WO2015163505A1

WO2015163505A1 - Apparatus for continuously supplying ingot raw material

Info

Publication number: WO2015163505A1
Application number: PCT/KR2014/003652
Authority: WO
Inventors: 박진섭; 김진노; 이경석; 이재식
Original assignee: (주)에스테크
Priority date: 2014-04-25
Filing date: 2014-04-25
Publication date: 2015-10-29
Also published as: KR101554223B1

Abstract

The present invention relates to an apparatus for continuously supplying an ingot raw material, for enabling a fixed amount of a raw material to be continuously supplied using a raw material supply roller which is forwardly/reversely rotated in a predetermined section by a driving source and a power transfer means, and for continuously supplying a fixed amount of an ingot growing raw material. The apparatus for continuously supplying an ingot raw material comprises: a hopper (22) into which a great quantity of an ingot raw material (21) is inserted; an auxiliary hopper (24) which is downwardly elastically supported by a spring (23) at the lower portion of the hopper (22); a raw material supply roller (26) which is axially installed at the lower portion of the auxiliary hopper (24) and which comes into surface contact with the lower surface (25) of the auxiliary hopper (24); a supply hole (27) formed at the raw material supply roller (26); a servo motor (27) and a power transfer means (28) for forwardly/reversely rotating the raw material supply roller (26) in a predetermined section; and a controller (29). Accordingly, the raw material (21), which is continuously discharged in a fixed amount by means of the raw material supply roller (26) which rotates in a section, is continuously supplied in a fixed amount to a crucible (2) along a discharge guide means (30) and a plurality of guide pipes (31, 32, 33).

Description

Ingot raw material continuous feeder

The present invention relates to an ingot raw material continuous supply device for continuously quantitatively supplying the ingot growth raw material, the raw material supply roller having a "b" shape supply hole is rotated forward and reverse for a predetermined period so that the quantitative raw material is continuously supplied.

Generally, ingot growth apparatus using Czochralski crystal growth method is a silicon ingot growth furnace (hereinafter referred to as a 'growth furnace'), for example, a crucible installed in a hot zone area. Solid raw materials such as polysilicon (or gallium arsenide) and impurities are introduced (supplied), heated and melted with an electrothermal heater to form a silicon melt, and then a single crystal seed is contacted with the silicon melt. When it is pulled up gradually, a silicon ingot of a predetermined length and a predetermined diameter is obtained.

Looking at the growth process of the silicon ingot, stacking (filling) of polysilicon and dopant in a quartz crucible → vacuum (vacuum) to maintain the growth furnace at high vacuum → melting (melting) of polysilicon → Dipping the seed into contact with the melt → Necking to raise the diameter while reducing the diameter to avoid defects → Shouldering to grow the diameter of the ingot → Body gross to grow the length of the ingot Growth Ingot is grown through various processes such as tailing to reduce the diameter of the ingot and cooling down to cool the ingot.

Poly silicon, which is an ingot growth raw material, is made of chunk poly and / or granule poly, and a predetermined amount of boron or phosphorus is mainly used as a dopant. Boron is used to grow P-type ingots, and phosphorus is used to grow N-type ingots.

Since the raw materials are in a solid state, in order to melt them to form a hot melt, impurities are put in a crucible and poly silicon agglomerates are stacked and stacked in a dome form. Even if it is dissolved inside the crucible, the volume of the pores formed between the silicon mass and the mass is reduced.

In addition, if the silicon melt is gradually consumed as the ingot grows, and the level (liquid level) is lowered, the crucible is raised by the elevating means while detecting the level displacement using a distance measuring means so that the silicon melt surface is kept constant. However, due to the difficulty in precision control and the quantitative supply of raw materials, not only the diameter of the growth ingot is not uniform, but also the segregation phenomenon of uneven quality due to the change of the concentration of impurities in the direction in which the ingot is raised. There was a problem such as occurring.

Therefore, in order to grow the desired diameter and desired length while maintaining the quality of the growing ingot uniformly, the ingot raw materials (polysilicon and impurities) are quantitatively continued by the volume (or the required volume) that decreases with the growth of the ingot. There is a need for a continuous feed to supplement.

