WO2014206175A1 - Method for manufacturing non-punch through reverse conducting insulated gate bipolar transistor - Google Patents

Method for manufacturing non-punch through reverse conducting insulated gate bipolar transistor Download PDF

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Publication number
WO2014206175A1
WO2014206175A1 PCT/CN2014/078797 CN2014078797W WO2014206175A1 WO 2014206175 A1 WO2014206175 A1 WO 2014206175A1 CN 2014078797 W CN2014078797 W CN 2014078797W WO 2014206175 A1 WO2014206175 A1 WO 2014206175A1
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type
bipolar transistor
insulated gate
type substrate
gate bipolar
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PCT/CN2014/078797
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French (fr)
Chinese (zh)
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黄璇
邓小社
王根毅
王万礼
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无锡华润上华半导体有限公司
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Publication of WO2014206175A1 publication Critical patent/WO2014206175A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66234—Bipolar junction transistors [BJT]
    • H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
    • H01L29/66333—Vertical insulated gate bipolar transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
    • H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395—Vertical transistors, e.g. vertical IGBT

Definitions

  • the present invention relates to an insulated gate bipolar transistor technology, and more particularly to a method of fabricating a non-punch-through reverse conducting insulated gate bipolar transistor.
  • Figure 1 is a conventional non-punch-through reverse conducting insulated gate bipolar transistor (Non Punch Through Reverse) Conducting Insulated Gate Bipolar Transistor, NPT RC IGBT) internal structure section schematic.
  • the front structure of the IGBT is the same as VDMOS except that a P-type layer is added between the drain and drain regions.
  • a process similar to that of manufacturing a field effect transistor is performed on the front side, and then the silicon wafer is thinned, and then a P+ emitter region is formed on the back surface thereof (that is, the extra P-type layer is formed).
  • the difficulty of this method mainly has two aspects: First, the need to reduce the silicon wafer flow capacity, especially for the common IGBT below 1200 volts, the thickness of which is below 200 microns, the film circulation process is very demanding; A special double exposure machine is required to expose the wafer.
  • a method for fabricating a non-punch-through reverse conducting insulated gate bipolar transistor comprising the steps of: providing an N-type substrate; forming a P+ emitter region by trench filling on the N-type substrate; Forming an N-type drift region on one side of the N-type substrate having a P+ emitter region; preparing a front surface structure of the insulated gate bipolar transistor on the N-type drift region; thinning the N-type substrate to the back surface Exposing the P+ emitter region; forming a metal electrode on the back surface of the N-type substrate.
  • the N-type substrate has a thickness of 100 to 650 microns
  • the N-type drift region has a thickness of 10 to 650 microns
  • the thickness of the N-type substrate and the N-type drift region is It is equivalent to the thickness of a normal circulating silicon wafer.
  • the normally flowing silicon wafer is a 6 inch silicon wafer having a thickness of 625 microns or 675 microns, or an 8 inch silicon wafer having a thickness of 725 microns.
  • the normally flowing silicon wafer is a 6 inch silicon wafer
  • the N-type drift region is 300 microns thick
  • the N-type substrate is 325 microns or 375 microns thick.
  • the normally flowing silicon wafer is an 8-inch silicon wafer
  • the N-type drift region is 400 microns thick
  • the N-type substrate is 325 microns thick.
  • the step of forming a P+ emitter region by trench filling on the N-type substrate comprises: photolithographically forming an etched pattern on the N-type substrate; The N-type substrate is etched to form a trench; the trench is filled with P-type silicon; and the surface of the N-type substrate and the P-type silicon are ground.
  • the P-type silicon is monocrystalline silicon, polycrystalline silicon, or amorphous silicon.
  • the method further includes the polysilicon and the amorphous silicon being heated to form single crystal silicon.
  • the P-type silicon has a resistivity of 0.001 to 50 ohm.cm.
  • the N-type substrate has a resistivity of 0.001 to 10 ohm.cm
  • the N-type drift region has a resistivity of 5 to 500 ohm.cm.
  • the metal electrode in the step of forming a metal electrode on the back surface of the N-type substrate, may be formed by sputtering or evaporation.
  • the N-type substrate is thinned using mechanical grinding.
  • the step of preparing a front side structure of the insulated gate bipolar transistor on the N-type drift region includes: forming a P-type body region on the N-type drift region; and forming the P-type body region; Forming an N-type emitter region on the region; forming a gate layer on the N-type channel between the P-type body regions; extracting an emitter electrode on the N-type emitter region, and extracting a gate electrode on the gate layer electrode.
  • the above method adopts trench filling and epitaxial bonding to prepare NPT RC. IGBT.
