WO2014200726A1 - Low surface roughness polishing pad - Google Patents
Low surface roughness polishing pad Download PDFInfo
- Publication number
- WO2014200726A1 WO2014200726A1 PCT/US2014/040226 US2014040226W WO2014200726A1 WO 2014200726 A1 WO2014200726 A1 WO 2014200726A1 US 2014040226 W US2014040226 W US 2014040226W WO 2014200726 A1 WO2014200726 A1 WO 2014200726A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polishing
- polishing pad
- mpa
- substrate
- pad
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016519532A JP2016524549A (en) | 2013-06-13 | 2014-05-30 | Low surface roughness polishing pad |
CN201480024087.4A CN105163907B (en) | 2013-06-13 | 2014-05-30 | The polishing pad of low surface roughness |
SG11201508452VA SG11201508452VA (en) | 2013-06-13 | 2014-05-30 | Low surface roughness polishing pad |
EP14811299.8A EP3007858A4 (en) | 2013-06-13 | 2014-05-30 | Low surface roughness polishing pad |
KR1020157036537A KR20160019465A (en) | 2013-06-13 | 2014-05-30 | Low surface roughness polishing pad |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/917,422 | 2013-06-13 | ||
US13/917,422 US20140370788A1 (en) | 2013-06-13 | 2013-06-13 | Low surface roughness polishing pad |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014200726A1 true WO2014200726A1 (en) | 2014-12-18 |
Family
ID=52019618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2014/040226 WO2014200726A1 (en) | 2013-06-13 | 2014-05-30 | Low surface roughness polishing pad |
Country Status (8)
Country | Link |
---|---|
US (1) | US20140370788A1 (en) |
EP (1) | EP3007858A4 (en) |
JP (1) | JP2016524549A (en) |
KR (1) | KR20160019465A (en) |
CN (1) | CN105163907B (en) |
SG (1) | SG11201508452VA (en) |
TW (1) | TWI542442B (en) |
WO (1) | WO2014200726A1 (en) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9873180B2 (en) | 2014-10-17 | 2018-01-23 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
US10875145B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
US10821573B2 (en) | 2014-10-17 | 2020-11-03 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
KR102630261B1 (en) | 2014-10-17 | 2024-01-29 | 어플라이드 머티어리얼스, 인코포레이티드 | Cmp pad construction with composite material properties using additive manufacturing processes |
US10875153B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
US10399201B2 (en) | 2014-10-17 | 2019-09-03 | Applied Materials, Inc. | Advanced polishing pads having compositional gradients by use of an additive manufacturing process |
JP6940495B2 (en) | 2015-10-30 | 2021-09-29 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Equipment and methods for forming abrasive articles with the desired zeta potential |
US10391605B2 (en) | 2016-01-19 | 2019-08-27 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
CN108698206B (en) | 2016-01-19 | 2021-04-02 | 应用材料公司 | Porous chemical mechanical polishing pad |
KR101835090B1 (en) * | 2017-05-29 | 2018-03-06 | 에스케이씨 주식회사 | Porous polyurethane polishing pad and method preparing semiconductor device by using the same |
KR101835087B1 (en) * | 2017-05-29 | 2018-03-06 | 에스케이씨 주식회사 | Porous polyurethane polishing pad and method preparing semiconductor device by using the same |
US11471999B2 (en) | 2017-07-26 | 2022-10-18 | Applied Materials, Inc. | Integrated abrasive polishing pads and manufacturing methods |
WO2019032286A1 (en) | 2017-08-07 | 2019-02-14 | Applied Materials, Inc. | Abrasive delivery polishing pads and manufacturing methods thereof |
CN112654655A (en) | 2018-09-04 | 2021-04-13 | 应用材料公司 | Advanced polishing pad formulations |
US11813712B2 (en) | 2019-12-20 | 2023-11-14 | Applied Materials, Inc. | Polishing pads having selectively arranged porosity |
US11806829B2 (en) | 2020-06-19 | 2023-11-07 | Applied Materials, Inc. | Advanced polishing pads and related polishing pad manufacturing methods |
US11878389B2 (en) | 2021-02-10 | 2024-01-23 | Applied Materials, Inc. | Structures formed using an additive manufacturing process for regenerating surface texture in situ |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6120353A (en) * | 1919-02-12 | 2000-09-19 | Shin-Etsu Handotai Co., Ltd. | Polishing method for semiconductor wafer and polishing pad used therein |
WO2001091972A1 (en) * | 2000-05-27 | 2001-12-06 | Rodel Holdings, Inc. | Grooved polishing pads for chemical mechanical planarization |
KR100774824B1 (en) * | 2006-12-08 | 2007-11-07 | 동부일렉트로닉스 주식회사 | Polishing pad to prevent scratch in cmp process |
US20120100783A1 (en) * | 2009-06-23 | 2012-04-26 | Shin-Etsu Handotai Co., Ltd. | Polishing pad, manufacturing method thereof and polishing method |
