WO2015137319A1 - Non-contact floating transport device - Google Patents

Non-contact floating transport device Download PDF

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Publication number
WO2015137319A1
WO2015137319A1 PCT/JP2015/056955 JP2015056955W WO2015137319A1 WO 2015137319 A1 WO2015137319 A1 WO 2015137319A1 JP 2015056955 W JP2015056955 W JP 2015056955W WO 2015137319 A1 WO2015137319 A1 WO 2015137319A1
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WO
WIPO (PCT)
Prior art keywords
swirl
swirl flow
gas
force
swirling
Prior art date
Application number
PCT/JP2015/056955
Other languages
French (fr)
Japanese (ja)
Inventor
佐藤　光
伊藤　彰彦
貴裕 安田
Original Assignee
オイレス工業株式会社
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Filing date
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Application filed by オイレス工業株式会社 filed Critical オイレス工業株式会社
Publication of WO2015137319A1 publication Critical patent/WO2015137319A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion

Definitions

  • a swirl flow generating portion that generates a swirl flow is disposed on a transport path surface that transports a transported object, and the swirl flow generates a driving force for the transported object while floating the transported object, thereby transporting the transported object.
  • the invention relates to a non-contact type levitation transport device that levitates and transports objects in a completely non-contact state, particularly from a glass substrate for display used in flat panels for solar cells, mobile phones, liquid crystal televisions, liquid crystal monitors for personal computers, etc.
  • the present invention relates to a non-contact type levitation conveyance device that levitates and conveys the object to be conveyed.
  • an injection port is provided on the back surface of a ring-shaped member having a circular through-hole penetrating from the front surface to the back surface, and air is injected from the injection port, whereby the surface of the ring-shaped member is A swirling flow forming body that generates a swirling flow in a direction away from the front surface on the side and a flow of air in the back surface direction in the vicinity of the opening of the through hole on the front surface side of the ring-shaped member.
  • Non-contact transfer device that has two or more on the transfer surface, and floats and conveys the object to be conveyed using a contact type driving mechanism while maintaining high flying height accuracy of the object to be conveyed made of liquid crystal glass or the like.
  • the swirl directions of the swirl flow of the swirl flow forming body are changed so as to maintain the flying height accuracy by avoiding the rotation and wobbling of the conveyed object on the conveyance surface.
  • the swirl force of the swirl flow sent from each swirl flow forming body onto the transport surface is intentionally canceled and swirled in the gap between the bottom surface of the object to be transported and the transport surface
  • a contact-type drive mechanism such as a friction roller or a belt. It is necessary to apply a driving force for transferring the object to the object.
  • the present invention solves the problems of the prior art as described above, that is, the object of the present invention is to use the swirl force of swirl flow without using a contact type drive mechanism. It is an object of the present invention to provide a non-contact type levitation conveyance device that smoothly conveys an object to be conveyed while floating in a completely non-contact state.
  • the swirl flow that generates a swirl flow composed of gas is disposed on a flat conveyance path surface that conveys the object to be conveyed, and the swirl flow that sequentially overflows from the swirl flow formation unit.
  • a non-contact type levitation conveyance device that conveys the conveyance object with a conveyance force generated by the swirling force of the swirling flow while floating the conveyance object with a gap between the bottom surface of the conveyance object and the conveyance path surface
  • a pair of the swirl flow forming portions are arranged to be spaced apart from each other in the width direction of the transport road surface, and the swirl flow swirl directions respectively generated in the swirl flow formation portion are the width direction of the transport road surface.
  • Gas receiving recesses that are set in opposite directions and receive gas that overflows and merges as a swirling flow from the pair of left and right swirling flow forming portions extend in the transport direction between the pair of left and right swirling flow forming portions.
  • the existing gas merging area By being, it is to solve the aforementioned problems.
  • a plurality of the swirl flow forming portions are arranged apart from each other in the conveyance direction of the conveyance path surface. And the above-described problems are further solved by setting the swirling directions of the swirling flows respectively generated in the swirling flow forming portions to be the same in the transport direction of the transport path surface. is there.
  • the swirl flow forming portion is provided below the conveyance path surface so as to be on the conveyance path surface. And a gas injection port for generating a swirling flow by injecting the gas into a swirl forming space region surrounded by the peripheral side wall from a tangential direction of the peripheral side wall.
  • the invention according to claim 4 includes a gas receiving recess that exists at a position lower than the transfer path surface.
  • the bottom surface portion is opened toward the back surface side of the conveyance path surface, thereby further solving the above-described problem.
  • the invention according to claim 5 includes a gas receiving recess that exists at a position lower than the transfer path surface.
  • the bottom surface portion is formed to be freely opened and closed, thereby further solving the above-described problems.
  • the invention according to claim 6 includes, in addition to the configuration of the non-contact type levitation transfer device according to any one of claims 1 to 5, the swirl flow forming unit, a transfer path surface, an object to be transferred, and the like.
  • the above-described problems are further solved by disposing the gas release holes for escaping the gas that overflows and stays excessively in the gap of the gas and is distributed on the conveyance path surface.
  • the swirl flow forming unit in addition to the configuration of the non-contact type levitation transfer device according to any one of the first to sixth aspects, the swirl flow forming unit generates the gas injection force.
  • the above-described problem is further solved by being detachably attached to the transport path surface as another part that can be alternatively selected.
  • the swirl flow forming unit that generates the swirl flow composed of gas is disposed on the flat conveyance path surface that conveys the object to be conveyed, so that the swirl flow formation unit sequentially overflows.
  • the object to be conveyed can be levitated, and the following specific effects can be achieved.
  • a pair of swirl flow forming portions are arranged to be separated from each other in the width direction of the conveyance path surface, and are respectively generated in the swirl flow forming portion.
  • the swirling direction of the swirling flow is set to be opposite to each other in the width direction of the conveying road surface, and the gas receiving recesses for receiving the gas that overflows and merges as a swirling flow from the pair of left and right swirling flow forming portions, respectively.
  • the swirl flow acting on the object to be transported by the pair of left and right swirl flow forming portions and moving toward the front area in the transport direction Since the transport direction of the object to be transported is directed based on the magnitude relationship between the acting force and the swirling flow acting force toward the rear area in the transport direction, the contact type is utilized by utilizing the swirling force of the swirling flow.
  • both swirling flows are dispersed in the radial direction and the swirling flow acting force is reduced, but between the pair of left and right swirling flow forming portions, Since both swirl flows do not stay in the gap space formed between the conveyance path surface and the object to be conveyed and flow into the gas receiving recess without any stagnation, a flow path to the front area in the conveyance direction is formed, so that the gas reception
  • the swirl force acting force in the gas receiving recess is larger than the swirl force acting force generated on both outer sides in the road width direction in the pair of left and right swirl flow forming portions, Since the transmitted force is greater in the swirl flow acting force acting toward the front area in the conveyance direction than the swirl flow acting force acting toward the rear area in the conveyance direction, a contact type drive mechanism should be provided. Without contact It can be smoothly conveyed toward the conveyed object to the front region of the conveying direction in
  • the swirling radius of the swirling flow increases due to the centrifugal force of the swirling flow.
  • the atmospheric pressure generated in the vicinity of the center of the swirling flow is relatively lower than the atmospheric pressure generated in the swirling portion of the swirling flow, and this reduced atmospheric pressure acts as a negative pressure on the object to be transported.
  • the transport force to the front area in the transport direction can be increased. That is, when the size of the cross-sectional area of the gas receiving recess as viewed from the transport direction is adjusted, the flow rate of the swirling flow that flows into the gas receiving recess changes, so that the transport force to the front area in the transport direction can be adjusted.
  • the swirl flow forming portions are spaced apart from each other in the conveyance direction of the conveyance road surface.
  • a plurality of sets of swirls arranged in the transport direction are arranged in such a manner that the swirl directions of the swirl flows respectively generated in the swirl flow forming section are set in the same direction as the transport direction of the transport path surface. Since each of the swirling flows generated in the flow forming section acts on the object to be transported, a swirling flow acting force in the transport direction can be applied, so that the transport force can be further increased.
  • the swirl flow forming portion is provided below the conveyance path surface and the conveyance road surface
  • a gas injection port that generates a swirl flow by injecting gas from the tangential direction of the peripheral side wall into the swirl forming space region surrounded by the peripheral side wall Since a swirl flow is formed with a simple and compact configuration, a non-contact type levitation transport device can be simplified without requiring a rotating structure such as a motor.
  • the gas reception located at a position lower than the conveyance road surface Since the bottom surface portion of the recess is open toward the back surface side of the conveyance path surface, a sufficient escape space for the swirling gas that has entered the gas receiving recess is formed, and the gas flow is not hindered. Compared with when the is not opened, the swirl force acting force acting toward the front region in the conveying direction can be increased to increase the conveying force.
  • the gas reception existing at a position lower than the conveyance road surface Since the flow rate of the swirling flow that flows into the gas receiving recess changes because the bottom surface portion of the recess is formed to be openable and closable, the magnitude of the swirling flow acting force acting toward the front area in the transport direction and the transport direction
  • the moving direction of the conveyed object can be switched by changing the magnitude relationship with the magnitude of the swirling flow acting force acting toward the rear area.
  • the magnitude of the swirl flow acting force acting toward the front area in the transport direction and the magnitude of the swirl flow acting force acting toward the rear area in the transport direction Since the magnitude of the swirl force acting force acting toward the front area in the conveyance direction changes while maintaining the magnitude relationship with the distance, the conveyance force toward the front area in the conveyance direction can be adjusted.
  • the conveying path surface and the object to be conveyed from the swirl flow forming portion are distributed on the conveyance path surface, so that the gas release holes serve as escape areas for the excessively stagnant gas, and the swirl flow Since the flow of gas that sequentially overflows from the forming part is not hindered, the swirl flow acting force acting toward the front area and the rear area in the transport direction is increased compared to when the gas release hole is not provided. The difference can also be increased to increase the conveying force.
  • the swirl flow forming portion provides the gas injection force. Since it is detachably attached to the transport road surface as a separately selectable separate part, the strength of the swirling force due to swirling flow can be changed simply by changing the swirling flow forming section. It is possible not only to adjust the swirl flow acting force in the transport direction without using force adjustment means but also to arbitrarily adjust the transport force, as well as to diversify the materials of the swirl flow forming part and the manufacturing processing options it can.
  • FIG. 3 is an enlarged perspective view showing a swirl flow forming portion at a location denoted by reference numeral 2 in FIG. 1.
  • FIG. 3 is a conceptual cross-sectional view illustrating the principle of generating a swirling flow and a force to draw downward by the swirling flow forming unit of the present invention.
  • the reference figure which shows the swirl flow action force of the structure which is not providing the gas acceptance recessed part as reference.
  • FIG. 6 is an enlarged plan view as viewed from reference numeral 5 in FIG. 1, illustrating a principle of generating a conveyance force in the first embodiment.
  • a swirl flow forming unit that generates a swirl flow composed of gas is disposed on a flat conveyance path surface that conveys the object to be conveyed.
  • a non-contact type levitation transport device that floats a transported object by being interposed in a gap between the transport path surface and transports the transported object with a transport force generated by a swirling force of a swirling flow.
  • a pair of left and right is arranged apart from each other in the width direction of the road surface, and the swirl directions of the swirl flows generated in the swirl flow forming portions are set to be opposite to each other in the width direction of the conveyance road surface.
  • the gas receiving recesses for receiving the gas that overflows and merges as the swirl flow from the swirl flow forming portion are provided in the gas merge region extending in the transport direction between the pair of left and right swirl flow forming portions.
  • a pair of left and right swirl flow forming portions The swirling direction of the swirling flow set respectively acts on the object to be conveyed by the pair of left and right swirling flow forming portions, and the swirling flow acting force toward the front area in the conveying direction and the swirling flow acting force toward the rear area in the conveying direction
  • the direction of the transported object is directed based on the magnitude relationship between them, and the transported object can be constructed with a simple device configuration without using a contact-type drive mechanism by utilizing the swirling force of the swirling flow. As long as it is smoothly conveyed while floating in a non-contact state, any specific embodiment may be used.
  • a specific embodiment of the swirl flow forming portion employed in the present invention may be directly formed on the base portion itself constituting the conveyance path surface by drilling or cutting, but a chip by resin processing or the like. It may be formed separately from the base part that constitutes the conveyance path surface, such as a shaped molded product, and when the swirl flow forming part is formed separately from the base part, It is more preferable because the options for manufacturing can be diversified. Further, the specific structure of the swirl flow forming portion may be anything as long as it forms a swirl flow from a gas such as air.
  • the swirl flow may be formed by the gas injected from the gas injection port of the swirl flow forming section flowing along the peripheral side wall having a depth of about 3 to 10 mm of the guide recess for guiding in the swirl direction.
  • the shape of the guide recess in plan view is not particularly limited.
  • the specific shape of the guide recess may be, for example, a circular shape, an annular shape, an elliptical shape, a polygonal shape, a circular shape with a notch formed therein, and more specifically, a circular cup with a hook. The shape is more preferable.
  • an air inlet and a fan may be provided in a guide recess provided with a peripheral side wall, and a swirling flow directed upward from the guide recess surrounded by the peripheral side wall may be formed by rotating the fan.
  • sequence form of the swirl flow formation part in this invention as mentioned above, the turning direction of the swirl flow set to the pair of left and right swirl flow formation parts is the pair of left and right swirl flow formation parts.
  • any arrangement form may be used as long as it constructs a levitating conveyance mechanism that can utilize the swirl force of the swirling flow to convey the object to be conveyed while levitating.
  • the pair of swirl flow forming portions that are separated from each other in the width direction of the conveyance road surface may be arranged in the same positional relationship in the conveyance direction, or arranged in a positional relationship that is shifted from each other in the conveyance direction. May be.
  • region extended in a conveyance direction between a pair of right-and-left swirl flow formation parts, and a left-right pair swirl flow formation Any shape structure may be used as long as it accepts the gas that overflows and merges as a swirling flow, for example, the bottom portion of the gas receiving recess located at a lower position than the conveyance path surface is the back surface of the conveyance path surface It may be open toward the side, or the bottom part of the gas receiving recess located lower than the conveyance path surface may be formed to be openable and closable.
  • the gas receiving recess It is possible to increase the conveying force by increasing the swirl flow acting force acting toward the front area in the conveying direction compared to when the is not opened.
  • the front area in the conveying direction It headed it is possible to switch the moving direction of the swirling flow acting force magnitude and the conveying direction of the swirling flow acting force that acts rearward region size conveyed object by changing the magnitude relation between of acting.
  • the specific installation form of the gas receiving recess may be provided in the gas merging region extending in the transport direction between the pair of left and right swirl flow forming portions.
  • the pair of left and right swirl flows Swirl flow from a pair of left and right swirl flow forming portions installed in a slightly forward area, an intermediate area, a slightly rear area or a combination of at least one of these.
  • the conveyance path surface in this invention is flat, and it goes without saying that if the processing accuracy of this flat conveyance path surface is high, a more stable conveyance state of the object to be conveyed can be obtained.
  • the guide plate is transported in order to prevent the gas overflowing from the swirl flow forming part from excessively leaking from both side edges in the road width direction and to guide and restrict the object to be transported in the transport direction.
  • a thin plate made of a material such as glass, plastic, metal, etc. It is a glass substrate for display having a thickness of about 0.1 to 0.5 mm used for a flat panel for a battery, a mobile phone, a liquid crystal television, a liquid crystal monitor for a personal computer, and the like.
  • FIG. 1 is a perspective view showing a non-contact type levitation conveying apparatus 100 according to the first embodiment of the present invention
  • FIG. 2 is an enlarged perspective view showing a swirl flow forming portion 130A at a location 2 in FIG.
  • FIG. 3 is a conceptual cross-sectional view showing the principle of generation of the swirling flow R and the force D to be drawn downward by the swirling flow forming portions 130A and 130B of the present invention
  • FIG. 5 is a reference diagram showing a swirl flow acting force having a configuration in which a receiving recess is not provided
  • FIG. 5 is an enlarged plan view seen from the reference numeral 5 in FIG. 1 and shows the principle of generating a conveying force in the first embodiment.
  • FIG. 1 is a perspective view showing a non-contact type levitation conveying apparatus 100 according to the first embodiment of the present invention
  • FIG. 2 is an enlarged perspective view showing a swirl flow forming portion 130A at a location 2 in FIG.
  • FIG. 3 is a
  • the non-contact type levitation transfer apparatus 100 has, for example, thicknesses of swirl flow forming portions 130 ⁇ / b> A and 130 ⁇ / b> B that generate a swirl flow R made of gas.
  • a flat conveyance path surface 111 that conveys a thin plate-like object C made of a display glass substrate of about 0.3 mm
  • the swirl flow R that sequentially overflows from the swirl flow forming portions 130A and 130B is conveyed.
  • the transported object C is floated by being interposed in the gap between the bottom surface of the transported object C and the transport path surface 111 and transported by the transporting force generated by the swirling force of the swirling flow R.
  • the non-contact type levitation transfer apparatus 100 includes a base portion 110 and a machine base frame 120 that supports the base portion 110. Then, on the conveyance path surface 111 facing the object C to be conveyed in the base part 110, round cup-shaped swirl flow forming portions 130A and 130B formed by resin molding are provided in the path width direction S of the conveyance path surface 111. Only one pair, that is, one set, is disposed apart from each other on the left and right.
  • the swirl flow forming portions 130A and 130B are provided on the peripheral side wall 131a of the bottomed guide recess 131 provided below the transport path surface and opening on the transport path surface, and the peripheral side wall from the tangential direction of the peripheral side wall 131a.
  • the swirl flow forming portion 130 ⁇ / b> A guides air along a guide recess 131 that guides air in the swirl direction and a cylindrical peripheral side wall 131 a that surrounds the guide recess 131.
  • It has two gas injection ports 132 to inject.
  • these two gas injection ports 132 are provided at a position that bisects the cylindrical peripheral side wall 131a surrounding the guide recess 131, so that the swirling flow R can be reliably and stably provided. It is supposed to be generated.
