WO2014201733A1 - 信号线倾斜角测量方法及装置 - Google Patents

信号线倾斜角测量方法及装置 Download PDF

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Publication number
WO2014201733A1
WO2014201733A1 PCT/CN2013/078729 CN2013078729W WO2014201733A1 WO 2014201733 A1 WO2014201733 A1 WO 2014201733A1 CN 2013078729 W CN2013078729 W CN 2013078729W WO 2014201733 A1 WO2014201733 A1 WO 2014201733A1
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Prior art keywords
signal line
light
rotation angle
light intensity
light source
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PCT/CN2013/078729
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English (en)
French (fr)
Inventor
郑文达
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line

Definitions

  • the present invention relates to the field of display production technology, and in particular, to a signal line tilt angle measuring method and apparatus.
  • TFT-LCD Thin Film Transistor Liquid Crystal
  • the TFT-LCD includes an upper glass substrate (such as an Array substrate) and a lower glass substrate (such as a CF substrate), and the upper glass substrate and the lower glass substrate include a liquid crystal layer including liquid crystal molecules therein.
  • the main body of the TFT-LCD film manufacturing process includes film formation, cleaning, photoresist coating, exposure, development, drying, etching, photoresist removal, detection, etc., thereby forming a signal line on the glass substrate, and finally passing through a plurality of mask manufacturing processes. Forming a thin film transistor TFT) array.
  • the side surface 11 and the lower surface 12 of the signal line 10 have an inclination angle ⁇ .
  • the inclination angle ⁇ is controlled. At a suitable angle, the inclination angle ⁇ is prevented from being excessively large to prevent voids from occurring in the film to be covered, resulting in defects in the TFT-LCD substrate.
  • the prior art In order to monitor the tilt angle ⁇ of the signal line 10, the prior art generally performs glass cutting of the glass substrate being produced, and then sends it to the laboratory for tilt angle measurement by scanning electron microscopy (SEM) technology.
  • SEM scanning electron microscopy
  • the measurement method of the signal line tilt angle of the prior art is a scanning electron microscope slicing method
  • the method is to manually measure the signal line tilt angle, the process is cumbersome, and the error is easy due to the angle problem of the slicing; and the method requires the glass
  • the substrate is subjected to the destructive measurement, which causes waste of materials, and cannot be effectively monitored in real time when the inclination angle of the signal line is abnormal, which seriously affects the product yield of the TFT-LCD.
  • An object of the present invention is to provide a method and a device for measuring a signal line tilt angle, which solve the technical problem that the measurement method of the signal line tilt angle is large in error, low in efficiency, and cumbersome in the prior art.
  • the present invention constructs a signal line tilt angle measuring method, wherein the method comprises the following steps:
  • the substrate to be measured is disposed on a carrying platform, the substrate to be measured includes a signal line, and the signal line includes an upper surface parallel to the substrate to be measured and an outer side surface on a side of the upper surface;
  • Providing a light source controlling the light source to rotate and emitting light to illuminate the outer side of the signal line, wherein the rotation is performed on the outer side of the signal line with the length direction of the signal line as an axis;
  • the rotation angle of the light source is acquired in real time, and the light intensity reflected from the outer side of the signal line and corresponding to the rotation angle is acquired by the light sensor;
  • a signal line tilt angle is generated according to a rotation angle corresponding to the maximum light intensity.
  • the present invention also constructs a signal line tilt angle measuring method, and the method includes the following steps:
  • the substrate to be measured is disposed on a carrying platform, the substrate to be measured includes a signal line, and the signal line includes an upper surface parallel to the substrate to be measured and an outer side surface on a side of the upper surface;
  • Providing a light source controlling the light source to rotate and emitting light to illuminate an outer side surface of the signal line, wherein the rotation is performed around an outer side of the signal line with an axial direction of the signal line as an axis;
  • the rotation angle of the light source and the light intensity corresponding to the rotation angle are acquired in real time; wherein the light intensity is the intensity of the light reflected by the outer side surface;
  • the present invention also constructs a signal line tilt angle measuring device, including:
  • a carrying platform for carrying a substrate to be measured wherein the substrate to be measured includes a signal line, the signal line includes an upper surface parallel to the substrate to be measured and an outer side surface on a side of the upper surface;
  • control unit configured to control the rotation of the light source and emit light to illuminate the outer side of the signal line, wherein the rotation is performed around the outer side of the signal line with the length direction of the signal line as an axis;
  • An angle recording unit configured to record a rotation angle of the light source during rotation of the light source
  • a light intensity acquiring unit configured to receive light reflected by an outer side of the signal line, and generate light intensity according to the received light
  • the result generating unit is configured to obtain a maximum value in the light intensity, obtain a rotation angle corresponding to the maximum value, and generate a signal line tilt angle according to the obtained rotation angle.
