JP2017173258A - Distance measurement device, distance measurement method, and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a distance measurement device, a distance measurement method, and a program for tracking a measurement object after having moved and measuring the distance to the measurement object by a relatively simple configuration.SOLUTION: The distance measurement device comprises: a sensor body having a light projection for scanning a pulsed laser beam on a scan range in two dimensions and a light receiving unit for measuring the distance to a measurement object on the basis of the reflected light of the laser beam; a stage for moving the sensor body; and a controller for controlling the stage so that the scan range scanned by the laser beam from the light projection unit tracks the measurement object. The light projection unit expands an area in the scan range consisting of measurement points in a row to an enlarged area, and the controller controls the movement of the sensor body by the stage in accordance with the position of the measurement object in the enlarged area.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a distance measuring device, a distance measuring method, and a program.

  A distance measuring device called a laser radar device that measures the distance to a measurement object using laser light has been proposed. The laser radar apparatus includes a light projecting unit that irradiates a laser beam by, for example, two-dimensional scanning with a MEMS (Micro Electro Mechanical System) mirror. In addition, the laser radar device includes a light receiving unit that detects reflected light from the measurement target with a photodetector and calculates a distance to the measurement target for each scanning position.

  The light projecting unit scans a preset scanning range by two-dimensionally scanning laser light. For this reason, if the measurement object is within the scanning range, the distance to the measurement object can be calculated in the light receiving unit. However, if the measurement object moves outside the scanning range, the light receiving unit cannot detect the reflected light from the measurement object, and thus cannot calculate the distance to the measurement object.

  For example, a method of providing a camera that captures an imaging range wider than the scanning range of the laser radar device so that the measurement target can be tracked so that the distance to the measurement target can be calculated in the light receiving unit even if the measurement target moves. is there. In this case, even if the measurement object moves and moves out of the scanning range of the laser radar apparatus, the measurement object within the imaging range can be detected by the camera. Accordingly, by adjusting the irradiation direction of the laser light of the laser radar device according to the position of the measurement target detected by the camera, the distance to the measurement target can be measured following the moved measurement target. However, in this method, since the second optical system including the camera is provided in addition to the first optical system including the laser radar apparatus, the configuration of the apparatus becomes complicated. In addition, when the first and second optical systems are provided, alignment between the two optical systems is necessary. Further, the addition of the second optical system increases the cost of the apparatus.

JP 2010-54429 A Japanese Patent Laid-Open No. 5-87922 JP 2007-155541 A

  Conventionally, when measuring a distance to a measurement target by following the moved measurement target, since the two optical systems are provided, the configuration of the apparatus becomes complicated.

  Therefore, an object of one aspect is to provide a distance measuring device, a distance measuring method, and a program that can measure the distance to the measuring object by following the moved measuring object with a relatively simple configuration.

  According to one proposal, a sensor body having a light projecting unit that scans a scanning range two-dimensionally with pulsed laser light, and a light receiving unit that measures a distance to a measurement object based on reflected light of the laser light; A moving means for moving the sensor body; and a control means for controlling the moving means so that a scanning range scanned by the laser light from the light projecting unit follows the measurement object, The light projecting unit has an enlarging means for enlarging the area of the distance measuring points arranged in at least one line within the scanning range into an enlarged area, and the control means is responsive to the position of the measurement target in the enlarged area. A distance measuring device for controlling movement of the sensor body by the moving means is provided.

  According to one aspect, the distance to the measurement object can be measured by following the moved measurement object with a relatively simple configuration.

It is a figure which shows an example of the distance measuring device in one Example. It is a block diagram which shows an example of a computer. It is a flowchart explaining an example of a distance measurement process. It is a figure explaining an example of the relationship between a measuring object and a reference position. It is a figure which shows the 1st example of a cylindrical lens. It is a figure which shows the 2nd example of a cylindrical lens. It is a figure which shows the 3rd example of a cylindrical lens. It is a figure explaining the arrival position of the laser beam when a cylindrical lens is not provided. It is a figure explaining the arrival position of the laser beam in case a cylindrical lens is provided.

