WO2015055222A1 - Kühlsystem für ein optisches element einer laseranlage und anordnung einer laseranlage mit einem kühlsystem - Google Patents
Kühlsystem für ein optisches element einer laseranlage und anordnung einer laseranlage mit einem kühlsystem Download PDFInfo
- Publication number
- WO2015055222A1 WO2015055222A1 PCT/EP2013/003095 EP2013003095W WO2015055222A1 WO 2015055222 A1 WO2015055222 A1 WO 2015055222A1 EP 2013003095 W EP2013003095 W EP 2013003095W WO 2015055222 A1 WO2015055222 A1 WO 2015055222A1
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- WIPO (PCT)
- Prior art keywords
- cooling
- fluid
- cooling fluid
- pressure
- pressure control
- Prior art date
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/703—Cooling arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
Definitions
- Cooling system for an optical element of a laser system and arrangement of a laser system with a cooling system
- the invention relates to a cooling system for at least one pressure-controlled optical element, in particular for at least one adaptive laser mirror, with an element cooling fluid system, in particular an element cooling circuit, for a
- Element cooling fluid for cooling the optical element.
- the optical properties of the optical element are adjustable by the voltage applied to the optical element element cooling fluid pressure.
- the invention relates to a laser machine for mechanical
- a laser system in particular with an adaptive laser mirror, as well as with an aforementioned cooling system for the optical element.
- a laser beam on an optical element of a laser system such. B. a deflection mirror, this can be considerably heated by the laser beam.
- a laser system usually has
- Cooling system in which z. B. water circulates as a cooling medium between the optical elements and a cooling unit.
- the cooling water has to travel relatively long distances within the laser processing system in order to move from the cooling unit to the optical elements to be cooled and back again.
- cooling water in various laser applications also serves to control the pressure of special optical elements whose optical properties can be adjusted with the help of an applied control pressure.
- a laser processing apparatus which comprises an adaptive mirror.
- the curvature of the mirror surface is varied in this case by means of compressed air.
- the pressure applied to the adaptive mirror control pressure of the compressed air can be adjusted continuously by an electropneumatic valve.
- the invention has set itself the task of freedom of design
- the object is achieved by a cooling system having the features of claim 1 and a laser system having the features of claim 11.
- the static fluid pressure component of the circulating element cooling fluid of the cooling system can be adjusted by means of a pressure control device.
- the resulting pressure on the optical element is composed of a static and optionally a dynamic pressure component.
- Pressure control device is highly compressible, z. B. by the volume available for the element cooling fluid is changeable.
- the change in the static pressure component by a pressure piston which acts on the element cooling fluid. In this way, the static
- Fluid pressure component can be influenced without that thereby the
- the element cooling fluid for pressure control is operatively connected to a pressure control fluid other than the element cooling fluid.
- Cooling system thus has a pressure control device by means of which the
- Fluid pressure of the element cooling fluid, which is applied in the optical element, is adjustable by the element cooling fluid with one of the element cooling fluid
- the pressure control device is a pressure control device.
- preferred embodiment allows a highly accurate pressure control, especially when the pressure control fluid is gaseous.
- the element cooling fluid is also operatively connected to heat dissipation with a plant cooling fluid circulating separately in the cooling system.
- the cooling system accordingly has a heat exchanger, by means of which heat from the element cooling fluid can be discharged by the element cooling fluid with a system cooling fluid circulating separately in the cooling system is in operative connection.
- the cooling system according to the invention therefore has, in addition to the element cooling fluid, at least one further fluid or a further fluid circuit for specific tasks in the cooling system.
- inventive measure the design freedom of the cooling system is increased.
- the fluids or fluid circuits can be designed optimized for each purpose. Due to the separation of functions, malfunctions or
- Fluctuations in the area of the other fluid or of the other fluid circuit do not directly affect the element cooling circuit.
- the risk that pressure fluctuations in the cooling medium cycle arise that complicate a precise adjustment of the fluid pressure at the optical element On the one hand arise such pressure fluctuations due to fluidic effects, such. B. back pressure, in the long
- Cooling medium act in it, which then take unwanted influence on the fluid pressure.
- the fluid pressure at the optical element can be set more precisely and stably.
- the element cooling system is preferably for cooling and
- laser system is also a variant of the invention advantageous in which the element cooling system, in particular the element cooling circuit, for cooling and possibly.
- the element cooling system in particular the element cooling circuit, for cooling and possibly.
