WO2014077086A1

WO2014077086A1 - Shape sensing system

Info

Publication number: WO2014077086A1
Application number: PCT/JP2013/078414
Authority: WO
Inventors: 啓晃笠井; 渡辺　正浩; 達雄針山
Original assignee: 株式会社日立製作所
Priority date: 2012-11-13
Filing date: 2013-10-21
Publication date: 2014-05-22
Also published as: JP2014115277A

Abstract

The present invention is a shape sensing system, wherein are provided a distance sensor for measuring the distance to a measurement object while rotating a measurement light, a shape sensing unit comprising a means for changing the measurement position of the distance sensor, a movement means for moving the shape sensing unit, and a position sensing means for sensing the position of the shape sensing unit.

Description

Shape measurement system

The present invention relates to a shape measurement system

In manufacturing, in addition to ensuring product quality, shape measurement is required to reduce work time during processing and assembly. 2. Description of the Related Art Conventionally, a shape measuring apparatus that irradiates a measurement object with laser light and measures the shape of the measurement object from the reflected light is known.

As background art in this technical field, there is JP-A-2005-180925 (Patent Document 1). This publication states that “in a laser measurement system for measuring the three-dimensional shape of a measurement object using laser light, a measurement means for measuring the three-dimensional shape of the measurement object, and measurement at a plurality of positions by the measurement means” A storage means for storing measurement data relating to the three-dimensional shape of the measured object, and a three-dimensional shape calculation for calculating the three-dimensional shape of the measured object by combining the measurement data at a plurality of positions stored in the storage means The three-dimensional shape calculation means calculates the three-dimensional shape of the object to be measured by combining the measurement data at a plurality of positions stored in the storage means. It is described.
Further, there is Japanese Patent No. 4486737 (Patent Document 2). In this publication, “a camera combining a fish-eye lens and a line sensor horizontally with a predetermined imaging angle, two multi-line cameras, a DGPS receiver, and a laser in a different direction. Three-dimensional graphics using camera data, laser data, INS data consisting of position and orientation, and GPS time obtained by moving the three laser scanners that receive and fire and the inertial navigation device while being fixed on the moving body A mobile mapping spatial information generating device for generating an image, the camera data having the GPS time, the means for linking the INS data having the GPS time to the camera data and laser data, and the laser data of each laser scanner Read the distance value to the measurement point indicated by each laser data, the angle of the laser direction with respect to the measurement point, Means for defining each three-dimensional geographic coordinate on the basis of NS data; means for synthesizing a unidirectional model of each laser defined by the respective three-dimensional geographic coordinate on the three-dimensional coordinate; Based on the INS data of the camera data, the model is divided into planes according to a predetermined condition, the divided area is converted into polygons, and the image data associated with each distance value and angle of the polygon is searched. And a means for allocating the processed image data to the polygon to generate the three-dimensional graphic image ”.

Moreover, there is JP 2012-27883 A (Patent Document 3). In this publication, “an inner surface shape measuring apparatus for three-dimensionally measuring the inner surface shape of a tubular body, by scanning a laser beam in a vertical direction along the inner surface of the tubular body, First ranging data detection means for outputting ranging data for each direction of the irradiated laser beam; and scanning the laser beam in a direction inclined by a predetermined angle with respect to the vertical direction along the inner surface of the tube. A second ranging data detecting means for outputting ranging data for each azimuth of the laser beam irradiated on the inner surface of the tube, the first ranging data detecting means, and the second ranging Moving means for moving the data detection means in the axial direction of the tube, and respective positions when the first distance measurement data detection means and the second distance measurement data detection means are moved by the movement means Position coordinate detecting means for detecting coordinates, and the first A tilt angle between the moving means and the axis of the tube is calculated based on the distance measurement data detected by the distance measurement data detection means and the second distance measurement data detection means, and detected by the position coordinate detection means. And a control means for generating the three-dimensional shape of the inner surface of the tubular body by correcting the position coordinates obtained based on the calculated inclination angle.

