CN104018122B - A kind of collection device - Google Patents
A kind of collection device Download PDFInfo
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- CN104018122B CN104018122B CN201410256493.5A CN201410256493A CN104018122B CN 104018122 B CN104018122 B CN 104018122B CN 201410256493 A CN201410256493 A CN 201410256493A CN 104018122 B CN104018122 B CN 104018122B
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- panel
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- evaporation source
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
Embodiments of the invention provide a kind of collection device, relate to organic LED panel and manufacture field, when solving to substrate evaporation luminescent material, occur on material evaporation to evaporation chamber and evaporation to the inhomogenous problem of the material thickness on substrate, decrease the waste of material, reduce production cost, improve stability and the production efficiency of product.This device comprises: collecting board, wherein: collecting board comprises: the 3rd panel that the first panel that a non-horizontal is arranged, horizontally disposed second panel and a non-horizontal are arranged; Limit above first panel is connected with the first limit of the second panel, and the Second Edge of the second panel is connected with the limit above the 3rd panel; First panel does not contact with the 3rd panel; Collecting board is used for, when linear evaporation source is in the blank stage of pre-evaporation stage and two substrate switchings, stopping that the deposition material that linear evaporation source evaporates is ejected on evaporation chamber.The present invention is applied in light-emitting-diode panel manufacture.
Description
Technical field
The present invention relates to organic LED panel manufacturing technology field, particularly relate to a kind of collection device.
Background technology
In the production of prior art Organic Light Emitting Diode (OrganicLightEmittingDiode is called for short OLED) panel, usually adopt evaporation process that luminescent material is attached on the substrate of needs.Evaporation process is generally complete in evaporation chamber.In existing evaporation chamber, facing down by evaporation of substrate is adsorbed on the base station of top, and mask frame carries mask plate between linear evaporation source and substrate.Before evaporation, need the pre-steaming of advanced line linearity evaporation source, make the evaporation rate of linear evaporation source reach target evaporation rate; During evaporation, the position of substrate and mask plate is fixed, and linear evaporation source, along a direction parallel substrate and mask plate motion scan, completes the evaporation to whole substrate.
But because prior art is in pre-process of steaming, linear evaporation source is still outwardly evaporating luminescent material, there will be the problem that luminescent material is evaporated to chamber inner wall like this, causes the waste of luminescent material.There is the blank phase in two substrate switching processes in evaporate process, there will be the problem that luminescent material is evaporated to chamber inner wall equally.Meanwhile, in prior art, complete the evaporation to substrate by the movement of linear evaporation source, due to the vibrations of linear evaporation source in moving process, there will be evaporation to the inhomogenous problem of the material thickness on substrate.
Summary of the invention
Embodiments of the invention provide a kind of collection device, solve prior art when to substrate evaporation luminescent material, the material evaporation occurred due to self Problems existing in evaporate process to evaporation chamber and evaporation to the inhomogenous problem of the material thickness on substrate, greatly reduce the waste of material, reduce production cost.Improve the stability of the product obtained simultaneously, improve production efficiency.
For achieving the above object, embodiments of the invention adopt following technical scheme:
On the one hand, provide a kind of collection device, described collection device comprises: collecting board, wherein:
Described collecting board comprises: the 3rd panel that the first panel that a non-horizontal is arranged, horizontally disposed second panel and a non-horizontal are arranged;
Limit above described first panel is connected with the first limit of described second panel, and the Second Edge of described second panel is connected with the limit above described 3rd panel; Described first panel does not contact with described 3rd panel;
Described collecting board, during for being in blank stage that pre-evaporation stage and two substrates switch when linear evaporation source, stops that the deposition material that described linear evaporation source evaporates is ejected on evaporation chamber.
Optionally, described collecting board also comprises: the fourth face plate that a non-horizontal is arranged and the 5th panel that a non-horizontal is arranged, wherein:
First limit of described fourth face plate is connected with a limit of the side of described first panel, and the Second Edge of described fourth face plate is connected with the 3rd limit of described second panel, and the 3rd limit of described fourth face plate is connected with a limit of the side of described 3rd panel;
First limit of described 5th panel is connected with another limit of the side of described first panel, and the Second Edge of described 5th panel is connected with the 4th limit of described second panel, and the 3rd limit of described 5th panel is connected with another limit of the side of described 3rd panel.
