WO2015109612A1 - 一种在高温腔体中侦测物品存在的装置及侦测方法 - Google Patents

一种在高温腔体中侦测物品存在的装置及侦测方法 Download PDF

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Publication number
WO2015109612A1
WO2015109612A1 PCT/CN2014/071842 CN2014071842W WO2015109612A1 WO 2015109612 A1 WO2015109612 A1 WO 2015109612A1 CN 2014071842 W CN2014071842 W CN 2014071842W WO 2015109612 A1 WO2015109612 A1 WO 2015109612A1
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Prior art keywords
probe
detecting
high temperature
temperature cavity
glass substrate
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PCT/CN2014/071842
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English (en)
French (fr)
Inventor
王松
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to US14/413,142 priority Critical patent/US9678243B2/en
Publication of WO2015109612A1 publication Critical patent/WO2015109612A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V8/00—Prospecting or detecting by optical means
    • G01V8/10—Detecting, e.g. by using light barriers
    • G01V8/12—Detecting, e.g. by using light barriers using one transmitter and one receiver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
    • C03B29/025—Glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C03B29/06—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
    • C03B29/08—Glass sheets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V9/00—Prospecting or detecting by methods not provided for in groups G01V1/00 - G01V8/00

Definitions

  • the invention relates to a detecting device and a detecting method, in particular to a device for detecting the presence of an object in a high temperature cavity and a detecting method.
  • the main object of the present invention is to provide a detecting device and a detecting method capable of determining whether a glass substrate is in a high temperature chamber in real time.
  • the present invention provides a device for detecting the presence of an object in a high temperature cavity for detecting the entry and exit of a glass substrate in a high temperature cavity, wherein the detecting device includes a sensing probe and a detecting component, and a sense
  • the probe is mounted on the sidewall of the high temperature cavity, and includes a fixed probe and a deflection probe on the same line.
  • the deflection probe is connected.
  • the detecting component emits an inductive signal to characterize the glass substrate into the high temperature cavity.
  • the weight of the two ends of the deflection probe is unequal, wherein the touch end of the glass substrate is a first end arm, and the contact end of the contact probe is a second end arm, the first end arm The weight is less than the weight of the second end arm, the length of the first end arm being less than the length of the second end arm such that the first end arm is tilted upward.
  • the detecting component is a grating sensor or a pressure sensitive device.
  • the grating sensor comprises a light source emitter, a contact probe and a light source receiver, and the light source emitter is connected with the contact probe, and when the glass substrate touches the deflection probe, the The reverse swing of the deflection probe turns on the light source emitter, and the intensity of the light source received by the light source receiver is reduced, and the light intensity sensing signal is converted into an electrical signal transmission.
  • the detecting component is a pressure sensitive device
  • the front end of the pressure sensitive device protrudes out of the contact probe, and when the glass substrate touches the deflection probe, the reverse oscillation is turned on by the deflection probe. If the current pressure measured by the pressure sensitive device is greater than the set pressure value, the pressure sensing signal is converted into an electrical signal transmission.
  • a sealed bearing mounted on a sidewall of the high temperature cavity is added, and the deflection probe is provided.
  • the needle is passed through the sealed bearing, which seals the bearing and deflects the shaft up and down.
  • the deflection probe is fixed by a sealed bearing, and the high temperature cavity is sealed to prevent air leakage.
  • the invention also provides a method for detecting the presence of an object in a high temperature cavity for detecting the entry and exit of the glass substrate in the high temperature cavity.
  • the deflection probe In the initial state, there is no glass substrate in the high temperature chamber, the deflection probe is in a normal tilt state, and the deflection probe is not in contact with the contact probe, and the detecting element is not turned on; when the deflection probe is pressed and deflected, the deflection probe is deflected Contact with the contact probe, the detection element is turned on, and the detection element sends an induction signal, indicating that the glass substrate enters the high temperature cavity.
