WO2014083605A1 - Substrate printing device - Google Patents

Substrate printing device Download PDF

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Publication number
WO2014083605A1
WO2014083605A1 PCT/JP2012/080579 JP2012080579W WO2014083605A1 WO 2014083605 A1 WO2014083605 A1 WO 2014083605A1 JP 2012080579 W JP2012080579 W JP 2012080579W WO 2014083605 A1 WO2014083605 A1 WO 2014083605A1
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WO
WIPO (PCT)
Prior art keywords
substrate
individual
positioning
positioning plate
pallet
Prior art date
Application number
PCT/JP2012/080579
Other languages
French (fr)
Japanese (ja)
Inventor
毅 近藤
Original Assignee
富士機械製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士機械製造株式会社 filed Critical 富士機械製造株式会社
Priority to JP2014549658A priority Critical patent/JP6120453B2/en
Priority to PCT/JP2012/080579 priority patent/WO2014083605A1/en
Publication of WO2014083605A1 publication Critical patent/WO2014083605A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0008Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0147Carriers and holders
    • H05K2203/0165Holder for holding a Printed Circuit Board [PCB] during processing, e.g. during screen printing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing

Definitions

  • the present invention relates to a substrate printing apparatus that collectively prints a predetermined pattern on a plurality of individual substrates.
  • Patent Document 1 Japanese Patent Laid-Open No. 2009-135215. This is arranged below a conveyor for carrying a pallet on which individual substrates are placed in a plurality of substrate placement spaces to a work position and each substrate placement space of the pallet carried to the work position.
  • a plurality of suction units and a plurality of rectangular positioning holes which are arranged above the pallet loaded into the work position and are used to loosely insert and position the plurality of individual substrates placed on the pallet.
  • a dedicated drive mechanism for positioning that moves in a substantially diagonal direction.
  • the suction unit holder is lifted and the individual substrates are held in the state in which the individual substrates are sucked by the suction units through openings formed in the substrate mounting spaces of the pallet.
  • the individual board is loosely inserted into the positioning holes and stopped in a state where the height of the upper surface of each individual board matches the height of the upper surface of the board positioning plate.
  • the positioning drive mechanism is operated to move the suction unit holder in a substantially diagonal direction of the individual substrates, thereby moving the individual substrates in the positioning holes in a substantially diagonal direction.
  • Positioning is performed by bringing the two sides of each individual substrate into contact with the two sides of the positioning hole.
  • Patent Document 1 it is necessary to newly provide a positioning-dedicated drive mechanism that moves each individual substrate in each positioning hole in a substantially diagonal direction when positioning a plurality of individual substrates placed on the pallet. There was a disadvantage that the cost increased accordingly. In addition, since the printing apparatus is dedicated to the individual substrate, it cannot be used for printing one circuit board at a time, and the versatility is inferior.
  • the problem to be solved by the present invention is that there is no need to newly provide a drive mechanism dedicated to positioning of individual substrates, and moreover, batch printing of a plurality of individual substrates and normal printing of each circuit substrate. It is an object of the present invention to provide a substrate printing apparatus that can cope with both of the above, and can realize cost reduction and versatility improvement.
  • the present invention is to carry a pallet on which a plurality of individual substrates are placed to a work position below a printing mask by a conveyor, position the plurality of individual substrates, and to each individual substrate.
  • the substrate printing apparatus that collectively prints a predetermined pattern, the substrate is placed below each substrate placement space of the pallet carried into the work position, and the opening is formed in each substrate placement space.
  • a plurality of suction nozzles for sucking individual substrates in each substrate mounting space and a plurality of individual substrates placed on the pallet and placed above the pallet carried to the work position are loosely inserted and positioned.
  • a substrate positioning plate having a plurality of rectangular positioning holes, an elevating mechanism that integrally lifts and lowers the plurality of suction nozzles, and the plurality of suction nozzles
  • An XY movement mechanism that moves in the X direction and the Y direction integrally with the lowering mechanism, and a control unit that controls the elevating mechanism and the XY movement mechanism. Operate the lifting mechanism to raise the plurality of suction nozzles so that the individual substrates are sucked by the suction nozzles through the openings formed in the substrate mounting spaces of the pallet.
  • each piece substrate in each positioning hole is operated by operating the XY moving mechanism to move each suction nozzle in an oblique direction with respect to each positioning hole. It is characterized in that the control to position by abutting two sides of the respective pieces substrate is moved to the two sides of each of the positioning holes in the oblique direction.
  • an XY moving mechanism is used as means for moving each individual substrate in an oblique direction with respect to each positioning hole. There is no need to newly provide a drive mechanism.
  • a pallet on which a plurality of individual substrates are placed instead of a pallet on which a plurality of individual substrates are placed, if a large circuit board is put into a conveyor one by one, a normal circuit board can be printed one by one. It is possible to cope with both batch printing and ordinary printing of circuit boards one by one, and it is possible to realize cost reduction and improved versatility.
  • a plurality of suction nozzles may be supported by the nozzle support base so as to be rotatable and displaceable in the X and Y directions, respectively, and may be biased by the biasing means toward the center of the nozzle support base.
  • the two sides of each individual substrate are surely brought into contact with the two sides of each positioning hole.
  • the amount of deviation of each individual substrate in the X, Y, and ⁇ directions can be corrected with high accuracy.
  • the present invention provides a plate table for placing the substrate positioning plate in a state of being restrained so as not to move in the X and Y directions, and a plate suction that is lifted and lowered by the lifting mechanism while the substrate positioning plate is sucked.
  • a camera that images the recognition mark on the upper surface of the substrate positioning plate or the recognition mark on the individual substrate and the recognition mark on the lower surface of the printing mask, and after the positioning operation of each individual substrate is completed, The captured image is processed to measure the amount of displacement of the substrate positioning plate with respect to the printing mask, and the substrate positioning plate is sucked by the plate suction portion and lifted from the plate table by the lifting mechanism to be detached.
  • the serial respective pieces substrate may be to print at once a predetermined pattern. In this way, it is possible to accurately print a predetermined pattern on each individual substrate by correcting the displacement of the substrate positioning plate with respect to the print mask.
  • At least one of the X axis and the Y axis of the XY moving mechanism is configured as two axes, and the two axes are driven in opposite directions to correct the deviation of the substrate positioning plate in the ⁇ direction.
  • the XY movement mechanism also functions as a ⁇ rotation mechanism, and the XY movement mechanism can correct not only the displacement of the substrate positioning plate in the X and Y directions but also the displacement in the ⁇ direction.
  • FIG. 1 is a plan view of a substrate printing apparatus according to an embodiment of the present invention.
  • FIG. 2 is a right side view of the substrate printing apparatus.
  • FIG. 3 is a view corresponding to FIG. 2 for explaining the positioning operation of a plurality of individual substrates placed on the pallet.
  • FIGS. 4A and 4B are plan views for explaining the operation of positioning the individual substrate by loosely inserting it into the positioning hole of the substrate positioning plate.
  • FIG. 4 is a right side view for explaining the operation for loosely positioning the individual substrate into the positioning hole of the substrate positioning plate.
  • FIG. 6 is a perspective view for explaining the arrangement of a plurality of suction nozzles.
  • FIG. 7 is an enlarged perspective view of the suction nozzle.
  • FIG. 8 is a plan view when a normal size circuit board is printed one by one using the substrate printing apparatus.
  • the pallet 12 (see FIG. 2) on which the plurality of individual substrates 11 are placed is carried into a work position below the printing mask 65 (see FIG. 5) by the conveyors 13 and 14.
  • the conveyors 13 and 14 are provided in parallel to the upper part of the fixed side plate 15 and the upper part of the movable side plate 16.
  • a feed screw mechanism (not shown) or the like according to the width dimension of the pallet 12 to be carried in
  • the fixed side By adjusting the distance between the plate 15 and the movable side plate 16, the width between the conveyors 13 and 14 that convey the pallet 12 is adjusted.
  • a plurality of rectangular recess-shaped substrate placement spaces 17 for storing a plurality of individual substrates 11 one by one are formed at a predetermined arrangement pitch.
  • the clearance between the outer peripheral edges of the single substrates 11 is set in consideration of the fitting workability of the individual substrates 11 and the manufacturing variations of the external dimensions of the individual substrates 11 (that is, the most within the manufacturing variation range). The clearance necessary for fitting the large-sized individual substrate 11 is secured).
  • An opening 18 is formed at the bottom of each substrate placement space 17, and the individual substrate 11 in the substrate placement space 17 is picked up by a suction nozzle 20, which will be described later, through this opening 18 and lifted. ing.
  • the pallet 12 is prepared in advance with a plurality of types of pallets 12 having different sizes of the substrate placement space 17, and the pallet 12 having the substrate placement space 17 having a size corresponding to the size of the individual substrate 11 to be printed. Is used.
  • suction nozzles 20 for suctioning the individual substrates 11 with air suction force (vacuum) are arranged.
  • the lifting table 21 that supports the plurality of suction nozzles 20 is moved in the vertical direction (Z direction) by a lifting mechanism (not shown), and is moved by the XY moving mechanism 22 in the X direction (the conveying direction of the pallet 12). It is configured to move in the Y direction, which is a perpendicular direction.
  • the XY moving mechanism 22 includes one X-axis feed screw mechanism 23 and two Y-axis feed screw mechanisms 24 and 25 (see FIG. 1), and the two Y-axis feed screw mechanisms 24 and 25 are reverse to each other. , It also functions as a ⁇ rotation mechanism that rotates the lift table 21 in the ⁇ direction (horizontal rotation direction), and is configured to correct the deviation of the lift table 21 in the ⁇ direction.
  • the elevating table 21 is supported by the X-axis feed screw mechanism 23 and the Y-axis feed screw mechanisms 24, 25 so as to be rotatable in the ⁇ direction (horizontally rotatable) via shafts 26, 27, 28 (see FIG. 1), respectively. Yes.
  • each suction nozzle 20 is detachably mounted on the lifting table 21 via a stepped cylindrical nozzle support base 31.
  • the nozzle support base 31 is attracted and held on the upper surface of the elevating table 21 formed of a magnetic material such as an iron plate by the magnetic force of the magnet 32 fixed to the lower end thereof.
  • a nozzle positioning plate 34 in which a plurality of positioning holes 33 for positioning a plurality of nozzle support bases 31 is formed is placed on the elevating table 21, and each nozzle is supported in each positioning hole 33 of the nozzle positioning plate 34.
  • the nozzle support bases 31 are positioned by fitting the lower ends of the bases 31.
  • a plurality of nozzle positioning plates 34 having different numbers of positioning holes 33 and different arrangement pitches are prepared in advance according to the number and arrangement pitch of the suction nozzles 20 to be mounted on the lifting table 21, and the substrate of the pallet 12 to be carried in A plurality of suction nozzles 20 may be mounted on the lifting table 21 by selecting the nozzle positioning plates 34 corresponding to the number of placement spaces 17 and the arrangement pitch.