  • the swirl flow forming portions 130A and 130B configured as described above overflow the swirl flow R between the transport path surface 111 and the transported object C, so that the transported object C is levitated about 0.05 mm, for example. I am letting.
  • the relationship between the structure of the swirl flow forming unit 130A and the structure of the swirl flow forming unit 130B is that the virtual center line in the T-axis direction (conveying direction of the object C) between the swirl flow forming units 130A and 130B. This is a line-symmetrical relationship as a reference, and the swirling directions of the swirling flows Ra and Rb generated in the swirling flow forming portions 130A and 130B (see FIGS.
  • the round cup-shaped member with a flange formed by resin molding forming the swirl flow forming portions 130A and 130B is formed as a member separate from the base portion 110 and is fitted into the base portion 110. However, it may be formed integrally with the base portion 110 itself.
  • the gas receiving recess 140 is provided in a gas merging area A extending in the transport direction T between the pair of left and right swirl flow forming portions 130A and 130B.
  • the gas receiving recess 140 has an elongated rectangular recess toward the transport direction T in order to receive air that overflows and merges as a swirl flow Ra, Rb from the pair of left and right swirl flow forming portions 130A, 130B, respectively. It is configured as follows.
  • the machine base frame 120 is provided so that the posture of the base portion 110 with respect to the horizontal direction can be adjusted, and in this embodiment, the installation posture of the conveyance path surface 111 of the base portion 110 is adjusted to be horizontal.
  • vortex flow R continuously generate
  • the swirl flow R moves upward from the peripheral side wall 131a of the guide recess 131 and leaves the peripheral wall 131a of the guide recess 131, the swirl radius of the swirl flow R is swirled by the centrifugal force of the overflow swirl flow R. Enlarge with reference to the swirling center of flow R. That is, the swirl flow R swirls while spreading in the radial direction.
  • a swirl force acting force having a configuration in which no gas receiving recess is provided will be described with reference to FIG.
  • a pair of swirl flow forming portions 130 ⁇ / b> A and 130 ⁇ / b> B are disposed apart from each other in the width direction S of the conveyance path surface 111.
  • the U axis indicates the flying direction (vertical direction).
  • the swirl directions of the swirl flows Ra and Rb generated in the swirl flow forming portions 130 ⁇ / b> A and 130 ⁇ / b> B are set to be opposite to each other in the road width direction S of the conveyance path surface 111.
  • the swirling flow acting force of the swirling flow Ra acting in the direction opposite to the direction of the T-axis arrow is represented by fa1.
  • the swirling flow acting force of the swirling flow Ra acting in the direction of the T-axis arrow is represented by fa2.
  • the swirling flow acting force of the swirling flow Rb acting in the direction opposite to the direction of the T-axis arrow is expressed as fb1.
  • the swirl flow acting force of the swirl flow Rb acting in the direction of the T-axis arrow is defined as fb2.
  • the sum of fa1 and fb1 is the sum of fa2 and fb2, and the sum of fa2 and fb2 is the sum of fa2 and fb2, and the sum of fa2 and fb2.
  • the swirl force acting force acting on the front area is F2.
  • both swirl flows Ra and Rb lose their escape points and become mutual.
  • the swirl forces of the swirl flows Ra and Rb that is, swirl flow acting forces fa1 and fb1 are reduced by interference and disturbance.
  • both the swirl flows Ra and Rb do not interfere with each other on both outer sides 111b in the road width direction in the pair of left and right swirl flow forming portions 130A and 130B, the swirl force of the swirl flows Ra and Rb, that is, swirl The flow acting forces fa2 and fb2 are not diminished.
  • the swirl flow acting force F1 of the swirl flows Ra and Rb acting in the rearward direction (the direction opposite to the direction of the T-axis arrow) between the pair of left and right swirl flow forming portions 130A and 130B.
  • the swirling flow acting force F2 of the swirling flows Ra and Rb acting on the front area (the direction of the T-axis arrow) in the transport direction T on both outer sides in the road width direction of the pair of left and right swirling flow forming portions 130A and 130B is relatively growing. Further, the force transmitted to the transported object C due to the surface friction caused by the force D that sucks the transported object C and draws it toward the lower swirl flow forming portions 130A and 130B, respectively.
  • the conveyed object C moves in the direction of the arrow on the T axis upon receiving the conveying force. That is, the pair of left and right swirl flow forming portions 130A and 130B convey the conveyed object C in a non-contact manner using the swirl force of the swirl flows Ra and Rb. At this time, instead of simply applying an air force to the transported object C in the transporting direction, the force D to be attracted by the negative pressure described above acts on the transported object C. In this state, since the swirl flow acting forces F1 and F2 in the conveying direction are added, the conveying force is reliably transmitted to the conveyed object C as a relative difference between the swirl flow acting forces F1 and F2.
  • the swirling flow acting force of the swirling flow Rb acting in the direction opposite to the direction of the T-axis arrow is fb1
  • the swirling flow acting force of the swirling flow Rb acting in the direction of the T-axis arrow is defined as fb2.
  • F1 and F2 the swirl flow acting force acting on the front area of the conveyance direction T (the area opposite to the direction of the T-axis arrow)
  • F2 and Fb2 The swirl force acting force acting on the rear region (direction region of the T-axis arrow) is defined as F2.
  • the swirling flows Ra and Rb on the road width direction outer side 111b of the pair of left and right swirling flow forming portions 130A and 130B are dispersed in the radial direction, and the swirling flow acting forces fa2 and fb2 of the swirling flows Ra and Rb are reduced.
  • the swirl flow Ra, Rb flows into the gas receiving recess 140 between the pair of left and right swirl flow forming portions 130A, 130B, and a flow path to the front region in the transport direction T (the region opposite to the direction of the T-axis arrow).
  • the swirling flow acting force F1 of the swirling flows Ra and Rb in the gas receiving recess 140 is outside in the road width direction of the two swirling flow forming portions 130A and 130B adjacent in the road width direction S.
  • the relationship is greater than the swirl flow acting force F2 of the swirl flow R at 111b.
  • the force transmitted to the conveyed object C due to the surface friction caused by the force D to be attracted is the swirl of the swirl flows Ra and Rb acting toward the rear region in the transport direction T (the direction of the T-axis arrow).
  • the swirling flow acting force F1 of the swirling flows Ra and Rb acting toward the front region in the transport direction T (the region opposite to the direction of the T-axis arrow) is larger than the flowing force F2. Therefore, the conveyed object C moves in the direction opposite to the direction of the T-axis arrow in response to the conveying force. That is, the moving direction during transport is in a reverse relationship compared to a configuration in which the gas receiving recess 140 is not provided (see FIG. 4).
  • the size of the gas receiving recess 140 in order for the moving direction at the time of conveyance to be reversed, it is necessary to increase the size of the gas receiving recess 140, in particular, the cross-sectional area viewed from the conveyance direction T to some extent.
  • the size of the gas receiving recess 140 of the present embodiment is assumed to be sufficient to satisfy this relationship. That is, even if the gas receiving recess 140 is provided, the movement direction during the conveyance is not necessarily opposite to the example of the reference diagram of FIG. 4. For example, if the cross-sectional area viewed from the conveyance direction T is gradually increased, In some cases, the swirling flow acting force F1 and the swirling flow acting force F2 are balanced. And if the cross-sectional area seen from the conveyance direction T is larger than when balanced, the relationship is opposite to the example of the reference diagram of FIG.
  • the bottom surface portion of the gas receiving recess 140 existing at a position lower than the transport path surface 111 may be configured to be open toward the back surface side of the transport path surface 111.
  • a sufficient escape space for the swirling flow Ra and Rb air that has entered the gas receiving recess 140 is created, and the air flow is not hindered. That is, the swirl flow acting force F1 of the swirl flow Ra and Rb acting toward the front region in the transport direction T (the region opposite to the direction of the T-axis arrow) is larger than when the gas receiving recess 140 is not opened. As a result, the conveyance force increases.
  • the gas release holes 150 that escape from the swirling flow forming portions 130A and 130B to the excess space that overflows into the gap between the conveyance path surface 111 and the object to be conveyed C are dispersed on the conveyance path surface 111. It is arranged. As a result, the gas release hole 150 becomes an escape place for the air that stays excessively, and the flow of air that sequentially overflows from the swirl flow forming portions 130A and 130B is not hindered. That is, as compared with the case where the gas release hole 150 is not provided, the swirl flow acting force of the swirl flows Ra and Rb acting toward the front area and the rear area in the transport direction T is increased and the relative difference thereof is also large. To increase the conveying force.
  • the swirl flow forming portions 130 ⁇ / b> A and 130 ⁇ / b> B are detachably attached to the conveyance path surface 111 as separate components that can alternatively select the air injection force.
  • the strength of the swirl force by the swirl flow R can be changed simply by changing the swirl flow forming portions 130A and 130B.
  • the strength of the swirling force due to the swirling flow R is changed by changing the size of the hole of the gas injection port 132, and the conveying speed of the conveyed object C can be freely adjusted.
  • the swirl flow forming portions 130A and 130B are separated from each other in the road width direction S of the conveyance road surface 111 and are paired with each other.
  • the swirl directions of the swirl flows Ra and Rb generated in the swirl flow forming portions 130A and 130B are set to be opposite to each other in the road width direction S of the conveyance path surface 111, and a pair of left and right swirl flow forming portions 130A is formed.
  • the pair of swirl flow forming portions 130A and 130B can utilize the swirl force of the swirl flows Ra and Rb to provide a simple device configuration without providing a contact-type drive mechanism.
  • the transported object C can be smoothly transported while floating in a non-contact state, and transport force (relative to F1 and F2) in the forward area of the transport direction T (the direction opposite to the direction of the T-axis arrow) Difference) can be adjusted.
  • the swirl forming space 130A, 130B is provided with a bottomed peripheral side wall 131a provided below the transport path surface and opened on the transport path surface, and a swirl formation space surrounded by the peripheral side wall 131a from the tangential direction of the peripheral side wall 131a.
  • the gas receiving recess 140 is not opened because the bottom surface portion of the gas receiving recess 140 existing at a position lower than the transport path surface 111 is opened toward the back side of the transport path surface 111.
  • the swirling flow acting force F1 of the swirling flows Ra and Rb acting toward the front region of the conveying direction T can be increased to increase the conveying force.
  • gas release holes 150 are provided in a distributed manner on the conveyance path surface 111 for releasing excess air that overflows from the swirl flow forming portions 130A and 130B to the gap between the conveyance path surface 111 and the object C to be conveyed.
  • the swirl flow acting forces F1 and F2 of the swirl flows Ra and Rb acting toward the front region and the rear region in the transport direction T are increased and relative to that when the gas release hole 150 is not provided. The difference can be increased to increase the conveying force.
  • the swirl flow forming portions 130A and 130B are detachably attached to the conveyance path surface 111 as separate components capable of selectively selecting the air injection force, thereby using an injection force adjusting means such as a valve.
  • the effect of the swirling flow acting force F1, F2 in the conveying direction T can be adjusted without any adjustment, and the effect is enormous.
  • FIG. 6 is a perspective view showing a non-contact type levitation conveying apparatus 200 of the second embodiment of the present invention
  • FIG. 7 is a plan view seen from the reference numeral 7 in FIG.
  • the non-contact type levitation transfer device 200 of the second embodiment is obtained by changing the number and arrangement of the swirl flow forming portions 130A and 130B of the non-contact type levitation transfer device 100 of the first embodiment. Is common to the non-contact type levitation transfer apparatus 100 of the first embodiment, detailed description of common items is omitted, and only the reference numbers of the 200 series in which the last two digits are common are attached.
  • the swirl flow forming unit 230 ⁇ / b> A and the swirl flow forming unit 230 ⁇ / b> B are A pair is disposed apart from each other on the left and right sides, and a plurality of them are disposed apart from each other in the transport direction T on the transport path surface 211.
  • the swirling directions of the swirling flows Ra and Rb generated respectively in the swirling flow forming portions 230A and 230B are set to be opposite to each other in the road width direction S of the conveying path surface 211 and in the conveying direction T of the conveying path surface 211. They are set in the same direction.
  • each of the swirl flows Ra and Rb generated in the plurality of swirl flow forming portions 230A and 230B arranged in the transport direction T has a swirl flow acting force F1 and F2 in the transport direction T with respect to the conveyed object C.
  • a conveyance force acts on the to-be-conveyed object C as a relative difference of the swirl
  • the swirl flow forming portions 230A and 230B are separated from each other in the road width direction S of the conveyance road surface 211 and are paired with each other.
  • the swirl flows Ra and Rb generated in the swirl flow forming portions 230A and 230B are arranged in a plurality of positions spaced apart from each other in the transport direction T of the transport path surface 211.
  • the reverse direction is set in the path width direction S and the same direction is set in the transfer direction T on the transfer road surface 211, and overflows from the pair of left and right swirl flow forming portions 230A and 230B as swirl flows Ra and Rb, respectively.
  • a gas receiving recess 240 for receiving the air to be merged is provided in the gas merging region A extending in the transport direction between the pair of left and right swirl flow forming portions 230A and 230B.
  • the pair of swirl flow forming portions 230A and 230B generate a transport force while floating the transported object C in a non-contact state with a simple apparatus configuration without attaching a contact-type drive mechanism.
  • the effect can be enormous, for example, the object C can be smoothly conveyed in a non-contact manner, and the conveying force can be increased as compared with the first embodiment.
  • FIG. 8A is a diagram illustrating the principle of generating a transport force when the bottom side of the transport path surface 311 of the gas receiving recess 340 is closed in the third embodiment of the present invention
  • FIG. 8A is a diagram illustrating the principle of generating a transport force when the bottom side of the transport path surface 311 of the gas receiving recess 340 is closed in the third embodiment of the present invention
  • the non-contact type levitation transport device 300 of the third embodiment is formed by opening and closing the bottom surface portion of the gas receiving recess 140 that is located lower than the transport path surface 111 of the non-contact levitation transport device 100 of the first embodiment. Since many elements are common to the non-contact type levitating and conveying apparatus 100 of the first embodiment, detailed description of common items is omitted, and only the reference numbers in the 300 series having the lower two digits are attached. .
  • the non-contact type levitating apparatus 300 overflows and merges as a swirl flow Ra and Rb from the pair of left and right swirl flow forming portions 330A and 330B, respectively.
  • a gas receiving recess 340 for receiving air is provided in the gas merging region A extending in the transport direction T between the pair of left and right swirl flow forming portions 330A and 330B.
  • the size of the gas receiving recess 340 is a balance between the swirling flow acting force F1 of the swirling flows Ra and Rb and the swirling flow acting force F2 of the swirling flows Ra and Rb. It is smaller than the cross-sectional area of the gas receiving recess (340) as viewed from the transport direction T.
  • the open / close switching means 360 is in a state where the bottom surface portion of the gas receiving recess 340 existing at a position lower than the conveyance path surface 311 is closed.
  • the swirl flow Ra and Rb flow into the gas receiving recess 340 to form a flow path in the direction opposite to the arrow of the T axis.
  • the swirl flow Ra, Rb loses the escape field on the central portion side 311a between the pair of left and right swirl flow forming portions 330A, 330B, and the swirl flow acting force of the swirl flow R fa1 and fb1 are killed.
  • both swirl flows Ra and Rb do not interfere with each other. Therefore, the swirl flow acting forces fa2 and fb2 of the swirl flows Ra and Rb are Not killed.
  • the pair of left and right swirling flows Ra and Rb acting in the direction opposite to the arrow on the T axis on the central portion side 311a between the pair of left and right swirling flow forming portions 330A and 330B is relatively paired with the left and right swirling flow acting force F1.
  • the swirl flow acting force F2 of the swirl flows Ra and Rb acting in the arrow direction of the T axis on the road width direction outer side 311b of the swirl flow forming portions 330A and 330B is greatly related.
  • the force transmitted to the conveyed object C due to the surface friction caused by the force D to be attracted is the swirl flow acting force F1 of the swirl flow Ra and Rb acting in the direction opposite to the arrow of the T axis.
  • the open / close switching means 360 switches to a state in which the bottom surface portion of the gas receiving recess 340 existing at a position lower than the transport path surface 311 is opened. Then, in the central portion side 311a between the pair of left and right swirl flow forming portions 330A and 330B, a sufficient escape space for the air of the swirl flow Ra and Rb that has entered the gas receiving recess 340 can be formed, and the air flow is not hindered.
  • the swirling flow acting force F1 of the swirling flows Ra and Rb acting in the direction opposite to the arrow of the T-axis is increased and the conveying force is increased. In other words, the swirling flow acting forces fa1 and fb1 of the swirling flows Ra and Rb are not killed or the degree to which they are killed is small.
  • the swirling flow acting force F1 of the swirling flows Ra and Rb in the gas receiving recess 340 on the central portion side 311a between the pair of left and right swirling flow forming portions 330A and 330B is the road width of the pair of left and right swirling flow forming portions 330A and 330B.
  • the relationship is larger than the swirl flow acting force F2 of the swirl flows Ra and Rb in the direction outer side 311b.
  • the force transmitted to the conveyed object C due to the surface friction caused by the force D to be attracted as described above is greater than the swirl flow acting force F2 of the swirl flows Ra and Rb acting in the arrow direction of the T axis.
  • the swirling flow acting force F1 of the swirling flows Ra and Rb acting in the direction opposite to the arrow of the shaft is larger. Accordingly, the conveyed object C moves in the direction opposite to the arrow on the T axis upon receiving the conveying force.
  • the bottom surface portion of the gas receiving recess 340 existing at a position lower than the conveyance path surface 311 is formed to be freely opened and closed.
  • the moving direction of the transported object C can be switched, and the effect is enormous.
  • FIGS. 9A to 9C are plan views showing variations of the gas receiving recesses 440a to 440c of the fourth embodiment of the present invention.
  • the non-contact type levitation transfer device 400 of the fourth embodiment is obtained by changing the shape and arrangement of the gas receiving recess 140 of the non-contact type levitation transfer device 100 of the first embodiment.
  • the non-contact type levitating and conveying apparatus 100 is the same as the non-contact type levitating and conveying apparatus 100. Therefore, detailed description of the common items is omitted, and only the 400th series code having the same lower two digits is attached.
  • the gas receiving recess 440a is disposed in the gas confluence region A extending in the transport direction T between the pair of left and right swirl flow forming portions 430A and 430B. Yes. Even if the gas receiving recess 440a is not disposed on an imaginary line connecting the centers of the pair of left and right swirl flow forming portions 430A and 430B, the gas receiving recess 440a is similar to the first embodiment described above as long as it is disposed in the vicinity thereof. The effect of this can be obtained.
  • the gas receiving recess 440b is disposed in the gas confluence region A extending in the transport direction T between the pair of left and right swirl flow forming portions 430A and 430B. Yes.
  • the gas receiving recess 440b is formed in an elliptical shape that is long in the transport direction T in plan view. In this case, the same effect as that of the first embodiment can be obtained.
  • the gas receiving recess 440c is disposed in the gas confluence region A extending in the transport direction T between the pair of left and right swirl flow forming portions 430A and 430B. Yes.
  • the gas receiving recess 440c is formed in a circular shape in plan view, and is disposed at a position shifted in the transport direction T with respect to a line connecting the centers of the two swirl flow forming portions 430A and 430B adjacent in the road width direction S. Has been. In this case, the same effect as that of the first embodiment can be obtained.
  • non-contact type levitation transfer device 110 210, 410 ... base part 111, 211, 311, 411 ... transfer road surface 120, 220 ... machine base frame 130A, 230A , 330A, 430A ... swirl flow forming portions 130B, 230B, 330B, 430B ... swirl flow forming portions 131, 231, 331, 431 ... guide recess 132 ...

