WO2014153999A1 - Package substrate unit and preparation method therefor, and substrate assembly - Google Patents

Package substrate unit and preparation method therefor, and substrate assembly Download PDF

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Publication number
WO2014153999A1
WO2014153999A1 PCT/CN2013/090740 CN2013090740W WO2014153999A1 WO 2014153999 A1 WO2014153999 A1 WO 2014153999A1 CN 2013090740 W CN2013090740 W CN 2013090740W WO 2014153999 A1 WO2014153999 A1 WO 2014153999A1
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WO
WIPO (PCT)
Prior art keywords
substrate unit
shielding
copper foil
layer
package substrate
Prior art date
Application number
PCT/CN2013/090740
Other languages
French (fr)
Chinese (zh)
Inventor
徐艺林
高成志
郑仰存
谷新
黄良松
Original Assignee
深南电路有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 深南电路有限公司 filed Critical 深南电路有限公司
Publication of WO2014153999A1 publication Critical patent/WO2014153999A1/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/0026Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H05K3/0035Etching of the substrate by chemical or physical means by laser ablation of organic insulating material of blind holes, i.e. having a metal layer at the bottom
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0216Reduction of cross-talk, noise or electromagnetic interference
    • H05K1/0218Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/552Protection against radiation, e.g. light or electromagnetic waves
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/185Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
    • H05K1/186Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit manufactured by mounting on or connecting to patterned circuits before or during embedding
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09009Substrate related
    • H05K2201/09063Holes or slots in insulating substrate not used for electrical connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15Position of the PCB during processing
    • H05K2203/1572Processing both sides of a PCB by the same process; Providing a similar arrangement of components on both sides; Making interlayer connections from two sides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4614Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination

Definitions

  • the present invention relates to the field of circuit board processing technology, and in particular to a package substrate unit, a manufacturing method thereof and a substrate assembly.
  • the conventional buried circuit board is usually formed by slotting a circuit board, embedding an electronic component such as a chip or the like in the opened slot, and fixing it.
  • the electronic components buried in this type of circuit board are subject to external electromagnetic interference and cannot work optimally.
  • a shield is added to the circuit board to avoid electromagnetic interference.
  • the shield increases the thickness of the board and reduces the versatility of the product, which is not conducive to miniaturization, and the shield is not reliable enough, and there is a risk of failure such as displacement or shedding. Summary of the invention
  • Embodiments of the present invention provide a package substrate unit, a manufacturing method thereof, and a substrate assembly to solve the defects caused by electromagnetic shielding of a circuit board by using a shield cover in the prior art.
  • a first aspect of the present invention provides a method of fabricating a package substrate unit, comprising: fabricating a multi-layer substrate on which one or more package substrate units are planned; processing a shield trench at a periphery of each package substrate unit,
  • the shielding slot includes a first shielding slot and a second shielding slot respectively processed from two sides of the multi-layer substrate, and the bottoms of the first shielding slot and the second shielding slot respectively reach the inner layer of the multi-layer substrate Two sides of the copper foil; metallizing the sidewall of the shielding groove; removing the outer copper foil of the central portion of the package substrate unit; processing the central portion for removing the outer copper foil for fixing the electronic component Hold the slot.
  • a second aspect of the present invention provides a package substrate unit, including: a central portion of the package substrate unit is provided with an inner layer copper foil and an outer layer for fixing the electronic component and the electronic component and the package substrate unit a shielding groove of the copper foil insulation, a shielding groove is formed in the periphery of the package substrate unit, and the shielding groove includes a first shielding groove and a second shielding groove respectively located on two sides of the multilayer substrate and corresponding to the position a shielding groove and a bottom of the second shielding groove respectively reach the inner layer copper of the multilayer substrate On both sides of the foil, a metallization layer for electromagnetically shielding the electronic component is processed on the sidewall of the shielding groove.
  • a second aspect of the present invention provides a substrate assembly, comprising: a package substrate unit as described above, an electronic component buried in a receiving groove formed by the package substrate unit, and respectively pressed on both sides of the package substrate unit
  • the upper and lower substrates are electrically connected to the circuit patterns on the upper substrate or the lower substrate.
  • the shielding groove is processed on the periphery of the package substrate unit, the sidewall of the shielding groove is metallized, and the electronic component is buried in the central region of the package substrate, and the outer copper foil on the surface of the package substrate unit and the side of the shielding groove are utilized.
  • the wall can reliably electromagnetically shield the electronic components without adding a shielding cover, which does not increase the thickness of the packaging substrate, does not reduce the versatility of the product, and has a reliable structure and reduces the structure. The risk of failure and the cost of production are also lower.
  • FIG. 1 is a flow chart of a method for fabricating a package substrate according to an embodiment of the present invention
  • FIG. 2 is a schematic view of an inner core plate of a processed inner layer pattern
  • Figure 3 is a cross-sectional view of the inner core sheet of the processed inner layer pattern
  • Figure 4 is a schematic view of a manufactured multilayer substrate
  • Figure 5 is a schematic view of a package substrate unit having processed through holes
  • FIG. 6 is a schematic view of a package substrate unit in which a shielded groove has been processed
  • Figure 7 is a cross-sectional view of a package substrate unit in which a shielded groove has been processed
  • Figure 8 is a cross-sectional view of the package substrate unit after the shield trench is metallized
  • Figure 9 is a cross-sectional view of a package substrate unit in which a dry film is provided.
  • Figure 10 is a cross-sectional view of a package substrate unit that has been etched
  • Figure 11 is a cross-sectional view of the package substrate unit in which the receiving groove is processed
  • Figure 12 is a schematic view of a separate package substrate unit
  • Figure 13 is a schematic illustration of a substrate assembly including a package substrate unit.
  • Embodiment 1 provides a method for fabricating a package substrate, which can solve the defects of the existing electromagnetic shielding technology for the circuit board.
  • Embodiments of the present invention also provide corresponding package substrates. The details are described below separately.
  • an embodiment of the present invention provides a method for fabricating a package substrate unit, including:
  • a multilayer substrate is fabricated, and one or more package substrate units are planned on the multilayer substrate.
  • the package substrate unit is designed in a multi-layer structure, and therefore, the processing of the package substrate unit starts from making a large multilayer substrate.
