WO2015087411A1 - Appareil de traitement et procédé de traitement - Google Patents

Appareil de traitement et procédé de traitement Download PDF

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Publication number
WO2015087411A1
WO2015087411A1 PCT/JP2013/083199 JP2013083199W WO2015087411A1 WO 2015087411 A1 WO2015087411 A1 WO 2015087411A1 JP 2013083199 W JP2013083199 W JP 2013083199W WO 2015087411 A1 WO2015087411 A1 WO 2015087411A1
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WIPO (PCT)
Prior art keywords
tool
workpiece
distance
unit
distance measuring
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PCT/JP2013/083199
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English (en)
Japanese (ja)
Inventor
貴志 藤井
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住友化学株式会社
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Priority to PCT/JP2013/083199 priority Critical patent/WO2015087411A1/fr
Publication of WO2015087411A1 publication Critical patent/WO2015087411A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/445—Movable or adjustable work or tool supports using particular mechanisms using a first carriage for a smaller workspace mounted on a second carriage for a larger workspace, both carriages moving on the same axes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B23Q17/2233—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work for adjusting the tool relative to the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q39/00—Metal-working machines incorporating a plurality of sub-assemblies, each capable of performing a metal-working operation
    • B23Q39/02—Metal-working machines incorporating a plurality of sub-assemblies, each capable of performing a metal-working operation the sub-assemblies being capable of being brought to act at a single operating station
    • B23Q39/021—Metal-working machines incorporating a plurality of sub-assemblies, each capable of performing a metal-working operation the sub-assemblies being capable of being brought to act at a single operating station with a plurality of toolheads per workholder, whereby the toolhead is a main spindle, a multispindle, a revolver or the like
    • B23Q39/022—Metal-working machines incorporating a plurality of sub-assemblies, each capable of performing a metal-working operation the sub-assemblies being capable of being brought to act at a single operating station with a plurality of toolheads per workholder, whereby the toolhead is a main spindle, a multispindle, a revolver or the like with same working direction of toolheads on same workholder
    • B23Q39/024—Metal-working machines incorporating a plurality of sub-assemblies, each capable of performing a metal-working operation the sub-assemblies being capable of being brought to act at a single operating station with a plurality of toolheads per workholder, whereby the toolhead is a main spindle, a multispindle, a revolver or the like with same working direction of toolheads on same workholder consecutive working of toolheads

Definitions

  • the present invention generally relates to a machining apparatus and a machining method, and more specifically, a machining apparatus and a machining method for performing high-precision (for example, nanometer to micrometer order) fine machining on the surface of a workpiece.
  • high-precision for example, nanometer to micrometer order
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2011-240457 enables high-precision fine surface processing with a simple configuration and less change in cutting depth even in long-time processing.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2011-240457 enables high-precision fine surface processing with a simple configuration and less change in cutting depth even in long-time processing.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2011-240457 enables high-precision fine surface processing with a simple configuration and less change in cutting depth even in long-time processing.
  • Patent Document 1 Patent Document 1
  • the processing apparatus disclosed in Patent Document 1 is an ultra-precision processing machine having stages that are movable in the X, Y, and Z axis directions orthogonal to each other. Above the workpiece, a reference surface of a reference plate serving as a reference plane is installed. A displacement detection sensor for measuring the gap to the reference surface is installed at the rear end of the tool.
  • Patent Document 1 As disclosed in Patent Document 1 described above, various processing apparatuses have been proposed in order to perform high-precision fine processing on the surface of a workpiece (processing object). In particular, there are an increasing number of cases where high-precision fine machining is required for large-sized workpieces.
  • embossing roll having a width of more than 3 meters as a large mold used for manufacturing parts of optical film.
  • a protruding defect having a height difference of only about 0.5 ⁇ m and a diameter of about 30 ⁇ m is not allowed.
  • a glass substrate on which a TFT (Thin Film Transistor), a color filter, or a transparent electrode is formed on the surface can be cited as a large-sized work that requires high-precision fine processing on the surface.
  • TFT Thin Film Transistor
  • various films are formed on a glass substrate and subjected to various processes including etching.
  • a method for correcting the defect portion on the surface of the workpiece as described above for example, a method of polishing the entire surface of an embossing roll or the like and reworking the mold shape, or a method of finely processing only the defect portion can be considered. .
