WO2014184067A1 - Agencements et procédés d'usinage par écoulement abrasif - Google Patents

Agencements et procédés d'usinage par écoulement abrasif Download PDF

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Publication number
WO2014184067A1
WO2014184067A1 PCT/EP2014/059337 EP2014059337W WO2014184067A1 WO 2014184067 A1 WO2014184067 A1 WO 2014184067A1 EP 2014059337 W EP2014059337 W EP 2014059337W WO 2014184067 A1 WO2014184067 A1 WO 2014184067A1
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WO
WIPO (PCT)
Prior art keywords
passage
deflecting
arrangement
interior passage
interior
Prior art date
Application number
PCT/EP2014/059337
Other languages
English (en)
Inventor
Jani KENDA
Franci Pusavec
Janez Kopac
Original Assignee
University Of Ljubljana
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University Of Ljubljana filed Critical University Of Ljubljana
Priority to US14/889,187 priority Critical patent/US20160082565A1/en
Priority to EP14723049.4A priority patent/EP2996840B1/fr
Publication of WO2014184067A1 publication Critical patent/WO2014184067A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
    • B24B31/116—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/006—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor for grinding the interior surfaces of hollow workpieces

Definitions

  • the present invention is in the field of abrasive flow machining. More specifically, the present invention relates to new and improved arrangements and methods for treating interior surfaces of workpieces with abrasive fluids.
  • Abrasive flow machining is a well-known machining process, in which an abrasive medium is extruded through, or past, a workpiece surface, to effect an abrasive surface treatment of the same.
  • the abrasive action in abrasive flow machining may be seen as being analogous to conventional filing, grinding, lapping or honing, in that the extruded abrasive medium passes by a surface of a workpiece, thereby abrading the material forming the surface and thus treating the surface. If suitable non-Newtonian fluids are used, the abrasive fluid may flow through, or past, a workpiece substantially in plug flow.
  • the plug may then be seen as a self-forming file, grinding stone or lap, as it is extruded under pressure through the confined passage, which is restricting its flow.
  • This causes effective surface treatment of the workpiece.
  • the media supporting the abrasive particles in abrasive flow machining is plastic. This leads to a very uniform surface treatment.
  • WO 2009/105043 discloses an abrasive flow machining apparatus consisting of a structure holding two opposed media chambers and a workpiece inserted therebetween.
  • the media chambers are extruding chambers, which can hydraulically or mechanically extrude the abrasive medium from one chamber through the passage into the other chamber.
  • the surface to be abraded is a bore through the workpiece, and the media chambers are sealed to each end of the bore so that the bore becomes a sealed passageway between the two chambers.
  • the abrasive medium is extruded from one medium chamber to the other in a reciprocating manner.
  • US 3,819,343 discloses an abrasive medium for use in abrasive flow machining, which is a semi-solid, visco-elastic material permeated with an abrasive grit. The abrasive grit is held in place by the semi-solid visco-elastic material.
  • the conventional abrasive flow machining processes are effective in many applications, the conventional processes are often in ineffective, in particular, when the surface to be treated is an interior surface of a passage, which passage is either very long and narrow, or in cases where the passage comprises multiple sections having cross- sectional areas of different magnitude.
  • the fluid velocity in the narrow and wide sections will vary considerably. In narrow sections, the velocity of the fluid will be relatively high, whereas in the wide sections of the passage, the velocity will be relatively low. As a consequence, while the abrasive action will be relatively effective in the narrow sections, the abrasive action in sections having relatively large cross- sectional areas will not be satisfactory. There is a need in the art for methods and arrangements for abrasive fluid machining which ameliorate the above mentioned problems.
  • the present invention fulfils this need by providing methods, and corresponding apparatuses, for abrasive flow machining, in which methods an abrasive medium is extruded through a passage, and in which deflection objects are inserted into the passageway, preferably in the passages, or sections thereof , having relatively large cross- sectional area.
  • the deflection elements effect a local reduction of the effective cross sectional area available for fluid flow. Hence, they increase the velocity of the abrasive medium locally in the vicinity of the defecting objects. As a result, the effectiveness of the abrasive action at the location of deflection will be increased. Furthermore, since the areas of increased fluid velocity are relatively short (measured in the axial direction), the increase of the overall pressure drop is relatively small. Hence, methods of the invention provide for increased effectiveness of the surface treatment at selected locations within the workpiece, without increasing the required pressure to unacceptable levels.
  • the deflecting objects can be used to adjust the intensity of the surface treatment in such sections.
  • Deflecting objects can be used to effect a relatively uniform treatment of the surfaces of the wide and narrow sections of the passage in the workpiece, e.g., by locally increasing the flow velocity of the abrasive medium in the wide sections of the passage.
