WO2015192268A1 - Carbon dioxide gas laser tube and preparation method therefor - Google Patents

Carbon dioxide gas laser tube and preparation method therefor Download PDF

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Publication number
WO2015192268A1
WO2015192268A1 PCT/CN2014/000601 CN2014000601W WO2015192268A1 WO 2015192268 A1 WO2015192268 A1 WO 2015192268A1 CN 2014000601 W CN2014000601 W CN 2014000601W WO 2015192268 A1 WO2015192268 A1 WO 2015192268A1
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WO
WIPO (PCT)
Prior art keywords
carbon dioxide
dioxide gas
metal ring
gas laser
tube
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PCT/CN2014/000601
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French (fr)
Chinese (zh)
Inventor
徐海军
Original Assignee
徐海军
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Publication date
Application filed by 徐海军 filed Critical 徐海军
Priority to CN201480009212.4A priority Critical patent/CN105684242A/en
Priority to PCT/CN2014/000601 priority patent/WO2015192268A1/en
Publication of WO2015192268A1 publication Critical patent/WO2015192268A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/034Optical devices within, or forming part of, the tube, e.g. windows, mirrors

Definitions

  • the present invention relates to the field of laser tube technology, and in particular to a carbon dioxide gas laser tube and a method of preparing the same. Background technique
  • one is a laser tube that does not have a lens
  • the other is a laser tube that has an adjustable lens angle.
  • Fig. 1 is a schematic view showing the structure of a prior art non-adjustable lens laser tube.
  • the laser tube is formed by firstly grinding the end faces 51, 54 of the glass tube with a fine sand into a plane and making the plane perpendicular to the discharge tube, and then respectively, the laser lenses 50, 55. Directly bonded to the end faces 51, 54 at both ends of the glass tube.
  • current is introduced into the laser tube from the tungsten needles 52, 53.
  • the advantages of this type of laser tube are: The connection of the laser lens is stable.
  • the tungsten needle is additionally welded to introduce current from the tungsten needle, and the very thin and hard tungsten needle is not easy to connect the wire; in addition, the lens is directly bonded to the glass nozzle because the glass is thermally conductive, Not conducive to lens distraction,
  • Patent CN 203150891 U discloses a carbon dioxide laser tube conditioning head for connecting a laser lens to a glass tube to form a laser tube with an adjustable lens angle.
  • the advantage of using the adjustable structure of the adjustment head to connect the laser lens to the glass tube is that the nozzle is not required to be ground, and the angle of the lens is adjusted by adjusting the screw; without the need to weld the tungsten needle, the current can be introduced through the metal structure of the adjustment head. Inside the laser tube.
  • the disadvantage of using such an adjustment head to connect the laser lens to the glass tube is that the adjustment head changes the angle of the laser lens by adjusting the screw and connects the laser lens to the glass tube, however, the adjustment screw is at different temperatures and In the case of vibration, it is loose, so that the connection of the laser lens is unstable, resulting in deterioration of the laser mode of the laser tube and a decrease in laser power.
  • a carbon dioxide gas laser tube comprising a laser lens and a glass tube, wherein the laser lens is fixedly connected to the glass by a metal ring that is matched with a port of the glass tube. a port of the tube, the metal ring being disposed between the laser lens and a port of the glass tube, wherein the metal ring comprises a sheet portion, a mirror portion, and a gradable portion.
  • the sheet portion of the metal ring is made of a metal or alloy having a Brinell hardness of 55 or less.
  • the sheet portion of the metal ring is made of copper.
  • the sheet portion of the metal ring of the metal ring is brazed to the seat end surface of the lens holder portion.
  • the craterable portion of the metal ring is made of a metal or alloy having a coefficient of expansion that matches the glass orifice.
  • the craterable portion of the metal ring is made of a Kovar alloy whose expansion coefficient is matched with a glass nozzle.
  • the lens holder portion of the metal ring is made of stainless steel.
  • the mirror portion of the metal ring is made of an alloy of iron, nickel, titanium or the like.
  • the mirror seat portion and the cut portion of the metal ring are made of the same metal.
  • the metal ring is provided with a metal post or hole for connecting an external wire.
  • the carbon dioxide gas laser tube comprises a laser lens and a glass tube, and the method comprises:
  • the laser lens is fixedly connected to the port of the glass tube by a metal ring that is matched with the port of the glass tube, since the adjustment screw is not used like a laser tube with a adjustable lens angle
  • the connection of the laser lens is ensured, and the tungsten needle is not welded, and current can be introduced into the laser tube through the metal ring.
  • the metal ring includes a sheet portion, a mirror portion, and a cut portion.
  • the lens holder portion and the kovar portion are integrally welded, the crater portion is sealed and sintered with the port of the glass tube, the sheet portion is brazed to the lens holder portion, and the sheet portion is adhesively sealed and connected to the laser lens.
  • the metal is relatively soft and has good thermal conductivity. For example, it can be made of metal or alloy with a Brinell hardness of 55 or less.
  • the material of the sheet is copper. The copper is soft and easy to process. The copper conducts heat better, which helps the laser lens. Cooling. DRAWINGS
  • Fig. 1 is a schematic view showing the structure of a prior art non-adjustable lens laser tube.
  • Fig. 2 is a view showing the structure of a carbon dioxide gas laser tube according to an embodiment of the present invention.
  • Fig. 3 is an enlarged view showing the trailing end of the carbon dioxide gas laser tube shown in Fig. 2.
  • Fig. 4 is an enlarged plan view showing the front end of the carbon dioxide gas laser tube shown in Fig. 2.
  • Fig. 2 is a view showing the structure of a carbon dioxide gas laser tube according to an embodiment of the present invention.
  • the carbon dioxide gas laser tube of this embodiment includes a glass tube 20 including a tail port 4 and a front port 7, and a full port mirror 1' that matches the tail port 4 of the glass tube 20.
