WO2015162772A1 - アクティブ制振装置および設計方法 - Google Patents
アクティブ制振装置および設計方法 Download PDFInfo
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- 238000001514 detection method Methods 0.000 claims abstract description 16
- 238000012546 transfer Methods 0.000 claims description 23
- 238000004458 analytical method Methods 0.000 claims description 10
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/002—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion characterised by the control method or circuitry
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
- F16F15/007—Piezoelectric elements being placed under pre-constraint, e.g. placed under compression
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B15/00—Systems controlled by a computer
- G05B15/02—Systems controlled by a computer electric
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
- G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
Definitions
- the present invention relates to an active vibration damping device and a design method thereof.
- Japanese Patent Laid-Open No. 2007-120711 is known as a background art of this technology.
- a plurality of frequencies are selected in the vibration control target frequency range, a control system for each frequency is designed in advance, and the natural frequency of the vibration control object is selected from these. It is disclosed that a control system designed with the closest frequency is selected and the selected control system is incorporated into the controller of the active vibration control device.
- an information storage device equipped with a plurality of recording devices will be described as an example to describe a failure that leads to performance degradation of the information storage device caused by vibration.
- a description will be given using a storage device equipped with an HDD (Hard Disk Drive) as a commonly used recording device.
- the HDD itself generates vibrations by operating the internal actuator and the spindle of the disk. This vibration is transmitted through the housing of the storage device to another HDD that is attached to the storage device that is not performing input / output, and the HDD that is not performing input / output also vibrates.
- the vibrations from the HDDs that are not performing input / output overlap multiple times and are transmitted as external vibrations to the input / output HDDs, affecting the operation of the input / output HDDs, and the amount of input / output. It will adversely affect.
- a fan for forcibly circulating air to dissipate heat is often mounted. In this case, there is a case where the vibration generated by the operation of the fan is transmitted as external vibration to the HDD performing input / output via the housing of the storage device.
- vibration such as measuring equipment such as electron microscopes, manufacturing equipment that performs ultra-fine processing, and the like, which require high-accuracy imaging of extremely small areas, reduces the performance of the device.
- suppressing vibration is an important issue.
- the vibration of the structure can be a source of noise, which can reduce the added value of the device.
- the vibration of the target is detected, a control signal for suppressing the vibration is generated, and the vibration generating means is driven to reduce the vibration.
- an active vibration control device There is a method of applying such an active vibration control device.
- this device is referred to as an active vibration damping device.
- Such an active vibration damping device is known to have higher vibration damping performance than a passive vibration damping device that has been widely used.
- the active vibration damping device is difficult to design, it is necessary to design the active vibration damping device specifically for the application target, and the cost as the vibration damping device is increased.
- a vibration damping device that is attached to a target structure whose vibration is to be reduced, and includes a plurality of identical vibration detection units that detect distortion of a part of the target. And a plurality of identical vibration generating means for causing distortion in a part of the target at different locations, and a control means for generating a control signal for determining the driving force of the vibration generating means based on a signal from the vibration detecting means ""
- the vibration detecting means for detecting the vibration and the vibration generating means for generating the driving force for reducing the target vibration can be installed at an arbitrary position of the target object, which is more efficient in suppressing the vibration. Can be placed in position.
- the number of man-hours required to design a vibration damper is as long as the target frequency can be found quickly and the vibration detection means and vibration generation means can be identified with less effort. Can be greatly reduced.
- the present invention is a device that is desired to reduce the influence of vibration, and is further added to a device in which a housing is vibrated by an internal vibration source, and has a low cost and high vibration damping performance.
- the purpose is to realize a method for efficiently designing a device.
- the present application provides a plurality of vibration detection means for detecting a vibration of a part of the target in a target structure to be reduced in vibration, and a plurality of vibration generation means for causing distortion in a part of the target.
- a control means for generating a control signal for determining the driving force of the vibration generating means by a signal from the vibration detecting means, a signal input / output means for exchanging signals with the control means, and a signal input / output means.
- the present invention is to provide a vibration damping device comprising a provided signal analyzing means and a display device for displaying a calculation result by the signal analyzing means, and further switching between a plurality of vibration detecting means and a plurality of vibration generating means.
- the driving force generation signal and vibration state information are measured for each of the combinations, and the results of calculating the transfer characteristics by the signal analysis means are displayed on the display device as a list.
