WO2015122132A1 - チューブ型のオゾン発生装置 - Google Patents

チューブ型のオゾン発生装置 Download PDF

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Publication number
WO2015122132A1
WO2015122132A1 PCT/JP2015/000373 JP2015000373W WO2015122132A1 WO 2015122132 A1 WO2015122132 A1 WO 2015122132A1 JP 2015000373 W JP2015000373 W JP 2015000373W WO 2015122132 A1 WO2015122132 A1 WO 2015122132A1
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WO
WIPO (PCT)
Prior art keywords
clip
tube
ozone
ozone generator
electrode
Prior art date
Application number
PCT/JP2015/000373
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
裕二 寺島
吉田　久次
秀樹 廣井
勝博 北村
安央 尾形
Original Assignee
住友精密工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 住友精密工業株式会社 filed Critical 住友精密工業株式会社
Priority to CN201580003306.5A priority Critical patent/CN105849037A/zh
Publication of WO2015122132A1 publication Critical patent/WO2015122132A1/ja

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C01B13/11—Preparation of ozone by electric discharge
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/10—Dischargers used for production of ozone
    • C01B2201/14—Concentric/tubular dischargers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/20—Electrodes used for obtaining electrical discharge
    • C01B2201/22—Constructional details of the electrodes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/30—Dielectrics used in the electrical dischargers
    • C01B2201/32—Constructional details of the dielectrics
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/60—Feed streams for electrical dischargers
    • C01B2201/62—Air
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/60—Feed streams for electrical dischargers
    • C01B2201/64—Oxygen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/70—Cooling of the discharger; Means for making cooling unnecessary
    • C01B2201/74—Cooling of the discharger; Means for making cooling unnecessary by liquid
    • C01B2201/76—Water
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge

Definitions

  • the present invention relates to a tube-type ozone generator, and in particular, to a structure for supplying electrons.
  • Ozone has a strong oxidizing action and decomposes into harmless oxygen after the action. Therefore, ozone is frequently used for processing such as cleaning, sterilization, and deodorization in the fields of semiconductor manufacturing, food manufacturing, water treatment, and the like.
  • a gap (discharge gap) is provided between a pair of electrodes opposed via a dielectric.
  • silent discharge is generated in the discharge gap.
  • a source gas containing oxygen in the discharge gap the source gas is ozonized and ozone is generated.
  • a tube-type ozone generator as an ozone generator that employs such a silent discharge method.
  • a discharge tube having a tube shape is used as a dielectric constituting a unit that generates ozone.
  • a plurality of discharge tubes can be densely arranged in parallel, so that there is an advantage that the size is easily increased.
  • Patent Document 1 The structure of the power supply in the tube-type ozone generator is disclosed in Patent Document 1 and Patent Document 2, for example.
  • Patent Document 1 a rod-shaped electron supply that is electrically connected to a high-voltage power supply is arranged inside a dielectric tube, and the electron supply is made of an electrode metallized on the inner surface of the dielectric tube and stainless steel wool. It is electrically connected through the material.
  • Patent Document 2 a lantern-shaped supply electron having a plurality of slits formed on the outer peripheral surface is used, and the supply electron is elastically brought into contact with an electrode metallized on the inner surface of the dielectric tube.
  • the power source and the electrode are electrically connected.
  • the dielectric tube is made of glass or the like, but the inner surface is often not a perfect circle due to the influence of the material and molding accuracy, and the inner diameter also varies to some extent. From the micro level, the inner surface of the dielectric tube is not smooth and has irregularities.
  • the contact between the power supply and the electrode is ensured by using a wool material or a lantern type shape, but since the shape of the wool material and the lantern type is complicated, there is a problem that the production is troublesome.
  • a main object of the present invention is to provide an ozone generator that can be easily manufactured.
  • An ozone generation unit provided in a tube-type ozone generator according to the present invention includes a cylindrical outer electrode tube and a discharge tube disposed inside the outer electrode tube with a discharge gap therebetween. .
  • the discharge tube is provided in close contact with the inner peripheral surface of the dielectric tube in a state of having a cylindrical dielectric tube having an opening at at least one end and an exposed end protruding from the opening.
  • an electron supply connected to an external power source for supplying power to the electrode film.
  • the electron supply includes an inner clip installed inside the electrode film, and an outer clip installed outside the electrode film, and the exposed end is formed by the inner clip and the outer clip. The part is sandwiched.
  • the exposed end can be easily provided by adjusting the length of the electrode film in the longitudinal direction of the dielectric tube. Can do. And since the exposed end portion of the electrode film is sandwiched between the inner clip and the outer clip, the electrode film and the electron supply can be directly and uniformly contacted, and the electrode film can be stably Power can be supplied.
  • the outer clip has a plurality of clip portions so as to sandwich the end portions of the plurality of electrode films at a time, and the plurality of exposed end portions are respectively disposed inside the exposed end portions. It is preferable to be sandwiched between the inner clip and the clip portion.
  • one outer clip can be used to sandwich the end portions of a plurality of electrode films at once. Therefore, it is possible to reduce the number of work steps for sandwiching the exposed end portion of the electrode film. In addition, a large number of discharge tubes can be connected easily, and the contact resistance can be reduced.
  • a plurality of the ozone generating units may be provided, and at least a part of the inner clip may be an inner clip with a connection terminal provided directly with a connection terminal electrically connected to the external power source.
  • FIG. 1 It is a schematic perspective view which shows the tube type ozone generator of 1st Embodiment. It is the schematic side view which a part was abbreviate
  • (A) is a top view
  • (b) is the front view which abbreviate
  • (A) is a top view
  • (b) is a front view.
  • (A) is a top view
  • (b) is a front view.