Abstract

　Provided is a non-contact floating transport device for utilizing the swirling force of swirl flows to smoothly transport an object while causing the transported object to float using a simple device configuration without adding a contact-type driving mechanism. A pair of swirl-flow-forming units (130A, 130B) for generating gaseous swirl flows are provided at a distance from each other on the left and right of a flat transportation path surface (111) for transporting the transported object. The swirl flows generated by the swirl-flow-forming units (130A, 130B) are configured so as to swirl in mutually opposite directions. A gas reception recess (140) for receiving gas merging from the swirl-flow-forming units (130A, 130B) is provided in a gas-merging region (A) extending in the transport direction (T) between the left and right swirl-flow-forming units (130A, 130B). The swirl flows spilling out from the swirl-flow-forming units (130A, 130B) are thereby brought into the gap between the bottom surface of the transported object and the transport path surface (111) so that the transported object is caused to float and be smoothly transported using the transporting force produced by the swirling force from the swirl flows.

Description

非接触式浮上搬送装置Non-contact levitation transfer device
　本発明は、旋回流を発生させる旋回流形成部が被搬送物を搬送する搬送路面に配設され、この旋回流により被搬送物を浮上させながら被搬送物に対する駆動力を発生させて被搬送物を完全な非接触状態にて浮上搬送させる非接触式浮上搬送装置に関するものであって、特に、太陽電池用フラットパネルや携帯電話、液晶テレビ、パソコン用液晶モニターなどに用いるディスプレイ用ガラス基板からなる被搬送物を浮上搬送する非接触式浮上搬送装置に関するものである。 In the present invention, a swirl flow generating portion that generates a swirl flow is disposed on a transport path surface that transports a transported object, and the swirl flow generates a driving force for the transported object while floating the transported object, thereby transporting the transported object. The invention relates to a non-contact type levitation transport device that levitates and transports objects in a completely non-contact state, particularly from a glass substrate for display used in flat panels for solar cells, mobile phones, liquid crystal televisions, liquid crystal monitors for personal computers, etc. The present invention relates to a non-contact type levitation conveyance device that levitates and conveys the object to be conveyed.
　従来、非接触搬送装置として、表面から裏面に貫通する横断面円形の貫通孔を有するリング状部材の裏面に噴射口を備え、この噴射口から空気を噴射させることにより、このリング状部材の表面側にこの表面から離れる方向へ向かう旋回流を生じさせるとともに、このリング状部材の表面側の貫通孔の開口部近傍に裏面方向への空気の流れを生じさせる旋回流形成体を、基台フレームの搬送面に２個以上備えて、液晶用ガラスなどからなる被搬送物の浮上高さ精度を高く維持しつつ接触式の駆動機構を用いて被搬送物を浮上搬送させる非接触搬送装置が知られている（特許文献１および特許文献２参照）。 Conventionally, as a non-contact conveyance device, an injection port is provided on the back surface of a ring-shaped member having a circular through-hole penetrating from the front surface to the back surface, and air is injected from the injection port, whereby the surface of the ring-shaped member is A swirling flow forming body that generates a swirling flow in a direction away from the front surface on the side and a flow of air in the back surface direction in the vicinity of the opening of the through hole on the front surface side of the ring-shaped member. There is known a non-contact transfer device that has two or more on the transfer surface, and floats and conveys the object to be conveyed using a contact type driving mechanism while maintaining high flying height accuracy of the object to be conveyed made of liquid crystal glass or the like. (See Patent Document 1 and Patent Document 2).
特許５２３７３５７号公報（特に、第３頁第６～７段落、図１、図２を参照）Japanese Patent No. 5237357 (in particular, see page 3, paragraphs 6-7, FIG. 1 and FIG. 2) 国際公開ＷＯ２０１０／００４８００号公報（特に、請求項１、図３参照）International Publication No. WO2010 / 004800 (refer to claim 1, FIG. 3 in particular)
　しかしながら、上述した従来の非接触搬送装置では、搬送面上における被搬送物の回動やふらつきを回避して浮上高さ精度を保つように、旋回流形成体の旋回流の旋回方向が互いに変わるように搬送方向に複数配列することにより、それぞれの旋回流形成体から搬送面上に送り出された旋回流の旋回力を意図的に相殺させるとともに被搬送物の底面と搬送面との間隙に旋回流を送り続けて介在させた浮上状態を呈するものの、この浮上している被搬送物を搬送方向へ搬送させるためには、別途、摩擦コロやベルトなどの接触式の駆動機構を用いて被搬送物に搬送するための駆動力を与えて搬送する必要があり、このような接触式の駆動機構を付設すると搬送装置としての全体的装置構成やその駆動制御が複雑となるという問題があった。
　また、従来の非接触搬送装置では、被搬送物と搬送面との間に形成される間隙空間内で送り出された旋回流が滞留して淀み、この淀んだ旋回流が過剰に送り出されると搬送方向への搬送抵抗となる場合があるという問題があった。 However, in the above-described conventional non-contact conveyance device, the swirl directions of the swirl flow of the swirl flow forming body are changed so as to maintain the flying height accuracy by avoiding the rotation and wobbling of the conveyed object on the conveyance surface. In this way, by arranging a plurality in the transport direction, the swirl force of the swirl flow sent from each swirl flow forming body onto the transport surface is intentionally canceled and swirled in the gap between the bottom surface of the object to be transported and the transport surface In order to transport the floating transported object in the transport direction, it is transported separately using a contact-type drive mechanism such as a friction roller or a belt. It is necessary to apply a driving force for transferring the object to the object. When such a contact type driving mechanism is provided, there is a problem that the overall apparatus configuration as a conveying apparatus and its drive control become complicated.
Further, in the conventional non-contact transfer device, the swirl flow sent out in the gap space formed between the object to be transferred and the transfer surface stays and stagnates. There was a problem that it might become a conveyance resistance in the direction.
　そこで、本発明は、前述したような従来技術の問題を解決するものであって、すなわち、本発明の目的は、旋回流の旋回力を活用して接触式の駆動機構を付設することなく簡便な装置構成で被搬送物を完全なる非接触状態で浮上させながら円滑に搬送する非接触式浮上搬送装置を提供することである。 Therefore, the present invention solves the problems of the prior art as described above, that is, the object of the present invention is to use the swirl force of swirl flow without using a contact type drive mechanism. It is an object of the present invention to provide a non-contact type levitation conveyance device that smoothly conveys an object to be conveyed while floating in a completely non-contact state.
　本請求項１に係る発明は、気体からなる旋回流を発生させる旋回流形成部が被搬送物を搬送する平坦な搬送路面に配設され、前記旋回流形成部から順次溢出してくる旋回流を被搬送物の底面と搬送路面との間隙に介在させて被搬送物を浮上させるとともに前記旋回流の旋回力によって生じる搬送力で被搬送物を搬送する非接触式浮上搬送装置であって、前記旋回流形成部が、前記搬送路面の路幅方向で左右相互に離間して一対配設され、前記旋回流形成部でそれぞれ発生する旋回流の旋回方向が、前記搬送路面の路幅方向で相互に逆方向に設定され、前記左右一対の旋回流形成部からそれぞれ旋回流として溢出して合流する気体を受け入れる気体受入凹部が、前記左右一対の旋回流形成部の相互間で搬送方向に延在する気体合流領域内に設けられていることによって、前述した課題を解決するものである。 According to the first aspect of the present invention, the swirl flow that generates a swirl flow composed of gas is disposed on a flat conveyance path surface that conveys the object to be conveyed, and the swirl flow that sequentially overflows from the swirl flow formation unit. Is a non-contact type levitation conveyance device that conveys the conveyance object with a conveyance force generated by the swirling force of the swirling flow while floating the conveyance object with a gap between the bottom surface of the conveyance object and the conveyance path surface, A pair of the swirl flow forming portions are arranged to be spaced apart from each other in the width direction of the transport road surface, and the swirl flow swirl directions respectively generated in the swirl flow formation portion are the width direction of the transport road surface. Gas receiving recesses that are set in opposite directions and receive gas that overflows and merges as a swirling flow from the pair of left and right swirling flow forming portions extend in the transport direction between the pair of left and right swirling flow forming portions. In the existing gas merging area By being, it is to solve the aforementioned problems.
　本請求項２に係る発明は、請求項１に記載された非接触式浮上搬送装置の構成に加えて、前記旋回流形成部が、前記搬送路面の搬送方向で前後相互に離間して複数配設されているとともに、前記旋回流形成部でそれぞれ発生する旋回流の旋回方向が、前記搬送路面の搬送方向で相互に同一方向に設定されていることによって、前述した課題をさらに解決するものである。 In the invention according to claim 2, in addition to the configuration of the non-contact type levitation conveyance device according to claim 1, a plurality of the swirl flow forming portions are arranged apart from each other in the conveyance direction of the conveyance path surface. And the above-described problems are further solved by setting the swirling directions of the swirling flows respectively generated in the swirling flow forming portions to be the same in the transport direction of the transport path surface. is there.
　本請求項３に係る発明は、請求項１または請求項２に記載された非接触式浮上搬送装置の構成に加えて、前記旋回流形成部が、前記搬送路面下に設けられて搬送路面上に開口する有底の周側壁と、該周側壁の接線方向から周側壁で囲繞される旋回形成空間領域内へ前記気体を噴射して旋回流を発生させる気体噴射口とを備えていることにより、前述した課題をさらに解決するものである。 In the invention according to claim 3, in addition to the configuration of the non-contact type levitation conveyance device according to claim 1 or 2, the swirl flow forming portion is provided below the conveyance path surface so as to be on the conveyance path surface. And a gas injection port for generating a swirling flow by injecting the gas into a swirl forming space region surrounded by the peripheral side wall from a tangential direction of the peripheral side wall. The above-mentioned problem is further solved.
　本請求項４に係る発明は、請求項１乃至請求項３のいずれか１つに記載された非接触式浮上搬送装置の構成に加えて、前記搬送路面より低位置に存在する気体受入凹部の底面部分が、前記搬送路面の裏面側に向けて開放されていることにより、前述した課題をさらに解決するものである。 In addition to the configuration of the non-contact type levitation transfer apparatus according to any one of claims 1 to 3, the invention according to claim 4 includes a gas receiving recess that exists at a position lower than the transfer path surface. The bottom surface portion is opened toward the back surface side of the conveyance path surface, thereby further solving the above-described problem.
　本請求項５に係る発明は、請求項１乃至請求項３のいずれか１つに記載された非接触式浮上搬送装置の構成に加えて、前記搬送路面より低位置に存在する気体受入凹部の底面部分が、開閉自在に形成されていることにより、前述した課題をさらに解決するものである。 In addition to the configuration of the non-contact type levitation transfer device according to any one of claims 1 to 3, the invention according to claim 5 includes a gas receiving recess that exists at a position lower than the transfer path surface. The bottom surface portion is formed to be freely opened and closed, thereby further solving the above-described problems.
　本請求項６に係る発明は、請求項１乃至請求項５のいずれか１つに記載された非接触式浮上搬送装置の構成に加えて、前記旋回流形成部から搬送路面と被搬送物との間隙に溢出して過剰に滞留する気体を逃す気体解放孔が、前記搬送路面に分散して配設されていることにより、前述した課題をさらに解決するものである。 The invention according to claim 6 includes, in addition to the configuration of the non-contact type levitation transfer device according to any one of claims 1 to 5, the swirl flow forming unit, a transfer path surface, an object to be transferred, and the like. The above-described problems are further solved by disposing the gas release holes for escaping the gas that overflows and stays excessively in the gap of the gas and is distributed on the conveyance path surface.
　本請求項７に係る発明は、請求項１乃至請求項６のいずれか１つに記載された非接触式浮上搬送装置の構成に加えて、前記旋回流形成部が、前記気体の噴射力を択一的に選択可能な別部品として前記搬送路面に着脱自在に取り付けられていることにより、前述した課題をさらに解決するものである。 According to the seventh aspect of the present invention, in addition to the configuration of the non-contact type levitation transfer device according to any one of the first to sixth aspects, the swirl flow forming unit generates the gas injection force. The above-described problem is further solved by being detachably attached to the transport path surface as another part that can be alternatively selected.
　本発明の非接触式浮上搬送装置は、気体からなる旋回流を発生させる旋回流形成部が被搬送物を搬送する平坦な搬送路面に配設されていることにより、旋回流形成部から順次溢出してくる旋回流を被搬送物の底面と搬送路面との間隙に介在させて被搬送物を浮上させることができるばかりでなく、以下のような特有の効果を奏することができる。 In the non-contact type levitation conveyance device of the present invention, the swirl flow forming unit that generates the swirl flow composed of gas is disposed on the flat conveyance path surface that conveys the object to be conveyed, so that the swirl flow formation unit sequentially overflows. In addition to allowing the swirling flow to intervene in the gap between the bottom surface of the object to be conveyed and the surface of the conveying path, the object to be conveyed can be levitated, and the following specific effects can be achieved.
　本請求項１に係る発明の非接触式浮上搬送装置によれば、旋回流形成部が、搬送路面の路幅方向で左右相互に離間して一対配設され、旋回流形成部でそれぞれ発生する旋回流の旋回方向が、搬送路面の路幅方向で相互に逆方向に設定され、左右一対の旋回流形成部からそれぞれ旋回流として溢出して合流する気体を受け入れる気体受入凹部が、左右一対の旋回流形成部の相互間で搬送方向に延在する気体合流領域内に設けられていることにより、左右一対の旋回流形成部で被搬送物に作用して搬送方向の前方域に向かう旋回流作用力と搬送方向の後方域に向かう旋回流作用力との相互間で生じた大小関係に基づいて被搬送物の搬送方向が方向付けされるため、旋回流の旋回力を活用して接触式の駆動機構を付設することなく簡便な装置構成で、非接触状態で被搬送物を搬送方向の前方域へ向かって浮上させつつ円滑に搬送することができる。
　すなわち、左右一対の旋回流形成部における路幅方向の両外側では、双方の旋回流が放射方向へ分散されて旋回流作用力が小さくなるが、左右一対の旋回流形成部の相互間では、双方の旋回流が搬送路面と被搬送物との間に形成される隙間空間で滞留すること無く気体受入凹部に淀みなく流れ込んで搬送方向の前方域への流路が形成されるため、気体受入凹部の大きさによっては、気体受入凹部における旋回流作用力が左右一対の旋回流形成部における路幅方向の両外側でそれぞれ生じる旋回流作用力より大きくなり、被搬送物に対して面摩擦によって伝わる力は、搬送方向の後方域へ向かって作用する旋回流作用力よりも搬送方向の前方域へ向かって作用する旋回流作用力の方が大きくなるため、接触式の駆動機構を付設することなく非接触状態で被搬送物を搬送方向の前方域へ向かって円滑に搬送させることができる。 According to the non-contact type levitation conveyance device of the invention according to claim 1, a pair of swirl flow forming portions are arranged to be separated from each other in the width direction of the conveyance path surface, and are respectively generated in the swirl flow forming portion. The swirling direction of the swirling flow is set to be opposite to each other in the width direction of the conveying road surface, and the gas receiving recesses for receiving the gas that overflows and merges as a swirling flow from the pair of left and right swirling flow forming portions, respectively. By being provided in the gas confluence region extending in the transport direction between the swirl flow forming portions, the swirl flow acting on the object to be transported by the pair of left and right swirl flow forming portions and moving toward the front area in the transport direction Since the transport direction of the object to be transported is directed based on the magnitude relationship between the acting force and the swirling flow acting force toward the rear area in the transport direction, the contact type is utilized by utilizing the swirling force of the swirling flow. With a simple device configuration without any additional drive mechanism It can be smoothly conveyed while being floated toward the conveyed object to the front region of the conveying direction in a non-contact state.
That is, on both outer sides in the road width direction in the pair of left and right swirling flow forming portions, both swirling flows are dispersed in the radial direction and the swirling flow acting force is reduced, but between the pair of left and right swirling flow forming portions, Since both swirl flows do not stay in the gap space formed between the conveyance path surface and the object to be conveyed and flow into the gas receiving recess without any stagnation, a flow path to the front area in the conveyance direction is formed, so that the gas reception Depending on the size of the recess, the swirl force acting force in the gas receiving recess is larger than the swirl force acting force generated on both outer sides in the road width direction in the pair of left and right swirl flow forming portions, Since the transmitted force is greater in the swirl flow acting force acting toward the front area in the conveyance direction than the swirl flow acting force acting toward the rear area in the conveyance direction, a contact type drive mechanism should be provided. Without contact It can be smoothly conveyed toward the conveyed object to the front region of the conveying direction in a state.
　また、旋回流形成部内で連続的に発生する旋回流が旋回流形成部から被搬送物側に向かって搬送路面上に溢出すると、この溢出した旋回流の遠心力によって旋回流の旋回半径が拡大して、旋回流の中心近傍部分に生じる気圧が旋回流の旋回部分に生じる気圧と比べて相対的に低くなり、この低くなった気圧が被搬送物に負圧として作用することにより、被搬送物を旋回流形成部側へ吸引して引き寄せようとする力と被搬送物を溢出した旋回流で浮上させようとする力とが釣り合った被搬送物の浮上位置に被搬送物を保持するため、被搬送物を安定させた浮上支持状態で旋回流作用力による搬送力を確実に被搬送物へ伝えることができる。
　すなわち、単に、搬送方向へ気体の力を被搬送物に対して付加しているのではなく、被搬送物を旋回流形成部側へ吸引して引き寄せようとする力が作用している状態で前述した旋回流作用力を被搬送物に対して付加しているため、確実に旋回流作用力による搬送力を被搬送物へ伝えることができる。
　さらに、搬送方向から視た気体受入凹部の断面積が大きい程、気体受入凹部に流れ込む旋回流の流量が多くなるため、搬送方向の前方域への搬送力を大きくすることができる。
　すなわち、搬送方向から視た気体受入凹部の断面積の大小を調整すると気体受入凹部に流れ込む旋回流の流量が変化するため、搬送方向の前方域への搬送力を調整することができる。 In addition, when the swirling flow continuously generated in the swirling flow forming portion overflows from the swirling flow forming portion toward the object to be conveyed, the swirling radius of the swirling flow increases due to the centrifugal force of the swirling flow. Thus, the atmospheric pressure generated in the vicinity of the center of the swirling flow is relatively lower than the atmospheric pressure generated in the swirling portion of the swirling flow, and this reduced atmospheric pressure acts as a negative pressure on the object to be transported. In order to hold the transported object at the floating position of the transported object in which the force to attract and attract the object to the swirling flow forming portion and the force to lift the transported object in the swirling flow overflowing are balanced Thus, it is possible to reliably convey the conveying force due to the swirl force acting force to the conveyed object in the floating support state in which the conveyed object is stabilized.