- active vibration control devices that are specially designed for individual devices are designed by considering the configuration and control method according to the target, so that it takes time to design and requires expert knowledge Is required. This increases the cost of the vibration damping device. Furthermore, the vibration characteristics of the actual target device may be different from those assumed at the time of design.
- it is possible to better measure the vibration state of the target by providing a plurality of vibration detection means having the same shape and properties according to almost the same standard, while the vibration generation means also according to the same standard, By aligning the shape and performance, the number and arrangement of the vibration generating means can be determined in advance according to the characteristics of the target, thereby generating a driving force that can efficiently reduce the vibration of the target.
- the signal input / output means connected to the control means for controlling these, it is possible to output the vibration state information from the vibration detection means to the outside of the vibration damping device, and conversely, by inputting a driving force generation signal from the outside, A corresponding driving force can be generated in the vibration generating means to vibrate the object. In this way, it is possible to grasp the vibration characteristics of the object itself, and furthermore, since no additional equipment such as a vibrator or vibration measuring instrument is required, it is possible to quickly grasp the vibration phenomenon. It is.
- the transfer characteristic from a certain vibration generating means to a certain vibration detecting means can be calculated.
- the combination of detection means can be selected, and the control parameters of the control means at that time can be adjusted to complete the design of the vibration damping device, and the vibration problem can be dealt with simply and quickly.
- the operator can grasp the general vibration state. If the frequency axes are aligned and displayed in parallel, highlighting where the problematic frequency is can make it easier to grasp the magnitude of vibration in each transfer characteristic, Easy to design. Alternatively, it is possible to easily grasp the magnitude of the vibration at the problematic frequency by displaying the transfer characteristics in an overlapping manner.
- active vibration control devices that are difficult to design in the past and that have high application barriers can be introduced with low-cost and simple design, which can quickly deal with devices that have vibration problems and ensure performance.
- the added value of the target device can be increased.
- FIG. 1 is a schematic diagram illustrating Example 1.
- FIG. FIG. 3 is a schematic diagram illustrating the operation of the first embodiment.
- 1 is a block diagram of Embodiment 1.
- FIG. 6 is a schematic diagram showing Example 2.
- FIG. It is the flowchart which compared the design method of Example 2 with the past. 6 is a schematic diagram illustrating a display example of Example 2.
- FIG. 10 is a schematic diagram illustrating another display example of the second embodiment.
- the object whose vibration is to be reduced will be described as an information storage device using, for example, a RAID device.
- FIG. 1 is a schematic diagram showing the first embodiment.
- FIG. 1 shows an example in which an active vibration damping device 1 of the present invention is mounted on a target storage device 2.
- Piezoelectric sensors 3 a and 3 b are attached to the structural plate 6 on the side surface of the housing of the storage device 2.
- plate-like piezoelectric actuators 4 a, 4 b, 4 c are attached to the other parts of the structural plate 6, and the piezoelectric sensors 3 a, 3 b and the piezoelectric actuators 4 a, 4 b, 4 c are connected to the controller 5.
- a mechanism for reducing the vibration of the structural plate 6 of the storage device 2 will be described with reference to FIG. FIG.
- FIG. 2 is a simplified illustration of the case where the structural plate 6 is subjected to bending vibration.
- the dotted line in this figure represents the original shape of the storage device 2.
- the controller 5 the feedback circuit shown in FIG. 3 is formed so that the voltage output 7 becomes zero at the target vibration frequency, whereby the control output 8 is sent to the piezoelectric actuators 4 a, 4 b, 4 c. .
- the piezoelectric actuators 4a to 4c generate distortion and deform the structural plate 6 so as to suppress vibration. Thereby, the vibration generated in the structural plate 6 is reduced.
- two sensors are used like the piezoelectric sensors 3a and 3b.
- the number of target vibrations is large, that is, when the number of vibration modes to be dealt with in the storage device 2 is large.
- a plurality of vibrations can be detected by increasing the number of piezoelectric sensors 3. This is because which part vibrates greatly depending on the vibration mode, and even if it is detected by one sensor as in the prior art, there is a vibration mode that is difficult to detect depending on the position of the sensor.
- the vibration mode has a complicated aspect (FIG. 2 is simplified for the sake of explanation). Therefore, it is desirable to affix the piezoelectric sensor 3 not only to the structural plate 6 which is one component but also to other components.