  • the present invention obtains the intensity of the light reflected by the outer side of the signal line by controlling the light source to be rotated around the outer side of the signal line, and matching the rotation angle of the light source corresponding to the maximum value of the light intensity.
  • the rotation angle of the light source corresponds to the inclination angle of the signal line.
  • the invention can accurately measure the inclination angle of the signal line, has small error, and can complete the measurement of the inclination angle of the signal line without cutting the substrate to be measured, and the process is simple, and can be effective in real time when the abnormality of the inclination angle of the signal line is found. Monitoring has improved the yield of TFT-LCD products.
  • Figure 1 is a schematic view showing a tilt angle of a signal line
  • FIG. 2 is a schematic flow chart of a method for measuring a tilt angle of a signal line according to a first embodiment of the present invention
  • 3A to 3D are schematic diagrams showing a process of measuring a tilt angle of a signal line in an embodiment of the present invention.
  • FIG. 4 is a schematic structural view of a signal line tilt angle measuring device according to an embodiment of the present invention.
  • FIG. 2 is a schematic flow chart of a method for measuring a signal line tilt angle according to an embodiment of the present invention.
  • step S201 the substrate to be measured is placed on the carrying platform.
  • FIG. 3A is a cross-sectional view of the substrate to be inspected.
  • the substrate to be inspected 30 includes a substrate body 31 to be detected and a signal line 32.
  • the signal line includes an upper surface 321 , an outer side surface 322 on a side of the upper surface 321 , and an opposite side of the upper surface 321 .
  • the lower surface 323, the upper surface 321 and the lower surface 323 of the signal line are parallel to the substrate 30 to be measured, and the signal line 32 is a metal wire.
  • step S202 the light source is controlled to rotate and emit light to illuminate the outer side of the signal line.
  • a light source such as a light-emitting diode (LED) lamp
  • a light source 40 is controlled with the longitudinal direction K of the signal line 32 as an axis (FIG. 3B), starting from the intersection L of the outer side surface 322 of the signal line 32 and the upper surface 321
  • the outer side surface 322 of the signal line 32 is rotated in the clockwise direction M (Fig. 3A) and rotated until the emitted light is parallel to the upper surface 321 or the lower surface 323 of the signal line 32.
  • step S203 during the rotation of the light source, the rotation angle of the light source and the light intensity corresponding to the rotation angle are acquired in real time.
  • the angle of rotation of the light source 40 referred to in the present invention is preferably an angle ⁇ of the light source 40 with respect to a vertical line Q on the surface of the signal line.
  • the surface vertical line Q of the signal line is perpendicular to the upper surface 321 of the signal line 32.
  • the rotation angle may be other angles, such as an angle between the light source 40 and the upper surface 321 of the signal line 32, as long as it can correspond to the signal line inclination angle ⁇ .
  • the light intensity referred to in the embodiment of the present invention is the intensity of light emitted from the light source 40 and reflected by the outer side surface 322 of the signal line 32.
  • the light emitted by the light source 40 is reflected by the outer side 322 of the signal line 32, and is received by a light receiver (not shown).
  • the light receiver receives the outer side of the signal line 32. After 322 reflected light, the corresponding light intensity is calculated.
  • step S204 a rotation angle corresponding to the maximum value of the light intensity is acquired, and a signal line inclination angle is generated according to a rotation angle corresponding to the maximum value of the light intensity.
  • the angle between the light source 40 and the vertical line Q is equal to the inclination angle ⁇ of the signal line, and therefore, after acquiring the maximum value of the light intensity, matching the rotation corresponding to the maximum value of the light intensity
  • the angle of rotation is the angle of inclination of the signal line, wherein the angle of rotation is the angle of the light source 40 relative to the vertical line Q.
