酸酯、乙二醇乙基醚乙酸酯、丙二醇甲基醚乙酸酯、丙二醇乙基醚乙酸酯、及丙二醇丙基醚乙酸酯;乙腈、N-甲基吡咯啶酮、N-乙基吡咯啶酮、正丙基吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N,N-二甲基亞碸、甲苯、及二甲苯;及醇系溶劑諸如甲醇、乙醇、正丙醇、異丙醇、正丁醇、異丁醇、環己醇、甲基環己醇、苄基醇、乙二醇、1,2-丙二醇、及二乙二醇、 其單一或組合。 In the photosensitive resin composition of the present invention, the (D) organic solvent includes, but is not limited to, any solvent as long as it is a component capable of dissolving a resin containing a siloxane and not inhibiting dispersion of the pigment. Specific examples of the organic solvent include, but are not limited to, ketone solvents such as methyl ethyl ketone, methyl n-propyl ketone, methyl isopropyl ketone, methyl n-butyl ketone, methyl isobutyl ketone, Methyl-n-amyl ketone, diethyl ketone, dipropyl ketone, diisobutyl ketone, cyclohexanone, cyclopentanone, methylcyclohexanone, 2,4-pentanedione, acetone acetone, γ - Butyrolactone, and γ-valerolactone; ether solvents such as methyl ethyl ether, methyl di-n-propyl ether, diisopropyl ether, tetrahydrofuran, methyl tetrahydrofuran, ethylene glycol dimethyl ether , glycol ether, ethylene glycol dibutyl ether, ethylene glycol methyl ethyl ether, triethylene glycol dimethyl ether, triethylene glycol ether, triethylene glycol methyl ethyl ether, propylene glycol Methyl ether, propylene glycol ether, propylene glycol-n-propyl ether, propylene glycol dibutyl ether, ethylene glycol methyl ether, ethylene glycol ethyl ether, diethylene glycol monomethyl ether, diethylene glycol ethyl ether , propylene glycol monomethyl ether; ether acetate-based solvent such as ethylene glycol methyl ether propionate, ethylene glycol ethyl ether propionate, ethylene glycol methyl ether acetate, B Glycol ethyl ether acetate Propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, and propylene glycol propyl ether acetate; acetonitrile, N-methylpyrrolidone, N-ethylpyrrolidone, n-propyl pyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, N,N-dimethylhydrazine, toluene, and xylene; and alcoholic solvents such as methanol, ethanol, n-propanol , isopropanol, n-butanol, isobutanol, cyclohexanol, methylcyclohexanol, benzyl alcohol, ethylene glycol, 1,2-propanediol, and diethylene glycol, It is single or combined.
有機溶劑的含量可基於矽氧烷樹脂、顏料、光聚合起始劑及具有不飽和鍵之多官能單體的含量而適當地調整,且可根據塗布光敏性樹脂組成物以在基板上形成光遮蔽層之方法而變化。例如,以100重量份之光敏性樹脂組成物之總量為基準,有機溶劑之含量的範圍係20至90重量份,但不限於此。 The content of the organic solvent can be appropriately adjusted based on the content of the siloxane oxide resin, the pigment, the photopolymerization initiator, and the polyfunctional monomer having an unsaturated bond, and the light-sensitive resin composition can be applied to form light on the substrate. The method of shielding the layer varies. For example, the content of the organic solvent is in the range of 20 to 90 parts by weight based on 100 parts by weight of the total amount of the photosensitive resin composition, but is not limited thereto.
(E)具有不飽和鍵之多官能單體是一種反應性不飽和化合物,其在分子中具有至少一個額外可聚合的不飽和基團,且此化合物可選擇地單獨使用或組合使用。 (E) The polyfunctional monomer having an unsaturated bond is a reactive unsaturated compound having at least one additional polymerizable unsaturated group in the molecule, and this compound may be optionally used singly or in combination.
具有不飽和鍵之多官能單體的非限制性實例可包括乙二醇二丙烯酸酯、二乙二醇二丙烯酸酯、三乙二醇二丙烯酸酯、三乙二醇二甲基丙烯酸酯、1,6-己二醇二丙烯酸酯、季戊四醇三丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯(dipentaerythritol hexaacrylate)、雙酚A環氧基丙烯酸酯、乙二醇單甲基醚丙烯酸酯、乙二醇二甲基丙烯酸酯、或1,6-己二醇二甲基丙烯酸酯。 Non-limiting examples of polyfunctional monomers having unsaturated bonds may include ethylene glycol diacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, triethylene glycol dimethacrylate, 1 , 6-hexanediol diacrylate, pentaerythritol triacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, bisphenol A epoxy acrylate, ethylene glycol monomethyl ether acrylate, Ethylene glycol dimethacrylate or 1,6-hexanediol dimethacrylate.
以100重量份之矽氧烷樹脂為基準,具有不飽和鍵之多官能單體的含量係0至200重量份。當該含量超過200重量份時,會降低矽氧烷樹脂和碳顆粒的相容性,這會使得其難以控制圖案外型。 The content of the polyfunctional monomer having an unsaturated bond is from 0 to 200 parts by weight based on 100 parts by weight of the rhodium oxide resin. When the content exceeds 200 parts by weight, the compatibility of the decane resin and the carbon particles is lowered, which makes it difficult to control the pattern appearance.