  • the P/N spacer structure on the N-type substrate can be operated by a conventional photolithography machine and an ion trench filling device, and the thickness of the wafer after the epitaxy is the same as that of the normal flow wafer, and thus the conventional conventional process compatible.
  • FIG. 1 is a schematic cross-sectional view showing the internal structure of a conventional NPT RC IGBT
  • FIG. 2 is a flow chart showing a method of manufacturing an NPT IGBT according to an embodiment
  • 4(a) and 4(b) are NPT RC IGBT structures corresponding to step S102 of FIG. 2;
  • FIG. 5 is an NPT RC IGBT structure corresponding to step S103 of FIG. 2;
  • NPT RC IGBT structure corresponding to step S104 of FIG. 2;
  • FIG. 7 is an NPT RC IGBT structure corresponding to step S105 of FIG. 2;
  • FIG. 8 is an NPT RC IGBT structure corresponding to step S106 of FIG. 2.
  • FIG. 2 is a flow chart showing a method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to an embodiment. The method includes the following steps S101 to S106.
  • Step S101 providing an N-type substrate.
  • the N-type substrate refers to a substrate formed by doping N-type ions into a semiconductor material, and is formed into a wafer shape of a standard size (6 inches or 8 inches, etc.), on which various semiconductor processes can be performed, such as Figure 3 shows.
  • the N-type substrate has a thickness of 100 to 650 ⁇ m and a resistivity of 0.001 to 10 ohm•cm ( ⁇ •cm).
  • the N-type substrate 100 serves as a support for the subsequent epitaxial layer and is also used to form the final P-type layer.
  • Step S102 forming a P+ emitter region by using a trench fill on the N-type substrate.
  • a plurality of P-type regions 102 are formed on the N-type substrate 100 at intervals.
  • the P-type region 102 is formed by trench filling.
  • the trench filling specifically includes the following steps:
  • Step S121 lithographically forming an etched pattern on the N-type substrate.
  • This step is a conventional step of photolithography, including steps of coating photoresist, baking, photolithography, cleaning, and the like.
  • an etched pattern is formed on the N-type substrate 100, that is, a part of the surface of the N-type substrate 100 is covered by the photoresist 200, and the other portion is exposed. The exposed portion is the area used to form the P-type region.
  • Step S122 etching the N-type substrate according to the etching pattern to form a trench.
  • the depth of the trench is consistent with or slightly larger than the depth at which the P+ emitter region is formed.
  • Step S123 filling the trench with P-type silicon.
  • the P-type silicon is single crystal silicon, polycrystalline silicon or amorphous silicon.
  • polycrystalline silicon and amorphous silicon single crystal silicon is also formed through a heating step.
  • the filled P-type silicon has a resistivity of 0.001 to 50 ohm.cm, which is consistent with the resistivity of the N-type substrate 100.
  • Step S124 Smoothing the surface of the N-type substrate and the P-type silicon. Specifically, chemical mechanical polishing or the like can be used. After this step, a plurality of spaced P-type regions 102 as shown in FIG. 4, that is, P+ emitter regions of the finally formed IGBT, can be formed on the N-type substrate 100.
  • Step S103 epitaxially preparing an N-type drift region on one side of the N-type substrate having a P+ emitter region.
  • epitaxial fabrication refers to forming a substrate, referred to as an epitaxial layer, over the N-type substrate 100. That is, the N-type drift region 300 shown in FIG.
  • the technique for preparing the epitaxial layer is relatively conventional and will not be described here.
  • the thickness of the formed N-type drift region 300 is 10 to 650 ⁇ m, and the sum of the thicknesses of the N-type substrate 100 is equivalent to the thickness of the normal-flow silicon wafer.
  • the N-type drift region 300 is used to form other layers of the IGBT other than the P+ emitter region, and is referred to as a front surface structure of the IGBT in this embodiment. That is, the thickness of the N-type drift region 300 can be used to form a complete IGBT front surface structure, and the thickness together with the N-type substrate 100 is equivalent to the thickness of a normal flow silicon wafer.
  • a normal flow silicon wafer is typically a 6 inch silicon wafer having a thickness of 625 microns or 675 microns, or an 8 inch silicon wafer having a thickness of 725 microns.
  • examples of possible thicknesses are: when used in a 6 inch silicon wafer process, the N-type drift region 300 is 300 microns thick, the N-type substrate 100 is 325 microns or 375 microns thick; when used in an 8-inch silicon wafer process The N-type drift region 300 is 400 microns thick, and the N-type substrate 100 is 325 microns thick.
  • other thicknesses satisfying the above two conditions can also be selected.
  • the resistivity of the N-type drift region 300 is 5 to 500 ohm•cm ( ⁇ •cm).