An object of the present invention is to provide an ingot raw material continuous supply device for continuously supplying the ingot raw material by the reduced volume to grow an ingot (Ingot).

Another object of the present invention is to provide an ingot raw material continuous supply device for continuously supplying the ingot raw material while the raw material supply roller having a "b" shape supply hole is rotated forward and backward a predetermined section.

Still another object of the present invention is to provide an ingot raw material continuous supply device for continuously supplying quantitatively supplying granule granules, which are mainly used recently because the melting speed is faster than that of chunks of polysilicon. There is a purpose.

The ingot raw material continuous supply device of the present invention, a hopper 22 into which a large amount of ingot raw material 21 is injected, an auxiliary hopper 24 which is supported by a spring 23 below the hopper 22, and the auxiliary hopper. (24) a raw material feed roller 26 which is installed in the lower portion and is in surface contact with the bottom surface 25 of the auxiliary hopper 24, a supply hole 27 formed in the raw material feed roller 26, and the raw material It may include a servo motor 28, a power transmission means and a controller 29 for forward and reverse rotation of the supply roller 26 a predetermined section.

The supply hole 27 is a "b" shape formed in a direction orthogonal to the virtual axis of the raw material supply roller 26, the inlet (27a) is formed on the upper side, the outlet 27b may be formed on the side have.

The raw material supply roller 26 may be cylindrical and further include an arc-shaped bottom surface 25 of the auxiliary hopper 24 in surface contact with the cylindrical surface.

The power transmission means 28 includes a shaft bar 57 protruding on both sides of the shaft support member 56, a disc 58 fixed to an inner end of the shaft bar 57, and a shaft pin on the disc 58. One end of the link 59 is axially installed to be eccentric to 60, one side shaft member 49, the other end of the link 59 is axially installed by the shaft pin 61, and the outer side of the shaft 57 It may include a timing pulley 62 fixed to an end portion, a timing pulley 63 fixed to a rotating shaft of the servomotor 28, and a timing belt 64 connecting the

timing pulleys

62 and 63. .

It may further include a rod 68 protruding from the timing pulley 62 and a proximity sensor 69 for sensing the rod 68.

The raw material feed roller 26 includes

shaft members

49 and 50 having angles on both side surfaces thereof,

shaft rods

51 and 52 protruding to both sides of the

shaft members

49 and 50, and the shaft bars ( 51 and 52 may further include

shaft support members

54 and 55 which are respectively installed in the shaft.

When the raw material 21 introduced into the supply hole 27 of the raw material supply roller 26 flows out, a gap 45 in which a part of the inlet opening 27a is formed over the hollow portion 39 of the auxiliary hopper 24 is formed. It may further include.

Protruding frame 40 formed on the outer surface of the auxiliary hopper 24, a spring 23 coupled to the upper surface of the projecting frame 40 and the bottom surface of the hopper support 41, and the protruding frame ( 40 may include a stepped portion 43 of the housing 42 installed at the bottom of the hopper support 41 to which it is locked.

The present invention has the effect that the raw material of the quantitative continuous supply of the raw material supply roller having a supply hole of the "b" shape is rotated forward and backward a predetermined section.

In the present invention, ingot is not only continuously replenished ingot raw material by a reduced volume to grow, but also ingot growth raw material is continuously quantitatively supplied so that the productivity of the ingot is greatly improved and the quality is uniform effect. .

The present invention is a very useful invention having the effect of adjusting the size (diameter and / or length) of the ingot by continuously supplying quantitatively the raw materials required for ingot growth.

1 is a front view showing an example of the present invention.

2 is a cross-sectional view showing an example of the present invention.

3 is a sectional view showing main parts of one embodiment of the present invention;

4 is a perspective view illustrating main parts of the present invention as an example.

Figure 5 is a schematic view of the interval rotation of the raw material supply roller shown as an example of the invention.

Figure 6 is a cross-sectional view of the raw material is introduced into the supply hole of the raw material supply roller shown in an embodiment of the present invention.