具有不飽和鍵(其中該不飽和鍵包括在黏結劑樹脂中)之多官能單體可不包括在光敏性樹脂組成物中,但可以使用為圖案外型控制和敏感性。 A polyfunctional monomer having an unsaturated bond (wherein the unsaturated bond is included in the binder resin) may not be included in the photosensitive resin composition, but may be used for pattern appearance control and sensitivity.
又,用於光遮蔽之光敏性樹脂組成物可進一步包括本領域中通用的添加劑,若需要,例如固化加速劑、熱聚合抑制劑、塑化劑、填充劑、溶劑、整平劑、及消泡劑。熱聚合抑制劑可以是氫醌、氫醌單甲基醚、五倍子酚、三級丁基兒茶酚、或酚噻嗪(phenothiazine)。塑化劑可以是酞酸二丁酯、酞酸二辛酯、或三甲苯基。填充劑可以是玻璃填充劑、氧化矽、雲母、或氧化鋁。且,消泡劑或整平劑可以是,例如矽氧系化合物、氟系化合物、或丙烯酸系化合物。 Further, the photosensitive resin composition for light shielding may further include additives generally used in the art, such as a curing accelerator, a thermal polymerization inhibitor, a plasticizer, a filler, a solvent, a leveling agent, and the like, if necessary. Foaming agent. The thermal polymerization inhibitor may be hydroquinone, hydroquinone monomethyl ether, gallic phenol, tert-butyl catechol, or phenothiazine. The plasticizer may be dibutyl phthalate, dioctyl phthalate, or a trimethylphenyl group. The filler may be a glass filler, cerium oxide, mica, or aluminum oxide. Further, the antifoaming agent or the leveling agent may be, for example, an anthracene based compound, a fluorine-based compound, or an acrylic compound.
於使用光敏性樹脂組成物形成光遮蔽層(黑色矩陣)之一個實施例可包括(S1)在基板上塗布根據本發明之用於光遮蔽之光敏性樹脂組成物之步驟;(S2)移除該組成物中之溶劑以形成塗覆膜之步驟;(S3)曝光及顯影該塗覆膜以形成薄膜之步驟;及(S4)在介於200℃至少於300℃間之溫度下熱處理該薄膜之步驟。又,該方法可進一步包含(S5)在從300℃至600℃之溫度下熱處理該薄膜之步驟。 One embodiment of forming a light shielding layer (black matrix) using a photosensitive resin composition may include (S1) a step of coating a photosensitive resin composition for light shielding according to the present invention on a substrate; (S2) removing a solvent in the composition to form a coating film; (S3) a step of exposing and developing the coating film to form a film; and (S4) heat treating the film at a temperature between 200 ° C and at least 300 ° C The steps. Further, the method may further comprise (S5) a step of heat-treating the film at a temperature of from 300 ° C to 600 ° C.
在(S1)在基板上塗布用於光遮蔽之光敏性樹脂組成物之製程的一實施例中,該塗布可在具有0.5~1.1mm厚度之乾淨表面之純表面的玻璃基板上使用接觸式轉移型塗布機諸如滾輪塗布機(roll coater)、逆輥式塗布機(reverse coater)、及棒式塗布機(bar coater),或非接觸式塗布機諸如旋轉器(旋轉式塗布機)及淋幕式塗布機(curtain flow coater)來實施。 In an embodiment in which (S1) a process for coating a photosensitive resin composition for light shielding is applied on a substrate, the coating can be used for contact transfer on a pure glass substrate having a clean surface having a thickness of 0.5 to 1.1 mm. Type coaters such as roll coaters, reverse coaters, and bar coaters, or non-contact coaters such as rotators (rotary coaters) and curtains It is implemented by a curtain flow coater.
在製備和塗布中,為了改善該玻璃基板與該光敏性樹 脂組成物的黏著性,可添加矽烷偶合劑或可在該基板上施用。 In preparation and coating, in order to improve the glass substrate and the photosensitive tree The adhesion of the lipid composition may be added to the decane coupling agent or applied to the substrate.
隨後地,(S2)從該組成物移除溶劑以形成塗覆膜。 Subsequently, (S2) the solvent is removed from the composition to form a coating film.
為了做此步驟,藉由使用加熱板在80℃~120℃,較佳90℃~100℃之溫度持續60秒~120秒來乾燥該組成物,或藉由使該組成物保持在室溫下持續幾小時~幾天,或藉由將該組成物放置在加熱空氣加熱器或紅外線加熱器持續幾分鐘~幾小時以移除溶劑之後,可在0.5~5μm之範圍調整塗覆膜厚度。 In order to perform this step, the composition is dried by using a hot plate at a temperature of 80 ° C to 120 ° C, preferably 90 ° C to 100 ° C for 60 seconds to 120 seconds, or by keeping the composition at room temperature. After a few hours to several days, or by placing the composition in a heated air heater or an infrared heater for a few minutes to several hours to remove the solvent, the thickness of the coating film can be adjusted in the range of 0.5 to 5 μm.
隨後地,(S3)曝光及顯影該塗覆膜以形成薄膜。 Subsequently, (S3) the coating film is exposed and developed to form a film.