Optionally, described collection device also comprises: collect web plate, described collection web plate is fixed on the below of described collecting board, wherein:
Described collection web plate comprises: the 3rd grid panel that the first grid panel that a non-horizontal is arranged, horizontally disposed second grid panel and a non-horizontal are arranged;
Limit above described first grid panel is connected with the first limit of described second grid panel, and the Second Edge of described second grid panel is connected with the limit above described 3rd grid panel; Described first grid panel does not contact with described 3rd grid panel;
Shape in each grid panel in described collection web plate is fine and closely woven latticed, and described collection web plate is used for, when linear evaporation source is in the blank stage of pre-evaporation stage and two substrate switchings, collecting the deposition material that described linear evaporation source evaporates.
Optionally, described collection web plate also comprises: the 4th grid panel that a non-horizontal is arranged and the 5th grid panel that a non-horizontal is arranged, wherein:
First limit of described 4th grid panel is connected with a limit of the side of described first grid panel, the Second Edge of described 4th grid panel is connected with the 3rd limit of described second grid panel, and the 3rd limit of described 4th grid panel is connected with a limit of the side of described 3rd grid panel;
First limit of described 5th grid panel is connected with another limit of the side of described first grid panel, the Second Edge of described 5th grid panel is connected with the 4th limit of described second grid panel, and the 3rd limit of described 5th grid panel is connected with another limit of the side of described 3rd grid panel.
Optionally, described collection device also comprises: horizontally disposed straight-bar and a driving arrangement, wherein:
One end of described straight-bar is connected with the 4th limit of described first panel, and the other end of described straight-bar is connected with the output terminal of described driving arrangement;
Described driving arrangement is used for controlling described collecting board according to the control signal received by described straight-bar and extend out to above described linear evaporation source when described linear evaporation source is in the blank stage of pre-evaporation stage and two substrate switchings, otherwise regains.
Optionally, described collection device also comprises: horizontally disposed straight-bar and a driving arrangement, wherein:
One end of described straight-bar is connected with the 4th limit of described first panel, and the other end of described straight-bar is connected with the output terminal of described driving arrangement;
Described driving arrangement is used for controlling described collecting board and described collection web plate according to the control signal that receives by described first straight-bar and extend out to above described linear evaporation source when described linear evaporation source is in the blank stage that pre-evaporation stage and two substrates switch, otherwise regains.
Optionally, described control signal to be responded to above described linear evaporation source with or without substrate by producing by infrared inductor.
Optionally, described control signal to be responded to above described linear evaporation source with or without substrate by producing by laser inductor.
Optionally, when described linear evaporation source carries out evaporation to described substrate, described linear evaporation source transfixion, substrate moves the top by described linear evaporation source with certain speed.
The collection device that embodiments of the invention provide, by arranging collection device in evaporation chamber, and when linear evaporation source is in the blank stage of pre-evaporation stage and two substrate switchings, stretches out above linear evaporation source by this collection device; When linear evaporation source is when giving substrate deposition material, this collection device is retracted; Simultaneously, in whole evaporate process, linear evaporation source is adopted to fix and substrate moves mode above by linear evaporation source with certain speed, solve prior art when to substrate evaporation luminescent material, the material evaporation occurred due to self Problems existing in evaporate process to evaporation chamber and evaporation to the inhomogenous problem of the material thickness on substrate, greatly reduce the waste of material, reduce production cost.Improve the stability of the product obtained simultaneously, improve production efficiency.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The structural representation of a kind of collection device that Fig. 1 provides for embodiments of the invention;
The structural representation of the another kind of collection device that Fig. 2 provides for embodiments of the invention;
The schematic cross-section of a kind of collection device that Fig. 3 provides for embodiments of the invention;
The schematic shapes of each grid panel of the collection web plate in a kind of collection device that Fig. 4 provides for embodiments of the invention;
The structural representation of another collection device that Fig. 5 provides for embodiments of the invention;
The structural representation of a kind of collection device that Fig. 6 provides for another embodiment of the present invention.
