WO2015083195A1 - Pompe à vide à vis - Google Patents

Pompe à vide à vis Download PDF

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Publication number
WO2015083195A1
WO2015083195A1 PCT/JP2013/007063 JP2013007063W WO2015083195A1 WO 2015083195 A1 WO2015083195 A1 WO 2015083195A1 JP 2013007063 W JP2013007063 W JP 2013007063W WO 2015083195 A1 WO2015083195 A1 WO 2015083195A1
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WO
WIPO (PCT)
Prior art keywords
rotor
oil
screw
hollow portion
male
Prior art date
Application number
PCT/JP2013/007063
Other languages
English (en)
Japanese (ja)
Inventor
肇 飯塚
洋成 川端
大見　忠弘
Original Assignee
株式会社飯塚鉄工所
国立大学法人東北大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社飯塚鉄工所, 国立大学法人東北大学 filed Critical 株式会社飯塚鉄工所
Priority to PCT/JP2013/007063 priority Critical patent/WO2015083195A1/fr
Priority to JP2014555429A priority patent/JP5892569B2/ja
Priority to TW103117314A priority patent/TWI622702B/zh
Publication of WO2015083195A1 publication Critical patent/WO2015083195A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/023—Lubricant distribution through a hollow driving shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/807—Balance weight, counterweight
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the present invention relates to a screw vacuum pump.
  • the same type of pump may be used as long as it does not depend on the exhaust speed, and the trouble of selecting a pump for each exhaust location does not occur. If the pumps of the above type are realized at low cost and commercialized, the degree of spread will be significant, and it is easily expected to greatly contribute to the development of the industry.
  • the screw vacuum pump of the first aspect of the present invention has a male rotor and a female rotor having screw teeth that mesh with each other,
  • the screw teeth of the male and female rotors are an unequal lead unequal inclination angle screw part formed on the upper end side in the rotation axis direction and the unequal lead unequal inclination formed on the lower end side in the rotation axis direction.
  • At least one of the male rotor and the female rotor has a hollow portion that opens at an upper end surface and a lower end surface in the rotation axis direction, A rotating shaft coupled to the at least one rotor and at least partially housed in the hollow portion; A bearing housed in the hollow portion and rotatably supporting the rotating shaft; The connecting portion between the at least one rotor and the rotary shaft is arranged near the position of the center of gravity of the at least one rotor in the rotation axis direction.
  • the screw vacuum pump of the second aspect of the present invention has a male rotor and a female rotor having screw teeth that mesh with each other, At least one of the male rotor and the female rotor has a hollow portion that opens at an upper end surface and a lower end surface in the rotation axis direction, A rotating shaft coupled to the at least one rotor and at least partially housed in the hollow portion; A bearing housed in the hollow portion and rotatably supporting the rotating shaft; A connecting portion between the at least one rotor and the rotating shaft is disposed in the hollow portion separated from the upper end portion and the lower end portion of the at least one rotor.
  • the screw vacuum pump of the third aspect of the present invention has a male rotor and a female rotor having screw teeth that mesh with each other,
  • the screw teeth of the male and female rotors have an unequal lead unequal inclination angle screw part and an equal lead screw part continuous to the unequal lead unequal inclination angle screw part,
  • a stator having a gas inlet and outlet and accommodating the male rotor and female rotor;
  • At least one of the male rotor and the female rotor has a hollow portion that opens at a lower end surface in the rotation axis direction;
  • the at least one rotor has a plurality of mass attaching portions for attaching a mass for adjusting the rotation balance of the at least one rotor,
  • the stator is formed to be accessible to the plurality of mass mounting portions from the outside of the stat
  • FIG. 1 is a cross-sectional view of a gas exhaust pump according to an embodiment of the present invention.
