CN202710599U - Low-frequency vibration acceleration transducer system based on MEMS technology - Google Patents
Low-frequency vibration acceleration transducer system based on MEMS technology Download PDFInfo
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- CN202710599U CN202710599U CN 201220278277 CN201220278277U CN202710599U CN 202710599 U CN202710599 U CN 202710599U CN 201220278277 CN201220278277 CN 201220278277 CN 201220278277 U CN201220278277 U CN 201220278277U CN 202710599 U CN202710599 U CN 202710599U
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Abstract
The utility model discloses a low-frequency vibration acceleration transducer system based on MEMS technology. The low-frequency vibration acceleration transducer system comprises a sensing element of the acceleration transducer based on MEMS technology, a signal transmission line, a low-pass filter circuit and an analogue-to-digital conversion circuit, wherein the signal input end of the sensing element of the acceleration transducer based on MEMS technology is used for sensing vibration signals of an external structure, and the signal output end is connected with the signal input end of the low-pass filter circuit through the signal transmission line; and the signal output end of the low-pass filter circuit is used for connecting with a microprocessor circuit of a data acquisition device through the analogue-to-digital conversion circuit. The low-frequency vibration acceleration transducer system is simple in structure, has good test dynamic response, high test precision, good repeatability and stability, and strong anti-interference capability. The low-frequency vibration acceleration transducer system is suitable for sensing and processing of structural low-frequency vibration acceleration signals in the field of industrial measurement and control.
Description
Technical field
The utility model belongs to the industrial measurement and control field, relates to a kind of acceleration signal sensory perceptual system, specifically a kind of low-frequency vibration acceleration sensor system based on the MEMS technology.
Background technology
At the modern industry measurement and control area, the structure cognition technology has a great development than the initial stage, and different principle, sensor dissimilar, different test structures are widely applied.And along with the development of technology, all have higher requirement to acquisition precision, dynamic response, antijamming capability, reliability, quality, cost and the frequency band etc. of sensor in the industrial measurement and control field.But, the employed acceleration transducer in present industrial measurement and control field, inertia-type displacement transducer and the supporting amplifiers of adopting carry out the structural vibration acceleration test more, it exists, and Ability of Resisting Disturbance is poor, easily aging, poor reliability, the shortcoming such as dynamic responding speed is slow, cost is higher, easily cause the distortion of test data, be difficult to satisfy present industrial measurement and control field structural parameters are carried out requirement long-term, real-time, on-line automatic perception.
Summary of the invention
The technical problems to be solved in the utility model, provide a kind of low-frequency vibration acceleration sensor system based on the MEMS technology, have that precision is high, rapid dynamic response speed, reliability is high and long-time stability are good characteristics, can realize to the structural low-frequency vibration acceleration parameter carry out for a long time, in real time, automatic sensing.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is:
A kind of low-frequency vibration acceleration sensor system based on the MEMS technology comprises sensor sensing element, signal transmssion line, low-pass filter circuit and analog to digital conversion circuit based on the MEMS technology;
The signal input part of described sensor sensing element based on the MEMS technology is used for induction external structure vibration signal, and signal output part connects the signal input part of low-pass filter circuit by signal transmssion line;
The signal output part of low-pass filter circuit is used for the microcontroller circuit of connection data harvester by analog to digital conversion circuit.
As to restriction of the present utility model: described sensor sensing element based on the MEMS technology adopts sensor chip SCA61T, the first pin of described sensor chip SCA61T, the second pin, three-prong are all unsettled, the 7th pin connects the signal input part of signal transmssion line by the RC filtering circuit, the 8th pin connects external power source.
As the further restriction to aforesaid way: described low-pass filter circuit comprises eight rank Bezier low pass frequency overlapped-resistable filters of ISA integrated circuit board form, the second pin of described eight rank Bezier low pass frequency overlapped-resistable filters connects the signal output part of signal transmssion line as input end, the 5th pin is as output terminal.
As the further restriction to aforesaid way: analog-digital conversion circuit as described comprises the high speed analog-to-digital conversion chip of successive approximation, the input end of described high speed analog-to-digital conversion chip connects the 5th pin of eight rank Bezier low pass frequency overlapped-resistable filters, and output terminal is used for the signal input part of the microcontroller circuit of connection harvester.
