WO2014162547A1 - Instrument de mesure d'une caractéristique optique - Google Patents

Instrument de mesure d'une caractéristique optique Download PDF

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Publication number
WO2014162547A1
WO2014162547A1 PCT/JP2013/060245 JP2013060245W WO2014162547A1 WO 2014162547 A1 WO2014162547 A1 WO 2014162547A1 JP 2013060245 W JP2013060245 W JP 2013060245W WO 2014162547 A1 WO2014162547 A1 WO 2014162547A1
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WO
WIPO (PCT)
Prior art keywords
light
integrating sphere
hole
light guide
incident
Prior art date
Application number
PCT/JP2013/060245
Other languages
English (en)
Japanese (ja)
Inventor
望月　学
昭一 藤森
Original Assignee
パイオニア株式会社
株式会社パイオニアＦａ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パイオニア株式会社, 株式会社パイオニアＦａ filed Critical パイオニア株式会社
Priority to CN201380075271.7A priority Critical patent/CN105074399B/zh
Priority to JP2015509798A priority patent/JP6199374B2/ja
Priority to PCT/JP2013/060245 priority patent/WO2014162547A1/fr
Publication of WO2014162547A1 publication Critical patent/WO2014162547A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0216—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0422—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using light concentrators, collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0254—Spectrometers, other than colorimeters, making use of an integrating sphere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J2001/0481—Preset integrating sphere or cavity