其非限制性實施例可包括透過負型光罩暴露至活性能量射線,諸如在輻射能量射線量介於30~2000mJ/cm2之間的範圍的紫外線及準分子鐳射光。該輻射能量射線量可依所用之用於光遮蔽之光敏性組成物的類型而變化。透過曝光獲得的薄膜係使用顯影溶液藉由浸漬方法或噴霧方法來顯影以形成黑色矩陣圖案。顯影用之顯影溶液可包括單乙醇胺、二乙醇胺、及三乙醇胺之有機溶液,或氫氧化鈉、氫氧化鉀、碳酸鈉、氨水、及四級銨鹽類之水溶液。 Non-limiting embodiments thereof may include exposure to active energy rays through a negative reticle, such as ultraviolet and excimer laser light in a range of radiant energy rays between 30 and 2000 mJ/cm 2 . The amount of radiant energy radiation may vary depending on the type of photosensitive composition used for light shielding. The film obtained by the exposure is developed using a developing solution by a dipping method or a spraying method to form a black matrix pattern. The developing solution for development may include an organic solution of monoethanolamine, diethanolamine, and triethanolamine, or an aqueous solution of sodium hydroxide, potassium hydroxide, sodium carbonate, aqueous ammonia, and a quaternary ammonium salt.
又,在本發明之製備方法的一個實施例中,該方法可進一步包括(S4)在介於200℃至少於300℃間之溫度下熱處理該薄膜,且在(S4)之後,可進一步包含(S5)在從300℃至600℃之溫度下熱處理該薄膜。 Further, in an embodiment of the preparation method of the present invention, the method may further comprise (S4) heat treating the film at a temperature between 200 ° C and at least 300 ° C, and after (S4), further comprising ( S5) The film is heat treated at a temperature of from 300 ° C to 600 ° C.
在(S4)中之熱處理可在介於200℃至少於300℃間之溫度下持續5-60分鐘來實施,且所述熱處理方法可使用通用 烘箱,但並不限於此。 The heat treatment in (S4) can be carried out at a temperature between 200 ° C and at least 300 ° C for 5 to 60 minutes, and the heat treatment method can be used in general Oven, but not limited to this.
又,在(S5)中之熱處理可在300℃至600℃間之溫度下持續5-60分鐘來實施,且所述熱處理方法可使用本領域中之通用方法,例如烘箱,但並不特別限制。 Further, the heat treatment in (S5) may be carried out at a temperature between 300 ° C and 600 ° C for 5 to 60 minutes, and the heat treatment method may use a general method in the art, such as an oven, but is not particularly limited. .
一般而言,咸知在200℃或高於200℃下的額外熱處理會降解薄膜及包含該薄膜之光遮蔽層的電絕緣性質,且在300℃或高於300℃下的額外熱處更進一步降解其電絕緣性質。這是因為顏料諸如碳黑的導電性特徵。亦即,如果熱處理溫度在製備薄膜的製程中升高時,圍繞顏料的樹脂會劣化而使顏料之間的距離縮小,導致增加導電性。結果,薄膜的電絕緣性質變差。 In general, it is known that additional heat treatment at 200 ° C or higher may degrade the electrical insulating properties of the film and the light shielding layer containing the film, and further increase at 300 ° C or higher than 300 ° C. Degrading its electrical insulation properties. This is because of the conductive characteristics of pigments such as carbon black. That is, if the heat treatment temperature is raised in the process of preparing the film, the resin surrounding the pigment is deteriorated to narrow the distance between the pigments, resulting in an increase in conductivity. As a result, the electrical insulating properties of the film deteriorate.
然而,在根據本發明之一個實施例之從光敏性樹脂組成物製造薄膜中,薄膜可在200℃或高於200℃下熱處理之後(即使是在300℃或高於300℃下熱處理之後)具有良好的電絕緣性質,且包含該薄膜之光遮蔽層的電絕緣性質亦能改善。 However, in the film produced from the photosensitive resin composition according to an embodiment of the present invention, the film may have a heat treatment at 200 ° C or higher (even after heat treatment at 300 ° C or higher) Good electrical insulating properties, and the electrical insulating properties of the light shielding layer comprising the film can also be improved.
藉由上述製備方法獲得之光遮蔽層(黑色矩陣)係有用於多種顯示器裝置諸如液晶面板及電漿顯示器面板。 The light shielding layer (black matrix) obtained by the above preparation method is used for various display devices such as liquid crystal panels and plasma display panels.
下文,將透過實例詳細描述以幫助了解本發明。然而,本發明之實施例可採取許多其他形式,且本發明之範圍不應被解釋為限於下列實例。本發明之實施例係提供以對本領域中具有通常知識者更充分地解釋。 Hereinafter, the detailed description will be made through examples to help understand the present invention. However, the embodiments of the present invention may take many other forms, and the scope of the present invention should not be construed as being limited to the following examples. Embodiments of the present invention are provided to more fully explain those of ordinary skill in the art.
