WO2015013839A1

WO2015013839A1 - Land-use velocity and acceleration double-parameter multi-component digital geophone

Info

Publication number: WO2015013839A1
Application number: PCT/CN2013/000911
Authority: WO
Inventors: 郭建
Original assignee: 中国科学院地质与地球物理研究所
Priority date: 2013-08-02
Filing date: 2013-08-02
Publication date: 2015-02-05

Abstract

A land-use velocity and acceleration double-parameter multi-component digital geophone is a multi-component geophone having simultaneous acquisition function of a moving-coil velocity geophone and a single-component or multi-component micro electro mechanical system (MEMS) acceleration geophone, and provides two parameters comprising velocity and acceleration at the same time during acquisition. The land-use velocity and acceleration double-parameter multi-component digital geophone comprises a three-component or single-component MEMS acceleration sensor (MEMS Sensor), a weak signal detection and feedback circuit (ASIC), a moving-coil geophone (CG), a digital unit (ADU), a control module (CM), a data communications unit (CI) and a power module (PM). The MEMS sensor and the ASIC are used to complete acquisition and digitization functions of an acceleration parameter. The CG and the ADU are used to complete the acquisition and digitization functions of a velocity parameter. The CI provides a data communication function with a host system of a seismometer. The CM controls the ASIC, the ADU, the CI and the PM. The geophone can research seismic wave propagation characteristics finely, thereby improving the exploration precision.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention generally relates to geophones, and more particularly to a dual-parameter multi-component digital geophone for land speed and acceleration. Technical Background Seismic exploration is still the main means of exploring oil and gas on land and in the sea, and is also an important exploration method for other mineral resources. It is widely used in the study of internal structure of the earth, engineering exploration and detection, geological disaster prediction, etc. . An instrument used in seismic exploration to directly pick up seismic vibrations and convert the vibrations into a form of energy that meets the needs of the instrument's recording system is called a geophone. Geophones can be divided into onshore detectors, swamp detectors, marine detectors and downhole detectors according to the use environment; according to the working principle, they can be divided into electromagnetic induction (dynamic coil) detectors, piezoelectric detectors, and optical fibers. Detectors, MEMS detectors, etc.; according to the physical quantity of the output signal can be divided into speed detector, acceleration detector, etc.; according to the type of output signal can be divided into analog detector and digital detector. The geophone's indicators determine the main technical indicators of seismic exploration instruments. At present, the most used ones at home and abroad are moving coil geophones. This type of geophone has a history of 50 years. The weight has grown from the first few kilograms to the current tens of grams. It has been widely used in seismic exploration. . However, due to its inherent mechanical characteristics, this detector has low sensitivity, small dynamic range (about 60dB), narrow frequency band (10~200Hz), poor anti-interference ability, large mass and volume, and the current seismic instruments have reached With a dynamic range of 120 dB, the role of seismic instruments cannot be fully utilized. However, due to the lack of suitable alternatives, it is still the most widely used geophone. Compared with conventional analog moving coil detectors, digital MEMS detectors have the advantages of light weight, wide frequency band, large dynamic range, small distortion and strong anti-interference ability, which may replace the most widely used analog moving coil detector. . MEMS digital detectors are especially suitable for high-density acquisition of single detectors. A moving geophone is a typical speed detector, and a MEMS detector is a typical accelerometer. However, the currently used MEMS detectors and moving coil detectors are not capable of performing the task of more detailed study of seismic wave propagation characteristics. SUMMARY OF THE INVENTION The present invention is directed to overcoming the above-mentioned deficiencies of the prior art, and provides a land-speed and acceleration dual-parameter multi-component digital geophone capable of more closely studying seismic wave propagation characteristics. The detector has simultaneous acquisition The function of two different vibration parameters of speed and acceleration. The detector can more closely study the propagation characteristics of seismic waves while improving the accuracy of exploration. In order to achieve the above object, the present invention uses a dual-parameter multi-component digital geophone for land speed and acceleration