  • an object of the present invention is to solve the above-mentioned problems, and to provide a machining apparatus and a machining method that are excellent in economic efficiency and realize high-precision machining of the workpiece surface.
  • a processing apparatus includes a tool for processing the surface of a workpiece, a first linear movement mechanism that moves the tool in a first direction along the surface of the workpiece, a tip of the tool, and a surface of the workpiece.
  • a measurement unit, a tool and a distance measurement unit are mounted, and a moving mechanism unit that switches and moves the tool and the distance measurement unit to a specific position on the workpiece surface.
  • the machining apparatus configured as described above, by providing the moving mechanism unit that moves the tool and the distance measuring unit in a switched manner, the workpiece surface, the tool, and the distance measuring unit can be used regardless of the accuracy of the first linear motion mechanism unit.
  • the moving mechanism unit moves the tool and the distance measuring unit in a direction parallel to the first direction.
  • the tool and the distance measuring unit are switched to a specific position on the workpiece surface by moving the tool and the distance measuring unit in a direction parallel to the first direction by the moving mechanism unit. Can be moved.
  • the moving mechanism unit rotates and moves the tool and the distance measuring unit.
  • the tool and the distance measuring unit can be switched and moved to a specific position on the workpiece surface by rotating the tool and the distance measuring unit by the moving mechanism unit.
  • the tool and the distance measuring unit are arranged side by side along the moving direction of the moving mechanism unit.
  • the moving distance of the tool and the distance measuring unit by the moving mechanism unit is smaller than the moving distance of the tool by the first linear movement mechanism unit.
  • the moving mechanism is configured to have repeatability with the required accuracy. Since the moving distance of the tool and the distance measuring unit by the moving mechanism unit only needs to be a distance sufficient to switch and move the tool and the distance measuring unit, as a result, the moving distance of the tool and the distance measuring unit by the moving mechanism unit is The moving distance of the tool by the first linear motion mechanism is smaller. Since the moving distance of the tool and the distance measuring unit by the moving mechanism unit is smaller than the moving distance of the tool by the first linear motion mechanism unit, it is possible to reduce economic deterioration due to the adoption of the high-precision moving mechanism unit.
  • the processing apparatus further includes a shape identification unit that is mounted on the moving mechanism unit and identifies the shape of the workpiece surface.
  • the moving mechanism unit moves the tool, the distance measuring unit, and the shape identifying unit to a specific position.
  • the moving mechanism unit that moves the tool, the distance measuring unit, and the shape identifying unit in a switched manner, the workpiece surface, the tool, and the tool can be used regardless of the accuracy of the first linear motion mechanism unit.
  • the relative positional relationship between the distance measuring unit and the shape identifying unit can be maintained with high accuracy.
  • the processing apparatus further includes a rotating device that is mounted with a tool and rotates the tool when processing a workpiece, and an elastic body that is interposed between the rotating device and the second linear motion mechanism.
  • the processing apparatus configured as described above, by providing the elastic body, it is possible to suppress the vibration generated in the rotating apparatus from being transmitted to the second linear motion mechanism section. Thereby, the closed loop control in a 2nd linear motion mechanism part can be performed appropriately.
  • the processing apparatus further includes a third linear motion mechanism that moves the tool in a third direction orthogonal to the first direction and the second direction.
  • the processing apparatus further includes a workpiece moving mechanism that moves the workpiece in a third direction orthogonal to the first direction and the second direction.
  • the processing apparatus further includes a work rotation mechanism that rotates the work around an axis parallel to the first direction.
  • any of the above-described effects can be achieved in a machining apparatus having various machining axes.
  • the machining method according to the present invention is a machining method for correcting a defective portion on the workpiece surface using any of the above-described machining apparatuses.
  • the machining method includes a step of moving the distance measuring unit to a specific position facing a defect on the workpiece surface, and a distance measurement by a front distance measuring unit positioned at the specific position between the tip of the tool and the surface of the workpiece.
  • the step of moving the tool to a specific position instead of the distance measuring unit by the moving mechanism unit, and the distance measuring unit And a step of correcting the defective portion by moving the tool toward the surface of the workpiece by the second linear motion mechanism based on the distance between the tip of the tool specified by the above and the surface of the workpiece.
  • the machining method configured in this manner, it is possible to realize a machining method that is excellent in economic efficiency and realizes machining of the workpiece surface with high accuracy.