- a cooling system can have a (central) system cooling circuit and several element cooling circuits.
- Pressure control fluid to use particularly suitable fluid but not itself must be particularly suitable for use as a cooling medium.
- a fluid can be selected as the element cooling fluid, which enables efficient heat removal in the first place.
- the element cooling fluid is liquid, which proves to be advantageous, especially due to the higher thermal conductivity and capacity of liquids compared to gases.
- the element cooling fluid is gel-like and in particular thixotropic.
- the heat transfer through the element cooling fluid is gel-like and in particular thixotropic.
- Element cooling fluid can be accomplished predominantly by heat conduction, as the high viscosity of the gel-like element cooling fluid prevents convection. In other cases, however, heat transfer is effected, at least to a significant degree, by circulation / circulation of the element cooling fluid in the element cooling fluid system. Consequently, the element cooling fluid system is then an element cooling circuit. Depending on the design of the element cooling circuit, the circulation can be caused solely by temperature differences and thereby
- Fluid conveyance such as a circulating pump, be accomplished.
- the pressure control fluid is gaseous. Setting a
- Control pressure in a gaseous pressure control fluid is easier and more accurate than a liquid, in particular due to the high compressibility of a gas.
- the use of a gaseous pressure control fluid is advantageous in that a gas pressure control device is less expensive, smaller in size, and lighter in weight than a similar device for liquids.
- air is a cheap and environmentally friendly variant of a pressure control fluid.
- Process gas can also be used for the supply of the pressure control fluid.
- Process gas may be related to one
- the element cooling fluid is compressed or pressurized more or less strongly at at least one pressure feed chamber.
- the pressure control fluid and the element cooling fluid are operatively connected to communicate the pressure from the pressure control fluid to the element cooling fluid.
- a variant is characterized in which the element cooling fluid and the pressure control fluid for pressure control are directly in operative connection with each other.
- direct operative connection can be realized by bringing together a liquid element cooling fluid and a gaseous pressure control fluid in a pressure feed chamber. Due to the difference in density, a liquid phase forms with the element cooling fluid and above that a gaseous phase with the pressure control fluid. The liquid cooling medium phase is connected to the cooling fluid system.
- gaseous pressure control fluid phase is to a gas pressure control device
- the pressure control gas transfers the set gas pressure to the liquid element cooling fluid.
- the pressure feed takes place at the geodetically uppermost point of the element cooling fluid system.
- the two fluids are in operative connection with one another, in particular a fluid-impermeable pressure feed element.
- a fluid-impermeable pressure feed element for example, may be provided as a Druckeinspeiseelement a barrier liquid layer, which is formed in the Druckeinspeisehunt between the element cooling fluid phase and the pressure control fluid phase.
- a Druckeinspeiseelement is provided in the form of a membrane or a pressure piston.
- the membrane or the pressure piston is directly between the two fluids
- Pressure control device is arranged on the optical element, in particular in a housing of the optical element is arranged.
- the dynamics of Pressure control increases as the pressure is adjusted directly on the optical element.
- the pressure control device has a pressure control fluid reservoir.
- This variant is characterized by the advantage that z. B. no pressure line from a central pressure supply system
- the pressure control fluid reservoir is connected for loading or refilling to a process gas line for a laser processing head.
- Process gas line is advantageously used for an additional purpose.
- the cooling system is provided with at least one circulation pump, by means of which the element cooling fluid in the element cooling fluid system or element cooling circuit can be circulated is.
- the cooling system can be designed such that a circulation of the element cooling fluid in the element cooling circuit in the manner of
- Thermosyphons done.
- the element cooling fluid heated at the optical element rises due to its lower density in the element cooling circuit. There, it cools down and then, due to its now higher density, sinks back down to the optical element. Often it is necessary to use the element cooling circuit relatively large
- the cooling system preferably has at least one heat exchanger.
- the heat from the element cooling fluid can be applied to a liquid or
- gaseous fluid to be transferred is particularly preferred.
- a variant with an indirect heat exchanger in which the fluid flows over a
- heat-transmitting component are in operative connection.
- a heat dissipation from the element cooling fluid to a heat-absorbing component of the laser system such as. B. a steel beam of Laser system, done.
- heat dissipation can take place at least largely or even exclusively from the optical element to adjacent components of the laser system.
- the element coolant and the equipment cooling fluid are above the housing of the optical element
- the cooling system according to the invention in particular according to the above-mentioned advancements or developments, can be used for cooling an optical element of any laser system.