  In the disclosed distance measuring apparatus, distance measuring method, and program, a light projecting unit that scans a scanning range in two dimensions with pulsed laser light, and a light receiving unit that measures a distance to a measurement object based on reflected light of the laser light, A moving means for moving the sensor main body having the above is used. The control means controls the moving means so that the scanning range scanned by the laser light from the light projecting unit follows the measurement object. The light projecting unit has an enlarging means for enlarging the area of the distance measuring points arranged in at least one line within the scanning range into an enlarged area, and the control means is based on the moving means according to the position of the measurement target in the enlarged area. Controls the movement of the sensor body.

  Embodiments of the disclosed distance measuring device, distance measuring method, and program will be described below with reference to the drawings.

  FIG. 1 is a diagram illustrating an example of a distance measuring device according to an embodiment. The distance measuring device shown in FIG. 1 includes a sensor body 1 including a light projecting unit 2 and a light receiving unit 3, a computer 4, and a rotary stage 5. The sensor body 1 is housed in the housing 1A. The housing 1 </ b> A (that is, the sensor main body 1) is rotatably provided on the rotary stage 5. The rotary stage 5 is an example of a moving unit that has a motor or the like and moves the housing 1A (that is, the sensor body 1). The rotation angle of the rotary stage 5 can be controlled by the computer 4.

  The light projecting unit 2 includes, for example, a control circuit 21, a light emitting circuit 22, a laser light source 23 formed of a laser diode, and a well-known configuration including a two-dimensional MEMS (Micro Electro Mechanical System) mirror 24, and a cylindrical structure. It has a lens 25. The control circuit 21 controls the light emitting circuit 22 so that the laser light source 23 emits pulsed laser light (that is, a laser pulse) under the control of the light emitting circuit 22. In addition, the control circuit 21 controls a known driving unit (not shown) that drives the MEMS mirror 24 two-dimensionally so that the laser light emitted from the laser light source 23 is two-dimensionally scanned. That is, the laser beam is raster scanned in the row direction (or horizontal direction with respect to the ground) and the column direction (or vertical direction with respect to the ground), for example. As a result, the laser beam scans the scanning range 61 two-dimensionally through the opening 26 or the cylindrical lens 25 as indicated by the solid line in FIG. In addition, since the cylindrical lens 25 is provided, a part of the scanning range 61 scanned through the cylindrical lens 25 forms an enlarged region 62. The cylindrical lens 25 is an example of an enlarging unit that enlarges an area of at least one line of distance measuring points in the scanning range 61 (or an area of distance measuring points linearly arranged in at least one column).

  In the scanning range 61 and the enlarged region 62 shown in FIG. 1, a circle mark indicated by a satin surface corresponds to a distance measuring point. As can be seen from FIG. 1, the distance measuring point is a point on the scanning range 61 or the enlarged region 62 where the laser beam emitted from the sensor main body 1 reaches and the distance is measured. The distance measuring points in the scanning range 61 have a fixed first interval (or sampling interval). On the other hand, the distance measuring points in the enlarged region 62 have a constant second interval (or sampling interval), but the second interval is larger than the first interval of the distance measuring points in the scanning range 61. wide.

  The scanning range 61 and the enlarged region 62 have a rectangle in this example, but the shape is not particularly limited. In the example shown in FIG. 1, the enlarged region 62 is formed by one line of distance measuring points, but may be formed by two or more lines of distance measuring points. That is, the enlarged region 62 only needs to be formed by at least one row of distance measuring points. Further, in this example, the enlarged area 62 is enlarged along the row direction (that is, the horizontal direction) of the rectangular scanning range 61, but along the column direction (that is, the vertical direction) of the rectangular scanning range 61. It may be enlarged or may be enlarged along a diagonal direction (for example, a diagonal line) with respect to the matrix of the rectangular scanning range 61. Further, the enlarged region 62 may be enlarged so as not to pass through the center of the scanning range 61 as in the example shown in FIG.