  • FIG. 3 It is a perspective view which shows the processing apparatus in Embodiment 1 of this invention. It is a perspective view which shows the 1st modification of the processing apparatus in FIG. It is a perspective view which shows the 2nd modification of the processing apparatus in FIG. It is a perspective view which shows the processing apparatus in Embodiment 2 of this invention.
  • the Example using the processing apparatus in FIG. 3 it is a photograph which shows the optical image (before correction processing) of the workpiece
  • FIG. 1 is a perspective view showing a processing apparatus according to Embodiment 1 of the present invention.
  • a processing apparatus 100 is an apparatus for processing a surface 51 a of a workpiece 51.
  • the processing apparatus 100 includes a tool 12, an actuator 16, an actuator 20 and an actuator 40, and an actuator 28.
  • Actuator 16, actuator 20, and actuator 40 are means for moving the tool 12 to reach a specified position on the workpiece surface.
  • the actuator 16 as the first linear motion mechanism moves the tool 12 in the X-axis direction along the surface 51a of the workpiece 51.
  • the actuator 20 as the second linear motion mechanism unit moves the tool 12 in the Y-axis direction orthogonal to the X-axis direction so that the distance between the tip 12p of the tool 12 and the surface 51a of the workpiece 51 changes.
  • the actuator 40 as the third linear motion mechanism unit moves the tool 12 in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction.
  • the X-axis direction and the Y-axis direction are horizontal directions
  • the Z-axis direction is a vertical direction.
  • the present invention is not limited to this.
  • the machining apparatus 100 capable of machining (three-axis machining) into three axes of the X axis, the Y axis, and the Z axis that are orthogonal to each other is configured.
  • actuators are composed of a drive device for moving an object and a control device for controlling the movement of the object by the drive device.
  • the drive device refers to all devices and substances that generate power, such as a motor, an air cylinder, a hydraulic cylinder, and a piezo (piezoelectric element).
  • motor-driven drive devices that use a direct-acting linear motor and one that uses a motor to turn a screw to convert rotational motion into linear motion.
  • actuators are preferably equipped with an encoder in a linear motion device (linear actuator) and perform closed loop control in order to achieve high decision accuracy.
  • a linear motion device that is closed-loop controlled by a high-resolution linear encoder.
  • a piezo element is generally used as a stage having submicron accuracy.
  • the piezo element has a short movable stroke, and when a large workpiece is processed, the stroke may be insufficient. is there.
  • the driving by the stepping motor and the feed screw such a concern can be solved.
  • Sufficient cutting accuracy can be obtained by using a linear encoder having a signal resolution of 5 nanometers.
  • a stage system that employs such a feed screw drive mechanism for example, there is a feedback stage system FS-1050SPX (manufactured by Sigma Tech Co., Ltd.).
  • a linear motion device that employs a cross roller guide as a guide mechanism has high rigidity and can be preferably used from the viewpoint of economy.
  • the closed loop control is a control method in which the amount of rotation of the motor is controlled while confirming an error between the current position and the target position by an encoder, and reaches the target value.
  • the amount of table movement is often determined from the amount of motor rotation and the pitch of the feed screw, but the required accuracy may not be achieved due to imperfections in the feed screw.
  • the current position can be known from the scale even with an incomplete feed screw, so the error between the current position and the target position can be known, and the stage can be accurately moved to the target position. .
  • Feedback stage refers to a linear motion device whose position can be controlled by closed loop.
  • the encoder is generally composed of a scale and a head for reading the scale. This is used to know the current position of the linear motion device table when the linear motion device is moved.
  • a linear encoder is used, and when rotating motion is read, a rotary encoder is used.
  • Actuator 28 as a moving mechanism is a means for moving tool 12 and distance measuring device 24 (described later) to a specific position on the workpiece surface.
  • a tool 12 and a distance measuring device 24 are mounted on the actuator 28.
  • the tool 12 and the distance measuring device 24 are arranged side by side in the moving direction by the actuator 28.
  • the actuator 28 moves the tool 12 and the distance measuring device 24 in the X-axis direction.
  • the actuator 28 moves the tool 12 and the distance measuring device 24 in a direction parallel to the moving direction of the actuator 16.
  • the tool 12 and the distance measuring device 24 are provided side by side in the X-axis direction.
