WO2015093223A1 - 光変調素子 - Google Patents
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- WO2015093223A1 WO2015093223A1 PCT/JP2014/080758 JP2014080758W WO2015093223A1 WO 2015093223 A1 WO2015093223 A1 WO 2015093223A1 JP 2014080758 W JP2014080758 W JP 2014080758W WO 2015093223 A1 WO2015093223 A1 WO 2015093223A1
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- liquid crystal
- phase modulation
- modulation amount
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- electrodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1347—Arrangement of liquid crystal layers or cells in which the final condition of one light beam is achieved by the addition of the effects of two or more layers or cells
- G02F1/13471—Arrangement of liquid crystal layers or cells in which the final condition of one light beam is achieved by the addition of the effects of two or more layers or cells in which all the liquid crystal cells or layers remain transparent, e.g. FLC, ECB, DAP, HAN, TN, STN, SBE-LC cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/294—Variable focal length devices
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/50—Phase-only modulation
Definitions
- the present invention relates to a liquid crystal optical device for giving a phase distribution to a light flux.
- a liquid crystal element is disposed in an optical system, and the focal length of the optical system is changed by providing a desired phase distribution to a light flux transmitted through the liquid crystal element by utilizing the refractive index variability of the liquid crystal element. Correction of aberration or aberration has been studied.
- a liquid crystal layer is provided, a plurality of ring-shaped transparent electrodes are provided concentrically on at least one surface of the liquid crystal layer, and the other transparent electrode is opposed to the other through the liquid crystal layer.
- a liquid crystal element whose focal length can be adjusted by adjusting a voltage applied between the transparent electrodes for each ring-shaped transparent electrode.
- the refractive index of the liquid crystal layer is adjusted by the voltage applied between the two transparent electrodes facing each other across the liquid crystal layer. Therefore, by forming and patterning the transparent electrode provided on at least one surface of the liquid crystal layer with a plurality of partial electrodes to which different voltages can be applied, the refractive index of the liquid crystal layer can be adjusted according to the pattern of the transparent electrode. It is adjusted. And the phase distribution given to the light flux which penetrates a liquid crystal layer turns into discrete distribution according to the pattern of a transparent electrode. Therefore, in order to reduce the difference between the ideal and continuous phase distribution and the phase distribution actually given, which is to be given to the light flux transmitted through the liquid crystal layer, the individual partial electrodes are made smaller, and It is necessary to increase the number of
- the gap for insulating adjacent partial electrodes also increases.
- the number of lead-out electrodes drawn from each partial electrode to the outside of the liquid crystal element also increases.
- the liquid crystal layer light transmitted through portions corresponding to the gap and the extraction electrode is not subjected to desired phase modulation by the liquid crystal layer, and therefore, the increase of the gap and the extraction electrode causes deterioration of the optical performance of the liquid crystal element.
- due to the limitations of processing technology when providing a transparent electrode on the surface of the liquid crystal layer there is a limit to the miniaturization of partial electrodes.
- the present invention provides a liquid crystal optical device capable of providing a light beam with a phase distribution of finer resolution than the resolution of the transparent electrode pattern formed on the surface of the liquid crystal layer.
- a liquid crystal optical device having N liquid crystal elements arranged along an optical axis, and N is an integer of 2 or more.
- each of the N liquid crystal elements includes a liquid crystal layer in which liquid crystal molecules aligned in a predetermined direction are sealed, and two transparent electrodes arranged to face each other across the liquid crystal layer.
- At least one of the two transparent electrodes has a plurality of partial electrodes, and the difference between the maximum value and the minimum value of the phase modulation amount in the phase distribution given to the light flux transmitted through the liquid crystal layer is a predetermined level For each level when divided by a number, at least one of the plurality of partial electrodes is disposed in the portion of the liquid crystal layer that provides the light flux with the phase modulation amount of that level, and the boundary between two adjacent partial electrodes for the light flux.
- the liquid crystal element is characterized in that the position is different for each liquid crystal element.
- the phase modulation amount at each level corresponds to the difference between adjacent levels when the difference between the maximum value and the minimum value of the phase modulation amount is equally divided by a predetermined number of levels, N It is preferable that a plurality of partial electrodes be arranged for each liquid crystal element so as to be shifted for each liquid crystal element by the difference in phase modulation amount obtained by equal division.
- the plurality of partial electrodes are arranged such that the number of levels of phase modulation amount included in the interval is reduced.
- the positions of the lead-out electrodes supplying power to the plurality of partial electrodes in the plane orthogonal to the optical axis be the same for each of the plurality of liquid crystal elements.
- the liquid crystal optical device is a light flux transmitted through a portion of the liquid crystal layer provided with the partial electrode between the transparent electrode and each of the plurality of partial electrodes. It is preferable to further include a control circuit that applies a voltage according to the level of the phase modulation amount to be provided.
- the control circuit controls between the partial electrode corresponding to the position where the phase modulation amount in the phase modulation profile is the maximum value, and the partial electrode corresponding to the position where the phase modulation amount is the minimum value, and the opposing transparent electrode. It is preferable to apply a voltage so that the phase modulation amount becomes the maximum value and the minimum value, respectively.