- it can be used in a laser system which is essentially "only" formed by a laser aggregate, a laser resonator or a laser source, but the use of the inventive cooling system on a laser system which drives at least one drive axis, ie at least one, is particularly preferred movable
- Plant unit includes.
- the invention therefore also relates to a laser machine for machining machined parts, comprising a driven, in particular rotationally driven, system unit and with a pressure-controlled optical element arranged on the system unit, in particular with an adaptive laser mirror, and with a cooling system according to the above embodiments with a corresponding element -Ksselfluidsystem.
- the closed element cooling fluid system is arranged on the driven movable system unit of the laser system.
- the element cooling fluid system is arranged as a closed element cooling fluid system on the movable equipment unit as it is fully disposed on the movable equipment unit, ie, the element cooling fluid only flows in ducts mounted on the equipment unit.
- the element cooling fluid therefore does not have to traverse the axis of motion of the system unit, but only possibly existing axes of motion within the system unit.
- the element cooling fluid traverses in the element Cooling fluid system but no movement axis of the laser system.
- line sections which are arranged on the one hand on the system unit and on the other hand on a carrier unit for the system unit, complex and fault-prone connection means can be omitted.
- Carrier unit is rotationally driven, as particularly prone to failure and consuming
- the plant unit is preferably a freely rotatable unit, i. H. after a 360 ° rotation, the initial state is restored, so that the unit does not have to be turned back again or can be rotated as often as desired by 360 °.
- the construction of the plant unit results in a plant unit with a compact, low-maintenance and precisely controllable cooling system.
- the system unit is driven movably mounted on a carrier unit of the laser system.
- a carrier unit are a fixed machine body of the laser system or a carriage of a moving unit, which z. B. itself is mounted on a machine body of the laser system.
- Plant unit arranged as the element cooling fluid system.
- a structurally advantageous variant results if a plant cooling circuit for a system cooling fluid operatively connected to the element cooling fluid
- Power unit driven movable, in particular rotationally mounted is stored.
- Plant cooling fluid is a development of the invention, in which a standing with the element cooling fluid in thermal contact
- Heat emission element is arranged on the system unit.
- a heat receiving element in thermal contact with the plant cooling fluid arranged on the carrier unit.
- a cross-axis heat exchanger is formed in this way.
- the cherriesabgabe- and the heat receiving element are designed and arranged such that a heat dissipation of the
- Heat transfer element can be made to the heat receiving element.
- the two elements can touch each other for heat transfer or slide against each other. Preferably, a gap is provided between them, albeit a very narrow gap over which the heat transfer is substantially non-contact.
- the two elements are movable relative to each other, in particular rotatable, so that the possibilities of movement of the system unit relative to the carrier unit are not limited by the cross-axis heat exchanger.
- a particularly compact heat exchanger over an axis of rotation is formed by the heat-emitting element and the heat receiving element are annular or at least ring segment-like and are arranged at least almost concentric with the axis of rotation about which the system unit is rotationally driven relative to the carrier unit.
- the heat-emitting element and the heat receiving element are annular or at least ring segment-like and are arranged at least almost concentric with the axis of rotation about which the system unit is rotationally driven relative to the carrier unit.
- Plant unit and carrier unit heat transfer can take place.
- the ring or ring segment-shaped elements can be arranged axially offset from one another.
- one of the elements is at least partially disposed radially within the other element.
- Pressure control means by means of which the fluid pressure of the element cooling fluid is adjustable, which rests in the optical element, arranged on the same system unit as the element cooling fluid system. It is understood that it is of particular advantage if the pressure control device is developed according to the aspects stated above and below.
- the element cooling fluid system is formed on the system unit such that the element cooling fluid remains in the optical element during operation of the optical element, ie, does not leave a housing of the optical element.
- the element cooling fluid system. ie that Recording volume or the channels for the element cooling fluid are thus completely covered by the housing of the optical element. This results in a compact unit.
- a separate cooling pipe system or the like for the element cooling fluid can be dispensed with. The thus reduced amount of required element cooling medium increases the dynamics with which the fluid pressure of the Eiement cooling medium
- Pressure control device by means of which the applied in the optical element fluid pressure of the element cooling fluid is adjustable, takes place in the housing of the optical element.
- the element cooling fluid is again directly in contact with a, in particular gaseous, pressure control fluid
- Druckeinspeiseelement z. B. be adjustable directly by means of an electric motor.