JP 2005-180925 A Japanese Patent No. 4486737 JP 2012-27883 A

In the laser measurement system of Patent Document 1, since the shape measurement data of a measurement object measured from a plurality of locations using a three-dimensional shape measurement apparatus is synthesized, setup such as three-dimensional movement and designation of a measurement region, synthesis of measurement data There is a problem that it takes time.

In Patent Document 2, the position and posture of a vehicle equipped with a plurality of cameras and a laser scanner are measured using a inertial navigation device and GPS, and the image data and the distance data of the laser scanner are combined into geographical coordinates. However, since the position and orientation are measured using an inertial navigation system and GPS, the measurement accuracy is at most cm, and in addition to ensuring product quality in manufacturing, it is possible to achieve accuracy that can be used during processing and assembly. There is a problem that can not be.

In Patent Document 3, the inclination angle between the moving means and the measurement target axis is estimated based on the distance measurement data detected by the two distance measurement data detection means, and the shape measurement result is corrected. Since the sensor is not installed and the tilt angle between the moving means and the measurement target axis is estimated based on the distance measurement data detected by the distance measurement data detection means, the measurement accuracy depends on the movement accuracy. There is a problem such as.

In view of the above problems, the present invention moves the shape measuring unit with moving means that does not need to be highly accurate, and measures the position and orientation of the shape measuring unit with high accuracy, thereby reducing the man-hours for installation and measurement. An object of the present invention is to provide a measurement shape measurement system that can measure a large shape of a measurement object with high accuracy, with a small number of methods, regardless of the accuracy of the moving means.

The present application includes a plurality of means for solving the above-described problems. For example, a distance sensor that measures the distance to the measurement object while rotating the measurement light, and a means for changing the measurement position of the distance sensor. A shape measuring system comprising: a shape measuring unit comprising: a moving unit that moves the shape measuring unit; and a position measuring unit that measures the position of the shape measuring unit.

According to the present invention, the three-dimensional shape of a large object can be measured by a fast and simple method.

In addition, by moving the shape measuring unit with moving means and measuring the position and orientation of the shape measuring unit with high accuracy, it is possible to measure the shape of a large measurement target with high accuracy by a simple method for installation and measurement. it can.

It is an example of the block diagram of the shape measurement system 100 of Example 1. FIG. It is the figure which showed a mode that it mounted in the rail vehicle 1 which is an example of the measuring object of Example 1. FIG. FIG. 3 is a cross-sectional view taken along a plane A in FIG. 2. It is an example of a block diagram of the position and orientation measurement sensor unit 300 3 is an example of a configuration diagram of a position and orientation measurement sensor unit 300. FIG. 2 is an example diagram of a configuration in which the positions of a position / orientation measurement sensor unit 300 and a position / orientation measurement laser emitting unit 400 are interchanged in the configuration example of FIG. It is an example figure of the shape measurement flowchart of the shape measurement system. It is an example figure of the block diagram of the shape measurement system 600 in Example 2. FIG. It is a figure which shows an example of a structure of the adapter 230 and the mounting part 214. FIG. It is an example figure of the structure which supports the mounting wire 210 using the relay support | pillar 223 on the way. FIG. 5 is a cross-sectional view perpendicular to the mounting wire 210. It is an example of the block diagram which can extend the range which can measure a position and attitude | position in a y-axis direction using a some laser. It is an example of the block diagram which can arrange | position the some PSD306 in steps and can expand the range which can measure a position and attitude | position in a y-axis direction. It is an example of the block diagram of the shape measurement system 700 in Example 3. FIG. It is an example of the block diagram of the shape measurement system 800 in Example 4. FIG. It is an example of the block diagram of the shape measurement system 900 in Example 4. FIG.

Hereinafter, examples will be described with reference to the drawings.