  • Step S104 preparing a front structure of the insulated gate bipolar transistor on the N-type drift region.
  • the front structure is shown in FIG. 6.
  • This step includes forming a P-type body region 302 on the N-type drift region 300 and forming an N-type emitter region 304 on the P-type body region 302. Between the two P-type body regions 302 is an N-type channel, and a gate layer 306 is formed on the N-type channel. They are then taken up through the electrodes as emitters and gates.
  • Step S105 thinning the N-type substrate to the N-type channel.
  • the N-type substrate 100 is thinned from a direction facing away from the P-type region 102 toward the P-type region 102 until the P-type region 102 is also exposed on the back surface of the N-type substrate 100.
  • the thinned N-type substrate 100 is as shown in FIG.
  • the manner in which the N-type substrate 100 is thinned may be mechanically ground. It can be understood that in order to reduce the processing time at the time of thinning and to avoid the waste generated by the N-type substrate 100, the thickness of the N-type substrate 100 should be as small as possible while ensuring the safety of circulation.
  • Step S106 forming a metal electrode on the back surface of the N-type substrate. That is, a metal layer is formed on the P+ emitter region and thus the electrode acts as a collector of the entire IGBT, and finally forms an NPT Refer to Figure 7 for the complete structure of the IGBT.
  • the metal electrode may be formed by sputtering or evaporation.
  • NPT RC is prepared by combining trench filling and epitaxy. IGBT.
  • the P/N spacer structure on the N-type substrate 100 can be operated by a conventional photolithography machine and a trench filling device, and the thickness of the wafer after epitaxial extension is the same as that of the normal flow wafer, and thus the conventional conventional process compatible.

Abstract

A method for manufacturing a non-punch through reverse conducting insulated gate bipolar transistor, comprising the following steps: providing an N-type substrate (100); forming a P+ transmitting region (102) on the N-type substrate (100) by adopting the manner of digging a groove and filling same; epitaxially preparing an N-type drift region (300) on one surface of the N-type substrate (100) which is provided with the P+ transmitting region (102); preparing a front surface structure of an insulated gate bipolar transistor on the N-type drift region (300); thinning the N-type substrate (100) to expose the P+ transmitting region (102) from the back surface thereof; and forming a metal electrode on the back surface of the N-type substrate (100). The above-mentioned method adopts the combination of the manner of digging a groove and filling same with an epitaxial manner to prepare a non-punch through reverse conducting insulated gate bipolar transistor, so as to be compatible with the conventional silicon wafer technology, and therefore, there is no need for higher requirements of the slice circulation technology, and there is also no need for a dedicated double-sided exposure machine.

Description

非穿通型反向导通绝缘栅双极型晶体管的制造方法Method for manufacturing non-punch-through reverse conducting insulated gate bipolar transistor
【技术领域】[Technical Field]
本发明涉及绝缘栅双极型晶体管技术，特别是涉及一种非穿通型反向导通绝缘栅双极型晶体管的制造方法。The present invention relates to an insulated gate bipolar transistor technology, and more particularly to a method of fabricating a non-punch-through reverse conducting insulated gate bipolar transistor.
【背景技术】【Background technique】
图1是一种传统的非穿通型反向导通绝缘栅双极晶体管（Non Punch Through Reverse Conducting Insulated Gate Bipolar Transistor，NPT RC IGBT）内部结构断面示意图。IGBT的正面结构与VDMOS相同，只是在漏极和漏区之间增加了一个P型层。传统的制造方法中，在其正面进行与制造场效应晶体管类似的工艺，然后将硅片减薄，接着在其背面形成P+发射区（也即制造该多出的P型层）。这种方法的难点主要有两个方面：一、需要有减薄硅片流通能力，特别是对于常见的1200伏以下的IGBT，其厚度在200微米以下，对薄片流通工艺要求很高；二、需要专门的双面曝光机对硅片曝光。Figure 1 is a conventional non-punch-through reverse conducting insulated gate bipolar transistor (Non Punch Through Reverse) Conducting Insulated Gate Bipolar Transistor, NPT RC IGBT) internal structure section schematic. The front structure of the IGBT is the same as VDMOS except that a P-type layer is added between the drain and drain regions. In the conventional manufacturing method, a process similar to that of manufacturing a field effect transistor is performed on the front side, and then the silicon wafer is thinned, and then a P+ emitter region is formed on the back surface thereof (that is, the extra P-type layer is formed). The difficulty of this method mainly has two aspects: First, the need to reduce the silicon wafer flow capacity, especially for the common IGBT below 1200 volts, the thickness of which is below 200 microns, the film circulation process is very demanding; A special double exposure machine is required to expose the wafer.
