WO2014112731A1 - Rubbing and photo-aligning device - Google Patents

Rubbing and photo-aligning device Download PDF

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Publication number
WO2014112731A1
WO2014112731A1 PCT/KR2013/012359 KR2013012359W WO2014112731A1 WO 2014112731 A1 WO2014112731 A1 WO 2014112731A1 KR 2013012359 W KR2013012359 W KR 2013012359W WO 2014112731 A1 WO2014112731 A1 WO 2014112731A1
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WO
WIPO (PCT)
Prior art keywords
rubbing
gantry
optical alignment
lamp
coupled
Prior art date
Application number
PCT/KR2013/012359
Other languages
French (fr)
Korean (ko)
Inventor
윤형열
코지하시즈메
Original Assignee
위아코퍼레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 위아코퍼레이션 filed Critical 위아코퍼레이션
Priority to CN201380069747.6A priority Critical patent/CN104903787B/en
Priority to JP2015550332A priority patent/JP5927358B2/en
Publication of WO2014112731A1 publication Critical patent/WO2014112731A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133784Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing

Definitions

  • the present invention relates to a rubbing and photoalignment device, and more particularly, to an apparatus capable of simultaneously performing mechanical rubbing and photoalignment.
  • a liquid crystal layer is formed between two glass substrates, a transparent electrode for applying an electric field to the liquid crystal layer on the inner surface of the two glass substrates, a switching element for turning the electric field on and off, and a color. It has a structure in which a color filter for displaying a light emitting film, and an alignment film for orienting liquid crystal molecules are formed.
  • a liquid crystal material is sealed between two glass substrates to produce a liquid crystal display device.
  • the alignment film is made of a resin layer such as polyimide resin (PI) coated on a substrate, and after the alignment film is cured, the liquid crystal is aligned in a predetermined direction by a rubbing treatment with a rubbing device.
  • PI polyimide resin
  • both ends of the rubbing roller are rotatably supported on an upper portion of a table on which a glass substrate is fixed, and a rubbing cloth (napping fabric) is attached to the surface of the rubbing roller by a double-sided tape or the like.
  • a rubbing cloth (napping fabric) is attached to the surface of the rubbing roller by a double-sided tape or the like.
  • Such mechanical rubbing has the advantage that the alignment process is easy to be suitable for mass production and stable orientation.
  • the present invention has been made to solve the above-described problems, and to provide a rubbing and photoalignment apparatus capable of performing photoalignment in order to compensate for the disadvantages while utilizing the advantages of the alignment treatment using a rubbing roller.
  • the rubbing and photoalignment device includes a gantry positioned on a table on which a liquid crystal display device substrate is placed, a lamp positioned inside the gantry to generate light for photoalignment, and an outer portion of the gantry. It includes a photoalignment case coupled to change the characteristics of the light from the lamp, the gantry can be selectively combined with a rubbing roller or photoalignment case.
  • the rubbing and photoalignment device may include one or more of the following embodiments.
  • the gantry has a horizontal frame
  • the lamp is located inside the horizontal frame
  • the horizontal frame has a support
  • the support roller and the optical alignment case may be combined.
  • the rubbing roller and the optical alignment case may have the same coupling structure with respect to the support.
  • the optical alignment case may include a polarizer and a cold mirror.
  • the rubbing and photoalignment device includes a gantry positioned on a table on which a liquid crystal display device substrate is placed, and an optical alignment module coupled to an outside of the gantry, wherein the optical alignment module includes optical light therein.
  • a lamp for generating light for orientation is provided, and the gantry can be selectively coupled with the optical alignment module or rubbing roller.
  • the rubbing and photoalignment device may include one or more of the following embodiments.
  • the gantry may have a support coupled to the rubbing roller and the optical alignment module, and the rubbing roller and the optical alignment module may have the same coupling structure with respect to the support.
  • the optical alignment module may include a polarizer and a cold mirror.
  • the rubbing and photoalignment device includes a gantry positioned on a table on which a liquid crystal display substrate is placed, and a lamp and a polarizing element for photoalignment are provided inside the gantry. Can be combined and separated with the rubbing roller.
  • the rubbing and photoalignment device may include the following embodiments.
  • the gantry may be provided with a horizontal frame in which the lamp and the polarizer are positioned, and the support may be provided with the rubbing roller.
  • the present invention can provide a rubbing and photoalignment device capable of increasing the manufacturing yield of a liquid crystal display device and enabling the manufacture of a high-quality liquid crystal display device, since the orientation and photoalignment by rubbing can be used selectively or simultaneously. .
  • FIG. 1 is a perspective view illustrating a rubbing and photoalignment device according to a first embodiment of the present invention.
  • FIG. 2 is a view of a gantry of the rubbing and photoalignment device illustrated in FIG. 1.
  • FIG. 3 is a perspective view of a rubbing roller coupled to the gantry illustrated in FIG. 2.
  • FIG. 4 is a perspective view of an optical alignment case coupled to the gantry illustrated in FIG.
  • FIG. 5 is a view illustrating a state in which the optical alignment case illustrated in FIG. 4 is coupled to the gantry illustrated in FIG. 2.
  • FIG. 6 is a perspective view illustrating an optical alignment module of the rubbing and optical alignment device according to the second embodiment of the present invention.
  • FIG. 7 is a diagram illustrating a gantry of a rubbing and photoalignment device according to a third embodiment of the present invention.
  • FIG. 1 is a perspective view of a rubbing and photoalignment apparatus 100 according to a first embodiment of the present invention
  • FIG. 2 is a gantry 120 of the rubbing and photoalignment apparatus 100 illustrated in FIG. 1.
  • This is the drawing. 3 is a perspective view of the rubbing roller 190
  • Figure 4 is a perspective view of the optical orientation case 220.
  • the rubbing and photoalignment device 100 may be provided with a lamp 210 in the gantry 120 to perform photoalignment.
  • the optical alignment case 220 (see FIG. 4) may be coupled to the outside of the flavor gantry 120 to obtain light characteristics such as a desired polarization direction.
  • the rubbing and photoalignment device 100 according to the first embodiment may perform the rubbing by combining the rubbing roller 190 (see FIG. 3) for rubbing to the outside of the gantry 120. Therefore, since the rubbing and photoalignment apparatus 100 according to the present embodiment can perform mechanical rubbing and photoalignment selectively or simultaneously, the rubbing and photoalignment apparatus 100 has an advantage of performing orientation by utilizing the advantages of rubbing and photoalignment.
  • the rubbing and photoalignment device 100 includes a gantry 120, a main base 150 and an auxiliary base 152, a stage driving device 160, a stage 170, and a table 174.
  • Have And the rubbing roller 190 may be selectively coupled to the outside of the gantry 120 to perform the orientation by the rubbing.
  • the lamp 210 and the reflecting mirror 212 is provided inside the gantry 120, the optical alignment case 220 on the outside of the gantry 120, the rubbing roller 190 It can instead be combined selectively.
  • the liquid crystal display device (not shown) positioned on the table 174 passes through the lower portion of the gantry 120 by linear reciprocating motion by the stage driving device 160.
  • the alignment layer (not shown) formed on the liquid crystal display device is rubbed by a rubbing roller 190 coupled to the gantry 120, or the lamp 210 and the gantry 120 provided in the gantry 120.
  • the optical alignment in the desired direction is made by the optical alignment case 220 coupled to.
  • a liquid crystal display element to be worked is placed on the table 174.
  • the table 174 is positioned above the stage 170 by the support 172 having a constant height.
  • a polarized angle sensor (not shown) may be provided to measure the degree of polarization of the light irradiated upon the optical alignment.
  • the stage 170 receives the driving force of the stage driving device 160 to linearly reciprocate the lower portion of the gantry 120 along the guide rail 164.
  • a driving coil (not shown) corresponding to the mover of the stage driving device 160 may be coupled to the lower portion of the stage 170.
  • the stage driving device 160 corresponds to a linear motor for linearly moving the stage 170.
  • the stage driving device 160 includes a stator 162 corresponding to a magnet, a driving coil (not shown) coupled to a lower portion of the stage 170, and a guide rail corresponding to a movement path of the stage 170. 164.
  • a current is applied to the driving coil, a force for moving the stage 170 is generated by electromagnetic interaction with a magnet corresponding to the stator 162.
  • stage driving device 160 various driving sources such as a ball screw using a motor in addition to the linear motor may be used.
  • the stage driver 160 is located on the main base 150.
  • the auxiliary base 152 is provided on both left and right sides of the main base 150, respectively.
  • the auxiliary base 152 is provided with gantry rotating means 142 and up-down means 140 for driving the gantry 120.
  • the gantry rotating means 142 rotates the gantry 120 at a predetermined angle (for example, 0 to 45 degrees) in a clockwise or counterclockwise direction. That is, the gantry rotating means 142 may change the angle formed by the stage 170 and the rubbing roller 190, and thus the rubbing process of the twisted nematic mode or the IPS mode (In-Plane Switching mode). Makes it possible.
  • a predetermined angle for example, 0 to 45 degrees
  • Up-down means 140 serves to adjust the height of the horizontal frame 122 of the gantry 120 relative to the table (174). Therefore, by adjusting the up-down means 140, it is possible to adjust the height of the rubbing roller 190 or the optical alignment case 220 for the liquid crystal display element placed on the table 174.
  • Tilt adjustment means 134 is provided on the left and right vertical frames 134 of the gantry 120.
  • the tilt adjusting means 134 serves to adjust the tilt angle of the horizontal frame 122 of the gantry 120.
  • the gantry 120 is selectively coupled with a rubbing roller 190 for rubbing or an optical orientation case 220 for photoalignment.
