WO2015064017A1 - レーザビーム合成装置 - Google Patents
レーザビーム合成装置 Download PDFInfo
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- WO2015064017A1 WO2015064017A1 PCT/JP2014/005084 JP2014005084W WO2015064017A1 WO 2015064017 A1 WO2015064017 A1 WO 2015064017A1 JP 2014005084 W JP2014005084 W JP 2014005084W WO 2015064017 A1 WO2015064017 A1 WO 2015064017A1
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- laser beam
- axicon
- optical system
- mirror
- cone angle
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/001—Axicons, waxicons, reflaxicons
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
- G02B17/061—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
Definitions
- the present invention relates to a laser beam synthesizer, and more particularly to a laser beam synthesizer that incoherently synthesizes a plurality of annular laser beams.
- a laser beam synthesizing apparatus disclosed in Patent Document 1 is known as an apparatus for increasing the output of a laser beam by synthesizing a plurality of annular laser beams.
- a plurality of circular laser beams are combined so that a circular laser beam with a large diameter surrounds a circular laser beam with a small diameter.
- the condensing property of the annular laser beam depends on the width dimension and the inner / outer diameter ratio (inner diameter dimension / outer diameter dimension) in the ring-shaped cross section of the annular laser beam before focusing.
- the smaller the width (cross-sectional area of the light beam) of the annular laser beam before focusing the larger the diameter of the focused laser beam and the lower the focusing performance.
- the condensed laser beam is inferior in condensing performance.
- the annular laser beam having a large diameter surrounds the annular laser beam having a small diameter, and thus the width dimension of each annular laser beam is small. Therefore, when the laser beam obtained by combining the annular laser beams is condensed, the diameter of the condensed laser beam is increased. As a result, the diameter of the laser beam obtained by synthesizing a plurality of annular laser beams also increases, and the energy density (energy per unit area irradiated) and power density (energy density per unit time) decrease. . As a result, there arises a problem that high energy cannot be obtained at the focal point of the focused laser beam or the distance that the focused laser beam can be irradiated becomes short.
- the present invention has been made to solve such problems, and an object of the present invention is to provide a laser beam synthesizing apparatus that improves irradiation performance of high energy density and high power density.
- a laser beam synthesizing apparatus includes a plurality of shaping optical units that emit circular laser beams having different amounts of change in outer diameter per unit propagation distance, and each of the shaping optical units emits light.
- the annular laser beams are arranged so as to be concentric.
- the present invention has an effect that it can provide a laser beam synthesizing apparatus having the above-described configuration and improved irradiation performance of high energy density and high power density.
- FIG. 5A is a graph showing the intensity distribution of the annular laser beam on the fifth reflecting surface in FIG. FIG.
- FIG. 5B is a graph showing the intensity distribution of the laser beam obtained by condensing the annular laser beam of FIG. 5A. It is a block diagram which shows typically the condensing optical system of the laser beam synthesizing
- FIG. 7A is a graph showing the diameter dimension of the annular laser beam on the fifth reflecting surface when the annular laser beams do not overlap with each other on the fifth reflecting surface in FIG. 6.
- FIG. 7B is a graph showing the diameter dimension of the annular laser beam on the fifth reflecting surface when the annular laser beams overlap with each other on the fifth reflecting surface in FIG. 6. It is a graph which shows the relationship between the focal distance and energy density ratio of the laser beam synthesizing
- FIG. 12A is a diagram showing the intensity distribution of an annular laser beam before focusing in a conventional laser beam synthesizer
- FIG. 12B is a cross section taken along the line AA in FIG. 12A
- FIG. 12B is a diagram showing the intensity distribution of an annular laser beam before focusing in a conventional laser beam synthesizer
- FIG. 13A is a diagram showing the intensity distribution of the annular laser beam before focusing in the laser beam combining apparatus of FIG. 11
- FIG. 13B is a cross section taken along line BB of FIG. 13A
- FIG. 14 is a graph showing an intensity distribution of a laser beam obtained by condensing the annular laser beam in FIGS. 13A and 13B.
- FIG. It is a figure which shows the relationship of the cone angle in a pair of axicon lens of the laser beam synthesizing
- a laser beam combining apparatus includes a plurality of shaping optical units that emit circular laser beams having different amounts of change in outer diameter per unit propagation distance.
- the annular laser beams are arranged so as to be concentric.
- the laser beam combining apparatus includes a first axicon having a conical surface for enlarging the diameter of the incident laser beam and emitting an annular laser beam.
- An optical system a second axicon optical system having a conical surface for reducing the diameter of the annular laser beam emitted from the first axicon optical system, and a path of the annular laser beam emitted from the second axicon optical system.
- a reflection optical system to be changed and at least one of a cone angle of the first axicon optical system and a cone angle of the second axicon optical system is different for each shaping optical unit, and the reflection optical system May emit the incident annular laser beam concentrically with respect to the annular laser beam emitted from the other reflection optical system.
- the laser beam combining apparatus is a convex axicon mirror having a reflecting surface protruding in a conical shape
- the second axicon optical system Is a concave axicon mirror having a reflecting surface facing the reflecting surface of the convex axicon mirror and recessed in a conical shape, and a hole penetrating between the reflecting surface and the opposite surface
- the reflecting optical system is disposed between the convex axicon mirror and the concave axicon mirror, and is a reflecting surface that is inclined with respect to the optical axis of the annular laser beam emitted from the concave axicon mirror.
- a scraper mirror having a hole penetrating between the reflecting surface and the surface on the opposite side.
- the laser beam combining apparatus according to the third aspect, wherein a cone angle of the concave axicon mirror in each of the shaping optical units is smaller than a cone angle of the convex axicon mirror.
- the difference between the cone angle of the concave axicon mirror and the cone angle of the convex axicon mirror may be smaller than the shaping optical unit provided on the exit direction side of the scraper mirror of the shaping optical unit.
- a cone angle of the concave axicon mirror in each shaping optical unit is larger than a cone angle of the convex axicon mirror.
- the difference between the cone angle of the concave axicon mirror and the cone angle of the convex axicon mirror may be larger than that of the shaping optical unit provided on the exit direction side of the scraper mirror of the shaping optical unit.
- the laser beam combining apparatus wherein the first axicon optical system is a first axicon lens having an exit surface protruding in a conical shape, and the second axicon optical system.
- the first axicon optical system is a first axicon lens having an exit surface protruding in a conical shape
- the second axicon optical system Is a second axicon lens having an entrance surface facing the exit surface and projecting in a conical shape, and the reflection optical system sandwiches the second axicon lens between the first axicon lens and And a hole penetrating between the reflecting surface inclined with respect to the optical axis of the annular laser beam emitted from the second axicon lens and a surface on the opposite side of the reflecting surface
- a scraper mirror having
- the cone angle of the first axicon lens is larger than the cone angle of the second axicon lens
- the first shaping optical unit has the first cone angle.
- the difference between the cone angle of the axicon lens and the cone angle of the second axicon lens may be smaller than the shaping optical unit provided on the emission direction side of the scraper mirror of the shaping optical unit.
- the laser beam combining apparatus wherein a cone angle of the first axicon lens is smaller than a cone angle of the second axicon lens, and the first shaping optical unit has the first cone angle.
- the difference between the cone angle of the axicon lens and the cone angle of the second axicon lens may be larger than that of the shaping optical unit provided on the emission direction side of the scraper mirror of the shaping optical unit.
- the laser beam combining apparatus according to any one of the second to eighth aspects, further comprising a condensing optical system that condenses the annular laser beam emitted from the reflection optical system.
- the difference between the cone angle of the first axicon optical system and the cone angle of the second axicon optical system in the shaping optical unit is that the annular laser beam emitted from the reflection optical system of each shaping optical unit is the condensing optical system. May be determined so as to overlap each other on the exit surface.
- the condensing optical system includes a secondary mirror having a reflecting surface that enlarges the diameter of the annular laser beam emitted from the reflecting optical system.
- a primary mirror having a reflecting surface for condensing an annular laser beam emitted from the secondary mirror, and a cone angle of the first axicon optical system and a cone angle of the second axicon optical system in each shaping optical unit The difference may be determined so that the annular laser beams emitted from the reflecting optical systems of the shaping optical units overlap each other on the reflecting surface of the main mirror.
- a laser beam combining apparatus according to the ninth or tenth aspect, wherein the diameter of the circular laser beam emitted from the reflection optical system is reduced and emitted to the condensing optical system.
- An optical system may be further provided.
- the laser beam combining apparatus according to any one of the second to eleventh aspects, wherein the cone angle of the first axicon optical system and the cone angle of the second axicon optical system in each shaping optical unit.