- the predetermined number of levels for the first liquid crystal element of the N liquid crystal elements is the first number of levels, and for the other liquid crystal elements of the N liquid crystal elements.
- the predetermined number of levels is preferably a second number of levels obtained by adding one to the first number of levels.
- the control circuit controls the voltage applied between the partial electrode corresponding to the maximum value of the phase modulation amount among the plurality of partial electrodes in the first liquid crystal element and the phase difference between the transparent electrode and the transparent electrode.
- the liquid crystal optical device can provide the light flux transmitted through the liquid crystal optical element with a phase distribution with a resolution finer than that of the transparent electrode pattern formed on the surface of the liquid crystal layer.
- FIG. 1 is a schematic view of a liquid crystal optical device according to an embodiment of the present invention.
- FIG. 2A is a schematic side view of a liquid crystal element included in the liquid crystal optical device.
- FIG. 2B is a schematic front view of a liquid crystal element included in the liquid crystal optical device.
- FIG. 3 is a view showing an example of a phase distribution for symmetrical aberration correction given to a light beam by a liquid crystal optical device.
- FIGS. 4A to 4C respectively show an example of the phase distribution given to the luminous flux by each liquid crystal element and the corresponding ring-shaped electrode pattern.
- FIG. 5 is a diagram showing the deviation of the phase distribution given to the luminous flux by each liquid crystal element.
- FIG. 6 is a diagram showing an example of a phase distribution given to a light flux transmitted through the entire liquid crystal optical device.
- FIG. 7 is a diagram showing the relationship between each annular electrode and the applied voltage.
- FIG. 8 is a view showing another example of the phase distribution given to light flux by each liquid crystal element.
- FIG. 9 is a view showing another example of the phase distribution given to the light flux transmitted through the entire liquid crystal optical device.
- FIGS. 10 (A) to 10 (C) are diagrams showing an example of the phase distribution given to the luminous flux by the individual liquid crystal elements according to the modification and the corresponding ring electrode pattern, respectively.
- FIG. 11 is a diagram showing the deviation of the phase distribution given to the luminous flux by each liquid crystal element according to the modification.
- FIG. 12 is a diagram showing an example of a phase distribution given to a light flux transmitted through the entire liquid crystal optical device according to a modification.
- FIG. 13 is a schematic configuration view of a laser microscope having a liquid crystal optical device according to the
- This liquid crystal optical device has a plurality of liquid crystal elements along the optical axis direction.
- Each liquid crystal element has a liquid crystal layer and two transparent electrodes facing each other across the liquid crystal layer.
- at least one of the two transparent electrodes provided in each liquid crystal element is formed of a plurality of partial electrodes arranged in accordance with the phase distribution given to the light flux passing through the liquid crystal optical device.
- the arrangement of the partial electrodes is determined such that the level difference of the phase modulation amount provided to the partial light fluxes transmitted through the respective regions corresponding to two adjacent partial electrodes in the liquid crystal layer becomes equal. .
- the partial electrodes are arranged such that the position of the boundary between the partial electrodes with respect to the light flux transmitted through the liquid crystal optical device is shifted for each liquid crystal element.
- this liquid crystal optical device gives the light beam a phase distribution having a finer resolution than the resolution of the pattern of the transparent electrode of each liquid crystal element.
- the position of the boundary between the partial electrodes with respect to the light beam transmitted through the liquid crystal optical device if the distance from the optical axis to the boundary between the partial electrodes differs for each liquid crystal element.
- each liquid crystal element is different.
- the luminous flux incident on the liquid crystal optical device is diffused light or convergent light, if the ratio of the distance from the optical axis to the boundary between the partial electrodes to the distance from the optical axis to the outer periphery of the luminous flux differs for each liquid crystal element
- the position of the boundary between the partial electrodes with respect to the light flux transmitted through the liquid crystal optical device is different for each liquid crystal element.
- FIG. 1 is a schematic view of a liquid crystal optical device according to an embodiment of the present invention.
- the liquid crystal optical device 1 has three liquid crystal elements 2-1 to 2-3 and a control circuit 3 for controlling each liquid crystal element along an optical axis OA of an optical system in which the liquid crystal optical device is disposed.
- the light flux transmitted through the liquid crystal optical device 1 is phase-modulated by the liquid crystal elements 2-1 to 2-3 by transmitting through the liquid crystal layers of the liquid crystal elements 2-1 to 2-3.
- the liquid crystal optical device 1 provides the light beam with a desired phase distribution, for example, a phase distribution for correcting the wavefront aberration generated in the optical system in which the liquid crystal optical device 1 is disposed.
- the number of liquid crystal elements included in the liquid crystal optical device 1 is not limited to three, and may be two or more.
- the liquid crystal elements 2-1 to 2-3 included in the liquid crystal optical device 1 will be described below.
- the liquid crystal elements 2-1 to 2-3 have the same structure and function except for the arrangement pattern of the transparent electrodes. Therefore, only the liquid crystal element 2-1 will be described below.