  In the example shown in FIG. 1, for convenience of explanation, the distance measuring points in the scanning range 61 are 5 rows × 5 columns, but actually, for example, 320 rows × 240 columns. For this reason, even if the enlarged region 62 having distance measuring points for one row or, for example, several rows (for example, 5 rows or less) is provided as in the example shown in FIG. Is negligibly small, and its influence on the distance measurement accuracy is negligibly small.

  The laser beam reflected by the measuring object 100 is received by the light receiving unit 3 as indicated by a dotted line in FIG. The measurement object 100 is a human in this example, but is not limited to a human and may be a vehicle or the like. The light receiving unit 3 has a known configuration including, for example, a light receiving lens 31, a photodetector 32, and a distance measuring circuit 33. Laser light reflected within the scanning range 61 including the measurement object 100 is detected by the photodetector 32 via the light receiving lens 31. The detection output of the photodetector 32 is supplied to the distance measurement circuit 33. The distance measurement circuit 33 measures the round-trip time (TOF: Time Of Flight) ΔT from when the laser light is emitted until the laser light is reflected by the measurement object 100 and returns. The distance is optically measured, and distance information (or distance signal) indicating the measured distance is output. Here, when the high speed is represented by c (about 300,000 km / s), the distance to the measuring object 100 can be obtained from (c × ΔT) / 2.

  Distance information indicating the distance to each distance measuring point measured by the distance measuring circuit 33 is output from the light receiving unit 3 to the computer 4. The distance to the distance measuring point is the distance from the sensor body 1 to the distance measuring point. The computer 4 controls the rotational position of the rotary stage 5 so as to follow the measurement object 100 based on distance information indicating the distance to each distance measuring point. Thereby, when the measuring object 100 is an athlete, for example, the movement of the athlete can be followed and the athlete can be followed. Further, by following the movement of the athlete, the distance to the athlete can be measured. The computer 4 may set the light emission timing, light emission power, etc. of the laser light source 23 controlled by the control circuit 21 of the light projecting unit 2.

  The computer 4 may have the configuration shown in FIG. 2, for example. FIG. 2 is a block diagram illustrating an example of a computer. The computer 4 shown in FIG. 2 includes a processor 41, a memory 42, an input device 43, a display device 44, and an interface (or communication device) 45 that are connected to each other via a bus 40. The processor 41 can be formed by a central processing unit (CPU), for example, and executes a program stored in the memory 42 to control the entire computer 4. The memory 42 can be formed by a computer-readable storage medium such as a semiconductor storage device, a magnetic recording medium, an optical recording medium, or a magneto-optical recording medium. The memory 42 stores various programs including a distance measurement program executed by the processor 41, various data, and the like.

  The input device 43 can be formed by, for example, a keyboard operated by a user (or an operator), and is used to input commands and data to the processor 41. The display device 44 displays a message for the user, a measurement result of the distance measurement process, and the like. The interface 45 connects the computer 4 to be communicable with other computers. In this example, the computer 4 is connected to the distance measuring circuit 33 of the light receiving unit 3 via the interface 45. The computer 4 may be connected to the control circuit 21 of the light projecting unit 2 via the interface 45.

  The computer 4 is not limited to a hardware configuration in which components of the computer 4 are connected via the bus 40. As the computer 4, for example, a general-purpose computer may be used.

  Further, the input device 43 and the display device 44 of the computer 4 can be omitted. Further, in the case of a module, a semiconductor chip, or the like in which the interface 45 of the computer 4 is further omitted, the output of the sensor body 1 (that is, the output of the distance measuring circuit 33) is directly connected to the processor 41 even if connected to the bus 40. May be. For example, when the computer 4 is formed of a semiconductor chip or the like, the semiconductor chip or the like may be provided in the sensor body 1. The computer 4 forms an example of a control unit that controls the rotary stage 5 so that the scanning range 61 by the light projecting unit 2 follows the measurement target 100.