- the actuator for.
- the electric motor attached to the housing of the optical element or part of the assembly of the optical element.
- a hydraulic or pneumatic auxiliary unit which flatten the control pressure characteristic.
- the additional unit has z.
- a membrane or a pressure piston which are adjustable by means of an actuator. By means of the membrane or the pressure piston, the pressure of the
- Adjusting pressure control fluid which in a receiving volume of the auxiliary unit, such as a printing cylinder is recorded.
- the pressure control fluid in turn is in operative connection with the element cooling fluid in the optical element directly or via a pressure feed element (eg a further diaphragm or a further pressure piston).
- the auxiliary unit and the actuator are attached to the housing of the optical element.
- the optical element can be designed such that the heat is dissipated by the element cooling fluid exclusively to the surrounding components. However, it may also be provided in turn a separate system cooling fluid for at least complementary heat dissipation. This can, as described above, via the housing of the optical element with the element cooling fluid in operative connection, for. Example, by means of a cooling fluid channel in an adjacent component, or even with the element cooling fluid in operative connection by even a plant cooling fluid conduit is guided through the housing of the optical element itself.
- the heat transfer in the element cooling fluid may for example be designed such that a circulation of the element cooling fluid in the element in the manner of a thermosiphon, as already explained above, takes place.
- FIG. 1 a laser processing system for the mechanical 3D machining of workpieces; 1, the basic structure of a rotationally driven rotary / swivel arm of the laser processing system according to FIG. 1, the basic design of a cooling system for cooling an adaptive mirror of the laser processing system according to FIG. 1 6 shows the basic structure of a cooling system for cooling an adaptive mirror of the laser processing system according to FIG. 1 according to a fourth design, and FIG the basic structure of a cooling system for cooling an adaptive mirror of the laser processing system of FIG. 1 according to a fifth type.
- a laser processing system 1 has a fixed one
- Machine body 2 three carrier carriages 3, 4, 5 and a rotary / pivoting arm 6.
- the carrier carriages 3, 4, 5 are each along a linear axis 7, 8, 9
- the rotary / pivoting arm 6 is about a vertical axis of rotation 10th
- the carrier carriage 5 consequently forms a carrier unit for the rotary / pivoting arm 6.
- the rotary / pivot arm 6 comprises a laser processing head 11, which is rotatably mounted in the rotary / pivot arm about a horizontal pivot axis 12 (FIG. 3).
- the laser processing head 11 may be used for distance control Laser processing nozzle 13 (Fig. 3) relative to a workpiece 14 have a further, not shown, linear drive axle.
- the workpiece 14 can be laser cut and / or welded along an almost arbitrary 3-D contour.
- the workpiece 14 For storage of the workpiece 14 during processing, the
- Laser processing system 1 a workpiece table 15.
- the structure of the laser processing system 1 shown in FIG. 1 provides a
- Machining optics another arrangement of the axes of movement to each other and with further axes of movement for the workpiece 14 conceivable.
- the laser beam 16 is generated in an only indicated laser unit 17, which is part of a z. B. set up next to the machine body 2
- Supply unit 18 is.
- a beam guide 19 with a plurality of optical elements such as laser mirrors, lenses, filters, etc. are provided. In FIG. 1, only one deflecting mirror 20 is shown by way of example.
- the laser processing system 1 has a plurality of
- the supply lines 21 are indicated in Fig. 1 for reasons of clarity only in principle.
- the laser processing system 1 has a cooling system 22 in order to cool the optical elements, which can be heated by the laser beam 16. It has a system cooling system, in particular a system cooling circuit 23 (FIG. 2), in which system cooling water circulates as system cooling fluid.
- a central cooling unit 24 serves to cool the system cooling water, which is circulated by means of a pump, not shown.
- the cooling unit 24 may be part of the supply unit 18 set up at the machine body 2, for example. It can also be set up separately from the other laser processing system 1. For example, it may even be located on another floor of the machine hall.
- the cooling unit 24 can also provide plant cooling water for several laser processing systems 1.
- the system cooling water is when leaving the cooling unit 24 z. B. under an operating output pressure of a maximum of about 4.5 bar and is using
- Plant cooling circuit 23 is also located on the carrier carriage 5, on which the rotary / pivoting arm 6 is mounted.
- two pressurized water lines 25, which lead into the carriage 5, are shown by way of example in FIG.