VAMCG (Velocity & Acceleration Multi-component Geophone) is a multi-component detector (generally 4 components) with a moving coil type speed detector and a single-component or multi-component MEMS accelerometer simultaneous acquisition function, which can be simultaneously provided during acquisition. Two parameters of velocity and acceleration of seismic signal: The detector consists of seven major units: MEMS sensor 3 component or single component acceleration sensor MEMS Sensor, weak signal detection and feedback circuit ASIC, moving coil detector CG, digital unit ADU, control module CM, data communication unit CI and power supply module PM, where: MEMS seismic 3 component or single component acceleration sensor MEMS Sensor and weak signal detection and feedback circuit ASIC are used to complete acceleration parameter acquisition and digitization functions, circle The detector CG and the digitizing unit ADU are used to complete the acquisition and digitization function of the speed parameter, the data communication unit CI provides the data communication function with the seismic instrument host system, the control module CM controls the weak signal detection and feedback circuit ASIC, the digitizing unit ADU, Data communication unit CI and power supply module P M. That is, the multi-component detector consisting of a MEMS accelerometer or a 3-component MEMS accelerometer and a moving coil type speed detector, the invention combines the MEMS accelerometer and the moving coil type speed detector into one, which can be simultaneously collected. A digital detector (acquisition station) that receives two physical quantities of velocity and acceleration, which has a dual-parameter signal acquisition and reception function for the same receiving point, which enables subsequent data processing and analysis at speed and acceleration. Two kinds of physical fields describing the same receiving point displacement are compared and analyzed, and at the same time, the propagation characteristics of seismic waves and the advantages of exploration accuracy can be studied more finely. The detector consists of seven major units: MEMS sensor seismic acceleration sensor or 3-component accelerometer MEMS Sensor (Micro ElectroMechani cal Systems Sensor), Weak Signal Detection and Feedback Circuit ASIC (Application Specific Integrated Circuits) > Dynamic Detector CG (Coiling Geophone)> ADU (Analog to Digital Unit), control module CM (Control Module), data communication unit CI (Communication Interface) and power supply module PM (Power Module); where: MEMS 3 component acceleration The sensor MEMS Sensor and the weak signal detection and feedback circuit ASIC are used to complete the acquisition and digitization of the acceleration parameters. The moving coil detector CG and the digitizing unit ADL! are used to complete the acquisition and digitization of the speed parameters, and the data communication unit CI provides The data communication function of the seismic instrument host system, the control module CM controls the weak signal detection and feedback circuit ASK: the digitizing unit ADli, the data communication unit CI and the power supply module PM, and the power supply module PM is used to provide power support (to other units). The detector of the invention has a signal acquisition and reception function for one speed parameter and one or three (3 component) acceleration parameters for the same receiving point, which can make subsequent data processing and analysis in one speed parameter and one or Three (3 component) acceleration parameters are described between different physical quantities of the same receiving point displacement and compared. The dual-parameter multi-component digital geophone for land velocity and acceleration of the present invention is of great significance for studying the propagation characteristics of seismic waves more finely and improving the precision of exploration. It can be used in oil, natural gas, coal field and mineral exploration, geological engineering survey, geological hazard monitoring, etc. It is a device that can detect artificial or natural seismic signals and convert them into digital signals. As an optimization, the MEMS seismic single component or 3-component acceleration sensor MEMS Sensor is a vertical acceleration detector MEMSz or consists of three orthogonal sets of MEMS sensors MEMSx, ME Sy and MEMSz; the moving coil detector CG It is a vertical component CGz detector. The existence of CGz and MEMSz has the function of collecting and receiving signals of two parameters of speed and acceleration for the same receiving point, which can make the subsequent data processing and analysis different in the same receiving point displacement in terms of speed and acceleration. The physical quantity field is carried out and comparative analysis is carried out. As an optimization, the vertical component