- the curvature of the wavefront of each annular laser beam may be set so as to correct the difference in the focal length of each annular laser beam caused by the difference between the two.
- the laser beam synthesizer according to any one of the second to twelfth aspects, wherein the guide light source emits visible light along the optical axis of the annular laser beam emitted from the reflection optical system. May be further provided.
- a laser beam combining apparatus according to the first aspect of the present invention, wherein an emission optical system for emitting an annular laser beam and a diameter dimension of the annular laser beam emitted from the emission optical system are changed.
- a reflecting optical system having an elliptical conical surface that changes the path of the annular laser beam, and the cone angles on both the major axis side and the minor axis side of the elliptical cone surface of the reflecting optical system are different for each shaping optical unit.
- the reflective optical system may emit the incident circular laser beam concentrically with respect to another circular laser beam emitted from another reflective optical system.
- FIG. 1 is a configuration diagram schematically showing a laser beam synthesizing apparatus 100 according to the first embodiment of the present invention.
- FIG. 2 is a diagram illustrating the relationship between the cone angles ⁇ A and ⁇ B of the pair of axicon mirrors 14 and 15. With reference to FIGS. 1 and 2, the configuration of the laser beam combining apparatus 100 will be described.
- a laser beam combining device 100 is a device that combines a plurality of annular laser beams, and includes a plurality of shaping optical units 11 (hereinafter referred to as “units”).
- the annular laser beam is a ring-shaped laser beam from which a central portion of a laser beam having a circular cross section is removed.
- the laser beam combining device 100 may further include a laser light source 12 and a condensing optical system 20.
- the laser light source 12 is a laser device that emits a solid laser beam, and a semiconductor laser, a fiber laser, a solid-state laser, or the like is used according to necessary characteristics.
- the laser light source 12 is provided corresponding to each unit 11, and for example, three laser light sources 12 are provided.
- the three laser light sources 12 are arranged so that the optical axes of the emitted solid laser beams are parallel to each other.
- the unit 11 is provided with a plurality of, for example, three units that emit circular laser beams having different reduction amounts of the outer diameter per unit propagation distance.
- the three units 11 include a first unit 11a, a second unit 11b, and a third unit 11c.
- the third unit 11c, the second unit 11b, and the first unit 11a are arranged in this order (proximity order) so that the third unit 11c is closest to the condensing optical system 20.
- each of the first unit 11a, the second unit 11b, and the third unit 11c may be referred to as an nth unit 11.
- the nth unit 11 is closer to the condensing optical system 20 than the n ⁇ 1 unit 11, and n and n ⁇ 1 are integers from 1 to 3 in this embodiment.
- the unit 11 includes a pair of axicon mirrors 14 and 15 and a scraper mirror 16.
- the pair of axicon mirrors 14 and 15 includes a concave axicon mirror 14 and a convex axicon mirror 15, and the concave axicon mirror 14 is positioned closer to the laser light source 12 than the convex axicon mirror 15. .
- the convex axicon mirror 15 is a first axicon optical system, has a substantially disk shape, and has a first reflecting surface 15a.
- the first reflecting surface 15a is a conical surface that expands the diameter dimension (inner diameter dimension and outer diameter dimension) of the incident laser beam and emits an annular laser beam.
- the first reflecting surface 15 a protrudes in a conical shape, and is formed so that the apex of the cone is located at the center of the convex axicon mirror 15.
- the convex axicon mirror 15 is arranged so that the first reflecting surface 15 a faces the laser light source 12.
- the concave axicon mirror 14 is a second axicon optical system, has a substantially disk shape, and has a second reflecting surface 14a and a hole (first passage hole) 14b.
- the second reflecting surface 14 a is a conical surface that reduces the diameter of the annular laser beam emitted from the convex axicon mirror 15.
- the second reflecting surface 14 a is recessed in a conical shape, and is formed so that the apex of the cone is located at the center of the concave axicon mirror 14.
- the diameter of the second reflecting surface 14a is larger than the diameter of the first reflecting surface 15a.
- the first passage hole 14b penetrates between the second reflecting surface 14a and the surface on the opposite side along the axis of the second reflecting surface 14a at the apex of the second reflecting surface 14a.
- the concave axicon mirror 14 is arranged such that the first passage hole 14b is along the optical axis of the solid laser beam from the laser light source 12.
- the concave axicon mirror 14 is disposed such that the second reflecting surface 14a faces the first reflecting surface 15a and the axis of the second reflecting surface 14a coincides with the axis of the first reflecting surface 15a. Yes.
- the scraper mirror 16 is a reflection optical system that changes the path of the annular laser beam emitted from the concave axicon mirror 14, and is disposed between the concave axicon mirror 14 and the convex axicon mirror 15.
- the scraper mirror 16 has a disk shape and has a flat third reflecting surface 16a and a hole (second passage hole) 16b.
- the second passage hole 16b penetrates between the third reflecting surface 16a and the surface on the opposite side thereof at the center of the third reflecting surface 16a.
- the second passage hole 16b is opened from two directions inclined at 45 ° with respect to the third reflecting surface 16a so that two laser beams orthogonal to each other can pass through.
- the scraper mirror 16 is disposed so that the first direction is parallel to the axis of the second reflecting surface 14a and the second direction is orthogonal to the axis of the second reflecting surface 14a. Further, in the scraper mirror 16, the center of the second passage hole 16b in the second reflecting surface 14a is on the axis of the first reflecting surface 15a and the axis of the second reflecting surface 14a, and the third reflecting surface 16a is the second reflecting surface. It arrange
- the pair of axicon mirrors 14 and 15 differ in the cone angle ⁇ A of the first reflecting surface 15 a and the cone angle ⁇ B of the second reflecting surface 14 a, and this difference ⁇ is close to the unit 11. It is formed so that it becomes larger (in order of proximity of the unit 11).
- the cone angle ⁇ A of the first reflecting surface 15a is twice the angle ⁇ a between the cone rotation axis and the cone generatrix on the first reflecting surface 15a.
- the cone angle ⁇ B of the second reflecting surface 14a is twice the angle ⁇ b between the cone rotation axis and the cone generating line in the second reflecting surface 14a.
- the cone angle ⁇ A and the cone angle ⁇ B are obtuse angles, and are preferably 170 to 180 °, for example.
- the cone angle ⁇ A of the first reflecting surface 15a is formed larger than the cone angle ⁇ B of the second reflecting surface 14a.
- This difference ⁇ is, for example, 0.001 to 0.1 °, and increases in the order of proximity of the units 11. That is, the difference ⁇ in the (n ⁇ 1) th unit 11 is smaller than the difference ⁇ in the nth unit provided on the emission direction side of the third reflecting surface 16a.
- the difference ⁇ is set to 0.010 in the first unit 11a
- the difference ⁇ is set to 0.015 in the second unit 11b
- the difference ⁇ is set to 0.020 in the third unit 11c.
- the cone angle ⁇ B is constant
- the cone angle ⁇ A is set so as to increase in the order of proximity of the unit 11.
- the cone angle ⁇ A may be constant and the cone angle ⁇ B may be changed, or both the cone angles ⁇ A and ⁇ B may be changed. Good.
- the cone angle ⁇ A is larger than the cone angle ⁇ B in each unit 11, but the cone angle ⁇ A may be equal to the cone angle ⁇ B in the first unit 11a. In this case, the difference ⁇ between the cone angle ⁇ A and the cone angle ⁇ B is zero.
- the pair of axicon mirrors 14 and 15 in each unit 11 are arranged so that the dimension between the first reflecting surface 15 a and the second reflecting surface 14 a increases in the order of proximity of the unit 11.
- the diameter of the circular laser beam reflected by the reflecting surfaces 14 a and 15 a increases in the order of proximity of the unit 11.
- the cone angle of the first reflecting surface 15a is set so that the diameter of the annular laser beam reflected by the reflecting surfaces 14a and 15a increases in the order of proximity of the unit 11. You may adjust (theta) A and the cone angle (theta) B of the 2nd reflective surface 14a.
- the scraper mirrors 16 are arranged so that the center lines (guide lines) in the second direction of the second passage holes 16b coincide. Further, in each unit 11, the scraper mirror 16 is formed so that the diameters of the third reflecting surface 16 a and the second passage hole 16 b are larger as the unit 11 is closer to the condensing optical system 20. That is, the diameter dimensions of the scraper mirror 16 and the second passage hole 16b in the nth unit 11 are larger than those of the n-1th unit 11.