  • the obtained rotation angle is the angle of the light source 40 with respect to the lower surface 323 of the signal line 32, the difference between the rotation angle and 90 degrees is calculated, and the absolute value of the difference is obtained.
  • the signal line tilt angle is the angle of the light source 40 with respect to the lower surface 323 of the signal line 32.
  • all of the real-time acquisition is performed in the process of controlling the light source 40 to start from the intersection L (Fig. 3A) and rotate until the emitted light is parallel with the upper surface 321 of the signal line 32.
  • the light intensity is compared one by one to obtain the maximum value of the light intensity, and the corresponding rotation angle is obtained according to the maximum value of the light intensity.
  • the embodiment of the invention can accurately measure the tilt angle of the signal line, and the error is small; and the measurement of the tilt angle of the signal line can be completed without cutting the substrate to be measured, the process is simple, and the number of discarded normal liquid crystal display panels is reduced, and the number of discarded LCD panels is reduced.
  • the particles generated by cutting the glass prevent the person from being injured by cutting the glass; and the embodiment of the invention can perform real-time and effective monitoring when the angle of the metal wire is abnormal, and the yield of the TFT-LCD product is improved.
  • FIG. 4 is a schematic structural diagram of a signal line tilt angle measuring apparatus according to an embodiment of the present invention.
  • the apparatus includes a light source 40, a carrying platform 51, a control unit 52, an angle recording unit 53, a light intensity acquisition unit 54, and a result generation unit 55.
  • the substrate to be measured 30 is carried by the carrying platform 51 when the signal is to be measured.
  • the substrate to be inspected 30 includes the substrate to be inspected 31 to be inspected. And a signal line 32 including an upper surface 321 , an outer side surface 322 on a side of the upper surface 321 , and a lower surface 323 disposed opposite the upper surface 321 .
  • control unit 52 controls the light source 40 to rotate and emit light to illuminate the outer side 322 of the signal line 32.
  • the control unit 52 controls the light source 40 to take the length direction K of the signal line 32 as an axis (FIG. 3B), from the intersection of the outer side surface 322 and the upper surface 321 of the signal line 32.
  • L starts to rotate in the clockwise direction M around the outer side surface 322 of the signal line 32 (Fig. 3A), and is rotated until the light emitted by the light source 40 is parallel to the upper surface 321 or the lower surface 323 of the signal line 32. until.
  • the angle recording unit 53 records the rotation angle of the light source 40 in real time.
  • the rotation angle of the light source 40 referred to in the present invention is preferably an angle ⁇ of the light source 40 with respect to a vertical line Q of the surface of the signal line, wherein the vertical line Q of the signal line is perpendicular to the surface.
  • the upper surface 321 of the signal line 32 The rotation angle may be other angles, such as an angle between the light source 40 and the upper surface 321 of the signal line 32, as long as it can correspond to the signal line inclination angle ⁇ , the angle recording unit 53.
  • the rotation angle sensor is not described herein because the rotation angle sensor is prior art.
  • the light intensity acquiring unit 54 receives the light reflected by the outer side of the signal line in real time, and according to the receiving The resulting light is calculated to produce light intensity.
  • the light intensity referred to in the embodiment of the present invention is the intensity of light emitted from the light source 40 and reflected by the outer side surface 322 of the signal line 32.
  • the light intensity acquisition unit 54 is preferably a light receiver. After the light receiver receives the light reflected by the outer side surface 322 of the signal line 32, the corresponding light intensity is calculated.
  • the result generating unit 55 is configured to process the results acquired by the angle recording unit 53 and the light intensity acquiring unit 54. Specifically, the result generating unit 55 obtains a light intensity maximum value from the light intensity acquiring unit 54, and then obtains a rotation angle corresponding to the maximum light intensity from the rotation angle recorded by the angle recording unit 53, and A signal line tilt angle is generated according to a rotation angle corresponding to the maximum light intensity.
  • the result generating unit 55 compares the light intensity acquired by the light intensity acquiring unit 54 one by one, acquires the light intensity maximum value, and then obtains the rotation angle recorded by the angle recording unit 53. The rotation angle corresponding to the maximum light intensity.
