WO2014182053A1 - 송풍기의 차압측정 장치 - Google Patents
송풍기의 차압측정 장치 Download PDFInfo
- Publication number
- WO2014182053A1 WO2014182053A1 PCT/KR2014/004030 KR2014004030W WO2014182053A1 WO 2014182053 A1 WO2014182053 A1 WO 2014182053A1 KR 2014004030 W KR2014004030 W KR 2014004030W WO 2014182053 A1 WO2014182053 A1 WO 2014182053A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- differential pressure
- pressure
- air
- blower
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N3/00—Regulating air supply or draught
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
- F23L5/00—Blast-producing apparatus before the fire
- F23L5/02—Arrangements of fans or blowers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/20—Arrangement or mounting of control or safety devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2225/00—Measuring
- F23N2225/04—Measuring pressure
- F23N2225/06—Measuring pressure for determining flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23N—REGULATING OR CONTROLLING COMBUSTION
- F23N2233/00—Ventilators
- F23N2233/06—Ventilators at the air intake
Definitions
- the present invention relates to a differential pressure measuring device of the blower, and more particularly to a differential pressure measuring device of the blower for accurately measuring the differential pressure of the air supplied for proportional control of the boiler.
- Heating and hot water boilers used in homes are divided into oil boilers and gas boilers according to the fuel used.
- gas boilers with low air pollution and easy use are mainly used, and liquefied natural gas (LNG) is used as the fuel.
- LNG liquefied natural gas
- Gas boilers are classified into condensing and non-condensing methods according to heat exchangers for heating heating water. Among them, the condensing-type gas boiler heats the heating water directly by using combustion heat and absorbs the latent heat of condensation of the exhaust gas again, thereby maximizing thermal efficiency.
- a burner is installed at an upper portion to ignite and burn down a gas mixed with air, and a heating water is heated using a hot combustion gas in a heating heat exchanger installed at a lower portion thereof.
- the heating operation is performed by circulating the heated water into the room and the living room.
- the three-way valve is operated to cut off the hot water supplied to the room and the living room, convert it into a hot water supply heat exchanger installed in parallel, and use it as a heating source.
- the hot water is heated while supplying and returning the hot water, and the warmed hot water is used for washing and bathing.
- the gas boiler configured as described above can be divided into various types according to the control method or the sealed state.
- the air proportional control method measures the pressure of air introduced from the outside, and then measures the pressure of the burner in proportion to the measured air pressure.
- variable to control the gas amount is changed only depending on the air pressure, even if the proportional control part of the gas valve is not controlled separately, a certain amount of gas is discharged to a constant air pressure, so that it has a constant air ratio. Unlike the proportional control method, accurate proportional control is possible.
- Such an air proportional control boiler is described in detail in the applicant Patent No. 10-0406472 (air proportional control boiler using a wind pressure sensor, registered November 7, 2003).
- the conventional boiler is an air pressure detecting unit for detecting the pressure of the air supplied from the blower to perform the air proportional control (reference numeral in FIG. 1 of the Patent No. 10-0406472). 50).
- the air pressure detection unit is configured to detect the pressure of the air supplied to the burner at the outlet end of the blower, and a method of detecting the differential pressure of the supplied air is used.
- a differential pressure flowmeter can be used to detect the flow rate by measuring the differential pressure of the air, and in general, a tightening mechanism is provided in the middle of the pipeline through which the fluid flows to narrow the passage area of the fluid. Due to the resistance generated, the pressure difference between the front and rear ends of the tightening mechanism is generated, and the differential pressure is transmitted to the manometer through the differential pressure transmitter to detect the flow rate according to the change of capacitance according to the differential pressure.
- FIG. 1 is a configuration diagram of a differential pressure measuring device of a conventional blower.
- a general blower includes a housing 1 having an outlet end 4 provided on one side thereof and an inlet 3 formed at a central portion of the front surface thereof, and housed inside the housing 1 to an external motor. It is configured to include an impeller (2) to rotate in accordance with the drive of (not shown), to discharge the air intake through the intake port (3) through the outlet end (4).
- the air pressure detecting unit 5 is provided so as to protrude from the inner part of the outlet end 4 toward the center side of the outlet end 4.
- the air pressure detecting unit 5 is a tightening mechanism described above, and for example, a venturi tube, an orifice, a flow nozzle V-cone may be used.