  • a plurality of regularly arranged package substrate units are arranged on the larger multi-layer substrate, and the arrays are arranged in an array, horizontally and vertically.
  • the process of fabricating the multi-layer substrate comprises: processing the inner layer pattern on the inner layer copper foil 201 of the inner layer core board 200 as shown in FIGS. 2 and 3, the inner layer pattern may include a box-shaped line corresponding to the subsequent The shielding groove to be processed; as shown in FIG. 4, the outer layer 300 is pressed against the surface of the inner core plate, and the semi-cured layer 301 and the outer copper foil 302 are laminated on both sides.
  • the inner core plate 200 is exemplified by a single-sided copper clad plate. In practical applications, a double-sided copper clad plate can also be used.
  • the line width of the above-mentioned square-shaped line corresponding to the shield groove is preferably 150 ⁇ m larger than the width of the shield groove to be processed later.
  • the through hole 401 is processed at a top corner portion of each of the package substrate units 400 indicated by a broken line frame.
  • the machined through holes 401 can be used later as via holes, alignment holes or tool holes between the layers.
  • the method of machining the through hole 401 may be a mechanical drilling process.
  • the shielding slot is processed at a periphery of each of the package substrate units, and the shielding slot includes a first shielding slot and a second shielding slot respectively processed from two sides of the multi-layer substrate and corresponding to the position, the first shielding slot and The bottoms of the second shielding grooves respectively reach both sides of the inner layer copper foil of the multilayer substrate.
  • the shield groove 402 is processed along the boundary indicated by the broken line frame. As shown in FIG. 7, the shielding groove 402 is separately processed from both sides of the package substrate unit during processing, and the first shielding groove 4021 is processed from the first surface, and the processing depth is to reach the inner layer copper foil 201.
  • the first face processed from the second face is referred to as a second shield groove 4022 which is machined to a second face that reaches the inner layer copper foil 201.
  • each of the package substrate units 400 has four shielding slots 402, and it should be noted that the four screens are Any one of the masks is composed of a first shielding groove and a second shielding groove respectively located on both sides of the package substrate unit.
  • the step of processing the shielding groove at the periphery of each of the package substrate units may include: first, opening a window on the outer copper foil 302 of the shielding groove region to be processed around each of the package substrate units 400; The insulating medium under the opening window area is removed, and the inner layer copper foil 201 is exposed to form the shielding groove 402.
  • the etching process can be used to open the window, and the C02 laser drilling machine can be used for laser ablation to remove the insulating dielectric layer.
  • the respective package substrate units 202 are connected at the top corner and the like, and can be further processed as a whole to improve the processing efficiency.
  • the layout method of planning a plurality of package substrate units on the substrate, and the arrangement of the respective units can improve the utilization rate of the substrate and reduce the production cost.
  • the sidewall of the shielding groove is metallized by a metallization process. If the through hole is previously machined, the through hole is also metallized at the same time.
  • a cross-sectional view of a metallized package substrate unit is shown in Fig. 8. It can be seen that a metallization layer 403 is attached to the sidewall of the shield trench 402. The thickness of the metallization layer is preferably 15 ⁇ m or more.
  • the metallized sidewalls are then used as a shield to provide metal shielding for the embedded electronic components within the package substrate unit.
  • the metal layer formed on the side wall is plated with the outer copper foil on the surface of the substrate and the inner inner copper foil. The reliability is very good, and no detachment or displacement occurs during use.
  • the shielding trench 402 may be filled by electroplating, or the shielding trench 402 may be filled with resin or ink.
  • a pattern transfer process is used to open a window in the central portion of the package substrate unit, that is, to remove the outer layer copper foil in the central portion.
  • the steps of opening the window on the outer copper foil include:
  • a dry film 405 is disposed on the package substrate unit 400 except for the central portion, so that the dry film 405 covers the shielding groove 402; and then, a chemical etching process is employed.
  • the outer layer copper foil 302 of the central region is removed.
  • the dry film is removed.
  • the insulating core layer 208 in the central region has been exposed.
  • the method further includes: plating the package substrate unit 400 with gold, and plating a layer of nickel gold or nickel palladium on the outer copper foil 302 that is not removed around the central region. Protects exposed copper and provides good solderability.
  • the receiving groove 406 can be processed in the central region by a process such as mechanical milling or laser cutting.
  • the receiving groove 406 penetrates the multilayer substrate up and down, and the sidewall thereof is an insulating material, which can be used for subsequent embedding of electronic components.
  • it may be slightly smaller than the size of the central region, that is, slightly smaller than the size of the window opening region on the outer copper foil 302.
  • the processing receiving groove 406 is formed such that the edge of the receiving groove 406 has a certain size range, for example, no copper foil in the range of 0.5 mm, thereby achieving good insulation performance between the chip and the package substrate unit.
  • the following steps may be further included: cutting along a distance from the outer edge of the shielding slot 402 to cut the multilayer substrate into a plurality of independent package substrate units 400.
  • the electronic component can be fixed in the receiving groove. Since the electronic component and the metallized sidewall are separated by the insulating substrate, the insulating property is very reliable, and the electronic component and the package substrate unit can be ensured. Each copper foil layer is completely insulated.
  • the upper and lower surfaces of the package substrate unit 400 in which the electronic component 501 is embedded may be respectively pressed onto the upper and lower substrates 502, and the upper and lower substrates 502 are respectively processed with circuit patterns, and the electronic components are respectively processed.
  • the 501 can be electrically connected to the circuit pattern on the upper or lower substrate to constitute a practical substrate assembly.
  • the embodiment of the present invention provides a method for fabricating a package substrate, which uses a peripheral processing shield groove of the package substrate unit to metallize the sidewall of the shield trench, embeds an electronic component in a central region of the package substrate, and utilizes the package substrate.
  • the outer layer of the surface of the copper foil on the surface of the unit and the side wall of the shielding groove serve as a technical solution for the metal shielding layer, and the single tube reliably realizes electromagnetic shielding of the electronic component without adding an additional shielding cover, which does not increase the thickness of the packaging substrate, and does not Reduce product versatility, and reliable structure, reducing the risk of failure.
  • the method of the embodiment of the present invention only needs to use common equipment such as an image transfer device and an electroplating device, and does not need to add special equipment, and has good versatility.