WO2012068428A2 (en) * | 2010-11-18 | 2012-05-24 | Cabot Microelectronics Corporation | Polishing pad comprising transmissive region |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7651761B2 (en) * | 2001-11-13 | 2010-01-26 | Toyo Tire & Rubber Co., Ltd. | Grinding pad and method of producing the same |
US6852020B2 (en) * | 2003-01-22 | 2005-02-08 | Raytech Innovative Solutions, Inc. | Polishing pad for use in chemical—mechanical planarization of semiconductor wafers and method of making same |
US20040171339A1 (en) * | 2002-10-28 | 2004-09-02 | Cabot Microelectronics Corporation | Microporous polishing pads |
US20050276967A1 (en) * | 2002-05-23 | 2005-12-15 | Cabot Microelectronics Corporation | Surface textured microporous polishing pads |
JP3910921B2 (en) * | 2003-02-06 | 2007-04-25 | 株式会社東芝 | Polishing cloth and method for manufacturing semiconductor device |
US7435161B2 (en) * | 2003-06-17 | 2008-10-14 | Cabot Microelectronics Corporation | Multi-layer polishing pad material for CMP |
EP1498222B1 (en) * | 2003-07-17 | 2014-12-17 | JSR Corporation | Chemical mechanical polishing pad and chemical mechanical polishing method |
US6899602B2 (en) * | 2003-07-30 | 2005-05-31 | Rohm And Haas Electronic Materials Cmp Holdings, Nc | Porous polyurethane polishing pads |
JP2005212055A (en) * | 2004-01-30 | 2005-08-11 | Kanebo Ltd | Polishing cloth for nonwoven fabric base, and its fablication method |
US8075372B2 (en) * | 2004-09-01 | 2011-12-13 | Cabot Microelectronics Corporation | Polishing pad with microporous regions |
JP3769581B1 (en) * | 2005-05-18 | 2006-04-26 | 東洋ゴム工業株式会社 | Polishing pad and manufacturing method thereof |
US20090061743A1 (en) * | 2007-08-29 | 2009-03-05 | Stephen Jew | Method of soft pad preparation to reduce removal rate ramp-up effect and to stabilize defect rate |
JP2009220265A (en) * | 2008-02-18 | 2009-10-01 | Jsr Corp | Chemical machinery polishing pad |
JP2009256473A (en) * | 2008-04-17 | 2009-11-05 | Nitta Haas Inc | Manufacturing method of expanded polyurethane, and abrasive pad |
US8585790B2 (en) * | 2009-04-23 | 2013-11-19 | Applied Materials, Inc. | Treatment of polishing pad window |
JP2012012957A (en) * | 2010-06-29 | 2012-01-19 | Toyota Motor Corp | Cylinder block made of aluminum alloy, and method of manufacturing the same |
US9067297B2 (en) * | 2011-11-29 | 2015-06-30 | Nexplanar Corporation | Polishing pad with foundation layer and polishing surface layer |
US9156125B2 (en) * | 2012-04-11 | 2015-10-13 | Cabot Microelectronics Corporation | Polishing pad with light-stable light-transmitting region |
US9597769B2 (en) * | 2012-06-04 | 2017-03-21 | Nexplanar Corporation | Polishing pad with polishing surface layer having an aperture or opening above a transparent foundation layer |
-
2013
- 2013-06-13 US US13/917,422 patent/US20140370788A1/en not_active Abandoned
-
2014
- 2014-05-30 JP JP2016519532A patent/JP2016524549A/en active Pending
- 2014-05-30 SG SG11201508452VA patent/SG11201508452VA/en unknown
- 2014-05-30 KR KR1020157036537A patent/KR20160019465A/en not_active Application Discontinuation
- 2014-05-30 EP EP14811299.8A patent/EP3007858A4/en not_active Withdrawn
- 2014-05-30 CN CN201480024087.4A patent/CN105163907B/en not_active Expired - Fee Related
- 2014-05-30 WO PCT/US2014/040226 patent/WO2014200726A1/en active Application Filing
- 2014-06-05 TW TW103119535A patent/TWI542442B/en not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6120353A (en) * | 1919-02-12 | 2000-09-19 | Shin-Etsu Handotai Co., Ltd. | Polishing method for semiconductor wafer and polishing pad used therein |
WO2001091972A1 (en) * | 2000-05-27 | 2001-12-06 | Rodel Holdings, Inc. | Grooved polishing pads for chemical mechanical planarization |
KR100774824B1 (en) * | 2006-12-08 | 2007-11-07 | 동부일렉트로닉스 주식회사 | Polishing pad to prevent scratch in cmp process |
US20120100783A1 (en) * | 2009-06-23 | 2012-04-26 | Shin-Etsu Handotai Co., Ltd. | Polishing pad, manufacturing method thereof and polishing method |
WO2012068428A2 (en) * | 2010-11-18 | 2012-05-24 | Cabot Microelectronics Corporation | Polishing pad comprising transmissive region |
Also Published As
Publication number | Publication date |
---|---|
KR20160019465A (en) | 2016-02-19 |
TW201501865A (en) | 2015-01-16 |
CN105163907A (en) | 2015-12-16 |
US20140370788A1 (en) | 2014-12-18 |
EP3007858A1 (en) | 2016-04-20 |
SG11201508452VA (en) | 2015-12-30 |
CN105163907B (en) | 2017-11-28 |
EP3007858A4 (en) | 2017-03-08 |
JP2016524549A (en) | 2016-08-18 |
TWI542442B (en) | 2016-07-21 |
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