7 is a cross-sectional view of the raw material continues to flow into the supply hole of the raw material supply roller shown as an example of the present invention.

Figure 8 is a cross-sectional view of the raw material flowed out quantitatively introduced into the supply hole of the raw material supply roller shown as an example of the present invention.

(1)-Main Chamber (2)-Internal Crucible

(3)-outer crucible (4)-heat shield

(6)-Electric Heater (10)-Increasing Means

(11)-Ingot (12)-Impression Cable

(13)-load cell (20)-continuous feeder

(21)-Raw Material (22)-Hopper

(23)-Spring (24)-Secondary Hopper

(25)-bottom surface (26)-raw material supply roller

(27)-Supply hole (27a)-Inlet

(27b)-Outlet (28)-Servo Motor

(29)-controller (30)-emission guidance

(31) (32) (33)-Guide (34)-Storage Space

(35)-Inlet (36)-Cover

(39)-Hollow (40)-Extrude

(41)-hopper support (42)-housing

(43)-Joint (44)-Slant

(45)-Gap (48)-Protrusion

(49) (50)-Shaft Member (51) (52) (57)-Shaft

(53)-case (54) (55) (56)-shaft support member

(58)-Discs (59)-Link

(60) (61)-Shaft Pin (62) (63)-Timing Pulley

(64)-Timing Belt (65)-Internal Space

(66)-Exit (67)-Outer Space

(68)-Bar (69)-Proximity sensor

(71)-Sealing member (C1) (C2) (C3)-Virtual circle

(M)-Silicone Melt

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the embodiments of the present invention, the same components in the drawings are denoted by the same reference numerals as much as possible, and detailed descriptions of related known configurations or functions will be omitted so as not to obscure the subject matter of the present invention.

FIG. 1 shows an example of a Czochralski method ingot growth apparatus equipped with the present invention ingot raw material continuous supply device 20 for continuously supplying a fixed quantity of ingot raw materials.

The ingot growth apparatus includes a main chamber (1) equipped with cooling means, an inner crucible (2) and an outer crucible (3) installed inside the main chamber (1) to melt polysilicon (hot melt), and an inner / Heating the heat shield member 4 installed on the top of the

outer crucible

2, 3, the pedestal 5 supporting the inner /

outer crucible

2, 3, and the inner /

outer crucible

2, 3 Supporting and rotating the electric heater 6, a power supply means for supplying a large electric power to the electric heater 6, and the internal /

external crucibles

2 and 3 and the pedestal 5. A drive shaft 7 and drive means 8 for raising and lowering, a dome chamber ⁹ provided above the main chamber 1, a gate valve and a viewport provided in the dome chamber 9, and a dome chamber ( 9) a pulling mechanism (10) installed in a pull chamber of the upper part, a pulling cable (12) installed in the pulling means (10), and an ingot (11) to raise the ingot (11). Rod measuring weight 13, a seed chuck 14 provided at the lower end of the pulling cable 11, a CCD camera and a distance meter for imaging the melt surface of the silicon melt M through a viewport, vacuum means, cooling Means, sensing means, control means and measuring means, and the like, in the present invention, the ingot raw material continuous supply device 20 is installed on the upper side of the ingot growth apparatus as shown in FIG.

Figure 2 is a front view of the ingot raw material continuous supply device 20 shown as an example of the present invention, Figure 3, Figure 4 is a cross-sectional view, a hopper 22, which is injected (filled) a large amount of ingot raw material 21, and the hopper (22) The auxiliary hopper 24 which is supported by the spring 23 in the lower portion, and the raw material feed roller 26 which is installed in the lower portion of the auxiliary hopper 24 and the surface contact with the bottom surface 25 of the auxiliary hopper 24 ), The supply hole 27 formed in the raw material supply roller 26, the servo motor 28 and the power transmission means and the controller 29 for rotating the raw material supply roller 26 forward and backward (section rotation) for a predetermined period. It is configured to include, the raw material 21 which is continuously discharged quantitatively by the rotation of the raw material supply roller 26 is a crucible (2) along the discharge guide means 30, a plurality of guide pipes (31) (32) (33) Is supplied.

