WO2015182932A1

WO2015182932A1 - Gate valve

Info

Publication number: WO2015182932A1
Application number: PCT/KR2015/005187
Authority: WO
Inventors: 김형규
Original assignee: 김형규
Priority date: 2014-05-30
Filing date: 2015-05-22
Publication date: 2015-12-03
Also published as: KR101493902B1

Abstract

The present invention relates to a gate valve and, more particularly, to a gate valve configured such that, when an opening/closing member has opened/closed a fluid passage, the movement of the opening/closing member causes a sealing member to selectively abut the outer peripheral edge of the opening/closing member or of the fluid passage, thereby improving airtightness, and the simple structure facilitates assembly and repair. The gate valve according to the present invention comprises: a body unit having a first fluid passage formed on one side thereof and an opening/closing space formed therein so as to be perpendicular to the first fluid passage and to be open to the other side thereof; a cover having a second fluid passage formed therein so as to be coupled to the other side of the body unit, thereby closing the opening/closing space; an opening/closing member which slides inside the opening/closing space by means of an actuator, thereby opening/closing the space between the first fluid passage and the second fluid passage; a sealing member, which has a third fluid passage formed therein, and which is mounted between the opening/closing member and the cover; and a pressurization member mounted between the sealing member and the cover, thereby pressurizing the sealing member towards the opening/closing member, wherein a constraint protrusion is formed on one of facing surfaces of the opening/closing member and the sealing member; a constraint groove is formed on the other of the facing surfaces of the opening/closing member and the sealing member, the constraint protrusion being selectively inserted into the constraint groove; the constraint protrusion is not inserted into the constraint groove, when the opening/closing member moves, such that the sealing member moves while being spaced from the opening/closing member by the height of the constraint protrusion; and the constraint protrusion is inserted into the constraint groove, when the opening/closing member does not move, such that the sealing member is forced against the inner surface of one side of the opening/closing member or the body unit by the pressurization member.

Description

Gate valve

The present invention relates to a gate valve, and more particularly, when the opening and closing member opens and closes the fluid passage, the sealing member is selectively in contact with the outer periphery of the opening and closing member or the fluid passage by the movement of the opening and closing member, thereby improving airtightness. It relates to a gate valve that is simple in structure and can facilitate assembly and repair.

In general, the air inside the chamber where the work is performed when performing an operation such as an etching process, a deposition process, a sputtering process or a special coating process requiring a vacuum state such as a liquid crystal display (LCD) substrate or a semiconductor wafer. To form a vacuum environment.

At this time, it is important to set and maintain an appropriate degree of vacuum, which is essential for this.

The gate valve is positioned in a passage connecting the vacuum chamber and the vacuum pump to maintain or release the vacuum state by opening and closing the passage.

In general, the gate valve maintains the airtightness of the chamber by closing the passage connected to the chamber by the operation of one drive plate and one airtight plate.

Such a gate valve is provided between the chamber in which the semiconductor element integration process is performed and the vacuum pump that sucks air in the chamber, and opens and closes the suction force of the vacuum pump to the chamber.

Therefore, since the airtightness of the gate valve plays an important role, efforts to maintain its life have also emerged as an important problem.

In particular, the fluid in the vacuum chamber discharged through the gate valve contains various by-products, and these by-products are continuously connected to the link of the actuator for driving the valve plate of the gate valve or the inner wall of the housing in which the valve plate is slid when the fluid is discharged. Since it is attached to hinder the forward and backward operation of the valve plate, the sealing member for opening and closing the space in which the valve plate is sliding was required.

Conventional gate valves having such a sealing member are disclosed in Korean Patent Publication No. 10-0497418 and Japanese Patent Publication No. 10-0906572.

The conventional gate valve is to improve the airtightness by moving the sealing member in the vertical direction by using a roller, a ball and an elastic spring.

However, such a conventional gate valve has a problem in that the sealing member is operated separately from the movement of the opening and closing member, so that it is difficult to control the gas and thus the airtightness is lowered if the control is not performed properly.

In addition, the conventional gate valve has a problem in that assembly and repair is difficult because of the complex structure that the roller, the ball and the elastic spring is coupled.