  • Embodiment 2 Embodiment 2
  • an embodiment of the present invention provides a package substrate unit 400.
  • the central portion of the package substrate unit 400 is provided with an inner layer for fixing the electronic component and the inner layer of the package substrate unit 400.
  • a shielding groove 406 is formed on the periphery of the package substrate unit 400, and the shielding groove includes a first shielding groove and a corresponding position on both sides of the multilayer substrate.
  • a shielding slot, the bottoms of the first shielding slot and the second shielding slot respectively reach two sides of the inner layer copper foil of the multilayer substrate, and the sidewall of the shielding slot is processed for electromagnetically conducting the electronic component Shielded metallization layer 403.
  • the top corner portion of the package substrate unit 400 may be processed with a metalized via 401.
  • the outer copper foil of the sealing substrate unit 400 may be plated with a layer of nickel gold or nickel palladium gold.
  • an embodiment of the present invention further provides a substrate assembly, including: the package substrate unit 400 as described above, the electronic component 501 embedded in the receiving groove 406 of the package substrate unit 400, and the respective voltages
  • the upper and lower substrates 502 are bonded to both sides of the package substrate unit 400, and the electronic component 501 is electrically connected to a circuit pattern on the upper substrate or the lower substrate.
  • the embodiment of the present invention provides a package substrate unit and a substrate assembly including the package substrate unit, wherein sidewalls of the shielding groove around the package substrate unit are metallized, and electrons can be buried in a central region of the package substrate
  • the component is electromagnetically shielded.
  • the structure of the product is reliable, does not increase the thickness of the package substrate, does not reduce the versatility of the product, and has a low risk of failure.
  • the package substrate unit of the embodiment of the present invention only needs to use common equipment such as an image transfer device and an electroplating device during processing, and does not need to add special equipment, and has good versatility.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

A method for preparing a package substrate unit comprises: preparing a multi-layer substrate, and designing more than one package substrate unit on the multi-layer substrate; treating a shielding groove on the periphery of each package substrate unit; metalizing a sidewall of the shielding groove; removing an outer copper foil of a central region of the package substrate unit; and on the central region with the outer copper foil removed, treating an accommodating groove used for fixing an electronic element. The embodiments of the present invention also provide a corresponding package substrate unit and a substrate assembly. In the technical solutions of the present invention, a shielding groove is treated on the periphery of a package substrate unit and a sidewall of the shielding groove is metalized as a metal shielding layer; in this manner, electromagnetic shielding is simply and reliably implemented on an electronic device and an additional shielding case is not required, which does not increase the thickness of a package substrate and does not decrease the universality of a product, the structure is reliable, the incapacitation risk is lowered, and the cost is low.

Description

一种封装基板单元及其制作方法和基板组件  Package substrate unit, manufacturing method thereof and substrate assembly
本申请要求于 2013 年 3 月 26 日提交中国专利局、 申请号为 201310100854.2、 发明名称为 "一种封装基板单元及其制作方法和基板组件" 的中国专利申请的优先权, 其全部内容通过引用结合在本申请中。  The present application claims priority to Chinese Patent Application No. 201310100854.2, entitled "A Package Substrate Unit and Its Manufacturing Method and Substrate Assembly", filed on March 26, 2013, the entire contents of which are hereby incorporated by reference. Combined in this application.
技术领域 Technical field
本发明涉及电路板加工技术领域,具体涉及一种封装基板单元及其制作方 法和基板组件。  The present invention relates to the field of circuit board processing technology, and in particular to a package substrate unit, a manufacturing method thereof and a substrate assembly.
背景技术 Background technique
现有的埋入式电路板通常采用在电路板上开槽,将电子元件例如芯片等嵌 入所开的槽中并固定等方法制成。该种电路板中埋入的电子元件会受到外界电 磁干扰, 不能工作在最佳状态。现有技术中一般采用在电路板上增加一个屏蔽 罩的方式来避免电磁干扰。 但是, 屏蔽罩会增加电路板的厚度, 降低产品的通 用性, 不利于向小型化发展, 且屏蔽罩不够可靠, 有移位或脱落等失效风险。 发明内容  The conventional buried circuit board is usually formed by slotting a circuit board, embedding an electronic component such as a chip or the like in the opened slot, and fixing it. The electronic components buried in this type of circuit board are subject to external electromagnetic interference and cannot work optimally. In the prior art, a shield is added to the circuit board to avoid electromagnetic interference. However, the shield increases the thickness of the board and reduces the versatility of the product, which is not conducive to miniaturization, and the shield is not reliable enough, and there is a risk of failure such as displacement or shedding. Summary of the invention
本发明实施例提供一种封装基板单元及其制作方法和基板组件,以解决现 有技术中采用屏蔽罩对电路板进行电磁屏蔽带来的缺陷。  Embodiments of the present invention provide a package substrate unit, a manufacturing method thereof, and a substrate assembly to solve the defects caused by electromagnetic shielding of a circuit board by using a shield cover in the prior art.
本发明第一方面提供一种封装基板单元的制作方法,包括:制作多层基板, 在所述多层基板上规划一个以上封装基板单元;在每个封装基板单元的周边加 工屏蔽槽,所述屏蔽槽包括分別从所述多层基板的两面加工且位置对应的第一 屏蔽槽和第二屏蔽槽,所述第一屏蔽槽和第二屏蔽槽的底部分別抵达所述多层 基板的内层铜箔的两面; 将所述屏蔽槽的侧壁金属化; 将所述封装基板单元的 中央区域的外层铜箔去除;在去除外层铜箔的所述中央区域加工用于固定电子 元件的容纳槽。  A first aspect of the present invention provides a method of fabricating a package substrate unit, comprising: fabricating a multi-layer substrate on which one or more package substrate units are planned; processing a shield trench at a periphery of each package substrate unit, The shielding slot includes a first shielding slot and a second shielding slot respectively processed from two sides of the multi-layer substrate, and the bottoms of the first shielding slot and the second shielding slot respectively reach the inner layer of the multi-layer substrate Two sides of the copper foil; metallizing the sidewall of the shielding groove; removing the outer copper foil of the central portion of the package substrate unit; processing the central portion for removing the outer copper foil for fixing the electronic component Hold the slot.
