WO2015052885A1 - Resin composition containing polyimide precursor and method for manufacturing cured film using said resin composition - Google Patents

Abstract

This invention consists of the following: a resin composition that contains (a) a polyimide precursor that has a constitutional unit that can be represented by general formula (1), (b) a compound that can be represented by general formula (2), and (c) a compound that generates radicals upon exposure to active light rays; a cured film or patterned cured film formed by said resin composition; a method for manufacturing a cured film using same; and an electronic component that contains the aforementioned cured film or patterned cured film. (In formula (1), R¹ represents a tetravalent organic group, R² represents a divalent organic group, and R³ and R⁴ each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, or a monovalent organic group that contains a carbon-carbon unsaturated double bond.) (In formula (2), R⁵ represents a hydrogen atom or a C_{1 - 4} alkyl group and R⁶ represents a monovalent organic group that does not contain a (meth)acrylic group.)

Description

Resin composition containing polyimide precursor and method for producing cured film using the same

The present invention relates to a resin composition containing a polyimide precursor suitable as a material for a protective film such as a surface coat film of a semiconductor element, an interlayer insulating film of a thin-film multilayer wiring board, and an insulating film, and a method for producing a cured film using the same And electronic parts.

In recent years, organic materials having high heat resistance such as polyimide resin have been widely applied as protective film materials for semiconductor integrated circuits. A protective film (cured film) using such a polyimide resin is obtained by heating and curing a resin film formed by applying and drying a polyimide precursor or a resin composition containing a polyimide precursor on a substrate. It is obtained by.

If the polyimide resin is photosensitive, a pattern resin film (patterned resin film) can be easily formed. By heating and curing such a patterned resin film, a pattern cured film (patterned cured film) can be easily formed.

Conventionally, as a polyimide precursor, an aromatic tetracarboxylic dianhydride is reacted with an olefin unsaturated alcohol to synthesize an olefin aromatic tetracarboxylic acid diester, and this compound and a diamine are subjected to a dehydration condensation reaction using carbodiimides. There is known a polyimide precursor that is polymerized by the above-described method and has a photosensitive group introduced by a covalent bond (see, for example, Patent Document 1).
Also known is a polyimide precursor in which an isocyanate compound having a photosensitive group is bonded to a polyamic acid obtained by reacting an aromatic tetracarboxylic dianhydride with an aromatic diamine (see, for example, Patent Document 2). .

These polyimide precursors are applied to a substrate in a varnish state dissolved in an organic solvent, dried, formed into a film, and then exposed to ultraviolet rays through a photomask to photo-cure the exposed portion of the negative photosensitive resin composition. It is used as. A relief pattern is obtained by developing and rinsing an unexposed portion other than the exposed portion using an organic solvent.

By the way, in the negative photosensitive resin composition containing the said polyimide precursor, the bifunctional di (meth) acrylate compound has been widely used as a crosslinking agent at the time of photocuring an exposure part conventionally (for example, patent) Reference 2-5).

A cured film using a polyimide resin has a thick film and a high elastic modulus, which increases the stress after curing, and the warpage of the semiconductor wafer increases, which may cause problems during transportation and wafer fixation. There is a need to develop a cured film with low stress.

Examples of a method for reducing the stress of the polyimide resin include a method using a polyamide obtained by copolycondensation of a phthalic acid compound having a specific functional group with a tetracarboxylic acid compound (for example, Patent Document 6).

In addition, there is an increasing demand for low-temperature curing with respect to the heat-curing temperature of the polyimide precursor. Conventionally, heat-curing of the polyimide precursor has been performed at a high temperature of about 370 ° C. Heat curing is required (for example, Patent Document 7).

JP-A-60-233646 JP-A-9-188762 JP-A-6-342211 JP-A-10-95848 JP-A-8-286374 International Publication No. 2006/008991 International Publication No. 2009/060380

In this technical field, it has been thought that a crosslinking reaction between polymer chains does not proceed unless it is a bifunctional or higher functional (meth) acrylate compound, and it does not become insoluble in an organic solvent used as a developer. .
However, as a result of the study by the present inventors, even when a monofunctional (meth) acrylate compound is used, a photosensitive resin composition having a photosensitive property equivalent to that when a bifunctional or higher (meth) acrylate compound is used and curing It was found that a film was obtained.

An object of the present invention is to provide a novel polyimide precursor-containing resin composition and a method for producing a cured film using the same.

According to the present invention, the following resin composition, a method for producing a cured film using the same, and the like are provided.
1. A resin composition containing the following components (a), (b) and (c).
(A) A polyimide precursor having a structural unit represented by the following general formula (1) (b) A compound represented by the following general formula (2) (c) A compound that generates radicals upon irradiation with actinic rays

(Wherein R ¹ is a tetravalent organic group, R ² is a divalent organic group, R ³ and R ⁴ are each independently a hydrogen atom, an alkyl group, a cycloalkyl group, or a carbon-carbon unsaturated double bond. A monovalent organic group.)

(In the formula, R ⁵ is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R ⁶ is a monovalent organic group not containing a (meth) acryl group.)
2. 2. The resin composition according to 1, wherein the component (b) is contained in an amount of 1 to 100 parts by mass with respect to 100 parts by mass of the component (a).
3. Formula (2) R ⁶ is (meth) acrylic group, a hydroxyl group, and 1 or 2 resin composition according to a monovalent organic group containing no amino group in.
4). 4. The resin composition according to any one of 1 to 3, wherein the component (b) is a monofunctional photopolymerizable compound having a molecular weight of 300 or less.
5. 5. The resin composition according to any one of 1 to 4, wherein at least one of R ³ and R ⁴ in the formula (1) is a monovalent organic group having a carbon-carbon unsaturated double bond.
6). 6. The resin composition according to any one of 1 to 5, wherein R ¹ in the formula (1) is any one of tetravalent organic groups represented by the following general formulas (2a) to (2e).

(In the formula (2d), X and Y each independently represent a divalent group or a single bond that is not conjugated to the benzene ring to which each is bonded. In the general formula (2e), Z represents an ether bond (—O—). Or a sulfide bond (—S—).)
7. 7. The resin composition according to any one of 1 to 6, wherein R ² in the formula (1) is a divalent organic group represented by the following general formula (5) or (6).

(Wherein R ¹⁰ to R ¹⁷ each independently represents a hydrogen atom, a halogen atom or a monovalent organic group, and at least one of R ¹⁰ to R ¹⁷ is a halogen atom or a halogenated alkyl group. R ¹⁸ And R ¹⁹ each independently represents a halogen atom or a halogenated alkyl group.)
8). 8. The resin composition according to any one of 1 to 7, wherein the component (c) is an oxime ester compound.
A cured film formed from the resin composition according to any one of 9.1 to 8.
10. A method for producing a cured film, comprising a step of applying the resin composition according to any one of 10.1 to 8 on a substrate and drying to form a coating film, and a step of heat-treating the coating film.
11. A cured pattern film formed from the resin composition according to any one of 11.1 to 8.
A step of applying the resin composition according to any one of 12.1 to 8 on a substrate and drying to form a coating film; and a step of irradiating the coating film with actinic rays and developing to obtain a patterned resin film And a step of heat-treating the patterned resin film.
An electronic component having the cured film according to 13.9 or the patterned cured film according to 11.

According to the present invention, a novel polyimide precursor-containing resin composition and a method for producing a cured film using the same can be provided.

It is a schematic sectional drawing of one Embodiment of the semiconductor device using the resin composition of this invention. (A) is a gas chromatogram when the pyrolysis gas chromatograph mass spectrometry was performed about the cured film obtained in Example 10. FIG. (B) is a gas chromatogram when the pyrolysis gas chromatograph mass spectrometry was performed about the cured film obtained by the comparative example 2. FIG. (A) is the figure which measured the outgas from the cured film of the comparative example 2 using the heat generation gas mass spectrometry. (B) is the figure which measured the outgas from the cured film of Example 1 using the heat generation gas mass spectrometry.

Hereinafter, embodiments of the resin composition according to the present invention, a cured film using the resin composition, a method for producing the cured film, and the like and an electronic component will be described in detail. In the present invention, methacrylate and acrylate are collectively referred to as (meth) acrylate. Similarly, methacrylic groups and acrylic groups are collectively referred to as (meth) acrylic groups. A methacryloxy group and an acryloxy group are also referred to as (meth) acryloxy groups. The numerical range indicated by using “to” indicates a range including the numerical values described before and after “to” as the minimum value and the maximum value, respectively.

<Resin composition>
The resin composition of the present invention contains the following components (a), (b) and (c).
(A) A polyimide precursor having a structural unit represented by the following general formula (1) (b) A compound represented by the following general formula (2) (c) A compound that generates radicals upon irradiation with actinic rays

(Wherein R ¹ is a tetravalent organic group, R ² is a divalent organic group, R ³ and R ⁴ are each independently a hydrogen atom, an alkyl group, a cycloalkyl group, or a carbon-carbon unsaturated double bond. A monovalent organic group.)

(In the formula, R ⁵ represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R ⁶ is a monovalent organic group not containing a (meth) acryl group.)

The component (b) of the resin composition of the present invention is a crosslinking agent. By setting it as the said structure in this invention, a pattern cured film is obtained, without using a polyfunctional (meth) acrylate compound. Thereby, outgas generated during the curing reaction can be suppressed.