The present invention is to solve the above problems, the opening and closing member is moved by the control of the opening and closing member is moved accordingly to improve the airtightness by selectively contacting the inner surface of the opening and closing member or body portion, structure It is an object of the present invention to provide a gate valve that can simplify the assembly and repair.

In order to achieve the above object, the gate valve of the present invention includes: a body portion having a first fluid passage formed at one side and an opening and closing space orthogonal to the first fluid passage formed therein; A cover configured to form a second fluid passage to be coupled to the other side of the body to block the opening and closing space; An opening / closing member sliding in the opening / closing space by an actuator to open / close the first fluid passage and the second fluid passage; A sealing member having a third fluid passage formed between the opening and closing member and the cover; A pressing member mounted between the sealing member and the cover to press the sealing member toward the opening / closing member; To include, one of the face of the closing member and the sealing member is formed with a restraining projection, the other side of the opening and closing member and the sealing member is formed with a restraining groove is selectively inserted into the restraining projection When the opening and closing member is moved, the restraining protrusion is not inserted into the restraint groove so that the sealing member is moved away from the opening member by the height of the restraining protrusion, and the restraining member is not moved. The protrusion is inserted into the constraining groove, characterized in that the sealing member is in close contact with the inner surface of the opening member or the body portion by the pressing member.

According to the gate valve of the present invention as described above has the following advantages.

The opening and closing member is moved by the control of the opening and closing member and thus the sealing member is flowed to selectively contact the inner surface of the opening or closing member or the body part, thereby improving the airtightness by controlling one of the opening and closing members.

In addition, there is an effect that the structure can be simplified to facilitate assembly and repair.

1 is a perspective view showing a gate valve according to an embodiment of the present invention.

Figure 2 is an exploded perspective view of one direction showing the configuration of a gate valve according to an embodiment of the present invention.

Figure 3 is an exploded perspective view of the other direction showing the configuration of the gate valve according to an embodiment of the present invention.

Figure 4 is a perspective view showing the structure of the body portion in the gate valve according to an embodiment of the present invention.

Figure 5 is a perspective view showing the structure of the cover in the gate valve according to an embodiment of the present invention.

Figure 6 is a perspective view showing the structure of the opening and closing member in the gate valve according to an embodiment of the present invention.

Figure 7 is a perspective view showing the structure of the sealing member in the glove valve according to an embodiment of the present invention.

Figure 8 is an exploded perspective view showing the structure of the opening and closing member in the gate valve according to an embodiment of the present invention.

Figure 9 is a side cross-sectional view showing the open and closed state cut on the basis of the center line of the fluid passage in the gate valve according to an embodiment of the present invention.

Figure 10 is a side cross-sectional view showing the operation of the opening and closing member and the sealing member by cutting based on the sliding member in the gate valve according to an embodiment of the present invention.

Figure 11 is a side cross-sectional view showing the configuration and operation state by cutting on the pressing member and the support member in the gate valve according to an embodiment of the present invention.

1 to 11, the gate valve according to an embodiment of the present invention, the body portion 100, the cover 200, the opening and closing member 300, the sealing member 400, the pressing member 500 And a support member 600.

The body portion 100 is formed in a substantially rectangular parallelepiped shape so that a first fluid passage P1 is formed at one side and an opening / closing space S perpendicular to the first fluid passage P1 is formed therein, and the other side is opened. do.

More specifically, as shown in FIGS. 1 to 4, the fluid flows into the first fluid passage P1 of the body part 100, and the opening / closing member 300 is provided in the opening / closing space S. ) And a sealing member 400, etc. are mounted to open and close the movement of the fluid by an actuator A mounted at the lower portion of the body portion 100, and the opening and closing space S of the body portion 100 is opened. The cover 200 is mounted on the other side.

A guide groove 110 is formed on one side of the body portion 100 in the moving direction of the opening and closing member 300, and a plurality of support member insertion grooves 120 are formed at an outer circumference of the first fluid passage P1. Is formed.