  • the metal ring of the kovable fixed seal is connected to the glass tube 20
  • the tail port 4, the output mirror 11 is fixedly connected to the front port 7 of the glass tube 20 by a cleavable portion of the metal ring that mates with the front port 7 of the glass tube 20.
  • a structure such as a screw hole 2 may be provided on the metal ring between the full mirror 1 and the tail port 4 of the glass tube 20 for connecting an external positive lead (for example, a positive high voltage line).
  • a structure of a metal post on the metal ring between the full mirror 1 and the tail port 4 of the glass tube 20 to connect the external positive lead.
  • a positive electrode 5 is connected inside the metal ring between the full-mirror 1 and the tail port 4 of the glass tube 20, thereby introducing a current into the laser tube.
  • a structure such as a screw hole 10 may be provided on the metal ring between the output mirror 11 and the front port 7 of the glass tube 20 for connecting the negative electrode lead, and further, between the output mirror 11 and the front port 7 of the glass tube 20.
  • the inner side of the metal ring is connected with a spring 22 which is placed on the nozzle of the discharge tube 18 by a spring 22 and is connected to the metal ring between the output mirror 11 and the front port 7 of the glass tube 20, thereby introducing a current into the laser tube.
  • the metal ring between the full mirror 1 and the tail port 4 of the glass tube 20 comprises a foil portion 31 which is fixedly sealed to the full mirror 1 .
  • the metal ring between the output mirror 11 and the front port 7 of the glass tube 20 includes a foil portion 32 that is fixedly sealed to the output mirror 11.
  • the sheet portion 31 and the sheet portion 32 may be thin, so that the deformation thereof has little influence on the deformation of the entire metal ring structure.
  • the sheet portion 31 and the sheet portion 32 may be made of a metal or alloy having a Brinell hardness of 55 or less for the purpose of milling and grinding, for example, may be made of copper, and in this case, also for the full-mirror 1 and the output mirror 11 Cooling.
  • Fig. 3 is an enlarged view showing the trailing end of the carbon dioxide gas laser tube shown in Fig. 2.
  • the metal ring between the full-mirror 1 and the tail port 4 of the glass tube 20 further includes a crater 14 and a tail mirror base 12, a crater 14 and a tail mirror seat 12.
  • the connection between the gradable portion 14 and the tail port 4 of the glass tube 20 can be performed, for example, by welding or the like, and the tail mirror portion 12 is welded to the sheet portion 31, for example.
  • the kovable portion 14 is made of Kovar alloy.
  • the tail mirror seat portion 12 may be made of metal iron, titanium, nickel or an alloy thereof, and preferably may be made of a metal or alloy of a low expansion coefficient or stainless steel.
  • Fig. 4 is an enlarged plan view showing the front end of the carbon dioxide gas laser tube shown in Fig. 2.
  • the metal ring between the output mirror 11 and the front port 7 of the glass tube 20 is shown in FIG.
  • a kovable portion 23 and a front lens holder portion 25 may be connected by welding or the like, and the gradable portion 23 is sealed, for example, to the front port 7 of the glass tube 20, the front mirror
  • the seat portion 25 is spliced to the sheet portion 32, for example.
  • the kovable portion 23 is formed of Kovar alloy.
  • the kovable portion 14 may be formed of a metal or alloy having a different expansion coefficient and matching with the port glass as long as it can be matched and sealed with the glass nozzle.
  • the front mirror portion 25 may be made of metal iron, titanium, nickel or an alloy thereof, and preferably may be made of a metal or alloy having a low expansion coefficient, or may be made of stainless steel. According to another embodiment of the present invention, a method of preparing the above carbon dioxide gas laser tube is provided.
  • the kovable portion 14 may be sealed at the tail port 4 of the glass tube 20 by a sealing point 15, and the other end of the kovable portion 14 may be welded by a solder joint 3 (for example The sub-arc joint 12, the sheet portion 31 is welded to the tail mirror portion 12, for example, and then the full-mirror 1 is bonded (for example, glued) to the sheet portion 31, and at the tail mirror portion 12 A threaded hole 2 is provided for connecting the positive electrode lead, and a positive electrode 5 is connected to the inner side of the tail mirror seat portion 12. As shown in FIG.
  • the crater 23 can be sealed at the front port 7 of the glass tube 20 by a sealing point 8, and the other end of the kovable portion 23 is welded (for example, argon arc welded) to the front lens holder through the solder joint 9.
  • the portion 25, the sheet portion 32 is spliced to the front mirror portion 25, for example, and then the output mirror 11 is bonded (for example, glued) to the sheet portion 32, and the threaded hole 10 is provided on the front mirror portion 25 for use.
  • a spring 22 is connected to the inner side of the front mirror portion 25, and the negative electrode 21 is placed on the nozzle of the discharge tube 18 by the spring 22 and connected to the front mirror portion 25.
  • the surface of the sheet portion 31 for bonding the entire mirror 1 and the sheet portion 32 may be bonded to the sheet portion 31 and before the output mirror 11 is bonded to the sheet portion 32.
  • the surface for bonding the output mirror 11 is ground and simultaneously detected. For example, it can be detected by a self-collimating inner focusing telescope (also called a collimator) so that the surface after grinding is perpendicular to the discharge tube 18.
  • the central shaft preferably, causes the ground surface to be coaxial with the discharge tube 18. Grinding can be carried out by hand or by using an electric grinder under numerical control to achieve the requirements of the present invention. In addition, CNC tool milling can also be used to achieve the grinding effect.
  • the electric motor can be mounted on a multi-axis, multi-angle CNC platform that can swing back and forth, left and right, up and down, and then adjust its position and angle to make it thin.