- the plate-like piezoelectric actuator 4 has the same shape and performance according to the same standard, and by using a plurality of these, the driving force as a whole is ensured and vibration is generated according to the characteristics of the target. By determining the number and arrangement of means in advance, it is possible to generate a driving force that can efficiently reduce the vibration of the object.
- a piezoelectric sensor is used as the vibration detection means, but other vibration detection means, for example, a sensor for detecting acceleration, a sensor for detecting displacement and speed, and the like can be used.
- the piezoelectric actuator is used as the vibration generating means, for example, a type of vibration generating means that uses an inertial force that moves the weight with an electromagnetic actuator may be used.
- the signal input / output interface 9 connected to the controller 5 outputs, in the controller 5, a signal state signal 13 proportional to the voltage output 7 sent from the piezoelectric sensors 3a and 3b to the outside. be able to.
- the driving force generation signal 14 input from the outside can be superimposed on the control input 8 and sent to the piezoelectric actuators 4a to 4c.
- the time required for the design is shortened, and by using the sensor and the actuator possessed by the vibration damping device itself, a simple design that does not require any other equipment is enabled. be able to.
- active vibration control devices that are difficult to introduce from the viewpoint of cost and design man-hours despite their high vibration control performance can be applied to a wide variety of devices. It will become apparent with reference to this embodiment that this is possible.
- FIG. 4 shows a second embodiment of the present invention.
- the configurations relating to the piezoelectric sensors 3a and 3b, the piezoelectric actuators 4a to 4c, the controller 5, and the signal input / output interface 9 are the same as those in the first embodiment.
- an active vibration damping device design system 10 including an analysis device 11 and a display device 12 for displaying the analysis result is shown at the end of the signal input / output interface 9 as a configuration suitable for designing the vibration damping device 1. ing.
- the analysis device 11 and the display device 12 are provided with an interface for exchanging signals with the signal input / output interface 9 based on a general personal computer, and the vibration state signal 13 and driving force sent from the signal input / output interface 9 by software. It has a function of transmitting the generation signal 14.
- signals from arbitrary piezoelectric sensors 3a and 3b can be selected on the software, and driving force signals to be sent to the piezoelectric actuators 4a to 4c can also be selected. By doing so, it is possible to generate a driving force in a certain actuator and measure a vibration state generated by a certain sensor on the object (storage device 2) at that time. At this time, the transfer characteristic of the object from the actuator to the sensor can be calculated in the analyzer 11 in the manner of the following equation (1).
- the frequency in question is determined. It differs depending on the case, such as a frequency having a particularly large vibration peak compared to other vibration peaks, or a frequency at which other important components are likely to react excessively with respect to that frequency. Therefore, the designer of the vibration damping device designs the vibration damping device by examining the transmission characteristics while paying attention to the problematic frequency.
- all or a part of each combination of a plurality of sensors and actuators is measured, and for example, a combination in which a vibration peak at a problematic frequency is large is searched for.
- the combination of the sensor and the actuator having the maximum vibration peak is that the driving force from the actuator is effectively acting on the object when the vibration damping device 1 is actually operated, or the vibration of the object is detected. Since the actuator and the sensor are installed at the point where the measurement can be effectively performed, the mounting position of the sensor and the actuator can be determined by this position. Of course, it is also possible to examine characteristics when a plurality of sensors (piezoelectric sensors 3a and 3b in this embodiment) and a plurality of actuators (piezoelectric actuators 4a to 4c in this embodiment) are driven.
- the place where the vibration peak is maximized may not be selected depending on the intention of the designer. This is a case where the object itself is measured and its vibration is reduced.
- the same vibration damping device 1 is applied to other individuals of the same design, it is preferable to make a suitable selection as a whole. It will be hit.
- FIG. 5 shows a design method of a conventional active vibration control device and a design method in this embodiment when a vibration problem of an object occurs.
- the conventional method of designing an active vibration damping device the flow of grasping vibration characteristics of an object, modeling, selection or design of a sensor or actuator, examination of its installation position, design of a control system, etc. In some cases, it takes a considerable amount of time to return to the previous process.
- a plurality of sensors 3a and 3b and actuators 4a to 4c are temporarily installed, and these are switched, and a driving force generation signal and vibration state information are measured and analyzed for each combination of the sensors and actuators.
- the transfer characteristic is calculated from the equation (1) by the device 11.