More specifically, the guide groove 110 as shown in Figure 4 in the moving direction of the opening and closing member 300 to the left and right sides of the first fluid passage (P1) on one inner surface of the body portion 100. It is formed long and a part of the second bead (B2) to be described later is inserted to guide the movement of the opening and closing member (300).

And the support member insertion groove 120 is formed in the outer periphery of the first fluid passage (P1) on the inner surface of one side of the body portion 100 as shown in Figure 4 to be described later support member 600 Is inserted.

Detailed description of the guide groove 110 and the support member insertion groove 120 will be described later.

In addition, the sealing member 400, which will be described later, is selectively in contact with the inner surface of one side of the body portion 100 (b).

The cover 200 has a second fluid passage (P2) is formed to be coupled to the other side of the body portion 100 to block the opening and closing space (S).

That is, the cover 200 has the second fluid passage (P2) is formed in a position corresponding to the first fluid passage (P1) as shown in Figures 1 to 3 the other side of the body portion 100 It is coupled to prevent the opening and closing space (S) opened.

The cover 200 supports the other side of the pressing member 500 as shown in FIG. 11.

A second sealing groove 210 is formed at the inner circumference of the second fluid passage P2 in the circumferential direction.

As shown in FIGS. 5 and 9, the second protrusion 440, which will be described later, is inserted into the second sealing groove 210 so that the sealing member 400 is in the same direction as the second fluid passage P2. It is inserted into the fluid to seal between the sealing member 400 and the cover 200.

The opening and closing member 300 is slid in the opening and closing space (S) by the actuator (A) to open and close between the first fluid passage (P1) and the second fluid passage (P2).

In the opening and closing member 300, a first bead insertion groove 321 is formed on a surface corresponding to the sealing member 400 so that the sealing member 400 selectively contacts the opening and closing member 300. A part of the first bead B1 is exposed to the first bead insertion groove 321 and is rotatably inserted.

The first bead (B1) is selectively inserted into the restraint groove 410 of the sealing member 400 as described later, the airtightness between the opening and closing member 300 and the sealing member 400 or the body portion To improve the airtightness between the inner surface of one side of the (100) and the sealing member (400).

That is, the first bead insertion groove 321 is formed on the surface facing the sealing member 400 of the opening and closing member 300, as shown in Figure 4 (a) and the first bead insertion groove 321 ) Is inserted into the restraint groove 410 formed in the sealing member 400 in accordance with the movement of the opening and closing member 300 is inserted into the first bead (B1).

The first bead insertion groove 321 is formed in the upper and middle of the opening and closing member 300, as shown in Figure 4 (a).

And the interval between the first bead insertion groove 321 is formed to be spaced apart by the moving distance that the opening and closing member 300 is opened.

Constraints (not shown) may be formed in place of the second beads B2 and the second bead insertion grooves 322 to be selectively inserted into the constraining grooves 410 formed in the sealing member 400. .

The opening and closing member 300 includes an opening and closing plate 310, the sliding member 320 and the delay member 330.

The opening and closing plate 310 opens and closes between the first fluid passage P1 and the second fluid passage P2.

More specifically, the opening and closing plate 310 is formed in a plate shape as shown in Figure 6, 8 and 9 is in communication with the first fluid passage (P1) and the second fluid passage (P2). Open and close between the third fluid passages (P3).

The sealing member 400, which will be described later, selectively contacts the opening and closing plate 310 to improve airtightness.

In addition, the opening and closing plate 310 is supported not to flow in the direction of the first fluid passage (P1) by the support member 600 as shown in Figure 11 (a).

And the left and right sides of the opening and closing plate 310, the coupling member 311 is formed protruding.

6 and 8, the coupling member 311 protrudes from both the left and right sides and the left and right sides of the opening and closing plate 310 to be coupled to the delay member 330 to be described later.

The sliding member 320 is coupled to both left and right sides of the opening and closing plate 310, the first bead insertion groove 321 is formed on the surface facing the sealing member 400 and the second bead ( B2) is inserted and slid by the actuator A.

