WO2015046033A1 - Linear motor actuator with ball spline and method for manufacturing same - Google Patents

Linear motor actuator with ball spline and method for manufacturing same Download PDF

Info

Publication number
WO2015046033A1
WO2015046033A1 PCT/JP2014/074797 JP2014074797W WO2015046033A1 WO 2015046033 A1 WO2015046033 A1 WO 2015046033A1 JP 2014074797 W JP2014074797 W JP 2014074797W WO 2015046033 A1 WO2015046033 A1 WO 2015046033A1
Authority
WO
WIPO (PCT)
Prior art keywords
linear motor
nut
spline
ball spline
ball
Prior art date
Application number
PCT/JP2014/074797
Other languages
French (fr)
Japanese (ja)
Inventor
山中 修平
Original Assignee
Thk株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thk株式会社 filed Critical Thk株式会社
Priority to KR1020167007347A priority Critical patent/KR101666340B1/en
Priority to CN201480052416.6A priority patent/CN105594109B/en
Priority to DE112014004441.5T priority patent/DE112014004441B4/en
Publication of WO2015046033A1 publication Critical patent/WO2015046033A1/en

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/04Ball or roller bearings
    • F16C29/06Ball or roller bearings in which the rolling bodies circulate partly without carrying load
    • F16C29/068Ball or roller bearings in which the rolling bodies circulate partly without carrying load with the bearing body fully encircling the guide rail or track
    • F16C29/0683Ball or roller bearings in which the rolling bodies circulate partly without carrying load with the bearing body fully encircling the guide rail or track the bearing body encircles a rail or rod of circular cross-section, i.e. the linear bearing is not suited to transmit torque
    • F16C29/0685Ball or roller bearings in which the rolling bodies circulate partly without carrying load with the bearing body fully encircling the guide rail or track the bearing body encircles a rail or rod of circular cross-section, i.e. the linear bearing is not suited to transmit torque with balls
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/08Arrangements for covering or protecting the ways
    • F16C29/084Arrangements for covering or protecting the ways fixed to the carriage or bearing body movable along the guide rail or track
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08Structural association with bearings