- the vibration characteristics of the object can be grasped, and the results are displayed as a list on the display device 12, and the combination of the sensor and the actuator that the operator seems most appropriate is selected from the list. At this time, it is easier to adjust the control system at the same time. Then, sensors and actuators are installed at positions that are considered appropriate, and for example, insulation processing and protection processing are performed, and the design of the active vibration damper is completed. Not only is it simpler than the conventional design method, but a series of operations can be advanced only by the active vibration damping device design system 10 of this embodiment, and no other equipment is required.
- FIG. 6 shows an example of a list of transfer characteristics and a control system parameter adjustment screen displayed on the display device 12.
- the transfer characteristics 15 of each combination for example, the curves represented by Aa, Ab, and Ac in FIG. 6 are the transfer characteristics.
- the transfer characteristics 15 displayed at this time are displayed in parallel, for example, Aa, Ab, and Ac in FIG.
- the transfer frequency 15 can also be displayed by superimposing curves representing transfer characteristics represented by, for example, Aa, Ab, and Ac in FIG. It becomes easier to grasp the frequency of the problem in the above, and to compare the magnitude of the vibration at the frequency of the problem.
- control parameter adjustment screen 18 can be displayed so that it can be adjusted, it is more suitable for the design.
- the screens of FIGS. 6 and 7 are examples, and other information indicating the state and information necessary for designing the control parameters can be displayed.
- the active vibration damping device 1 can be designed more easily and quickly than before, and the problem of product development and adjustment can be reduced by quickly solving the vibration problem of the object. be able to.
- this invention is not limited to above-mentioned Example 1, 2, Various modifications are included.
- the first and second embodiments described above are described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described.
- a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment.
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Abstract
Description
大面積の板状圧電素子を貼る場所を確保するのが難しい場合がある、という問題があり、また大面積の圧電素子は製造上の難度からコストが高くなる。そこで本発明の装置では、板状圧電アクチュエータ4を、同一規格によって形状や性能を揃えており、これを複数用いることで、全体としての駆動力を確保するとともに、対象の特性に応じて振動発生手段の数と配置を事前に決めることで、効率的に対象の振動を低減できる駆動力を発生することができる。
=(フーリエ変換後の振動状態情報)
/(フーリエ変換後の対象物への駆動力発生信号) (1)
この伝達特性は、対象物の振動振幅と位相が振動数に応じてどのように変化するかを示しており、一般には振動振幅が大きいところ(振動ピーク)が問題となる振動を表している。センサやアクチュエータの搭載位置が異なると、どの振動モードに影響するかが異なってくるので、伝達特性は選択したセンサとアクチュエータの組み合わせによって変化する。
以上により本実施例にて、従来よりも簡便かつ迅速にアクティブ制振装置1の設計が可能になり、対象物の振動問題を迅速に解決することで、製品開発や調整などの工数を低減することができる。
2 記憶装置
3 圧電センサ
4 板状圧電アクチュエータ
5 コントローラ
6 構造板
7 電圧出力
8 制御信号
9 信号入出力インタフェース
10 アクティブ制振装置設計システム
11 解析装置
12 表示装置
13 振動状態信号
14 駆動力発生信号
15 伝達特性
16 強調表示
17 周波数軸
18 制御パラメータの調整画面
Claims (6)
- 振動を低減すべき対象の構造体にとりつける制振装置であって、
対象の一部分の振動を検出する振動検出手段と、
対象の一部分にひずみを生じさせる振動発生手段と、