The hopper 22 is provided with a storage space 34 of a predetermined volume so that a large amount of raw material 21 can be added and filled, the hopper 22 can be sealed after the input of a large amount of raw material 21. The inlet 35 and the lid 36 are configured so that the airtightness of the storage space 34 is maintained by the sealing member 71 such as an O-ring and is isolated from the outside. Reference numeral 37 in FIG. 2 exemplifies the input limit line of the raw material 21.

The raw material 21 is granular Poly granules (Granule Poly) is a fast melting rate, easy to quantitatively and continuously supplied, the size is a circular or elliptical or polygonal diameter of 2 to 10 mm, or their shape.

At the outlet 38 of the hopper 22 through which the raw material 21 is discharged, an auxiliary hopper 24 having a hollow portion 39 formed up and down is installed, and a protruding frame 40 is provided at an outer surface of the auxiliary hopper 24. Is formed, the spring 23 is coupled to the upper surface of the protruding frame 40 and the bottom surface of the hopper support 41, the auxiliary hopper 24 is carried down downward.

The protruding frame 40 is caught by the stepped portion 43 of the housing 42 installed at the bottom of the hopper support 41 to prevent the detachment, and the lower protrusion 48 of the auxiliary hopper 24 is the housing 42. It protrudes downward and is in surface contact with the surface of the raw material supply roller 26, and is in a state of always being in surface contact with the surface of the raw material supply roller 26 located at the lower side because it is downwardly touched by the spring 23.

The raw material feed roller 26 is cylindrical, and

shaft members

49 and 50 are respectively provided on both sides thereof, and

shaft rods

51 and 52 protruding to both sides of the

shaft members

49 and 50 are provided in a case ( 53) are axially installed on each of the

shaft support members

54, 55 provided on both sides.

The shaft support member 56 installed on one side of the case 53 is installed such that the shaft bar 57 protrudes to both sides, and a disc 58 having a predetermined diameter is formed at an end of the shaft bar 57 protruding into the case 53. It is fixed, the disc 58 is axially installed so that one end of the link 59 is eccentric by the shaft pin 60, the other end of the link 59 is a shaft pin 61 on the one side shaft member (49) , The timing pulley 62 is fixed to the shaft rod 57, which protrudes out of the case 53, and a thermovotor 28 is installed outside the case 53, and the servo servo motor 28 is provided. The timing pulley 63 is fixed to the rotating shaft of the timing pulleys 62 and 63 is connected to the timing belt 64, the rotational force is transmitted to the shaft 57, the rotational force transmitted to the shaft 57 is eccentric It is converted into a rocking motion in the link 59 is installed shaft, and by the rocking motion to make the raw material supply roller 26 and the forward and reverse rotation The.

FIG. 5 is a schematic view showing the section forward and reverse rotation of the raw material feed roller 26, FIG. 6 is a state in which the raw material 21 flows into the supply hole 27 of the raw material feed roller 26, and FIG. 21 is continuously flowing, and FIG. 8 is a state in which the raw material 21 quantitatively introduced into the supply hole 27 is supplied dropwise.

The supply hole 27 formed in the raw material supply roller 26 is formed in a direction orthogonal to the virtual axis of the raw material supply roller 26 (an imaginary line connecting the center lines of both shaft bars 51 and 52). B "shape, the inlet port (27a) located in the upper portion is located in the hollow portion 39 of the auxiliary hopper 24, the raw material 21 is introduced, the outlet port (27b) located in the side is the auxiliary hopper 24 When the quantitative raw material 21 is discharged (discharged) to the inner space 65 of the case 53 while being located at a position away from the discharge means, the discharge guide means 30 and the plurality of guides are provided through the outlet 66 under the case 53. It is fed to the crucible 2 along the

tubes

31, 32, 33.

The volume (volume) of the supply hole 27 becomes the supply volume. That is, the amount of the raw material 21 introduced into the supply hole 27 is the amount of the raw material to be supplied once, and is always supplied in a fixed quantity because it is the same amount.