Definitions

  • the present invention relates to an optical characteristic measuring apparatus using an integrating sphere.
  • Patent Document 1 discloses a photodetection device.
  • Patent Document 1 requires a light shielding plate (see reference numeral 206 in FIG. 2 of Patent Document 1 and FIG. 2 of the present application). And if there is a light shielding plate, the light in a specific direction out of the light of the measurement object is blocked by the light shielding plate, and the number of reflections on the surface of the integrating sphere increases and is absorbed. Even if it is used, there is a problem that only the integrated light in which the portion of the light component in a predetermined direction is reduced can be measured.
  • the present invention has been made in view of the above problems, and an example of the object thereof is to provide an optical characteristic measuring apparatus capable of obtaining a more accurate measurement value.
  • An optical characteristic measuring apparatus includes an integrating sphere having an inner surface of an integrating sphere that diffusely reflects incident light, and a light guide unit that passes and reflects the light emitted from the measurement object and guides the light to the integrating sphere.
  • the light guide is formed so that the surfaces other than the integrating sphere side and the measurement object side reflect light regularly.
  • FIG. 1 is an explanatory diagram of a first embodiment of the present invention.
  • the optical characteristic measuring device 1 includes an integrating sphere 2 and a light guide component member 5.
  • the integrating sphere 2 has an integrating sphere body 3, a first through hole portion 31, and a second through hole portion 33.
  • the integrating sphere main body 3 has a spherical hollow space.
  • the integrating sphere body 3 is formed so that the integrating sphere inner surface 3a, which is the surface on the hollow space side, diffusely reflects (diffuse reflection).
  • the hollow space formed by the integrating sphere inner surface 3a of the integrating sphere main body 3 needs to be spherical, but the external shape does not necessarily have to be a sphere.
  • a first through hole portion 31 and a second through hole portion 33 are connected to the integrating sphere body 3.
  • the integrating sphere inner surface 3a of the integrating sphere 2 has been described as performing diffuse reflection.
  • the integrating sphere inner surface 3a may be regularly reflected.
  • an appropriate configuration and usage method are required. Specifically, in the case of regular reflection, high precision machining is required because it is easily affected by the unevenness on the inner surface.
  • the integrating sphere 2 that diffusely reflects it is generally preferable to use the integrating sphere 2 that diffusely reflects.
  • the integrating sphere 2 that diffusely reflects is advantageous.
  • the reflective material for example, barium sulfate
  • a cylindrical hollow space is formed in the first through hole portion 31.
  • a first through hole 31 c is formed that penetrates from the outside of the first through hole portion 31 to the hollow space of the integrating sphere main body 3.
  • the integrating sphere 2 receives the light to be measured through the first through hole 31c of the first through hole 31.
  • this 1st through-hole part 31 is a cylindrical shape in this embodiment, it may be prismatic shape (triangular prism, quadrangular prism, pentagonal prism, or more prismatic shapes).
  • a cylindrical outer surface formed by the first through holes 31c is referred to as a first outer surface 31b.
  • the cylindrical inner surface (integral sphere body 3 side) formed by the first through hole 31c is referred to as a first inner surface 31a.
  • a cylindrical hollow space is formed in the second through-hole portion 33.
  • a second through hole 33 c is formed that penetrates from the outside of the second through hole portion 33 to the hollow space of the integrating sphere main body 3.
  • the integrating sphere 2 outputs the light to be measured through the second through hole 33c of the second through hole 33.
  • the light passing through the second through-hole portion 33 is obtained after the light passing through the first through-hole portion 31 is diffusely reflected at the integrating sphere inner surface 3a at least once. The reason for this will be described later in detail.
  • the second through-hole portion 33 has a cylindrical shape in this embodiment, but may have a prismatic shape (triangular prism, quadrangular prism, pentagonal prism, or more prismatic shapes).
  • the cylindrical outer surface formed by the second through hole 33c is referred to as a second outer surface 33b.
  • a cylindrical inner surface (integral sphere body 3 side) formed by the second through hole 33c is referred to as a second inner surface 33a.
  • the light receiving unit 7 and the wavelength measuring unit 9 are disposed at the position of the second external surface 33b.
  • the light receiving unit 7 is used to measure the amount of light after being diffusely reflected by the integrating sphere body 3.
  • a photodetector may be used for the light receiving unit 7.
  • a CCD or the like may be used.
  • the wavelength measuring unit 9 is used to measure the wavelength of light after being diffusely reflected by the integrating sphere body 3.
  • the wavelength measuring unit 9 allows light to enter from the front end surface of the optical fiber, guide the light through the optical fiber, guide it to the wavelength measuring device, and actually measure the wavelength with the wavelength measuring device. good.
  • a light guide member may be further used at the tip of the optical fiber so that the light guide member first guides the light to the optical fiber and then guides it to the wavelength measuring device.
  • a member that reflects the inner surface of the cylindrical member may be used, or a member (for example, glass) that reflects the extended inner surface may be used.
  • the light guide member may be formed of a member that reflects the surface of a cylindrical or prismatic side surface.
  • the wavelength measuring unit 9 may be such that the wavelength measuring device directly faces the second outer surface 33b.
  • the light receiving unit 7 and the wavelength measuring unit 9 are described so as to contact the second external surface 33b. May be. Furthermore, it may be inserted inside the second external surface 33b. Further, although the light receiving unit 7 and the wavelength measuring unit 9 are provided in the second through hole 33, it is not always necessary to provide both of them in the second through hole 33. For example, it is also possible to form a third through hole and place either one there.
  • FIG. 2 is an explanatory diagram for explaining the function of the integrating sphere 2.
  • the integrating sphere 2 outputs diffused light (emitted from the second through hole 33c) by repeating diffuse reflection of the incident light (incident from the first through hole 31c). That is, the integrating sphere 2 can measure light in which the polarization, light distribution, wavelength, and the like of light in the direction of the measurement object 101 (for example, LED) are averaged.
  • equation is materialized about the light quantity output with respect to the light quantity input at this time.
  • Output port area (second outer surface 33b of second through hole 33c) / total surface area inside integrating sphere ( (in the case of FIG. 1) 3a + 31a + 33a)
  • the light guide member 5 is inserted into the first through hole 31c.
  • the light guide component member 5 has a hollow internal space having a truncated cone shape.
  • This internal space is a light guide.
  • the truncated cone shape is a rotating body centered on a straight line (hereinafter referred to as the optical axis center CA) connecting the measurement object 101 and the center of the integrating sphere 2 (integrating sphere body 3).
  • the optical axis center CA it is not essential that the optical axis center CA coincides with the center of the integrating sphere 2.
  • the light guide part constituting member 5 has a cylindrical shape in which the cross-sectional area becomes smaller toward the measuring object 101 side.
  • the outer shape of the light guide component member 5 is not limited and may be any shape.
  • the light guide member inner peripheral surface 5a on the inner space side of the light guide unit constituting member 5 is formed so as to regularly reflect light.
  • the light guide member inner peripheral surface 5a may be plated.
  • the internal space has an integrating sphere side opening 5b on the integrating sphere main body 3 side. Further, the internal space has a measurement object side opening 5c on the measurement object 101 side.
  • the measurement object 101 is arranged inside or outside the measurement object side opening 5c.
  • the internal space of the light guide component member 5 has a truncated cone shape, but the present invention is not limited to this.
  • the internal space of the light guide member 5 may have a truncated pyramid shape.
  • the shape of the light guide may be a simple conical shape. As will be described later, it is sufficient that the direct light does not enter the second through hole 33c, and the direct light incident position can exist regardless of the shape.