  • the schematic diagram which shows the connection position of the male rotor which concerns on one Embodiment of this invention, and a rotating shaft.
  • the schematic diagram which shows the connection position of the conventional rotor and a rotating shaft.
  • produces in the conventional rotor.
  • the screw vacuum pump 100 includes a pair of male and female rotors 110 and 120 that are arranged in mesh with each other while maintaining a meshing gap and rotate synchronously in opposite directions, A stator 130 for housing the female rotor 120, rotary shafts 150A and 150B connected to the male and female rotors 110 and 120, a drive motor 140 provided integrally with the rotary shaft 150A, and the rotary shaft 150A are rotatable.
  • Bearing bearings 160, 161, 162 for supporting, a pair of synchronous gears 170A, 170B attached to the lower ends of the rotary shafts 150A, 150B, an oil reservoir 300 provided below the stator 130 and containing oil OL, It is provided at the lower end of the rotating shafts 150A and 150B.
  • a shaft seal device 230 disposed above the bearing 160 and a support member 200 that supports the shaft seal device 230 are provided.
  • FIG. 1 details of the structure inside the female rotor 120 are omitted, but a bearing is also provided on the female rotor 120 side in the same manner as the male rotor 110, and the rotary shaft 150B is rotatably supported.
  • the same shaft seal device and support member as those on the male rotor 110 side are provided, but no drive motor is provided.
  • a drive motor may be integrally provided on the rotating shaft 150B on the female rotor side (in this case, for example, it is rotated so as to be synchronized using an inverter). It is also possible to make the configuration of the female rotor side shaft sealing device, the support member, etc. different from that of the male rotor 110 side.
  • the stator 130 is made of a metal such as stainless steel. As shown in FIG. 1, the stator 130 is fixed to the main body 131 that houses the male rotor 110 and the female rotor 120, the lower end of the main body 131, and the exhaust port 136.
  • the stator 130, the male rotor 110, and the female rotor 120 cooperate to form a gas working chamber that transfers and compresses gas.
  • the male rotor 110 and the female rotor 120 respectively have screw teeth 111 and 121 that mesh with each other while maintaining a meshing gap.
  • the screw teeth 111 and 121 of the male rotor 110 and the female rotor 120 are disposed on the intake port 135 side, and are unequal lead unequal inclination angle screw portions (hereinafter referred to as unequal lead screw portions) 111a for transporting and compressing gas.
  • unequal lead screw portions unequal lead screw portions
  • the equal lead screw portions 111b and 121b are formed with equal lead equal inclination angles and have straight tooth traces.
  • the unequal lead screw portions 111a and 121a are formed such that the lead and the inclination angle (lead angle) gradually decrease from the intake port 135 side to the exhaust port 136 side, and have curved tooth traces. .
  • the lead angle changes according to the rotation angles of the male rotor 110 and the female rotor 120, and between one lead of the gas working chamber formed by the male rotor 110 and the female rotor 120 and the stator 130. Is continuously reduced from the intake port 135 side toward the exhaust port 136 side, whereby gas transfer compression is performed.
  • the rotary shaft 150A is formed of a metal such as stainless steel, and the upper end side is rotatably supported by the support member 200 via the bearing 160 and is coaxially connected to the male rotor 110.
  • the structure of the support member 200 will be described later.
  • Bearings 161 and 162 are provided on the lower end side of the rotating shaft 150 ⁇ / b> A.
  • the bearing 161 is held by a first bearing holder 137 and the bearing 162 is held by a second bearing holder 138.
  • the first bearing holder 137 is fixed to the lower end portion of the support member 200, and the second bearing holder 138 is fixed to the base portion 132.
  • the bearing 160 is an angular ball bearing and supports most of the loads of the male rotor 110 and the rotating shaft 150A.
  • the bearings 161 and 162 are also angular ball bearings, these are mainly provided to suppress the swing of the rotating shaft 150 ⁇ / b> A that may occur during the high-speed rotation of the male rotor 110.