  • the angle between the light source 40 and the vertical line Q is equal to the inclination angle ⁇ of the signal line, and therefore, after acquiring the maximum value of the light intensity, matching the rotation corresponding to the maximum value of the light intensity
  • the angle of rotation is the angle of inclination of the signal line, wherein the angle of rotation is the angle of the light source 40 relative to the vertical line Q.
  • the obtained rotation angle is the angle of the light source 40 with respect to the lower surface 323 of the signal line 32, the difference between the rotation angle and 90 degrees is calculated, and the absolute value of the difference is obtained.
  • the signal line tilt angle is the angle of the light source 40 with respect to the lower surface 323 of the signal line 32.
  • the embodiment of the invention by controlling the light source to rotate around the outer side of the signal line, the light intensity reflected by the outer side of the signal line is obtained, and the rotation angle of the light source corresponding to the maximum value of the light intensity is matched, and the obtained light source rotation angle corresponds to The signal line is inclined.
  • the embodiment of the invention can accurately measure the inclination angle of the signal line, has small error, and can complete the measurement of the inclination angle of the signal line without cutting the substrate to be measured, and the process is simple, and can be performed when an abnormality occurs in the inclination angle of the signal line. Real-time and effective monitoring improves the yield of TFT-LCD products.

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  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
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Abstract