Definitions

  • the present invention relates to a linear motor actuator with a ball spline having a ball spline and a method for manufacturing the same.
  • this linear motor actuator with a ball spline includes a linear motor 51 in which a drive shaft 53 linearly moves in the axial direction with respect to a main body 52, and a ball spline 47 arranged in parallel to the linear motor 51.
  • a linear motor 51 in which a drive shaft 53 linearly moves in the axial direction with respect to a main body 52
  • a ball spline 47 arranged in parallel to the linear motor 51.
  • the ball spline 47 is used to guide the linear motion of a moving body such as an electronic component with high accuracy.
  • the drive shaft 53 of the linear motor 51 and the spline shaft 46 of the ball spline 47 are connected by a head plate 48.
  • the nut 41 of the ball spline 47 is accommodated in the housing 43 and is connected to the main body 52 of the linear motor 51 via a connecting plate 49.
  • the spline shaft 46 of the ball spline 47 moves linearly together with the drive shaft 53 of the linear motor 51.
  • the main body 52 of the linear motor 51 When using a linear motor actuator with a ball spline as a uniaxial actuator for a component mounting machine, the main body 52 of the linear motor 51 is mounted on the component mounting machine. An attachment surface 52 a that is attached to the component mounting machine is formed on the main body 52 of the linear motor 51. A suction pad (not shown) for sucking a moving body such as an electronic component is provided at the tip of the spline shaft 46. The moving body linearly moves in one axial direction with the mounting surface 52a of the main body 52 of the linear motor 51 as a reference surface.
  • the main body 52 of the linear motor 51 is also provided with a sliding bearing such as a bush. However, since it is a sliding bearing, the accuracy of guiding the linear motion of the moving body cannot be increased so much. In order to improve the guidance accuracy, a ball spline 47 that guides using the rolling motion of the ball is used.
  • the nut 41 of the ball spline 47 is inserted into the hole of the housing 43 and adhered to the hole of the housing 43 using an adhesive.
  • the nut 41 of the ball spline 47 is inclined by the amount of play of the clearance in the hole of the housing 43, so that the mounting accuracy of the nut 41 with respect to the mounting surface 52 a of the main body 52 of the linear motor 51 is difficult to obtain. Therefore, there is a problem that the running parallelism of the spline shaft 46 with respect to the mounting surface 52a of the linear motor 51 is lowered.
  • the running parallelism is a numerical value indicating the allowable range of the distance from the mounting surface 52a of the main body 52 of the linear motor 51 to the spline shaft 46 regardless of the position of the linearly moving spline shaft 46. It is shown by.
  • an object of the present invention is to provide a linear motor actuator with a ball spline that can improve the running parallelism of the spline shaft with respect to the mounting surface of the main body of the linear motor, and a method for manufacturing the same.
  • an aspect of the present invention includes a linear motor in which a drive shaft linearly moves with respect to a main body, and a spline shaft that is arranged in parallel with a predetermined distance from the drive shaft of the linear motor. And a spline shaft having a nut assembled so as to be relatively movable in the axial direction via a plurality of balls, and a ball spline integrated with a housing in which a mounting portion for mounting to a mating part is formed on the nut And a first connecting member fixed to the nut of the ball spline using the mounting portion, and fixed to the drive shaft of the linear motor.
  • a linear motor actuator with a ball spline comprising: a second connecting member fixed to the spline shaft of the ball spline It is over data.
  • a linear motor in which a drive shaft linearly moves with respect to a main body, a spline shaft arranged in parallel at a predetermined distance from the drive shaft of the linear motor, and a large number of spline shafts.
  • a ball spline that has a nut assembled so as to be relatively movable in the axial direction via the ball of the ball and integrates a housing in which a mounting portion for mounting to a mating part is formed on the nut. Fixing the first connecting member to the main body portion of the linear motor and fixing the first connecting member to the nut of the ball spline using the mounting portion; and a second connecting member. Fixing the second connecting member to the spline shaft of the ball spline and fixing the second connecting member to the drive shaft of the linear motor. It is a manufacturing method of the linear motor actuator with Le splines.
  • the nut of the ball spline and the housing in which the mounting portion for mounting to the mating part is integrated, and the nut is connected to the main body of the linear motor via the first connecting member.
  • the mounting accuracy of the nut with respect to the mounting surface of the main body of the motor can be improved. Therefore, the running parallelism of the spline shaft with respect to the mounting surface of the main body portion of the linear motor can be improved.
  • FIG. 2 (a) shows a front view
  • FIG.2 (b) shows a side view
  • a perspective view of the linear motor of this embodiment (including a partial cross section)
  • FIG. 5A is a plan view of the ball spline of this embodiment
  • FIG. 5B is a front view of the ball spline of this embodiment.
  • FIG. 9 (a1) (a2) shows a prior art example
  • FIG.9 (b1) (b2) shows this implementation Shows form)
  • Perspective view of a conventional linear motor actuator with ball spline The figure which shows the nut accommodated in the housing of the conventional linear motor actuator with a ball spline
  • FIG. 1 is a perspective view of a linear motor actuator with a ball spline according to this embodiment.
  • the linear motor actuator with a ball spline according to the present embodiment includes a linear motor 1 and a ball spline 4 that is arranged in parallel at a predetermined distance from the linear motor 1.
  • the linear motor 1 includes a forcer 2 as a main body and a drive shaft 3 that moves linearly with respect to the forcer 2.
  • the forcer 2 of the linear motor 1 is formed with an attachment surface 2a for attachment to a component mounter or the like.
  • a female screw 7 is embedded in the mounting surface 2a.
  • the ball spline 4 includes a nut 5 and a spline shaft 6 supported by the nut 5 so as to be linearly movable.
  • the forcer 2 of the linear motor 1 and the nut 5 of the ball spline 4 are connected by a connecting plate 8 as a first connecting member.
  • the drive shaft 3 of the linear motor 1 and the spline shaft 6 of the ball spline 4 are connected by a head plate 9 as a second connecting member.
  • a suction pad (not shown) for sucking a moving body such as an electronic component is provided at the tip of the spline shaft 6.
  • a suction pad (not shown) for sucking a moving body such as an electronic component is provided at the tip of the spline shaft 6.
  • the head plate 9 is formed in a square plate shape.
  • the connecting plate 8 is provided with a through hole 8a through which the drive shaft 3 passes. A slight clearance is provided between the inner peripheral surface of the through hole 8 a and the drive shaft 3 so as to allow linear movement of the drive shaft 3.
  • the connecting plate 8 is provided with a through hole 8b through which the spline shaft 6 passes. An end cap 32a, which will be described later, is fitted into the through hole 8b.
  • the connecting plate 8 is formed with a plurality of through holes through which the bolts 24 are passed.
  • the connecting plate 8 is fixed to the forcer 2 of the linear motor 1 and the nut 5 of the ball spline 4 by connecting means such as a bolt 24.
  • FIG. 2 shows the forcer 2 of the linear motor 1 and the nut 5 of the ball spline 4 fixed to the connecting plate 8.
  • FIG. 2 (a) shows these front views
  • FIG. 2 (b) shows these side views.
  • a part of nut 5 is shown with sectional drawing.
  • the nut 5 includes a metal nut body 31 and a pair of end caps 32 a and 32 b as a pair of lid members attached to both end surfaces of the nut body 31 in the axial direction.
  • a seal 33 is attached to the outside of the end caps 32 a and 32 b in order to prevent foreign matter from entering the inside of the nut body 31 and to hold the lubricant inside the nut body 31.
  • the nut body 31 When viewed in a cross section perpendicular to the axial direction, the nut body 31 has a quadrangular outer shape (see FIG. 1).
  • the end caps 32a and 32b and the seal 33 are formed in a circular shape.
  • the nut body 31 is integrated with a housing in which a female thread 34 as an attachment portion is formed. That is, the nut main body 31 is a single part manufactured from a single material, and is not a two-part joined by bonding. One end surface 31 a in the axial direction of the nut body 31 is in contact with the connecting plate 8. An internal thread 34 for fixing the nut body 31 to the connecting plate 8 is formed on the end surface 31 a of the nut body 31.
  • the bolt 24 is screwed into the female screw 34.
  • the female screw 34 is disposed at the four corners of the end surface 31a of the nut main body 31 having a quadrangular outer shape and outside the circular end cap 32a.
  • the end cap 32 a protrudes in the axial direction from the end surface 31 a of the nut body 31 and enters the inside of the connection plate 8.
  • the connecting plate 8 has a through hole 8b into which the end cap 32a and the seal 33 are inserted.
  • An end cap 32 b and a seal 33 are attached to the other end surface 31 b in the axial direction of the nut body 31.
  • a cylindrical wall portion 31 c protrudes from the end surface 31 b of the nut body 31 in the axial direction.
  • the wall portion 31 c is made of the same metal as the nut body 31 and is formed integrally with the nut body 31.
  • the wall 31c surrounds the periphery of the cylindrical side surface of the end cap 31b.
  • the tip end surface in the axial direction of the wall portion 31 c protrudes in the axial direction from the end surface of the seal 33.
  • a female thread 36 is formed on the front end surface 31c1 of the wall portion 31c (see FIGS. 9B1 and 9B2).
  • the female screw 36 is disposed at the four corners of the wall portion 31c having a rectangular outer shape and outside the end cap 32b having a circular outer shape.
  • FIG. 3 is a perspective view (partially sectional view) of the linear motor 1 of the present embodiment.
  • the drive shaft 3 includes a hollow rod 11 and a plurality of magnets 12 accommodated in the hollow space of the rod 11.
  • the rod 11 is made of a nonmagnetic material such as stainless steel.
  • the magnet 12 is formed in a cylindrical shape and is magnetized in the axial direction.
  • a plurality of magnets 12 are arranged in the hollow space of the rod 11 so that the same poles face each other.
  • a magnetic pole block 13 made of a magnetic material such as iron is interposed between the magnets 12.
  • the drive shaft 3 is surrounded by a plurality of coils 15 arranged in the center line direction. A magnetic clearance is interposed between the drive shaft 3 and the coil 15.
  • the coil 15 is a copper wire spirally wound and is held by a coil holder 16.
  • a substrate 17 for wiring to the plurality of coils 15 is provided on the upper surface of the coil holder 16.
  • the coil 15, the coil holder 16, and the substrate 17 are covered with the forcer 2.
  • the forcer 2 constitutes the main body of the linear motor 1.
  • the forcer 2 is formed, for example, by insert molding in which the coil 15, the coil holder 16, and the substrate 17 are set in an injection mold and a molten resin or special ceramics is allowed to flow.
  • the forcer 2 is formed with an attachment surface 2a for attachment to a component mounting machine.
  • the mounting surface 2a is provided with a female screw 7 and a positioning recess into which a positioning pin is inserted.
  • End members 19a and 19b are provided at both ends in the center line direction of the forcer 2.
  • the end members 19a and 19b are provided with bushes 21 for guiding the drive shaft 3 to move in the axial direction.
  • the bush 21 is made of resin.
  • the drive shaft 3 slides on the inner peripheral surface of the bush 21.
  • the bush 21 prevents the drive shaft 3 from contacting the coil 15 and has a role of interposing a magnetic clearance therebetween.
  • One end member 19 a is formed with a female screw (not shown) for fixing the connecting plate 8.
  • a sensor 22 (see FIG. 1) for detecting the position of the drive shaft 3 is attached to the other end member 19b.
  • a plurality of columnar magnets 12 are arranged so that the same poles face each other, that is, the N pole and the N pole are opposed to each other.
  • a plurality of coils 15 are stacked around the drive shaft 3.
  • the coil 15 is a three-phase coil composed of U, V, and W phases.
  • FIG. 4 shows a perspective view of the ball spline 4.
  • the ball spline 4 includes a spline shaft 6 and a nut 5 that is assembled to the spline shaft 6 through a large number of balls so as to be relatively movable in the axial direction.
  • the nut 5 includes a nut body 31 and end caps 32 a and 32 b as lid members attached to both end surfaces of the nut body 31 in the axial direction.
  • the nut body 31 has a quadrangular outer shape over the entire length of the nut body 31 in the axial direction.
  • FIG. 5 (a) is a plan view of the ball spline 4
  • FIG. 5 (b) is a front view of the ball spline 4 viewed from the axial direction.
  • a pair of end caps 32a and 32b are attached to both end faces 31a and 31b in the axial direction of the nut body 31 (see FIG. 6).
  • One end cap 32 a is exposed from the nut body 31, and the other end cap 32 b is embedded in the wall portion 31 c of the nut body 31.
  • FIG. 6 shows a cross-sectional view along the axial direction of the ball spline 4
  • FIG. 7 shows a cross-sectional view orthogonal to the axial direction of the ball spline 4.
  • a ball rolling groove 35 facing the spline groove 6 a of the spline shaft 6 is formed in the nut body 31.
  • a ball return portion 36 is formed in the nut body 31 in parallel with the ball rolling groove 35.
  • the ball return portion 36 also includes a groove facing the spline shaft 6.
  • the end caps 32 a and 32 b are formed with a U-shaped direction changing portion 37 that connects the end of the ball rolling groove 35 and the end of the ball return portion 36.
  • FIG. 6 shows a cross-sectional view along the axial direction of the ball spline 4
  • FIG. 7 shows a cross-sectional view orthogonal to the axial direction of the ball spline 4.
  • the direction changing portion 37 also includes a groove facing the spline shaft 6. As shown in FIG. 8, a large number of balls 38 are arranged in a ball circulation path including a ball rolling groove 35, a ball return portion 36, and a pair of direction changing portions 37.
  • the ball 38 rolls between the spline groove 6a and the ball rolling groove 35 while receiving a compressive load.
  • the ball 38 rolled to one end of the ball rolling groove 35 enters the direction changing portion 37, is released from the load and turns 180 °, and moves the ball returning portion 36 in the opposite direction. Then, after entering the direction changing portion 37 on the opposite side, the ball enters the original ball rolling groove 35 again.
  • FIGS. 9 (a1) and 9 (a2) show a conventional linear motor actuator with a ball spline
  • FIGS. 9 (b1) and 9 (b2) show a linear motor actuator with a ball spline of this embodiment.
  • FIGS. 9A1 and 9B1 are side views of a linear motor actuator with a ball spline
  • FIGS. 9A2 and 9B2 are front views.
  • the nut body 31 has a cross-sectional outer shape formed in a square shape, and female screws 34 are formed in the four corners of the quadrilateral, so that the nut body 31 has a cross-sectional outer shape formed in a circular shape compared to the radial direction. The dimensions of can also be reduced.
  • the nut 5 can be provided with a greasing hole that has been difficult in the prior art, and the nut 5 can be easily replaced even when it is broken.
  • the conventional linear motor actuator with a ball spline requires a screw 46 for attaching the lid 42, so that it is attached for attaching other parts to the lid 42. Surfaces and female threads cannot be provided.
  • the end cap 32b and the seal 33 are embedded inside the wall portion 31c of the nut 5.
  • the attachment surface and the internal thread 36 can be provided on the front end surface 31c1 of the wall portion 31c of the fifth wall portion 31c, so that the user can easily attach other components.
  • a coil is provided in the main body portion of the linear motor and a magnet is provided in the drive shaft.
  • a magnet may be provided in the main body portion and a coil may be provided in the drive shaft.
  • both end caps may be surrounded by the nut wall.
  • the tip end surface of the wall portion of the nut can be fixed to the connecting plate.
  • SYMBOLS 1 Linear motor, 2 ... Forcer (body part), 2a ... Mounting surface, 3 ... Drive shaft, 4 ... Ball spline, 5 ... Nut, 6 ... Spline shaft, 6a ... Spline groove, 8 ... Connection plate (1st Connecting member), 9 ... head plate (second connecting member), 31 ... nut body, 31a, 31b ... end face of the nut body, 31c ... wall part of the nut body, 31c1 ... tip end face of the wall part of the nut body, 32a , 32b ... End cap, 34 ... Female screw (mounting part), 35 ... Ball rolling groove, 36 ... Ball return part, 38 ... Ball