- FIG. 2 (A) is a schematic front view of the liquid crystal element 2-1
- FIG. 2 (B) is a schematic side view of the liquid crystal element 2-1
- the liquid crystal element 2-1 includes a liquid crystal layer 10, and transparent substrates 11 and 12 disposed substantially parallel to both sides of the liquid crystal layer 10 along the optical axis OA.
- the liquid crystal molecules 15 contained in the liquid crystal layer 10 are sealed between the transparent substrates 11 and 12 and the seal member 16.
- the size of the liquid crystal molecules 15 is exaggerated more than the size of the actual liquid crystal molecules.
- the liquid crystal element 2-1 further includes a transparent electrode 13 disposed between the transparent substrate 11 and the liquid crystal layer 10 and a transparent electrode 14 disposed between the liquid crystal layer 10 and the transparent substrate 12.
- the transparent substrates 11 and 12 are made of, for example, a material such as glass or resin that is transparent to light having a wavelength included in a predetermined wavelength range.
- the transparent electrodes 13 and 14 are made of, for example, a material called ITO, in which tin oxide is added to indium oxide.
- an alignment film (not shown) may be disposed between the transparent electrodes 13 and 14 and the liquid crystal layer 10 to align the liquid crystal molecules 15 in a predetermined direction.
- the transparent electrode 13 has a plurality of annular electrodes 13-1 to 13-n arranged concentrically around the optical axis OA.
- Each annular electrode is an example of a partial electrode.
- the liquid crystal molecules are driven by the control circuit 3 in the liquid crystal layer 10 by the plurality of ring-shaped electrodes, thereby covering the entire active region which is a region capable of modulating the phase of the light beam transmitted through the liquid crystal element 2-1.
- the transparent electrode 14 is formed as one circular electrode covering the entire active area.
- the transparent electrode 14 may also have a plurality of annular electrodes arranged concentrically in the same manner as the transparent electrode 13.
- annular zone By applying different voltages between the respective annular electrodes and the transparent electrode 14, annular portions of the liquid crystal layer 10 corresponding to the individual annular electrodes (hereinafter simply referred to as an annular zone for the sake of convenience) ), A different phase modulation amount is given to the luminous flux. For this reason, the control circuit 3 can give a desired phase distribution to the luminous flux transmitted through the liquid crystal element 2-1 by adjusting the voltage applied to each ring-shaped electrode.
- the liquid crystal molecules 15 enclosed in the liquid crystal layer 10 are homogeneously oriented, for example, such that the major axis direction of the liquid crystal molecules 15 is substantially parallel to the polarization plane of linearly polarized light incident on the liquid crystal element 2-1. That is, the long axis directions of the liquid crystal molecules 15 are parallel to each other, and are aligned parallel to the interface between the transparent substrates 11 and 12 and the liquid crystal layer 10.
- the liquid crystal molecules sealed in the liquid crystal layers of the liquid crystal elements 2-2 and 2-3 are also aligned in the same direction as the alignment direction of the liquid crystal molecules of the liquid crystal element 2-1.
- the refractive index n e of the liquid crystal molecules 15 is different from the refractive index in the long axis direction and the refractive index in the direction orthogonal to the long axis direction, and the refractive index n e for the polarization component (abnormal ray) parallel to the long axis direction of the liquid crystal molecules 15 is higher than the refractive index n o for a polarized component parallel to the minor axis direction of liquid crystal molecules 15 (ordinary ray). Therefore, the liquid crystal element 2-1 in which the liquid crystal molecules 15 are homogeneously aligned behaves as a uniaxial birefringent element.
- the liquid crystal molecules 15 have dielectric anisotropy, and generally, a force acts in the direction in which the long axis of the liquid crystal molecules follows the electric field direction. That is, when a voltage is applied between the transparent electrodes 13 and 14 provided on the two transparent substrates 11 and 12 sandwiching the liquid crystal molecules 15, the major axis direction of the liquid crystal molecules 15 is parallel to the transparent substrates 11 and 12. From the state, it inclines in the direction orthogonal to the surfaces of the transparent substrates 11 and 12 according to the applied voltage.
- the refractive index n [psi of the liquid crystal layer 10, n o ⁇ n ⁇ ⁇ n e (n o is the refractive index of ordinary light, n e is The refractive index of the extraordinary light). Therefore, when the thickness of the liquid crystal layer 10 is d, an optical path length difference ⁇ nd ( n e d) between the light flux passing through the area to which voltage is applied and the light flux passing through the area to which voltage is not applied. -N ⁇ d) occurs. Therefore, the phase difference between the two light beams is 2 ⁇ nd / ⁇ .
- ⁇ is the wavelength of the luminous flux incident on the liquid crystal layer 10.
- the voltage applied to a ring-shaped zone is a refractive index n a of the annular zone the liquid crystal layer 10 when the V a, the liquid crystal layer 10 when the voltage applied to the other ring-shaped zone V b
- the phase difference generated between the light beams transmitted through the two ring zones is 2 ⁇ (n a ⁇ n b ) d / ⁇ .