That is, the sliding member 320 is formed longer than the opening and closing plate 310 in the moving direction of the opening and closing member 300 as shown in Figs. 6 and 8 are coupled to the left and right sides of the opening and closing plate 310 The first bead insertion groove 321 is formed in each of the sliding members 320 at an upper portion and a middle of a surface facing the sealing member 400, and in the first bead insertion groove 321. The first bead B1 is inserted.

Further, the sliding member 320 is formed to be thicker than the thickness of the opening and closing plate 310 as shown in FIG. 9 to be spaced apart from the opening and closing plate 310 and the sealing member 400 at regular intervals. The second protrusion 440 formed in the sealing member 400 is selectively contacted.

The second bead insertion groove 322 is formed on a surface corresponding to one side of the body part 100 in the sliding member 320.

As shown in FIGS. 6 (b) and 10, the second bead insertion groove 322 is inserted to expose a portion of the second bead B2 to one side inner surface of the body part 100 described above. The exposed part of the second bead B2 is inserted into the formed guide groove 110 so that the second bead B2 rotates along the guide groove 110 by the movement of the opening and closing member 300. Guide the movement of the opening and closing member 300.

In the present embodiment, the second bead insertion groove 322 is formed in the sliding member 320, and the guide groove 110 is formed in one inner surface of the body portion 100, on the contrary, the second bead An insertion groove 322 may be formed on one side inner surface of the body part 100, and the guide groove 110 may be formed on the sliding member 320.

As shown in FIG. 8, the sliding member 320 is provided with a coupling groove 323 having a long hole shape in the longitudinal direction.

The delay member 330 is mounted to the coupling groove 323 as described later.

The delay member 330 is the opening and closing member 300 when the opening and closing member 300 in the state of closing the first fluid passage (P1) and the third fluid passage (P3) between the initial opening and closing, Mounted between the sliding member 320 to delay the movement of the opening and closing plate 310.

Detailed description of the delay member 330 will be described later.

The sealing member 400 is a third fluid passage (P3) is formed is mounted between the opening and closing member 300 and the cover 200.

That is, the third fluid passage (P3) is formed to correspond to the first fluid passage (P1) and the second fluid passage (P2) as shown in Figures 2 and 3 and the opening and closing member 300 It is mounted between the cover 200.

The sealing member 400 is in close contact with the opening and closing member 300 selectively when the opening and closing member 300 is completely closed, that is, by the movement of the opening and closing member 300 as shown in FIG. When the opening and closing member 300 is fully opened, it is in contact with the inner surface of one side of the body portion 100 to improve the airtightness.

The left and right sides of the sealing member 400 are formed with restriction grooves 410 for selectively inserting the first beads B1 inserted into the first bead insertion grooves 321 of the sliding member 320. .

That is, the restraint groove 410 is the first bead (B1) inserted in the upper, middle of the sliding member 320, as shown in Figure 7 (b) and 10 is the opening and closing member 300 When fully opened or closed, the first bead B1 is formed in the upper middle lower portion of the sealing member 400 to be inserted.

As the first bead B1 is selectively inserted into the constraining groove 410 as described above, when the opening / closing member 300 moves, the second bead B2 is as shown in FIG. 10 (b). Since the sealing member 400 is not inserted into the restraint groove 410 and the sealing member 400 is spaced apart by the exposed height of the second bead B2 to smoothly move the opening and closing member 300. When is not moved, as shown in Figure 10 (a) and 10 (b) the first bead (B1) is inserted into the restraint groove 410, the sealing member 400 is the opening and closing member ( 300 or the inner side of the body portion 100 is in close contact by the pressing member 500 to be described later to improve airtightness.

The restraint groove 410 is formed to be inclined upward in the direction in which the opening and closing member 300 moves.

That is, as shown in FIG. 10, the restraint groove 410 is formed to be inclined upwardly in the moving direction of the opening / closing member 300 to facilitate the detachment when the first bead B1 is restrained from being restrained.

Accordingly, as shown in FIG. 10, the restraint groove 410 formed in the middle of the sealing member 400 is formed to be inclined upward in the up and down direction, and the restraint groove 410 formed in the upper portion is upward in the downward direction. It is formed to be inclined, the restriction groove 410 formed at the bottom is formed to be inclined upward in the upper direction.