  • the detecting component is a grating sensor or a pressure sensitive device, and when the deflection probe is deflected by the pressure and touches the contact probe, the detecting component is turned on, and the light intensity change value measured by the detecting component is detected. Or when the pressure change value is greater than the set value, the induced signal is converted into an electrical signal transmission.
  • the present invention is a device for detecting the presence of an object in a high temperature cavity, which can be applied to detect the presence of a glass substrate in a high temperature cavity in real time, and when the glass substrate enters the cavity, the deflection is detected.
  • the needle is pressed to deflect it to turn on the detecting element. If the detecting element senses a change in light intensity or pressure, it can be determined that the glass substrate is present in the cavity. Similarly, when the glass substrate leaves the cavity, it can also be judged whether it is still present by sensing the change in light intensity or pressure.
  • FIG. 1 is a schematic structural view of an apparatus for detecting the presence of an article in a high temperature chamber in an initial state
  • FIG. 2 is a schematic view showing the structure of a device for detecting the presence of an article in a high temperature cavity in the presence of a glass substrate.
  • the present invention provides a device for detecting the presence of an object in a high temperature cavity for detecting the high temperature of the glass substrate 3.
  • the detecting device is disposed on either side of the high temperature cavity 2, and includes a sensing probe and a detecting component 12, the sensing probe includes a fixed probe on the same line 10a and deflection probe 10b, which is mounted on the side wall of the high temperature chamber 2, when the glass substrate enters the high temperature chamber 2, when the glass substrate 3 touches the deflection probe 10b, the deflection probe 10b turns on the detection element 12, the detecting component 12 emits an inductive signal to characterize the glass substrate 3 into the high temperature cavity 2.
  • the present invention determines whether the glass substrate 3 is present in the high temperature chamber 2 by means of a mechanical sensing of the detecting device.
  • the detecting device is mounted on the side wall of the high temperature cavity 2. When the glass substrate 3 contacts the detecting device, the detecting device is triggered to transmit an inductive signal.
  • the weight of the two ends of the deflection probe 10b is unequal, wherein the touch end of the glass substrate is the first end arm 102, and the contact end of the contact probe is the second end arm 104, the first end arm 102.
  • the weight is less than the weight of the second end arm 104, such that When the deflection probe 10 is not pressed, in the free state, the first end arm 102 is naturally tilted up, deflected upward, and the second end arm 104 is naturally suspended and deflected downward so that when the glass substrate 3 enters the cavity, The glass substrate 3 will be pressed against the first end arm 102 such that the second end arm 102 will be lifted up to trigger the detecting element 12.
  • the weight of the first end arm 102 is smaller than the weight of the second end arm 104 to ensure that the deflection probe 10b remains in the initial state. Tilt and disconnect from the detection element.
  • the detecting component 12 can be a grating sensor or a pressure sensitive device.
  • the grating sensor comprises a light source emitter 120, a contact probe 122 and a light source receiver 124, and the light source emitter 120 and the high temperature cavity 2 are maintained.
  • the light source receiver 124 can be disposed on the same side of the light source emitter 120 or on the same side of the fixed probe 10a.
  • the light source receiver 124 is disposed on the fixed probe.
  • the light source emitter 120, the glass substrate 3, and the light source receiver 124 are on the same line.
  • the deflection probe 10b When the glass substrate 3 is not entered in the high temperature chamber 2, the deflection probe 10b is in a freely deflected state, which is not in contact with the contact probe 122. At this time, the light source emitter 120 is turned off, the light source is not transmitted, and when there is glass The substrate 3 enters the high temperature cavity 2, the deflection probe 10b is pressed by the glass substrate 3 to change the angle, and the light source emitter 120 is turned on by the reverse swing of the deflection probe 10b, and the light source emitter 120 emits a light source, if the light source receiver 124 When the intensity of the received light source is reduced, the light intensity sensing signal is converted into an electrical signal transmission, indicating that the glass substrate 3 has entered the high temperature cavity 2.