  • the actuator 40 As the actuator 40 is driven, the actuator 16, the actuator 28, and the actuator 20 move in the Z-axis direction together with the tool 12 and the distance measuring device 24. As the actuator 16 is driven, the actuator 28 and the actuator 20 move together with the tool 12 and the distance measuring device 24 in the X-axis direction. As the actuator 28 is driven, the actuator 20 moves in the X-axis direction together with the tool 12 and the distance measuring device 24. As the actuator 20 is driven, the tool 12 moves in the Y-axis direction.
  • the processing apparatus 100 in the present embodiment is suitably used for processing a large workpiece.
  • the movable distance of the tool 12 by the actuator 16 (maximum movement distance of the tool 12 in the X-axis direction) is 1 m or more. In another example, the movable distance of the tool 12 by the actuator 16 is 3 m or more.
  • the moving distance of the tool 12 and the distance measuring device 24 by the actuator 28 may be a distance that is sufficient to switch and move the tool 12 and the distance measuring device 24 to a specific position on the workpiece surface. For this reason, the moving distance of the tool 12 and the distance measuring device 24 by the actuator 28 is smaller than the movable distance of the tool 12 by the actuator 16.
  • the moving distance of the tool 12 and the distance measuring device 24 by the actuator 28 differs from the movable distance of the tool 12 by the actuator 16 on the order of two digits.
  • the movable distance of the tool 12 by the actuator 16 is in the range of 1 m or more and less than 10 m
  • the moving distance of the tool 12 and the distance measuring device 24 by the actuator 28 is in the range of 1 cm or more and less than 10 cm.
  • the relationship between the movement distance of the tool 12 and the distance measuring device 24 by the actuator 28 and the movable distance of the tool 12 by the actuator 16 is merely an example, and the relationship between the two is the machining axis included in the machining device 100. Naturally, it can vary depending on the stroke of the tool and the pitch between the tool 12 and the distance measuring device 24.
  • the tool 12 is a tool for processing the surface 51a of the workpiece 51, and is typically a cutting tool such as an end mill.
  • a cutting tool such as an end mill.
  • end mill products having various materials and shapes are appropriately selected in consideration of the processing purpose and processing target.
  • a good surface state can be obtained by using a flat end mill as the tool 12. Further, by using a ball end mill as the tool 12, for example, a defective portion generated in a mold having a smooth shape such as an anti-glare mold can be corrected.
  • an end mill made of cemented carbide is preferably used because of the wide range of materials that can be cut.
  • a cemented carbide coated with a hard material provides operational advantages such as reduced wear and less frequent replacement.
  • the tool 12 is not limited to the cutting tool as described above, and may be a syringe for injecting a metal paste for hole filling, for example.
  • the machining apparatus 100 further includes a motor spindle 36 as a rotation device that rotates the tool 12 when machining the workpiece 51.
  • the tool 12 is detachably attached to the motor spindle 36.
  • the motor spindle 36 it is preferable to use a motor spindle that employs a hydrostatic bearing that has small vibration during rotation and generates little frictional heat. Further, from the viewpoint of suppressing heat generation, a rotating device using an air turbine may be used instead of a motor that generates a rotational force by an electric current.
  • the processing apparatus 100 preferably further includes an elastic body interposed between the motor spindle 36 and the actuator 20.
  • the elastic body include a metal spring, an anti-vibration rubber, and an anti-vibration gel. It is preferable to use an antivibration gel because of its high performance and ease of handling.
  • the anti-vibration gel one that suppresses transmission of vibration having a frequency corresponding to the rotation speed of the motor spindle 36 to the feedback stage constituting the actuator 20 is preferably used.
  • the frequency of the generated vibration can be estimated from the rotational speed of the motor spindle 36.
  • the material of the vibration-proof gel is not particularly limited, but if an elastic body such as silicone rubber, natural rubber or chloroprene rubber is used, the vibration transmission rate can be reduced.
  • the vibration generated by the motor spindle 36 affects the linear encoder in the feedback stage, so that the closed loop control is difficult to function normally. Since the rotation speed of the motor spindle 36 is known, it is sufficient to use a vibration-proof gel having a small frequency transmission rate corresponding to the rotation speed. As a result, the actuator 20 can perform stable and highly accurate closed-loop control.
  • the processing apparatus 100 further includes a work holding device 52.
  • the work holding device 52 is means for holding the work 51.
  • various clamping mechanisms can be preferably used.
  • FIG. 2 is a perspective view showing a first modification of the processing apparatus in FIG.
  • the machining apparatus includes a workpiece linear motion device 54 as a workpiece moving mechanism unit instead of the actuator 40 in FIG. 1.