In addition, a first protrusion 420 protruding toward the opening / closing member 300 is formed at an outer circumference of the third fluid passage P3 of the sealing member 400 as shown in FIG. .

The first sealing groove 430 is formed in the circumferential direction on an upper surface of the first protrusion 420.

In addition, a first seal L1 is inserted into the first sealing groove 430, and the first seal L1 selectively contacts one side inner surface of the opening and closing member 300 or the body part 100. Sealing member 400 and the opening and closing member 300 or between the sealing member 400 and the inner surface of one side of the body portion 100 is sealed.

As described above, the first protrusion 420 protrudes, and the first seal L1 is inserted into the upper surface of the first protrusion 420, whereby the first bead B1 and the restraint groove 410 are provided. As shown in FIG. 9, the airtightness is maximized while minimizing the area of selective contact, and the first sealing L1 is inserted into the first sealing groove 430 to minimize the exposure to the outside by the fluid. It is possible to minimize the damage or deformation of the first sealing (L1).

In addition, a second protrusion 440 is formed on the outer circumference of the third fluid passage P3 of the sealing member 400 in the direction of the cover 200 as shown in FIG.

The second protrusion 440 is inserted into and coupled to the first fluid passage P1 in the same direction as the second fluid passage P2.

In addition, the outer periphery of the second protrusion 440 is in contact with the second sealing (L2) inserted into the second sealing groove 210 of the second fluid passage (P2) as shown in FIG. While sealing between the sealing member 400 and the cover 200, the sealing member 400 is made possible to flow in the same direction as the movement direction of the fluid by the pressure member 500 to be described later.

The pressing member 500 is mounted between the sealing member 400 and the cover 200 to press the sealing member 400 toward the opening and closing member 300.

The pressing member 500 is composed of a plurality of coil springs 333 as shown in Figures 2, 3 and 11 one side is coupled to the sealing member 400 and the other side is coupled to the cover 200 To press the sealing member 400 uniformly in the direction of the opening and closing member (300).

As the pressing member 500 presses the sealing member 400, the sealing member 400 tries to move in the direction of the opening and closing member 300 at all times, and thus the first bead B1 and the As shown in FIG. 9, the first sealing portion L1 inserted into the upper surface of the first protrusion 420 while the sealing member 400 moves in the same direction as the moving direction of the fluid by the restriction groove 410 is shown in FIG. 9. As described above, the sealing member 400 is moved by the movement of the opening and closing member 300 by selectively contacting the inner surface of the opening and closing plate 310 or the body portion 100 to move the sealing member 400 and the opening and closing member. Selectively seal between 300 or between the sealing member 400 and one side inner surface of the body portion 100.

Meanwhile, the delay member 330 includes a guide shaft 331, a moving member 332, and a spring 333 as shown in FIG. 8.

One side of the guide shaft 331 is hinged to the coupling groove 323.

That is, the guide shaft 331 is formed in a substantially cylindrical shape as shown in Figs. 8 and 10, one side is hinged to the coupling groove 323, the other side is hinged in the coupling groove 323 It is combined to rotate slightly in the center.

The moving member 332 is coupled to the coupling member 311 and is slidably coupled to the other side of the guide shaft 331.

That is, the moving member 332 is coupled to the coupling member 311 formed on both the left and right sides of the opening and closing plate 310 as shown in FIGS. 8 and 10 to slide the guide shaft 331 while opening and closing the opening and closing member. The plate 310 is moved in the longitudinal direction in the guide shaft 331.

The spring 333 is inserted into the guide shaft 331 so that the opening and closing member 300 opens the second fluid passage P2 and the third fluid passage P3. Pressurize.

That is, the spring 333 is pressed in the opposite direction to open in a state in which the opening and closing member 300 is closed as shown in FIG.

As such, the spring 333 presses the movable member 332 in the opposite direction to be opened while the opening / closing member 300 is closed, so that the opening / closing member 300 is disposed between the third fluid passages P3. During the initial movement to open, the first sealing (L1) in contact with the opening and closing plate 310 is minimized to be damaged by friction.