- the condensing optical system 20 is a reflection optical system having a primary mirror 21 and a secondary mirror 22.
- the primary mirror 21 has a fifth reflective surface 21a and a hole (third passage hole 21b), and the secondary mirror 22 has a fourth reflective surface 22a.
- the third passage hole 21b penetrates between the fifth reflecting surface 21a and the surface on the opposite side at the center of the fifth reflecting surface 21a.
- the diameter of the fifth reflecting surface 21a is set larger than the diameter of the fourth reflecting surface 22a.
- the fifth reflecting surface 21a is a concave surface
- the fourth reflecting surface 22a is a convex surface.
- the fourth reflection surface 22a may be formed as a concave surface.
- Each reflection surface 21a, 22a is formed of an aspherical surface such as a paraboloid or a hyperboloid, and in this embodiment is formed of a paraboloid.
- the fifth reflecting surface 21a and / or the fourth reflecting surface 22a may be formed as a spherical surface.
- the radius of curvature of the fourth reflecting surface 22a is set to be sufficiently large so as to suppress the generation of geometric optical aberration as compared with the radial dimension of the outer diameter of the annular laser beam incident on the fourth reflecting surface 22a.
- the sub mirror 22 is arranged such that the axis of the fourth reflecting surface 22a coincides with the axis of the fifth reflecting surface 21a, and the fourth reflecting surface 22a faces the fifth reflecting surface 21a.
- the condensing optical system 20 is a Cassegrain type optical system using the primary mirror 21 having the third passage hole 21b, but is not limited thereto.
- the condensing optical system 20 may be a Nasmyth type or coupe type optical system.
- the reflecting surface is arranged between the primary mirror 21 and the secondary mirror 22 without providing the third passage hole 21 b in the primary mirror 21.
- the reflecting surface is a flat surface and is inclined with respect to the axis of the secondary mirror 22.
- the reflecting surface reflects the annular laser beam incident from the side thereof and guides it to the secondary mirror 22.
- the laser beam synthesizing apparatus 100 may include a reduction optical system 30 (FIG. 9), a light guide optical system 40, or the like between the unit 11 and the condensing optical system 20, as necessary.
- the reduction optical system 30 (FIG. 9) is an optical system that reduces the diameter of the annular laser beam emitted from the unit 11.
- the light guide optical system 40 is an optical system that guides the annular laser beam emitted from the unit 11 to the condensing optical system 20, and in this embodiment, two flat mirrors 41 and 42 are used.
- the laser beam combining device 100 may further include a guide light source 60 that emits visible light.
- the guide light source 60 is arranged so that visible light passes through the center of the second passage hole 16b of each scraper mirror 16 along the guide line from the second direction.
- FIG. 3 is a diagram showing the shape of the combined laser beam in the condensing optical system 20.
- FIG. 4 is a diagram schematically showing the combined laser beam condensed by the condensing optical system 20.
- a solid laser beam enters each unit 11 from each laser light source 12.
- the diameter of the first passage hole 14b of the concave axicon mirror 14 and the diameter of the second passage hole 16b of the scraper mirror 16 are set larger than the diameter of the solid laser beam. Therefore, the solid laser beam passes through the first passage hole 14b and further passes through the second passage hole 16b in the first direction.
- the solid laser beam reaches the first reflecting surface 15 a of the convex axicon mirror 15. At this time, the vertex of the first reflecting surface 15a is on the optical axis of the solid laser beam.
- the center of the solid laser beam hits the apex of the first reflecting surface 15a, and the solid laser beam is line symmetric with respect to the axis of the conical first reflecting surface 15a, regardless of the distance from this axis. Reflects at a certain angle.
- the solid laser beam is converted into an annular laser beam, and the annular laser beam advances toward the scraper mirror 16 with its width dimension being constant.
- the diameter dimension of the second passage hole 16b of the scraper mirror 16 is set to be larger than the outer diameter dimension of the annular laser beam reflected by the first reflecting surface 15a. For this reason, the annular laser beam passes through the second passage hole 16b in the first direction toward the concave axicon mirror 14.
- the annular laser beam travels along the axis of the second reflecting surface 14 a while spreading around the optical axis, and the inner diameter of the annular laser beam is larger than the diameter of the first passage hole 14 b of the concave axicon mirror 14. growing. Thereby, the annular laser beam strikes the second reflecting surface 14a around the first passage hole 14b.
- the annular laser beam is axisymmetric with respect to the axis of the second reflecting surface 14a and is reflected at a constant angle regardless of the distance from this axis. Since the axis of the second reflecting surface 14a coincides with the axis of the first reflecting surface 15a, the annular laser beam is reflected by the second reflecting surface 14a while remaining in a ring shape.
- the annular laser beam reflected by the second reflecting surface 14a becomes slightly narrower around the optical axis and again becomes a scraper mirror. Proceed toward 16.
- the second reflecting surface 14a is a conical surface, the annular laser beam maintains its width dimension constant. Since the inner diameter of the annular laser beam is larger than the diameter of the second passage hole 16b in the scraper mirror 16, the annular laser beam strikes the third reflecting surface 16a around the second passage hole 16b. Then, the annular laser beam is reflected in a direction perpendicular to the axis of the second reflecting surface 14 a and is emitted from the unit 11.
- the diameter of the annular laser beam is adjusted so as to increase in the order of proximity of the unit 11. Thereby, the diameter of the annular laser beam (n-th annular laser beam) emitted from the n-th unit 11 is set so that the annular laser beam (n-1-th annular laser) emitted from the n-1 unit 11 is reduced. Beam).
- the diameter dimension of the second passage hole 16 b of the scraper mirror 16 is increased in the order of proximity of the unit 11.
- the diameter of the second passage hole 16b in the nth unit 11 is larger than the outer diameter of the n-1 annular laser beam emitted from the n-1 unit 11. For this reason, the (n-1) -th annular laser beam can pass through the second passage hole 16b of the n-th unit 11.
- the third reflecting surface 16a is arranged on the guide line at the center and has the same inclination angle. For this reason, the optical axes of the annular laser beams reflected by the third reflecting surface 16a of each unit 11 coincide.
- the three annular laser beams are combined concentrically and the combined laser beam is emitted coaxially.
- This synthesized laser beam has a shape in which the n-th annular laser beam surrounds the (n-1) -th laser beam immediately after emission.
- the combined laser beam is reduced to a size that can pass through the third passage hole 21b of the condensing optical system 20 in the reduction optical system 30 (FIG. 9).
- the combined laser beam that has passed through the reduction optical system 30 (FIG. 9) is reflected by the plate mirrors 41 and 42 of the light guide optical system 40 and guided to the condensing optical system 20.
- the combined laser beam passes through the third passage hole 21 b of the primary mirror 21 and travels toward the secondary mirror 22.
- each annular laser beam of the synthetic laser beam is reduced in diameter while the difference (width dimension) between the outer diameter and the inner diameter of the ring-shaped cross section is constant. This is because, as shown in FIG. 2, since the cone angle ⁇ A is larger than the cone angle ⁇ B, the annular laser beam travels in a direction approaching the optical axis OA, not parallel to the optical axis OA.
- the cone angle ⁇ A is increased in the order of approach of the unit 11 so that the difference ⁇ between the cone angle ⁇ A and the cone angle ⁇ B is increased in the order of approach of the unit 11.
- the incident angle and the reflection angle of the annular laser beam reflected by the first reflecting surface 15a, the second reflecting surface 14a, and the third reflecting surface 16a become smaller in the order of proximity. Therefore, as shown in FIG. 3, the angle (inclination) between the annular laser beam reflected by the third reflecting surface 16a and the optical axis OA increases in the order in which the units 11 approach each other. For this reason, as the distance from the third reflecting surface 16a increases, the ratio of the reduction in the diameter of the annular laser beam increases in the order of proximity of the units 11.
- the diameter dimension of the annular laser beam increases in the order of proximity of the unit 11 when reflected by the third reflecting surface 16a. For this reason, as the circular laser beam has a larger diameter, the inclination of the circular laser beam is larger and the rate of reduction is larger. Accordingly, the diameter of the n-th annular laser beam is greatly reduced as compared with the (n-1) -th annular laser beam as the distance from the third reflecting surface 16a is maintained while the width dimension is kept constant.
- the inner diameter dimension of the nth annular laser beam is smaller than the outer diameter dimension of the (n-1) th annular laser beam and overlaps with the (n-1) th annular laser beam. As a result, as shown by G2 in FIG. 3, in the synthetic laser beam on the fourth reflecting surface 22a, the annular laser beams overlap each other.