  • the gantry 120 includes a horizontal frame 122 positioned at a predetermined height on the table 174, and a vertical frame 134 extending vertically from the left and right ends of the horizontal frame 122.
  • the cuboid-shaped horizontal frame 122 includes an internal space 128, and the internal space 128 is provided with a lamp 210 and a reflector 212 for optical alignment.
  • the lower left and right both sides of the horizontal frame 122 is provided with a support 126 for coupling with the rubbing roller 190 or the optical alignment case 220.
  • a part of the lower surface of the horizontal frame 122 corresponds to the light transmitting part 124 through which the light from the lamp 210 can pass.
  • the lamp 210 generates light for photo-alignment, and may correspond to a lamp for generating ultraviolet rays (UV) by microwaves, and the internal space 128 of the horizontal frame 122 is applied to the microwaves. It may correspond to the resonator for. After the light from the lamp 210 passes through the light transmission unit 124, after passing through the polarizing element 224 and the cold mirror 226 of the optical alignment case 220 is coupled to the lower portion of the horizontal frame 122 The alignment layer (not shown) of the liquid crystal display element substrate placed on the table 174 is reached.
  • UV ultraviolet rays
  • Lamp 210 for the photo-alignment can be used a variety of lamps in addition to the micro UV lamp is a matter of course.
  • the lamp 210 may be formed with one having a length capable of covering all the widths of the liquid crystal display substrate or a plurality of lamps having a shorter length than the length of the liquid crystal display device substrate.
  • the lamps 210 may be arranged in one row or two or more rows in parallel with each other in the horizontal frame 122.
  • the reflector 212 is to increase the light collecting efficiency of the lamp 210 and has a length slightly larger than that of the lamp 210.
  • the reflecting mirror 212 may have a parabolic shape in cross section thereof.
  • the pair of supports 126 disposed below the horizontal frame 122 serves to support the supporting rollers 190 or the both ends of the optical alignment case 220. Since the coupling structure formed at both ends of the rubbing roller 190 and the coupling structure formed at both ends of the optical alignment case 220 are the same, the support 126 is easily coupled with the rubbing roller 190 or the optical alignment case 220. You can do it.
  • a cooling device (not shown) for cooling the lamp 210 may be provided inside the horizontal frame 122.
  • the support 126 can move left and right by a predetermined distance in the horizontal direction (arrow display), the position of the rubbing roller 190 or the optical alignment case 220 with respect to the liquid crystal display element substrate placed on the table 174 can be moved. I can adjust it.
  • one of the left and right supports 126 may be provided with a motor (not shown) for providing a rotational force to the rubbing roller 190.
  • the rubbing and photoalignment device 100 includes a microwave generator 180 for emitting light of the lamp 210.
  • the microwave generated by the microwave generator 180 is transmitted to the inside of the horizontal frame 122 of the gantry 120 through the waveguide 182 to induce light emission of the lamp 210 by resonance.
  • the microwave generator 180 may be located at a distance from the rubbing and optical alignment device 100.
  • the rubbing roller 190 illustrated in FIG. 3 is coupled to the support 126 of the gantry 120.
  • the rubbing roller 190 includes a cylindrical cylindrical portion 192, a roll flange 194 coupled to both ends of the cylindrical portion 192, and a spindle 196 coupled to the roll flange 194.
  • a rubbing cloth (not shown) for rubbing the alignment film is coupled around the cylindrical portion 192.
  • the roll flange 194 for coupling with the support 126 is coupled to the left and right ends of the cylindrical portion 192, and the spindle 196 for coupling with the support 126 is coupled to the center of the roll flange 194.
  • the roll flange 194 and the spindle 196 corresponding to the coupling structure of both ends of the rubbing roller 190 may be the same as the coupling structure of both ends of the optical alignment case 220.
  • the support 126 is horizontally moved to enlarge the width between the left and right supports 126, and then the roll flange 194 and the spindle 196 of the rubbing roller 190 are supported by the support 126.
  • the contact pressure between the rubbing roller 190 and the liquid crystal display device substrate is adjusted by the up-down means 140, and by the gantry rotating means 142.
  • the angle between the liquid crystal display element substrate and the rubbing roller 190 is adjusted, and the tilt angle of the rubbing roller 190 is adjusted by the tilt adjusting means 144.
  • the rubbing roller 190 moves to the liquid crystal display device.
  • the rubbing process is performed by rotation while contacting the alignment layer of the substrate.
  • the contact pressure, angle, and tilt angle of the rubbing roller 190 with respect to the liquid crystal display element substrate may be adjusted.
  • the pretreatment of the alignment layer may be performed before photoalignment to improve the alignment treatment efficiency.
  • the pretreatment may correspond to a process of heating the alignment film subjected to the primary alignment treatment by the rubbing roller 190 to a predetermined temperature by hot air or the like.
  • Such a pretreatment process can improve the responsiveness of the irradiation light to the alignment layer during the photo-alignment process by light irradiation, and can perform an effective alignment treatment even at a small effective energy.
  • the rubbing and photoalignment device 100 may perform the second photoalignment after the first rubbing process and pretreatment, but may perform only one of the rubbing process or the photoalignment by the rubbing roller 190. Of course.
  • the rubbing roller 190 is removed from the gantry 120 and then the optical alignment case 220 is coupled.
  • the left and right sides of the optical alignment case 220 is provided with a spindle 222 and a roll flange 223, which is the same structure as the spindle 196 and the roll flange 194 provided on the left and right sides of the rubbing roller 190.
  • the polarization element 224 and the cold mirror 226 are provided inside the optical alignment case 220.
  • the polarizer 224 polarizes the light emitted from the lamp 210 in a predetermined direction and may correspond to a wire grid.
  • the polarized light generated by the polarizer 224 reaches the optical alignment layer and aligns the optical alignment layer to have a direction perpendicular to the polarization direction.
  • the polarizer 224 may change the polarization direction.
  • the cold mirror 226 filters out infrared rays, which cause a temperature increase, from the light emitted from the lamp 210, and serves to suppress temperature rise of the optical alignment case 220 and the table 174.
  • the optical alignment case 220 may include a cleaning function for removing foreign particles generated after the rubbing process by the rubbing roller 190.
  • the optical alignment case 220 may further include a device that can remove the static electricity generated after the rubbing process.
  • FIG 5 is a view illustrating a state in which the optical alignment case 220 is coupled to the gantry 120.
  • the optical alignment case 220 is coupled to the support 126.
  • the optical alignment case 220 may be coupled to be in close contact with the lower portion of the gantry 120, and thus, the UV light generated from the lamp 210 may enter the optical alignment case 220 without being leaked to the outside. do.
  • the microwave generator 180 to generate a microwave so that the UV light from the lamp 210.
  • the UV light emitted from the lamp 210 passes through the light transmitting part 124 of the gantry 120, passes through the polarizing element 224 and the cold mirror 226 of the optical alignment case 220, and reaches the alignment layer. Perform photoalignment.
  • the rubbing and optical alignment device 100 has been illustrated as selectively combining the rubbing roller 190 or the optical alignment case 220 with one gantry 120, the rubbing according to another embodiment.
  • the optical alignment device may be provided with two gantry to selectively combine the rubbing roller 190 and the optical alignment case 220. In this case, only the rubbing roller 190 may be coupled to both gantry, or only the optical alignment case 220 may be coupled.
  • optical alignment module 300 of the rubbing and optical alignment device according to the second embodiment of the present invention will be described with reference to FIG. 6.
  • FIG. 6 is a perspective view illustrating an optical alignment module 300 of the rubbing and optical alignment device according to the second embodiment of the present invention.
  • the rubbing and optical alignment device includes an optical alignment module 300.
  • the optical alignment module 300 includes a reflector 324, a lamp 326, a polarizer 328, and a cold mirror 332.
  • the optical alignment module 300 may be selectively coupled to the outside of the gantry for optical alignment, in which the lamp is not provided inside the gantry. Therefore, the rubbing and photoalignment device according to the present embodiment is the same as the rubbing and photoalignment device 100 according to the first embodiment, except that the reflector 324 and the lamp 326 are not located inside the gantry. There is a difference in that the optical alignment module 300 is provided inside.
  • the optical alignment module 300 includes a case 320, a reflector 324, a lamp 326, a polarizer 328, and a cold mirror 332.
  • the optical alignment module 300 may be coupled to the gantry for optical alignment.
  • the case 320 forms an outer body of the optical alignment module 300, and a reflecting mirror 324, a lamp 326, a polarizer 328, and a cold mirror 332 are located therein.
  • the case 320 has a resonator structure for microwaves, so that microwaves generated by the microwave generator 180 are transmitted and resonate therein. UV light is induced in the lamp 326 by microwaves resonating inside the case 320.
  • the spindle 322 and the roll flange 333 are provided on the left and right sides of the case 320.
  • the spindle 322 and the roll flange 333 have the same structure as the spindle 196 and the roll flange 194 of the rubbing roller 190.
  • the optical alignment module 300 may be easily coupled to the support 126 to which the rubbing roller 190 is coupled.
  • the reflector 324, the lamp 326, the polarizer 328, and the cold mirror 332 provided in the case 320 may include the reflector of the rubbing and optical alignment device 100 according to the first embodiment. 212), the lamp 210, the polarizer 224, and the cold mirror 226 are the same as detailed descriptions thereof will be omitted.
  • the optical alignment module 300 coupled to the gantry includes a lamp 326, the microwave generator 180 and the cooling device in the internal space of the horizontal frame 122 of the gantry. (Not shown) and the like can be stored.
  • the case 320 of the optical alignment module 300 may have a structure (eg, a mesh structure) that can prevent the outflow of microwaves.