Reference numeral: 1-collecting board; 11-first panel; 12-second panel; 13-the 3rd panel; 14-fourth face plate; 15-the 5th panel; 2-linear evaporation source; 3-collects web plate; 4-straight-bar; 5-driving arrangement.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Embodiments of the invention provide a kind of collection device, and this application of installation is in carrying out in the evaporation chamber of material evaporation to substrate, and with reference to shown in Fig. 1, this device comprises: collecting board 1, wherein:
Collecting board 1 comprises: the first horizontally disposed second panel 12 of panel 11, that a non-horizontal is arranged and the 3rd panel 13 that a non-horizontal is arranged.
Limit above first panel 11 is connected with the first limit of the second panel 12, and the Second Edge of the second panel 12 is connected with the limit above the 3rd panel 13; First panel 11 does not contact with the 3rd panel 13.
Collecting board 1, during for being in blank stage that pre-evaporation stage and two substrates switch when linear evaporation source 2, stops that injection of material that linear evaporation source evaporates is on evaporation chamber.
Wherein, the material of each panel of collecting board can adopt not with the material of deposition material generation chemical reaction, such as: the materials such as stainless steel, anaerobic aluminium.
It should be noted that, the relation between the size just illustrating the size that collecting board is shown and linear vapor deposition source in Fig. 1, it must be larger than the size of linear evaporation source for not limiting collecting board.Actual arrange, the size that can design collecting board is greater than or equal to the size of linear evaporation source, and concrete principle of design is the evaporating materials that evaporation port that the size of collecting board is enough to cover linear evaporation source evaporates.
The collection device that embodiments of the invention provide, by arranging collection device in evaporation chamber, and when linear evaporation source is in the blank stage of pre-evaporation stage and two substrate switchings, stretches out above linear evaporation source by this collection device; When linear evaporation source is when giving substrate deposition material, this collection device is retracted; Simultaneously, in whole evaporate process, linear evaporation source is adopted to fix and substrate moves mode above by linear evaporation source with certain speed, solve prior art when to substrate evaporation luminescent material, the material evaporation occurred due to self Problems existing in evaporate process to evaporation chamber and evaporation to the inhomogenous problem of the material thickness on substrate, greatly reduce the waste of material, reduce production cost.Improve the stability of the product obtained simultaneously, improve production efficiency.
Further, with reference to shown in Fig. 2, the collecting board 1 in this collection device also comprises: the fourth face plate 14 that a non-horizontal is arranged and the 5th panel 15 that a non-horizontal is arranged, wherein:
First limit of fourth face plate 14 is connected with a limit of the side of the first panel 11, and the Second Edge of fourth face plate 14 is connected with the 3rd limit of the second panel 12, and the 3rd limit of fourth face plate 14 is connected with a limit of the side of the 3rd panel 13.
First limit of the 5th panel 15 is connected with another limit of the side of the first panel 11, and the Second Edge of the 5th panel 15 is connected with the 4th limit of the second panel 12, and the 3rd limit of the 5th panel 15 is connected with another limit of the side of the 3rd panel 13.
It should be noted that, not this part panels in the region representation of dash area collection device provided by the invention in Fig. 2.
Further, this collection device also comprises: collect web plate, attached not shown, collects the below that web plate is fixed on collecting board 1, wherein:
Collection web plate comprises: the 3rd grid panel that the first grid panel that a non-horizontal is arranged, horizontally disposed second grid panel and a non-horizontal are arranged.
Limit above first grid panel is connected with the first limit of the second grid panel, and the Second Edge of the second grid panel is connected with the limit above the 3rd grid panel; First grid panel does not contact with the 3rd grid panel.
The shape of collecting in each grid panel in web plate is fine and closely woven latticed.
Concrete, the each grid panel collected in web plate adopts fine and closely woven latticed shape, the deposition material that linear evaporation source can be made like this to evaporate better farthest is stayed and is collected on web plate, can carry out recycling like this, greatly reduce production cost to deposition material.
Collect web plate to be used for, when linear evaporation source is in the blank stage of pre-evaporation stage and two substrate switchings, collecting the material that linear evaporation source evaporates.
Concrete, collect web plate and also comprise: the 4th grid panel that a non-horizontal is arranged and the 5th grid panel that a non-horizontal is arranged, wherein:
First limit of the 4th grid panel is connected with a limit of the side of the first grid panel, and the Second Edge of the 4th grid panel is connected with the 3rd limit of the second grid panel, and the 3rd limit of the 4th grid panel is connected with a limit of the side of the 3rd grid panel.