  • the detecting component 12 is a pressure sensitive device
  • the front end of the pressure sensitive device protrudes from the contact probe, and when the glass substrate touches the deflection probe, the reverse oscillation of the deflection probe turns on the pressure sensitive
  • the device if the current pressure measured by the pressure sensitive device is greater than the set pressure value, converts the pressure sensing signal into an electrical signal transmission, indicating that the glass substrate has entered the high temperature cavity.
  • the contact probe 122 is triggered by the deflection probe 10b to turn on the grating sensor or the pressure sensitive sensor to trigger a change in the sensed light intensity or pressure to determine whether the glass substrate is present in the high temperature chamber.
  • the detecting device is provided with a sealed bearing 4 mounted on the side wall of the high temperature chamber 2, and the deflecting probe 10b is passed through the sealed bearing 4, which can seal the bearing 4 to pivot up and down.
  • the sealed bearing 4 functions both to fix the deflection probe 10 and to seal the high temperature cavity, thereby preventing the leakage or penetration of the gas by the perforation of the deflection probe 10b on the high temperature cavity 2.
  • a plurality of sets of detecting devices may be disposed in parallel in the same high temperature chamber, so that a plurality of sets of glass substrates can simultaneously enter the high temperature chamber and are respectively sensed whether they are present therein.
  • the invention also provides a method for detecting the presence of an object in a high temperature cavity for detecting the entry and exit of the glass substrate in the high temperature cavity.
  • the deflection probe 10b In the initial state, there is no glass substrate 3 in the high temperature chamber 2, the deflection probe 10b is in a normal tilt state, the first end arm 102 is tilted upward, the second end arm 104 is inclined downward, and is not in contact with the contact probe 122.
  • the detecting element 12 is not turned on; when the deflecting probe 10b is pressed and deflected, the glass substrate 3 presses the fixed probe 10a and the deflecting probe 10b, and the second end arm 104 of the deflecting probe 10b is in contact with the contact probe 122, Turning on the grating sensor, emitting the light source, at the moment of emitting the light source, Received by the light source receiver 124, as the glass substrate 3 moves forward, it gradually blocks the light, and the light intensity received by the light source receiver 124 is weakened. At this time, the light source receiver 124 converts the light intensity sensing signal into an electrical signal transmission. , indicating that the glass substrate enters the high temperature chamber.
  • the deflection probe 10b When the glass substrate leaves the fixed probe 10a and the deflection probe 10b, the deflection probe 10b returns to the free tilt state, and the contact with the contact probe 122 is broken, and the light source emitter 120 stops emitting the light source. At this time, the light source receiver 124 When no light is received, the light intensity sensing signal is converted into an electrical signal transmission, and the feedback glass substrate has left the high temperature cavity.
  • the detecting component 12 can be a grating sensor or a pressure sensitive device.
  • the detecting component 12 is turned on, when the detecting component 12 determines When the light intensity change value or the pressure change value is greater than the set value, the sensing signal is converted into an electrical signal transmission, thereby determining whether the glass substrate is in the high temperature cavity.