本发明第二方面提供一种封装基板单元, 包括: 所述封装基板单元的中央 区域开设有用于固定电子元件,并使所述电子元件与所述封装基板单元上的内 层铜箔及外层铜箔绝缘的容纳槽, 所述封装基板单元的周边加工有屏蔽槽, 所 述屏蔽槽包括分別位于所述多层基板的两面且位置对应的第一屏蔽槽和第二 屏蔽槽,所述第一屏蔽槽和第二屏蔽槽的底部分別抵达所述多层基板的内层铜 箔的两面,所述屏蔽槽的侧壁上加工有用于对所述电子元件进行电磁屏蔽的金 属化层。 A second aspect of the present invention provides a package substrate unit, including: a central portion of the package substrate unit is provided with an inner layer copper foil and an outer layer for fixing the electronic component and the electronic component and the package substrate unit a shielding groove of the copper foil insulation, a shielding groove is formed in the periphery of the package substrate unit, and the shielding groove includes a first shielding groove and a second shielding groove respectively located on two sides of the multilayer substrate and corresponding to the position a shielding groove and a bottom of the second shielding groove respectively reach the inner layer copper of the multilayer substrate On both sides of the foil, a metallization layer for electromagnetically shielding the electronic component is processed on the sidewall of the shielding groove.
本发明第二方面提供一种基板组件, 包括: 如上文所述的封装基板单元, 埋入所述封装基板单元开设的容纳槽中的电子元件,以及分別压合在所述封装 基板单元两面的上、 下基板, 所述电子元件与所述上基板或下基板上的电路图 形电连接。  A second aspect of the present invention provides a substrate assembly, comprising: a package substrate unit as described above, an electronic component buried in a receiving groove formed by the package substrate unit, and respectively pressed on both sides of the package substrate unit The upper and lower substrates are electrically connected to the circuit patterns on the upper substrate or the lower substrate.
本发明实施例采用在封装基板单元的周边加工屏蔽槽,将屏蔽槽的侧壁金 属化,在封装基板的中央区域埋入电子元件, 利用封装基板单元表面的外层铜 箔和屏蔽槽的侧壁作为金属屏蔽层的技术方案,筒单可靠的实现了对电子元件 进行电磁屏蔽, 而不必另外增加屏蔽罩, 不会增加封装基板厚度, 不会降低产 品的通用性, 且结构可靠, 降低了失效风险, 同时制作成本也更低廉。  In the embodiment of the invention, the shielding groove is processed on the periphery of the package substrate unit, the sidewall of the shielding groove is metallized, and the electronic component is buried in the central region of the package substrate, and the outer copper foil on the surface of the package substrate unit and the side of the shielding groove are utilized. As a technical solution of the metal shielding layer, the wall can reliably electromagnetically shield the electronic components without adding a shielding cover, which does not increase the thickness of the packaging substrate, does not reduce the versatility of the product, and has a reliable structure and reduces the structure. The risk of failure and the cost of production are also lower.
附图说明 DRAWINGS
图 1是本发明实施例提供的封装基板的制作方法的流程图;  1 is a flow chart of a method for fabricating a package substrate according to an embodiment of the present invention;
图 2是已加工内层图形的内层芯板的示意图;  2 is a schematic view of an inner core plate of a processed inner layer pattern;
图 3是已加工内层图形的内层芯板的截面图;  Figure 3 is a cross-sectional view of the inner core sheet of the processed inner layer pattern;
图 4是制成的多层基板的示意图;  Figure 4 is a schematic view of a manufactured multilayer substrate;
图 5是已加工通孔的封装基板单元的示意图;  Figure 5 is a schematic view of a package substrate unit having processed through holes;
图 6是已加工屏蔽槽的封装基板单元的示意图;  6 is a schematic view of a package substrate unit in which a shielded groove has been processed;
图 7是已加工屏蔽槽的封装基板单元的截面图;  Figure 7 is a cross-sectional view of a package substrate unit in which a shielded groove has been processed;
图 8是屏蔽槽金属化后的封装基板单元的截面图;  Figure 8 is a cross-sectional view of the package substrate unit after the shield trench is metallized;
图 9是设置了干膜的封装基板单元的截面图;  Figure 9 is a cross-sectional view of a package substrate unit in which a dry film is provided;
图 10是已经过蚀刻的封装基板单元的截面图;  Figure 10 is a cross-sectional view of a package substrate unit that has been etched;
图 11是已加工容纳槽的封装基板单元的截面图;  Figure 11 is a cross-sectional view of the package substrate unit in which the receiving groove is processed;
图 12是独立的封装基板单元的示意图;  Figure 12 is a schematic view of a separate package substrate unit;
图 13是包括封装基板单元的基板组件的示意图。  Figure 13 is a schematic illustration of a substrate assembly including a package substrate unit.
具体实施方式 detailed description
本发明实施例提供本发明实施例提供一种封装基板的制作方法,可以解决 现有的对电路板电磁屏蔽技术的缺陷。 本发明实施例还提供相应的封装基板。 以下分別进行详细说明。 实施例一、 The embodiments of the present invention provide a method for fabricating a package substrate, which can solve the defects of the existing electromagnetic shielding technology for the circuit board. Embodiments of the present invention also provide corresponding package substrates. The details are described below separately. Embodiment 1
请参考图 1 , 本发明实施例提供一种封装基板单元的制作方法, 包括: Referring to FIG. 1 , an embodiment of the present invention provides a method for fabricating a package substrate unit, including:
101、 制作多层基板, 在所述多层基板上规划一个以上封装基板单元。 本实施例中, 所述封装基板单元设计为多层结构, 因此, 对所述封装基板 单元的加工从制作一张较大的多层基板开始。该较大的多层基板上规划出若干 个规则排列的封装基板单元, 其排列方式呈阵列式, 横成行, 竖成列。 101. A multilayer substrate is fabricated, and one or more package substrate units are planned on the multilayer substrate. In this embodiment, the package substrate unit is designed in a multi-layer structure, and therefore, the processing of the package substrate unit starts from making a large multilayer substrate. A plurality of regularly arranged package substrate units are arranged on the larger multi-layer substrate, and the arrays are arranged in an array, horizontally and vertically.