  • the lubrication of the bearings 160 to 162 will be described later.
  • the drive motor 140 includes a motor rotor 141 fixed between the bearings 160 and 161 of the rotary shaft 150A, and a stator 142 disposed around the motor rotor 141 and fixed to the support member 220 so that a predetermined gap 143 is formed. It is driven by receiving AC power from the outside of the pump.
  • FIG. 3 is a schematic diagram showing the relationship between a conventional male rotor and a rotating shaft.
  • the rotor 510 shown in FIG. 3 is the same as the male rotor 110 with respect to the screw teeth on the outer peripheral side, but a hollow 512 is formed at the upper end 510t with a connecting portion 512 to the rotary shaft 550 and opens at the lower end surface in the rotation axis direction
  • a hollow portion 511 accommodates a part 511 and a bearing 560 that rotatably supports a part of the rotation shaft 550 and the rotation shaft 550.
  • This vibration deformation mode is an axial bending deformation with the bearing 560 as a restraint portion as a base point.
  • the structure shown in FIG. 2 is adopted in order to increase the resonance frequency of the rotor.
  • the male rotor 110 has a lower hollow portion 113A that opens at the lower end surface 110b in the direction of the rotation axis AX, and an upper hollow portion 113B that opens at the upper end surface 110t.
  • the hollow portion 113B communicates with the hollow portion 113B through a through hole 112h formed in the connecting portion 112.
  • the connecting portion 112 is connected to a flange portion 151 formed at the upper end portion of the rotating shaft.
  • the connecting portion 112 is disposed at a position away from the upper end surface 110 t and the lower end surface 110 b of the male rotor 110, and the rotation axis AX direction of the connecting portion 112 is located near the center of gravity GC of the male rotor 110. In this way, the connection position between the rotary shaft 150 and the male rotor 110 is moved to the position of the center of gravity GC of the male rotor 110, and the distance between the bearing 160 serving as the restraint portion and the connection portion between the rotary shaft 150 and the male rotor 110 is set. It was found that the resonance frequency of the male rotor 110 can be increased by shortening the length compared to the conventional one.
  • the primary resonance point of the male rotor 110 could be increased to over 10,000 rpm. Further, by connecting the rotating shaft 150 and the male rotor 110 to the inside of the male rotor 110, the entire length of the rotating shaft 150 can be shortened as compared with the conventional one, and weight reduction, vibration suppression, and the like can be achieved. But it is advantageous. Although only the male rotor 110 has been described, the same structure is adopted for the female rotor 120.
  • a plurality of end surface portions 114 formed at the end of the unequal lead screw portion 111 a on the upper end side of the male rotor 110 are used as masses for adjusting the rotational balance of the male rotor 110.
  • a plurality of mass attaching portions 114h for attaching the screw M are arranged.
  • the mass attaching part 114h is configured by, for example, a screw hole.
  • the end surface portions 114 are arranged at equal intervals in the circumferential direction around the rotation axis AX, and are orthogonal to the rotation axis AX.
  • the plurality of mass attaching portions 114h are arranged along the circumferential direction, and are also arranged at equal intervals in the radial direction.
  • a disk-shaped plate 115 is formed integrally with the male rotor 110 at the lower end of the male rotor 110.
  • the center of the disk-shaped plate 115 coincides with the rotation axis AX, and the outer peripheral surface 115f of the disk-shaped plate 115 is parallel to the rotation axis AX.
  • a plurality of mass attaching portions 115h are formed on the outer peripheral surface 115f at regular intervals along the circumferential direction.
  • the mass attachment portion 115h is configured by, for example, a screw hole formed toward the center of the disk-shaped plate 115.
  • a screw M as a mass for adjusting the rotational balance of the male rotor 110 can be attached to the mass attaching portion 115h.