  • the optical alignment module 300 may further include a function capable of removing foreign particles generated after the rubbing process and a function capable of removing static electricity.
  • FIG. 7 illustrates a gantry 400 of a rubbing and photoalignment device according to a third embodiment of the present invention.
  • the gantry 400 of the rubbing and optical alignment device includes a lamp 430, a polarizer 436, and a cold mirror 438 inside the horizontal frame 420. It is characteristic in that it exists. Therefore, the rubbing and photoalignment apparatus according to the present embodiment only needs to remove the rubbing roller 190 coupled to the outside of the gantry 400 without having to combine the photoalignment case 220 illustrated in FIG. 4 for photoalignment. do.
  • the horizontal frame 420 has an inner space 424, which includes a reflector 432, a lamp 430, a polarizer 436, and a cold mirror 438.
  • the horizontal frame 420 includes a light transmission part 422 through which the light from the lamp 430 can pass.
  • the lower surface of the horizontal frame 420 is provided with a pair of supports 426 for the coupling of the rubbing roller 190.
  • the lamp 430, the reflector 432, the polarizer 436, and the cold mirror 438 provided in the gantry 400 of the rubbing and optical alignment device according to the present embodiment are rubbing according to the first embodiment. And since it is the same as the lamp 210, the reflector 212, the polarizing element 224 and the cold mirror 226 of the optical alignment device, a detailed description thereof will be omitted.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
  • Polarising Elements (AREA)

Abstract

Disclosed is a rubbing and photo-aligning device. A rubbing and photo-aligning device according to an aspect of the present invention includes a gantry positioned above a table for supporting a liquid crystal display element, a lamp arranged within the gantry for generating a light for photo-aligning, and a photo-aligning case connected to the outside of the gantry for altering the properties of the light generated from the lamp, wherein the gantry may be joined selectively with a rubbing roller or the photo-aligning case.

Description

러빙 및 광배향 장치Rubbing and Photoalignment Devices
본 발명은 러빙 및 광배향 장치에 관한 것으로서, 구체적으로는 기계적인 러빙과 광배향을 동시에 수행할 수 있는 장치에 관한 것이다. The present invention relates to a rubbing and photoalignment device, and more particularly, to an apparatus capable of simultaneously performing mechanical rubbing and photoalignment.
액정표시장치는 일반적으로 두 장의 글라스(glass) 기판 사이에 액정층이 형성되고, 두 장의 글라스 기판의 내면에 상기 액정층에 전계를 걸기 위한 투명 전극, 상기 전계를 온오프 시키기 위한 스위칭 소자, 컬러를 표시하기 위한 컬러 필터 및 액정분자를 배향하기 위한 배향막 등이 형성된 구조를 갖는다. 두 장의 글라스 기판 사이에 액정 재료가 봉입되어 액정표시소자가 제작된다. 배향막은 기판 위에 도포된 폴리이미드 수지(PI) 등의 수지층으로 이루어지고, 배향막이 경화된 후 러빙장치에 의한 러빙 처리에 의해 액정이 일정 방향으로 배향된다. Generally, a liquid crystal layer is formed between two glass substrates, a transparent electrode for applying an electric field to the liquid crystal layer on the inner surface of the two glass substrates, a switching element for turning the electric field on and off, and a color. It has a structure in which a color filter for displaying a light emitting film, and an alignment film for orienting liquid crystal molecules are formed. A liquid crystal material is sealed between two glass substrates to produce a liquid crystal display device. The alignment film is made of a resin layer such as polyimide resin (PI) coated on a substrate, and after the alignment film is cured, the liquid crystal is aligned in a predetermined direction by a rubbing treatment with a rubbing device.
통상의 러빙장치는, 러빙롤러가 글라스 기판이 고정된 테이블의 상부에 회전 가능하게 그 양단이 지지되고, 러빙포(기모포)가 양면 테이프 등에 의해 러빙롤러의 표면에 부착된다. 이 러빙롤러의 회전에 의해 글라스 기판의 배향층 표면에 접촉하는 러빙포가 배향층을 일정한 방향으로 문지름으로써 그 방향으로 액정재료가 배향된다. In a typical rubbing device, both ends of the rubbing roller are rotatably supported on an upper portion of a table on which a glass substrate is fixed, and a rubbing cloth (napping fabric) is attached to the surface of the rubbing roller by a double-sided tape or the like. By the rotation of this rubbing roller, the rubbing cloth which contacts the surface of the orientation layer of a glass substrate rubs an orientation layer in a fixed direction, and a liquid crystal material is orientated in that direction.
이와 같은 기계적인 러빙은 배향 처리가 용이하여 대량 생산에 적합하고 안정적인 배향을 할 수 있는 장점을 갖는다. Such mechanical rubbing has the advantage that the alignment process is easy to be suitable for mass production and stable orientation.
그러나 상기 기계적인 러빙은, 배향막을 러빙포의 직접적인 접촉에 의해서 배향이 이루어지기 때문에 먼지(particle) 발생에 의한 액정 셀(cell)의 오염, 정전기 발생에 의해 기판에 설치된 TFT 소자의 파괴, 러빙 후 추가적인 세정 공정의 필요, 대면적 적용시 배향의 비균일성 등과 같은 여러 가지 문제점을 유발하여, 액정표시장치의 제조시 수율을 떨어뜨린다. However, since the mechanical rubbing is oriented by the direct contact of the rubbing cloth, the rubbing of the liquid crystal cell due to the generation of particles and the destruction of the TFT elements installed on the substrate due to the generation of static electricity, after rubbing Various problems, such as the need for an additional cleaning process and non-uniformity of orientation in large area applications, are caused, resulting in lower yields in the manufacture of liquid crystal displays.
따라서 본 발명은 상술한 문제점을 해결하기 위해 도출된 것으로서, 러빙롤러를 이용한 배향 처리의 장점을 살리면서도 그 단점을 보완하기 위해서 광배향을 수행할 수 있는 러빙 및 광배향 장치를 제공하고자 한다. Accordingly, the present invention has been made to solve the above-described problems, and to provide a rubbing and photoalignment apparatus capable of performing photoalignment in order to compensate for the disadvantages while utilizing the advantages of the alignment treatment using a rubbing roller.
본 발명의 다른 목적들은 이하에 서술되는 실시예를 통하여 더욱 명확해질 것이다.Other objects of the present invention will become more apparent through the embodiments described below.
본 발명의 일 측면에 따른 러빙 및 광배향 장치는, 액정표시소자 기판이 놓여지는 테이블 상에 위치하는 갠트리와, 갠트리의 내부에 위치하면서 광배향을 위한 빛을 생성하는 램프와, 갠트리의 외부에 결합되어 램프에서 나온 빛의 특성을 변경하는 광배향케이스를 포함하고, 갠트리는 러빙롤러 또는 광배향케이스와 선택적으로 결합할 수 있다. The rubbing and photoalignment device according to an aspect of the present invention includes a gantry positioned on a table on which a liquid crystal display device substrate is placed, a lamp positioned inside the gantry to generate light for photoalignment, and an outer portion of the gantry. It includes a photoalignment case coupled to change the characteristics of the light from the lamp, the gantry can be selectively combined with a rubbing roller or photoalignment case.
본 측면에 따른 러빙 및 광배향 장치는 다음과 같은 실시예들을 하나 또는 그 이상 구비할 수 있다. 예를 들면, 갠트리는 수평프레임을 구비하고, 램프는 수평프레임의 내부에 위치하며, 수평프레임은 지지체를 구비하고, 지지체에는 러빙롤러 및 광배향케이스가 결합될 수 있다. The rubbing and photoalignment device according to this aspect may include one or more of the following embodiments. For example, the gantry has a horizontal frame, the lamp is located inside the horizontal frame, the horizontal frame has a support, the support roller and the optical alignment case may be combined.
러빙롤러 및 광배향케이스는 지지체에 대해서 동일한 결합구조를 구비할 수 있다. 그리고 광배향케이스는 편광소자 및 콜드미러를 포함할 수 있다. The rubbing roller and the optical alignment case may have the same coupling structure with respect to the support. The optical alignment case may include a polarizer and a cold mirror.
본 발명의 다른 측면에 따른 러빙 및 광배향 장치는, 액정표시소자 기판이 놓여지는 테이블 상에 위치하는 갠트리와, 갠트리의 외부에 결합되는 광배향모듈을 포함하고, 광배향모듈은 그 내부에 광배향을 위한 빛을 생성하는 램프를 구비하며, 갠트리는 광배향모듈 또는 러빙롤러와 선택적으로 결합할 수 있다. The rubbing and photoalignment device according to another aspect of the present invention includes a gantry positioned on a table on which a liquid crystal display device substrate is placed, and an optical alignment module coupled to an outside of the gantry, wherein the optical alignment module includes optical light therein. A lamp for generating light for orientation is provided, and the gantry can be selectively coupled with the optical alignment module or rubbing roller.
본 측면에 따른 러빙 및 광배향 장치는 다음과 같은 실시예들을 하나 또는 그 이상 구비할 수 있다. 예를 들면, 갠트리는 러빙롤러 및 광배향모듈과 결합하는 지지체를 구비하고, 러빙롤러 및 광배향모듈은 지지체에 대해서 동일한 결합구조를 구비할 수 있다. 그리고 광배향모듈은 편광소자 및 콜드미러를 구비할 수 있다. The rubbing and photoalignment device according to this aspect may include one or more of the following embodiments. For example, the gantry may have a support coupled to the rubbing roller and the optical alignment module, and the rubbing roller and the optical alignment module may have the same coupling structure with respect to the support. The optical alignment module may include a polarizer and a cold mirror.
