WO2014177243A1 - Beschleunigungssensor sowie verfahren zur herstellung eines beschleunigungssensors - Google Patents
Beschleunigungssensor sowie verfahren zur herstellung eines beschleunigungssensors Download PDFInfo
- Publication number
- WO2014177243A1 WO2014177243A1 PCT/EP2014/000833 EP2014000833W WO2014177243A1 WO 2014177243 A1 WO2014177243 A1 WO 2014177243A1 EP 2014000833 W EP2014000833 W EP 2014000833W WO 2014177243 A1 WO2014177243 A1 WO 2014177243A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrode
- substrate
- acceleration sensor
- movable
- comb
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
Abstract
Description
Claims
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA2915176A CA2915176C (en) | 2013-05-02 | 2014-03-27 | Acceleration sensor and method for producing an acceleration sensor |
EP14717409.8A EP2992336B1 (de) | 2013-05-02 | 2014-03-27 | Beschleunigungssensor sowie verfahren zur herstellung eines beschleunigungssensors |
BR112015026651-7A BR112015026651B1 (pt) | 2013-05-02 | 2014-03-27 | Sensor de aceleração e método para a produção de um sensor de aceleração |
JP2016510957A JP6067926B2 (ja) | 2013-05-02 | 2014-03-27 | 加速度センサ及び加速度センサの製造方法 |
RU2015142635A RU2618482C1 (ru) | 2013-05-02 | 2014-03-27 | Датчик ускорения, а также способ изготовления датчика ускорения |
AU2014261760A AU2014261760B2 (en) | 2013-05-02 | 2014-03-27 | Acceleration sensor and method for producing an acceleration sensor |
KR1020157031114A KR101818027B1 (ko) | 2013-05-02 | 2014-03-27 | 가속도 센서 및 가속도 센서의 제조 방법 |
US14/888,432 US9709596B2 (en) | 2013-05-02 | 2014-03-27 | Acceleration sensor and method for producing an acceleration sensor |
CN201480025135.1A CN105190319B (zh) | 2013-05-02 | 2014-03-27 | 加速度传感器及其制造方法 |
IL242052A IL242052A (en) | 2013-05-02 | 2015-10-13 | Accelerometer Sensor and Method for Manufacturing Accelerometer Sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013007593.9A DE102013007593B4 (de) | 2013-05-02 | 2013-05-02 | Beschleunigungssensor sowie verfahren zur herstellung eines beschleunigungssensors |
DE102013007593.9 | 2013-05-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014177243A1 true WO2014177243A1 (de) | 2014-11-06 |
Family
ID=50486883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2014/000833 WO2014177243A1 (de) | 2013-05-02 | 2014-03-27 | Beschleunigungssensor sowie verfahren zur herstellung eines beschleunigungssensors |
Country Status (13)
Country | Link |
---|---|
US (1) | US9709596B2 (de) |
EP (1) | EP2992336B1 (de) |
JP (1) | JP6067926B2 (de) |
KR (1) | KR101818027B1 (de) |
CN (1) | CN105190319B (de) |
AU (1) | AU2014261760B2 (de) |
BR (1) | BR112015026651B1 (de) |
CA (1) | CA2915176C (de) |
DE (1) | DE102013007593B4 (de) |
IL (1) | IL242052A (de) |
RU (1) | RU2618482C1 (de) |
TR (1) | TR201819239T4 (de) |
WO (1) | WO2014177243A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114088976A (zh) * | 2022-01-24 | 2022-02-25 | 成都华托微纳智能传感科技有限公司 | 一种梳齿间隙可调式mems加速度计 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015000158A1 (de) * | 2015-01-05 | 2016-07-07 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit reduziertem Bias und Herstellungsverfahren eines Beschleunigungssensors |
DE102015001128B4 (de) | 2015-01-29 | 2021-09-30 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit Federkraftkompensation |
JP6513519B2 (ja) * | 2015-07-17 | 2019-05-15 | 株式会社日立製作所 | 物理量センサ |
GB201514319D0 (en) | 2015-08-12 | 2015-09-23 | Atlantic Inertial Systems Ltd | Accelerometers |
CN107188108B (zh) * | 2017-05-23 | 2023-07-21 | 深迪半导体(绍兴)有限公司 | 一种mems器件及其防吸附方法 |
US10816568B2 (en) | 2017-12-26 | 2020-10-27 | Physical Logic Ltd. | Closed loop accelerometer |
KR20200043816A (ko) * | 2018-10-18 | 2020-04-28 | 엘지전자 주식회사 | Mems 가속도계 및 이의 제조 방법 |
US11567100B2 (en) * | 2019-11-07 | 2023-01-31 | Honeywell International Inc. | Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling |
CN111751574B (zh) * | 2020-07-30 | 2022-01-28 | 保定开拓精密仪器制造有限责任公司 | 一种温度加速度复合型石英摆片的制备方法 |
Citations (4)
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WO2006105314A1 (en) * | 2005-03-29 | 2006-10-05 | Analog Devices, Inc. | Capacitive sensor with damping |
US20070029629A1 (en) * | 2005-07-21 | 2007-02-08 | Evigia Systems, Inc. | Integrated sensor and circuitry and process therefor |
US20120031185A1 (en) * | 2010-08-09 | 2012-02-09 | Johannes Classen | Acceleration sensor having a damping device |
DE102011083487A1 (de) * | 2011-09-27 | 2013-03-28 | Robert Bosch Gmbh | Beschleunigungssensor und Verfahren zum Betrieb eines Beschleunigungssensors |