In addition to the above, when the heat-curing temperature is as low as 300 ° C. or lower, outgas from the polyimide film increases in the vacuum process such as etching of the electrode part after the polyimide cured film formation process, and outgas is generated during the process Therefore, there is a problem that the chamber is contaminated. If the component (b) is a monofunctional photopolymerizable compound represented by the formula (2) and having a molecular weight of 300 or less, even a cured film cured at a low temperature of 300 ° C. or less is exposed to a vacuum process. Can be suppressed, and a cured film with low stress can be obtained.

(A) Component: polyimide precursor having a structural unit represented by the general formula (1) The resin composition of the present invention comprises (a) a polyimide precursor having a structural unit represented by the following general formula (1). contains.
(Wherein R ¹ is a tetravalent organic group, R ² is a divalent organic group, R ³ and R ⁴ are each independently a hydrogen atom, an alkyl group, a cycloalkyl group, or a carbon-carbon unsaturated double bond. A monovalent organic group.)

Although the resin composition of the present invention can exhibit high i-line transmittance, specifically, the i-line transmittance is preferably 1% or more and preferably 10% or more at a film thickness of 20 μm. Is more preferable and 15% or more is even more preferable. If it is lower than 1%, the i-line does not reach the deep part, and radicals are not sufficiently generated. Therefore, there is a possibility that the photosensitive characteristics deteriorate, for example, the resin exudes from the substrate side of the film during development.

The i-line transmittance can be measured by measuring a transmission UV spectrum using U-3310 spctrophotometer (manufactured by Hitachi, Ltd.).

R ¹ in the general formula (1) has a structure derived from, for example, tetracarboxylic dianhydride used as a raw material. The tetracarboxylic dianhydride used is not particularly limited, but pyromellitic dianhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride is used from the viewpoint of excellent heat resistance in electronic parts. 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride, 2,2 ′, 3,3′-biphenyltetracarboxylic dianhydride, 3,3 ′, 4,4′-benzophenone tetra Carboxylic dianhydride, 3,3 ′, 4,4′-diphenyl ether tetracarboxylic dianhydride, 3,3 ′, 4,4′-diphenylsulfone tetracarboxylic dianhydride, 1,2,5,6 -Naphthalenetetracarboxylic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, 2,3,5,6-pyridine Tetracarboxylic dianhydride 3,4,9,10-perylenetetracarboxylic dianhydride, 3,3 ′, 4,4′-tetraphenylsilanetetracarboxylic dianhydride, 2,2-bis (3,4-dicarboxyl) Phenyl) hexafluoropropane dianhydride, 2,2-bis {4 '-(2,3-dicarboxyphenoxy) phenyl} propane dianhydride, 2,2-bis {4'-(3,4-dicarboxy) Phenoxy) phenyl} propane dianhydride, 1,1,1,3,3,3-hexafluoro-2,2′-bis {4 ′-(2,3-dicarboxyphenoxy) phenyl} propane dianhydride, 1,1,1,3,3,3-hexafluoro-2,2′-bis {4- (3,4-dicarboxyphenoxy) phenyl} propane dianhydride, 4,4′-oxydiphthalic dianhydride 4,4'-sulfonyldiphthalic acid di- Aromatic tetracarboxylic dianhydride such as anhydride is preferred. These can be used alone or in combination of two or more.

The tetravalent organic group in R ¹ is preferably any of the tetravalent organic groups represented by the following general formulas (2a) to (2e).

(In the general formula (2d), X and Y each independently represent a divalent group or a single bond that is not conjugated to the benzene ring to which each is bonded. In the general formula (2e), Z represents an ether bond (—O— Or a sulfide bond (—S—).)

The “divalent group not conjugated with the benzene ring to be bonded” of X and Y in the general formula (2d) is —O—, —S—, or a divalent group represented by the following formula.

(Wherein R ⁸ is a carbon atom or a silicon atom. R ⁹ is independently a hydrogen atom or a halogen atom selected from a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
n = 3. )

Moreover, R < ² > in General formula (1) is a structure originating in the diamine used as a raw material, for example.
The diamine used in the present invention is not particularly limited, and examples thereof include 4,4′-diaminodiphenyl ether, 4,4′-diaminodiphenylmethane, 4,4′-diaminodiphenyl sulfone, and 4,4′-diaminodiphenyl. Sulfide, benzidine, m-phenylenediamine, p-phenylenediamine, 1,5-naphthalenediamine, 2,6-naphthalenediamine, bis (4-aminophenoxyphenyl) sulfone, bis (3-aminophenoxyphenyl) sulfone, bis ( Diamines having aromatic rings such as 4-aminophenoxy) biphenyl, bis [4- (4-aminophenoxy) phenyl] ether, 1,4-bis (4-aminophenoxy) benzene, 1,3-diamino-4-hydroxy Benzene, 1,3-diamino-5-hydroxybenzene, 3,3′-diamino-4,4′-dihydroxybiphenyl, 4,4′-diamino-3,3′-dihydroxybiphenyl, bis (3-amino-4-hydroxyphenyl) propane, bis (4-amino-3 -Hydroxyphenyl) propane, bis (3-amino-4-hydroxyphenyl) sulfone, bis (4-amino-3-hydroxyphenyl) sulfone, bis (3-amino-4-hydroxyphenyl) hexafluoropropane, bis (4 -Amino-3-hydroxyphenyl) diamine having a hydroxyl group and an aromatic ring such as hexafluoropropane, 2,5-diaminobenzoic acid, 3,4-diaminobenzoic acid, 3,5-diaminobenzoic acid, 2,5- Diaminoterephthalic acid, bis (4-amino-3-carboxyphenyl) methylene, bis (4-amino-3- Carboxyl groups and aromatic rings such as carboxyphenyl) ether, 4,4′-diamino-3,3′-dicarboxybiphenyl, 4,4′-diamino-5,5′-dicarboxy-2,2′-dimethylbiphenyl The diamine etc. which have these are mentioned, You may use these individually or in combination of 2 or more types.

The divalent organic group in R ² is preferably a divalent organic group represented by the following general formula (5) or (6).

In the formula, R ¹⁰ to R ¹⁷ each independently represents a hydrogen atom, a halogen atom or a monovalent organic group, and at least one of R ¹⁰ to R ¹⁷ is a halogen atom or a halogenated alkyl group. R ¹⁸ and R ¹⁹ are each independently a halogen atom or a halogenated alkyl group.
Examples of the monovalent organic group represented by R ¹⁰ to R ¹⁷ include an alkyl group having 1 to 20 carbon atoms (such as a methyl group), a halogenated alkyl group having 1 to 20 carbon atoms (such as a trifluoromethyl group), and 1 to Examples thereof include an alkoxy group having 20 alkyl groups (such as a methoxy group).
The halogen atom is preferably a fluorine atom.
The halogenated alkyl group is preferably a perfluoroalkyl group.
The alkyl group and the halogenated alkyl group preferably have 1 to 6 carbon atoms.

As R ³ and R ⁴ in the general formula (1), for example, each independently a hydrogen atom, an alkyl group having 1 to 20 carbon atoms (preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms), A cycloalkyl group or hydrocarbon group having 3 to 20 carbon atoms (preferably 5 to 15 carbon atoms, more preferably 6 to 12 carbon atoms) is a (meta) having 1 to 10 carbon atoms (preferably 1 to 6 carbon atoms). ) A hydrocarbon group containing an acryloxy group. The hydrocarbon group containing a (meth) acryloxy group is preferably a (meth) acryloxy group-containing alkyl group.

Examples of the alkyl group having 1 to 20 carbon atoms include methyl group, ethyl group, n-propyl group, 2-propyl group, n-butyl group, n-hexyl group, n-heptyl group, n-decyl group, and n-dodecyl group. Examples of the cycloalkyl group having 3 to 20 carbon atoms include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, and an adamantyl group.
Examples of the hydrocarbon group containing a (meth) acryloxy group having 1 to 10 carbon atoms in the hydrocarbon group include acryloxyethyl group, acryloxypropyl group, acryloxybutyl group, methacryloxyethyl group, methacryloxypropyl group, And a methacryloxybutyl group.

In the resin composition of the present invention, at least one of R ³ and R ⁴ has a carbon-carbon unsaturated double bond such as a (meth) acryloxyalkyl group, and generates a radical upon irradiation with actinic rays. In combination with the compound, it is preferable to enable crosslinking between molecular chains by radical polymerization.

The component (a) can be synthesized by addition polymerization of tetracarboxylic dianhydride and diamine. Moreover, after making the tetracarboxylic dianhydride represented by Formula (10) into a diester derivative, it converts into the acid chloride represented by Formula (11), and makes it react with the diamine represented by Formula (12). Can be synthesized. These synthesis methods can be selected from known methods.

(Where R ¹ to R ⁴ are the same as in formula (1).)

The tetracarboxylic acid mono (di) ester dichloride represented by the general formula (11) includes a tetracarboxylic dianhydride represented by the general formula (10) and a compound represented by the following general formula (13). Can be obtained by reacting a tetracarboxylic acid mono (di) ester obtained by reacting with a chlorinating agent such as thionyl chloride or dichlorooxalic acid.

(Here, R ²² in the formula is an alkyl group, a cycloalkyl group, or a monovalent organic group having a carbon-carbon unsaturated double bond.)