4 and 5, when the shaft 57 is rotated clockwise (A direction) by the servo motor 28 and the power transmission means, the disc 58 is also clockwise. Rotation, the one side of the link 59 eccentrically provided by the shaft pin 60 on one side edge portion of the disc 58 rotates along the imaginary circle C1, and the shaft pin 61 on the one shaft member 49. The other side of the eccentric link 59 is pivoted for a predetermined section along the virtual circle C2, and the raw material supply roller 26 reciprocates a predetermined section of the virtual circle C3. Therefore, the link 59 reciprocates in the D↔E direction of FIG. 4 or the predetermined angle θ 1 of FIG. 5 by the turning motion along the A↔B direction and the virtual circle C1 (C2). ) Is metered in.

The virtual circle C1 is a rotational trajectory of the pin shaft 60 rotating along the disc 58, and the virtual circle C2 is the orbit of the other pin shaft 61 around the pin shaft 60, and the virtual circle. C3 is the orbit of the other pin shaft 61.

The turning trajectory section of the pin shaft 61 and the raw material supply roller 26 corresponds to the diameter of the virtual circle C1, and thus the raw material supply roller 26 reciprocates at a predetermined angle θ 1 of FIG. 5. .

An inclined portion 44 is formed in the hollow portion 39 of the auxiliary hopper 24 to guide the raw material 21 of the auxiliary hopper 24 to be well introduced into the inlet 27a, and the auxiliary hopper 24 The bottom surface 25 of the) is not only arc-shaped so that the surface of the raw material supply roller 26 is in surface contact, but also downwardly supported by the spring 23, so that the bottom surface 25 of the auxiliary hopper 24 and the raw material supply roller The raw material 21 cannot be pulled out between the holes 26. The spring 23 is an elastic force that hardly wears even when the bottom surface 25 of the auxiliary hopper 24 is in contact with the surface of the raw material feed roller 26.

FIG. 6 shows the inlet 27a of the supply hole 27 formed in the raw material supply roller 26 which rotates in the forward and reverse sections and is located in the hollow portion 39 of the auxiliary hopper 24, and thus the raw material 21 is supplied to the supply hole 27. 7 is in a state in which the inlet port 27a of the raw material supply roller 26 rotates in the forward and reverse sections does not escape the hollow portion 39 of the auxiliary hopper 24, and thus the raw material 21 is continuously introduced. 8 shows that the inlet 27a of the raw material supply roller 26 leaves the hollow portion 39 of the auxiliary hopper 24 and thus the inflow of the raw material 21 is stopped and the raw material 21 quantitatively introduced into the supply hole 27. Is in a state that falls while flowing out of the raw material supply roller 26.

6 is a state in which the outlet 21b of the supply hole 27 is inclined upward at a predetermined angle θ 2 from the lowest horizontal line of the supply hole 27 so that the raw material 21 does not flow out. The outlet port 27b of the supply hole 27 is inclined downward at a predetermined angle θ 3 from the horizontal line in FIG. 6, and thus the raw material 21 flows out.

In the present invention, when the raw material 21 introduced into the supply hole 27 is discharged as shown in FIG. 8, a gap 45 is formed so that a part of the inlet port 27a is disposed over the hollow portion 39 of the auxiliary hopper 24. This prevents the corner portion of the inlet opening 27a and the corner portion of the inclined portion 44 from being met, thereby preventing the mock portion from being damaged while the raw material 21 is sandwiched therebetween, or preventing a malfunction of the raw material supply roller 26. The size of the gap 45 is satisfied if it is 2/3 to 3/4 size than the average size of the raw material 21.

In the present invention, the inner space 65 of the case 53 that is isolated by the case 53 is a vacuum, the outer space 67 is a general atmospheric state, and the shaft support member 56 portion has a plurality of O-rings or packing and Airtightness is maintained by the same sealing member 71.