First limit of the 5th grid panel is connected with another limit of the side of the first grid panel, and the Second Edge of the 5th grid panel is connected with the 4th limit of the second grid panel, and the 3rd limit of the 5th grid panel is connected with another limit of the side of the 3rd grid panel.
The material of collecting each grid panel of web plate can adopt fine and closely woven latticed metal, such as: the materials such as aluminium, copper, stainless steel.
Wherein, the structural section schematic diagram collected between web plate 3 and collecting board 1 can with reference to shown in Fig. 3, and collection web plate and collecting board fit together, and the shape of collecting web plate is identical with the shape of collecting board, collect web plate and are fitted on the inwall of collecting board.Preferably arrange in the design of reality and collect together with web plate fits tightly with collecting board, collect the shape of web plate identical with the shape of collecting board, the size of collecting web plate is designed to the maximum and collecting board in the limit of each grid panel collecting web plate and fits together.
The shape of collecting each grid panel of web plate can with reference to shown in Fig. 4, just illustrate a kind of mesh shape of grid panel of possible collection web plate in certain figure, the feasible mesh shape that can realize collecting web plate function in practical application all can be suitable for.
Further, with reference to shown in Fig. 5, collection device also comprises: horizontally disposed straight-bar 4 and a driving arrangement 5, wherein:
One end of straight-bar 4 is connected with the 4th limit of the first panel 11, and the other end of straight-bar 4 is connected with the output terminal of driving arrangement 5.
It should be noted that, driving arrangement can have Telescopic, can realize any equipment of driving arrangement application function.Such as, can be hydraulic stem.
Driving arrangement 5 extend out to above linear evaporation source 2 when linear evaporation source 2 is in the blank stage of pre-evaporation stage and two substrate switchings for controlling collecting board 1 according to the control signal received by straight-bar 4, otherwise regains.
Or, driving arrangement 5 also for controlling collecting board 1 and collect web plate 3 to extend out to above described linear evaporation source when linear evaporation source 2 is in the blank stage of pre-evaporation stage and two substrate switchings by straight-bar 4 according to the control signal received, otherwise is regained.
Wherein, control signal by infrared inductor induction linear evaporation source above with or without substrate by producing.
Concrete, the speed that infrared inductor can run usually according to substrate is arranged near linear evaporation source; Infrared induction projector can transmit to infrared remote receiver, when making infrared remote receiver not receive signal in having substrate by infrared inductor, infrared remote receiver can produce signal and be sent to main frame, transmits control signal to driving arrangement after the signal that then host analysis receives.
Or, control signal by laser inductor induction linear evaporation source above with or without substrate by producing.
The principle of work of laser inductor with reference to prior art, can repeat no more herein.
Certainly, control signal also can be set sequential line thread run signal by the characteristics of motion in a computer according to substrate, and this signal is sent to driving arrangement, so that driving arrangement controls collecting board and/or collect web plate to move.Just illustrate in generation the present embodiment of control signal, do not limit concrete mode, in practical application, any signal that can realize that driving arrangement is periodically stretched all can be suitable for.
When linear evaporation source carries out evaporation to substrate, linear evaporation source transfixion, substrate moves the top by linear evaporation source with certain speed.
Concrete, be arranged on substrate in evaporate process in the present embodiment and move with certain speed, and certain invariant position that linear evaporation source keeps, substrate moves and completes evaporation to substrate by the top of linear evaporation source.Like this, effectively can avoid making evaporation to the problem of the deposition material uneven thickness one on substrate because of the vibrations of the mobile generation of linear evaporation source in prior art, ensure that the stability of evaporation, ensure that the quality of production.
Wherein, a kind of feasible implementation is: top collection device being arranged on evaporation chamber inner wall is positioned at the position above line source fixed position, but the condition that must meet is, this position can not affect the normally mobile top by linear evaporation source of substrate in evaporation chamber, ensure linear evaporation source evaporated deposition material can evaporation on substrate.