In the present embodiment, an example of a shape measurement system that measures the shape of an inner surface of a railway vehicle or the like as a measurement target will be described.
FIG. 1 is an example of a configuration diagram of a shape measuring system 100 of the present embodiment.

Briefly describing the shape measurement system 100, it measures the delay time of the reflected light while rotating the laser beam from the shape measuring unit to the measurement object, and measures the cross-sectional shape of the measurement object. Further, the distance from the measurement start position of the shape measuring unit is calculated based on the arrival time of the laser light to the reflection sensor or the measurement sensor or the detection time of the reflected light with another laser light.

</ RTI> By carrying out this over the entire area of the measurement object while moving the shape measurement unit, the three-dimensional structure of the object can be easily and quickly revealed.

A more detailed configuration will be described below.

Shape measurement comprising a distance sensor 11 for measuring a distance to a measurement object by laser light, a laser emitted light 12, a prism or reflecting plate 13 for changing an optical path of the laser emitted light 12, and a rotary stage 15 for rotating the prism 13. Part 10. The shape measuring unit 10 is held on the simple rail 200, and the shape measuring unit 10 moves on the simple rail by the wheels 201. At this time, the position from the starting point is calculated by the position / orientation measurement laser emitting unit 400, the position measurement distance sensor 402, the inclination sensor 309, the position / orientation measurement sensor unit 300, and the PC 500 that performs control / data processing.

The position / orientation measurement laser emitting unit 400, the position measurement distance sensor 402, the inclination sensor 309, and the position / orientation measurement sensor unit 300 are set to a reference point o (described in FIG. 3) of the position / orientation measurement sensor unit 300 as an origin. The position and orientation of the shape measuring unit 10 are measured and calculated. That is, the axes of the spatial coordinates x0, y0, z0 and x, y, z of the origin of the shape measuring unit 10 in the coordinate system with the reference point o (described in FIG. 3) of the position / orientation measurement sensor unit 300 as the origin are rotated. It plays the role of measuring the rotations θx, θy, θz around the axes.

301 is a detector, 17 is light emitted from the sensor, 401 is a laser output for posture control. A beam splitter 310 serves to separate the posture measurement laser output 401 into two.

The distance measuring method of the distance sensor 11 and the distance sensor 402 is not limited. For example, there are a Phase-Shift method, a TOF (Time-of-Flight) method, an FMCW (Frequency-modulated Continuous-wave) method, and the like.

The distance sensor 11 and the position measuring distance sensor 402 may be shared, and the output may be switched or the outputs may be divided.

FIG. 2 is a view showing a state of being mounted on a railway vehicle 1 which is an example of a measurement target of the present embodiment, and FIG. An example in which the shape measuring system 100 measures the shape of the inner surface of the railway vehicle 1 will be described with reference to a cross-sectional view (FIG. 3) taken along the plane A in FIG.

The PC 500 determines the irradiation position in the coordinate system of the shape measuring unit 10 based on the distance from the irradiation position of the output light 12 of the distance sensor 11 to the measurement target 1 as the measurement result of the distance sensor 11 and the rotation angle of the rotary stage 15. The spatial coordinates (x ′, y ′, z ′) are calculated.

Rotation θx, θy with the axes of the spatial coordinates x0, y0, z0 and x, y, z of the origin of the shape measuring unit 10 in the coordinate system with the reference point o of the position / orientation measurement sensor unit 300 as the origin , Θz is calculated.

For example, FIG. 4 is an example of a configuration diagram of the position and orientation measurement sensor unit 300. The beam splitter 310 serves to separate the attitude measurement laser output 401 into two. One of the separated light is received by a position detection element such as PSD (Position Sensitive Detector) 301, and the other is condensed on a position detection element such as PSD 302 by a lens 304. PSD 301 and PSD 302 play a role of calculating the coordinates of the center of the received laser. From the outputs dx and dy of the PSD 302, the rotations θx and θy with the x and y axes as the rotation axes are calculated from the following (Equation 1).