一种信号线倾斜角测量方法包括：控制光源（40）旋转并发射光线以照射信号线（32）外侧面（322），在光源（40）旋转过程中，实时的获取光源（40）的旋转角度以及对应旋转角度的光线强度；获取光线强度最大值所对应的旋转角度，并根据光线强度最大值所对应的旋转角度生成信号线倾斜角。还提供一种信号线倾斜角测量装置。该方法和装置能够准确测得信号线倾斜角度，且无需切割待测量基板即可完成对信号线倾斜角的测量。

Description

信号线倾斜角测量方法及装置 技术领域
本发明涉及显示器生产技术领域，特别是涉及一种信号线倾斜角测量方法及装置。
 背景技术
随着薄膜晶体管液晶显示器(Thin Film Transistor Liquid Crystal Display，TFT-LCD)的不断普及，对TFT-LCD的生产效率提出了很高的要求。
其中TFT-LCD包括上玻璃基板（譬如Array基板）和下玻璃基板（譬如CF基板），所述上玻璃基板和下玻璃基板包括有液晶层，所述液晶层内包括有液晶分子。TFT-LCD薄膜制作工艺主体包括成膜、清洗、涂光阻胶、曝光、显影、烘干、蚀刻、去光阻胶、检测等过程，从而在玻璃基板上形成信号线，经过多道光罩制作工艺最终形成薄膜晶体管( TFT)阵列。
譬如请参阅图1，所述信号线10的侧表面11和下表面12之间具有一倾斜角θ，为了保证信号线的导通，防止有断线的情况发生，会控制所述倾斜角θ在合适的角度，避免所述倾斜角θ过大，以避免接下来覆盖的薄膜有孔隙产生，造成TFT-LCD基板有缺陷。
为了监控所述信号线10倾斜角θ，现有技术通常是将正在生产的玻璃基板进行玻璃切割，再送至实验室通过扫描式电子显微（SEM）技术进行倾斜角测量。
由于现有技术的信号线倾斜角的测量方式都是扫描电子显微镜切片方式，该方式为人工测量信号线倾斜角，过程繁琐，容易因为切片的角度问题导致误差较大；而且该方式需要对玻璃基板进行破坏式测量，造成材料的浪费，且在发现信号线倾斜角异常时不能实时有效监控，严重影响TFT-LCD的产品良率。
因此，需解决现有技术中存在的上述技术问题。
 技术问题
本发明的一个目的在于提供一种信号线倾斜角测量方法及装置，以解决现有技术中对信号线倾斜角的测量方式误差大，效率低，过程繁琐的技术问题。
 技术解决方案
本发明构造了一种信号线倾斜角测量方法，其中所述方法包括以下步骤：
将待测量基板设置于承载平台上，所述待测量基板包括信号线，所述信号线包括与所述待测量基板平行的上表面以及位于所述上表面一侧的外侧面；
提供一光源，控制光源旋转并发射光线以照射所述信号线外侧面，其中所述旋转以所述信号线的长度方向为轴、绕所述信号线的外侧面进行；
在所述光源旋转过程中，实时的获取所述光源的旋转角度，并通过光线传感器获取从经所述信号线外侧面反射、且对应所述旋转角度的光线强度；
对所获取的光线强度一一进行对比，获取所述光线强度最大值，匹配与所述光线强度最大值对应的旋转角度；以及
根据所述光线强度最大值所对应的旋转角度生成信号线倾斜角。
为解决上述技术问题，本发明还构造了一种信号线倾斜角测量方法，所述方法包括以下步骤：
将待测量基板设置于承载平台上，所述待测量基板包括信号线，所述信号线包括与所述待测量基板平行的上表面以及位于所述上表面一侧的外侧面；
提供一光源，控制所述光源旋转并发射光线以照射所述信号线的外侧面，其中所述旋转以所述信号线的长度方向为轴、绕所述信号线的外侧面进行；
在所述光源旋转过程中，实时的获取所述光源的旋转角度以及对应所述旋转角度的光线强度；其中所述光线强度为经所述外侧面反射后的光线的强度；
获取所述光线强度最大值所对应的旋转角度，并根据所述光线强度最大值所对应的旋转角度生成信号线倾斜角。
为解决上述技术问题，本发明还构造了一种信号线倾斜角测量装置，包括：
承载平台，用于承载待测量基板，其中所述待测量基板包括信号线，所述信号线包括与所述待测量基板平行的上表面以及位于所述上表面一侧的外侧面；
光源，用于发射光线；
控制单元，用于控制光源旋转并发射光线以照射所述信号线外侧面，其中所述旋转以所述信号线的长度方向为轴、绕所述信号线的外侧面进行；
角度记录单元，用于在所述光源旋转过程中，记录所述光源的旋转角度；
光线强度获取单元：用于接收经所述信号线外侧面反射后的光线，并根据接收到的光线生成光线强度；以及
结果生成单元：用于获取光线强度中的最大值，并获取该最大值所对应的旋转角度，并根据获取的旋转角度生成信号线倾斜角。
 有益效果
相对于现有技术，本发明通过控制光源绕信号线的外侧面进行旋转照射，获取经所述信号线外侧面反射后的光线强度，并匹配光线强度最大值所对应的光源旋转角度，得到的光源旋转角度对应所述信号线倾斜角。显然，本发明能够准确的测得信号线倾斜角度，误差小，而且无需切割待测量基板即可完成对信号线倾斜角的测量，过程简洁，能够在发现信号线倾斜角发生异常时进行实时有效的监控，提高了TFT-LCD产品的良率。
