WO2015158181A1 - Spectromètre à transformée de fourier pour imagerie de biréfringence en temps réel basé sur une structure différentielle - Google Patents

Spectromètre à transformée de fourier pour imagerie de biréfringence en temps réel basé sur une structure différentielle Download PDF

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WO2015158181A1
WO2015158181A1 PCT/CN2015/072779 CN2015072779W WO2015158181A1 WO 2015158181 A1 WO2015158181 A1 WO 2015158181A1 CN 2015072779 W CN2015072779 W CN 2015072779W WO 2015158181 A1 WO2015158181 A1 WO 2015158181A1
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Prior art keywords
beam splitter
polarizing beam
spectral
light
image
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Ceased
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PCT/CN2015/072779
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English (en)
Inventor
Peng Jin
Shuaishuai ZHU
Yu Zhang
Jie Lin
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Harbin Institute of Technology
Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology
Harbin Institute of Technology Shenzhen
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/447—Polarisation spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4531—Devices without moving parts

Definitions

  • This invention relates to a real-time birefringent imaging Fourier transform spectrometer based on differential structure, which can be used for acquiring the objective image and the spectrum on every pixel of the image in a single integral time of CCD.
  • Spectrometer is wildly used in agriculture, astronomy, biomedical sciences, chromaticity measurement and many other fields. Spectrometer can be divided into two categories according to different principles: one is dispersive spectrometer based on dispersive prism or grating, which can acquire the objective spectrum directly; the other one is interferometer spectrometer based on Michelson interferometer or other kind of interferometer, which can obtain a interferogram, and the objective spectrum can be acquired by performing the Fourier transformation of the interferogram.
  • Dispersive spectrometer as a mature technology has stable performance, but the structure is relatively complex. Meanwhile high spatial resolution and high spectral resolution require a small entrance slit, which limits the throughput and signal-to –noise ratio.
  • Interferometer spectrometer using the Fourier transform of two-beam interference interferogram to obtain spectral data has large throughput, high spectral resolution, and wide free spectral range.
  • Early interferometer spectrometer mostly based on Michelson interferometer whose throughput is about 190 times the grating spectrometer at the same spectral resolution. But these instruments require stable and precision scanning mirrors, therefore they cannot obtain the objective spectral information in real-time, and their use in hostile environments requires significant sophistication in construction.
  • the imaging spectrometer presented by Michael W. Kudenov et al includes a object lens, a field stop, a collimator lens, a lenslet array, a generator, two Nomarski prisms, a half-wave plate, an analyzer , a CCD.
  • the objective light transmits through the object lens, and the image forms on the field stop. After collimated by collimating lens, the light hits the lenslet array. Then the light transmits through the generator, the fist Nomarski prism, the half-wave plate, the second Nomarski prism and the analyzer successively. After that the transmitted light is resolved into two equal amplitude, orthogonally polarized components that converge on the CCD.
  • each sub-image samples a different “slice” of the 3D interferogram data cube.
  • an interferogram and its corresponding spectrum can be calculated at each spatial location within the objective image in a single integral time of CCD.
  • this instrument has a low spatial resolution.
  • the optical efficiency of the instrument is about 25%due to the generator and analyzer. This issue could be a serious problem when the objective light is weak and a high signal-to-noise ratio is demanded.
  • this invention presents a real-time birefringent imaging Fourier transform spectrometer based on differential structure. Comparing with the prior art, this invention can not only capture the image and spectral information of a moving object, but also greatly improve the spatial resolution and signal-to-noise ratio which is significant in accurate measurement field.
  • the measuring equipment of this invention includes:
  • the objective light transmits through the object lens, and the image forms on the field stop. After collimated by the collimating lens, the light reaches the first polarizing beam splitter and is split into two orthogonally polarized components: reflected light and transmitted light. The reflected light is imaged by the eye lens onto the first CCD. The transmitted light hits the lenslet array along the original direction. Then the transmitted light transmits through the birefringent polarization interferometer which comprises: the first half-wave plate, the fist Nomarski prism, the second half-wave plate, the second Nomarski prism and the third half-wave plate. After that the transmitted light is resolved into two equal amplitude, orthogonally polarized components by the third polarizing beam splitter. Finally these two components hit the second CCD and the third CCD respectively.
  • a 3D interferogram cube can be obtained by taking the difference between the images obtained by the second CCD and the third CCD. Performing the required post-processing calculations produces the spectrum at each spatial location within the objective image.
  • this invention has several improvements: first, we set the first polarization beam splitter between the collimator lens and the lenslet array, adding an imaging branch; secondly, we alter the conventional optical structure to the differential structure by setting the second polarization beam splitter.
  • the present invention has the following advantages:
  • the spatial resolution is greatly improved.