In more detail, if there is no delay member 330, the opening and closing member 300, in the closed state, during the initial movement to open, the first bead (B1) is separated from the restraint groove 410 Since the first sealing L1 is in contact with the opening and closing plate 310 at the moment when the first sealing L1 falls on the opening and closing plate 310, the first sealing L1 is frictional while sliding. It is damaged by.

However, when the delay member 330 is mounted, the opening / closing member 310 is separated from the restraint groove 410 during the initial movement to open the opening / closing member 300 in the closed state. The frictional force of the first sealing (L1) in contact with the opening and closing plate 310 in a state that the first sealing (L1) is in contact with the opening and closing plate 310 when the first sealing (L1) falls to By the moving member 332 overcomes the elastic force of the spring 333, the opening and closing plate 310 is not moved instantaneously, at this moment the first bead (B1) is the restraint groove 410 The first sealing (L1) which is in contact with the opening and closing plate 310 is moved in the fluid moving direction to be separated from the opening and closing plate 310 so as not to slip each other while the first sealing (L1) is opened and closed Minimized damage by friction with the plate 310 Can.

The support member 600 is inserted into the support member insertion groove 120 to support the opening and closing plate 310.

That is, the support member 600 is mounted between one side of the body portion 100 and the opening and closing plate 310 as shown in FIG. 11 so that the opening and closing plate 310 is in contact with the sealing member 400. By the support so as not to move in one direction of the body portion (100).

The support member 600 is formed in a cylindrical shape as shown in Figure 2, the other side is inserted and fixed to the support member insertion groove 120, one side is formed with a third bead insertion groove 610.

At least two cutouts 620 are formed in the third bead insertion groove 610.

In the third bead insertion groove 610, the third bead B3 supporting and rotating while supporting the opening and closing plate 310 is forcibly rotatably coupled by the cutout 620 to open and close the opening and closing plate 310. Support.

More specifically, the size of the opening in which the third bead B3 is inserted into the third bead insertion groove 610 is formed smaller than the diameter of the third bead B3, thereby the third coupling groove. When the third bead B3 is inserted into the 323, the third bead B3 is inserted and coupled to the opening by the cutout 620 to support the opening and closing plate 310.

The reason for forcibly coupling the third bead B3 to the third bead insertion groove 610 is, when the opening and closing member 300 is opened as shown in Fig. 11 (b), the opening and closing plate ( Since it is not in contact with the 310 is to prevent the third bead (B3) from being randomly removed from the third bead insertion groove 610.

It will be described in detail the operating state of the gate valve according to an embodiment of the present invention having such a configuration.

First, a state in which the opening and closing plate 310 is opened will be described.

In the state in which the opening and closing plate 310 is open, as shown in FIG. 10 (c), the first bead B1 mounted at the top and the middle of the sliding member 320 is in the middle of the sealing member 400. It is inserted into the restraint groove 410 formed in the lower portion.

When the first bead (B1) is inserted into the restraint groove 410 formed in the middle and the lower portion of the sealing member 400, as shown in Figure 9 (b) the first of the sealing member 400 The first seal L1 mounted on the protrusion 420 is flown by the pressing member 500 to be in contact with one inner surface of the body part 100.

Thus, the first fluid passage (P1), the second fluid passage (P2) and the third fluid passage (P3) is in communication with the first fluid passage (P1), the second fluid passage (P2) and the first The fluid flows through the three-fluid passage P3.

At this time, the first protrusion 420 is in contact with the inner surface of one side of the body portion 100 so that the fluid does not leak between the sealing member 400 and the inner surface of the body portion 100.

And when the first fluid passage (P1), the second fluid passage (P2) and the third fluid passage (P3) in the closed state in such a way as to close the sliding member 320 with the actuator (A). The opening and closing plate 310 coupled to the sliding member 320 is moved between the first fluid passage P1 and the third fluid passage P3.

That is, as shown in Figure 9 (a) is moved between the first protrusion 420 and the first fluid passage (P1) formed on one side of the body portion (100).