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)
  • Transmission Devices (AREA)
  • Bearings For Parts Moving Linearly (AREA)

Abstract

Provided is a linear motor actuator with a ball spline, in which the traveling parallelism of a spline shaft with respect to an attachment surface of the main body of a linear motor can be improved. The linear motor actuator with the ball spline according to the present invention comprises: a linear motor (1) in which a drive shaft (3) moves linearly with respect to a main body portion (2); a ball spline (4) having a spline shaft (6) and a nut (5) and integrating the nut (5) and a housing on which an attachment portion (34) through which the housing is attached to the other party's component is formed, said spline shaft (6) being disposed in parallel with the drive shaft (3) of the linear motor (1) and apart therefrom by a predetermined distance, said nut (5) being assembled to the spline shaft (6) via a large number of balls (38) so as to be movable in a shaft direction; a first coupling member (8) fixed to the main body portion (2) of the linear motor (1) and also fixed to the nut (5) of the ball spline (4) by using the attachment portion (34); and a second coupling member (9) fixed to the drive shaft (3) of the linear motor (1) and also fixed to the spline shaft (6) of the ball spline (4).

Description

ボールスプライン付きリニアモータアクチュエータ及びその製造方法Linear motor actuator with ball spline and manufacturing method thereof
 本発明は、ボールスプラインを備えるボールスプライン付きリニアモータアクチュエータ及びその製造方法に関する。 The present invention relates to a linear motor actuator with a ball spline having a ball spline and a method for manufacturing the same.
 出願人はこの種のボールスプライン付きリニアモータアクチュエータとして、特許文献1に記載のボールスプライン付きリニアモータアクチュエータを提案している。図10に示すように、このボールスプライン付きリニアモータアクチュエータは、本体部52に対して駆動軸53が軸方向に直線運動するリニアモータ51と、リニアモータ51に平行に配置されるボールスプライン47と、を備え、例えば部品実装機の一軸アクチュエータとして用いられる。ボールスプライン47は電子部品等の移動体の直線運動を高精度に案内するために使用される。リニアモータ51の駆動軸53とボールスプライン47のスプライン軸46とはヘッドプレート48で連結される。ボールスプライン47のナット41はハウジング43に収容され、リニアモータ51の本体部52に連結プレート49を介して連結される。リニアモータ51の駆動軸53が直線運動すると、ボールスプライン47のスプライン軸46がリニアモータ51の駆動軸53と一緒に直線運動する。 The applicant has proposed a linear motor actuator with a ball spline described in Patent Document 1 as this type of linear motor actuator with a ball spline. As shown in FIG. 10, this linear motor actuator with a ball spline includes a linear motor 51 in which a drive shaft 53 linearly moves in the axial direction with respect to a main body 52, and a ball spline 47 arranged in parallel to the linear motor 51. Are used as, for example, a uniaxial actuator of a component mounter. The ball spline 47 is used to guide the linear motion of a moving body such as an electronic component with high accuracy. The drive shaft 53 of the linear motor 51 and the spline shaft 46 of the ball spline 47 are connected by a head plate 48. The nut 41 of the ball spline 47 is accommodated in the housing 43 and is connected to the main body 52 of the linear motor 51 via a connecting plate 49. When the drive shaft 53 of the linear motor 51 moves linearly, the spline shaft 46 of the ball spline 47 moves linearly together with the drive shaft 53 of the linear motor 51.
 ボールスプライン付きリニアモータアクチュエータを部品実装機の一軸アクチュエータとして用いる場合、リニアモータ51の本体部52が部品実装機に装着される。リニアモータ51の本体部52には、部品実装機に取り付けられる取付け面52aが形成される。スプライン軸46の先端部には、電子部品等の移動体を吸着するための吸着パッド(図示せず)が設けられる。移動体はリニアモータ51の本体部52の取付け面52aを基準面として一軸方向に直線運動する。リニアモータ51の本体部52にもブッシュ等のすべり軸受が設けられるが、すべり軸受であるがゆえに移動体の直線運動の案内精度をそれほど高くすることができない。案内精度を向上させるために、ボールの転がり運動を利用して案内するボールスプライン47が用いられる。 When using a linear motor actuator with a ball spline as a uniaxial actuator for a component mounting machine, the main body 52 of the linear motor 51 is mounted on the component mounting machine. An attachment surface 52 a that is attached to the component mounting machine is formed on the main body 52 of the linear motor 51. A suction pad (not shown) for sucking a moving body such as an electronic component is provided at the tip of the spline shaft 46. The moving body linearly moves in one axial direction with the mounting surface 52a of the main body 52 of the linear motor 51 as a reference surface. The main body 52 of the linear motor 51 is also provided with a sliding bearing such as a bush. However, since it is a sliding bearing, the accuracy of guiding the linear motion of the moving body cannot be increased so much. In order to improve the guidance accuracy, a ball spline 47 that guides using the rolling motion of the ball is used.
特開2010-57357号公報JP 2010-57357 A
 ところで、従来のボールスプライン付きリニアモータアクチュエータにおいては、図11に示すように、ボールスプライン47のナット41をハウジング43の穴に挿入し、接着剤を用いてハウジング43の穴内に接着していた。しかし、ハウジング43の穴内のすきまの遊び分だけ、ボールスプライン47のナット41が傾くおそれがあり、リニアモータ51の本体部52の取付け面52aに対するナット41の取付け精度が出しにくい。それゆえ、リニアモータ51の取付け面52aに対するスプライン軸46の走り平行度が低下するという課題がある。ここで、走り平行度とは、リニアモータ51の本体部52の取付け面52aからスプライン軸46までの距離が、直線運動するスプライン軸46の位置に係わらずどの程度の許容範囲にあるかを数値で示したものである。 By the way, in the conventional linear motor actuator with ball spline, as shown in FIG. 11, the nut 41 of the ball spline 47 is inserted into the hole of the housing 43 and adhered to the hole of the housing 43 using an adhesive. However, there is a possibility that the nut 41 of the ball spline 47 is inclined by the amount of play of the clearance in the hole of the housing 43, so that the mounting accuracy of the nut 41 with respect to the mounting surface 52 a of the main body 52 of the linear motor 51 is difficult to obtain. Therefore, there is a problem that the running parallelism of the spline shaft 46 with respect to the mounting surface 52a of the linear motor 51 is lowered. Here, the running parallelism is a numerical value indicating the allowable range of the distance from the mounting surface 52a of the main body 52 of the linear motor 51 to the spline shaft 46 regardless of the position of the linearly moving spline shaft 46. It is shown by.
 そこで、本発明は、リニアモータの本体部の取付け面に対するスプライン軸の走り平行度を向上させることができるボールスプライン付きリニアモータアクチュエータ及びその製造方法を提供することを目的とする。 Accordingly, an object of the present invention is to provide a linear motor actuator with a ball spline that can improve the running parallelism of the spline shaft with respect to the mounting surface of the main body of the linear motor, and a method for manufacturing the same.
 上記課題を解決するために、本発明の一態様は、本体部に対して駆動軸が直線運動するリニアモータと、前記リニアモータの前記駆動軸から所定距離だけ離れて平行に配置されるスプライン軸、及び前記スプライン軸に多数のボールを介して軸方向に相対的に移動可能に組み付けられるナットを有し、前記ナットに相手部品に取り付けるための取付け部が形成されるハウジングを一体化するボールスプラインと、前記リニアモータの前記本体部に固定されると共に、前記取付け部を用いて前記ボールスプラインの前記ナットに固定される第一の連結部材と、前記リニアモータの前記駆動軸に固定されると共に、前記ボールスプラインの前記スプライン軸に固定される第二の連結部材と、を備えるボールスプライン付きリニアモータアクチュエータである。 In order to solve the above-described problems, an aspect of the present invention includes a linear motor in which a drive shaft linearly moves with respect to a main body, and a spline shaft that is arranged in parallel with a predetermined distance from the drive shaft of the linear motor. And a spline shaft having a nut assembled so as to be relatively movable in the axial direction via a plurality of balls, and a ball spline integrated with a housing in which a mounting portion for mounting to a mating part is formed on the nut And a first connecting member fixed to the nut of the ball spline using the mounting portion, and fixed to the drive shaft of the linear motor. A linear motor actuator with a ball spline comprising: a second connecting member fixed to the spline shaft of the ball spline It is over data.