  • the imaging branch can obtain a high spatial resolution, colorful image, which can be combined with the low spatial resolution, high spectral resolution image obtained by the spectral branch.
  • the optical efficiency and the signal-to-noise ratio are greatly improved.
  • the differential structure can intensively restrain the common-mode error, and reduce 50%of the optical loss because of casting off the analyzer.
  • Fig. 1 is schematic illustration of the real-time birefringent imaging Fourier transform spectrometer based on differential structure based on differential structure.
  • Fig. 2 is schematic illustration of the birefringent polarization interferometer.
  • Fig. 3 is the distribution curve of the optical path difference.
  • Fig. 4 is isometric diagram of lenslet array and the spectral branch.
  • Fig. 5 is schematic illustration describing the distribution of the optical path difference.
  • Fig. 6 is schematic illustration of the 3D interferogram cube obtained by the transmitted spectral branch.
  • Fig. 7 is schematic illustration of a single Fresnel zone plate.
  • Fig. 8 is schematic illustration of a 4 ⁇ 4 Fresnel zone plate array.
  • a real-time birefringent imaging Fourier transform spectrometer based on differential structure comprises: a object lens1, a field stop 2, a collimator lens 3, a lenslet array 4, the first polarizing beam splitter 51, a eye lens 52, the CCD of imaging branch 53, the first half-wave plate 61, the first Nomarski prism 62, the second half-wave plate 63, the second Nomarski prism 64, the third half-wave plate 65, the second polarizing beam splitter 71, the CCD of transmitted spectral branch 72, the CCD of reflected spectral branch 73.
  • the objective light transmits through the object lens 1, and the image forms on the field stop 2.
  • the light After collimated by collimating lens 3, the light reaches the first polarizing beam splitter 51 and is split into two orthogonally polarized components: reflected light and transmitted light.
  • the reflected light is denoted as the imaging light
  • the transmitted light is denoted as the spectral light.
  • the imaging light is imaged by the eye lens 52 onto the CCD of imaging branch 53.
  • the spectral light After transmitting through the first polarizing beam splitter 51 the spectral light hits the lenslet array 4 along the original direction. Then the spectral light reaches the birefringent polarization interferometer which comprises: the first half-wave plate 61, the first Nomarski prism 62, the second half-wave plate 63, the second Nomarski prism 64 and the third half-wave plate 65 as shown in Fig. 2.
  • the first half-wave plate 61 whose fast axis is tilted with respect to the x-axis by an angle of 22.5° is provided to orient the polarization orientation of the spectral light at 45 degrees with respect to the x-axis.
  • the first Nomarski prism 62 and the second Nomarski prism 64 consist of two birefringent crystal prisms with wedge angle ⁇ 1 and ⁇ 2 respectively. Note that one of the fast axes in each Nomarski prism is tilted with respect to the x-axis by an angle ⁇ .This enables a real fringe localization plane to be formed outside of the prism.
  • the second half-wave plate 63 is placed between the first Nomarski prism 62 and the second Nomarski prism 64. Orienting the fast axis of the second half-wave plate 63 can rotate the polarization eigenmodes of the second Nomarski prism 64 by 90°. Since then the localization plane is compensated to lie within the xy plane.
  • the spectral light can be resolved into two equal amplitude, orthogonally polarized components by the Nomarski prism.
  • the polarization orientations of these two components are along the x-axis and the y-axis respectively.
  • the third half-wave plate 65 orienting at 22.5° with respect to the x-axis is provided to orient the polarization orientations of the components at 45° and 135° with respect to the y-axis respectively.
  • the second polarizing beam splitter 71 setting behind the birefringent polarization interferometer is provided to split the spectral light into two components hitting the CCD of transmitted spectral branch 72 and the CCD of reflected spectral branch 73 respectively.
  • the spectral light is monochromatic and its wavenumber is ⁇ .
  • the optical path difference between the components of the spectral light after transmitting through the second Nomarski prism 64 is ⁇ . So the Jones vector of the spectral light is:
  • the Jones matrix of the third half-wave plate 65 is:
  • the Jones matrices of the second polarizing beam splitter 71 for the transmitted light and the reflected light are:
  • the Jones vectors of the light we acquire on the CCD of transmitted spectral branch 72 and the CCD of reflected spectral branch 73 are:
  • the spectral density functionB ( ⁇ ) of the objective light is the Fourier Transform of the interference intensityI ( ⁇ ) .
  • Nomarski prisms used in this invention is made from calcite and the distribution curve of the optical path difference versus the displacement from the zero-OPD is shown in Fig. 3.
  • each sub-image is numbered 1-16, with images 1 and 16 representing the most negative and positive OPD samples, respectively. Consequently, each sub-image samples a different “slice” of the 3D interferogram cube, as depicted in Fig. 6, which has dimensions (x i , y i , OPD) ; here, x i and y i are the spatial coordinates within the sub-images.
  • the sub-images obtained by the CCD of reflected spectral branch 73 can make up a 3D interferogram cube too.
  • an interferogram and its corresponding spectrum can be calculated at each spatial location within the scene.
  • Performing the required post-processing calculations produces the spectral density functionB ( ⁇ ) at each pixel within the objective image.
  • the imaging branch can obtain a high spatial resolution, colorful image, which can be combined with the low spatial resolution, high spectral resolution image obtained by the spectral branch.
  • the high spatial resolution, high spectral resolution image by an appropriate interpolation.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