<矽氧烷樹脂的合成> <Synthesis of a siloxane resin>
合成例1 Synthesis Example 1
在配備有冷卻管及攪拌器的燒瓶中,稱重250g(1.0mol)的3-(三乙氧基矽基)丙酸甲酯(後文中亦稱為'丙酸')、198g(1.0mol)的苯基三甲氧基矽烷(後文中亦稱為'苯基')、136g(1.0mol)的甲基三甲氧基矽烷(後文中亦稱為'甲基')、497g(2.0mol)的甲基丙烯醯氧基丙基三甲氧基矽烷(後文中亦稱為'甲基丙烯基')、及2000g的丙二醇單甲基醚乙酸酯。在攪拌該溶液同時,逐滴加入13.0g(0.125mol)的35%鹽酸水溶液及270g的水之混合溶液。在完全滴加之後,使反應溫度增加至85℃,且在該增加的溫度下進行反應持續6小時。在反應完成之後,以添加醚和水實施萃取,回收有機相,且藉由蒸發作用移除殘餘的醇和溶劑,產生657g的矽氧烷樹脂。將獲得的矽氧烷樹脂溶解在657g的丙二醇單甲基醚乙酸酯。該矽氧烷樹脂的重量平均分子量是4,800。 In a flask equipped with a cooling tube and a stirrer, 250 g (1.0 mol) of methyl 3-(triethoxyindenyl)propionate (hereinafter also referred to as 'propionic acid'), 198 g (1.0 mol) was weighed. Phenyltrimethoxydecane (hereinafter also referred to as 'phenyl'), 136 g (1.0 mol) of methyltrimethoxydecane (hereinafter also referred to as 'methyl'), and 497 g (2.0 mol) Methyl propylene methoxy propyl trimethoxy decane (hereinafter also referred to as 'methacryloyl group'), and 2000 g of propylene glycol monomethyl ether acetate. While stirring the solution, a mixed solution of 13.0 g (0.125 mol) of a 35% aqueous hydrochloric acid solution and 270 g of water was added dropwise. After the complete dropwise addition, the reaction temperature was increased to 85 ° C, and the reaction was carried out at the increased temperature for 6 hours. After the completion of the reaction, extraction was carried out by adding ether and water, the organic phase was recovered, and the residual alcohol and solvent were removed by evaporation to yield 657 g of a dec. The obtained decane resin was dissolved in 657 g of propylene glycol monomethyl ether acetate. The helium oxide resin had a weight average molecular weight of 4,800.
合成例2 Synthesis Example 2
在配備有冷卻管及攪拌器的燒瓶中,稱重250g(1.0mol)的3-(三乙氧基矽基)丙酸甲酯、297g(1.5mol)的苯基三甲氧基矽烷、204g(1.5mol)的甲基三甲氧基矽烷、248g(1.0mol)的甲基丙烯醯氧基丙基三甲氧基矽烷、及2000g的丙二醇單甲基醚乙酸酯。在攪拌該溶液同時,逐滴加入13.0g(0.125mol)的35%鹽酸水溶液及270g的水之混合溶液。在完全滴加之後,使反應溫度增加至85℃,且在該增加的溫度下進行反應持續6小時。在反應完成之後,以添加醚和水實施萃取,回收有機相,且藉由蒸發作用移除殘 餘的醇和溶劑,產生608g的矽氧烷樹脂。將獲得的矽氧烷樹脂溶解在608g的丙二醇單甲基醚乙酸酯。該矽氧烷樹脂的重量平均分子量是4,200。 In a flask equipped with a cooling tube and a stirrer, 250 g (1.0 mol) of methyl 3-(triethoxydecyl)propionate, 297 g (1.5 mol) of phenyltrimethoxydecane, 204 g (weighed) 1.5 mol) of methyltrimethoxydecane, 248 g (1.0 mol) of methacryloxypropyltrimethoxydecane, and 2000 g of propylene glycol monomethyl ether acetate. While stirring the solution, a mixed solution of 13.0 g (0.125 mol) of a 35% aqueous hydrochloric acid solution and 270 g of water was added dropwise. After the complete dropwise addition, the reaction temperature was increased to 85 ° C, and the reaction was carried out at the increased temperature for 6 hours. After the reaction is completed, extraction is carried out by adding ether and water, the organic phase is recovered, and the residue is removed by evaporation. The remaining alcohol and solvent produced 608 g of a decane resin. The obtained decane resin was dissolved in 608 g of propylene glycol monomethyl ether acetate. The helium oxide resin had a weight average molecular weight of 4,200.
合成例3 Synthesis Example 3
在配備有冷卻管及攪拌器的燒瓶中,稱重264g(1.0mol)的3-(三乙氧基矽基)丙酸甲酯、396g(2.0mol)的苯基三甲氧基矽烷、272g(2.0mol)的甲基三甲氧基矽烷、及2000g的丙二醇單甲基醚乙酸酯。在攪拌該溶液同時,逐滴加入13.0g(0.125mol)的35%鹽酸水溶液及270g的水之混合溶液。在完全滴加之後,使反應溫度增加至85℃,且在該增加的溫度下進行反應持續6小時。在反應完成之後,以添加醚和水實施萃取,回收有機相,且藉由蒸發作用移除殘餘的醇和溶劑,產生560g的矽氧烷樹脂。將獲得的矽氧烷樹脂溶解在560g的丙二醇單甲基醚乙酸酯。該矽氧烷樹脂的重量平均分子量是3,800。 In a flask equipped with a cooling tube and a stirrer, 264 g (1.0 mol) of methyl 3-(triethoxyindenyl)propionate, 396 g (2.0 mol) of phenyltrimethoxydecane, and 272 g (weighed) were weighed ( 2.0 mol) of methyltrimethoxydecane, and 2000 g of propylene glycol monomethyl ether acetate. While stirring the solution, a mixed solution of 13.0 g (0.125 mol) of a 35% aqueous hydrochloric acid solution and 270 g of water was added dropwise. After the complete dropwise addition, the reaction temperature was increased to 85 ° C, and the reaction was carried out at the increased temperature for 6 hours. After the completion of the reaction, extraction was carried out by adding ether and water, the organic phase was recovered, and the residual alcohol and solvent were removed by evaporation to give 560 g of a dec. The obtained decane resin was dissolved in 560 g of propylene glycol monomethyl ether acetate. The helium oxide resin had a weight average molecular weight of 3,800.