  • (A) is a top view
  • (b) is the front view which abbreviate
  • (A) is a top view which shows the modification of an outer side clip
  • (b) is a front view which shows the modification of a construction clip.
  • the tube-type ozone generator 1 of this embodiment is shown.
  • the ozone generator 1 includes an apparatus main body 2, an auxiliary facility 3 including a control device, an operation panel, and the like that cooperate with the apparatus main body 2.
  • the apparatus main body 2 is a stainless steel pressure-resistant container having excellent corrosion resistance, and ozone is generated therein.
  • the apparatus main body 2 includes a cylindrical body portion 11 and two lid portions 12 that block both ends of the body portion 11.
  • the apparatus main body 2 is supported by a pair of leg portions 13 and 13 in a horizontally placed state.
  • One of the lid parts 12 is attached to the trunk part 11 via a hinge, and is a door that can be opened and closed.
  • the apparatus main body 2 is connected to a raw material gas pipe 14, an ozone pipe 15, a cooling pipe 16 and the like.
  • the source gas pipe 14 is connected to a source gas supply source (not shown), and a source gas such as oxygen or air is supplied to the apparatus main body 2 through the source gas pipe 14.
  • the ozone pipe 15 is connected to an ozone supply destination (not shown), and ozone generated by the apparatus main body 2 is sent to the supply destination through the ozone pipe 15.
  • the cooling pipe 16 has two cooling pipes 16a and 16b for incoming and outgoing water, each connected to a heat exchanger or the like not shown. Cooling water is circulated and supplied to the apparatus main body 2 through these cooling pipes 16a and 16b.
  • the inside of the apparatus main body 2 is partitioned into a source gas chamber 18, a cooling chamber 19, and an ozone chamber 20 by two partition plates 17 and 17 made of stainless steel.
  • the source gas chamber 18 is disposed at one end of the apparatus main body 2 and communicates with the source gas pipe 14.
  • the ozone chamber 20 is disposed at the other end of the apparatus main body 2 and communicates with the ozone pipe 15.
  • the cooling chamber 19 is located between the source gas chamber 18 and the ozone chamber 20 and occupies most of the apparatus main body 2.
  • the cooling chamber 19 communicates with the incoming cooling pipe 16a at the lower corner portion on the ozone chamber 20 side, and communicates with the outgoing cooling piping 16b at the upper corner portion on the source gas chamber 18 side.
  • a plurality of ozone generation units 30 are installed so as to cross the cooling chamber 19 and extend in parallel along the longitudinal direction of the body 11.
  • the ozone generation units 30 are arranged in a dense state. Specifically, the triangles are arranged so that the pitch between the ozone generation units 30 located adjacent to each other has the same length. In each of these ozone generation units 30, ozone is generated from the raw material gas.
  • FIG. 3 and FIG. 4 show details of the ozone generation unit 30.
  • the ozone generation unit 30 includes an outer electrode tube 31 and a discharge tube 32.
  • the outer electrode tube 31 is made of a cylindrical stainless steel tube, and each end thereof is joined to each partition plate 17 without a gap.
  • the outer electrode tube 31 is electrically grounded via the partition plate 17 and constitutes a low voltage side electrode.
  • the periphery of the outer electrode tube 31 is filled with cooling water, and each ozone generation unit 30 is cooled by the cooling water.
  • a discharge tube 32 is disposed concentrically inside the outer electrode tube 31.
  • the discharge tube 32 includes a dielectric tube 33, an electrode film 34, a power supply 40, and the like.
  • the dielectric tube 33 is an elongated rod-like member having an opening 33a at one end, and is formed in a cylindrical shape with glass or the like, for example.
  • the general dimensions of the dielectric tube 33 are as follows: the total length is 2 m long, the outer diameter is about 10 mm to 30 mm, and the wall thickness is about 1 mm to 3 mm.
  • the outer peripheral surface of the dielectric tube 33 faces the inner peripheral surface of the outer electrode tube 31 with a slight gap (discharge gap 36) therebetween.
  • discharge gap 36 discharge gap
  • the closed end of the dielectric tube 33 is located in the ozone chamber 20, and the end of the dielectric tube 33 having the opening 33 a is located in the source gas chamber 18. Ozone is generated when the source gas flows from the source gas chamber 18 into the discharge gap 36 where the silent discharge is generated. The generated ozone flows out into the ozone chamber 20 and is sent out to the supply destination through the ozone pipe 15.
  • the electrode film 34 is formed in a cylindrical shape using a thin metal conductor having high elasticity and excellent electrical conductivity, such as a stainless spring steel plate.