- each annular laser beam travels toward the main mirror 21 while its width dimension increases with distance from the fourth reflecting surface 22a along with the diameter dimension in its ring-shaped cross section. For this reason, as indicated by G3 in FIG. 3, the annular laser beams overlap each other even in the combined laser beam on the fifth reflecting surface 21a of the primary mirror 21.
- the synthesized laser beam is reflected by the concave fifth reflecting surface 21a and condensed.
- the annular laser beam converges while the diameter dimension in the ring-shaped cross section decreases as the distance from the fifth reflecting surface 21 a decreases.
- the focal lengths of the annular laser beams in the combined laser beam are different, the combined laser beam is irradiated with a width in the direction of the optical axis OA.
- the radius of curvature of the fifth reflecting surface 21a / the radius of curvature of the fourth reflecting surface 22a is defined as an enlargement factor P, and the distance F from the fifth reflecting surface 21a to the focal point is set.
- the angle of the n-th annular laser beam incident on the fourth reflecting surface 22a is ⁇ n, and the radial dimension of the n-th annular laser beam incident on the fifth reflecting surface 21a (here, the outer radius and the inner radius) Let yn be an average value.
- the distance Fn to the focal point of the n-th annular laser beam becomes shorter in the order of proximity.
- the combined laser beam is emitted from the laser beam combining apparatus 100 with a certain high energy density over a wide range in the optical axis OA.
- a laser light source 12 that emits a laser beam having an infrared wavelength is often used.
- the laser beam synthesized and emitted by the laser beam synthesizer 100 cannot be seen with the naked eye.
- the visible light emitted from the guide light source 60 travels along the optical axis OA of the annular laser beam and the optical axis of the combined laser beam. Based on the visible light, the position of the combined laser beam can be confirmed.
- the reflecting surfaces 14 a and 15 a in each unit 11 are conical surfaces, and the difference ⁇ between the cone angles ⁇ A and ⁇ B of the reflecting surfaces 14 a and 15 a is increased in the order of proximity of the units 11.
- the annular laser beam emitted from each unit 11 propagates, the outer diameter dimension decreases, and the amount of decrease in the outer diameter dimension per unit propagation distance increases in the order of proximity of the units 11.
- each annular laser beam has a larger ratio of the outer diameter to the inner diameter (inner / outer diameter ratio) while maintaining its width dimension constant.
- annular laser beams can be easily overlapped on the primary mirror 21 before focusing, and the width dimension and the inner / outer diameter ratio of each annular laser beam can be increased without increasing the primary mirror 21. .
- the diameter dimension of the condensed laser beam can be reduced.
- the energy density of the combined laser beam at the irradiation position can be increased while suppressing an increase in the size of the laser beam combining apparatus 100.
- FIG. 5A is a graph showing the intensity distribution (near-field image) of the annular laser beam before focusing on the fifth reflecting surface 21a.
- the outer diameter size and the total power (intensity integrated value) of each annular laser beam on the fifth reflecting surface 21a are made the same.
- the vertical axis indicates the intensity of the laser beam
- the horizontal axis indicates the distance from the center of the laser beam.
- the intensity (power density) of the laser beam condensed in the far field increases as the inner / outer diameter ratio of the annular laser beam before the condensing increases.
- the smaller the inner / outer diameter ratio of the annular laser beam before focusing the smaller the width dimension of the annular laser beam and the higher the intensity.
- side lobes are generated around the main lobe having the highest intensity in each laser beam. The smaller the inner / outer diameter ratio of the annular laser beam before focusing, the higher the intensity of the side lobe in the laser beam after focusing.
- each annular laser beam is overlapped on the fifth reflecting surface 21a and its width is widened to reduce the diameter of the focused laser beam, and the power density at the target position and its time integration. Energy density can be increased.
- the difference ⁇ between the cone angles ⁇ A and ⁇ B is changed in the order in which the units 11 approach each other, and the incident angle ⁇ n of each annular laser beam is set appropriately in advance, thereby condensing each annular laser beam.
- a difference is provided in the focal length.
- the irradiation range of the laser beam having a certain high energy density is expanded on the optical axis OA. For this reason, even when distance measurement to the target position is difficult, the target position can be irradiated with the laser beam.
- the energy of the synthesized laser beam can be increased and the output of the synthesized laser beam can be increased.
- each annular laser beam is synthesized coaxially, each annular laser beam is focused on the optical axis OA of the synthesized laser beam. Therefore, since the spread of the irradiation range in the direction perpendicular to the optical axis OA is suppressed, the energy density of the combined laser beam on the optical axis OA can be kept high.
- a reflection optical system composed of a pair of axicon mirrors 14 and 15 and a scraper mirror 16 is used for the unit 11.
- a plurality of annular laser beams can be synthesized, whereby the energy of the synthesized laser beam can be increased.
- problems such as a thermal lens effect and output loss that occur when a transmission optical system is used in the unit 11 can be eliminated.
- a reduction in the energy of the annular laser beam can be prevented, and the energy density of the combined laser beam at the focal point can be kept high.
- the visible light is emitted from the guide light source 60 along the optical axis of the annular laser beam, the visible light is positioned at the center of the synthetic laser beam, so that the irradiation position of the synthetic laser beam is visually observed based on the visible light. Can be confirmed.
- the curvature radius of the secondary mirror 22 is less than the radius of the outer diameter of the annular laser beam incident on the secondary mirror 22, and the generation of geometric optical aberration is suppressed. Is set to be large enough. Thereby, the laser beam synthesizing apparatus 100 can be used for an application in which the laser beam is irradiated with a certain high energy density over a wide range on the optical axis OA. On the other hand, a laser beam having a higher energy density may be required.
- FIG. 6 is a diagram schematically showing the condensing optical system 20 of the laser beam combining apparatus 100 according to the second embodiment. With reference to this FIG. 6, the structure of the laser beam synthesizing
- the fifth reflecting surface 21 a of the primary mirror 21 and the fourth reflecting surface 22 a of the secondary mirror 22 are each formed by a parabolic surface.
- the annular laser beam is reflected by the fifth reflecting surface 21a and the fourth reflecting surface 22a as described above, so that geometrical optical aberration occurs, and the focal positions of the annular laser beams can be brought close to each other.
- the curvature radius of the fifth reflection surface 21a / the curvature radius of the fourth reflection surface 22a is defined as an enlargement factor P
- the fifth reflection surface 21a is determined by the distance between the fifth reflection surface 21a and the fourth reflection surface 22a.
- a distance F from the focus to the focus is set.
- the incident angle of the n-th annular laser beam with respect to the fourth reflecting surface 22a is ⁇ n
- the radial dimension of the n-th annular laser beam incident on the fifth reflecting surface 21a (here, the average of the outer radius and the inner radius) (Value)
- geometric optical aberration for the n-th annular laser beam is ⁇ n.
- each incident angle ⁇ n and / or each geometric optical aberration ⁇ n is set so as to cancel out ⁇ n / P ⁇ n.
- the inclination ⁇ n of the annular laser beam is different, and therefore the focal length of the condensed laser beam is different.
- the difference in the incident angle ⁇ n is reduced, and the focal lengths of the annular laser beams can be matched. For example, as the incident angle ⁇ n of the annular laser beam is larger, the inclination ⁇ n of the annular laser beam reflected by the fifth reflecting surface 21a of the main mirror 21 is larger and the focal length Fn is shorter.
- the reflection angle increases as the diameter of the light is reflected at a position away from the optical axis OA, and the annular laser beam reflected by the fifth reflecting surface 21a.
- the slope ⁇ n of becomes smaller.
- the difference in the incident angle ⁇ n is canceled out by the geometric optical aberration ⁇ n, the focal lengths Fn of the annular laser beams become equal, and the annular laser beams are condensed at one point.
- FIG. 7A is an example of a graph showing the diameter of the annular laser beam on the fifth reflecting surface 21a when the annular laser beams do not overlap on the fifth reflecting surface 21a.
- FIG. 7B is an example of a graph showing the diameter dimension of the annular laser beam on the fifth reflecting surface 21a when the annular laser beams overlap each other on the fifth reflecting surface 21a.
- the vertical axis represents the outer and inner radial dimensions of the annular laser beam
- the horizontal axis represents the shaping optical unit number.
- the shaping optical unit numbers are assigned in the order of proximity of the units 11, and the closer the shaping optical unit number is, the closer to the secondary mirror 22. In this case, six units 11 were used.
- the circle mark represents the radial dimension of the outer diameter of the annular laser beam on the fifth reflecting surface 21a
- the square mark represents the radius dimension of the inner diameter of the annular laser beam on the fifth reflecting surface 21a.
