WO2015087171A1 - Detector for high-efficient electromagnetic radiation detection, and the process for production of said detector - Google Patents

Detector for high-efficient electromagnetic radiation detection, and the process for production of said detector Download PDF

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Publication number
WO2015087171A1
WO2015087171A1 PCT/IB2014/062763 IB2014062763W WO2015087171A1 WO 2015087171 A1 WO2015087171 A1 WO 2015087171A1 IB 2014062763 W IB2014062763 W IB 2014062763W WO 2015087171 A1 WO2015087171 A1 WO 2015087171A1
Authority
WO
WIPO (PCT)
Prior art keywords
rigid section
sensor
adhesive agent
detector
raster
Prior art date
Application number
PCT/IB2014/062763
Other languages
French (fr)
Inventor
Marko MIKUŽ
Vladimir CINDRO
Borut GROŠIČAR
Aleš MOLJK
Toni LUNKA
Original Assignee
Intech-Les, Razvojni Center, D.O.O.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intech-Les, Razvojni Center, D.O.O. filed Critical Intech-Les, Razvojni Center, D.O.O.
Publication of WO2015087171A1 publication Critical patent/WO2015087171A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14618Containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14643Photodiode arrays; MOS imagers
    • H01L27/14658X-ray, gamma-ray or corpuscular radiation imagers
    • H01L27/14661X-ray, gamma-ray or corpuscular radiation imagers of the hybrid type

Definitions

  • the present invention refers to a detector for high-efficient electromagnetic radiation detection, in particular to a highly efficient gamma-ray detection.
  • the present invention also refers to a process for production of said detector.
  • Detectors of aforementioned kind are known and are used, for instance in the field of positron tomography.
  • Said detectors comprise a silicon sensor with a connection area for n pads.
  • Each pad has a connecting conductor, for instance, a thin aluminium conductor, arranged in the area above the respective pad.
  • the sensor based on such a solution has a considerable thickness, which results in a low resolution of detection, a low filling ratio and thus bad efficiency of electromagnetic radiation detection.
  • Another objective of the invention is to provide a method for producing said detector for high-efficient electromagnetic radiation detection.
  • FIG. 1 shows a detector according to the invention in a three-dimensional exploded view
  • FIG. 2 shows a detail II of Fig. 1
  • FIG. 3 shows a detail of the assembled detector of Fig. 2.
  • a detector for high-efficient electromagnetic radiation detection is hereinafter described on the basis of embodiment of detector for high-efficient detection of gamma-ray energy photons. While the description allows those skilled in the field to produce and use everything which is at a given moment meant as the best method of application, it is, of course, understood that there may be other possibilities, combinations and equivalents of the specific embodiment. The invention is therefore not limited to the described embodiment but other embodiments may also be possible without departing from the spirit and scope of the invention, for which protection is sought.
  • a detector for high-efficient electromagnetic radiation detection comprises a flat supporting element 1, in the present embodiment a multilayer printed circuit board, said flat element 1 being formed so as to comprise a central rigid section 2 and flexible sections 3, 4, which are in a manner known per se associated at each longitudinal side with said rigid section 2.