As to another kind of restriction the of the present utility model: described signal transmssion line comprises that for transmission based on the shielded cable of the simulating signal of the sensor sensing element perception of MEMS technology be used for preventing the steel pipe that simulating signal external force or electromagnetic interference, that shielded cable is transmitted is protected, described steel pipe socket is contained in outside the shielded cable.
As the restriction to aforesaid way: described shielded cable comprises that 3 diameters are the cable of 0.5mm, and the described external diameter that is sleeved on the outer steel pipe of shielded cable is that 4mm, wall thickness are 1.5mm.
Owing to having adopted above-mentioned technical scheme, the utility model compared with prior art, obtained technical progress is:
(1) adopts based on MEMS technology, the integrated sensor chip SCA61T of silicon micro-capacitive, low frequency dynamic test performance is good, error is little, precision is high, repetition stability is good, low in energy consumption, operating temperature range is wide, can be applicable in the very large rugged surroundings of range of temperature; Output pin at sensor chip SCA61TA is provided with the RC filtering circuit simultaneously, can tentatively carry out filtering to the signal that gathers, and guarantees degree of purity and the quality of signal;
(2) signal transmssion line adopts the shielded cable outside steel pipe, can effectively avoid the interference of signal outer signals when signal transmssion line transmits, so that the simulating signal distortion of transmitting is little, transmission quality is high, good stability;
(3) low-pass filter circuit adopts eight rank Bezier low pass frequency overlapped-resistable filters, clutter and the filtering of high frequency aliasing ripple that the high frequency waves in the signal transmission engineering, power current can be introduced, the pure and quality of assurance signal; Described eight rank Bezier low pass frequency overlapped-resistable filter response speeds are very fast simultaneously, overshoot is less, a passband response the most smooth can be provided, effectively filtering high frequency clutter;
(4) eight rank Bezier low pass frequency overlapped-resistable filters are set to ISA integrated circuit board form, can with the data collecting instrument plug and play, instrument is succinct, easy to operate, and can reduce signal stube cable, saving survey station space between extra instrument, and interchangeability is strong; And owing to having shortened the signal cable that is connected between wave filter and the data collecting instrument, so that the signal transmission is more reliable, pure, reduce signal attenuation;
(5) high speed analog-digital conversion conversion chip ADS8323 is the high speed analog-to-digital conversion chip of sixteen bit, can obtain simultaneously the simulating signal of 16 acceleration transducer perception and carry out high speed A/D conversion, has improved the work efficiency of whole device.
As fully visible, the utility model sensing testing dynamic response is good, measuring accuracy is high, repetition stability good, antijamming capability is strong.
The utility model is applicable to perception and the processing to industrial measurement and control field inner structure low-frequency vibration acceleration signal.
The utility model is described in further detail below in conjunction with Figure of description and specific embodiment.
Description of drawings
Fig. 1 is the theory diagram of the utility model embodiment;
Fig. 2 is based on the circuit theory diagrams of the sensor sensing element of MEMS technology among the utility model embodiment;
Fig. 3 is the schematic diagram of low-pass filter circuit among the utility model embodiment;
Fig. 4 is the schematic diagram of analog to digital conversion circuit among the utility model embodiment;
Fig. 5 is the structural representation of signal transmssion line among the utility model embodiment.
Embodiment
A kind of low-frequency vibration acceleration sensor system based on the MEMS technology of embodiment
Figure 1 shows that the theory diagram of the present embodiment, comprise sensor sensing element, signal transmssion line, low-pass filter circuit and analog to digital conversion circuit based on the MEMS technology.
The signal input part of described sensor sensing element based on the MEMS technology is used for induction external structure vibration signal (being specially outside structural low-frequency vibration acceleration responsive signal), and signal output part connects the signal input part of low-pass filter circuit by signal transmssion line;
The signal output part of low-pass filter circuit is used for the microcontroller circuit of connection data harvester by analog to digital conversion circuit.
Shown in Figure 2 is in the present embodiment based on the circuit theory diagrams of the sensor sensing element of MEMS technology, comprises sensor chip U1, adopts sensor chip SCA61T.