- the difference ⁇ between the cone angle ⁇ A of the first reflecting surface 15a and the cone angle ⁇ B of the second reflecting surface 14a is in the order of the shaping optical unit number (that is, the approaching order of the units 11).
- FIG. 8 is a graph showing the relationship between the focal length and the energy density ratio.
- the vertical axis represents the energy density ratio of the combined laser beam, and the horizontal axis represents the focal length of the combined laser beam.
- This energy density ratio is a ratio of the energy density of the combined laser beam shown in FIG. 7B to the energy density of the combined laser beam shown in FIG. 7A, and is, for example, 2 to 4.5.
- each annular laser beam When the annular laser beams do not overlap each other, the width dimension of each annular laser beam becomes small as shown by the difference between the circle mark and the square mark of each unit 11 in FIG. 7A.
- the annular laser beams overlap with each other as shown by the difference between the circle mark and the square mark of each unit 11 in FIG. ) Can be increased.
- the diameter size of the condensed combined laser beam is reduced, and the energy density of the combined laser beam is increased.
- the synthetic laser beam of FIG. 7B has less energy density attenuation when the focal length is increased.
- the energy density ratio increases as the focal length of the combined laser beam increases.
- the greater the energy density of the synthetic laser beam the longer the focal length (that is, the distance that can be effectively irradiated).
- FIG. 9 is a diagram schematically showing a laser beam combining apparatus 100 according to the third embodiment.
- FIG. 10 is a diagram illustrating the relationship between the cone angles ⁇ C and ⁇ D of the pair of axicon lenses 51 and 52. With reference to FIGS. 9 and 10, the configuration of the laser beam combining apparatus 100 will be described.
- the unit 11 includes a pair of axicon lenses 51 and 52 and a scraper mirror 16.
- the pair of axicon lenses includes a first axicon lens 51 and a second axicon lens 52, and materials having the same refractive index are used.
- the first axicon lens 51 is a first axicon optical system, and is positioned closer to the laser light source 12 than the second axicon lens 52, and emits a circular planar incident surface (first incident surface 51a) and a conical surface. It has a surface (first emission surface 51b).
- the first exit surface 51b is a conical surface that emits an annular laser beam by enlarging the diameter of the incident laser beam.
- the second axicon lens 52 is a second axicon optical system, and is positioned between the first axicon lens 51 and the scraper mirror 16, and has a conical incident surface (second incident surface 52a) and a circular planar shape.
- the second incident surface 52 a is a conical surface that reduces the diameter of the annular laser beam emitted from the first axicon lens 51.
- the pair of axicon lenses 51 and 52 are arranged such that the first exit surface 51b and the second entrance surface 52a face each other and the cone axes thereof coincide.
- the cone angle ⁇ C of the first exit surface 51b and the cone angle ⁇ D of the second entrance surface 52a are obtuse angles, and the cone angle ⁇ C is slightly larger than the cone angle ⁇ D. 0.005 to 0.5 °.
- the cone angle ⁇ C of the first exit surface 51b is twice the angle ⁇ c between the cone rotation axis and the cone bus line on the first exit surface 51b.
- the cone angle ⁇ D is twice the angle ⁇ d between the cone rotation axis and the cone bus line on the second incident surface 52a.
- the cone angle ⁇ C in each unit 11 is larger than the cone angle ⁇ D, but in the first unit 11a, the cone angle ⁇ C may be equal to the cone angle ⁇ D. In this case, the difference ⁇ between the cone angle ⁇ C and the cone angle ⁇ D is zero.
- the difference ⁇ between the cone angle ⁇ C and the cone angle ⁇ D is set so as to increase as it approaches the secondary mirror 22. That is, the difference ⁇ in the (n ⁇ 1) th unit 11 is smaller than the difference ⁇ in the nth unit provided on the emission direction side of the third reflecting surface 16a.
- the pair of axicon lenses 51 and 52 are arranged such that the dimension between the first exit surface 51 b and the second entrance surface 52 a is larger as the unit 11 is closer to the secondary mirror 22. Further, in each unit 11, the diameter of the second axicon lens 52 is formed so as to be larger as the unit 11 is closer to the secondary mirror 22.
- the second passage hole 16b of the scraper mirror 16 is opened from a direction inclined at 45 ° with respect to the third reflecting surface 16a.
- the diameter dimension of the second passage hole 16b is set smaller than the inner diameter dimension of the annular laser beam emitted from the second exit surface 52b.
- the center of the second passage hole 16b on the incident surface is on the axis of the second incident surface 52a
- the third reflecting surface 16a is inclined at 45 ° with respect to the axis of the second incident surface 52a
- the second passage hole 16b is arranged so as to be orthogonal to the axis of the second incident surface 52a.
- a solid laser beam is emitted from the laser light source 12 in each unit 11.
- the solid laser beam is incident on the first axicon lens 51 from the first incident surface 51a and is emitted from the second emission surface 52b.
- the optical axis of the solid laser beam coincides with the axis of the first emission surface 51b. Therefore, the solid laser beam is axisymmetric with respect to the axis of the conical first emission surface 51b, and is refracted at a constant angle regardless of the distance from the axis.
- the solid laser beam is converted into an annular laser beam, and the annular laser beam advances toward the second incident surface 52a while expanding.
- the annular laser beam is incident on the second axicon lens 52 from the second incident surface 52a.
- the annular laser beam is line-symmetric with respect to the axis of the conical second incident surface 52a, and is refracted at a constant angle regardless of the distance from the axis.
- the cone angle ⁇ C of the first exit surface 51b is slightly larger than the cone angle ⁇ D of the second entrance surface 52a
- the refraction angle at the first exit surface 51b is slightly smaller than the refraction angle at the second exit surface 52b.
- the diameter of the annular laser beam is reduced while the width dimension of the ring-shaped cross section is constant.
- the annular laser beam emitted from the second exit surface 52b strikes the third reflecting surface 16a around the second passage hole 16b in the scraper mirror 16 and is reflected in a direction orthogonal to the axis of the second exit surface 52b.
- the third reflecting surface 16a of each unit 11 is centered on the guide line and has the same inclination angle. For this reason, the circular laser beam reflected by the third reflecting surface 16a of each unit 11 travels coaxially with the center of the circle of the cross-section being coincident.
- each unit 11 the dimension between the first exit surface 51 b and the second entrance surface 52 a is larger as the unit 11 is closer to the secondary mirror 22. For this reason, the diameter dimension of the annular laser beam emitted from the unit 11 close to the secondary mirror 22 is increased.
- the annular laser beam immediately after being emitted from each unit 11 has a concentric cross section, and the nth annular laser beam surrounds the n ⁇ 1th laser beam. It has a shape.
- the refraction angle of the annular laser beam in the pair of axicon lenses 51 and 52 is determined by the refractive index of the lenses 51 and 52 and the cone angles ⁇ C and ⁇ D. Therefore, the refraction angle of the annular laser beam may be changed by making the cone angles ⁇ C and ⁇ D equal in each unit 11 and changing the difference in refractive index between the axicon lenses 51 and 52 in the order of proximity of the units 11.
- the annular laser beams emitted from the respective units 11 are concentric and have different amounts of reduction in outer diameter per unit propagation distance.
- the concentric annular laser beams may be close to each other and overlap. For this reason, the amount of change in the outer diameter per unit propagation distance only needs to be different from each other. For example, the amount of change may be an increase instead of a decrease.
- FIG. 11 is a diagram illustrating the relationship between the cone angles ⁇ A and ⁇ B of the pair of axicon mirrors 14 and 15. With reference to FIGS. 11 and 1, the configuration of the laser beam combining apparatus 100 will be described.
- the pair of axicon mirrors 14 and 15 in each unit 11 has a cone angle ⁇ B of the second reflecting surface 14a larger than the cone angle ⁇ A of the first reflecting surface 15a.
- This difference ⁇ b is, for example, 0.001 to 0.1 °, and becomes smaller in the order of proximity of the units 11. That is, the difference ⁇ b in the (n ⁇ 1) th unit 11 is larger than the difference ⁇ b in the nth unit provided on the emission direction side of the third reflecting surface 16a.
- the cone angle ⁇ A may be constant and the cone angle ⁇ B may decrease in the order of proximity of the unit 11, or both the cone angles ⁇ A and ⁇ B may be decreased. May be changed.
- the cone angle ⁇ B is larger than the cone angle ⁇ A in each unit 11, but in the unit 11 closest to the condensing optical system 20, the cone angle ⁇ A and the cone angle ⁇ B may be equal. In this case, the difference ⁇ b is zero.
