WO2015188530A1

WO2015188530A1 - Collecting device and vapor deposition process using same

Info

Publication number: WO2015188530A1
Application number: PCT/CN2014/087907
Authority: WO
Inventors: 肖昂
Original assignee: 京东方科技集团股份有限公司; 北京京东方光电科技有限公司
Priority date: 2014-06-10
Filing date: 2014-09-30
Publication date: 2015-12-17
Also published as: CN104018122A; CN104018122B

Abstract

Provided are a collecting device and a vapor deposition process using the collecting device. The collecting device comprises a collecting plate (1). The collecting plate (1) comprises a non-horizontally arranged first panel (11), a horizontally arranged second panel (12) and a non-horizontally arranged third panel (13); the upper edge of the first panel (11) is connected with a first edge of the second panel (12), a second edge of the second panel (12) is connected with the upper edge of the third panel (13); and the first panel (11) is not in contact with the third panel (13). When a linear evaporation source is in a pre-evaporation stage and/or a blank stage where two substrates are switched, the collecting plate (1) is used for blocking a vapor deposition material evaporated from the linear evaporation source from being sprayed onto a vapor deposition cavity.

Description

Collection device and evaporation process using same

Technical field

Embodiments of the present invention relate to a collecting device and an evaporation process using the same.

Background technique

In the production of an Organic Light Emitting Diode (OLED) panel, an evaporation process is usually used to attach the luminescent material to a desired substrate. The evaporation process is generally done in an evaporation chamber. An evaporation process is: the vapor deposition surface of the substrate in the evaporation chamber is adsorbed on the top substrate, and the mask frame carrying mask is located between the linear evaporation source and the substrate. Before vapor deposition, pre-steaming of the linear evaporation source is required to achieve the evaporation rate of the linear evaporation source to reach the target evaporation rate; when the evaporation is performed, the positions of the substrate and the mask are fixed, and the linear evaporation source is parallel to the substrate in one direction and The mask is moved and scanned to complete evaporation of the entire substrate.

Summary of the invention

At least one embodiment of the present invention provides a collecting device that solves the problem of evaporation of a material onto a vapor deposition chamber and evaporation to a substrate due to problems inherent in the evaporation process when the substrate is vapor-deposited. The problem of uneven thickness of the material on the material greatly reduces the waste of materials and reduces the production cost. At the same time, the stability of the obtained product is improved and the production efficiency is improved.

At least one embodiment of the present invention provides a collection device that includes a collection plate. The collecting plate includes: a first panel that is not horizontally disposed, a second panel that is horizontally disposed, and a third panel that is not horizontally disposed; an upper edge of the first panel is connected to a first side of the second panel, a second side of the second panel is coupled to an upper side of the third panel; the first panel is not in contact with the third panel; the collection plate is used when the linear evaporation source is in a pre-evaporation stage and And / or a blanking stage of switching between the two substrates, the evaporation material that blocks the evaporation of the linear evaporation source is ejected onto the evaporation chamber.

Another embodiment of the present invention provides an evaporation process using the above-described collection device, comprising: using the collection device to block a linear evaporation source in a pre-evaporation phase and/or in a blank phase of two substrate switching The vapor deposition material evaporated by the linear evaporation source is sprayed onto the evaporation chamber.

DRAWINGS

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments will be briefly described below. It is obvious that the drawings in the following description relate only to some embodiments of the present invention, and are not intended to limit the present invention. .

1 is a schematic structural diagram of a collecting device according to an embodiment of the present invention;

2 is a schematic structural diagram of a collecting device according to another embodiment of the present invention;

3 is a schematic cross-sectional view of a collecting device according to another embodiment of the present invention;

4 is a schematic view showing the shape of each mesh panel of the collecting stencil in the collecting device according to another embodiment of the present invention;

FIG. 5 is a schematic structural diagram of a collecting device according to still another embodiment of the present invention; FIG.

FIG. 6 is a schematic structural diagram of a collecting device according to still another embodiment of the present invention.

Reference mark:

1-collecting plate; 11-first panel; 12-second panel; 13-third panel; 14-fourth panel; 15- fifth panel; 2-linear evaporation source; 3-collection stencil; Rod; 5-drive device.

detailed description

The technical solutions of the embodiments of the present invention will be clearly and completely described in the following with reference to the accompanying drawings. It is apparent that the described embodiments are part of the embodiments of the invention, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the described embodiments of the present invention without departing from the scope of the invention are within the scope of the invention.