- the cooling system 22 For cooling an adaptive deflection mirror 26 and optionally further optical elements which are arranged on the rotary / pivoting arm 6, the cooling system 22 has an element cooling system, in particular an element cooling circuit 27, which is self-contained on the rotary / pivoting arm 6 is arranged.
- an element cooling water separate from the plant cooling water circulates as the element cooling fluid. That way you can
- the basic structure of a variant of an element cooling circuit 27 will be explained below with reference to FIG. 2 and FIG. 3.
- the element cooling circuit 27 is connected to the adaptive mirror 26 and in addition to a further deflection mirror 28 (FIG. 3) on the drum pivot arm 6.
- the adaptive mirror 26 has z. B. a deformable metal diaphragm plate 29 and a housing 40. In the housing, a pressure chamber 44 is provided for the element cooling water. One side of the metal diaphragm disk 29 forms a Mirror surface for the incident on the adaptive mirror 26 laser beam 16. The other side of the metal diaphragm plate 29 is pressurized by the element cooling water in the pressure chamber 44. On the one hand, the element cooling water serves to remove heat, which is caused by the laser beam 16 of the
- Metal diaphragm disk 29 is supplied.
- the pressure (or the static pressure component) of the element cooling water in the pressure chamber 44 the curvature of the metal diaphragm disk 29 can be changed and thereby the optical properties of the mirror surface can be changed or adjusted. The change in optical properties is reflected in the
- a precise and dynamic control of the element cooling water pressure in the adaptive mirror 26 therefore has a decisive influence on the processing result of the laser processing system 1.
- Pressure control device is provided, by means of which the pressure of the element cooling fluid via a pressure control fluid can be controlled or regulated.
- a pressure control fluid z. B. compressed air, which is supplied for example from a central compressed air system of the laser processing system 1.
- a non-illustrated pressure generator (compressor) and / or a pressure control fluid reservoir 46 on the rotary / pivot arm 6 be provided, which must be refilled from time to time.
- the reservoir 46 may have a direction indicated in FIG.
- Supply line 47 may be connected to process gas, which to the
- Laser processing head 1 1 leads. In addition, not shown
- Connection means may be provided to periodically element cooling water
- a pressure feed chamber 31 is used to feed the set by means of a gas pressure regulator 45 air pressure on the element cooling water. In this way, the static pressure component of the element cooling water is changed. In geodetically lower part of the Druckeinspeisehunt 31, the heavier element cooling water accumulates, while in the geodesic upper part of the pressure feed chamber 31, the lighter compressed air accumulates. At the phase boundary 32, the two fluids for pressure control are in direct operative connection. To the
- the pressure feed chamber 31 is preferably located at the geodetic top point of the element cooling circuit 27.
- Membrane or a piston are separated, but continue to be operatively connected to the pressure feed or ⁇ transmission.
- the compressed air in the central compressed air system of the laser processing system 1 to an operating pressure of about 6 bar.
- Pressure control device 30 can set the air pressure in a range of 0 to 3.5 bar with high precision.
- the element cooling circuit 27 furthermore has a circulating pump 34, by means of which the element cooling water in the element cooling circuit 27
- the element cooling circuit 27 may be designed such that the circulation of the element cooling water takes place in the manner of a thermosiphon.
- the cooling system 22 has a heat exchanger 35 for the element cooling water.
- the element cooling fluid for heat dissipation with the separately circulating in the cooling system 22 system cooling water in operative connection without pressure fluctuations in the system cooling circuit can penetrate the element cooling circuit.
- Cooling element such as. B. a Peltier element, and / or heat dissipation by thermal contact with a heat-receiving component of
- Laser processing system 1, z As a steel beam can be provided. In contrast to a water / water or water / air heat exchanger 35, the heat absorbed by the component is not targeted to another
- Transfer cooling medium but stored in the component, derived or gradually released to the environment.
- FIG. 3 shows a highly schematic sectional view of the rotary / pivoting arm 6 with a cooling system 22 according to FIG. 2.
- the rotary / pivoting arm 6 is mounted on the support carriage 5 by means of a rotary bearing 36. It can be rotated freely about the axis of rotation 10, in particular as often rotated in both directions of rotation by 360 °.
- On the Dretv / pivot arm 6 of the adaptive mirror 26 and the deflecting mirror 28 are arranged, which guide the guided by the carriage 5 in the rotary / pivoting arm 6 laser beam 16 to the laser processing nozzle 3 of the laser processing head 1 1.