制作多层基板的过程包括: 如图 2和图 3所示, 在内层芯板 200的内层铜箔 201上加工内层图形, 所述内层图形可以包括一方框形线路, 对应于后续待加 工的屏蔽槽; 如图 4所示, 在所述内层芯板的表面压合外层 300, 包括在两面都 压合半固化层 301和外层铜箔 302。  The process of fabricating the multi-layer substrate comprises: processing the inner layer pattern on the inner layer copper foil 201 of the inner layer core board 200 as shown in FIGS. 2 and 3, the inner layer pattern may include a box-shaped line corresponding to the subsequent The shielding groove to be processed; as shown in FIG. 4, the outer layer 300 is pressed against the surface of the inner core plate, and the semi-cured layer 301 and the outer copper foil 302 are laminated on both sides.
图 2中, 内层芯板 200以单面覆铜板为例, 实际应用中, 也可以采用双面覆 铜板。上述对应于屏蔽槽的方框形线路的线路宽度以比后续将加工的屏蔽槽的 宽度大 150 μ ιη为宜。  In Fig. 2, the inner core plate 200 is exemplified by a single-sided copper clad plate. In practical applications, a double-sided copper clad plate can also be used. The line width of the above-mentioned square-shaped line corresponding to the shield groove is preferably 150 μm larger than the width of the shield groove to be processed later.
在本步骤之后, 后续加工屏蔽槽步骤之前, 还可以包括如下步骤: 如图 5 所示,在由虚线框表示的每个封装基板单元 400的顶角部位加工通孔 401。加工 的通孔 401可以在后续作为层间的导通孔、对位孔或工具孔使用。加工通孔 401 的方法可以是机械钻工艺。  After the step, before the step of processing the shielding trench, the following steps may be further included: As shown in FIG. 5, the through hole 401 is processed at a top corner portion of each of the package substrate units 400 indicated by a broken line frame. The machined through holes 401 can be used later as via holes, alignment holes or tool holes between the layers. The method of machining the through hole 401 may be a mechanical drilling process.
102、 在每个封装基板单元的周边加工屏蔽槽, 所述屏蔽槽包括分別从所 述多层基板的两面加工且位置对应的第一屏蔽槽和第二屏蔽槽,所述第一屏蔽 槽和第二屏蔽槽的底部分別抵达所述多层基板的内层铜箔的两面。  102. The shielding slot is processed at a periphery of each of the package substrate units, and the shielding slot includes a first shielding slot and a second shielding slot respectively processed from two sides of the multi-layer substrate and corresponding to the position, the first shielding slot and The bottoms of the second shielding grooves respectively reach both sides of the inner layer copper foil of the multilayer substrate.
本步骤中, 如图 6所示, 在封装基板单元 400的周边, 沿着所述虚线方框表 示的边界, 加工屏蔽槽 402。 如图 7所示, 所述的屏蔽槽 402在加工时从封装基 板单元的两面分別进行,从第一面加工的称为第一屏蔽槽 4021 , 其加工深度为 抵达所述内层铜箔 201的第一面; 从第二面加工的称为第二屏蔽槽 4022, 其加 工深度为抵达所述内层铜箔 201的第二面。  In this step, as shown in Fig. 6, at the periphery of the package substrate unit 400, the shield groove 402 is processed along the boundary indicated by the broken line frame. As shown in FIG. 7, the shielding groove 402 is separately processed from both sides of the package substrate unit during processing, and the first shielding groove 4021 is processed from the first surface, and the processing depth is to reach the inner layer copper foil 201. The first face processed from the second face is referred to as a second shield groove 4022 which is machined to a second face that reaches the inner layer copper foil 201.
具体应用中, 可以在封装基板单元 400的四周, 分別加工四个屏蔽槽 402。 从而, 每个封装基板单元 400均拥有四个屏蔽槽 402, 需要注意, 所述的四个屏 蔽槽中的任一个,都由分別位于封装基板单元两面的第一屏蔽槽和第二屏蔽槽 构成。 In a specific application, four shielding grooves 402 may be respectively processed around the package substrate unit 400. Therefore, each of the package substrate units 400 has four shielding slots 402, and it should be noted that the four screens are Any one of the masks is composed of a first shielding groove and a second shielding groove respectively located on both sides of the package substrate unit.
本实施例中, 在每个封装基板单元的周边加工屏蔽槽的步骤具体可以包 括: 首先,在每个封装基板单元 400周边待加工屏蔽槽区域的外层铜箔 302上开 窗; 然后将所述开窗区域下方的绝缘介质去除, 暴露出内层铜箔 201 , 形成屏 蔽槽 402。 其中, 可以采用蚀刻工艺开窗, 可以采用 C02激光钻孔机进行激光 烧蚀将绝缘介质层去除。  In this embodiment, the step of processing the shielding groove at the periphery of each of the package substrate units may include: first, opening a window on the outer copper foil 302 of the shielding groove region to be processed around each of the package substrate units 400; The insulating medium under the opening window area is removed, and the inner layer copper foil 201 is exposed to form the shielding groove 402. Among them, the etching process can be used to open the window, and the C02 laser drilling machine can be used for laser ablation to remove the insulating dielectric layer.
开槽完毕后, 各个封装基板单元 202在顶角等部位连接, 仍然可以作为一 个整体进行后续加工,以提高加工效率。该种在基板上规划多个封装基板单元, 各个单元紧邻的布局方法, 可以提高基板的板材利用率, 降低生产成本。  After the grooving is completed, the respective package substrate units 202 are connected at the top corner and the like, and can be further processed as a whole to improve the processing efficiency. The layout method of planning a plurality of package substrate units on the substrate, and the arrangement of the respective units can improve the utilization rate of the substrate and reduce the production cost.
103、 将所述屏蔽槽的侧壁金属化。  103. Metallize the sidewall of the shielding groove.