- the control circuit 3 adjusts the voltage applied to each annular electrode in accordance with the wavelength of the incident light flux, thereby providing a predetermined value for the light flux transmitted through the liquid crystal element 2-1 regardless of the wavelength of the incident light flux. Phase distribution is given.
- phase modulation profile to be displayed on the liquid crystal optical device 1 is determined.
- This phase modulation profile is determined to correct, for example, a symmetrical wavefront aberration centered on the optical axis OA, such as a spherical aberration generated in the entire optical system including the liquid crystal optical device 1.
- the phase modulation profile represents a phase distribution opposite to that of the wavefront aberration generated in the entire optical system including the liquid crystal optical device 1.
- FIG. 3 is a view showing an example of a symmetrical phase modulation profile for wavefront aberration correction given by the liquid crystal optical device 1 to a light beam.
- the horizontal axis represents the position in the plane orthogonal to the optical axis OA.
- the position of the optical axis OA is represented by 0 on the horizontal axis.
- the vertical axis represents the phase modulation amount.
- Curve 300 represents a phase modulation profile.
- the arrangement pattern of the annular electrodes is determined by dividing the phase modulation profile 300 such that the phase differences between adjacent annular zones are equal.
- the phase modulation profile 300 is discretely connected by connecting two adjacent ring zone electrodes with a resistor having the same resistance value.
- a phase modulation profile 310 can be provided that approximates.
- a pattern 320 of ring-shaped electrodes corresponding to discrete phase modulation profiles 310 is shown.
- the gaps between the annular electrodes are indicated by solid lines. That is, the individual rings or circles separated by solid lines correspond to one ring electrode 320-1 to 320-11 in order from the center.
- the difference between the maximum phase modulation amount and the minimum phase modulation amount of the phase modulation profile 300 is equally divided into six (that is, the number of levels of the phase modulation amount is 6), and the corresponding ring electrode is eleven.
- the boundaries at which the phase modulation amount changes between the respective liquid crystal elements are at different positions of the light flux transmitted through the liquid crystal optical device 1.
- the pattern of the annular electrode is determined. For example, the difference between the maximum phase modulation amount and the minimum phase modulation amount of the phase modulation profile displayed by the liquid crystal optical device 1 is equally divided by M (that is, the number of phase modulation amounts is M, M is an integer of 2 or more)
- M that is, the number of phase modulation amounts is M, M is an integer of 2 or more
- the position and range of the annular zone of each liquid crystal element which gives the luminous flux a phase modulation amount of Lth level from the level at which the phase modulation amount is minimum are determined according to the following equation.
- x and y represent the coordinates of two axes orthogonal to one another in a plane orthogonal to the optical axis
- F (x, y) represents normalized phase modulation at the coordinates (x, y) Indicates the phase modulation amount of the profile.
- the normalized phase modulation profile is obtained by normalizing the phase modulation profile displayed by each liquid crystal element such that the maximum phase modulation amount is 1.
- N is the number of liquid crystal elements that the liquid crystal optical device 1 has and modulates the phase of the light flux in the same polarization direction, and is an integer of 2 or more.
- k represents the number of the liquid crystal element that modulates the phase of the light flux in the same polarization direction.
- the number k in the equation (1) does not correspond to the order of liquid crystal elements along the optical axis OA.
- the number k corresponding to each liquid crystal element may be determined in an arbitrary order.
- the set of coordinates (x, y) for which the equation (1) is satisfied is the position and range of the L-th ring zone.
- one orbicular zone electrode is arranged in each orbicular zone respectively. That is, in each liquid crystal element, the voltage applied to the liquid crystal layer corresponds to the level of each phase modulation amount when the difference between the minimum value and the maximum value of the phase modulation amount is equally divided by a predetermined number of levels. Different annular electrodes are provided. Therefore, the difference in phase modulation amount between adjacent levels is the same in each liquid crystal element.
- a liquid crystal element having a difference in phase modulation amount between adjacent levels when the difference between the minimum value and the maximum value of phase modulation amount is equally divided by a predetermined number of levels The liquid crystal elements are shifted by the difference in phase modulation amount obtained by equal division by the number of.
- the individual ring zones of each liquid crystal element are displaced by approximately 1 / N of the width of the ring zone with respect to the ring zones of the other liquid crystal element.
- the horizontal axis represents the position in the plane orthogonal to the optical axis OA.
- the position of the optical axis OA is represented by 0 on the horizontal axis.
- the vertical axis represents the phase modulation amount.
- patterns 411, 421, and 431 of ring-shaped electrodes provided in the liquid crystal elements 2-1 to 2-3 are shown. Similar to FIG. 3, the gaps between the annular electrodes are indicated by solid lines.
- FIG. 5 is a diagram showing the deviation of the phase distribution given to the luminous flux by each liquid crystal element.
- FIG. 6 is a figure which shows an example of the phase distribution given to the light beam which permeate
- the horizontal axis represents the position in the plane orthogonal to the optical axis OA.
- the position of the optical axis OA is represented by 0 on the horizontal axis.
- the vertical axis represents the phase modulation amount.