The chlorinating agent is usually synthesized by reacting 2 mole equivalents with respect to 1 mol of tetracarboxylic acid mono (di) ester in the presence of twice as much basic compound as the chlorinating agent. In order to control the molecular weight of the polyimide precursor, the equivalent weight may be adjusted as appropriate. The equivalent amount of the chlorinating agent is preferably 1.5 to 2.5 molar equivalents, more preferably 1.6 to 2.4 molar equivalents, and even more preferably 1.7 to 2.3 molar equivalents. If the amount is less than 1.5 molar equivalents, the molecular weight of the polyimide precursor is low, so that low stress after curing may not be sufficiently exhibited. May remain in the polyimide precursor in a large amount, and the electrical insulation of the cured polyimide may be reduced.
As the basic compound, for example, pyridine, 4-dimethylaminopyridine, triethylamine and the like can be used, and the amount is preferably 1.5 to 2.5 times the amount of the chlorinating agent, and 1.7 to 2. The amount is more preferably 4 times, and more preferably 1.8 to 2.3 times. If the amount is less than 1.5 times, the molecular weight of the polyimide precursor is low, and the stress after curing may not be sufficiently reduced. If the amount is more than 2.5 times, the polyimide precursor may be colored.

Further, the tetracarboxylic dianhydride and the compound of the general formula (13) may be reacted in the presence of a basic catalyst. Examples of the basic catalyst include 1,8-diazabicyclo [5.4.0] undec-7-ene, 1,5-diazabicyclo [4.3.0] non-5-ene and the like.

Among the compounds represented by the general formula (13), examples of the alcohol include alcohols in which R ²² is an alkyl group having 1 to 20 carbon atoms or a cycloalkyl group having 3 to 20 carbon atoms.
Examples of the monovalent organic group having a carbon-carbon unsaturated double bond represented by R ²² include a (meth) acryloxyalkyl group having an alkyl group having 1 to 10 carbon atoms.
Specifically, methanol, ethanol, n-propanol, isopropanol, n-butanol, 2-butanol, t-butanol, hexanol, cyclohexanol, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, Examples include 2-hydroxypropyl methacrylate, 2-hydroxybutyl acrylate, 2-hydroxybutyl methacrylate, 4-hydroxybutyl acrylate, and 4-hydroxybutyl methacrylate. These may be used singly or in combination of two or more.

The weight average molecular weight of the polyimide precursor is preferably 10,000 to 100,000, more preferably 15,000 to 100,000, and still more preferably 20,000 to 85,000. From the viewpoint of sufficiently reducing the stress after curing, the weight average molecular weight is preferably 10,000 or more. From the viewpoint of increasing the solubility in a solvent and preventing the viscosity of the solution from increasing and handling properties from decreasing, it is preferably 100,000 or less. In addition, a weight average molecular weight can be measured by the gel permeation chromatography method, and can be calculated | required by converting using a standard polystyrene calibration curve.

The molar ratio of tetracarboxylic dianhydride and diamine in the synthesis of the polyimide precursor is usually 1.0, but in order to control the molecular weight and the terminal residue, the molar ratio is in the range of 0.7 to 1.3. Ratio may be used. When the molar ratio is 0.7 or less or 1.3 or more, the molecular weight of the obtained polyimide precursor becomes small, and the low stress property after curing may not be sufficiently exhibited.

The addition polymerization and condensation reaction, and the synthesis of the diester derivative and acid chloride are preferably performed in an organic solvent. As the organic solvent to be used, a polar solvent that completely dissolves the polyimide precursor to be synthesized is preferable. N-methyl-2-pyrrolidone, N, N-dimethylacetamide, N, N-dimethylformamide, dimethyl sulfoxide, tetramethyl Examples include urea, hexamethylphosphoric triamide, γ-butyrolactone, and the like.

In addition to the above polar solvents, ketones, esters, lactones, ethers, halogenated hydrocarbons, hydrocarbons and the like can also be used.

(B) Component: Compound Represented by General Formula (2) The resin composition of the present invention is a compound represented by the following general formula (2) as component (b) from the viewpoint of negative pattern forming properties. Containing. The component (b) reacts with the unsaturated double bond of the components (b) or (a) by radicals generated by actinic ray irradiation.

(In the formula, R ⁵ represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R ⁶ is a monovalent organic group not containing a (meth) acryl group.)

R ⁶ in the formula (2) is preferably a monovalent organic group not containing a (meth) acryl group, a hydroxyl group, or an amino group.
Examples of the monovalent organic group not containing the (meth) acryl group of R ⁶ include a group having a piperidine skeleton, a substituted or unsubstituted aminoalkyl group, a group having a polycyclic hydrocarbon group, and an aromatic hydrocarbon group. And a group having a nitrogen-containing heterocyclic group, a linear or branched alkyl polyethylene glycol residue, a cyclic alkyl polyethylene glycol residue, a substituted or unsubstituted phenyl polyethylene glycol residue, and the like.

The compound represented by the general formula (2) can be used without particular limitation. For example, piperidin-4-yl (meth) acrylate, 1-methylpiperidin-4-yl (meth) acrylate, 2,2,6 , 6-tetramethylpiperidin-4-yl (meth) acrylate, 1,2,2,6,6-pentamethylpiperidin-4-yl (meth) acrylate, (piperidin-4-yl) methyl (meth) acrylate, Piperidine skeleton-containing (meth) acrylates such as 2- (piperidin-4-yl) ethyl (meth) acrylate;
Aminoethyl (meth) acrylate, N-methylaminoethyl (meth) acrylate, N, N-dimethylaminoethyl (meth) acrylate, N-ethylaminoethyl (meth) acrylate, N, N-diethylaminoethyl (meth) acrylate, Aminopropyl (meth) acrylate, N-methylaminopropyl (meth) acrylate, N, N-dimethylaminopropyl (meth) acrylate, N-ethylaminopropyl (meth) acrylate, N, N-diethylaminopropyl (meth) acrylate, etc. Substituted or unsubstituted aminoalkyl (meth) acrylates of
Norbornyl (meth) acrylate, isobornyl (meth) acrylate, norbornanyl (meth) acrylate, dicyclopentenyl (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate, dicyclopentanyl (meth) acrylate, dicyclopentanyloxy Polycyclic hydrocarbon group-containing (meth) acrylates such as ethyl (meth) acrylate and tricyclodecane dimethylol (meth) acrylate;
Aromatic hydrocarbon group-containing (meth) acrylates such as benzyl (meth) acrylate;
Nitrogen-containing heterocyclic group-containing (meth) acrylates such as 2- (1,2-cyclohexacarboximido) ethyl (meth) acrylate;
2-ethylhexyl polyethylene glycol mono (meth) acrylate, pentyl polyethylene glycol mono (meth) acrylate, isopentyl polyethylene glycol mono (meth) acrylate, neopentyl polyethylene glycol mono (meth) acrylate, hexyl polyethylene glycol mono (meth) acrylate, heptyl Polyethylene glycol mono (meth) acrylate, octyl polyethylene glycol mono (meth) acrylate, nonyl polyethylene glycol mono (meth) acrylate, decyl polyethylene glycol mono (meth) acrylate, undecyl polyethylene glycol mono (meth) acrylate, dodecyl polyethylene glycol mono ( (Meth) acrylate, tridecyl polyethylene glycol (Meth) acrylate, tetradecyl polyethylene glycol mono (meth) acrylate, pentadecyl polyethylene glycol mono (meth) acrylate, hexadecyl polyethylene glycol mono (meth) acrylate, heptadecyl polyethylene glycol mono (meth) acrylate, octadecyl polyethylene glycol mono ( Linear or branched alkyl polyethylene glycol mono (meth) acrylates such as (meth) acrylate, nonadecyl polyethylene glycol mono (meth) acrylate, icosyl polyethylene glycol mono (meth) acrylate;
Cyclopropyl polyethylene glycol mono (meth) acrylate, cyclobutyl polyethylene glycol mono (meth) acrylate, cyclopentyl polyethylene glycol mono (meth) acrylate, cyclohexyl polyethylene glycol mono (meth) acrylate, cycloheptyl polyethylene glycol mono (meth) acrylate, cyclooctyl Cyclic alkyl polyethylene glycol mono (meth) acrylates such as polyethylene glycol mono (meth) acrylate, cyclononyl polyethylene glycol mono (meth) acrylate, cyclodecyl polyethylene glycol mono (meth) acrylate; and non-substituted or non-substituted such as nonylphenoxy polyethylene glycol acrylate Substituted phenyl polyethylene glycol mono (meta ) Acrylates. These may be used alone or in combination of two or more.

Among them, linear or branched alkyl polyethylene glycol mono (meth) acrylate, aromatic hydrocarbon group-containing (meth) acrylate, polycyclic hydrocarbon group-containing (meth) acrylate, nitrogen-containing heterocyclic group-containing ( (Meth) acrylate and substituted or unsubstituted phenyl polyethylene glycol mono (meth) acrylate, nonylphenoxypolyethylene glycol (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate, dicyclopentanyl (meth) acrylate, benzyl (meth) ) Acrylate or 2- (1,2-cyclohexacarboximido) ethyl (meth) acrylate is more preferred from the viewpoint of excellent photocurability.