前記振動検出手段からの信号により、前記振動発生手段の駆動力を決定する制御信号を発生する制御手段と、
前記制御手段と信号の授受を行う信号入出力手段とを備え、
外部から前記信号入出力手段を介して駆動力発生信号を受取り、それに応じた駆動力を前記制御手段によって発生し、これにより選択された前記振動発生手段を駆動し、
一方、選択された前記振動検出手段から得られた振動状態情報を前記制御手段から前記信号入出力手段を介して外部に出力することを特徴とする制振装置。
- 請求項1に記載の制振装置において、
前記信号入出力手段の先に設けた信号解析手段と、
前記信号解析手段による計算結果を表示する表示装置とを備え、
前記駆動力発生信号と前記振動状態情報を元に、前記駆動力発生信号から前記振動状態情報への伝達特性を計算し、その結果を表示装置に表示することを特徴とする制振装置。
- 振動を低減すべき対象の構造体にとりつける制振装置の設計方法であって、
対象の一部分の振動を検出する複数の振動検出手段と、
対象の一部分にひずみを生じさせる複数の振動発生手段と、
前記振動検出手段からの信号により、前記振動発生手段の駆動力を決定する制御信号を発生する制御手段と、
前記制御手段と信号の授受を行う信号入出力手段と、
前記信号入出力手段の先に設けた信号解析手段と、
前記信号解析手段による計算結果を表示する表示装置とを備えた制振装置の設計方法において、
複数の振動検出手段と複数の振動発生手段を切り替えて、その各々の組み合わせに対して駆動力発生信号と振動状態情報を測定し、信号解析手段によって伝達特性を計算した結果を、前記表示装置上に一覧表示し、その中から操作者がもっとも適切と思われる振動検出手段と振動発生手段の組み合わせを選択する制振装置の設計方法。
- 請求項3に記載の制振装置の設計方法において、
選択した振動検出手段と振動発生手段の組み合わせに対して、前記制御手段における制御パラメータを操作者が変更できることを特徴とする制振装置の設計方法。
- 請求項3あるいは4に記載の制振装置の設計方法において、
前記表示装置上に、複数の駆動力発生信号と振動状態情報の組み合わせによって得られた伝達特性を振動数軸を合わせて並列に表示することを特徴とする制振装置の設計方法。
- 請求項3あるいは4に記載の制振装置の設計方法において、
前記表示装置上に、複数の駆動力発生信号と振動状態情報の組み合わせによって得られた伝達特性を重ねて表示することを特徴とする制振装置の設計方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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EP14890362.8A EP3135953A4 (en) | 2014-04-25 | 2014-04-25 | Active vibration damping device and design method |
US15/306,418 US10107355B2 (en) | 2014-04-25 | 2014-04-25 | Active damping device and design method |
PCT/JP2014/061648 WO2015162772A1 (ja) | 2014-04-25 | 2014-04-25 | アクティブ制振装置および設計方法 |
JP2016514654A JP6408564B2 (ja) | 2014-04-25 | 2014-04-25 | アクティブ制振装置および設計方法 |
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JPH09291968A (ja) * | 1996-04-30 | 1997-11-11 | Sumitomo Electric Ind Ltd | 制振型アンテナ装置 |
JPH10227149A (ja) * | 1997-02-18 | 1998-08-25 | Takenaka Komuten Co Ltd | 圧電アクチュエータの設置方法 |
JP2000275370A (ja) * | 1999-03-25 | 2000-10-06 | Canon Inc | ステージおよびアクティブ除振装置の補償パラメータ更新方法 |
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WO1999053217A1 (fr) * | 1998-04-09 | 1999-10-21 | Nikon Corporation | Systeme d'elimination des vibrations et d'exposition |
US8231098B2 (en) * | 2004-12-07 | 2012-07-31 | Newport Corporation | Methods and devices for active vibration damping of an optical structure |
JP2007120711A (ja) | 2005-10-31 | 2007-05-17 | Kajima Corp | アクティブ制振システムの設計方法 |
JPWO2014192088A1 (ja) | 2013-05-29 | 2017-02-23 | 株式会社日立製作所 | アクティブ制振装置及びアクティブ制振方法 |
EP3037222A4 (en) * | 2013-09-24 | 2017-04-12 | Sony Olympus Medical Solutions Inc. | Medical robot arm device, medical robot arm control system, medical robot arm control method, and program |
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JPH09291968A (ja) * | 1996-04-30 | 1997-11-11 | Sumitomo Electric Ind Ltd | 制振型アンテナ装置 |
JPH10227149A (ja) * | 1997-02-18 | 1998-08-25 | Takenaka Komuten Co Ltd | 圧電アクチュエータの設置方法 |
JP2000275370A (ja) * | 1999-03-25 | 2000-10-06 | Canon Inc | ステージおよびアクティブ除振装置の補償パラメータ更新方法 |
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JP6408564B2 (ja) | 2018-10-17 |
US10107355B2 (en) | 2018-10-23 |
EP3135953A1 (en) | 2017-03-01 |
EP3135953A4 (en) | 2018-01-31 |
JPWO2015162772A1 (ja) | 2017-04-13 |
US20170045109A1 (en) | 2017-02-16 |
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