<用於黑色矩陣之光敏性樹脂的製備> <Preparation of photosensitive resin for black matrix>
實例1 Example 1
以100重量份之總樹脂組成物為基準,混合12重量份的鹼溶性矽氧烷樹脂(於合成例1中合成的矽氧烷樹脂,苯基/甲基/甲基丙烯基/丙酸=20/20/40/20,Mw 4800,酸價36mg[KOH]/g[樹脂])、3.6重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。18重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟) (OXE-02,BASF)、及69重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 12 parts by weight of an alkali-soluble decane resin (the oxime resin synthesized in Synthesis Example 1, phenyl/methyl/methacryl/propionic acid = 1 part) based on 100 parts by weight of the total resin composition 20/20/40/20, Mw 4800, acid value 36 mg [KOH] / g [resin]), 3.6 parts by weight of carbon black (100 nm particle size) (used as a dispersion containing 20% carbon black). 18 parts by weight of carbon black was transferred to the dispersion), 1 part by weight of ethyl ketone-1-[9-ethyl-6-(2-methyl-tetrahydropiperidyloxybenzylidene)-9H -carbazol-3-yl]-1-(o-ethylindenyl) (OXE-02, BASF), and 69 parts by weight of propylene glycol monomethyl ether acetate as an organic solvent to prepare a photosensitive resin composition.
實例2 Example 2
以100重量份之總樹脂組成物為基準,混合實例1中使用之10重量份的鹼溶性矽氧烷樹脂(於合成例1中合成的矽氧烷樹脂,苯基/甲基/甲基丙烯基/丙酸=20/20/40/20,Mw 4800,酸價36mg[KOH]/g[樹脂])、6重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。30重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟)(OXE-02,BASF)、及59重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 10 parts by weight of the alkali-soluble decane resin used in Example 1 was mixed with 100 parts by weight of the total resin composition (the decyl alkane resin synthesized in Synthesis Example 1, phenyl/methyl/methacryl) Base / propionic acid = 20 / 20 / 40 / 20, Mw 4800, acid value 36 mg [KOH] / g [resin]), 6 parts by weight of carbon black (100 nm particle size) (with a dispersion containing 20% carbon black) In the form of use, 30 parts by weight of carbon black is transferred to the dispersion), 1 part by weight of ethyl ketone-1-[9-ethyl-6-(2-methyl-tetrahydropyranyloxybenzene) Mercapto)-9H-carbazol-3-yl]-1-(o-ethenylhydrazine) (OXE-02, BASF), and 59 parts by weight of propylene glycol monomethyl ether acetate as an organic solvent to prepare photosensitive Resin composition.
實例3 Example 3
以100重量份之總樹脂組成物為基準,混合實例1中使用之9重量份的鹼溶性矽氧烷樹脂(於合成例1中合成的矽氧烷樹脂,苯基/甲基/甲基丙烯基/丙酸=20/20/40/20,Mw 4800,酸價36mg[KOH]/g[樹脂])、8重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。40重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟)(OXE-02,BASF)、及50重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 9 parts by weight of the alkali-soluble decane resin used in Example 1 was mixed with 100 parts by weight of the total resin composition (the decyl alkane resin synthesized in Synthesis Example 1, phenyl/methyl/methacryl) Base / propionic acid = 20 / 20 / 40 / 20, Mw 4800, acid value 36 mg [KOH] / g [resin]), 8 parts by weight of carbon black (100 nm particle size) (with 20% carbon black dispersion) The form is used. 40 parts by weight of carbon black is transferred to the dispersion), 1 part by weight of ethyl ketone-1-[9-ethyl-6-(2-methyl-tetrahydropyranyloxybenzene) Mercapto)-9H-carbazol-3-yl]-1-(o-ethenylhydrazine) (OXE-02, BASF), and 50 parts by weight of propylene glycol monomethyl ether acetate as an organic solvent to prepare photosensitive Resin composition.
實例4 Example 4
以100重量份之總樹脂組成物為基準,混合實例1中使用之8重量份的鹼溶性矽氧烷樹脂(於合成例1中合成的矽氧烷樹脂,苯基/甲基/甲基丙烯基/丙酸=20/20/40/20,Mw 4800,酸價36mg[KOH]/g[樹脂])、9.4重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。47重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟)(OXE-02,BASF)、44重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 8 parts by weight of the alkali-soluble decane resin used in Example 1 was mixed with 100 parts by weight of the total resin composition (the oxime resin synthesized in Synthesis Example 1, phenyl/methyl/methacryl) Base / propionic acid = 20 / 20 / 40 / 20, Mw 4800, acid value 36 mg [KOH] / g [resin]), 9.4 parts by weight of carbon black (100 nm particle size) (with a dispersion containing 20% carbon black) The form is used. 47 parts by weight of carbon black is transferred to the dispersion), 1 part by weight of ethyl ketone-1-[9-ethyl-6-(2-methyl-tetrahydropyranyloxybenzene) Mercapto)-9H-carbazol-3-yl]-1-(o-ethenylhydrazine) (OXE-02, BASF), 44 parts by weight of propylene glycol monomethyl ether acetate as an organic solvent to prepare photosensitivity Resin composition.