  • the electrode film 34 is inserted into the dielectric tube 33 through the opening 33a in a state where the metal conductor is elongated and cylindrical, and then the metal conductor is formed inside the dielectric tube 33 by its own elastic force. Is in close contact with the inner peripheral surface of the dielectric tube 33 by spreading outward in the radial direction.
  • the electrode film 34 can be removed from the dielectric tube 33, so that only the electrode film 34 can be replaced. .
  • the electrode film 34 is placed on the dielectric tube 33 with a part (also referred to as an exposed end 34a) protruding from the opening 33a.
  • the electron supply 40 is connected to the high voltage side of the external power source 37 and supplies power to the electrode film 34, and is configured by an inner clip 41, an outer clip 42, and the like as shown in FIG.
  • the inner clip 41 and the outer clip 42 are all formed by metal press processing, multi-forming, processing jigs, etc., and are excellent in elasticity and electrical conductivity.
  • the outer clip 42 is a cylindrical member partly divided in the axial direction and has a C-shaped cross section.
  • the inner diameter of the outer clip 42 is smaller than the inner diameter of the dielectric tube 33 in a no-load state where no external force is applied.
  • the length L2 in the axial direction of the exposed end portion 34a is not a problem as long as it is larger than 0, that is, exposed from the opening 33a, but is larger than the length L1 in the axial direction of the outer clip 42 (L2 ⁇ L1). It is preferable that L2 ⁇ 2L1 is more preferable.
  • the inner clip 41 is also a cylindrical member having a C-shaped cross section.
  • the outer diameter of the inner clip 41 is formed larger than the inner diameter of the dielectric tube 33 in an unloaded state.
  • the axial length L3 of the inner clip 41 is formed to be at least larger than the axial length L1 of the inner clip 41.
  • the outer clip 42 is expanded in diameter by applying an external force, and is fitted to the outside of the exposed end portion 34a in which the inner clip 41 is inserted.
  • the outer clip 42 is contracted, so that the outer clip 42 is placed on the outer side of the electrode film 34 in a state of being pressed against the exposed end portion 34a from the outer side.
  • the inner clip 41 is reduced in diameter by applying an external force, and is inserted inside the electrode film 34 until the tip is located inside the dielectric tube 33. Then, when the external force is removed, the inner clip 41 expands. Therefore, the inner clip 41 is placed inside the electrode film 34 in a state of being pressed against the electrode film 34 from the inside.
  • the exposed end 34a is sandwiched between the inner clip 41 and the outer clip 42, and is in a state of being pressed from the inside and outside.
  • the exposed end portion 34 a of the electrode film 34 that protrudes from the opening 33 a of the dielectric tube 33 is sandwiched between the inner clip 41 and the outer clip 42 so as to be in direct and uniform contact with the power supply 40. . Therefore, power can be stably supplied to the electrode film 34.
  • each of the feeders 40 is connected in series, that is, one feeder 40 is connected to one or two neighboring feeders 40, but the connection pattern between the feeders 40 is a specification. It is set appropriately according to
  • connection terminals 43 electrically connected to the lead wires 44 are provided at a plurality of locations of the group of the power supply 40 connected to each other.
  • the lead wire 44 is electrically connected to an external power source 37 outside the figure. Power is supplied from the external power source 37 to the group of power supply 4 via the connection terminal 43 and the lead wire 44.
  • connection of the group of power supply units 40 is a work with a large load because the gap between adjacent power supply units 40 is small and the number of power supply units 40 is large.
  • the shapes of the inner clip 41 and the outer clip 42 are devised so that the connection of the power supply 40 can be easily performed.
  • the inner clip 41 is formed such that the length L4 of the inner clip 41 protruding from the opening 33a of the dielectric tube 33 is at least twice the length L1 of the outer clip 42 in the axial direction. is set up. The reason why the number is twice or more is to allow at least two or more outer clips 42 to overlap the inner clip 41.
  • two outer clips 42 are integrally formed so as to sandwich two exposed end portions 34a at a time (also referred to as an outer clip pair 42P).
  • a bent portion 45 that is bent is provided between the two outer clips 42, 42 connected in series.