【发明内容】 [Summary of the Invention]
基于此，有必要针对提供一种不需要双面曝光机且不需要较高的薄片流通工艺要求的非穿通型反向导通绝缘栅双极型晶体管的制造方法。Based on this, it is necessary to provide a method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor that does not require a double exposure machine and does not require a high sheet flow process requirement.
一种非穿通型反向导通绝缘栅双极型晶体管的制造方法，包括如下步骤：提供N型衬底；在所述N型衬底上采用挖槽填充的方式形成P+发射区；在所述N型衬底上具有P+发射区的一面外延制备N型漂移区；在所述N型漂移区上制备所述绝缘栅双极型晶体管的正面结构；将所述N型衬底减薄至背面露出所述P+发射区；在所述N型衬底背面形成金属电极。A method for fabricating a non-punch-through reverse conducting insulated gate bipolar transistor, comprising the steps of: providing an N-type substrate; forming a P+ emitter region by trench filling on the N-type substrate; Forming an N-type drift region on one side of the N-type substrate having a P+ emitter region; preparing a front surface structure of the insulated gate bipolar transistor on the N-type drift region; thinning the N-type substrate to the back surface Exposing the P+ emitter region; forming a metal electrode on the back surface of the N-type substrate.
在其中一个实施例中，所述N型衬底的厚度为100~650微米，所述N型漂移区的厚度为10~650微米，且所述N型衬底和N型漂移区的厚度之和与正常流通硅片的厚度相当。In one embodiment, the N-type substrate has a thickness of 100 to 650 microns, the N-type drift region has a thickness of 10 to 650 microns, and the thickness of the N-type substrate and the N-type drift region is It is equivalent to the thickness of a normal circulating silicon wafer.
在其中一个实施例中，所述正常流通硅片是厚度为625微米或675微米的6英寸硅片，或者是厚度为725微米的8英寸硅片。In one embodiment, the normally flowing silicon wafer is a 6 inch silicon wafer having a thickness of 625 microns or 675 microns, or an 8 inch silicon wafer having a thickness of 725 microns.
在其中一个实施例中，所述正常流通硅片采用6英寸硅片，所述N型漂移区为300微米厚，所述N型衬底为325微米或375微米厚。In one embodiment, the normally flowing silicon wafer is a 6 inch silicon wafer, the N-type drift region is 300 microns thick, and the N-type substrate is 325 microns or 375 microns thick.
在其中一个实施例中，所述正常流通硅片采用8英寸硅片，所述N型漂移区为400微米厚，所述N型衬底为325微米厚。In one embodiment, the normally flowing silicon wafer is an 8-inch silicon wafer, the N-type drift region is 400 microns thick, and the N-type substrate is 325 microns thick.
在其中一个实施例中，所述在N型衬底上采用挖槽填充的方式形成P+发射区的步骤包括：在所述N型衬底上光刻形成刻蚀图形；根据所述刻蚀图形对N型衬底进行腐蚀形成沟槽；在所述沟槽内填充P型硅；将所述N型衬底表面和P型硅磨平。In one embodiment, the step of forming a P+ emitter region by trench filling on the N-type substrate comprises: photolithographically forming an etched pattern on the N-type substrate; The N-type substrate is etched to form a trench; the trench is filled with P-type silicon; and the surface of the N-type substrate and the P-type silicon are ground.
在其中一个实施例中，所述P型硅为单晶硅、多晶硅或非晶硅。In one embodiment, the P-type silicon is monocrystalline silicon, polycrystalline silicon, or amorphous silicon.
在其中一个实施例中，所述方法进一步包括：所述多晶硅和非晶硅经过加热以形成单晶硅。In one embodiment, the method further includes the polysilicon and the amorphous silicon being heated to form single crystal silicon.
在其中一个实施例中，所述P型硅的电阻率为0.001~50欧姆•厘米。In one embodiment, the P-type silicon has a resistivity of 0.001 to 50 ohm.cm.
在其中一个实施例中，所述N型衬底的电阻率为0.001~10欧姆•厘米，所述N型漂移区的电阻率为5~500欧姆•厘米。In one embodiment, the N-type substrate has a resistivity of 0.001 to 10 ohm.cm, and the N-type drift region has a resistivity of 5 to 500 ohm.cm.
在其中一个实施例中，所述在N型衬底背面形成金属电极的步骤中，可以采用溅射或蒸发方式形成所述金属电极。In one embodiment, in the step of forming a metal electrode on the back surface of the N-type substrate, the metal electrode may be formed by sputtering or evaporation.