- the water pipes 37 of the element cooling circuit 27 are all mounted on the rotary / pivot arm 6.
- the element cooling circuit 27 is thus arranged closed on the DrelWSchwenkarm 6.
- the lines 37 in FIG. 3 are indicated only in sections.
- the line length of the element cooling circuit 27 is made relatively short, so that a generation of pressure fluctuations due to dynamic axis movements of the
- Laser processing system 1 or significantly reduced due to fluidic effects.
- Element cooling circuit 27 arranged.
- the heat exchanger 35 for the element cooling fluid is partially at the rotary
- An annular heat-dissipating member 41 is in thermal contact with the element cooling fluid by e.g. B. has a spiral channel through which flows the element cooling water.
- the annular heat-emitting element 41 is attached concentrically to the axis of rotation 10 on the DrelWSchwenkarm 6.
- An annular heat receiving element 42 is also concentric with
- Rotary axis 10 attached to the carriage 5. It is in thermal contact with the system cooling water.
- the heat receiving element 42 may be for this purpose for example, also have a spiral channel, which is flowed through by the system cooling water.
- the heat-absorbing element 42 engages around the heat-dissipating element 41.
- the heat-dissipating and heat-absorbing element 41, 42 are not firmly connected to one another, but freely rotatable relative to one another.
- Between the two elements 41, 42 is an annular gap 43, but with z. B. about 0.02 mm is formed relatively narrow to sufficient heat transfer from the
- Circular cylinder made of copper or an aluminum alloy.
- the respective spiral-shaped channel extends around the longitudinal axis of the circular cylinder.
- the circular cylinders can each be constructed of a plurality of stacked metal rings having recesses, which in the stacked state the respective
- the elements 41, 42 may also be substantially the same
- a comparable cross-axis heat exchanger can also be provided for the case that a to be cooled and possibly pressure-controlled optical element is arranged on a system unit, which along a linear
- Drive axis relative to a support unit for the system unit is movable.
- the heat-dissipating and heat-absorbing element must be movable relative to one another along the linear drive axis.
- FIG. 4 shows the schematic structure of a second variant of a cooling system 122.
- the same or similar components are compared to the cooling system of Figure 2 provided with increased by 100 reference numerals.
- the cooling system 122 in turn comprises an adaptive deflection mirror 126 with a metal diaphragm disk 129, on which the laser beam 116 is reflected. Furthermore, the deflection mirror 126 has a housing 140 which encloses a pressure chamber 144 for the element cooling fluid, in particular the element cooling water. In the pressure chamber 144 annular channels for the cooling fluid are arranged, as shown in Figure 4 is sketched. The resulting in operation circulation of the element cooling water in the channels of the pressure chamber 144 in the manner of a thermosiphon is indicated in Figure 4 by the arrows 150.
- the element cooling fluid is heated by the thermal energy introduced by the laser beam 116. This lowers the density of the element cooling water. It rises in the pressure chamber 144 up and away from the metal diaphragm disk 129 away. In the part of the metal membrane disk 129 remote from the
- the element cooling water is cooled by the heat through the housing of the deflecting mirror 126 is delivered to an adjacent component 151.
- the heat flow is indicated by the arrows 152.
- the heat is stored there, derived or gradually released to the environment.
- the adjacent component 151 may also be supported by a not shown
- the element cooling water does not leave the deflection mirror 126, but circulates exclusively within the housing 140 of the deflection mirror 126.
- a Druckeinspeisehunt 131 is arranged.
- Pressure control device 130 may be constructed according to the variant of Figure 2 and reference is made to the local statements.
- the, in particular gaseous, pressure control fluid can also in the variant according to FIG. 4 directly via a phase boundary 132 or via a pressure feed element 133, e.g. B. in the form of a membrane or a pressure piston, are in operative connection with the element cooling water.
- FIG. 5 shows the schematic structure of a third variant of a cooling system 222.
- the same or similar components are compared to the cooling system of Figure 2 with reference numerals increased by 200 provided.
- the variant according to FIG. 5 corresponds predominantly to the variant according to FIG. 4. Reference is therefore made to the statements there.
- the main difference between the two variants is the design of the pressure chamber 244 of the deflecting mirror 226.
- the pressure chamber 244 has no cooling fluid channels as in the variant of Figure 4, but a cooling fluid chamber 244, in which the arrows 250th characterized flow of the element cooling water is formed.