  • the surface of the portion 31 for bonding the full-mirror 1 and the use of the sheet portion 32 Milling is performed on the surface of the bonded output mirror 11, and may be used in combination with milling so that the surface of the sheet portion 31 for bonding the full-mirror 1 and the surface of the sheet portion 32 for bonding the output mirror 11 are vertical.
  • the full-mirror 1 is bonded to the sheet portion 31 and the output mirror 11 is bonded to the sheet portion 32, it is necessary to ensure that the mirror faces of the full-mirror 1 and the output mirror 11 are perpendicular to the central axis of the discharge tube 18.
  • the mirror faces of the full mirror 1 and the output mirror 11 are made coaxial with the discharge tube 18.
  • matching means that the mutually matching members can be fixedly sealed, not limited to the shape, size, etc. of the members, and the components that match each other without adverse effects
  • the shape, size, etc. may vary.
  • matching sealing of glass there is a corresponding matching sealing metal material for different materials of glass, which has strict expansion coefficient requirements for the metal.
  • the present invention is not limited thereto, and those skilled in the art may use appropriate sealing connections as needed, for example It is also possible to use a method such as sintering as long as the sealing connection is fixed and not adjustable.
  • the metal ring may include only two portions (sheet portion and metal). Another part of the ring).
  • the foregoing is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto.
  • the embodiments of the present invention may omit some of the technical features described above, and only solve the existing parts in the prior art.
  • the technical problems, and the technical features disclosed may be combined in any way, and any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the present invention are covered by the scope of the present invention. Accordingly, the scope of the invention is defined by the scope of the appended claims.

Abstract

A carbon dioxide gas laser tube and a preparation method therefor. The carbon dioxide gas laser tube comprises laser lenses (1, 11) and a glass tube (20), characterised in that the laser lenses (1, 11) are fixedly sealed and connected to ports of the glass tube via metal rings matching the port expansion coefficient of the glass tube (20), the metal rings being arranged between the laser lenses and the ports of the glass tube. A metal ring comprises a Kovar portion (14), a lens seat portion (12) and a thin sheet portion (32), said portions being fixedly sealed and connected. The Kovar portions (14) are sealed and sintered to the ports of the glass tube (20), the laser lenses (1, 11) are adhered to the thin sheet portions (32), and the thin sheet portions (32) are annular metal thin sheet structures.

Description

二氧化碳气体激光管及其制备方法 技术领域  Carbon dioxide gas laser tube and preparation method thereof
本发明涉及激光管技术领域, 具体地, 涉及二氧化碳气体激光 管及其制备方法。 背景技术  The present invention relates to the field of laser tube technology, and in particular to a carbon dioxide gas laser tube and a method of preparing the same. Background technique
现有技术的二氧化碳气体激光管中, 一种是不可调镜片的激光 管, 另一种是可调镜片角度的激光管。  Among the prior art carbon dioxide gas laser tubes, one is a laser tube that does not have a lens, and the other is a laser tube that has an adjustable lens angle.
图 1 示出了现有技术的不可调镜片的激光管的结构示意图。 如 图 1所示, 这种激光管通过以下方式形成, 首先, 用细砂将玻璃管两 端的端面 51、 54手工研磨成平面并使该平面垂直于放电管, 然后分 别将激光镜片 50、 55直接粘接在玻璃管两端的端面 51、 54上。在这 种激光管的使用过程中, 电流从钨针 52、 53引入激光管内。 这种激 光管的优点在于: 激光镜片的连接稳定。这种激光管的缺点在于: 要 另焊钨针, 以从钨针引入电流, 而很细很硬的钨针不容易连接导线; 另外, 镜片直接粘接在玻璃管口上, 因为玻璃导热慢, 不利于镜片散 执、、。  Fig. 1 is a schematic view showing the structure of a prior art non-adjustable lens laser tube. As shown in Fig. 1, the laser tube is formed by firstly grinding the end faces 51, 54 of the glass tube with a fine sand into a plane and making the plane perpendicular to the discharge tube, and then respectively, the laser lenses 50, 55. Directly bonded to the end faces 51, 54 at both ends of the glass tube. During the use of such a laser tube, current is introduced into the laser tube from the tungsten needles 52, 53. The advantages of this type of laser tube are: The connection of the laser lens is stable. The disadvantages of this type of laser tube are: the tungsten needle is additionally welded to introduce current from the tungsten needle, and the very thin and hard tungsten needle is not easy to connect the wire; in addition, the lens is directly bonded to the glass nozzle because the glass is thermally conductive, Not conducive to lens distraction,
专利 CN 203150891 U公开了一种二氧化碳激光管调节头, 其用 于将激光镜片连接至玻璃管, 以形成可调镜片角度的激光管。利用这 种可调结构的调节头将激光镜片连接至玻璃管的优点在于:不需要对 管口研磨, 通过调节螺丝调节镜片角度; 不用另焊钨针, 电流可以通 过调节头的金属结构件引入激光管内。然而,利用这种调节头将激光 镜片连接至玻璃管的缺点在于:这种调节头通过调节螺丝来改变激光 镜片的角度并将激光镜片连接至玻璃管,然而,调节螺丝在不同温度 下以及在振动的情况下会松动,从而激光镜片的连接不稳定, 导致激 光管的激光模式变差并且激光功率下降。 发明内容 Patent CN 203150891 U discloses a carbon dioxide laser tube conditioning head for connecting a laser lens to a glass tube to form a laser tube with an adjustable lens angle. The advantage of using the adjustable structure of the adjustment head to connect the laser lens to the glass tube is that the nozzle is not required to be ground, and the angle of the lens is adjusted by adjusting the screw; without the need to weld the tungsten needle, the current can be introduced through the metal structure of the adjustment head. Inside the laser tube. However, the disadvantage of using such an adjustment head to connect the laser lens to the glass tube is that the adjustment head changes the angle of the laser lens by adjusting the screw and connects the laser lens to the glass tube, however, the adjustment screw is at different temperatures and In the case of vibration, it is loose, so that the connection of the laser lens is unstable, resulting in deterioration of the laser mode of the laser tube and a decrease in laser power. Summary of the invention
鉴于此, 本发明的目的是提供一种二氧化碳气体激光管, 其既 能保证激光镜片的连接稳定, 也不用另焊钨针。  In view of this, it is an object of the present invention to provide a carbon dioxide gas laser tube which can ensure the stability of the connection of the laser lens without the need to weld a tungsten needle.