- a curve 400 in FIG. 5 represents an ideal phase modulation profile, and corresponds to the phase modulation profile 400 in FIG. 4 (A) to FIG. 4 (C). Further, phase modulation profile 600 indicated by a dotted line in FIG.
- phase modulation profile 610 represents an ideal phase modulation profile corresponding to phase modulation profile 610 obtained by combining the phase modulation profiles provided by the respective liquid crystal elements (ie, phase modulation
- the profile 600 has a phase modulation amount three times the phase modulation amount of the ideal phase modulation profile for each liquid crystal element).
- the phase modulation profiles 410 to 430 represent phase modulations given by the liquid crystal elements 2-1 to 2-3 to the luminous flux, respectively, and correspond to the phase modulation profiles 410 to 430 in FIG. 4 (A) to FIG. 4 (C).
- FIG. 5 the boundary position between adjacent levels of the phase modulation amount differs for each liquid crystal element. Therefore, as shown in the phase modulation profile 610 of FIG.
- the phase modulation amount given to the light flux transmitted through the liquid crystal optical device 1 is equally divided into 18 levels by 35 ring zones. As described above, the resolution of the phase distribution given to the light flux transmitted through the liquid crystal optical device 1 is higher than the resolution of the transparent electrode pattern of each liquid crystal element.
- the phase modulation profile 610 can approximate the ideal phase modulation profile 400 more appropriately than the phase modulation profiles 410 to 430.
- the number M of levels of phase modulation amount in each liquid crystal element is not limited to the above example.
- the number M of levels of the phase modulation amount may be appropriately set according to the application and specification of the liquid crystal optical device 1.
- each annular electrode may be the same. And in order to set the applied voltage of each annular electrode so that the difference of the applied voltage between adjacent annular electrodes becomes the same, from the phase modulation profile, the position where the amount of phase modulation is maximum and the position where it is minimum An annular electrode corresponding to is determined. Then, the control circuit 3 applies an applied voltage as the maximum phase modulation amount and an applied voltage as the minimum phase modulation amount to the corresponding ring electrodes.
- the plurality of annular electrodes are connected to each other by adjacent electrodes (resistors) having the same electric resistance. For this reason, the voltage difference between adjacent ring electrodes is equal due to resistance division. Further, by controlling the applied voltage in this manner, the number of lead-out electrodes can be reduced and the configuration of the control circuit 3 can be simplified, as compared to independently controlling the voltage applied to each annular electrode.
- FIG. 7 is a diagram showing the relationship between each annular electrode and the applied voltage when the liquid crystal elements 2-1 to 2-3 have n annular electrodes.
- the center electrode is the ring electrode 1
- the ring electrode at the outermost periphery is the ring electrode n
- the ring electrode to which the maximum voltage is applied is the ring electrode m.
- the same voltage V1 is applied to the first annular electrode of the center electrode and the nth annular electrode on the outermost periphery
- the voltage V2 is applied to the m annular electrode.
- the maximum phase modulation amount and the minimum phase modulation amount of each liquid crystal element are equally divided by the number of liquid crystal elements that the liquid crystal optical device 1 has, the maximum phase modulation amount and the minimum phase modulation amount that the entire liquid crystal optical device 1 gives to light flux.
- the voltage applied to each liquid crystal element may be determined so as to obtain the phase modulation amount.
- the phase distribution given to the light flux by the liquid crystal optical device 1 may not be a distribution symmetrical with the optical axis.
- the liquid crystal optical device 1 has each liquid crystal element such that the phase distribution for correcting the wavefront aberration asymmetric with respect to the optical axis, such as coma aberration generated in the entire optical system in which the liquid crystal optical device 1 is disposed,
- the arrangement pattern of the transparent electrodes 13 of may be determined.
- FIG. 9 is a view showing another example of the phase modulation profile given to the light flux transmitted through the entire liquid crystal optical device 1.
- the horizontal axis represents the position in the plane orthogonal to the optical axis OA.
- the position of the optical axis OA is represented by 0 on the horizontal axis.
- the vertical axis represents the phase modulation amount.
- a partial electrode is disposed for each portion of the liquid crystal layer 10 corresponding to each level.
- the position of the boundary between adjacent levels of the phase modulation amount that is, the position of the boundary between adjacent partial electrodes differs for each liquid crystal element. Therefore, as shown in the phase modulation profile 910 of FIG. 9, the phase modulation amount given to the light flux transmitted through the liquid crystal optical device 1 is equally divided into 18 levels.
- the difference between the phase modulation profile 910 which the entire liquid crystal optical device 1 gives to the luminous flux and the corresponding ideal phase modulation profile 900 is the ideal phase with the phase modulation profiles 810 to 830 which the individual liquid crystal elements give to the luminous flux. It is smaller than the difference of the modulation profile 800.
- the maximum point of the phase modulation amount, the minimum point, and the phase modulation amount at the outermost periphery of the active region of the liquid crystal layer are different from each other, the maximum point, the minimum point, and the active region
- a voltage corresponding to the phase modulation amount of the portion where the partial electrode is provided is supplied from the control circuit 3 to the partial electrode provided at the outermost periphery through the extraction electrode.