在其中一个实施例中，采用机械研磨减薄所述N型衬底。In one of the embodiments, the N-type substrate is thinned using mechanical grinding.
在其中一个实施例中，所述在N型漂移区上制备绝缘栅双极型晶体管的正面结构的步骤包括：在所述N型漂移区上间隔形成P型体区；在所述P型体区上形成N型发射区；在所述P型体区之间的N型沟道上形成栅极层；在所述N型发射区上引出发射极电极，在所述栅极层上引出栅极电极。In one embodiment, the step of preparing a front side structure of the insulated gate bipolar transistor on the N-type drift region includes: forming a P-type body region on the N-type drift region; and forming the P-type body region; Forming an N-type emitter region on the region; forming a gate layer on the N-type channel between the P-type body regions; extracting an emitter electrode on the N-type emitter region, and extracting a gate electrode on the gate layer electrode.
上述方法采用挖槽填充与外延方式结合制备NPT RC IGBT。其中，N型衬底上的P/N交隔结构可以采用常规光刻机和离子挖槽填充设备作业，在其上外延后圆片厚度与正常流通圆片相同，因此与现有的常规工艺兼容。此外，也无需专用的双面曝光设备，大大降低工艺成本。The above method adopts trench filling and epitaxial bonding to prepare NPT RC. IGBT. Wherein, the P/N spacer structure on the N-type substrate can be operated by a conventional photolithography machine and an ion trench filling device, and the thickness of the wafer after the epitaxy is the same as that of the normal flow wafer, and thus the conventional conventional process compatible. In addition, there is no need for a dedicated double-sided exposure device, which greatly reduces the process cost.
【附图说明】[Description of the Drawings]
图1为传统的NPT RC IGBT内部结构断面示意图；1 is a schematic cross-sectional view showing the internal structure of a conventional NPT RC IGBT;
图2为一实施例的NPT IGBT的制造方法流程图；2 is a flow chart showing a method of manufacturing an NPT IGBT according to an embodiment;
图3为与图2的步骤S101对应的NPT RC IGBT结构；3 is an NPT RC IGBT structure corresponding to step S101 of FIG. 2;
图4（a）和图4（b）为与图2的步骤S102对应的NPT RC IGBT结构；4(a) and 4(b) are NPT RC IGBT structures corresponding to step S102 of FIG. 2;
图5为与图2的步骤S103对应的NPT RC IGBT结构；FIG. 5 is an NPT RC IGBT structure corresponding to step S103 of FIG. 2;
图6为与图2的步骤S104对应的NPT RC IGBT结构；6 is an NPT RC IGBT structure corresponding to step S104 of FIG. 2;
图7为与图2的步骤S105对应的NPT RC IGBT结构；FIG. 7 is an NPT RC IGBT structure corresponding to step S105 of FIG. 2;
图8为与图2的步骤S106对应的NPT RC IGBT结构。FIG. 8 is an NPT RC IGBT structure corresponding to step S106 of FIG. 2.
【具体实施方式】 【detailed description】
以下结合附图和实施例对本发明进行进一步说明。The invention is further described below in conjunction with the drawings and embodiments.
如图2所示，为一实施例的非穿通型反向导通绝缘栅双极型晶体管的制造方法流程图。该方法包括如下步骤S101~S106。2 is a flow chart showing a method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to an embodiment. The method includes the following steps S101 to S106.
步骤S101：提供N型衬底。N型衬底是指在半导体材料中掺入N型离子后所形成的衬底，做成标准尺寸（6英寸或8英寸等）的圆片形状，能够在其上进行各种半导体工艺，如图3所示。所述N型衬底的厚度为100~650微米，电阻率为0.001~10欧姆•厘米（Ω•cm）。N型衬底100作为后续的外延层的支撑，同时也用于形成最后的P型层。Step S101: providing an N-type substrate. The N-type substrate refers to a substrate formed by doping N-type ions into a semiconductor material, and is formed into a wafer shape of a standard size (6 inches or 8 inches, etc.), on which various semiconductor processes can be performed, such as Figure 3 shows. The N-type substrate has a thickness of 100 to 650 μm and a resistivity of 0.001 to 10 ohm•cm (Ω•cm). The N-type substrate 100 serves as a support for the subsequent epitaxial layer and is also used to form the final P-type layer.