  • the workpiece 51 is attached to the workpiece linear motion device 54.
  • the workpiece linear motion device 54 moves the workpiece 51 in the Z-axis direction.
  • the machining position of the workpiece 51 by the tool 12 is displaced in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction.
  • the actuator 16 As shown in the present modification, by using the actuator 16, the actuator 20, and the workpiece linear motion device 54 in combination, it is possible to configure a machining device capable of machining an arbitrary position on the workpiece surface.
  • FIG. 3 is a perspective view showing a second modification of the processing apparatus in FIG.
  • the machining apparatus in the present modification is suitably used for machining a workpiece 51 having a cylindrical shape.
  • the processing apparatus has a work rotation device 44 as a work rotation mechanism section instead of the actuator 40 in FIG.
  • a work rotation device 44 rotates the work 51 around a U axis parallel to the X axis.
  • a combination of the actuator 16, the actuator 20, and the work rotating device 44 can be used to constitute a processing device that can process an arbitrary position on the work surface.
  • processing apparatus 100 in the present embodiment further includes a distance measuring device 24 and a calculation unit (not shown).
  • the distance measuring device 24 as a distance measuring unit is a means for specifying the distance between the tip 12p of the tool 12 and the surface 51a of the workpiece 51.
  • the computing unit computes the distance between the tip 12p of the tool 12 and the workpiece surface based on the measurement result by the distance measuring device 24.
  • Measures for measuring distances with submicron accuracy include laser interferometers and confocal laser sensors. In general, it is difficult to reduce the size of the measuring instrument, but it is relatively compact and is not easily affected by surface roughness.
  • the confocal double-scan high-precision laser measuring instrument LT9010M manufactured by Keyence Corporation Is mentioned.
  • the calculation unit calculates the distance between the tip 12p of the tool 12 and the cutting target surface on the workpiece surface based on these parameters after measuring the relative positional relationship between the components of the apparatus in advance.
  • the calculation is realized by, for example, a central processing unit (CPU) or equipment equipped with a CPU.
  • the processing apparatus 100 further includes a shape recognition device 32.
  • the shape recognition device 32 as a shape recognition unit is a means for identifying the shape of the workpiece surface.
  • the shape recognition device 32 includes an image sensor such as a CCD or CMOS, a lens having a magnification capable of observing a cutting point, and illumination for imaging.
  • a macro lens employing a telecentric optical system can be preferably used when used for correcting manufacturing equipment parts of an optical film.
  • the telecentric optical system can pick up a slight unevenness such as a scratch more clearly. By mounting such a lens on the actuator 28, a portion to be cut can be accurately identified.
  • the defect portion of this size it is difficult to accurately move the tool 12 to the cutting position by visual observation.
  • the CCD image sensor include CV-H200C (manufactured by Keyence Co., Ltd.)
  • examples of the macro lens employing a telecentric optical system include CA-LMA4 (manufactured by Keyence Co., Ltd.).
  • the shape recognition device 32 is mounted on the actuator 28 together with the tool 12 and the distance measurement device 24.
  • the tool 12, the distance measurement device 24, and the shape recognition device 32 are arranged side by side in the movement direction (X-axis direction) by the actuator 28.
  • the shape recognition device 32 is arranged between the tool 12 and the distance measurement device 24, but is not limited to such an arrangement.
  • the shape recognition device 32 is moved by driving the actuator 16 and the actuator 40 so that the defective portion is reflected at the designated position of the imaging device (sighting).
  • the actuator 28 is driven to move the distance measuring device 24 to a position facing the defect portion instead of the shape recognition device 32.
  • the distance between the tip 12p of the tool 12 and the surface 51a of the workpiece 51 is specified by distance measurement by the distance measuring device 24.
  • the actuator 28 by driving the actuator 28, the tool 12 is moved to a position facing the defect portion instead of the distance measuring device 24. Based on the distance between the tip 12p of the tool 12 specified by the distance measuring device 24 and the surface 51a of the workpiece 51, the actuator 20 is driven to move the tool 12 toward the surface 51a of the workpiece 51, thereby causing a defect portion. To correct.
  • a method of detecting the position of the tool tip with a distance measuring device and adjusting the position of the tool with the actuator 20 at any time while machining the workpiece surface with the tool is conceivable.