  • a passage 132 a is formed in the base portion 132 of the stator 130 that allows access to the mass attaching portion 115 h from the outside of the stator 130.
  • the passage 132a is normally sealed and opened only when necessary.
  • the mass attaching portion 114h on the upper end side of the male rotor 110 can be accessed from the outside of the stator 130 through the air inlet 135 as shown in FIG.
  • the mass attaching portions are provided at the upper and lower ends of the male rotor 110.
  • the present invention is not limited to this.
  • the mass attaching portions are formed in the intermediate portion in the rotation axis direction of the male rotor 110. It is also possible. Although only the male rotor 110 has been described, the same structure is adopted for the female rotor 120.
  • the rotary shaft 150 ⁇ / b> A has an oil supply path 152 formed by a through hole extending in the longitudinal direction at the center thereof.
  • the opening at the lower end surface of the through hole formed in the rotating shaft 150A is an inlet 153 into which the oil OL flows, and the opening at the upper end surface of the through hole is a plug fixed to the connecting portion 112 of the male rotor 110. It is sealed with a member 156.
  • a member 156 As shown in an enlarged view in FIG.
  • the oil supply path 152 communicates with an oil supply path 152 a extending in the radial direction of the rotary shaft 150 ⁇ / b> A formed above the bearing 160, and the outer periphery of the rotary shaft 150 ⁇ / b> A.
  • the end of the oil supply path 152a that opens at the surface is an outlet 154 from which the oil OL flows out.
  • the oil supply path 152a is formed at two positions symmetrical with respect to the rotation axis AX, and each oil supply path 152a has a flow path 155h having a flow path area defined so as to adjust the flow rate of the oil OL to a predetermined amount.
  • the flow rate adjusting member 155 formed with is screwed.
  • a push-up head 180 that pushes oil OL upward from the oil reservoir 300 by centrifugal force and drag effect is provided at the inlet 153 of the rotary shaft 150A.
  • the push-up head 180 has a through-hole penetrating in the vertical direction, and the inner peripheral surface of the through-hole is formed in a tapered shape that increases in diameter from below to above.
  • the push-up head 180 is fixed to the lower end of the rotary shaft 150A, and rotates with the rotary shaft 150A when the screw vacuum pump 100 is driven.
  • the centrifugal force using the tapered inner peripheral surface and the rotation of the rotary shafts 150A and 150B described above.
  • the lubricating oil is pushed up from the oil reservoir 300 by a drag effect.
  • the oil OL pushed up by the rotating push-up head 180 moves upward along the inner wall of the oil supply path 152 and is discharged from the outlet 154 to the outside of the rotary shaft 150A through the oil supply path 152a and the flow rate adjusting member 155. Is done.
  • an annular oil amount adjusting ring 220 is provided between the bearing 160 of the rotation shaft 150A and the outlet 154.
  • the oil amount adjusting ring 220 is fixed to the rotating shaft 150A.
  • the oil amount adjusting ring 220 includes an annular lower plate portion 221, an annular upper plate portion 222 facing the lower plate portion 221, and a lower plate portion 221 and an upper plate portion 222 on the inner peripheral side.
  • the connecting wall 223 is formed with a flow hole 225 formed at a position corresponding to the outlet 154 of the oil supply passage 152a extending in the radial direction of the rotary shaft 150A.
  • a plurality of oil supply holes 226 that supply oil OL for lubricating the bearing 160 are arranged in the lower plate portion 221 at equal intervals along the circumferential direction.
  • a flange part 24 is formed on the upper part of the outer periphery of the lower plate part 221. The flange 24 serves to prevent the oil OL from falling downward from between a receiving plate 210 (described later) fitted into the outer peripheral surface 228 of the lower plate 221 and the lower plate 221.
  • the oil amount adjustment ring 220 is provided above the bearing 160 to optimize the supply amount of the oil OL.
  • the number and dimensions of the oil supply holes 226 of the oil amount adjustment ring 220 are adjusted in advance so that the supply amount of the oil OL is optimized.