The component (b) can also be used in combination with one having a vinyl group such as vinyl norbornene or vinyl norbornane.

Among the above, from the viewpoint of suppressing the outgas generation from the cured film, it is preferable to use a compound having a molecular weight of 300 or less. More specifically, it is preferably in the range of 100 to 300, more preferably in the range of 110 to 300, still more preferably in the range of 120 to 280, and particularly preferably in the range of 130 to 260. A range of 150 to 255 is extremely preferable.

Among them, a linear or branched alkyl polyethylene glycol mono (meth) acrylate having a molecular weight of 300 or less, an aromatic hydrocarbon group-containing (meth) acrylate, a polycyclic hydrocarbon group-containing (meth) acrylate, Of the nitrogen-containing heterocyclic group-containing (meth) acrylates and substituted or unsubstituted phenyl polyethylene glycol mono (meth) acrylates, those having a molecular weight of 300 or less are preferred, and among the nonylphenoxypolyethylene glycol (meth) acrylates, the molecular weight is 300. The following, dicyclopentenyloxyethyl (meth) acrylate, dicyclopentanyl (meth) acrylate, benzyl (meth) acrylate or 2- (1,2-cyclohexacarboximido) ethyl (meth) acrylate are photocured Excellent In, more preferable.

Specifically, for example, dicyclopentenyloxyethyl (meth) acrylate, dicyclopentanyl (meth) acrylate, benzyl (meth) acrylate) or 2- (1,2-cyclohexacarboximido) ethyl (meth) acrylate 2- (1,2-cyclohexacarboximido) ethyl acrylate is more preferable.

The component (b) is preferably contained in an amount of 1 to 100 parts by weight, more preferably 3 to 80 parts by weight, and further preferably 5 to 50 parts by weight with respect to 100 parts by weight of the component (a). The content is preferably 5 to 25 parts by mass, particularly preferably 5 to 15 parts by mass.

In the case of containing other crosslinking agent, the blending amount is preferably 1 to 100 parts by weight, more preferably 2 to 75 parts by weight, with respect to 100 parts by weight of component (a). The amount is more preferably 5 parts by mass, and particularly preferably 5 to 30 parts by mass. If the amount is 1 part by mass or more, good photosensitive properties can be imparted.

(C) Component: Compound that generates radicals by actinic rays (a) At least a part of R ³ and / or R ⁴ in the polyimide precursor of component is a monovalent organic group having a carbon-carbon unsaturated double bond. In this case, a photosensitive resin composition can be obtained by dissolving it in a solvent in combination with a compound that generates radicals when irradiated with actinic rays.

Examples of the component (c) include N, N′-tetraalkyl-4,4′-, such as an oxime ester compound, benzophenone, and N, N′-tetramethyl-4,4′-diaminobenzophenone (Michler ketone) described later. Fragrances such as diaminobenzophenone, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-propanone-1 Quinones fused with aromatic rings such as aromatic ketones and alkylanthraquinones, benzoin ether compounds such as benzoin alkyl ether, benzoin compounds such as benzoin and alkylbenzoin, and benzyl derivatives such as benzyldimethyl ketal.
Among these, an oxime ester compound is preferable because it is excellent in sensitivity and gives a good pattern.

The oxime ester compound is represented by the compound represented by the following formula (7), the compound represented by the following formula (8), or the following general formula (9) from the viewpoint of obtaining good sensitivity and a remaining film ratio. A compound is preferred.

In the formula (7), R and R ₁ each represent an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 4 to 10 carbon atoms, a phenyl group, or a tolyl group, and an alkyl group having 1 to 8 carbon atoms, carbon It is preferably a cycloalkyl group having 4 to 6 carbon atoms, a phenyl group or a tolyl group, more preferably an alkyl group having 1 to 4 carbon atoms, a cycloalkyl group having 4 to 6 carbon atoms, a phenyl group or a tolyl group. More preferably a methyl group, a cyclopentyl group, a phenyl group or a tolyl group.
R ₂ represents a hydrogen atom, —OH, —COOH, —O (CH ₂ ) OH, —O (CH ₂ ) ₂ OH, —COO (CH ₂ ) OH or —COO (CH ₂ ) ₂ OH, hydrogen It is preferably an atom, —O (CH ₂ ) OH, —O (CH ₂ ) ₂ OH, —COO (CH ₂ ) OH or —COO (CH ₂ ) ₂ OH, a hydrogen atom, —O (CH ₂ ) More preferably, it is ₂ OH or —COO (CH ₂ ) ₂ OH. Incidentally, the aromatic ring may have a substituent group other than R _2.

In formula (8), each R ₃ independently represents an alkyl group having 1 to 6 carbon atoms, and is preferably a propyl group.
R ₄ represents —NO ₂ or —C (═O) Ar (wherein Ar represents an aryl group), and Ar is preferably a tolyl group.
R ₅ and R ₆ each represent an alkyl group having 1 to 12 carbon atoms, a phenyl group or a tolyl group, and preferably a methyl group, a phenyl group or a tolyl group.
The aromatic ring may have a substituent other than R ₄ .

In the formula (9), R ₇ represents an alkyl group having 1 to 6 carbon atoms, and is preferably an ethyl group.
R ₈ is an organic group having an acetal bond, and is preferably a substituent corresponding to R ⁸ included in the compound represented by the following formula (9-1).
R ₉ and R ₁₀ each represent an alkyl group having 1 to 12 carbon atoms, a phenyl group or a tolyl group, preferably a methyl group, a phenyl group or a tolyl group, and more preferably a methyl group.
The aromatic ring may have a substituent other than R ₈ .

Examples of the compound represented by the above formula (7) include a compound represented by the following formula (7-1) and a compound represented by the following formula (7-2). The compound represented by the following formula (7-1) is available as IRGACURE OXE-01 (trade name, manufactured by BASF Corporation).

Examples of the compound represented by the above formula (8) include a compound represented by the following formula (8-1). This compound is available as DFI-091 (trade name, manufactured by Daitokemix Co., Ltd.).

Examples of the compound represented by the above formula (9) include a compound represented by the following formula (9-1). It is available as Adekaoptomer N-1919 (trade name, manufactured by ADEKA Corporation).

As other oxime ester compounds, the following compounds are preferably used.

Moreover, the following compounds can also be used as the component (c).

The content of the component (c) is preferably 0.01 to 30 parts by mass, more preferably 0.03 to 20 parts by mass with respect to 100 parts by mass of the component (a). The amount is more preferably from 05 to 15 parts by mass, and particularly preferably from 0.5 to 10 parts by mass. When the blending amount is 0.01 parts by mass or more, the exposed part is sufficiently cross-linked, and the photosensitive characteristics are further improved, and when it is 30 parts by mass or less, the heat resistance of the cured film tends to be improved.

(D) Component (Adhesion Auxiliary Agent): Organosilane Compound The resin composition of the present invention contains an organosilane compound as the component (d) in order to improve adhesion to a cured silicon substrate or the like. Also good. Organic silane compounds include γ-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, vinyltriethoxysilane, vinyltrimethoxysilane, γ-glycidoxypropyltriethoxysilane, and γ-glycidoxypropyltrimethoxy. Silane, γ-methacryloxypropyltrimethoxysilane, γ-acryloxypropyltrimethoxysilane, 3-ureidopropyltriethoxysilane, 3-mercaptopropyltrimethoxysilane, triethoxysilylpropylethylcarbamate, 3- (triethoxysilyl) Propyl succinic anhydride, phenyltriethoxysilane, phenyltrimethoxysilane, N-phenyl-3-aminopropyltrimethoxysilane, 3-triethoxysilyl-N- (1,3-dimethylbutyryl ) Propylamine, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane 1-isocyanatomethyltrimethylsilane, 1-isocyanatomethyltriethylsilane, 1-isocyanatomethyltripropylsilane, 1-isocyanatomethyltributyl Silane, 1-isocyanatomethyltrimethoxysilane, 1-isocyanatomethyldimethoxymethylsilane, 1-isocyanatomethylmethoxydimethylsilane, 1-isocyanatomethyltriethoxysilane, 1-isocyanatomethyltripropoxysilane, 1-isocyanate Natomethyltributoxysilane, 1-isocyanatomethyldiethoxyethylsilane, 3-isocyanatopropyltrimethylsilane, 3-isocyanatopropyltriethylsilane, 3 Isocyanatopropyltrimethoxysilane, 3-isocyanatopropyldimethoxymethylsilane, 3-isocyanatopropylmethoxydimethylsilane, 3-isocyanatopropyltriethoxysilane, 3-isocyanatopropyldiethoxyethylsilane, 3-isocyanatopropylethoxy Diethylsilane, 6-isocyanatohexyltrimethoxysilane, 6-isocyanatohexyldimethoxymethylsilane, 6-isocyanatohexylmethoxydimethylsilane, 6-isocyanatohexyltriethoxysilane, 6-isocyanatohexyldiethoxyethylsilane, 6 -Isocyanatohexylethoxydiethylsilane, bis (2-hydroxyethyl) -3-aminopropyltriethoxysilane, N, N-bis (2- Hydroxyethyl) -N, N-bis (trimethoxysilylpropyl) ethylenediamine, N- (hydroxymethyl) -N-methylaminopropyltrimethoxysilane, 7-triethoxysilylpropoxy-5-hydroxyflavone, N- (3- Triethoxysilylpropyl) -4-hydroxybutyramide, 2-hydroxy-4- (3methyldiethoxysilylpropoxy) diphenylketone, 1,3-bis (4-hydroxybutyl) tetramethyldisiloxane, 3- (N- Acetyl-4-hydroxypropyloxy) propyltriethoxysilane, hydroxymethyltriethoxysilane, γ-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, vinyltriethoxysilane, vinyltrimethoxysilane, γ-glycidoxy Propyltriethoxysilane, γ-glycidoxypropyltrimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, triethoxysilylpropylethylcarbamate, N- (3-triethoxysilylpropyl) Ot -Butyl carbamate and the like. The blending amount is appropriately adjusted so as to obtain a desired effect.
Of these, bis (2-hydroxyethyl) -3-aminopropyltriethoxysilane is preferably used.