- the air pressure detection unit 5 since the air pressure detection unit 5 is provided to protrude inside the outlet end 4, it acts as a resistance of the flow path through which air is supplied, and turbulence is formed around the air pressure detection unit 5.
- the differential pressure of the conventional air pressure detection unit 5 when the differential pressure of the conventional air pressure detection unit 5 is measured while the exhaust is closed in the boiler, the differential pressure is not fixed but fluctuates. That is, it is normal for the differential pressure to be 0 mmH 2 O at the time of exhaust closing, but in the conventional manner, the differential pressure is not fixed and the value is varied.
- the air pressure detection unit 5 since the air pressure detection unit 5 is provided only in a part of the outlet stage 4, when a difference in air flow rate occurs in a part of the outlet stage 4, an accurate amount of air cannot be detected. In order to achieve this, the number of air pressure detectors 5 needs to be increased. However, as described above, the air pressure detector 5 acts as a resistance of the air supply, thereby preventing the smooth supply of air.
- the controller of the boiler to perform the air proportional control can not accurately control, there is a problem that the efficiency is inevitably lowered.
- the problem to be solved by the present invention in view of the above problems is to provide a differential pressure measuring apparatus of the blower capable of accurately measuring the flow rate of the air supplied through the blower.
- the present invention is to provide a differential pressure measuring device of the blower to be able to converge to 0 mmH 2 O, the result of measuring the differential pressure of the air supplied from the blower in the exhaust closed state of the boiler.
- Another object of the present invention is to provide a differential pressure measuring apparatus for a blower capable of reducing errors by detecting common differential pressures at various positions without disturbing the flow of air.
- the differential pressure measuring device of the blower of the present invention for solving the above problems, the bell mouth is provided with an inlet for the air inlet to the blower, and the differential pressure cover is coupled to the bell mouse to transfer the pressure change of the inlet through the tube And a differential pressure measuring unit for detecting a pressure change of the inlet that is transmitted through the tube.
- the differential pressure cover is a ring-shaped structure coupled to the edge of the inlet, and the differential pressure hole provided in the inner diameter direction of the ring-shaped structure to be located at the edge of the inlet, the communication with the differential pressure hole, the tube protruding so that the tube can be coupled It may include a coupling tube.
- the differential pressure hole may be provided in plural, and may further include a connection flow path interconnecting the plurality of differential pressure holes.
- the differential pressure hole may be a hole provided toward an inner diameter portion of the differential pressure cover, or a groove provided on a rear surface of the differential pressure cover, and formed between the bell mouse.
- the differential pressure measuring unit may detect a differential pressure between the pressure in the tube and the internal pressure of the boiler.
- the differential pressure measuring apparatus of the blower measures the differential pressure at the intake port side where the air flow is most stable in the blower, but does not act as a resistance to the flow of air, thereby preventing the occurrence of turbulence, thereby enabling accurate measurement of the differential pressure.
- the present invention provides a plurality of measuring holes connected by the interconnection flow path of the bell mouse installed in the inlet of the blower, so that the differential pressure measurement error can be minimized even when there is a difference in some of the air intake through the inlet of the blower. It can be effective.
- the present invention when the differential pressure is measured in the exhaust closed state of the boiler, the measurement result of the differential pressure converges to 0 mmH 2 O, it is possible to improve the boiler efficiency by improving the accuracy of the proportional control of the boiler by preventing the fluctuation occurs It works.
- FIG. 1 is a configuration diagram of a differential pressure measuring device of a conventional blower.
- FIG. 2 is an exploded perspective view of the differential pressure measuring apparatus of the blower according to the preferred embodiment of the present invention.
- FIG. 3 is a cross-sectional view of the bonding state of FIG.
- Figure 4 is a partially cutaway perspective view of the bell mouse of the blower differential pressure measuring apparatus of the present invention.
- FIG 5 is an explanatory diagram for explaining the operation concept of the blower differential pressure measuring apparatus of the present invention.
- connection path 53 tube connector
- Figure 2 is an exploded perspective view of the differential pressure measuring apparatus of the blower according to a preferred embodiment of the present invention
- Figure 3 is a cross-sectional configuration of the coupled state of Figure 2
- Figure 4 is an explanatory diagram for explaining the differential pressure measurement of the present invention.
- the differential pressure measuring apparatus of the blower is accommodated in the housing 10 of the blower, the impeller 20 is rotated by the rotation of the motor (not shown) And a cover part 30 which covers the front surface of the housing 10 in which the impeller 20 is accommodated, and provides an exposure hole 31 through which the central part of the impeller 20 is exposed, and the cover part 30.