步骤S102：在所述N型衬底上采用挖槽填充的方式形成P+发射区。参考图4，N型衬底100上间隔形成了多个P型区102。该P型区102是采用挖槽填充方式形成的。挖槽填充具体包括以下步骤：Step S102: forming a P+ emitter region by using a trench fill on the N-type substrate. Referring to FIG. 4, a plurality of P-type regions 102 are formed on the N-type substrate 100 at intervals. The P-type region 102 is formed by trench filling. The trench filling specifically includes the following steps:
步骤S121：在N型衬底上光刻形成刻蚀图形。该步骤是光刻的常规步骤，包括涂覆光刻胶、烘焙、光刻蚀、清洗等步骤。经过光刻后，在N型衬底100上形成了刻蚀图形，也即N型衬底100的表面一部分被光刻胶200覆盖，另一部分露出。露出的部分是用来形成P型区的区域。Step S121: lithographically forming an etched pattern on the N-type substrate. This step is a conventional step of photolithography, including steps of coating photoresist, baking, photolithography, cleaning, and the like. After photolithography, an etched pattern is formed on the N-type substrate 100, that is, a part of the surface of the N-type substrate 100 is covered by the photoresist 200, and the other portion is exposed. The exposed portion is the area used to form the P-type region.
步骤S122：根据所述刻蚀图形对N型衬底进行腐蚀形成沟槽。沟槽的深度与形成P+发射区的深度一致或略大。Step S122: etching the N-type substrate according to the etching pattern to form a trench. The depth of the trench is consistent with or slightly larger than the depth at which the P+ emitter region is formed.
步骤S123：在所述沟槽内填充P型硅。所述P型硅为单晶硅、多晶硅或非晶硅。对于多晶硅和非晶硅，还经过加热步骤形成单晶硅。所填充的P型硅的电阻率为0.001~50欧姆•厘米，与N型衬底100的电阻率一致。Step S123: filling the trench with P-type silicon. The P-type silicon is single crystal silicon, polycrystalline silicon or amorphous silicon. For polycrystalline silicon and amorphous silicon, single crystal silicon is also formed through a heating step. The filled P-type silicon has a resistivity of 0.001 to 50 ohm.cm, which is consistent with the resistivity of the N-type substrate 100.
步骤S124：将所述N型衬底表面和P型硅磨平。具体可以采用化学机械研磨等方式。经过本步骤之后，就可以在N型衬底100上形成如图4所示的多个间隔的P型区102，也即最后形成的IGBT的P+发射区。Step S124: Smoothing the surface of the N-type substrate and the P-type silicon. Specifically, chemical mechanical polishing or the like can be used. After this step, a plurality of spaced P-type regions 102 as shown in FIG. 4, that is, P+ emitter regions of the finally formed IGBT, can be formed on the N-type substrate 100.
步骤S103：在所述N型衬底上具有P+发射区的一面外延制备N型漂移区。参考图5，外延制备是指在N型衬底100之上再形成一个衬底，称为外延层。也即图5所示的N型漂移区300。制备外延层的技术较为常规，在此不赘述。所形成的N型漂移区300的厚度为10~650微米，并且与N型衬底100的厚度之和与正常流通硅片的厚度相当。N型漂移区300用于形成IGBT中除P+发射区之外的其他层，本实施例中，称为IGBT的正面结构。也即是说，N型漂移区300的厚度既要能够用于形成完整的IGBT正面结构，又要与N型衬底100一起的厚度与正常流通硅片的厚度相当。正常流通硅片一般是厚度为625微米或675微米的6英寸硅片，或者是厚度为725微米的8英寸硅片。因此，可行的厚度示例为：当用于6英寸硅片工艺时，N型漂移区300为300微米厚，N型衬底100为325微米或375微米厚；当用于8英寸硅片工艺时，N型漂移区300为400微米厚，N型衬底100为325微米厚。当然，也可以选择其他满足上述两个条件的厚度。Step S103: epitaxially preparing an N-type drift region on one side of the N-type substrate having a P+ emitter region. Referring to FIG. 5, epitaxial fabrication refers to forming a substrate, referred to as an epitaxial layer, over the N-type substrate 100. That is, the N-type drift region 300 shown in FIG. The technique for preparing the epitaxial layer is relatively conventional and will not be described here. The thickness of the formed N-type drift region 300 is 10 to 650 μm, and the sum of the thicknesses of the N-type substrate 100 is equivalent to the thickness of the normal-flow silicon wafer. The N-type drift region 300 is used to form other layers of the IGBT other than the P+ emitter region, and is referred to as a front surface structure of the IGBT in this embodiment. That is, the thickness of the N-type drift region 300 can be used to form a complete IGBT front surface structure, and the thickness together with the N-type substrate 100 is equivalent to the thickness of a normal flow silicon wafer. A normal flow silicon wafer is typically a 6 inch silicon wafer having a thickness of 625 microns or 675 microns, or an 8 inch silicon wafer having a thickness of 725 microns. Thus, examples of possible thicknesses are: when used in a 6 inch silicon wafer process, the N-type drift region 300 is 300 microns thick, the N-type substrate 100 is 325 microns or 375 microns thick; when used in an 8-inch silicon wafer process The N-type drift region 300 is 400 microns thick, and the N-type substrate 100 is 325 microns thick. Of course, other thicknesses satisfying the above two conditions can also be selected.