  • a plurality of types of suction nozzles 20 having different outer diameter dimensions of the nozzle support base 31 are prepared, a nozzle in which a positioning hole 33 having an inner diameter dimension corresponding to the outer diameter dimension of the nozzle support base 31 to be used is formed.
  • a positioning plate 34 may be used.
  • Each suction nozzle 20 is supported by a nozzle support base 31 so as to be rotatable in the ⁇ direction (horizontal direction) and displaceable in the X and Y directions.
  • a flange portion 35 is formed on the outer peripheral portion of a thick cylindrical nozzle body 20a formed on the lower side of the suction nozzle 20, and the flange portion 35 is sandwiched by a plurality of hard balls 36 from both upper and lower sides.
  • the rigid sphere 36 is sandwiched between two ring-shaped ball receiving plates 37 and 38.
  • the lower ball receiving plate 38 is fixed to the upper surface portion of the nozzle support base 31, and a ring-shaped elastic body 40 is interposed between the cover 39 attached to the upper portion of the nozzle support base 31 and the upper ball receiving plate 37.
  • the upper ball receiving plate 37 is pressed against the hard sphere 36 by the elastic force of the elastic body 40.
  • the flange portion 35 of the suction nozzle 20 is sandwiched and supported between the plurality of rigid spheres 36 supported between the two ball receiving plates 37 and 38, and the rotational force in the ⁇ direction acting on the suction nozzle 20 is supported.
  • Each of the hard spheres 36 rolls according to the external force in the X and Y directions, so that the suction nozzle 20 can be rotated in the ⁇ direction and displaced in the X and Y directions.
  • the ball receiving plates 37 and 38 are made of a metal-based plain bearing material such as a hardened metal in order to reduce wear on the surface on which the hard ball 36 rolls.
  • a plurality of magnets 43 are fixed to a lower end portion of the nozzle body 20 a of the suction nozzle 20 at a predetermined pitch (for example, 120 ° pitch), and a plurality of magnets 44 are provided to the upper end portion of the nozzle support base 31.
  • the magnet 43 is fixed so as to face the magnet 43.
  • the magnets 43 and 44 function as a biasing unit that biases the suction nozzle 20 toward the center of the nozzle support base 31 by a magnetic attractive force acting between the magnets 43 and 44, and in a state where no external force acts on the suction nozzle 20, the magnet 43. , 44 is configured so that the suction nozzle 20 is held at the center position of the nozzle support base 31 by a magnetic attraction force acting between them.
  • a urethane tube 46 is bonded and fixed to the inner diameter portion of the nozzle body 20a of the suction nozzle 20 in a state of protruding downward, and a rubber packing 47 (seal member) is attached to the urethane tube 46 protruding downward from the nozzle body 20a.
  • the nozzle support base 31 is provided with a joint 49 for connecting a negative pressure introduction hose (not shown), and the joint 49 communicates with the negative pressure introduction space 48 in the nozzle support base 31.
  • the negative pressure supplied through the negative pressure introduction hose is introduced from the joint 49 into the negative pressure introduction space 48 in the nozzle support base 31, and the air in the suction nozzle 20 is introduced into the negative pressure introduction space 48 by the negative pressure.
  • the negative pressure introducing hose is connected to a negative pressure generating source (not shown) via a solenoid valve (not shown), and switching between the solenoid valves causes a negative pressure introduction (suction) and an atmosphere release (suction release). Switching is performed.
  • a nozzle removal auxiliary plate 51 is attached to one side of the outer peripheral portion of the nozzle support base 31 with a screw 52 or the like, and the lower end of the nozzle removal auxiliary plate 51 is in a state of approaching the nozzle positioning plate 34.
  • the attachment of the plurality of suction nozzles 20 on the lift table 21 is the magnetic force of the magnet 32, the plurality of suction nozzles 20 can be removed.
  • the nozzle positioning plate 34 is lifted directly above the lifting table 21, so that the nozzle positioning plate 34 has a lower end of the nozzle removal auxiliary plate 51.
  • a substrate positioning plate 55 is disposed above the pallet 12 carried into the work position.
  • the substrate positioning plate 55 is formed with a plurality of rectangular positioning holes 56 for loosely inserting and positioning the plurality of individual substrates 11 placed on the pallet 12.
  • free insertion means that a gap is formed between the outer peripheral edge of the individual substrate 11 and the inner peripheral edge of the positioning hole 56 in a state in which the individual substrate 11 is fitted into the positioning hole 56 (inserted state). It can be done.
  • the substrate positioning plate 55 is mounted on the mounting table 57 installed at the four corners of the work position, and fixed to the upper surface of each mounting table 57 with the fixing pins 58 fixed upward. By inserting the fitting hole 59 formed in the corner portion, the substrate positioning plate 55 is placed on the placement table 57 in a restrained state so as not to move in the X, Y, and ⁇ directions. Note that, instead of the fixing pin 58, an adsorption hole or a magnet may be provided on the upper surface of each mounting table 57, and the substrate positioning plate 55 may be adsorbed and fixed by a negative pressure attractive force or a magnetic force.
  • suction blocks 61 and 62 plate suction portions for sucking and holding the substrate positioning plate 55 from the lower surface side are provided on the upper end surfaces of the fixed side plate 15 and the movable side plate 16, respectively.
  • the substrate positioning plate 55 is lifted from the mounting table 57 and the positional displacement of the substrate positioning plate 55 in the X, Y, and ⁇ directions is corrected, the substrate positioning plate 55 is sucked and held by the suction blocks 61 and 62. It is supposed to be.
  • the side plates 15 and 16 (each suction block 61 and 62) are moved up and down (Z direction) by an elevating mechanism (not shown) separately from the elevating table 21, and X is moved by the XY moving mechanism 22.
  • the side plates 15 and 16 (each suction block 61 and 62) and the lifting table 21 (suction nozzle 20) are configured so that they both move up and down separately and move together in the X, Y, and ⁇ directions. Has been.
  • a printing mask 65 (screen mask) is horizontally installed above the substrate positioning plate 55, and a squeegee 66 is arranged above the printing mask 65.
  • the squeegee 66 is moved along the upper surface of the printing mask 65 by a squeegee moving device (not shown).
  • the printing mask 65 is provided with a mask opening (not shown) for collectively printing a printing pattern such as a solder pattern on the plurality of individual substrates 11 placed on the pallet 12.
  • recognition marks (not shown) for recognizing reference positions in the X, Y, and ⁇ directions are formed.
  • the board printing apparatus is provided with a camera 67 that takes an image of a part to be imaged such as a recognition mark on the pallet 12 (or the individual board 11) and a recognition mark on the pallet 12.
  • the camera 67 is moved in the X and Y directions by a camera moving device (not shown), and a prism for imaging both the pallet 12 side and the print mask 65 side on the lens side of the camera 67. 68 is installed.
  • the camera 67 is moved between the pallet 12 and the printing mask 65 with the gap between the pallet 12 and the printing mask 65 before screen printing, and the pallet 12 (or individual substrate).
  • the recognition mark of 11) and the recognition mark of the printing mask 65 are imaged in order and the respective reference positions are recognized, and then the positional displacement of the substrate positioning plate 55 in the X, Y, and ⁇ directions with respect to the printing mask 65 is corrected.
  • a solder pattern is applied to the individual substrates 11 in the plurality of positioning holes 56 of the substrate positioning plate 55 with the print mask 65 superimposed on the substrate positioning plate 55. Screen printing is performed on all the printing patterns.
  • a method for collectively printing a print pattern such as a solder pattern on a plurality of individual substrates 11 placed on the pallet 12 using the substrate printing apparatus of the present embodiment described above will be described.
  • the operation of each process described below is controlled by a control computer (control means) of the board printing apparatus.
  • the pallet 12 on which the individual substrates 11 are placed in the plurality of substrate placement spaces 17 is brought into the working position by the conveyors 13 and 14 and stopped.
  • Each suction nozzle 20 on the lifting table 21 is positioned directly below each substrate placement space 17 of the pallet 12 stopped at this working position.
  • the movable side plate 16 is moved, and the pallet 12 is sandwiched between the fixed side plate 15 and the movable side plate 16 and fixed.
  • the reason for fixing the pallet 12 is that when the individual substrate 11 is returned to the substrate placement space 17 of the pallet 12 after screen printing, which will be described later, the individual substrate 11 is properly placed in the substrate placement space 17. .
  • the lifting table 21 is raised and the individual nozzles 11 in the substrate mounting spaces 17 are moved downward through the suction nozzles 20 through the openings 18 of the substrate mounting spaces 17 of the pallet 12. From each of the suction nozzles 20 and lifted. As a result, each individual substrate 11 is raised to the height position of the substrate positioning plate 55, and each individual substrate 11 is loosely inserted into each positioning hole 56 of the substrate positioning plate 55 so that the height of the upper surface of each individual substrate 11 is increased. The substrate positioning plate 55 is stopped in a state where it matches the height of the upper surface of the substrate positioning plate 55.
  • each individual substrate 11 in each positioning hole 56 of the substrate positioning plate 55 is moved in an oblique direction by moving it in an oblique direction with respect to the hole 56 (for example, substantially diagonal direction of the positioning hole 56). Then, the two sides of each individual substrate 11 are pressed against the two sides of each positioning hole 56 to correct the X, Y, and ⁇ misalignment of each individual substrate 11, and the two sides of each individual substrate 11 are each positioned. The two sides of the hole 56 are brought into contact with each other. Thereby, each individual substrate 11 is positioned with reference to the two sides of each positioning hole 56.
  • each suction nozzle 20 is supported by the nozzle support base 31 so as to be rotatable in the ⁇ direction and displaceable in the X and Y directions.
  • the pressing force forces the individual substrates 11 in the X, Y, and ⁇ directions with respect to each positioning hole 56.
  • the amount of deviation can be automatically corrected independently for each individual substrate 11, and the two sides of each individual substrate 11 can be reliably brought into contact with the two sides of each positioning hole 56. It is possible to position all the individual substrates 11 at the same time accurately with reference to the two sides of 56.
  • the side plates 15 and 16 on both sides are raised integrally with the suction blocks 61 and 62, and the substrate positioning plate 55 is sucked and held by the suction blocks 61 and 62.
  • the print mask 65 is disposed horizontally above the substrate positioning plate 55.
  • the camera 67 is moved between the substrate positioning plate 55 and the print mask 65, and the recognition marks on the pallet 12 (or the individual substrate 11) and the recognition marks on the print mask 65 are sequentially imaged.
  • the image is processed to recognize the reference position of the substrate positioning plate 55 and the reference position of the printing mask 65, and based on the recognition result, the amount of positional deviation of the substrate positioning plate 55 in the X, Y, and ⁇ directions with respect to the printing mask 65 Is calculated.
  • the XY moving mechanism 22 is operated to adjust the position of the substrate positioning plate 55 in the X, Y, and ⁇ directions in accordance with the amount of positional deviation of the substrate positioning plate 55 in the X, Y, and ⁇ directions. The displacement of the plate 55 in the X, Y, and ⁇ directions is corrected.