  • the present invention thus relates to a method of treating an interior surface of a workpiece; said method comprising (i) providing a workpiece having an interior passage defined at least partly by said interior surface to be treated, said passage having an inlet section and an outlet section; (ii) providing in said interior passage at least one deflecting object, said deflecting object having an outer surface, whereby a space is formed between said outer surface of said at least one deflecting object and said interior surface of said workpiece; (iii) providing an abrasive fluid in said space, such that said space is substantially filled with said abrasive fluid; and (iv) effecting flow of said abrasive medium through said interior passage from said inlet portion to said outlet portion.
  • the interior space is completely filled with the abrasive fluid.
  • the step of effecting flow preferably comprises moving a piston in a cylinder connected to said inlet portion of said interior passage. Thereby abrasive fluid is pumped into said interior passage, and/or there is established a net flow of abrasive fluid through the interior passage.
  • the at least one deflecting object is mounted on a solid support, such as rod or a spindle.
  • the deflecting object can also be mounted on a rope or a wire.
  • the wire is preferably flexible. Mounting of the deflecting object on a solid support, such as a road or is spindle, allows for the spatial position of that deflecting object in said interior passage to be accurately adjusted.
  • the cross-sectional area of the rod in a plane normal to the longitudinal axis of the passage is preferably substantially smaller than the cross-sectional area of the deflecting object in a plane normal to the longitudinal axis of the passage.
  • said cross-sectional area of the rod is at least 5 or 10 times smaller than said cross-sectional area of the deflecting object.
  • the rod is connected to the piston.
  • This arrangement allows for movement of the at least deflecting object at the same speed and at the same frequency as the piston. This makes it particularly easy to control the movement and position of the at least one deflecting object in the interior passage.
  • the rod is movable relative to the piston. This allows for the at least one deflecting object to be moved independently from, i.e., at a different speed and frequency as the piston.
  • the deflecting object may also (e.g. additionally) perform a rotating movement in said passage.
  • the at least one deflecting object comprises multiple deflecting objects.
  • multiple deflecting objects are present. Use of multiple deflecting objects allows, e.g., for accounting for multiple sections of different cross-sectional area in the interior passage, such that the velocity of the abrasive medium can be adjusted in each individual section in a manner that a uniform treatment of the passage's surface is achieved.
  • the multiple deflecting objects are connected to each other.
  • the multiple deflecting objects are connected to each other such as to hold the multiple deflecting objects at a fixed distance of each other. This allows for positions of all multiple deflecting objects to be adjusted at the same time.
  • the multiple deflecting objects may be mounted on one and the same rod. Movement of the multiple deflecting objects in the passage may then effected by movement of a single rod.
  • the rod may conveniently be connected to the piston, such that the multiple deflecting objects move in parallel to the piston.
  • the multiple deflecting objects are connected to each other such as to allow relative motion, relative to each other. This allows for greater flexibility in determining the longitudinal position and speed of movement of the multiple deflecting objects in the passage.
  • the passage is rotationally symmetric.
  • the interior passage has at least one circular cross-section, preferably in a plane normal to a longitudinal axis of the interior passage.
  • the at least one deflecting object is rotationally symmetric.
  • the interior passage has at least one square cross section, preferably in a plane normal to a longitudinal axis of the interior passage.
  • the at least one deflecting object also has at least one square cross section, preferably in a plane normal to a longitudinal axis of the interior passage.
  • the at least one deflecting object comprises, or is formed by, or assumes the shape of, a substantially flat structure, preferably oriented normal to a longitudinal axis of said interior passage (when mounted therein).
  • the at least one deflecting object may comprise a disc-shaped object, or it may comprise a rectangular plate.
  • the disc or the plate may be mounted on a rod.
  • the at least one deflecting object comprises multiple substantially flat structures, preferably all oriented normal to a longitudinal axis of said passage.
  • the multiple flat structures may all be disc-shaped, or they may all assume the shape of a rectangular plate.
  • an outer contour of said at least one deflecting object may follow an inner contour of said passage.
  • a gap of approximately constant thickness is formed between the deflecting object and the inner surface of the interior passage, and the abrasive fluid will flow at approximately constant velocity past/around the at least one deflecting object.
  • the abrasive fluid comprises a viscous fluid or a visco-elastic fluid.