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FR2495328B1 (fr) * | 1980-11-28 | 1986-04-11 | Onera (Off Nat Aerospatiale) | Perfectionnements aux accelerometres electrostatiques |
RU2098832C1 (ru) * | 1996-04-04 | 1997-12-10 | Русланов Александр Семенович | Чувствительный элемент емкостного акселерометра |
JP3528539B2 (ja) * | 1997-10-13 | 2004-05-17 | 日産自動車株式会社 | 半導体装置およびその製造方法 |
US6133670A (en) * | 1999-06-24 | 2000-10-17 | Sandia Corporation | Compact electrostatic comb actuator |
JP2002357619A (ja) * | 2001-06-01 | 2002-12-13 | Mitsubishi Electric Corp | 加速度センサ及びその製造方法 |
US6792804B2 (en) * | 2001-10-19 | 2004-09-21 | Kionix, Inc. | Sensor for measuring out-of-plane acceleration |
JP4156946B2 (ja) * | 2003-02-26 | 2008-09-24 | 三菱電機株式会社 | 加速度センサ |
WO2004076340A1 (en) * | 2003-02-28 | 2004-09-10 | Bae Systems Plc | An accelerometer |
US6952041B2 (en) * | 2003-07-25 | 2005-10-04 | Robert Bosch Gmbh | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
JP2005172543A (ja) * | 2003-12-10 | 2005-06-30 | Mitsubishi Electric Corp | 加速度センサおよび加速度センサの製造方法 |
US7449355B2 (en) * | 2005-04-27 | 2008-11-11 | Robert Bosch Gmbh | Anti-stiction technique for electromechanical systems and electromechanical device employing same |
DE102007030120B4 (de) * | 2007-06-29 | 2010-04-08 | Litef Gmbh | Drehratensensor |
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DE102008016004A1 (de) | 2008-03-27 | 2009-10-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikroelektromechanischer Inertialsensor mit atmosphärischer Bedämpfung |
US8210038B2 (en) * | 2009-02-17 | 2012-07-03 | Robert Bosch Gmbh | Drive frequency tunable MEMS gyroscope |
JP5333354B2 (ja) | 2010-06-15 | 2013-11-06 | 株式会社デンソー | 力学量センサ |
JP5790297B2 (ja) * | 2011-08-17 | 2015-10-07 | セイコーエプソン株式会社 | 物理量センサー及び電子機器 |
US20150301075A1 (en) * | 2012-10-16 | 2015-10-22 | Hitachi Automotive Systems, Ltd. | Inertial Sensor |
-
2013
- 2013-05-02 DE DE102013007593.9A patent/DE102013007593B4/de active Active
-
2014
- 2014-03-27 US US14/888,432 patent/US9709596B2/en not_active Expired - Fee Related
- 2014-03-27 AU AU2014261760A patent/AU2014261760B2/en active Active
- 2014-03-27 TR TR2018/19239T patent/TR201819239T4/tr unknown
- 2014-03-27 RU RU2015142635A patent/RU2618482C1/ru active
- 2014-03-27 KR KR1020157031114A patent/KR101818027B1/ko active IP Right Grant
- 2014-03-27 JP JP2016510957A patent/JP6067926B2/ja active Active
- 2014-03-27 WO PCT/EP2014/000833 patent/WO2014177243A1/de active Application Filing
- 2014-03-27 EP EP14717409.8A patent/EP2992336B1/de active Active
- 2014-03-27 BR BR112015026651-7A patent/BR112015026651B1/pt active IP Right Grant
- 2014-03-27 CA CA2915176A patent/CA2915176C/en active Active
- 2014-03-27 CN CN201480025135.1A patent/CN105190319B/zh active Active
-
2015
- 2015-10-13 IL IL242052A patent/IL242052A/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2006105314A1 (en) * | 2005-03-29 | 2006-10-05 | Analog Devices, Inc. | Capacitive sensor with damping |
US20070029629A1 (en) * | 2005-07-21 | 2007-02-08 | Evigia Systems, Inc. | Integrated sensor and circuitry and process therefor |
US20120031185A1 (en) * | 2010-08-09 | 2012-02-09 | Johannes Classen | Acceleration sensor having a damping device |
DE102011083487A1 (de) * | 2011-09-27 | 2013-03-28 | Robert Bosch Gmbh | Beschleunigungssensor und Verfahren zum Betrieb eines Beschleunigungssensors |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114088976A (zh) * | 2022-01-24 | 2022-02-25 | 成都华托微纳智能传感科技有限公司 | 一种梳齿间隙可调式mems加速度计 |
CN114088976B (zh) * | 2022-01-24 | 2022-04-12 | 成都华托微纳智能传感科技有限公司 | 一种梳齿间隙可调式mems加速度计 |
Also Published As
Publication number | Publication date |
---|---|
DE102013007593B4 (de) | 2022-12-29 |
CA2915176C (en) | 2020-06-16 |
US9709596B2 (en) | 2017-07-18 |
IL242052A (en) | 2016-07-31 |
AU2014261760B2 (en) | 2016-10-13 |
CN105190319B (zh) | 2017-12-15 |
BR112015026651A2 (pt) | 2017-07-25 |
AU2014261760A1 (en) | 2015-12-17 |
CA2915176A1 (en) | 2014-11-06 |
EP2992336A1 (de) | 2016-03-09 |
JP2016522896A (ja) | 2016-08-04 |
TR201819239T4 (tr) | 2019-01-21 |
RU2618482C1 (ru) | 2017-05-03 |
CN105190319A (zh) | 2015-12-23 |
BR112015026651B1 (pt) | 2022-03-15 |
KR20150136131A (ko) | 2015-12-04 |
JP6067926B2 (ja) | 2017-01-25 |
DE102013007593A1 (de) | 2014-11-06 |
KR101818027B1 (ko) | 2018-01-12 |
US20160069928A1 (en) | 2016-03-10 |
EP2992336B1 (de) | 2018-12-05 |
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