From the measurement results of the θx ′, θy ′, the inclination sensor 309, the PSD 301, and the distance sensor 402, the position and orientation of the shape measuring unit 10 with the reference point O of the position and orientation measuring sensor unit 300 as the origin, that is, the shape The rotations θx, θy, and θz with the respective axes of the spatial coordinates x0, y0, z0 and x, y, z as the rotation axes are calculated. Here, in (Equation 1), f represents the focal length of the lens 304. An imaging sensor such as a CCD may be used as the position detection element.

FIG. 5A is an example of another configuration diagram of the position / orientation measurement sensor unit 300. The PSD 301 and the PSD 303 are arranged at positions where the distance from the beam splitter 310 is different by ΔL. The beam splitter 310 serves to separate the attitude measurement laser output 401 into two. One of the separated light is received by PSD 301 and the other is received by PSD 303. With such an arrangement, it can be considered that PSD 301 and PSD 303 are virtually arranged in series as shown in FIG. As shown in FIG. 5B, since there is a path difference ΔL, when the posture measurement laser output 401 is incident on the position and posture measurement sensor unit 300 at an angle inclined by θ from the vertical direction, PSD 301 and PSD 303 Therefore, when the difference in the x-axis direction is Δx and the difference in the y-axis direction is Δy, x and y of the shape measuring unit 10 and rotations θx and θy with the respective axes as rotation axes are (Equation 2).

From this and the x and y coordinates detected by the PSD 301 or the PD 303, the position and orientation of the shape measuring unit 10, that is, the spatial coordinates x0 and y0 of the origin of the shape measuring unit 10 can be obtained.

The PC 500 determines the irradiation position in the coordinate system of the shape measuring unit 10 from the spatial coordinates x0, y0, z0 and the rotations θx, θy, θz of the shape measuring unit 10 with the reference point o of the position / orientation measuring sensor unit 300 as the origin. A transformation matrix T for converting the spatial coordinates (x ′, y ′, z ′) into a coordinate system with the reference point o of the position / orientation measurement sensor unit 300 as the origin is obtained by (Equation 3).

The PC 500 uses the transformation matrix T of (Equation 3) to perform coordinate transformation according to (Equation 4) below, and in the coordinate system with the reference point o of the position and orientation measurement sensor unit 300 as the origin, the emitted light 12 of the distance sensor 11 The spatial coordinates (x, y, z) of the irradiation position are obtained.

FIG. 6 shows a configuration example in which the positions of the position / orientation measurement sensor unit 300 and the position / orientation measurement laser emitting unit 400 in the configuration example of FIG. 1 are interchanged. When the positions of the position / orientation measurement sensor unit 300 and the position / orientation measurement laser emitting unit 400 are interchanged, a change in the incident position of the posture measurement laser output 401 on the position / orientation measurement sensor unit 300 due to a change in posture of the shape measurement unit 10 occurs. Since it becomes smaller, the range in which the posture change can be measured is expanded.

The outgoing light 12 is manipulated on the cross section perpendicular to the longitudinal axis of the measuring object 1 using the prism 13 and the rotary stage 15, and the shape measuring unit 10 is moved on the simple rail 200 by the wheel 201 to move the distance sensor 11. The inner surface shape of the measuring object 1 is measured by operating the irradiation position of the outgoing light 12 and obtaining the spatial coordinates of the irradiation position of the outgoing light 12 of the measuring object 1.

An example of a shape measurement flowchart of the shape measurement system 100 is shown in FIG. The z-axis movement range and z-axis movement step number N are input (S101), moved to the initial position (S102), and measurement is started (S103). The shape measuring unit 10 records data (S104). In parallel with the data recording of the shape measuring unit 10, the position and orientation of the shape measuring unit are measured (S105), a transformation matrix T is calculated (S106), and coordinate transformation is performed using the transformation matrix T (S107). It is determined whether or not the current step number i is equal to the set step number N (S108). If not, the movement is made in the z-axis direction (S109), the measurement is started again (S103), and the current step number is returned. The measurement is repeated until i becomes equal to the set step number N, and when the current step number i becomes equal to the set step number N, shape measurement data is output (S110).