  • Preferred fluids are non-Newtonian fluids, in particular dilatant, i.e., shear thickening fluids. Dilatant fluids increase their viscosity as the shear rate or shear stress increases.
  • Such fluids when extruded through a passage having a constant cross-section, flow substantially in the plug flow like fashion. Plug flow of the abrasive medium through the passage maximizes the shear forces at the surface to be treated, thereby maximizing the effectiveness of the abrasive action.
  • the abrasive medium further comprises an abrasive grit, i.e., solid particles with abrasive properties.
  • the abrasive fluid may contain, e.g., boron carbide, aluminum oxide, calcite, emery (corundum), diamond dust, synthetic diamond dust, novaculite, pumice dust, sand, boron nitride, ceramic particles, ceramic iron oxide, glass powder, steel particles, silicon carbide, and zirconia alumina.
  • the particles preferably have a median diameter (based on the number of particles) of from 1 ⁇ to 4 mm, preferably from 10 ⁇ to 2 mm, even more preferred from 100 ⁇ to 1 mm.
  • the diameter of a particle is preferably determined from a micro-photograph, namely as the largest individual dimension across the two-dimensional image of said particle in said micro-photograph.
  • An automatic image analysis system such as the Morphologi G3 System of Malvern Instruments Ltd., England, is preferably used to determine the number- based median diameter of the particles.
  • the at least one deflecting object is preferably moved in said passage. Thereby the position of the deflecting object(s), and thus the position where effective surface treatment occurs, may be adjusted. Movement of the deflecting object(s) in the passage may also increase the flow of abrasive fluid, thereby adding to the movement caused by the net flow of abrasive medium through the passage.
  • the movement of said at least one deflecting object in said passage may comprise movement parallel to a longitudinal axis of said passage, e.g., the movement may include reciprocal movement parallel to a longitudinal axis of said passage.
  • said movement comprises rotational movement about an axis parallel to a longitudinal axis of said passage. This may increase the effectiveness of the surface treatment at the location of the deflecting object by adding a tangential component to the movement of the abrasive fluid across the surface to be treated.
  • Preferred interior surfaces to be treated according to the invention are metal surfaces.
  • the present invention also relates to systems, to an apparatus or to an arrangement for treating an interior surface of a workpiece, said workpiece having an interior passage, said interior passage being at least partially defined by said interior surface to be treated, said interior passage having an inlet portion and an outlet portion; the arrangement comprising: (i) a first chamber for holding an abrasive fluid; (ii) connecting means for connecting said workpiece to said arrangement in such a manner that a fluid-tight connection is established between said first chamber and said inlet portion of said interior passage; (iii) pressure imposing means for imposing an elevated pressure on said abrasive fluid in said first chamber, if such is present in said first chamber; and (iv) at least one deflecting object mountable in said interior passage, when said workpiece is connected to said arrangement, said deflecting object adapted for deflecting abrasive fluid, when such abrasive fluid is flowing through said interior passage.
  • the arrangement may also include the workpiece.
  • said means for imposing a pressure on said abrasive fluid comprises a first cylinder portion and a first piston movably arranged in said first cylinder portion.
  • said at least one deflecting object is mounted on a rod.
  • the system, apparatus or arrangement further comprises said arrangement further comprising a second chamber connectable to said workpiece in a manner that a fluid tight connection is established to said outlet portion of said interior passage, said second chamber also comprising means for imposing a pressure on an abrasive fluid when such is present in said second chamber.
  • said means for imposing a pressure on an abrasive fluid in said second chamber comprises a second cylinder portion and a second piston arranged in said second cylinder portion.
  • the first and second pistons are preferably movable in a manner so as to effect reciprocal movement of an abrasive fluid in said interior passage, e.g., past said at least one deflecting object, when such abrasive fluid is present in said first and second chambers and in said interior passage.
  • the interior passage may have at least one circular cross-sectional area in a plane normal to a longitudinal axis of said passage.
  • said at least one deflecting object is rotationally symmetric.
  • the interior passage has at least one square cross-sectional area, preferably in a plane normal to a longitudinal axis of said interior passage.
  • the at least one deflecting object has at least one square cross-sectional area.
  • the at least one deflecting object may comprise, or may be formed by, or assume the shape of, a substantially flat structure, preferably oriented normal to a longitudinal axis of said interior passage.
  • said substantially flat structure is disc-shaped. In other preferred embodiments, said substantially flat structure is a rectangular plate.
  • the at least one deflecting object may comprise multiple substantially flat structures oriented normal to a longitudinal axis of said interior passage. These may all be discshaped.