N型漂移区300的电阻率为5~500欧姆•厘米（Ω•cm）。The resistivity of the N-type drift region 300 is 5 to 500 ohm•cm (Ω•cm).
步骤S104：在所述N型漂移区上制备绝缘栅双极型晶体管的正面结构。该正面结构如图6所示。本步骤包括在N型漂移区300上形成P型体区302和在P型体区302上形成N型发射区304。两个P型体区302之间是N型沟道，N型沟道上形成栅极层306。然后分别经过电极引出作为发射极和栅极。Step S104: preparing a front structure of the insulated gate bipolar transistor on the N-type drift region. The front structure is shown in FIG. 6. This step includes forming a P-type body region 302 on the N-type drift region 300 and forming an N-type emitter region 304 on the P-type body region 302. Between the two P-type body regions 302 is an N-type channel, and a gate layer 306 is formed on the N-type channel. They are then taken up through the electrodes as emitters and gates.
步骤S105：将所述N型衬底减薄至N型通道处。将N型衬底100自背向P型区102的一面向P型区102的方向减薄，直至P型区102在N型衬底100的背面也露出。减薄后的N型衬底100如图7所示。减薄N型衬底100的方式可以采用机械研磨。可以理解，为减少减薄时的处理时间和避免减薄N型衬底100产生的浪费，N型衬底100的厚度在保证流通安全的前提下应当尽可能小。Step S105: thinning the N-type substrate to the N-type channel. The N-type substrate 100 is thinned from a direction facing away from the P-type region 102 toward the P-type region 102 until the P-type region 102 is also exposed on the back surface of the N-type substrate 100. The thinned N-type substrate 100 is as shown in FIG. The manner in which the N-type substrate 100 is thinned may be mechanically ground. It can be understood that in order to reduce the processing time at the time of thinning and to avoid the waste generated by the N-type substrate 100, the thickness of the N-type substrate 100 should be as small as possible while ensuring the safety of circulation.
步骤S106：在所述N型衬底背面形成金属电极。即在P+发射区上形成金属层并因此电极作为整个IGBT的集电极，并最终形成NPT IGBT的完整结构，参考图7。本步骤中，可以采用溅射或蒸发方式形成所述金属电极。Step S106: forming a metal electrode on the back surface of the N-type substrate. That is, a metal layer is formed on the P+ emitter region and thus the electrode acts as a collector of the entire IGBT, and finally forms an NPT Refer to Figure 7 for the complete structure of the IGBT. In this step, the metal electrode may be formed by sputtering or evaporation.
上述方法中，采用挖槽填充与外延方式结合制备NPT RC IGBT。其中，N型衬底100上的P/N交隔结构可以采用常规光刻机和挖槽填充设备作业，在其上外延后圆片厚度与正常流通圆片相同，因此与现有的常规工艺兼容。此外，也无需专用的双面曝光设备，大大降低工艺成本。In the above method, NPT RC is prepared by combining trench filling and epitaxy. IGBT. Wherein, the P/N spacer structure on the N-type substrate 100 can be operated by a conventional photolithography machine and a trench filling device, and the thickness of the wafer after epitaxial extension is the same as that of the normal flow wafer, and thus the conventional conventional process compatible. In addition, there is no need for a dedicated double-sided exposure device, which greatly reduces the process cost.
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对本发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。 The above-mentioned embodiments are merely illustrative of several embodiments of the present invention, and the description thereof is more specific and detailed, but is not to be construed as limiting the scope of the invention. It should be noted that a number of variations and modifications may be made by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of the invention should be determined by the appended claims.

Claims (13)

  1. 一种非穿通型反向导通绝缘栅双极型晶体管的制造方法，包括如下步骤：A method for manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor includes the following steps:
    提供N型衬底；Providing an N-type substrate;
    在所述N型衬底上采用挖槽填充的方式形成P+发射区；Forming a P+ emitter region on the N-type substrate by trench filling;
    在所述N型衬底上具有P+发射区的一面外延制备N型漂移区；Forming an N-type drift region on one side of the N-type substrate having a P+ emitter region;
    在所述N型漂移区上制备所述绝缘栅双极型晶体管的正面结构；Preparing a front structure of the insulated gate bipolar transistor on the N-type drift region;
    将所述N型衬底减薄至背面露出所述P+发射区；及Thinning the N-type substrate to the back surface to expose the P+ emitter region;
    在所述N型衬底背面形成金属电极。A metal electrode is formed on the back surface of the N-type substrate.