- the cone angle of the second reflecting surface 14a is made larger than that of the first reflecting surface 15a, and the cone angle difference ⁇ b is made smaller in the order of approach of the unit 11.
- 12A to 12C show the intensity distribution of the annular laser beam in the conventional laser beam synthesis apparatus
- FIGS. 13A to 13C show the intensity distribution of the annular laser beam in the laser beam synthesis apparatus 100 of the present embodiment.
- 12A and 13A are diagrams showing the intensity distribution (near-field image) of the annular laser beam before focusing on the fifth reflecting surface 21a.
- 12B and 13B are graphs showing the intensity distribution of a conventional annular laser beam in a cross section cut along line AA in FIG. 12A and line BB in FIG. 13A.
- 12C and 13C are graphs showing the intensity distribution (far field image) of the laser beam obtained by condensing the annular laser beam.
- the vertical axis indicates the intensity
- the horizontal axis indicates the distance from the center of the laser beam.
- the vertical axis in FIG. 12C and FIG. 13C indicates intensity.
- the distance between the fifth reflecting surface 21a and the condensing position of the annular laser beam is 1 km.
- the cone angle ⁇ A of the first reflecting surface 15a and the cone angle ⁇ B of the second reflecting surface 14a are set equal.
- the annular laser beams before focusing in the near-field image have a small width dimension of each annular laser beam and are spaced apart from each other.
- strength of each annular laser beam is represented.
- the intensity of the annular laser beam with a smaller diameter increases.
- the annular laser beams before focusing in the near-field image are wide and overlap each other.
- the intensity of the portion where the annular laser beam overlaps (the center in the width direction) is large, and the intensity decreases as it approaches the end (the inner periphery and the outer periphery of the ring-shaped cross section).
- the intensity of the laser beam condensed in the far field is large, which is about 3.9 times the intensity of FIG. 13C. Thereby, the power density and energy density in a target position are raised.
- the annular laser beams emitted from the respective units 11 are concentric, and the amount of increase in the outer diameter per unit propagation distance is different from each other.
- the amount of change in the outer diameter per unit propagation distance is different from each other, and it is only necessary to approach and overlap each other as the concentric annular laser beam propagates.
- the reflection optical system including the pair of axicon mirrors 14 and 15 is used for the unit 11.
- the transmission optical system is used for the unit 11 in the fifth embodiment.
- This transmission optical system is the same as that of the second embodiment, but the relationship between the cone angles ⁇ C and ⁇ D of the axicon lenses 51 and 52 and the difference thereof are different.
- FIG. 14 is a diagram illustrating the relationship between the cone angles ⁇ C and ⁇ D of the pair of axicon lenses 51 and 52.
- the cone angle ⁇ C of the first exit surface 51b is smaller than the cone angle ⁇ D of the second entrance surface 52a.
- This difference is, for example, 0.005 to 0.5 °, and becomes smaller in the order of proximity of the units 11. That is, the difference in the (n ⁇ 1) th unit 11 is larger than the nth unit provided on the emission direction side of the third reflecting surface 16a.
- the cone angle ⁇ C in each unit 11 is smaller than the cone angle ⁇ D.
- the cone angle ⁇ C may be equal to the cone angle ⁇ D. In this case, the difference ⁇ between the cone angle ⁇ C and the cone angle ⁇ D is zero.
- the cone angle of the first exit surface 51b is made smaller than that of the second entrance surface 52a, and the difference between the cone angles is made smaller in the order of approach of the units 11.
- a reflective optical system having a primary mirror 21 and a secondary mirror 22 is used as the condensing optical system 20.
- the condensing optical system 20 is not limited to this as long as it collects the annular laser beam from the scraper mirror 16, and for example, a transmission optical system such as a single lens or a transmission telescope can also be used.
- a transmission optical system such as a single lens or a transmission telescope can also be used.
- the difference between the cone angle of the first axicon optical system 15, 51 and the cone angle of the second axicon optical system 14, 52 in each unit 11 is due to the annular laser beam emitted from the scraper mirror 16 of each unit 11. They are determined so as to overlap each other on the exit surface of the condensing optical system 20.
- the radius of curvature of the secondary mirror 22 is set so that the focal positions of the annular laser beams of the combined laser beam are close to each other in order to improve the condensing performance of the combined laser beam.
- the method for improving the condensing property of the combined laser beam is not limited to this.
- it can also be realized by optimizing the curvature of the wavefront of the laser beam incident on the axicon optical system 14, 15, 51, 52 of the unit 11 from the laser light source 12.
- the difference between the cone angle of the first axicon optical system 15, 51 and the cone angle of the second axicon optical system 14, 52 is different in the order of proximity of the unit 11.
- the inclination of each annular laser beam reflected by the main mirror 21 is different, and the focal length of each annular laser beam is different. Therefore, the wavefront curvature of the laser beam from the laser light source 12 is set so that the focal lengths of the respective annular laser beams coincide.
- the divergence angle of the laser beam incident on the axicon optical system 14, 15, 51, 52 is adjusted so as to correct the difference in focal length.
- the focal lengths of the respective annular laser beams collected from the main mirror 21 become closer to each other and the irradiation area of the synthetic laser beam is reduced, so that the energy density and power density of the synthetic laser beam can be further increased.
- the annular laser beams can be completely overlapped.
- the curvature of the wavefront of each annular laser beam may be optimized as in the seventh embodiment. Thereby, the condensing property of the laser beam is improved.
- an image relay optical system can be used for the reduction optical system 30.
- the image relay optical system reduces the diameter of the circular laser beam emitted from the scraper mirror 16 and emits it to the condensing optical system 20.
- the annular laser beam emitted from the scraper mirror 16 is reduced by an image relay optical system having a reduction ratio R (value smaller than 1).
- R reduction ratio
- the interval between the annular laser beams is reduced to R times, and the inclination (change rate of the outer diameter) of each annular laser beam is increased to 1 / R times. Therefore, the propagation distance until the circular laser beams emitted from the scraper mirror 16 without being reduced overlap each other is L1.
- the propagation distance L2 required until the circular laser beams emitted from the scraper mirror 16 and reduced by the image relay optical system overlap each other can be expressed as R 2 L1.
- the propagation distance L2 is shorter than L1, the laser beam combining apparatus 100 can be downsized.
- the ring laser beam reduced by the image relay optical system may be expanded.
- the annular laser beam is once reduced and then expanded and emitted to the condensing optical system.
- the guide light source 60 is provided in the laser beam combining apparatus 100.
- the guide light source 60 may not be provided.
- the guide light source 60 may be provided in the laser beam combining apparatus 100 according to the first and third embodiments.
- the difference between the cone angles ⁇ A and ⁇ C of the first axicon optical systems 15 and 51 and the cone angles ⁇ B and ⁇ C of the second axicon optical systems 14 and 52 in each unit 11 is increased in the order of proximity of the units 11.
- the reflecting surface 16a of the scraper mirror 16 in each unit 11 is an elliptical conical surface that keeps the circular laser beam reflected by the reflecting surface 16a circular, and the cone angle of the reflecting surface 16a is the unit. You may set so that it may become small in order of 11 proximity.
- the reflecting surface 16a of the scraper mirror 16 is an elliptical cone surface that reduces the diameter of the annular laser beam emitted from the axicon optical system and changes the path of the annular laser beam.
- the reflection surface 16 a is recessed in an elliptical cone shape, and is formed so that the vertex is located at the center of the scraper mirror 16.
- the major axis and minor axis of the elliptical cone surface are different for each unit 11, and the cone angle on both the major axis side and the minor axis side of the elliptical cone surface is smaller as the unit 11 is closer to the condensing optical system 20.
- the reflective surface 16a of the scraper mirror 16 in the first unit 11a may be a flat surface.
- the reflecting surface 16a is an elliptical conical surface, the reflecting surface 16a may be a conical surface as long as the circular laser beam reflected by the reflecting surface 16a is kept circular.
- the annular laser beam reflected by the concave reflecting surface 16a having the elliptical cone shape propagates while maintaining its width dimension constant and reducing the outer diameter dimension. Since the cone angle of the reflecting surface 16a decreases in the order of proximity of the unit 11, the amount of decrease in the outer diameter per unit propagation distance of the annular laser beam increases in the order of proximity of the unit 11. Further, the outer diameter dimension of the annular laser beam on the reflecting surface 16a is larger in the order of approach of the unit 11. Therefore, the annular laser beam incident from the reflecting surface 16a overlaps with each other on the fourth reflecting surface 22a and the fifth reflecting surface 21a before focusing.