  • an outer contour of said at least one deflecting object follows an inner contour of said interior passage.
  • Figure 1 shows a first embodiment of the invention employing a spherical deflecting object.
  • Figure 2 shows a second embodiment of the invention employing at disc shaped deflecting object.
  • Figure 3 shows a third embodiment employing three disc-shaped deflecting objects.
  • Figure 4 shows an embodiment including a deflecting object which is movable independently of a piston.
  • Substantially flat with reference to a tree-dimensional object extending in the axial and in radial directions, according to the invention, shall be understood as meaning that the object has at least one dimension in the radial direction, which is at least 5, or 10 times greater than the object's largest dimension in the axial dimension.
  • Figure 1 shows a first embodiment of the invention. Shown is an arrangement for the treatment of an interior surface of a workpiece 5.
  • a cylinder portion 2 and a piston 1 form a first chamber.
  • the first chamber holds and abrasive medium 3.
  • Connected to piston 1 is a rod 4 on which a deflection object 6 is mounted.
  • Deflection object 6, in this embodiment has spherical shape.
  • Rod 4 keeps deflection object 6 at a fixed distance from piston 1.
  • the first chamber is connected in a fluid-tight manner to workpiece 5. As shown by an arrow on piston 1 , the piston is movable downwardly in the vertical direction, so as to impose an increased pressure on abrasive fluid 3 in the first chamber.
  • rod 4 may be of a deformable, e.g., comprising an elastic material.
  • rod 4 may be made of plastic or steel.
  • Rod 4 may also be made of wire or rope.
  • Figure 2 depicts a second embodiment of the invention.
  • a first chamber is formed from cylindrical portion 2 and corresponding piston 1.
  • the first chamber is filled with abrasive fluid 3.
  • Piston 1 is movable in a vertical direction, in this case to perform a reciprocating movement.
  • rod 4 Connected to piston 1 is rod 4 to which deflecting object 6 is connected. Movement of piston 1 effects movement of rod 4 and deflecting object 6 at the same speed and frequency.
  • abrasive fluid 3 is forced into the interior passage, past the moving deflecting object 6, into a second chamber, in this case formed by second cylindrical portion 10 and second piston 9.
  • the velocity of abrasive fluid 3 in interior passage 11 is increased around the deflecting object 6, relative to the velocity in the remainder of interior passage 11, because around the deflecting object the available for cross-sectional area for fluid flow is particularly small.
  • both pistons are movable in a reciprocating manner. The reciprocating movement of pistons 1 and 9, in combination with the parallel movement of deflecting object 6 through the interior passage, leads to effective and uniform treatment of the interior surface of workpiece 5.
  • Figure 3 shows a third embodiment of the invention.
  • This embodiment includes first and second fluid chambers, formed by cylindrical portions 2 and 10 with corresponding pistons 1 and 9, respectively. Reciprocal motion of first and second pistons 1 and 9 effects a reciprocal flow of abrasive medium 3 through the interior passage 11.
  • interior passage 11 has sections of different cross-sectional area. A first section, vertically below a second section, has a larger cross-sectional area than has the second section. In conventional abrasive fluid machining arrangements, this would lead to a less effective machining of the surface in the first section having the larger cross-sectional area.
  • multiple deflecting objects 6, 7, 8 may be provided in interior passage 11, thereby effecting a substantially uniform treatment of the surfaces of first and second sections.
  • three separate deflecting objects 6, 7, 8 are arranged on a single rod 4, thus they move at the same speed and frequency.
  • Figure 4 shows a fourth embodiment of the invention.
  • deflecting object 6 is mounted on a rod 4, which rod 4 is movable independently of piston 1. This allows the velocity and frequency of movement of deflecting object 6 to be controlled independently of direction and frequency of piston 1. This is useful, e.g., if the requirements on the smoothness of the surface in the lower part of interior passage 11 are higher than the requirements in the upper part of the passage. In such cases, deflecting object 6 will primarily be positioned in the lower part of passage 11 , while at the same time first and second pistons 1 and 9 perform their reciprocating movement, thereby providing for more effective surface treatment in the lower part of the passage 11.
  • Figure 5 is shown an embodiment in which rod 4 and deflecting object 6 are movable in a rotating fashion about a longitudinal axis of passage 11. Rotational movement of deflecting object 6 in passage 11 adds a tangential component to the otherwise axial movement of the abrasive fluid 3 through passage 11.
  • the abrasive fluid may comprise the following components:
  • the abrasive fluid may comprise abrasive solids selected from the group consisting of: aluminum oxide, silicon carbide, boron carbide, diamond.
  • At least 80% of the abrasive particles (by number) have a largest diameter of from 0.01 to 2 mm, more preferred 0.02-1 mm, even more preferred 0.05 to 0.5 mm. Most preferably, at least 80% of the abrasive particles of the abrasive medium have a largest diameter of 100-200 ⁇ .
  • the viscosity of the abrasive medium is preferably 100-10000 Pas, more preferably 1000- 5000 Pas, most preferred 1500-4000 Pas.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