  FIG. 3 is a flowchart illustrating an example of the distance measurement process. The distance measurement process shown in FIG. 3 can be executed by, for example, the processor 41 shown in FIG.

  In FIG. 3, when the distance measurement process is started, in step S <b> 1, the processor 41 controls the MEMS mirror 24 through the control circuit 21 in the light projecting unit 2, and also through the control circuit 21 and the light emitting circuit 22. The laser light source 23 is controlled. Thus, a two-dimensional scanning process is performed in which the laser beam (that is, the laser pulse) scans the scanning range 61 as shown in FIG. 1 through the MEMS mirror 24 and the aperture 26 or the cylindrical lens 25. The laser beam reflected in the scanning range 61 including the measurement object 100 is detected by the photodetector 32 via the light receiving lens 31 in the light receiving unit 3, and the distance measurement circuit 33 reaches the distance measurement point of the measurement object 100. The distance is measured, and distance information indicating the measured distance is output.

  In step S <b> 2, the processor 41 calculates the position of the measurement object 100 from the distance information output from the distance measurement circuit 33. In step S3, the processor 41 determines whether or not the positional deviation of the measuring object 100 with respect to the scanning range 61 exceeds a threshold value. If the determination result is NO, the process returns to step S1, and the determination result is YES. If so, the process proceeds to step S4.

  FIG. 4 is a diagram illustrating an example of the relationship between the measurement target and the reference position. In this example, a reference position p0 is set in advance within the scanning range 61. The reference position p0 is, for example, the center position p3 in the scanning range 61. In this case, the positional deviation of the measuring object 100 with respect to the scanning range 61 can be obtained from the absolute value of the relative distance from the reference position p0, that is, E = | pn−p0 |. Here, n is 1 to 5 in this example. When the distance between two adjacent distance measuring points in the scanning range 61 is represented by d, for example, when the threshold value is 3d, the measurement object 100 is located at the position p1 of the distance measuring point in the enlarged area 62 and the position of the distance measuring point. When it is at p5, the determination result of step S3 is YES. Thereby, when the positional deviation exceeds the threshold value, it can be determined that at least a part of the measuring object 100 has moved outside the scanning range 61. Further, when the measurement object 100 is at the positions p2, p3, and p4 of the distance measuring points in the enlarged region 62, the determination result in step S3 is NO. When the positional deviation is equal to or smaller than the threshold value, it can be determined that the measurement object 100 is within the scanning range 61.

  In step S <b> 4, the processor 41 calculates a rotation correction angle θ of the rotary stage 5 (or the sensor body 1) for following the measurement target 100 so that the measurement target 100 falls within the scanning range 61. The rotation correction angle θ is an example of the amount of movement of the moving means for following the measurement target 100 so that the measurement target 100 falls within the scanning range 61. Specifically, based on the distance measurement point position p, a rotation correction angle θ for rotating the rotary stage 5 to follow the measurement object 100 is calculated. Note that the rotation correction angle θ may be calculated in advance for the position p of each distance measuring point. In this case, a table of the rotation correction angle θ with respect to the position p of the distance measuring point as shown in Table 1 is stored in the memory 42 or the like, and in step S4, the processor 41 determines the rotation correction angle corresponding to the position p of the distance measuring point. You may read (theta) from the table in the memory 42. FIG. In the example shown in FIG. 4, since the measuring object 100 is at the position p4 of the distance measuring point, the rotation correction angle θ = −5 ° is read from the table. In Table 1, when the rotation correction angle θ is a negative value, for example, the rotation stage 5 is rotated counterclockwise (for example, in the negative direction), and when the rotation correction angle θ is a positive value. Represents that the rotary stage 5 is rotated clockwise (for example, in the positive direction).

In step S <b> 5, the processor 41 controls the rotary stage 5 so as to move the housing 1 </ b> A (that is, the sensor main body 1) so that the measurement target 100 is within the scanning range 61. Specifically, the rotation stage 5 is controlled to rotate by the rotation correction angle θ = −5 °. As a result, the measuring object 100 is within the scanning range 61. In step S6, the processor 41 determines whether or not the two-dimensional scanning process has ended. If the determination result is NO, the process returns to step S1, and if the determination result is YES, the distance measurement process ends.