  • the oil amount adjusting ring 220 is not limited to the oil amount adjusting mechanism of the present invention. Further, although the oil amount adjusting ring 220 is fixed to the rotating shaft 150A, an oil amount adjusting mechanism can be realized without being fixed to the rotating shaft 150A.
  • the receiving plate 210 is formed in an annular shape, covers the upper portion of the bearing 160 together with the oil amount adjusting ring 220, and is fixed to the support member 200.
  • the receiving plate 210 is provided to guide oil OL discharged from the outlet 154 of the rotary shaft 150A to a plurality of inlets 201a and 202a formed in the support member 200 described later.
  • a circulation hole 210h is formed at a position corresponding to 201a and 202a.
  • the support member 200 is formed of a metal such as stainless steel and is formed in a cylindrical shape as shown in FIGS. 9A and 9B. As shown in FIG. 1, the support member 200 is formed in the cylindrical hollow portion 113A of the male rotor 110. A slight gap is formed between the outer peripheral surface 206 of the support member 200 and the inner wall surface of the hollow portion 113A.
  • the support member 200 has a lower end fixed to the base portion 132 of the stator 130, and extends in the direction of the rotation axis AX so as to reach the middle of the unequal lead screw portion 111a from the base portion 132 through the opening of the hollow portion 113A. It is extended.
  • the support member 200 is transmitted with heat from the male rotor 110 that becomes high temperature due to the compression heat of the gas.
  • the male rotor 110 is expected to have the highest temperature at the end portion of the unequal lead screw portion 111a on the side of the equal lead screw portion 111b.
  • the heat of the male rotor 110 is increased. Can be received effectively.
  • the support member 200 holds the bearing 160 in the bearing holding portion 203, the heat generated by the bearing 160 can be effectively received.
  • a plurality of first flow paths 201 and a plurality of second flow paths 202 are formed on the outer peripheral side of the bearing holding portion 203 through which oil OL extending in the vertical direction flows.
  • the first flow path 201 is formed so as to distribute the oil OL flowing from the inflow port 201 a to the gap 143 formed between the motor rotor 141 and the motor stator 142 of the drive motor 140.
  • the second flow path 202 is formed so as to distribute the oil OL flowing from the inlet 202 a onto the outer peripheral surface 142 a of the motor stator 142. That is, the support member 200 also serves as the flow path member and the guide member of the present invention. Note that the present invention is not limited to this, and the flow path member and the guide member may be separate members.
  • the motor stator 142 has a plurality of grooves 142b formed in the outer peripheral surface 142a and extending in the rotation axis direction.
  • the groove 142b cooperates with the inner wall surface 205 of the support member 200 to form a flow path for circulating the oil OL supplied from the second flow path 202.
  • the oil reservoir 300 is formed at a lower portion of the stator 130 and is provided for storing the oil OL.
  • a cooling pipe 191 of the cooling device 190 is disposed in the oil reservoir 300.
  • the cooling device 190 cools the oil OL stored in the oil reservoir 300 by a water cooling method, and is disposed in the oil reservoir 300 and circulates the cooling water, and supplies the cooling water to the cooling pipe 191.
  • a cooling pump 192 is included.
  • the shaft seal device 230 prevents the oil OL and its vapor supplied from the outlet 154 of the rotary shaft 150A from entering the gas working chamber formed by the stator 130, the male rotor 110, and the female rotor 120 in cooperation.
  • the rotary shaft 150A is sealed.
  • the shaft seal device 230 is formed in an annular shape and fixed to the upper end of the support member 200, and a first seal that holds the first lip seal 233a and the second lip seal 233b.
  • the assembly 232 includes a second seal assembly 234 disposed adjacent to the first seal assembly 232 and holding the lip seal 234a, and a labyrinth seal 235 provided adjacent to the second seal assembly 234.