본 발명의 또 다른 측면에 따른 러빙 및 광배향 장치는, 액정표시소자 기판이 놓여지는 테이블 상에 위치하는 갠트리를 포함하고, 갠트리 내부에는 광배향을 위한 램프 및 편광소자가 구비되어 있으며, 갠트리는 러빙롤러와 결합 및 분리할 수 있다. The rubbing and photoalignment device according to another aspect of the present invention includes a gantry positioned on a table on which a liquid crystal display substrate is placed, and a lamp and a polarizing element for photoalignment are provided inside the gantry. Can be combined and separated with the rubbing roller.
본 측면에 따른 러빙 및 광배향 장치는 다음과 같은 실시예를 구비할 수 있다. 예를 들면, 갠트리는 램프 및 편광소자가 위치하는 수평프레임을 구비하고, 수평프레임에는 러빙롤러가 결합되는 지지체가 구비될 수 있다. The rubbing and photoalignment device according to this aspect may include the following embodiments. For example, the gantry may be provided with a horizontal frame in which the lamp and the polarizer are positioned, and the support may be provided with the rubbing roller.
본 발명은 러빙에 의한 배향 및 광배향을 선택적 또는 동시에 사용할 수 있기 때문에 액정표시장치의 제조 수율을 높일 수 있고, 고화질의 액정표시장치의 제조를 가능하게 하는 러빙 및 광배향 장치를 제공할 수 있다. The present invention can provide a rubbing and photoalignment device capable of increasing the manufacturing yield of a liquid crystal display device and enabling the manufacture of a high-quality liquid crystal display device, since the orientation and photoalignment by rubbing can be used selectively or simultaneously. .
도 1은 본 발명의 제1 실시예에 따른 러빙 및 광배향 장치를 예시하는 사시도이다.1 is a perspective view illustrating a rubbing and photoalignment device according to a first embodiment of the present invention.
도 2는 도 1에 예시된 러빙 및 광배향 장치의 갠트리에 대한 도면이다.FIG. 2 is a view of a gantry of the rubbing and photoalignment device illustrated in FIG. 1.
도 3은 도 2에 예시된 갠트리에 결합되는 러빙롤러에 대한 사시도이다.3 is a perspective view of a rubbing roller coupled to the gantry illustrated in FIG. 2.
도 4는 도 2에 예시된 갠트리에 결합되는 광배향케이스에 대한 사시도이다. 4 is a perspective view of an optical alignment case coupled to the gantry illustrated in FIG.
도 5는 도 2에 예시된 갠트리에 도 4에 예시된 광배향케이스가 결합된 상태에 대한 도면이다.FIG. 5 is a view illustrating a state in which the optical alignment case illustrated in FIG. 4 is coupled to the gantry illustrated in FIG. 2.
도 6은 본 발명의 제2 실시예에 따른 러빙 및 광배향 장치의 광배향모듈을 예시하는 사시도이다.6 is a perspective view illustrating an optical alignment module of the rubbing and optical alignment device according to the second embodiment of the present invention.
도 7은 본 발명의 제3 실시예에 따른 러빙 및 광배향 장치의 갠트리를 예시하는 도면이다.7 is a diagram illustrating a gantry of a rubbing and photoalignment device according to a third embodiment of the present invention.
본 발명은 다양한 변환을 가할 수 있고 여러 가지 실시 예를 가질 수 있는 바, 특정 실시 예들을 도면에 예시하고 상세한 설명에서 상세하게 설명하고자 한다. 그러나, 이는 본 발명을 특정한 실시 형태에 대해 한정하려는 것이 아니며, 본 발명의 사상 및 기술 범위에 포함되는 모든 변환, 균등물 내지 대체물을 포함하는 것으로 이해되어야 한다. 본 발명을 설명함에 있어서 관련된 공지 기술에 대한 구체적인 설명이 본 발명의 요지를 흐릴 수 있다고 판단되는 경우 그 상세한 설명을 생략한다.As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the written description. However, this is not intended to limit the present invention to specific embodiments, it should be understood to include all transformations, equivalents, and substitutes included in the spirit and scope of the present invention. In the following description of the present invention, if it is determined that the detailed description of the related known technology may obscure the gist of the present invention, the detailed description thereof will be omitted.
본 출원에서 사용한 용어는 단지 특정한 실시예를 설명하기 위해 사용된 것으로, 본 발명을 한정하려는 의도가 아니다. 단수의 표현은 문맥상 명백하게 다르게 뜻하지 않는 한, 복수의 표현을 포함한다. 본 출원에서, "포함하다" 또는 "가지다" 등의 용어는 명세서상에 기재된 특징, 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것이 존재함을 지정하려는 것이지, 하나 또는 그 이상의 다른 특징들이나 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다.The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof.
수평 및 수직 그리고 메인 및 보조 등의 용어는 다양한 구성요소들을 설명하는데 사용될 수 있지만, 상기 구성요소들은 상기 용어들에 의해 한정되어서는 안 된다. 상기 용어들은 하나의 구성요소를 다른 구성요소로부터 구별하는 목적으로만 사용된다. Terms such as horizontal and vertical and main and auxiliary may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.
이하, 첨부한 도면들을 참조하여 본 발명에 따른 실시예들을 상세히 설명하기로 하며, 첨부 도면을 참조하여 설명함에 있어 도면 부호에 상관없이 동일하거나 대응하는 구성 요소는 동일한 참조번호를 부여하고 이에 대한 중복되는 설명은 생략하기로 한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, and in describing the present invention with reference to the accompanying drawings, the same or corresponding elements are denoted by the same reference numerals regardless of the reference numerals, and duplicates thereof. The description will be omitted.
이하에서는 본 발명의 제1 실시예에 따른 러빙 및 광배향 장치(100)에 대해서 도 1 내지 도 5를 참조하면서 설명하기로 한다. Hereinafter, the rubbing and optical alignment device 100 according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 5.
도 1은 본 발명의 제1 실시예에 따른 러빙 및 광배향 장치(100)에 대한 사시도이고, 도 2는 도 1에 예시된 러빙 및 광배향 장치(100)의 갠트리(gantry)(120)에 대한 도면이다. 그리고 도 3은 러빙롤러(190)에 대한 사시도이고, 도 4는 광배향케이스(220)에 대한 사시도이다.FIG. 1 is a perspective view of a rubbing and photoalignment apparatus 100 according to a first embodiment of the present invention, and FIG. 2 is a gantry 120 of the rubbing and photoalignment apparatus 100 illustrated in FIG. 1. This is the drawing. 3 is a perspective view of the rubbing roller 190, Figure 4 is a perspective view of the optical orientation case 220.
도 1 내지 도 2를 참조하면, 본 발명의 제1 실시예에 따른 러빙 및 광배향 장치(100)는, 갠트리(120)에 램프(210)가 구비되어 있어서 광배향을 수행할 수 있고, 광배향시 갠트리(120)의 외부에 광배향케이스(220, 도 4 참조)를 결합하여 원하는 편광 방향 등과 같은 빛의 특성을 얻을 수 있다. 또한, 제1 실시예에 따른 러빙 및 광배향 장치(100)는, 갠트리(120)의 외부에 러빙(rubbing)을 위한 러빙롤러(190, 도 3 참조)를 결합하여 러빙을 수행할 수 있다. 따라서 본 실시예에 따른 러빙 및 광배향 장치(100)는, 기계적인 러빙 및 광배향을 선택적 또는 동시에 수행할 수 있기 때문에 러빙 및 광배향의 장점을 살려서 배향을 실시할 수 있는 장점을 갖는다.1 and 2, the rubbing and photoalignment device 100 according to the first embodiment of the present invention may be provided with a lamp 210 in the gantry 120 to perform photoalignment. The optical alignment case 220 (see FIG. 4) may be coupled to the outside of the flavor gantry 120 to obtain light characteristics such as a desired polarization direction. In addition, the rubbing and photoalignment device 100 according to the first embodiment may perform the rubbing by combining the rubbing roller 190 (see FIG. 3) for rubbing to the outside of the gantry 120. Therefore, since the rubbing and photoalignment apparatus 100 according to the present embodiment can perform mechanical rubbing and photoalignment selectively or simultaneously, the rubbing and photoalignment apparatus 100 has an advantage of performing orientation by utilizing the advantages of rubbing and photoalignment.
제1 실시예에 따른 러빙 및 광배향 장치(100)는, 갠트리(120), 메인베이스(150) 및 보조베이스(152), 스테이지 구동장치(160), 스테이지(170) 및 테이블(174)를 갖는다. 그리고 러빙에 의한 배향을 수행하기 위해서 갠트리(120)의 외부에는 러빙롤러(190)가 선택적으로 결합될 수 있다. 또한, 광배향을 수행하기 위해서, 갠트리(120)의 내부에는 램프(210) 및 반사경(212)이 구비되어 있고, 갠트리(120)의 외부에는 광배향케이스(220)가 러빙롤러(190)를 대신하여 선택적으로 결합될 수 있다. The rubbing and photoalignment device 100 according to the first embodiment includes a gantry 120, a main base 150 and an auxiliary base 152, a stage driving device 160, a stage 170, and a table 174. Have And the rubbing roller 190 may be selectively coupled to the outside of the gantry 120 to perform the orientation by the rubbing. In addition, in order to perform the optical alignment, the lamp 210 and the reflecting mirror 212 is provided inside the gantry 120, the optical alignment case 220 on the outside of the gantry 120, the rubbing roller 190 It can instead be combined selectively.