  • the distance measuring device having the required accuracy is large and has a narrow field of view range that can be measured, it is substantially difficult to measure the tip position of the tool at the same time as machining with the tool. For this reason, it is necessary to first dispose a distance measuring device on the defective part, measure the distance to the workpiece surface, and then move the tool onto the defective part by driving the actuator 16.
  • the tool 12 and the distance measuring device 24 are mounted separately from the actuator 16 for moving the tool 12 along the workpiece surface, and the moving direction of the actuator 16 is changed.
  • An actuator 28 for moving the tool 12 and the distance measuring device 24 in a direction parallel to the actuator 12 is provided. By driving the actuator 28, the tool 12 and the distance measuring device 24 are moved to a position facing the defect portion.
  • the positional relationship between the tool 12 and the distance measuring device 24 with respect to the workpiece surface is kept constant without being affected by pitching, yawing, rolling, etc. generated by the actuator 16 having a long movable distance, and the defect portion is corrected. Processing can be performed. That is, in the present embodiment, repeatability is ensured by the actuator 28.
  • the actuator 28 when the actuator 28 is realized by a highly accurate linear motion device, the tool 12 and the distance measuring device 24 are reciprocated on the highly accurate linear motion device at the time of correcting the defective portion. Will only do.
  • the tool 12 and the distance measuring device 24 since the tool 12 and the distance measuring device 24 repeatedly move on this highly accurate linear motion device, even when the linear motion device is finely curved or meandering, from the workpiece surface to the tool tip. And the distance from the workpiece surface to the distance measuring device can be kept constant.
  • the tool 28 and the tool 12 are affected by the actuator 28 without being affected by insufficient accuracy of linear movement by the actuator 16.
  • the movement accuracy of the distance measuring device 24 can be improved.
  • the adjustment man-hour of an apparatus can be reduced and the processing apparatus 100 can be constructed
  • the actuator 16 that is excellent in terms of economy but is inferior in linear movement accuracy is used, it is possible to process the workpiece surface with high accuracy.
  • the processing apparatus 100 and the processing method using the same according to the present embodiment are suitably used for manufacturing an optical film manufacturing equipment part or a glass substrate described below.
  • Optical films are becoming more important with the rapid spread of liquid crystal display devices.
  • TAC triacetyl cellulose
  • PVA polyvinyl alcohol
  • PET polyethylene terephthalate
  • PMMA polymethyl methacrylate
  • COP cycloolefin polymer
  • PC polycarbonate
  • the surface is subjected to various treatments depending on the required function. Typical examples include hard coat treatment to prevent scratches, antireflection treatment to reduce light reflection from the surface, antiglare treatment with matte treatment, and antifouling treatment to prevent adhesion of dirt. It is mentioned in.
  • Optical films are required to have high uniformity with respect to film thickness and surface appearance. Because the uniformity is based on light, the level of defects that must be removed is very high. For example, if it is about 0.5 ⁇ m, which is equivalent to the wavelength of visible light, it may be recognized as a defective portion even if the height is different from the peripheral uniform portion. Further, the size is recognized as a defective part from a diameter of about 30 ⁇ m.
  • optical film manufacturing equipment parts include a mold for matting the surface of a product, a guide roll, a nip roll, a cooling roll, and an embossing roll for anti-glare treatment used in the film manufacturing equipment.
  • the material may be metal, resin, ceramic, glass, rubber, or the like.
  • optical film manufacturing equipment various parts related to film molding and conveyance are used.
  • an optical film manufacturing facility using a melt extrusion molding method there are cooling rollers having high surface accuracy, and an optical film is molded by cooling the film using these.
  • a solution in which a material is dissolved in a solvent is caused to flow and adhere to a casting drum having a smooth surface, and the contained solvent is evaporated to mold the optical film.
  • the glass substrate examples include glass substrates used in various display devices such as liquid crystal display devices, plasma display devices and organic EL display devices, and various devices such as organic EL lighting and touch panels.
  • various films are formed on a glass substrate and subjected to various processes including etching.
  • Typical examples of the film formed on the glass substrate by film formation and various processes include a TFT, a color filter, and a transparent conductive film.
  • Typical sizes of glass substrates used are the sixth generation (1.5 m ⁇ 1.8 m), the seventh generation (1.9 m ⁇ 2.2 m), and the eighth generation (2.16 m ⁇ 2.46 m). And 10th generation (2.85 m ⁇ 3.05 m).