  • the first and second lip seals 233a, 233b and the lip seal 234a that are in contact with the surface of the rotating shaft 150A are characterized by having heat resistance, chemical stability, low friction properties, and moderate elasticity. It is desirable to be composed of a fluorinated resin.
  • fluorinated resins include: (1) perfluorinated resins such as polytetrafluoroethylene (PTFE), and (2) partially fluorinated resins such as polychlorotrifluoroethylene (PCTFE, CTFE). , Polyvinylidene fluoride (PVDF), polyvinyl fluoride (PVF), etc.
  • fluorinated resin copolymers such as perfluoroalkoxy fluororesin (PFA), tetrafluoroethylene / hexafluoropropylene copolymer (FEP) ), Ethylene / tetrafluoroethylene copolymer (ETFE), ethylene / chlorotrifluoroethylene copolymer (ECTFE), and the like.
  • PFA perfluoroalkoxy fluororesin
  • FEP tetrafluoroethylene / hexafluoropropylene copolymer
  • Ethylene / tetrafluoroethylene copolymer ETFE
  • ECTFE ethylene / chlorotrifluoroethylene copolymer
  • PFA and PTFE are particularly preferable. Since these resins can dramatically improve heat resistance by being provided on a metal such as nickel (Ni) or nickel fluoride (NiF2), such an embodiment is particularly preferable in the present invention. Is.
  • the holding member 231 is provided with a seal gas supply path 231a.
  • a seal gas such as nitrogen gas is supplied to the seal gas supply path 231a, and the upper end side from the gas passage 232a formed in the main body of the first seal assembly 232 is provided. And flows toward the lower end side, and is discharged through a gas passage 232b formed in the main body of the first seal assembly 232.
  • the supply path and discharge path (not shown) of the seal gas are formed in the support member 200 and the stator 130, and the seal gas is supplied from the outside of the pump through this supply path and passes through the gas passage 232b. Is discharged to the outside of the pump through a discharge path (not shown) and collected by a collection device (not shown).
  • the rotating shaft 150A is made of stainless steel
  • PTFE may be thermally decomposed by the catalytic effect of stainless steel when the temperature rises to about 180 ° C. or higher. Therefore, in this embodiment, the oil circulation system efficiently releases the heat in the pump to the outside to suppress the temperature rise of the lip seal, but to prevent the lip seal from deteriorating and to obtain a stable sealing performance for a long period of time.
  • a nickel plating film or a nickel fluoride film may be applied to the contact portion of the rotary shaft 150A between the first and second lip seals 233a, 233b and the lip seal 234a. preferable.
  • the space in which the oil circulates is a sealed space and the sealed space is decompressed.
  • a vacuum formed by the screw vacuum pump 100 can be used. It is also possible to provide another pump to reduce the pressure.
  • the pressure reduction may be, for example, a pressure at which the saturation solubility of air is about half of the saturation solubility at atmospheric pressure.
  • the oil circulation of the above oil circulation system will be described with reference to FIG.
  • the screw vacuum pump 100 is driven, as shown in FIG. 11, the oil OL cooled in the oil reservoir 300 by the rotating push-up head 180 is supplied to the oil supply path 152, the oil supply path 152a and the outlet of the rotary shaft 150A.
  • 154 is supplied onto the lower plate portion 221 and the receiving plate 210 of the oil amount adjusting ring 220, and a part of the oil OL is lubricated to the bearing 160 through the oil supply hole 226 of the lower plate portion 221 for lubrication of the bearing 160.
  • the oil OL drops from the bearing 160 and is supplied to the gap 143 of the drive motor 140.
  • the oil OL supplied onto the receiving plate 210 is distributed to the first and second flow paths 201 and 202.
  • the heat generated in the bearing 160 is absorbed by the oil OL supplied directly to the bearing 160 and is absorbed by the oil OL flowing through the first and second flow paths 201 and 202 that pass around the bearing 160. .