 本発明の他の態様は、本体部に対して駆動軸が直線運動するリニアモータと、前記リニアモータの前記駆動軸から所定距離だけ離れて平行に配置されるスプライン軸、及び前記スプライン軸に多数のボールを介して軸方向に相対的に移動可能に組み付けられるナットを有し、前記ナットに相手部品に取り付けるための取付け部が形成されるハウジングを一体化するボールスプラインと、を用意する工程と、第一の連結部材を前記リニアモータの前記本体部に固定すると共に、前記第一の連結部材を前記取付け部を用いて前記ボールスプラインの前記ナットに固定する工程と、第二の連結部材を前記リニアモータの前記駆動軸に固定すると共に、前記第二の連結部材を前記ボールスプラインの前記スプライン軸に固定する工程と、を備えるボールスプライン付きリニアモータアクチュエータの製造方法である。 In another aspect of the present invention, a linear motor in which a drive shaft linearly moves with respect to a main body, a spline shaft arranged in parallel at a predetermined distance from the drive shaft of the linear motor, and a large number of spline shafts. A ball spline that has a nut assembled so as to be relatively movable in the axial direction via the ball of the ball and integrates a housing in which a mounting portion for mounting to a mating part is formed on the nut. Fixing the first connecting member to the main body portion of the linear motor and fixing the first connecting member to the nut of the ball spline using the mounting portion; and a second connecting member. Fixing the second connecting member to the spline shaft of the ball spline and fixing the second connecting member to the drive shaft of the linear motor. It is a manufacturing method of the linear motor actuator with Le splines.
 本発明によれば、ボールスプラインのナットと相手部品に取り付けるための取付け部が形成されるハウジングとを一体化し、ナットを第一の連結部材を介してリニアモータの本体部に連結するので、リニアモータの本体部の取付け面に対するナットの取付け精度を向上させることができる。したがって、リニアモータの本体部の取付け面に対するスプライン軸の走り平行度を向上させることができる。 According to the present invention, the nut of the ball spline and the housing in which the mounting portion for mounting to the mating part is integrated, and the nut is connected to the main body of the linear motor via the first connecting member. The mounting accuracy of the nut with respect to the mounting surface of the main body of the motor can be improved. Therefore, the running parallelism of the spline shaft with respect to the mounting surface of the main body portion of the linear motor can be improved.
本発明の一実施形態のボールスプライン付きリニアモータアクチュエータの斜視図The perspective view of the linear motor actuator with a ball spline of one embodiment of the present invention. 本実施形態の連結プレートに固定されるリニアモータの本体部及びナットを示す図(図2(a)は正面図を示し、図2(b)は側面図を示す)The figure which shows the main-body part and nut of a linear motor fixed to the connection plate of this embodiment (FIG. 2 (a) shows a front view, FIG.2 (b) shows a side view) 本実施形態のリニアモータの斜視図(一部断面を含む)A perspective view of the linear motor of this embodiment (including a partial cross section) 本実施形態のボールスプラインの斜視図The perspective view of the ball spline of this embodiment 図5(a)は本実施形態のボールスプラインの平面図、図5(b)は本実施形態のボールスプラインの正面図FIG. 5A is a plan view of the ball spline of this embodiment, and FIG. 5B is a front view of the ball spline of this embodiment. 本実施形態のボールスプラインの軸方向に沿った断面図Sectional drawing along the axial direction of the ball spline of this embodiment 本実施形態のボールスプラインの軸方向に直交する断面図Sectional drawing orthogonal to the axial direction of the ball spline of this embodiment 本実施形態のボールスプラインのボール循環路の模式図Schematic diagram of ball circulation path of ball spline of this embodiment 従来のボールスプライン付きリニアモータアクチュエータと本実施形態のボールスプライン付きリニアモータアクチュエータとを比較する図(図9(a1)(a2)は従来例を示し、図9(b1)(b2)は本実施形態を示す)The figure which compares the conventional linear motor actuator with a ball spline and the linear motor actuator with a ball spline of this embodiment (FIG. 9 (a1) (a2) shows a prior art example, FIG.9 (b1) (b2) shows this implementation Shows form) 従来のボールスプライン付きリニアモータアクチュエータの斜視図Perspective view of a conventional linear motor actuator with ball spline 従来のボールスプライン付きリニアモータアクチュエータのハウジングに収容されたナットを示す図The figure which shows the nut accommodated in the housing of the conventional linear motor actuator with a ball spline
 以下、添付図面を参照して本発明の一実施形態のボールスプライン付きリニアモータアクチュエータを説明する。図1は本実施形態のボールスプライン付きリニアモータアクチュエータの斜視図を示す。本実施形態のボールスプライン付きリニアモータアクチュエータは、リニアモータ1と、リニアモータ1から所定距離だけ離れて平行に配置されるボールスプライン4と、を備える。 Hereinafter, a linear motor actuator with a ball spline according to an embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a linear motor actuator with a ball spline according to this embodiment. The linear motor actuator with a ball spline according to the present embodiment includes a linear motor 1 and a ball spline 4 that is arranged in parallel at a predetermined distance from the linear motor 1.
 リニアモータ1は、本体部としてのフォーサ2、フォーサ2に対して直線運動する駆動軸3と、を備える。リニアモータ1のフォーサ2には、部品実装機等に取り付けるための取付け面2aが形成される。取付け面2aには、雌ねじ7が埋め込まれる。ボールスプライン4は、ナット5と、ナット5に直線運動可能に支持されるスプライン軸6と、を備える。リニアモータ1のフォーサ2とボールスプライン4のナット5とは、第一の連結部材としての連結プレート8で連結される。リニアモータ1の駆動軸3とボールスプライン4のスプライン軸6とは、第二の連結部材としてのヘッドプレート9で連結される。 The linear motor 1 includes a forcer 2 as a main body and a drive shaft 3 that moves linearly with respect to the forcer 2. The forcer 2 of the linear motor 1 is formed with an attachment surface 2a for attachment to a component mounter or the like. A female screw 7 is embedded in the mounting surface 2a. The ball spline 4 includes a nut 5 and a spline shaft 6 supported by the nut 5 so as to be linearly movable. The forcer 2 of the linear motor 1 and the nut 5 of the ball spline 4 are connected by a connecting plate 8 as a first connecting member. The drive shaft 3 of the linear motor 1 and the spline shaft 6 of the ball spline 4 are connected by a head plate 9 as a second connecting member.
 スプライン軸6の先端部には、電子部品等の移動体を吸着する吸着パッド(図示せず)が設けられる。リニアモータ1の駆動軸3を直線運動させると、駆動軸3と一緒にスプライン軸6が直線運動し、吸着パッドに吸着した移動体が直線運動する。リニアモータ1の駆動軸3の位置はセンサ22によって検出される。本実施形態のボールスプライン付きリニアモータアクチュエータは、単一の一軸アクチュエータとして使用されることもあるし、複数組み合わせて多軸アクチュエータとして使用されることもある。 A suction pad (not shown) for sucking a moving body such as an electronic component is provided at the tip of the spline shaft 6. When the drive shaft 3 of the linear motor 1 is linearly moved, the spline shaft 6 is linearly moved together with the drive shaft 3, and the moving body adsorbed on the suction pad is linearly moved. The position of the drive shaft 3 of the linear motor 1 is detected by a sensor 22. The linear motor actuator with a ball spline according to the present embodiment may be used as a single uniaxial actuator or may be used as a multi-axis actuator in combination of a plurality.
 ヘッドプレート9は四角形の板状に形成される。連結プレート8には、駆動軸3が貫通する貫通穴8aが空けられる。駆動軸3の直線運動を許容するように、貫通穴8aの内周面と駆動軸3との間にはわずかなすきまが空く。連結プレート8には、スプライン軸6が貫通する貫通穴8bが空けられる。貫通穴8bには、後述するエンドキャップ32aが嵌められる。連結プレート8には、ボルト24が通される複数の通し穴が形成される。連結プレート8は、ボルト24等の結合手段によってリニアモータ1のフォーサ2及びボールスプライン4のナット5に固定される。 The head plate 9 is formed in a square plate shape. The connecting plate 8 is provided with a through hole 8a through which the drive shaft 3 passes. A slight clearance is provided between the inner peripheral surface of the through hole 8 a and the drive shaft 3 so as to allow linear movement of the drive shaft 3. The connecting plate 8 is provided with a through hole 8b through which the spline shaft 6 passes. An end cap 32a, which will be described later, is fitted into the through hole 8b. The connecting plate 8 is formed with a plurality of through holes through which the bolts 24 are passed. The connecting plate 8 is fixed to the forcer 2 of the linear motor 1 and the nut 5 of the ball spline 4 by connecting means such as a bolt 24.
 図2は、連結プレート8に固定されるリニアモータ1のフォーサ2及びボールスプライン4のナット5を示す。図2(a)はこれらの正面図を示し、図2(b)はこれらの側面図を示す。図2(b)において、ナット5の一部を断面図で示す。ナット5は、金属製のナット本体31と、ナット本体31の軸方向の両端面に取り付けられる一対の蓋部材としての一対のエンドキャップ32a,32bと、を備える。エンドキャップ32a,32bの外側には、ナット本体31の内部に異物が入るのを防止するために、またナット本体31の内部の潤滑剤を保持するためにシール33が取り付けられる。軸方向に直交する断面で見たとき、ナット本体31は外形が四角形に形成される(図1参照)。エンドキャップ32a,32b及びシール33は円形に形成される。 FIG. 2 shows the forcer 2 of the linear motor 1 and the nut 5 of the ball spline 4 fixed to the connecting plate 8. FIG. 2 (a) shows these front views, and FIG. 2 (b) shows these side views. In FIG.2 (b), a part of nut 5 is shown with sectional drawing. The nut 5 includes a metal nut body 31 and a pair of end caps 32 a and 32 b as a pair of lid members attached to both end surfaces of the nut body 31 in the axial direction. A seal 33 is attached to the outside of the end caps 32 a and 32 b in order to prevent foreign matter from entering the inside of the nut body 31 and to hold the lubricant inside the nut body 31. When viewed in a cross section perpendicular to the axial direction, the nut body 31 has a quadrangular outer shape (see FIG. 1). The end caps 32a and 32b and the seal 33 are formed in a circular shape.