- the adjacent partial electrodes may be connected by electrodes (resistors) having the same electric resistance.
- the lead-out electrodes for supplying power from the control circuit 3 to the ring-shaped electrodes of each liquid crystal element may be provided at the same position on the plane orthogonal to the optical axis OA. As a result, the proportion of the portion of the light flux incident on the liquid crystal optical device 1 that transmits the extraction electrode is reduced, so the liquid crystal optical device 1 provides the desired phase distribution to more portions of the incident light flux. be able to.
- this liquid crystal optical device the pattern of the transparent electrode is determined such that the position of the boundary between the partial electrodes with respect to the incident light flux is different for each liquid crystal element. Therefore, this liquid crystal optical device can give to the light flux the phase distribution having a finer resolution than the resolution of the pattern of the transparent electrode of each liquid crystal element. Therefore, since this liquid crystal optical device can reduce the error between the ideal and continuous phase distribution given to the luminous flux and the discrete phase distribution actually given to the luminous flux, it is more appropriate for the luminous flux A phase distribution can be given.
- this liquid crystal optical device can reduce the number of levels of phase modulation amount applied to luminous flux to individual luminous elements as compared to the number of phase modulation amounts applied to luminous flux as a whole liquid crystal optical device, each liquid crystal element has The number of partial electrodes can also be reduced. Therefore, this liquid crystal optical device can suppress the gap between the partial electrodes and the number of extraction electrodes.
- a part of the plurality of boundaries between two adjacent partial electrodes in each liquid crystal element may be at the same position with respect to the light beam transmitted through each liquid crystal element. Even in this case, the other boundaries of the plurality of boundaries between two adjacent partial electrodes are at different positions with respect to the light flux transmitted through each liquid crystal element, so the liquid crystal optical device is a transparent electrode of each liquid crystal element A phase distribution having finer resolution than that of the pattern of can be given to the transmitted light flux.
- the liquid crystal optical device has two sets of the above-mentioned liquid crystal elements so that desired phase modulation can be performed even on a light flux having a polarization plane in any direction, and each set of liquid crystal elements
- the arrangement pattern of the electrodes and the arrangement direction of the liquid crystals may be orthogonal to each other.
- the liquid crystal optical device may have the above-described set of liquid crystal elements for each type of aberration to be corrected.
- the difference in applied voltage between adjacent partial electrodes may be different. That is, the difference between the adjacent levels of the phase modulation amount by the individual liquid crystal elements may be different for each level. For example, in order to prevent the partial electrodes from becoming finer, in at least one liquid crystal element, the narrower the distance along the plane orthogonal to the optical axis between two adjacent extreme values of the phase adjustment amount, ie, the phase As the amount of adjustment changes sharply, the number of levels of phase modulation amount included in the interval may be reduced.
- FIGS. 10A to 10 (C) respectively show liquid crystal elements 2-1 to 2-3 for applying phase modulation corresponding to the phase modulation profile shown in FIG. 3 to the luminous flux according to the modification. It is a figure showing an example of a phase modulation profile, and a corresponding ring zone electrode pattern.
- the horizontal axis represents the position in the plane orthogonal to the optical axis OA.
- the position of the optical axis OA is represented by 0 on the horizontal axis.
- the vertical axis represents the phase modulation amount.
- FIGS. 10A to 10C patterns 1011, 1021, and 1031 of ring-shaped electrodes provided in the liquid crystal elements 2-1 to 2-3 are shown. Similar to FIG. 3, the gaps between the annular electrodes are indicated by solid lines.
- the phase modulation amount is divided into four levels from the position r1 to the position that is the outermost periphery of the active region, that is, the position r2 adjacent to the position r1 where the phase modulation amount is a minimum value.
- the difference in phase modulation amount between adjacent levels is twice the difference in phase modulation amount between adjacent levels in the range from position 0 to r1. Therefore, in this modification, in the ideal phase modulation profile 1000 corresponding to the phase modulation profile 300 in FIG. 3, the number of ring zones included in the ring electrode pattern shown in FIG. Rings are set.
- phase modulation between adjacent levels is performed to realize such a phase modulation profile.
- the larger the difference in quantity the larger the resistance value of the resistor connecting the two corresponding ring electrodes.
- the difference in phase modulation between adjacent levels is the difference in phase modulation between adjacent levels in other portions.
- the resistor connected between the strip electrode 1011c and the other has a resistance twice as large as that of the resistor connected between the other ring electrodes.
- the phase modulation amount is divided into five levels and four levels, respectively.
- phase modulation profiles 1020 and 1030 in the portion where the phase modulation amount is steep, the difference in phase modulation amount between adjacent levels is the difference in phase modulation amount between adjacent levels in the range from position 0 to r1 It is doubled.
- the number of annular zones included in the annular electrode patterns shown in FIGS. 4B and 4C is smaller than the number of annular zones 11 10 rings are set. Also in this modification, the position of the boundary between adjacent ring zones differs for each liquid crystal element.
- FIG. 11 is a diagram showing the deviation of the phase distribution given to the luminous flux by each liquid crystal element having the annular electrode pattern shown in FIGS. 10 (A) to 10 (C).