(E) Component: Solvent A solvent can be used as the component (e) in the resin composition of the present invention, if necessary.
The component (e) is preferably a polar solvent that completely dissolves the polyimide precursor, such as N-methyl-2-pyrrolidone, N, N-dimethylacetamide, N, N-dimethylformamide, dimethyl sulfoxide, tetramethylurea, hexa Examples include methylphosphoric triamide, γ-butyrolactone, δ-valerolactone, γ-valerolactone, cyclohexanone, cyclopentanone, propylene glycol monomethyl ether acetate, propylene carbonate, ethyl lactate, 1,3-dimethyl-2-imidazolidinone. It is done. These may be used alone or in combination of two or more.

The content of the component (e) is not particularly limited, but is usually preferably 50 to 1000 parts by mass, more preferably 100 to 500 parts by mass with respect to 100 parts by mass of the component (a).

In addition, the resin composition of the present invention may contain a radical polymerization inhibitor or a radical polymerization inhibitor in order to ensure good storage stability. Examples of radical polymerization inhibitors or radical polymerization inhibitors include p-methoxyphenol, diphenyl-p-benzoquinone, benzoquinone, hydroquinone, pyrogallol, phenothiazine, resorcinol, orthodinitrobenzene, paradinitrobenzene, metadinitrobenzene, phenanthraquinone, Examples thereof include N-phenyl-2-naphthylamine, cuperone, 2,5-toluquinone, tannic acid, parabenzylaminophenol, nitrosamines and the like. These may be used alone or in combination of two or more.

The blending amount when containing a radical polymerization inhibitor or radical polymerization inhibitor is preferably 0.01 to 30 parts by mass, and 0.01 to 10 parts by mass with respect to 100 parts by mass of the polyimide precursor. More preferred is 0.05 to 5 parts by mass. If the blending amount is 0.01 parts by mass or more, the storage stability becomes better, and if it is 30 parts by mass or less, the heat resistance of the cured film can be further improved.

The resin composition of the present invention may contain a bifunctional or higher photopolymerizable compound as long as the effects of the present invention are not impaired. Examples of the bifunctional or higher functional photopolymerizable compound include tetraethylene glycol dimethacrylate.
The amount of the bifunctional or higher photopolymerizable compound is preferably 1 to 10 parts by mass, more preferably 1 to 8 parts by mass with respect to 100 parts by mass of the polyimide precursor. More preferably, it is 1 to 5 parts by mass.

The resin composition of the present invention is substantially composed of the components (a) to (c) and optionally at least one of the components (d), (e), a radical polymerization inhibitor and a radical polymerization inhibitor. It may be composed of only these components. “Substantially” means that the above components are 95% by mass or more, or 98% by mass or more with respect to the entire composition.

<Method for producing cured film and patterned cured film>
The cured film of the present invention is formed from the above resin composition.
Moreover, the pattern cured film of this invention is a pattern cured film formed with the above-mentioned resin composition.

The method for producing a cured pattern film of the present invention includes a step of applying the above resin composition on a substrate and drying to form a coating film, and developing the coating film after irradiating the coating film formed in the above step with actinic rays. It includes a step of obtaining a pattern resin film and a step of heat-treating the pattern resin film.

Hereinafter, each process of the manufacturing method of a pattern cured film is demonstrated first.
The manufacturing method of the pattern cured film of this invention includes the process of apply | coating the above-mentioned resin composition on a board | substrate, and drying and forming a coating film. Examples of the method for applying the resin composition on the substrate include an immersion method, a spray method, a screen printing method, and a spin coating method. Examples of the base material include a silicon wafer, a metal substrate, and a ceramic substrate.

In the drying process, a non-adhesive coating film can be formed by removing the solvent by heating. In the drying process, an apparatus such as DATAPLATE (Digital Hotplate) manufactured by PMC Co., Ltd. can be used. The drying temperature is preferably 90 to 130 ° C., and the drying time is preferably 100 to 400 seconds.

The manufacturing method of the pattern cured film of this invention includes the process of developing after irradiating the actinic ray to the coating film formed at the said process, and obtaining a pattern resin film. Thereby, a resin film on which a desired pattern is formed can be obtained.
Although the resin composition of the present invention is suitable for i-line exposure, ultraviolet rays, far ultraviolet rays, visible rays, electron beams, X-rays, and the like can be used as the active rays to be irradiated.

The developer is not particularly limited, but is a flame retardant solvent such as 1,1,1-trichloroethane, an aqueous alkali solution such as an aqueous solution of sodium carbonate and an aqueous solution of tetramethylammonium hydroxide, N, N-dimethylformamide, dimethyl sulfoxide, Good solvents such as N, N-dimethylacetamide, N-methyl-2-pyrrolidone, cyclopentanone, γ-butyrolactone, and acetic acid esters, and these good solvents and poor solvents such as lower alcohols, water, and aromatic hydrocarbons A mixed solvent or the like is used. After development, rinsing with a poor solvent is performed as necessary.

The manufacturing method of the pattern cured film of this invention includes the process of heat-processing a pattern resin film.
This heat treatment can be performed using an apparatus such as a vertical diffusion furnace manufactured by Koyo Lindberg, and is preferably performed at a heating temperature of 80 to 400 ° C., and the heating time is preferably 5 to 300 minutes. By this step, imidation of the polyimide precursor in the resin composition can be advanced to obtain a patterned cured film containing a polyimide resin.
The heating temperature is more preferably 250 to 300 ° C, further preferably 260 to 290 ° C. The heating time is more preferably 120 to 280 minutes, and further preferably 180 to 270 minutes.

The method for producing a cured film of the present invention includes a step of applying a resin composition on a substrate and drying to form a coating film, and a step of heat-treating the coating film. The process of forming a coating film and the process of heat-treating can be carried out in the same manner as in the method for producing a patterned cured film. The cured film of the present invention may be a cured film that is not patterned.

The cured film or patterned cured film of the present invention thus obtained can be used as a surface protective layer, an interlayer insulating layer, a rewiring layer or the like of a semiconductor device.
FIG. 1 is a schematic cross-sectional view of a semiconductor device having a rewiring structure according to an embodiment of the present invention.
The semiconductor device of this embodiment has a multilayer wiring structure. An Al wiring layer 2 is formed on the interlayer insulating layer (interlayer insulating film) 1, an insulating layer (insulating film) 3 (for example, a P-SiN layer) is further formed on the Al wiring layer 2, and a surface protective layer of the device A (surface protective film) 4 is formed. A rewiring layer 6 is formed from the pad portion 5 of the wiring layer 2 and extends to an upper portion of the core 8 which is a connection portion with a conductive ball 7 formed of solder, gold or the like as an external connection terminal. Further, a cover coat layer 9 is formed on the surface protective layer 4. The rewiring layer 6 is connected to the conductive ball 7 through the barrier metal 10, and a collar 11 is provided to hold the conductive ball 7. When a package having such a structure is mounted, an underfill 12 may be interposed in order to further relieve stress.

The cured film or pattern cured film of the present invention can be used for so-called package applications such as the cover coat layer 9, the rewiring core 8, the ball collar 11 such as solder, the underfill 12, and the like.

The cured film or pattern cured film of the present invention has the cured film or pattern cured film of the present invention because it has excellent adhesion to a metal layer, a sealant, and the like, as well as excellent copper migration resistance and a high stress relaxation effect. The semiconductor element is excellent in reliability.

The electronic component of the present invention is particularly limited except that it has a cover coat using the cured film or pattern cured film of the present invention, a core for rewiring, a ball collar such as solder, an underfill used in flip chips, etc. Instead, it can take various structures.

Hereinafter, the present invention will be specifically described by way of examples, but the present invention is not limited by these.

Synthesis Example 1 (Synthesis of pyromellitic acid-hydroxyethyl methacrylate diester)
In a 0.5 liter plastic bottle, pyromellitic dianhydride 43.624 g (200 mmol), 2-hydroxyethyl methacrylate 54.919 g (401 mmol), hydroquinone 0. 220 g was dissolved in 394 g of N-methylpyrrolidone. After adding a catalytic amount of 1,8-diazabicycloundecene, the mixture was stirred at room temperature (25 ° C.) for 24 hours, esterified, and pyromellitic acid-hydroxyethyl A methacrylate diester (PMDA (HEMA)) solution was obtained.