 附图说明
图1为信号线倾斜角度示意图；
图2为本发明第一实施例中信号线倾斜角测量方法的流程示意图；
图3A至3D为本发明实施例中测量信号线倾斜角的过程示意图；
图4为本发明实施例中信号线倾斜角测量装置的结构示意图。
 本发明的最佳实施方式
以下各实施例的说明是参考附加的图式，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。在图中，结构相似的单元是以相同标号表示。
请参阅图2，图2为本发明实施例中信号线倾斜角测量方法的流程示意图。
在步骤S201中，将待测量基板设置于承载平台上。
譬如请参阅图3A，图3A为所述待检测基板的剖视图。其中所述待检测基板30包括待检测基板主体31以及信号线32，所述信号线包括有上表面321、位于所述上表面321一侧的外侧面322以及与所述上表面321相对设置的下表面323，所述信号线的上表面321及下表面323与所述待测量基板30平行，所述信号线32为金属导线。
在步骤S202中，控制光源旋转并发射光线以照射所述信号线外侧面。
具体的，首先提供一光源，譬如发光二级管（LED）灯，请一并参阅图3A、3B以及3D，其中图3B为所述待测量基板的俯视图，图3C、3D为所述信号线的剖视图。在具体实施过程中，控制所述光源40以所述信号线32的长度方向K为轴（图3B），从所述信号线32的外侧面322与上表面321的交汇处L开始，绕所述信号线32的外侧面322沿顺时针方向M进行旋转（图3A），并旋转至所发射的光线与所述信号线32的上表面321或者下表面323平行为止。
当然，还可以以所述信号线32的长度方向K为轴，从所述信号线32的外侧面322与下表面323交汇处N开始，绕所述信号线32的外侧面322沿逆时针方向进行旋转。
在步骤S203中，在所述光源旋转过程中，实时的获取所述光源的旋转角度以及对应所述旋转角度的光线强度。
譬如请参阅图3C，本发明所指的光源40的旋转角度优选为所述光源40相对所述信号线上表面垂直线Q的角度β。其中所述信号线上表面垂直线Q垂直于所述信号线32的上表面321。当然所述旋转角度也可以是其它角度，譬如所述光源40与所述信号线32的上表面321之间的角度，只要能够对应所述信号线倾斜角θ即可。
进一步的，本发明实施例所指的光线强度为从所述光源40发射，并经所述信号线32的外侧面322反射后的光线的强度。其中所述光源40发射的光线经所述信号线32的外侧面322反射后，可通过一光线接收器（图未示出）接收，所述光线接收器接收经所述信号线32的外侧面322反射的光线后，计算生成对应的光线强度。
在步骤S204中，获取所述光线强度最大值所对应的旋转角度，并根据所述光线强度最大值所对应的旋转角度生成信号线倾斜角。
请一并参阅图3D，当从所述光源40出射的光线垂直照射所述信号线32的外侧面322时，此时的光线被垂直反射，因此此时反射后的光线强度最强。而此时，所述光源40与所述垂直线Q之间的夹角等于所述信号线倾斜角θ，因此，在获取所述光线强度最大值后，匹配与该光线强度最大值对应的旋转角度，该旋转角度即为所述信号线倾斜角，其中该旋转角度为所述光源40相对所述垂直线Q的角度。
当然，如果得出的旋转角度为所述光源40相对所述信号线32的下表面323的角度，则将该旋转角度与90度进行差值计算，得出的差值的绝对值即为所述信号线倾斜角。
在具体实施过程中，在控制所述光源40从所述交汇处L（图3A）开始，旋转至所发射的光线与所述信号线32的上表面321平行为止的过程中，将所有实时获取的光线强度进行一一对比，以获取光线强度的最大值，并根据所述光线强度最大值查找获取对应的旋转角度。
显然，本发明实施例能够准确的测得信号线倾斜角度，误差小；而且无需切割待测量基板即可完成对信号线倾斜角的测量，过程简洁，减少了报废正常液晶显示器面板的数量，降低了因切割玻璃而产生的微粒，避免了人员因切割玻璃而造成公伤；而且本发明实施例能够在发现金属导线角度发生异常时进行实时有效的监控，提高了TFT-LCD产品的良率。
请参阅图4，图4为本发明实施例中信号线倾斜角测量装置的结构示意图。所述装置包括光源40、承载平台51、控制单元52、角度记录单元53、光线强度获取单元54以及结果生成单元55。