- FIG. 12 is a figure which shows an example of the phase distribution given to the light beam which permeate
- the horizontal axis represents the position in the plane orthogonal to the optical axis OA.
- the position of the optical axis OA is represented by 0 on the horizontal axis.
- the vertical axis represents the phase modulation amount.
- a curve 1000 in FIG. 11 represents an ideal phase modulation profile given to the luminous flux by each liquid crystal element, and corresponds to the phase modulation profile 1000 in FIGS.
- phase modulation profiles 1010 to 1030 respectively indicate phase modulations given to the luminous flux by the liquid crystal elements 2-1 to 2-3, and correspond to the phase modulation profiles 1010 to 1030 in FIGS. 10 (A) to 10 (C).
- a phase modulation profile 1200 indicated by a dotted line in FIG. 12 represents an ideal phase modulation profile corresponding to the phase modulation profile 1210 obtained by combining the phase modulation profiles provided by the liquid crystal elements. As shown in FIG. 11, the boundary position between adjacent levels of the phase modulation amount differs for each liquid crystal element. Therefore, as shown in the phase modulation profile 1210 of FIG. 12, the phase modulation amount given to the light flux transmitted through the liquid crystal optical device 1 is equally divided into 18 levels by 30 ring zones.
- the resolution of the phase distribution given to the light flux transmitted through the liquid crystal optical device 1 is higher than the resolution of the transparent electrode pattern of each liquid crystal element. Moreover, in this modification, since the minimum width of the widths of the individual orbicular zones becomes wider as compared with the above embodiment, the formation of the transparent electrode pattern on the transparent substrate is facilitated.
- each partial electrode of each liquid crystal element is insulated from each other, and each partial electrode is individually separated from the control circuit via the lead electrode.
- the part where the partial electrode is provided may receive a voltage according to the amount of phase modulation given to the luminous flux.
- FIG. 13 shows a schematic configuration diagram of a laser microscope 100 provided with a liquid crystal optical device according to one embodiment or modification of the present invention.
- the laser beam emitted from the laser light source 101 which is a coherent light source, is adjusted to collimated light by the collimating optical system 102, and the collimated light is transmitted through the liquid crystal optical device 103 according to the above embodiment or modification. Is focused on the sample 105.
- a luminous flux including the information of the sample such as a luminous flux reflected or scattered by the sample 105 or fluorescence generated by the sample is traced back along the optical path, reflected by the beam splitter 106, and a confocal optical system 107 as a second optical system.
- the laser light source 101 may have a plurality of laser light sources having different wavelengths of emitted lasers.
- the wavefront aberration generated by the optical system from the laser light source 1 to the focusing position of the light beam including the objective lens 104 is estimated, and the phase distribution that cancels the wavefront aberration is used as a phase modulation profile in the liquid crystal optical device 103.
- this laser microscope 100 improves the imaging performance.