根据本发明的一方面, 提供一种二氧化碳气体激光管, 包插激 光镜片和玻璃管,其特征在于,所述激光镜片通过与所述玻璃管的端 口匹配的金属环固定密封连接至所述玻璃管的端口,所述金属环设置 在所述激光镜片与所述玻璃管的端口之间,其中,所述金属环包括薄 片部、 镜座部、 可伐部。  According to an aspect of the present invention, a carbon dioxide gas laser tube is provided, comprising a laser lens and a glass tube, wherein the laser lens is fixedly connected to the glass by a metal ring that is matched with a port of the glass tube. a port of the tube, the metal ring being disposed between the laser lens and a port of the glass tube, wherein the metal ring comprises a sheet portion, a mirror portion, and a gradable portion.
优选地, 所述金属环的薄片部由布氏硬度 55以下的金属或合金 制成。  Preferably, the sheet portion of the metal ring is made of a metal or alloy having a Brinell hardness of 55 or less.
优选地, 所述金属环的薄片部由铜制成。  Preferably, the sheet portion of the metal ring is made of copper.
优选地, 所述金属环的金属环的薄片部钎焊在镜座部的座端面。 '优选地, 所述金属环的可伐部由膨胀系数和玻璃管口相匹配的 金属或合金制成。  Preferably, the sheet portion of the metal ring of the metal ring is brazed to the seat end surface of the lens holder portion. Preferably, the craterable portion of the metal ring is made of a metal or alloy having a coefficient of expansion that matches the glass orifice.
优选地, 所述金属环的可伐部由膨胀系数和玻璃管口相匹配的 可伐合金制成。  Preferably, the craterable portion of the metal ring is made of a Kovar alloy whose expansion coefficient is matched with a glass nozzle.
优选地, 所述金属环的镜座部由不锈钢制成。  Preferably, the lens holder portion of the metal ring is made of stainless steel.
优选地, 所述金属环的镜座部由铁, 镍, 钛等合金制成。 优选地, 所述金属环的镜座部和可伐部由同一金属制成。 优选地,所述金属环上设置有用于连接外部导线的金属柱或孔。 优选地, 所述二氧化碳气体激光管包括激光镜片和玻璃管, 所述方法包括:  Preferably, the mirror portion of the metal ring is made of an alloy of iron, nickel, titanium or the like. Preferably, the mirror seat portion and the cut portion of the metal ring are made of the same metal. Preferably, the metal ring is provided with a metal post or hole for connecting an external wire. Preferably, the carbon dioxide gas laser tube comprises a laser lens and a glass tube, and the method comprises:
将与所述玻璃管的端口膨胀系数相匹配的可伐部密封烧结至所 述玻璃管的端口;将与所述薄片部钎焊在镜座部的座端面; 将所述用 于胶粘所述激光镜片的薄片部表面进行铣削、 研磨,使金属环的研磨 表面垂直与放电管中心轴; 将所述激光镜片粘接至所述薄片部的铣 肖 |J、 研磨面。 其中, 所述薄片部、 镜座部、 可伐部在镜片与所述玻璃 管的端口之间。  Cutting a vane portion matching the port expansion coefficient of the glass tube to a port of the glass tube; brazing the sheet portion to a seat end portion of the lens holder portion; The surface of the sheet portion of the laser lens is subjected to milling and polishing so that the polishing surface of the metal ring is perpendicular to the central axis of the discharge tube; and the laser lens is bonded to the milling surface of the sheet portion and the polished surface. Wherein the sheet portion, the mirror portion, and the cut portion are between the lens and the port of the glass tube.
有益效果 本发明的二氧化碳气体激光管中, 所述激光镜片通过与所述玻 璃管的端口匹配的金属环固定密封连接至所述玻璃管的端口,由于没 有像可调镜片角度的激光管那样使用调节螺丝来将激光镜片连接至 玻璃管, 因此保证了激光镜片的连接稳定, 并且不用另焊钨针, 电流 可以通过所述金属环引入激光管内。 Beneficial effect In the carbon dioxide gas laser tube of the present invention, the laser lens is fixedly connected to the port of the glass tube by a metal ring that is matched with the port of the glass tube, since the adjustment screw is not used like a laser tube with a adjustable lens angle In order to connect the laser lens to the glass tube, the connection of the laser lens is ensured, and the tungsten needle is not welded, and current can be introduced into the laser tube through the metal ring.
此外, 本发明的二氧化碳气体激光器中, 所述金属环包括薄片 部、 镜座部、 可伐部。  Further, in the carbon dioxide gas laser of the present invention, the metal ring includes a sheet portion, a mirror portion, and a cut portion.