 ナット本体31は、取付け部としての雌ねじ34が形成されるハウジングと一体化される。すなわち、ナット本体31は単一の材料から製造される単一の部品であり、接着によって2部品を結合したものではない。ナット本体31の軸方向の一方の端面31aが連結プレート8に接する。ナット本体31の端面31aには、ナット本体31を連結プレート8に固定するための雌ねじ34が形成される。雌ねじ34にはボルト24がねじ込まれる。ナット本体31の軸方向から見て、雌ねじ34は外形が四角形のナット本体31の端面31aの四隅にかつ円形のエンドキャップ32aの外側に配置される。エンドキャップ32aは、ナット本体31の端面31aから軸方向に突出していて、連結プレート8の内側に入る。連結プレート8には、エンドキャップ32a及びシール33が入る貫通穴8bが空けられる。 The nut body 31 is integrated with a housing in which a female thread 34 as an attachment portion is formed. That is, the nut main body 31 is a single part manufactured from a single material, and is not a two-part joined by bonding. One end surface 31 a in the axial direction of the nut body 31 is in contact with the connecting plate 8. An internal thread 34 for fixing the nut body 31 to the connecting plate 8 is formed on the end surface 31 a of the nut body 31. The bolt 24 is screwed into the female screw 34. When viewed from the axial direction of the nut main body 31, the female screw 34 is disposed at the four corners of the end surface 31a of the nut main body 31 having a quadrangular outer shape and outside the circular end cap 32a. The end cap 32 a protrudes in the axial direction from the end surface 31 a of the nut body 31 and enters the inside of the connection plate 8. The connecting plate 8 has a through hole 8b into which the end cap 32a and the seal 33 are inserted.
 ナット本体31の軸方向の他方の端面31bには、エンドキャップ32b及びシール33が取り付けられる。ナット本体31の端面31bからは円筒状の壁部31cが軸方向に突出する。壁部31cは、ナット本体31と同一の金属製であり、ナット本体31と一体に形成される。壁部31cは、エンドキャップ31bの円筒形の側面の周囲を囲む。壁部31cの軸方向の先端面は、シール33の端面よりも軸方向に突出する。壁部31cの先端面31c1には、雌ねじ36が形成される(図9(b1)(b2)参照)。雌ねじ36は、外形が四角形の壁部31cの四隅にかつ外形が円形のエンドキャップ32bの外側に配置される。 An end cap 32 b and a seal 33 are attached to the other end surface 31 b in the axial direction of the nut body 31. A cylindrical wall portion 31 c protrudes from the end surface 31 b of the nut body 31 in the axial direction. The wall portion 31 c is made of the same metal as the nut body 31 and is formed integrally with the nut body 31. The wall 31c surrounds the periphery of the cylindrical side surface of the end cap 31b. The tip end surface in the axial direction of the wall portion 31 c protrudes in the axial direction from the end surface of the seal 33. A female thread 36 is formed on the front end surface 31c1 of the wall portion 31c (see FIGS. 9B1 and 9B2). The female screw 36 is disposed at the four corners of the wall portion 31c having a rectangular outer shape and outside the end cap 32b having a circular outer shape.
 リニアモータ1の構造は以下のとおりである。図3は本実施形態のリニアモータ1の斜視図(一部断面図)を示す。駆動軸3は、中空のロッド11と、ロッド11の中空空間に収容される複数のマグネット12と、を備える。ロッド11は、例えばステンレス等の非磁性材料からなる。マグネット12は円柱状に形成されていて、軸線方向に着磁される。ロッド11の中空空間には、複数のマグネット12が互いに同極が対向するように配列される。マグネット12間には、例えば鉄等の磁性材料からなる磁極ブロック13が介在する。 The structure of the linear motor 1 is as follows. FIG. 3 is a perspective view (partially sectional view) of the linear motor 1 of the present embodiment. The drive shaft 3 includes a hollow rod 11 and a plurality of magnets 12 accommodated in the hollow space of the rod 11. The rod 11 is made of a nonmagnetic material such as stainless steel. The magnet 12 is formed in a cylindrical shape and is magnetized in the axial direction. A plurality of magnets 12 are arranged in the hollow space of the rod 11 so that the same poles face each other. A magnetic pole block 13 made of a magnetic material such as iron is interposed between the magnets 12.
 駆動軸3は中心線方向に配列された複数のコイル15によって囲まれる。駆動軸3とコイル15との間には磁気的なすきまが介在する。コイル15は銅線を螺旋状に巻いたもので、コイルホルダ16に保持されている。コイルホルダ16の上面には複数のコイル15に配線するための基板17が設けられる。コイル15、コイルホルダ16、基板17はフォーサ2によって覆われる。フォーサ2がリニアモータ1の本体部を構成する。フォーサ2は、例えばコイル15、コイルホルダ16及び基板17を射出成型の金型にセットし、溶融した樹脂又は特殊セラミックスを流すインサート成型によって形成される。フォーサ2には、部品実装機に取り付けるための取付け面2aが形成される。取付け面2aには、雌ねじ7が設けられると共に、位置決めピンが挿入される位置決め凹部が形成される。 The drive shaft 3 is surrounded by a plurality of coils 15 arranged in the center line direction. A magnetic clearance is interposed between the drive shaft 3 and the coil 15. The coil 15 is a copper wire spirally wound and is held by a coil holder 16. A substrate 17 for wiring to the plurality of coils 15 is provided on the upper surface of the coil holder 16. The coil 15, the coil holder 16, and the substrate 17 are covered with the forcer 2. The forcer 2 constitutes the main body of the linear motor 1. The forcer 2 is formed, for example, by insert molding in which the coil 15, the coil holder 16, and the substrate 17 are set in an injection mold and a molten resin or special ceramics is allowed to flow. The forcer 2 is formed with an attachment surface 2a for attachment to a component mounting machine. The mounting surface 2a is provided with a female screw 7 and a positioning recess into which a positioning pin is inserted.
 フォーサ2の中心線方向の両端部にはエンド部材19a,19bが設けられる。エンド部材19a,19bには、駆動軸3が軸方向に移動するのを案内するブッシュ21が設けられる。ブッシュ21は樹脂製である。駆動軸3はブッシュ21の内周面を滑る。ブッシュ21は駆動軸3がコイル15に接触するのを防止し、これらの間に磁気的なすきまを介在させる役割を持つ。一方のエンド部材19aには、連結プレート8を固定するための雌ねじ(図示せず)が形成される。他方のエンド部材19bには、駆動軸3の位置を検出するセンサ22(図1参照)が取り付けられる。 End members 19a and 19b are provided at both ends in the center line direction of the forcer 2. The end members 19a and 19b are provided with bushes 21 for guiding the drive shaft 3 to move in the axial direction. The bush 21 is made of resin. The drive shaft 3 slides on the inner peripheral surface of the bush 21. The bush 21 prevents the drive shaft 3 from contacting the coil 15 and has a role of interposing a magnetic clearance therebetween. One end member 19 a is formed with a female screw (not shown) for fixing the connecting plate 8. A sensor 22 (see FIG. 1) for detecting the position of the drive shaft 3 is attached to the other end member 19b.
 ロッド11内の中空空間には、円柱状の複数のマグネット12が互いに同極が対向するように、すなわちN極とN極が、S極とS極とが対向するように配列される。駆動軸3の周囲には、複数のコイル15が積層される。コイル15はU・V・W相からなる三相コイルである。三相コイルに120°ずつ位相がずれる三相電流を流すと、駆動軸3に発生する磁束と三相コイルに流れる電流との相互作用によって駆動軸3に推力が発生する。これにより、駆動軸3がフォーサ2に対して軸方向に移動する。 In the hollow space in the rod 11, a plurality of columnar magnets 12 are arranged so that the same poles face each other, that is, the N pole and the N pole are opposed to each other. A plurality of coils 15 are stacked around the drive shaft 3. The coil 15 is a three-phase coil composed of U, V, and W phases. When a three-phase current having a phase shift of 120 ° is applied to the three-phase coil, thrust is generated on the drive shaft 3 due to the interaction between the magnetic flux generated on the drive shaft 3 and the current flowing on the three-phase coil. As a result, the drive shaft 3 moves in the axial direction with respect to the forcer 2.
 ボールスプライン4の詳細な構造は以下のとおりである。図4は、ボールスプライン4の斜視図を示す。ボールスプライン4は、スプライン軸6と、スプライン軸6に多数のボールを介して軸方向に相対的に移動可能に組み付けられるナット5と、を備える。スプライン軸6の外周面には、軸方向に伸びる複数条の、この実施形態では四条のスプライン溝6aが形成される。ナット5は、ナット本体31と、ナット本体31の軸方向の両端面に取り付けられる蓋部材としてのエンドキャップ32a,32bと、を備える。ナット本体31の断面形状の外形は、ナット本体31の軸方向の全長に渡って四角形である。 The detailed structure of the ball spline 4 is as follows. FIG. 4 shows a perspective view of the ball spline 4. The ball spline 4 includes a spline shaft 6 and a nut 5 that is assembled to the spline shaft 6 through a large number of balls so as to be relatively movable in the axial direction. On the outer peripheral surface of the spline shaft 6, a plurality of spline grooves 6a extending in the axial direction in this embodiment are formed. The nut 5 includes a nut body 31 and end caps 32 a and 32 b as lid members attached to both end surfaces of the nut body 31 in the axial direction. The nut body 31 has a quadrangular outer shape over the entire length of the nut body 31 in the axial direction.
 図5(a)はボールスプライン4の平面図、図5(b)は軸方向から見たボールスプライン4の正面図を示す。ナット本体31の軸方向の両端面31a,31bには、一対のエンドキャップ32a,32bが取り付けられる(図6参照)。一方のエンドキャップ32aはナット本体31から露出しており、他方のエンドキャップ32bはナット本体31の壁部31c内に埋め込まれる。 5 (a) is a plan view of the ball spline 4, and FIG. 5 (b) is a front view of the ball spline 4 viewed from the axial direction. A pair of end caps 32a and 32b are attached to both end faces 31a and 31b in the axial direction of the nut body 31 (see FIG. 6). One end cap 32 a is exposed from the nut body 31, and the other end cap 32 b is embedded in the wall portion 31 c of the nut body 31.