實例5 Example 5
以100重量份之總樹脂組成物為基準,混合10重量份的鹼溶性矽氧烷樹脂(於合成例2中合成的矽氧烷樹脂,苯基/甲基/甲基丙烯基/丙酸=30/30/20/20,Mw 3600,酸價42mg[KOH]/g[樹脂])、2重量份的二季戊四醇六丙烯酸酯作為具有不飽和鍵之多官能單體、3.6重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。18重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟)(OXE-02,BASF)、69重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 10 parts by weight of an alkali-soluble decane resin (the siloxane resin synthesized in Synthesis Example 2, phenyl/methyl/methacryl/propionic acid = 1 part) based on 100 parts by weight of the total resin composition 30/30/20/20, Mw 3600, acid value 42 mg [KOH] / g [resin]), 2 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, and 3.6 parts by weight of carbon black (100 nm particle size) (used as a dispersion containing 20% carbon black. 18 parts by weight of carbon black was transferred to the dispersion), 1 part by weight of ethyl ketone-1-[9-ethyl-6 -(2-methyl-tetrahydropiperidyloxybenzylidene)-9H-indazol-3-yl]-1-(o-ethylindenylhydrazine) (OXE-02, BASF), 69 parts by weight Propylene glycol monomethyl ether acetate was used as an organic solvent to prepare a photosensitive resin composition.
實例6 Example 6
以100重量份之總樹脂組成物為基準,混合實例5中使用之8重量份的鹼溶性矽氧烷樹脂(於合成例2中合成的 矽氧烷樹脂,苯基/甲基/甲基丙烯基/丙酸=30/30/20/20,Mw 3600,酸價42mg[KOH]/g[樹脂])、4重量份的二季戊四醇六丙烯酸酯作為具有不飽和鍵之多官能單體、3.6重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。18重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟)(OXE-02,BASF)、及69重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 8 parts by weight of the alkali-soluble decane resin (used in Synthesis Example 2) used in Example 5 was mixed with 100 parts by weight of the total resin composition. A siloxane resin, phenyl/methyl/methacryl/propionic acid=30/30/20/20, Mw 3600, acid value 42 mg [KOH]/g [resin]), 4 parts by weight of dipentaerythritol The acrylate was used as a polyfunctional monomer having an unsaturated bond, 3.6 parts by weight of carbon black (100 nm particle size) (used as a dispersion containing 20% of carbon black. 18 parts by weight of carbon black was transferred to the dispersion Liquid), 1 part by weight of ethyl ketone-1-[9-ethyl-6-(2-methyl-tetrahydropiperidyloxybenzylidene)-9H-indazol-3-yl]-1- (o-Ethylene oxime) (OXE-02, BASF), and 69 parts by weight of propylene glycol monomethyl ether acetate were used as an organic solvent to prepare a photosensitive resin composition.
實例7 Example 7
以100重量份之總樹脂組成物為基準,混合實例5中使用6重量份的鹼溶性矽氧烷樹脂(於合成例2中合成的矽氧烷樹脂,苯基/甲基/甲基丙烯基/丙酸=30/30/20/20,Mw 3600,酸價42mg[KOH]/g[樹脂])、6重量份的二季戊四醇六丙烯酸酯作為具有不飽和鍵之多官能單體、3.6重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。18重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟)(OXE-02,BASF)、及69重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 6 parts by weight of an alkali-soluble decane resin (the oxime resin synthesized in Synthesis Example 2, phenyl/methyl/methacryl group) was used in the mixing example 5 based on 100 parts by weight of the total resin composition. /propionic acid = 30/30/20/20, Mw 3600, acid value 42 mg [KOH] / g [resin]), 6 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, 3.6 weight Parts of carbon black (100 nm particle size) (used as a dispersion containing 20% carbon black. 18 parts by weight of carbon black is transferred to the dispersion), 1 part by weight of ethyl ketone-1-[9- Ethyl-6-(2-methyl-tetrahydropiperidyl benzhydryl)-9H-indazol-3-yl]-1-(o-ethylindenyl) (OXE-02, BASF), And 69 parts by weight of propylene glycol monomethyl ether acetate as an organic solvent to prepare a photosensitive resin composition.
實例8 Example 8
以100重量份之總樹脂組成物為基準,混合實例5中使用之4重量份的鹼溶性矽氧烷樹脂(於合成例2中合成的 矽氧烷樹脂,苯基/甲基/甲基丙烯基/丙酸=30/30/20/20,Mw 3600,酸價42mg[KOH]/g[樹脂])、4重量份的二季戊四醇六丙烯酸酯作為具有不飽和鍵之多官能單體、9.4重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。47重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟)(OXE-02,BASF)、44重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 4 parts by weight of the alkali-soluble decane resin used in Example 5 was mixed with 100 parts by weight of the total resin composition (synthesized in Synthesis Example 2). A siloxane resin, phenyl/methyl/methacryl/propionic acid=30/30/20/20, Mw 3600, acid value 42 mg [KOH]/g [resin]), 4 parts by weight of dipentaerythritol The acrylate was used as a polyfunctional monomer having an unsaturated bond, 9.4 parts by weight of carbon black (100 nm particle size) (used as a dispersion containing 20% of carbon black. 47 parts by weight of carbon black was transferred to the dispersion Liquid), 1 part by weight of ethyl ketone-1-[9-ethyl-6-(2-methyl-tetrahydropiperidyloxybenzylidene)-9H-indazol-3-yl]-1- (o-Ethylene oxime) (OXE-02, BASF), 44 parts by weight of propylene glycol monomethyl ether acetate as an organic solvent to prepare a photosensitive resin composition.