Synthesis Example 2 (Synthesis of 3,3′-4,4′-biphenyltetracarboxylic acid diester)
30.893 g (105 mmol) of 3,3′-4,4′-biphenyltetracarboxylic dianhydride and 2-hydroxy methacrylate were dried in a 0.5-liter plastic bottle for 24 hours in a dryer at 160 ° C. 28.833 g (210 mmol) of ethyl and 0.110 g of hydroquinone were dissolved in 239 g of N-methylpyrrolidone, and after adding a catalytic amount of 1,8-diazabicycloundecene, the mixture was stirred at room temperature (25 ° C.) for 24 hours. Esterification was performed to obtain a 3,3′-4,4′-biphenyltetracarboxylic acid-hydroxyethyl methacrylate diester (s-BPDA (HEMA)) solution.

Synthesis Example 3 (Synthesis of 4,4′-oxydiphthalic acid diester)
In a 0.5 liter plastic bottle, 49.634 g (160 mmol) of 4,4′-oxydiphthalic acid, 44.976 g (328 mmol) of 2-hydroxyethyl methacrylate and hydroquinone 0 were dried in a dryer at 160 ° C. for 24 hours. 176 g was dissolved in 378 g of N-methylpyrrolidone, and after adding a catalytic amount of 1,8-diazabicycloundecene, the mixture was stirred at room temperature (25 ° C.) for 48 hours to perform esterification, and 4,4′- An oxydiphthalic acid-hydroxyethyl methacrylate diester (ODPA (HEMA)) solution was obtained.

Synthesis Example 4 (Synthesis of Polymer 1)
In a 0.5 liter flask equipped with a stirrer and a thermometer, 195.564 g of the PMDA (HEMA) solution obtained in Synthesis Example 1 and 58.652 g of the ODPA (HEMA) solution obtained in Synthesis Example 3 were placed. Under ice cooling, 25.9 g (217.8 mmol) of thionyl chloride was added dropwise using a dropping funnel so that the reaction solution temperature was kept at 10 ° C. or lower. After the addition of thionyl chloride was completed, the reaction was carried out for 2 hours under ice cooling to obtain a solution of PMDA (HEMA) and ODPA (HEMA) acid chloride. Next, using a dropping funnel, 31.696 g (99.0 mmol) of 2,2′-bis (trifluoromethyl) benzidine, 34.457 g (435.6 mmol) of pyridine, 0.076 g (0.693 mmol) of hydroquinone -A solution of 90.211 g of methylpyrrolidone was added dropwise while cooling with ice so that the temperature of the reaction solution did not exceed 10 ° C. The reaction solution was dropped into distilled water, and the precipitate was collected by filtration and dried under reduced pressure to obtain a polyamic acid ester. The weight average molecular weight determined by standard polystyrene conversion was 34,000. This was polymer 1 (pyromellitic acid-hydroxyethyl methacrylate diester / 4,4′-oxydiphthalic acid-hydroxyethyl methacrylate diester / 2,2′-bis (trifluoromethyl) benzidine condensation polymer (PMDA / ODPA / TFMB)). And 1 g of polymer 1 is dissolved in 1.5 g of N-methylpyrrolidone, applied onto a glass substrate by spin coating, and heated on a hot plate at 100 ° C. for 180 seconds to evaporate the solvent to form a 20 μm thick coating film. did. At this time, the i-line transmittance of the obtained coating film was 30%.

Synthesis Example 5 (Synthesis of polymer 2)
282.125 g of the s-BPDA (HEMA) solution obtained in Synthesis Example 2 was placed in a 0.5 liter flask equipped with a stirrer and a thermometer, and then 25.9 g (217.8 mmol) of thionyl chloride under ice-cooling. ) Was dropped using a dropping funnel so that the reaction solution temperature was kept at 10 ° C. or lower. After completion of the dropwise addition of thionyl chloride, the mixture was stirred for 1 hour under ice-cooling to obtain a solution of s-BPDA (HEMA) chloride. Next, using a dropping funnel, 31.696 g (99.0 mmol) of 2,2′-bis (trifluoromethyl) benzidine, 34.457 g (435.6 mmol) of pyridine, 0.076 g (0.693 mmol) of hydroquinone -A solution of 90.211 g of methylpyrrolidone was added dropwise while cooling with ice so that the temperature of the reaction solution did not exceed 10 ° C. The reaction solution was dropped into distilled water, and the precipitate was collected by filtration and dried under reduced pressure to obtain a polyamic acid ester. The weight average molecular weight determined by standard polystyrene conversion was 85,000. This is polymer 2 (3,3′-4,4′-biphenyltetracarboxylic acid-hydroxyethyl methacrylate diester / 2,2′-bis (trifluoromethyl) benzidine condensation polymer (BPDA / TFMB)). 1 g of polymer 2 is dissolved in 1.5 g of N-methylpyrrolidone, applied onto a glass substrate by spin coating, and heated on a hot plate at 100 ° C. for 180 seconds to evaporate the solvent to form a 20 μm thick coating film. did. At this time, the i-line transmittance of the obtained coating film was 60%.

Synthesis Example 6 (Synthesis of Polymer 3)
In a 0.5 liter flask equipped with a stirrer and a thermometer, 244.455 g of the PMDA (HEMA) solution obtained in Synthesis Example 1 was placed, and then 25.9 g (217.8 mmol) of thionyl chloride was added under ice cooling. The reaction solution was dropped using a dropping funnel so that the temperature of the reaction solution was kept at 10 ° C. or lower. After the dropwise addition of thionyl chloride was completed, stirring was performed for 1 hour under ice cooling to obtain a solution of PMDA (HEMA) chloride. Next, using a dropping funnel, 31.696 g (99.0 mmol) of 2,2′-bis (trifluoromethyl) benzidine, 34.457 g (435.6 mmol) of pyridine, 0.076 g (0.693 mmol) of hydroquinone -A solution of 90.211 g of methylpyrrolidone was added dropwise while cooling with ice so that the temperature of the reaction solution did not exceed 10 ° C. The reaction solution was dropped into distilled water, and the precipitate was collected by filtration and dried under reduced pressure to obtain a polyamic acid ester. The weight average molecular weight calculated | required by standard polystyrene conversion was 32,000. This is designated as Polymer 3 (pyromellitic acid-hydroxyethyl methacrylate diester / 2,2'-bis (trifluoromethyl) benzidine condensation polymer (PMDA / TFMB)). 1 g of Polymer 3 is dissolved in 1.5 g of N-methylpyrrolidone, applied onto a glass substrate by spin coating, and heated on a hot plate at 100 ° C. for 180 seconds to evaporate the solvent to form a 20 μm thick coating film. did. At this time, the i-ray transmittance of the obtained coating film was 17%.

Synthesis Example 7 (Synthesis of polymer 4)
In a 0.5 liter flask equipped with a stirrer and a thermometer, 169.275 g of the s-BPDA (HEMA) solution obtained in Synthesis Example 2 and 72.7776 g of the ODPA (HEMA) solution obtained in Synthesis Example 3 were placed. Thereafter, 25.9 g (217.8 mmol) of thionyl chloride was added dropwise using a dropping funnel while maintaining the reaction solution temperature at 10 ° C. or lower under ice cooling. After completion of the dropwise addition of thionyl chloride, the mixture was stirred for 1 hour under ice cooling to obtain a chloride solution of s-BPDA (HEMA) and ODPA (HEMA). Then, using a dropping funnel, and then using a dropping funnel, 21.017 g (99.0 mmol) of 2,2′-dimethylbenzidine, 34.457 g (435.6 mmol) of pyridine, 0.076 g (0.693 mmol) of hydroquinone N-methylpyrrolidone (59.817 g) was added dropwise while cooling with ice so that the temperature of the reaction solution did not exceed 10 ° C. The reaction solution was dropped into distilled water, and the precipitate was collected by filtration and dried under reduced pressure to obtain a polyamic acid ester. The weight average molecular weight determined by standard polystyrene conversion was 35,000. The polymer 4 (3,3′-4,4′-biphenyltetracarboxylic acid-hydroxyethyl methacrylate diester / 4,4′-oxydiphthalic acid-hydroxyethyl methacrylate diester / 2,2′-dimethylbenzidine condensation polymer (BPDA / ODPA / DMB)). 1 g of polymer 4 is dissolved in 1.5 g of N-methylpyrrolidone, applied onto a glass substrate by spin coating, and heated on a hot plate at 100 ° C. for 180 seconds to evaporate the solvent to form a 20 μm thick coating film. did. At this time, the i-line transmittance of the obtained coating film was 8%.

Synthesis Example 8 (Synthesis of polymer 5)
In a 0.5 liter flask equipped with a stirrer and a thermometer, 181.944 g of the ODPA (HEMA) solution obtained in Synthesis Example 3 was placed, and then 25.9 g (217.8 mmol) of thionyl chloride was added under ice cooling. The reaction solution was dropped using a dropping funnel so that the temperature of the reaction solution was kept at 10 ° C. or lower. After completion of the dropwise addition of thionyl chloride, the mixture was stirred for 1 hour under ice cooling to obtain a solution of ODPA (HEMA) chloride. Then, using a dropping funnel, 21.017 g (99.0 mmol) of 2,2′-dimethylbenzidine, 34.457 g (435.6 mmol) of pyridine, 0.076 g (0.693 mmol) of hydroquinone and 59. The 817 g solution was added dropwise while cooling with ice so that the temperature of the reaction solution did not exceed 10 ° C. The reaction solution was dropped into distilled water, and the precipitate was collected by filtration and dried under reduced pressure to obtain a polyamic acid ester. The weight average molecular weight determined by standard polystyrene conversion was 35,000. This is referred to as Polymer 5 (4,4′-oxydiphthalic acid-hydroxyethyl methacrylate diester / 2,2′-dimethylbenzidine condensation polymer (ODPA / DMB)). 1 g of polymer 5 is dissolved in 1.5 g of N-methylpyrrolidone, applied onto a glass substrate by spin coating, and heated on a hot plate at 100 ° C. for 180 seconds to evaporate the solvent to form a 20 μm thick coating film. did. At this time, the i-ray transmittance of the obtained coating film was 40%.