At this time, the first bead (B1) mounted on the sliding member 320 is moved to the state separated from the restraint groove 410, as shown in Figure 10 (b), the sealing member 400 The first protrusion 420 of the) is moved in a state in which the opening and closing plate 310 and the first bead (B1) is spaced apart by a height protruding from the sliding member (320).

Then, the first bead (B1) is moved and inserted into the restraint groove 410 formed in the upper and middle of the sealing member 400 as shown in Figure 10 (a).

When the first bead (B1) is inserted into the restraint groove 410 formed in the upper and middle of the sealing member 400 as shown in Figure 10 (a), as shown in Figure 9 (a) As described above, the opening and closing plate 310 is positioned between the first fluid passage P1 and the third fluid passage P3, and the first bead B1 is inserted into the restraint groove 410. The first seal L1 mounted to the first protrusion 420 of the sealing member 400 contacts the opening / closing plate 310 by the pressing member 500 so as to contact the first fluid passage P1. The third fluid passage P3 is closed.

As the sealing plate member is moved in the same direction as the moving direction of the fluid by the movement of the opening and closing member 300 as described above, the sealing plate member selectively contacts the inner surface of one side of the opening and closing plate member 310 or the body part 100. By controlling the actuator A, the opening and closing member 300 and the sealing plate can be simultaneously moved to improve airtightness.

On the other hand, when moving the opening and closing member 300 to open and communicate with the first fluid passage (P1) and the third fluid passage (P3), the sliding member 320 by the actuator (A) in FIG. After the step (b), the process moves to FIG. 10 (c).

By this movement, the opening and closing plate 310 is moved as shown in FIG. 9 (b).

At this time, in the state in which the opening and closing member 300 is closed by the delay member 330, when the initial movement to open, the first bead (B1) is separated from the restraint groove 410 to the opening and closing plate 310 As soon as the first sealing L1 falls, the first sealing L1 is in contact with the opening / closing plate 310, and the first sealing L1 is in contact with the opening / closing plate 310 by a frictional force. The opening member 332 overcomes the elastic force of the spring 333, so that the opening and closing plate 310 is not moved instantaneously, at this moment the first bead (B1) is separated from the restraint groove 410 While the first sealing (L1) in contact with the opening and closing plate 310 moves in the direction of fluid movement, that is, the first sealing (L1) in the opening and closing plate 310 is perpendicular to the opening and closing plate 310 The first sealing (L1) is opened and closed while moving in a direction to fall from the opening and closing plate 310 Is no slip in the material (310).

As such, the first sealing L1 is not damaged by the friction with the opening and closing plate 310 while the first sealing L1 is not slipped from the opening and closing plate 310 by the delay member 330. can do.

Subsequently, the opening and closing plate 310 is moved, and the first bead B1 is moved to the middle of the sealing member 400 as shown in FIGS. 10 (c) and 9 (b). The first fluid passage (P1), the second fluid passage (P2) and the third fluid passage (P3) are in communication with each other while being inserted into the constraining groove 410 formed in the lower portion.

Through such a process, the opening and closing member 300 and the close contact member are moved to improve the airtightness of the gate valve.

The gate valve of the present invention is not limited to the above-described embodiment, and may be variously modified and implemented within the range in which the technical idea of the present invention is permitted.

The code used is as follows.

100: body 110: guide groove 120: support member insertion groove

200: cover 210: second sealing groove 300: opening and closing member

310: opening and closing plate 311: coupling member 320: sliding member

321: first bead insertion groove 322: second bead insertion groove 323: coupling groove

330: delay member 331: guide shaft 332: moving member

333: spring 400: sealing member 410: restraint groove

420: first protrusion 430: first sealing groove 440: second protrusion

500: pressure member 600: support member 610: third bead insertion groove

620: incision S: opening and closing space A: actuator

P1: first fluid passage P2: second fluid passage P3: third fluid passage

B1: First Bead B2: Second Bead B3: Third Bead

L1: first seal L2: second seal L3: third seal

Claims

A body portion having a first fluid passage formed at one side and an opening and closing space orthogonal to the first fluid passage formed therein and opened to the other side;

A cover configured to form a second fluid passage to be coupled to the other side of the body to block the opening and closing space;

An opening / closing member sliding in the opening / closing space by an actuator to open / close the first fluid passage and the second fluid passage;

A sealing member having a third fluid passage formed between the opening and closing member and the cover;

A pressing member mounted between the sealing member and the cover to press the sealing member toward the opening / closing member; Including,

Constraining protrusions are formed on any one of the opening and closing members facing the sealing member, and restraining grooves for selectively inserting the restraining protrusions are formed on the remaining surfaces of the opening and closing members facing each other.