That is, not simply applying a gas force to the conveyed object in the conveying direction, but in a state where a force is applied to attract and attract the conveyed object to the swirl flow forming portion side. Since the above-described swirl flow acting force is added to the object to be conveyed, the conveying force due to the swirl force acting force can be reliably transmitted to the object to be conveyed.
Furthermore, since the flow rate of the swirling flow flowing into the gas receiving recess increases as the cross-sectional area of the gas receiving recess viewed from the transport direction increases, the transport force to the front area in the transport direction can be increased.
That is, when the size of the cross-sectional area of the gas receiving recess as viewed from the transport direction is adjusted, the flow rate of the swirling flow that flows into the gas receiving recess changes, so that the transport force to the front area in the transport direction can be adjusted.
　本請求項２に係る発明の非接触式浮上搬送装置によれば、請求項１に係る発明が奏する効果に加えて、旋回流形成部が、搬送路面の搬送方向で前後相互に離間して複数配設されているとともに、旋回流形成部でそれぞれ発生する旋回流の旋回方向が、搬送路面の搬送方向で相互に同一方向に設定されていることにより、搬送方向に配列された複数組の旋回流形成部で生じた旋回流のそれぞれが被搬送物に対して搬送方向への旋回流作用力を作用するため、搬送力をより一段と大きくすることができる。 According to the non-contact type levitation conveyance device of the invention according to claim 2, in addition to the effect of the invention according to claim 1, the swirl flow forming portions are spaced apart from each other in the conveyance direction of the conveyance road surface. A plurality of sets of swirls arranged in the transport direction are arranged in such a manner that the swirl directions of the swirl flows respectively generated in the swirl flow forming section are set in the same direction as the transport direction of the transport path surface. Since each of the swirling flows generated in the flow forming section acts on the object to be transported, a swirling flow acting force in the transport direction can be applied, so that the transport force can be further increased.
　本請求項３に係る発明の非接触式浮上搬送装置によれば、請求項１または請求項２に係る発明が奏する効果に加えて、旋回流形成部が、搬送路面下に設けられて搬送路面上に開口する有底の周側壁と、この周側壁の接線方向から周側壁で囲繞される旋回形成空間領域内へ気体を噴射して旋回流を発生させる気体噴射口とを備えていることにより、簡単でコンパクトな構成で旋回流が形成されるため、モータなどの回転構造を不要として非接触式浮上搬送装置を簡素化することができる。 According to the non-contact type levitation conveyance device of the invention according to claim 3, in addition to the effect exerted by the invention according to claim 1 or claim 2, the swirl flow forming portion is provided below the conveyance path surface and the conveyance road surface By having a bottomed peripheral side wall that opens upward, and a gas injection port that generates a swirl flow by injecting gas from the tangential direction of the peripheral side wall into the swirl forming space region surrounded by the peripheral side wall Since a swirl flow is formed with a simple and compact configuration, a non-contact type levitation transport device can be simplified without requiring a rotating structure such as a motor.
　本請求項４に係る発明の非接触式浮上搬送装置によれば、請求項１乃至請求項３のいずれか１つに係る発明が奏する効果に加えて、搬送路面より低位置に存在する気体受入凹部の底面部分が、搬送路面の裏面側に向けて開放されていることにより、気体受入凹部に入ってきた旋回流の気体の十分な逃げ場ができて気体の流れを妨げないため、気体受入凹部が開放されていないときと比べて搬送方向の前方域へ向かって作用する旋回流作用力を大きくして搬送力を増加させることができる。 According to the non-contact type levitation conveyance device of the invention according to claim 4, in addition to the effect exhibited by the invention according to any one of claims 1 to 3, the gas reception located at a position lower than the conveyance road surface Since the bottom surface portion of the recess is open toward the back surface side of the conveyance path surface, a sufficient escape space for the swirling gas that has entered the gas receiving recess is formed, and the gas flow is not hindered. Compared with when the is not opened, the swirl force acting force acting toward the front region in the conveying direction can be increased to increase the conveying force.
　本請求項５に係る発明の非接触式浮上搬送装置によれば、請求項１乃至請求項３のいずれか１つに係る発明が奏する効果に加えて、搬送路面より低位置に存在する気体受入凹部の底面部分が、開閉自在に形成されていることにより、気体受入凹部に流れ込む旋回流の流量が変化するため、搬送方向の前方域へ向かって作用する旋回流作用力の大きさと搬送方向の後方域へ向かって作用する旋回流作用力の大きさとの大小関係を変えて被搬送物の移動方向を切り替えることができる。
　また、搬送方向から視た気体受入凹部の断面積などによっては、搬送方向の前方域へ向かって作用する旋回流作用力の大きさと搬送方向の後方域へ向かって作用する旋回流作用力の大きさとの大小関係が維持されたまま搬送方向の前方域へ向かって作用する旋回流作用力の大きさが変化するため、搬送方向の前方域への搬送力を調整することができる。 According to the non-contact type levitation conveyance device of the invention according to claim 5, in addition to the effect exerted by the invention according to any one of claims 1 to 3, the gas reception existing at a position lower than the conveyance road surface Since the flow rate of the swirling flow that flows into the gas receiving recess changes because the bottom surface portion of the recess is formed to be openable and closable, the magnitude of the swirling flow acting force acting toward the front area in the transport direction and the transport direction The moving direction of the conveyed object can be switched by changing the magnitude relationship with the magnitude of the swirling flow acting force acting toward the rear area.
In addition, depending on the cross-sectional area of the gas receiving recess viewed from the transport direction, the magnitude of the swirl flow acting force acting toward the front area in the transport direction and the magnitude of the swirl flow acting force acting toward the rear area in the transport direction Since the magnitude of the swirl force acting force acting toward the front area in the conveyance direction changes while maintaining the magnitude relationship with the distance, the conveyance force toward the front area in the conveyance direction can be adjusted.
　本請求項６に係る発明の非接触式浮上搬送装置によれば、請求項１乃至請求項５のいずれか１つに係る発明が奏する効果に加えて、旋回流形成部から搬送路面と被搬送物との間隙に溢出して過剰に滞留する気体を逃す気体解放孔が、搬送路面に分散して配設されていることにより、この気体解放孔が過剰に滞留する気体の逃げ場となり、旋回流形成部から順次溢出してくる気体の流れが妨げられないため、気体解放孔が設けられていないときと比べて搬送方向の前方域および後方域へ向かって作用する旋回流作用力を大きくするとともにその差も大きくして搬送力を増加させることができる。 According to the non-contact type levitating and conveying apparatus of the invention according to claim 6, in addition to the effect produced by the invention according to any one of claims 1 to 5, the conveying path surface and the object to be conveyed from the swirl flow forming portion. The gas release holes that escape the excessively stagnant gas that overflows into the gap with the object are distributed on the conveyance path surface, so that the gas release holes serve as escape areas for the excessively stagnant gas, and the swirl flow Since the flow of gas that sequentially overflows from the forming part is not hindered, the swirl flow acting force acting toward the front area and the rear area in the transport direction is increased compared to when the gas release hole is not provided. The difference can also be increased to increase the conveying force.
　本請求項７に係る発明の非接触式浮上搬送装置によれば、請求項１乃至請求項６のいずれか１つに係る発明が奏する効果に加えて、旋回流形成部が気体の噴射力を択一的に選択可能な別部品として搬送路面に着脱自在に取り付けられていることにより、旋回流形成部を付け替えるだけで旋回流による旋回力の強さが変更可能となるため、バルブなどの噴射力調整手段を用いることなく搬送方向への旋回流作用力を調整して搬送力を任意に調整することができるばかりでなく、旋回流形成部の素材や製作加工の選択肢を多様化させることができる。 According to the non-contact type levitation conveyance device of the invention according to claim 7, in addition to the effect exerted by the invention according to any one of claims 1 to 6, the swirl flow forming portion provides the gas injection force. Since it is detachably attached to the transport road surface as a separately selectable separate part, the strength of the swirling force due to swirling flow can be changed simply by changing the swirling flow forming section. It is possible not only to adjust the swirl flow acting force in the transport direction without using force adjustment means but also to arbitrarily adjust the transport force, as well as to diversify the materials of the swirl flow forming part and the manufacturing processing options it can.
本発明の第１実施例の非接触式浮上搬送装置を示す斜視図。The perspective view which shows the non-contact-type levitation conveyance apparatus of 1st Example of this invention. 図１の符号２の箇所の旋回流形成部を示す拡大斜視図。FIG. 3 is an enlarged perspective view showing a swirl flow forming portion at a location denoted by reference numeral 2 in FIG. 1. 本発明の旋回流形成部による旋回流および下方へ引き寄せようとする力が発生する原理を示す概念断面図。FIG. 3 is a conceptual cross-sectional view illustrating the principle of generating a swirling flow and a force to draw downward by the swirling flow forming unit of the present invention. 参考として気体受入凹部を設けていない構成の旋回流作用力を示す参考図。The reference figure which shows the swirl flow action force of the structure which is not providing the gas acceptance recessed part as reference. 図１の符号５から視た拡大平面図であって第１実施例において搬送力が発生する原理を示す図。FIG. 6 is an enlarged plan view as viewed from reference numeral 5 in FIG. 1, illustrating a principle of generating a conveyance force in the first embodiment. 本発明の第２実施例の非接触式浮上搬送装置を示す斜視図。The perspective view which shows the non-contact-type levitation conveyance apparatus of 2nd Example of this invention. 図６の符号７から視た平面図。The top view seen from the code | symbol 7 of FIG. 本発明の第３実施例において搬送力が発生する原理を示す図。The figure which shows the principle which conveyance force generate | occur | produces in 3rd Example of this invention. 本発明の第３実施例において搬送力が発生する原理を示す図。The figure which shows the principle which conveyance force generate | occur | produces in 3rd Example of this invention. 本発明の第４実施例の気体受入凹部のバリエーションを示す平面図。The top view which shows the variation of the gas acceptance recessed part of 4th Example of this invention. 本発明の第４実施例の気体受入凹部のバリエーションを示す平面図。The top view which shows the variation of the gas acceptance recessed part of 4th Example of this invention. 本発明の第４実施例の気体受入凹部のバリエーションを示す平面図。The top view which shows the variation of the gas acceptance recessed part of 4th Example of this invention.
　本発明は、気体からなる旋回流を発生させる旋回流形成部が被搬送物を搬送する平坦な搬送路面に配設され、旋回流形成部から順次溢出してくる旋回流を被搬送物の底面と搬送路面との間隙に介在させて被搬送物を浮上させるとともに旋回流の旋回力によって生じる搬送力で被搬送物を搬送する非接触式浮上搬送装置であって、旋回流形成部が、搬送路面の路幅方向で左右相互に離間して一対配設され、旋回流形成部でそれぞれ発生する旋回流の旋回方向が、搬送路面の路幅方向で相互に逆方向に設定され、左右一対の旋回流形成部からそれぞれ旋回流として溢出して合流する気体を受け入れる気体受入凹部が、左右一対の旋回流形成部の相互間で搬送方向に延在する気体合流領域内に設けられていることにより、左右一対の旋回流形成部にそれぞれ設定された旋回流の旋回方向が、左右一対の旋回流形成部で被搬送物に作用して搬送方向の前方域に向かう旋回流作用力と搬送方向の後方域に向かう旋回流作用力との相互間で生じた大小関係に基づいて被搬送物の搬送方向を方向付けして、旋回流の旋回力を活用して接触式の駆動機構を付設することなく簡便な装置構成で被搬送物を非接触状態で浮上させながら円滑に搬送するものであれば、その具体的な実施態様は、如何なるものであっても構わない。 In the present invention, a swirl flow forming unit that generates a swirl flow composed of gas is disposed on a flat conveyance path surface that conveys the object to be conveyed. Is a non-contact type levitation transport device that floats a transported object by being interposed in a gap between the transport path surface and transports the transported object with a transport force generated by a swirling force of a swirling flow. A pair of left and right is arranged apart from each other in the width direction of the road surface, and the swirl directions of the swirl flows generated in the swirl flow forming portions are set to be opposite to each other in the width direction of the conveyance road surface. The gas receiving recesses for receiving the gas that overflows and merges as the swirl flow from the swirl flow forming portion are provided in the gas merge region extending in the transport direction between the pair of left and right swirl flow forming portions. , A pair of left and right swirl flow forming portions The swirling direction of the swirling flow set respectively acts on the object to be conveyed by the pair of left and right swirling flow forming portions, and the swirling flow acting force toward the front area in the conveying direction and the swirling flow acting force toward the rear area in the conveying direction The direction of the transported object is directed based on the magnitude relationship between them, and the transported object can be constructed with a simple device configuration without using a contact-type drive mechanism by utilizing the swirling force of the swirling flow. As long as it is smoothly conveyed while floating in a non-contact state, any specific embodiment may be used.
　すなわち、本発明で採用する旋回流形成部の具体的な実施態様については、穿孔加工や切削加工などにより搬送路面を構成するベース部自体に直接形成されていても良いが、樹脂加工などによるチップ状の成形品等、搬送路面を構成するベース部と別体に形成されていても良く、旋回流形成部がベース部と別体に形成されている場合には、旋回流形成部の素材や製作加工の選択肢を多様化させることができるので、より好ましい。
　また、旋回流形成部の具体的な構造については、空気などの気体から旋回流を形成するものであれば如何なるものであっても何ら構わない。例えば、旋回流形成部の気体噴射口から噴射された気体が、旋回方向へ案内する案内凹所の深さ３～１０ｍｍ程度の周側壁に沿って流れることで旋回流を形成するものでもよい。平面視の案内凹所の形状としては如何なるものであっても何ら構わない。この案内凹所の具体的な形状は、例えば、円形状、環状、楕円形状、多角形状、円形状に切り欠き部が形成された形状などでも良く、更に具体的には、鍔付きの円形カップ状のものがより好ましい。
　また、周側壁を備えた案内凹所内に吸気口とファンとを設けて、ファンが回転することで周側壁で囲繞された案内凹所内から上方へ向かう旋回流を形成するものでも良い。
　そして、本発明における旋回流形成部の具体的な配列形態については、前述したように、左右一対の旋回流形成部にそれぞれ設定された旋回流の旋回方向が、左右一対の旋回流形成部で被搬送物に作用して搬送方向の前方域に向かう旋回流作用力と搬送方向の後方域に向かう旋回流作用力との相対的な差に基づいて被搬送物の搬送方向を方向付けし、旋回流の旋回力を活用して被搬送物を浮上させつつ搬送させることが可能な浮上搬送機構を構築するものであれば如何なる配列形態であっても良い。旋回流形成部が、搬送路面の路幅方向で左右相互に離間して一対のみ配設された配列形態、あるいは、搬送路面の路幅方向で左右相互に離間して一対配設されるとともに搬送路面の搬送方向で前後相互に離間して複数配設された配列形態のいずれであっても何ら構わない。
　さらに、本発明では、搬送路面の路幅方向で左右相互に離間する一対の旋回流形成部が、搬送方向で同じ位置関係で配列されても良く、搬送方向で互いにずれた位置関係で配列されても良い。
　そして、本発明で採用する気体受入凹部の具体的な形状構造については、左右一対の旋回流形成部の相互間で搬送方向に延在する気体合流領域内に設けられて左右一対の旋回流形成部からそれぞれ旋回流として溢出して合流する気体を受け入れるものであれば如何なる形状構造のものであっても良く、たとえば、搬送路面より低位置に存在する気体受入凹部の底面部分が搬送路面の裏面側に向けて開放されているもの、あるいは、搬送路面より低位置に存在する気体受入凹部の底面部分が開閉自在に形成されているものであっても良く、前者の場合には、気体受入凹部が開放されていないときと比べて搬送方向の前方域へ向かって作用する旋回流作用力を大きくして搬送力を増加させることが可能であり、後者の場合には、搬送方向の前方域へ向かって作用する旋回流作用力の大きさと搬送方向の後方域へ向かって作用する旋回流作用力の大きさとの大小関係を変えて被搬送物の移動方向を切り替えることが可能である。
　また、気体受入凹部の具体的な設置形態については、左右一対の旋回流形成部の相互間で搬送方向に延在する気体合流領域内に設けられていれば良く、たとえば、左右一対の旋回流形成部の相互間のやや前方域、中間域、やや後方域のいずれか、あるいは、これらのいずれかを少なくとも組み合わせて一体化した領域内に設置されて左右一対の旋回流形成部からそれぞれ旋回流として溢出して合流する気体を受け入れ可能となるものであれば良い。
　そして、本発明における搬送路面は、平坦であることが重要であり、この平坦な搬送路面の加工精度が高ければ被搬送物のより安定した搬送状態が得られることは言うまでもない。また、必要に応じて、旋回流形成部から溢出された気体が路幅方向の両側縁から過度に漏出することを抑制するとともに被搬送物を搬送方向へ誘導規制するために、ガイド板を搬送路面の両側縁に設けるのも良い。
　なお、本発明の非接触式浮上搬送装置によって浮上搬送させる被搬送物としては、例えば、ガラス、プラスチック、金属などの素材からなる薄板状のものであり、特に好適な被搬送物としては、太陽電池用フラットパネルや携帯電話、液晶テレビ、パソコン用液晶モニターなどに用いる厚さ０．１乃至０．５ｍｍ程度のディスプレイ用ガラス基板である。 That is, a specific embodiment of the swirl flow forming portion employed in the present invention may be directly formed on the base portion itself constituting the conveyance path surface by drilling or cutting, but a chip by resin processing or the like. It may be formed separately from the base part that constitutes the conveyance path surface, such as a shaped molded product, and when the swirl flow forming part is formed separately from the base part, It is more preferable because the options for manufacturing can be diversified.
Further, the specific structure of the swirl flow forming portion may be anything as long as it forms a swirl flow from a gas such as air. For example, the swirl flow may be formed by the gas injected from the gas injection port of the swirl flow forming section flowing along the peripheral side wall having a depth of about 3 to 10 mm of the guide recess for guiding in the swirl direction. The shape of the guide recess in plan view is not particularly limited. The specific shape of the guide recess may be, for example, a circular shape, an annular shape, an elliptical shape, a polygonal shape, a circular shape with a notch formed therein, and more specifically, a circular cup with a hook. The shape is more preferable.
In addition, an air inlet and a fan may be provided in a guide recess provided with a peripheral side wall, and a swirling flow directed upward from the guide recess surrounded by the peripheral side wall may be formed by rotating the fan.
And about the specific arrangement | sequence form of the swirl flow formation part in this invention, as mentioned above, the turning direction of the swirl flow set to the pair of left and right swirl flow formation parts is the pair of left and right swirl flow formation parts. Directing the transport direction of the transported object based on the relative difference between the swirl flow acting force acting on the transported object and moving toward the front area in the transport direction and the swirling flow acting force moving toward the rear area in the transport direction, Any arrangement form may be used as long as it constructs a levitating conveyance mechanism that can utilize the swirl force of the swirling flow to convey the object to be conveyed while levitating. An arrangement in which the swirl flow forming portions are arranged in a pair spaced apart from each other in the width direction of the conveying road surface or a pair of the swirling flow forming portions spaced apart from each other in the width direction of the conveying road surface and conveyed. Any of a plurality of arrangement forms spaced apart from each other in the transport direction of the road surface may be used.