  • the camera 67 is retracted to the outside of the pallet 12, and then the lifting table 21 is raised so that the substrate positioning plate 55 and the upper surface of each individual substrate 11 are in light contact with the lower surface of the printing mask 65.
  • the squeegee 66 is moved along the upper surface of the print mask 65 to collectively print the print patterns such as solder patterns on the individual substrates 11 in the plurality of positioning holes 56 of the substrate positioning plate 55. Screen print.
  • each individual substrate 11 is screen-printed in a state of being sandwiched between the substrate positioning plate 55 and the print mask 65, so that it is possible to prevent the individual substrate 11 from being displaced during screen printing, and to perform a squeegee operation.
  • the printing mask 65 on which the pressing force 66 acts can be received and supported by the substrate positioning plate 55, and the printing mask 65 can be prevented from being bent and deformed downward by the pressing force of the squeegee 66.
  • the substrate positioning plate 55 is lowered to place the substrate positioning plate 55 on the placement table 57, and the suction nozzles 20 are lowered to place the individual substrates 11 on the substrate placement spaces 17 of the pallet 12.
  • the movable side plate 16 is widened to release the pallet 12 and the conveyors 13 and 14 are operated to print the pallet 12 on the substrate. Unload from the device.
  • the position of the substrate positioning plate 55 is adjusted in the X, Y, and ⁇ directions to correct the positional displacement of the substrate positioning plate 55 in the X, Y, and ⁇ directions, and then the substrate positioning plate 55 is lowered to position the substrate.
  • the fitting hole 59 of the plate 55 is fitted to the fixing pin 58 of the mounting table 57.
  • an XY moving mechanism is provided as means for moving each individual substrate 11 in an oblique direction with respect to each positioning hole 56 when positioning the plurality of individual substrates 11 placed on the pallet 12. 22 is used, there is no need to newly provide a drive mechanism dedicated to positioning the individual substrate 11.
  • the large circuit boards 71 are put into the conveyors 13 and 14 one by one instead of the pallet 12 on which the plurality of individual boards 11 are placed, the large circuit boards 71 can be printed one by one.
  • the plurality of suction nozzles 20 are supported by the nozzle support base 31 so as to be rotatable in the ⁇ direction and displaceable in the X and Y directions, respectively, and the suction nozzles 20 are moved toward the center of the nozzle support base 31 by the magnets 43 and 44. Since it is configured to be urged, the two side portions of each individual substrate 11 are surely connected to the two side portions of each positioning hole 56 even if the deviation amounts of the individual substrate 11 in the X, Y, and ⁇ directions vary. It is possible to make contact with each other, and it is possible to accurately correct the deviation amounts of the individual substrates 11 in the X, Y, and ⁇ directions.
  • this invention is not limited to the said Example, For example, it cannot be overemphasized that various changes can be implemented within the range which does not deviate from a summary, for example, you may change the support structure of the suction nozzle 20 suitably.
  • nozzle removal auxiliary plate 55 ... substrate positioning plate, 56 ... positioning hole, 57 ... mounting table, 58 ... fixing pin, 59 ... fitting hole, 61 and 62 ... suction block (plate suction part), 65 ... printing mask, 66 ... squeegee, 67 ... camera, 68 ... Zum

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Screen Printers (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

When a pallet (12) whereon a plurality of individual substrates (11) are placed is transported into a working position by conveyors (13, 14) and the plurality of individual substrates (11) are positioned, the individual substrates (11) are raised to a height position of a substrate positioning plate (55) in a state where a plurality of suction nozzles (20) are raised and each of the individual substrates (11) is picked up by a respective suction nozzle (20) via an opening part (18) formed in each substrate placement space (17) of the pallet (12) and are stopped in a state in which each individual substrate (11) is inserted with clearance into a respective positioning hole (56) and the height of the upper surface of the individual substrates (11) matches the height of the upper surface of the substrate positioning plate (55). Thereafter, an XY movement mechanism (22) is operated and the suction nozzles (20) moved in a direction inclined to the positioning holes (56) to move the individual substrates (11) in an inclined direction within the positioning holes (56) and to position the same such that two side parts of each individual substrate (11) contact two side parts of the respective positioning hole (56).

Description

基板印刷装置Substrate printing device
 本発明は、複数の個片基板に所定のパターンを一括して印刷する基板印刷装置に関する発明である。 The present invention relates to a substrate printing apparatus that collectively prints a predetermined pattern on a plurality of individual substrates.
 この種の基板印刷装置の公知例としては、特許文献1(特開2009-135215号公報)に記載されたものがある。このものは、複数の基板載置スペースにそれぞれ個片基板を載置したパレットを作業位置に搬入するコンベアと、前記作業位置に搬入された前記パレットの各基板載置スペースの下方にそれぞれ配置された複数の吸着ユニットと、前記作業位置に搬入されたパレットの上方に配置され、該パレットに載置した複数の個片基板を遊挿して位置決めするための複数の矩形状の位置決め穴が形成された基板位置決めプレートと、前記複数の吸着ユニットを保持する吸着ユニット保持体と、前記吸着ユニット保持体を上下方向に移動させる吸着ユニット保持体昇降機構と、前記吸着ユニット保持体を前記各個片基板のほぼ対角線方向に移動させる位置決め専用の駆動機構とを備え、各個片基板の位置決め動作時に、前記吸着ユニット保持体昇降機構を動作させて前記吸着ユニット保持体を上昇させて前記パレットの各基板載置スペースに形成された開口部を通して前記各吸着ユニットで前記各個片基板を吸着した状態で前記各個片基板を前記基板位置決めプレートの高さ位置まで上昇させて前記各個片基板を前記各位置決め穴内に遊挿して前記各個片基板の上面の高さを前記基板位置決めプレートの上面の高さに一致させた状態で停止させた後、前記位置決め専用の駆動機構を動作させて前記吸着ユニット保持体を前記各個片基板のほぼ対角線方向に移動させることで、前記各位置決め穴内の各個片基板をほぼ対角線方向に移動させて前記各位置決め穴の2辺部に前記各個片基板の2辺部を当接させて位置決めするようにしている。 A known example of this type of substrate printing apparatus is described in Patent Document 1 (Japanese Patent Laid-Open No. 2009-135215). This is arranged below a conveyor for carrying a pallet on which individual substrates are placed in a plurality of substrate placement spaces to a work position and each substrate placement space of the pallet carried to the work position. A plurality of suction units and a plurality of rectangular positioning holes which are arranged above the pallet loaded into the work position and are used to loosely insert and position the plurality of individual substrates placed on the pallet. A substrate positioning plate, a suction unit holder for holding the plurality of suction units, a suction unit holder lifting mechanism for moving the suction unit holder in the vertical direction, and the suction unit holder for each individual substrate. And a dedicated drive mechanism for positioning that moves in a substantially diagonal direction. The suction unit holder is lifted and the individual substrates are held in the state in which the individual substrates are sucked by the suction units through openings formed in the substrate mounting spaces of the pallet. The individual board is loosely inserted into the positioning holes and stopped in a state where the height of the upper surface of each individual board matches the height of the upper surface of the board positioning plate. Thereafter, the positioning drive mechanism is operated to move the suction unit holder in a substantially diagonal direction of the individual substrates, thereby moving the individual substrates in the positioning holes in a substantially diagonal direction. Positioning is performed by bringing the two sides of each individual substrate into contact with the two sides of the positioning hole.
特開2009-135215号公報JP 2009-135215 A
 しかしながら、上記特許文献1の構成では、パレットに載置した複数の個片基板を位置決めする際に各位置決め穴内の各個片基板をほぼ対角線方向に移動させる位置決め専用の駆動機構を新たに設ける必要があり、その分、コストアップする欠点があった。しかも、個片基板専用の印刷装置となるため、通常の1枚ずつの回路基板の印刷には使用できず、汎用性に劣るという欠点もあった。 However, in the configuration of Patent Document 1, it is necessary to newly provide a positioning-dedicated drive mechanism that moves each individual substrate in each positioning hole in a substantially diagonal direction when positioning a plurality of individual substrates placed on the pallet. There was a disadvantage that the cost increased accordingly. In addition, since the printing apparatus is dedicated to the individual substrate, it cannot be used for printing one circuit board at a time, and the versatility is inferior.
 そこで、本発明が解決しようとする課題は、個片基板の位置決め専用の駆動機構を新たに設ける必要がなく、しかも、複数の個片基板の一括印刷と通常の1枚ずつの回路基板の印刷の両方に対応でき、低コスト化と汎用性向上とを実現できる基板印刷装置を提供することである。 Therefore, the problem to be solved by the present invention is that there is no need to newly provide a drive mechanism dedicated to positioning of individual substrates, and moreover, batch printing of a plurality of individual substrates and normal printing of each circuit substrate. It is an object of the present invention to provide a substrate printing apparatus that can cope with both of the above, and can realize cost reduction and versatility improvement.
 上記課題を解決するために、本発明は、複数の個片基板を載置したパレットをコンベアにより印刷マスクの下方の作業位置に搬入し、前記複数の個片基板を位置決めして各個片基板に所定のパターンを一括して印刷する基板印刷装置において、前記作業位置に搬入された前記パレットの各基板載置スペースの下方にそれぞれ配置され、前記各基板載置スペースに形成された開口部を通して前記各基板載置スペースの個片基板を吸着する複数の吸着ノズルと、前記作業位置に搬入された前記パレットの上方に配置され、該パレットに載置した複数の個片基板を遊挿して位置決めするための複数の矩形状の位置決め穴が形成された基板位置決めプレートと、前記複数の吸着ノズルを一体的に昇降させる昇降機構と、前記複数の吸着ノズルを前記昇降機構と一体的にX方向及びY方向に移動させるXY移動機構と、前記昇降機構及び前記XY移動機構を制御する制御手段とを備え、前記制御手段は、前記各個片基板の位置決め動作時に、前記昇降機構を動作させて前記複数の吸着ノズルを上昇させて前記パレットの各基板載置スペースに形成された開口部を通して前記各吸着ノズルで前記各個片基板を吸着した状態で前記各個片基板を前記基板位置決めプレートの高さ位置まで上昇させて前記各個片基板を前記各位置決め穴内に遊挿して前記各個片基板の上面の高さを前記基板位置決めプレートの上面の高さに一致させた状態で停止させた後、前記XY移動機構を動作させて前記各吸着ノズルを前記各位置決め穴に対して斜め方向に移動させることで、前記各位置決め穴内の各個片基板を前記斜め方向に移動させて前記各位置決め穴の2辺部に前記各個片基板の2辺部を当接させて位置決めするように制御することを特徴とするものである。 In order to solve the above-mentioned problems, the present invention is to carry a pallet on which a plurality of individual substrates are placed to a work position below a printing mask by a conveyor, position the plurality of individual substrates, and to each individual substrate. In the substrate printing apparatus that collectively prints a predetermined pattern, the substrate is placed below each substrate placement space of the pallet carried into the work position, and the opening is formed in each substrate placement space. A plurality of suction nozzles for sucking individual substrates in each substrate mounting space and a plurality of individual substrates placed on the pallet and placed above the pallet carried to the work position are loosely inserted and positioned. A substrate positioning plate having a plurality of rectangular positioning holes, an elevating mechanism that integrally lifts and lowers the plurality of suction nozzles, and the plurality of suction nozzles An XY movement mechanism that moves in the X direction and the Y direction integrally with the lowering mechanism, and a control unit that controls the elevating mechanism and the XY movement mechanism. Operate the lifting mechanism to raise the plurality of suction nozzles so that the individual substrates are sucked by the suction nozzles through the openings formed in the substrate mounting spaces of the pallet. In a state where the individual substrate is raised to the height position of the substrate positioning plate and the individual substrates are loosely inserted into the respective positioning holes so that the height of the upper surface of each individual substrate matches the height of the upper surface of the substrate positioning plate. After stopping, each piece substrate in each positioning hole is operated by operating the XY moving mechanism to move each suction nozzle in an oblique direction with respect to each positioning hole. It is characterized in that the control to position by abutting two sides of the respective pieces substrate is moved to the two sides of each of the positioning holes in the oblique direction.