La présente invention concerne un spectromètre à transformée de Fourier pour imagerie de biréfringence en temps réel basé sur une structure différentielle. L'invention définit un diviseur de faisceau de polarisation pour ajouter une branche d'imagerie. Par ailleurs, l'invention modifie la structure optique classique en structure différentielle par réglage d'un autre diviseur de faisceau de polarisation. La différence entre lesdits deux interférogrammes obtenus par deux branches de la structure différentielle en tant qu'interférogramme final et la mise en oeuvre des calculs de post-traitement requis produisent le spectre à chaque pixel. Dans l'invention, la structure différentielle permet d'empêcher intensivement l'erreur de mode commun et 50 % de la perte optique est évitée en raison du calibrage de l'analyseur ; une image à haute résolution spatiale et spectrale est acquise par combinaison de la haute résolution spatiale, de l'image colorée à faible résolution spatiale, de l'image à haute résolution spectrale.
PCT/CN2015/072779 2014-02-18 2015-02-11 Spectromètre à transformée de fourier pour imagerie de biréfringence en temps réel basé sur une structure différentielle Ceased WO2015158181A1 (fr)

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CN201410150852.9 2014-04-15
CN201410150852.9A CN103900693B (zh) 2014-02-18 2014-04-15 一种差分快照式成像光谱仪与成像方法

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CN104880253B (zh) * 2014-02-18 2016-11-16 哈尔滨工业大学 一种基于偏振分光器的高空间分辨率快照式成像方法
CN108151880B (zh) * 2017-12-20 2019-11-15 中国科学院长春光学精密机械与物理研究所 基于阵列相位反射镜快照成像光谱仪及制作方法
CN108151878B (zh) * 2017-12-20 2020-03-06 中国科学院长春光学精密机械与物理研究所 基于微成像镜阵列与阵列相位反射镜的快照成像光谱仪

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