Further, in the present invention, the pair of swirl flow forming portions that are separated from each other in the width direction of the conveyance road surface may be arranged in the same positional relationship in the conveyance direction, or arranged in a positional relationship that is shifted from each other in the conveyance direction. May be.
And about the concrete shape structure of the gas reception recessed part employ | adopted by this invention, it is provided in the gas confluence | merging area | region extended in a conveyance direction between a pair of right-and-left swirl flow formation parts, and a left-right pair swirl flow formation Any shape structure may be used as long as it accepts the gas that overflows and merges as a swirling flow, for example, the bottom portion of the gas receiving recess located at a lower position than the conveyance path surface is the back surface of the conveyance path surface It may be open toward the side, or the bottom part of the gas receiving recess located lower than the conveyance path surface may be formed to be openable and closable. In the former case, the gas receiving recess It is possible to increase the conveying force by increasing the swirl flow acting force acting toward the front area in the conveying direction compared to when the is not opened. In the latter case, the front area in the conveying direction It headed it is possible to switch the moving direction of the swirling flow acting force magnitude and the conveying direction of the swirling flow acting force that acts rearward region size conveyed object by changing the magnitude relation between of acting.
In addition, the specific installation form of the gas receiving recess may be provided in the gas merging region extending in the transport direction between the pair of left and right swirl flow forming portions. For example, the pair of left and right swirl flows Swirl flow from a pair of left and right swirl flow forming portions installed in a slightly forward area, an intermediate area, a slightly rear area or a combination of at least one of these. As long as it can accept the gas that overflows and joins.
And it is important that the conveyance path surface in this invention is flat, and it goes without saying that if the processing accuracy of this flat conveyance path surface is high, a more stable conveyance state of the object to be conveyed can be obtained. In addition, if necessary, the guide plate is transported in order to prevent the gas overflowing from the swirl flow forming part from excessively leaking from both side edges in the road width direction and to guide and restrict the object to be transported in the transport direction. It may be provided on both side edges of the road surface.
In addition, as a to-be-conveyed object to be levitated and conveyed by the non-contact type levitating and conveying apparatus of the present invention, for example, a thin plate made of a material such as glass, plastic, metal, etc. It is a glass substrate for display having a thickness of about 0.1 to 0.5 mm used for a flat panel for a battery, a mobile phone, a liquid crystal television, a liquid crystal monitor for a personal computer, and the like.
　以下に、本発明の第１実施例である非接触式浮上搬送装置１００について、図１乃至図５に基づいて説明する。
　ここで、図１は、本発明の第１実施例の非接触式浮上搬送装置１００を示す斜視図であり、図２は、図１の符号２の箇所の旋回流形成部１３０Ａを示す拡大斜視図であり、図３は、本発明の旋回流形成部１３０Ａ、１３０Ｂによる旋回流Ｒおよび下方へ引き寄せようとする力Ｄが発生する原理を示す概念断面図であり、図４は、参考として気体受入凹部を設けていない構成の旋回流作用力を示す参考図であり、図５は、図１の符号５から視た拡大平面図であって第１実施例において搬送力が発生する原理を示す図である。 Below, the non-contact type levitation conveyance apparatus 100 which is 1st Example of this invention is demonstrated based on FIG. 1 thru | or FIG.
Here, FIG. 1 is a perspective view showing a non-contact type levitation conveying apparatus 100 according to the first embodiment of the present invention, and FIG. 2 is an enlarged perspective view showing a swirl flow forming portion 130A at a location 2 in FIG. FIG. 3 is a conceptual cross-sectional view showing the principle of generation of the swirling flow R and the force D to be drawn downward by the swirling flow forming portions 130A and 130B of the present invention, and FIG. FIG. 5 is a reference diagram showing a swirl flow acting force having a configuration in which a receiving recess is not provided, and FIG. 5 is an enlarged plan view seen from the reference numeral 5 in FIG. 1 and shows the principle of generating a conveying force in the first embodiment. FIG.
　本発明の第１実施例である非接触式浮上搬送装置１００は、図１乃至図５に示すように、気体からなる旋回流Ｒを発生させる旋回流形成部１３０Ａ、１３０Ｂが、例えば、厚さ０．３ｍｍ程度のディスプレイ用ガラス基板からなる薄板状の被搬送物Ｃを搬送する平坦な搬送路面１１１に配設され、旋回流形成部１３０Ａ、１３０Ｂから順次溢出してくる旋回流Ｒを被搬送物Ｃの底面と搬送路面１１１との間隙に介在させて被搬送物Ｃを浮上させるとともに旋回流Ｒの旋回力によって生じる搬送力で被搬送物Ｃを搬送するように構成されている。
　具体的に、非接触式浮上搬送装置１００は、ベース部１１０と、このベース部１１０を支持する機台フレーム１２０とを備えている。
　そして、ベース部１１０における被搬送物Ｃと対向する搬送路面１１１には、樹脂成形加工してなる鍔付きの円形カップ状の旋回流形成部１３０Ａ、１３０Ｂが、搬送路面１１１の路幅方向Ｓで左右相互に離間して一対、すなわち、一組のみ配設されている。
　本実施例では、旋回流形成部１３０Ａ、１３０Ｂが、搬送路面下に設けられて搬送路面上に開口する有底の案内凹所１３１の周側壁１３１ａと、この周側壁１３１ａの接線方向から周側壁１３１ａで囲繞される旋回形成空間領域内へ気体としての空気を噴射して旋回流Ｒを発生させる気体噴射口１３２とを備えている。
　図２に示すように、旋回流形成部１３０Ａ（１３０Ｂ）は、空気を旋回方向へ案内する案内凹所１３１と、この案内凹所１３１を囲繞する円筒状の周側壁１３１ａに沿って空気をそれぞれ噴射する２つの気体噴射口１３２とを有している。
　本実施例の場合には、これら２つの気体噴射口１３２が、案内凹所１３１を囲繞する円筒状の周側壁１３１ａを２分する位置に設けられており、旋回流Ｒを確実かつ安定して発生させるようになっている。 As shown in FIGS. 1 to 5, the non-contact type levitation transfer apparatus 100 according to the first embodiment of the present invention has, for example, thicknesses of swirl flow forming portions 130 </ b> A and 130 </ b> B that generate a swirl flow R made of gas. Arranged on a flat conveyance path surface 111 that conveys a thin plate-like object C made of a display glass substrate of about 0.3 mm, the swirl flow R that sequentially overflows from the swirl flow forming portions 130A and 130B is conveyed. The transported object C is floated by being interposed in the gap between the bottom surface of the transported object C and the transport path surface 111 and transported by the transporting force generated by the swirling force of the swirling flow R.
Specifically, the non-contact type levitation transfer apparatus 100 includes a base portion 110 and a machine base frame 120 that supports the base portion 110.
Then, on the conveyance path surface 111 facing the object C to be conveyed in the base part 110, round cup-shaped swirl flow forming portions 130A and 130B formed by resin molding are provided in the path width direction S of the conveyance path surface 111. Only one pair, that is, one set, is disposed apart from each other on the left and right.
In this embodiment, the swirl flow forming portions 130A and 130B are provided on the peripheral side wall 131a of the bottomed guide recess 131 provided below the transport path surface and opening on the transport path surface, and the peripheral side wall from the tangential direction of the peripheral side wall 131a. A gas injection port 132 for generating a swirl flow R by injecting air as a gas into the swirl forming space region surrounded by 131a.
As shown in FIG. 2, the swirl flow forming portion 130 </ b> A (130 </ b> B) guides air along a guide recess 131 that guides air in the swirl direction and a cylindrical peripheral side wall 131 a that surrounds the guide recess 131. It has two gas injection ports 132 to inject.
In the case of the present embodiment, these two gas injection ports 132 are provided at a position that bisects the cylindrical peripheral side wall 131a surrounding the guide recess 131, so that the swirling flow R can be reliably and stably provided. It is supposed to be generated.
　そして、このように構成された旋回流形成部１３０Ａ、１３０Ｂが、旋回流Ｒを搬送路面１１１と被搬送物Ｃとの間に溢出することにより、被搬送物Ｃを、例えば０．０５ｍｍ程度浮上させている。
　ここで、旋回流形成部１３０Ａの構造と、旋回流形成部１３０Ｂの構造との関係は、旋回流形成部１３０Ａおよび１３０Ｂ間のＴ軸方向（被搬送物Ｃの搬送方向）の仮想中心線を基準とした線対称の関係であり、旋回流形成部１３０Ａ、１３０Ｂでそれぞれ発生する旋回流Ｒａ、Ｒｂの旋回方向（図４、図５参照）が、搬送路面１１１の路幅方向Ｓで相互に逆方向に設定されている。
　なお、本実施例では、旋回流形成部１３０Ａ、１３０Ｂを構成する樹脂成形加工してなる鍔付きの円形カップ状の部材は、ベース部１１０と別部材で形成されてベース部１１０に嵌め込まれているが、ベース部１１０自体に一体的に形成されていてもよい。 Then, the swirl flow forming portions 130A and 130B configured as described above overflow the swirl flow R between the transport path surface 111 and the transported object C, so that the transported object C is levitated about 0.05 mm, for example. I am letting.
Here, the relationship between the structure of the swirl flow forming unit 130A and the structure of the swirl flow forming unit 130B is that the virtual center line in the T-axis direction (conveying direction of the object C) between the swirl flow forming units 130A and 130B. This is a line-symmetrical relationship as a reference, and the swirling directions of the swirling flows Ra and Rb generated in the swirling flow forming portions 130A and 130B (see FIGS. 4 and 5) are mutually in the road width direction S of the conveying path surface 111. It is set in the reverse direction.
In this embodiment, the round cup-shaped member with a flange formed by resin molding forming the swirl flow forming portions 130A and 130B is formed as a member separate from the base portion 110 and is fitted into the base portion 110. However, it may be formed integrally with the base portion 110 itself.
　さらに、気体受入凹部１４０は、左右一対の旋回流形成部１３０Ａ、１３０Ｂの相互間で搬送方向Ｔに延在する気体合流領域Ａ内に設けられている。
　そして、気体受入凹部１４０は、左右一対の旋回流形成部１３０Ａ、１３０Ｂからそれぞれ旋回流Ｒａ、Ｒｂとして溢出して合流する空気を受け入れるために、搬送方向Ｔに向かって細長の矩形状凹部を呈するように構成されている。
　また、機台フレーム１２０は、水平方向に対するベース部１１０の姿勢を調整自在に設けられ、本実施例では、ベース部１１０の搬送路面１１１の設置姿勢が水平となるように調整されている。 Further, the gas receiving recess 140 is provided in a gas merging area A extending in the transport direction T between the pair of left and right swirl flow forming portions 130A and 130B.
The gas receiving recess 140 has an elongated rectangular recess toward the transport direction T in order to receive air that overflows and merges as a swirl flow Ra, Rb from the pair of left and right swirl flow forming portions 130A, 130B, respectively. It is configured as follows.
Further, the machine base frame 120 is provided so that the posture of the base portion 110 with respect to the horizontal direction can be adjusted, and in this embodiment, the installation posture of the conveyance path surface 111 of the base portion 110 is adjusted to be horizontal.
　ここで、先ず、図３を用いて、旋回流形成部１３０Ａ（１３０Ｂ）から溢出される旋回流Ｒ、および、被搬送物Ｃを下方の旋回流形成部１３０Ａ（１３０Ｂ）側へ引き寄せようとする力Ｄが発生する原理について説明する。
　前述した旋回流形成部１３０Ａ（１３０Ｂ）の気体噴射口１３２から空気が噴射されると、噴射された空気が案内凹所１３１の周側壁１３１ａに沿って流れ、案内凹所１３１内で旋回流Ｒが連続的に継続して形成される。
　そして、空気が、気体噴射口１３２から順次噴射されるので、案内凹所１３１内から連続的に発生してくる旋回流Ｒは、被搬送物Ｃ側に向かって上方へ移動し溢出する。
　この際、旋回流Ｒが案内凹所１３１の周側壁１３１ａから上方へ移動し、案内凹所１３１の周側壁１３１ａから離れるため、溢出した旋回流Ｒの遠心力により旋回流Ｒの旋回半径が旋回流Ｒの旋回中心を基準に拡大する。
　つまり、旋回流Ｒが放射方向へ広がりながら旋回する。
　そして、旋回流Ｒの旋回中心近傍の空気が放射方向へ引っ張られるようにして、旋回流Ｒの旋回中心近傍の気圧が下がり旋回流Ｒの旋回部分に生じる気圧と比べて相対的に低くなる。
　そのため、被搬送物Ｃに対して負圧が作用して被搬送物Ｃを下方の旋回流形成部１３０Ａ（１３０Ｂ）側へ吸引して引き寄せようとする力Ｄが発生する。
　この引き寄せようとする力Ｄと被搬送物Ｃを溢出した旋回流Ｒで浮上させようとする力とが釣り合って、被搬送物の浮上位置に被搬送物Ｃが保持される。 Here, first, using FIG. 3, the swirl flow R overflowing from the swirl flow forming unit 130A (130B) and the conveyed object C are attracted to the lower swirl flow forming unit 130A (130B) side. The principle that the force D is generated will be described.
When air is injected from the gas injection port 132 of the swirl flow forming portion 130A (130B) described above, the injected air flows along the peripheral side wall 131a of the guide recess 131, and the swirl flow R in the guide recess 131. Are continuously formed.
And since air is sequentially injected from the gas injection port 132, the swirl | vortex flow R continuously generate | occur | produced from the inside of the guide recess 131 moves upward toward the to-be-conveyed object C side, and overflows.
At this time, since the swirl flow R moves upward from the peripheral side wall 131a of the guide recess 131 and leaves the peripheral wall 131a of the guide recess 131, the swirl radius of the swirl flow R is swirled by the centrifugal force of the overflow swirl flow R. Enlarge with reference to the swirling center of flow R.
That is, the swirl flow R swirls while spreading in the radial direction.
Then, air in the vicinity of the turning center of the swirling flow R is pulled in the radial direction so that the air pressure in the vicinity of the turning center of the swirling flow R decreases and becomes relatively lower than the air pressure generated in the swirling portion of the swirling flow R.
Therefore, a negative pressure acts on the conveyed object C and a force D is generated to attract and attract the conveyed object C toward the lower swirl flow forming portion 130A (130B).
The force D to be attracted and the force to be lifted by the swirling flow R overflowing the conveyed object C are balanced, and the conveyed object C is held at the floating position of the conveyed object.
　続いて、本発明についての理解を容易にするために、図４を用いて、参考として気体受入凹部を設けていない構成の旋回流作用力を説明する。
　図４の参考図では、旋回流形成部１３０Ａ、１３０Ｂが、搬送路面１１１の路幅方向Ｓで左右相互に離間して一対配設されている。
　なお、Ｕ軸が示すのは、浮上方向（鉛直方向）である。
　さらに、旋回流形成部１３０Ａ、１３０Ｂでそれぞれ発生する旋回流Ｒａ、Ｒｂの旋回方向が、搬送路面１１１の路幅方向Ｓで相互に逆方向に設定されている。 Subsequently, in order to facilitate understanding of the present invention, a swirl force acting force having a configuration in which no gas receiving recess is provided will be described with reference to FIG.
In the reference diagram of FIG. 4, a pair of swirl flow forming portions 130 </ b> A and 130 </ b> B are disposed apart from each other in the width direction S of the conveyance path surface 111.
Note that the U axis indicates the flying direction (vertical direction).
Further, the swirl directions of the swirl flows Ra and Rb generated in the swirl flow forming portions 130 </ b> A and 130 </ b> B are set to be opposite to each other in the road width direction S of the conveyance path surface 111.
　ここで、図４中の左側の旋回流形成部１３０Ａの旋回流Ｒａが案内凹所１３１外に出た際、Ｔ軸矢印の方向と逆方向に作用する旋回流Ｒａの旋回流作用力をｆａ１、Ｔ軸矢印の方向に作用する旋回流Ｒａの旋回流作用力をｆａ２とする。
　同様に、図４中の右側の旋回流形成部１３０Ｂの旋回流Ｒｂが案内凹所１３１外に出た際、Ｔ軸矢印の方向と逆方向に作用する旋回流Ｒｂの旋回流作用力をｆｂ１、Ｔ軸矢印の方向に作用する旋回流Ｒｂの旋回流作用力をｆｂ２とする。
　そして、ｆａ１、ｆｂ１の和であり、搬送方向Ｔの後方域（Ｔ軸矢印の方向と逆方向域）へ作用する旋回流作用力をＦ１とし、ｆａ２、ｆｂ２の和であり、搬送方向Ｔの前方域（Ｔ軸矢印の方向域）へ作用する旋回流作用力をＦ２とする。 Here, when the swirling flow Ra of the swirling flow forming portion 130A on the left side in FIG. 4 comes out of the guide recess 131, the swirling flow acting force of the swirling flow Ra acting in the direction opposite to the direction of the T-axis arrow is represented by fa1. The swirling flow acting force of the swirling flow Ra acting in the direction of the T-axis arrow is represented by fa2.
Similarly, when the swirling flow Rb of the swirling flow forming portion 130B on the right side in FIG. 4 goes out of the guide recess 131, the swirling flow acting force of the swirling flow Rb acting in the direction opposite to the direction of the T-axis arrow is expressed as fb1. The swirl flow acting force of the swirl flow Rb acting in the direction of the T-axis arrow is defined as fb2.
The sum of fa1 and fb1 is the sum of fa2 and fb2, and the sum of fa2 and fb2 is the sum of fa2 and fb2, and the sum of fa2 and fb2. The swirl force acting force acting on the front area (direction of the T-axis arrow) is F2.
　このとき、配置された左右一対の旋回流形成部１３０Ａ、１３０Ｂに挟まれた搬送路面１１１の搬送方向Ｔに沿った中央部分側１１１ａでは、双方の旋回流Ｒａ、Ｒｂが逃げ場を失って相互に干渉したり乱れたりしてそれぞれ旋回流Ｒａ、Ｒｂの旋回力、すなわち、旋回流作用力ｆａ１、ｆｂ１が減殺される。
　他方、左右一対の旋回流形成部１３０Ａ、１３０Ｂにおける路幅方向の両外側１１１ｂでは、双方の旋回流Ｒａ、Ｒｂが相互に干渉したりしないため、旋回流Ｒａ、Ｒｂの旋回力、すなわち、旋回流作用力ｆａ２、ｆｂ２が減殺されない。
　その結果、左右一対の旋回流形成部１３０Ａ、１３０Ｂの相互間で搬送方向Ｔの後方域（Ｔ軸矢印の方向と逆方向）へ作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１に対して、左右一対の旋回流形成部１３０Ａ、１３０Ｂの路幅方向の両外側で搬送方向Ｔの前方域（Ｔ軸矢印の方向）へ作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ２が相対的に大きくなる。
　さらに、被搬送物Ｃを吸引して下方の旋回流形成部１３０Ａ、１３０Ｂ側へそれぞれ引き寄せようとする力Ｄに起因して生じる面摩擦によって被搬送物Ｃに伝わる力は、搬送方向Ｔの後方域（Ｔ軸矢印の方向と逆方向）へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１よりも搬送方向Ｔの前方域（Ｔ軸矢印の方向）へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ２の方が大きくなる。 At this time, on the central portion side 111a along the transport direction T of the transport path surface 111 sandwiched between the pair of left and right swirl flow forming portions 130A and 130B, both swirl flows Ra and Rb lose their escape points and become mutual. The swirl forces of the swirl flows Ra and Rb, that is, swirl flow acting forces fa1 and fb1 are reduced by interference and disturbance.