 この構成では、パレットに載置した複数の個片基板を位置決めする際に各個片基板を各位置決め穴に対して斜め方向に移動させる手段としてXY移動機構を用いるため、個片基板の位置決め専用の駆動機構を新たに設ける必要がない。しかも、複数の個片基板を載置するパレットに代えて、大型の回路基板を1枚ずつコンベアに投入すれば、通常の1枚ずつの回路基板の印刷も可能であり、複数の個片基板の一括印刷と通常の1枚ずつの回路基板の印刷の両方に対応でき、低コスト化と汎用性向上とを実現できる。 In this configuration, when positioning a plurality of individual substrates placed on the pallet, an XY moving mechanism is used as means for moving each individual substrate in an oblique direction with respect to each positioning hole. There is no need to newly provide a drive mechanism. In addition, instead of a pallet on which a plurality of individual substrates are placed, if a large circuit board is put into a conveyor one by one, a normal circuit board can be printed one by one. It is possible to cope with both batch printing and ordinary printing of circuit boards one by one, and it is possible to realize cost reduction and improved versatility.
 この場合、複数の吸着ノズルを、それぞれノズル支持ベースに回転可能且つX,Y方向に変位可能に支持させると共に、付勢手段により前記ノズル支持ベースの中心方向に付勢する構成としても良い。このようにすれば、各個片基板のX,Y,θ方向(水平回転方向)のずれ量にばらつきがあっても、各個片基板の2辺部を各位置決め穴の2辺部に確実に当接させることができて、各個片基板のX,Y,θ方向のずれ量を精度良く修正することができる。 In this case, a plurality of suction nozzles may be supported by the nozzle support base so as to be rotatable and displaceable in the X and Y directions, respectively, and may be biased by the biasing means toward the center of the nozzle support base. In this way, even if the amount of deviation in the X, Y, and θ directions (horizontal rotation direction) of each individual substrate varies, the two sides of each individual substrate are surely brought into contact with the two sides of each positioning hole. The amount of deviation of each individual substrate in the X, Y, and θ directions can be corrected with high accuracy.
 更に、本発明は、前記基板位置決めプレートをX,Y方向に動かないように拘束した状態で載置するプレート置き台と、前記基板位置決めプレートを吸着した状態で前記昇降機構によって昇降されるプレート吸着部と、前記基板位置決めプレートの上面の認識マーク又は前記個片基板の認識マークと前記印刷マスクの下面の認識マークを撮像するカメラとを備え、前記各個片基板の位置決め動作終了後に、前記カメラの撮像画像を処理して前記印刷マスクに対する前記基板位置決めプレートの位置ずれ量を計測すると共に、前記基板位置決めプレートを前記プレート吸着部で吸着して前記昇降機構により前記プレート置き台から上昇させて離脱させた状態で、前記XY移動機構により前記基板位置決めプレートの位置ずれ量を補正した後、前記各個片基板に所定のパターンを一括して印刷するようにすれば良い。このようにすれば、印刷マスクに対する基板位置決めプレートの位置ずれを補正して各個片基板に所定のパターンを精度良く印刷することができる。 Furthermore, the present invention provides a plate table for placing the substrate positioning plate in a state of being restrained so as not to move in the X and Y directions, and a plate suction that is lifted and lowered by the lifting mechanism while the substrate positioning plate is sucked. And a camera that images the recognition mark on the upper surface of the substrate positioning plate or the recognition mark on the individual substrate and the recognition mark on the lower surface of the printing mask, and after the positioning operation of each individual substrate is completed, The captured image is processed to measure the amount of displacement of the substrate positioning plate with respect to the printing mask, and the substrate positioning plate is sucked by the plate suction portion and lifted from the plate table by the lifting mechanism to be detached. In this state, after correcting the positional deviation amount of the substrate positioning plate by the XY movement mechanism, The serial respective pieces substrate may be to print at once a predetermined pattern. In this way, it is possible to accurately print a predetermined pattern on each individual substrate by correcting the displacement of the substrate positioning plate with respect to the print mask.
 この場合、XY移動機構のX軸とY軸の少なくとも一方を2軸に構成し、当該2軸を互いに逆方向に駆動することで基板位置決めプレートのθ方向のずれを補正するように構成すると良い。このようにすれば、XY移動機構は、θ回転機構としても機能し、XY移動機構によって基板位置決めプレートのX方向、Y方向のずれだけでなく、θ方向のずれも補正することができる。 In this case, it is preferable that at least one of the X axis and the Y axis of the XY moving mechanism is configured as two axes, and the two axes are driven in opposite directions to correct the deviation of the substrate positioning plate in the θ direction. . In this way, the XY movement mechanism also functions as a θ rotation mechanism, and the XY movement mechanism can correct not only the displacement of the substrate positioning plate in the X and Y directions but also the displacement in the θ direction.
図1は本発明の一実施例における基板印刷装置の平面図である。FIG. 1 is a plan view of a substrate printing apparatus according to an embodiment of the present invention. 図2は基板印刷装置の右側面図である。FIG. 2 is a right side view of the substrate printing apparatus. 図3はパレットに載置した複数の個片基板の位置決め動作を説明する図2相当図である。FIG. 3 is a view corresponding to FIG. 2 for explaining the positioning operation of a plurality of individual substrates placed on the pallet. 図4(a)、(b)は個片基板を基板位置決めプレートの位置決め穴内に遊挿して位置決めする動作を説明する平面図である。FIGS. 4A and 4B are plan views for explaining the operation of positioning the individual substrate by loosely inserting it into the positioning hole of the substrate positioning plate. 図4は個片基板を基板位置決めプレートの位置決め穴内に遊挿して位置決めする動作を説明する右側面図である。FIG. 4 is a right side view for explaining the operation for loosely positioning the individual substrate into the positioning hole of the substrate positioning plate. 図6は複数の吸着ノズルの配列を説明する斜視図である。FIG. 6 is a perspective view for explaining the arrangement of a plurality of suction nozzles. 図7は吸着ノズルの拡大斜視図である。FIG. 7 is an enlarged perspective view of the suction nozzle. 図8は基板印刷装置を用いて通常サイズの回路基板を1枚ずつ印刷する場合の平面図である。FIG. 8 is a plan view when a normal size circuit board is printed one by one using the substrate printing apparatus.
 以下、本発明を実施するための形態を具体化した一実施例を説明する。
 まず、基板印刷装置の構成を説明する。
Hereinafter, an embodiment embodying a mode for carrying out the present invention will be described.
First, the configuration of the substrate printing apparatus will be described.
 複数の個片基板11を載置したパレット12(図2参照)は、コンベア13,14により印刷マスク65(図5参照)の下方の作業位置に搬入される。コンベア13,14は、固定側サイドプレート15の上部と可動側サイドプレート16の上部に平行に設けられている。搬入するパレット12の幅寸法に応じて、可動側サイドプレート16を送りねじ機構(図示せず)等によってY方向(パレット12の搬送方向とは直角の方向)に移動させることで、固定側サイドプレート15と可動側サイドプレート16との間隔を調整して、パレット12を搬送するコンベア13,14間の幅を調整するように構成されている。 The pallet 12 (see FIG. 2) on which the plurality of individual substrates 11 are placed is carried into a work position below the printing mask 65 (see FIG. 5) by the conveyors 13 and 14. The conveyors 13 and 14 are provided in parallel to the upper part of the fixed side plate 15 and the upper part of the movable side plate 16. By moving the movable side plate 16 in the Y direction (direction perpendicular to the conveying direction of the pallet 12) by a feed screw mechanism (not shown) or the like according to the width dimension of the pallet 12 to be carried in, the fixed side By adjusting the distance between the plate 15 and the movable side plate 16, the width between the conveyors 13 and 14 that convey the pallet 12 is adjusted.
 パレット12には、複数の個片基板11を1個ずつ収納するための複数の矩形凹部形状の基板載置スペース17が所定の配列ピッチで形成され、各基板載置スペース17の内周縁と各個片基板11の外周縁との間のクリアランスは、各個片基板11の嵌合作業性と個片基板11の外形寸法の製造ばらつきを考慮して設定されている(つまり製造ばらつき範囲の中で最も大きいサイズの個片基板11を嵌合するのに必要なクリアランスが確保されている)。各基板載置スペース17の底面部には、開口部18が形成され、この開口部18を通して基板載置スペース17内の個片基板11を下方から後述する吸着ノズル20に吸着して持ち上げるようにしている。尚、パレット12は、予め基板載置スペース17のサイズが異なる複数種類のパレット12が用意され、印刷しようとする個片基板11のサイズに有ったサイズの基板載置スペース17を持つパレット12が使用される。 On the pallet 12, a plurality of rectangular recess-shaped substrate placement spaces 17 for storing a plurality of individual substrates 11 one by one are formed at a predetermined arrangement pitch. The clearance between the outer peripheral edges of the single substrates 11 is set in consideration of the fitting workability of the individual substrates 11 and the manufacturing variations of the external dimensions of the individual substrates 11 (that is, the most within the manufacturing variation range). The clearance necessary for fitting the large-sized individual substrate 11 is secured). An opening 18 is formed at the bottom of each substrate placement space 17, and the individual substrate 11 in the substrate placement space 17 is picked up by a suction nozzle 20, which will be described later, through this opening 18 and lifted. ing. The pallet 12 is prepared in advance with a plurality of types of pallets 12 having different sizes of the substrate placement space 17, and the pallet 12 having the substrate placement space 17 having a size corresponding to the size of the individual substrate 11 to be printed. Is used.
 作業位置に搬入されたパレット12の各基板載置スペース17の下方には、それぞれ空気吸引力(バキューム)で個片基板11を吸着する吸着ノズル20が配置されている。これら複数の吸着ノズル20を支持する昇降テーブル21は、昇降機構(図示せず)によって上下方向(Z方向)に移動し、且つ、XY移動機構22によってX方向(パレット12の搬送方向)とその直角方向であるY方向に移動するように構成されている。 At the bottom of each substrate placement space 17 of the pallet 12 carried into the work position, suction nozzles 20 for suctioning the individual substrates 11 with air suction force (vacuum) are arranged. The lifting table 21 that supports the plurality of suction nozzles 20 is moved in the vertical direction (Z direction) by a lifting mechanism (not shown), and is moved by the XY moving mechanism 22 in the X direction (the conveying direction of the pallet 12). It is configured to move in the Y direction, which is a perpendicular direction.