The first pin SCK, the second pin MISO, the three-prong MOSI of described sensor chip SCA61T are all unsettled;
Described the 4th pin GND ground connection;
Described the 7th pin VOUT is connected the signal input part of signal transmssion line with the RC filtering circuit that the first capacitor C1 consists of by the first resistance R 1 by serial connection;
Described the 8th pin VDD connects external power source, simultaneously also by connecing the second capacitor C2 ground connection.
Shown in Figure 3 is the schematic diagram of the present embodiment low-pass filter circuit, comprises eight rank Bezier low pass frequency overlapped-resistable filter U2 (adopting low-pass filter ISA integrated circuit board form, eight pin DIP-8 encapsulation).
The first pin COM of eight rank Bezier low pass frequency overlapped-resistable filter U2 is by the 3rd capacitor C3 ground connection;
The second pin IN connects the signal output part of signal transmssion line;
Three-prong GND ground connection;
The 4th pin VDD connects external power source, simultaneously also by the 4th capacitor C4 ground connection;
The 5th pin OUT is as signal output part;
The 7th pin SHDN connects the 4th pin VDD of self;
The 8th pin CLK is by the 5th capacitor C5 ground connection.
Shown in Figure 4 is the schematic diagram of D/A converting circuit in the present embodiment, comprises high speed analog-to-digital conversion chip U3 (adopt the high speed analog-to-digital conversion chip ADS8323 of successive approximation, its frequency range is free setting in the 3Hz-1KHz scope as required).
The V of described high speed analog-to-digital conversion chip U3
REFPin is respectively applied to be connected outside+2.5V power supply with-IN pin;
Signal input tube pin+IN of high digital-to-analogue number conversion chip U3 connects the 5th pin OUT of eight rank Bezier low pass frequency overlapped-resistable filter U2;
The signal output pin D of high speed analog-to-digital conversion chip U3
OUTThe signal input part that is used for the microcontroller circuit of connection data harvester.
Fig. 5 is the structural representation of signal transmssion line in the present embodiment, comprise for the shielded cable 1 of the simulating signal of transmission sensor chip U1 perception and be used for preventing the steel pipe 2 that simulating signal external force or electromagnetic interference, that shielded cable is transmitted is protected, described shielded cable 1 comprises that 3 diameters are the 0.5mm cable, one is used for ground connection, one is used for connecing+the 5V power supply, and another root is as the transmission line of simulating signal; The external diameter of described steel pipe 2 is that 4mm, wall thickness are 1.5mm, and described steel pipe 2 is sleeved on outside the shielded cable 1 fully.High-quality and the high stability of the present embodiment in order to guarantee signal is arranged on the transmitting range of signal transmssion line in 100 meters.
The specific works process of the present embodiment is: by the sensor sensing element automatic sensing external structure low-frequency vibration acceleration responsive signal based on the MEMS technology, and send the signal of institute's perception to eight rank Bezier low pass frequency overlapped-resistable filters by signal transmssion line, with the high frequency waves in the signals transmission, the clutter that power current is introduced and high frequency aliasing ripple carry out filtering to be processed, what low-pass filter will obtain afterwards is pure, high-quality, the signal of high stability sends analog to digital conversion circuit to and carries out analog to digital conversion, the digital signal that conversion is good sends the microprocessor of signal pickup assembly to, finishes the collection to signal.
The present embodiment sensing testing dynamic response is good, measuring accuracy is high, repetition stability good, antijamming capability is strong, can realize the external structure acceleration signal automatic real-time perception, need not external trigger, cost performance is high, capability of industrialization is strong, and the signal that perceives can be carried out Real-Time Filtering, obtain pure useful acceleration signal, and can be converted in real time digital signal and send microcontroller circuit to.Simultaneously, the design of filter of the present embodiment is ISA integrated circuit board form, and plug and play, interchangeability are strong, easy to operate.
Claims (6)
1. the low-frequency vibration acceleration sensor system based on the MEMS technology is characterized in that: comprise sensor sensing element, signal transmssion line, low-pass filter circuit and analog to digital conversion circuit based on the MEMS technology;
The signal input part of described sensor sensing element based on the MEMS technology is used for induction external structure vibration signal, and signal output part connects the signal input part of low-pass filter circuit by signal transmssion line;
The signal output part of low-pass filter circuit is used for the microcontroller circuit of connection data harvester by analog to digital conversion circuit.