 図6はボールスプライン4の軸方向に沿った断面図を示し、図7はボールスプライン4の軸方向に直交する断面図を示す。図6に示すように、ナット本体31には、スプライン軸6のスプライン溝6aに対向するボール転走溝35が形成される。図7に示すように、ナット本体31には、ボール転走溝35に平行にボール戻し部36が形成される。ボール戻し部36もスプライン軸6に対向する溝からなる。図6に示すように、エンドキャップ32a,32bには、ボール転走溝35の端部とボール戻し部36の端部を接続するU字状の方向転換部37が形成される。図7に示すように、方向転換部37もスプライン軸6に対向する溝からなる。図8に示すように、ボール転走溝35、ボール戻し部36、一対の方向転換部37から構成されるボール循環路には、多数のボール38が配列される。 6 shows a cross-sectional view along the axial direction of the ball spline 4, and FIG. 7 shows a cross-sectional view orthogonal to the axial direction of the ball spline 4. As shown in FIG. 6, a ball rolling groove 35 facing the spline groove 6 a of the spline shaft 6 is formed in the nut body 31. As shown in FIG. 7, a ball return portion 36 is formed in the nut body 31 in parallel with the ball rolling groove 35. The ball return portion 36 also includes a groove facing the spline shaft 6. As shown in FIG. 6, the end caps 32 a and 32 b are formed with a U-shaped direction changing portion 37 that connects the end of the ball rolling groove 35 and the end of the ball return portion 36. As shown in FIG. 7, the direction changing portion 37 also includes a groove facing the spline shaft 6. As shown in FIG. 8, a large number of balls 38 are arranged in a ball circulation path including a ball rolling groove 35, a ball return portion 36, and a pair of direction changing portions 37.
 ナット5に対してスプライン軸6が直線運動すると、ボール38がスプライン溝6aとボール転走溝35との間を圧縮荷重を受けながら転がり運動する。ボール転走溝35の一端まで転がったボール38は方向転換部37に入り、荷重から開放されて180°方向転換し、ボール戻し部36を反対方向に移動する。そして、反対側の方向転換部37に入った後、再び元のボール転走溝35に入る。 When the spline shaft 6 moves linearly relative to the nut 5, the ball 38 rolls between the spline groove 6a and the ball rolling groove 35 while receiving a compressive load. The ball 38 rolled to one end of the ball rolling groove 35 enters the direction changing portion 37, is released from the load and turns 180 °, and moves the ball returning portion 36 in the opposite direction. Then, after entering the direction changing portion 37 on the opposite side, the ball enters the original ball rolling groove 35 again.
 図9を参照しつつ、本実施形態のボールスプライン付きリニアモータアクチュエータの効果を説明する。図9(a1)(a2)は従来のボールスプライン付きリニアモータアクチュエータを示し、図9(b1)(b2)は本実施形態のボールスプライン付きリニアモータアクチュエータを示す。図9(a1)(b1)はボールスプライン付きリニアモータアクチュエータの側面図を示し、図9(a2)(b2)は正面図を示す。 Referring to FIG. 9, the effect of the linear motor actuator with the ball spline of this embodiment will be described. 9 (a1) and 9 (a2) show a conventional linear motor actuator with a ball spline, and FIGS. 9 (b1) and 9 (b2) show a linear motor actuator with a ball spline of this embodiment. FIGS. 9A1 and 9B1 are side views of a linear motor actuator with a ball spline, and FIGS. 9A2 and 9B2 are front views.
 <走り平行度>図9(b1)に示すように、本実施形態のボールスプライン付きリニアモータアクチュエータによれば、ボールスプライン4のナット5とハウジングとを一体化し、ナット5を連結プレート8を介してリニアモータ1のフォーサ2に連結するので、リニアモータ1のフォーサ2の取付け面2aに対するスプライン軸6の走り平行度を向上させることができる。 <Running Parallelism> As shown in FIG. 9 (b 1), according to the linear motor actuator with ball spline of this embodiment, the nut 5 of the ball spline 4 and the housing are integrated, and the nut 5 is connected via the connecting plate 8. As a result, the running parallelism of the spline shaft 6 with respect to the mounting surface 2a of the forcer 2 of the linear motor 1 can be improved.
 <寸法>図9(a1)に示すように、従来のボールスプライン付きリニアモータアクチュエータにおいては、ナット41の飛び出し防止のために、蓋42が必要になる。このため、蓋42まで含めたハウジング43の全長Lが長くなる。これに対して、図9(b1)に示すように、本実施形態のボールスプライン付きリニアモータアクチュエータによれば、連結プレート8にナット5自体を固定するので、蓋42に相当する部分が不要になる。しかも、エンドキャップ32aが連結プレート8に埋め込まれるので、ナット5の全長Lを短くすることができる。さらに、ナット本体31の断面の外形を四角形に形成し、四角形の四隅に雌ねじ34を形成することで、ナット本体31の断面の外形を円形に形成する場合に比べて、ナット本体31の半径方向の寸法も小さくすることができる。 <Dimension> As shown in FIG. 9 (a1), the conventional linear motor actuator with ball spline requires a lid 42 to prevent the nut 41 from popping out. For this reason, the total length L of the housing 43 including the lid 42 is increased. On the other hand, as shown in FIG. 9 (b1), according to the linear motor actuator with the ball spline of this embodiment, the nut 5 itself is fixed to the connecting plate 8, so that a portion corresponding to the lid 42 is unnecessary. Become. And since the end cap 32a is embedded in the connection plate 8, the full length L of the nut 5 can be shortened. Furthermore, the nut body 31 has a cross-sectional outer shape formed in a square shape, and female screws 34 are formed in the four corners of the quadrilateral, so that the nut body 31 has a cross-sectional outer shape formed in a circular shape compared to the radial direction. The dimensions of can also be reduced.
 <組み立て性、メンテナンス性>図9(a1)に示すように、従来のボールスプライン付きリニアモータアクチュエータにおいては、ハウジング43内にナット41を挿入する際、樹脂製のエンドキャップ44又は樹脂製のシール45が金属製の連結プレート58に接する。このため、エンドキャップ44又はシール45が変形して、スプライン軸56の摺動抵抗の増加を招いたり、スプライン軸56の動きに影響を与えたりする。これに対して、図9(b2)に示すように、本実施形態のボールスプライン付きリニアモータアクチュエータによれば、金属製のナット5がボルト24で連結プレート8に固定されるので、組み立て時に樹脂製のエンドキャップ32a,32b又はシール33が他の部品に接することがない。このため、組み立ての安定性が向上する。さらに、ハウジングにナット5を接着する必要がなくなるので、組立工数を大幅に削減することができる。ナット5に従来では困難であった給脂穴も設けることができるし、破損時にもナット5を容易に交換できるようになる。 <Assemblyability and maintainability> As shown in FIG. 9 (a1), in the conventional linear motor actuator with ball spline, when the nut 41 is inserted into the housing 43, the resin end cap 44 or the resin seal 45 contacts the metal connection plate 58. For this reason, the end cap 44 or the seal 45 is deformed, causing an increase in sliding resistance of the spline shaft 56 or affecting the movement of the spline shaft 56. On the other hand, as shown in FIG. 9 (b2), according to the linear motor actuator with the ball spline of this embodiment, the metal nut 5 is fixed to the connecting plate 8 with the bolts 24. The made end caps 32a, 32b or the seal 33 do not come into contact with other parts. For this reason, the stability of assembly improves. Further, since it is not necessary to bond the nut 5 to the housing, the number of assembling steps can be greatly reduced. The nut 5 can be provided with a greasing hole that has been difficult in the prior art, and the nut 5 can be easily replaced even when it is broken.
 <ユーザ取付け>図9(a2)に示すように、従来のボールスプライン付きリニアモータアクチュエータにおいては、蓋42を取り付けるためのねじ46を必要とするので、蓋42に他の部品を取り付けるための取付け面及び雌ねじを設けることができない。これに対して、図9(b2)に示すように、本実施形態のボールスプライン付きリニアモータアクチュエータによれば、エンドキャップ32b及びシール33がナット5の壁部31cの内側に埋め込まれるので、ナット5の壁部31cの先端面31c1に取付け面及び雌ねじ36を設けることができ、ユーザが他の部品を取り付けることが容易になる。 <User Installation> As shown in FIG. 9 (a2), the conventional linear motor actuator with a ball spline requires a screw 46 for attaching the lid 42, so that it is attached for attaching other parts to the lid 42. Surfaces and female threads cannot be provided. On the other hand, as shown in FIG. 9 (b2), according to the linear motor actuator with the ball spline of the present embodiment, the end cap 32b and the seal 33 are embedded inside the wall portion 31c of the nut 5. The attachment surface and the internal thread 36 can be provided on the front end surface 31c1 of the wall portion 31c of the fifth wall portion 31c, so that the user can easily attach other components.
 なお、本発明は上記実施形態に具現化されるのに限られることはなく、本発明の要旨を変更しない範囲で様々な実施形態に具現化できる。 Note that the present invention is not limited to the embodiment described above, and can be embodied in various embodiments without changing the gist of the present invention.
 例えば、上記実施形態では、リニアモータの本体部にコイルが設けられ、駆動軸にマグネットが設けられているが、本体部にマグネットが設けられ、駆動軸にコイルが設けられてもよい。 For example, in the above embodiment, a coil is provided in the main body portion of the linear motor and a magnet is provided in the drive shaft. However, a magnet may be provided in the main body portion and a coil may be provided in the drive shaft.
 上記実施形態では、一方のエンドキャップのみをナットの壁部で囲んでいるが、両方のエンドキャップをナットの壁部で囲むこともできる。この場合、ナットの壁部の先端面を連結プレートに固定することもできる。 In the above embodiment, only one end cap is surrounded by the nut wall, but both end caps may be surrounded by the nut wall. In this case, the tip end surface of the wall portion of the nut can be fixed to the connecting plate.
 本明細書は、2013年9月25日出願の特願2013-198376に基づく。この内容はすべてここに含めておく。 This specification is based on Japanese Patent Application No. 2013-198376 filed on September 25, 2013. All this content is included here.
1…リニアモータ,2…フォーサ(本体部),2a…取付け面,3…駆動軸,4…ボールスプライン,5…ナット,6…スプライン軸,6a…スプライン溝,8…連結プレート(第一の連結部材),9…ヘッドプレート(第二の連結部材),31…ナット本体,31a,31b…ナット本体の端面,31c…ナット本体の壁部,31c1…ナット本体の壁部の先端面,32a,32b…エンドキャップ,34…雌ねじ(取付け部),35…ボール転走溝,36…ボール戻し部,38…ボール
 