比較實例1 Comparative example 1
以100重量份之總樹脂組成物為基準,混合4重量份的鹼溶性卡多型(cardo-based)樹脂(Mw 5000,酸價80mg[KOH]/g[樹脂],Adeka)、4重量份的二季戊四醇六丙烯酸酯作為具有不飽和鍵之多官能單體、9.4重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。47重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟)(OXE-02,BASF)、及44重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 4 parts by weight of an alkali-soluble cardo-based resin (Mw 5000, acid value 80 mg [KOH] / g [resin], Adeka), 4 parts by weight based on 100 parts by weight of the total resin composition Dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, 9.4 parts by weight of carbon black (100 nm particle size) (used as a dispersion containing 20% carbon black. 47 parts by weight of carbon black was used Transfer to the dispersion), 1 part by weight of ethyl ketone-1-[9-ethyl-6-(2-methyl-tetrahydropiperidyloxybenzylidene)-9H-indazol-3-yl ]-1-(o-ethenylhydrazine) (OXE-02, BASF), and 44 parts by weight of propylene glycol monomethyl ether acetate as an organic solvent to prepare a photosensitive resin composition.
比較實例2 Comparative example 2
以100重量份之總樹脂組成物為基準,混合4重量份的鹼溶性矽烷氧樹脂(於合成例3中合成的矽氧烷樹脂,苯基/甲基/丙酸=40/40/20,Mw 3800,酸價40mg[KOH]/g[樹 脂])、4重量份的二季戊四醇六丙烯酸酯作為具有不飽和鍵之多官能單體、9.4重量份的碳黑(100nm顆粒尺寸)(以含有20%碳黑之分散液的形式來使用。47重量份的碳黑被轉移到該分散液)、1重量份的乙酮-1-[9-乙基-6-(2-甲基-四氫哌喃氧基苯甲醯基)-9H-咔唑-3-基]-1-(鄰乙醯基肟)(OXE-02,BASF)、及44重量份的丙二醇單甲基醚乙酸酯作為有機溶劑以製備光敏性樹脂組成物。 4 parts by weight of an alkali-soluble decane-oxygen resin (a siloxane resin synthesized in Synthesis Example 3, phenyl/methyl/propionic acid = 40/40/20, based on 100 parts by weight of the total resin composition) Mw 3800, acid price 40mg [KOH] / g [tree Lipid]), 4 parts by weight of dipentaerythritol hexaacrylate as a polyfunctional monomer having an unsaturated bond, and 9.4 parts by weight of carbon black (100 nm particle size) (used as a dispersion containing 20% of carbon black). 47 parts by weight of carbon black was transferred to the dispersion), 1 part by weight of ethyl ketone-1-[9-ethyl-6-(2-methyl-tetrahydropiperidyloxybenzylidene)-9H - oxazol-3-yl]-1-(o-ethenylhydrazine) (OXE-02, BASF), and 44 parts by weight of propylene glycol monomethyl ether acetate as an organic solvent to prepare a photosensitive resin composition.
<測試例> <Test example>
將在實施例及比較實例中製備之用於光遮蔽(用於黑色矩陣)之光敏性樹脂組成物藉由旋轉塗布以1.2微米之厚度塗布在LCD-面板用之玻璃基板上,且在100℃下軟烤以移除溶劑,形成塗覆膜。所形成之塗覆膜在鹼性水溶液中曝光及顯影以形成薄膜。在230℃烘箱使其中具有薄膜之玻璃基板熱處理持續30分鐘以獲得最終薄膜之後,測量表面電阻率、介電常數、光密度、針孔(pinholes)、及黏著性。之後,在380℃烘箱實施進一步熱處理持續30分鐘並以相同方式測量上述評估。根據評估標準的結果係顯示在表1和表2。 The photosensitive resin composition for light shielding (for black matrix) prepared in the examples and comparative examples was coated on a glass substrate for an LCD-panel by spin coating at a thickness of 1.2 μm, and at 100 ° C. The mixture is soft baked to remove the solvent to form a coating film. The formed coating film is exposed and developed in an alkaline aqueous solution to form a film. After the glass substrate having the film therein was heat-treated at 230 ° C for 30 minutes to obtain a final film, surface resistivity, dielectric constant, optical density, pinholes, and adhesion were measured. Thereafter, further heat treatment was carried out in an oven at 380 ° C for 30 minutes and the above evaluation was measured in the same manner. The results according to the evaluation criteria are shown in Tables 1 and 2.
表面電阻率量測Surface resistivity measurement
為了測量所形成之薄膜的表面電阻率,使用Keithley的高電阻量測儀(high resistance meter)來測量表面電阻率。 To measure the surface resistivity of the formed film, Keithley's high resistance meter was used to measure the surface resistivity.