Another kind of feasible implementation is: control collecting board by driving arrangement and/or collect the movement of web plate; When linear evaporation source starts, collection device is opened simultaneously, when linear evaporation source steams the stage in advance, main frame sends control signals to driving arrangement, driving arrangement by straight-bar by collecting board and/or collect web plate and move to the top position place of linear evaporation source so that collect the deposition material that now linear evaporation source evaporates; When linear vapor deposition source completes the pre-steaming stage, driving arrangement is then controlled collecting board by straight-bar and/or is collected web plate to move to the position not affecting whole evaporation chamber and normally run; When one piece of substrate completes the evaporation of deposition material, driving arrangement controls collecting board by straight-bar again and/or collects web plate to move to linear evaporation source top from initial position, the deposition material of mobile phone now linear evaporation source evaporated; Meanwhile, after substrate has switched, driving arrangement controls collecting board and/or collects web plate to remove to original position from the top position of linear evaporation source and namely do not affect the position that whole evaporation chamber normally runs.
The collection device that embodiments of the invention provide, by arranging collection device in evaporation chamber, and when linear evaporation source is in the blank stage of pre-evaporation stage and two substrate switchings, stretches out above linear evaporation source by this collection device; When linear evaporation source is when giving substrate deposition material, this collection device is retracted; Simultaneously, in whole evaporate process, linear evaporation source is adopted to fix and substrate moves mode above by linear evaporation source with certain speed, solve prior art when to substrate evaporation luminescent material, the material evaporation occurred due to self Problems existing in evaporate process to evaporation chamber and evaporation to the inhomogenous problem of the material thickness on substrate, greatly reduce the waste of material, reduce production cost.Improve the stability of the product obtained simultaneously, improve production efficiency.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; change can be expected easily or replace, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (7)
1. a collection device, is characterized in that, described collection device comprises: collecting board, wherein:
Described collecting board comprises: the 3rd panel that the first panel that a non-horizontal is arranged, horizontally disposed second panel and a non-horizontal are arranged;
Limit above described first panel is connected with the first limit of described second panel, and the Second Edge of described second panel is connected with the limit above described 3rd panel; Described first panel does not contact with described 3rd panel;
Described collecting board, during for being in blank stage that pre-evaporation stage and two substrates switch when linear evaporation source, stops that the deposition material that described linear evaporation source evaporates is ejected on evaporation chamber;
Described collection device also comprises: collect web plate, described collection web plate is fixed on the below of described collecting board, wherein:
Described collection web plate comprises: the 3rd grid panel that the first grid panel that a non-horizontal is arranged, horizontally disposed second grid panel and a non-horizontal are arranged;
Limit above described first grid panel is connected with the first limit of described second grid panel, and the Second Edge of described second grid panel is connected with the limit above described 3rd grid panel; Described first grid panel does not contact with described 3rd grid panel;
Shape in each grid panel in described collection web plate is fine and closely woven latticed, and described collection web plate is used for, when linear evaporation source is in the blank stage of pre-evaporation stage and two substrate switchings, collecting the deposition material that described linear evaporation source evaporates.
2. device according to claim 1, is characterized in that, described collecting board also comprises: the fourth face plate that a non-horizontal is arranged and the 5th panel that a non-horizontal is arranged, wherein:
First limit of described fourth face plate is connected with a limit of the side of described first panel, and the Second Edge of described fourth face plate is connected with the 3rd limit of described second panel, and the 3rd limit of described fourth face plate is connected with a limit of the side of described 3rd panel;
First limit of described 5th panel is connected with another limit of the side of described first panel, and the Second Edge of described 5th panel is connected with the 4th limit of described second panel, and the 3rd limit of described 5th panel is connected with another limit of the side of described 3rd panel.
3. device according to claim 2, is characterized in that, described collection web plate also comprises: the 4th grid panel that a non-horizontal is arranged and the 5th grid panel that a non-horizontal is arranged, wherein:
First limit of described 4th grid panel is connected with a limit of the side of described first grid panel, the Second Edge of described 4th grid panel is connected with the 3rd limit of described second grid panel, and the 3rd limit of described 4th grid panel is connected with a limit of the side of described 3rd grid panel;
First limit of described 5th grid panel is connected with another limit of the side of described first grid panel, the Second Edge of described 5th grid panel is connected with the 4th limit of described second grid panel, and the 3rd limit of described 5th grid panel is connected with another limit of the side of described 3rd grid panel.