在对包括有信号线的待检测基板进行信号新倾斜角测量时，通过所述承载平台51承载待测量基板30，譬如请一并参阅图3A，所述待检测基板30包括待检测基板主体31以及信号线32，所述信号线包括有上表面321、位于所述上表面321一侧的外侧面322以及与所述上表面321相对设置的下表面323。
在将所述承载待测量基板30放置于所述承载平台51后，所述控制单元52控制所述光源40旋转并发射光线以照射所述信号线32的外侧面322。
在具体实施过程中，所述控制单元52控制所述光源40以所述信号线32的长度方向K为轴（图3B），从所述信号线32的外侧面322与上表面321的交汇处L开始，绕所述信号线32的外侧面322沿顺时针方向M进行旋转（图3A），并旋转至所述光源40发射的光线与所述信号线32的上表面321或者下表面323平行为止。当然，还可以以所述信号线32的长度方向K为轴，从所述信号线32的外侧面322与下表面323交汇处N开始，绕所述信号线32的外侧面322沿逆时针方向进行旋转。
在所述控制单元52控制所述光源40旋转照射所述信号线32的外侧面322过程中，所述角度记录单元53实时的记录所述光源40的旋转角度。譬如请一并参阅图3C，本发明所指的光源40的旋转角度优选为所述光源40相对所述信号线上表面垂直线Q的角度β，其中所述信号线上表面垂直线Q垂直于所述信号线32的上表面321。当然所述旋转角度也可以是其它角度，譬如所述光源40与所述信号线32的上表面321之间的角度，只要能够对应所述信号线倾斜角θ即可，所述角度记录单元53譬如为旋转角度传感器，鉴于所述旋转角度传感器为现有技术，此处不再赘述。
在所述控制单元52控制所述光源40旋转照射所述信号线32的外侧面322过程中，所述光线强度获取单元54实时的接收经所述信号线外侧面反射后的光线，并根据接收到的光线计算生成光线强度。本发明实施例所指的光线强度为从所述光源40发射，并经所述信号线32的外侧面322反射后的光线的强度。所述光线强度获取单元54优选为光线接收器，通过所述光线接收器接收经所述信号线32的外侧面322反射的光线后，计算生成对应的光线强度。
所述结果生成单元55用于对所述角度记录单元53以及所述光线强度获取单元54获取的结果进行处理。具体的，所述结果生成单元55从所述光线强度获取单元54处获取光线强度最大值，之后从所述角度记录单元53记录的旋转角度中获取所述光线强度最大值对应的旋转角度，并根据所述光线强度最大值所对应的旋转角度生成信号线倾斜角。
进一步的，所述结果生成单元55对所述光线强度获取单元54获取的光线强度一一进行对比，获取所述光线强度最大值，之后从所述角度记录单元53记录的旋转角度中获取所述光线强度最大值对应的旋转角度。
譬如请一并参阅图3D，当从所述光源40出射的光线垂直照射所述信号线32的外侧面322时，此时的光线被垂直反射，因此反射后的光线强度最强。而此时，所述光源40与所述垂直线Q之间的夹角等于所述信号线倾斜角θ，因此，在获取所述光线强度最大值后，匹配与该光线强度最大值对应的旋转角度，该旋转角度即为所述信号线倾斜角，其中该旋转角度为所述光源40相对所述垂直线Q的角度。
当然，如果得出的旋转角度为所述光源40相对所述信号线32的下表面323的角度，则将该旋转角度与90度进行差值计算，得出的差值的绝对值即为所述信号线倾斜角。
本发明实施例通过控制光源绕信号线的外侧面进行旋转照射，获取经所述信号线外侧面反射后的光线强度，并匹配光线强度最大值所对应的光源旋转角度，得到的光源旋转角度对应所述信号线倾斜角。显然，本发明实施例能够准确的测得信号线倾斜角度，误差小，而且无需切割待测量基板即可完成对信号线倾斜角的测量，过程简洁，能够在发现信号线倾斜角发生异常时进行实时有效的监控，提高了TFT-LCD产品的良率。
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。
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  1. 一种信号线倾斜角测量方法，其中所述方法包括以下步骤：
    将待测量基板设置于承载平台上，所述待测量基板包括信号线，所述信号线包括与所述待测量基板平行的上表面以及位于所述上表面一侧的外侧面；
    提供一光源，控制光源旋转并发射光线以照射所述信号线外侧面，其中所述旋转以所述信号线的长度方向为轴、绕所述信号线的外侧面进行；
    在所述光源旋转过程中，实时的获取所述光源的旋转角度，并通过光线传感器获取从经所述信号线外侧面反射、且对应所述旋转角度的光线强度；