介電常數量測Dielectric constant measurement
為了測量所形成之薄膜的介電常數,在具有ITO塗覆之低電極和透過鋁沉積形成的高電極之玻璃基板上形成薄 膜。使用Agilent 4284 LCR量測儀進行介電常數的量測。 In order to measure the dielectric constant of the formed film, a thin film is formed on a glass substrate having an ITO-coated low electrode and a high electrode formed by aluminum deposition. membrane. The dielectric constant was measured using an Agilent 4284 LCR meter.
光密度量測Optical density measurement
為了測量所形成之薄膜的光密度,使用X-rite 361T測量光密度O.D。 In order to measure the optical density of the formed film, the optical density O.D was measured using an X-rite 361T.
針孔量測Pinhole measurement
所形成之薄膜的針孔量測涉及使用光學顯微鏡測量在10cm X 10cm玻璃基板內的針孔數。0~10個針孔以O表示,10~30個針孔以△表示,且30個或更多個針孔以×表示。 The pinhole measurement of the formed film involved measuring the number of pinholes in a 10 cm X 10 cm glass substrate using an optical microscope. 0 to 10 pinholes are denoted by O, 10 to 30 pinholes are denoted by Δ, and 30 or more pinholes are denoted by ×.
黏著性試驗Adhesion test
為了測量黏著性,在玻璃基板上形成膜之後,最終固化的試樣以百格刮刀(crosshatch cutter)刮痕來曝光該基板,且在施用3M黏著膠帶之後,分離。在此例子中,分離區域的面積超過全部試驗表面的65%以0B表示,35-65%以1B表示,15-35%以2B表示,5-15%以3B表示,少於5%以4B表示,及沒有分離區域以5B表示。 In order to measure the adhesion, after the film was formed on the glass substrate, the finally cured sample was exposed with a crosshatch cutter scratch and separated after application of the 3M adhesive tape. In this example, the area of the separation zone exceeds 65% of the total test surface by 0B, 35-65% by 1B, 15-35% by 2B, 5-15% by 3B, and less than 5% by 4B. Indicates that there is no separation area indicated by 5B.
參見實例1至實例4,顯示出樹脂組成物中的矽烷氧樹脂的含量增加,從該樹脂組成物製造的薄膜的介電常數降低,亦即,改善電絕緣性質。 Referring to Examples 1 to 4, it was shown that the content of the decaneoxy resin in the resin composition was increased, and the dielectric constant of the film produced from the resin composition was lowered, that is, the electrical insulating property was improved.
又,實例5至實例8關於具有不飽合鍵(包含二季戊四醇六丙烯酸酯作為多官能單體)之樹脂組成物,且實例5至 實例8中製備的薄膜顯示出,當矽氧烷樹脂的含量增加,它們顯示較低介電常數而具有較佳電絕緣性質。 Further, Examples 5 to 8 pertain to a resin composition having an unsaturated bond (containing dipentaerythritol hexaacrylate as a polyfunctional monomer), and Examples 5 to The film prepared in Example 8 showed that when the content of the decane resin was increased, they exhibited a lower dielectric constant and had better electrical insulating properties.
又,當分別比較實例5和實例8與實例1和實例4時,實例5和實例8是彼等其中在實例1和實例4的樹脂組成物中之矽氧烷樹脂含量的一部分經具有不飽和鍵之多官能單體取代,且從實例5和實例8(經如上述取代者)形成之薄膜相對於從實例1和實例4形成之薄膜具有較差電絕緣性質的效果。 Further, when Example 5 and Example 8 were compared with Examples 1 and 4, respectively, Examples 5 and 8 were the parts in which the content of the decane resin in the resin compositions of Examples 1 and 4 was unsaturated. The polyfunctional monomer of the bond was substituted, and the films formed from Examples 5 and 8 (as replaced by the above) had an effect of having poor electrical insulating properties with respect to the films formed from Examples 1 and 4.
同時,相較於從實例1至實例8之樹脂組成物製造的薄膜,從使用卡多型樹脂的比較實例1之樹脂組成物製造的薄膜顯示顯著高的介電常數而具有極差電絕緣性質。 Meanwhile, the film produced from the resin composition of Comparative Example 1 using the card type resin showed a significantly high dielectric constant and had extremely poor electrical insulating properties as compared with the film produced from the resin compositions of Examples 1 to 8. .
如表1和表2所顯示,相較於比較實例,即使是在380℃的高溫製程之後,經本發明製備的薄膜具有極較佳的電絕緣性質、光學性質、黏著性、圖案解析度及敏感度,因而其適用於需要高溫處理的製備製程。又,包含該薄膜的光遮蔽層亦可呈現出良好的電絕緣性質、光學性質、圖案解析度、及敏感度。 As shown in Tables 1 and 2, the film prepared by the present invention has extremely excellent electrical insulating properties, optical properties, adhesion, pattern resolution and sensitivity, even after a high temperature process at 380 ° C, as compared with the comparative example. Degree, and thus it is suitable for a preparation process requiring high temperature processing. Moreover, the light shielding layer comprising the film can also exhibit good electrical insulating properties, optical properties, pattern resolution, and sensitivity.
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TWI767982B (en) * | 2017-01-31 | 2022-06-21 | 日商東京應化工業股份有限公司 | Polymerizable composition, method for producing cured film, and cured film |
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