  Next, an example of a cylindrical lens will be described with reference to FIGS. FIG. 5 is a diagram illustrating a first example of a cylindrical lens. A cylindrical lens 25-1 shown in FIG. 5 is formed of a single lens member that is thinly cut in a line shape, and is bonded to, for example, a wall of the housing 1A that forms a circular opening 26. The cylindrical lens 25-1 is disposed in parallel with the row direction (or the horizontal direction with respect to the ground) of the scanning range 61 scanned by the laser light. Since the cylindrical lens 25-1 is arranged so as to pass through the center of the opening 26, the enlarged region 62 is enlarged so as to pass through the center of the scanning range 61 as shown in FIG. For this reason, it is possible to detect that the central portion of the measuring object 100 has moved outside the scanning range 61 using the enlarged region 62.

  FIG. 6 is a diagram illustrating a second example of the cylindrical lens. The cylindrical lens 25-2 is formed of a plurality (in this example, a pair) of parallel lens members that are thinly cut in a line shape, and is bonded to, for example, the wall of the housing 1A that forms the circular opening 26. Yes. The cylindrical lens 25-2 is disposed in parallel with the row direction (or the horizontal direction with respect to the ground) of the scanning range 61 scanned by the laser light. Since the cylindrical lens 25-2 is arranged so as to pass up and down avoiding the center of the opening 26, the pair of enlarged regions 62 are enlarged so as to pass up and down avoiding the center of the scanning range 61. . For this reason, it is possible to detect that the upper part and the lower part of the measuring object 100 have moved out of the scanning range 61 using the pair of enlarged regions 62. In other words, when the measurement object 100 is a human, the pair of enlarged regions 62 can be used to detect the human head and feet. In this case, each of the pair of enlarged regions 62 may have distance measuring points for one line or, for example, several lines (for example, 5 lines or less).

  FIG. 7 is a diagram illustrating a third example of the cylindrical lens. The cylindrical lens 25-3 is formed of a single lens member that is thinly cut in a line shape, and is bonded to, for example, a wall of the housing 1A that forms a circular opening 26. The cylindrical lens 25-2 is in the row direction (or horizontal direction with respect to the ground) of the scanning range 61 scanned by the laser beam, or in the column direction (or vertical direction with respect to the ground) of the scanning range 61. In contrast, it has an inclined arrangement other than parallel. Since the cylindrical lens 25-3 is arranged obliquely so as to pass through the center of the opening 26, the enlarged region 62 is enlarged obliquely so as to pass through the center of the scanning range 61. For this reason, the enlarged region 62 is used to detect that the upper part of the measurement object 100 has moved outside the scanning range 61 in one direction (for example, the left direction) along the horizontal direction, and below the measurement object 100. It can be detected that the portion has moved out of the scanning range 61 in the other direction (for example, the right direction) along the horizontal direction. The cylindrical lens 25-3 having an oblique arrangement may be arranged so as to avoid the center of the opening 26, and may be formed by a plurality of lens members.

  When the casing 1A is provided with a rotatable circular sleeve and the opening 26 is formed by the wall of the sleeve, each cylindrical lens 25, 25-1 to 25-3 can be arbitrarily set by rotating the sleeve. The rotation angle can be set. Note that the sleeve in this case is a ring member having an opening 26 and corresponds to the portion of the opening 26 in FIG.

  Next, the arrival position of the laser beam will be described with reference to FIGS. FIG. 8 is a diagram for explaining the arrival position of the laser beam when the cylindrical lens is not provided. FIG. 9 is a diagram for explaining the arrival position of the laser beam when a cylindrical lens is provided. 8 and 9, Mp indicates the position of the reflection surface of the MEMS mirror 24, and Sp1 and Sp2 indicate the position of the scanning range 61 where the distance from the position Mp is L.