L'invention concerne un procédé de traitement d'une surface intérieure d'une pièce (5); ledit procédé comprenant: - la fourniture d'une pièce (5) comprenant un passage intérieur (11) défini au moins partiellement par ladite surface intérieure devant être traitée, ledit passage (11) comprenant une section d'admission et une section d'évacuation; - la fourniture dans ledit passage intérieur (11) d'au moins un objet de déviation (6), ledit objet de déviation (6) présentant une surface externe, un espace étant formé entre ladite surface externe dudit objet de déviation (6) et ladite surface intérieure de ladite pièce (5); - la fourniture d'un fluide abrasif (3) dans ledit espace de sorte que ledit espace soit sensiblement rempli dudit fluide abrasif (3); et - le passage de l'écoulement de ladite substance abrasive (3) dans ledit passage intérieur (11) depuis ladite partie d'admission vers ladite partie d'évacuation.
PCT/EP2014/059337 2013-05-14 2014-05-07 Agencements et procédés d'usinage par écoulement abrasif WO2014184067A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US14/889,187 US20160082565A1 (en) 2013-05-14 2014-05-07 Arrangements and methods for abrasive flow machining
EP14723049.4A EP2996840B1 (fr) 2013-05-14 2014-05-07 Agencements et procédés d'usinage par écoulement abrasif