  • Slits (cuts) (first slits 5e and second slits 5d) for inserting the probes 11 (first probe 11a and second probe 11b) are formed on the measurement object 101 side of the light guide unit constituting member 5. Is formed.
  • the tip of the probe 11 contacts the electrode of the measurement object 101 (for example, LED).
  • the probe 11 is used for supplying power to the measurement object 101 to emit light.
  • the probe 11 and the slit are not essential when the measurement object 101 does not require the probe 11.
  • the light that has passed through and reflected through the light guide component member 5 exits the integrating sphere side opening 5b.
  • the angle is in the range of 0 to ⁇ 1 with respect to the optical axis center CA.
  • ⁇ 1 is referred to as the maximum angle ⁇ 1).
  • the first point is a position that is at a larger angle with respect to the optical axis center CA with the point A as the base point than the position that has the maximum angle ⁇ 1 with respect to the optical axis center CA with the point A as the base point.
  • a second inner surface 33a of the two through holes 33c is arranged. More specifically, a point B which is the farthest position from the integrating sphere side opening 5b in the second inner surface 33a is an angle ⁇ 2 ( ⁇ 2 ⁇ ⁇ 1) with respect to the optical axis center CA with the point A as a base point. It is arranged at the position.
  • Patent Document 1 there is a portion similar in shape to the embodiment shown in FIG. 1, but the configuration is completely different. This will be described below.
  • the inner wall surface of the reflecting member corresponding to the light guide component member 5 in the first embodiment is made of a diffuse reflecting material (see paragraph [0032] of Patent Document 1).
  • the first through hole 31 c and the second through hole 31 c A shielding plate (light shielding plate) is provided between the through hole 33c.
  • FIG. 3 is an explanatory diagram of the effect of the first embodiment.
  • FIG. 4 is an explanatory diagram of an example of the effect of the first embodiment.
  • the second and subsequent reflections are not performed, but if there is a second reflection, the light is reflected by (( ⁇ -2 ⁇ ) -2 ⁇ ).
  • the light exits from the integrating sphere side opening 5b of the light guide unit constituting member 5.
  • the maximum angle ⁇ 1 is the maximum range in which the light that has passed through and reflected by the light guide member 5 is directly incident on the integrating sphere inner surface 3a without being diffusely reflected.
  • FIG. 4 shows the result of calculating the maximum angle ⁇ 1 when the distance between the integrating sphere side opening 5b and the measurement object side opening 5c (light guide member length L) is actually finite. It is.
  • the horizontal axis represents the light guide member inclination angle ⁇ of the light guide unit constituting member 5.
  • the maximum angle ⁇ 1 is automatically set. Can be calculated. If the second outer surface 33b is positioned at a position that is larger than ⁇ 1, light that is not diffusely reflected on the integrating sphere inner surface 3a is not incident on the light receiving unit 7. Become. As a result, a light shielding plate is not necessary, and a more appropriate measurement result can be obtained. On the other hand, in Patent Document 1, since the reflection at the member corresponding to the light guide component member 5 is diffuse reflection, the light that is diffusely reflected by entering, for example, the position C in FIG.
  • the measurement object 101 is in the opposite direction.
  • the average light quantity and wavelength can be measured for the light added to the light.
  • the light guide member inner peripheral surface 5a of the light guide unit constituting member 5 may have a reflectance at which light attenuates when the number of reflections is large (for example, three times). This is because when the number of reflections is large, the wavelength of light may be deflected due to the influence of the wavelength absorption characteristics of the reflective material, and in this case, the measured value may not be accurate.
  • the light receiving unit 7 and the wavelength measuring unit 9 are arranged with respect to the same second through hole 33c.
  • the wavelength of the light incident on the light receiving unit 7 can be measured. That is, when a through hole is created in the integrating sphere body 3 for each of the light receiving unit 7 and the wavelength measuring unit 9, the measurement position is different, so that the light incident on the light receiving unit 7 and the wavelength measuring unit 9
  • there is no such fear since the light receiving unit 7 and the wavelength measuring unit 9 are arranged with respect to the same second through hole 33c, a portion for measurement is reduced, and the area of the integrating sphere inner surface 3a that diffusely reflects is increased. it can. Therefore, there is an effect that a more accurate measurement value can be obtained.
  • FIG. 5 is an explanatory diagram of the second embodiment. More specifically, FIG. 5 is an enlarged portion of the second through hole 33c portion of the second embodiment, and other portions are the same as those of the first embodiment.
  • the incident surface 9 a of the wavelength measuring unit 9 may be formed so as to contact the second through hole 33 c. Further, as shown in FIG. 5, the wavelength measuring unit 9 may pass through the second through hole 33.
  • ⁇ 3 90 °.
  • the angle ⁇ 4 is configured to be 90 °.
  • the wavelength measuring unit 9 can more smoothly guide light to a part to be actually measured such as a spectroscope.
  • ⁇ 3 may not be 90 °.
  • the wavelength measuring unit 9 may penetrate into the second through hole 33c. In that case, ⁇ 3 may be adjusted to an angle at which light is easily incident.
  • the optical property measuring apparatus 1 includes an integrating sphere 2 having an integrating sphere inner surface 3a that diffusely reflects incident light, and a light guide that guides the integrating sphere 2 by passing and reflecting the light emitted from the measuring object 101.
  • the light guide is formed so that the surfaces other than the integrating sphere 2 side and the measurement object 101 side reflect light regularly. Since it has such a structure, it becomes possible to provide the optical characteristic measuring apparatus which can obtain a more exact measured value.
  • the light guide section has a rotating body shape with a straight line passing through the measurement object 101 as a rotation center, and the light guide section is formed such that the cross-sectional area of the rotation body shape is larger on the integrating sphere 2 side than the measurement object 101 side.
  • the light guide section has a rotating body shape with a straight line passing through the measurement object 101 as a rotation center, and the light guide section is formed such that the cross-sectional area of the rotation body shape is larger on the integrating sphere 2 side than the measurement object 101 side.
  • the light guide has a truncated cone shape. Since it has such a shape, it is also possible to reduce the light incident on the integrating sphere main body 3 from passing through the light guide and returning to the measuring object 101 side.
  • the light guide is a hollow space. Since it has such a shape, it is also possible to reduce the light incident on the integrating sphere main body 3 from passing through the light guide and returning to the measuring object 101 side.
  • the integrating sphere 2 includes a first through hole 31c into which the light emitted from the measurement object 101 is incident, and a second through hole that guides the light to the light receiving unit 7 that receives a part of the light incident on the integrating sphere 2. 33c, and a wavelength measurement unit 9 for measuring the wavelength of light in addition to the light receiving unit 7 is disposed in the second through hole 33c.
  • a wavelength measurement unit 9 for measuring the wavelength of light in addition to the light receiving unit 7 is disposed in the second through hole 33c.
  • the light guide has a rotating body shape with a straight line passing through the measurement object 101 and the integrating sphere 2 as the center of rotation. Since it has such a configuration, it is possible to provide an optical characteristic measurement device that can obtain more accurate measurement values.
  • the second through hole 33c has a cylindrical shape
  • the wavelength measuring unit 9 has an incident surface 9a on which light to be measured is incident, and the incident surface 9a is from a side surface portion of the cylindrical second through hole 33c. It arrange
  • the normal direction of the incident surface 9a and the central axis of the second through hole 33c are formed to have a predetermined angle. Since it has such a configuration, it is possible to directly measure the wavelength of light incident on the light receiving unit 7 with a more appropriate configuration.
  • the light guide in the present invention may be any one as long as light is guided through the hollow space formed by the light guide component 5.
  • An example of the measurement object in the present invention is an LED.
  • the measurement object may be anything as long as it emits (reflects) light.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