  • Said rigid section 2 is formed at each flat side thereof with a plurality of contacts 2' which are mutually isolated and arranged in a raster structure, said contacts 2' being associated in a manner known per se with said multilayer printed circuit board 1.
  • Said isolated separation of said contacts 2' is provided by means of a web between two adjacent contacts 2', said webs being formed in a manner known per se of a photo- imageable solder mask.
  • a sensor 5 of electromagnetic radiation in present embodiment a silicon sensor with a plurality of gamma-ray detection pads 5' arranged in a raster structure, is attached to said rigid section 2 of the multilayer printed circuit board 1 at each free flat side thereof.
  • Said plurality of pads 5' on said sensor 5 is arranged in a raster structure in a manner to corresponds to the plurality of said contacts 2' in the rigid section 2 arranged in a raster structure.
  • each sensor 5 to the rigid section 2 is formed by means of a plurality of islands 6 of adhesive agent between the rigid section 2 and each sensor 5, said islands being mutually isolated and arranged in a raster structure, wherein said raster arrangement is aligned with the raster arrangement of said pads 5' on the sensor 5 and, respectively, to said contacts 2' on the rigid section 2.
  • said adhesive agent is selected as an electrically conductive thermoplastic adhesive agent. Due to the low elastic modulus of the thermoplastic adhesive agent, a reliable coupling of elements with different temperature coefficients of elongation is enabled.
  • a detector for high-efficient electromagnetic radiation detection is, according to the invention, produced in a manner that the island 6 of adhesive agent, in the present embodiment of thermoplastic adhesive agent, is applied to each said contact 2' from the plurality of contacts of said rigid section 2 arranged in raster.
  • Said application of adhesive agent is carried out, for instance, by means of a suitable mask or screen or by a process of pipetting or the like.
  • said sensor 5 is placed on said rigid section 2 provided with islands 6 of adhesive agent in a manner for the raster of arrangement of the pads 5' is aligned with the raster arrangement of islands 6 of adhesive agent.
  • both flat sides of rigid section 2 are provided with islands 6 of adhesive agent and the sensor 5, this assembly is compressed, preferably at a temperature higher than the ambient temperature.
  • the pressure under which said assembly is pressed lies in the presented embodiment between 1.5 bar and 2.5 bar, whereas the temperature at which the compression is carried out, lies between 150°C and 200°C.
  • the assembly has been exposed to said pressure for approximately 60 minutes. In this way a perfect vertical connection between the rigid section 2 and, respectively, its contacts 2' and the sensor 5 and, respectively, the plurality of its pads 5' is achieved, wherein islands 6 of adhesive agent remain mutually isolated.
  • the present invention has an additional advantage which allows for the above described detectors for high-efficient electromagnetic radiation detection to be assembled in a module of several detectors, arranged one upon the other, thus increasing the filling ratio of the detector and, respectively, of such module.