As shown in FIG. 8, when the swing angle of the MEMS mirror 24 with respect to the horizontal plane parallel to the ground is θ ₁ , the optical path length k ₁ of the laser light emitted through the opening 26 without passing through the cylindrical lens 25 is The horizontal distance from Mp can be expressed as k ₁ = L / cos θ ₁ using L. In FIG. 8, d ₁ indicates the beam position (or height position) of the laser light with respect to the horizontal plane passing through the center of the opening 26 in this example at the position of the horizontal distance L from the position Mp.

On the other hand, as shown in FIG. 9, for the optical path length k ₂ of the laser light emitted through the cylindrical lens 25, the beam position of the laser light is d ₂ and the horizontal distance from the position Mp to the cylindrical lens 25 is s. Assuming that the swing angle of the laser light passing through the cylindrical lens 25 with respect to the horizontal plane is θ ₂ , the following expression (1) is established. In FIG. 9, d ₂ indicates the beam position (or height position) of the laser light with respect to the horizontal plane passing through the cylindrical lens 25 at the horizontal distance L from the position Mp.

tan θ ₂ = (d ₂ −s × tan θ ₁ ) / (L−s) (1)
Therefore, the optical path length k ₂ of the laser light emitted through the cylindrical lens 25 can be calculated from the following equation (2) using the above equation (1). As can be seen from FIGS. 8 and 9, the optical path length k ₂ of the laser beam emitted through the cylindrical lens 25, without passing through the cylindrical lens 25, the optical path length k of the laser beam emitted through the opening 26 Longer than ₁ .

k ₂ = (s / cos θ ₁ ) + {(L−s) / cos θ ₂ )} Expression (2)
In step S <b> 2 shown in FIG. 3, the processor 41 determines the position of the measurement object 100 based on the optical path length k ₁ for the distance measurement point of the laser light emitted through the opening 26 without passing through the cylindrical lens 25. By calculating, the distance to the measuring object 100 can be measured. In step S2, the processor 41 calculates the position of the multi-measurement object 100 for the distance measurement point of the laser light emitted through the cylindrical lens 25 based on the optical path length k _2. Distances up to 100 can be measured. As described above, the distance measurement point of the laser light emitted through the cylindrical lens 25 does not pass through the cylindrical lens 25 but the distance measurement point of the laser light emitted through the opening 26 is calculated. The distance to the measuring object 100 may be measured by correcting the position. When such correction is performed, the measurement accuracy of the distance to the measurement object 100 can be improved.

Incidentally, it obtained in advance of the beam position d ₂ when the swing angle theta _1, may be registered in the data table. In this case, the data table can be stored in the memory 42 shown in FIG. The optical path length k _{2 with} respect to the swing angle θ ₁ can be calculated based on the above equations (1) and (2) using the beam position d ₂ read from the data table. Furthermore, when the optical conditions of the cylindrical lens 25 are known, the relationship between the swing angle θ ₁ and the optical path length k ₂ may be calculated by optical simulation and stored in the memory 42 or the like. In this case, the optical path length k _{2 with} respect to the swing angle θ ₁ can be obtained from the relationship read from the memory 42.

  According to the above embodiment, the distance to the measurement object can be measured by following the moved measurement object with a relatively simple configuration using a single optical system. Further, since a relatively simple configuration using a single optical system is used, alignment between the two optical systems as in the case where two optical systems are provided becomes unnecessary. Furthermore, since a relatively simple configuration using a single optical system is used, an increase in the cost of the distance measuring device can be avoided.