DESCRIPTION OF SYMBOLS 1 ... Linear motor, 2 ... Forcer (body part), 2a ... Mounting surface, 3 ... Drive shaft, 4 ... Ball spline, 5 ... Nut, 6 ... Spline shaft, 6a ... Spline groove, 8 ... Connection plate (1st Connecting member), 9 ... head plate (second connecting member), 31 ... nut body, 31a, 31b ... end face of the nut body, 31c ... wall part of the nut body, 31c1 ... tip end face of the wall part of the nut body, 32a , 32b ... End cap, 34 ... Female screw (mounting part), 35 ... Ball rolling groove, 36 ... Ball return part, 38 ... Ball

Claims (7)

  1.  本体部に対して駆動軸が直線運動するリニアモータと、
     前記リニアモータの前記駆動軸から所定距離だけ離れて平行に配置されるスプライン軸、及び前記スプライン軸に多数のボールを介して軸方向に相対的に移動可能に組み付けられるナットを有し、前記ナットに相手部品に取り付けるための取付け部が形成されるハウジングを一体化するボールスプラインと、
     前記リニアモータの前記本体部に固定されると共に、前記取付け部を用いて前記ボールスプラインの前記ナットに固定される第一の連結部材と、
     前記リニアモータの前記駆動軸に固定されると共に、前記ボールスプラインの前記スプライン軸に固定される第二の連結部材と、を備えるボールスプライン付きリニアモータアクチュエータ。
    A linear motor in which the drive shaft moves linearly with respect to the main body,
    A spline shaft arranged in parallel with a predetermined distance from the drive shaft of the linear motor; and a nut assembled to the spline shaft so as to be relatively movable in the axial direction via a plurality of balls. A ball spline that integrates a housing in which a mounting portion for mounting to a mating part is formed;
    A first connecting member fixed to the body portion of the linear motor and fixed to the nut of the ball spline using the attachment portion;
    A linear motor actuator with a ball spline, comprising: a second connecting member fixed to the drive shaft of the linear motor and fixed to the spline shaft of the ball spline.
  2.  前記ナットは、
     前記スプライン軸のスプライン溝に対向するボール転走溝、及び前記ボール転走溝に平行な転動体戻し部が形成されるナット本体と、
     前記ナット本体の軸方向の両端面に取り付けられ、前記転動体転走溝の端部と前記転動体戻し部の端部を接続する方向転換部が形成される一対の蓋部材と、を有し、
     前記ナット本体に前記ハウジングを一体化することを特徴とする請求項1に記載のボールスプライン付きリニアモータアクチュエータ。
    The nut is
    A nut rolling body formed with a ball rolling groove facing the spline groove of the spline shaft, and a rolling element return portion parallel to the ball rolling groove;
    A pair of lid members that are attached to both end surfaces of the nut body in the axial direction and in which a direction changing portion that connects an end portion of the rolling element rolling groove and an end portion of the rolling element return portion is formed; ,
    The linear motor actuator with a ball spline according to claim 1, wherein the housing is integrated with the nut body.
  3.  前記第一の連結部材は、前記ナット本体の前記両端面のうちの一方の端面に固定され、
     前記一対の蓋部材のうちの一方の蓋部材は、前記ナット本体の前記一方の端面から軸方向に突出すると共に、前記第一の連結部材の内側に入ることを特徴とする請求項2に記載のボールスプライン付きリニアモータアクチュエータ。
    The first connecting member is fixed to one end face of the both end faces of the nut body,
    The one lid member of the pair of lid members protrudes in the axial direction from the one end surface of the nut body and enters the inside of the first connecting member. Linear motor actuator with ball spline.
  4.  前記ナット本体には、前記一対の蓋部材の少なくとも一方の周囲を覆うように、前記ナット本体の前記両端面の少なくとも一方の端面から軸方向に突出する壁部が一体に設けられることを特徴とする請求項2又は3に記載のボールスプライン付きリニアモータアクチュエータ。 The nut body is integrally provided with a wall portion protruding in an axial direction from at least one end face of the both end faces of the nut body so as to cover at least one of the pair of lid members. The linear motor actuator with a ball spline according to claim 2 or 3.
  5.  前記ナット本体を軸方向に直交する断面で見たとき、
     前記ナット本体の断面形状の外形は、四角形に形成されることを特徴とする請求項2又は3に記載のボールスプライン付きリニアモータアクチュエータ。
    When the nut body is viewed in a cross section orthogonal to the axial direction,
    The linear motor actuator with a ball spline according to claim 2 or 3, wherein an outer shape of a cross-sectional shape of the nut body is formed in a square shape.
  6.  前記ナット本体の前記取付け部は、前記ナット本体の前記両端面のうちの少なくとも一方の端面、又は前記壁部の先端面に設けられることを特徴とする請求項2又は3に記載のボールスプライン付きリニアモータアクチュエータ。 The ball spline according to claim 2 or 3, wherein the mounting portion of the nut main body is provided on at least one end surface of the both end surfaces of the nut main body or a front end surface of the wall portion. Linear motor actuator.
  7.  本体部に対して駆動軸が直線運動するリニアモータと、前記リニアモータの前記駆動軸から所定距離だけ離れて平行に配置されるスプライン軸、及び前記スプライン軸に多数のボールを介して軸方向に相対的に移動可能に組み付けられるナットを有し、前記ナットに相手部品に取り付けるための取付け部が形成されるハウジングを一体化するボールスプラインと、を用意する工程と、
     第一の連結部材を前記リニアモータの前記本体部に固定すると共に、前記第一の連結部材を前記取付け部を用いて前記ボールスプラインの前記ナットに固定する工程と、
     第二の連結部材を前記リニアモータの前記駆動軸に固定すると共に、前記第二の連結部材を前記ボールスプラインの前記スプライン軸に固定する工程と、
     を備えるボールスプライン付きリニアモータアクチュエータの製造方法。
     