The inventors have found that, in the foregoing method, during the pre-steaming, the linear evaporation source is still evaporating the luminescent material to the outside, which causes a problem that the luminescent material is evaporated to the inner wall of the chamber, resulting in waste of the luminescent material. Moreover, during the evaporation process, there is a blank period in the conversion process of the two substrates, and the problem that the luminescent material is evaporated to the inner wall of the chamber also occurs. At the same time, the evaporation of the substrate is completed by the movement of the linear evaporation source, and the thickness of the material evaporated onto the substrate may be uneven due to the vibration of the linear evaporation source during the movement.

At least one embodiment of the present invention provides a collecting device for use in an evaporation chamber for material evaporation of a substrate, as shown in FIG. 1, which includes a collecting plate 1. The collecting plate 1 includes: a first panel 11 that is not horizontally disposed, a second panel 12 that is horizontally disposed, and a non-horizontal setting Three panels 13. The upper side of the first panel 11 is connected to the first side of the second panel 12, and the second side of the second panel 12 is connected to the upper side of the third panel 13. In FIG. 1, the first side and the second side of the second panel 12 are respectively left and right opposite to each other. The first panel 11 is not in contact with the third panel 13.

The collecting plate 1 is used to block the material evaporated from the linear evaporation source from being ejected onto the evaporation chamber when the linear evaporation source 2 is in the pre-evaporation phase and/or the blanking phase of the two substrate switching.

The material of each panel of the collecting plate may be made of a material that does not chemically react with the vapor deposition material, such as stainless steel or oxygen-free aluminum.

It should be noted that, in FIG. 1, only the relationship between the size of the collecting plate and the size of the linear vapor deposition source is shown, and the collecting plate is not limited to be larger than the size of the linear evaporation source. For example, the size of the collection plate can be designed to be greater than or equal to the size of the linear evaporation source. The specific design principle is that the collection plate is large enough to cover the evaporation material evaporated from the evaporation port of the linear evaporation source.

In addition, although FIG. 1 shows that the first panel 11 and the third panel 13 form an angle (for example, a right angle) with the joint between the second panel 12, respectively, they may also form a smooth transition portion at the joint, and the implementation of the present invention The examples are not limited to the specific form of engagement between the two panels.

At least one embodiment of the present invention provides a collecting device that extends a collecting device by providing a collecting device in an evaporation chamber and when the linear evaporation source is in a pre-evaporation phase and/or a blanking phase of two substrate switching Above the linear evaporation source; when the linear evaporation source vaporizes the material to the substrate, the collection device is retracted; meanwhile, the linear evaporation source is fixed during the entire evaporation process and the substrate is moved through the linear evaporation source at a certain speed Above, the problem of uneven thickness of the material deposited on the vapor deposition chamber and vapor-deposited onto the substrate due to the problem existing in the evaporation process during the evaporation of the luminescent material on the substrate is solved. Greatly reduce material waste and reduce production costs. At the same time, the use of the collecting device improves the stability of the prepared product and improves the production efficiency.

Further, referring to FIG. 2, in an embodiment of the present invention, the collecting plate 1 in the collecting device may further include: a fourth panel 14 that is not horizontally disposed, and a fifth panel 15 that is not horizontally disposed.

The first side of the fourth panel 14 is connected to one side of the side surface of the first panel 11, the second side of the fourth panel 14 is connected to the third side of the second panel 12, and the third side and the third side of the fourth panel 14 are connected. One side of the side of the panel 13 is connected.

The first side of the fifth panel 15 is connected to the other side of the side of the first panel 11, the second side of the fifth panel 15 is connected to the fourth side of the second panel 12, and the third side of the fifth panel 15 is Three panels The other side of the side of the 13 is connected.

In FIG. 2, the third side and the fourth side of the second panel 12 are the front side (near the observer side) and the rear side (away from the observer side); the first side to the fourth side of the fourth panel 14 are respectively the left side. The upper side, the right side, and the lower side of the fifth panel 15 are the left side, the upper side, the right side, and the lower side, respectively.