 XY移動機構22は、1つのX軸送りねじ機構23と、2つのY軸送りねじ機構24,25(図1参照)とから構成され、2つのY軸送りねじ機構24,25を互いに逆方向に駆動することで、昇降テーブル21をθ方向(水平回転方向)に回転させるθ回転機構としても機能し、昇降テーブル21のθ方向のずれを補正できるように構成されている。昇降テーブル21は、X軸送りねじ機構23とY軸送りねじ機構24,25にそれぞれ軸26,27,28(図1参照)を介してθ方向に回転可能(水平回転可能)に支持されている。 The XY moving mechanism 22 includes one X-axis feed screw mechanism 23 and two Y-axis feed screw mechanisms 24 and 25 (see FIG. 1), and the two Y-axis feed screw mechanisms 24 and 25 are reverse to each other. , It also functions as a θ rotation mechanism that rotates the lift table 21 in the θ direction (horizontal rotation direction), and is configured to correct the deviation of the lift table 21 in the θ direction. The elevating table 21 is supported by the X-axis feed screw mechanism 23 and the Y-axis feed screw mechanisms 24, 25 so as to be rotatable in the θ direction (horizontally rotatable) via shafts 26, 27, 28 (see FIG. 1), respectively. Yes.
 図6及び図7に示すように、各吸着ノズル20は、それぞれ段付き筒状のノズル支持ベース31を介して昇降テーブル21上に着脱可能に取り付けられている。本実施例では、ノズル支持ベース31は、その下端に固定したマグネット32の磁力によって、鉄板等の磁性材料で形成した昇降テーブル21の上面に吸着保持されている。昇降テーブル21上には、複数のノズル支持ベース31を位置決めするための複数の位置決め孔33が形成されたノズル位置決めプレート34が載置され、このノズル位置決めプレート34の各位置決め孔33に各ノズル支持ベース31の下端部を嵌合することで、各ノズル支持ベース31が位置決めされるようになっている。従って、予め、昇降テーブル21上に取り付ける吸着ノズル20の数や配列ピッチに応じて、位置決め孔33の数や配列ピッチの異なる複数のノズル位置決めプレート34を用意しておき、搬入するパレット12の基板載置スペース17の数や配列ピッチに対応するノズル位置決めプレート34を選択して、昇降テーブル21上に複数の吸着ノズル20を取り付けるようにすれば良い。尚、ノズル支持ベース31の外径寸法が異なる複数種類の吸着ノズル20が用意されている場合は、使用するノズル支持ベース31の外径寸法に応じた内径寸法の位置決め孔33が形成されたノズル位置決めプレート34を使用するようにすれば良い。 As shown in FIGS. 6 and 7, each suction nozzle 20 is detachably mounted on the lifting table 21 via a stepped cylindrical nozzle support base 31. In this embodiment, the nozzle support base 31 is attracted and held on the upper surface of the elevating table 21 formed of a magnetic material such as an iron plate by the magnetic force of the magnet 32 fixed to the lower end thereof. A nozzle positioning plate 34 in which a plurality of positioning holes 33 for positioning a plurality of nozzle support bases 31 is formed is placed on the elevating table 21, and each nozzle is supported in each positioning hole 33 of the nozzle positioning plate 34. The nozzle support bases 31 are positioned by fitting the lower ends of the bases 31. Accordingly, a plurality of nozzle positioning plates 34 having different numbers of positioning holes 33 and different arrangement pitches are prepared in advance according to the number and arrangement pitch of the suction nozzles 20 to be mounted on the lifting table 21, and the substrate of the pallet 12 to be carried in A plurality of suction nozzles 20 may be mounted on the lifting table 21 by selecting the nozzle positioning plates 34 corresponding to the number of placement spaces 17 and the arrangement pitch. When a plurality of types of suction nozzles 20 having different outer diameter dimensions of the nozzle support base 31 are prepared, a nozzle in which a positioning hole 33 having an inner diameter dimension corresponding to the outer diameter dimension of the nozzle support base 31 to be used is formed. A positioning plate 34 may be used.
 各吸着ノズル20は、それぞれノズル支持ベース31にθ方向(水平方向)に回転可能且つX,Y方向に変位可能に支持されている。具体的には、吸着ノズル20の下部側に形成された厚肉筒状のノズル本体20aの外周部にフランジ部35が形成され、このフランジ部35がその上下両側から複数の剛球36で挟み付けられ、該剛球36が2個のリング状の球受けプレート37,38で挟み付けられている。下側の球受けプレート38は、ノズル支持ベース31の上面部に固定され、ノズル支持ベース31の上部に取り付けられたカバー39と上側の球受けプレート37との間にリング状の弾性体40が挟み込まれて、該弾性体40の弾性力により上側の球受けプレート37が剛球36に押し付けられている。これにより、2個の球受けプレート37,38の間に支持された複数の剛球36の間に吸着ノズル20のフランジ部35が挟み込まれて支持され、吸着ノズル20に作用するθ方向の回転力やX,Y方向の外力に応じて各剛球36が転がることで、吸着ノズル20がθ方向に回転したり、X,Y方向に変位できるようになっている。球受けプレート37,38は、剛球36が転がる面の摩耗を少なくするために焼き入れ金属等の金属系すべり軸受材料で形成されている。 Each suction nozzle 20 is supported by a nozzle support base 31 so as to be rotatable in the θ direction (horizontal direction) and displaceable in the X and Y directions. Specifically, a flange portion 35 is formed on the outer peripheral portion of a thick cylindrical nozzle body 20a formed on the lower side of the suction nozzle 20, and the flange portion 35 is sandwiched by a plurality of hard balls 36 from both upper and lower sides. The rigid sphere 36 is sandwiched between two ring-shaped ball receiving plates 37 and 38. The lower ball receiving plate 38 is fixed to the upper surface portion of the nozzle support base 31, and a ring-shaped elastic body 40 is interposed between the cover 39 attached to the upper portion of the nozzle support base 31 and the upper ball receiving plate 37. The upper ball receiving plate 37 is pressed against the hard sphere 36 by the elastic force of the elastic body 40. As a result, the flange portion 35 of the suction nozzle 20 is sandwiched and supported between the plurality of rigid spheres 36 supported between the two ball receiving plates 37 and 38, and the rotational force in the θ direction acting on the suction nozzle 20 is supported. Each of the hard spheres 36 rolls according to the external force in the X and Y directions, so that the suction nozzle 20 can be rotated in the θ direction and displaced in the X and Y directions. The ball receiving plates 37 and 38 are made of a metal-based plain bearing material such as a hardened metal in order to reduce wear on the surface on which the hard ball 36 rolls.
 吸着ノズル20のノズル本体20aの下端部には、複数のマグネット43が所定ピッチ(例えば120°ピッチ)で固定され、ノズル支持ベース31の上端部には、複数のマグネット44がノズル本体20aの複数のマグネット43と対向するように固定されている。マグネット43,44は、両者間に作用する磁気吸引力により吸着ノズル20をノズル支持ベース31の中心方向に付勢する付勢手段として機能し、吸着ノズル20に外力が作用しない状態では、マグネット43,44間に作用する磁気吸引力により吸着ノズル20がノズル支持ベース31の中心位置に保持されるように構成されている。 A plurality of magnets 43 are fixed to a lower end portion of the nozzle body 20 a of the suction nozzle 20 at a predetermined pitch (for example, 120 ° pitch), and a plurality of magnets 44 are provided to the upper end portion of the nozzle support base 31. The magnet 43 is fixed so as to face the magnet 43. The magnets 43 and 44 function as a biasing unit that biases the suction nozzle 20 toward the center of the nozzle support base 31 by a magnetic attractive force acting between the magnets 43 and 44, and in a state where no external force acts on the suction nozzle 20, the magnet 43. , 44 is configured so that the suction nozzle 20 is held at the center position of the nozzle support base 31 by a magnetic attraction force acting between them.
 吸着ノズル20のノズル本体20aの内径部には、ウレタンチューブ46が下方に突出した状態で接着固定され、該ノズル本体20aから下方に突出したウレタンチューブ46には、ゴムパッキン47(シール部材)が挿通され、該ウレタンチューブ46の外周面とノズル支持ベース31の内周面との間の隙間がゴムパッキン47でシールされ、該ゴムパッキン47とマグネット32との間に負圧を導入する空間48が形成されている。 A urethane tube 46 is bonded and fixed to the inner diameter portion of the nozzle body 20a of the suction nozzle 20 in a state of protruding downward, and a rubber packing 47 (seal member) is attached to the urethane tube 46 protruding downward from the nozzle body 20a. A space 48 through which the gap between the outer peripheral surface of the urethane tube 46 and the inner peripheral surface of the nozzle support base 31 is sealed with a rubber packing 47, and a negative pressure is introduced between the rubber packing 47 and the magnet 32. Is formed.
 ノズル支持ベース31には、負圧導入ホース(図示せず)を接続する継手49が設けられ、該継手49がノズル支持ベース31内の負圧導入空間48に連通している。これにより、負圧導入ホースを通して供給される負圧が継手49からノズル支持ベース31内の負圧導入空間48に導入され、その負圧により吸着ノズル20内の空気が負圧導入空間48内に吸引されることで該吸着ノズル20の上端に負圧吸引力が発生するようになっている。負圧導入ホースは、電磁弁(図示せず)を介して負圧発生源(図示せず)に接続され、該電磁弁の切り換えにより負圧導入(吸引)と大気開放(吸引解除)との切り換えを行うようになっている。 The nozzle support base 31 is provided with a joint 49 for connecting a negative pressure introduction hose (not shown), and the joint 49 communicates with the negative pressure introduction space 48 in the nozzle support base 31. Thereby, the negative pressure supplied through the negative pressure introduction hose is introduced from the joint 49 into the negative pressure introduction space 48 in the nozzle support base 31, and the air in the suction nozzle 20 is introduced into the negative pressure introduction space 48 by the negative pressure. By sucking, a negative pressure suction force is generated at the upper end of the suction nozzle 20. The negative pressure introducing hose is connected to a negative pressure generating source (not shown) via a solenoid valve (not shown), and switching between the solenoid valves causes a negative pressure introduction (suction) and an atmosphere release (suction release). Switching is performed.