The edge 68 of the timing pulley 62 is provided with a rod 68 protruding outwardly and rotates along the timing pulley 62, and the shaft supporting member 56 is close to sensing the rotational speed of the rod 68. The sensor 69 is installed and input to the controller 9 to detect the rotation speed and position.

A gate 73 is opened and closed by the opening and closing means 72 below the discharge guide means 30.

The

shaft supporting members

54, 55 and 56 are provided with bearings for supporting the

respective shaft rods

51, 52 and 57 and a plurality of sealing members 71. 53) is fastened and fixed. For example, the sealing member 71 may be an O-ring or a packing having excellent wear resistance and airtightness (density).

Instead of the cover 36 on the inlet 35 of the hopper 22, a gate (not shown) which is opened and closed about the shaft by manual, automatic or mechanical opening and closing means (not shown) is provided, and a predetermined amount of raw material is provided. When 21 is input, it may be configured to have a structure that is closed so that the airtight (氣密) of the inlet (35) can be maintained.

The present invention described above is not limited to the present embodiment and the accompanying drawings, and various substitutions, modifications, and changes are possible without departing from the technical spirit of the present invention, and this is in the technical field to which the present invention belongs. It is self-evident for those of ordinary knowledge.

Claims

A hopper 22 into which a large amount of ingot raw material 21 is introduced;

An auxiliary hopper 24 which is supported by a spring 23 under the hopper 22;

A raw material feed roller 26 which is installed under the auxiliary hopper 24 and is in surface contact with the bottom surface 25 of the auxiliary hopper 24;

A supply hole 27 formed in the raw material supply roller 26;

A servo motor 27, a power transmission means 28, and a controller 29 for forward and reverse rotation of the raw material supply roller 26 in a predetermined section;

Ingot raw material continuous feeder comprising a.
The method of claim 1:

Supply hole 27 is,

"B" shape formed in the direction orthogonal to the virtual axis of the raw material feed roller 26,

Inlet raw material continuous supply device characterized in that the inlet (27a) is formed on the upper side, the outlet (27b) is formed on the side.
The method according to claim 1 or 2, wherein:

The raw material feed roller 26 is columnar,

An arc-shaped bottom surface 25 of the auxiliary hopper 24 which is in surface contact with the cylindrical surface;

Ingot raw material continuous supply device further comprising.
The method according to claim 1 or 2, wherein:

The power transmission means 28,

Shaft rods 57 protruding to both sides of the shaft support member 56;

A disc 58 fixed to the inner end of the shaft 57;

One end of the link 59 which is axially installed to be eccentric to the disc 58 with an axial pin 60;

One side shaft member 49 is the other end of the link 59 is installed shaft shaft 61;

A timing pulley 62 fixed to an outer end of the shaft 57;

A timing pulley 63 fixed to the rotation shaft of the servomotor 28;

A timing belt 64 connecting the timing pulleys 62 and 63;

Ingot raw material continuous feeder comprising a.
The method of claim 4 wherein:

A rod body 68 protruding from the timing pulley 62;

Proximity sensor (69) for sensing the rod (68);

Ingot raw material continuous supply device further comprising.
The method according to claim 1 or 2, wherein:

The raw material feed roller 26,

Shaft members (49) (50) that are installed on both sides;

Shaft rods 51 and 52 protruding to both sides of the shaft members 49 and 50;

Shaft support members 54 and 55 on which the shaft bars 51 and 52 are respectively installed;

Ingot raw material continuous supply device further comprising.
The method according to claim 1 or 2, wherein:

A gap 45 in which a part of the inlet opening 27a is formed over the hollow portion 39 of the auxiliary hopper 24 when the raw material 21 introduced into the supply hole 27 of the raw material supply roller 26 flows out;

Ingot raw material continuous supply device further comprising.
The method according to claim 1 or 2, wherein:

Protruding frame 40 formed on the outer surface of the auxiliary hopper 24;

A spring 23 coupled to the top surface of the protruding frame 40 and the bottom surface of the hopper support 41;

A stepped portion 43 of the housing 42 installed at the bottom of the hopper support 41 on which the protruding frame 40 is locked;

Ingot raw material continuous feeder comprising a.