  • FIG. 4 is a perspective view showing a processing apparatus according to Embodiment 2 of the present invention. Compared with the processing apparatus in FIG. 3 demonstrated in Embodiment 1, the processing apparatus in this Embodiment is fundamentally provided with the same structure. Hereinafter, the description of the overlapping structure will not be repeated.
  • processing apparatus 200 in the present embodiment has a turntable 29 instead of actuator 28 in FIG. 3.
  • the turntable 29 is means for moving the tool 12, the distance measuring device 24, and the shape recognizing device 32 at specific positions on the workpiece surface.
  • a tool 12, a distance measuring device 24, and a shape recognition device 32 are mounted on the turntable 29.
  • the tool 12, the distance measuring device 24, and the shape recognizing device 32 are arranged side by side in the moving direction by the turntable 29.
  • the turntable 29 rotates the tool 12, the distance measuring device 24, and the shape recognition device 32.
  • the turntable 29 rotates and moves the tool 12, the distance measurement device 24, and the shape recognition device 32 in the circumferential direction around an axis parallel to the Z axis.
  • the tool 12, the distance measuring device 24, and the shape recognizing device 32 are provided side by side in the circumferential direction around an axis parallel to the Z axis.
  • the tool 12 is disposed between the shape recognition device 32 and the distance measurement device 24, but is not limited to such an arrangement.
  • a mechanism called a revolver that switches objective lenses having different magnifications in a microscope can be used.
  • the tool 12, the distance measuring device 24, and the shape recognition device 32 are directly mounted on the turntable 29.
  • the turntable 29 is mounted on the actuator 20, and the actuator 20 is mounted on the actuator 16.
  • the elastic body when an elastic body is interposed between the motor spindle 36 and the actuator 20, the elastic body may be provided at a connection portion between the motor spindle 36 and the turntable 29. It may be provided at a connection portion with the actuator 20.
  • the element facing the defective portion on the workpiece surface is switched by driving the turntable 29.
  • the effects described in the first embodiment can be similarly achieved. Further, by using the turntable 29, the load on the actuator 16 can be configured in a compact manner.
  • FIG. 5 is a photograph showing an optical image of the workpiece surface (before correction processing) in the example using the processing apparatus in FIG.
  • FIG. 6 is a photograph showing an optical image (after correction processing) of the workpiece surface in the example using the processing apparatus in FIG.
  • the surface shape imparting die of the antiglare film used as an optical film is used as an object to be cut, and the protruding defect portion generated on the surface is corrected by cutting.
  • a specific apparatus configuration in this case will be described.
  • the cutting accuracy required for this workpiece is an error of 0.5 ⁇ m or less.
  • a ball end mill r 0.5: TSC-BEM2S0.5 (handled by MISUMI Corporation), which is a cutting tool, is used as the tool 12, and this is used as an air turbine spindle RSX (made by Daishowa Seiki Co., Ltd.) which is a motor spindle 36. Installed.
  • This air turbine spindle was fixed to a feedback stage system FS-1050SPX (manufactured by Sigma Tech Co., Ltd.) as the actuator 20 via three anti-vibration gels (GELB2501 MISUMI handling product).
  • the rotation speed of the air turbine spindle was about 60000 rpm, and the frequency was about 1 kHz.
  • the transmission rate of the vibration-proof gel used was 1/20 or less. Under such conditions, the vibration of the linear encoder of the feedback stage was within ⁇ 35 nm, and no problem in use occurred.
  • Feedback stage system FS-1050SPX manufactured by Sigmatec Co., Ltd.
  • double-scan high-precision laser measuring instrument LT9010M manufactured by Keyence Co., Ltd.
  • CCD CV- H200C manufactured by Keyence Corporation
  • telecentric macro lens CA-LMA4 manufactured by Keyence Corporation
  • white LED spot illumination CA-DPW2 manufactured by Keyence Corporation
  • the ball end mill r 0.5: TSC-BEM2S0.5, double-scan high-precision laser measuring instrument LT9010M, CCD CV-H200C, telecentric macro lens CA-LMA4 and white LED spot illumination CA-DPW2 are actuators. It was arranged to repeatedly move on KS103-100TN, which is 28. Further, the above-described component was fixed to the linear actuator GLM20-148-S-EP-C-NV-I-X-J-N-D05-E05-CE (manufactured by THK Co., Ltd.) which is the actuator 16.