镜座部与可伐部焊接上成为整体, 可伐部与所述玻璃管的端口 密封烧结,薄片部钎焊在镜座部上, 薄片部与所述激光镜片胶粘密封 连接, 所述薄片部选择比较软, 导热比较好的金属, 如可以由布氏硬 度 55以下的金属或合金制成,薄片部材料为铜,铜比较软方便加工, 铜导热比较好, 其有助于所述激光镜片的散热。 附图说明  The lens holder portion and the kovar portion are integrally welded, the crater portion is sealed and sintered with the port of the glass tube, the sheet portion is brazed to the lens holder portion, and the sheet portion is adhesively sealed and connected to the laser lens. The metal is relatively soft and has good thermal conductivity. For example, it can be made of metal or alloy with a Brinell hardness of 55 or less. The material of the sheet is copper. The copper is soft and easy to process. The copper conducts heat better, which helps the laser lens. Cooling. DRAWINGS
图 1示出了现有技术的不可调镜片的激光管的结构示意图。 图 2示出了根据本发明的一个实施例的二氧化碳气体激光管的 结构示意图。  Fig. 1 is a schematic view showing the structure of a prior art non-adjustable lens laser tube. Fig. 2 is a view showing the structure of a carbon dioxide gas laser tube according to an embodiment of the present invention.
图 3示出了图 2所示的二氧化碳气体激光管的尾端的放大视图。 图 4示出了图 2所示的二氧化碳气体激光管的前端的放大视图。 具体实施方式  Fig. 3 is an enlarged view showing the trailing end of the carbon dioxide gas laser tube shown in Fig. 2. Fig. 4 is an enlarged plan view showing the front end of the carbon dioxide gas laser tube shown in Fig. 2. detailed description
下面将结合附图, 对本发明的实施例的技术方案进行清楚、 完 整地描述, 显然, 所描述的实施例仅仅是本发明的优选实施例, 而不 是全部的实施例。基于本发明的实施例,本领域普通技术人员所获得 的所有其他实施例, 都属于本发明保护的范围。  The technical solutions of the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings. It is obvious that the described embodiments are merely preferred embodiments of the present invention, but not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention are within the scope of the present invention.
图 2示出了根据本发明的一个实施例的二氧化碳气体激光管的 结构示意图。  Fig. 2 is a view showing the structure of a carbon dioxide gas laser tube according to an embodiment of the present invention.
如图 2所示, 该实施例的二氧化碳气体激光管包括玻璃管 20和 放电管 18, 玻璃管 20包括尾端口 4和前端口 7, 全反镜 1'通过与玻 璃管 20的尾端口 4匹配的金属环的可伐部固定密封连接至玻璃管 20 的尾端口 4,输出镜 11通过与玻璃管 20的前端口 7匹配的金属环的 可伐部固定密封连接至玻璃管 20的前端口 7。 可以在全反镜 1与玻 璃管 20的尾端口 4之间的金属环上设置例如螺纹孔 2等结构, 以用 于连接外部的正极引线 (例如, 正极高压线) 。 当然, 也可以在全反 镜 1与玻璃管 20的尾端口 4之间的金属环上设置金属柱的结构来连 接外部的正极引线。 而且, 在全反镜 1与玻璃管 20的尾端口 4之间 的金属环内侧连接有正电极 5, 从而将电流引入激光管内。 可以在输 出镜 11与玻璃管 20的前端口 7之间的金属环上设置例如螺纹孔 10 等结构, 以用于连接负极引线, 而且, 在输出镜 11与玻璃管 20的前 端口 7之间的金属环内侧连接有弹簧 22, 负电极 21通过弹簧 22顶 在放电管 18的管口并连接至输出镜 11与玻璃管 20的前端口 7之间 的金属环, 从而将电流引入激光管内。 而且, 全反镜 1与玻璃管 20 的尾端口 4之间的金属环包括薄片部 31 , 其与全反镜 1 固定密封连 接。输出镜 11与玻璃管 20的前端口 7之间的金属环包括薄片部 32, 其与输出镜 11固定密封连接。 薄片部 31和薄片部 32可以很薄, 从 而其变形对整个金属环结构的变形的影响很小。 薄片部 31和薄片部 32可以由布氏硬度 55以下的金属或合金制成, 以便于铣削和研磨, 例如, 可以由铜制成, 该情况下, 也有利于全反镜 1和输出镜 11的 散热。 As shown in FIG. 2, the carbon dioxide gas laser tube of this embodiment includes a glass tube 20 including a tail port 4 and a front port 7, and a full port mirror 1' that matches the tail port 4 of the glass tube 20. The metal ring of the kovable fixed seal is connected to the glass tube 20 The tail port 4, the output mirror 11 is fixedly connected to the front port 7 of the glass tube 20 by a cleavable portion of the metal ring that mates with the front port 7 of the glass tube 20. A structure such as a screw hole 2 may be provided on the metal ring between the full mirror 1 and the tail port 4 of the glass tube 20 for connecting an external positive lead (for example, a positive high voltage line). Of course, it is also possible to provide a structure of a metal post on the metal ring between the full mirror 1 and the tail port 4 of the glass tube 20 to connect the external positive lead. Further, a positive electrode 5 is connected inside the metal ring between the full-mirror 1 and the tail port 4 of the glass tube 20, thereby introducing a current into the laser tube. A structure such as a screw hole 10 may be provided on the metal ring between the output mirror 11 and the front port 7 of the glass tube 20 for connecting the negative electrode lead, and further, between the output mirror 11 and the front port 7 of the glass tube 20. The inner side of the metal ring is connected with a spring 22 which is placed on the nozzle of the discharge tube 18 by a spring 22 and is connected to the metal ring between the output mirror 11 and the front port 7 of the glass tube 20, thereby introducing a current into the laser tube. Moreover, the metal ring between the full mirror 1 and the tail port 4 of the glass tube 20 comprises a foil portion 31 which is fixedly sealed to the full mirror 1 . The metal ring between the output mirror 11 and the front port 7 of the glass tube 20 includes a foil portion 32 that is fixedly sealed to the output mirror 11. The sheet portion 31 and the sheet portion 32 may be thin, so that the deformation thereof has little influence on the deformation of the entire metal ring structure. The sheet portion 31 and the sheet portion 32 may be made of a metal or alloy having a Brinell hardness of 55 or less for the purpose of milling and grinding, for example, may be made of copper, and in this case, also for the full-mirror 1 and the output mirror 11 Cooling.