  • the oil OL flowing through the first and second flow paths 201 and 202 absorbs heat received from the rotary shaft 150A side and the male rotor 110 side, and then grooves are formed in the gap 143 of the drive motor 140 and the outer peripheral surface of the motor stator 142. It flows through the flow path formed by 142b. Thereby, the heat generated from the drive motor 140 is efficiently absorbed.
  • the oil OL that has passed through the drive motor 140 falls into the oil reservoir OL, but a part of the oil OL is supplied to the meshing portions of the bearings 161 and 162 and the synchronous gears 170A and 170B for lubrication and then into the oil reservoir OL. Fall into. Although the temperature of the oil OL falling into the oil reservoir OL has risen, it is cooled to a predetermined temperature by the cooling device 190 in the oil reservoir OL. Although only the male rotor 110 has been described, a similar oil circulation system can be employed for the female rotor 120.
  • the amount of oil OL that can be supplied for lubrication and cooling by the lifting head 180 is limited to some extent because it depends on the rotational speed of the lifting head 180.
  • a limited amount of oil OL can be efficiently used for lubrication and cooling, and temperature rise of the screw vacuum pump 100 can be prevented. As a result, the screw vacuum pump 100 can be operated at high speed.
  • An oil reservoir 300A shown in FIG. 12 is disposed concentrically in a closed space CS, a tank 301 formed of a heat insulating material, a bottom plate 304 provided inside the tank 301 and forming a closed space CS together with the tank 301.
  • An upper part of the tank 301 has an oil outlet 302 into which the push-up head 180 is inserted and communicates with the oil supply path of the rotary shaft 150A, and an inlet 303 into which the recovered oil flows.
  • the inflow port 303 is disposed in the outermost peripheral region R 1 of the tank 301, and the oil outflow port 302 is disposed in the central region R 2 of the tank 301.
  • the cooling liquid 320 flows to the bottom of the tank 301, and the cooling liquid 320 of the cooler is in full contact with the bottom plate 304.
  • the oil OL flow by the oil circulation should be designed to be a turbulent flow with about 2000 to 3000 lay nozzles. preferable. Further, it is preferable that the flow passage cross-sectional area of the oil OL is constant so that the number of lay nozzles is constant in the tank 301.
  • a part of the tank 301 is formed of a flexible material, the flexible part is pressed from the outside of the tank 301 to be elastically deformed, and the volume of the closed space CS is reduced, whereby the oil OL is pushed up. Can be pushed inward.
  • a plunger device 340 is provided in the tank 300 ⁇ / b> A, and an auxiliary tank 330 is connected to the inlet 303 via a backflow prevention mechanism 340.
  • the rear end portion of the plunger rod 342 to which the plunger tip 341 of the plunger device 340 is connected to the tip is connected to the piston rod 361 of the cylinder device 360 so that the plunger tip 341 can reciprocate.
  • the plunger tip 341 is advanced, the volume of the closed space CS decreases, and the oil OL is pushed up into the push-up head 180. At this time, the oil OL in the tank 301 does not flow back through the inflow port 303 by the backflow prevention mechanism 340. Further, when the plunger tip 341 is retracted, the oil OL recovered in the auxiliary tank 330 is present, so that the oil OL in the lifting head 180 can be prevented from returning into the oil tank 301.
  • Screw vacuum pump 110 Male rotor 111 Screw tooth 111a Unequal lead Unequal inclination angle screw part 111b Equal lead screw part 111c connecting portion 113a hollow portion 113b hollow portion 114 flat plate portion 114h mounting hole 115 disk portion 115h mounting hole 120 female rotor 121 screw tooth 121a unequal lead unequal inclination angle screw portion 121b equal lead screw portion 130 Stator 135 Intake port 136 Exhaust port 140 Drive motor 141 Motor rotor 142 Motor stator 142a Outer peripheral surface 142b Channel groove 143 Gap 150 Rotating shaft 152, 152a Oil supply path 156 Blocking member 160, 161, 162 Bearing 180 Lifting head 190 Cooling Device 200 Support member 201 First channel 201a Inlet 202 Second channel 202a Inlet 210 Receiving plate 220 Oil amount adjusting ring 230 Shaft seal device 231 Holding member 232 First seal assembly 233a First lip seal 233b Second lip Seal 234 Second seal assembly 234a Lip seal 235 Labyrinth