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SI201300118A SI24359A (sl) 2013-05-14 2013-05-14 Priprave in postopki poliranja z abrazivnim tokom
SIP-201300118 2013-05-14

Publications (1)

Publication Number Publication Date
WO2014184067A1 true WO2014184067A1 (fr) 2014-11-20

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PCT/EP2014/059337 WO2014184067A1 (fr) 2013-05-14 2014-05-07 Agencements et procédés d'usinage par écoulement abrasif

Country Status (4)

Country Link
US (1) US20160082565A1 (fr)
EP (1) EP2996840B1 (fr)
SI (1) SI24359A (fr)
WO (1) WO2014184067A1 (fr)

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CN105538048A (zh) * 2015-12-15 2016-05-04 广东工业大学 一种自增压高速磨粒流孔内表面抛光方法
RU2605402C1 (ru) * 2015-06-04 2016-12-20 Открытое акционерное общество "Московское машиностроительное предприятие имени В.В. Чернышёва" Установка для гидроабразивной обработки заготовок
US10189141B2 (en) * 2014-06-27 2019-01-29 Applied Materials, Inc. Chamber components with polished internal apertures
CN110116363A (zh) * 2019-04-30 2019-08-13 江苏师范大学 一种微孔表面强化抛光装置及方法
CN110802501A (zh) * 2019-11-28 2020-02-18 山东润通齿轮集团有限公司 一种模具流体抛光设备及其抛光方法
DE102019201656A1 (de) * 2019-02-08 2020-08-13 MTU Aero Engines AG Verfahren zum glätten einer oberfläche eines bauteils
WO2021036473A1 (fr) * 2019-08-28 2021-03-04 南京星合精密智能制造研究院有限公司 Dispositif de traitement de flux abrasif utilisant une grande pente, un trajet sinueux et un canal unique complexe

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US9463548B2 (en) * 2015-03-05 2016-10-11 Hamilton Sundstrand Corporation Method and system for finishing component using abrasive media
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US10646977B2 (en) * 2016-06-17 2020-05-12 United Technologies Corporation Abrasive flow machining method
US11333162B2 (en) * 2017-02-24 2022-05-17 Mitsubishi Heavy Industries Compressor Corporation Impeller manufacturing method and impeller flow path elongation jig
WO2019003397A1 (fr) * 2017-06-28 2019-01-03 三菱製鋼株式会社 Procédé de fabrication de stabilisateur creux
US11364587B2 (en) 2018-04-19 2022-06-21 Raytheon Technologies Corporation Flow directors and shields for abrasive flow machining of internal passages
US11148248B2 (en) 2018-04-19 2021-10-19 Raytheon Technologies Corporation Smoothing round internal passages of additively manufactured parts using metallic spheres
CN110513421B (zh) * 2019-09-19 2021-03-09 中国船舶科学研究中心（中国船舶重工集团公司第七0二研究所） 一种船用大载荷低频隔振装置及其安装方法
CN111958473A (zh) * 2020-05-28 2020-11-20 沈阳富创精密设备有限公司 一种小孔多流道分体式流体抛光治具
CN112643527B (zh) * 2020-12-01 2022-10-14 四川航天长征装备制造有限公司 一种三通零件交叉孔去毛刺的多孔道磨粒流加工工装
CN115256206A (zh) * 2022-05-20 2022-11-01 富准精密模具(淮安)有限公司 抛光设备
CN117086771B (zh) * 2023-10-18 2024-04-16 泰州市得尔机电制造有限公司 一种防爆电器用配件加工设备

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US20220297256A1 (en) * 2014-06-27 2022-09-22 Applied Materials, Inc. Chamber components with polished internal apertures
US10189141B2 (en) * 2014-06-27 2019-01-29 Applied Materials, Inc. Chamber components with polished internal apertures
US20230339065A1 (en) * 2014-06-27 2023-10-26 Applied Materials, Inc. Chamber components with polished internal apertures
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