- the differential pressure hole 51 is located at the edge of the inlet 41 of the bell mouse 40, and communicates with the tube connecting tube 53 provided on the front of the differential pressure cover 50, one end is The other end of the tube 54 connected to the tube connecting tube 53 is connected to the differential pressure measuring unit 55 to transmit the pressure when the air is introduced through the inlet 41 to the differential pressure measuring unit 55.
- the blower housing 10 accommodates the impeller 20 to supply the intake air according to the driving of the impeller 20 to the burner side of the boiler, and the impeller 20 receiving portion has a cylindrical receiving space.
- the outlet end 11 is in the form of a narrow tube compared with the receiving space.
- the front surface of the housing 10 has an open structure, and the cover part 30 is coupled to the open front surface of the housing 10.
- the shape of the cover portion 30 is the same as the shape of the open surface of the housing 10, the exposure hole 31 for exposing the central portion of the impeller 20 to the outside is provided. As the impeller 20 rotates, air is supplied to the center portion, and the supplied air is blown outward, and an exposure hole 31 is provided in the cover portion 30 to supply air.
- the bell mouse 40 is coupled to the front surface of the cover part 30 in which the exposure hole 31 is provided.
- the role of the bell mouse 40 is a structure in which the periphery of the supply port 41 is inclined toward the center of the impeller 20 so that the air supply port 41 is located closer to the center of the impeller 20.
- the inclined surface around the supply port 41 is formed to have a gentle curvature so as to prevent the occurrence of turbulent flow of the incoming air.
- the differential pressure cover 50 is coupled to the front surface of the bell mouse (40).
- the differential pressure cover 50 is coupled to the circumference of the supply port 41 provided in the central portion of the bell mouse 40, it is an annular structure having the same inner diameter as the supply port 41.
- the differential pressure cover 50 is provided with a differential pressure hole 51 at the edge of the supply port 41 in the direction toward the inner diameter, the tube connecting pipe 53 communicating with the differential pressure hole 51 protrudes on the front surface have.
- the differential pressure hole 51 may be directly provided in the differential pressure cover 50 or may be formed between the bell mouse 40 by providing a groove in the rear surface of the differential pressure cover 50.
- the supply port 41 serves as a tightening mechanism for measuring the differential pressure, and as air flows into the housing 10 through the supply port 41, the pressure of the supply port 41 is lowered.
- the pressure of the supply port 41 As the pressure of the supply port 41 is lowered, the pressure of the differential pressure hole 51 is lower than that of the inner pressure, so that the air inside is discharged to the outside, and the change in the pressure is as shown in FIG. 4.
- the inner pressure of the tube connecting tube 53 and the tube 54 is lowered.
- the pressure of the supply port 41 is transmitted to the first pressure P1 on one side of the differential pressure measuring unit 55 through the tube 54.
- the other end pressure of the differential pressure measuring unit 55 is a second pressure P2 which is an internal pressure of the boiler, and the differential pressure measuring unit 55 measures the differential pressure between the second pressure P2 and the first pressure P1. .
- the deformation plate 56 provided inside the differential pressure measuring unit 55 is deformed by the differential pressure between the first pressure P1 and the second pressure P2, and the deformation degree is different depending on the magnitude of the differential pressure. Thus, the change in capacitance according to the magnitude of the differential pressure is detected.
- differential pressure measuring unit 55 may be changed to a differential pressure sensor in various ways as necessary.
- the differential pressure hole 51 provided on the side of the supply port 41 does not act as a resistance to the flow path of the air supplied into the housing 10 through the supply port 41, the front surface of the differential pressure cover 50
- the streamlined structure prevents turbulence. Therefore, it is possible to prevent the occurrence of variables in the pressure measurement and to measure the accurate differential pressure.
- the amount of air supplied through the blower may be calculated by Equation 1 below.
- rs is the standard air specific volume
- r is the specific volume of current air
- delta P is the measured differential pressure
- K is a constant.
- FIG. 5 is a partial cutaway cross-sectional view of the coupled state of the bell mouse 40 and the differential pressure cover 50 according to another embodiment of the present invention.
- the differential pressure cover 50 is provided with a plurality of differential pressure holes 51 in contact with the supply port 41 of the bell mouse 40, and connects the plurality of differential pressure holes 51 with each other.
- the flow path 52 is included.