 ノズル支持ベース31の外周部の片側には、ノズル取外し補助板51がねじ52等により取り付けられ、該ノズル取外し補助板51の下端がノズル位置決めプレート34に接近した状態となっている。前述したように、昇降テーブル21上への複数の吸着ノズル20の取り付けは、マグネット32の磁力であるため、複数の吸着ノズル20は取り外し可能となっている。昇降テーブル21上から複数の吸着ノズル20を一括して取り外す場合は、昇降テーブル21上に載置したノズル位置決めプレート34を真上に持ち上げることで、ノズル位置決めプレート34がノズル取外し補助板51の下端に当接した状態となり、その状態で、ノズル位置決めプレート34を更に持ち上げると、ノズル取外し補助板51が持ち上げられることでノズル支持ベース31が徐々に傾いてマグネット32が昇降テーブル21から徐々に引き剥がされて吸着ノズル20のノズル支持ベース31が昇降テーブル21から取り外される。これにより、昇降テーブル21上から複数の吸着ノズル20を一括して取り外しやすくなる。 A nozzle removal auxiliary plate 51 is attached to one side of the outer peripheral portion of the nozzle support base 31 with a screw 52 or the like, and the lower end of the nozzle removal auxiliary plate 51 is in a state of approaching the nozzle positioning plate 34. As described above, since the attachment of the plurality of suction nozzles 20 on the lift table 21 is the magnetic force of the magnet 32, the plurality of suction nozzles 20 can be removed. When removing a plurality of suction nozzles 20 from the lifting table 21 at a time, the nozzle positioning plate 34 is lifted directly above the lifting table 21, so that the nozzle positioning plate 34 has a lower end of the nozzle removal auxiliary plate 51. In this state, when the nozzle positioning plate 34 is further lifted, the nozzle removal auxiliary plate 51 is lifted, so that the nozzle support base 31 is gradually tilted and the magnet 32 is gradually peeled off from the lifting table 21. Then, the nozzle support base 31 of the suction nozzle 20 is removed from the lifting table 21. Thereby, it becomes easy to remove the plurality of suction nozzles 20 from the lifting table 21 in a lump.
 図2及び図3に示すように、作業位置に搬入されたパレット12の上方には、基板位置決めプレート55が配置されている。この基板位置決めプレート55には、パレット12に載置した複数の個片基板11を遊挿して位置決めするための複数の矩形状の位置決め穴56が形成されている。ここで、「遊挿」とは、個片基板11を位置決め穴56に嵌め込んだ状態(挿入した状態)において、個片基板11の外周縁と位置決め穴56の内周縁との間に隙間ができることである。 As shown in FIGS. 2 and 3, a substrate positioning plate 55 is disposed above the pallet 12 carried into the work position. The substrate positioning plate 55 is formed with a plurality of rectangular positioning holes 56 for loosely inserting and positioning the plurality of individual substrates 11 placed on the pallet 12. Here, “free insertion” means that a gap is formed between the outer peripheral edge of the individual substrate 11 and the inner peripheral edge of the positioning hole 56 in a state in which the individual substrate 11 is fitted into the positioning hole 56 (inserted state). It can be done.
 この基板位置決めプレート55は、作業位置の4つのコーナ部に設置された載置台57上に載置され、各載置台57の上面に上向きに固定した固定ピン58に、基板位置決めプレート55の4つのコーナ部に形成した嵌合孔59を差し込むことで、基板位置決めプレート55がX,Y,θ方向に動かないように拘束した状態で載置台57上に載置されるようになっている。尚、各載置台57の上面に、固定ピン58に代えて、吸着穴又はマグネットを設けて、負圧吸引力又は磁力で基板位置決めプレート55を吸着固定するようにしても良い。 The substrate positioning plate 55 is mounted on the mounting table 57 installed at the four corners of the work position, and fixed to the upper surface of each mounting table 57 with the fixing pins 58 fixed upward. By inserting the fitting hole 59 formed in the corner portion, the substrate positioning plate 55 is placed on the placement table 57 in a restrained state so as not to move in the X, Y, and θ directions. Note that, instead of the fixing pin 58, an adsorption hole or a magnet may be provided on the upper surface of each mounting table 57, and the substrate positioning plate 55 may be adsorbed and fixed by a negative pressure attractive force or a magnetic force.
 一方、固定側サイドプレート15と可動側サイドプレート16の上端面には、それぞれ基板位置決めプレート55を下面側から吸着保持するための吸着ブロック61,62(プレート吸着部)が設けられ、図5に示すように、基板位置決めプレート55を載置台57から持ち上げて該基板位置決めプレート55のX,Y,θ方向の位置ずれを補正するときに、各吸着ブロック61,62で基板位置決めプレート55を吸着保持するようになっている。各サイドプレート15,16(各吸着ブロック61,62)は、昇降テーブル21とは別々に、昇降機構(図示せず)によって上下方向(Z方向)に移動し、且つ、XY移動機構22によってX,Y,θ方向に移動するように構成されている。各サイドプレート15,16(各吸着ブロック61,62)と昇降テーブル21(吸着ノズル20)とは、両者が別々に昇降し、両者が一体的にX,Y,θ方向に移動するように構成されている。 On the other hand, suction blocks 61 and 62 (plate suction portions) for sucking and holding the substrate positioning plate 55 from the lower surface side are provided on the upper end surfaces of the fixed side plate 15 and the movable side plate 16, respectively. As shown in the drawing, when the substrate positioning plate 55 is lifted from the mounting table 57 and the positional displacement of the substrate positioning plate 55 in the X, Y, and θ directions is corrected, the substrate positioning plate 55 is sucked and held by the suction blocks 61 and 62. It is supposed to be. The side plates 15 and 16 (each suction block 61 and 62) are moved up and down (Z direction) by an elevating mechanism (not shown) separately from the elevating table 21, and X is moved by the XY moving mechanism 22. , Y, and θ directions. The side plates 15 and 16 (each suction block 61 and 62) and the lifting table 21 (suction nozzle 20) are configured so that they both move up and down separately and move together in the X, Y, and θ directions. Has been.
 図5に示すように、基板位置決めプレート55の上方には、印刷マスク65(スクリーンマスク)が水平に設置され、この印刷マスク65の上方にスキージ66が配置されている。このスキージ66は、スキージ移動装置(図示せず)によって印刷マスク65の上面に沿って移動される。 As shown in FIG. 5, a printing mask 65 (screen mask) is horizontally installed above the substrate positioning plate 55, and a squeegee 66 is arranged above the printing mask 65. The squeegee 66 is moved along the upper surface of the printing mask 65 by a squeegee moving device (not shown).
 印刷マスク65には、パレット12に載置した複数の個片基板11に半田パターン等の印刷パターンを一括してスクリーン印刷するマスク開口(図示せず)が形成され、更に、印刷マスク65の下面に、X,Y,θ方向の基準位置を認識するための認識マーク(図示せず)が形成されている。 The printing mask 65 is provided with a mask opening (not shown) for collectively printing a printing pattern such as a solder pattern on the plurality of individual substrates 11 placed on the pallet 12. In addition, recognition marks (not shown) for recognizing reference positions in the X, Y, and θ directions are formed.
 一方、パレット12(又は個片基板11)の上面に、X,Y,θ方向の基準位置を認識するための認識マーク(図示せず)が形成されている。基板印刷装置には、パレット12(又は個片基板11)の認識マークとパレット12の認識マーク等の撮像対象部位を撮像するカメラ67が設けられている。このカメラ67は、カメラ移動装置(図示せず)によってX,Y方向に移動されると共に、該カメラ67のレンズ側には、パレット12側と、印刷マスク65側の両方を撮像するためのプリズム68が装着されている。 On the other hand, recognition marks (not shown) for recognizing the reference positions in the X, Y, and θ directions are formed on the top surface of the pallet 12 (or the individual substrate 11). The board printing apparatus is provided with a camera 67 that takes an image of a part to be imaged such as a recognition mark on the pallet 12 (or the individual board 11) and a recognition mark on the pallet 12. The camera 67 is moved in the X and Y directions by a camera moving device (not shown), and a prism for imaging both the pallet 12 side and the print mask 65 side on the lens side of the camera 67. 68 is installed.
 基板印刷装置の稼働中は、スクリーン印刷前にパレット12と印刷マスク65との間隔をあけた状態で、カメラ67をパレット12と印刷マスク65との間に移動させてパレット12(又は個片基板11)の認識マークと印刷マスク65の認識マークを順番に撮像して各々の基準位置を認識した後、印刷マスク65に対する基板位置決めプレート55のX,Y,θ方向の位置ずれを補正すると共に、カメラ67をパレット12の外側へ退避させてから、該基板位置決めプレート55上に印刷マスク65を重ね合わせた状態にして該基板位置決めプレート55の複数の位置決め穴56内の個片基板11に半田パターン等の印刷パターンを一括してスクリーン印刷する。 During the operation of the substrate printing apparatus, the camera 67 is moved between the pallet 12 and the printing mask 65 with the gap between the pallet 12 and the printing mask 65 before screen printing, and the pallet 12 (or individual substrate). 11) The recognition mark of 11) and the recognition mark of the printing mask 65 are imaged in order and the respective reference positions are recognized, and then the positional displacement of the substrate positioning plate 55 in the X, Y, and θ directions with respect to the printing mask 65 is corrected. After the camera 67 is retracted to the outside of the pallet 12, a solder pattern is applied to the individual substrates 11 in the plurality of positioning holes 56 of the substrate positioning plate 55 with the print mask 65 superimposed on the substrate positioning plate 55. Screen printing is performed on all the printing patterns.
 一方、複数の個片基板11を載置するパレット12に代えて、図8に示すように、通常サイズの回路基板71を1枚ずつコンベア13,14に投入すれば、通常の1枚ずつの回路基板71の印刷も可能である。この際、昇降テーブル21上の複数の吸着ノズル20を、回路基板71を受け支えるバックアップピンとして使用して、スクリーン印刷時の回路基板71の下方への湾曲を複数の吸着ノズル20によって防止するようにしても良い。或は、昇降テーブル21から複数の吸着ノズル20を取り外して、該昇降テーブル21上に、回路基板71を受け支える複数のバックアップピンを取り付けるようにしても良い。 On the other hand, instead of the pallet 12 on which the plurality of individual substrates 11 are placed, as shown in FIG. 8, if normal size circuit boards 71 are put into the conveyors 13 and 14 one by one, normal one by one Printing of the circuit board 71 is also possible. At this time, the plurality of suction nozzles 20 on the lifting table 21 are used as backup pins for supporting the circuit board 71 so that the downward suction of the circuit board 71 during screen printing is prevented by the plurality of suction nozzles 20. Anyway. Alternatively, a plurality of suction nozzles 20 may be removed from the lifting table 21 and a plurality of backup pins that support the circuit board 71 may be attached on the lifting table 21.
 以上説明した本実施例の基板印刷装置を用いて、パレット12に載置した複数の個片基板11に半田パターン等の印刷パターンを一括してスクリーン印刷する方法を説明する。以下に説明する各工程の動作は、基板印刷装置の制御コンピュータ(制御手段)によって制御される。 A method for collectively printing a print pattern such as a solder pattern on a plurality of individual substrates 11 placed on the pallet 12 using the substrate printing apparatus of the present embodiment described above will be described. The operation of each process described below is controlled by a control computer (control means) of the board printing apparatus.