테이블(174)에 위치하는 액정표시소자(도시하지 않음)는, 스테이지 구동장치(160)에 의한 직선 왕복 운동에 의해서 갠트리(120)의 하부를 통과한다. 이 과정에서, 액정표시소자에 형성된 배향막(도시하지 않음)은 갠트리(120)에 결합된 러빙롤러(190)에 의해서 러빙 처리 되거나, 갠트리(120)에 구비된 램프(210) 및 갠트리(120)에 결합된 광배향케이스(220)에 의해서 원하는 방향의 광배향이 이루어진다. The liquid crystal display device (not shown) positioned on the table 174 passes through the lower portion of the gantry 120 by linear reciprocating motion by the stage driving device 160. In this process, the alignment layer (not shown) formed on the liquid crystal display device is rubbed by a rubbing roller 190 coupled to the gantry 120, or the lamp 210 and the gantry 120 provided in the gantry 120. The optical alignment in the desired direction is made by the optical alignment case 220 coupled to.
테이블(174) 상에는 작업 대상이 되는 액정표시소자가 놓여진다. 테이블(174)은 일정한 높이를 갖는 서포트(172)에 의해서 스테이지(170)에 대해 상부에 위치한다. 테이블(174) 상에는 광배향시 조사되는 광의 편광 정도를 측정하기 위한 편광센서(Polarized Angle Sensor)(도시하지 않음)가 구비될 수 있다. On the table 174, a liquid crystal display element to be worked is placed. The table 174 is positioned above the stage 170 by the support 172 having a constant height. On the table 174, a polarized angle sensor (not shown) may be provided to measure the degree of polarization of the light irradiated upon the optical alignment.
스테이지(170)는 스테이지 구동장치(160)의 구동력을 받아서, 가이드레일(164)을 따라서 갠트리(120) 하부를 직선 왕복 운동을 한다. 스테이지(170)의 하부에는, 스테이지 구동장치(160)의 가동자에 해당하는 구동코일(도시하지 않음)이 결합될 수 있다. The stage 170 receives the driving force of the stage driving device 160 to linearly reciprocate the lower portion of the gantry 120 along the guide rail 164. A driving coil (not shown) corresponding to the mover of the stage driving device 160 may be coupled to the lower portion of the stage 170.
스테이지 구동장치(160)는 스테이지(170)를 직선 운동하게 하는 리니어 모터(linear motor)에 해당한다. 스테이지 구동장치(160)는 마그네트(magnet)에 해당하는 고정자(162)와, 스테이지(170)의 하부에 결합된 구동코일(도시하지 않음)와, 스테이지(170)의 이동 경로에 해당하는 가이드레일(164)을 포함한다. 구동코일에 전류가 인가되면 고정자(162)에 해당하는 마그네트와의 전자기적인 상호 작용에 의해 스테이지(170)를 이동하게 하는 힘이 생성된다. The stage driving device 160 corresponds to a linear motor for linearly moving the stage 170. The stage driving device 160 includes a stator 162 corresponding to a magnet, a driving coil (not shown) coupled to a lower portion of the stage 170, and a guide rail corresponding to a movement path of the stage 170. 164. When a current is applied to the driving coil, a force for moving the stage 170 is generated by electromagnetic interaction with a magnet corresponding to the stator 162.
스테이지 구동장치(160)로 리니어 모터 이외에 모터를 이용한 볼 스크류 등 다양한 구동원이 사용될 수 있음은 물론이다.As the stage driving device 160, various driving sources such as a ball screw using a motor in addition to the linear motor may be used.
스테이지 구동장치(160)는 메인베이스(150) 상에 위치한다. 그리고 메인베이스(150)의 좌우 양측면에는 보조베이스(152)가 각각 구비되어 있다. 보조베이스(152)에는 갠트리(120)를 구동하기 위한 갠트리 회전수단(142) 및 업다운수단(140)이 구비된다. The stage driver 160 is located on the main base 150. The auxiliary base 152 is provided on both left and right sides of the main base 150, respectively. The auxiliary base 152 is provided with gantry rotating means 142 and up-down means 140 for driving the gantry 120.
갠트리 회전수단(142)은, 갠트리(120)를 시계 또는 반시계 방향으로 일정 각도(예를 들면, 0~45도)로 회전하게 한다. 즉, 갠트리 회전수단(142)은 스테이지(170)와 러빙롤러(190)가 이루는 각도를 변경할 수 있게 하는데, 이로 인해 TN 모드(Twisted Nematic mode) 또는 IPS 모드(In-Plane Switching mode)의 러빙 처리가 가능하게 한다.The gantry rotating means 142 rotates the gantry 120 at a predetermined angle (for example, 0 to 45 degrees) in a clockwise or counterclockwise direction. That is, the gantry rotating means 142 may change the angle formed by the stage 170 and the rubbing roller 190, and thus the rubbing process of the twisted nematic mode or the IPS mode (In-Plane Switching mode). Makes it possible.
업다운수단(140)은 테이블(174)에 대한 갠트리(120)의 수평프레임(122)의 높이를 조정하는 역할을 한다. 따라서 업다운수단(140)을 조정함으로써, 테이블(174)에 놓여진 액정표시소자에 대한 러빙롤러(190) 또는 광배향케이스(220)의 높이를 조정할 수 있게 된다. Up-down means 140 serves to adjust the height of the horizontal frame 122 of the gantry 120 relative to the table (174). Therefore, by adjusting the up-down means 140, it is possible to adjust the height of the rubbing roller 190 or the optical alignment case 220 for the liquid crystal display element placed on the table 174.
갠트리(120)의 좌우 수직프레임(134)에는 틸트조정수단(134)이 구비되어 있다. 틸트조정수단(134)은 갠트리(120)의 수평프레임(122)의 틸트각(tilt angle)을 조정하는 역할을 한다. Tilt adjustment means 134 is provided on the left and right vertical frames 134 of the gantry 120. The tilt adjusting means 134 serves to adjust the tilt angle of the horizontal frame 122 of the gantry 120.
갠트리(120)에는 러빙을 위한 러빙롤러(190) 또는 광배향을 위한 광배향케이스(220)가 선택적으로 결합된다. 갠트리(120)는 테이블(174) 상에 일정한 높이를 갖고 위치하는 수평프레임(122)과, 수평프레임(122)의 좌우 단부에서 수직으로 연장되는 수직프레임(134)을 포함한다. The gantry 120 is selectively coupled with a rubbing roller 190 for rubbing or an optical orientation case 220 for photoalignment. The gantry 120 includes a horizontal frame 122 positioned at a predetermined height on the table 174, and a vertical frame 134 extending vertically from the left and right ends of the horizontal frame 122.
직육면체 형상의 수평프레임(122)은 내부공간(128)을 구비하고, 그 내부공간(128)에는 광배향을 위한 램프(210) 및 반사경(212)이 구비되어 있다. 또한, 수평프레임(122)의 하부 좌우 양측에는 러빙롤러(190) 또는 광배향케이스(220)와의 결합을 위한 지지체(126)가 구비되어 있다. 그리고 수평프레임(122)의 하면 중 일부는 램프(210)에서 나온 빛이 투과할 수 있는 광투과부(124)에 해당한다.The cuboid-shaped horizontal frame 122 includes an internal space 128, and the internal space 128 is provided with a lamp 210 and a reflector 212 for optical alignment. In addition, the lower left and right both sides of the horizontal frame 122 is provided with a support 126 for coupling with the rubbing roller 190 or the optical alignment case 220. A part of the lower surface of the horizontal frame 122 corresponds to the light transmitting part 124 through which the light from the lamp 210 can pass.
램프(210)는 광배향을 위한 빛을 생성하는 것으로, 마이크로파(microwave)에 의해서 자외선(UV)를 생성하는 램프에 해당할 수 있으며, 이때 수평프레임(122)의 내부공간(128)은 마이크로파에 대한 공진기에 해당할 수 있다. 램프(210)에서 나온 빛은 광투과부(124)를 통과한 후, 수평프레임(122)의 하부에 결합되는 광배향케이스(220)의 편광소자(224) 및 콜드미러(226)를 통과한 후 테이블(174)에 놓여진 액정표시소자 기판의 배향층(도시하지 않음)에 도달하게 된다. The lamp 210 generates light for photo-alignment, and may correspond to a lamp for generating ultraviolet rays (UV) by microwaves, and the internal space 128 of the horizontal frame 122 is applied to the microwaves. It may correspond to the resonator for. After the light from the lamp 210 passes through the light transmission unit 124, after passing through the polarizing element 224 and the cold mirror 226 of the optical alignment case 220 is coupled to the lower portion of the horizontal frame 122 The alignment layer (not shown) of the liquid crystal display element substrate placed on the table 174 is reached.
광배향을 위한 램프(210)는 마이크로 UV 램프 이외에도 다양한 종류의 램프가 사용될 수 있음은 물론이다. Lamp 210 for the photo-alignment can be used a variety of lamps in addition to the micro UV lamp is a matter of course.
램프(210)는 액정표시소자 기판의 폭을 모두 커버할 수 있는 길이를 갖는 하나가 형성되거나 또는 그 길이에 비해 짧은 길이를 갖는 다수 개로 형성될 수 있다. 또한, 램프(210)는 수평프레임(122)의 내부에 1열로 배치되거나 또는 상호 평행하게 2열 이상으로 배치될 수 있다. The lamp 210 may be formed with one having a length capable of covering all the widths of the liquid crystal display substrate or a plurality of lamps having a shorter length than the length of the liquid crystal display device substrate. In addition, the lamps 210 may be arranged in one row or two or more rows in parallel with each other in the horizontal frame 122.