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  • Engineering & Computer Science (AREA)
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  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
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Abstract

一种在高温腔体（2）中侦测物品存在的侦测装置，用于侦测玻璃基板（3）在高温腔体（2）中的进出，侦测装置包括感测探针和侦测元件（12），感测探针装配于高温腔体（2）的侧壁，其包括在同一直线上的固定探针（10a）和偏转探针（10b），当玻璃基板（3）进入高温腔体（2）内时，玻璃基板（3）触碰到偏转探针（10b）时，偏转探针（10b）接通侦测元件（12），则侦测元件（12）发出感应信号，以表征玻璃基板（3）进入高温腔体（2）内；通过简单的机械结构和常规的侦测元件，就可实时地判断玻璃基板（3）或其他元器件是否存在于高温设备中。

Description

一种在高温腔体中侦测物品存在的装置及侦测方法 技术领域
本发明涉及一种侦测装置和侦测方法， 尤其是指一种在高温腔体中侦测物品存在的装置 及侦测方法。
背景技术
在玻璃基板的制造过程中， 需要将其从高温腔体导出至较低温腔体中进行加工， 在封闭 的腔室内连续完成。在现有技术中， 采用软件记录来记录玻璃基板在高温腔体中的进出状况， 来判断玻璃基板是否已存在于高温设备中， 若发生检修时， 已将玻璃基板从高温设备中取出， 未及时更新软件的记录信息， 影响后续制程的进出料工序， 发生错误的几率很大， 因此， 有 必要提供一种能准备记录玻璃基板是否存在于高温腔体内装置和方法。
发明内容
基于现有技术的不足， 本发明的主要目的在于提供一种可实时判断玻璃基板是否在高温 腔体内的侦测装置和侦测方法。
本发明提供了一种在高温腔体中侦测物品存在的装置， 用于侦测玻璃基板在高温腔体中 的进出， 其中， 所述侦测装置包括感测探针和侦测元件， 感测探针装配于高温腔体的侧壁， 其包括在同一直线上的固定探针和偏转探针， 当玻璃基板进入高温腔体内时， 玻璃基板触碰 到偏转探针时， 偏转探针接通侦测元件， 则侦测元件发出感应信号， 以表征玻璃基板进入高 温腔体内。
优选地， 所述偏转探针的两端重量不相等， 其中， 设与玻璃基板触碰端为第一端臂， 与 接触探针触碰端为第二端臂， 所述第一端臂的重量小于第二端臂的重量， 所述第一端臂的长 度小于第二端臂的长度， 从而使得第一端臂向上翘起。
优选地， 所述侦测元件为光栅感应器或压敏感应器。 所述侦测元件为光栅感应器时， 所 述光栅感应器包括光源发射器、 接触探针和光源接收器， 光源发射器与接触探针连接， 当玻 璃基板触碰到偏转探针时， 通过偏转探针的反向摆动接通光源发射器， 光源接收器所接收的 光源强度降低， 则将光强感应信号转换为电信号发送。 所述侦测元件为压敏感应器时， 所述 压敏感应器的前端伸出接触探针， 当玻璃基板触碰到偏转探针时， 通过偏转探针的反向摆动 接通压敏感应器， 若压敏感应器所测的当前压力大于设定的压力值， 则将压力感应信号转换 为电信号发送。
优选地， 在本发明的侦测装置中， 增设有安装于高温腔体侧壁的密封轴承， 所述偏转探 针由密封轴承中穿出， 其可以密封轴承为轴心上下偏转。 通过密封轴承固定所述偏转探针， 并将高温腔体密封， 防止其漏气。