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention concerne une pompe à vide à vis qui présente une vitesse d'échappement plus élevée par obtention d'une rotation à vitesse élevée d'un rotor à vis. Un palier (160) qui supporte en rotation un arbre rotatif (150A) auquel est couplé un rotor mâle est disposé dans une partie creuse (113A) du rotor mâle (110). La partie d'accouplement entre le rotor mâle (110) et l'arbre rotatif (150A) est située sensiblement au niveau du centre de gravité (GC) du rotor mâle (110) dans la partie creuse (113A) dans une direction d'axe de rotation (AX).
PCT/JP2013/007063 2013-12-02 2013-12-02 Pompe à vide à vis WO2015083195A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2013/007063 WO2015083195A1 (fr) 2013-12-02 2013-12-02 Pompe à vide à vis
JP2014555429A JP5892569B2 (ja) 2013-12-02 2013-12-02 スクリュー真空ポンプ
TW103117314A TWI622702B (zh) 2013-12-02 2014-05-16 Spiral exhaust pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2013/007063 WO2015083195A1 (fr) 2013-12-02 2013-12-02 Pompe à vide à vis

Publications (1)

Publication Number Publication Date
WO2015083195A1 true WO2015083195A1 (fr) 2015-06-11

Family

ID=53272994

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2013/007063 WO2015083195A1 (fr) 2013-12-02 2013-12-02 Pompe à vide à vis

Country Status (3)

Country Link
JP (1) JP5892569B2 (fr)
TW (1) TWI622702B (fr)
WO (1) WO2015083195A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019210053A1 (fr) * 2018-04-27 2019-10-31 Carrier Corporation Compresseur à vis comprenant un rotor de moteur externe
WO2020120746A1 (fr) * 2018-12-13 2020-06-18 Vogelsang Gmbh & Co. Kg Pompe à piston rotatif avec palier interne

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0495694U (fr) * 1991-01-12 1992-08-19
JPH0953581A (ja) * 1995-08-14 1997-02-25 Tochigi Fuji Ind Co Ltd 流体機械
JP2004204855A (ja) * 1992-09-03 2004-07-22 Matsushita Electric Ind Co Ltd 真空排気装置
JP2006002649A (ja) * 2004-06-17 2006-01-05 Anest Iwata Corp スクロール流体機械における振動防止装置
JP2006022771A (ja) * 2004-07-09 2006-01-26 Shimadzu Corp ターボ分子ポンプ
JP2008038844A (ja) * 2006-08-09 2008-02-21 Boc Edwards Kk ターボ分子ポンプ
JP2009185671A (ja) * 2008-02-05 2009-08-20 Ebara Corp ターボ真空ポンプ
WO2011148797A1 (fr) * 2010-05-24 2011-12-01 国立大学法人東北大学 Pompe à vide à vis

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9913969D0 (en) * 1999-06-16 1999-08-18 Boc Group Plc Improvements in screw pumps
JP4558349B2 (ja) * 2004-03-02 2010-10-06 財団法人国際科学振興財団 真空ポンプ

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0495694U (fr) * 1991-01-12 1992-08-19
JP2004204855A (ja) * 1992-09-03 2004-07-22 Matsushita Electric Ind Co Ltd 真空排気装置
JPH0953581A (ja) * 1995-08-14 1997-02-25 Tochigi Fuji Ind Co Ltd 流体機械
JP2006002649A (ja) * 2004-06-17 2006-01-05 Anest Iwata Corp スクロール流体機械における振動防止装置
JP2006022771A (ja) * 2004-07-09 2006-01-26 Shimadzu Corp ターボ分子ポンプ
JP2008038844A (ja) * 2006-08-09 2008-02-21 Boc Edwards Kk ターボ分子ポンプ
JP2009185671A (ja) * 2008-02-05 2009-08-20 Ebara Corp ターボ真空ポンプ
WO2011148797A1 (fr) * 2010-05-24 2011-12-01 国立大学法人東北大学 Pompe à vide à vis

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019210053A1 (fr) * 2018-04-27 2019-10-31 Carrier Corporation Compresseur à vis comprenant un rotor de moteur externe
CN111989490A (zh) * 2018-04-27 2020-11-24 开利公司 具有外部马达转子的螺杆压缩机
US11519409B2 (en) 2018-04-27 2022-12-06 Carrier Corporation Screw compressor with external motor rotor
WO2020120746A1 (fr) * 2018-12-13 2020-06-18 Vogelsang Gmbh & Co. Kg Pompe à piston rotatif avec palier interne
CN113316688A (zh) * 2018-12-13 2021-08-27 福格申有限责任两合公司 包括处于内部的轴承结构的旋转活塞泵
US11953007B2 (en) 2018-12-13 2024-04-09 Vogelsang Gmbh & Co Kg Rotary lobe pump with internal bearing

Also Published As

Publication number Publication date
TW201522780A (zh) 2015-06-16
JP5892569B2 (ja) 2016-03-23
JPWO2015083195A1 (ja) 2017-03-16
TWI622702B (zh) 2018-05-01

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