    对所获取的光线强度一一进行对比，获取所述光线强度最大值，匹配与所述光线强度最大值对应的旋转角度；以及
    根据所述光线强度最大值所对应的旋转角度生成信号线倾斜角。
  2. 根据权利要求1所述的信号线倾斜角测量方法，其中控制光源旋转并发射光线以照射所述信号线外侧面时，是以所述信号线的长度方向为轴，从所述信号线的外侧面与上表面的交汇处开始顺时针进行旋转，并旋转至所发射的光线与所述信号线上表面平行为止。
  3. 根据权利要求2所述的信号线倾斜角测量方法，其中所述光源的旋转角度为所述光线相对所述信号线上表面垂直线的旋转角度，所述信号线上表面垂直线垂直于所述信号线上表面；而在获取所述光线强度最大值所对应的旋转角度后，所述光线强度最大值所对应的旋转角度即为所述信号线倾斜角。
  4. 一种信号线倾斜角测量方法，其中所述方法包括以下步骤：
    将待测量基板设置于承载平台上，所述待测量基板包括信号线，所述信号线包括与所述待测量基板平行的上表面以及位于所述上表面一侧的外侧面；
    提供一光源，控制光源旋转并发射光线以照射所述信号线外侧面，其中所述旋转以所述信号线的长度方向为轴、绕所述信号线的外侧面进行；
    在所述光源旋转过程中，实时的获取所述光源的旋转角度以及对应所述旋转角度的光线强度，其中所述光线强度为经所述外侧面反射后的光线的强度；以及
    获取所述光线强度最大值所对应的旋转角度，并根据所述光线强度最大值所对应的旋转角度生成信号线倾斜角。
  5. 根据权利要求4所述的信号线倾斜角测量方法，其中控制光源旋转并发射光线以照射所述信号线外侧面时，是以所述信号线的长度方向为轴，从所述信号线的外侧面与上表面的交汇处开始顺时针进行旋转，并旋转至所发射的光线与所述信号线上表面平行为止。
  6. 根据权利要求5所述的信号线倾斜角测量方法，其中所述光源的旋转角度为所述光线相对所述信号线上表面垂直线的旋转角度，所述信号线上表面垂直线垂直于所述信号线上表面；而在获取所述光线强度最大值所对应的旋转角度后，所述光线强度最大值所对应的旋转角度即为所述信号线倾斜角。
  7. 根据权利要求4所述的信号线倾斜角测量方法，其中获取所述光线强度最大值所对应的旋转角度的步骤包括：
    对所获取的光线强度一一进行对比，获取所述光线强度最大值；以及
    匹配与所述光线强度最大值对应的旋转角度。
  8. 根据权利要求4所述的信号线倾斜角测量方法，其中通过光线传感器获取从所述光源射出、并经所述信号线外侧面反射后的光线强度。
  9. 一种信号线倾斜角测量装置，其中包括：
    承载平台，用于承载待测量基板，其中所述待测量基板包括信号线，所述信号线包括与所述待测量基板平行的上表面以及位于所述上表面一侧的外侧面；
    光源，用于发射光线；
    控制单元，用于控制光源旋转并发射光线以照射所述信号线外侧面，其中所述旋转以所述信号线的长度方向为轴、绕所述信号线的外侧面进行；
    角度记录单元，用于在所述光源旋转过程中，记录所述光源的旋转角度；
    光线强度获取单元：用于接收经所述信号线外侧面反射后的光线，并根据接收到的光线生成光线强度；以及
    结果生成单元：用于获取光线强度中的最大值，并获取该最大值所对应的旋转角度，并根据获取的旋转角度生成信号线倾斜角。
  10. 根据权利要求9所述的信号线倾斜角测量装置，其中
    所述控制单元在控制所述光源旋转并发射光线以照射所述信号线外侧面时，是以所述信号线的长度方向为轴，从所述信号线的外侧面与上表面的交汇处开始顺时针进行旋转，并旋转至所发射的光线与所述信号线上表面平行为止。
  11. 根据权利要求10所述的信号线倾斜角测量装置，其中所述光源的旋转角度为所述光线相对所述信号线上表面垂直线的旋转角度，所述信号线上表面垂直线垂直于所述信号线上表面；而在所述结果生成单元获取所述光线强度最大值所对应的旋转角度后，所述光线强度最大值所对应的旋转角度即为所述信号线倾斜角。
  12. 根据权利要求9所述的信号线倾斜角测量装置，其中所述结果生成单元在获取所述光线强度最大值所对应的旋转角度时，进一步的用于对所获取的光线强度一一进行对比，获取所述光线强度最大值，并匹配与所述光线强度最大值对应的旋转角度。
  13. 根据权利要求9所述的信号线倾斜角测量装置，其中所述光线强度获取单元为光线传感器，所述光线传感器用于获取从所述光源射出、并经所述信号线外侧面反射后的光线强度。
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