On the other hand, since both the swirl flows Ra and Rb do not interfere with each other on both outer sides 111b in the road width direction in the pair of left and right swirl flow forming portions 130A and 130B, the swirl force of the swirl flows Ra and Rb, that is, swirl The flow acting forces fa2 and fb2 are not diminished.
As a result, the swirl flow acting force F1 of the swirl flows Ra and Rb acting in the rearward direction (the direction opposite to the direction of the T-axis arrow) between the pair of left and right swirl flow forming portions 130A and 130B. The swirling flow acting force F2 of the swirling flows Ra and Rb acting on the front area (the direction of the T-axis arrow) in the transport direction T on both outer sides in the road width direction of the pair of left and right swirling flow forming portions 130A and 130B is relatively growing.
Further, the force transmitted to the transported object C due to the surface friction caused by the force D that sucks the transported object C and draws it toward the lower swirl flow forming portions 130A and 130B, respectively. Swirl flow Ra acting toward the front region (direction of the T-axis arrow) in the transport direction T rather than the swirl flow acting force F1 of the swirl flow Ra, Rb acting toward the region (the direction opposite to the direction of the T-axis arrow) , Rb's swirl force acting force F2 becomes larger.
　したがって、搬送力を受けて被搬送物Ｃは、Ｔ軸の矢印方向へ移動する。
　つまり、左右一対の旋回流形成部１３０Ａ、１３０Ｂが、旋回流Ｒａ、Ｒｂの旋回力を活用して被搬送物Ｃを非接触で浮上させつつ搬送する。
　この際、ただ単に、搬送する方向へ空気の力を被搬送物Ｃに対して付加しているのではなく、上述した負圧による引き寄せようとする力Ｄが被搬送物Ｃに対して作用した状態で、搬送する方向への旋回流作用力Ｆ１、Ｆ２を付加しているため、旋回流作用力Ｆ１、Ｆ２の相対的な差として搬送力が被搬送物Ｃへ確実に伝えられる。 Therefore, the conveyed object C moves in the direction of the arrow on the T axis upon receiving the conveying force.
That is, the pair of left and right swirl flow forming portions 130A and 130B convey the conveyed object C in a non-contact manner using the swirl force of the swirl flows Ra and Rb.
At this time, instead of simply applying an air force to the transported object C in the transporting direction, the force D to be attracted by the negative pressure described above acts on the transported object C. In this state, since the swirl flow acting forces F1 and F2 in the conveying direction are added, the conveying force is reliably transmitted to the conveyed object C as a relative difference between the swirl flow acting forces F1 and F2.
　続いて、図５を用いて、本発明の第１実施例において搬送力が発生する原理について説明する。
　ここで、図４の参考図と同様、図５中の左側の旋回流形成部１３０Ａの旋回流Ｒａが案内凹所１３１外に出た際、Ｔ軸矢印の方向と逆方向に作用する旋回流Ｒａの旋回流作用力をｆａ１、Ｔ軸矢印の方向に作用する旋回流Ｒａの旋回流作用力をｆａ２とする。
　また、図５中の右側の旋回流形成部１３０Ｂの旋回流Ｒｂが案内凹所１３１外に出た際、Ｔ軸矢印の方向と逆方向に作用する旋回流Ｒｂの旋回流作用力をｆｂ１、Ｔ軸矢印の方向に作用する旋回流Ｒｂの旋回流作用力をｆｂ２とする。
　そして、ｆａ１、ｆｂ１の和であり、搬送方向Ｔの前方域（Ｔ軸矢印の方向と逆方向域）へ作用する旋回流作用力をＦ１とし、ｆａ２、ｆｂ２の和であり、搬送方向Ｔの後方域（Ｔ軸矢印の方向域）へ作用する旋回流作用力をＦ２とする。 Next, with reference to FIG. 5, the principle of generating a conveyance force in the first embodiment of the present invention will be described.
Here, as in the reference view of FIG. 4, when the swirling flow Ra of the swirling flow forming portion 130A on the left side in FIG. 5 goes out of the guide recess 131, the swirling flow acts in the direction opposite to the direction of the T-axis arrow. The swirl flow acting force of Ra is fa1, and the swirl flow force of the swirl flow Ra acting in the direction of the T-axis arrow is fa2.
Further, when the swirling flow Rb of the swirling flow forming portion 130B on the right side in FIG. 5 goes out of the guide recess 131, the swirling flow acting force of the swirling flow Rb acting in the direction opposite to the direction of the T-axis arrow is fb1, The swirling flow acting force of the swirling flow Rb acting in the direction of the T-axis arrow is defined as fb2.
And it is the sum of fa1 and fb1, and the swirl flow acting force acting on the front area of the conveyance direction T (the area opposite to the direction of the T-axis arrow) is F1, and is the sum of fa2 and fb2, The swirl force acting force acting on the rear region (direction region of the T-axis arrow) is defined as F2.
　このとき、左右一対の旋回流形成部１３０Ａ、１３０Ｂの路幅方向外側１１１ｂにおける旋回流Ｒａ、Ｒｂは放射方向へ分散されて旋回流Ｒａ、Ｒｂの旋回流作用力ｆａ２、ｆｂ２が小さくなる。
　他方、左右一対の旋回流形成部１３０Ａ、１３０Ｂの間で旋回流Ｒａ、Ｒｂが気体受入凹部１４０に流れ込んで搬送方向Ｔの前方域（Ｔ軸矢印の方向と逆方向域）への流路が形成されて気体受入凹部１４０の大きさによっては気体受入凹部１４０における旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１が路幅方向Ｓで隣り合う二つの旋回流形成部１３０Ａ、１３０Ｂの路幅方向外側１１１ｂにおける旋回流Ｒの旋回流作用力Ｆ２より大きな関係となる。 At this time, the swirling flows Ra and Rb on the road width direction outer side 111b of the pair of left and right swirling flow forming portions 130A and 130B are dispersed in the radial direction, and the swirling flow acting forces fa2 and fb2 of the swirling flows Ra and Rb are reduced.
On the other hand, the swirl flow Ra, Rb flows into the gas receiving recess 140 between the pair of left and right swirl flow forming portions 130A, 130B, and a flow path to the front region in the transport direction T (the region opposite to the direction of the T-axis arrow). Depending on the size of the gas receiving recess 140 formed, the swirling flow acting force F1 of the swirling flows Ra and Rb in the gas receiving recess 140 is outside in the road width direction of the two swirling flow forming portions 130A and 130B adjacent in the road width direction S. The relationship is greater than the swirl flow acting force F2 of the swirl flow R at 111b.
　さらに、引き寄せようとする力Ｄに起因して生じる面摩擦によって被搬送物Ｃに伝わる力は搬送方向Ｔの後方域（Ｔ軸矢印の方向域）へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ２よりも搬送方向Ｔの前方域（Ｔ軸矢印の方向と逆方向域）へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１の方が大きくなる。
　したがって、搬送力を受けて被搬送物Ｃは、Ｔ軸矢印の方向と逆方向へ移動する。
　つまり、気体受入凹部１４０を設けていない構成（図４参照）と比べて搬送時の移動方向が逆向きの関係となる。 Further, the force transmitted to the conveyed object C due to the surface friction caused by the force D to be attracted is the swirl of the swirl flows Ra and Rb acting toward the rear region in the transport direction T (the direction of the T-axis arrow). The swirling flow acting force F1 of the swirling flows Ra and Rb acting toward the front region in the transport direction T (the region opposite to the direction of the T-axis arrow) is larger than the flowing force F2.
Therefore, the conveyed object C moves in the direction opposite to the direction of the T-axis arrow in response to the conveying force.
That is, the moving direction during transport is in a reverse relationship compared to a configuration in which the gas receiving recess 140 is not provided (see FIG. 4).
　なお、技術的思想として、搬送時の移動方向が逆向きの関係となるためには、気体受入凹部１４０の大きさ、特に、搬送方向Ｔから視た断面積を、ある程度大きくする必要がある。
　本実施例の気体受入凹部１４０の大きさは、この関係を満たす十分な大きさであるものとする。
　つまり、気体受入凹部１４０を設けても必ず搬送時の移動方向が図４の参考図の例と逆向きの関係になるわけではなく、例えば、搬送方向Ｔから視た断面積を徐々に大きくすると、旋回流作用力Ｆ１と旋回流作用力Ｆ２とが釣り合うときがある。
　そして、釣り合ったときよりも搬送方向Ｔから視た断面積が大きければ、図４の参考図の例と逆向きの関係になる。 In addition, as a technical idea, in order for the moving direction at the time of conveyance to be reversed, it is necessary to increase the size of the gas receiving recess 140, in particular, the cross-sectional area viewed from the conveyance direction T to some extent.
The size of the gas receiving recess 140 of the present embodiment is assumed to be sufficient to satisfy this relationship.
That is, even if the gas receiving recess 140 is provided, the movement direction during the conveyance is not necessarily opposite to the example of the reference diagram of FIG. 4. For example, if the cross-sectional area viewed from the conveyance direction T is gradually increased, In some cases, the swirling flow acting force F1 and the swirling flow acting force F2 are balanced.
And if the cross-sectional area seen from the conveyance direction T is larger than when balanced, the relationship is opposite to the example of the reference diagram of FIG.
　また、搬送路面１１１より低位置に存在する気体受入凹部１４０の底面部分が、搬送路面１１１の裏面側に向けて開放されているように構成してもよい。
　この場合、気体受入凹部１４０に入ってきた旋回流Ｒａ、Ｒｂの空気の十分な逃げ場ができて空気の流れが妨げられない。
　つまり、気体受入凹部１４０が開放されていないときと比べて搬送方向Ｔの前方域（Ｔ軸矢印の方向と逆方向域）へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１が大きくなり搬送力が増加する。 Further, the bottom surface portion of the gas receiving recess 140 existing at a position lower than the transport path surface 111 may be configured to be open toward the back surface side of the transport path surface 111.
In this case, a sufficient escape space for the swirling flow Ra and Rb air that has entered the gas receiving recess 140 is created, and the air flow is not hindered.
That is, the swirl flow acting force F1 of the swirl flow Ra and Rb acting toward the front region in the transport direction T (the region opposite to the direction of the T-axis arrow) is larger than when the gas receiving recess 140 is not opened. As a result, the conveyance force increases.
　また、旋回流作用力Ｆ１と旋回流作用力Ｆ２とが釣り合うときの搬送方向Ｔから視た気体受入凹部（１４０）の断面積よりも小さい場合であっても、気体受入凹部１４０の搬送路面１１１より底側が開放されていることにより、旋回流作用力Ｆ１と旋回流作用力Ｆ２とが釣り合うときの搬送方向Ｔから視た気体受入凹部（１４０）の断面積よりも大きい場合と同じ効果が得られる。 Even if the cross-sectional area of the gas receiving recess (140) viewed from the transport direction T when the swirling flow acting force F1 and the swirling flow acting force F2 are balanced is smaller than the cross-sectional area of the gas receiving recess 140, the transport path surface 111 of the gas receiving recess 140. Since the bottom side is more open, the same effect is obtained as when the cross-sectional area of the gas receiving recess (140) as viewed from the conveyance direction T when the swirling flow acting force F1 and the swirling flow acting force F2 are balanced is larger. It is done.
　さらに、本実施例では、旋回流形成部１３０Ａ、１３０Ｂから搬送路面１１１と被搬送物Ｃとの間隙に溢出して過剰に滞留する空気を逃す気体解放孔１５０が、搬送路面１１１に分散して配設されている。
　これにより、気体解放孔１５０が過剰に滞留する空気の逃げ場となり、旋回流形成部１３０Ａ、１３０Ｂから順次溢出してくる空気の流れが妨げられない。
　つまり、気体解放孔１５０が設けられていないときと比べて搬送方向Ｔの前方域および後方域へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力を大きくするとともにその相対的な差も大きくして搬送力を増加させる。 Furthermore, in this embodiment, the gas release holes 150 that escape from the swirling flow forming portions 130A and 130B to the excess space that overflows into the gap between the conveyance path surface 111 and the object to be conveyed C are dispersed on the conveyance path surface 111. It is arranged.
As a result, the gas release hole 150 becomes an escape place for the air that stays excessively, and the flow of air that sequentially overflows from the swirl flow forming portions 130A and 130B is not hindered.
That is, as compared with the case where the gas release hole 150 is not provided, the swirl flow acting force of the swirl flows Ra and Rb acting toward the front area and the rear area in the transport direction T is increased and the relative difference thereof is also large. To increase the conveying force.
　また、本実施例では、旋回流形成部１３０Ａ、１３０Ｂが、空気の噴射力を択一的に選択可能な別部品として搬送路面１１１に着脱自在に取り付けられている。
　これにより、旋回流形成部１３０Ａ、１３０Ｂを付け替えるだけで旋回流Ｒによる旋回力の強さが変更可能となる。
　例えば、気体噴射口１３２の孔の大きさが変わることにより旋回流Ｒによる旋回力の強さが変わり、被搬送物Ｃの搬送速度を自在に調整することが可能となる。 In this embodiment, the swirl flow forming portions 130 </ b> A and 130 </ b> B are detachably attached to the conveyance path surface 111 as separate components that can alternatively select the air injection force.
Thereby, the strength of the swirl force by the swirl flow R can be changed simply by changing the swirl flow forming portions 130A and 130B.
For example, the strength of the swirling force due to the swirling flow R is changed by changing the size of the hole of the gas injection port 132, and the conveying speed of the conveyed object C can be freely adjusted.
　このようにして得られた本発明の第１実施例である非接触式浮上搬送装置１００は、旋回流形成部１３０Ａ、１３０Ｂが、搬送路面１１１の路幅方向Ｓで左右相互に離間して一対配設され、旋回流形成部１３０Ａ、１３０Ｂでそれぞれ発生する旋回流Ｒａ、Ｒｂの旋回方向が、搬送路面１１１の路幅方向Ｓで相互に逆方向に設定され、左右一対の旋回流形成部１３０Ａ、１３０Ｂからそれぞれ旋回流Ｒａ、Ｒｂとして溢出して合流する空気を受け入れる気体受入凹部１４０が、左右一対の旋回流形成部１３０Ａ、１３０Ｂの相互間で搬送方向Ｔに延在する気体合流領域Ａ内に設けられていることにより、一対の旋回流形成部１３０Ａ、１３０Ｂが、旋回流Ｒａ、Ｒｂの旋回力を活用して接触式の駆動機構を付設することなく簡便な装置構成で、被搬送物Ｃを非接触状態で浮上させながら円滑に搬送することができ、搬送方向Ｔの前方域（Ｔ軸矢印の方向と逆方向）への搬送力（Ｆ１とＦ２との相対的な差）を調整することができる。 In the non-contact type levitation conveyance device 100 according to the first embodiment of the present invention thus obtained, the swirl flow forming portions 130A and 130B are separated from each other in the road width direction S of the conveyance road surface 111 and are paired with each other. The swirl directions of the swirl flows Ra and Rb generated in the swirl flow forming portions 130A and 130B are set to be opposite to each other in the road width direction S of the conveyance path surface 111, and a pair of left and right swirl flow forming portions 130A is formed. 130B, a gas receiving recess 140 for receiving air that overflows and merges as swirl flows Ra and Rb, respectively, extends in the conveying direction T between the pair of left and right swirl flow forming portions 130A and 130B. With this arrangement, the pair of swirl flow forming portions 130A and 130B can utilize the swirl force of the swirl flows Ra and Rb to provide a simple device configuration without providing a contact-type drive mechanism. The transported object C can be smoothly transported while floating in a non-contact state, and transport force (relative to F1 and F2) in the forward area of the transport direction T (the direction opposite to the direction of the T-axis arrow) Difference) can be adjusted.
　また、旋回流形成部１３０Ａ、１３０Ｂが、搬送路面下に設けられて搬送路面上に開口する有底の周側壁１３１ａと、この周側壁１３１ａの接線方向から周側壁１３１ａで囲繞される旋回形成空間領域内へ空気を噴射して旋回流Ｒａ、Ｒｂを発生させる気体噴射口１３２とを備えていることにより、モータなどの回転構造を不要として非接触式浮上搬送装置１００を簡素化することができる。 The swirl forming space 130A, 130B is provided with a bottomed peripheral side wall 131a provided below the transport path surface and opened on the transport path surface, and a swirl formation space surrounded by the peripheral side wall 131a from the tangential direction of the peripheral side wall 131a. By providing the gas injection port 132 for injecting air into the region to generate the swirling flows Ra and Rb, the non-contact type levitation transfer device 100 can be simplified without requiring a rotating structure such as a motor. .
　さらに、本実施例では、搬送路面１１１より低位置に存在する気体受入凹部１４０の底面部分が、搬送路面１１１の裏面側に向けて開放されていることにより、気体受入凹部１４０が開放されていないときと比べて搬送方向Ｔの前方域（Ｔ軸矢印の方向と逆方向域）へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１を大きくして搬送力を増加させることができる。 Further, in the present embodiment, the gas receiving recess 140 is not opened because the bottom surface portion of the gas receiving recess 140 existing at a position lower than the transport path surface 111 is opened toward the back side of the transport path surface 111. Compared to the time, the swirling flow acting force F1 of the swirling flows Ra and Rb acting toward the front region of the conveying direction T (the region opposite to the direction of the T-axis arrow) can be increased to increase the conveying force.
　さらに、旋回流形成部１３０Ａ、１３０Ｂから搬送路面１１１と被搬送物Ｃとの間隙に溢出して過剰に滞留する空気を逃す気体解放孔１５０が、搬送路面１１１に分散して配設されていることにより、気体解放孔１５０が設けられていないときと比べて搬送方向Ｔの前方域および後方域へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１、Ｆ２を大きくするとともにその相対的な差も大きくして搬送力を増加させることができる。 Further, gas release holes 150 are provided in a distributed manner on the conveyance path surface 111 for releasing excess air that overflows from the swirl flow forming portions 130A and 130B to the gap between the conveyance path surface 111 and the object C to be conveyed. As a result, the swirl flow acting forces F1 and F2 of the swirl flows Ra and Rb acting toward the front region and the rear region in the transport direction T are increased and relative to that when the gas release hole 150 is not provided. The difference can be increased to increase the conveying force.
　また、旋回流形成部１３０Ａ、１３０Ｂが、空気の噴射力を択一的に選択可能な別部品として搬送路面１１１に着脱自在に取り付けられていることにより、バルブなどの噴射力調整手段を用いることなく搬送方向Ｔへの旋回流作用力Ｆ１、Ｆ２を調整して搬送力を調整することができるなど、その効果は甚大である。 In addition, the swirl flow forming portions 130A and 130B are detachably attached to the conveyance path surface 111 as separate components capable of selectively selecting the air injection force, thereby using an injection force adjusting means such as a valve. The effect of the swirling flow acting force F1, F2 in the conveying direction T can be adjusted without any adjustment, and the effect is enormous.
　続いて、本発明の第２実施例である非接触式浮上搬送装置２００について、図６および図７に基づいて説明する。
　ここで、図６は、本発明の第２実施例の非接触式浮上搬送装置２００を示す斜視図であり、図７は、図６の符号７から視た平面図である。
　第２実施例の非接触式浮上搬送装置２００は、第１実施例の非接触式浮上搬送装置１００の旋回流形成部１３０Ａ、１３０Ｂの配置数および配列形態を変更したものであり、多くの要素について第１実施例の非接触式浮上搬送装置１００と共通するので、共通する事項については詳しい説明を省略し、下２桁が共通する２００番台の符号を付すのみとする。 Next, a non-contact type levitation transport apparatus 200 that is a second embodiment of the present invention will be described with reference to FIGS.
Here, FIG. 6 is a perspective view showing a non-contact type levitation conveying apparatus 200 of the second embodiment of the present invention, and FIG. 7 is a plan view seen from the reference numeral 7 in FIG.