本发明还提供了一种高温腔体内侦测物品存在的方法， 用于侦测玻璃基板在高温腔体中 的进出。 在初始状态， 高温腔体内无玻璃基板， 偏转探针处于正常倾斜状态， 且偏转探针与 接触探针不接触， 侦测元件未导通； 当偏转探针受压而发生偏转， 偏转探针与接触探针接触， 导通侦测元件， 侦测元件发出感应信号， 表示玻璃基板进入高温腔体内。
其中， 所述侦测元件为光栅感应器或压敏感应器， 当偏转探针受压偏转而触碰到接触探 针时， 导通侦测元件， 当侦测元件所测定的光强变化值或压力变化值大于设定值时， 则将感 应信号转换为电信号发送。
与现有技术相比， 本发明一种在高温腔体中侦测物品存在的装置， 可应用于实时侦测玻 璃基板在高温腔体中的存在， 当玻璃基板进入腔体内时， 向偏转探针施压， 使其发生偏转而 接通侦测元件， 若侦测元件感测到光强或压力的变化， 则可判定玻璃基板存在于腔体内。 同 样地， 当玻璃基板离开腔体时， 也可以通过感测光强或压力的变化， 来判定其是否还存在其 中。 由此， 通过简单地机械结构和常规的侦测元件， 就可以实时地判断玻璃基板或其他元器 件是否存在于高温设备中， 有效降低了因采用软件来对进出料进行记录而产生的失误， 降低 了生产过程中因物料与产品不符而产生的问题等等， 也不需要针对高温设备的侦测应用而采 用耐高温的元件， 减少了开发费用， 保障了物料侦测的实时性和准确性。
附图说明
图 1为本发明一种在高温腔体中侦测物品存在的装置在初始状态的结构示意图；
图 2为本发明一种在高温腔体中侦测物品存在的装置在玻璃基板存在时的结构示意图。
具体实施方式
为了对高温设备腔体内的物品是否存在进行实时监测， 参照图 1和图 2所示， 本发明提 供了一种在高温腔体中侦测物品存在的装置， 用于侦测玻璃基板 3在高温腔体中的进出， 其 中， 所述侦测装置设于高温腔体 2的任一侧， 包括感测探针和侦测元件 12， 所述感测探针包 括在同一直线上的固定探针 10a和偏转探针 10b， 其装配于高温腔体 2的侧壁， 当玻璃基板 进入高温腔体 2内时， 玻璃基板 3触碰到偏转探针 10b时， 偏转探针 10b接通侦测元件 12， 则侦测元件 12发出感应信号， 以表征玻璃基板 3进入高温腔体 2内。本发明通过侦测装置的 机械式感测的方式， 判断玻璃基板 3是否存在于高温腔体 2内。 所述侦测装置安装于高温腔 体 2的侧壁， 当玻璃基板 3接触到侦测装置时， 侦测装置受触发而发送感应信号。
所述偏转探针 10b的两端重量不相等， 其中， 设与玻璃基板触碰端为第一端臂 102， 与 接触探针触碰端为第二端臂 104， 所述第一端臂 102的重量小于第二端臂 104的重量， 这样， 当偏转探针 10未受压， 在自由状态时， 第一端臂 102自然翘起， 向上偏斜， 而第二端臂 104 自然垂下， 向下偏斜， 使得当玻璃基板 3进入腔体内， 玻璃基板 3将施压于第一端臂 102上， 使得第二端臂 102随之翘起而触发侦测元件 12。 优选地， 通过调整所述第一端臂 102的长度 小于第二端臂 104的长度， 使得第一端臂 102的重量小于第二端臂 104的重量， 以保证偏转 探针 10b在初始状态保持倾斜， 并与侦测元件断开。
在本发明中， 所述侦测元件 12可为光栅感应器或压敏感应器。 实施例一中， 所述侦测元 件 12为光栅感应器时，所述光栅感应器包括光源发射器 120、接触探针 122和光源接收器 124， 光源发射器 120与高温腔体 2之间保持一定距离，接触探针 122由光源发射器 120中延伸出， 光源接收器 124可设置于光源发射器 120同侧或固定探针 10a的同侧， 优选地， 光源接收器 124设于固定探针 10a的同侧，光源发射器 120、玻璃基板 3和光源接收器 124在同一直线上。 当在高温腔体 2中未有玻璃基板 3进入时，偏转探针 10b为自由偏转状态，其与接触探针 122 未接触， 这时， 光源发射器 120关闭状态， 未发送光源， 当有玻璃基板 3进入高温腔体 2内， 偏转探针 10b受玻璃基板 3按压而改变角度， 通过偏转探针 10b的反向摆动接通光源发射器 120， 光源发射器 120发射光源， 若光源接收器 124所接收的光源强度降低， 则将光强感应信 号转换为电信号发送， 表征玻璃基板 3已进入高温腔体 2内。