本步骤中采用金属化工艺将所述屏蔽槽的侧壁金属化。如果之前加工了通 孔, 则同时将通孔也金属化。金属化后的一个封装基板单元的截面图如 8所示, 可以看出,屏蔽槽 402的侧壁上附着了一金属化层 403。该金属化层的厚度优选 为 15 μ ιη以上。 该被金属化的侧壁后续将作为屏蔽层, 为封装基板单元内埋入 的电子元件提供金属屏蔽作用。侧壁形成的金属层与基板表面的外层铜箔以及 内部的内层铜箔电镀相连, 可靠性非常好,使用过程中完全不会发生脱离或者 移位现象。  In this step, the sidewall of the shielding groove is metallized by a metallization process. If the through hole is previously machined, the through hole is also metallized at the same time. A cross-sectional view of a metallized package substrate unit is shown in Fig. 8. It can be seen that a metallization layer 403 is attached to the sidewall of the shield trench 402. The thickness of the metallization layer is preferably 15 μm or more. The metallized sidewalls are then used as a shield to provide metal shielding for the embedded electronic components within the package substrate unit. The metal layer formed on the side wall is plated with the outer copper foil on the surface of the substrate and the inner inner copper foil. The reliability is very good, and no detachment or displacement occurs during use.
一种实施方式中,将所述屏蔽槽的侧壁金属化之后还可以包括: 电镀填充 所述屏蔽槽 402, 或者, 采用树脂或油墨填充所述屏蔽槽 402。  In one embodiment, after the sidewall of the shielding trench is metallized, the shielding trench 402 may be filled by electroplating, or the shielding trench 402 may be filled with resin or ink.
104、 将所述封装基板单元的中央区域的外层铜箔去除。  104. Remove the outer layer copper foil in the central region of the package substrate unit.
本步骤中采用图形转移工艺在所述封装基板单元的中央区域开窗, 即,将 中央区域的外层铜箔去除。以便于后续在中央区域加工用于埋入电子元件的容 纳槽。 在外层铜箔上开窗的步骤包括:  In this step, a pattern transfer process is used to open a window in the central portion of the package substrate unit, that is, to remove the outer layer copper foil in the central portion. In order to subsequently process the receiving groove for embedding the electronic component in the central region. The steps of opening the window on the outer copper foil include:
如图 9所示,在所述封装基板单元 400上除所述中央区域以外的其它部分设 置一层干膜 405 , 使所述干膜 405覆盖所述屏蔽槽 402; 然后, 采用化学腐蚀工 艺将所述中央区域的外层铜箔 302去除。 蚀刻完毕后, 去除干膜, 如图 10所示, 中央区域的绝缘芯板层 208已暴露出来。 一种实施方式中, 本步骤之后, 还可以包括: 对所述封装基板单元 400镀 金, 使所述中央区域四周未被去除的外层铜箔 302上镀一层镍金或镍钯金, 以 便保护棵露的铜并提供良好的可焊性。 As shown in FIG. 9, a dry film 405 is disposed on the package substrate unit 400 except for the central portion, so that the dry film 405 covers the shielding groove 402; and then, a chemical etching process is employed. The outer layer copper foil 302 of the central region is removed. After the etching is completed, the dry film is removed. As shown in Fig. 10, the insulating core layer 208 in the central region has been exposed. In an embodiment, after the step, the method further includes: plating the package substrate unit 400 with gold, and plating a layer of nickel gold or nickel palladium on the outer copper foil 302 that is not removed around the central region. Protects exposed copper and provides good solderability.
105、 在去除外层铜箔的中央区域加工用于固定电子元件的容纳槽。  105. Processing a receiving groove for fixing the electronic component in a central region where the outer copper foil is removed.
如图 11所示, 中央区域的外层铜箔 302被去除后, 可以采用机械铣或者激 光切割等工艺在中央区域加工容纳槽 406。该容纳槽 406上下贯穿多层基板, 其 侧壁为绝缘材料, 可用于后续嵌入电子元件。 实际应用中, 为了避免后续嵌入 的电子元件接触中央区域周围的外层铜箔 302造成短路, 可以按照略小于所述 中央区域的尺寸, 也就是略小于外层铜箔 302上开窗区域的尺寸, 加工容纳槽 406, 使所述容纳槽 406边缘一定尺寸范围, 例如 0.5mm范围内没有铜箔, 从而 实现芯片与封装基板单元之间的良好绝缘性能。  As shown in Fig. 11, after the outer copper foil 302 in the central region is removed, the receiving groove 406 can be processed in the central region by a process such as mechanical milling or laser cutting. The receiving groove 406 penetrates the multilayer substrate up and down, and the sidewall thereof is an insulating material, which can be used for subsequent embedding of electronic components. In practical applications, in order to avoid short circuit caused by the subsequent embedded electronic component contacting the outer copper foil 302 around the central region, it may be slightly smaller than the size of the central region, that is, slightly smaller than the size of the window opening region on the outer copper foil 302. The processing receiving groove 406 is formed such that the edge of the receiving groove 406 has a certain size range, for example, no copper foil in the range of 0.5 mm, thereby achieving good insulation performance between the chip and the package substrate unit.
本步骤之后, 还可以包括以下步骤: 沿所述屏蔽槽 402外边缘一定距离进 行切割, 将多层基板切割成为多个独立的封装基板单元 400。 切割后独立的封 装基板单元 400, 如图 12所示。  After the step, the following steps may be further included: cutting along a distance from the outer edge of the shielding slot 402 to cut the multilayer substrate into a plurality of independent package substrate units 400. A separate package substrate unit 400 after cutting, as shown in FIG.
后续, 可以将电子元件固定在所述容纳槽中, 由于电子元件与金属化侧壁 之间是由绝缘基材隔离, 绝缘性能非常可靠, 可以保证所述电子元件与所述封 装基板单元上的各个铜箔层完全绝缘。  Subsequently, the electronic component can be fixed in the receiving groove. Since the electronic component and the metallized sidewall are separated by the insulating substrate, the insulating property is very reliable, and the electronic component and the package substrate unit can be ensured. Each copper foil layer is completely insulated.
如图 13所示, 实际应用中,埋入了电子元件 501的封装基板单元 400的上下 两面可以分別压合上、 下基板 502, 上、 下基板 502上分別加工有电路图形, 所 述电子元件 501可以和所述上基板或下基板上的电路图形电连接, 从而构成可 实际应用的基板组件。  As shown in FIG. 13 , in the actual application, the upper and lower surfaces of the package substrate unit 400 in which the electronic component 501 is embedded may be respectively pressed onto the upper and lower substrates 502, and the upper and lower substrates 502 are respectively processed with circuit patterns, and the electronic components are respectively processed. The 501 can be electrically connected to the circuit pattern on the upper or lower substrate to constitute a practical substrate assembly.