램프(210)에서 나온 빛은 반사경(212)에서 반사된 후 광투과부(124)로 향하게 된다. 반사경(212)은 램프(210)의 집광 효율을 높이기 위한 것으로, 램프(210)의 길이에 비해 다소 큰 길이를 갖는다. 또한, 반사경(212)은 그 단면이 포물선 형상을 가질 수 있다. Light emitted from the lamp 210 is reflected by the reflector 212 and then directed to the light transmission unit 124. The reflector 212 is to increase the light collecting efficiency of the lamp 210 and has a length slightly larger than that of the lamp 210. In addition, the reflecting mirror 212 may have a parabolic shape in cross section thereof.
수평프레임(122)의 하부에 배치되어 있는 한 쌍의 지지체(126)는 러빙롤러(190) 또는 광배향케이스(220)의 양단부와 결합하여 지지하는 역할을 한다. 러빙롤러(190)의 양단부에 형성된 결합구조와 광배향케이스(220)의 양단부에 형성된 결합구조는 동일하기 때문에, 지지체(126)는 러빙롤러(190) 또는 광배향케이스(220)와 용이하게 결합할 수 있게 된다. The pair of supports 126 disposed below the horizontal frame 122 serves to support the supporting rollers 190 or the both ends of the optical alignment case 220. Since the coupling structure formed at both ends of the rubbing roller 190 and the coupling structure formed at both ends of the optical alignment case 220 are the same, the support 126 is easily coupled with the rubbing roller 190 or the optical alignment case 220. You can do it.
수평프레임(122)의 내부에는 램프(210)를 냉각하기 위한 냉각장치(도시하지 않음)가 구비될 수 있다. A cooling device (not shown) for cooling the lamp 210 may be provided inside the horizontal frame 122.
지지체(126)는 수평 방향(화살표 표시)으로 일정 거리만큼 좌우로 이동이 가능하기 때문에, 테이블(174)에 놓여진 액정표시소자 기판에 대한 러빙롤러(190) 또는 광배향케이스(220)의 위치를 조정할 수 있다. 또한, 좌우 지지체(126) 중 하나에는 러빙롤러(190)에 회전력을 제공하기 위한 모터(도시하지 않음)가 구비될 수 있다. Since the support 126 can move left and right by a predetermined distance in the horizontal direction (arrow display), the position of the rubbing roller 190 or the optical alignment case 220 with respect to the liquid crystal display element substrate placed on the table 174 can be moved. I can adjust it. In addition, one of the left and right supports 126 may be provided with a motor (not shown) for providing a rotational force to the rubbing roller 190.
본 실시예에 따른 러빙 및 광배향 장치(100)는 램프(210)의 발광을 위한 마이크로파 생성기(180)를 포함한다. 마이크로파 생성기(180)에서 생성된 마이크로파는 도파관(182)을 통해서 갠트리(120)의 수평프레임(122)의 내부로 전달된 후 공진에 의해서 램프(210)의 발광을 유도한다. 마이크로파 생성기(180)는 러빙 및 광배향 장치(100)에서 일정 거리만큼 떨어진 곳에 위치할 수 있다.The rubbing and photoalignment device 100 according to the present embodiment includes a microwave generator 180 for emitting light of the lamp 210. The microwave generated by the microwave generator 180 is transmitted to the inside of the horizontal frame 122 of the gantry 120 through the waveguide 182 to induce light emission of the lamp 210 by resonance. The microwave generator 180 may be located at a distance from the rubbing and optical alignment device 100.
액정표시소자 기판에 대한 러빙 공정을 수행하기 위해서, 도 3에 예시된 러빙롤러(190)가 갠트리(120)의 지지체(126)에 결합한다. 러빙롤러(190)는 원통 형상의 원통부(192)와, 원통부(192)의 양 단부에 결합된 롤플랜지(194)와, 롤플랜지(194)에 결합된 스핀들(196)을 포함한다. In order to perform a rubbing process for the liquid crystal display device substrate, the rubbing roller 190 illustrated in FIG. 3 is coupled to the support 126 of the gantry 120. The rubbing roller 190 includes a cylindrical cylindrical portion 192, a roll flange 194 coupled to both ends of the cylindrical portion 192, and a spindle 196 coupled to the roll flange 194.
원통부(192)의 둘레에는 배향막을 문지르기 위한 러빙포(도시하지 않음)가 결합된다. 원통부(192)의 좌우 단부에는 지지체(126)와의 결합을 위한 롤플랜지(194)가 결합되어 있으며, 롤플랜지(194)의 중앙에는 지지체(126)와의 결합을 위한 스핀들(196)이 결합된다. 러빙롤러(190)의 양 단부의 결합구조에 해당하는 롤플랜지(194) 및 스핀들(196)은, 광배향케이스(220)의 양 단부의 결합구조와 동일할 수 있다. A rubbing cloth (not shown) for rubbing the alignment film is coupled around the cylindrical portion 192. The roll flange 194 for coupling with the support 126 is coupled to the left and right ends of the cylindrical portion 192, and the spindle 196 for coupling with the support 126 is coupled to the center of the roll flange 194. . The roll flange 194 and the spindle 196 corresponding to the coupling structure of both ends of the rubbing roller 190 may be the same as the coupling structure of both ends of the optical alignment case 220.
러빙롤러(190)를 결합하기 위해서, 좌우 지지체(126) 사이의 폭을 확대하도록 지지체(126)를 수평 이동한 후 러빙롤러(190)의 롤플랜지(194) 및 스핀들(196)을 지지체(126)에 결합한다. 이와 같이, 러빙롤러(190)를 갠트리(120)에 대해 결합한 후, 업다운수단(140)에 의해서 러빙롤러(190)와 액정표시소자 기판의 접촉압을 조정하고, 갠트리 회전수단(142)에 의해서 액정표시소자 기판과 러빙롤러(190)가 이루는 각도를 조정하며, 틸트조정수단(144)에 의해서 러빙롤러(190)의 틸트각을 조정한다. In order to couple the rubbing roller 190, the support 126 is horizontally moved to enlarge the width between the left and right supports 126, and then the roll flange 194 and the spindle 196 of the rubbing roller 190 are supported by the support 126. ) As described above, after the rubbing roller 190 is coupled to the gantry 120, the contact pressure between the rubbing roller 190 and the liquid crystal display device substrate is adjusted by the up-down means 140, and by the gantry rotating means 142. The angle between the liquid crystal display element substrate and the rubbing roller 190 is adjusted, and the tilt angle of the rubbing roller 190 is adjusted by the tilt adjusting means 144.
러빙롤러(190)의 액정표시소자 기판에 대한 접촉압, 각도 및 틸트각을 조정한 후, 스테이지 구동장치(160)가 작동하여 테이블(174)이 이동하면, 러빙롤러(190)는 액정표시소자 기판의 배향막과 접촉하면서 회전에 의해서 러빙 공정을 수행하게 된다. 또한, 러빙 공정 중에도 러빙롤러(190)의 액정표시소자 기판에 대한 접촉압, 각도 및 틸트각은 각각 조정될 수 있다. After adjusting the contact pressure, angle and tilt angle of the rubbing roller 190 with respect to the liquid crystal display device substrate, when the stage driving device 160 is operated to move the table 174, the rubbing roller 190 moves to the liquid crystal display device. The rubbing process is performed by rotation while contacting the alignment layer of the substrate. In addition, during the rubbing process, the contact pressure, angle, and tilt angle of the rubbing roller 190 with respect to the liquid crystal display element substrate may be adjusted.
러빙 공정을 수행한 후 광배향 이전에 배향막에 대한 전처리(pre-treatment)를 수행하여 배향 처리 효율을 향상할 수 있다. 전처리는 러빙롤러(190)에 의해 1차 배향처리된 배향막을 열풍 등에 의해 일정 온도로 가열하는 공정에 해당할 수 있다. 이와 같은 전처리 공정은 이후 광조사에 의한 광배향 공정시 배향막에 대한 조사광의 반응성을 향상할 수 있고 작은 유효 에너지(effective energy)에서도 효과적인 배향 처리를 실시할 수 있게 한다. After the rubbing process is performed, the pretreatment of the alignment layer may be performed before photoalignment to improve the alignment treatment efficiency. The pretreatment may correspond to a process of heating the alignment film subjected to the primary alignment treatment by the rubbing roller 190 to a predetermined temperature by hot air or the like. Such a pretreatment process can improve the responsiveness of the irradiation light to the alignment layer during the photo-alignment process by light irradiation, and can perform an effective alignment treatment even at a small effective energy.
본 실시예에 따른 러빙 및 광배향 장치(100)는 1차 러빙 공정 및 전처리 후 2차 광배향을 수행할 수 있지만, 러빙롤러(190)에 의한 러빙 공정 또는 광배향 중 어느 하나만을 수행할 수 있음은 물론이다.The rubbing and photoalignment device 100 according to the present embodiment may perform the second photoalignment after the first rubbing process and pretreatment, but may perform only one of the rubbing process or the photoalignment by the rubbing roller 190. Of course.
액정표시소자 기판에 대해서 광배향을 수행하기 위해서, 갠트리(120)에 러빙롤러(190)를 제거한 후 광배향케이스(220)를 결합한다. 광배향케이스(220)의 좌우 양측면에는 스핀들(222) 및 롤플랜지(223)가 구비되어 있는데, 이는 러빙롤러(190)의 좌우 측면에 구비된 스핀들(196) 및 롤플랜지(194)와 동일한 구조를 갖는다. 따라서 러빙롤러(190)를 분리한 후 별다른 어려움 없이 광배향케이스(220)를 지지체(126)에 결합할 수 있게 된다.In order to perform optical alignment with respect to the liquid crystal display device substrate, the rubbing roller 190 is removed from the gantry 120 and then the optical alignment case 220 is coupled. The left and right sides of the optical alignment case 220 is provided with a spindle 222 and a roll flange 223, which is the same structure as the spindle 196 and the roll flange 194 provided on the left and right sides of the rubbing roller 190. Has Therefore, after separating the rubbing roller 190, it is possible to couple the optical orientation case 220 to the support 126 without any difficulty.