detector CGz and the acceleration sensor vertical component MEMSz have signal acquisition and reception of two parameters of vertical component velocity and acceleration of the same receiving point, using a velocity sensor (moving coil detector CGz) and an acceleration sensor. (acceleration sensor vertical component MEMSz) This characteristic of different response characteristics of seismic signals and noise at the same receiving point establishes the relationship between the speed sensor and the acceleration sensor for improving resolution and signal-to-noise ratio, and detecting weak signal. That is, the vertical component detector CGz and the acceleration sensor vertical component MEMSz have signal acquisition and reception of two parameters of vertical component velocity and acceleration of the same receiving point, but due to the speed sensor (moving coil detector CGz) and the acceleration sensor (acceleration sensor) The vertical component MEMSz) has different response characteristics to seismic signals and noise at the same receiving point. With this feature, the relationship between the speed sensor and the acceleration sensor can be established, which is advantageous for improving resolution and signal-to-noise ratio, and detecting weak signal. As an optimization, the function of acquiring and receiving signals with one speed parameter and one or three (3 component) acceleration parameters for the same receiving point enables subsequent data processing and analysis by speed parameters and acceleration parameters. Describe the different physical quantities of the same receiving point displacement and perform a comparative analysis. As an optimization, the MEMS seismic single-component or 3-component accelerometer MEMS Sensor and the weak signal detection and feedback circuit ASIC, the moving coil detector CG and the digitizing unit ADU are directly connected and integrated, respectively, for avoiding analog signals. The transmission on the cable retains the active component of the weak signal and improves the anti-interference ability. That is, the MEMS seismic acceleration sensor or the 3-component accelerometer MEMS Sensor and the weak signal detection and feedback circuit ASIC, the moving coil detector CG and the digitizing unit ADU are directly connected and integrated. This connection avoids the mode The transmission of the pseudo-signal on the cable retains the active component of the weak signal and improves the anti-interference ability. As an optimization, the control module CM is an embedded CPU. That is, the control module CM is an embedded CPU, and controls the weak signal detection and feedback circuit ASIC, the digitizing unit ADL', the data communication unit CI, and the power supply module PM. As an optimization, the acceleration sensor and the moving coil detector are combined to form a collecting station that can simultaneously acquire one speed component and one or three acceleration components of the same receiving point. As an optimization, the weak signal detection and feedback circuit ASIC is a weak signal detection and feedback circuit ASIC for low-noise capacitance signal amplification and large dynamic range amplification, and is matched with the MEMS seismic acceleration sensor or the 3-component acceleration sensor MEMS Sensor] 10dB dynamic range; the digital unit ADU uses Cirrus Logic's A/D conversion kit CS3301A, CS5373A and CS5378 or TI's AD1282 chip. As an optimization, the overall structure is composed of an upper cover R1, an outgoing cable R2, a circuit board R3, an orthogonal 3 component or a vertical single component acceleration seismic sensor MEMS Sensor, a moving coil detector CG, a casing R4 and a tail cone R5; For the 2-layer structure, the moving coil detector CG is placed at the bottom of the lower layer, the 3-component or single-component sensor MEMS Sensor is placed on the moving coil detector CG, and the circuit board R3 is placed inside the outer casing R4; the weak signal detection and feedback circuit ASIC, The digitizing unit ADU, the control module CM, the data communication unit CI and the power supply module PM are integrated on the circuit board R3; the moving coil detector CG, the 3-component or single-component sensor MEMS Sensor and the circuit board R3 are encapsulated in the outer casing by the upper cover R1 In R4, the moving coil detector CG extraction signal line is connected to the circuit board R3, and the 3-component or single-component sensor MEMS Sensor also leads the signal line to the circuit board R3. As an optimization, two pairs of cables are led out by the circuit board R3, one pair is responsible for the dual-parameter multi-component digital geophone for land speed and acceleration, and the other pair is used as the data line, and the tail cone is mounted at the lower end of the casing as a grounding member; The circuit board R3 is vertically mounted or