图 3示出了图 2所示的二氧化碳气体激光管的尾端的放大视图。 该实施例中, 如图 3所示, 全反镜 1与玻璃管 20的尾端口 4之 间的金属环还包括可伐部 14和尾镜座 12, 可伐部 14和尾镜座部 12 之间可以通过焊接等方式连接,可伐部 14例如封接至玻璃管 20的尾 端口 4,尾镜座部 12例如焊接至薄片部 31。可伐部 14由可伐合金制 成, 当然,也可以采用由其它膨胀系数和端口玻璃相匹配的金属或合 金制成可伐部 14, 只要其能够与玻璃管口匹配封接即可。 尾镜座部 12 可以由金属铁、 钛、 镍或其合金制成, 优选地, 可以由低膨胀系 数的金属或合金制成, 也可以由不锈钢制成。  Fig. 3 is an enlarged view showing the trailing end of the carbon dioxide gas laser tube shown in Fig. 2. In this embodiment, as shown in FIG. 3, the metal ring between the full-mirror 1 and the tail port 4 of the glass tube 20 further includes a crater 14 and a tail mirror base 12, a crater 14 and a tail mirror seat 12. The connection between the gradable portion 14 and the tail port 4 of the glass tube 20 can be performed, for example, by welding or the like, and the tail mirror portion 12 is welded to the sheet portion 31, for example. The kovable portion 14 is made of Kovar alloy. Of course, it is also possible to use the metal or alloy which is matched with other expansion coefficients and the port glass to form the kovable portion 14, as long as it can be matched and sealed with the glass nozzle. The tail mirror seat portion 12 may be made of metal iron, titanium, nickel or an alloy thereof, and preferably may be made of a metal or alloy of a low expansion coefficient or stainless steel.
图 4示出了图 2所示的二氧化碳气体激光管的前端的放大视图。 如图 4所示, 输出镜 11与玻璃管 20的前端口 7之间的金属环 还包括可伐部 23和前镜座部 25, 可伐部 23和前镜座部 25之间可以 通过焊接等方式连接, 可伐部 23例如封接至玻璃管 20的前端口 7, 前镜座部 25例如悍接至薄片部 32。 可伐部 23由可伐合金形成, 当 然,也可以采用由其它膨胀系数和端口玻璃相匹配的金属或合金制成 可伐部 14, 只要其能够与玻璃管口匹配封接即可。 前镜座部 25可以 由金属铁、 钛、 镍或其合金制成, 优选地, 可以由低膨胀系数的金属 或合金制成, 也可以由不锈钢制成。根据本发明的另一实施例, 提供 了一种上述二氧化碳气体激光管的制备方法。 Fig. 4 is an enlarged plan view showing the front end of the carbon dioxide gas laser tube shown in Fig. 2. As shown in FIG. 4, the metal ring between the output mirror 11 and the front port 7 of the glass tube 20 is shown in FIG. Also included is a kovable portion 23 and a front lens holder portion 25, and the kovable portion 23 and the front lens holder portion 25 may be connected by welding or the like, and the gradable portion 23 is sealed, for example, to the front port 7 of the glass tube 20, the front mirror The seat portion 25 is spliced to the sheet portion 32, for example. The kovable portion 23 is formed of Kovar alloy. Of course, the kovable portion 14 may be formed of a metal or alloy having a different expansion coefficient and matching with the port glass as long as it can be matched and sealed with the glass nozzle. The front mirror portion 25 may be made of metal iron, titanium, nickel or an alloy thereof, and preferably may be made of a metal or alloy having a low expansion coefficient, or may be made of stainless steel. According to another embodiment of the present invention, a method of preparing the above carbon dioxide gas laser tube is provided.
继续参照图 3和图 4, 如图 3所示, 可以在玻璃管 20的尾端口 4处通过封接点 15封接可伐部 14, 可伐部 14的另一端处通过焊点 3 焊接 (例如, 亚弧焊) 尾镜座部 12, 薄片部 31例如焊接至尾镜座部 12, 然后, 全反镜 1粘接 (例如, 胶粘) 在薄片部 31上, 且在尾镜 座部 12上设置有螺紋孔 2, 用于连接正极引线, 在尾镜座部 12的内 侧连接有正电极 5。 如图 4所示, 可以在玻璃管 20的前端口 7处通 过封接点 8封接可伐部 23,可伐部 23的另一端处通过焊点 9焊接(例 如,氩弧焊)前镜座部 25 ,薄片部 32例如悍接至前镜座部 25,然后, 输出镜 11粘接 (例如, 胶粘) 在薄片部 32上, 且在前镜座部 25上 设置有螺纹孔 10, 用于连接负极引线, 在前镜座部 25的内侧连接有 弹簧 22, 负电极 21通过弹簧 22顶在放电管 18的管口并连接至前镜 座部 25。  With continued reference to FIGS. 3 and 4, as shown in FIG. 3, the kovable portion 14 may be sealed at the tail port 4 of the glass tube 20 by a sealing point 15, and the other end of the kovable portion 14 may be welded by a solder joint 3 (for example The sub-arc joint 12, the sheet portion 31 is welded to the tail mirror portion 12, for example, and then the full-mirror 1 is bonded (for example, glued) to the sheet portion 31, and at the tail mirror portion 12 A threaded hole 2 is provided for connecting the positive electrode lead, and a positive electrode 5 is connected to the inner side of the tail mirror seat portion 12. As shown in FIG. 4, the crater 23 can be sealed at the front port 7 of the glass tube 20 by a sealing point 8, and the other end of the kovable portion 23 is welded (for example, argon arc welded) to the front lens holder through the solder joint 9. The portion 25, the sheet portion 32 is spliced to the front mirror portion 25, for example, and then the output mirror 11 is bonded (for example, glued) to the sheet portion 32, and the threaded hole 10 is provided on the front mirror portion 25 for use. To connect the negative lead, a spring 22 is connected to the inner side of the front mirror portion 25, and the negative electrode 21 is placed on the nozzle of the discharge tube 18 by the spring 22 and connected to the front mirror portion 25.