    A linear motor in which a drive shaft moves linearly with respect to the main body, a spline shaft arranged in parallel at a predetermined distance from the drive shaft of the linear motor, and a plurality of balls on the spline shaft in the axial direction A step of preparing a ball spline that has a nut that is assembled so as to be relatively movable, and that integrates a housing in which a mounting portion for mounting to a mating part is formed on the nut;
    Fixing the first connecting member to the body portion of the linear motor, and fixing the first connecting member to the nut of the ball spline using the mounting portion;
    Fixing the second connecting member to the drive shaft of the linear motor, and fixing the second connecting member to the spline shaft of the ball spline;
    A method of manufacturing a linear motor actuator with a ball spline.
PCT/JP2014/074797 2013-09-25 2014-09-19 Linear motor actuator with ball spline and method for manufacturing same WO2015046033A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020167007347A KR101666340B1 (en) 2013-09-25 2014-09-19 Linear motor actuator with ball spline and method for manufacturing same
CN201480052416.6A CN105594109B (en) 2013-09-25 2014-09-19 Linear motor actuator and its manufacture method with ball spline
DE112014004441.5T DE112014004441B4 (en) 2013-09-25 2014-09-19 Linear motor actuator provided with a grooved shaft guide and method of manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-198376 2013-09-25
JP2013198376A JP5786007B2 (en) 2013-09-25 2013-09-25 Linear motor actuator with ball spline and manufacturing method thereof

Publications (1)

Publication Number Publication Date
WO2015046033A1 true WO2015046033A1 (en) 2015-04-02

Family

ID=52743170

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/074797 WO2015046033A1 (en) 2013-09-25 2014-09-19 Linear motor actuator with ball spline and method for manufacturing same

Country Status (6)

Country Link
JP (1) JP5786007B2 (en)
KR (1) KR101666340B1 (en)
CN (1) CN105594109B (en)
DE (1) DE112014004441B4 (en)
TW (1) TWI547068B (en)
WO (1) WO2015046033A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI577112B (en) * 2016-07-15 2017-04-01 台達電子工業股份有限公司 Linear-rotary actuator
JP6190550B1 (en) * 2017-01-31 2017-08-30 山洋電気株式会社 Linear motor and magnetic shielding structure of linear motor

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08322236A (en) * 1995-05-23 1996-12-03 Oriental Motor Co Ltd Cylindrical linear pulse motor
JPH10184683A (en) * 1996-11-11 1998-07-14 Thk Kk Linear motion device and lubricating oil feeder used therefor
WO2007026566A1 (en) * 2005-08-31 2007-03-08 Thk Co., Ltd. Linear motor
JP2008253117A (en) * 2007-03-30 2008-10-16 Thk Co Ltd Linear actuator
JP2009171708A (en) * 2008-01-15 2009-07-30 Hiihaisuto Seiko Kk Linear actuator
JP2010057357A (en) * 2008-07-30 2010-03-11 Thk Co Ltd Linear motor actuator and multiaxial linear motor actuator
JP2012016180A (en) * 2010-07-01 2012-01-19 Yaskawa Electric Corp Actuator
JP2012239362A (en) * 2011-05-13 2012-12-06 Yaskawa Electric Corp Linear motor
JP2013110913A (en) * 2011-11-24 2013-06-06 Thk Co Ltd Linear motor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59140920A (en) 1983-01-29 1984-08-13 Hiroshi Teramachi Ball spline bearing
JPS63140111A (en) 1986-12-03 1988-06-11 Nippon Thompson Co Ltd Ball spline bearing with drive device
JPH10169652A (en) 1996-12-06 1998-06-23 Nippon Thompson Co Ltd Linear bushing
DE10150595A1 (en) 2001-10-12 2003-04-17 Ina Schaeffler Kg Linear ball bearing has tubular internal sleeve whose top and bottom surfaces form raceways for ball bearings, shaft on which it is fitted on having ribs which hold balls in position on raceways
JP2004084823A (en) * 2002-08-27 2004-03-18 Nsk Ltd Ball screw
US8106545B2 (en) 2007-07-09 2012-01-31 Thk Co., Ltd. Linear actuator unit
CN102537043A (en) * 2012-02-22 2012-07-04 威海利奥泰儆自动化设备有限公司 Plane rollaway nest ball spline pair

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08322236A (en) * 1995-05-23 1996-12-03 Oriental Motor Co Ltd Cylindrical linear pulse motor
JPH10184683A (en) * 1996-11-11 1998-07-14 Thk Kk Linear motion device and lubricating oil feeder used therefor
WO2007026566A1 (en) * 2005-08-31 2007-03-08 Thk Co., Ltd. Linear motor
JP2008253117A (en) * 2007-03-30 2008-10-16 Thk Co Ltd Linear actuator
JP2009171708A (en) * 2008-01-15 2009-07-30 Hiihaisuto Seiko Kk Linear actuator
JP2010057357A (en) * 2008-07-30 2010-03-11 Thk Co Ltd Linear motor actuator and multiaxial linear motor actuator
JP2012016180A (en) * 2010-07-01 2012-01-19 Yaskawa Electric Corp Actuator
JP2012239362A (en) * 2011-05-13 2012-12-06 Yaskawa Electric Corp Linear motor
JP2013110913A (en) * 2011-11-24 2013-06-06 Thk Co Ltd Linear motor

Also Published As

Publication number Publication date
CN105594109B (en) 2017-08-08
KR101666340B1 (en) 2016-10-13
TWI547068B (en) 2016-08-21
KR20160039294A (en) 2016-04-08
CN105594109A (en) 2016-05-18
JP2015065757A (en) 2015-04-09
DE112014004441T5 (en) 2016-07-07
DE112014004441B4 (en) 2024-02-01
TW201530987A (en) 2015-08-01
JP5786007B2 (en) 2015-09-30

Similar Documents

Publication Publication Date Title
JP4757261B2 (en) Linear motor
US6541886B2 (en) Motor
JP5276299B2 (en) Mounting head with built-in shaft type linear motor
US10243426B2 (en) Motor
US20070068491A1 (en) Intake-air control device for internal combustion engine
US7109621B2 (en) Electric motor having a printed circuit board attached to a stator and at least partially supporting a bearing
WO2012131750A1 (en) Motor
WO2015046033A1 (en) Linear motor actuator with ball spline and method for manufacturing same
TWI455451B (en) Linear synchronous motor
US7040481B1 (en) Apparatus, method of manufacturing and method of using a linear actuator
JP5254651B2 (en) Linear motor with magnetic shield plate, multi-axis linear motor with magnetic shield plate, and method for manufacturing linear motor with magnetic shield plate
JP4237114B2 (en) solenoid valve
JP2015010876A (en) Stroke sensor
EP2773028B1 (en) Spindle drive
US20200149652A1 (en) Electromagnetic Actuator with Bearing Element
WO2011145359A1 (en) Linear motor
WO2021241717A1 (en) Stroke sensor
KR102599779B1 (en) Transfer Car for cleaning
JP2012147627A (en) Linear motor and manufacturing method of the same
US20200161913A1 (en) Rotor and motor
US20200161914A1 (en) Rotor and motor
US20090072674A1 (en) Stepping Motor
JP2020162365A (en) motor
JP2020162367A (en) motor
JP2020162366A (en) motor

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14848773

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20167007347

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 1120140044415

Country of ref document: DE

Ref document number: 112014004441

Country of ref document: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14848773

Country of ref document: EP

Kind code of ref document: A1