horizontally mounted. After adopting the above technical solution, the dual-parameter multi-component digital geophone of land speed and acceleration of the invention has the functions of collecting and receiving signals of one speed parameter and one or three component acceleration parameters for the same receiving point, which can make subsequent Data processing and analysis are carried out between a plurality of velocity parameters and one or even three-component acceleration parameters describing different physical quantities of the same receiving point displacement, and comparative analysis is performed, which can more closely study seismic wave propagation characteristics and significantly improve exploration accuracy. The advantages. It is a device capable of finely detecting artificial or natural seismic signals and converting them into digital signals. It can be used in petroleum, natural gas, coal and mineral exploration, geological engineering exploration, geological disaster monitoring, etc. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an original of a land-based speed and acceleration dual-parameter multi-component digital geophone using the single-component MEMS 2 is a block diagram of a dual-parameter multi-component digital geophone for land speed and acceleration using the ≡ component MEMS; FIG. 3 is a schematic diagram of a dual-parameter multi-component digital geophone for land speed and acceleration according to the present invention; Schematic diagram of the overall structure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown, the dual-parameter multi-component digital geophone for land speed and acceleration of the present invention is a multi-component detection with a simultaneous acquisition function of a moving coil type speed detector and a single component or multi-component MEMS accelerometer. The detector can simultaneously provide two parameters of velocity and acceleration of the seismic signal: The detector consists of seven major units: MEMS sensor 3 component or single component acceleration sensor MEMS Sensor, weak signal detection and feedback circuit ASK, dynamic The circle detector CG, the digitizing unit ADLI, the control module CM, the data communication unit CI and the power supply module PM, wherein: the MEMS seismic 3 component or single component acceleration sensor MEMS Sensor and the weak signal detection and feedback circuit ASIC are used to complete the acceleration Parameter acquisition and digitization functions, moving coil detector CG and digitizing unit ADU are used to complete the acquisition and digitization of speed parameters. Data communication unit CI provides data communication function with seismic instrument host system, and control module CM controls weak signal detection. And feedback circuit ASIC, digital unit ADU, data Communication unit CI and power supply module PM. The MEMS seismic single-component or 3-component acceleration sensor MEMS Sensor is a vertical acceleration detector MEMSz or consists of three orthogonal MEMS sensors MEMSx, MEMSy and MEMSz; the moving coil detector CG is a vertical component CGz The detector; while the presence of CGz and MEMSz has the function of collecting and receiving the two components of velocity and acceleration for the same receiving point, which enables subsequent data processing and analysis to describe the same receiving point in both speed and acceleration. The different physical quantities of the displacement are performed and comparative analysis is performed. The vertical component detector CGz and the acceleration sensor vertical component MEMSz collect and receive signals of two parameters of vertical component velocity and acceleration of the same receiving point, and use the velocity sensor and the acceleration sensor to respond to seismic signals and noise at the same receiving point. This feature, which has different characteristics, establishes the relationship between the speed sensor and the acceleration sensor for improving the resolution and signal-to-noise ratio and detecting weak signals. Perform signal acquisition and reception of 1 speed parameter and 1 acceleration parameter or even 3 different component acceleration parameters for the same receiving point, so that subsequent data processing and analysis can be described in 4 speed parameters and 3 component acceleration parameters. Perform the same physical quantity between the same receiving point displacement and perform comparative analysis. The MEMS single-component or 3-component accelerometer MEMS Sensor and the weak signal detection and feedback circuit ASIC, the moving coil detector CG and the digitizing unit ADU are directly connected and integrated, respectively, to avoid analog letters. The transmission on the cable retains the active component of the weak signal and improves the anti-interference ability. The control module CM is embedded