광배향케이스(220)의 내부에는 편광소자(224) 및 콜드미러(226)가 구비되어 있다. The polarization element 224 and the cold mirror 226 are provided inside the optical alignment case 220.
편광소자(224)는 램프(210)에서 나온 빛을 일정한 방향으로 편광하는 것으로, 와이어 그리드(wire grid)에 해당할 수 있다. 편광소자(224)에 의해 생성된 편광빛은 광배향막에 도달하여 광배향막을 편광방향과 수직 방향을 갖도록 정렬한다. 그리고 편광소자(224)는 그 편광 방향을 변경할 수 있다. The polarizer 224 polarizes the light emitted from the lamp 210 in a predetermined direction and may correspond to a wire grid. The polarized light generated by the polarizer 224 reaches the optical alignment layer and aligns the optical alignment layer to have a direction perpendicular to the polarization direction. The polarizer 224 may change the polarization direction.
콜드미러(226)는 램프(210)에서 나온 빛 중에서 온도 상승을 유발하는 적외선 등을 필터링 하여, 광배향케이스(220) 및 테이블(174) 등의 온도 상승을 억제하는 역할을 한다.The cold mirror 226 filters out infrared rays, which cause a temperature increase, from the light emitted from the lamp 210, and serves to suppress temperature rise of the optical alignment case 220 and the table 174.
광배향케이스(220)는, 러빙롤러(190)에 의한 러빙 공정 후 발생하는 이물질(particle)을 제거하는 클리닝(cleaning) 기능을 구비할 수 있다. 또한, 광배향케이스(220)는, 러빙 공정 후 발생하는 정전기를 제거할 수 있는 장치를 추가로 구비할 수도 있다. The optical alignment case 220 may include a cleaning function for removing foreign particles generated after the rubbing process by the rubbing roller 190. In addition, the optical alignment case 220 may further include a device that can remove the static electricity generated after the rubbing process.
도 5는 갠트리(120)에 광배향케이스(220)가 결합된 상태를 예시하는 도면이다. 5 is a view illustrating a state in which the optical alignment case 220 is coupled to the gantry 120.
도 5를 참조하면, 광배향을 수행하기 위해서 러빙롤러(190)를 갠트리(120)에서 제거한 후, 광배향케이스(220)를 지지체(126)에 결합한다. 광배향케이스(220)는 갠트리(120)의 하부에 밀착되도록 결합될 수 있는데, 이로 인해, 램프(210)에서 발생한 UV 빛이 외부로 유출되지 않고 광배향케이스(220)로 모두 입사할 수 있게 된다. Referring to FIG. 5, after the rubbing roller 190 is removed from the gantry 120 to perform optical alignment, the optical alignment case 220 is coupled to the support 126. The optical alignment case 220 may be coupled to be in close contact with the lower portion of the gantry 120, and thus, the UV light generated from the lamp 210 may enter the optical alignment case 220 without being leaked to the outside. do.
그리고 마이크로파 생성기(180)의 작동에 의해 마이크로파를 생성시켜서 램프(210)로부터 UV가 발광되게 한다. 램프(210)에서 나온 UV 빛은, 갠트리(120)의 광투과부(124)를 투과하고 광배향케이스(220)의 편광소자(224) 및 콜드미러(226)를 각각 투과한 후 배향막에 도달하여 광배향을 수행한다. And by the operation of the microwave generator 180 to generate a microwave so that the UV light from the lamp 210. The UV light emitted from the lamp 210 passes through the light transmitting part 124 of the gantry 120, passes through the polarizing element 224 and the cold mirror 226 of the optical alignment case 220, and reaches the alignment layer. Perform photoalignment.
본 실시예에 따른 러빙 및 광배향 장치(100)는 하나의 갠트리(120)를 구비하여 러빙롤러(190) 또는 광배향케이스(220)를 선택적으로 결합하는 것으로 예시하였지만, 다른 실시예에 따른 러빙 및 광배향 장치는 두 개의 갠트리를 구비하여 러빙롤러(190) 및 광배향케이스(220)를 선택적으로 결합할 수 있다. 이때, 두 개의 갠트리 모두에는 러빙롤러(190)만 결합되거나 또는 광배향케이스(220)만 결합될 수 있다. Although the rubbing and optical alignment device 100 according to the present embodiment has been illustrated as selectively combining the rubbing roller 190 or the optical alignment case 220 with one gantry 120, the rubbing according to another embodiment. And the optical alignment device may be provided with two gantry to selectively combine the rubbing roller 190 and the optical alignment case 220. In this case, only the rubbing roller 190 may be coupled to both gantry, or only the optical alignment case 220 may be coupled.
이하에서는 도 6을 참조하면서 본 발명의 제2 실시예에 따른 러빙 및 광배향 장치의 광배향모듈(300)에 대해서 설명하기로 한다.Hereinafter, the optical alignment module 300 of the rubbing and optical alignment device according to the second embodiment of the present invention will be described with reference to FIG. 6.
도 6은 본 발명의 제2 실시예에 따른 러빙 및 광배향 장치의 광배향모듈(300)을 예시하는 사시도이다.6 is a perspective view illustrating an optical alignment module 300 of the rubbing and optical alignment device according to the second embodiment of the present invention.
도 6을 참조하면, 본 실시예에 따른 러빙 및 광배향 장치는 광배향모듈(300)을 포함하는 것을 특징으로 한다. 광배향모듈(300)에는 반사경(324), 램프(326), 편광소자(328) 및 콜드미러(332)가 구비되어 있다. 또한, 광배향모듈(300)은 광배향을 위해서 갠트리의 외부에 선택적으로 결합할 수 있는데, 이때 갠트리의 내부에는 램프가 구비되어 있지 않다. 따라서 본 실시예에 따른 러빙 및 광배향 장치는, 제1 실시예에 따른 러빙 및 광배향 장치(100)의 구성과 동일하고 다만, 반사경(324) 및 램프(326)가 갠트리의 내부에 위치하지 않고 광배향모듈(300)의 내부에 구비되어 있다는 점에 차이점이 있다. Referring to FIG. 6, the rubbing and optical alignment device according to the present embodiment includes an optical alignment module 300. The optical alignment module 300 includes a reflector 324, a lamp 326, a polarizer 328, and a cold mirror 332. In addition, the optical alignment module 300 may be selectively coupled to the outside of the gantry for optical alignment, in which the lamp is not provided inside the gantry. Therefore, the rubbing and photoalignment device according to the present embodiment is the same as the rubbing and photoalignment device 100 according to the first embodiment, except that the reflector 324 and the lamp 326 are not located inside the gantry. There is a difference in that the optical alignment module 300 is provided inside.
광배향모듈(300)은 케이스(320), 반사경(324), 램프(326), 편광소자(328) 및 콜드미러(332)를 포함한다. 광배향모듈(300)은 광배향을 위해서 갠트리에 결합될 수 있다. The optical alignment module 300 includes a case 320, a reflector 324, a lamp 326, a polarizer 328, and a cold mirror 332. The optical alignment module 300 may be coupled to the gantry for optical alignment.
케이스(320)는 광배향모듈(300)의 외체를 형성하는 것으로, 그 내부에는 반사경(324), 램프(326), 편광소자(328) 및 콜드미러(332)가 위치한다. 케이스(320)는 마이크로파에 대한 공진기 구조를 가져서, 마이크로파 생성기(180)에서 생성된 마이크로파가 전달되어 그 내부에서 공진된다. 케이스(320) 내부에서 공진되는 마이크로파에 의해서 램프(326)에서 UV 빛이 유도된다. The case 320 forms an outer body of the optical alignment module 300, and a reflecting mirror 324, a lamp 326, a polarizer 328, and a cold mirror 332 are located therein. The case 320 has a resonator structure for microwaves, so that microwaves generated by the microwave generator 180 are transmitted and resonate therein. UV light is induced in the lamp 326 by microwaves resonating inside the case 320.
케이스(320)의 좌우 측면에는 스핀들(322) 및 롤플랜지(333)가 구비되어 있다. 스핀들(322) 및 롤플랜지(333)는 러빙롤러(190)의 스핀들(196) 및 롤플랜지(194)와 동일한 구조를 갖는다. 이로 인해, 광배향모듈(300)은 러빙롤러(190)가 결합하는 지지체(126)에 용이하게 결합될 수 있다. The spindle 322 and the roll flange 333 are provided on the left and right sides of the case 320. The spindle 322 and the roll flange 333 have the same structure as the spindle 196 and the roll flange 194 of the rubbing roller 190. Thus, the optical alignment module 300 may be easily coupled to the support 126 to which the rubbing roller 190 is coupled.
케이스(320)의 내부에 구비되어 있는 반사경(324), 램프(326), 편광소자(328) 및 콜드미러(332)는, 제1 실시예에 따른 러빙 및 광배향 장치(100)의 반사경(212), 램프(210), 편광소자(224) 및 콜드미러(226)과 동일하기 때문에 구체적인 설명은 생략하기로 한다. The reflector 324, the lamp 326, the polarizer 328, and the cold mirror 332 provided in the case 320 may include the reflector of the rubbing and optical alignment device 100 according to the first embodiment. 212), the lamp 210, the polarizer 224, and the cold mirror 226 are the same as detailed descriptions thereof will be omitted.