- the width dimension and the inner / outer diameter ratio of the annular laser beam before focusing can be increased without increasing the diameter dimension of the fifth reflecting surface 21a.
- the diameter dimension of the condensed laser beam becomes smaller. Energy density and power density can be increased.
- the axicon optical system is an optical system having a conical surface that emits an incident laser beam as an annular laser beam.
- an axicon optical system for example, a pair of optical systems of a convex axicon mirror 15, a convex axicon mirror 15 and a concave axicon mirror 14, a first axicon lens 51, and a first axicon lens 51 and a second A pair of optical systems of the axicon lens 52 is used.
- the exit optical system that shapes the solid laser beam into an annular laser beam and emits it is not limited to the pair of axicon optical systems 14, 15, 51, 52.
- a scraper mirror can be used as the output optical system.
- This scraper mirror has a flat plate shape and has a through hole at the center thereof. For this reason, when a solid laser beam is emitted from the laser light source 12 to the scraper mirror, when the solid laser beam passes through the scraper mirror, the central portion thereof is removed and converted into an annular laser beam.
- the scraper mirror 16 is arranged such that the third reflecting surface 16a is inclined at 45 ° with respect to the axis of the second reflecting surface 14a.
- this inclination angle is not limited to 45 °.
- the inclination angle can be changed according to the arrangement of the units 11. Thereby, the freedom degree of arrangement
- the nth laser beam surrounds the n-1th annular laser beam.
- the n-th annular laser beam and the n-1th laser beam may overlap.
- the laser beam having the smallest diameter on the fifth reflecting surface 21a of the primary mirror 21 is an annular laser beam having a ring-shaped cross section, but may be a solid laser beam.
- the reflecting surface 16a of the scraper mirror 16 is an elliptical conical surface that reduces the diameter of the circular laser beam emitted from the axicon optical system and changes the path of the circular laser beam.
- the reflecting surface 16a of the scraper mirror 16 may be an elliptical cone surface that enlarges the diameter of the annular laser beam emitted from the axicon optical system and changes the path of the annular laser beam.
- the reflection surface 16 a has a protruding elliptical cone shape, and the cone angle of the reflection surface 16 a increases in the order of proximity of the unit 11.
- the annular laser beam reflected by the reflecting surface 16a propagates with a wide width dimension and an enlarged outer diameter dimension.
- the amount of expansion of the outer diameter per unit propagation distance of the annular laser beam decreases in the order in which the units 11 approach each other.
- the outer diameter dimension of the annular laser beam on the reflecting surface 16a is larger in the order of approach of the unit 11. Therefore, the annular laser beams incident from the reflecting surface 16a overlap each other before focusing. Therefore, it is possible to increase the energy density and power density of the combined laser beam at the irradiation position by reducing the diameter of the focused laser beam while suppressing the increase in size of the laser beam combining apparatus 100.
- the laser beam synthesizing apparatus of the present invention is useful as a laser beam synthesizing apparatus or the like for improving the irradiation performance of high energy density or high power density.
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Abstract
Description
(レーザビーム合成装置の構成)
図1は、本発明の第1実施の形態に係るレーザビーム合成装置100を模式的に示す構成図である。図2は、一対のアキシコンミラー14、15の円錐角θA、θBの関係を示す図である。この図1および図2を参照して、レーザビーム合成装置100の構成について説明する。
図3は、集光光学系20における合成レーザビームの形状を示す図である。図4は、集光光学系20により集光した合成レーザビームを模式的に示す図である。以下、図1~図4を参照して、レーザビーム合成装置100が複数の円環レーザビームを合成する動作について説明する。
上記実施の形態では、各ユニット11における反射面14a、15aを円錐面とし、この反射面14a、15aの円錐角θA、θBの差Δをユニット11の近接順に大きくしている。これにより、各ユニット11から出射する円環レーザビームは、伝搬するに従って、外径寸法が減少し、その単位伝搬距離当たりの外径寸法の減少量はユニット11の近接順に大きくなっている。また、各円環レーザビームは、その幅寸法を一定に維持しながら、内径寸法に対する外径寸法の比(内外径比)が大きくなる。これにより、集光前の主鏡21上において複数の円環レーザビームを簡単に重ねて、主鏡21を大きくせずに各円環レーザビームの幅寸法や内外径比を大きくすることができる。このような円環レーザビームをその幅寸法および外径寸法が小さくなるように集光すると、集光したレーザビームの径寸法を小さくすることができる。この結果、レーザビーム合成装置100の大型化を抑制しながら、照射位置における合成レーザビームのエネルギー密度を高めることができる。
上記第1実施の形態に係るレーザビーム合成装置100では、副鏡22の曲率半径が副鏡22に入射する円環レーザビームの外径の半径寸法に比べて、幾何光学的収差の発生を抑えるように十分に大きく設定されている。これにより、レーザビーム合成装置100は、レーザビームが光軸OA上において広い範囲にある程度高いエネルギー密度を持って照射される用途に利用され得る。これに対して、さらに高いエネルギー密度を有するレーザビームが必要な場合がある。このため、第2実施の形態に係るレーザビーム合成装置100では、合成レーザビームにおいて各レーザビームの焦点位置を互いに近づけるように副鏡22の曲率半径を設定している。図6は、第2実施の形態に係るレーザビーム合成装置100の集光光学系20を模式的に示す図である。この図6を参照して、レーザビーム合成装置100の構成について説明する。
上記第1および第2実施の形態では、一対のアキシコンミラー14、15で構成される反射光学系をユニット11に用いた。これに対して、第3実施の形態では、透過光学系をユニット11に用いている。図9は、第3実施の形態に係るレーザビーム合成装置100を模式的に示す図である。図10は、一対のアキシコンレンズ51、52の円錐角θC、θDの関係を示す図である。この図9および図10を参照して、レーザビーム合成装置100の構成について説明する。