 まず、図2に示すように、複数の基板載置スペース17にそれぞれ個片基板11を載置したパレット12をコンベア13,14によって作業位置に搬入して停止させる。この作業位置で停止したパレット12の各基板載置スペース17の真下には、それぞれ昇降テーブル21上の各吸着ノズル20が位置した状態となる。 First, as shown in FIG. 2, the pallet 12 on which the individual substrates 11 are placed in the plurality of substrate placement spaces 17 is brought into the working position by the conveyors 13 and 14 and stopped. Each suction nozzle 20 on the lifting table 21 is positioned directly below each substrate placement space 17 of the pallet 12 stopped at this working position.
 この後、可動側サイドプレート16を移動させて、パレット12を固定側サイドプレート15と可動側サイドプレート16とで挟み込んで位置決め固定する。パレット12を固定する理由は、後述するスクリーン印刷後に個片基板11をパレット12の基板載置スペース17に戻すときに個片基板11が基板載置スペース17内に正しく収まるようにするためである。 Thereafter, the movable side plate 16 is moved, and the pallet 12 is sandwiched between the fixed side plate 15 and the movable side plate 16 and fixed. The reason for fixing the pallet 12 is that when the individual substrate 11 is returned to the substrate placement space 17 of the pallet 12 after screen printing, which will be described later, the individual substrate 11 is properly placed in the substrate placement space 17. .
 この後、図3に示すように、昇降テーブル21を上昇させて各吸着ノズル20をパレット12の各基板載置スペース17の開口部18を通して各基板載置スペース17内の個片基板11を下方から各吸着ノズル20で吸着して上昇させる。これにより、各個片基板11を基板位置決めプレート55の高さ位置まで上昇させて各個片基板11を該基板位置決めプレート55の各位置決め穴56内に遊挿して各個片基板11の上面の高さを基板位置決めプレート55の上面の高さに一致させた状態で停止させる。 Thereafter, as shown in FIG. 3, the lifting table 21 is raised and the individual nozzles 11 in the substrate mounting spaces 17 are moved downward through the suction nozzles 20 through the openings 18 of the substrate mounting spaces 17 of the pallet 12. From each of the suction nozzles 20 and lifted. As a result, each individual substrate 11 is raised to the height position of the substrate positioning plate 55, and each individual substrate 11 is loosely inserted into each positioning hole 56 of the substrate positioning plate 55 so that the height of the upper surface of each individual substrate 11 is increased. The substrate positioning plate 55 is stopped in a state where it matches the height of the upper surface of the substrate positioning plate 55.
 この後、基板位置決めプレート55の各位置決め穴56内の個片基板11を位置決めするために、XY移動機構22を動作させて、図4(a)に示すように、各吸着ノズル20を各位置決め穴56に対して斜め方向(例えば位置決め穴56のほぼ対角線方向)に移動させることで、各位置決め穴56内の各個片基板11を斜め方向に移動させて、図4(b)に示すように、各個片基板11の2辺部を各位置決め穴56の2辺部に押し付けて各個片基板11のX,Y,θ方向のずれを修正して、各個片基板11の2辺部を各位置決め穴56の2辺部に当接させる。これにより、各個片基板11が各位置決め穴56の2辺部を基準にして位置決めされる。 Thereafter, in order to position the individual substrate 11 in each positioning hole 56 of the substrate positioning plate 55, the XY moving mechanism 22 is operated, and each suction nozzle 20 is positioned as shown in FIG. As shown in FIG. 4B, each individual substrate 11 in each positioning hole 56 is moved in an oblique direction by moving it in an oblique direction with respect to the hole 56 (for example, substantially diagonal direction of the positioning hole 56). Then, the two sides of each individual substrate 11 are pressed against the two sides of each positioning hole 56 to correct the X, Y, and θ misalignment of each individual substrate 11, and the two sides of each individual substrate 11 are each positioned. The two sides of the hole 56 are brought into contact with each other. Thereby, each individual substrate 11 is positioned with reference to the two sides of each positioning hole 56.
 この場合、各吸着ノズル20は、それぞれノズル支持ベース31にθ方向に回転可能且つX,Y方向に変位可能に支持されているため、各個片基板11のX,Y,θ方向のずれ量にばらつきがあっても、各個片基板11の2辺部を各位置決め穴56の2辺部に押しつける際に、その押し付け力により、各位置決め穴56に対する各個片基板11のX,Y,θ方向のずれ量を各個片基板11毎に独立して自動修正することができて、各個片基板11の2辺部を各位置決め穴56の2辺部に確実に当接させることができ、各位置決め穴56の2辺部を基準にして全ての個片基板11を同時に精度良く位置決めすることができる。 In this case, each suction nozzle 20 is supported by the nozzle support base 31 so as to be rotatable in the θ direction and displaceable in the X and Y directions. Even if there is a variation, when the two sides of each individual substrate 11 are pressed against the two sides of each positioning hole 56, the pressing force forces the individual substrates 11 in the X, Y, and θ directions with respect to each positioning hole 56. The amount of deviation can be automatically corrected independently for each individual substrate 11, and the two sides of each individual substrate 11 can be reliably brought into contact with the two sides of each positioning hole 56. It is possible to position all the individual substrates 11 at the same time accurately with reference to the two sides of 56.
 この後、両側のサイドプレート15,16を吸着ブロック61,62と一体的に上昇させて該吸着ブロック61,62で基板位置決めプレート55を吸着保持し、図5に示すように、基板位置決めプレート55を載置台57から持ち上げて、該基板位置決めプレート55の嵌合孔59を載置台57の固定ピン58から上方に外した位置で該基板位置決めプレート55の上昇を停止させる。この状態では、基板位置決めプレート55の上方に印刷マスク65が水平に配置されている。 Thereafter, the side plates 15 and 16 on both sides are raised integrally with the suction blocks 61 and 62, and the substrate positioning plate 55 is sucked and held by the suction blocks 61 and 62. As shown in FIG. Is lifted from the mounting table 57, and the rising of the substrate positioning plate 55 is stopped at a position where the fitting hole 59 of the substrate positioning plate 55 is removed upward from the fixing pin 58 of the mounting table 57. In this state, the print mask 65 is disposed horizontally above the substrate positioning plate 55.
 この後、基板位置決めプレート55と印刷マスク65との間にカメラ67を移動させてパレット12(又は個片基板11)の認識マークと印刷マスク65の認識マークを順番に撮像して、それらの撮像画像を処理して基板位置決めプレート55の基準位置と印刷マスク65の基準位置を認識して、その認識結果に基づいて、印刷マスク65に対する基板位置決めプレート55のX,Y,θ方向の位置ずれ量を算出する。この後、XY移動機構22を動作させて、基板位置決めプレート55のX,Y,θ方向の位置ずれ量に応じて基板位置決めプレート55の位置をX,Y,θ方向に調整して、基板位置決めプレート55のX,Y,θ方向の位置ずれを補正する。 Thereafter, the camera 67 is moved between the substrate positioning plate 55 and the print mask 65, and the recognition marks on the pallet 12 (or the individual substrate 11) and the recognition marks on the print mask 65 are sequentially imaged. The image is processed to recognize the reference position of the substrate positioning plate 55 and the reference position of the printing mask 65, and based on the recognition result, the amount of positional deviation of the substrate positioning plate 55 in the X, Y, and θ directions with respect to the printing mask 65 Is calculated. Thereafter, the XY moving mechanism 22 is operated to adjust the position of the substrate positioning plate 55 in the X, Y, and θ directions in accordance with the amount of positional deviation of the substrate positioning plate 55 in the X, Y, and θ directions. The displacement of the plate 55 in the X, Y, and θ directions is corrected.
 その後、カメラ67をパレット12の外側へ退避させた後、昇降テーブル21を上昇させて基板位置決めプレート55と各個片基板11の上面を印刷マスク65の下面に軽く接触させた位置で該基板位置決めプレート55の上昇を停止した後、スキージ66を印刷マスク65の上面に沿って移動させて該基板位置決めプレート55の複数の位置決め穴56内の個片基板11に半田パターン等の印刷パターンを一括してスクリーン印刷する。 Thereafter, the camera 67 is retracted to the outside of the pallet 12, and then the lifting table 21 is raised so that the substrate positioning plate 55 and the upper surface of each individual substrate 11 are in light contact with the lower surface of the printing mask 65. After stopping the ascent of 55, the squeegee 66 is moved along the upper surface of the print mask 65 to collectively print the print patterns such as solder patterns on the individual substrates 11 in the plurality of positioning holes 56 of the substrate positioning plate 55. Screen print.
 この際、各個片基板11は、基板位置決めプレート55と印刷マスク65との間に挟み込まれた状態でスクリーン印刷されるため、スクリーン印刷時に各個片基板11が位置ずれすることを防止できると共に、スキージ66の押圧力が作用する印刷マスク65を基板位置決めプレート55で受け支えることができ、スキージ66の押圧力によって印刷マスク65が下方へ湾曲変形することを防止できる。 At this time, each individual substrate 11 is screen-printed in a state of being sandwiched between the substrate positioning plate 55 and the print mask 65, so that it is possible to prevent the individual substrate 11 from being displaced during screen printing, and to perform a squeegee operation. The printing mask 65 on which the pressing force 66 acts can be received and supported by the substrate positioning plate 55, and the printing mask 65 can be prevented from being bent and deformed downward by the pressing force of the squeegee 66.
 スクリーン印刷後は、基板位置決めプレート55を下降させて該基板位置決めプレート55を載置台57に載置すると共に、各吸着ノズル20を下降させて各個片基板11をパレット12の各基板載置スペース17に載置した状態に戻し、各吸着ノズル20の吸着を解除した後、可動側サイドプレート16を広げてパレット12の固定を開放して、コンベア13,14を動作させて該パレット12を基板印刷装置から搬出する。尚、基板位置決めプレート55を載置台57に載置する際に、基板位置決めプレート55の嵌合孔59が載置台57の固定ピン58から位置ずれしている場合は、XY移動機構22を動作させて基板位置決めプレート55の位置をX,Y,θ方向に調整して、基板位置決めプレート55のX,Y,θ方向の位置ずれを補正した上で、基板位置決めプレート55を下降させて該基板位置決めプレート55の嵌合孔59を載置台57の固定ピン58に嵌合する。 After the screen printing, the substrate positioning plate 55 is lowered to place the substrate positioning plate 55 on the placement table 57, and the suction nozzles 20 are lowered to place the individual substrates 11 on the substrate placement spaces 17 of the pallet 12. After the suction of each suction nozzle 20 is released, the movable side plate 16 is widened to release the pallet 12 and the conveyors 13 and 14 are operated to print the pallet 12 on the substrate. Unload from the device. When the substrate positioning plate 55 is mounted on the mounting table 57, if the fitting hole 59 of the substrate positioning plate 55 is displaced from the fixing pin 58 of the mounting table 57, the XY moving mechanism 22 is operated. Then, the position of the substrate positioning plate 55 is adjusted in the X, Y, and θ directions to correct the positional displacement of the substrate positioning plate 55 in the X, Y, and θ directions, and then the substrate positioning plate 55 is lowered to position the substrate. The fitting hole 59 of the plate 55 is fitted to the fixing pin 58 of the mounting table 57.