Similarly, although FIG. 2 shows that the fourth panel 14 and the fifth panel 15 form an angle (for example, a right angle) with the joint between the second panel 12, respectively, they may also form a smooth transition portion at the joint, and the implementation of the present invention The examples are not limited to the specific form of engagement between the two panels.

It should be noted that the area of the shaded portion in FIG. 2 (i.e., the area opposite to the second panel 12) indicates that the portion of the collecting device provided by the present invention is not provided with the panel, and thus is open.

Further, the collecting device may further include: a collecting screen (not shown) fixed under the collecting plate 1.

For example, the collection stencil includes: a first grid panel that is not horizontally disposed, a second grid panel that is horizontally disposed, and a third grid panel that is not horizontally disposed.

The upper side of the first mesh panel is connected to the first side of the second mesh panel, and the second side of the second mesh panel is connected to the upper side of the third mesh panel; the first mesh panel and the third The grid panel does not touch. The sides of the first to third mesh panels are the same as the sides of the first to third panels corresponding to the collecting plate 1.

For example, the shape in each grid panel in the collection stencil is a fine grid.

For example, each mesh panel in the collection stencil adopts a fine grid-like shape, so that the evaporation material evaporated by the linear evaporation source can be better retained on the collecting stencil to the maximum extent, so that the vapor deposition can be performed. The materials are recycled and reused, which greatly reduces production costs.

The collecting screen is used to collect the material evaporated by the linear evaporation source when the linear evaporation source is in the pre-evaporation phase and/or the blanking phase of the two substrate switching.

In one embodiment, the collection screen may further include: a fourth grid panel that is not horizontally disposed and a fifth grid panel that is not horizontally disposed. For example, the first side of the fourth mesh panel is connected to one side of the side of the first mesh panel, and the second side of the fourth mesh panel is connected to the third side of the second mesh panel, the fourth mesh panel The third side is connected to one side of the side of the third mesh panel.

The first side of the fifth mesh panel is connected to the other side of the side of the first mesh panel, the second side of the fifth mesh panel is connected to the fourth side of the second mesh panel, and the fifth mesh panel is Third side and first The other side of the side of the three mesh panel is connected.

The sides of the fourth and fifth mesh panels are the same as the sides of the fourth to fifth panels corresponding to the collecting plate 1.

The material of each mesh panel of the collection stencil can be made of fine mesh metal, such as aluminum, copper, stainless steel and the like.

A schematic cross-sectional view of the structure between the collecting stencil 3 and the collecting plate 1 can be referred to FIG. 3, and the collecting stencil and the collecting plate are attached together, and the shape of the collecting stencil is the same as that of the collecting plate, and the collecting stencil is attached. Close to the inner wall of the collection plate. In the actual design, for example, the collecting stencil and the collecting plate are closely attached, and the collecting stencil has the same shape as the collecting plate, and the collecting stencil is sized to collect the side of each mesh panel of the stencil. Maximum fit to the collection plate.

Although FIG. 3 shows the joint forming angle (for example, a right angle) between the mesh panel of the collecting screen 3 and the mesh panel, they may also form a smooth transition portion at the joint, and embodiments of the present invention are not limited to two. The specific form of engagement between the panels.

The shape of each mesh panel of the collection stencil can be as shown in FIG. 4 , of course, the illustration only illustrates a possible grid shape of the grid panel of the collection stencil, and the stencil function can be implemented in practical applications. The feasible mesh shapes are applicable.

Further, referring to FIG. 5, in an embodiment of the present invention, the collecting device may further include: a horizontally disposed straight rod 4 and a driving device 5.

For example, one end of the straight rod 4 is connected to the fourth side of the first panel 11, and the other end of the straight rod 4 is connected to the output end of the drive device 5.

For example, the drive device can be any device that has a telescoping function, for example, can be a hydraulic lever.

The driving device 5 is configured to control the collecting plate 1 through the straight rod 4 according to the received control signal to extend above the linear evaporation source 2 when the linear evaporation source 2 is in the pre-evaporation phase and/or the blanking phase of the two substrate switching, otherwise Take back.

Alternatively, the driving device 5 is further configured to control the collecting plate 1 and the collecting screen 3 through the straight rod 4 according to the received control signal to extend to the blank evaporation source 2 in the pre-evaporation phase and/or the blanking phase of the two substrate switching to Above the linear evaporation source, otherwise retracted.