  • a support spindle TS210 (manufactured by Tsuda Koma Kogyo Co., Ltd.) and a stepping motor AR98AA-H100-3 (manufactured by Oriental Motor Co., Ltd.) are used as the work rotating device 44, and a scroll chuck TC190F (Kobayashi Tekko Co., Ltd.) is used as the work holding device 46.
  • the embossing roll as the work 51 was held.
  • the embossing roll has a cylindrical surface with a diameter of 300 mm and a surface length of 1350 mm precisely processed, and the surface is chrome plated.
  • the rotational center runout of the cylindrical portion of the roll was measured with a double-scan high-precision laser measuring instrument LT9010M (manufactured by Keyence Corporation) using the distance measuring device 24, and it was ⁇ 50 ⁇ m.
  • the depth was in the range of ⁇ 0.2 ⁇ m, and sufficient cutting accuracy was achieved.
  • the diameter of the defect shown in the position surrounded by the dotted line in FIG. 5 was about 100 ⁇ m and the height was about 1.5 ⁇ m.
  • the actuator 28 was set to the initial position so that the image sensor of the shape recognition device 32 equipped with a telecentric lens and coaxial epi-illumination was directly above the defective part.
  • the shape recognition device 32 was moved by the drive of the actuator 16 so that the defective portion was reflected at the designated position of the image sensor.
  • the actuator 28 was driven to move the measurement position of the distance measuring device 24 directly above the defective portion.
  • the measurement range of the double-scan high-precision laser measuring instrument LT9010M which is the distance measuring device 24 is 1100 ⁇ m on the surface to be processed, and the step is 2 ⁇ m. From the height information excluding the range of ⁇ 100 ⁇ m from the measurement center, the base height at the measurement center was determined by the least square method.
  • the actuator 12 was driven to move the tool 12 directly above the defective part.
  • the tool 20 was moved by the actuator 20 by a distance obtained by adding a desired cutting amount to the distance between the tool tip calculated by the calculation unit and the surface to be cut, and the defective portion was cut. As shown in FIG. 6, as a result of cutting, the defective portion was able to be corrected to a state where no abnormality was visually confirmed.
  • the present invention is used, for example, for manufacturing a mold used in an optical film manufacturing facility and a glass substrate on which a TFT, a color filter or a transparent electrode is formed on the surface.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

La présente invention concerne un appareil de traitement (100) équipé : d'un outil (12) permettant de traiter une surface (51a) d'une pièce (51) ; d'une première unité de mécanisme (16) à mouvement linéaire qui déplace l'outil (12) dans la première direction le long de la surface (51a) de la pièce (51) ; d'une seconde unité de mécanisme (20) à mouvement linéaire qui déplace l'outil (12) dans la seconde direction orthogonale à la première direction de sorte qu'une distance entre une extrémité avant (12p) de l'outil (12) et la surface (51a) de la pièce (51) varie ; d'une unité de mesure (24) de distance permettant de spécifier la distance entre l'extrémité avant (12p) de l'outil (12) et la surface (51a) de la pièce (51) ; et d'une unité de mécanisme (28) mobile sur laquelle sont montés l'outil (12) et l'unité de mesure (24) de distance, et qui déplace en alternance l'outil (12) et l'unité de mesure (24) de distance vers une position spécifiée sur une surface de pièce. Au moyen d'une telle configuration, l'invention pourvoit audit appareil de traitement, lequel permet d'obtenir une excellente performance de coûts et un traitement de grande précision de la surface de pièce.
PCT/JP2013/083199 2013-12-11 2013-12-11 Appareil de traitement et procédé de traitement WO2015087411A1 (fr)

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CN109202512A (zh) * 2018-11-12 2019-01-15 东莞市固达机械制造有限公司 一种数控铣床用大工件主动定位装置
WO2019137695A1 (fr) * 2018-01-15 2019-07-18 Festool Gmbh Arrangement d'usinage
JP2020116713A (ja) * 2019-01-25 2020-08-06 ファナック株式会社 精密工作機械

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WO2019137695A1 (fr) * 2018-01-15 2019-07-18 Festool Gmbh Arrangement d'usinage
CN111565886A (zh) * 2018-01-15 2020-08-21 费斯托工具有限责任公司 加工装置
CN111565886B (zh) * 2018-01-15 2022-07-19 费斯托工具有限责任公司 加工装置
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JP2020116713A (ja) * 2019-01-25 2020-08-06 ファナック株式会社 精密工作機械
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