The output shape measurement data is compared with CAD data by the point cloud data processing software built in the PC500, and data processing such as extraction of dimension data from the shape measurement data is performed to correct the shape of the railway vehicle and at the time of shipment. Can be used as inspection data.

Thus, in the present invention, a large object to be measured can be measured with high accuracy regardless of the accuracy of the moving means, for example, by a method with less man-hours for installation and measurement. For example, it is possible to provide a shape measurement system that can measure the shape of a measurement object exceeding 10 m with an accuracy of, for example, 1 mm or less.

This embodiment is a modification of the first embodiment. Only differences from the first embodiment will be described.

In the present embodiment, an example of a shape measurement system that can perform shape measurement even when the installation surface is uneven will be described.

FIG. 8 is an example of a configuration diagram of the shape measurement system 600 according to the second embodiment.

The description of the components having the same functions as those already described with reference to FIGS. 1 to 6 will be omitted.

The adapter 230 serves to connect the shape measuring unit 10 and the mounting unit 214.

The mounting unit 214 plays a role of mounting the shape measuring unit 10 on the mounting wire 210 fixed to the column 213.

The motor 221 is disposed in the winding unit 220 and plays a role of moving the shape measuring unit using the moving wire 211.

FIG. 9 shows details of the configuration of the adapter 230 and the mounting unit 214. The adapter 230 rotates around the z axis and keeps the shape measuring unit horizontal against gravity, and the movable mechanism 232 includes the x axis. A stopper 233 that limits the direction of movement so as not to rotate around, a movable mechanism 231 that rotates around the x axis and keeps the shape measuring unit horizontal against gravity, and movable so that the movable mechanism 231 does not rotate around the z axis. And a stopper 234 for limiting the direction, which makes it possible to reduce the rotations θx and θz around the x and z axes. The mounting portion 214 has wheels 216 and plays a role of traveling on the mounting wire 210.

The mounting wire 210 bends in the direction of gravity, in this case the y-axis direction, due to the weight of the shape measuring unit 10, the adapter 230, and the mounting unit 214, and the weight of the mounting wire 210. The amount of deflection is most when the weight of the shape measuring unit 10, the adapter 230, and the mounting unit 214 is 3 kg, the mounting wire 210 is stainless steel with a diameter of 2 mm, the length is 25 m, and the mounting wire 210 is stretched with a tension of 200 kg. It will bend about 100 mm at the center position where it bends. However, the measurable range of the position / orientation measurement sensor unit 300 is determined by the size of the PSD 301, and the size is generally about 20 mm square, so the position can be reduced even when the deflection is reduced or there is a deflection. It is necessary to expand the measurement range of the position and orientation in the deflection direction so that the orientation can be measured.

For example, as in the configuration example of FIG. 10, the mounting wire 210 is supported in the middle, and the deflection can be reduced by using the relay post 223. FIG. 11 shows a cross-sectional view perpendicular to the mounting wire 210. The mounting portion 214 has, for example, a U shape so as not to interfere with the relay support 223.

¡When one relay post 223 is arranged in a half length portion of the mounting wire 210, the deflection is halved. If a plurality of, for example, ten relay posts 223 are used, it is possible to suppress the deflection below the size of the PSD 301 and to measure the position and orientation.

Further, for example, as shown in the configuration example of FIG. 11, by using the mounting thin metal roll 212 that is thick in the y-axis direction and thin in the x-axis direction, the deflection in the y-axis direction can be reduced, and the position and orientation can be reduced. Can be measured. Since the thin mounting thin metal roll 212 can be wound up, the mounting portion 214 can be mounted without impairing the portability.