CPU. Combine the acceleration sensor and the moving coil detector into one, which can simultaneously collect the same receiving point.

A collection station of 1 velocity component and 1 acceleration component or 3 acceleration components. The weak signal detection and feedback circuit ASK is a weak signal detection and feedback circuit ASIC for low-frequency acoustic signal amplification and large dynamic range amplification, and achieves a dynamic range of 110 dB when combined with a MEMS sensor of a MEMS seismic component or a 3-component acceleration sensor. The digital unit ADU uses Cirrus Logic's A/D conversion kits CS3301A, CS5373A and CS5378 or the company's AD1282 chip. The overall structure consists of the upper cover R1, the lead-out cable R2, the circuit board R3, the orthogonal 3 component or the vertical single-component acceleration seismic sensor MEMS Sensor, the moving coil detector CG, the outer casing R4 and the tail cone R5, etc.; the outer casing R4 is 2 layers Structure, the moving coil detector CG is placed at the bottom of the lower layer, the 3-component or single-component sensor MEMS Sensor is placed on the moving coil detector CG, and the circuit board R3 is placed inside the outer casing R4; the weak signal detection and feedback circuit ASIC, the digitizing unit ADU The control module CM, the data communication unit CI and the power supply module PM are integrated on the circuit board R3; the moving coil detector CG, the 3-component or single-component sensor MEMS Sensor and the circuit board R3 are encapsulated in the outer casing R4 by the upper cover R1, The moving coil detector CG pull-out signal line is connected to the circuit board R3, and the 3-component or single-component sensor MEMS Sensor also leads the signal line to the circuit board R3. Two pairs of cables are led out by the circuit board R3, one pair is responsible for the dual-parameter multi-component digital geophone for land speed and acceleration, and the other pair is used as the data line, the tail cone is mounted at the lower end of the outer casing and serves as a grounding member; The plate R3 is vertically mounted or horizontally mounted. Specifically, it may have a signal acquisition and reception function of performing one speed component and one or three acceleration components on the same receiving point, so that subsequent data processing and analysis can describe the same receiving point in one speed parameter and acceleration parameter. The displacement is performed between different physical quantities and comparative analysis is performed. At the same time, because the speed sensor (moving coil detector CG) and the acceleration sensor (MEMS sensor MEMS Sensor) have different response characteristics to the same receiving point seismic signal and noise, in other words, the seismic effective signal and various noises are The two physical quantities, speed and acceleration, have different performance characteristics. With this feature, it is more conducive to improving the resolution and signal-to-noise ratio and detecting weak signals. Referring to Figure 1, the geophone of the present invention uses a single component MEMS consisting of seven major units: MEMS Sensor (Micro 曰ectroW! mechanical system Sensor), moving coil detector CG (Coiling Geophone) . Weak Signal Detection and Feedback Circuit ASIC (Application Specific Integrated Circuits), ADU (Analog to Digital Unit), Control Circuit CM (Control Module). Data Communication Unit CI (Communication Interface) and Power Supply Circuit PM ( Power Module). Referring to Fig. 2, the device for land speed and acceleration dual-parameter multi-component digital geophone uses a three-component MEMS four-component detector consisting of seven large units: MEMS Sensor (Micro Electromechanical Systems Sensor), weak Detective and Integrated Circuits (ASIC), Coiling Geophone, ADU (Analog to Digital Unit), Control Circuit CM (Control Modul e), Data Communication Unit CI (Communication) Interface) and power supply circuit PM (Power Module). The MEMS sensor of the MEMS sensor uses the MS seismic sensor developed by the Shanghai Institute of Microsystems and Information Technology of the Chinese Academy of