- Such a configuration is provided with a plurality of differential pressure holes 51 described in detail in the previous embodiment, the pressure of the supply port 41 is measured at various measurement positions, and the average pressure thereof is one end of the differential pressure measuring unit 55 It is reflected in.
- FIG. 6 is an explanatory diagram for explaining the pressure of the supply port 41 reflected by the differential pressure hole 51 and the connection flow path 52 in FIG. 5.
- each of the four differential pressure holes 51 is connected by a connection flow path 52.
- a tube 54 connected to the tube connecting tube 53 communicating with one of the differential pressure holes 51 is connected to one end of the differential pressure measuring unit 55.
- the internal pressure of the tube 54 is P1- of each pressure.
- P1-2, P1-3, and P1-4 are shown as the average value P1
- the differential pressure measuring unit 55 measures the difference between the internal pressure P2 of the boiler and the average pressure value P1 of the supply port 41.
- a plurality of detection positions of the pressure at the supply port 41 may be prevented from acting as a resistance to the flow of air supplied through the supply port 41, thereby preventing the intervention of variables causing errors such as the generation of turbulence. Can be.
- the blower used in the measurement was ACEIII 20K, and the differential pressure was decreased as the exhaust closing pressure was increased, and the differential pressure was measured without change within 5 mmH 2 O while the exhaust closing pressure exceeded 15 mmH 2 O. Variation here means that the measured differential pressure increases despite the increase in the exhaust closing pressure.
- the differential pressure is detected as 0 mmH 2 O in the state of completely exhaust closing.
- the present invention can accurately measure the differential pressure of the blower, it is possible to increase the accuracy of the proportional control of the boiler, there is industrial applicability.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Thermal Sciences (AREA)
- Measuring Fluid Pressure (AREA)
- Regulation And Control Of Combustion (AREA)
Abstract
Description
Claims (5)
- 송풍기에 공기가 유입되는 유입구가 마련된 벨마우스;상기 벨마우스에 결합되어 상기 유입구의 압력 변화분을 튜브를 통해 전달하는 차압커버; 및상기 튜브를 통해 전달되는 상기 유입구의 압력 변화분을 검출하는 차압측정부를 포함하는 송풍기의 차압측정 장치.
- 제1항에 있어서,상기 차압커버는,상기 유입구의 가장자리에 결합되는 링형 구조이며,상기 유입구의 가장자리에 위치하도록 상기 링형 구조의 내경방향으로 마련된 차압공; 및상기 차압공과 연통되며, 상기 튜브가 결합 될 수 있도록 돌출된 튜브결합관을 포함하는 송풍기의 차압측정 장치.
- 제2항에 있어서,상기 차압공은 다수로 마련되며,상기 다수의 차압공을 상호 연결하는 연결유로를 더 포함하는 송풍기의 차압측정 장치.
- 제2항 또는 제3항에 있어서,상기 차압공은,상기 차압커버의 내경부를 향해 마련된 홀이거나,상기 차압커버의 배면에 마련된 홈으로, 상기 벨마우스와의 사이에 형성된 것을 특징으로 하는 송풍기의 차압측정 장치.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 차압측정부는,상기 튜브 내의 압력과 보일러 내부압력의 차압을 검출하는 것을 특징으로 하는 송풍기의 차압측정 장치.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU2014263407A AU2014263407B2 (en) | 2013-05-08 | 2014-05-07 | Apparatus for measuring differential pressure in air blower |
| CN201480026294.3A CN105209876B (zh) | 2013-05-08 | 2014-05-07 | 送风机的压差测量装置 |
| RU2015152429A RU2633003C2 (ru) | 2013-05-08 | 2014-05-07 | Устройство для измерения дифференциального давления в нагнетательном вентиляторе |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2013-0052015 | 2013-05-08 | ||
| KR20130052015A KR101489688B1 (ko) | 2013-05-08 | 2013-05-08 | 송풍기의 차압측정 장치 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2014182053A1 true WO2014182053A1 (ko) | 2014-11-13 |
Family