In addition, for example, as in the configuration example of FIG. 8, the posture measuring unit 300 is mounted on a y-axis stage 320 that plays a role of moving a load in the y-axis direction, and the shape measuring unit 10 is bent by the deflection of the mounting wire 210. It can be configured to move so as to follow a change in position in the y-axis direction.

For example, as shown in FIG. 12, a plurality of

lasers

400 a, 400 b, and 400 c are arranged in the y-axis direction in the position / orientation measuring laser emitting unit 400, and any one of the lasers is always applied to the sensor of the orientation measuring unit 300. Make it irradiating. The laser 400 a is arranged in advance so as to hit the sensor of the attitude measurement unit 300 and enters the image sensor 305. Since the mounting wire 210 can recognize which laser is irradiating the image sensor 305 even when the deflection shape measuring unit 10 moves in the y-axis direction, the range in which the position and orientation can be measured is in the y-axis direction. Can be spread. In this method, since the deflection can be followed without increasing the movable part, durability is improved and handling becomes easy.

Further, for example, as shown in FIG. 13, when a plurality of lasers 400 a and lasers 400 b are arranged in the x-axis direction in the position and orientation measurement laser emitting unit 400, and a plurality of PSDs 306 are arranged in the position and orientation measurement sensor unit 300, Even if the mounting wire 210 moves the deflection shape measuring unit 10 in the y-axis direction, it is possible to recognize which laser is incident on any of the plurality of PSDs 306 and which laser is irradiated on the image sensor 305. The range in which the position and orientation can be measured can be expanded in the y-axis direction.

The winding wire 211 is wound up by the motor 221 and the shape measuring unit 10 is moved to measure the shape of the measuring object 1.

According to the present embodiment, since the shape measuring unit 10 moves without touching the installation surface, the shape can be measured even when the installation surface is uneven.

This example is a modification of Example 1 and Example 2. Only differences from the first and second embodiments will be described.

In this embodiment, an example of a shape measurement system that can perform shape measurement even when the long axis of the measurement target is inclined with respect to the ground will be described.

FIG. 14 is an example of a configuration diagram of the shape measurement system 700 in the third embodiment. The shape measurement of the escalator 2 will be described as an example.

The description of the components having the same functions as those already described with reference to FIGS. 1 to 13 will be omitted.

The escalator 2 is fixed to a pedestal 20 on which the escalator is installed.

The shape measurement system 700 includes a distance sensor 11 that measures a distance to a measurement target, a shape measurement unit 10, a mounting unit 214, a mounting wire 210 connected to the mounting unit 214, a moving wire 211, and a position. It includes an attitude measurement laser emitting unit 400, a position measurement distance sensor 402, an inclination sensor 309, a position / orientation measurement sensor unit 300, and a PC 500 that performs control / data processing.
The tilt table 330 plays a role of changing the orientation of the position / orientation measurement sensor unit 300. It is only necessary to measure the relative position and orientation of the shape measurement unit, and the tilt table 330 does not need to measure the tilt angle, and the posture measurement laser output 401 is incident on the position / orientation measurement sensor unit 300 substantially perpendicularly. The angle may be adjusted as follows.

The tilting table 410 plays a role of changing the direction of the position and orientation measurement laser emitting unit 400. It is only necessary to measure the relative position and orientation of the shape measurement unit, and the tilt table 410 does not need to measure the tilt angle, and the posture measurement laser output 401 enters the position / orientation measurement sensor unit 300 approximately perpendicularly. The angle may be adjusted as follows.

Further, the mounting position of the adapter 230 can be changed, and the shape measuring unit 10 can be made to have a uniform inclination of the mounting unit 214, and can be configured without using the tilting table 410.

The mirror 403 serves to bend the optical path in order to apply the emitted light 17 of the position measurement distance sensor 402 to the position / orientation measurement sensor unit 300.

According to the present embodiment, the shape can be measured even when the measuring object is inclined obliquely with respect to the direction of gravity, such as an escalator.