본 실시예에 따른 러빙 및 광배향 장치는 갠트리에 결합하는 광배향모듈(300)이 램프(326)를 구비하기 때문에, 갠트리의 수평프레임(122)의 내부 공간에 마이크로파 생성기(180) 및 냉각장치(도시하지 않음) 등을 수납할 수 있다. 그리고 광배향모듈(300)의 케이스(320)는 마이크로파의 외부 유출을 방지할 수 있는 구조(예를 들면, 메쉬(mesh) 구조)를 가질 수 있다. 또한, 광배향모듈(300)은 러빙 공정 수행 후 발생한 이물질(particle)을 제거할 수 있는 기능과 정전기를 제거할 수 있는 기능을 추가로 포함할 수 있다. In the rubbing and optical alignment device according to the present embodiment, since the optical alignment module 300 coupled to the gantry includes a lamp 326, the microwave generator 180 and the cooling device in the internal space of the horizontal frame 122 of the gantry. (Not shown) and the like can be stored. In addition, the case 320 of the optical alignment module 300 may have a structure (eg, a mesh structure) that can prevent the outflow of microwaves. In addition, the optical alignment module 300 may further include a function capable of removing foreign particles generated after the rubbing process and a function capable of removing static electricity.
이하에서는 도 7을 참조하면서 본 발명의 제3 실시예에 따른 러빙 및 광배향 장치에 대해서 설명하기로 한다. Hereinafter, the rubbing and optical alignment device according to the third embodiment of the present invention will be described with reference to FIG. 7.
도 7은 본 발명의 제3 실시예에 따른 러빙 및 광배향 장치의 갠트리(400)를 예시하는 도면이다.7 illustrates a gantry 400 of a rubbing and photoalignment device according to a third embodiment of the present invention.
도 7을 참조하면, 본 실시예에 따른 러빙 및 광배향 장치의 갠트리(400)는 그 수평프레임(420)의 내부에 램프(430), 편광소자(436) 및 콜드미러(438)가 구비되어 있다는 점에 특징이 있다. 따라서 본 실시예에 따른 러빙 및 광배향 장치는, 광배향을 위해서 도 4에 예시된 광배향케이스(220)를 결합할 필요 없이 갠트리(400)의 외부에 결합된 러빙롤러(190)만 제거하면 된다. Referring to FIG. 7, the gantry 400 of the rubbing and optical alignment device according to the present embodiment includes a lamp 430, a polarizer 436, and a cold mirror 438 inside the horizontal frame 420. It is characteristic in that it exists. Therefore, the rubbing and photoalignment apparatus according to the present embodiment only needs to remove the rubbing roller 190 coupled to the outside of the gantry 400 without having to combine the photoalignment case 220 illustrated in FIG. 4 for photoalignment. do.
수평프레임(420)은 내부공간(424)을 갖는데, 내부공간(424)에는 반사경(432), 램프(430), 편광소자(436) 및 콜드미러(438)가 위치한다. 그리고 수평프레임(420)은 램프(430)에서 나온 빛이 투과할 수 있는 광투과부(422)를 구비한다. 또한, 수평프레임(420)의 하면에는 러빙롤러(190)의 결합을 위한 한 쌍의 지지체(426)가 구비되어 있다. The horizontal frame 420 has an inner space 424, which includes a reflector 432, a lamp 430, a polarizer 436, and a cold mirror 438. In addition, the horizontal frame 420 includes a light transmission part 422 through which the light from the lamp 430 can pass. In addition, the lower surface of the horizontal frame 420 is provided with a pair of supports 426 for the coupling of the rubbing roller 190.
지지체(426)에는 러빙을 위한 러빙롤러(190)만 결합된다. Only the rubbing roller 190 for rubbing is coupled to the support 426.
본 실시예에 따른 러빙 및 광배향 장치의 갠트리(400) 내부에 구비되어 있는 램프(430), 반사경(432), 편광소자(436) 및 콜드미러(438)는, 제1 실시예에 따른 러빙 및 광배향 장치의 램프(210), 반사경(212), 편광소자(224) 및 콜드미러(226)와 동일하기 때문에 구체적인 설명은 생략하기로 한다. The lamp 430, the reflector 432, the polarizer 436, and the cold mirror 438 provided in the gantry 400 of the rubbing and optical alignment device according to the present embodiment are rubbing according to the first embodiment. And since it is the same as the lamp 210, the reflector 212, the polarizing element 224 and the cold mirror 226 of the optical alignment device, a detailed description thereof will be omitted.
상기에서는 본 발명의 일 실시예를 참조하여 설명하였지만, 해당 기술 분야에서 통상의 지식을 가진 자라면 하기의 특허 청구의 범위에 기재된 본 발명의 사상 및 영역으로부터 벗어나지 않는 범위 내에서 본 발명을 다양하게 수정 및 변경시킬 수 있음을 이해할 수 있을 것이다.Although the above has been described with reference to an embodiment of the present invention, those skilled in the art may vary the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. It will be appreciated that modifications and variations can be made.

Claims (9)

  1. 액정표시소자 기판이 놓여지는 테이블 상에 위치하는 갠트리;A gantry positioned on a table on which the liquid crystal display substrate is placed;
    상기 갠트리의 내부에 위치하면서 광배향을 위한 빛을 생성하는 램프; 및A lamp positioned inside the gantry to generate light for photoalignment; And
    상기 갠트리의 외부에 결합되어 상기 램프에서 나온 빛의 특성을 변경하는 광배향케이스를 포함하고,It is coupled to the outside of the gantry includes an optical alignment case for changing the characteristics of the light emitted from the lamp,
    상기 갠트리는 러빙롤러 또는 상기 광배향케이스와 선택적으로 결합할 수 있는 러빙 및 광배향 장치.The gantry is a rubbing and optical alignment device that can be selectively coupled with the rubbing roller or the optical alignment case.
  2. 제1항에 있어서,The method of claim 1,
    상기 갠트리는 수평프레임을 구비하고, 상기 램프는 상기 수평프레임의 내부에 위치하며,The gantry has a horizontal frame, the lamp is located inside the horizontal frame,
    상기 수평프레임은 지지체를 구비하고, 상기 지지체에는 상기 러빙롤러 및 광배향케이스가 결합되는 것을 특징으로 하는 러빙 및 광배향 장치.The horizontal frame is provided with a support, the rubbing roller and the optical alignment device, characterized in that the rubbing roller and the optical orientation case is coupled.
  3. 제2항에 있어서,The method of claim 2,
    상기 러빙롤러 및 광배향케이스는 상기 지지체에 대해서 동일한 결합구조를 구비하는 것을 특징으로 하는 러빙 및 광배향 장치.The rubbing roller and the photo-alignment case is a rubbing and photo-alignment device characterized in that it has the same coupling structure with respect to the support.
  4. 제1항에 있어서,The method of claim 1,
    상기 광배향케이스는 편광소자 및 콜드미러를 포함하는 것을 특징으로 하는 러빙 및 광배향 장치.The photoalignment case is a rubbing and optical alignment device, characterized in that it comprises a polarizing element and a cold mirror.
  5. 액정표시소자 기판이 놓여지는 테이블 상에 위치하는 갠트리; 및A gantry positioned on a table on which the liquid crystal display substrate is placed; And
    상기 갠트리의 외부에 결합되는 광배향모듈을 포함하고,It includes an optical alignment module coupled to the outside of the gantry,
    상기 광배향모듈은 그 내부에 광배향을 위한 빛을 생성하는 램프를 구비하며, The optical alignment module includes a lamp for generating light for optical alignment therein,
    상기 갠트리는 상기 광배향모듈 또는 러빙롤러와 선택적으로 결합할 수 있는 러빙 및 광배향 장치.The gantry is a rubbing and optical alignment device that can be selectively coupled with the optical alignment module or rubbing roller.
  6. 제5항에 있어서,The method of claim 5,
    상기 갠트리는 상기 러빙롤러 및 광배향모듈과 결합하는 지지체를 구비하고,The gantry has a support coupled to the rubbing roller and the optical alignment module,
    상기 러빙롤러 및 광배향모듈은 상기 지지체에 대해서 동일한 결합구조를 구비하는 것을 특징으로 하는 러빙 및 광배향 장치.And the rubbing roller and the optical alignment module have the same coupling structure with respect to the support.
  7. 제5항에 있어서,The method of claim 5,
    상기 광배향모듈은 편광소자 및 콜드미러를 구비하는 것을 특징으로 하는 러빙 및 광배향 장치.The optical alignment module rubbing and optical alignment device characterized in that it comprises a polarizing element and a cold mirror.
  8. 액정표시소자 기판이 놓여지는 테이블 상에 위치하는 갠트리를 포함하고,A gantry positioned on a table on which the liquid crystal display substrate is placed,
    상기 갠트리 내부에는 광배향을 위한 램프 및 편광소자가 구비되어 있으며,The gantry is provided with a lamp and a polarizing element for optical alignment,
    상기 갠트리는 러빙롤러와 결합 및 분리할 수 있는 러빙 및 광배향 장치.The gantry is a rubbing and optical alignment device that can be coupled to and separated from the rubbing roller.
  9. 제8항에 있어서,The method of claim 8,
    상기 갠트리는 상기 램프 및 편광소자가 위치하는 수평프레임을 구비하고,The gantry has a horizontal frame in which the lamp and the polarizer is located,
    상기 수평프레임에는 러빙롤러가 결합되는 지지체가 구비되어 있는 것을 특징으로 하는 러빙 및 광배향 장치.The rubbing and optical alignment device, characterized in that the horizontal frame is provided with a support to which the rubbing roller is coupled.
PCT/KR2013/012359 2013-01-15 2013-12-30 Rubbing and photo-aligning device WO2014112731A1 (en)

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KR101393460B1 (en) 2014-05-12

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