- the liquid crystal optical device of the present invention is used for aberration correction of an optical system such as a laser microscope, but the present invention is not limited to these embodiments.
- the liquid crystal optical device of the present invention may be used as an optical axis symmetric refractive index distribution lens.
Abstract
Description
この液晶光学デバイスは、光軸方向に沿って複数の液晶素子を有する。各液晶素子は、液晶層と、液晶層を挟んで対向する二つの透明電極とを有する。そして各液晶素子に設けられる二つの透明電極のうちの少なくとも一方は、液晶光学デバイスを透過する光束に与える位相分布に応じて配置される複数の部分電極により形成される。そして液晶層のうちの互いに隣接する二つの部分電極に対応するそれぞれの領域を透過した部分光束間に対して与えられる位相変調量のレベル差が等しくなるように、部分電極の配置が決定される。さらに、液晶光学デバイスを透過する光束に対する部分電極間の境界の位置が、液晶素子ごとにずれるように、部分電極は配置される。これにより、この液晶光学デバイスは、個々の液晶素子の透明電極のパターンの解像度よりも微細な解像度を持つ位相分布を光束に与える。
なお、液晶光学デバイス1が有する液晶素子の数は3個に限られず、2個以上であればよい。
液晶素子2-1は、液晶層10と、光軸OAに沿って液晶層10の両側に略平行に配置された透明基板11、12を有する。そして液晶層10に含まれる液晶分子15は、透明基板11及び12と、シール部材16との間に封入されている。なお、図2(B)において、説明のために、液晶分子15のサイズは、実際の液晶分子のサイズよりも誇張されている。また液晶素子2-1は、透明基板11と液晶層10の間に配置された透明電極13と、液晶層10と透明基板12の間に配置された透明電極14とを有する。なお、透明基板11、12は、例えば、ガラスまたは樹脂など、所定の波長域に含まれる波長を持つ光に対して透明な材料により形成される。また透明電極13、14は、例えば、ITOと呼ばれる、酸化インジウムに酸化スズを添加した材料により形成される。また、透明電極13、14と、液晶層10の間には、液晶分子15を所定の方向に配向させる配向膜(図示せず)が配置されてもよい。
なお、液晶層10に入射する光束の波長によって、液晶層10の屈折率は変化する。そこで制御回路3が、入射する光束の波長に応じて各輪帯電極に印加する電圧を調節することで、入射する光束の波長によらずに液晶素子2-1を透過する光束に対して所定の位相分布が与えられる。
2-1~2-3 液晶素子
3 制御回路
10 液晶層
11、12 透明基板
13、14 透明電極
13-1~13-n 輪帯電極(部分電極)
15 液晶分子
16 シール部材
100 レーザー顕微鏡
101 レーザー光源
102 コリメート光学系
103 収差補正デバイス
104 対物レンズ
105 試料
106 ビームスプリッター
107 コンフォーカル光学系
108 共焦点ピンホール
109 検出器
Claims (7)
- 光軸に沿って配列されたN個の液晶素子を有し、かつNは2以上の整数である液晶光学デバイスであって、
前記N個の液晶素子のそれぞれは、
所定の方向に配向された液晶分子が封入された液晶層と、
前記液晶層を挟んで対向するように配置された二つの透明電極とを有し、
前記二つの透明電極のうちの少なくとも一方は、複数の部分電極を有し、かつ、前記液晶層を透過する光束に与える位相分布における位相変調量の最大値と最小値の差を所定のレベル数で分割したときの各レベルごとに、当該レベルの位相変調量を前記光束に与える前記液晶層の部分に前記複数の部分電極の少なくとも一つが配置され、
前記光束に対する、隣接する二つの前記部分電極間の境界の位置が前記液晶素子ごとに異なる箇所を有することを特徴とする液晶光学デバイス。 - 各レベルの位相変調量が、前記位相変調量の最大値と最小値の差を前記所定のレベル数で等分割したときの隣接レベル間の差に相当する位相変調量を前記Nで等分割して得られる位相変調量の差ずつ、前記液晶素子ごとにずれるように、各液晶素子について前記複数の部分電極が配置される、請求項1に記載の液晶光学デバイス。
- 前記N個の液晶素子のうちの少なくとも一つにおいて、
前記位相変調量の隣接する二つの極値のそれぞれに相当する、前記光軸に直交する面における位置の間隔が小さいほど、当該間隔に含まれる位相変調量のレベルの数が少なくなるように前記複数の部分電極が配置される、請求項1に記載の液晶光学デバイス。 - 前記光軸に直交する面における、前記複数の部分電極に電力を供給する引き出し電極の位置が前記複数の液晶素子のそれぞれについて同一である、請求項1~3の何れか一項に記載の液晶光学デバイス。
- 前記N個の液晶素子のそれぞれについて、前記複数の部分電極のそれぞれと対向する前記透明電極との間に、前記液晶層のうちの当該部分電極が設けられた部分を透過する光束に与える位相変調量の前記レベルに応じた電圧を印加する制御回路をさらに有する、請求項1~4の何れか一項に記載の液晶光学デバイス。
- 前記N個の液晶素子のそれぞれについて、前記複数の部分電極のうちの互いに隣接する二つの部分電極は、それぞれ抵抗子によって接続され、
前記制御回路は、前記位相変調プロファイルにおける位相変調量が極大値となる位置に対応する前記部分電極及び前記位相変調量が極小値となる位置に対応する前記部分電極と、対向する前記透明電極との間に、それぞれ、前記位相変調量が極大値及び極小値となるように電圧を印加する、請求項5に記載の液晶光学デバイス。 - 前記N個の液晶素子のうちの第1の液晶素子についての前記所定のレベル数は第1のレベル数であり、前記N個の液晶素子のうちの他の液晶素子についての前記所定のレベル数は前記第1のレベル数に1を加えた第2のレベル数であり、
前記制御回路は、前記第1の液晶素子における、前記複数の部分電極のうちの前記位相変調量の最大値に対応する部分電極と対向する前記透明電極との間に印加される電圧と、前記位相変調量の最小値に対応する部分電極と対向する前記透明電極との間に印加される電圧との第1の電圧差に対する、前記他の液晶素子における、前記複数の部分電極のうちの前記位相変調量の最大値に対応する部分電極と対向する前記透明電極との間に印加される電圧と、前記位相変調量の最小値に対応する部分電極と対向する前記透明電極との間に印加される電圧との第2の電圧差の比が、前記第1のレベル数に対する前記第2のレベル数の比と等しくなるように、各液晶素子の各部分電極と対向する前記透明電極との間の電圧を制御する、請求項5または6に記載の液晶光学デバイス。
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CN201480069445.3A CN105829958B (zh) | 2013-12-19 | 2014-11-20 | 液晶光学器件 |
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WO2021153083A1 (ja) * | 2020-01-30 | 2021-08-05 | 株式会社ジャパンディスプレイ | 光制御装置及び照明装置 |
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US11054680B1 (en) * | 2018-08-07 | 2021-07-06 | UltResFP, LLC | Electronically configurable variable aperture and grating for optical and spectral applications |
CN109782498B (zh) * | 2019-01-24 | 2022-02-18 | 南京奥谱依电子科技有限公司 | 用于波前寻址测调的液晶微镜、其制备方法和光学显微镜 |
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