The non-contact type levitation transfer device 200 of the second embodiment is obtained by changing the number and arrangement of the swirl flow forming portions 130A and 130B of the non-contact type levitation transfer device 100 of the first embodiment. Is common to the non-contact type levitation transfer apparatus 100 of the first embodiment, detailed description of common items is omitted, and only the reference numbers of the 200 series in which the last two digits are common are attached.
　本発明の第２実施例である非接触式浮上搬送装置２００では、図６および図７に示すように、旋回流形成部２３０Ａおよび旋回流形成部２３０Ｂが、搬送路面２１１の路幅方向Ｓで左右相互に離間して一対配設されているとともに搬送路面２１１の搬送方向Ｔで前後相互に離間して複数配設されている。
　さらに、旋回流形成部２３０Ａ、２３０Ｂでそれぞれ発生する旋回流Ｒａ、Ｒｂの旋回方向が、搬送路面２１１の路幅方向Ｓで相互に逆方向に設定されているとともに搬送路面２１１の搬送方向Ｔで相互に同一方向に設定されている。
　これにより、上述した第１実施例と同様の効果を得ることができる。
　さらに、搬送方向Ｔに配列された複数組の旋回流形成部２３０Ａ、２３０Ｂで生じた旋回流Ｒａ、Ｒｂのそれぞれが被搬送物Ｃに対して搬送方向Ｔへの旋回流作用力Ｆ１、Ｆ２を作用する。そして、旋回流作用力Ｆ１、Ｆ２の相対的な差として搬送力が被搬送物Ｃに作用する。 In the non-contact type levitation conveyance device 200 according to the second embodiment of the present invention, as shown in FIGS. 6 and 7, the swirl flow forming unit 230 </ b> A and the swirl flow forming unit 230 </ b> B are A pair is disposed apart from each other on the left and right sides, and a plurality of them are disposed apart from each other in the transport direction T on the transport path surface 211.
Further, the swirling directions of the swirling flows Ra and Rb generated respectively in the swirling flow forming portions 230A and 230B are set to be opposite to each other in the road width direction S of the conveying path surface 211 and in the conveying direction T of the conveying path surface 211. They are set in the same direction.
Thereby, the same effect as the first embodiment described above can be obtained.
Further, each of the swirl flows Ra and Rb generated in the plurality of swirl flow forming portions 230A and 230B arranged in the transport direction T has a swirl flow acting force F1 and F2 in the transport direction T with respect to the conveyed object C. Works. And a conveyance force acts on the to-be-conveyed object C as a relative difference of the swirl | flow flow action forces F1 and F2.
　このようにして得られた本発明の第２実施例である非接触式浮上搬送装置２００は、旋回流形成部２３０Ａ、２３０Ｂが、搬送路面２１１の路幅方向Ｓで左右相互に離間して一対配設されているとともに搬送路面２１１の搬送方向Ｔで前後相互に離間して複数配設され、旋回流形成部２３０Ａ、２３０Ｂでそれぞれ発生する旋回流Ｒａ、Ｒｂの旋回方向が、搬送路面２１１の路幅方向Ｓで相互に逆方向に設定されているとともに搬送路面２１１の搬送方向Ｔで相互に同一方向に設定され、左右一対の旋回流形成部２３０Ａ、２３０Ｂからそれぞれ旋回流Ｒａ、Ｒｂとして溢出して合流する空気を受け入れる気体受入凹部２４０が、左右一対の旋回流形成部２３０Ａ、２３０Ｂの相互間で搬送方向に延在する気体合流領域Ａ内に設けられていることにより、一対の旋回流形成部２３０Ａ、２３０Ｂが、接触式の駆動機構を付設することなく簡便な装置構成で、被搬送物Ｃを非接触状態で浮上させつつ搬送力を発生させて被搬送物Ｃを非接触で円滑に搬送することができ、上記第１実施例と比べて搬送力を大きくすることができるなど、その効果は甚大である。 In the non-contact type levitation conveyance device 200 according to the second embodiment of the present invention thus obtained, the swirl flow forming portions 230A and 230B are separated from each other in the road width direction S of the conveyance road surface 211 and are paired with each other. The swirl flows Ra and Rb generated in the swirl flow forming portions 230A and 230B are arranged in a plurality of positions spaced apart from each other in the transport direction T of the transport path surface 211. The reverse direction is set in the path width direction S and the same direction is set in the transfer direction T on the transfer road surface 211, and overflows from the pair of left and right swirl flow forming portions 230A and 230B as swirl flows Ra and Rb, respectively. Thus, a gas receiving recess 240 for receiving the air to be merged is provided in the gas merging region A extending in the transport direction between the pair of left and right swirl flow forming portions 230A and 230B. Thus, the pair of swirl flow forming portions 230A and 230B generate a transport force while floating the transported object C in a non-contact state with a simple apparatus configuration without attaching a contact-type drive mechanism. The effect can be enormous, for example, the object C can be smoothly conveyed in a non-contact manner, and the conveying force can be increased as compared with the first embodiment.
　続いて、本発明の第３実施例である非接触式浮上搬送装置３００について、図８Ａおよび図８Ｂに基づいて説明する。
　ここで、図８Ａは、本発明の第３実施例において気体受入凹部３４０の搬送路面３１１より底側が閉塞しているときに搬送力が発生する原理を示す図であり、図８Ｂは、気体受入凹部３４０の搬送路面３１１より底側が開放しているときに搬送力が発生する原理を示す図である。 Next, a non-contact levitation transfer apparatus 300 that is a third embodiment of the present invention will be described with reference to FIGS. 8A and 8B.
Here, FIG. 8A is a diagram illustrating the principle of generating a transport force when the bottom side of the transport path surface 311 of the gas receiving recess 340 is closed in the third embodiment of the present invention, and FIG. It is a figure which shows the principle which conveyance force generate | occur | produces when the bottom side is open | released from the conveyance path surface 311 of the recessed part 340. FIG.
　第３実施例の非接触式浮上搬送装置３００は、第１実施例の非接触式浮上搬送装置１００の搬送路面１１１より低位置に存在する気体受入凹部１４０の底面部分を開閉自在に形成したものであり、多くの要素について第１実施例の非接触式浮上搬送装置１００と共通するので、共通する事項については詳しい説明を省略し、下２桁が共通する３００番台の符号を付すのみとする。 The non-contact type levitation transport device 300 of the third embodiment is formed by opening and closing the bottom surface portion of the gas receiving recess 140 that is located lower than the transport path surface 111 of the non-contact levitation transport device 100 of the first embodiment. Since many elements are common to the non-contact type levitating and conveying apparatus 100 of the first embodiment, detailed description of common items is omitted, and only the reference numbers in the 300 series having the lower two digits are attached. .
　本発明の第３実施例である非接触式浮上搬送装置３００では、図８Ａおよび図８Ｂに示すように、左右一対の旋回流形成部３３０Ａ、３３０Ｂからそれぞれ旋回流Ｒａ、Ｒｂとして溢出して合流する空気を受け入れる気体受入凹部３４０が、左右一対の旋回流形成部３３０Ａ、３３０Ｂの相互間で搬送方向Ｔに延在する気体合流領域Ａ内に設けられている。 As shown in FIGS. 8A and 8B, the non-contact type levitating apparatus 300 according to the third embodiment of the present invention overflows and merges as a swirl flow Ra and Rb from the pair of left and right swirl flow forming portions 330A and 330B, respectively. A gas receiving recess 340 for receiving air is provided in the gas merging region A extending in the transport direction T between the pair of left and right swirl flow forming portions 330A and 330B.
　そして、気体受入凹部３４０の大きさ、特に、搬送方向Ｔから視た断面積は、旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１と旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ２とが釣り合うときの搬送方向Ｔから視た気体受入凹部（３４０）の断面積よりも小さく設けられている。
　図８Ａに示すように、開閉切り替え手段３６０によって搬送路面３１１より低位置に存在する気体受入凹部３４０の底面部分が閉塞された状態になっている。 The size of the gas receiving recess 340, in particular, the cross-sectional area viewed from the transport direction T, is a balance between the swirling flow acting force F1 of the swirling flows Ra and Rb and the swirling flow acting force F2 of the swirling flows Ra and Rb. It is smaller than the cross-sectional area of the gas receiving recess (340) as viewed from the transport direction T.
As shown in FIG. 8A, the open / close switching means 360 is in a state where the bottom surface portion of the gas receiving recess 340 existing at a position lower than the conveyance path surface 311 is closed.
　このとき、左右一対の旋回流形成部３３０Ａ、３３０Ｂの間の中央部分側３１１ａでは、旋回流Ｒａ、Ｒｂが気体受入凹部３４０に流れ込んでＴ軸の矢印と逆方向への流路が形成されるが気体受入凹部３４０の大きさが十分ではないため、左右一対の旋回流形成部３３０Ａ、３３０Ｂの間の中央部分側３１１ａでは旋回流Ｒａ、Ｒｂが逃げ場を失って旋回流Ｒの旋回流作用力ｆａ１、ｆｂ１が減殺される。
　他方、左右一対の旋回流形成部３３０Ａ、３３０Ｂの路幅方向外側３１１ｂでは、双方の旋回流Ｒａ、Ｒｂが相互に干渉したりしないため、旋回流Ｒａ、Ｒｂの旋回流作用力ｆａ２、ｆｂ２は減殺されない。 At this time, in the central portion side 311a between the pair of left and right swirl flow forming portions 330A and 330B, the swirl flow Ra and Rb flow into the gas receiving recess 340 to form a flow path in the direction opposite to the arrow of the T axis. However, since the size of the gas receiving recess 340 is not sufficient, the swirl flow Ra, Rb loses the escape field on the central portion side 311a between the pair of left and right swirl flow forming portions 330A, 330B, and the swirl flow acting force of the swirl flow R fa1 and fb1 are killed.
On the other hand, in the road width direction outer side 311b of the pair of left and right swirl flow forming portions 330A and 330B, both swirl flows Ra and Rb do not interfere with each other. Therefore, the swirl flow acting forces fa2 and fb2 of the swirl flows Ra and Rb are Not killed.
　そして、左右一対の旋回流形成部３３０Ａ、３３０Ｂの間の中央部分側３１１ａでＴ軸の矢印と逆方向へ作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１に対して相対的に左右一対の旋回流形成部３３０Ａ、３３０Ｂの路幅方向外側３１１ｂでＴ軸の矢印方向へ作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ２が大きな関係となる。
　さらに、前述した引き寄せようとする力Ｄに起因して生じる面摩擦によって被搬送物Ｃに伝わる力はＴ軸の矢印と逆方向へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１よりもＴ軸の矢印方向へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ２の方が大きくなる。
　したがって、搬送力を受けて被搬送物Ｃは、Ｔ軸の矢印方向へ移動する。 The pair of left and right swirling flows Ra and Rb acting in the direction opposite to the arrow on the T axis on the central portion side 311a between the pair of left and right swirling flow forming portions 330A and 330B is relatively paired with the left and right swirling flow acting force F1. The swirl flow acting force F2 of the swirl flows Ra and Rb acting in the arrow direction of the T axis on the road width direction outer side 311b of the swirl flow forming portions 330A and 330B is greatly related.
Further, the force transmitted to the conveyed object C due to the surface friction caused by the force D to be attracted is the swirl flow acting force F1 of the swirl flow Ra and Rb acting in the direction opposite to the arrow of the T axis. In addition, the swirl flow acting force F2 of the swirl flows Ra and Rb acting in the direction of the arrow of the T axis becomes larger.
Therefore, the conveyed object C moves in the direction of the arrow on the T axis upon receiving the conveying force.
　そして、図８Ｂに示すように、開閉切り替え手段３６０によって搬送路面３１１より低位置に存在する気体受入凹部３４０の底面部分が開放された状態に切り替えられる。
　すると、左右一対の旋回流形成部３３０Ａ、３３０Ｂの間の中央部分側３１１ａでは、気体受入凹部３４０に入ってきた旋回流Ｒａ、Ｒｂの空気の十分な逃げ場ができて空気の流れが妨げられなくなり、気体受入凹部３４０が閉塞されたときと比べて、Ｔ軸の矢印と逆方向へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１が大きくなり搬送力が増加する。
　つまり、旋回流Ｒａ、Ｒｂの旋回流作用力ｆａ１、ｆｂ１が減殺されない、または、減殺される程度が小さい。 Then, as shown in FIG. 8B, the open / close switching means 360 switches to a state in which the bottom surface portion of the gas receiving recess 340 existing at a position lower than the transport path surface 311 is opened.
Then, in the central portion side 311a between the pair of left and right swirl flow forming portions 330A and 330B, a sufficient escape space for the air of the swirl flow Ra and Rb that has entered the gas receiving recess 340 can be formed, and the air flow is not hindered. Compared with when the gas receiving recess 340 is closed, the swirling flow acting force F1 of the swirling flows Ra and Rb acting in the direction opposite to the arrow of the T-axis is increased and the conveying force is increased.
In other words, the swirling flow acting forces fa1 and fb1 of the swirling flows Ra and Rb are not killed or the degree to which they are killed is small.
　そして、左右一対の旋回流形成部３３０Ａ、３３０Ｂの間の中央部分側３１１ａの気体受入凹部３４０における旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１が左右一対の旋回流形成部３３０Ａ、３３０Ｂの路幅方向外側３１１ｂにおける旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ２より大きな関係となる。
　さらに、前述した引き寄せようとする力Ｄに起因して生じる面摩擦によって被搬送物Ｃに伝わる力はＴ軸の矢印方向へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ２よりもＴ軸の矢印と逆方向へ向かって作用する旋回流Ｒａ、Ｒｂの旋回流作用力Ｆ１の方が大きくなる。
　したがって、搬送力を受けて被搬送物Ｃは、Ｔ軸の矢印と逆方向へ移動する。 Then, the swirling flow acting force F1 of the swirling flows Ra and Rb in the gas receiving recess 340 on the central portion side 311a between the pair of left and right swirling flow forming portions 330A and 330B is the road width of the pair of left and right swirling flow forming portions 330A and 330B. The relationship is larger than the swirl flow acting force F2 of the swirl flows Ra and Rb in the direction outer side 311b.
Further, the force transmitted to the conveyed object C due to the surface friction caused by the force D to be attracted as described above is greater than the swirl flow acting force F2 of the swirl flows Ra and Rb acting in the arrow direction of the T axis. The swirling flow acting force F1 of the swirling flows Ra and Rb acting in the direction opposite to the arrow of the shaft is larger.
Accordingly, the conveyed object C moves in the direction opposite to the arrow on the T axis upon receiving the conveying force.
　このようにして得られた本発明の第３実施例である非接触式浮上搬送装置３００は、搬送路面３１１より低位置に存在する気体受入凹部３４０の底面部分が、開閉自在に形成されていることにより、被搬送物Ｃの搬送時の移動方向を切り替えることができるなど、その効果は甚大である。 In the non-contact type levitation conveyance device 300 according to the third embodiment of the present invention thus obtained, the bottom surface portion of the gas receiving recess 340 existing at a position lower than the conveyance path surface 311 is formed to be freely opened and closed. As a result, the moving direction of the transported object C can be switched, and the effect is enormous.
　続いて、本発明の第４実施例である非接触式浮上搬送装置４００について、図９Ａ～図９Ｃに基づいて説明する。
　ここで、図９Ａ～図９Ｃは、本発明の第４実施例の気体受入凹部４４０ａ～４４０ｃのバリエーションを示す平面図である。
　第４実施例の非接触式浮上搬送装置４００は、第１実施例の非接触式浮上搬送装置１００の気体受入凹部１４０の形状や配置を変更したものであり、多くの要素について第１実施例の非接触式浮上搬送装置１００と共通するので、共通する事項については詳しい説明を省略し、下２桁が共通する４００番台の符号を付すのみとする。 Next, a non-contact levitation transfer apparatus 400 that is a fourth embodiment of the present invention will be described with reference to FIGS. 9A to 9C.
Here, FIGS. 9A to 9C are plan views showing variations of the gas receiving recesses 440a to 440c of the fourth embodiment of the present invention.
The non-contact type levitation transfer device 400 of the fourth embodiment is obtained by changing the shape and arrangement of the gas receiving recess 140 of the non-contact type levitation transfer device 100 of the first embodiment. The non-contact type levitating and conveying apparatus 100 is the same as the non-contact type levitating and conveying apparatus 100. Therefore, detailed description of the common items is omitted, and only the 400th series code having the same lower two digits is attached.
　第１変形例では、図９Ａに示すように、気体受入凹部４４０ａが、左右一対の旋回流形成部４３０Ａ、４３０Ｂの相互間で搬送方向Ｔに延在する気体合流領域Ａ内に配設されている。
　気体受入凹部４４０ａは、左右一対の旋回流形成部４３０Ａ、４３０Ｂのそれぞれの中心を結ぶ仮想線上に配設されていなくても、その近傍に配設されていれば上述した第１実施例と同様の作用効果を得ることができる。 In the first modified example, as shown in FIG. 9A, the gas receiving recess 440a is disposed in the gas confluence region A extending in the transport direction T between the pair of left and right swirl flow forming portions 430A and 430B. Yes.
Even if the gas receiving recess 440a is not disposed on an imaginary line connecting the centers of the pair of left and right swirl flow forming portions 430A and 430B, the gas receiving recess 440a is similar to the first embodiment described above as long as it is disposed in the vicinity thereof. The effect of this can be obtained.
　第２変形例では、図９Ｂに示すように、気体受入凹部４４０ｂが、左右一対の旋回流形成部４３０Ａ、４３０Ｂの相互間で搬送方向Ｔに延在する気体合流領域Ａ内に配設されている。
　気体受入凹部４４０ｂは、平面視で搬送方向Ｔに長尺な楕円形に形成されている。
　この場合も上述した第１実施例と同様の作用効果を得ることができる。 In the second modified example, as shown in FIG. 9B, the gas receiving recess 440b is disposed in the gas confluence region A extending in the transport direction T between the pair of left and right swirl flow forming portions 430A and 430B. Yes.
The gas receiving recess 440b is formed in an elliptical shape that is long in the transport direction T in plan view.
In this case, the same effect as that of the first embodiment can be obtained.
　第３変形例では、図９Ｃに示すように、気体受入凹部４４０ｃが、左右一対の旋回流形成部４３０Ａ、４３０Ｂの相互間で搬送方向Ｔに延在する気体合流領域Ａ内に配設されている。
　気体受入凹部４４０ｃは、平面視で円形に形成され、路幅方向Ｓで隣り合う二つの旋回流形成部４３０Ａ、４３０Ｂのそれぞれの中心を結ぶ線に対して搬送方向Ｔでずれた位置に配設されている。
　この場合も上述した第１実施例と同様の作用効果を得ることができる。 In the third modified example, as shown in FIG. 9C, the gas receiving recess 440c is disposed in the gas confluence region A extending in the transport direction T between the pair of left and right swirl flow forming portions 430A and 430B. Yes.
The gas receiving recess 440c is formed in a circular shape in plan view, and is disposed at a position shifted in the transport direction T with respect to a line connecting the centers of the two swirl flow forming portions 430A and 430B adjacent in the road width direction S. Has been.
In this case, the same effect as that of the first embodiment can be obtained.
１００、　２００、　３００、　４００　・・・非接触式浮上搬送装置
１１０、　２１０、　　　　　　４１０　・・・ベース部
１１１、　２１１、　３１１、　４１１　・・・搬送路面
１２０、　２２０　　　　　　　　　　　・・・機台フレーム
１３０Ａ、２３０Ａ、３３０Ａ、４３０Ａ・・・旋回流形成部
１３０Ｂ、２３０Ｂ、３３０Ｂ、４３０Ｂ・・・旋回流形成部
１３１、　２３１、　３３１、　４３１　・・・案内凹所
１３２　　　　　　　　　　　　　　　　・・・気体噴射口
　　　　　２４０、　３４０、　４４０　・・・気体受入凹部
１５０、　２５０　　　　　　　　　　　・・・気体解放孔
　　　　　　　　　　３６０　　　　　　・・・開閉切り替え手段
Ａ　　　　　　　・・・気体合流領域
Ｃ　　　　　　　・・・被搬送物
Ｄ　　　　　　　・・・下方へ引き寄せようとする力
Ｆ１　　　　　　・・・Ｔ軸矢印の方向と逆方向へ作用する旋回流作用力
ｆａ１、ｆａ２　・・・一方の旋回流による旋回流作用力
Ｆ２　　　　　　・・・Ｔ軸矢印の方向へ作用する旋回流作用力
ｆｂ１、ｆｂ２　・・・他方の旋回流による旋回流作用力
Ｒ　　　　　　　・・・旋回流
Ｓ　　　　　　　・・・路幅方向
Ｔ　　　　　　　・・・搬送方向
Ｕ　　　　　　　・・・浮上方向