2. the low-frequency vibration acceleration sensor system based on the MEMS technology as claimed in claim 1, it is characterized in that: described sensor sensing element based on the MEMS technology adopts sensor chip SCA61T, the first pin of described sensor chip SCA61T, the second pin, three-prong are all unsettled, the 7th pin connects the signal input part of signal transmssion line by the RC filtering circuit, the 8th pin connects external power source.
3. the low-frequency vibration acceleration sensor system based on the MEMS technology as claimed in claim 2, it is characterized in that: described low-pass filter circuit comprises eight rank Bezier low pass frequency overlapped-resistable filters of ISA integrated circuit board form, the second pin of described eight rank Bezier low pass frequency overlapped-resistable filters connects the signal output part of signal transmssion line as input end, the 5th pin is as output terminal.
4. the low-frequency vibration acceleration sensor system based on the MEMS technology as claimed in claim 3, it is characterized in that: analog-digital conversion circuit as described comprises the high speed analog-to-digital conversion chip of successive approximation, the input end of described high speed analog-to-digital conversion chip connects the 5th pin of eight rank Bezier low pass frequency overlapped-resistable filters, and output terminal is used for the signal input part of the microcontroller circuit of connection harvester.
5. such as the described low-frequency vibration acceleration sensor system based on the MEMS technology of any one in the claim 1 to 4; it is characterized in that: described signal transmssion line comprises that for transmission based on the shielded cable of the simulating signal of the sensor sensing element perception of MEMS technology be used for preventing the steel pipe that simulating signal external force or electromagnetic interference, that shielded cable is transmitted is protected, described steel pipe socket is contained in outside the shielded cable.
6. the low-frequency vibration acceleration sensor system based on the MEMS technology as claimed in claim 5, it is characterized in that: described shielded cable comprises that 3 diameters are the cable of 0.5mm, the described external diameter that is sleeved on the outer steel pipe of shielded cable is that 4mm, wall thickness are 1.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220278277 CN202710599U (en) | 2012-06-13 | 2012-06-13 | Low-frequency vibration acceleration transducer system based on MEMS technology |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220278277 CN202710599U (en) | 2012-06-13 | 2012-06-13 | Low-frequency vibration acceleration transducer system based on MEMS technology |
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| CN 201220278277 Expired - Fee Related CN202710599U (en) | 2012-06-13 | 2012-06-13 | Low-frequency vibration acceleration transducer system based on MEMS technology |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103274352A (en) * | 2013-05-23 | 2013-09-04 | 安徽海聚信息科技有限责任公司 | MEMS module and control system based on same |
| CN106225917A (en) * | 2016-09-30 | 2016-12-14 | 上海华阳检测仪器有限公司 | Vibration signal acquisition device and signal processing method |
| CN109669055A (en) * | 2017-10-13 | 2019-04-23 | 航天科工惯性技术有限公司 | Vibrate rectification error test Acquisition Circuit and the acquisition system with it |
| CN112345797A (en) * | 2020-11-04 | 2021-02-09 | 中国工程物理研究院电子工程研究所 | MEMS accelerometer sensitive structure radiation effect on-line testing device and method |
-
2012
- 2012-06-13 CN CN 201220278277 patent/CN202710599U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103274352A (en) * | 2013-05-23 | 2013-09-04 | 安徽海聚信息科技有限责任公司 | MEMS module and control system based on same |
| CN106225917A (en) * | 2016-09-30 | 2016-12-14 | 上海华阳检测仪器有限公司 | Vibration signal acquisition device and signal processing method |
| CN109669055A (en) * | 2017-10-13 | 2019-04-23 | 航天科工惯性技术有限公司 | Vibrate rectification error test Acquisition Circuit and the acquisition system with it |
| CN109669055B (en) * | 2017-10-13 | 2021-04-27 | 航天科工惯性技术有限公司 | Vibration rectification error test acquisition circuit and acquisition system with same |
| CN112345797A (en) * | 2020-11-04 | 2021-02-09 | 中国工程物理研究院电子工程研究所 | MEMS accelerometer sensitive structure radiation effect on-line testing device and method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20130613 |