When the opening and closing member is moved, the constraining projection is not inserted into the constraining groove so that the sealing member is moved apart from the opening member by the height of the constraining projection.

When the opening and closing member does not move, the restraining projection is inserted into the restraint groove so that the sealing member is in close contact with the inner surface of one side of the opening member or the body portion by the pressing member.
The method according to claim 1,

The restraint protrusion is made of a first bead,

The gate valve, characterized in that the first bead insertion groove is formed in any one surface of the opening and closing member facing the sealing member is exposed to be inserted rotatably part of the first bead.
The method according to claim 1,

The restriction groove is a gate valve, characterized in that formed inclined upward in the direction in which the opening and closing member moves.
The method according to claim 1,

The opening and closing member,

An opening and closing plate that opens and closes between the first fluid passage and the third fluid passage;

A sliding member coupled to both left and right sides of the opening and closing plate and facing the sealing member so that the restraining protrusion or the restraining groove is formed to slide by the actuator;

A delay member mounted between the opening and closing plate and the sliding member to delay the movement of the opening and closing plate when the opening and closing member closes between the first fluid passage and the third fluid passage, and is initially opened and closed therebetween; Gate valve comprising a.
The method according to claim 4,

Coupling members protrude from the left and right sides of the opening and closing plate material,

The sliding member penetrates from side to side to form a coupling groove having a long hole shape in a longitudinal direction.

The delay member,

A guide shaft inserted into the coupling groove in a longitudinal direction and one side of which is hinged to the coupling groove;

A moving member coupled to the coupling member and slidingly coupled to the other side of the guide shaft;

A spring inserted into the guide shaft to press the moving member in a direction in which the opening / closing member opens the first fluid passage and the third fluid passage; Gate valve comprising a.
The method according to claim 4,

A second bead insertion groove is formed on one of the inner surface of one side of the body portion and the surface facing one side of the body portion of the sliding member,

One side inner surface of the body portion and the other surface of the surface facing the one side of the body portion of the sliding member is formed with a guide groove long in the moving direction of the opening and closing member,

And a part of the second bead is rotatably inserted into the second bead insertion groove, and the part of the exposed second bead is inserted into the guide groove to guide the movement of the opening and closing member.
The method according to claim 1,

The sealing member,

A first protrusion protruding toward the opening / closing member at an outer circumference of the third fluid passage;

A first sealing groove in a circumferential direction on an upper surface of the first protrusion; Is formed,

The first sealing groove is inserted into the first sealing groove, wherein the first sealing is selectively in contact with the inner surface of one side of the opening member or the body portion between the opening and closing member and the sealing member or between one inner surface of the body portion and the sealing member. Gate valve, characterized in that for sealing.
The method according to claim 1,

On the outer periphery of the third fluid passage of the sealing member a second projection is formed in the cover direction,

The second protrusion is inserted and coupled to the second fluid passage to flow in the same direction as the second fluid passage,

A second sealing groove is formed in the circumferential direction at an inner circumference of the second fluid passage or an outer circumference of the protrusion.

The second sealing groove is inserted into the second sealing groove is coupled to the gate valve, characterized in that for sealing between the sealing member and the cover.
The method according to claim 4,

The inner surface of one side of the body portion is formed with a plurality of support member insertion grooves on the outer periphery of the first fluid passage,

The support member is inserted into the support member insertion groove for supporting the opening and closing plate member: further comprising:

The support member,

A cylindrical shape is formed and the other side is inserted into the support member insertion groove, one side is formed with a third bead insertion groove, the third bead insertion groove is formed with at least two incisions,

And a third bead is rotatably coupled to the third bead insertion groove by the cutout to support the opening and closing plate member.