The following additional notes are further disclosed with respect to the embodiment including the above examples.
(Appendix 1)
A sensor body having a light projecting unit that scans a scanning range in two dimensions with pulsed laser light, and a light receiving unit that measures a distance to a measurement object based on reflected light of the laser light;
Moving means for moving the sensor body;
Control means for controlling the moving means so that a scanning range scanned by the laser light from the light projecting unit follows the measurement object;
With
The light projecting unit has an enlarging means for enlarging an area of ranging points arranged in at least one line within the scanning range into an enlarged area,
The distance measuring apparatus according to claim 1, wherein the control unit controls movement of the sensor body by the moving unit according to a position of the measurement target in the enlarged region.
(Appendix 2)
The distance measuring apparatus according to claim 1, wherein the magnifying means includes a cylindrical lens formed of a single lens member provided in an opening of a housing of the sensor body.
(Appendix 3)
The distance measuring device according to claim 2, wherein the cylindrical lens is disposed so as to pass through a center of the opening, and the enlarged region passes through a center of the scanning range.
(Appendix 4)
The distance measuring apparatus according to claim 1, wherein the magnifying means includes a cylindrical lens formed of a plurality of parallel lens members provided in an opening of a housing of the sensor body.
(Appendix 5)
Any one of Supplementary notes 2 to 4, wherein the cylindrical lens has an inclined arrangement other than parallel with respect to a horizontal direction with respect to the ground or with respect to a vertical direction with respect to the ground. The distance measuring device according to item.
(Appendix 6)
A rotatable circular sleeve provided in the housing of the sensor body;
The cylindrical lens is provided on a wall of the sleeve forming the opening;
The rotation angle of the cylindrical lens can be set by rotating the sleeve.
The distance measuring device according to appendix 5.
(Appendix 7)
The control means includes
For the distance measurement point of the laser light emitted through the cylindrical lens, the position of the measurement object calculated for the distance measurement point of the laser light emitted through the opening without passing through the cylindrical lens The distance measuring device according to any one of appendices 2 to 6, wherein the distance measuring device corrects and measures the distance to the measuring object.
(Appendix 8)
Based on the position of the distance measuring point, a table of the amount of movement with respect to the position of the distance measuring point is stored in which the amount of movement of the moving means is calculated in advance for the position of each distance measuring point in order to follow the measurement object. With additional memory,
The control means reads the movement amount corresponding to the position of each ranging point from the table in the memory, and moves the movement means in the direction corresponding to the sign of the movement amount by the movement amount read out. The distance measuring device according to any one of appendices 1 to 7, wherein the distance measuring device is controlled to move.
(Appendix 9)
Moving means for moving a sensor main body having a light projecting unit that scans a scanning range two-dimensionally with pulsed laser light and a light receiving unit that measures a distance to a measurement object based on reflected light of the laser light A scanning range scanned by the laser light from the light projecting unit is controlled to follow the measurement object,
The enlargement unit of the light projecting unit enlarges the area of the distance measuring points arranged in at least one line within the scanning range into an enlarged area,
The distance measuring method, wherein the computer controls movement of the sensor body by the moving means in accordance with a position of the measurement target in the enlarged region.
(Appendix 10)
The computer is
For the ranging point of the laser beam emitted through the cylindrical lens forming the magnifying means, the position of the measurement object calculated for the ranging point of the laser beam emitted without passing through the cylindrical lens is corrected. Then, the distance measuring method according to appendix 9, wherein the distance to the measuring object is measured.
(Appendix 11)
Based on the position of the distance measuring point, a table of the amount of movement relative to the position of the distance measuring point in which the amount of movement of the moving means is calculated in advance for the position of each distance measuring point in order to follow the measurement object is stored in the memory. Has been
The computer reads the movement amount corresponding to the position of each ranging point from the table in the memory, and moves in the direction corresponding to the positive or negative value of the movement amount by the movement amount read from the moving means. The distance measuring method according to appendix 9 or 10, wherein control is performed so that
(Appendix 12)
A program for causing a computer to execute a distance measurement process,
Moving means for moving a sensor body having a light projecting unit that scans a scanning range two-dimensionally with pulsed laser light and a light receiving unit that measures a distance to a measurement object based on reflected light of the laser light; A scanning range scanned by the laser light from the light projecting unit is controlled so as to follow the measurement object,
In accordance with the position of the measurement target in the enlarged area obtained by enlarging the area of the distance measuring points arranged in at least one line in the scanning range, the enlargement means of the light projecting unit moves the sensor body by the moving means. Control,
A program for causing a computer to execute processing.
(Appendix 13)
For the ranging point of the laser beam emitted through the cylindrical lens forming the magnifying means, the position of the measurement object calculated for the ranging point of the laser beam emitted without passing through the cylindrical lens is Correct and measure the distance to the measurement object,
The program according to appendix 12, further causing the computer to execute a process.
(Appendix 14)
Based on the position of the distance measuring point, a table of the amount of movement relative to the position of the distance measuring point in which the amount of movement of the moving means is calculated in advance for the position of each distance measuring point in order to follow the measurement object is stored in the memory. Has been
The movement amount corresponding to the position of each distance measuring point is read from the table in the memory, and the movement means is controlled to move in the direction corresponding to the value of the movement amount by the read movement amount. To
14. The program according to appendix 12 or 13, further causing the computer to execute processing.