For example, the control signal is generated by an infrared sensor that senses the presence or absence of a substrate above the linear evaporation source.

For example, the infrared sensor can be set in the linear evaporation source according to the speed at which the substrate is normally operated. The infrared inductive transmitter emits a signal to the infrared receiver. When the substrate passes through the infrared sensor and the infrared receiver does not receive the signal, the infrared receiver generates a signal to the host, and then the host analyzes the received signal. Send a control signal to the drive device. Alternatively, the control signal is generated by a laser sensor sensing the presence or absence of a substrate above the linear evaporation source.

The working principle of the laser sensor can refer to the known technical solutions, and will not be described here.

Of course, the control signal may also be configured by setting a timing line thread running signal according to the motion law of the substrate in the computer, and transmitting the signal to the driving device, so that the driving device controls the collecting plate and/or the collecting screen to move. The generation of the control signal is only exemplified in the embodiment, and the specific manner is not limited. Any signal that can realize the periodic expansion and contraction of the driving device can be applied in practical applications.

For example, when the substrate is vapor-deposited by a linear evaporation source, the linear evaporation source is stationary, and the substrate moves above the linear evaporation source at a constant speed.

For example, in the embodiment, the substrate is moved at a certain speed during the evaporation process, and the linear evaporation source maintains a certain position, and the substrate moves through the upper portion of the linear evaporation source to complete the evaporation of the substrate. This can effectively avoid the problem that the thickness of the vapor deposition material evaporated onto the substrate is not uniform due to the vibration generated by the movement of the linear evaporation source, thereby ensuring the stability of the evaporation and ensuring the production quality.

For example, a feasible implementation solution is: installing the collecting device at the top of the inner wall of the vapor deposition chamber at a position above the fixed position of the line source, but the condition must be satisfied that the position cannot affect the normal substrate in the evaporation chamber. Moving through the top of the linear evaporation source ensures that the evaporation material at the evaporation of the linear evaporation source can be evaporated onto the substrate.

Another possible implementation is to control the movement of the collecting plate and/or the collecting plate by driving the device; the collecting device is simultaneously turned on when the linear evaporation source starts, and the host sends a control signal when the linear evaporation source performs the pre-steaming phase. To the driving device, the driving device moves the collecting plate and/or the collecting mesh plate to a position above the linear evaporation source through a straight rod, so as to collect the evaporation material evaporated by the linear evaporation source at this time; when the linear evaporation source is completed During the steaming stage, the driving device moves through the straight rod control collecting plate and/or the collecting screen to a position that does not affect the normal operation of the entire evaporation chamber; when a substrate completes the evaporation of the evaporation material, the driving device passes through the straight The rod control collecting plate and/or the collecting screen moves from the initial position to the upper side of the linear evaporation source, and collects the evaporation material at the evaporation point of the linear evaporation source at this time; meanwhile, after the substrate switching is completed, the driving device controls the collecting plate and/or Collecting the upper position of the stencil from the linear evaporation source The position moved to the original position does not affect the normal operation of the entire evaporation chamber.

At least one embodiment of the present invention provides a collecting device that extends a collecting device by providing a collecting device in an evaporation chamber and when the linear evaporation source is in a pre-evaporation phase and/or a blanking phase of two substrate switching Above the linear evaporation source; when the linear evaporation source vaporizes the material to the substrate, the collection device is retracted; meanwhile, the linear evaporation source is fixed during the entire evaporation process and the substrate is moved through the linear evaporation source at a certain speed Above, it solves the problem that when the luminescent material is evaporated on the substrate, the material is vapor-deposited onto the evaporation chamber and the thickness of the material evaporated onto the substrate is uneven due to the problem existing in the evaporation process. This reduces material waste and reduces production costs. At the same time, the stability of the obtained product is improved and the production efficiency is improved.

The above is only an exemplary embodiment of the present invention, and is not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims.

The present application claims the priority of the Chinese Patent Application No. 20141025649, filed on Jun. 10, 2014, the entire disclosure of which is hereby incorporated by reference.