  100, 200, 300, 400 ... non-contact type levitation transfer device 110, 210, 410 ... base part 111, 211, 311, 411 ... transfer road surface 120, 220 ... machine base frame 130A, 230A , 330A, 430A ... swirl flow forming portions 130B, 230B, 330B, 430B ... swirl flow forming portions 131, 231, 331, 431 ... guide recess 132 ... gas injection ports 240, 340, 440・ ・ ・ Gas receiving recesses 150, 250 ・ ・ ・ Gas release hole 360 ・ ・ ・ Open / close switching means A ・ ・ ・ Gas merging area C ・ ・ ・ Transported object D ・ ・ ・ Force F1 to draw downward F・ Swirl flow acting forces fa1, fa2 acting in the direction opposite to the direction of the T-axis arrow Swirl flow acting force F2 due to the swirl flow of the swirl flow acting force fb1, fb2 acting in the direction of the T-axis arrow ... swirl flow force acting due to the other swirl flow R ... swirl flow S ... road Width direction T ・ ・ ・ Transport direction U ・ ・ ・ Floating direction

Claims (7)

  1. 　気体からなる旋回流を発生させる旋回流形成部が被搬送物を搬送する平坦な搬送路面に配設され、前記旋回流形成部から順次溢出してくる旋回流を被搬送物の底面と搬送路面との間隙に介在させて被搬送物を浮上させるとともに前記旋回流の旋回力によって生じる搬送力で被搬送物を搬送する非接触式浮上搬送装置であって、
    　前記旋回流形成部が、前記搬送路面の路幅方向で左右相互に離間して一対配設され、
    　前記旋回流形成部でそれぞれ発生する旋回流の旋回方向が、前記搬送路面の路幅方向で相互に逆方向に設定され、
    　前記左右一対の旋回流形成部からそれぞれ旋回流として溢出して合流する気体を受け入れる気体受入凹部が、前記左右一対の旋回流形成部の相互間で搬送方向に延在する気体合流領域内に設けられていることを特徴とする非接触式浮上搬送装置。     A swirl flow forming portion that generates a swirl flow composed of gas is disposed on a flat transport path surface that transports the object to be transported. A non-contact type levitation transport device that floats the transported object by interposing it in the gap and transports the transported object with a transport force generated by the swirling force of the swirling flow,
    A pair of the swirl flow forming portions are arranged spaced apart from each other in the width direction of the conveyance road surface,
    The swirling direction of the swirling flow respectively generated in the swirling flow forming unit is set to be opposite to each other in the width direction of the conveying path surface,
    Gas receiving recesses for receiving gas that overflows and merges as a swirl flow from the pair of left and right swirl flow forming portions are provided in a gas merge region extending in the transport direction between the pair of left and right swirl flow forming portions. A non-contact type levitation conveying apparatus characterized by being provided.
  2. 　前記旋回流形成部が、前記搬送路面の搬送方向で前後相互に離間して複数配設されているとともに、
    　前記旋回流形成部でそれぞれ発生する旋回流の旋回方向が、前記搬送路面の搬送方向で相互に同一方向に設定されていることを特徴とする請求項１記載の非接触式浮上搬送装置。     A plurality of the swirl flow forming portions are arranged spaced apart from each other in the transport direction of the transport path surface, and
    The non-contact type levitation transport apparatus according to claim 1, wherein the swirl directions of the swirl flows respectively generated in the swirl flow forming unit are set in the same direction as the transport direction of the transport path surface.
  3. 　前記旋回流形成部が、前記搬送路面下に設けられて搬送路面上に開口する有底の周側壁と、該周側壁の接線方向から周側壁で囲繞される旋回形成空間領域内へ前記気体を噴射して旋回流を発生させる気体噴射口とを備えていることを特徴とする請求項１または請求項２記載の非接触式浮上搬送装置。 The swirl flow forming portion is provided under the transport path surface and has a bottomed peripheral side wall that opens on the transport path surface, and the gas is introduced into a swirl formation space region surrounded by the peripheral side wall from a tangential direction of the peripheral side wall. The non-contact type levitation conveyance apparatus according to claim 1, further comprising a gas injection port that generates a swirling flow by jetting.
  4. 　前記搬送路面より低位置に存在する気体受入凹部の底面部分が、前記搬送路面の裏面側に向けて開放されていることを特徴とする請求項１乃至請求項３のいずれか１つに記載の非接触式浮上搬送装置。 The bottom surface portion of the gas receiving concave portion existing at a position lower than the transport path surface is opened toward the back surface side of the transport path surface, according to any one of claims 1 to 3. Non-contact levitation transfer device.
  5. 　前記搬送路面より低位置に存在する気体受入凹部の底面部分が、開閉自在に形成されていることを特徴とする請求項１乃至請求項３のいずれか１つに記載の非接触式浮上搬送装置。 The non-contact type levitation conveyance apparatus according to any one of claims 1 to 3, wherein a bottom surface portion of a gas receiving recess located at a lower position than the conveyance path surface is formed to be openable and closable. .
  6. 　前記旋回流形成部から搬送路面と被搬送物との間隙に溢出して過剰に滞留する気体を逃す気体解放孔が、前記搬送路面に分散して配設されていることを特徴とする請求項１乃至請求項５のいずれか１つに記載の非接触式浮上搬送装置。 The gas release holes for releasing the gas that overflows from the swirl flow forming portion into the gap between the conveyance path surface and the object to be conveyed and stays excessively are distributed on the conveyance path surface. The non-contact levitation conveyance apparatus according to any one of claims 1 to 5.
  7. 　前記旋回流形成部が、前記気体の噴射力を択一的に選択可能な別部品として前記搬送路面に着脱自在に取り付けられていることを特徴とする請求項１乃至請求項６のいずれか１つに記載の非接触式浮上搬送装置。

          The said swirl flow formation part is detachably attached to the said conveyance path surface as another component which can selectively select the injection force of the said gas, The any one of Claim 1 thru | or 6 characterized by the above-mentioned. Non-contact type levitation conveyance device described in 1.

PCT/JP2015/056955 2014-03-11 2015-03-10 Non-contact floating transport device WO2015137319A1 (en)

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WO2003086917A1 (en) * 2002-04-18 2003-10-23 Olympus Corporation Substrate conveying device
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JP2011235999A (en) * 2010-05-10 2011-11-24 Oiles Corp Non-contact conveying device

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JP5495065B2 (en) * 2010-12-06 2014-05-21 株式会社ダイフク Plate-shaped body transfer device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003086917A1 (en) * 2002-04-18 2003-10-23 Olympus Corporation Substrate conveying device
JP2010533970A (en) * 2007-07-19 2010-10-28 セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト Non-contact transfer device for planar substrates
JP2011235999A (en) * 2010-05-10 2011-11-24 Oiles Corp Non-contact conveying device

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