  2. 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述N型衬底的厚度为100~650微米，所述N型漂移区的厚度为10~650微米，且所述N型衬底和N型漂移区的厚度之和与正常流通硅片的厚度相当。The method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 1, wherein the thickness of the N-type substrate is 100 to 650 μm, and the thickness of the N-type drift region is 10 to 650 microns, and the sum of the thicknesses of the N-type substrate and the N-type drift region is equivalent to the thickness of the normal flow silicon wafer.
  3. 根据权利要求2所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述正常流通硅片是厚度为625微米或675微米的6英寸硅片，或者是厚度为725微米的8英寸硅片。The method of fabricating a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 2, wherein said normal circulating silicon wafer is a 6-inch silicon wafer having a thickness of 625 micrometers or 675 micrometers, or a thickness It is a 725 micron 8-inch wafer.
  4. 根据权利要求3所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述正常流通硅片采用6英寸硅片，所述N型漂移区为300微米厚，所述N型衬底为325微米或375微米厚。The method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 3, wherein said normal circulating silicon wafer is a 6-inch silicon wafer, and said N-type drift region is 300 micrometers thick. The N-type substrate is 325 microns or 375 microns thick.
  5. 根据权利要求3所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述正常流通硅片采用8英寸硅片，所述N型漂移区为400微米厚，所述N型衬底为325微米厚。The method of fabricating a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 3, wherein said normal flow silicon wafer is an 8-inch silicon wafer, and said N-type drift region is 400 micrometers thick. The N-type substrate is 325 microns thick.
  6. 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述在N型衬底上采用挖槽填充的方式形成P+发射区的步骤包括：The method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 1, wherein the step of forming a P+ emitter region by using a trench fill on the N-type substrate comprises:
    在所述N型衬底上光刻形成刻蚀图形；Photolithographically forming an etched pattern on the N-type substrate;
    根据所述刻蚀图形对N型衬底进行腐蚀形成沟槽；Etching the N-type substrate according to the etched pattern to form a trench;
    在所述沟槽内填充P型硅；Filling the trench with P-type silicon;
    将所述N型衬底表面和P型硅磨平。The N-type substrate surface and the P-type silicon are ground.
  7. 根据权利要求6所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述P型硅为单晶硅、多晶硅或非晶硅。The method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 6, wherein the P-type silicon is single crystal silicon, polycrystalline silicon or amorphous silicon.
  8. 根据权利要求7所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述方法进一步包括：所述多晶硅和非晶硅的P型硅经过加热，以形成单晶硅。The method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 7, wherein the method further comprises: heating the polysilicon and amorphous silicon P-type silicon to form a single Crystalline silicon.
  9. 根据权利要求6所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述P型硅的电阻率为0.001~50欧姆•厘米。The method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 6, wherein the P-type silicon has a resistivity of 0.001 to 50 ohm.cm.
  10. 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述N型衬底的电阻率为0.001~10欧姆•厘米，所述N型漂移区的电阻率为5~500欧姆•厘米。The method of fabricating a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 1, wherein said N-type substrate has a resistivity of 0.001 to 10 ohm.cm, said N-type drift region The resistivity is 5~500 ohm•cm.
  11. 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述在N型衬底背面形成金属电极的步骤中，可以采用溅射或蒸发方式形成所述金属电极。The method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 1, wherein the step of forming a metal electrode on the back surface of the N-type substrate may be formed by sputtering or evaporation. The metal electrode.
  12. 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，所述在N型漂移区上制备绝缘栅双极型晶体管的正面结构的步骤包括：The method of fabricating a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 1, wherein the step of preparing the front structure of the insulated gate bipolar transistor on the N-type drift region comprises:
    在所述N型漂移区上间隔形成P型体区；Forming a P-type body region on the N-type drift region;
    在所述P型体区上形成N型发射区；Forming an N-type emitter region on the P-type body region;
    在所述P型体区之间的N型沟道上形成栅极层；及Forming a gate layer on the N-type channel between the P-type body regions; and
    在所述N型发射区上引出发射极电极，在所述栅极层上引出栅极电极。An emitter electrode is drawn on the N-type emitter region, and a gate electrode is drawn on the gate layer.
  13. 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法，其特征在于，采用机械研磨减薄所述N型衬底。The method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to claim 1, wherein the N-type substrate is thinned by mechanical polishing.
PCT/CN2014/078797 2013-06-24 2014-05-29 Method for manufacturing non-punch through reverse conducting insulated gate bipolar transistor WO2014206175A1 (en)

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