The measurement conditions of the weight average molecular weight determined by GPC standard polystyrene conversion of the polymers 1 to 5 are as follows, and the solvent [tetrahydrofuran (THF) / dimethylformamide (DMF) = 1/1 with respect to 0.5 mg of polymer ( Volume ratio)] Measured using 1 mL of solution.

Measuring device: Detector L4000UV manufactured by Hitachi, Ltd.
Pump: L6000 manufactured by Hitachi, Ltd.
C-R4A Chromatopac manufactured by Shimadzu Corporation
Measurement conditions: Column Gelpack GL-S300MDT-5x2 Eluent: THF / DMF = 1/1 (volume ratio)
LiBr (0.03 mol / L), H ₃ PO ₄ (0.06 mol / L)
Flow rate: 1.0 mL / min, detector: UV 270 nm
The i-line transmittance of polymers 1 to 5 was measured using U-3310 Spectrophotometer (manufactured by Hitachi, Ltd.).

<Examples 1 to 9, Comparative Example 1>
Components (a) to (c) and an adhesion aid were dissolved in N-methylpyrrolidone with the formulation shown in Table 1 to prepare a resin composition.
In Table 1, the numbers in parentheses in each column of the component (b), the component (c), and the adhesion assistant indicate the amount added (parts by mass) relative to 100 parts by mass of the component (a). Further, N-methylpyrrolidone was used as a solvent, and the amount used was 1.5 times (150 parts by mass) with respect to 100 parts by mass of component (a).
In the examples, as component (c), the following 1,2-octanedione, 1- [4- (phenylthio) phenyl-, 2- (O-benzoyloxime)] (IRGACURE OXE-01 manufactured by BASF Corp.) ) Was used.

Further, bis (2-hydroxyethyl) -3-aminopropyltriethoxysilane (manufactured by Gelest Co., Ltd., SIB-1140) was used as an adhesion assistant.

Table 1 shows the results of measuring the photosensitive properties (residual film ratio, resolution) during film formation for the resin compositions prepared in Examples and Comparative Examples. The evaluation method is as follows.

(Evaluation of photosensitive properties (residual film rate, resolution))
The resin composition was applied onto a 6-inch silicon wafer by spin coating, heated on a hot plate at 100 ° C. for 3 minutes to volatilize the solvent, and a coating film having a thickness of 10 μm was obtained. The development time was set twice as long as the coating film was immersed in a mixed solvent of γ-butyrolactone: butyl acetate = 7: 3 and completely dissolved. The coating film obtained by the same method was exposed to 200 mJ / cm ^{2 in} terms of i-line using an i-line stepper FPA-3000iW manufactured by Canon Inc. through a photomask. The wafer was immersed in γ-butyrolactone: butyl acetate = 7: 3 and subjected to paddle development for the above development time, and then rinsed with cyclopentanone. At this time, the film remaining ratio at the rear part of the dew was evaluated. Here, the remaining film ratio was calculated by the method of the following formula (1).

By the same method as described above, the minimum value of the mask size of the line and space pattern formed when the obtained coating film was exposed to 400 mJ / cm ^{2 in} terms of i-line through a photomask was evaluated as the resolution.

In Table 1, the component (a) is the following compound.
P1: Polymer 1 synthesized in Synthesis Example 4 (PMDA / ODPA / TFMB)
P2: Polymer 2 synthesized in Synthesis Example 5 (BPDA / TFMB)
P3: Polymer 3 synthesized in Synthesis Example 6 (PMDA / TFMB)
P4: Polymer 4 synthesized in Synthesis Example 7 (BPDA / ODPA / DMB)
P5: Polymer 5 synthesized in Synthesis Example 8 (ODPA / DMB)

In Table 1, the component (b) is a compound represented by the following structural formula.

b1: Nonylphenoxy polyethylene glycol acrylate (manufactured by Hitachi Chemical Co., Ltd., FA-318A, n (average value) = 8)
b2: Dicyclopentenyloxyethyl methacrylate (manufactured by Hitachi Chemical Co., Ltd., FA-512M)
b3: Dicyclopentanyl methacrylate (manufactured by Hitachi Chemical Co., Ltd., FA-513M)
b4: benzyl methacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., BzMA)
b5: 2- (1,2-cyclohexacarboximido) ethyl acrylate (manufactured by Toagosei Co., Ltd., M-140)
b ′: Tetraethylene glycol dimethacrylate (manufactured by Sartomer, TEGDMA)

As shown in Table 1, the resin compositions of Examples 1 to 9 use the bifunctional tetraethylene glycol dimethacrylate of Comparative Example 1, even if monofunctional (meth) acrylate is used as component (b). It has pattern characteristics comparable to those of conventional resin compositions.

<Examples 10 to 13, Comparative Example 2>
By the way, when the cured film using polyimide resin is made thicker and has a higher elastic modulus, the stress after curing is increased, the warpage of the semiconductor wafer is increased, and problems occur during transportation and wafer fixing. There is a case.

The present inventors faced the problem that when the heat curing temperature is as low as 300 ° C. or lower, outgas from the polyimide film increases in a vacuum process such as etching of the electrode portion after the polyimide cured film formation process. If outgas is generated during the process, the chamber is contaminated, which is a problem. From the viewpoint of outgas generation, the embodiments shown in Examples 10 to 12 below are preferable.

Example 10
(A) 100 parts by mass of polymer 1, (b) 10 parts by mass of 2- (1,2-cyclohexacarboximide) ethyl acrylate (manufactured by Toa Gosei Co., Ltd., M-140, molecular weight 251), (c) 1,2-octanedione, 1- [4- (phenylthio) phenyl-, 2- (O-benzoyloxime)] (IRGACURE OXE-01 manufactured by BASF Corp.), 2 parts by mass, bis (2-hydroxyethyl) ) -3-aminopropyltriethoxysilane (manufactured by Gelest Co., Ltd., SIB-1140) (3 parts by mass) was dissolved in N-methylpyrrolidone (solvent 150 parts by mass) to prepare a resin composition.
About the prepared resin composition, the photosensitive characteristic (residual film rate, resolution) at the time of film-forming, the stress after hardening, and the outgas generation amount were measured in accordance with the following evaluation method.

(Evaluation of photosensitive properties (residual film rate, resolution))
The resin composition was applied onto a 6-inch silicon wafer by spin coating, heated on a hot plate at 100 ° C. for 3 minutes to volatilize the solvent, and a coating film having a thickness of 10 μm was obtained. The development time was set twice as long as the coating film was immersed in a mixed solvent of γ-butyrolactone: butyl acetate = 7: 3 and completely dissolved. The coating film obtained by the same method was exposed to 200 mJ / cm ^{2 in} terms of i-line using an i-line stepper FPA-3000iW manufactured by Canon Inc. through a photomask. The wafer was immersed in γ-butyrolactone: butyl acetate = 7: 3 and subjected to paddle development for the above development time, and then rinsed with cyclopentanone. When the remaining film ratio of the exposed portion at this time was evaluated, it was 92%. The residual film ratio was calculated as the film thickness after development with respect to the film thickness before development.

When the minimum value of the mask dimension of the line and space pattern formed when the obtained coating film was exposed to 400 mJ / cm ^{2 in} terms of i-line through a photomask in the same manner as described above was evaluated as 8 μm. there were.

(Measurement of residual stress)
The obtained resin composition was applied onto a 6-inch silicon wafer by spin coating, heated on a hot plate at 100 ° C. for 3 minutes, and the solvent was evaporated to obtain a coating film having a thickness of 10 μm after curing. . This was cured by heating at 270 ° C. for 4 hours in a nitrogen atmosphere using a vertical diffusion furnace manufactured by Koyo Lindberg to obtain a polyimide film (cured film). The residual stress of the cured polyimide film was 22 MPa when measured at room temperature using a thin film stress measuring apparatus FLX-2320 manufactured by KLA Tencor Corporation.

(Pyrolysis gas chromatograph mass spectrometry)
A polyimide film was prepared in the same manner as the measurement of the residual stress, and a sample for pyrolysis gas chromatography mass spectrometry was obtained. After the sample was heated at 270 ° C./30 min using a Tekmar 7000HT headspace sampler, the generated gas was GC / MS (manufactured by Shimadzu Corporation, model number: GC / MS QP-2010, carrier gas: helium, 1.0 mL / min, Column: HP-5MS, Oven: heated at 40 ° C. for 5 minutes, then heated to 280 ° C. at a rate of 15 ° C./min, interface temperature: 280 ° C., ion source temperature: 250 ° C., sample injection amount: 0.1 mL) Introduced and analyzed. FIG. 2 (a) shows the measurement results. The sum of the peak area values was taken as the total amount of outgas. The sum of the peak area values was 38,375,993, and when the sum of the peak area values of Comparative Example 2 described later was 1, it was about 0.26, and the outgas was sufficiently reduced.