 以上説明した本実施例によれば、パレット12に載置した複数の個片基板11を位置決めする際に、各個片基板11を各位置決め穴56に対して斜め方向に移動させる手段としてXY移動機構22を用いるため、個片基板11の位置決め専用の駆動機構を新たに設ける必要がない。しかも、複数の個片基板11を載置するパレット12に代えて、大型の回路基板71を1枚ずつコンベア13,14に投入すれば、大型の回路基板71を1枚ずつ印刷することも可能であり、複数の個片基板11の一括印刷と通常の1枚ずつの回路基板71の印刷の両方に対応でき、低コスト化と汎用性向上とを実現できる。 According to the embodiment described above, an XY moving mechanism is provided as means for moving each individual substrate 11 in an oblique direction with respect to each positioning hole 56 when positioning the plurality of individual substrates 11 placed on the pallet 12. 22 is used, there is no need to newly provide a drive mechanism dedicated to positioning the individual substrate 11. In addition, if the large circuit boards 71 are put into the conveyors 13 and 14 one by one instead of the pallet 12 on which the plurality of individual boards 11 are placed, the large circuit boards 71 can be printed one by one. Thus, it is possible to cope with both batch printing of a plurality of individual substrates 11 and normal printing of each circuit board 71, and cost reduction and versatility can be realized.
 しかも、複数の吸着ノズル20を、それぞれノズル支持ベース31にθ方向に回転可能且つX,Y方向に変位可能に支持させると共に、マグネット43,44により吸着ノズル20をノズル支持ベース31の中心方向に付勢するように構成したので、各個片基板11のX,Y,θ方向のずれ量にばらつきがあっても、各個片基板11の2辺部を各位置決め穴56の2辺部に確実に当接させることができて、各個片基板11のX,Y,θ方向のずれ量を精度良く修正することができる。 In addition, the plurality of suction nozzles 20 are supported by the nozzle support base 31 so as to be rotatable in the θ direction and displaceable in the X and Y directions, respectively, and the suction nozzles 20 are moved toward the center of the nozzle support base 31 by the magnets 43 and 44. Since it is configured to be urged, the two side portions of each individual substrate 11 are surely connected to the two side portions of each positioning hole 56 even if the deviation amounts of the individual substrate 11 in the X, Y, and θ directions vary. It is possible to make contact with each other, and it is possible to accurately correct the deviation amounts of the individual substrates 11 in the X, Y, and θ directions.
 尚、本発明は上記実施例に限定されず、例えば、吸着ノズル20の支持構造を適宜変更しても良い等、要旨を逸脱しない範囲内で種々変更して実施できることは言うまでもない。 In addition, this invention is not limited to the said Example, For example, it cannot be overemphasized that various changes can be implemented within the range which does not deviate from a summary, for example, you may change the support structure of the suction nozzle 20 suitably.
 11…個片基板、12…パレット、13,14…コンベア、15…固定側サイドプレート、16…可動側サイドプレート、17…基板載置スペース、18…開口部、20…吸着ノズル、21…昇降テーブル、22…XY移動機構、23…X軸送りねじ機構、24,25…Y軸送りねじ機構、31…ノズル支持ベース、32…マグネット、33…位置決め孔、34…ノズル位置決めプレート、36…剛球、37,38…球受けプレート、40…弾性体、43,44…マグネット、48…負圧導入空間、51…ノズル取外し補助板、55…基板位置決めプレート、56…位置決め穴、57…載置台、58…固定ピン、59…嵌合孔、61,62…吸着ブロック(プレート吸着部)、65…印刷マスク、66…スキージ、67…カメラ、68…プリズム DESCRIPTION OF SYMBOLS 11 ... Individual board | substrate, 12 ... Pallet, 13, 14 ... Conveyor, 15 ... Fixed side plate, 16 ... Movable side plate, 17 ... Substrate mounting space, 18 ... Opening part, 20 ... Suction nozzle, 21 ... Lifting Table, 22 ... XY movement mechanism, 23 ... X-axis feed screw mechanism, 24, 25 ... Y-axis feed screw mechanism, 31 ... Nozzle support base, 32 ... Magnet, 33 ... Positioning hole, 34 ... Nozzle positioning plate, 36 ... Hard sphere , 37, 38 ... ball receiving plate, 40 ... elastic body, 43, 44 ... magnet, 48 ... negative pressure introduction space, 51 ... nozzle removal auxiliary plate, 55 ... substrate positioning plate, 56 ... positioning hole, 57 ... mounting table, 58 ... fixing pin, 59 ... fitting hole, 61 and 62 ... suction block (plate suction part), 65 ... printing mask, 66 ... squeegee, 67 ... camera, 68 ... Zum

Claims (4)

  1.  複数の個片基板を載置したパレットをコンベアにより印刷マスクの下方の作業位置に搬入し、前記複数の個片基板を位置決めして各個片基板に所定のパターンを一括して印刷する基板印刷装置において、
     前記作業位置に搬入された前記パレットの各基板載置スペースの下方にそれぞれ配置され、前記各基板載置スペースに形成された開口部を通して前記各基板載置スペースの個片基板を吸着する複数の吸着ノズルと、
     前記作業位置に搬入された前記パレットの上方に配置され、該パレットに載置した複数の個片基板を遊挿して位置決めするための複数の矩形状の位置決め穴が形成された基板位置決めプレートと、
     前記複数の吸着ノズルを一体的に昇降させる昇降機構と、
     前記複数の吸着ノズルを前記昇降機構と一体的にX方向及びY方向に移動させるXY移動機構と、
     前記昇降機構及び前記XY移動機構を制御する制御手段とを備え、
     前記制御手段は、前記各個片基板の位置決め動作時に、前記昇降機構を動作させて前記複数の吸着ノズルを上昇させて前記パレットの各基板載置スペースに形成された開口部を通して前記各吸着ノズルで前記各個片基板を吸着した状態で前記各個片基板を前記基板位置決めプレートの高さ位置まで上昇させて前記各個片基板を前記各位置決め穴内に遊挿して前記各個片基板の上面の高さを前記基板位置決めプレートの上面の高さに一致させた状態で停止させた後、前記XY移動機構を動作させて前記各吸着ノズルを前記各位置決め穴に対して斜め方向に移動させることで、前記各位置決め穴内の各個片基板を前記斜め方向に移動させて前記各位置決め穴の2辺部に前記各個片基板の2辺部を当接させて位置決めするように制御することを特徴とする基板印刷装置。
    A substrate printing apparatus for carrying a pallet on which a plurality of individual substrates are placed to a work position below a printing mask by a conveyor, positioning the plurality of individual substrates, and printing a predetermined pattern on each individual substrate in a batch. In
    A plurality of substrates that are respectively arranged below the substrate placement spaces of the pallet carried into the work position and suck the individual substrates in the substrate placement spaces through openings formed in the substrate placement spaces. A suction nozzle;
    A substrate positioning plate which is disposed above the pallet carried into the work position and in which a plurality of rectangular positioning holes for loosely positioning a plurality of individual substrates placed on the pallet are formed;
    A lifting mechanism that integrally lifts and lowers the plurality of suction nozzles;
    An XY movement mechanism for moving the plurality of suction nozzles in the X direction and the Y direction integrally with the lifting mechanism;
    Control means for controlling the lifting mechanism and the XY moving mechanism,
    In the positioning operation of each individual substrate, the control means operates the elevating mechanism to raise the plurality of suction nozzles and causes each suction nozzle to pass through an opening formed in each substrate placement space of the pallet. With the individual substrates being adsorbed, the individual substrates are raised to the height position of the substrate positioning plate, and the individual substrates are loosely inserted into the positioning holes, so that the height of the upper surface of the individual substrates is increased. After stopping in a state where it matches the height of the upper surface of the substrate positioning plate, the XY moving mechanism is operated to move the suction nozzles in the oblique direction with respect to the positioning holes, thereby positioning the positioning Control is performed such that each individual substrate in the hole is moved in the oblique direction so that the two sides of each individual substrate abut against the two sides of each positioning hole. Substrate printing apparatus that.
  2.  前記複数の吸着ノズルは、それぞれノズル支持ベースに回転可能且つX,Y方向に変位可能に支持されていると共に、付勢手段により前記ノズル支持ベースの中心方向に付勢されていることを特徴とする請求項1に記載の基板印刷装置。 The plurality of suction nozzles are respectively supported by a nozzle support base so as to be rotatable and displaceable in the X and Y directions, and are urged by a biasing means toward the center of the nozzle support base. The substrate printing apparatus according to claim 1.
  3.  前記基板位置決めプレートをX,Y方向に動かないように拘束した状態で載置するプレート置き台と、
     前記基板位置決めプレートを吸着した状態で前記昇降機構によって昇降されるプレート吸着部と、
     前記基板位置決めプレートの上面の認識マーク又は前記個片基板の認識マークと前記印刷マスクの下面の認識マークを撮像するカメラとを備え、
     前記制御手段は、前記各個片基板の位置決め動作終了後に、前記カメラの撮像画像を処理して前記印刷マスクに対する前記基板位置決めプレートの位置ずれ量を計測すると共に、前記基板位置決めプレートを前記プレート吸着部で吸着して前記昇降機構により前記プレート置き台から上昇させて離脱させた状態で、前記XY移動機構により前記基板位置決めプレートの位置ずれ量を補正した後、前記各個片基板に所定のパターンを一括して印刷することを特徴とする請求項1又は2に記載の基板印刷装置。
    A plate rest for placing the substrate positioning plate in a constrained state so as not to move in the X and Y directions;
    A plate suction portion that is lifted and lowered by the lifting mechanism in a state of sucking the substrate positioning plate;
    A camera for imaging a recognition mark on the upper surface of the substrate positioning plate or a recognition mark on the individual substrate and a recognition mark on the lower surface of the printing mask;
    After the positioning operation of each individual substrate is completed, the control means processes a captured image of the camera to measure a positional deviation amount of the substrate positioning plate with respect to the printing mask, and moves the substrate positioning plate to the plate adsorption unit. In the state of being picked up by the lift mechanism and lifted from the plate table by the lifting mechanism, the positional displacement amount of the substrate positioning plate is corrected by the XY movement mechanism, and then a predetermined pattern is collectively applied to the individual substrates. The substrate printing apparatus according to claim 1, wherein printing is performed.
  4.  前記XY移動機構は、X軸とY軸の少なくとも一方が2軸に構成され、当該2軸を互いに逆方向に駆動することで前記基板位置決めプレートの水平回転方向のずれを補正するように構成されていることを特徴とする請求項1乃至3のいずれかに記載の基板印刷装置。 The XY moving mechanism is configured such that at least one of the X axis and the Y axis is configured as two axes, and the two axes are driven in directions opposite to each other to correct a shift in the horizontal rotation direction of the substrate positioning plate. The board printing apparatus according to claim 1, wherein the board printing apparatus is provided.
PCT/JP2012/080579 2012-11-27 2012-11-27 Substrate printing device WO2014083605A1 (en)

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Cited By (12)

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