4. device according to claim 1, is characterized in that, described collection device also comprises: horizontally disposed straight-bar and a driving arrangement, wherein:
One end of described straight-bar is connected with the 4th limit of described first panel, and the other end of described straight-bar is connected with the output terminal of described driving arrangement;
Described driving arrangement is used for controlling described collecting board and described collection web plate according to the control signal that receives by described straight-bar and extend out to above described linear evaporation source when described linear evaporation source is in the blank stage that pre-evaporation stage and two substrates switch, otherwise regains.
5. device according to claim 4, is characterized in that,
Described control signal to be responded to above described linear evaporation source with or without substrate by producing by infrared inductor.
6. device according to claim 4, is characterized in that,
Described control signal to be responded to above described linear evaporation source with or without substrate by producing by laser inductor.
7. device according to claim 1, is characterized in that,
When described linear evaporation source carries out evaporation to described substrate, described linear evaporation source transfixion, substrate moves the top by described linear evaporation source with certain speed.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410256493.5A CN104018122B (en) | 2014-06-10 | 2014-06-10 | A kind of collection device |
| PCT/CN2014/087907 WO2015188530A1 (en) | 2014-06-10 | 2014-09-30 | Collecting device and vapor deposition process using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410256493.5A CN104018122B (en) | 2014-06-10 | 2014-06-10 | A kind of collection device |
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| CN104018122A CN104018122A (en) | 2014-09-03 |
| CN104018122B true CN104018122B (en) | 2016-04-20 |
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| CN201410256493.5A Active CN104018122B (en) | 2014-06-10 | 2014-06-10 | A kind of collection device |
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| WO (1) | WO2015188530A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104018122B (en) * | 2014-06-10 | 2016-04-20 | 京东方科技集团股份有限公司 | A kind of collection device |
| CN105019040A (en) * | 2015-06-03 | 2015-11-04 | 苏州大学 | Bubble electrostatic spinning device |
| CN106191785B (en) * | 2016-09-27 | 2018-09-18 | 京东方科技集团股份有限公司 | Crucible, evaporation coating device and deposition system |
| JP7188973B2 (en) * | 2018-10-15 | 2022-12-13 | キヤノントッキ株式会社 | Film forming apparatus, manufacturing system, organic EL panel manufacturing system, film forming method, and organic EL element manufacturing method |
| CN112301312A (en) * | 2019-07-25 | 2021-02-02 | 杭州纤纳光电科技有限公司 | Evaporation device and recovery method of evaporation raw material thereof |
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| CN202139291U (en) * | 2011-07-07 | 2012-02-08 | 京东方科技集团股份有限公司 | Vacuum evaporation device |
| CN203582959U (en) * | 2013-12-06 | 2014-05-07 | 京东方科技集团股份有限公司 | Evaporation device |
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| JPH07138741A (en) * | 1993-11-17 | 1995-05-30 | Canon Inc | Vacuum vapor deposition device |
| JP4045953B2 (en) * | 2002-12-27 | 2008-02-13 | 日新電機株式会社 | Vacuum arc evaporation system |
| JP2005350732A (en) * | 2004-06-10 | 2005-12-22 | Fuji Photo Film Co Ltd | Vacuum deposition system |
| CN101876058B (en) * | 2010-03-23 | 2012-07-11 | 东莞宏威数码机械有限公司 | Vacuum evaporation device |
| KR101289705B1 (en) * | 2011-09-05 | 2013-07-26 | 주식회사 에스에프에이 | Glass deposition apparatus for Flat Display |
| CN203128650U (en) * | 2013-02-05 | 2013-08-14 | 吴江南玻华东工程玻璃有限公司 | U-shaped net-wrapped baffle plate for vacuum cavity |
| CN104018122B (en) * | 2014-06-10 | 2016-04-20 | 京东方科技集团股份有限公司 | A kind of collection device |
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2014
- 2014-06-10 CN CN201410256493.5A patent/CN104018122B/en active Active
- 2014-09-30 WO PCT/CN2014/087907 patent/WO2015188530A1/en active Application Filing
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202139291U (en) * | 2011-07-07 | 2012-02-08 | 京东方科技集团股份有限公司 | Vacuum evaporation device |
| CN203582959U (en) * | 2013-12-06 | 2014-05-07 | 京东方科技集团股份有限公司 | Evaporation device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104018122A (en) | 2014-09-03 |
| WO2015188530A1 (en) | 2015-12-17 |
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