以上, 本发明实施例提供了一种封装基板的制作方法, 采用才封装基板单 元的周边加工屏蔽槽,将屏蔽槽的侧壁金属化,在封装基板的中央区域埋入电 子元件,利用封装基板单元表面的外层铜箔和屏蔽槽的侧壁作为金属屏蔽层的 技术方案, 筒单可靠的实现了对电子元件进行电磁屏蔽, 而不必另外增加屏蔽 罩, 不会增加封装基板厚度, 不会降低产品的通用性, 且结构可靠, 降低了失 效风险。 另外, 本发明实施例方法只需要采用图像转移设备、 电镀设备等常用 设备即可, 无需新增特殊的设备, 通用性好。 实施例二、 In the above, the embodiment of the present invention provides a method for fabricating a package substrate, which uses a peripheral processing shield groove of the package substrate unit to metallize the sidewall of the shield trench, embeds an electronic component in a central region of the package substrate, and utilizes the package substrate. The outer layer of the surface of the copper foil on the surface of the unit and the side wall of the shielding groove serve as a technical solution for the metal shielding layer, and the single tube reliably realizes electromagnetic shielding of the electronic component without adding an additional shielding cover, which does not increase the thickness of the packaging substrate, and does not Reduce product versatility, and reliable structure, reducing the risk of failure. In addition, the method of the embodiment of the present invention only needs to use common equipment such as an image transfer device and an electroplating device, and does not need to add special equipment, and has good versatility. Embodiment 2
请参考图 12, 本发明实施例提供一种封装基板单元 400, 所述封装基板单 元 400的中央区域开设有用于固定电子元件, 并使所述电子元件与所述封装基 板单元 400上的内层铜箔及外层铜箔绝缘的容纳槽 406, 所述封装基板单元 400 的周边加工有屏蔽槽,所述屏蔽槽包括分別位于所述多层基板的两面且位置对 应的第一屏蔽槽和第二屏蔽槽,所述第一屏蔽槽和第二屏蔽槽的底部分別抵达 所述多层基板的内层铜箔的两面,所述屏蔽槽的侧壁上加工有用于对所述电子 元件进行电磁屏蔽的金属化层 403。  Referring to FIG. 12, an embodiment of the present invention provides a package substrate unit 400. The central portion of the package substrate unit 400 is provided with an inner layer for fixing the electronic component and the inner layer of the package substrate unit 400. a shielding groove 406 is formed on the periphery of the package substrate unit 400, and the shielding groove includes a first shielding groove and a corresponding position on both sides of the multilayer substrate. a shielding slot, the bottoms of the first shielding slot and the second shielding slot respectively reach two sides of the inner layer copper foil of the multilayer substrate, and the sidewall of the shielding slot is processed for electromagnetically conducting the electronic component Shielded metallization layer 403.
其它实施方式中, 所述封装基板单元 400的顶角部分可以加工有金属化通 孔 401。 所述封转基板单元 400的外层铜箔上可以镀有一层镍金或镍钯金。  In other embodiments, the top corner portion of the package substrate unit 400 may be processed with a metalized via 401. The outer copper foil of the sealing substrate unit 400 may be plated with a layer of nickel gold or nickel palladium gold.
请参考图 13 , 本发明实施例还提供一种基板组件, 包括: 如上文所述的封 装基板单元 400 , 埋入所述封装基板单元 400开设的容纳槽 406中的电子元件 501 , 以及分別压合在所述封装基板单元 400两面的上、 下基板 502, 所述电子 元件 501与所述上基板或下基板上的电路图形电连接。  Referring to FIG. 13 , an embodiment of the present invention further provides a substrate assembly, including: the package substrate unit 400 as described above, the electronic component 501 embedded in the receiving groove 406 of the package substrate unit 400, and the respective voltages The upper and lower substrates 502 are bonded to both sides of the package substrate unit 400, and the electronic component 501 is electrically connected to a circuit pattern on the upper substrate or the lower substrate.
以上,本发明实施例提供了一种封装基板单元及一种包含该封装基板单元 的基板组件, 所述封装基板单元周边屏蔽槽的侧壁被金属化, 可以对封装基板 中央区域埋入的电子元件进行电磁屏蔽, 该产品结构筒单可靠, 不会增加封装 基板厚度, 不会降低产品的通用性, 失效风险低。 另外, 本发明实施例的封装 基板单元在加工时只需要采用图像转移设备、 电镀设备等常用设备即可, 无需 新增特殊的设备, 通用性好。  In the above, the embodiment of the present invention provides a package substrate unit and a substrate assembly including the package substrate unit, wherein sidewalls of the shielding groove around the package substrate unit are metallized, and electrons can be buried in a central region of the package substrate The component is electromagnetically shielded. The structure of the product is reliable, does not increase the thickness of the package substrate, does not reduce the versatility of the product, and has a low risk of failure. In addition, the package substrate unit of the embodiment of the present invention only needs to use common equipment such as an image transfer device and an electroplating device during processing, and does not need to add special equipment, and has good versatility.
以上对本发明实施例所提供的封装基板及其制作方法进行了详细介绍,但 以上实施例的说明只是用于帮助理解本发明的方法及其核心思想,不应理解为 对本发明的限制。本技术领域的技术人员在本发明揭露的技术范围内, 可轻易 想到的变化或替换, 都应涵盖在本发明的保护范围之内。  The package substrate and the method for fabricating the same are provided in detail in the above description, but the description of the above embodiments is only for helping to understand the method and the core idea of the present invention, and should not be construed as limiting the present invention. Those skilled in the art will be able to devise variations or substitutions that are conceivable within the scope of the present invention.

Claims

权 利 要 求 Rights request
1、 一种封装基板单元的制作方法, 其特征在于, 包括: 1. A method for manufacturing a package substrate unit, characterized by including:
制作多层基板, 在所述多层基板上规划一个以上封装基板单元; 在每个封装基板单元的周边加工屏蔽槽,所述屏蔽槽包括分別从所述多层 基板的两面加工且位置对应的第一屏蔽槽和第二屏蔽槽,所述第一屏蔽槽和第 二屏蔽槽的底部分別抵达所述多层基板的内层铜箔的两面; Make a multi-layer substrate, and plan more than one packaging substrate unit on the multi-layer substrate; process shielding grooves around each packaging substrate unit, and the shielding grooves include corresponding holes processed from both sides of the multi-layer substrate. A first shielding groove and a second shielding groove, the bottoms of which respectively reach both sides of the inner copper foil of the multi-layer substrate;
将所述屏蔽槽的侧壁金属化; Metalizing the side walls of the shielding trench;
将所述封装基板单元的中央区域的外层铜箔去除; Remove the outer copper foil from the central area of the package substrate unit;
在去除外层铜箔的所述中央区域加工用于固定电子元件的容纳槽。 A receiving groove for fixing electronic components is processed in the central area where the outer layer of copper foil is removed.