Abstract

The present invention relates to a detector for high-efficient electromagnetic radiation detection, in particular to a highly efficient gamma-ray detection. According to the invention it is proposed that the detector comprises a flat supporting element (1) comprising a central rigid section (2) and flexible sections (3, 4), which are connected with said rigid section 2 at each longitudinal side thereof, wherein sensor (5) is connected with rigid section (2) at each free flat side thereof. Said connection of the respective sensor (5) with rigid section (2) is formed by means of islands (6) of adhesive agent, arranged between the rigid section (2) and the sensor (5).

Description

DETECTOR FOR HIGH-EFFICIENT ELECTROMAGNETIC RADIATION DETECTION, AND THE PROCESS FOR PRODUCTION OF SAID DETECTOR
The present invention refers to a detector for high-efficient electromagnetic radiation detection, in particular to a highly efficient gamma-ray detection. The present invention also refers to a process for production of said detector.
Detectors of aforementioned kind are known and are used, for instance in the field of positron tomography. Said detectors comprise a silicon sensor with a connection area for n pads. Each pad has a connecting conductor, for instance, a thin aluminium conductor, arranged in the area above the respective pad. The sensor based on such a solution has a considerable thickness, which results in a low resolution of detection, a low filling ratio and thus bad efficiency of electromagnetic radiation detection.
It is the object of the present invention to create a detector for high-efficient detection of photons, which remedies drawbacks of known solutions.
Another objective of the invention is to provide a method for producing said detector for high-efficient electromagnetic radiation detection.
The object as set above is achieved by the features given in the characterizing part of the claim 1. Details of the invention are disclosed in the subclaims. The invention is hereinafter described in more detail on the basis of non-limiting embodiment and with reference to the attached drawing, wherein
FIG. 1 shows a detector according to the invention in a three-dimensional exploded view, FIG. 2 shows a detail II of Fig. 1,
FIG. 3 shows a detail of the assembled detector of Fig. 2.
A detector for high-efficient electromagnetic radiation detection is hereinafter described on the basis of embodiment of detector for high-efficient detection of gamma-ray energy photons. While the description allows those skilled in the field to produce and use everything which is at a given moment meant as the best method of application, it is, of course, understood that there may be other possibilities, combinations and equivalents of the specific embodiment. The invention is therefore not limited to the described embodiment but other embodiments may also be possible without departing from the spirit and scope of the invention, for which protection is sought.
A detector for high-efficient electromagnetic radiation detection comprises a flat supporting element 1, in the present embodiment a multilayer printed circuit board, said flat element 1 being formed so as to comprise a central rigid section 2 and flexible sections 3, 4, which are in a manner known per se associated at each longitudinal side with said rigid section 2. Said rigid section 2 is formed at each flat side thereof with a plurality of contacts 2' which are mutually isolated and arranged in a raster structure, said contacts 2' being associated in a manner known per se with said multilayer printed circuit board 1. Said isolated separation of said contacts 2' is provided by means of a web between two adjacent contacts 2', said webs being formed in a manner known per se of a photo- imageable solder mask.
A sensor 5 of electromagnetic radiation, in present embodiment a silicon sensor with a plurality of gamma-ray detection pads 5' arranged in a raster structure, is attached to said rigid section 2 of the multilayer printed circuit board 1 at each free flat side thereof. Said plurality of pads 5' on said sensor 5 is arranged in a raster structure in a manner to corresponds to the plurality of said contacts 2' in the rigid section 2 arranged in a raster structure. Said association of each sensor 5 to the rigid section 2 is formed by means of a plurality of islands 6 of adhesive agent between the rigid section 2 and each sensor 5, said islands being mutually isolated and arranged in a raster structure, wherein said raster arrangement is aligned with the raster arrangement of said pads 5' on the sensor 5 and, respectively, to said contacts 2' on the rigid section 2. According to the present invention it is provided that said adhesive agent is selected as an electrically conductive thermoplastic adhesive agent. Due to the low elastic modulus of the thermoplastic adhesive agent, a reliable coupling of elements with different temperature coefficients of elongation is enabled.
A detector for high-efficient electromagnetic radiation detection is, according to the invention, produced in a manner that the island 6 of adhesive agent, in the present embodiment of thermoplastic adhesive agent, is applied to each said contact 2' from the plurality of contacts of said rigid section 2 arranged in raster. Said application of adhesive agent is carried out, for instance, by means of a suitable mask or screen or by a process of pipetting or the like. When said adhesive agent is dried, said sensor 5 is placed on said rigid section 2 provided with islands 6 of adhesive agent in a manner for the raster of arrangement of the pads 5' is aligned with the raster arrangement of islands 6 of adhesive agent. When both flat sides of rigid section 2 are provided with islands 6 of adhesive agent and the sensor 5, this assembly is compressed, preferably at a temperature higher than the ambient temperature. The pressure under which said assembly is pressed lies in the presented embodiment between 1.5 bar and 2.5 bar, whereas the temperature at which the compression is carried out, lies between 150°C and 200°C. The assembly has been exposed to said pressure for approximately 60 minutes. In this way a perfect vertical connection between the rigid section 2 and, respectively, its contacts 2' and the sensor 5 and, respectively, the plurality of its pads 5' is achieved, wherein islands 6 of adhesive agent remain mutually isolated. The present invention has an additional advantage which allows for the above described detectors for high-efficient electromagnetic radiation detection to be assembled in a module of several detectors, arranged one upon the other, thus increasing the filling ratio of the detector and, respectively, of such module.