所述侦测元件 12为压敏感应器时， 所述压敏感应器的前端伸出接触探针， 当玻璃基板触 碰到偏转探针时， 通过偏转探针的反向摆动接通压敏感应器， 若压敏感应器所测的当前压力 大于设定的压力值， 则将压力感应信号转换为电信号发送， 表征玻璃基板已进入高温腔体内。
通过偏转探针 10b触发接触探针 122接通光栅感应器或压敏感应器， 以触发感测光强或 压力的变化， 来判断玻璃基板是否存在于高温腔体内。
优选地， 在侦测装置增设有安装于高温腔体 2侧壁的密封轴承 4， 所述偏转探针 10b由 密封轴承 4中穿出， 其可以密封轴承 4为轴心上下偏转。 所述密封轴承 4既起到固定偏转探 针 10的作用， 又起到密封高温腔体的作用， 避免偏转探针 10b在高温腔体 2上的穿孔造成气 体的泄漏或渗入。
在本发明中， 同一个高温腔体内， 可平行设置有多组侦测装置， 使得多组玻璃基板可同 时进入高温腔体内， 并分别受感测到其是否存在其中。
本发明还提供了一种高温腔体内侦测物品存在的方法， 用于侦测玻璃基板在高温腔体中 的进出。 在初始状态， 高温腔体 2内无玻璃基板 3， 偏转探针 10b处于正常倾斜状态， 第一 端臂 102向上翘起，第二端臂 104向下倾斜，且与接触探针 122不接触，侦测元件 12未导通; 当偏转探针 10b受压而发生偏转， 玻璃基板 3按压固定探针 10a和偏转探针 10b， 偏转探针 10b的第二端臂 104与接触探针 122接触， 导通光栅感应器， 发射光源， 在发射光源的瞬间， 被光源接收器 124接收， 随着玻璃基板 3向前推移， 其逐渐挡住了光线， 光源接收器 124接 收到的光强减弱， 这时， 光源接收器 124将光强感应信号转换为电信号发送， 表示玻璃基板 进入高温腔体内。 当玻璃基板离开固定探针 10a和偏转探针 10b时， 偏转探针 10b恢复自由 倾斜状态， 断开与接触探针 122的接触， 则光源发射器 120停止发射光源， 这时， 光源接收 器 124接收不到任何光线， 则将光强感应信号转换为电信号发送， 反馈玻璃基板已离开高温 腔体。
所述侦测元件 12可为光栅感应器或压敏感应器， 当偏转探针 10受压偏转而触碰到接触 探针 122时， 导通侦测元件 12， 当侦测元件 12所测定的光强变化值或压力变化值大于设定 值时， 则将感应信号转换为电信号发送， 由此判定玻璃基板是否在高温腔体内。

Claims

权 利 要 求 书
、 一种在高温腔体中侦测物品存在的装置， 用于侦测玻璃基板在高温腔体中的进出， 其中： 所 述侦测装置包括偏转探针和侦测元件，偏转探针装配于高温腔体的侧壁，其包括在同一直线 上的固定探针和偏转探针， 当玻璃基板进入高温腔体内时， 玻璃基板触碰到偏转探针时， 偏 转探针接通侦测元件， 则侦测元件发出感应信号， 以表征玻璃基板进入高温腔体内， 所述侦 测装置增设有安装于高温腔体侧壁的密封轴承，所述偏转探针由密封轴承中穿出，其可以密 封轴承为轴心上下偏转。
、 根据权利要求 1所述的高温腔体中侦测物品存在的装置，其中：所述侦测元件为光栅感应器 或压敏感应器。
、 根据权利要求 2所述的高温腔体中侦测物品存在的装置，其中：所述侦测元件为光栅感应器 时，所述光栅感应器包括光源发射器、接触探针和光源接收器，光源发射器与接触探针连接， 当玻璃基板触碰到偏转探针时，通过偏转探针的反向摆动接通光源发射器，光源接收器所接 收的光源强度降低， 则将光强感应信号转换为电信号发送。