La présente invention concerne un instrument de mesure d'une caractéristique optique, l'instrument étant capable d'obtenir des valeurs de mesure plus précises. L'instrument de mesure d'une caractéristique optique (1) comprend une sphère d'intégration (2) ayant une surface interne (3a) de sphère d'intégration qui réfléchit par diffusion une lumière incidente et un guide de lumière qui fait passer et réfléchit la lumière émise par un objet testé (101) et qui guide la lumière vers la sphère d'intégration, les surfaces de l'unité de guidage de lumière différentes des surfaces du côté de la sphère intégration et du côté de l'objet testé (101) étant formées de façon à permettre une réflexion spéculaire de la lumière.
PCT/JP2013/060245 2013-04-03 2013-04-03 Instrument de mesure d'une caractéristique optique WO2014162547A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201380075271.7A CN105074399B (zh) 2013-04-03 2013-04-03 光特性测定装置
JP2015509798A JP6199374B2 (ja) 2013-04-03 2013-04-03 光特性測定装置
PCT/JP2013/060245 WO2014162547A1 (fr) 2013-04-03 2013-04-03 Instrument de mesure d'une caractéristique optique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2013/060245 WO2014162547A1 (fr) 2013-04-03 2013-04-03 Instrument de mesure d'une caractéristique optique