Sciences. The weak signal detection and feedback circuit ASIC is customized according to the design. After the two devices are matched, the dynamic range of 110dB can be achieved. International advanced level. The digitizing unit ADU can use Cirrus Logic's A/D converter kits CS3301A, CS5373A and CS5378 or TI's AD1282 chip. The MEMS sensor of the MEMS sensor in the land speed and acceleration dual-parameter multi-component digital geophone is a typical acceleration sensor, and the weak signal detection and feedback circuit ASIC completes the receiving and digitizing function of the acceleration parameter. The moving coil detector CG in the land-based land speed and acceleration dual-parameter multi-component digital geophone of the present invention is a typical speed sensor, which completes the receiving and digitizing function of the speed parameter with the digitizing unit ADU. The device of the invention combines the MEMS acceleration sensor and the moving coil speed detector into a single acquisition station (digital detector), so that one speed component and one or three acceleration components of the same receiving point can be simultaneously acquired. The weak signal detection and feedback circuit ASIC in the dual-parameter multi-component digital geophone for land speed and acceleration of the invention adopts low-noise capacitance signal amplification technology and large dynamic range amplification technology, which is beneficial for detecting weak signal components and improving the sensor The dynamic range allows the dynamic range to meet the needs of seismic exploration. The MEMS sensor and the weak signal detection and feedback circuit ASIC in the dual-parameter multi-component digital geophone for land speed and acceleration of the present invention are directly connected and integrated; the moving coil detector CG and the digitizing unit ADU is directly connected and integrated. This connection avoids the transmission of analog signals on the cable, retains the active components of the weak signal, and improves the immunity to interference. The control circuit CM in the dual-parameter multi-component digital geophone for land speed and acceleration of the present invention is embedded The CPU controls the weak signal detection and feedback circuit ASIC: the digitizing unit ADU, the data communication unit CI, and the power supply circuit PM. The data communication unit CI in the dual-parameter multi-component digital geophone for land speed and acceleration of the present invention provides data communication functions with the seismic instrument host system. The dual-parameter multi-component digital geophone for land speed and acceleration of the present invention has an overall structure (see Fig. 3). The upper cover R1, the outgoing cable R2, the circuit board R3, the MEMS single component or the three-component seismic sensor MEMS Sensor The circle detector CG, the outer casing R4 and the tail cone R5 are composed. The outer casing R4 has a two-layer structure, a moving coil type detector CG is placed at the bottom of the lower layer, a single-component or three-component sensor MEMS Sensor is placed on the moving coil type detector CG, and a circuit board R3 is placed on the upper layer of the outer casing R4. The weak signal detection and feedback circuit ASIC, the digitizing unit ADU, the control module CM, the data communication unit CI and the power supply module PM are integrated on the circuit board R3. The moving coil detector CG, the single component or three component sensor MEMS Sensor and the circuit board R3 are encapsulated in the outer casing R4 by the upper cover R1, and the moving coil detector CG leads the signal line to the circuit board R3, single component or three components. The sensor MEMS Sensor also leads the signal line to the circuit board R3. Two pairs of cables are led out by the circuit board R3. One pair is responsible for the dual-parameter multi-component digital geophone for land speed and acceleration, and the other pair is used as the data line. The tail cone is mounted at the lower end of the casing and serves as a grounding member. For convenience, the board R3 in Figure 2 can also be mounted horizontally.