、 根据权利要求 3所述的高温腔体中侦测物品存在的装置，其中：所述光源接收器设置于光源 发射器同侧或固定探针的同侧。
、 根据权利要求 2所述的高温腔体中侦测物品存在的装置，其中：所述侦测元件为压敏感应器 时， 所述压敏感应器的前端伸出接触探针， 当玻璃基板触碰到偏转探针时， 通过偏转探针的 反向摆动接通压敏感应器，若压敏感应器所测的当前压力大于设定的压力值，则将压力感应 信号转换为电信号发送。
、 根据权利要求 1所述的高温腔体中侦测物品存在的装置，其中：所述偏转探针的两端重量不 相等， 其中， 设与玻璃基板触碰端为第一端臂， 与接触探针触碰端为第二端臂， 所述第一端 臂的重量小于第二端臂的重量。
、 根据权利要求 6所述的高温腔体中侦测物品存在的装置，其中：所述第一端臂的长度小于第 二端臂的长度。
、 一种在高温腔体中侦测物品存在的装置， 用于侦测玻璃基板在高温腔体中的进出， 其中： 所 述侦测装置包括偏转探针和侦测元件，偏转探针装配于高温腔体的侧壁，其包括在同一直线 上的固定探针和偏转探针， 当玻璃基板进入高温腔体内时， 玻璃基板触碰到偏转探针时， 偏 转探针接通侦测元件， 则侦测元件发出感应信号， 以表征玻璃基板进入高温腔体内。
、 根据权利要求 8所述的高温腔体中侦测物品存在的装置，其中：所述侦测元件为光栅感应器 或压敏感应器。
0、 根据权利要求 9所述的高温腔体中侦测物品存在的装置， 其中： 所述侦测装置增设有安装 于高温腔体侧壁的密封轴承，所述偏转探针由密封轴承中穿出，其可以密封轴承为轴心上下 偏转。
、 根据权利要求 9所述的高温腔体中侦测物品存在的装置， 其中： 所述侦测元件为光栅感应 器时， 所述光栅感应器包括光源发射器、接触探针和光源接收器， 光源发射器与接触探针连 接， 当玻璃基板触碰到偏转探针时， 通过偏转探针的反向摆动接通光源发射器， 光源接收器 所接收的光源强度降低， 则将光强感应信号转换为电信号发送。
、 根据权利要求 11所述的高温腔体中侦测物品存在的装置， 其中： 所述光源接收器设置于光 源发射器同侧或固定探针的同侧。
、 根据权利要求 9所述的高温腔体中侦测物品存在的装置， 其中： 所述侦测元件为压敏感应 器时， 所述压敏感应器的前端伸出接触探针， 当玻璃基板触碰到偏转探针时， 通过偏转探针 的反向摆动接通压敏感应器，若压敏感应器所测的当前压力大于设定的压力值，则将压力感 应信号转换为电信号发送。
、 根据权利要求 8所述的高温腔体中侦测物品存在的装置， 其中： 所述偏转探针的两端重量 不相等， 其中， 设与玻璃基板触碰端为第一端臂， 与接触探针触碰端为第二端臂， 所述第一 端臂的重量小于第二端臂的重量。
、 根据权利要求 14所述的高温腔体中侦测物品存在的装置， 其中： 所述第一端臂的长度小于 第二端臂的长度。
、 一种高温腔体内侦测物品存在的方法， 用于侦测玻璃基板在高温腔体中的进出， 其中： 在 初始状态， 高温腔体内无玻璃基板， 偏转探针处于正常倾斜状态， 且偏转探针与接触探针不 接触， 侦测元件未导通； 当偏转探针受压而发生偏转， 偏转探针与接触探针接触， 导通侦测 元件， 侦测元件发出感应信号， 表示玻璃基板进入高温腔体内； 当玻璃基板离开固定探针和 偏转探针时， 偏转探针恢复自由倾斜状态， 断开与接触探针的接触， 则断开侦测元件， 侦测 元件发出感应信号， 反馈玻璃基板已离开高温腔体。
、 根据权利要求 16所示的高温腔体内侦测物品存在的方法， 其中： 所述侦测元件为光栅感应 器或压敏感应器， 当偏转探针受压偏转而触碰到接触探针时， 导通侦测元件， 当侦测元件所 测定的光强变化值或压力变化值大于设定值时， 则将感应信号转换为电信号发送。
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