2、 根据权利要求 1所述的方法, 其特征在于, 所述的制作多层基板包括: 在内层芯板的内层铜箔上加工内层图形; 2. The method according to claim 1, characterized in that the manufacturing of the multi-layer substrate includes: processing an inner layer pattern on the inner copper foil of the inner core board;
在所述内层芯板的表面压合半固化层和外层铜箔。 The semi-cured layer and the outer copper foil are pressed onto the surface of the inner core board.
3、根据权利要求 1所述的方法, 其特征在于, 所述的在每个封装基板单元 的周边加工屏蔽槽之前还包括: 3. The method according to claim 1, characterized in that before processing a shielding groove around each packaging substrate unit, the method further includes:
在每个封装基板单元的顶角部位加工通孔。 Through holes are processed at the top corners of each package substrate unit.
4、根据权利要求 1所述的方法, 其特征在于, 所述的在每个封装基板单元 的周边加工屏蔽槽包括: 4. The method according to claim 1, characterized in that processing a shielding groove around each packaging substrate unit includes:
在每个封装基板单元周边待加工屏蔽槽区域的外层铜箔上开窗; 将所述开窗区域下方的绝缘介质去除, 暴露出内层铜箔, 形成屏蔽槽。 A window is opened on the outer copper foil in the shielding groove area to be processed around each package substrate unit; the insulating medium under the windowed area is removed to expose the inner copper foil to form a shielding groove.
5、根据权利要求 1所述的方法, 其特征在于, 所述的将所述屏蔽槽的侧壁 金属化之后还包括: 5. The method according to claim 1, characterized in that, after metallizing the side walls of the shielding trench, the method further includes:
电镀填充所述屏蔽槽, 或者, 采用树脂或油墨填充所述屏蔽槽。 The shielding groove is filled with electroplating, or the shielding groove is filled with resin or ink.
6、根据权利要求 1所述的方法, 其特征在于, 所述的将所述封装基板单元 的中央区域的外层铜箔去除包括: 6. The method according to claim 1, characterized in that: removing the outer copper foil in the central area of the packaging substrate unit includes:
在所述封装基板单元上除所述中央区域以外的其它部分设置一层干膜,使 所述干膜覆盖所述屏蔽槽; A layer of dry film is provided on other parts of the packaging substrate unit except the central area, so that the dry film covers the shielding groove;
采用化学腐蚀工艺将所述中央区域的外层铜箔去除。 A chemical etching process is used to remove the outer copper foil in the central area.
7、根据权利要求 1所述的方法, 其特征在于, 所述的将所述封装基板单元 的中央区域的外层铜箔去除之后, 还包括: 7. The method according to claim 1, characterized in that: the packaging substrate unit After removing the outer copper foil in the central area, it also includes:
对所述封装基板单元镀金,使所述中央区域以外未被去除的外层铜箔上镀 一层镍金或镍钯金。 The package substrate unit is plated with gold, so that the outer copper foil outside the central area that has not been removed is plated with a layer of nickel gold or nickel-palladium gold.
8、根据权利要求 1所述的方法, 其特征在于, 所述的在去除外层铜箔的所 述中央区域加工用于固定电子元件的容纳槽包括: 8. The method according to claim 1, characterized in that, processing a receiving groove for fixing electronic components in the central area where the outer layer of copper foil is removed includes:
按照略小于所述中央区域的尺寸加工容纳槽,使所述容纳槽边缘一定尺寸 范围内没有外层铜箔。 The receiving groove is processed to a size slightly smaller than the central area, so that there is no outer copper foil within a certain size range of the edge of the receiving groove.
9、 一种多层结构的封装基板单元, 其特征在于: 所述封装基板单元的中 央区域开设有用于固定电子元件,并使所述电子元件与所述封装基板单元上的 内层铜、箔及外层铜、箔绝缘的容纳槽, 所述封装基板单元的周边加工有屏蔽槽, 所述屏蔽槽包括分別位于所述多层基板的两面且位置对应的第一屏蔽槽和第 二屏蔽槽,所述第一屏蔽槽和第二屏蔽槽的底部分別抵达所述多层基板的内层 铜箔的两面,所述屏蔽槽的侧壁上加工有用于对所述电子元件进行电磁屏蔽的 金属化层。 9. A packaging substrate unit with a multi-layer structure, characterized in that: a central area of the packaging substrate unit is provided for fixing electronic components, and connecting the electronic components with the inner layer of copper and foil on the packaging substrate unit and a receiving groove with outer copper and foil insulation. A shielding groove is processed around the package substrate unit. The shielding groove includes a first shielding groove and a second shielding groove respectively located on both sides of the multi-layer substrate and in corresponding positions. , the bottoms of the first shielding groove and the second shielding groove respectively reach both sides of the inner copper foil of the multi-layer substrate, and the side walls of the shielding groove are processed with metal for electromagnetic shielding of the electronic components. layer.
10、 一种基板组件, 其特征在于, 包括: 如权利要求 9所述的封装基板单 元,埋入所述封装基板单元开设的容纳槽中的电子元件, 以及分別压合在所述 封装基板单元两面的上、 下基板, 所述电子元件与所述上基板或下基板上的电 路图形电连接。 10. A substrate assembly, characterized by comprising: the packaging substrate unit as claimed in claim 9, electronic components embedded in the receiving grooves provided in the packaging substrate unit, and electronic components respectively pressed in the packaging substrate unit There are upper and lower substrates on both sides, and the electronic components are electrically connected to the circuit patterns on the upper substrate or the lower substrate.
PCT/CN2013/090740 2013-03-26 2013-12-27 Package substrate unit and preparation method therefor, and substrate assembly WO2014153999A1 (en)

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