上記第1および第2実施の形態では、各ユニット11が出射する円環レーザビームは、同心状であって、その単位伝搬距離当たりの外径寸法の減少量が互いに異なるようにした。ただし、同心状の円環レーザビームが伝搬するに従って互いに接近して重なり合えばよい。このため、単位伝搬距離当たりの外径寸法の変化量が互いに異なっていればよく、たとえば、この変化量が減少量でなく増加量であってもよい。図11は、一対のアキシコンミラー14、15の円錐角θA、θBの関係を示す図である。この図11および図1を参照して、レーザビーム合成装置100の構成について説明する。
上記第4実施の形態では、一対のアキシコンミラー14、15で構成される反射光学系をユニット11に用いた。これに対して、第5実施の形態では透過光学系をユニット11に用いている。この透過光学系は第2実施の形態と同様であるが、アキシコンレンズ51、52の円錐角θCとθDとの関係およびその差が異なる。図14は、一対のアキシコンレンズ51、52の円錐角θC、θDの関係を示す図である。
上記全ての実施の形態では、集光光学系20に主鏡21および副鏡22を有する反射光学系を用いた。しかしながら、集光光学系20は、スクレイパーミラー16からの円環レーザビームを集光するものであればこれに限定されず、たとえば、単レンズや透過型望遠鏡などの透過光学系を用いることもできる。この場合、各ユニット11における第1アキシコン光学系15、51の円錐角と第2アキシコン光学系14、52の円錐角との差は、各ユニット11のスクレイパーミラー16から出射した円環レーザビームが集光光学系20の出射面において互いに重なるように定められる。
上記第2実施の形態では、合成レーザビームの集光性を向上させるために、合成レーザビームの各円環レーザビームの焦点位置を互いに近づけるように副鏡22の曲率半径を設定した。しかしながら、合成レーザビームの集光性を向上させる方法はこれに限定されない。たとえば、レーザ光源12からユニット11のアキシコン光学系14、15、51、52に入射させるレーザビームの波面の曲率を最適化することによっても実現することができる。
上記全ての実施の形態において、縮小光学系30にイメージリレー光学系を用いることができる。イメージリレー光学系は、スクレイパーミラー16から出射した円環レーザビームの径寸法を縮小して集光光学系20に出射する。
上記第1実施の形態では、レーザビーム合成装置100にガイド光源60を設けたが、ガイド光源60を設けなくてもよい。また、第1および第3実施の形態に係るレーザビーム合成装置100にガイド光源60を設けてもよい。
上記その他の実施の形態1では、スクレイパーミラー16の反射面16aは、アキシコン光学系から出射した円環レーザビームの径寸法を縮小して当該円環レーザビームの進路を変更する楕円錐面とした。これに対して、スクレイパーミラー16の反射面16aは、アキシコン光学系から出射した円環レーザビームの径寸法を拡大して当該円環レーザビームの進路を変更する楕円錐面としてもよい。この場合、反射面16aは、突き出した楕円錐形状であって、反射面16aの円錐角をユニット11の近接順に大きくなる。
11 整形光学ユニット
14 凹型アキシコンミラー(第2アキシコン光学系、アキシコン光学系、出射光学系)
14a 第2反射面
14b 第1通過孔
15 凸型アキシコンミラー(第1アキシコン光学系、アキシコン光学系、出射光学系)
15a 第1反射面
16 スクレイパーミラー(反射光学系)
16a 第3反射面
16b 第2通過孔
20 集光光学系
21 主鏡
21a 第5反射面
21b 第3通過孔
22 副鏡
22a 第4反射面
30 縮小光学系
51 第1アキシコンレンズ(第1アキシコン光学系、アキシコン光学系、出射光学系)
51a 第1入射面
51b 第1射出面
52 第2アキシコンレンズ(第2アキシコン光学系、アキシコン光学系、出射光学系)
52a 第2入射面
52b 第2射出面
60 ガイド光源
Claims (14)
- 単位伝搬距離当たりの外径寸法の変化量が互いに異なる円環レーザビームを出射する複数の整形光学ユニットを備え、
前記各整形光学ユニットは、出射する円環レーザビームが同心状となるように配置されている、レーザビーム合成装置。 - 前記整形光学ユニットは、
入射したレーザビームの径寸法を拡大して円環レーザビームを出射する円錐面を有する第1アキシコン光学系と、
前記第1アキシコン光学系から出射した円環レーザビームの径寸法を縮小する円錐面を有する第2アキシコン光学系と、
前記第2アキシコン光学系から出射した円環レーザビームの進路を変更する反射光学系と、を含み、
前記第1アキシコン光学系の円錐角および前記第2アキシコン光学系の円錐角の少なくともいずれか一方が前記各整形光学ユニットごとに異なっており、
前記反射光学系は、入射した円環レーザビームを、他の前記反射光学系から出射された円環レーザビームに対して同心状に出射する、請求項1に記載のレーザビーム合成装置。 - 前記第1アキシコン光学系は、円錐形状に突出した反射面を有する凸型アキシコンミラーであり、
前記第2アキシコン光学系は、前記凸型アキシコンミラーの反射面に対向しかつ円錐形状に窪んだ反射面、および、当該反射面とその反対側にある面との間を貫通した孔を有する凹型アキシコンミラーであり、
前記反射光学系は、前記凸型アキシコンミラーと前記凹型アキシコンミラーとの間に配置され、かつ、前記凹型アキシコンミラーから出射した円環レーザビームの光軸に対して傾斜する反射面、および、当該反射面とその反対側にある面との間を貫通した孔を有するスクレイパーミラーである、請求項2に記載のレーザビーム合成装置。 - 前記各整形光学ユニットにおける前記凹型アキシコンミラーの円錐角は前記凸型アキシコンミラーの円錐角より小さく、
前記整形光学ユニットにおける前記凹型アキシコンミラーの円錐角と前記凸型アキシコンミラーの円錐角との差は、当該整形光学ユニットの前記スクレイパーミラーの出射方向側に設けられた整形光学ユニットより小さい、請求項3に記載のレーザビーム合成装置。 - 前記各整形光学ユニットにおける前記凹型アキシコンミラーの円錐角は前記凸型アキシコンミラーの円錐角より大きく、
前記整形光学ユニットにおける前記凹型アキシコンミラーの円錐角と前記凸型アキシコンミラーの円錐角との差は、当該整形光学ユニットの前記スクレイパーミラーの出射方向側に設けられた整形光学ユニットより大きい、請求項3に記載のレーザビーム合成装置。 - 前記第1アキシコン光学系は、円錐形状に突出した射出面を有する第1アキシコンレンズであり、
前記第2アキシコン光学系は、前記射出面に対向しかつ円錐形状に突出した入射面を有する第2アキシコンレンズであり、
前記反射光学系は、前記第1アキシコンレンズとの間に前記第2アキシコンレンズを挟むように配置され、かつ、前記第2アキシコンレンズから出射した円環レーザビームの光軸に対して傾斜する反射面、および、当該反射面とその反対側にある面との間を貫通した孔を有するスクレイパーミラーである、請求項2に記載のレーザビーム合成装置。 - 前記第1アキシコンレンズの円錐角は前記第2アキシコンレンズの円錐角より大きく、
前記各整形光学ユニットにおける前記第1アキシコンレンズの円錐角と前記第2アキシコンレンズの円錐角との差は、当該整形光学ユニットの前記スクレイパーミラーの出射方向側に設けられた整形光学ユニットより小さい、請求項6に記載のレーザビーム合成装置。 - 前記第1アキシコンレンズの円錐角は前記第2アキシコンレンズの円錐角より小さく、
前記各整形光学ユニットにおける前記第1アキシコンレンズの円錐角と前記第2アキシコンレンズの円錐角との差は、当該整形光学ユニットの前記スクレイパーミラーの出射方向側に設けられた整形光学ユニットより大きい、請求項6に記載のレーザビーム合成装置。 - 前記反射光学系から出射した円環レーザビームを集光する集光光学系をさらに備え、
前記各整形光学ユニットにおける前記第1アキシコン光学系の円錐角および前記第2アキシコン光学系の円錐角の差は、前記各整形光学ユニットの前記反射光学系から出射した円環レーザビームが前記集光光学系の出射面において互いに重なるように定められる、請求項2~8のいずれか一項に記載のレーザビーム合成装置。 - 前記集光光学系は、
前記反射光学系から出射した円環レーザビームの径寸法を拡大する反射面を有する副鏡と、
前記副鏡から出射した円環レーザビームを集光する反射面を有する主鏡と、を含み
前記各整形光学ユニットにおける前記第1アキシコン光学系の円錐角および前記第2アキシコン光学系の円錐角の差は、前記各整形光学ユニットの前記反射光学系から出射した円環レーザビームが前記主鏡の反射面において互いに重なるように定められる、請求項9に記載のレーザビーム合成装置。 - 前記反射光学系から出射した円環レーザビームの径寸法を縮小して前記集光光学系に出射するイメージリレー光学系をさらに備えている、請求項9または10に記載のレーザビーム合成装置。
- 前記各整形光学ユニットにおける前記第1アキシコン光学系の円錐角および前記第2アキシコン光学系の円錐角の差により発生する各円環レーザビームの焦点距離の差異を補正するように、各円環レーザビームの波面の曲率が設定されている、請求項2~11に記載のレーザビーム合成装置。
- 前記反射光学系から出射された円環レーザビームの光軸に沿って可視光線を出射するガイド光源をさらに備えている、請求項2~12のいずれか一項に記載のレーザビーム合成装置。
- 前記整形光学ユニットは、
円環レーザビームを出射する出射光学系と、
前記出射光学系から出射した円環レーザビームの径寸法を変化して当該円環レーザビームの進路を変更する楕円錐面を有する反射光学系と、を含み、
前記反射光学系の楕円錐面の長径側および短径側の両方の円錐角が前記各整形光学ユニットごとに異なり、
前記反射光学系は、入射した円環レーザビームを、他の前記反射光学系から出射された他の円環レーザビームに対して同心状に出射する、請求項1記載のレーザビーム合成装置。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105353516A (zh) * | 2015-12-14 | 2016-02-24 | 中国科学院光电技术研究所 | 单一探测器对光瞳光轴分区域成像的双光束合成传感器 |
JPWO2022018850A1 (ja) * | 2020-07-22 | 2022-01-27 | ||
WO2022018850A1 (ja) * | 2020-07-22 | 2022-01-27 | 三菱電機株式会社 | レーザ装置 |
JP7143553B2 (ja) | 2020-07-22 | 2022-09-28 | 三菱電機株式会社 | レーザ装置 |
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EP3470910B1 (en) | 2020-07-22 |
EP3064986A4 (en) | 2017-07-26 |
US9746681B2 (en) | 2017-08-29 |
JP5603992B1 (ja) | 2014-10-08 |
US20160274369A1 (en) | 2016-09-22 |
EP3470910A1 (en) | 2019-04-17 |
EP3064986B1 (en) | 2018-11-28 |
IL245323A0 (en) | 2016-06-30 |
EP3064986A1 (en) | 2016-09-07 |
IL245323B (en) | 2019-03-31 |
JP2015087484A (ja) | 2015-05-07 |
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