  • the dimension between the two outer clips 42 and 42 is set according to the pitch between the feeders 40 located adjacent to each other. Since the bent portion 45 is elastically deformed, it can cope with even a slight shift in pitch.
  • a part of the inner clip 41 is an inner clip 52 with a connection terminal in which the connection terminal 43 is provided directly on the inner clip 41 as shown in FIG.
  • connection terminals 43 can be easily provided at a desired location.
  • FIG. 9 shows the power supply 40 connected to each other using these outer clip pairs 42P.
  • the outer clip pair 42P is fitted into the two exposed end portions 34a and 34a adjacent to each other, thereby forming a supply pair in which the two supply electrons 40 and 40 are electrically connected. Furthermore, another outer clip pair 42P is fitted into the two exposed end portions 34a, 34a adjacent to the electron supply pair, and further, an electron supply pair is formed.
  • the two adjacent supply electrons 40 and 40 are arranged such that the outer clip pair 42P is overlapped in the longitudinal direction of the dielectric tube 33, and the two The inner clips 41 and 41 are sandwiched.
  • the outer clip pairs 42P are alternately fitted into the exposed end portion 34a and the inner clip 41 of each of the feeders 40, whereby a large number of the feeders 40 can be easily connected.
  • Second Embodiment 10 to 12 show an ozone generator according to the second embodiment. Since the basic configurations of the ozone generator and the discharge tube of the present embodiment are the same as those of the first embodiment, the same reference numerals are used for the configurations of the same functions, and descriptions thereof are omitted.
  • the outer clip 42 is used alone, and the feeder 40 is separately provided with a construction clip 50 and a construction clip 51 with connection terminals as shown in FIGS. 10 and 11. .
  • the installation clip 50 has a pair of insertion legs 50a extending opposite to each other, and an installation section 50b spanning one end of the insertion legs 50a.
  • a bent portion 50c that can be elastically deformed is formed at an intermediate portion of the erection portion 50b.
  • the dimension between the insertion legs 50a and 50a is set in accordance with the pitch between the power supply units 40 located adjacent to each other. Specifically, the size between the plug-in legs 50a and 50a is slightly smaller than the pitch between the power supply units 40 located adjacent to each other.
  • Each insertion leg portion 50 a is formed in an inferior arc shape in cross section in accordance with the inner peripheral surface of the inner clip 41 installed in the dielectric tube 33 and the shape of the ozone generation unit 30.
  • each insertion leg portion 50a and 50a are expanded, and each insertion leg portion 50a is inserted into the two inner clips 41 and 41 adjacent to each other, whereby the installation clip 50 is connected to the two inner clips 41 and 41. It will be erected. By doing so, each insertion leg part 50a is crimped
  • FIG. 11 shows an erection clip 51 with connection terminals.
  • the connection terminal 43 capable of connecting the lead wire 44 is integrally provided on the installation section 50b.
  • FIG. 12 shows the power supply 40 connected to each other using the installation clip 50 and the installation clip 51 with connection terminals.
  • the connection by the erection clip 50 and the bridging clip 51 with the connection terminal is made by simply inserting the erection clip 50 and the bridging clip 51 with the connection terminal into the two adjacent inner clips 41, 41 from the direction in which the opening 33 a of the dielectric tube 33 faces. Therefore, workability is excellent.
  • connection terminal 43 can be easily provided only by setting a part of the installation clip 50 as the installation clip 51 with the connection terminal.
  • ozone generator concerning this invention is not limited to embodiment mentioned above, The other various structure is also included.
  • three or more outer clips 42 may be connected. Further, as shown in FIG. 13B, two or more bridging clips 50 may be connected.
  • a large number of connections is advantageous in terms of workability and electrical resistance. In particular, a large number of these, such as 10 or 20, may be used. Then, if one outer clip 42 or the like is required, one can be cut and used, and if two are required, two can be cut and used. Since it can be used by dividing it as necessary, it has excellent versatility.
  • a part of the inner clips 41 may be used as the inner clips 52 with connection terminals shown in FIG.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
PCT/JP2015/000373 2014-02-17 2015-01-28 チューブ型のオゾン発生装置 WO2015122132A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201580003306.5A CN105849037A (zh) 2014-02-17 2015-01-28 管型臭氧产生装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014027101A JP6196913B2 (ja) 2014-02-17 2014-02-17 チューブ型のオゾン発生装置
JP2014-027101 2014-02-17