Thus, in the present invention, a large object to be measured can be measured with high accuracy regardless of the accuracy of the moving means, for example, by a method with less man-hours for installation and measurement. For example, it is possible to provide a measurement shape measurement system that can measure the shape of a measurement object exceeding 10 m with an accuracy of, for example, 1 mm or less.

This embodiment is a modification of the second embodiment. Only differences from the first embodiment, the second embodiment, and the third embodiment will be described.

In this embodiment, an example of a shape measuring system capable of measuring a shape even when a long axis to be measured is perpendicular to the ground will be described by taking shape measurement of an elevator rail as an example.

The elevator 3 includes a rail 31, a lifting unit 801, a control unit 802, and a car in the riding part.

FIG. 15 shows an example of shape measurement of the rail 31 in which a shape measurement system 800 is mounted instead of a cage.

The position / orientation measurement sensor unit 300 is attached to the top plate 803, and the position and orientation of the shape measuring unit 10 are measured.

The shape measuring unit 10 is lifted by the hanging wire 217. The shape measuring unit 10 is moved up and down by winding the hanging wire 217 with the winding unit 801 and adjusting the length.

According to the present embodiment, the shape can be measured even when the object to be measured is inclined with respect to the direction of gravity, such as the rail 31 of the elevator 3.

FIG. 16 is a configuration example of a shape measurement system 900 that performs shape measurement while moving on the guide rail 901 without using the hanging wire 217. A wheel 901 is attached to the shape measuring unit 10 and the shape is measured while moving on the rail with its own weight. Moreover, it is good also as a structure which drives the wheel 901 using drive mechanisms, such as a motor.

The measurement systems described in the above embodiments may be used alone or in combination. By combining, it can be applied to various special-shaped large objects.

The present invention has industrial applicability regarding the shape measurement system.

100 Example of Shape Measurement System 10 Shape Measurement Unit 11 Distance Sensor 12 Emission Light 13 Prism 15 Rotating Stage 200 Simple Rail 201 Wheel 210 Mounting Wire 211 Moving Wire 212 Mounting Thin Metal Roll 213 Post 220 Winding Unit 221 Motor 300 Position Attitude measurement sensor unit 301 PSD
302 PSD
303 PSD
309 Inclination sensor 400 Position and orientation measurement laser emitting unit 401 Attitude measurement laser output 402 Position measurement distance sensor 500 PC
600 Example of shape measurement system 700 Example of shape measurement system 800 Example of shape measurement system 900 Example of shape measurement system

Claims

A distance sensor that measures the distance to the measurement object while rotating the measurement light; and a shape measurement unit that includes means for changing the measurement position of the distance sensor;
Moving means for moving the shape measuring unit;
A shape measuring system comprising: a position measuring unit that measures the position of the shape measuring unit.
The shape measurement system according to claim 1, further comprising a position / orientation measurement unit that measures an attitude in addition to the position.
3. The shape measurement system according to claim 2, wherein the measurement result of the length measurement unit is corrected based on the position and orientation of the shape measurement unit calculated by the position / orientation measurement unit.
4. The shape measurement system according to claim 3, wherein the position and orientation measurement range is reduced by moving on a straight line.
The shape measuring system according to claim 2, wherein the position of the shape measuring unit is measured by a distance sensor and a position detecting element.
The shape measurement system according to claim 2, wherein the position and orientation of the shape measurement unit are calculated from the arrangement of at least two position detection elements and the detection position of each position detection element.
The shape measuring system according to claim 2, wherein the shape measuring unit is mounted on a wire and moves without touching an installation surface.
The shape measuring system according to claim 7, wherein the deflection of the wire is reduced using a relay post.
8. The shape measuring system according to claim 7, wherein the position detecting means is moved using a stage to cause the position detecting means to follow the position change of the shape measuring portion due to the deflection of the wire.
8. The shape measuring system according to claim 7, wherein a plurality of position detecting means are positioned and the position and orientation of the shape measuring unit are measured even when there is a change in position of the shape measuring unit due to wire deflection.