其中, 可以在将全反镜 1粘接在薄片部 31上、 以及将输出镜 11 粘接在薄片部 32之前,对薄片部 31的用于粘接全反镜 1的表面以及 对薄片部 32的用于粘接输出镜 11的表面进行研磨, 同时进行检测, 例如, 可以通过自准直内调焦望远镜(也叫平行光管)进行检测, 以 使得研磨后的表面垂直于放电管 18的中心轴, 优选地, 使得研磨后 的表面与放电管 18同轴。 可以通过手工进行研磨, 也可以使用数控 条件下的电磨头进行研磨, 以实现本发明的要求。 此外, 也可以使用 数控刀具铣削来实现研磨效果,例如,可以将电动马达安装在可前后、 左右、上下摆动的多轴、多角度数控平台上,然后调整其位置和角度, 以使其对薄片部 31的用于粘接全反镜 1的表面以及对薄片部 32的用 于粘接输出镜 11的表面进行铣削, 也可以铣削与研磨组合使用, 以 使得薄片部 31的用于粘接全反镜 1的表面以及薄片部 32的用于粘接 输出镜 11的表面垂直于放电管 18的中心轴。 Here, the surface of the sheet portion 31 for bonding the entire mirror 1 and the sheet portion 32 may be bonded to the sheet portion 31 and before the output mirror 11 is bonded to the sheet portion 32. The surface for bonding the output mirror 11 is ground and simultaneously detected. For example, it can be detected by a self-collimating inner focusing telescope (also called a collimator) so that the surface after grinding is perpendicular to the discharge tube 18. The central shaft, preferably, causes the ground surface to be coaxial with the discharge tube 18. Grinding can be carried out by hand or by using an electric grinder under numerical control to achieve the requirements of the present invention. In addition, CNC tool milling can also be used to achieve the grinding effect. For example, the electric motor can be mounted on a multi-axis, multi-angle CNC platform that can swing back and forth, left and right, up and down, and then adjust its position and angle to make it thin. The surface of the portion 31 for bonding the full-mirror 1 and the use of the sheet portion 32 Milling is performed on the surface of the bonded output mirror 11, and may be used in combination with milling so that the surface of the sheet portion 31 for bonding the full-mirror 1 and the surface of the sheet portion 32 for bonding the output mirror 11 are vertical. On the central axis of the discharge tube 18.
而且, 在将全反镜 1粘接在薄片部 31上、 以及将输出镜 11粘 接在薄片部 32上时,要确保全反镜 1和输出镜 11的镜面垂直于放电 管 18的中心轴, 优选地, 使全反镜 1和输出镜 11 的镜面与放电管 18同轴。  Further, when the full-mirror 1 is bonded to the sheet portion 31 and the output mirror 11 is bonded to the sheet portion 32, it is necessary to ensure that the mirror faces of the full-mirror 1 and the output mirror 11 are perpendicular to the central axis of the discharge tube 18. Preferably, the mirror faces of the full mirror 1 and the output mirror 11 are made coaxial with the discharge tube 18.
本申请中所采用的术语 "匹配" 是指相互匹配的构件之间能够 进行固定密封连接, 不限于构件之间的形状、大小等完全一致, 在没 有负面影响的情况下,相互匹配的构件之间的形状、大小等可以有所 差异。如玻璃的匹配封接,针对不同材质的玻璃有相应的匹配封接金 属材料, 对所述金属有严格的膨胀系数要求。  The term "matching" as used in the present application means that the mutually matching members can be fixedly sealed, not limited to the shape, size, etc. of the members, and the components that match each other without adverse effects The shape, size, etc. may vary. For the matching sealing of glass, there is a corresponding matching sealing metal material for different materials of glass, which has strict expansion coefficient requirements for the metal.
虽然上述实施例中给出了一些金属构件的材料示例, 例如, 金 属铜、 铁、 钛、 镍或其合金、 或者不锈钢, 但是, 本发明不限于此, 本领域技术人员可以根据需要使用适当的材料。  Although the material examples of some metal members are given in the above embodiments, for example, metal copper, iron, titanium, nickel or alloys thereof, or stainless steel, the present invention is not limited thereto, and those skilled in the art may use appropriate ones as needed. material.
而且, 虽然上述实施例中给出了一些固定密封连接的方式, 例 如, 封接、 悍接、 粘接, 但是本发明不限于此, 本领域技术人员可以 根据需要使用适当的密封连接方式, 例如, 还可以使用烧结等方式, 只要该密封连接固定、 不可调节即可。  Moreover, although some embodiments of the fixed sealing connection are given in the above embodiments, for example, sealing, splicing, and bonding, the present invention is not limited thereto, and those skilled in the art may use appropriate sealing connections as needed, for example It is also possible to use a method such as sintering as long as the sealing connection is fixed and not adjustable.
此外, 虽然上述实施例中以所述金属环包括三部分 (薄片部、 镜座部、 可伐部)为例进行了说明, 但是, 所述金属环可以只包括两 个部分 (薄片部和金属环的另一部分) 。 以上所述, 仅为本发明的具体实施方式, 但本发明的保护范围 并不局限于此,本发明的实施例可以省略上述技术特征中的一些技术 特征, 仅解决现有技术中存在的部分技术问题, 而且, 所公开的技术 特征可以进行任意组合,任何熟悉本技术领域的技术人员在本发明揭 露的技术范围内可轻易想到的变化或替换都应涵盖在本发明的保护 范围之内。因此,本发明的保护范围以所述权利要求的保护范围为准。  In addition, although the above embodiment has been described by taking the metal ring as three parts (sheet portion, mirror portion, and vane portion) as an example, the metal ring may include only two portions (sheet portion and metal). Another part of the ring). The foregoing is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. The embodiments of the present invention may omit some of the technical features described above, and only solve the existing parts in the prior art. The technical problems, and the technical features disclosed, may be combined in any way, and any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the present invention are covered by the scope of the present invention. Accordingly, the scope of the invention is defined by the scope of the appended claims.