ID=51867467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2014/004030 Ceased WO2014182053A1 (ko) | 2013-05-08 | 2014-05-07 | 송풍기의 차압측정 장치 |
Country Status (5)
| Country | Link |
|---|---|
| KR (1) | KR101489688B1 (ko) |
| CN (1) | CN105209876B (ko) |
| AU (1) | AU2014263407B2 (ko) |
| RU (1) | RU2633003C2 (ko) |
| WO (1) | WO2014182053A1 (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106814545A (zh) * | 2015-11-30 | 2017-06-09 | 上海微电子装备有限公司 | 气压测量装置及方法、调焦调平装置及光刻机设备 |
| AU2020223747B2 (en) * | 2019-09-11 | 2022-05-19 | Kyungdong Navien Co., Ltd. | Bell mouth, air supply assembly including the bell mouth, and air supply control system using the bell mouth |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018105063A1 (de) * | 2018-03-06 | 2019-09-12 | Ebm-Papst Mulfingen Gmbh & Co. Kg | Vorrichtung und Verfahren zur Luftmengenerfassung |
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| JP2001165741A (ja) * | 1999-12-06 | 2001-06-22 | Japan National Oil Corp | 多相流体流量計及び多相流体流量演算方法 |
| KR100870887B1 (ko) * | 2008-07-23 | 2008-11-27 | (주) 터보맥스 | 공기 또는 가스의 벨마우스형 흡입유량 측정수단이 구비된터보기계 |
| KR20090090040A (ko) * | 2008-02-20 | 2009-08-25 | 한라공조주식회사 | 공기 송풍 장치 |
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| CN201173839Y (zh) * | 2008-04-02 | 2008-12-31 | 李岩峰 | 一种带温度湿度指示功能的机械式差压表 |
| DE102008049809A1 (de) * | 2008-09-30 | 2010-04-08 | Eastman Kodak Co. | Bogenfördervorrichtung |
| KR101162234B1 (ko) | 2009-12-02 | 2012-07-04 | 이기현 | 공기여과기 모의장치 |
| WO2011133822A1 (en) * | 2010-04-21 | 2011-10-27 | Flow Systems, Inc. | Differential pressure constant volume flow air sampler |
| CN103658221B (zh) * | 2013-12-19 | 2015-12-30 | 江阴江顺铝型材成套设备制造有限公司 | 一种热剪炉燃烧室进风口测压装置 |
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2013
- 2013-05-08 KR KR20130052015A patent/KR101489688B1/ko active Active
-
2014
- 2014-05-07 RU RU2015152429A patent/RU2633003C2/ru active
- 2014-05-07 AU AU2014263407A patent/AU2014263407B2/en not_active Ceased
- 2014-05-07 WO PCT/KR2014/004030 patent/WO2014182053A1/ko not_active Ceased
- 2014-05-07 CN CN201480026294.3A patent/CN105209876B/zh active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5947680A (en) * | 1995-09-08 | 1999-09-07 | Ebara Corporation | Turbomachinery with variable-angle fluid guiding vanes |
| JP2001165741A (ja) * | 1999-12-06 | 2001-06-22 | Japan National Oil Corp | 多相流体流量計及び多相流体流量演算方法 |
| KR20090090040A (ko) * | 2008-02-20 | 2009-08-25 | 한라공조주식회사 | 공기 송풍 장치 |
| KR100870887B1 (ko) * | 2008-07-23 | 2008-11-27 | (주) 터보맥스 | 공기 또는 가스의 벨마우스형 흡입유량 측정수단이 구비된터보기계 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106814545A (zh) * | 2015-11-30 | 2017-06-09 | 上海微电子装备有限公司 | 气压测量装置及方法、调焦调平装置及光刻机设备 |
| CN106814545B (zh) * | 2015-11-30 | 2018-08-24 | 上海微电子装备(集团)股份有限公司 | 气压测量装置及方法、调焦调平装置及光刻机设备 |
| AU2020223747B2 (en) * | 2019-09-11 | 2022-05-19 | Kyungdong Navien Co., Ltd. | Bell mouth, air supply assembly including the bell mouth, and air supply control system using the bell mouth |
| US11408641B2 (en) | 2019-09-11 | 2022-08-09 | Kyungdong Navien Co., Ltd | Bell mouth, air supply assembly including the bell mouth, and air supply control system using the bell mouth |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105209876B (zh) | 2017-10-31 |
| AU2014263407A1 (en) | 2015-11-26 |
| KR101489688B1 (ko) | 2015-02-04 |
| CN105209876A (zh) | 2015-12-30 |
| AU2014263407B2 (en) | 2017-09-14 |
| RU2633003C2 (ru) | 2017-10-11 |
| RU2015152429A (ru) | 2017-06-14 |
| KR20140132597A (ko) | 2014-11-18 |
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