Claims

Claims
1. A detector for high-efficient electromagnetic radiation detection, characterized in that it comprises a flat supporting element (1) with a central rigid section (2) and flexible sections (3, 4) associated with said rigid section (2) from each longitudinal side thereof, wherein electromagnetic radiation sensor (5) is attached to the rigid section (2) at each free flat side thereof, and wherein said attachment of each sensor (5) to the rigid section (2) is formed by means of a plurality of mutually isolated islands (6) of adhesive agent, arranged between the rigid section (2) and the sensor (5).
2. A detector according to claim 1, characterized in that said rigid section (2) is formed at each flat side thereof with a plurality of contacts (2') arranged in raster and mutually isolated, and that said sensor (5) is formed with a plurality of pads (5') arranged in raster for electromagnetic radiation detection, and said islands (6) of adhesive agent are arranged in a raster structure, wherein said raster arrangement of islands (6) is aligned with the raster arrangement of said pads (5') on the sensor (5) and, respectively, of said contacts (2') on the rigid section (2).
3. A detector according to claim 1, characterized in that said sensor (5) is a silicon sensor.
4. A detector according to claim 1, characterized in that said adhesive agent is selected as an electrically conductive thermoplastic adhesive agent.
5. A detector according to claim 1, characterized in that said flat supporting element (1) is a multilayer printed circuit board.
6. A method for production of a detector for high-efficient electromagnetic radiation detection, characterized in that it comprises
a) application of mutually isolated islands (6) of adhesive agent on each contact (2') of a plurality of contacts of rigid section (2) arranged in raster; b) drying of said adhesive agent;
c) placement of said sensor (5) on each side of said rigid section (2) provided with islands (6) of adhesive agent, so that the raster of the arrangement of the pads (5') on the sensor (5) is aligned with the raster of islands (6);
compressing of the assembly obtained in the previous step, with a pressure of between 1.5 bar and 2.5 bar, preferably at a temperature higher than the ambient temperature, and with the time of compression of about 60 minutes.
A method for production of a detector according to claim 6, characterized in that the temperature, at which the compression is carried out, lies between 150°C and 200°C.
A method for manufacturing of a detector according to claims 6 and 7, characterized in that the adhesive agent is selected as an electrically conductive thermoplastic adhesive agent.
A method for manufacturing of a detector according to claims 6 to 8, characterized in that said application is carried out by means of a suitable mask or screen or by the process of pipetting or the like.
A method for manufacturing of a detector according claims 6 to 9, characterized in that detectors for high-efficient electromagnetic radiation detection can be assembled into a module of several detectors.
11. A module, comprising a plurality of detectors arranged one upon the other according to any of the preceding claims.
PCT/IB2014/062763 2013-12-10 2014-07-01 Detector for high-efficient electromagnetic radiation detection, and the process for production of said detector WO2015087171A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SIP-201300416 2013-12-10
SI201300416A SI24581A (en) 2013-12-10 2013-12-10 The detector for high separation eficiently detecting electromagnetic radiation and manufactoring process of said detector

Publications (1)

Publication Number Publication Date
WO2015087171A1 true WO2015087171A1 (en) 2015-06-18

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0872896A1 (en) * 1997-04-10 1998-10-21 Canon Kabushiki Kaisha Photoelectric conversion device
US20060071173A1 (en) * 2004-10-01 2006-04-06 Zeman Gregory S Module assembly for multiple die back-illuminated diode
US20110226951A1 (en) * 2010-03-16 2011-09-22 Siemens Aktiengesellschaft Detector Module For A Radiation Detector And Radiation Detector
US20130049151A1 (en) * 2011-08-31 2013-02-28 General Electric Company Anode-illuminated radiation detector

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0872896A1 (en) * 1997-04-10 1998-10-21 Canon Kabushiki Kaisha Photoelectric conversion device
US20060071173A1 (en) * 2004-10-01 2006-04-06 Zeman Gregory S Module assembly for multiple die back-illuminated diode
US20110226951A1 (en) * 2010-03-16 2011-09-22 Siemens Aktiengesellschaft Detector Module For A Radiation Detector And Radiation Detector
US20130049151A1 (en) * 2011-08-31 2013-02-28 General Electric Company Anode-illuminated radiation detector

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Publication number Publication date
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