- a gel-like or thixotropic cooling medium cooling fluid
- the heat dissipation is largely by heat conduction (in Fig. 5 in the horizontal direction from right to left) without significant fluid movement.
- the variant according to FIG. 5 has a simpler construction and can therefore be produced less expensively.
- FIG. 6 shows the schematic structure of a fourth variant of a cooling system 322.
- the same or similar components are compared with the cooling system 22 of Figure 2 with reference numerals increased by 300 provided.
- the cooling system 322 according to FIG. 6 is similar to the cooling system 222 according to FIG. 5, so that reference is made to the explanations regarding FIG.
- the essential difference from the variant according to FIG. 5 is the design of the pressure control device 330.
- the pressure control device 330 has a mechanical actuator in the form of an electric motor 354, which is attached to the housing 340 of the deflection mirror 326.
- the electric motor 354 is connected to cables 355 for driving and power supply.
- the electric motor 354 drives an adjuster tappet 356 with a movement toward and away from the pressure feed chamber 331. At one end is the adjusting plunger
- the membrane is the pressure of a, in particular gaseous
- Pressure control fluid in a receiving volume 358 set.
- the pressure control fluid in turn is immediately above a phase boundary 332 or a
- the pressure piston 357 or the diaphragm and the receiving volume 358 with the pressure control fluid form an assembly 359, by means of which the control pressure characteristic of the electric motor 354 is flattened to ensure a more precise adjustment of the pressure in the deflection mirror 326.
- FIG. 7 also shows the schematic structure of a fifth variant of a cooling system 422.
- the same or similar components are compared to the cooling system 22 of Figure 2 with reference number increased by 400.
- the cooling system 422 according to FIG. 7 largely corresponds to the cooling system 322 according to FIG. 6. Reference is made to the explanations there.
- the cooling system 422 has no additional aggregate between the electric motor 454 and the pressure feed element 433 in the form of a pressure piston or a membrane.
- the adjusting ram 456 is directly connected to the Druckeinspeiseelement 433.
- the variant is particularly suitable if the requirements for a precise setting of the pressure of the element cooling fluid are not particularly high or in conjunction with high-precision mechanical
- Cooling system 22 may be attached to the rotary / pivot arm 6 of the laser processing system 1 according to Figure 3, in which case the element cooling water only for cooling the respective adaptive deflection mirror 126, 226, 326, 426 is used.
- the remaining optical elements must be cooled by means of one or more further element cooling systems.
- the cross-axis heat exchanger 35 can be dispensed with in these variants or at least does not serve for heat removal from the element cooling water of the corresponding adaptive deflection mirror 126, 226, 326, 426.
- All pressure control devices 30, 130, 230, 330, 430 are suitable for control by a numerical control system.
- the pressure control devices 30, 130, 230, 330, 430 are suitable for control by a numerical control system.
- the pressure control devices 30, 130, 230, 330, 430 are suitable for control by a numerical control system.
- Pressure control devices 30, 130, 230, 330, 430 also not shown
- the sensors may also be arranged in the region of the pressure chambers 144, 244, 344, 444 and directly detect the pressure of the element cooling fluid in the pressure chambers.