Claims

1. 一种二氧化碳气体激光管, 包括激光镜片和玻璃管, 其特征 在于,所述激光镜片通过与所述玻璃管的端口膨胀系数相匹配的余属 环固定密封连接至所述玻璃管的端口,所述金属环设置在所述激光镜 片与所述玻璃管的端口之间,其中,所述金属环包括固定密封连接可 伐部、镜座部和薄片部, 可伐部与所述玻璃管的端口密封烧结, 激光 镜片胶粘在薄片部上, 薄片部为环状金属薄片结构, 薄片部焊接在镜 座部的端面。 A carbon dioxide gas laser tube comprising a laser lens and a glass tube, wherein the laser lens is fixedly connected to a port of the glass tube by a residual ring that matches a port expansion coefficient of the glass tube The metal ring is disposed between the laser lens and the port of the glass tube, wherein the metal ring includes a fixed sealing connection of the kovable portion, the lens holder portion and the sheet portion, the gradable portion and the glass tube The port is sealed and sintered, the laser lens is adhered to the sheet portion, the sheet portion is an annular metal sheet structure, and the sheet portion is welded to the end surface of the mirror portion.
2. 根据权利要求 1所述的二氧化碳气体激光管, 其特征在于, 所述金属环的薄片部由布氏硬度 55以下的金属或合金制成。 The carbon dioxide gas laser tube according to claim 1, wherein the sheet portion of the metal ring is made of a metal or an alloy having a Brinell hardness of 55 or less.
3. 根据权利要求 2所述的二氧化碳气体激光管, 其特征在于, 所述金属环的薄片部由铜制成的。 The carbon dioxide gas laser tube according to claim 2, wherein the sheet portion of the metal ring is made of copper.
4. 根据权利要求 2所述的二氧化碳气体激光管, 其特征在于, 所述金属环的薄片部钎悍在镜座部的座端面。 The carbon dioxide gas laser tube according to claim 2, wherein the sheet portion of the metal ring is brazed to the seat end surface of the mirror portion.
5. 根据权利要求 1所述的二氧化碳气体激光管, 其特征在于, 所述金属环的可伐部由膨胀系数和玻璃管口相匹配的金属或合金制 成。 The carbon dioxide gas laser tube according to claim 1, wherein the crater portion of the metal ring is made of a metal or an alloy having a coefficient of expansion matching the glass nozzle.
6. 根据权利要求 1所述的二氧化碳气体激光管, 其特征在于, 所述金属环的可伐部由膨胀系数和玻璃管口相匹配的可伐合金制成。  The carbon dioxide gas laser tube according to claim 1, wherein the crater portion of the metal ring is made of a Kovar alloy whose expansion coefficient is matched with a glass nozzle.
7. 根据权利要求 1所述的二氧化碳气体激光管, 其特征在于, 所述金属环的镜座部由不锈钢制成。 The carbon dioxide gas laser tube according to claim 1, wherein the lens holder portion of the metal ring is made of stainless steel.
8. 根据权利要求 1所述的二氧化碳气体激光管, 其特征在于, 所述金属环的镜座部由铁、 镍、 钛及其合金制成。 8. The carbon dioxide gas laser tube according to claim 1, wherein The mirror portion of the metal ring is made of iron, nickel, titanium, and alloys thereof.
9. 根据权利要求 1所述的二氧化碳气体激光管, 其特征在于, 所述金属环的镜座部和可伐部由同一金属制成。 The carbon dioxide gas laser tube according to claim 1, wherein the lens holder portion and the cut portion of the metal ring are made of the same metal.
10. 根据权利要求 1所述的二氧化碳气体激光管, 其特征在于, 所述金属环上设置有用于连接外部导线的金属柱或孔。 10. The carbon dioxide gas laser tube according to claim 1, wherein the metal ring is provided with a metal post or a hole for connecting an external wire.
11. 一种二氧化碳气体激光管的制备方法, 所述二氧化碳气体 激光管包括激光镜片和玻璃管, 其特征在于, 所述方法包括: A method for preparing a carbon dioxide gas laser tube, the carbon dioxide gas laser tube comprising a laser lens and a glass tube, wherein the method comprises:
将与所述玻璃管的端口膨胀系数相匹配的可伐部密封烧结至所 述玻璃管的端口;  Cutting a vane portion matching the port expansion coefficient of the glass tube to a port of the glass tube;
将与所述薄片部钎焊在镜座部的座端面;  Brazing the sheet portion to the end surface of the lens holder portion;
将所述用于胶粘所述激光镜片的薄片部表面进行铣削、研磨,使 金属环的研磨表面垂直与放电管中心轴;  Milling and grinding the surface of the sheet for bonding the laser lens to make the grinding surface of the metal ring perpendicular to the central axis of the discharge tube;
将所述激光镜片粘接至所述薄片部的铣削、 研磨面。  The laser lens is bonded to the milled and polished surface of the sheet portion.
其中, 所述薄片部、 镜座部、 可伐部在镜片与所述玻璃管的端 口之间。  Wherein the sheet portion, the mirror portion, and the cut portion are between the lens and the end of the glass tube.
PCT/CN2014/000601 2014-06-18 2014-06-18 Carbon dioxide gas laser tube and preparation method therefor WO2015192268A1 (en)

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