Publications (1)

Publication Number Publication Date
WO2015122132A1 true WO2015122132A1 (ja) 2015-08-20

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PCT/JP2015/000373 WO2015122132A1 (ja) 2014-02-17 2015-01-28 チューブ型のオゾン発生装置

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Country Link
JP (1) JP6196913B2 (enrdf_load_stackoverflow)
CN (2) CN111777044A (enrdf_load_stackoverflow)
TW (1) TWI636953B (enrdf_load_stackoverflow)
WO (1) WO2015122132A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107311116A (zh) * 2017-05-17 2017-11-03 赵薇 臭氧发生器及其臭氧制取和浓度控制方法
JP2019131425A (ja) * 2018-01-30 2019-08-08 株式会社東芝 オゾン発生器

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6462605B2 (ja) * 2016-02-08 2019-01-30 株式会社東芝 オゾン発生装置
JP7020785B2 (ja) * 2017-02-17 2022-02-16 株式会社東芝 オゾン発生器
JP2023036357A (ja) * 2021-09-02 2023-03-14 株式会社東芝 オゾン発生器
JPWO2023162338A1 (enrdf_load_stackoverflow) * 2022-02-25 2023-08-31
WO2023162337A1 (ja) * 2022-02-25 2023-08-31 メタウォーター株式会社 オゾン発生装置及び移動抑止方法

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JPS51145489A (en) * 1975-05-27 1976-12-14 Fuji Electric Co Ltd Ozonizer
JPH09315803A (ja) * 1996-05-30 1997-12-09 Fuji Electric Co Ltd オゾン発生装置
JP2002159844A (ja) * 2000-11-22 2002-06-04 Nomura Denshi Kogyo Kk 低温プラズマ発生装置
JP2005162530A (ja) * 2003-12-02 2005-06-23 Ishikawajima Shibaura Mach Co Ltd オゾナイザ
WO2014076851A1 (ja) * 2012-11-19 2014-05-22 住友精密工業株式会社 チューブ型のオゾン生成装置及びその製造方法

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JPH1025104A (ja) * 1996-07-10 1998-01-27 Mitsubishi Electric Corp オゾン発生装置
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JP3607905B2 (ja) * 2002-10-22 2005-01-05 東芝三菱電機産業システム株式会社 オゾン発生器
CN2584592Y (zh) * 2002-11-12 2003-11-05 朱宁方 臭氧发生管
DE10316378B3 (de) * 2003-04-10 2004-07-29 Stefan Zimmermann Entladungsröhre
WO2007108142A1 (ja) * 2006-03-17 2007-09-27 Mitsubishi Electric Corporation オゾン発生装置
JP2010215448A (ja) * 2009-03-16 2010-09-30 Mitsubishi Electric Corp オゾン発生装置
JP4875120B2 (ja) * 2009-05-19 2012-02-15 三菱電機株式会社 オゾン発生装置
CA2764215C (en) * 2010-12-21 2014-03-18 Kabushiki Kaisha Toshiba Ozone generating apparatus
CN202751686U (zh) * 2012-08-17 2013-02-27 王涛 新型放射性粒子植入器

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
JPS51145489A (en) * 1975-05-27 1976-12-14 Fuji Electric Co Ltd Ozonizer
JPH09315803A (ja) * 1996-05-30 1997-12-09 Fuji Electric Co Ltd オゾン発生装置
JP2002159844A (ja) * 2000-11-22 2002-06-04 Nomura Denshi Kogyo Kk 低温プラズマ発生装置
JP2005162530A (ja) * 2003-12-02 2005-06-23 Ishikawajima Shibaura Mach Co Ltd オゾナイザ
WO2014076851A1 (ja) * 2012-11-19 2014-05-22 住友精密工業株式会社 チューブ型のオゾン生成装置及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107311116A (zh) * 2017-05-17 2017-11-03 赵薇 臭氧发生器及其臭氧制取和浓度控制方法
CN107311116B (zh) * 2017-05-17 2019-09-20 赵薇 臭氧发生器及其臭氧制取和浓度控制方法
JP2019131425A (ja) * 2018-01-30 2019-08-08 株式会社東芝 オゾン発生器

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CN105849037A (zh) 2016-08-10
TW201532957A (zh) 2015-09-01
JP2015151311A (ja) 2015-08-24
CN111777044A (zh) 2020-10-16
TWI636953B (zh) 2018-10-01
JP6196913B2 (ja) 2017-09-13

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