Example 11
The resin composition was the same as in Example 10 except that 1,2-octanedione, 1- [4- (phenylthio) phenyl-, 2- (O-benzoyloxime)] in (c) was changed to the following compound: Articles were prepared and evaluated.

In Example 11, the residual film rate was 95%, the resolution was 7 μm, and the residual stress was 22 MPa. The sum of peak area values in pyrolysis gas chromatograph mass spectrometry is 58,315,432, and when the sum of peak area values in Comparative Example 2 described later is 1, it is about 0.39, Outgas was sufficiently reduced.

Example 12
Furthermore, a resin composition was prepared and evaluated in the same manner as in Example 10 except that 5 parts by mass of tetraethylene glycol dimethacrylate (manufactured by Sartomer Co., Ltd., TEGDMA) was added.
The residual film ratio was 95%, the resolution was 7 μm, and the residual stress was 22 MPa. The sum of peak area values in pyrolysis gas chromatograph mass spectrometry is 67,924,419. When the sum of peak area values in Comparative Example 2 described later is 1, the value is about 0.45 and the outgas is sufficient. It was reduced.

Example 13
The 2- (1,2-cyclohexacarboximido) ethyl acrylate in (b) was changed to nonylphenoxy polyethylene glycol acrylate (manufactured by Hitachi Chemical Co., Ltd., FA-318A, n (average value) = 8, molecular weight 625). Except for this, a resin composition was prepared and evaluated in the same manner as in Example 10.
The residual film ratio was 89%, the resolution was 8 μm, and the residual stress was 24 MPa. The sum of peak area values in pyrolysis gas chromatograph mass spectrometry is 424, 225, 722. When the sum of peak area values in Comparative Example 2 described later is 1, it increases to about 2.84 times. Outgas increased.

Comparative Example 2
A resin composition was prepared and evaluated in the same manner as in Example 10 except that 2- (1,2-cyclohexacarboximido) ethyl acrylate in (b) was changed to tetraethylene glycol dimethacrylate (molecular weight 306). .
The residual film ratio was 92%, the resolution was 8 μm, and the residual stress was 22 MPa. The measurement result of pyrolysis gas chromatograph mass spectrometry is shown in FIG. The sum of the peak area values was 149,526,749.

Examples 10 to 12 were excellent in pattern properties, and in addition, the amount of outgas generated was small.

Experimental Example In order to investigate the cause of contamination of the chamber when the cured film after low-temperature curing was used in a vacuum process such as etching of the electrode portion, an experiment was conducted to measure the outgas emitted from the polyimide film.
In Example 10 and Comparative Example 2, a polyimide film was prepared in the same manner as the measurement of residual stress, and a cured film was used for 1 minute using a thermal decomposition apparatus (Frontier LAB PY2020D, manufactured by Frontier Laboratories Co., Ltd.). After the temperature was raised to 375 ° C. at a rate of 15 ° C., the generated gas was GC / MS (manufactured by Agilent Technologies, Inc., model number: GC / MS 5973 MSD, carrier gas: helium, 0.9 mL / min, column : UADTM-2.5N, Oven: 350 ° C.) for analysis.
The measurement result of the comparative example 2 is shown to Fig.3 (a). The broken line indicates polymer 1 and the solid line indicates TEGDMA.
The measurement result of Example 10 is shown in FIG.3 (b). The broken line indicates polymer 1 and the solid line indicates M-140.
TEGDMA in the cured film of Comparative Example 2 was gasified at around 300 ° C., but M-140 in the cured film of Example 10 was hardly gasified at 300 ° C. or higher.
At a conventional curing temperature of about 370 ° C., since the curing temperature is higher than the glass transition temperature of the cured film, the cured film once becomes a rubber-like region and releases a cross-linking agent as an outgas. When the curing temperature is lower than the glass transition temperature of the cured film, the cured film remains in a glass state, and the cured film contains an outgas component. When this film is exposed to a high vacuum, the contained crosslinking agent. Is assumed to be generated as an outgas component.

Experimental Example In order to investigate the cause of contamination of the chamber when the cured film after low-temperature curing was used in a vacuum process such as etching of the electrode portion, an experiment was conducted to measure the outgas emitted from the polyimide film.
In Example 1 and Comparative Example 2, a polyimide film was prepared in the same manner as the residual stress measurement, and a cured film was used at a temperature of 15 ° C. per minute using a thermal decomposition apparatus (Frontier LAB PY2020D, manufactured by Frontier Laboratories). After the temperature was raised to 375 ° C. at a rate, the generated gas was GC / MS (manufactured by Agilent Technologies, model number: GC / MS 5973 MSD, carrier gas: helium, 0.9 mL / min, column: UADTM-2.5N , Oven: 350 ° C.) for analysis.
The measurement result of the comparative example 2 is shown to Fig.3 (a). The broken line indicates polymer 1 and the solid line indicates TEGDMA.
The measurement result of Example 1 is shown in FIG.3 (b). The broken line indicates polymer 1 and the solid line indicates M-140.
TEGDMA in the cured film of Comparative Example 2 was gasified at around 300 ° C., but M-140 in the cured film of Example 1 was hardly gasified at 300 ° C. or higher.
At a conventional curing temperature of about 370 ° C., since the curing temperature is higher than the glass transition temperature of the cured film, the cured film once becomes a rubber-like region and releases a cross-linking agent as an outgas. When the curing temperature is lower than the glass transition temperature of the cured film, the cured film remains in a glass state, and the cured film contains an outgas component. When this film is exposed to a high vacuum, the contained crosslinking agent. Is assumed to be generated as an outgas component.

The resin composition of the present invention can be used for so-called package applications such as cover coat materials, rewiring core materials, ball color materials such as solder, underfill materials, etc., which form electronic components such as semiconductor devices. .

Although several embodiments and / or examples of the invention have been described in detail above, those skilled in the art will appreciate that these exemplary embodiments and / or embodiments are substantially without departing from the novel teachings and advantages of the invention. It is easy to make many changes to the embodiment. Accordingly, many of these modifications are within the scope of the present invention.
All the contents of the Japanese application specification that is the basis of the priority of Paris in this application are incorporated herein.

Claims (13)

1. A resin composition containing the following components (a), (b) and (c).
   (A) A polyimide precursor having a structural unit represented by the following general formula (1) (b) A compound represented by the following general formula (2) (c) A compound that generates radicals upon irradiation with actinic rays
   

   

   (Wherein R ¹ is a tetravalent organic group, R ² is a divalent organic group, R ³ and R ⁴ are each independently a hydrogen atom, an alkyl group, a cycloalkyl group, or a carbon-carbon unsaturated double bond. A monovalent organic group.)
   

   

   (In the formula, R ⁵ is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R ⁶ is a monovalent organic group not containing a (meth) acryl group.)
2. The resin composition according to claim 1, wherein the component (b) is contained in an amount of 1 to 100 parts by mass with respect to 100 parts by mass of the component (a).
3. The resin composition according to claim 1 or 2, wherein R ⁶ in the formula (2) is a monovalent organic group not containing a (meth) acryl group, a hydroxyl group, and an amino group.
4. The resin composition according to any one of claims 1 to 3, wherein the component (b) is a monofunctional photopolymerizable compound having a molecular weight of 300 or less.
5. The resin composition according to any one of claims 1 to 4, wherein at least one of R ³ and R ⁴ in the formula (1) is a monovalent organic group having a carbon-carbon unsaturated double bond. .
6. 6. The resin composition according to claim 1, wherein R ¹ in the formula (1) is any one of tetravalent organic groups represented by the following general formulas (2a) to (2e). object.
   

   

   (In the formula (2d), X and Y each independently represent a divalent group or a single bond that is not conjugated to the benzene ring to which each is bonded. In the general formula (2e), Z represents an ether bond (—O—). Or a sulfide bond (—S—).)
7. The resin composition according to any one of claims 1 to 6, wherein R ² in the formula (1) is a divalent organic group represented by the following general formula (5) or (6).
   

   

   (Wherein R ¹⁰ to R ¹⁷ each independently represents a hydrogen atom, a halogen atom or a monovalent organic group, and at least one of R ¹⁰ to R ¹⁷ is a halogen atom or a halogenated alkyl group. R ¹⁸ And R ¹⁹ each independently represents a halogen atom or a halogenated alkyl group.)
8. The resin composition according to any one of claims 1 to 7, wherein the component (c) is an oxime ester compound.
9. A cured film formed from the resin composition according to any one of claims 1 to 8.
10. A method for producing a cured film, comprising: a step of applying the resin composition according to any one of claims 1 to 8 onto a substrate and drying to form a coating film; and a step of heat-treating the coating film.
11. A cured pattern film formed from the resin composition according to any one of claims 1 to 8.
12. A step of coating the resin composition according to any one of claims 1 to 8 on a substrate and drying to form a coating film, and irradiating the coating film with an actinic ray, followed by development to form a pattern resin film The manufacturing method of a pattern cured film including the process of obtaining, and the process of heat-processing the said pattern resin film.
13. The electronic component which has the cured film of Claim 9, or the pattern cured film of Claim 11.
    
    
    

Images