  As described above, the disclosed distance measuring device, distance measuring method, and program have been described by way of examples. However, the present invention is not limited to the above examples, and various modifications and improvements can be made within the scope of the present invention. Needless to say.

DESCRIPTION OF SYMBOLS 1 Sensor main body 1A Case 2 Light projection unit 3 Light reception unit 4 Computer 5 Rotation stage 21 Control circuit 22 Light emission circuit 23 Laser light source 24 Two-dimensional MEMS mirror 25, 25-1 to 25-3 Cylindrical lens 26 Aperture 31 Light reception lens 32 Light Detector 33 Distance measuring circuit 41 Processor 42 Memory 43 Input device 44 Display device 45 Interface 61 Scanning range 62 Enlarged region

Claims (6)

A sensor body having a light projecting unit that scans a scanning range in two dimensions with pulsed laser light, and a light receiving unit that measures a distance to a measurement object based on reflected light of the laser light;
Moving means for moving the sensor body;
Control means for controlling the moving means so that a scanning range scanned by the laser light from the light projecting unit follows the measurement object;
With
The light projecting unit has an enlarging means for enlarging an area of ranging points arranged in at least one line within the scanning range into an enlarged area,
The distance measuring apparatus according to claim 1, wherein the control unit controls movement of the sensor body by the moving unit according to a position of the measurement target in the enlarged region.   2. The distance measuring device according to claim 1, wherein the magnifying means includes a cylindrical lens formed by a single lens member provided in an opening of a housing of the sensor main body.   2. The distance measuring apparatus according to claim 1, wherein the magnifying means includes a cylindrical lens formed of a plurality of parallel lens members provided in an opening of a housing of the sensor main body. The control means includes
For the distance measurement point of the laser light emitted through the cylindrical lens, the position of the measurement object calculated for the distance measurement point of the laser light emitted through the opening without passing through the cylindrical lens The distance measuring device according to claim 2, wherein the distance measuring device corrects and measures the distance to the measuring object. Moving means for moving a sensor main body having a light projecting unit that scans a scanning range two-dimensionally with pulsed laser light and a light receiving unit that measures a distance to a measurement object based on reflected light of the laser light A scanning range scanned by the laser light from the light projecting unit is controlled to follow the measurement object,
The enlargement unit of the light projecting unit enlarges the area of the distance measuring points arranged in at least one line within the scanning range into an enlarged area,
The distance measuring method, wherein the computer controls movement of the sensor body by the moving means in accordance with a position of the measurement target in the enlarged region. A program for causing a computer to execute a distance measurement process,
Moving means for moving a sensor body having a light projecting unit that scans a scanning range two-dimensionally with pulsed laser light and a light receiving unit that measures a distance to a measurement object based on reflected light of the laser light; A scanning range scanned by the laser light from the light projecting unit is controlled so as to follow the measurement object,
In accordance with the position of the measurement target in the enlarged area obtained by enlarging the area of the distance measuring points arranged in at least one line in the scanning range, the enlargement means of the light projecting unit moves the sensor body by the moving means. Control,
A program for causing a computer to execute processing.

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