Claims

A collection device comprising a collection plate, wherein:

The collecting plate includes: a first panel that is not horizontally disposed, a second panel that is horizontally disposed, and a third panel that is not horizontally disposed;

An upper side of the first panel is coupled to a first side of the second panel, and a second side of the second panel is coupled to an upper side of the third panel; the first panel and the first panel The third panel is not in contact;

The collecting plate is configured to block the evaporating material evaporated by the linear evaporation source from being ejected onto the evaporation chamber when the linear evaporation source is in the pre-evaporation stage and/or the blanking stage of the two substrate switching.
The collecting device according to claim 1, wherein the collecting plate further comprises: a fourth panel that is not horizontally disposed and a fifth panel that is not horizontally disposed, wherein:

The first side of the fourth panel is connected to one side of the side of the first panel, the second side of the fourth panel is connected to the third side of the second panel, and the fourth panel is The three sides are connected to one side of the side of the third panel;

The first side of the fifth panel is connected to the other side of the side of the first panel, and the second side of the fifth panel is connected to the fourth side of the second panel, the fifth panel The third side is coupled to the other side of the side of the third panel.
The collecting device according to claim 1 or 2, further comprising a collecting stencil fixed below the collecting plate.
The collecting device according to claim 3, wherein

The collection screen includes: a first grid panel that is not horizontally disposed, a second grid panel that is horizontally disposed, and a third grid panel that is not horizontally disposed;

The upper side of the first mesh panel is connected to the first side of the second mesh panel, and the second side of the second mesh panel is connected to the upper side of the third mesh panel; The first mesh panel is not in contact with the third mesh panel;

The shape in each of the mesh panels in the collection stencil is in a fine mesh shape, and the collection stencil is used to collect the linearity when the linear evaporation source is in the pre-evaporation phase and the blanking phase of the two substrate switching The evaporation material evaporated from the evaporation source.
The collecting device according to claim 4, wherein said collecting screen further comprises: non-water The fourth grid panel is set flat and the fifth grid panel is set non-horizontal, where:

The first side of the fourth mesh panel is connected to one side of the side of the first mesh panel, and the second side of the fourth mesh panel is connected to the third side of the second mesh panel The third side of the fourth mesh panel is connected to one side of the side of the third mesh panel;

The first side of the fifth mesh panel is connected to the other side of the side of the first mesh panel, and the second side of the fifth mesh panel and the fourth side of the second mesh panel Connected, the third side of the fifth mesh panel is connected to the other side of the side of the third mesh panel.
A collecting device according to any one of claims 1 to 5, further comprising: a horizontally disposed straight rod and driving device, wherein:

One end of the straight rod is connected to a fourth side of the first panel, and the other end of the straight rod is connected to an output end of the driving device;

The driving device is configured to control the collecting plate by the straight rod according to the received control signal to extend to the linear evaporation when the linear evaporation source is in a pre-evaporation phase and/or a blank phase of two substrate switching Above the source, otherwise retracted.
A collecting device according to any one of claims 1 to 5, further comprising: a horizontally disposed straight rod and a driving device, wherein:

One end of the straight rod is connected to a fourth side of the first panel, and the other end of the straight rod is connected to an output end of the driving device;

The driving device is configured to control the collecting plate and the collecting screen through the straight rod according to the received control signal, when the linear evaporation source is in a pre-evaporation phase and/or a blank phase of two substrate switching Exit to the top of the linear evaporation source, otherwise retract.
A collecting device according to claim 6 or 7, wherein

The control signal is generated by an infrared sensor sensing the presence or absence of a substrate above the linear evaporation source.
A collecting device according to claim 6 or 7, wherein

The control signal is generated by a laser sensor sensing the presence or absence of a substrate above the linear evaporation source.
A collecting device according to any one of claims 1-9, wherein

When the substrate is vapor-deposited by the linear evaporation source, the linear evaporation source is stationary, and the substrate moves above the linear evaporation source at a constant speed.
An evaporation process using the collection device of any of claims 1-10, comprising: using the collection device to block when the linear evaporation source is in a pre-evaporation phase and/or in a blank phase of two substrate switching The evaporation material evaporated by the linear evaporation source is sprayed onto the evaporation chamber.
The vapor deposition process according to claim 11, wherein in the evaporation process, the collecting means is moved to a position which does not affect the normal operation of the entire vapor deposition chamber.