Claims

claims

1. A land-based velocity and acceleration dual-parameter multi-component digital geophone, which is characterized in that it is a multi-component geophone with simultaneous acquisition functions of a moving coil velocity geophone and a single-component or multi-component MEMS acceleration geophone. The two parameters of seismic signal, velocity and acceleration, can be provided at the same time during acquisition: The geophone is composed of seven major units: microelectromechanical system seismic 3-component or single-component acceleration sensor MEMS Sensor, weak signal detection and feedback circuit ASIC, and moving coil geophone CG, digital unit ADU, control module CM, data communication unit CI and power supply module PM, among which: electromechanical system seismic 3-component or single-component acceleration sensor MEMS Sensor and weak signal detection and feedback circuit ASK are used to complete the collection of acceleration parameters and digital functions. The moving coil geophone CG and the digital unit ADU are used to complete the acquisition and digital functions of velocity parameters. The data communication unit CI provides data communication functions with the seismic instrument host system. The control module CM controls the weak signal detection and feedback circuit. ASIC, digital unit ADU, data communication unit CI and power supply module PM.

2. The geophone according to claim 1, characterized in that the micro-electromechanical system seismic single-component or 3-component acceleration sensor MEMS Sensor is a vertical acceleration geophone MEMSz or consists of three orthogonal groups of MEMS sensors MEMSx, MEMSy and MEMSz. Composition; the moving coil detector CG is a vertical component CGz detector; and the existence of CGz and MEMSz enables it to collect and receive signals of the two components of velocity and acceleration at the same receiving point, which can make subsequent data The processing and analysis are carried out in the fields of velocity and acceleration, two different physical quantities that describe the displacement of the same receiving point, and comparative analysis is carried out.

3. The detector according to claim 2, characterized in that the vertical component detector CGz and the vertical component MEMSz of the acceleration sensor collect and receive signals of the two parameters of vertical component velocity and acceleration at the same receiving point, using the velocity sensor and The acceleration sensor has different response characteristics to seismic signals and noise at the same receiving point. This characteristic establishes the relationship between the velocity sensor and the acceleration sensor, which is used to improve the resolution and signal-to-noise ratio and detect weak signals.

4. The detector according to claim 1, characterized in that it collects and receives signals of one velocity parameter, one acceleration parameter or even three acceleration parameters of different components at the same receiving point, so that subsequent data processing and analysis can Carry out comparative analysis among four different physical quantities describing the displacement of the same receiving point, namely 1 velocity parameter and 3-component acceleration parameter.

5. The geophone according to claim 1, characterized in that the micro-electromechanical system seismic single-component or 3-component acceleration sensor MEMS Sensor and the weak signal detection and feedback circuit ASIC, the moving coil geophone CG and the digital unit ADU are directly connected respectively. Connect and integrate into one to avoid the transmission of analog signals on the cable, retain the effective components of weak signals, and improve High anti-interference ability.

6. The detector according to claim 1, characterized in that the control module CM is an embedded CPU.

7. The detector according to claim 1, characterized in that the acceleration sensor and the moving coil detector are integrated into one, which can simultaneously collect one velocity component and one acceleration component or three accelerations at the same receiving point. Component collection station.

8. The detector according to claim 1, characterized in that the weak signal detection and feedback circuit ASIC is a weak signal detection and feedback circuit ASIC for low-noise capacitive signal amplification and large dynamic range amplification, and is combined with a micro-electromechanical system seismic single component Or the 3-component acceleration sensor MEMS Sensor can achieve a dynamic range of 10ciB after cooperation; the digital unit ADU adopts Cirrus Logic's A/D conversion kit CS3301A. CS5373A and CS5378 or the company's application 282 chip -.

9. The detector according to claim 1 or 2 or 3 or 4 or 5 or 6 or 7 or 8 or 9, characterized in that the overall structure consists of an upper cover R1, a lead cable R2, a circuit board R3, an orthogonal 3-component or Vertical single-component acceleration seismic sensor MEMS Sensor, moving coil geophone CG, housing R4 and tail cone R5, etc.; the housing R4 has a 2-layer structure, and the moving coil geophone CG is placed at the bottom of the lower layer. On the moving coil geophone CG Place the 3-component or single-component sensor MEMS Sensor, and place the circuit board R3 on the upper layer inside the housing R4 _; the weak signal detection and feedback circuit ASIC, digital unit ADU, control module CM, data communication unit Ci and power supply module PM are integrated on the circuit board R3; The moving coil detector C (;, the 3-component or single-component sensor MEMS Sensor and the circuit board R3 are packaged in the shell R4 by the upper cover R1. The signal line of the moving coil detector CG is connected to the circuit board R3. The 3-component Or the single-component sensor MEMS Sensor also leads out a signal line and connects it to the circuit board R3.

10. The geophone according to claim 10, characterized in that two pairs of cables are led out from the circuit board R3, one pair is responsible for the land speed and acceleration dual-parameter multi-component digital geophone, and the other pair is used as a data line. The cone is installed at the lower end of the housing and serves as a grounding component; the circuit board R3 is installed vertically or horizontally.