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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DE112013007410.9T DE112013007410B4 (de) | 2013-10-15 | 2013-10-15 | Kühlsystem für ein optisches Element einer Laseranlage und Anordnung einer Laseranlage mit einem Kühlsystem |
PCT/EP2013/003095 WO2015055222A1 (de) | 2013-10-15 | 2013-10-15 | Kühlsystem für ein optisches element einer laseranlage und anordnung einer laseranlage mit einem kühlsystem |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/EP2013/003095 WO2015055222A1 (de) | 2013-10-15 | 2013-10-15 | Kühlsystem für ein optisches element einer laseranlage und anordnung einer laseranlage mit einem kühlsystem |
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WO2015055222A1 true WO2015055222A1 (de) | 2015-04-23 |
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PCT/EP2013/003095 WO2015055222A1 (de) | 2013-10-15 | 2013-10-15 | Kühlsystem für ein optisches element einer laseranlage und anordnung einer laseranlage mit einem kühlsystem |
Country Status (2)
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DE (1) | DE112013007410B4 (de) |
WO (1) | WO2015055222A1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3257616A1 (de) * | 2016-06-18 | 2017-12-20 | Wsoptics GmbH | Laserbearbeitungskopf mit gekühlten optischen komponenten und verfahren zum betreiben eines laserbearbeitungskopfes |
TWI735116B (zh) * | 2019-12-25 | 2021-08-01 | 財團法人國家同步輻射研究中心 | 低振動冰液機系統 |
US11471979B2 (en) * | 2019-08-16 | 2022-10-18 | Bystronic Laser Ag | Machining apparatus for laser machining a workpiece, set of parts for a machining apparatus for laser machining a workpiece and method for laser machining a workpiece using such machining apparatus |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102022111298A1 (de) | 2022-05-06 | 2023-11-09 | Trumpf Laser- Und Systemtechnik Gmbh | Anlage zur schichtweisen Fertigung wenigstens eines Objekts auf einer Bauplattform und zugehöriges Fertigungsverfahren, mit gekühlter Blendeneinrichtung |
DE102022002164A1 (de) | 2022-06-15 | 2023-12-21 | Fritz Stepper GmbH & Co. KG. | Laser-Schweißkopf |
DE102022002959A1 (de) | 2022-08-15 | 2024-02-15 | Fritz Stepper GmbH & Co. KG. | Schweißvorrichtung und Verfahren zum Verschweißen zweier Werkstücke |
EP4431222A1 (de) * | 2023-03-14 | 2024-09-18 | Raylase GmbH | Prädiktive kühlung für eine laserbearbeitungsvorrichtung |
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DE4415008A1 (de) * | 1994-04-29 | 1995-11-16 | Fraunhofer Ges Forschung | Spiegel, insbesondere Spiegel für die Abbildungsoptiken und resonatorinternen Optiken eines Hochleistungslasers |
US20010008469A1 (en) * | 2000-01-19 | 2001-07-19 | Klaus Bar | Deformable mirror, in particular for a laser beam material machining apparatus |
US20060191883A1 (en) * | 2005-02-25 | 2006-08-31 | Michael Wessner | Laser processing |
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DE3900467C2 (de) * | 1989-01-10 | 1995-09-07 | Trumpf Lasertechnik Gmbh | Vorrichtung mit einem Spiegelkopf |
JPH04253589A (ja) * | 1991-01-30 | 1992-09-09 | Fanuc Ltd | レーザロボットの手首の配管装置 |
DE4304059A1 (de) * | 1993-02-11 | 1994-08-18 | Diehl Gmbh & Co | Spiegeleinrichtung mit einem deformierbaren Spiegelelement |
EP1087476A1 (de) * | 1999-07-28 | 2001-03-28 | TRUMPF LASERTECHNIK GmbH | Frequenzangeregter Gaslaser für die Materialbearbeitung |
DE102012205870B3 (de) * | 2012-04-11 | 2013-02-21 | Trumpf Laser- Und Systemtechnik Gmbh | Kühlanordnung für einen Gaslaser, Gaslaser damit, sowie Verfahren zum Kühlen von Lasergas |
-
2013
- 2013-10-15 WO PCT/EP2013/003095 patent/WO2015055222A1/de active Application Filing
- 2013-10-15 DE DE112013007410.9T patent/DE112013007410B4/de not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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DE4415008A1 (de) * | 1994-04-29 | 1995-11-16 | Fraunhofer Ges Forschung | Spiegel, insbesondere Spiegel für die Abbildungsoptiken und resonatorinternen Optiken eines Hochleistungslasers |
US20010008469A1 (en) * | 2000-01-19 | 2001-07-19 | Klaus Bar | Deformable mirror, in particular for a laser beam material machining apparatus |
US20060191883A1 (en) * | 2005-02-25 | 2006-08-31 | Michael Wessner | Laser processing |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3257616A1 (de) * | 2016-06-18 | 2017-12-20 | Wsoptics GmbH | Laserbearbeitungskopf mit gekühlten optischen komponenten und verfahren zum betreiben eines laserbearbeitungskopfes |
US11471979B2 (en) * | 2019-08-16 | 2022-10-18 | Bystronic Laser Ag | Machining apparatus for laser machining a workpiece, set of parts for a machining apparatus for laser machining a workpiece and method for laser machining a workpiece using such machining apparatus |
TWI735116B (zh) * | 2019-12-25 | 2021-08-01 | 財團法人國家同步輻射研究中心 | 低振動冰液機系統 |
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DE112013007410A5 (de) | 2016-05-25 |
DE112013007410B4 (de) | 2020-01-30 |
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