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WO2014162547A1 true WO2014162547A1 (fr) 2014-10-09

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CN (1) CN105074399B (fr)
WO (1) WO2014162547A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105910800A (zh) * 2016-06-17 2016-08-31 宜昌劲森光电科技股份有限公司 量子管用集测试、印码、分选一体的设备
CN106370399A (zh) * 2016-10-14 2017-02-01 淮阴工学院 激光通过旋转检测球能量损耗测试仪
JP2018128550A (ja) * 2017-02-08 2018-08-16 株式会社オプトコム 積分球型減光器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62278416A (ja) * 1986-05-28 1987-12-03 Kansai Paint Co Ltd 積分球型測光装置
JP2005127970A (ja) * 2003-10-27 2005-05-19 Unitec:Kk 広拡散光源光測定装置の光学系および広拡散光源光測定装置ならびにその光測定方法
JP2007198983A (ja) * 2006-01-27 2007-08-09 Hamamatsu Photonics Kk 積分球用アダプタ及びこれを備える光検出装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6061140A (en) * 1999-05-27 2000-05-09 X-Rite, Incorporated Spectrophotometer with selectable measurement area
CN101881655A (zh) * 2009-05-06 2010-11-10 晶元光电股份有限公司 发光二极管量测装置
CN101614589B (zh) * 2009-07-24 2010-12-01 深圳市易兴光电科技有限公司 色差仪光学系统
CN102607696B (zh) * 2012-04-01 2016-01-20 深圳市矽电半导体设备有限公司 一种用于led测试机的积分球

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62278416A (ja) * 1986-05-28 1987-12-03 Kansai Paint Co Ltd 積分球型測光装置
JP2005127970A (ja) * 2003-10-27 2005-05-19 Unitec:Kk 広拡散光源光測定装置の光学系および広拡散光源光測定装置ならびにその光測定方法
JP2007198983A (ja) * 2006-01-27 2007-08-09 Hamamatsu Photonics Kk 積分球用アダプタ及びこれを備える光検出装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105910800A (zh) * 2016-06-17 2016-08-31 宜昌劲森光电科技股份有限公司 量子管用集测试、印码、分选一体的设备
CN106370399A (zh) * 2016-10-14 2017-02-01 淮阴工学院 激光通过旋转检测球能量损耗测试仪
JP2018128550A (ja) * 2017-02-08 2018-08-16 株式会社オプトコム 積分球型減光器

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CN105074399B (zh) 2017-12-08
JPWO2014162547A1 (ja) 2017-02-16
JP6199374B2 (ja) 2017-09-20
CN105074399A (zh) 2015-11-18

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